WO2022113852A1 - Dispositif d'inspection visuelle, procédé d'inspection visuelle et programme d'inspection visuelle - Google Patents

Dispositif d'inspection visuelle, procédé d'inspection visuelle et programme d'inspection visuelle Download PDF

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Publication number
WO2022113852A1
WO2022113852A1 PCT/JP2021/042280 JP2021042280W WO2022113852A1 WO 2022113852 A1 WO2022113852 A1 WO 2022113852A1 JP 2021042280 W JP2021042280 W JP 2021042280W WO 2022113852 A1 WO2022113852 A1 WO 2022113852A1
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WIPO (PCT)
Prior art keywords
unit
light
subject
image pickup
visual inspection
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PCT/JP2021/042280
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English (en)
Japanese (ja)
Inventor
知久 小澤
昌也 守田
信介 石岡
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富士フイルム株式会社
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Application filed by 富士フイルム株式会社 filed Critical 富士フイルム株式会社
Priority to CN202180076730.8A priority Critical patent/CN116457645A/zh
Priority to JP2022565268A priority patent/JPWO2022113852A1/ja
Publication of WO2022113852A1 publication Critical patent/WO2022113852A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens

Definitions

  • the present invention relates to a visual inspection device, a visual inspection method, and a visual inspection program.
  • Patent Document 1 an object is illuminated from a plurality of different illumination directions, and image processing is performed on a plurality of images of the object obtained by imaging each of the plurality of illumination directions by an imaging means by a control device.
  • An optical inspection method for determining the presence or absence of a defect in the object is disclosed.
  • Patent Document 2 discloses a work inspection device that inspects the appearance of a work including a curved surface.
  • This work inspection device is integrally attached to the line sensor camera having a line-shaped photographing range along the orthogonal direction orthogonal to the predetermined direction of the curved surface and the line sensor camera, and is parallel to the optical axis of the line sensor camera.
  • a telecentric lens that causes light to enter the line sensor camera, lateral lighting means that emits light from a lateral position that deviates from the front of the shooting range in the predetermined direction of the curved surface toward the shooting range, and the line.
  • the rotating means for rotating the work relative to the sensor camera and the lateral lighting means along the predetermined direction of the curved surface, and the work relative to the line sensor camera and the lateral lighting means. It is provided with an inspection control means for generating an inspection image at the time of side illumination by causing the line sensor camera to take an image of the photographing range in a state where the side lighting means is made to emit light.
  • Patent Document 3 defects on the front and back of a color filter are separated by using a reflection system light source above the surface of the color filter, a reflection optical system of the inspection camera, and a transmission optical system of the transmission system inspection camera above the surface of the color filter. The method is disclosed.
  • Patent Document 4 describes a plurality of types of light sources capable of irradiating an object to be surfaced, which is at least one of an inner peripheral surface and an outer peripheral surface of a cylindrical inspection object, and an image of the inspection object.
  • a visual inspection apparatus including an imaging inspection unit for inspecting the appearance of the inspection object based on an image of an imaging inspection range corresponding to a part of the image to be inspected in the circumferential direction is disclosed. ..
  • This visual inspection device has a positioning mechanism having an arrangement portion for positioning the inspection object at the inspection position and a rotating portion for rotating the inspection object located at the inspection position around the central axis of the cylinder. ..
  • the light source has a bar light source having an optical axis parallel to the optical axis of the imaging inspection unit and having a pair of linear light emitting units extending in parallel with each other, and the same optical axis as the optical axis of the imaging inspection unit. Moreover, a coaxial light source located between the pair of light emitting units is provided. In the positioning mechanism, the optical axis of the imaging inspection unit is orthogonal to the tangent line of the surface to be inspected within the imaging inspection range, and the pair of light emitting units of the bar light source is the imaging inspection range.
  • An imaging arrangement in which the surface to be imaged is not overlapped with the optical axis of the imaging inspection unit and the central axis is tilted at a predetermined angle with respect to the optical axis of the imaging inspection unit.
  • the inspection object is positioned at the inspection position, and the imaging inspection unit images the inspection object in synchronization with the rotation of the inspection object by the rotating unit.
  • Patent Document 1 The appearance inspection of light-transmitting members such as lenses or films has been performed visually so far. Although methods for mechanizing visual inspection have been proposed as in Patent Document 1 and Patent Document 3, it is difficult to detect various types of defects that may occur in a subject by these methods. Patent Document 2 and Patent Document 4 do not assume inspection of a member having light transmission.
