WO2022142990A1 - 尾气过滤装置和镀膜设备 - Google Patents

尾气过滤装置和镀膜设备 Download PDF

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Publication number
WO2022142990A1
WO2022142990A1 PCT/CN2021/134978 CN2021134978W WO2022142990A1 WO 2022142990 A1 WO2022142990 A1 WO 2022142990A1 CN 2021134978 W CN2021134978 W CN 2021134978W WO 2022142990 A1 WO2022142990 A1 WO 2022142990A1
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WO
WIPO (PCT)
Prior art keywords
filter
unit
mounting
installation
exhaust gas
Prior art date
Application number
PCT/CN2021/134978
Other languages
English (en)
French (fr)
Inventor
宗坚
王志军
Original Assignee
江苏菲沃泰纳米科技股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 江苏菲沃泰纳米科技股份有限公司 filed Critical 江苏菲沃泰纳米科技股份有限公司
Priority to US18/265,780 priority Critical patent/US20240035156A1/en
Priority to EP21913731.2A priority patent/EP4268931A4/en
Priority to JP2023537656A priority patent/JP2024500450A/ja
Publication of WO2022142990A1 publication Critical patent/WO2022142990A1/zh

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/0002—Casings; Housings; Frame constructions
    • B01D46/0005—Mounting of filtering elements within casings, housings or frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/0002—Casings; Housings; Frame constructions
    • B01D46/0013—Modules
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/0084—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours provided with safety means
    • B01D46/0086—Filter condition indicators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/30—Particle separators, e.g. dust precipitators, using loose filtering material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/56—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with multiple filtering elements, characterised by their mutual disposition
    • B01D46/62—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with multiple filtering elements, characterised by their mutual disposition connected in series
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/025—Other waste gases from metallurgy plants
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2271/00—Sealings for filters specially adapted for separating dispersed particles from gases or vapours
    • B01D2271/02—Gaskets, sealings

Definitions

  • the invention relates to the field of exhaust gas treatment, in particular to an exhaust gas filtering device and coating equipment.
  • reaction raw materials are introduced into the reaction chamber for reaction, and part of the unreacted raw materials and part of the by-products generated by the reaction will form tail gas and need to be discharged from the reaction chamber in time to make the pressure of the reaction chamber.
  • these exhaust gases are often harmful to the environment if they are discharged directly.
  • the exhaust gas is usually absorbed by means of a filter bottle at the outlet position.
  • a filter material is placed in the filter bottle, and when the exhaust gas treatment capacity of the filter bottle is about to reach the upper limit, it is replaced with a new filter bottle.
  • the reaction chamber of the coating equipment needs to be maintained at a lower pressure relative to the external normal atmospheric pressure to facilitate the coating reaction. Therefore, when changing the filter bottle, it is often necessary to stop the coating equipment.
  • the exhaust gas is prevented from being discharged to the outside world, and on the other hand, the outside air is prevented from entering the reaction chamber to affect the coating environment.
  • An advantage of the present invention is to provide an exhaust gas filter device and a coating equipment, wherein the exhaust gas filter device can be quickly replaced when it needs to be replaced, so as to minimize the impact on the working efficiency of the coating equipment.
  • Another advantage of the present invention is to provide an exhaust gas filtering device and coating equipment, wherein the exhaust gas filtering device can provide a larger gas flow path to reduce pressure drop.
  • Another advantage of the present invention is to provide an exhaust gas filter device and a coating equipment, wherein a filter unit of the exhaust gas filter device can be easily disassembled and installed, and the sealing performance of the new filter unit can be ensured.
  • Another advantage of the present invention is to provide an exhaust gas filtering device and coating equipment, wherein the exhaust gas filtering device provides a monitoring unit, and the monitoring unit can monitor the filtering unit to prompt timely replacement of the filtering unit.
  • the present invention provides an exhaust gas filter device, which includes:
  • the filtering unit is located between the second mounting unit and the first mounting unit and the second mounting unit and the first mounting unit are respectively detachably mounted to the filtering unit, one of the The filter unit has a first mounting side and a second mounting side, wherein the second mounting unit is located on the first mounting side, the first mounting unit is located on the second mounting side, and exhaust gas is adapted to be directed from the The air inlet enters the second installation unit, then passes through the filter unit from the first installation side and moves toward the second installation side, and finally exits through the first installation unit and the air outlet in sequence.
  • the exhaust filter device is configured to be directed from the second installation unit, then passes through the filter unit from the first installation side and moves toward the second installation side, and finally exits through the first installation unit and the air outlet in sequence.
  • the filter unit has a filter inlet and a filter outlet
  • the first installation unit has an installation opening
  • the exhaust filter device further includes an installation assembly
  • the installation assembly includes a An installation piece and an installation fitting
  • the installation piece is arranged on the first installation unit
  • the installation fitting is arranged on the filter unit, and through the detachable connection between the installation piece and the installation fitting, the The filter unit and the first mounting unit are detachably mounted in such a manner that the filter outlet is aligned with the mounting opening of the first mounting unit.
  • the number of the filter units is at least two, each of the filter units has a filter inlet and a filter outlet, wherein the exhaust filter device further includes a mounting assembly, the mounting assembly It includes a mounting piece and a mounting fitting, the mounting piece is arranged on one of the filter units, and the mounting fitting is arranged on an adjacent one of the filtering units, by the difference between the mounting piece and the mounting fitting Removably connected, two adjacent filter units are detachably installed in a manner that the filter inlet is aligned with the filter outlet.
  • the mounting member is implemented as a hook
  • the mounting accessory is provided as a fixing seat extending outwardly from a peripheral position of the filter unit where the filter outlet is formed
  • the mounting The fitting is adapted to be detachably hung on the fixing seat; or, wherein the mounting member is implemented as a screw, the mounting fitting is implemented as a mounting hole, and the mounting member is adapted to be detachably screwed or, wherein the mounting member is implemented as a reversible snap, the mounting accessory is configured as a fixed seat, and the mounting member is adapted to be detachably fastened to the fixed seat.
  • the exhaust gas filtering device further includes a monitoring unit, wherein the monitoring unit is communicated with the gas passage and is disposed behind the filtering unit so that the exhaust gas first passes through the filtering unit Then pass through the monitoring unit.
  • the monitoring unit is provided with an observation window and includes an indication module, through which the observation window is used to observe whether the indication module fails to determine whether the filter unit needs to be replaced.
  • the monitoring unit includes a detection module, an indication module, and a processing module, wherein the processing module is communicatively connected to the detection module and the indication module, respectively, and the detection module The module is used to detect the exhaust gas filtered by the filter unit. Based on the detection result of the detection module, the processing module obtains the replacement time of the filter unit in advance and sends a signal to the indication module, and the indication module An instruction is issued to replace the filter unit.
  • the second installation unit is located below the first installation unit and the second installation unit is formed with a liquid outlet, the liquid outlet is configured to condense into liquid in case of condensation It can then be collected in the vicinity of the liquid outlet and is adapted to be discharged at the liquid outlet position.
  • the exhaust gas filtering device includes a sealing ring, wherein the sealing ring is adapted to be detachably installed between the filter unit and the first installation unit to ensure that the filter unit and the tightness between the first mounting units.
  • the present invention provides an exhaust filter device, which includes at least three filter units, and has an air outlet, an air inlet and a gas channel, the air outlet and the air inlet And the gas passages communicate with each other and the gas passages are formed in the filter unit, wherein the filter unit has a filter inlet, a filter outlet and a filter cavity, a filter inlet of the filter unit and the filter unit
  • the filter outlet is respectively aligned with the filter outlet of the adjacent one of the filter units and the filter inlet of the other adjacent filter unit, and is detachably lying between the two filter units.
  • the exhaust gas is adapted to be guided from the air inlet to one of the filter units, pass through a plurality of the filter units in sequence, and finally leave the exhaust gas filter device through the air outlet.
  • the present invention provides a coating equipment, which includes:
  • the coating body has a coating cavity
  • An exhaust filter device wherein the exhaust filter device includes:
  • At least one filter unit and has an air outlet, an air inlet and an air passage, wherein the second installation unit is communicated with the air inlet, and the air inlet is communicated with all parts of the coating body.
  • the coating chamber the first installation unit is communicated with the air outlet
  • the filter unit is located between the second installation unit and the first installation unit and the second installation unit and the first installation unit
  • the mounting units are respectively detachably mounted on the filter units, wherein one of the filter units has a first mounting side and a second mounting side, wherein the second mounting unit is located on the first mounting side, the The first installation unit is located on the second installation side, and the exhaust gas is adapted to be guided from the air inlet into the second installation unit and then from the first installation side through the filter unit and towards the second installation side move, and finally leave the exhaust filter device sequentially through the first installation unit and the air outlet.
