WO2022118958A1 - Matériau de pulvérisation thermique, procédé de pulvérisation thermique l'utilisant et film de revêtement par pulvérisation thermique - Google Patents
Matériau de pulvérisation thermique, procédé de pulvérisation thermique l'utilisant et film de revêtement par pulvérisation thermique Download PDFInfo
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- WO2022118958A1 WO2022118958A1 PCT/JP2021/044472 JP2021044472W WO2022118958A1 WO 2022118958 A1 WO2022118958 A1 WO 2022118958A1 JP 2021044472 W JP2021044472 W JP 2021044472W WO 2022118958 A1 WO2022118958 A1 WO 2022118958A1
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- thermal spray
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- rare earth
- thermal spraying
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Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
- C23C4/10—Oxides, borides, carbides, nitrides or silicides; Mixtures thereof
- C23C4/11—Oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
- C23C4/134—Plasma spraying
Definitions
- the present invention relates to a thermal spray material capable of improving the heat resistance stability of a thermal spray coating, a thermal spraying method using the same, and a thermal spray coating.
- a dry coating technique of providing a thermal spray coating on the surface of the part is applied.
- the thermal spraying method which is one of the dry coating technologies, melts a granular thermal spray material made of metal, ceramic, cermet, etc. with a heat source such as a combustion flame or electric energy, and accelerates the thermal spray particles to form a surface of the substrate. It is a method of forming a film by spraying and depositing.
- Patent Document 1 proposes the use of a composite film containing a rare earth silicate.
- the SiO 2 component in the coating volatilizes when the sprayed coating is formed and when the high temperature environment is maintained thereafter, and the composition changes (thickening of the coating) and the function as a coating is not satisfied.
- the problem has arisen. This is because SiO 2 volatilizes when sprayed with a rare earth silicate, the crystal phase separates, and SiO 2 volatilizes even in an actual use environment, resulting in low stability when used in an actual environment for a long time. Because it will end up.
- An object of the present invention is to provide a thermal spraying material that can maintain stability even when it is kept in an actual use environment for a long time when a rare earth silicate is sprayed.
- the present invention uses a thermal spraying material containing a rare earth silicate and a compound that combines with Si oxide or oxygen to form a Si oxide, or a Si-based compound selected from a combination thereof, in order to achieve the above object. ..
- This makes it possible to supplement the volatile content of the SiO 2 component by oxidizing the Si-based compound during the formation of the thermal spray coating and the subsequent high-temperature heating, and can solve the above-mentioned problems.
- the rare earth silicate may be a compound represented by RE 2 Si 2 O 7 or RE 2 SiO 5 (RE is a rare earth element).
- RE is a rare earth element
- the rare earth silicate is preferably a rare earth disilicate.
- Si oxide examples include SiO 2
- examples of the compound that combines with oxygen to form a Si oxide examples include SiC, SiC, and SiCN.
- the Si-based compound is preferably an oxide or carbide of Si.
- Yb 2 Si 2 O 7 when Yb 2 Si 2 O 7 is used as a rare earth silicate in a thermal spray material to form a Yb 2 Si 2 O 7 thermal spray coating, the SiO component volatilizes during the thermal spray coating formation and high temperature heating, resulting in Yb 2 SiO. 5 is generated.
- SiC is included as a compound that combines with oxygen to form a Si oxide in the sprayed material
- the SiO 2 generated by the oxidation of SiC is volatile by the following reaction formula (1).
- the reaction formula (2) makes it possible to retain the Yb 2 Si 2 O 7 component. SiC + 2O 2 ⁇ SiO 2 + CO 2 ... (1) Yb 2 SiO 5 + SiO 2 ⁇ Yb 2 Si 2 O 7 ... (2)
- Yb 2 Si 2 O 7 when Yb 2 Si 2 O 7 is used as a rare earth silicate in the spray material and a Yb 2 Si 2 O 7 bulk sintered body is formed by a hot press method, SiC is contained in the spray material.
- heat-treating the Yb 2 Si 2 O 7 bulk sintered body for example, holding it at 1250 ° C. for 5 hours, cracks formed on the surface of the sintered body due to the volatilization of SiO 2 can be repaired.
- the reaction described above may also include, as the spraying material, a rare earth silicate compound other than Yb 2 Si 2 O 7 and a compound other than SiC or a compound that combines with oxygen to form a Si oxide, or a combination thereof. Since it is generated, cracks generated on the surface of the film due to the volatilization of SiO 2 can be repaired as in the case of SiC.
