WO2022130800A1 - ウェーハの研磨方法およびウェーハの製造方法 - Google Patents
ウェーハの研磨方法およびウェーハの製造方法 Download PDFInfo
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- WO2022130800A1 WO2022130800A1 PCT/JP2021/039884 JP2021039884W WO2022130800A1 WO 2022130800 A1 WO2022130800 A1 WO 2022130800A1 JP 2021039884 W JP2021039884 W JP 2021039884W WO 2022130800 A1 WO2022130800 A1 WO 2022130800A1
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- Prior art keywords
- polishing
- wafer
- polishing rate
- rate
- ratio
- Prior art date
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- 238000005498 polishing Methods 0.000 title claims abstract description 339
- 238000000034 method Methods 0.000 title claims abstract description 44
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 10
- 239000000126 substance Substances 0.000 claims abstract description 57
- 239000003513 alkali Substances 0.000 claims abstract description 12
- 238000007517 polishing process Methods 0.000 claims abstract description 4
- 239000007788 liquid Substances 0.000 claims description 79
- 239000006061 abrasive grain Substances 0.000 claims description 43
- 230000008569 process Effects 0.000 claims description 4
- 239000013078 crystal Substances 0.000 claims description 2
- 239000002245 particle Substances 0.000 abstract description 23
- 235000012431 wafers Nutrition 0.000 description 128
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 31
- 229910052710 silicon Inorganic materials 0.000 description 30
- 239000010703 silicon Substances 0.000 description 29
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 16
- 238000010586 diagram Methods 0.000 description 13
- 230000009471 action Effects 0.000 description 12
- 230000008859 change Effects 0.000 description 12
- 230000002093 peripheral effect Effects 0.000 description 11
- 230000000052 comparative effect Effects 0.000 description 9
- 238000012417 linear regression Methods 0.000 description 6
- 238000012360 testing method Methods 0.000 description 6
- 239000000377 silicon dioxide Substances 0.000 description 5
- 238000009826 distribution Methods 0.000 description 4
- NAQMVNRVTILPCV-UHFFFAOYSA-N hexane-1,6-diamine Chemical compound NCCCCCCN NAQMVNRVTILPCV-UHFFFAOYSA-N 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 238000007665 sagging Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 3
- RPNUMPOLZDHAAY-UHFFFAOYSA-N Diethylenetriamine Chemical compound NCCNCCN RPNUMPOLZDHAAY-UHFFFAOYSA-N 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000003028 elevating effect Effects 0.000 description 3
- 239000004744 fabric Substances 0.000 description 3
- 230000033001 locomotion Effects 0.000 description 3
- PVOAHINGSUIXLS-UHFFFAOYSA-N 1-Methylpiperazine Chemical compound CN1CCNCC1 PVOAHINGSUIXLS-UHFFFAOYSA-N 0.000 description 2
- VILCJCGEZXAXTO-UHFFFAOYSA-N 2,2,2-tetramine Chemical compound NCCNCCNCCN VILCJCGEZXAXTO-UHFFFAOYSA-N 0.000 description 2
- ATRRKUHOCOJYRX-UHFFFAOYSA-N Ammonium bicarbonate Chemical compound [NH4+].OC([O-])=O ATRRKUHOCOJYRX-UHFFFAOYSA-N 0.000 description 2
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- ROSDSFDQCJNGOL-UHFFFAOYSA-N Dimethylamine Chemical compound CNC ROSDSFDQCJNGOL-UHFFFAOYSA-N 0.000 description 2
- QUSNBJAOOMFDIB-UHFFFAOYSA-N Ethylamine Chemical compound CCN QUSNBJAOOMFDIB-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- BAVYZALUXZFZLV-UHFFFAOYSA-N Methylamine Chemical compound NC BAVYZALUXZFZLV-UHFFFAOYSA-N 0.000 description 2
- UIIMBOGNXHQVGW-UHFFFAOYSA-M Sodium bicarbonate Chemical compound [Na+].OC([O-])=O UIIMBOGNXHQVGW-UHFFFAOYSA-M 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- IMUDHTPIFIBORV-UHFFFAOYSA-N aminoethylpiperazine Chemical compound NCCN1CCNCC1 IMUDHTPIFIBORV-UHFFFAOYSA-N 0.000 description 2
- 239000001099 ammonium carbonate Substances 0.000 description 2
- AYJRCSIUFZENHW-UHFFFAOYSA-L barium carbonate Chemical compound [Ba+2].[O-]C([O-])=O AYJRCSIUFZENHW-UHFFFAOYSA-L 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 2
- 239000010954 inorganic particle Substances 0.000 description 2
- NUJOXMJBOLGQSY-UHFFFAOYSA-N manganese dioxide Chemical compound O=[Mn]=O NUJOXMJBOLGQSY-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000011146 organic particle Substances 0.000 description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 2
- 239000004926 polymethyl methacrylate Substances 0.000 description 2
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 2
- 238000004513 sizing Methods 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L sodium carbonate Substances [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 2
- GETQZCLCWQTVFV-UHFFFAOYSA-N trimethylamine Chemical compound CN(C)C GETQZCLCWQTVFV-UHFFFAOYSA-N 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- -1 β-aminoethyl Chemical group 0.000 description 2
- HXMVNCMPQGPRLN-UHFFFAOYSA-N 2-hydroxyputrescine Chemical compound NCCC(O)CN HXMVNCMPQGPRLN-UHFFFAOYSA-N 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 1
- 229910000013 Ammonium bicarbonate Inorganic materials 0.000 description 1
- 229910052580 B4C Inorganic materials 0.000 description 1
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 229920002845 Poly(methacrylic acid) Polymers 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- LHIJANUOQQMGNT-UHFFFAOYSA-N aminoethylethanolamine Chemical compound NCCNCCO LHIJANUOQQMGNT-UHFFFAOYSA-N 0.000 description 1