  • the present invention provides a coating equipment, which includes:
  • the coating body has a coating cavity
  • An exhaust gas filter device wherein the exhaust gas filter device includes at least three filter units, and has an air outlet, an air inlet and a gas passage, and the air outlet, the air inlet and the gas passage communicate with each other And the air inlet is communicated with the coating cavity of the coating main body, wherein the filter unit has a filter inlet, a filter outlet and a filter cavity, a filter inlet of the filter unit and the filter The outlets are respectively aligned with the filter outlet of the adjacent one of the filter units and the filter inlet of the other adjacent filter unit and are detachably lying between the two filter units , the exhaust gas is adapted to be guided from the air inlet to one of the filter units and to pass through a plurality of the filter units in sequence, and finally to leave the exhaust gas filter device through the air outlet.
  • FIG. 1 is a schematic diagram of an exhaust gas filtering device according to a preferred embodiment of the present invention.
  • FIG. 2 is a schematic cross-sectional view of the above-mentioned exhaust gas filtering device according to the present invention.
  • FIG. 3 is a schematic exploded view of the above-mentioned exhaust gas filtering device according to the present invention.
  • FIG. 4 is a schematic diagram of a filtering unit of the above-mentioned exhaust gas filtering device according to the present invention.
  • 5A and 5B are schematic diagrams of a replacement process of a filter unit of the above-mentioned exhaust gas filter device according to the present invention.
  • FIG. 6 is a schematic diagram of the exhaust gas filtering device according to another preferred embodiment of the present invention.
  • FIG. 7 is a schematic diagram of the exhaust gas filtering device according to another preferred embodiment of the present invention.
  • an exhaust gas filter device 1 and a coating device 1000 according to a preferred embodiment of the present invention are illustrated.
  • the exhaust gas filter device 1 can be used in conjunction with a coating body 2 of the coating device 1000.
  • the coating body 2 of the coating device 1000 needs to discharge exhaust gas during operation, and the exhaust gas is guided through the exhaust gas filter device. 1, so that the treated exhaust gas is suitable to be discharged directly to the surrounding environment.
  • the exhaust filter device 1 has an air inlet 101 and an air outlet 102, wherein the air inlet 101 is connected to a coating cavity 300 of a coating main body 2 of the coating equipment 1000, and the air outlet 102 is connected to a coating chamber 300. Connected to the external environment.
  • the exhaust filter device 1 has a gas passage 100 , wherein the air inlet 101 and the air outlet 102 are located at two ends respectively and communicate with the gas passage 100 .
  • the exhaust filter device 1 may include a mounting housing 10 and at least one filter unit 20, wherein the filtering unit 20 may be detachably mounted on the mounting housing 10, wherein the mounting housing 10 may include a A first installation unit 11 and a second installation unit 12, wherein the air inlet 101 is arranged in the second installation unit 12 of the installation housing 10, and the air outlet 102 is arranged in the installation housing
  • the exhaust gas from the reaction chamber passes through the air inlet 101 , the second installation unit 12 , the filter unit 20 , the first installation unit 11 and the air outlet 102 in sequence.
  • One of the filtering units 20 is detachably mounted on the second mounting unit 12, and one of the filtering units 20 is detachably mounted on the first mounting unit 11, so that when the filtering unit 20 needs to be When replacing, the filter unit 20 can be directly removed from the second installation unit 12 and/or the first installation unit 11 .
  • the filter unit 20 has a first installation side and a second installation side.
  • the second installation unit 12 is disposed on the filter unit 20 On the first installation side, the first installation unit 11 is disposed on the second installation side of the same filter unit 20 .
  • the second installation unit 12 is provided on one side of the first installation side of the filter unit 20, the first installation The unit 11 is provided on one side of the second installation side of the other filter unit 20 .
  • the first installation side and the second installation side of the filter unit 20 may be opposite sides or adjacent sides.
  • the filter unit 20 is lying between the second installation unit 12 and the first installation unit 11 , and the exhaust gas is removed along the first installation side of the filter unit 20 toward the second installation side. Guided to be filtered through the filtering unit 20 .
  • the exhaust gas can pass through the position where the cross-sectional area of the filter unit 20 is larger, so as to help improve the working efficiency of the exhaust gas filtering device 1 .
  • the filter unit 20 includes a side wall 21 and a filter cavity 200, wherein the side wall 21 surrounds the filter cavity 200, wherein the side wall 21 has a high end 211 and a filter cavity 200.
  • a low end 212 wherein the first installation side is located at the high end 211 of the side wall 21 , and the second installation side is located at the low end 212 of the side wall 21 .
  • the filter unit 20 further includes a filter material 22, wherein the filter material 22 is arranged on the side wall 21 and located in the filter cavity 200.
  • the type of the filter material 22 can be selected according to the needs, but It is not limited to the activated carbon filter material 22 or the alumina filter material 22 or the like.
  • the adjacent filter units 20 can be detachably installed with each other, so that when one of the filter units 20 needs to be replaced, it can be replaced by Easy to replace.
  • the number of the filter units 20 is two or more, all the filter units 20 may be disassembled as a whole for replacement, or the desired filter units 20 may be disassembled individually.
  • the filter unit 20 that is adjacently mounted on the second mounting unit 12 or the first mounting unit 11 is also detachably mounted on the second mounting unit 12 or the first mounting unit 11 to Easy to replace.
  • the exhaust gas filter device 1 further includes at least one mounting assembly 30, and the mounting assembly 30 is adapted to be connected to the second mounting unit 12 and the filtering unit 20, or one of the filtering unit 20 and the filtering unit 20.
  • the adjacent filter units 20 , or the first installation unit 11 and the filter unit 20 are adjacent filter units 20 , or the first installation unit 11 and the filter unit 20 .
  • the mounting assembly 30 includes a mounting member 31 and a mounting accessory 32, wherein the mounting member 31 is detachably mounted on the mounting accessory 32, and the mounting member 31 or the mounting accessory 32 is suitable for being installed
  • the mounting fitting 32 or the mounting member 31 is suitable for being mounted on the first mounting unit 11, so that the mounting member 31 and the mounting fitting 32 are respectively installed.
  • the two components can be detachably installed.
  • the mounting member 31 or the mounting accessory 32 of the mounting assembly 30 may be provided at the peripheral position of the side wall 21 of the filter unit 20 or the side wall 21 or any other.
  • the oppositely arranged mounting member 31 can be installed on the mounting accessory 32 to limit the two filter units 20, so as to avoid two different filter units 20.
  • the filter units 20 are disengaged from each other.
  • the oppositely arranged installation member 31 can be installed on the installation accessory 32 to limit the filter unit 20 and the second installation unit 12
  • the unit 12 is installed, so that the filter unit 20 and the second installation unit 12 are firmly installed and connected.
  • the oppositely arranged installation member 31 can be installed on the installation accessory 32 to limit the filter unit 20 and the first installation member 32
  • the unit 11 is installed, so that the filter unit 20 and the first installation unit 11 are firmly installed and connected.
  • the mounting pieces 31 and the mounting fittings 32 of the mounting assembly 30 can be provided in the form of snaps that can be matched with each other, the number of the mounting pieces 31 and the mounting fittings 32 can be multiple, and the types can be is different.
  • one type of the mounting member 31 and the mounting accessory 32 is implemented as a fixed seat and a flip-up snap, when the mounting member 31 and the mounting accessory 32 need to be disassembled, Turn the buckle in a direction away from the fixing seat so that the fixing seat and the buckle are separated from each other. The direction of the buckle is reversed so that the buckle is fastened to the fixing seat.
  • Another type of the mounting member 31 and the mounting accessory 32 is implemented as a fixing seat and a hook, respectively, when the mounting member 31 and the mounting accessory 32 move toward each other along a predetermined direction, so that the hook is engaged with the fixing
  • the filter unit 20 with the mounting piece 31 and the filter unit 20 with the mounting fitting 32 can be locked with each other, when the mounting piece 31 and the mounting fitting 32 are in a predetermined direction
  • the filter unit 20 mounted with the mounting member 31 and the filter unit 20 mounted with the mounting accessory 32 can be unlocked from each other.
  • both the above-mentioned two types of the mounting member 31 and the mounting fitting 32 are used, and the installation of two filtering units 20 is taken as an example for description.
  • one of the mounting pieces 31 may be located on the second mounting side of one of the filter units 20
  • one of the mounting fittings 32 can be located on the first mounting side of the other of the filter units 20
  • the mounting pieces 31 and the mounting fittings 32 can be aligned with each other, so that the two filter units 20 In the process of mutual alignment, the mounting member 31 can be engaged with the mounting fitting 32 .
  • the mounting fitting 32 which is implemented as a reversible snap on the side of one filter unit 20 , is turned over to engage with the other filter unit 20 .