- the electron micrographs of (a) the sprayed coating using the mixed powder of Example 1 and (b) the sprayed coating using the granulated powder of Example 6 in the state of being sprayed without heat treatment are shown. .. Regarding the sprayed coating of Example 6, (a) an electron microscope secondary electron image photograph after heat treatment and (b) an electron microscope reflected electron image photograph after heat treatment are shown. An electron micrograph of the surface of the sprayed coatings of (a) Example 6 and (b) Example 7 observed without heat treatment and an electron micrograph after heat treatment at 1300 ° C. for 100 hours are shown.
- the rare earth silicate and Si-based compound in the thermal spray material can be particles, respectively.
- Such particles may be composed of granulated particles obtained by granulating finer primary particles, or may be mainly composed of aggregates of primary particles (may include a form of agglomeration). It may be a powder. More preferably, it may be a granule composed of an aggregate of primary particles. Further, the granules may be composed of a composite granule composed of a collection of primary particles of a rare earth silicate and primary particles of a Si-based compound.
- the thermal spray coating is formed of such a thermal spray material containing granules made of a composite granule, the amount of volatilization of the Si-based compound due to the thermal effect during film formation can be further suppressed.
- the particle size of the rare earth silicate particles and Si-based compounds in the thermal spraying material is not particularly limited. It is preferable that the ratio DvR / DvSi of the volume-based average particle diameter DvSi of the Si-based compound particles to the volume-based average particle diameter DvR of the rare earth silicate particles is 1/10 or more and 4 or less. Within this range, the Si-based compound can more preferably supplement the volatile content of the SiO2 component during the formation of the sprayed coating and the subsequent high-temperature heating, and has the effect of containing a large amount of rare earth disilicate structure. There is.
- the average particle size of the sprayed material particles is not particularly limited as long as it is about 10 ⁇ m or less, and the lower limit of the average particle size is also not particularly limited.
- the volume-based average particle size of the Si-based compound particles is preferably 0.3 ⁇ m or more and 2 ⁇ m or less.
- the average particle size of the rare earth silicate particles based on the volume is 1 ⁇ m or more and 3 ⁇ m or less.
- the average particle size on a volume basis in the case of granules is preferably 10 ⁇ m or more and 50 ⁇ m or less.
- the Si-based compound can more preferably supplement the volatile matter of the SiO 2 component at the time of forming the thermal spray coating and at the time of subsequent high-temperature heating, and can contain a large amount of rare earth disilicate structure. There is an effect.
- a laser diffraction / scattering type particle size distribution measuring device (Spectris Co., Ltd., laser diffraction type particle size distribution measuring device master sizer) is used for the average particle size of the sprayed particles.
- the measured 50% integrated particle size (D50) in the volume-based particle size distribution can be adopted.
- a sphere-equivalent diameter calculated based on the specific surface area can be adopted.
- the specific surface area is, for example, a value calculated by the BET 1-point method from the amount of gas adsorbed such as N2 measured by the continuous flow method using a specific surface area measuring device (manufactured by Mountech, fully automatic specific surface area measuring device Macsorb). can do.
- the critical value of the average particle size to which each measurement method is applied is not strictly defined in the above, and may be changed according to the accuracy of the analyzer used.
- the content of the Si-based compound in the thermal spraying material is not particularly limited, but is preferably 1% by weight or more and 10% by weight or less. If it is less than 1% by weight, the effect of replenishing the SiO 2 volatile matter is not sufficient, and if it exceeds 10% by weight, when it is exposed to a high temperature environment after the thermal spray coating is formed, cracks occur on the film surface as the oxidation reaction progresses. Because there is a tendency. It is considered that this is because the effect of the addition of SiC reaches supersaturation, and the formation of SiO 2 causes volume expansion and cracks. More preferably, it is 5% by weight or more and 10% by weight or less.
- the thermal spraying material may be a mixture of rare earth silicate particles and Si-based compound particles.
- composite particles may be produced by a solid-phase sintering method such as an atomizing method, a melt-crushing method, or a sintering-crushing method and a granulation-sintering method. Can be done.
- the atomizing method is obtained by melting a mixture of a rare earth silicate powder and a Si-based compound powder, spraying and cooling the mixture, and then classifying the mixture as necessary.
- a mixture of a rare earth silicate powder and a Si-based compound powder is melted, cooled and solidified, then pulverized, and if necessary, classified thereafter.
- the granulation-sintering method is obtained by preparing a granulation powder from a mixture of a rare earth silicate powder and a Si-based compound powder, sintering the granulation powder, and further crushing and classifying the granulation powder.