- 235000012538 ammonium bicarbonate Nutrition 0.000 description 1
- 235000012501 ammonium carbonate Nutrition 0.000 description 1
- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 229910000420 cerium oxide Inorganic materials 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 229910000423 chromium oxide Inorganic materials 0.000 description 1
- 239000008119 colloidal silica Substances 0.000 description 1
- 239000011246 composite particle Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- HPNMFZURTQLUMO-UHFFFAOYSA-N diethylamine Chemical compound CCNCC HPNMFZURTQLUMO-UHFFFAOYSA-N 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 229910021485 fumed silica Inorganic materials 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 229960003506 piperazine hexahydrate Drugs 0.000 description 1
- AVRVZRUEXIEGMP-UHFFFAOYSA-N piperazine;hexahydrate Chemical compound O.O.O.O.O.O.C1CNCCN1 AVRVZRUEXIEGMP-UHFFFAOYSA-N 0.000 description 1
- 229920002239 polyacrylonitrile Polymers 0.000 description 1
- 239000011736 potassium bicarbonate Substances 0.000 description 1
- 229910000028 potassium bicarbonate Inorganic materials 0.000 description 1
- 235000015497 potassium bicarbonate Nutrition 0.000 description 1
- 229910000027 potassium carbonate Inorganic materials 0.000 description 1
- 235000011181 potassium carbonates Nutrition 0.000 description 1
- TYJJADVDDVDEDZ-UHFFFAOYSA-M potassium hydrogencarbonate Chemical compound [K+].OC([O-])=O TYJJADVDDVDEDZ-UHFFFAOYSA-M 0.000 description 1
- 229940086066 potassium hydrogencarbonate Drugs 0.000 description 1
- 235000011118 potassium hydroxide Nutrition 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011002 quantification Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910000030 sodium bicarbonate Inorganic materials 0.000 description 1
- 235000017557 sodium bicarbonate Nutrition 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 235000017550 sodium carbonate Nutrition 0.000 description 1
- 235000011121 sodium hydroxide Nutrition 0.000 description 1
- 239000012798 spherical particle Substances 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
- H01L21/02005—Preparing bulk and homogeneous wafers
- H01L21/02008—Multistep processes
- H01L21/0201—Specific process step
- H01L21/02024—Mirror polishing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30625—With simultaneous mechanical treatment, e.g. mechanico-chemical polishing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/005—Control means for lapping machines or devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
Definitions
- the present disclosure relates to a wafer polishing method and a wafer manufacturing method, and more particularly to a wafer polishing method and a wafer manufacturing method in which the flatness of the wafer is controlled based on the magnitude of the mechanical polishing rate with respect to the chemical polishing rate. ..
- Patent Document 1 a silicon wafer is held in a carrier plate, the wafer is sandwiched between upper and lower platens to which a polishing cloth is attached, and then a polishing liquid is placed between the polishing cloth and the surface of the silicon wafer.
- the carrier plate is revolved and rotated by the sun gear and the internal gear, and the abrasive grains (for example, silica: SiO 2 ) contained in the polishing liquid remain on the surface of the polishing cloth, so that both sides of the silicon wafer are polished.
- a method for polishing both sides of a silicon wafer is disclosed.
- polishing to a state where the thickness of the wafer after polishing is equal to or less than the thickness of the carrier plate is referred to as "fixed size polishing".
- polishing in which the thickness of the wafer after polishing becomes thicker than the thickness of the carrier plate is called “non-standard size polishing”.
- the shape of the wafer after double-sided polishing is a "concave shape" in which the central portion is thin and the outer peripheral portion is thick in the state of non-standard size polishing.
- the concave shape of the "concave shape” tends to be excessively dented, and the carrier plate is heavily worn, which causes a problem that the polishing time is long.
- the gist structure of the present invention is as follows.
- the method of polishing the wafer is The first correlation, which is the correlation between the alkali concentration and the chemical polishing rate, is obtained by using a plurality of polishing solutions having different alkali concentrations, and the abrasive grain concentration is obtained by using a plurality of polishing solutions having different abrasive grain concentrations.
- the process of finding the second correlation which is the correlation between the machine polishing rate and the machine polishing rate.
- a step of calculating the mechanical polishing rate / chemical polishing rate which is the ratio of the mechanical polishing rate to the chemical polishing rate of the plurality of polishing liquids, based on the first correlation and the second correlation.
- the wafer manufacturing method is as follows: after slicing a single crystal ingot grown by the Czochralski method to obtain a pre-polished wafer, the obtained pre-polished wafer is subjected to the above-mentioned wafer polishing method. Apply polishing treatment.