  • Said mounts 31 of the side of the unit 20 is provided.
  • the mounting assembly 30 may also include another set of the mounting piece 31 and the mounting fitting 32, wherein the mounting piece 31 may be implemented as a bolt, the mounting fitting 32 may be implemented as a mounting hole, After the filter unit 20 is aligned and installed on another filter unit 20, or after the filter unit 20 is aligned and installed on the second installation unit 12 or the first installation unit 11, the screw Connect the mounting piece 31 and the mounting fitting 32 to fasten the adjacent filter unit 20 or the filter unit 20 and the second mounting unit 12, or the first mounting unit 11 .
  • the second installation unit 12 and/or the first installation unit 11 of the exhaust filter device 1 may be fixedly arranged on the coating apparatus 1000, so that the filter unit 20 passes through the second installation unit 1000.
  • the installation between the installation unit 12 and/or the first installation unit 11 can then be installed in the coating apparatus 1000 .
  • the first installation unit 11 may be located below the second installation unit 12 , the air inlet 101 is located on one side of the first installation unit 11 , and the air outlet 102 is located on the one side of the second installation unit 12 . side.
  • the air passage 100 extends from the air inlet 101 to the air outlet 102 from bottom to top.
  • the exhaust gas filtering device 1 may include a monitoring unit 40 , wherein the monitoring unit 40 may be used to monitor the effectiveness of the filtering unit 20 .
  • the monitoring unit 40 may be disposed behind the filtering unit 20 , so that the exhaust gas passes through the monitoring unit 40 after being processed by the filtering unit 20 .
  • the monitoring unit 40 may include at least one detection module 41 and at least one indication module 42, wherein the detection module 41 is disposed in the gas channel 100 and behind the filter unit 20, so that the exhaust gas passes through the filter unit. 20 passes through the detection module 41 after filtering.
  • the detection module 41 is used to detect specific substances in the exhaust gas. When the specific substance in the exhaust gas detected by the detection module 41 exceeds a certain amount, the indication module 42 may issue an indication.
  • the detection module 41 and the indication module 42 may be the same substance, for example, a reagent that can chemically react with a specific substance in the exhaust gas and indicate by changing color.
  • one of the filtering units 20 is used to filter the harmful gas A in the exhaust gas. After filtering by the filtering unit 20, the harmful gas A in the exhaust gas has been removed or the content is below a certain level. However, if a harmful gas A or a harmful gas A exceeding a certain content is detected through the position of the detection module 41, and the indication module 42 gives a relevant indication, then the corresponding filter material 22 in the filter unit 20 is explained. Has expired and needs to be replaced.
  • the numbers of the detection modules 41 and the indication modules 42 can be set according to requirements, for example, when the number of the filtering units 20 is two or more, and the filtering units 20 When the filter materials 22 are not the same, one of the detection modules 41 and one of the indication modules 42 can be used to indicate whether the corresponding filter unit 20 fails.
  • the detection module 41 is disposed at the position of the air outlet 102 , and the filtered exhaust gas is discharged to the outside after passing through the detection module 41 .
  • the disassembly of the filter unit 20 relative to the second installation unit 12 or the first installation unit 11 does not affect the detection module 41 and the indication module 42 .
  • the detection module 41 and the indication module 42 can also be detachably installed at the position of the air outlet 102 respectively, so as to facilitate the replacement of the detection module 41 and the indication module 42 .
  • the user can know whether the filter unit 20 needs to be replaced by directly observing the monitoring unit 40, or the monitoring unit 40 is a communicable device that can send information to other electronic devices, such as production Manage devices, mobile electronic devices, etc. to prompt users to replace devices in a timely manner.
  • the monitoring unit 40 is a communicable device that can send information to other electronic devices, such as production Manage devices, mobile electronic devices, etc. to prompt users to replace devices in a timely manner.
  • the monitoring unit 40 may further include a processing module 43, wherein the detection module 41 is communicably connected to the processing module 43, and the indication module 42 may be communicatively connected to the processing module 43 Module 43.
  • the processing module 43 can pre-determine that the filtering unit 20 is about to fail.
  • the indication module 42 can issue an indication in advance, so as to reduce the possibility that the exhaust gas that does not meet the requirements of environmental protection is discharged to the outside.
  • the processing module 43 sends The instruction is sent to the instruction module 42, and the instruction module 42 can issue a prompt in advance before 9:40.
  • the monitoring unit 40 is implemented to include alumina treated with special chemical reagents, and the color change indicates whether the filter material 22 in the filter unit 20 fails.
  • the monitoring unit 40 can form an observation window 44, so that the user can observe the color change of the alumina inside the monitoring unit 40 through the observation window 44.
  • the first installation unit 11 forms a first accommodating cavity 110, and the first accommodating cavity 110 is communicated with the filter cavity 200 and the air outlet 102 of the filter unit 20, and passes through the filter unit After the first installation unit 11 converges, the exhaust gas of 20°C leaves the first installation unit 11 through the air outlet 102 , and then passes through the detection module 41 and the indication module 42 .
  • the second installation unit 12 forms a second accommodating cavity 120, wherein the second accommodating cavity 120 is communicated with the filter cavity 200 of the filter unit 20 and the air inlet 101, and comes from the air intake
  • the exhaust gas from the port 101 converges at the position of the second accommodating cavity 120 of the second installation unit 12 and enters the filter unit 20 upward.
  • the exhaust gas filter device 1 has a liquid outlet 103, wherein the liquid outlet 103 is provided in the second installation unit 12 and is located at a lower position of the second installation unit 12, so that the condensation in the The inner wall of the second installation unit 12 or the liquid of the filter unit 20 located above the second installation unit 12 can be discharged through the liquid outlet 103 to avoid collecting in the second installation unit 12 and affecting the to the passage of exhaust.
  • the temperature of the exhaust gas from the coating device 1000 may be at a higher level than the ambient temperature where the exhaust gas filter device 1 is located. Therefore, when there is moisture in the exhaust gas, the The inner wall of the second installation unit 12 or the filter unit 20 will condense into liquid and move toward the position of the liquid outlet 103 under the action of gravity.
  • the liquid outlet 103 is configured to be openable or closable, for example, a valve may be configured to discharge the condensate periodically.
  • the exhaust filter device 1 further includes at least one sealing ring 50, wherein the sealing The ring 50 is arranged between the filter unit 20 and the filter unit 20, or between the filter unit 20 and the second installation unit 12, or between the filter unit 20 and the first installation between units 11.
  • the sealing ring 50 may be detachably installed.
  • the sealing ring 50 is arranged at the connection edge position of the filter unit 20 and the filter unit 20, or the connection edge position of the filter unit 20 and the second installation unit 12, or the filter unit 20 and the connecting edge position of the first installation unit 11 .
  • the filter unit 20 has a filter inlet 201 and a filter outlet 202, wherein the filter inlet 201 and the filter outlet 202 are respectively located on both sides of the filter cavity 200 and communicate with the filter cavity 200,
  • the sealing ring 50 is disposed at the position of the side wall 21 forming the filter inlet 201 or the position of the side wall 21 forming the filter outlet 202 .
  • the first installation unit 11 is arranged on the side of the filter outlet 202 of the filter unit 20
  • the second installation unit 12 is arranged at the side of the filter inlet 201 of the filter unit 20 .
  • the cross section of the filter unit 20 can be, but is not limited to, a rectangle, a circle, or a polygon.
  • the shape of the filter inlet 201 of one of the filter units 20 and the shape of the filter outlet 202 of the other filter unit 20 are matched to each other to facilitate the sealing between the two.
  • the shape of the filter outlet 202 of one of the filter units 20 and the shape of an installation opening 1101 of the first installation unit 11 are matched with each other to facilitate the sealing between the two.
  • the shape of the filter inlet 201 of one of the filter units 20 and the shape of an installation opening 1201 of the second installation unit 12 are matched with each other to facilitate the sealing between the two.
  • the exhaust filter device 1 may further include an air inlet pipe 60 and an air outlet pipe 70, wherein the air inlet pipe 60 and the air outlet pipe 70 are respectively arranged at the position of the air inlet 101 and the position of the air outlet 102,
  • the air inlet pipe 60 is adapted to communicate with the coating equipment 1000 and the second installation unit 12
  • the air outlet pipe 70 is adapted to communicate with the external discharge device and the first installation unit 11 .
  • the exhaust filter device 1 may further include a corrugated pipe 80, wherein the corrugated pipe 80 is arranged between the intake pipe 60 and the second installation unit 12, and the exhaust gas passes through the intake pipe 60 and the corrugated pipe
  • the pipe 80 is transported from top to bottom to the position of the air inlet 101 , then passes through the filter unit 20 from bottom to top to be filtered, and then exits through the air outlet pipe 70 .