  • An object of the present invention is to evaluate a subject having light transmission with high accuracy.
  • the visual inspection apparatus includes a holding portion for holding a subject, an illuminating portion capable of irradiating the holding portion with illumination light having a plurality of shapes, and an imaging unit for imaging the holding portion. Control that causes the image pickup unit to image the subject multiple times by changing the relative positions of the holding unit, the illumination unit, and the image pickup unit, and the shape of the relative position and the illumination light.
  • the processor includes the subject including the reflected light in which the illumination light is reflected by the subject, and the subject including the transmitted light in which the illumination light has passed through the subject. Is imaged by the image pickup unit.
  • the visual inspection apparatus includes a holding portion for holding a subject, an illuminating portion capable of irradiating the holding portion with illumination light having a plurality of shapes, and an imaging unit for imaging the holding portion.
  • the holding unit, the illumination unit, and the driving unit that changes the relative position of the imaging unit, and the control that changes the relative position and the shape of the illumination light so that the imaging unit images the subject a plurality of times.
  • the processor is provided with a processor for changing the positions of both the illumination unit and the image pickup unit so that the image pickup unit can image the subject.
  • the visual inspection method includes a holding portion for holding a subject, an illuminating portion capable of irradiating the holding portion with illumination light having a plurality of shapes, and an imaging unit for imaging the holding portion.
  • a visual inspection method for inspecting the appearance of a subject by using the holding unit, the illuminating unit, and the driving unit that changes the relative position of the imaging unit, wherein the relative position and the illuminating light are used.
  • a control step is provided for controlling the image pickup unit to change the shape so that the subject is imaged a plurality of times.
  • the illumination light includes the reflected light reflected by the subject and the subject.
  • the image pickup unit is made to image the subject including the transmitted light transmitted through the subject by the illumination light.
  • the visual inspection method includes a holding portion for holding a subject, an illuminating portion capable of irradiating the holding portion with illumination light having a plurality of shapes, and an imaging unit for imaging the holding portion.
  • a visual inspection method for inspecting the appearance of a subject using the holding unit, the illuminating unit, and the driving unit that changes the relative position of the imaging unit, wherein the relative position and the illuminating light are used.
  • the image pickup unit is provided with a control step for controlling the shape of the image pickup unit to image the subject a plurality of times. The subject is imaged.
  • the visual inspection program includes a holding portion for holding a subject, an illuminating portion capable of irradiating the holding portion with illumination light having a plurality of shapes, and an imaging unit for imaging the holding portion.
  • a visual inspection program for inspecting the appearance of the subject using the holding unit, the illuminating unit, and the driving unit that changes the relative position of the imaging unit, wherein the relative position and the illuminating light are used.
  • the computer is made to execute a control step of changing the shape and controlling the image pickup unit to image the subject a plurality of times.
  • the illumination light reflects the reflected light of the subject.
  • the image pickup unit is made to image the subject including the subject and the subject including the transmitted light transmitted by the illumination light through the subject.
  • the visual inspection program includes a holding portion for holding a subject, an illuminating portion capable of irradiating the holding portion with illumination light having a plurality of shapes, and an imaging unit for imaging the holding portion.
  • This is an appearance inspection program for inspecting the appearance of the subject by using the holding unit, the lighting unit, and the driving unit that changes the relative position of the imaging unit.
  • the computer is made to execute a control step of changing the shape and controlling the image pickup unit to image the subject a plurality of times. In the control step, the positions of both the illumination unit and the image pickup unit are changed.
  • the image pickup unit is used to image the subject.
  • FIG. 3 is a schematic diagram showing a light reflection region of the lens L in which a sufficient amount of reflected light of flat light is incident on the image pickup unit 30 in the state ST4 of FIG.
  • FIG. 1 is a schematic diagram showing a schematic configuration of a visual inspection apparatus 100 according to an embodiment of the present invention.
  • FIG. 1 shows a direction X, a direction Y orthogonal to the direction X, and a direction Z orthogonal to the direction X and the direction Y.
  • the visual inspection device 100 is constructed so that the direction Z coincides with the vertical direction and the opposite direction.
  • the visual inspection device 100 includes a base 11 fixed at a predetermined position in the direction Z.