- the present invention it is possible to provide a wafer polishing method and a wafer manufacturing method that can effectively shorten the test time and at the same time accurately control the shape of the wafer.
- terms such as “about” and “approximately” are typically within +/- 20%, preferably within +/- 10%, more preferably within +/- 5% of a given value or range. Within, or within +/- 3%, or within +/- 2%, or within +/- 1%, or within +/- 0.5%.
- the predetermined number shown here is an approximate number, that is, even if there is no description of "about” or “about”, the meaning of "about” or “about” may be included.
- FIGS. 1A and 1B are a schematic perspective view and a cross-sectional view of a main part of the double-sided polishing apparatus 100 used for polishing a wafer.
- the double-sided polishing apparatus 100 as shown in FIGS. 1A and 1B can be used, but the present invention is not limited to this, and in other embodiments, one side is used. Polishing can also be performed using a polishing device.
- FIG. 1A is a schematic perspective view showing the configuration of the double-sided polishing apparatus according to the present embodiment
- FIG. 1B is a cross-sectional view of a main part in FIG. 1A
- the double-sided polishing apparatus 100 includes an upper surface plate 10, a lower surface plate 20, a sun gear 40, an inner gear 50, and a plurality of carrier plates 30.
- a single or a plurality of silicon wafers WF are housed in the carrier plate 30.
- the size of the double-sided polishing device is represented by the diameter of the carrier plate 30, and when the carrier diameter is about 28 inches, it is called Type_28B, and when the carrier diameter is about 20 inches, it is called Type_20B.
- Type_28B the carrier diameter is about 28 inches
- Type_20B when the carrier diameter is about 20 inches
- three wafers (for example, silicon wafers) WF are configured to be housed in one carrier plate 30.
- the double-sided polishing apparatus 100 of Type_28B when the diameter of the silicon wafer WF is 300 mm, it is usual to store three silicon wafers WF in one carrier plate 30.
- the upper surface plate 10 is configured to include an elevating mechanism 110 that brings the upper surface plate 10 closer to and away from the lower surface plate 20.
- the upper surface plate 10 and the lower surface plate 20 are formed in a substantially disk shape, and as shown in FIG. 1B, the lower surface of the upper surface plate 10 comes into contact with the upper surface of the silicon wafer WF when polishing the silicon wafer WF.
- the upper polishing pad 11 is provided.
- the upper surface plate 10 is provided with a plurality of supply holes (not shown) for supplying the polishing liquid 60 and rinsing with pure water at the time of polishing, and the polishing liquid 60 and the pure water are supplied to the upper surface plate 10. It can be supplied between the lower surface plate 20 and the lower surface plate 20.
- the lower surface plate 20 is a disk-shaped body rotatably provided on the pedestal of the double-sided polishing device 100, and the lower polishing pad 21 is provided on the surface of the lower surface plate 20 facing the upper surface plate 10. Then, when polishing, the lower polishing pad 21 comes into contact with the lower surface of the silicon wafer WF.
- the sun gear 40 is provided at substantially the center of the disk of the lower platen 20 so as to rotate independently of the lower platen 20, and a tooth portion that meshes with the carrier plate 30 is formed on the outer peripheral side surface thereof.
- the inner null gear 50 is composed of a ring-shaped body surrounding the lower platen 20, and a tooth portion that meshes with the carrier plate 30 is formed on the inner surface of the ring.
- the rotation shafts of the drive motors are coupled to the rotation centers of the upper surface plate 10, the lower surface plate 20, the sun gear 40, and the inner gear 50, and each drive motor rotates independently. ..
- the carrier plate 30 is made of a disk-shaped body, and a tooth portion that meshes with the sun gear 40 and the inner null gear 50 is formed on the outer peripheral side surface thereof. Further, a single or a plurality of wafer holding holes 31 are formed inside the disk-shaped body, and the silicon wafer WF is housed inside the wafer holding holes 31.
- the double-sided polishing device 100 is a planetary gear type double-sided polishing device capable of causing the carrier plate 30 to perform planetary motions of revolution motion and rotation motion by rotating the sun gear 40 and the inner gear 50.
- a carrier plate 30 is set on the lower surface plate 20
- the silicon wafer WF is stored in the wafer holding hole 31, and then the elevating mechanism 110.
- each drive motor is supplied with the polishing liquid 60 from the supply hole formed in the upper surface plate 10.
- the silicon wafer WF is double-sided polished by driving the silicon wafer.
- the polishing liquid 60 used in the polishing step usually contains alkaline chemicals and abrasive grains, and is a combined action of the chemical polishing action (alkali etching action) by the alkaline chemicals and the mechanical polishing action of the abrasive grains.
- alkali etching action chemical polishing action
- the polishing liquid 60 used in the polishing step usually contains alkaline chemicals and abrasive grains, and is a combined action of the chemical polishing action (alkali etching action) by the alkaline chemicals and the mechanical polishing action of the abrasive grains.
- the hydroxide ion (OH ⁇ ) in the alkaline chemical product chemically acts on the surface of the silicon wafer to form a reaction layer, the silicon atom is removed from the chemical reaction layer by the chemical etching action. Therefore, the effect of the chemical polishing action of this polishing liquid on the surface of the silicon wafer is determined by the hydroxide ion concentration and the heat distribution during polishing.
