WO2022149320A1 - Détecteur d'humidité - Google Patents

Détecteur d'humidité Download PDF

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Publication number
WO2022149320A1
WO2022149320A1 PCT/JP2021/036926 JP2021036926W WO2022149320A1 WO 2022149320 A1 WO2022149320 A1 WO 2022149320A1 JP 2021036926 W JP2021036926 W JP 2021036926W WO 2022149320 A1 WO2022149320 A1 WO 2022149320A1
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WIPO (PCT)
Prior art keywords
wiring electrode
electrode
wiring
main surface
detection sensor
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PCT/JP2021/036926
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English (en)
Japanese (ja)
Inventor
雅樹 竹内
鉄三 原
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株式会社村田製作所
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Publication of WO2022149320A1 publication Critical patent/WO2022149320A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance

Definitions

  • the present invention relates to a sensor that is inserted into a detection target such as soil and detects the moisture content of the detection target.
  • the soil sensor described in Patent Document 1 includes a cylindrical support, a plurality of electrodes, and a plurality of cables.
  • Multiple electrodes are arranged on the peripheral surface of the support.
  • the plurality of cables are connected to each of the plurality of electrodes inside the support, and are drawn from the upper end of the support to the outside of the support. Multiple cables are connected to the main body that performs soil moisture measurement and the like.
  • the support When detecting soil moisture, the support is inserted into the soil. In this state, the plurality of electrodes and the portions of the plurality of electrodes drawn from the support come into direct contact with the soil.
  • an object of the present invention is to realize a moisture detection sensor that suppresses poor connection between an electrode for sensing and a measuring unit for measuring using the electrode.
  • the moisture detection sensor of the present invention includes an insulating base material, a first sensing electrode, a second sensing electrode, a first wiring electrode, and a second wiring electrode.
  • the insulating substrate has a first main surface.
  • the first sensing electrode and the second sensing electrode are arranged on the first main surface of the base material to obtain a capacitance.
  • the first wiring electrode and the second wiring electrode are arranged on the first main surface of the base material and are connected to the first sensing electrode.
  • the first wiring electrode and the second wiring electrode are arranged at positions close to the first end surface of the base material with respect to the sensing electrode arrangement region where the first sensing electrode and the second sensing electrode are arranged on the first main surface. ..
  • the second wiring electrode and the first wiring electrode are arranged in this order from the sensing electrode arrangement area side.
  • the first wiring electrode is wider and / or higher than the first main surface than the second wiring electrode.
  • the first wiring electrode is most susceptible to erosion by moisture from the side edges of the substrate.
  • the first wiring electrode since the first wiring electrode has the above-mentioned configuration, it is possible to suppress the moisture from the side of the base material from reaching the second wiring electrode and the sensing electrode, and the erosion of the second wiring electrode and the sensing electrode is suppressed. To. Therefore, even if the first wiring electrode is altered or broken, the adverse effect on moisture detection is suppressed.
  • the second wiring electrode is less susceptible to erosion than the first wiring electrode.
  • the present invention it is possible to suppress a poor connection between the electrode for sensing and the measuring unit for measuring using the electrode.
  • FIG. 1A is a first main view of the moisture detection sensor according to the first embodiment
  • FIG. 1B is a first view in which the insulating film of the moisture detection sensor according to the first embodiment is removed.
  • 1 plan view. 1 (C) and 1 (D) are cross-sectional views of the moisture detection sensor according to the first embodiment.
  • FIG. 2 is a diagram showing a measurement concept using the moisture detection sensor according to the first embodiment.
  • FIG. 3 is a cross-sectional view of the moisture detection sensor according to the second embodiment.
  • FIG. 4 is a cross-sectional view of the moisture detection sensor according to the third embodiment.
  • FIG. 5 is a first plan view from which the insulating film of the moisture detection sensor according to the fourth embodiment is removed.
  • FIG. 6 is a partially enlarged cross-sectional view of the moisture detection sensor according to the fifth embodiment.
  • FIG. 7 is a partially enlarged cross-sectional view of the moisture detection sensor according to the sixth embodiment.
  • FIG. 8 is a partially enlarged plan view of the moisture detection sensor according to the seventh embodiment.
  • FIG. 9 is a partially enlarged plan view of the moisture detection sensor according to the eighth embodiment.
  • FIG. 10 is a partially enlarged plan view of the moisture detection sensor according to the ninth embodiment.
  • 11 (A) is a plan view of the moisture detection sensor according to the tenth embodiment, and
  • FIG. 11 (B) is a partially enlarged vertical side sectional view of the moisture detection sensor according to the tenth embodiment.
  • FIG. 12 is a plan view of the moisture detection sensor according to the eleventh embodiment.
  • FIG. 13 (A) is a plan view of the first main surface side of the moisture detection sensor according to the twelfth embodiment
  • FIG. 13 (B) is the second main surface of the moisture detection sensor according to the twelfth embodiment. It is a plan view of a plane side
  • FIG. 13C is a sectional view of a moisture detection sensor according to a twelfth embodiment.
  • FIG. 1A is a first main view of the moisture detection sensor according to the first embodiment
  • FIG. 1B is a first view in which the insulating film of the moisture detection sensor according to the first embodiment is removed.
  • 1 plan view. 1 (C) and 1 (D) are cross-sectional views of the moisture detection sensor according to the first embodiment.
  • 1 (C) shows a cross section AA in FIG. 1 (A)
  • FIG. 1 (D) shows a cross section AA in FIG. 1 (B).
  • FIG. 2 is a diagram showing a measurement concept using the moisture detection sensor according to the first embodiment.
  • the moisture detection sensor 10 includes a base material 20, a sensing electrode 31, a sensing electrode 32, and a wiring electrode 411.
  • a wiring electrode 412, a wiring electrode 421, a wiring electrode 422, and an insulating film 51 are provided.
  • the sensing electrode 31 corresponds to the "first sensing electrode” of the present invention
  • the sensing electrode 32 corresponds to the "second sensing electrode” of the present invention.
  • the wiring electrode 411 corresponds to the "first wiring electrode” of the present invention
  • the wiring electrode 412 corresponds to the "second wiring electrode” of the present invention.