  • a through hole penetrating in the direction Z is formed in the base 11, and a substantially cylindrical mounting portion 10 (an example of a holding portion in the present specification) is rotatably supported on the inner wall of the through hole. ..
  • the mounting unit 10 is a member on which the lens L as a subject to be inspected for appearance by the appearance inspection device 100 is placed.
  • the mounting portion 10 is rotatably supported around a rotation axis extending in the direction Z. When the lens L is mounted on the mounting portion 10, the optical axis K of the lens L and the rotation center of the mounting portion 10 are configured to coincide with each other.
  • the base 11 is provided with a rotation mechanism 10A for rotating the mounting portion 10.
  • the mounting portion 10 is configured to be rotatable around a rotation axis by a rotation mechanism 10A.
  • the rotation angle of the mounting portion 10 is defined as the position of the mounting portion 10.
  • the visual inspection device 100 further includes a flat light source 21 constituting a surface light source, and a flat light source drive mechanism 21A for moving the flat light source 21 in the directions X and Z and rotating the flat light source 21 around an axis Ax1 extending in the direction Y.
  • the flat light source 21 and the flat light source driving mechanism 21A are arranged on one side (upper side, first side in the drawing) of the direction Z with respect to the base 11.
  • the flat light source 21 irradiates the mounting portion 10 with flat light (plane light).
  • the configuration of the flat light source 21 is not limited as long as it irradiates planar light.
  • the flat light source 21 can be one composed of an LED (Light Lighting Diode) and a light guide, or one composed of a planar organic EL (Electroluminescence).
  • the combination of the position of the flat light source 21 in the direction X, the position of the flat light source 21 in the direction Z, and the rotation angle around the axis Ax1 of the flat light source 21 is defined as the position of the flat light source 21.
  • the visual inspection device 100 further includes a line light source 22 constituting the line light source, and a line light source drive mechanism 22A for moving the line light source 22 in the direction X and the direction Z and rotating the line light source 22 around the axis Ax2 extending in the direction Y.
  • the line light source 22 and the line light source drive mechanism 22A are arranged on the other side (lower side in the figure, second side) in the direction Z from the base 11.
  • the line light source 22 irradiates the mounting portion 10 with linear light (linear light) extending in the direction Y.
  • the configuration of the line light source 22 is not limited as long as it irradiates linear light.
  • the line light source 22 one composed of a metal halide lamp and a light guide, one composed of an LED and a light guide, and the like can be used.
  • the combination of the position of the line light source 22 in the direction X, the position of the line light source 22 in the direction Z, and the rotation angle of the line light source 22 around the axis Ax2 is defined as the position of the line light source 22.
  • the visual inspection device 100 directs the image pickup unit 30 that images the mounting section 10 and the lens L mounted on the mounting section 10, the spot light source 23 that is fixed to the image pickup section 30 and constitutes a point light source, and the image pickup section 30. Further, an image pickup unit drive mechanism 30A that moves in X and direction Z and rotates around an axis Ax3 extending in direction Y is further provided.
  • the image pickup unit 30, the spot light source 23, and the image pickup unit drive mechanism 30A are arranged on one side (upper side, first side in the drawing) of the direction Z with respect to the base 11.
  • the image pickup unit 30 includes an image pickup element and an image pickup optical system, and takes an image of the lens L mounted on the mounting unit 10 through the image pickup optical system.
  • the spot light source 23 irradiates the mounting portion 10 with point-like light (point-like light).
  • the configuration of the spot light source 23 is not limited as long as it irradiates point-like light.
  • a laser or one including an LED and an irradiation optical system can be used as the spot light source 23 .
  • the spot light source 23 is fixed to the image pickup unit 30 in a state where the optical axis thereof and the optical axis of the image pickup unit 30 intersect.
  • the image pickup unit drive mechanism 30A moves or rotates the spot light source 23 fixed to the image pickup unit 30 by moving or rotating the image pickup unit 30. Therefore, the image pickup unit drive mechanism 30A can also be said to be a spot light source drive mechanism that moves the spot light source 23 in the directions X and Z and rotates it around the axis Ax3.
  • the combination of the position of the image pickup unit 30 in the direction X, the position of the image pickup unit 30 in the direction Z, and the rotation angle of the image pickup unit 30 around the axis Ax3 is defined as the position of the image pickup unit 30.
  • the combination of the position of the spot light source 23 in the direction X, the position of the spot light source 23 in the direction Z, and the rotation angle of the spot light source 23 around the axis Ax3 is defined as the position of the spot light source 23.