- the mechanical polishing action is a mechanism in which after the abrasive grains come into contact with the chemical reaction layer on the surface of the silicon wafer, some of the silicon atoms are aggregated on the silica surface and removed.
- the allowance amount of the inner peripheral portion and the outer peripheral portion of the silicon wafer is different, and generally, the allowance amount of the outer peripheral portion is larger.
- alkaline chemicals include inorganic alkaline compounds such as potassium hydroxide, sodium hydroxide, potassium hydrogencarbonate, potassium carbonate, sodium hydrogencarbonate, sodium carbonate and the like; ammonium.
- Ammine salts such as tetramethylammonium hydroxide, ammonium hydrogencarbonate, ammonium carbonate and the like; amines such as methylamine, dimethylamine, trimethylamine, ethylamine, diethylamine, triethylamine, ethylenediamine, monoethanolamine, N- ( ⁇ -aminoethyl).
- Ethanolamine N- ( ⁇ -aminoethyl) ethanolamine, AEEA), hexamethylenediamine (HMDA), diethylenetriamine (diethylenetriamine, DETA), triethylenetetraamine, triethylenetetraamine (triethylenet) ), Piperazine hexahydrate, 1- (2-aminoethyl) piperazine (1- (2-aminoethyl) piperazine, AEPIZ), N-methylpiperazine (MPIZ) and the like.
- the material or property of the abrasive grains is not particularly limited, and may be appropriately selected depending on the purpose of use, the state of use, and the like.
- the abrasive grains include inorganic particles, organic particles, and organic-inorganic composite particles.
- Specific examples of the inorganic particles include oxide particles such as silica particles, aluminum oxide particles, cerium oxide particles, chromium oxide particles, titanium dioxide particles, zirconium oxide particles, magnesium oxide particles, manganese dioxide particles, zinc oxide particles, and red oxidation.
- organic particles include polymethylmethacrylate (PMMA) particles, poly (meth) acrylic acid, polyacrylonitrile, and the like.
- PMMA polymethylmethacrylate
- silica particles include colloidal silica, fumed silica, and precipitated silica. The silica particles may be used alone or in combination of two or more.
- the specific surface area (BET) diameter of the abrasive grains (hereinafter, simply referred to as "BET diameter") is not particularly limited, and is preferably 5 nm or more, and more preferably 10 nm or more from the viewpoint of polishing efficiency.
- the BET diameter is preferably, for example, 15 nm or more, more preferably 20 nm or more, and more than 20 nm from the viewpoint of obtaining a better polishing effect, for example, exhibiting effects such as haze reduction or defect removal. Is the most preferable.
- the shape (outer shape) of the abrasive grains may be spherical or non-spherical.
- non-spherical particles include peanut-shaped, cocoon-shaped, konpeito-shaped, rugby ball-shaped and the like.
- abrasive grains in which a large number of particles are peanut-shaped.
- the wafer polishing method according to the first embodiment of the present disclosure includes the following steps S110 to S140.
- step S110 a plurality of polishing liquids having different alkali concentrations are used to obtain a first correlation which is a correlation between the alkali concentration and the chemical polishing rate, and a plurality of polishing liquids having different abrasive grain concentrations are used.
- the second correlation which is the correlation between the abrasive grain concentration and the mechanical polishing rate.
- a plurality of polishing solutions having different alkali concentrations are used to obtain a polishing rate standard curve showing the relationship between the alkali concentration and the chemical polishing rate, and a plurality of polishing solutions having different abrasive grain concentrations.
- polishing rate standard curve showing the relationship between the abrasive grain concentration and the mechanical polishing rate.
- polishing liquid achieves chemical mechanical polishing by the combined action of both chemical polishing action and mechanical polishing action, it is necessary to obtain the independent acting force of each of the chemical polishing action and the mechanical polishing action.
- polishing is performed using a polishing liquid containing only alkaline chemicals and not containing abrasive grains at different alkaline concentrations, and the respective polishing rates at different alkaline concentrations are obtained.
- polishing is performed using a polishing solution containing a fixed concentration of alkaline chemicals and containing abrasive grains at different abrasive grain concentrations, and the respective polishing rates at different abrasive grain concentrations are obtained. ..
- polishing rate k (polishing coefficient) x p (pressure) x V (relative velocity), P (pressure) and V. (Relative velocity) is affected by the polishing equipment. Therefore, under the condition that P (pressure) and V (relative velocity) are constant, the polishing rate calculation formula of the polishing liquid is as shown in the following (formula 1).
- Equation 1 f ([abrasive grain], [OH- ] ) ⁇ f ([abrasive grain], 0) + f (0, [OH- ] )
- f ([abrasive grain], [OH- ] ) represents the polishing rate
- f ([abrasive grain], 0) represents the mechanical polishing rate
- f (0, [OH- ] ) represents the chemical polishing rate.
- polishing is performed using a polishing solution containing a fixed concentration of alkaline chemicals and containing abrasive grains at different abrasive grain concentrations, and after obtaining the respective polishing rates, the following (Equation 3) is performed by quadratic linear regression. ) Can be obtained.