- the sintering-crushing method is obtained by compression-molding a mixture of a rare earth silicate powder and a Si-based compound powder, sintering the mixture, and pulverizing and classifying the obtained sintered body.
- a granulated powder by a granulation-sintering method in which a granulated powder is produced from a powder mixed with raw materials and the granulated powder is sintered.
- the sprayed material produced by the granulation-sintering method is generally produced by another manufacturing method such as the sintering-sintering method, in which the raw material powder is compression-molded and then sintered, and the obtained sintered body is crushed. It has better fluidity than the fired material produced.
- the pulverization step since the pulverization step is not included in the manufacturing process, impurities can be further suppressed during pulverization.
- the method for spraying the thermal spraying material of the present embodiment may be high-speed flame spraying such as high-speed oxygen fuel (HVOF) spraying, plasma spraying such as atmospheric pressure plasma spraying (APS), or explosive spraying. You may. Alternatively, it may be cold process spraying such as cold spray, warm spray and high speed air fuel (HVAF) spraying.
- HVOF high-speed oxygen fuel
- APS atmospheric pressure plasma spraying
- HVAC high speed air fuel
- high-speed oxygen fuel (HVOF) spraying or plasma spraying is preferably applied. Even when a sprayed material having a relatively large average particle size is used, the sprayed particles can be sufficiently softened and melted and accelerated. As a result, even when a thermal spraying material containing particles having a large average particle size is used, it is possible to form a thermal sprayed coating that is dense and has a high pickers hardness.
- HVOF high-speed oxygen fuel
- the HVOF thermal spraying method is a type of frame thermal spraying method that uses a combustion flame obtained by mixing fuel and oxygen and burning them at high pressure as a heat source for thermal spraying. By increasing the pressure in the combustion chamber, a high-speed (including supersonic) high-temperature gas flow is ejected from the nozzle even though it is a continuous combustion flame.
- the HVOF thermal spraying method includes a general coating method for obtaining a thermal spray coating by putting a thermal spray material into this gas flow, heating and accelerating it, and depositing it on a substrate.
- the sprayed particles are based at a high speed of 500 m / s to 1000 m / s. It can be deposited by colliding with the material.
- the fuel used in the high-speed frame spraying may be a gas fuel of a hydrocarbon such as acetylene, ethylene, propane or propylene, or a liquid fuel such as kerosene or ethanol. Further, it is preferable that the temperature of the supersonic combustion flame is higher as the melting point of the thermal spray material is higher, and from this viewpoint, it is preferable to use gas fuel.
- the plasma spraying method is a thermal spraying method that uses a plasma flame as a thermal spraying heat source for softening or melting the thermal spraying material.
- a plasma flame as a thermal spraying heat source for softening or melting the thermal spraying material.
- the plasma spraying method includes a general coating method for obtaining a thermal spray coating by charging a thermal spray material into this plasma jet, heating and accelerating it, and depositing it on a substrate.
- the plasma spraying method includes atmospheric plasma spraying (APS: atmospheric plasma spraying) performed in the atmosphere, reduced pressure plasma spraying (LPS: low pressure plasma spraying) performed at a pressure lower than atmospheric pressure, and application higher than atmospheric pressure.
- APS atmospheric plasma spraying
- LPS reduced pressure plasma spraying
- plasma spraying for example, by melting and accelerating the thermal spraying material with a plasma jet of about 5000 ° C to 10000 ° C, the thermal spray particles collide with the substrate at a speed of about 300 m / s to 600 m / s. Can be deposited.
- the type of the base material for which the thermal spray coating is formed is not particularly limited, and examples thereof include metal materials, simple ceramic materials, composite ceramic materials, and ceramic matrix composites such as SiC / SiC.
- Specific examples of the base material include aluminum alloys such as Al 2 O 3 , zirconium alloys such as ZrO 2 , iron, steel, copper, copper alloys, nickel, nickel alloys, gold, silver, bismuth, manganese, zinc, and the like.
- Examples include metal materials such as zinc alloys and cobalt.
- steel include various SUS (stainless steel) materials used as corrosion-resistant structural steel.
- Examples of the aluminum alloy include A1000 series to A7000 series aluminum alloys that are useful as lightweight structural materials and the like.
- Corrosion-resistant alloys include, for example, Hasteroy (manufactured by Haynes), which is an alloy in which molybdenum, chromium, etc. are added to a nickel group, and Inconel (manufactured by Special Metals), which is an alloy in which iron, chromium, niobium, molybdenum, etc. are added to a nickel group.