  • the number of the filter units 20 is three, which are respectively implemented as an alumina filter box, an activated carbon filter box and a honeycomb activated carbon filter box from top to bottom, that is to say, the exhaust gas passes through in sequence
  • the filter material 22 may also include activated carbon sponges, which are arranged at the filter inlet 201 and the filter outlet 202 of the filter unit 20. On the one hand, it can prevent pollutants with larger particles from entering all the filters.
  • the filter cavity 200 can, on the other hand, prevent pollutants with larger particles from leaving the filter cavity 200 .
  • the filter unit 20 further includes at least one carrier plate 23, wherein the carrier plate 23 is supported on the side wall 21 and is hollowed out, so that the exhaust gas can pass through smoothly, and the filter material 22 can be supported on the carrier plate. plate 23. It can be understood that the type and configuration of the filter material 22 can be selected according to requirements. The types of filter materials 22 in the same filter unit 20 may be different, and gaps may be formed inside the filter materials 22 to facilitate the passage of exhaust gas.
  • the exhaust gas filter device 1 according to another preferred embodiment of the present invention is schematically illustrated.
  • the installation assembly 30 of the exhaust gas filter device 1 is implemented as a hook type, and the installation between two filter units 20 is taken as an example for illustration.
  • the formation of one filter unit 20 The side wall 21 of the filter inlet 201 extends outward to form the fixing seat as the mounting member 31 of the mounting assembly 30 , and another filter unit 20 is arranged near the filter outlet 202 There are said mounting accessories 32 .
  • the installation of the two filter units 20 can be realized by directly hanging the installation fitting 32 on the installation member 31 .
  • the filter inlet 201 of one of the filter units 20 is aligned with the filter outlet 202 of the other filter unit 20, and the mounting piece 31 and the mounting fitting 32 are gradually aligned so that the When the position of the filter inlet 201 is in close contact with the position of the filter outlet 202 , the mounting member 31 is hung on the mounting accessory 32 .
  • FIG. 7 it is a schematic diagram of the exhaust gas filter device 1 according to another preferred embodiment of the present invention.
  • the installation housing 10 and the filter unit 20 in the exhaust gas filter device 1 are arranged in the same direction, for example, in a vertical direction.
  • the second installation unit 12 and the first installation unit 11 of the installation housing 10 are located on the opposite first installation side and the second installation side of the filter unit 20 , respectively.
  • the second installation unit 12 and the first installation unit 11 of the installation housing 10 in the exhaust filter device 1 are located on adjacent two sides of the filter unit 20 respectively.
  • the relative positions of the installation housing 10 and the filter unit 20 or the relative positions of a plurality of the filter units 20 can be arranged according to the requirements of the gas flow channel 100 .
  • the filter unit 20 may be directly connected to the intake pipe 60 and the exhaust pipe 70 , that is, the exhaust filter device 1 may not include the installation housing 10 .
  • the number of the filter units 20 may be three, and the filter units 20 located in the middle are respectively detachably connected to two adjacent filter units 20 so that they can be replaced.

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Abstract

一尾气过滤装置（1）和镀膜设备（1000），其中尾气过滤装置（1）包括至少一个过滤单元（20），一第一安装单元（11）以及一第二安装单元（12），其中过滤单元（20）方便更换并且能够被及时更换。镀膜设备（1000）包括一镀膜主体（2）和尾气过滤装置（1），其中镀膜主体（2）具有一镀膜腔（300），尾气过滤装置（1）的进气口（101）连通于镀膜腔（300）。

Description

尾气过滤装置和镀膜设备