- Equation 3) f ([abrasive grain], 0) a2 * Y 2 + b2 * Y + C2
- Y represents the abrasive grain concentration
- a2, b2 and C2 are regression coefficients.
- C2 represents f (0, [OH ⁇ ]).
- polishing rate standard curve is calculated by quadratic linear regression, but the present invention is not limited to this, that is, if the person has ordinary knowledge in the art, it is based on the ordinary knowledge in the art. It must be understood that a more ideal polishing rate standard curve can be obtained by selecting a preferred calculation method and performing curve fitting. Examples include polynomial regression such as cubic linear regression, S function, trigonometric function and the like.
- step S120 mechanical polishing, which is the ratio of the mechanical polishing rate of each polishing liquid to the chemical polishing rate, based on the first correlation and the second correlation (in this example, each polishing rate standard curve).
- the ratio of rate / chemical polishing rate (hereinafter, also referred to as M / C ratio) is calculated.
- the formula is as shown in the following (formula 4).
- Equation 4 The index of the magnitude of the mechanical polishing rate with respect to the chemical polishing rate is not limited to the above M / C ratio, but is an index of flatness described later such as M / (C + c) (c is a constant) and M 2 / C. It can be used as various indicators that can be used to determine the relationship with.
- an index of wafer flatness obtained after polishing with each polishing liquid for example, global back surface-reflected ideal plane / Range, GBIR
- GBIR global back surface-reflected ideal plane / Range
- ESFQR ESFQR
- the lower limit of the M / C ratio is preferably 0.70 or more from the viewpoint of bringing the global shape of the wafer closer to the ideal shape. , 0.80 or more is more preferable, 0.85 or more is further preferable, 0.90 or more is more preferable, 0.95 or more is more preferable, and 1.15 or more is the most preferable. Preferably, 1.20 or more is most preferable.
- the upper limit of the M / C ratio is preferably 1.60 or less, more preferably 1.55 or less. It is more preferably 50 or less, further preferably 1.45 or less, and even more preferably 1.40 or less.
- the lower limit of the M / C ratio is 1.00 or more from the viewpoint of bringing the outer peripheral flatness of the wafer closer to slight sagging. It is preferably 1.05 or more, more preferably 1.10 or more, further preferably 1.15 or more, further preferably 1.20 or more, and even more preferably 1.25 or more. Is most preferable, and 1.30 or more is most preferable.
- the upper limit of the M / C ratio is not particularly limited, but is preferably 1.70 or less, more preferably 1.65 or less, still more preferably 1.60 or less, and 1.55. It is more preferably less than or equal to, and even more preferably 1.50 or less.
- GBIR is a backside-based Global Flatness index that can be measured using a wafer flatness measuring instrument, with the backside of the wafer as the reference plane. It is defined as the deviation between the maximum thickness and the minimum thickness of the wafer surface with respect to its reference plane.
- ESFQR is measured using a wafer flatness measuring device, and it is possible to evaluate the ESFQR of the edge of a silicon wafer that has been double-sided polished.
- ESFQR is an evaluation index of the flatness of an edge whose flatness tends to decrease (site flatness), and represents the magnitude of the amount of sagging (edge roll off).
- ESFQR is defined as the difference between the maximum value and the minimum value of the deviation from the reference surface (Site Best Surface), and this reference surface further divides the annular region along the edge of the wafer evenly in the circumferential direction.
- the unit region (site) to be obtained is targeted, and is obtained by the least squares method based on the thickness distribution in the site.
- the above-mentioned wafer flatness index is not limited to GBIR and ESFQR, and may be, for example, an evaluation index for evaluating the flatness of other semiconductors.
- Backshurface-refracted Ideal plane / Range) and the like can be mentioned.
- a first target polishing liquid that satisfies the specific range of the M / C ratio is selected.
- the first correlation and the first correlation and Based on the second correlation in this example, each polishing rate standard curve
- the abrasive grain concentration and the [OH ⁇ ] concentration corresponding to the specific M / C ratio are determined. For example, by adjusting the abrasive grain concentration and the [OH ⁇ ] concentration in the first target polishing liquid, the M / C ratio of the first target polishing liquid is kept within the above-mentioned specific range.
- the wafer is polished using the first target polishing liquid.
- the wafer polishing can be sizing or non-sizing as required.
- the M / C ratio of the first target polishing liquid is within a specific range, the GBIR and ESFQR of the polished wafer can be easily kept within the ideal values, and the wafer can be made into the target shape.
- the ideal shape of a wafer is a shape in which the global shape is slightly concave and the outer peripheral shape is slightly sagging, but the present invention is not limited to this, that is, it is necessary depending on the desired wafer shape.
- a specific range of M / C ratio can be set.
- FIG. 3 shows a flowchart of a wafer polishing method according to the second embodiment of the present disclosure, the same reference numerals are used for the same steps as those in FIG. 2, and the description thereof will be omitted. Please refer to FIG. The difference from FIG. 2 is that the first target polishing liquid is used in two stages to polish the wafer.
- step S151 the GBIR of the wafer is controlled by using the first target polishing liquid in the first step, and the wafer is used by using the first target polishing liquid in the second step.