- Hasteroy manufactured by Haynes
- Inconel manufactured by Special Metals
- iron, chromium, niobium, molybdenum, etc. are added to a nickel group.
- sterite manufactured by Delorosterite Group
- Inver which is an alloy obtained by adding nickel, manganese, carbon, etc. to iron.
- Example 1 Yb 2 Si 2 O particles having an average particle diameter (D50) of 32 ⁇ m and ⁇ -SiC particles having an average particle diameter (D50) of 2.3 ⁇ m were used as ⁇ -SiC particles for the entire thermal spraying material.
- the sprayed material was produced by putting them in a bag so that the amount of SiC particles added was 10% by weight and mixing them well.
- Yb 2 Si 2 O7 particles and ⁇ -SiC particles having an average particle size shown in Table 1 are added, and the amount of ⁇ -SiC particles added to the entire thermal spraying material is 10.
- the sprayed material was produced by putting the particles in a bag so as to have a weight of% by weight and mixing them well.
- Example 4 a solvent and ⁇ -SiC particles having an average particle diameter (D50) of 0.351 ⁇ m were used for Yb 2 Si 2 O 7 particles having an average particle diameter (D50) of 1.2 ⁇ m. Then, water is used as a solvent to mix and slurry so that the amount of ⁇ -SiC particles added to the entire sprayed material is 10% by weight, and spray-dried using a spray dryer to form a composite granulated powder. As a result, the spray material was manufactured.
- D50 average particle diameter
- Yb 2 Si 2 O 7 particles and ⁇ -SiC particles having an average particle size shown in Table 1 are added, and the amount of ⁇ -SiC particles added to the entire thermal spraying material is 10.
- a thermal spraying material was produced by forming a composite granulated powder according to the same procedure as in Example 4 by mixing so as to have a weight of% by weight. Further, in Examples 8 and 9, the silicate compound particles were replaced with Y 2 Si 2 O 7 (itrium silicate) and Gd 2 Si 2 O 7 (gadrinium silicate), respectively, and the silicates having the particle diameters shown in Table 1 were substituted.
- the compound particles and the ⁇ -SiC particles are mixed so that the amount of the ⁇ -SiC particles added to the entire sprayed material is 10% by weight, and a composite granulated powder is formed according to the same procedure as in Example 4. By doing so, the thermal spraying material was produced.
- Yb 2 Si 2 O 7 particles having an average particle diameter (D50) of 32 ⁇ m were used as a thermal spray material.
- Example 8 after holding at a high temperature of 1300 ° C. for 5 hours, the peak intensity of the sprayed coating was analyzed by X-ray diffraction, and in Example 8, the peak intensity ratio of YSi 2 O 7 to Y 2 SiO 5 was determined.
- the peak intensity ratio of Gd 2 Si 2 O 7 to Gd 2 SiO 5 is shown in Table 4.
- Maxima XRD-7000 device manufactured by Shimadzu Corporation under the conditions of tube voltage: 40 kV, tube current: 30 mA, scanning speed: 2.000 deg./min, scanning step: 0.0200 deg. I went below.
- the peak intensity and the peak intensity ratio the peak corresponding to each crystal structure obtained by X-ray diffraction was selected, normalized, and calculated as the intensity peak and the intensity peak ratio. The same method was used for the following examples.
- the Yb 2 Si 2 O 7 / Yb 2 SiO 5 intensity ratios after holding at 1300 ° C. for 5 hours and 50 hours were higher in Examples 1 to 7 than in Comparative Examples. It can be seen that in 1 to 7, more Yb 2 Si 2 O 7 was formed by the repair reaction than in the comparative example. Further, after holding at 1300 ° C. for 5 hours, the Yb 2 Si 2 O 7 of the thermal spray coating when the thermal spray material composed of the composite granulated powder of Yb 2 Si 2 O 7 particles and SiC particles of Examples 4 to 7 was used.
- the / Yb 2 SiO 5 intensity ratio is the Yb 2 Si 2 O 7 / Yb 2 SiO of the thermal spray coating when a thermal spray material composed of a mixed powder of Yb 2 Si 2 O 7 particles and SiC particles of Examples 1 to 3 is used. It can be seen that the intensity ratio tends to be higher than 5 . This is because the use of composite granulated powder as a raw material has less SiC volatilization, more SiC is left in the sprayed coating, and Yb 2 Si 2 O 7 is produced by the repair reaction. It shows that more were formed.