  • the wiring electrode 421 corresponds to the "third wiring electrode” of the present invention
  • the wiring electrode 422 corresponds to the "fourth wiring electrode” of the present invention.
  • the insulating film 51 in FIG. 1B is omitted from the viewpoint of easy viewing.
  • the base material 20 has an insulating property.
  • the base material 20 is formed of an insulating resin.
  • the base material 20 is rectangular in a plan view.
  • the base material 20 is a flat plate-like member having a first main surface 201 and a second main surface 202.
  • the base material 20 has a lower end E21, an upper end E22, a side end S21, and a side end S22. As shown in FIG. 2, the base material 20 is inserted into the soil 90 from the lower end E21 side.
  • the side end S21 and the side end S22 are directions orthogonal to the direction from the lower end E21 to the upper end E22, and are both end faces in the direction in which the first main surface 201 extends.
  • the base material 20 does not necessarily have to have a flat plate shape (flat shape), and may have a U-shaped or V-shaped curved shape when viewed from the lower end E21 to the upper end E22. good.
  • the sensing electrode 31 and the sensing electrode 32 are arranged on the first main surface 201.
  • the sensing electrode 31 and the sensing electrode 32 are arranged in the vicinity of the lower end E21 on the first main surface 201, for example, as shown in FIGS. 1 (A) and 1 (B).
  • the region where the sensing electrode 31 and the sensing electrode 32 are arranged corresponds to the “sensing electrode arrangement region” of the present invention.
  • the sensing electrode 31 and the sensing electrode 32 are substantially rectangular in a plan view.
  • the sensing electrode 31 and the sensing electrode 32 are arranged close to each other so as to obtain a predetermined capacitance according to the sensitivity of the moisture to be detected.
  • the area of the sensing electrode 31 and the sensing electrode 32 is determined according to the sensitivity of the moisture to be detected, that is, the capacitance generated between the sensing electrode 31 and the sensing electrode 32.
  • the thickness of the sensing electrode 31 and the sensing electrode 32 is preferably about the same as or less than the thickness of the wiring electrode 412 and the wiring electrode 422.
  • the wiring electrode 411 and the wiring electrode 412 are linear electrodes having a predetermined width.
  • the wiring electrode 411 and the wiring electrode 412 are arranged on the side end S21 side of the sensing electrode arrangement region on the first main surface 201.
  • the side end S21 corresponds to the "first end surface" of the present invention.
  • the wiring electrode 411 and the wiring electrode 412 are arranged on the side closer to the side end S21 with respect to the sensing electrode arrangement region on the first main surface 201.
  • One end of the wiring electrode 411 and the wiring electrode 412 in the extending direction is connected to the sensing electrode 31. More specifically, one end of the wiring electrode 411 and the wiring electrode 412 in the extending direction is connected to the end portion of the sensing electrode 31 on the side end S21 side.
  • the other end of the wiring electrode 411 and the wiring electrode 412 in the extending direction is pulled out to the upper end E22 of the base material 20.
  • the wiring electrode 411 and the wiring electrode 412 run in parallel over almost the entire length, and each has a main wire portion extending parallel to the side end S21.
  • the main wire portion of the wiring electrode 411 is arranged on the side end S21 side of the main wire portion of the wiring electrode 412. In other words, the main wire portion of the wiring electrode 412 and the main wire portion of the wiring electrode 411 are arranged in this order from the sensing electrode arrangement region toward the side end S21.
  • the wiring electrode 411 is connected to the lower end E21 side of the sensing electrode 31 with respect to the wiring electrode 412.
  • the wiring electrode 412 is arranged on the side opposite to the side end S21 with reference to the wiring electrode 411. That is, when viewed from the side end S21 side, the wiring electrode 412 is hidden behind the wiring electrode 411.
  • the wiring electrode 421 and the wiring electrode 422 are linear electrodes having a predetermined width.
  • the wiring electrode 421 and the wiring electrode 422 are arranged on the side end S22 side of the sensing electrode arrangement region on the first main surface 201.
  • the side end S22 corresponds to the "second end surface" of the present invention.
  • the wiring electrode 421 and the wiring electrode 422 are arranged on the side closer to the side end S22 with respect to the sensing electrode arrangement region on the first main surface 201.
  • One end of the wiring electrode 421 and the wiring electrode 422 in the extending direction is connected to the sensing electrode 32. More specifically, one end of the wiring electrode 421 and the wiring electrode 422 in the extending direction is connected to the end of the sensing electrode 32 on the side end S22 side.
  • the other end of the wiring electrode 421 and the wiring electrode 422 in the extending direction is pulled out to the upper end E22 of the base material 20.
  • the wiring electrode 421 and the wiring electrode 422 run in parallel over almost the entire length, and each has a main wire portion extending in parallel with the side end S22.
  • the main wire portion of the wiring electrode 421 is arranged on the side end S22 side of the main wire portion of the wiring electrode 422. In other words, the main wire portion of the wiring electrode 422 and the main wire portion of the wiring electrode 421 are arranged in this order from the sensing electrode arrangement region toward the side end S22.
  • the wiring electrode 421 is connected to the lower end E21 side of the sensing electrode 32 with respect to the wiring electrode 422.
  • the wiring electrode 422 is arranged on the side opposite to the side end S22 with reference to the wiring electrode 421. That is, when viewed from the side end S22 side, the wiring electrode 422 is hidden behind the wiring electrode 421.
  • the insulating film 51 is a film having a predetermined dielectric constant and covers the entire surface of the first main surface 201. More specifically, the insulating film 51 covers the sensing electrode 31, the sensing electrode 32, the wiring electrode 411, the wiring electrode 412, the wiring electrode 421, and the wiring electrode 422. In other words, the insulating film 51 covers the electrodes formed on the first main surface 201. Further, the insulating film 51 covers the region on the first main surface 201 where these electrodes are not formed.
  • the insulating film 51 can be omitted. Further, the insulating film 51 can be arranged, for example, in a part of the sensing electrode arrangement region or the like.