- the GBIR of the wafer is controlled in the first stage using the target polishing liquid of 1, and the ESFQR of the wafer is controlled in the second stage using the target polishing liquid of the first stage to control the wafer shape more accurately.
- the grinding machines used in the first and second stages may be the same or different. Further, the order of the steps of the first step and the second step is merely an example, and the present invention is not limited to this. That is, first a step of controlling ESFQR is performed, and then a step of controlling GBIR is performed. May be good.
- FIG. 4 shows a flowchart of a wafer polishing method according to the third embodiment of the present disclosure, the same reference numerals are used for the same steps as those in FIG. 2, and the description thereof will be omitted.
- the first target polishing liquid and the second target polishing liquid are selected based on the relationship diagram between the M / C ratio and the wafer flatness index, and the first target is selected in the first stage.
- the GBIR is controlled by using the polishing liquid
- the ESFQR is controlled by using the second target polishing liquid in the second stage.
- a first target polishing liquid that satisfies the specific range of the M / C ratio and a second target polishing liquid that satisfies the specific range of the M / C ratio are selected. Specifically, based on the relationship diagram between the M / C ratio and GBIR or ESFQR, the M / C ratio in a specific range with respect to GBIR can be determined, and the M / C ratio in a specific range with respect to ESFQR can be determined.
- the specific range of the M / C ratio of GBIR and ESFQR may be different, and the first target polishing liquid is adjusted to satisfy the M / C ratio with respect to GBIR based on the determined M / C ratio described above. At the same time, the second target polishing liquid is adjusted so as to satisfy the M / C ratio with respect to ESFQR.
- step S152 the GBIR of the wafer is controlled by using the first target polishing liquid in the first step, and the ESFQR of the wafer is controlled by using the second target polishing liquid in the second step.
- the wafer polished with the first target polishing solution in the first step has a wafer shape satisfying the ideal GBIR, and then the second target polishing solution is used in the second step.
- the polished wafer can have a wafer outer shape that satisfies the ideal ESFQR.
- the grinding machines used in the first and second stages may be the same or different.
- the order of the steps of the first step and the second step is merely an example, and the present invention is not limited to this, that is, first, the step of controlling ESFQR using the second target polishing liquid is performed. , The step of controlling GBIR may be performed using the first target polishing liquid.
- FIG. 5 shows a flowchart of a wafer polishing method according to the fourth embodiment of the present disclosure, the same reference numerals are used for the same steps as those in FIG. 2, and the description thereof will be omitted.
- the first target polishing liquid and the second target polishing liquid are selected based on the relationship diagram between the M / C ratio and the wafer flatness index, and the first target is selected in the first stage.
- the GBIR and ESFQR of the wafer are controlled by using the polishing liquid, and the GBIR and ESFQR are controlled by using the second target polishing liquid in the second stage.
- a first target polishing liquid satisfying a specific range of M / C ratio and a second target polishing liquid satisfying a specific range of M / C ratio are selected. .. Specifically, the M / C ratio in a specific range with respect to GBIR or ESFQR is determined based on the relationship diagram between the M / C ratio and GBIR or ESFQR, and the first M / C ratio is determined based on the above-mentioned determined M / C ratio.
- the second target polishing liquid is adjusted to satisfy the M / C ratio to GBIR and ESFQR.
- the M / C ratios of both the first target polishing liquid and the second target polishing liquid satisfy the specific range of the above M / C ratio, even if the M / C ratios are different from each other. good.
- step S153 the GBIR and ESFQR of the wafer are controlled by using the first target polishing liquid in the first step, and the GBIR and ESFQR of the wafer are controlled by using the second target polishing liquid in the second step.
- the wafer polished with the first target polishing solution in the first step has a wafer shape close to the ideal GBIR and ESFQR, and then the second target polishing solution is applied in the second step. Wafers polished using can have more ideal GBIR and ESFQR wafer perimeter shapes.
- it is preferable to use different polishing machines in the first stage and the second stage but the present invention is not limited to this, and the same polishing machine may be used. However, in this case, two-step polishing is performed.
- a silicon wafer manufactured by a predetermined method was polished using a Type1-28B double-sided grinding machine as shown in FIG. 1.
- the polishing test for processing was performed under non-standard size conditions.
- a polishing liquid containing an alkaline chemical ([OH ⁇ ] concentration 0.00026 mol / L) containing no abrasive grains was supplied for polishing, and the polishing time was set to 60 minutes. The polishing rate was obtained from the polished silicon wafer.
- the silicon wafer was polished under the conditions of each polishing liquid shown in Table 1 by the same method as in Example 1 except for the conditions of the alkaline chemical concentration and the abrasive grain concentration.
- polishing was performed with a polishing liquid containing no abrasive grains and containing an alkaline chemical ([OH ⁇ ] concentrations were 0.00118 and 0.00186 mol / L, respectively). Then, the polishing rate of each polishing liquid was obtained, and the rate of change of the polishing rate of each example was obtained based on the polishing rate of Comparative Example 1.
- polishing is performed with a polishing solution containing a fixed concentration of an alkaline chemical product (0.00186 mol / L) and containing abrasive grains having different concentrations, and the polishing rate of each polishing solution is obtained.