本申请要求于2020年12月28日提交中国专利局、申请号为202011575631.8、发明名称为“尾气过滤装置和镀膜设备”的中国专利申请的优先权，其全部内容通过引用结合在本申请中。
技术领域
本发明涉及到尾气处理领域，尤其涉及到一尾气过滤装置和镀膜设备。
背景技术
在镀膜过程中，反应原料被通入到反应腔室内进行反应，部分未反应完的原料和反应生成的一部分副产物会形成尾气并且需要被及时地排出反应腔室，以使得反应腔室的压力在控制范围内，这些尾气如果直接排放的话，通常会对环境造成危害。
通常通过在出口位置设置过滤瓶的方式来吸收尾气。过滤瓶内被放置有过滤材料，等到过滤瓶的尾气处理能力将要达到上限时，更换为新的过滤瓶。对于一个镀膜设备而言，镀膜设备的反应腔室需要相对于外部的正常大气压环境维持在一个较小压力的状态，以有利于镀膜反应，因此在更换滤瓶时，往往需要停止镀膜设备的工作，一方面避免尾气被排放在外界，另一方面避免外部的空气进入到反应腔室内以对于镀膜环境造成影响。
更换滤瓶的方式有两种，一种是仅仅更换为新的滤材，另一个是将过滤瓶和过滤瓶整个进行更换。由于后者的成本较高，并且更换新的滤瓶之后可能需要重新调整过滤瓶和反应腔室之间的连接以保证密封性，因此，采用前一种处理方式较为普遍。
在实际的使用过程中，发现用过滤瓶过滤还存在着两个问题，一个问题在于停工导致的生产效率降低，一个过滤瓶的使用期限大概为一周，这意味着一周就需要停工一次，另一个问题在于过滤瓶的气体流通口径小，压降大，导致有小背压要求的真空泵经常报警。
发明内容
本发明的一个优势在于提供一尾气过滤装置和镀膜设备，其中所述尾气过滤装置在需 要更换时，能够被快速地更换，以尽可能减少对于所述镀膜设备的工作效率的影响。
本发明的另一优势在于提供一尾气过滤装置和镀膜设备，其中所述尾气过滤装置能够提供一个较大的气体流通路径，以减小压降。
本发明的另一优势在于提供一尾气过滤装置和镀膜设备，其中所述尾气过滤装置的一过滤单元能够被方便地拆卸和安装，并且新的所述过滤单元的密封性能够被保证。
本发明的另一优势在于提供一尾气过滤装置和镀膜设备，其中所述尾气过滤装置提供一监测单元，所述监测单元能够对于所述过滤单元进行监测，以提示及时更换所述过滤单元。
根据本发明的一方面，本发明提供了一尾气过滤装置，其包括：
一第一安装单元；
一第二安装单元；
至少一过滤单元，以及具有一出气口、一进气口以及一气体通道，其中所述第二安装单元被连通于所述进气口，所述第一安装单元被连通于所述出气口，所述过滤单元位于所述第二安装单元和所述第一安装单元之间并且所述第二安装单元和所述第一安装单元被分别可拆卸地安装于所述过滤单元，其中一个所述过滤单元具有一第一安装侧和一第二安装侧，其中所述第二安装单元位于所述第一安装侧，所述第一安装单元位于第二安装侧，尾气适于被引导自所述进气口进入到所述第二安装单元然后自所述第一安装侧通过所述过滤单元并且朝向所述第二安装侧移动，最后依次通过所述第一安装单元和所述出气口离开所述尾气过滤装置。
根据本发明的一个实施例，所述过滤单元具有一过滤入口和一过滤出口，所述第一安装单元具有一安装开口，其中所述尾气过滤装置进一步包括一安装组件，所述安装组件包括一安装件和一安装配件，所述安装件被设置于所述第一安装单元，所述安装配件被设置于所述过滤单元，藉由所述安装件和所述安装配件的可拆卸连接，所述过滤单元和所述第一安装单元被以所述过滤出口对准于所述第一安装单元的所述安装开口的方式可拆卸地安装。
根据本发明的一个实施例，所述过滤单元的数目是至少两个，每一个所述过滤单元具有一过滤入口和一过滤出口，其中所述尾气过滤装置进一步包括一安装组件，所述安装组件包括一安装件和一安装配件，所述安装件被设置于一个所述过滤单元，所述安装配件被设置于相邻的一个所述过滤单元，藉由所述安装件和所述安装配件的可拆卸连接，相邻的两个所述过滤单元被以所述过滤入口对准所述过滤出口的方式可拆卸地安装。
根据本发明的一个实施例，所述安装件被实施为挂钩，所述安装配件被设置为自所述过滤单元的形成所述过滤出口的周沿位置朝外延伸形成的固定座，所述安装件适于被可拆卸地挂持于所述固定座；或者是，其中所述安装件被实施为螺钉，所述安装配件被实施为安装孔，所述安装件适于被可拆卸地螺接于所述安装配件；或者是，其中所述安装件被实施为可翻转卡扣，所述安装配件被设置为固定座，所述安装件适于被可拆卸地扣合于所述固定座。
根据本发明的一个实施例，所述尾气过滤装置进一步包括一监测单元，其中所述监测单元被连通于所述气体通道并且被设置于所述过滤单元的后方以使得尾气先通过所述过滤单元然后经过所述监测单元。
根据本发明的一个实施例，所述监测单元被设置有一个观察窗并且包括一指示模块，藉由所述观察窗观察所述指示模块是否失效以判断所述过滤单元是否需要更换。
根据本发明的一个实施例，所述监测单元包括一检测模块、一指示模块以及一处理模块，其中所述处理模块被分别可通信地连接于所述检测模块和所述指示模块，所述检测模块用于检测经过所述过滤单元过滤后的尾气，基于所述检测模块的检测结果，所述处理模块预先得出所述过滤单元的更换时间并且发送信号至所述指示模块，所述指示模块发出指示以提示更换所述过滤单元。
根据本发明的一个实施例，所述第二安装单元位于所述第一安装单元下方并且所述第二安装单元形成有一个出液口，所述出液口被配置为在遇冷凝集为液体后能够汇集在所述出液口附近并且适于在所述出液口位置被排出。
根据本发明的一个实施例，所述尾气过滤装置包括一密封圈，其中所述密封圈适于被可拆卸安装于所述过滤单元和所述第一安装单元之间以保证所述过滤单元和所述第一安装单元之间的密封性。
根据本发明的另一方面，本发明提供了一尾气过滤装置，其包括至少三个过滤单元，以及具有一出气口、一进气口以及一气体通道，所述出气口、所述进气口以及所述气体通道相互连通并且所述气体通道形成于所述过滤单元，其中所述过滤单元具有一过滤入口、一过滤出口以及一过滤腔，一个所述过滤单元的所述过滤入口和所述过滤出口被分别对准于相邻的一个所述过滤单元的所述过滤出口和相邻的另一个所述过滤单元的所述过滤入口并且被可拆卸地横卧在两个所述过滤单元之间，尾气适于被引导自所述进气口进入到一个所述过滤单元并且依次通过多个所述过滤单元，最后通过所述出气口离开所述尾气过滤装置。
根据本发明的另一方面，本发明提供了一镀膜设备，其包括：
一镀膜主体，其中所述镀膜主体具有一镀膜腔；和
一尾气过滤装置，其中所述尾气过滤装置包括：
一第一安装单元；
一第二安装单元；
至少一过滤单元，以及具有一出气口、一进气口以及一气体通道，其中所述第二安装单元被连通于所述进气口，所述进气口被连通于所述镀膜主体的所述镀膜腔，所述第一安装单元被连通于所述出气口，所述过滤单元位于所述第二安装单元和所述第一安装单元之间并且所述第二安装单元和所述第一安装单元被分别可拆卸地安装于所述过滤单元，其中一个所述过滤单元具有一第一安装侧和一第二安装侧，其中所述第二安装单元位于所述第一安装侧，所述第一安装单元位于第二安装侧，尾气适于被引导自所述进气口进入到所述第二安装单元然后自所述第一安装侧通过所述过滤单元并且朝向所述第二安装侧移动，最后依次通过所述第一安装单元和所述出气口离开所述尾气过滤装置。
根据本发明的另一方面，本发明提供了一镀膜设备，其包括：
一镀膜主体，其中所述镀膜主体具有一镀膜腔；和
一尾气过滤装置，其中所述尾气过滤装置包括至少三个过滤单元，以及具有一出气口、一进气口以及一气体通道，所述出气口、所述进气口以及所述气体通道相互连通并且所述进气口连通于所述镀膜主体的所述镀膜腔，其中所述过滤单元具有一过滤入口、一过滤出口以及一过滤腔，一个所述过滤单元的所述过滤入口和所述过滤出口被分别对准于相邻的一个所述过滤单元的所述过滤出口和相邻的另一个所述过滤单元的所述过滤入口并且被可拆卸地横卧在两个所述过滤单元之间，尾气适于被引导自所述进气口进入到一个所述过滤单元并且依次通过多个所述过滤单元，最后通过所述出气口离开所述尾气过滤装置。
附图说明
图1是根据本发明的一较佳实施例的一尾气过滤装置的示意图。
图2是根据本发明的上述尾气过滤装置的剖视示意图。
图3是根据本发明的上述尾气过滤装置的爆破示意图。
图4是根据本发明的上述尾气过滤装置的一个过滤单元的示意图。
图5A和图5B是根据本发明的上述尾气过滤装置的一个过滤单元的更换过程示意图。
图6是根据本发明的另一较佳实施例的所述尾气过滤装置的示意图。
图7是根据本发明的另一较佳实施例的所述尾气过滤装置的示意图。
具体实施方式
以下描述用于揭露本发明以使本领域技术人员能够实现本发明。以下描述中的优选实施例只作为举例，本领域技术人员可以想到其他显而易见的变型。在以下描述中界定的本发明的基本原理可以应用于其他实施方案、变形方案、改进方案、等同方案以及没有背离本发明的精神和范围的其他技术方案。
本领域技术人员应理解的是，在本发明的揭露中，术语“纵向”、“横向”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”、“内”、“外”等指示的方位或位置关系是基于附图所示的方位或位置关系，其仅是为了便于描述本发明和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此上述术语不能理解为对本发明的限制。
可以理解的是，术语“一”应理解为“至少一”或“一个或多个”，即在一个实施例中，一个元件的数量可以为一个，而在另外的实施例中，该元件的数量可以为多个，术语“一”不能理解为对数量的限制。