  • the moisture detection sensor 10 is used, for example, as shown in FIG.
  • the moisture detection sensor 10 is inserted into the soil 90. More specifically, the base material 20 of the moisture detection sensor 10 is inserted into the soil 90 from the lower end E21 side to a predetermined depth.
  • the sensing electrode 31 and the sensing electrode 32 can be buried in the soil 90 and form a capacitance according to the water content of the soil 90 (see the conceptual diagram of electric field coupling (line of electric force) in FIG. 2).
  • the wiring electrode 411, the wiring electrode 412, the wiring electrode 421, and the wiring electrode 422 of the moisture detection sensor 10 are connected to the measuring instrument 80.
  • the measuring instrument 80 acquires the detection signal corresponding to the capacitance from the combination of at least one of the wiring electrode 411 and the wiring electrode 412 and at least one of the wiring electrode 421 and the wiring electrode 422.
  • the measuring instrument 80 estimates and calculates the water content of the soil 90 using this detection signal.
  • the measuring instrument 80 may be provided on the base material 20 (for example, the upper end E22 side of the base material 20). Further, wireless communication may be realized by the moisture detection sensor 10 and the measuring instrument 80. In this case, the moisture detection sensor 10 transmits a detection signal to the outside by a wireless communication device, and the measuring instrument 80 receives the transmitted detection signal to estimate and calculate the moisture content of the soil 90.
  • the wiring electrode 411 is arranged between the side end S21 and the lower end E21 of the base material 20 and the wiring electrode 412. Therefore, the moisture from the side end S21 and the lower end E21 is prevented from reaching the wiring electrode 412 by the wiring electrode 411.
  • the wiring electrode 412 is suppressed from being eroded by the water from the side end S21 and the lower end E21.
  • the connection portion between the wiring electrode 412 and the sensing electrode 31 is suppressed from being eroded by the water from the side end S21 and the lower end E21.
  • the moisture detection sensor 10 can suppress a poor connection between the sensing electrode 31 and the measuring instrument 80.
  • the wiring electrode 421 is arranged between the side end S22 and the lower end E21 of the base material 20 and the wiring electrode 422. Therefore, the moisture from the side end S22 and the lower end E21 is prevented from reaching the wiring electrode 422 by the wiring electrode 421.
  • the wiring electrode 422 is suppressed from being eroded by the water from the side end S22 and the lower end E21. Similarly, it is suppressed that the connection portion between the wiring electrode 422 and the sensing electrode 32 is eroded by the water from the side end S22 and the lower end E21. As a result, the moisture detection sensor 10 can suppress a poor connection between the sensing electrode 32 and the measuring instrument 80.
  • the moisture detection sensor 10 can suppress poor connection between the sensing electrode for detecting moisture in the soil 90 and the measuring instrument that performs measurement using the electrode.
  • the moisture detection sensor 10 has the following configuration to further exert an effect.
  • the width W411 of the wiring electrode 411 is larger than the width W412 of the wiring electrode 412 (W411> W412).
  • the wiring electrode 411 is less likely to be disconnected due to erosion as compared with the wiring electrode 412. Therefore, poor connection between the sensing electrode 31 and the measuring instrument 80 can be further suppressed.
  • the width W421 of the wiring electrode 421 is larger than the width W422 of the wiring electrode 422 (W421> W422).
  • the wiring electrode 421 is less likely to be disconnected due to erosion as compared with the wiring electrode 422. Therefore, poor connection between the sensing electrode 32 and the measuring instrument 80 can be further suppressed.
  • the wiring electrode 411 and the wiring electrode 412 have substantially the same CR time constant with respect to the detection signal. This facilitates the setting of the measurement timing and the like on the measuring instrument 80, and can suppress the detection error.
  • the wiring electrode 411 has a longer routing length than the wiring electrode 412. Therefore, in order to realize this CR time constant relationship, it is preferable to adopt the relationship of W411> W412 as described above. As a result, the moisture detection sensor 10 can simultaneously suppress the detection error and the connection failure.
  • “the CR time constant with respect to the detection signal is substantially the same” means, for example, that the CR time constant of the wiring electrode 411 and the wiring electrode 412 is within a difference of 50% (hereinafter, the present specification). Same inside.).
  • the CR time constant between the wiring electrode 411 and the wiring electrode 412 is preferably within a difference of 25%, and more preferably within a difference of 10%.
  • the wiring electrode 421 and the wiring electrode 422 have substantially the same CR time constant with respect to the detection signal. This facilitates the setting of the measurement timing and the like on the measuring instrument 80, and can suppress the detection error.
  • the wiring electrode 421 has a longer routing length than the wiring electrode 422. Therefore, in order to realize this CR time constant relationship, it is preferable to adopt the relationship of W421> W422 as described above. As a result, the moisture detection sensor 10 can simultaneously suppress the detection error and the connection failure.
  • the moisture infiltration route is substantially limited to the side end S21, the side end S22, and the lower end E21 of the base material 20. Therefore, by providing the above-mentioned configuration, the wiring electrode 412 and the wiring electrode 422 are less likely to be exposed to the moisture of the soil 90.
  • the moisture detection sensor 10 can further suppress disconnection due to erosion of the wiring electrode 412, the connection portion between the wiring electrode 412 and the sensing electrode 31, the wiring electrode 422, and the connection portion between the wiring electrode 422 and the sensing electrode 32. .. Therefore, the moisture detection sensor 10 can further suppress poor connection between the sensing electrode for detecting moisture in the soil 90 and the measuring instrument that performs measurement using the electrode.
  • the width of the wiring electrode 411 is larger than the width of the wiring electrode 412 and the width of the wiring electrode 421 is larger than the width of the wiring electrode 422 is shown.
  • a predetermined effect can be obtained.
  • the width of the wiring electrode 411 and the width of the wiring electrode 412 are the same and the width of the wiring electrode 421 is larger than the width of the wiring electrode 422, a predetermined effect can be obtained.
  • FIG. 3 is a cross-sectional view of the moisture detection sensor according to the second embodiment.