- the peak intensity ratio of YSi 2 O 7 to Y 2 SiO 5 of Example 8 and the peak intensity ratio of Gd 2 Si 2 O 7 to Gd 2 SiO 5 of Example 9 are also compared. It was confirmed that the same effect was obtained even if the silicate compound particles were replaced, which was higher than the Yb 2 Si 2 O 7 / Yb 2 SiO 5 intensity ratio of the example.
- Example 3 it was obtained by Example 1 in which 10% by weight of ⁇ -SiC having the same particle size of 2.3 ⁇ m was added and a mixed powder was used, and Example 6 in which granules made of a composite granulated powder were used. Comparing the peak intensity ratio of Yb 2 Si 2 O 7 to Yb 2 SiO 5 of the sprayed coating, Example 6 using granules made of composite granulated powder was more than Example 1 using mixed powder. , Yb 2 Si 2 O 7 has a high peak intensity ratio to Yb 2 SiO 5 , and the sprayed film formed using the composite granulated powder has more Yb 2 Si 2 O 7 components than the simply mixed one, and is repaired. It can be seen that the effect is great.
- FIGS. 1 (a) and 1 (b) the operation-type electron micrographs of the sprayed coatings of Examples 1 and 6 in the state of being sprayed without heat treatment are shown in FIGS. 1 (a) and 1 (b), respectively.
- the electron micrograph was taken using a scanning electron microscope SU-70 manufactured by Hitachi High-Tech, and the surface of the sprayed coating sample was observed.
- the sprayed coating formed by using the granulated powder of Example 6 shown in (b) has more SiC crystals than the sprayed coating formed by using the mixed powder of Example 1 shown in (a). It can be seen that there are many particles. It is considered that this is because the mixed powder has a larger amount of SiC volatilized during the thermal spraying film formation than the granulated powder, and the amount of SiC formed as crystal grains in the thermal sprayed film is smaller.
- Example 6 an electron microscope secondary electron image photograph after heat treatment at 1300 ° C. for 5 hours and an electron microscope backscattered electron image photograph of the same region of the secondary electron image photograph are taken. It is shown in (a) and (b) of FIG. 2, respectively.
- the electron microscope secondary electron image photograph (a) it can be seen that black SiC particles are deposited on the YbxSiyOz substrate, which is a gray region, and in the electron microscope reflected electron image photograph (b), the black SiC particles are observed.
- a new gray area appears around it, which is formed by the oxidation of SiC to form SiO 2 , and the repair reaction between SiO 2 and Yb 2 SiO 5 (bright area) causes the gray area of Yb 2 Si 2 O 7 . Is considered to have been formed.
- FIG. 3 After forming the thermal spray coatings of Examples 6 and 7, an electron micrograph of the surface observed without heat treatment by the same method as described above and an electron micrograph after heat treatment at 1300 ° C. for 100 hours are shown in FIG. 3, respectively.
- rice field. (A) is the thermal spray coating of Example 6, and (b) is the thermal spray coating of Example 7, respectively, and an electron micrograph of the state in which the thermal spray coating is still formed is shown on the left side, and the same is shown on the right side. An electron micrograph of the test piece observed after heat treatment at 1300 ° C. for 100 hours is shown.
- the sprayed coating of Example 6 is heat-treated for a long time by comparing the X-ray diffraction pattern over time with respect to the sprayed coating and the coating after heat treatment at 1300 ° C. for 5, 50 hours and 100 hours. It was confirmed that the peak of Yb 2 Si 2 O 7 decreased and the peak of Yb 2 Si 2 O 7 increased due to the progress of the oxidation reaction due to the above, and the composition of the single layer film of Yb 2 Si 2 O 7 was almost approached. .. X-ray diffraction was performed using Maxima XRD-7000 manufactured by Shimadzu Corporation. It was confirmed that the longer the heat treatment time, the more the composition restoration progressed due to the oxidation reaction caused by the long heat treatment.
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Abstract
Afin de fournir un matériau de pulvérisation thermique qui peut conserver une stabilité même lorsqu'il est maintenu pendant une longue période dans un environnement d'utilisation réel lorsqu'un silicate de terre rare est pulvérisé thermiquement, un matériau de pulvérisation thermique est utilisé, lequel contient : un silicate de terre rare ; et un composé à base de Si choisi parmi un oxyde de Si, un composé qui est combiné à de l'oxygène pour former un oxyde de Si ou une combinaison de ces derniers. Ainsi, le composé à base de Si est oxydé pendant la formation d'un film de revêtement par pulvérisation thermique et pendant un chauffage à haute température ultérieur afin de compléter la teneur en matières volatiles d'un composant SiO2.
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