参考附图1至附图5B所示，根据本发明的一较佳实施例的一尾气过滤装置1和一镀膜设备1000被示意。
所述尾气过滤装置1能够和所述镀膜设备1000的一镀膜主体2被配合使用，所述镀膜设备1000的所述镀膜主体2在工作过程中需要排出尾气，尾气被引导通过所述尾气过滤装置1，以使得经过处理后的尾气适于直接朝向周围环境排出。
所述尾气过滤装置1具有一进气口101和一出气口102，其中所述进气口101被连通于所述镀膜设备1000的一镀膜主体2的一镀膜腔300，所述出气口102被连通于外部环境。所述尾气过滤装置1具有一气体通道100，其中所述进气口101和所述出气口102分别位于两端并且连通所述气体通道100。
所述尾气过滤装置1可以包括一安装壳体10和至少一过滤单元20，其中所述过滤单元20可以被可拆卸地安装于所述安装壳体10，其中所述安装壳体10可以包括一第一安装单元11和一第二安装单元12，其中所述进气口101被设置于所述安装壳体10的所述第二安装单元12，所述出气口102被设置于所述安装壳体10的所述第一安装单元11，其中所述过滤单元20被安装于所述第二安装单元12和所述第一安装单元11之间，所述气体通道 100形成于所述第二安装单元12、所述第一安装单元11和所述过滤单元20。来自于所述反应腔室的尾气依次通过所述进气口101、所述第二安装单元12、所述过滤单元20、所述第一安装单元11以及所述出气口102。
一个所述过滤单元20被可拆卸地安装于所述第二安装单元12，一个所述过滤单元20被可拆卸地安装于所述第一安装单元11，以使得当所述过滤单元20需要被更换时，直接自所述第二安装单元12和/或所述第一安装单元11拆卸所述过滤单元20即可。
详细地说，所述过滤单元20具有一第一安装侧和一第二安装侧，当所述过滤单元20的数目是一个时，所述第二安装单元12被设置于所述过滤单元20的所述第一安装侧一侧，所述第一安装单元11被设置于同一个所述过滤单元20的所述第二安装侧一侧。当所述过滤单元20的数目是两个或者是更多个时，所述第二安装单元12被设置于一个所述过滤单元20的所述第一安装侧的一侧，所述第一安装单元11被设置于另一个所述过滤单元20的所述第二安装侧的一侧。所述过滤单元20的所述第一安装侧和所述第二安装侧可以是相对的两侧，也可以是相邻的两侧。
所述过滤单元20被横卧在所述第二安装单元12和所述第一安装单元11之间，尾气沿着所述过滤单元20的所述第一安装侧朝向所述第二安装侧被引导以通过所述过滤单元20被过滤。
通过这样的方式，尾气能够通过所述过滤单元20的横截面积较大的位置，以有利于提高所述尾气过滤装置1的工作效率。
更详细地说，所述过滤单元20包括一侧围壁21和具有一过滤腔200，其中所述侧围壁21围绕形成所述过滤腔200，其中所述侧围壁21具有一高端211和一低端212，其中所述第一安装侧位于所述侧围壁21的所述高端211，所述第二安装侧位于所述侧围壁21的所述低端212。所述过滤单元20进一步包括一滤材22，其中所述滤材22被设置于所述侧围壁21并且位于所述过滤腔200，所述滤材22的类型可以根据需求被选择，可以但是并不限制于活性炭滤材22或者是氧化铝滤材22等。
当所述过滤单元20的数目是两个或者是更多个时，相邻的所述过滤单元20可以被相互可拆卸地安装，以方便其中一个所述过滤单元20需要被更换时，可以被方便地更换。换句话说，当所述过滤单元20的数目是两个或者是多个时，所有的所述过滤单元20可以被整体拆卸以更换，也可以是，单个拆除预期的所述过滤单元20。
被邻近地安装于所述第二安装单元12或者所述第一安装单元11的所述过滤单元20也被可拆卸地安装于所述第二安装单元12或者是所述第一安装单元11以方便更换。详细地 说，所述尾气过滤装置1进一步包括至少一安装组件30，所述安装组件30适于连接于所述第二安装单元12和所述过滤单元20，或者是一个所述过滤单元20和相邻的所述过滤单元20，或者所述第一安装单元11和所述过滤单元20。所述安装组件30包括一安装件31和一安装配件32，其中所述安装件31被可拆卸地安装于所述安装配件32，所述安装件31或者是所述安装配件32适于被安装于所述第二安装单元12，所述安装配件32或者是所述安装件31适于被安装于所述第一安装单元11，以使得分别安装所述安装件31和所述安装配件32的两个组件之间能够被可拆卸地安装。
所述安装组件30的所述安装件31或者是所述安装配件32可以被设在所述过滤单元20的所述侧围壁21的周沿位置或者是所述侧围壁21，或者是所述第二安装单元12和所述第一安装单元11的周沿位置或者是其侧壁。当所述过滤单元20被安装于另一个所述过滤单元20，相对设置的所述安装件31可以被安装于所述安装配件32以限位两个所述过滤单元20，以避免两个所述过滤单元20相互脱开。或者是，当所述过滤单元20被安装于所述第二安装单元12，相对设置的所述安装件31可以被安装于所述安装配件32以限位所述过滤单元20和所述第二安装单元12，以使得所述过滤单元20和所述第二安装单元12被稳固地安装连接。或者是，当所述过滤单元20被安装于所述第一安装单元11，相对设置的所述安装件31可以被安装于所述安装配件32以限位所述过滤单元20和所述第一安装单元11，以使得所述过滤单元20和所述第一安装单元11被稳固地安装连接。
所述安装组件30的所述安装件31和所述安装配件32可以被设置为可相互匹配的卡扣形式，所述安装件31和所述安装配件32的数目可以是多个，并且种类可以是不同的。
在本实施例中，一种类型的所述安装件31和所述安装配件32被实施为固定座和可翻转的卡扣，当所述安装件31和所述安装配件32需要被拆卸时，朝远离所述固定座的方向翻转所述卡扣以使得所述固定座和所述卡扣相互分离，当所述安装件31和所述安装配件32需要固定连接时，朝向所述固定座的方向翻转所述卡扣以使得所述卡扣扣合于所述固定座。另一种类型的所述安装件31和所述安装配件32被分别实施为固定座和挂钩，当所述安装件31和所述安装配件32沿着既定方向相向移动以使得挂钩卡合于固定座后，安装有所述安装件31的所述过滤单元20和安装有所述安装配件32的所述过滤单元20可以相互锁定，当所述安装件31和所述安装配件32沿着既定方向相背移动以使得所述挂钩脱离固定座后，安装有所述安装件31的所述过滤单元20和安装有所述安装配件32的所述过滤单元20可以相互解锁。
在本实施例中，上述两种类型的所述安装件31和所述安装配件32均被使用，以两个 所述过滤单元20的安装为例进行说明。当一个所述过滤单元20位于另一个所述过滤单元20的下方，并且两个所述过滤单元20相互错位，一个所述安装件31可以位于一个所述过滤单元20的所述第二安装侧，一个所述安装配件32可以位于另一个所述过滤单元20的所述第一安装侧，所述安装件31和所述安装配件32能够被相互对准，以使得两个所述过滤单元20相互对准的过程中，所述安装件31可以被卡合于所述安装配件32。当两个所述过滤单元20相互对准之后，位于一个所述过滤单元20的侧部的被实施为可翻转的卡扣的所述安装配件32被翻转至卡合于位于另一个所述过滤单元20的侧部的所述安装件31。
进一步地，为了使得两个所述过滤单元20之间的安装更加稳固，或者是一个所述过滤单元20和所述第二安装单元12之间的安装更加稳固，或者是一个所述过滤单元20和所述第一安装单元11之间的安装更加稳固。
所述安装组件30还可以包括另一组所述安装件31和所述安装配件32，其中所述安装件31可以被实施为一个螺栓，所述安装配件32被实施为一个安装孔，在一个所述过滤单元20被对准安装于另一个所述过滤单元20之后，或者是在所述过滤单元20被对准安装于所述第二安装单元12或者所述第一安装单元11之后，螺接所述安装件31和所述安装配件32以紧固相邻的所述过滤单元20或者是紧固所述过滤单元20和所述第二安装单元12，或者是所述第一安装单元11。
进一步地，所述尾气过滤装置1的所述第二安装单元12和/或所述第一安装单元11可以被固定设置于所述镀膜设备1000，以使得所述过滤单元20通过所述第二安装单元12和/或所述第一安装单元11之间的安装就可以被安装于所述镀膜设备1000。
所述第一安装单元11可以位于所述第二安装单元12的下方，所述进气口101位于所述第一安装单元11一侧，所述出气口102位于所述第二安装单元12一侧。所述气体通道100自所述进气口101自下而上延伸至所述出气口102位置。
进一步地，所述尾气过滤装置1可以包括一监测单元40，其中所述监测单元40可以用于监测所述过滤单元20的有效性。所述监测单元40可以被设置于所述过滤单元20的后方，以使得尾气经过所述过滤单元20的处理之后再经过所述监测单元40。
所述监测单元40可以包括至少一检测模块41和至少一指示模块42，其中所述检测模块41被设置于气体通道100并且位于所述过滤单元20的后方，以使得尾气在经过所述过滤单元20的过滤之后通过所述检测模块41。所述检测模块41用于检测尾气中的特定物质。当所述检测模块41检测到的尾气中的特定物质超过一定数量时，所述指示模块42可以发出指示。所述检测模块41和所述指示模块42可以是同一个物质，比如说一类可和尾气中 的特定物质发生化学反应并且通过变色的方式来指示的试剂。