  • the moisture detection sensor 10A according to the second embodiment has a wiring electrode 411A, a wiring electrode 412A, a wiring electrode 421A, and a wiring electrode 422A with respect to the moisture detection sensor 10 according to the first embodiment. Is different in shape. Other configurations of the moisture detection sensor 10A are the same as those of the moisture detection sensor 10, and the description of the same parts will be omitted.
  • the wiring electrode 411A has the same wiring as the wiring electrode 411, and the wiring electrode 412A has the same wiring as the wiring electrode 412.
  • the wiring electrode 421A has the same wiring as the wiring electrode 421, and the wiring electrode 422A has the same wiring as the wiring electrode 422.
  • the thickness D411A of the wiring electrode 411A is larger than the thickness D412A of the wiring electrode 412A.
  • the wiring electrode 411A and the wiring electrode 412A are arranged on the first main surface 201. Therefore, the upper surface of the wiring electrode 411A is higher than the upper surface of the wiring electrode 412A with respect to the first main surface 201.
  • the wiring electrode 411A is thick and wide, it is possible to suppress disconnection due to erosion of the wiring electrode 411A by water.
  • the thickness D421A of the wiring electrode 421A is larger than the thickness D422A of the wiring electrode 422A.
  • the wiring electrode 421A and the wiring electrode 422A are arranged on the first main surface 201. Therefore, the upper surface of the wiring electrode 421A is higher than the upper surface of the wiring electrode 422A with respect to the first main surface 201.
  • the wiring electrode 421A is thick and wide, it is possible to suppress disconnection due to erosion of the wiring electrode 421A by water.
  • the thicknesses of the wiring electrode 412A and the wiring electrode 422A can be adjusted, it becomes easier to make the CR time constant substantially the same as that of the wiring electrode 411A and the wiring electrode 421A.
  • the thickness of the wiring electrode 411A is larger than the thickness of the wiring electrode 412A and the thickness of the wiring electrode 421A is larger than the thickness of the wiring electrode 422A is shown.
  • a predetermined effect can be obtained.
  • the thickness of the wiring electrode 411A and the thickness of the wiring electrode 412A are the same and the thickness of the wiring electrode 421A is larger than the thickness of the wiring electrode 422A, a predetermined effect can be obtained.
  • FIG. 4 is a cross-sectional view of the moisture detection sensor according to the third embodiment.
  • the moisture detection sensor 10B according to the third embodiment has a wiring electrode 411B, a wiring electrode 412B, a wiring electrode 421B, and a wiring electrode 422B with respect to the moisture detection sensor 10A according to the second embodiment. Is different in shape. Other configurations of the moisture detection sensor 10B are the same as those of the moisture detection sensor 10A, and the description of the same parts will be omitted.
  • the wiring electrode 411B has the same wiring as the wiring electrode 411A, and the wiring electrode 412B has the same wiring as the wiring electrode 412A.
  • the width W411B of the wiring electrode 411B is substantially the same as the width W412B of the wiring electrode 412B.
  • the wiring electrode 421B has the same wiring as the wiring electrode 421A, and the wiring electrode 422B has the same wiring as the wiring electrode 422A.
  • the width W421B of the wiring electrode 421B is substantially the same as the width W422B of the wiring electrode 422B.
  • the thickness D411B of the wiring electrode 411B is larger than the thickness D412B of the wiring electrode 412B.
  • the wiring electrode 411B and the wiring electrode 412B are arranged on the first main surface 201. Therefore, the upper surface of the wiring electrode 411B is higher than the upper surface of the wiring electrode 412B with respect to the first main surface 201.
  • the wiring electrode 411B thicker, it is possible to suppress disconnection due to erosion of the wiring electrode 411B by water. Further, by not increasing the width of the wiring electrode 411B, it is easy to take a large distance between the wiring electrode 411B and the wiring electrode 412B. Therefore, undesired coupling between the wiring electrode 411B and the wiring electrode 412B can be suppressed.
  • the thickness D421B of the wiring electrode 421B is larger than the thickness D422B of the wiring electrode 422B.
  • the wiring electrode 421B and the wiring electrode 422B are arranged on the first main surface 201. Therefore, the upper surface of the wiring electrode 421B is higher than the upper surface of the wiring electrode 422B with respect to the first main surface 201.
  • the wiring electrode 421B thicker, it is possible to suppress disconnection due to erosion of the wiring electrode 421B by water. Further, by not increasing the width of the wiring electrode 421B, it is easy to increase the distance between the wiring electrode 421B and the wiring electrode 422B. Therefore, undesired coupling between the wiring electrode 421B and the wiring electrode 422B can be suppressed.
  • FIG. 5 is a first plan view from which the insulating film of the moisture detection sensor according to the fourth embodiment is removed.
  • the moisture detection sensor 10C according to the fourth embodiment is different from the moisture detection sensor 10 according to the first embodiment in the shape of the wiring electrode 421C.
  • Other configurations of the moisture detection sensor 10C are the same as those of the moisture detection sensor 10, and the description of the same parts will be omitted.
  • the moisture detection sensor 10C includes a wiring electrode 421C.
  • One end of the wiring electrode 421C in the extending direction is connected to the end of the sensing electrode 32 on the side end S21 side.
  • the wiring electrode 421C extends from this one end toward the lower end E21 along the side end S21, bends, and extends along the lower end E21. In this portion, the wiring electrode 421C is routed between the sensing electrode 32 and the lower end E21.
  • the wiring electrode 421C bends in the vicinity of the side end S22 and extends along the side end S22. In this portion, the wiring electrode 421C is routed between the sensing electrode 32 and the wiring electrode 422 and the side end S22.
  • the moisture detection sensor 10C can suppress the erosion of the wiring electrode 422 and the erosion of the sensing electrode 32.
  • FIG. 6 is a partially enlarged cross-sectional view of the moisture detection sensor according to the fifth embodiment.
  • the moisture detection sensor 10D according to the fifth embodiment is different from the moisture detection sensor 10 according to the first embodiment in the wiring electrode 411D and the wiring electrode 412D.
  • Other configurations of the moisture detection sensor 10D are the same as those of the moisture detection sensor 10, and the description of the same parts will be omitted.