- a polishing solution containing a fixed concentration of an alkaline chemical product (0.00186 mol / L) and containing abrasive grains having different concentrations, and the polishing rate of each polishing solution is obtained.
- rice field silica (SiO 2 ) particles having an average particle size (BET) of 20 to 30 nm were used as examples of the abrasive grains.
- Equation 2 was obtained by quadratic linear regression from the results of each concentration and polishing rate of Examples 1 and 2 and Comparative Example 1. This represents the standard curve of the chemical polishing rate.
- Equation 3 was obtained by quadratic linear regression from the results of each concentration and polishing rate of Examples 3 to 5 and Comparative Example 1. This represents the standard curve of the mechanical polishing rate.
- polishing is performed under each polishing liquid condition shown in Table 2 to obtain the polishing rate of each polishing liquid, and the polishing rates, alkaline chemical concentration, and silica of Examples 3 to 8 and Comparative Example 1 are obtained. Substituting the concentration into the above equation, the M / C ratio of each example was obtained.
- the M / C ratio is preferably in the range of 0.7 or more and 1.4 or less in order to optimize the GBIR of the wafer surface.
- the M / C ratio is 1.0 or more and 1.4 or less.
- the M / C ratio is 1.2, which is in the range of 1.7. It is preferable to do so. Therefore, when GBIR and ESFQR are considered at the same time, it is preferable that the M / C ratio is 1.2 or more and 1.4 or less. Therefore, depending on the specific range of the M / C ratio, the conditions in the predetermined polishing liquid can be easily adjusted, so that the subsequent wafer has a desired wafer shape.
- the same polishing liquid as in Examples 4 and 7 was used as Examples 9 and 10, respectively, and the carrier diameter was set.
- the silicon wafer was polished using a Type_20B double-sided grinding machine having the same configuration and operation as the double-sided grinding machine shown in FIG. 1 except that the thickness was about 20 inches.
- the polishing time was set to 60 minutes.
- the polishing rate was obtained from the polished silicon wafer.
- the GBIR and ESFQR rate of change were determined by the same method as described above. The results are shown in Table 3.
- Double-sided polishing device 10 Upper surface plate 11: Upper surface plate 20: Lower surface plate 21: Lower polishing pad 30: Carrier plate 31: Wafer holding hole 40: Sun gear 50: Internal gear 60: Polishing liquid 110: Elevating mechanism S110, S120, S130, S140, S141, S142, S150, S151, S152, S153: Step WF: Silicon wafer
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Abstract
Description
一実施形態において、ウェーハの研磨方法は、
アルカリ濃度が異なる複数の研磨液を用いて、アルカリ濃度と化学研磨率との相関性である第1の相関性を求め、且つ、砥粒濃度が異なる複数の研磨液を用いて、砥粒濃度と機械研磨率との相関性である第2の相関性を求める工程と、
前記第1の相関性及び前記第2の相関性に基づいて、前記複数の研磨液の、化学研磨率に対する機械研磨率の比率である、機械研磨率/化学研磨率を算出する工程と、
前記化学研磨率に対する機械研磨率の比率とウェーハの平坦度の指標との関係を得ると共に、前記化学研磨率に対する機械研磨率の比率の特定範囲を決定する工程と、
前記第1の相関性および前記第2の相関性に基づいて、前記化学研磨率に対する機械研磨率の比率の特定範囲を満たす第1の目標研磨液を選択する工程と、