举例说明，一个所述过滤单元20用于过滤尾气中的有害气体A，经过所述过滤单元20的过滤之后，尾气中的有害气体A已经被去除或者是低于一定的含量。然而，如果经过所述检测模块41位置检测到了有害气体A或者是超过一定含量的有害气体A，所述指示模块42给出了相关指示，那么说明对应的所述过滤单元20内的滤材22已经失效，需要更换。
可以理解的是，所述检测模块41和所述指示模块42的数目可以根据需求被设定，比如说当所述过滤单元20的数目是两个或者是更多个，并且所述过滤单元20内的滤材22并不相同时，一个所述检测模块41和一个所述指示模块42可以用于指示对应的所述过滤单元20是否失效。
另外，在本实施例中，所述检测模块41被设置于所述出气口102位置，过滤后的尾气经过所述检测模块41之后就被朝外排放。通过这样的方式，所述过滤单元20相对于所述第二安装单元12或者所述第一安装单元11的拆装并不影响到所述检测模块41和所述指示模块42。可以理解的是，所述检测模块41和所述指示模块42也可以分别被可拆卸地安装于所述出气口102位置，以方便所述检测模块41和所述指示模块42的更换。
进一步地，用户可以通过直接观察所述监测单元40就知道是否需要更换所述过滤单元20，也可以是所述监测单元40是一个可通讯设备，可以发送信息至其他的电子设备，比如说生产管理设备，移动电子设备等以提示用户及时地更换设备。
可选地，所述监测单元40还可以包括一处理模块43，其中所述检测模块41被可通信地连接于所述处理模块43，所述指示模块42可以被可通信地连接于所述处理模块43。
所述处理模块43基于所述检测模块41检测到数据，能够预先判断对于所述过滤单元20即将失效。所述指示模块42能够提前发出指示，以减少不符合环境保护要求的尾气被朝外排放的可能性。
举例说明，基于所述检测模块41检测到的数据，在9点10分到9点20分，尾气中不符合环保要求的某种物质的数量增加了10％，在9点20分至9点30分，尾气中不符合环保要求的某种物质的数量增加了50％，按照这一个增长规律，在9点40分的时候其含量极大可能已经超过预设数值，所述处理模块43发送指令至所述指示模块42，所述指示模块42可以在9点40分之前提前发出提示。
在本实施例中，所述监测单元40被实施包括经过特殊化学试剂处理的氧化铝，通过颜色变化来指示所述过滤单元20中的滤材22是否失效。所述监测单元40可以形成一个 观察窗44，以使得用户通过所述观察窗44可以观察到所述监测单元40内部的氧化铝的颜色变化。
进一步地，所述第一安装单元11形成一第一容纳腔110，所述第一容纳腔110连通于所述过滤单元20的所述过滤腔200和所述出气口102，通过所述过滤单元20的尾气在所述第一安装单元11汇聚之后通过所述出气口102离开所述第一安装单元11，然后通过所述检测模块41和所述指示模块42。
所述第二安装单元12形成一第二容纳腔120，其中所述第二容纳腔120连通于所述过滤单元20的所述过滤腔200和所述进气口101，来自于所述进气口101的尾气在所述第二安装单元12的所述第二容纳腔120位置汇聚并且朝上进入到所述过滤单元20。
所述尾气过滤装置1具有一出液口103，其中所述出液口103被设置于所述第二安装单元12并且位于所述第二安装单元12的一个较低位置，以使得凝聚于所述第二安装单元12的内壁或者是位于所述第二安装单元12上方的所述过滤单元20的液体能够通过所述出液口103排出，避免汇集在所述第二安装单元12，以影响到尾气的通行。
可以理解的是，来自于所述镀膜设备1000的尾气的温度和所述尾气过滤装置1所处的环境温度相比，可能处于一个较高的水平，因此当尾气中存在水分时，遇到所述第二安装单元12的内壁或者是所述过滤单元20，将会凝集成为液体，并且在重力作用下朝向所述出液口103位置移动。所述出液口103被设置为可打开的，或者是可关闭的，比如说可以被设置有一个阀门，以定期排出冷凝液。
进一步地，为了保证相互可拆卸的相邻的两个所述过滤单元20之间的连接的密封性，防止尾气外泄，或者是为了保证所述过滤单元20和所述第二安装单元12之间的连接的密封性，或者是为了保持所述过滤单元20和所述第一安装单元11之间的连接的密封性，所述尾气过滤装置1进一步包括至少一密封圈50，其中所述密封圈50被设置于所述过滤单元20和所述过滤单元20之间，或者是所述过滤单元20和所述第二安装单元12之间，或者是所述过滤单元20和所述第一安装单元11之间。所述密封圈50可以是被可拆卸地安装。所述密封圈50被设置于所述过滤单元20和所述过滤单元20的连接边缘位置，或者是所述过滤单元20和所述第二安装单元12的连接边缘位置，或者是所述过滤单元20和所述第一安装单元11的连接边缘位置。
详细地说，所述过滤单元20具有一过滤入口201和一过滤出口202，其中所述过滤入口201和所述过滤出口202分别位于所述过滤腔200两侧并且连通于所述过滤腔200，其中所述密封圈50被设置于形成所述过滤入口201的所述侧围壁21位置或者是形成所述过 滤出口202的所述侧围壁21位置。所述第一安装单元11被设置于所述过滤单元20的所述过滤出口202一侧，所述第二安装单元12被设置于所述过滤单元20的所述过滤入口201一侧。
所述过滤单元20的横截面可以但是并不限制于一矩形、一圆形、一多边形。一个所述过滤单元20的所述过滤入口201的形状和另一个所述过滤单元20的所述过滤出口202的形状相互匹配以有利于两者之间的密封性。或者是，一个所述过滤单元20的所述过滤出口202的形状和所述第一安装单元11的一安装开口1101的形状相互匹配以有利于两者之间的密封性。或者是，一个所述过滤单元20的所述过滤入口201的形状和所述第二安装单元12的一安装开口1201的形状相互匹配以有利于两者之间的密封性。
所述尾气过滤装置1还可以包括一进气管60和一出气管70，其中所述进气管60和所述出气管70被分别设置于所述进气口101位置和所述出气口102位置，所述进气管60适于连通于所述镀膜设备1000和所述第二安装单元12，所述出气管70适于连通于外部排放设备和所述第一安装单元11。
所述尾气过滤装置1还可以包括一波纹管80，其中所述波纹管80被设置于所述进气管60和所述第二安装单元12之间，尾气通过所述进气管60和所述波纹管80自上而下被运输至所述进气口101位置，然后自下而上通过所述过滤单元20之后以被过滤，然后通过所述出气管70离开。
在本实施例中，所述过滤单元20的数目是三个，自上而下分别被实施为一氧化铝式过滤箱、一活性炭过滤箱以及一蜂窝活性炭过滤箱，也就是说，尾气依次通过所述蜂窝活性炭过滤箱，所述活性炭过滤箱以及所述氧化铝式过滤箱。进一步地，所述滤材22还可以包括活性碳海绵，被设置于所述过滤单元20的所述过滤入口201和所述过滤出口202位置，一方面可以阻止颗粒较大的污染物进入到所述过滤腔200，另一方面可以阻止颗粒较大的污染物离开所述过滤腔200。
所述过滤单元20进一步包括至少一载板23，其中载板23被支撑于所述侧围壁21并且被设置为镂空的，以使得尾气能够顺利通过，滤材22可以被支持于所述载板23。可以理解的是，滤材22的种类和构造可以根据需求被选择。同一个所述过滤单元20内的滤材22的种类可以是不同的，滤材22内部可以形成有间隙以方便尾气通过。
参考附图6所示，是根据本发明的另一较佳实施例的所述尾气过滤装置1被示意。
在本实施例中，所述尾气过滤装置1的所述安装组件30被实施为挂钩式，以两个所述过滤单元20之间的安装为例进行说明，一个所述过滤单元20的形成所述过滤入口201 部分的所述侧围壁21朝外延伸形成所述固定座以作为所述安装组件30的所述安装件31，另一个所述过滤单元20在所述过滤出口202附近被设置有所述安装配件32。直接将所述安装配件32挂持于所述安装件31就可以实现两个所述过滤单元20的安装。
详细地说，对准一个所述过滤单元20的所述过滤入口201于另一个所述过滤单元20的所述过滤出口202，并且逐渐对齐所述安装件31和所述安装配件32以使得在所述过滤入口201位置贴合于所述过滤出口202位置时所述安装件31挂持于所述安装配件32。
参考附图7所示，是根据本发明的另一较佳实施例的所述尾气过滤装置1被示意。
在上述实施例中，所述尾气过滤装置1中的所述安装壳体10和所述过滤单元20被设置于同一个方向，比如说竖直方向。所述安装壳体10的所述第二安装单元12和所述第一安装单元11分别位于所述过滤单元20的相对的所述第一安装侧和所述第二安装侧。
在本实施例中，所述尾气过滤装置1中的所述安装壳体10的所述第二安装单元12和所述第一安装单元11分别位于所述过滤单元20的相邻两侧。所述安装壳体10和所述过滤单元20的相对位置或者是多个所述过滤单元20的相对位置可以根据所述气体流道100的需求被布置。
可以理解的是，所述过滤单元20可以直接连接于所述进气管60和所述出气管70，也就是说，所述尾气过滤装置1可以不包括所述安装壳体10。举例说明，所述过滤单元20的数目可以是三个，位于中间的所述过滤单元20被分别可拆卸地连接于相邻的两个所述过滤单元20，以使得其可被更换。
本领域的技术人员应理解，上述描述及附图中所示的本发明的实施例只作为举例而并不限制本发明。本发明的目的已经完整并有效地实现。本发明的功能及结构原理已在实施例中展示和说明，在没有背离所述原理下，本发明的实施方式可以有任何变形或修改。

Claims (20)

  1. 一尾气过滤装置，其特征在于，包括：