  • the wiring electrode 411D has a thickness D411D.
  • the wiring electrode 412D has a thickness D412D.
  • the thickness D411D of the wiring electrode 411D and the thickness D412D of the wiring electrode 412D are substantially the same.
  • the wiring electrode 411D is arranged on the first main surface 201.
  • the wiring electrode 412D is embedded in the base material 20 at a predetermined depth.
  • the height H411D of the upper surface of the wiring electrode 411D with respect to the first main surface 201 is higher than the height H412D of the upper surface of the wiring electrode 412D with reference to the first main surface 201.
  • the moisture detection sensor 10D can exert the same action and effect as the moisture detection sensor 10A and the moisture detection sensor 10B.
  • the height of the upper surface of the sensing electrode 31 is substantially the same as the height of the upper surface of the wiring electrode 411D with reference to the first main surface 201. However, it is preferable that the height of the upper surface of the sensing electrode 31 is lower than the height H411D of the upper surface of the wiring electrode 411D with respect to the first main surface 201. Further, it is more preferable that the height of the upper surface of the sensing electrode 31 is lower than the height H412D of the upper surface of the wiring electrode 412D with respect to the first main surface 201. As a result, the erosion of the sensing electrode 31 due to water is further suppressed.
  • the thickness D411D of the wiring electrode 411D and the thickness D412D of the wiring electrode 412D are substantially the same, but may be different.
  • the height from the first main surface 201 can be made different while the thickness of the wiring electrode 411D and the wiring electrode 412D is substantially the same.
  • the conductive material attached to the substrate can be patterned by etching to collectively form the wiring electrode 411D and the wiring electrode 412D, and the moisture detection sensor 10D can be easily manufactured.
  • the configuration of the wiring electrode 421D and the wiring electrode 422D connected to the sensing electrode 32 in the moisture detection sensor 10D is the same as the configuration of the wiring electrode 411D and the wiring electrode 412D described above.
  • the wiring electrode 411D may be wider than the wiring electrode 412D, and the wiring electrode 421D may be wider than the wiring electrode 422D.
  • FIG. 7 is a partially enlarged cross-sectional view of the moisture detection sensor according to the sixth embodiment.
  • the moisture detection sensor 10E according to the sixth embodiment is different from the moisture detection sensor 10 according to the first embodiment in the base material 20E.
  • Other configurations of the moisture detection sensor 10E are the same as those of the moisture detection sensor 10, and the description of the same parts will be omitted.
  • the moisture detection sensor 10E includes a base material 20E, a wiring electrode 411E, and a wiring electrode 412E.
  • the base material 20E has a protrusion 201EP on the side end S21 side with respect to the arrangement region of the sensing electrode.
  • the protruding portion 201EP has a shape that protrudes from the first main surface 201E of the base material 20E.
  • the wiring electrode 411E is arranged on the main surface of the protruding portion 201EP (a surface parallel to the first main surface 201E).
  • the wiring electrode 412E is arranged on the first main surface 201E. Therefore, the arrangement surface of the wiring electrode 411E protrudes from the arrangement surface of the wiring electrode 412E.
  • the thickness D411E of the wiring electrode 411E and the thickness D412E of the wiring electrode 412E are the same.
  • the arrangement surface of the wiring electrode near the side end S22 is the sensing electrode. It may protrude from the arrangement surface of the close wiring electrode.
  • the height H411E of the upper surface of the wiring electrode 411E with respect to the first main surface 201E is higher than the height H412E of the upper surface of the wiring electrode 412E with reference to the first main surface 201E.
  • the moisture detection sensor 10E can exert the same action and effect as the moisture detection sensor 10D.
  • the thickness D411E of the wiring electrode 411E and the thickness D412E of the wiring electrode 412E are the same, but may be different.
  • the thickness of the wiring electrode 411E and the wiring electrode 412E is made the same as that of the first main surface.
  • the height from the surface 201E can be different.
  • the conductive material attached to the substrate can be patterned by etching to collectively form the wiring electrode 411E and the wiring electrode 412E, and the moisture detection sensor 10E can be easily manufactured.
  • the protruding portion 201EP can be realized, for example, by forming the base material 20E with a laminated body and forming the protruding portion 201EP with more layers than other portions. Further, the protruding portion 201EP can be realized by grinding the central portion of the base material of the flat plate. Further, the protruding portion 201EP can be realized by applying, joining, or the like to another insulating material in the region where the protruding portion 201EP is desired to be formed in the base material of the flat plate.
  • the moisture detection sensor 10E also has a protruding portion on the side end S22 side, the wiring electrode 421E is arranged on the protruding portion, and the wiring electrode 422E is located on the sensing electrode arrangement region side of the protruding portion. It is arranged and has the same configuration as the wiring electrode 411E and the wiring electrode 412E described above.
  • the wiring electrode 411E may be wider than the wiring electrode 412E, and the wiring electrode 421E may be wider than the wiring electrode 422E.
  • FIG. 8 is a partially enlarged plan view of the moisture detection sensor according to the seventh embodiment.
  • the moisture detection sensor 10F according to the seventh embodiment is different from the moisture detection sensor 10 according to the first embodiment in that a plurality of sets of sensing electrodes are provided.
  • Other configurations of the moisture detection sensor 10F are the same as those of the moisture detection sensor 10, and the description of the same parts will be omitted.
  • the moisture detection sensor 10F includes a sensing electrode 33, a sensing electrode 34, a wiring electrode 431, a wiring electrode 432, a wiring electrode 441, and a wiring electrode 442.
  • the sensing electrode 33, the sensing electrode 34, the wiring electrode 431, the wiring electrode 432, the wiring electrode 441, and the wiring electrode 442 are arranged on the first main surface 201.
  • the sensing electrode 33 corresponds to the "third sensing electrode” of the present invention
  • the sensing electrode 34 corresponds to the "fourth sensing electrode” of the present invention.