前記第1の目標研磨液を用いてウェーハに対し研磨を行う工程と、
を含む。
一実施形態において、ウェーハの製造方法は、チョクラルスキー法で育成した単結晶インゴットをスライスして研磨前ウェーハを得た後、得られた研磨前ウェーハに対して、上記のウェーハの研磨方法により研磨処理を施す。
(式1)
f([砥粒],[OH-])≒f([砥粒],0)+f(0,[OH-])
式中、f([砥粒],[OH-])は研磨率を表し、f([砥粒],0)は機械研磨率を表し、f(0,[OH-])は化学研磨率を表す。本開示のいくつかの実施形態において、砥粒をシリカとすることができると例示しているが、本発明はこれに限定されないということが理解されなければならない。
(式2)
f(0,[OH-])=a1*X2+b1*X+C1
式中、Xは[OH-]濃度を表し、a1、b1およびC1は回帰係数を表す。
さらに、上記(式2)から、化学研磨率を表す標準曲線を求めることができる。
(式3)
f([砥粒],0)=a2*Y2+b2*Y+C2
式中、Yは砥粒濃度を表し、a2、b2およびC2は回帰係数である。[OH-]濃度が一定であるとき、C2はf(0,[OH-])を表す。
つまり、(式3)からf([砥粒],0)=a2*Y2+b2*Y+f(0,[OH-])を導き出すことができる。
さらに、上記(式3)から、機械研磨率を表す標準曲線を求めることができる。
(式4)
なお、化学研磨率に対する機械研磨率の大きさの指標は、上記のM/C比率には限られず、M/(C+c)(cは定数)、M2/C等、後述の平坦度の指標との関係を求め得る様々な指標とすることができる。
(式5)
実施例3~8及び比較例1の各ウェーハの表面を、ウェーハ平坦度測定器(KLA Tecnor社製、Wafersight)を用いて測定し(測定範囲298mm、外周1mm除外)、各ウェーハの厚さおよびGBIRを求めると共に、比較例1のGBIRを基準とし、各実施例3~8のGBIR変化率を求め、かつGBIR変化率とM/C比率との関係図を作成した。その結果は図7に示すとおりである。
実施例3~8および比較例1の各ウェーハを、ウェーハ平坦度測定器(KLA Tecnor社製、Wafersight)を用い、測定範囲298mm(外周1mm除外)で、ESFQR(角度5度×長さ35mm)を測定し、比較例1のESFQRを基準とし、各実施例3~8のESFQR変化率を求め、かつESFQR変化率とM/C比率との関係図を作成した。その結果は図8に示すとおりである。
で表される化学研磨率のCは一定である。よって、Type_28BとType_20B両面研磨機の差異は、機械研磨率のMの数値変化のみにあると認められる。故に、この結果から、実施例9、10のM/C比率を下記(式6)により推定することができる。
(式6)
10:上定盤
11:上研磨パッド
20:下定盤
21:下研磨パッド
30:キャリアプレート
31:ウェーハ保持孔
40:サンギア
50:インターナルギア
60:研磨液
110:昇降機構
S110、S120、S130、S140、S141、S142、S150、S151、S152、S153:ステップ
WF:シリコンウェーハ
Claims (13)
- アルカリ濃度が異なる複数の研磨液を用いて、アルカリ濃度と化学研磨率との相関性である第1の相関性を求め、且つ、砥粒濃度が異なる複数の研磨液を用いて、砥粒濃度と機械研磨率との相関性である第2の相関性を求める工程と、
前記第1の相関性及び前記第2の相関性に基づいて、前記複数の研磨液の、化学研磨率に対する機械研磨率の比率である、機械研磨率/化学研磨率を算出する工程と、
前記化学研磨率に対する機械研磨率の比率とウェーハの平坦度の指標との関係を得ると共に、前記化学研磨率に対する機械研磨率の比率の特定範囲を決定する工程と、
前記第1の相関性および前記第2の相関性に基づいて、前記化学研磨率に対する機械研磨率の比率の特定範囲を満たす第1の目標研磨液を選択する工程と、
前記第1の目標研磨液を用いてウェーハに対し研磨を行う工程と、
を含むことを特徴とする、ウェーハの研磨方法。 - 前記ウェーハ平坦度の指標がGBIRを含む、請求項1に記載のウェーハの研磨方法。
- 前記機械研磨率/化学研磨率の比率の特定範囲が0.70以上であって1.60以下の範囲である、請求項1又は2に記載のウェーハの研磨方法。
- 前記ウェーハ平坦度の指標がESFQRを含む、請求項1~3のいずれか一項に記載のウェーハの研磨方法。
- 前記機械研磨率/化学研磨率の比率の特定範囲が1.20以上であって1.70以下の範囲である、請求項4に記載のウェーハの研磨方法。
- 前記ウェーハ平坦度の指標がGBIRをさらに含み、かつ前記機械研磨率/化学研磨率の比率の特定範囲が1.20以上であって1.40以下の範囲である、請求項4に記載のウェーハの研磨方法。
- 前記研磨を行う工程は、第1の段階でウェーハのGBIRを制御する工程、および第2の段階でウェーハのESFQRを制御する工程をさらに含む、請求項1~6のいずれか一項に記載のウェーハの研磨方法。
- 前記研磨を行う工程は、前記第1の目標研磨液を用い第1の研磨機で前記第1の段階を実行し、かつ前記第1の目標研磨液を用い第2の研磨機で前記第2の段階を実行する工程をさらに含む、請求項7に記載のウェーハの研磨方法。
- 前記研磨を行う工程は、前記第1の目標研磨液を用い第1の研磨機で前記第1の段階および前記第2の段階を実行し、かつ前記第1の目標研磨液を用い第2の研磨機で前記第1の段階および前記第2の段階を実行する工程をさらに含む、請求項7に記載のウェーハの研磨方法。
- 前記機械研磨率/化学研磨率の比率の特定範囲を満たす第2の目標研磨液を選択する工程をさらに含む、請求項7に記載のウェーハの研磨方法。
- 前記研磨を行う工程は、前記第1の目標研磨液を用い第1の研磨機で前記第1の段階を実行し、かつ前記第2の目標研磨液を用い第2の研磨機で前記第2の段階を実行する工程をさらに含む、請求項10に記載のウェーハの研磨方法。
- 前記研磨を行う工程は、前記第1の目標研磨液を用い第1の研磨機で前記第1の段階および前記第2の段階を実行し、かつ前記第2の目標研磨液を用い第2の研磨機で前記第1の段階および前記第2の段階を実行する工程をさらに含む、請求項10に記載のウェーハの研磨方法。
- チョクラルスキー法で育成した単結晶インゴットをスライスして研磨前ウェーハを得た後、得られた研磨前ウェーハに対して、請求項1~12のいずれか一項に記載のウェーハの研磨方法により研磨処理を施すことを特徴とする、ウェーハの製造方法。
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US10600634B2 (en) * | 2015-12-21 | 2020-03-24 | Globalwafers Co., Ltd. | Semiconductor substrate polishing methods with dynamic control |
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