    一第一安装单元；
    一第二安装单元；
    至少一过滤单元，以及具有一出气口、一进气口以及一气体通道，其中所述第二安装单元被连通于所述进气口，所述第一安装单元被连通于所述出气口，所述过滤单元位于所述第二安装单元和所述第一安装单元之间并且所述第二安装单元和所述第一安装单元被分别可拆卸地安装于所述过滤单元，其中一个所述过滤单元具有一第一安装侧和一第二安装侧，其中所述第二安装单元位于所述第一安装侧，所述第一安装单元位于第二安装侧，尾气适于被引导自所述进气口进入到所述第二安装单元然后自所述第一安装侧通过所述过滤单元并且朝向所述第二安装侧移动，最后依次通过所述第一安装单元和所述出气口离开所述尾气过滤装置。
  2. 根据权利要求1所述的尾气过滤装置，其中所述过滤单元具有一过滤入口和一过滤出口，所述第一安装单元具有一安装开口，其中所述尾气过滤装置进一步包括一安装组件，所述安装组件包括一安装件和一安装配件，所述安装件被设置于所述第一安装单元，所述安装配件被设置于所述过滤单元，藉由所述安装件和所述安装配件的可拆卸连接，所述过滤单元和所述第一安装单元被以所述过滤出口对准于所述第一安装单元的所述安装开口的方式可拆卸地安装。
  3. 根据权利要求1所述的尾气过滤装置，其中所述过滤单元的数目是至少两个，每一个所述过滤单元具有一过滤入口和一过滤出口，其中所述尾气过滤装置进一步包括一安装组件，所述安装组件包括一安装件和一安装配件，所述安装件被设置于一个所述过滤单元，所述安装配件被设置于相邻的一个所述过滤单元，藉由所述安装件和所述安装配件的可拆卸连接，相邻的两个所述过滤单元被以所述过滤入口对准所述过滤出口的方式可拆卸地安装。
  4. 根据权利要求2或3所述的尾气过滤装置，其中所述安装件被实施为挂钩，所述安装配件被设置为自所述过滤单元的形成所述过滤出口的周沿位置朝外延伸形成的固定座，所述安装件适于被可拆卸地挂持于所述固定座；或者是，其中所述安装件被实施为螺钉，所述安装配件被实施为安装孔，所述安装件适于被可拆卸地螺接于所述安装配件；或 者是，其中所述安装件被实施为可翻转卡扣，所述安装配件被设置为固定座，所述安装件适于被可拆卸地扣合于所述固定座。
  5. 根据权利要求1至3任一所述的尾气过滤装置，其中所述尾气过滤装置进一步包括一监测单元，其中所述监测单元被连通于所述气体通道并且被设置于所述过滤单元的后方以使得尾气先通过所述过滤单元然后经过所述监测单元。
  6. 根据权利要求5所述的尾气过滤装置，其中所述监测单元被设置有一个观察窗并且包括一指示模块，藉由所述观察窗观察所述指示模块是否失效以判断所述过滤单元是否需要更换。
  7. 根据权利要求5所述的尾气过滤装置，其中所述监测单元包括一检测模块、一指示模块以及一处理模块，其中所述处理模块被分别可通信地连接于所述检测模块和所述指示模块，所述检测模块用于检测经过所述过滤单元过滤后的尾气，基于所述检测模块的检测结果，所述处理模块预先得出所述过滤单元的更换时间并且发送信号至所述指示模块，所述指示模块发出指示以提示更换所述过滤单元。
  8. 根据权利要求1至3任一所述的尾气过滤装置，其中所述第二安装单元位于所述第一安装单元下方并且所述第二安装单元形成有一个出液口，所述出液口被配置为在遇冷凝集为液体后能够汇集在所述出液口附近并且适于在所述出液口位置被排出。
  9. 根据权利要求1至3任一所述的尾气过滤装置，其中所述尾气过滤装置包括一密封圈，其中所述密封圈适于被可拆卸安装于所述过滤单元和所述第一安装单元之间以保证所述过滤单元和所述第一安装单元之间的密封性。
  10. 一尾气过滤装置，其特征在于，包括至少三个过滤单元，以及具有一出气口、一进气口以及一气体通道，所述出气口、所述进气口以及所述气体通道相互连通并且所述气体通道形成于所述过滤单元，其中所述过滤单元具有一过滤入口、一过滤出口以及一过滤腔，一个所述过滤单元的所述过滤入口和所述过滤出口被分别对准于相邻的一个所述过滤单元的所述过滤出口和相邻的另一个所述过滤单元的所述过滤入口并且被可拆卸地横卧在两个所述过滤单元之间，尾气适于被引导自所述进气口进入到一个所述过滤单元并且依次通过多个所述过滤单元，最后通过所述出气口离开所述尾气过滤装置。
  11. 一镀膜设备，其特征在于，包括：
    一镀膜主体，其中所述镀膜主体具有一镀膜腔；和
    一尾气过滤装置，其中所述尾气过滤装置包括：
    一第一安装单元；
    一第二安装单元；
    至少一过滤单元，以及具有一出气口、一进气口以及一气体通道，其中所述第二安装单元被连通于所述进气口，所述进气口被连通于所述镀膜主体的所述镀膜腔，所述第一安装单元被连通于所述出气口，所述过滤单元位于所述第一安装单元和所述第二安装单元之间并且所述第一安装单元和所述第二安装单元被分别可拆卸地安装于所述过滤单元，其中一个所述过滤单元具有一第一安装侧和一第二安装侧，其中所述第二安装单元位于所述第一安装侧，所述第一安装单元位于第二安装侧，尾气适于被引导自所述进气口进入到所述第二安装单元然后自所述第一安装侧通过所述过滤单元并且朝向所述第二安装侧移动，最后依次通过所述第一安装单元和所述出气口离开所述尾气过滤装置。
  12. 根据权利要求11所述的镀膜设备，其中所述过滤单元具有一过滤入口和一过滤出口，所述第一安装单元具有一安装开口，其中所述尾气过滤装置进一步包括一安装组件，所述安装组件包括一安装件和一安装配件，所述安装件被设置于所述第一安装单元，所述安装配件被设置于所述过滤单元，藉由所述安装件和所述安装配件的可拆卸连接，所述过滤单元和所述第一安装单元被以所述过滤出口对准于所述第一安装单元的所述安装开口的方式可拆卸地安装。
  13. 根据权利要求11所述的镀膜设备，其中所述过滤单元的数目是至少两个，每一个所述过滤单元具有一过滤入口和一过滤出口，其中所述尾气过滤装置进一步包括一安装组件，所述安装组件包括一安装件和一安装配件，所述安装件被设置于一个所述过滤单元，所述安装配件被设置于相邻的一个所述过滤单元，藉由所述安装件和所述安装配件的可拆卸连接，相邻的两个所述过滤单元被以所述过滤入口对准所述过滤出口的方式可拆卸地安装。
  14. 根据权利要求12或13所述的镀膜设备，其中所述安装件被实施为挂钩，所述安装配件被设置为自所述过滤单元的形成所述过滤出口的周沿位置朝外延伸形成的固定座，所述安装件适于被可拆卸地挂持于所述固定座；或者是，其中所述安装件被实施为螺钉，所述安装配件被实施为安装孔，所述安装件适于被可拆卸地螺接于所述安装配件；或者是，其中所述安装件被实施为可翻转卡扣，所述安装配件被设置为固定座，所述安装件适于被可拆卸地扣合于所述固定座。
  15. 根据权利要求11至13任一所述的镀膜设备，其中所述尾气过滤装置进一步包括 一监测单元，其中所述监测单元被连通于所述气体通道并且被设置于所述过滤单元的后方以使得尾气先通过所述过滤单元然后经过所述监测单元。
  16. 根据权利要求15所述的镀膜设备，其中所述监测单元被设置有一个观察窗并且包括一指示模块，藉由所述观察窗观察所述指示模块是否失效以判断所述过滤单元是否需要更换。
  17. 根据权利要求15所述的镀膜设备，其中所述监测单元包括一检测模块、一指示模块以及一处理模块，其中所述处理模块被分别可通信地连接于所述检测模块和所述指示模块，所述检测模块用于检测经过所述过滤单元过滤后的尾气，基于所述检测模块的检测结果，所述处理模块预先得出所述过滤单元的更换时间并且发送信号至所述指示模块，所述指示模块发出指示以提示更换所述过滤单元。
  18. 根据权利要求11至13任一所述的镀膜设备，其中所述第二安装单元位于所述第一安装单元下方并且所述第二安装单元形成有一个出液口，所述出液口被配置为在遇冷凝集为液体后能够汇集在所述出液口附近并且适于在所述出液口位置被排出。
  19. 根据权利要求11至13任一所述的镀膜设备，其中所述尾气过滤装置包括一密封圈，其中所述密封圈适于被可拆卸安装于所述过滤单元和所述第一安装单元之间以保证所述过滤单元和所述第一安装单元之间的密封性。
  20. 一镀膜设备，其特征在于，包括：
    一镀膜主体，其中所述镀膜主体具有一镀膜腔；和
    一尾气过滤装置，其中所述尾气过滤装置包括至少三个过滤单元，以及具有一出气口、一进气口以及一气体通道，所述出气口、所述进气口以及所述气体通道相互连通并且所述进气口连通于所述镀膜主体的所述镀膜腔，其中所述过滤单元具有一过滤入口、一过滤出口以及一过滤腔，一个所述过滤单元的所述过滤入口和所述过滤出口被分别对准于相邻的一个所述过滤单元的所述过滤出口和相邻的另一个所述过滤单元的所述过滤入口并且被可拆卸地横卧在两个所述过滤单元之间，尾气适于被引导自所述进气口进入到一个所述过滤单元并且依次通过多个所述过滤单元，最后通过所述出气口离开所述尾气过滤装置。
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CN112843976A (zh) 2021-05-28
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EP4268931A1 (en) 2023-11-01
US20240035156A1 (en) 2024-02-01

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