  • the wiring electrode 431 and the wiring electrode 432 correspond to the "fifth wiring electrode” of the present invention, more specifically, the wiring electrode 431 corresponds to the “seventh wiring electrode” of the present invention, and the wiring electrode 432 corresponds to the present invention. Corresponds to the "eighth wiring electrode” of. Further, the wiring electrode 441 and the wiring electrode 442 correspond to the "sixth wiring electrode” of the present invention, the wiring electrode 441 corresponds to the “nineth wiring electrode” of the present invention, and the wiring electrode 442 corresponds to the "tenth wiring electrode” of the present invention. Corresponds to "wiring electrode".
  • the sensing electrode 33 and the sensing electrode 34 are substantially rectangular in a plan view.
  • the sensing electrode 33 and the sensing electrode 34 are arranged on the upper end E22 (not shown) side with respect to the sensing electrode 31. That is, the sensing electrode 33, the sensing electrode 34, the sensing electrode 31, and the sensing electrode 32 are arranged in this order from the upper end side.
  • the sensing electrode 33 and the sensing electrode 34 are arranged close to each other so as to obtain a predetermined capacitance according to the sensitivity of the moisture to be detected.
  • the wiring electrode 431 and the wiring electrode 432 have the same shape as the wiring electrode 411 and the wiring electrode 412. One end of the wiring electrode 431 and the wiring electrode 432 in the extending direction is connected to the sensing electrode 33. More specifically, one end of the wiring electrode 431 and the wiring electrode 432 in the extending direction is connected to the end of the sensing electrode 33 on the side end S21 side. The other end of the wiring electrode 431 and the wiring electrode 432 in the extending direction is drawn out to the upper end E22 of the base material 20.
  • the wiring electrode 431 and the wiring electrode 432 are arranged between the wiring electrode 411 and the wiring electrode 412 and the sensing electrode 33. Then, the wiring electrode 432, the wiring electrode 431, the wiring electrode 412, and the wiring electrode 411 are arranged in this order from the sensing electrode 33 toward the side end S21.
  • the width of the wiring electrode 431 is larger than the width of the wiring electrode 432.
  • the wiring electrode 441 and the wiring electrode 442 have the same shape as the wiring electrode 421 and the wiring electrode 422.
  • One end of the wiring electrode 441 and the wiring electrode 442 in the extending direction is connected to the sensing electrode 34. More specifically, one end of the wiring electrode 441 and the wiring electrode 442 in the extending direction is connected to the end portion of the sensing electrode 34 on the side end S22 side. The other end of the wiring electrode 441 and the wiring electrode 442 in the extending direction is drawn out to the upper end E22 of the base material 20.
  • the wiring electrode 441 and the wiring electrode 442 are arranged between the wiring electrode 421 and the wiring electrode 422 and the sensing electrode 34. Then, the wiring electrode 442, the wiring electrode 441, the wiring electrode 422, and the wiring electrode 421 are arranged in this order from the sensing electrode 34 toward the side end S22.
  • the width of the wiring electrode 441 is larger than the width of the wiring electrode 442.
  • the moisture detection sensor 10F can detect moisture at two points in the depth direction. Further, in the moisture detection sensor 10F, the wiring electrode 431, the wiring electrode 432, the wiring electrode 431 and the connection portion between the wiring electrode 432 and the sensing electrode 33, the wiring electrode 441, the wiring electrode 442, the wiring electrode 441 and the wiring electrode 442 and the sensing electrode It is possible to prevent the connection portion with 34 from being eroded by water.
  • the wiring electrode 411 and the wiring electrode 412 are arranged between the wiring electrode 431 and the side end S21. Therefore, the moisture detection sensor 10F can more reliably suppress the wiring electrode 431, the wiring electrode 432, the wiring electrode 431, and the connection portion between the wiring electrode 432 and the sensing electrode 33 from being eroded by moisture.
  • the wiring electrode 421 and the wiring electrode 422 are arranged between the wiring electrode 441 and the side end S22. Therefore, the moisture detection sensor 10F can more reliably prevent the wiring electrode 441, the wiring electrode 442, the wiring electrode 441, and the connection portion between the wiring electrode 442 and the sensing electrode 34 from being eroded by moisture.
  • FIG. 9 is a partially enlarged plan view of the moisture detection sensor according to the eighth embodiment.
  • the moisture detection sensor 10G according to the eighth embodiment is different from the moisture detection sensor 10F according to the seventh embodiment in that it includes a wiring electrode 431G and a wiring electrode 441G.
  • Other configurations of the moisture detection sensor 10G are the same as those of the moisture detection sensor 10F, and the description of the same parts will be omitted.
  • the moisture detection sensor 10G includes a wiring electrode 431G and a wiring electrode 432.
  • the arrangement and routing of the wiring electrode 431G and the wiring electrode 432 are the same as the arrangement and routing of the wiring electrode 431 and the wiring electrode 432 of the moisture detection sensor 10F.
  • the width of the wiring electrode 431G is the same as the width of the wiring electrode 432, for example, the width of the wiring electrode 412.
  • the width of the wiring electrode 441G is the same as the width of the wiring electrode 442, and is, for example, the same as the width of the wiring electrode 422.
  • the moisture detection sensor 10G can exert the same action and effect as the moisture detection sensor 10H.
  • the moisture detection sensor 10G can suppress an undesired coupling between the wiring electrode 431G and the wiring electrode 412, and an undesired coupling between the wiring electrode 431G and the wiring electrode 432.
  • the moisture detection sensor 10G can suppress an undesired coupling between the wiring electrode 441G and the wiring electrode 422 and an undesired coupling between the wiring electrode 441G and the wiring electrode 442.
  • FIG. 10 is a partially enlarged plan view of the moisture detection sensor according to the ninth embodiment.
  • the moisture detection sensor 10H according to the ninth embodiment is different from the moisture detection sensor 10F according to the seventh embodiment in that the wiring electrode 421H is provided.
  • Other configurations of the moisture detection sensor 10H are the same as those of the moisture detection sensor 10F, and the description of the same parts will be omitted.
  • the moisture detection sensor 10H includes a wiring electrode 421H.
  • the wiring electrode 421H has the same configuration as the wiring electrode 421C of the moisture detection sensor 10C according to the fourth embodiment.
  • the moisture detection sensor 10H can exert the same action and effect as the moisture detection sensor 10F and the moisture detection sensor 10C.
  • the wiring electrode 421H is arranged so as to surround the side end S21 side, the lower end E21 side, and the side end S22 side of the sensing electrode 32, the side end S21 and the lower end It may have a portion that does not extend parallel to E21 and the side end S22.
  • the width of the wiring electrode 431 and the wiring electrode 432 and the width of the wiring electrode 441 and the wiring electrode 442 may be substantially the same.
  • FIG. 11 (A) is a plan view of the moisture detection sensor according to the tenth embodiment
  • FIG. 11 (B) is a partially enlarged side sectional view of the moisture detection sensor according to the tenth embodiment.
  • the moisture detection sensor 10I according to the tenth embodiment includes a porous body 60 with respect to the moisture detection sensor 10 according to the first embodiment. Is different. Other configurations of the moisture detection sensor 10I are the same as those of the moisture detection sensor 10, and the description of the same parts will be omitted.
  • the moisture detection sensor 10 includes a porous body 60.
  • the porous body 60 is a rectangular cuboid.
  • the porous body 60 is made of, for example, gypsum.
  • the porous body 60 may be made of another material such as ceramic.
  • the porous body 60 is arranged on the first main surface 201 side. More specifically, the porous body 60 is arranged on the surface of the insulating film 51 that covers the first main surface 201. With the first main surface 201 viewed in a plan view, the porous body 60 is arranged so as to overlap the sensing electrode 31 and the sensing electrode 32.
  • the moisture detection sensor 10I can exert the same action and effect as the moisture detection sensor 10. Further, by providing the porous body 60, the moisture detection sensor 10I can improve the sensitivity of moisture detection of the soil 90.
  • the embodiment in which the porous body 60 overlapping the sensing electrode 31 and the sensing electrode 32 in a plan view is provided is shown.
  • the sensing electrode 33 and the sensing electrode 34 are provided as in the seventh embodiment, the eighth embodiment, and the ninth embodiment described above, the sensing electrode 33 and the sensing electrode 34 are used in a plan view. It is also possible to arrange overlapping porous bodies.
  • FIG. 12 is a plan view of the moisture detection sensor according to the eleventh embodiment.
  • the moisture detection sensor 10J according to the eleventh embodiment is different from the moisture detection sensor 10 according to the first embodiment in that it includes a sensing electrode 31J and a sensing electrode 32J.
  • Other configurations of the moisture detection sensor 10J are the same as those of the moisture detection sensor 10, and the description of the same parts will be omitted.
  • the moisture detection sensor 10J includes a sensing electrode 31J and a sensing electrode 32J.
  • the sensing electrode 31J and the sensing electrode 32J are rectangular in a plan view.
  • the sensing electrode 31J and the sensing electrode 32J are arranged side by side in the width direction of the base material 20.
  • the moisture detection sensor 10J can exert the same action and effect as the moisture detection sensor 10.
  • FIG. 13 (A) is a plan view of the first main surface side of the moisture detection sensor according to the twelfth embodiment
  • FIG. 13 (B) is the second main surface of the moisture detection sensor according to the twelfth embodiment. It is a plan view of a plane side
  • FIG. 13C is a sectional view of a moisture detection sensor according to a twelfth embodiment. 13 (C) shows the BB cross section in FIGS. 13 (A) and 13 (B).
  • the moisture detection sensor 10K according to the twelfth embodiment has the same as the moisture detection sensor 10 according to the first embodiment. It differs in that the sensing electrode and the wiring electrode are arranged on both main surfaces of the base material 20. Other configurations of the moisture detection sensor 10K are the same as those of the moisture detection sensor 10, and the description of the same parts will be omitted.
  • the configuration of the first main surface 201 side of the moisture detection sensor 10K is the same as that of the moisture detection sensor 10.
  • the moisture detection sensor 10K includes a sensing electrode 35, a sensing electrode 36, a wiring electrode 451 and a wiring electrode 452, a wiring electrode 461, a wiring electrode 462, and an insulating film 52.
  • the sensing electrode 35 corresponds to the "fifth sensing electrode” of the present invention
  • the sensing electrode 36 corresponds to the "sixth sensing electrode” of the present invention.
  • the wiring electrode 451 corresponds to the "11th wiring electrode” of the present invention
  • the wiring electrode 452 corresponds to the "12th wiring electrode” of the present invention.
  • the wiring electrode 461 corresponds to the "13th wiring electrode” of the present invention
  • the wiring electrode 462 corresponds to the "14th wiring electrode” of the present invention.
  • the sensing electrode 35, the sensing electrode 36, the wiring electrode 451 and the wiring electrode 452, the wiring electrode 461, and the wiring electrode 462 are arranged on the second main surface 202 of the base material 20.
  • the shape and arrangement of the sensing electrode 35 and the sensing electrode 36 are the same as the shape and arrangement of the sensing electrode 31 and the sensing electrode 36.
  • the wiring electrode 451 and the wiring electrode 452 are linear electrodes having a predetermined width.
  • the wiring electrode 451 and the wiring electrode 452 are arranged on the side end S22 side of the sensing electrode arrangement region on the second main surface 202. In other words, the wiring electrode 451 and the wiring electrode 452 are arranged between the sensing electrode arrangement region on the second main surface 202 and the side end S22 side.
  • One end of the wiring electrode 451 and the wiring electrode 452 in the extending direction is connected to the sensing electrode 35. More specifically, one end of the wiring electrode 451 and the wiring electrode 452 in the extending direction is connected to the end of the sensing electrode 35 on the side end S22 side.
  • the other end of the wiring electrode 451 and the wiring electrode 452 in the extending direction is pulled out to the upper end E22 of the base material 20.
  • the wiring electrode 451 and the wiring electrode 452 run in parallel over almost the entire length, and each has a main wire portion extending parallel to the side end S22.
  • the main wire portion of the wiring electrode 451 is arranged on the side end S22 side of the main wire portion of the wiring electrode 452. In other words, the main wire portion of the wiring electrode 452 and the main wire portion of the wiring electrode 451 are arranged in this order from the sensing electrode arrangement region toward the side end S22.
  • the wiring electrode 451 is connected to the lower end E21 side of the sensing electrode 35 with respect to the wiring electrode 452.
  • the wiring electrode 452 is arranged on the side opposite to the side end S22 with reference to the wiring electrode 451. That is, when viewed from the side end S22 side, the wiring electrode 452 is hidden behind the wiring electrode 451.
  • the wiring electrode 461 and the wiring electrode 462 are linear electrodes having a predetermined width.
  • the wiring electrode 461 and the wiring electrode 462 are arranged on the side end S21 side of the sensing electrode arrangement region on the second main surface 202. In other words, the wiring electrode 461 and the wiring electrode 462 are arranged between the sensing electrode arrangement region on the second main surface 202 and the side end S21 side.
  • One end of the wiring electrode 461 and the wiring electrode 462 in the extending direction is connected to the sensing electrode 36. More specifically, one end of the wiring electrode 461 and the wiring electrode 462 in the extending direction is connected to the end of the sensing electrode 36 on the side end S21 side.
  • the other end of the wiring electrode 461 and the wiring electrode 462 in the extending direction is pulled out to the upper end E22 of the base material 20.
  • the wiring electrode 461 and the wiring electrode 462 run in parallel over almost the entire length, and each has a main wire portion extending parallel to the side end S21.
  • the main wire portion of the wiring electrode 461 is arranged on the side end S21 side of the main wire portion of the wiring electrode 462. In other words, the main wire portion of the wiring electrode 462 and the main wire portion of the wiring electrode 461 are arranged in this order from the sensing electrode arrangement region toward the side end S21.
  • the wiring electrode 461 is connected to the lower end E21 side of the sensing electrode 36 with respect to the wiring electrode 462.
  • the wiring electrode 462 is arranged on the side opposite to the side end S21 with reference to the wiring electrode 461. That is, when viewed from the side end S21 side, the wiring electrode 462 is hidden behind the wiring electrode 461.
  • the insulating film 52 is a film having a predetermined dielectric constant and covers the entire surface of the second main surface 202. More specifically, the insulating film 52 covers the sensing electrode 35, the sensing electrode 36, the wiring electrode 451 and the wiring electrode 452, the wiring electrode 461, and the wiring electrode 462. In other words, the insulating film 52 covers the electrodes formed on the second main surface 202. Further, the insulating film 52 covers the region on the second main surface 202 where these electrodes are not formed.
  • the moisture detection sensor 10K can suppress the erosion of these electrodes due to moisture even if the sensing electrodes and the wiring electrodes are arranged on both main surfaces of the base material 20.
  • the embodiment in which the porous body 60 is not used is shown, but as in the tenth embodiment, the porous body that overlaps the sensing electrode 31 and the sensing electrode 32 on the first main surface 201 side in a plan view. It is also possible to arrange the 60 and arrange the porous body 60 that overlaps the sensing electrode 35 and the sensing electrode 36 in a plan view on the second main surface 202 side.
  • the substrate is realized by a substrate having a high elastic modulus (so-called substrate having a certain degree of hardness), but the substrate is not limited to this.

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
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  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

Dans la présente invention, des électrodes de détection (31, 32) sont placées sur une première surface principale (201) d'un substrat (20) et permettent d'obtenir une capacité qui varie en fonction de l'humidité incluse dans le sol (90). Des électrodes de câblage (411, 412) sont placées sur la première surface principale (201) du substrat (20) et sont connectées à l'électrode de détection (31). Les électrodes de câblage (411, 412) sont placées sur un côté d'extrémité latérale (S21) de la zone de placement d'électrodes de détection dans laquelle les électrodes de détection (31, 32) sont placées sur la première surface principale (201). L'électrode de câblage (412) et l'électrode de câblage (411) sont placées dans l'ordre indiqué depuis le côté zone de placement d'électrodes de détection. L'électrode de câblage (411) est plus large que l'électrode de câblage (412).
PCT/JP2021/036926 2021-01-06 2021-10-06 Détecteur d'humidité WO2022149320A1 (fr)

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JP2021-000913 2021-01-06
JP2021000913 2021-01-06

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011158812A1 (fr) * 2010-06-17 2011-12-22 国立大学法人豊橋技術科学大学 Dispositif de spécification pour état d'eau de sol, et procédé associé
JP2016038697A (ja) * 2014-08-07 2016-03-22 株式会社ジャパンディスプレイ センサ装置及び表示装置
US20160139021A1 (en) * 2013-06-14 2016-05-19 Cornell University Multimodal sensor, method of use and fabrication
JP2017151042A (ja) * 2016-02-26 2017-08-31 国立大学法人 東京大学 水分量検出装置
CN206832735U (zh) * 2017-06-11 2018-01-02 北京乙辛科技有限公司 一种新型测量土壤体积含水量和营养液浓度的装置
JP3215629U (ja) * 2018-01-11 2018-04-05 株式会社ランテクノ 植物体内の水分測定装置
WO2021193217A1 (fr) * 2020-03-27 2021-09-30 株式会社村田製作所 Capteur de détection d'humidité

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011158812A1 (fr) * 2010-06-17 2011-12-22 国立大学法人豊橋技術科学大学 Dispositif de spécification pour état d'eau de sol, et procédé associé
US20160139021A1 (en) * 2013-06-14 2016-05-19 Cornell University Multimodal sensor, method of use and fabrication
JP2016038697A (ja) * 2014-08-07 2016-03-22 株式会社ジャパンディスプレイ センサ装置及び表示装置
JP2017151042A (ja) * 2016-02-26 2017-08-31 国立大学法人 東京大学 水分量検出装置
CN206832735U (zh) * 2017-06-11 2018-01-02 北京乙辛科技有限公司 一种新型测量土壤体积含水量和营养液浓度的装置
JP3215629U (ja) * 2018-01-11 2018-04-05 株式会社ランテクノ 植物体内の水分測定装置
WO2021193217A1 (fr) * 2020-03-27 2021-09-30 株式会社村田製作所 Capteur de détection d'humidité

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