  • the flat light source 21, the line light source 22, and the spot light source 23 carry light having a plurality of shapes (linear light as the first shape, planar light as the second shape, and point light as the third shape).
  • the illumination unit 20 capable of irradiating the placement unit 10 is configured.
  • any one of the flat light source 21, the line light source 22, and the spot light source 23 is controlled to irradiate light.
  • the position of the light source controlled so as to irradiate the mounting unit 10 with light is defined as the position of the illumination unit 20.
  • light may be irradiated from another light source.
  • the flat light source 21 may be used as auxiliary lighting for specifying the position of the outer peripheral portion of the lens.
  • the flat light source drive mechanism 21A, the line light source drive mechanism 22A, the image pickup unit drive mechanism 30A, and the rotation mechanism 10A constitute a drive unit that changes the relative positions of the mounting unit 10, the illumination unit 20, and the image pickup unit 30. ..
  • the flat light source drive mechanism 21A, the line light source drive mechanism 22A, and the image pickup unit drive mechanism 30A constitute a drive mechanism for moving the illumination unit 20 and the image pickup unit 30 with respect to the mounting unit 10.
  • the appearance inspection device 100 further includes a general control unit 40 that controls the whole, a position control unit 41, and a lighting control unit 42.
  • Each of the general control unit 40, the position control unit 41, and the lighting control unit 42 includes a processing unit that performs various processes, and a memory including a RAM (Random Access Memory) and a ROM (Read Only Memory).
  • the hardware structure of the processing unit is various processors as shown below.
  • the circuit configuration can be changed after manufacturing CPU (Central Processing Unit), FPGA (Field Programmable Gate Array), etc., which are general-purpose processors that execute software (programs) to perform various processes.
  • CPU Central Processing Unit
  • FPGA Field Programmable Gate Array
  • a dedicated electric circuit or the like which is a processor having a circuit configuration specially designed for executing a specific process such as a programmable logic device (PLD) which is a processor or an ASIC (Aplication Specifici Integrated Circuit). included.
  • PLD programmable logic device
  • ASIC Application Specifici Integrated Circuit
  • the processing unit may be composed of one of these various processors, or may be composed of a combination of two or more processors of the same type or different types (for example, a plurality of FPGAs or a combination of a CPU and an FPGA). You may.
  • Each processing unit of the integrated control unit 40, the position control unit 41, and the lighting control unit 42 is configured by using one or more of the above-mentioned various processors as a hardware-like structure. More specifically, the hardware-like structure of these various processors is an electric circuit (cyclery) in which circuit elements such as semiconductor elements are combined.
  • the integrated control unit 40, the position control unit 41, and the lighting control unit 42 may have a common configuration of a processing unit, a RAM, and a ROM.
  • the position control unit 41 independently drives the image pickup unit drive mechanism 30A, the flat light source drive mechanism 21A, the line light source drive mechanism 22A, and the rotation mechanism 10A in accordance with a command from the overall control unit 40.
  • the position control unit 41 operates the image pickup unit drive mechanism 30A to control the positions of the image pickup unit 30 and the spot light source 23.
  • the position control unit 41 operates the flat light source drive mechanism 21A to control the position of the flat light source 21.
  • the position control unit 41 operates the line light source drive mechanism 22A to control the position of the line light source 22.
  • the position control unit 41 operates the rotation mechanism 10A to control the position of the mounting unit 10.
  • the lighting control unit 42 individually controls the flat light source 21, the line light source 22, and the spot light source 23 according to a command from the integrated control unit 40.
  • the overall control unit 40 When performing an appearance inspection of the lens L mounted on the mounting unit 10, the overall control unit 40 at least performs a transmitted light inspection process and a first reflected light inspection process. The overall control unit 40 additionally performs a second reflected light inspection process depending on the structure of the lens L. Hereinafter, details of each inspection process will be described.
  • the transmitted light inspection process is a position control that controls the position of the line light source 22 and the position of the image pickup unit 30 to a position determined according to the lens information (information about the structure such as shape and curvature) of the lens L, and this position control.
  • Imaging control in which the line light source 22 and the imaging unit 30 whose positions are determined by the above are operated, and the lens L irradiated with the line light from the line light source 22 is imaged a plurality of times by the imaging unit 30 while rotating the mounting unit 10. This is a process including an evaluation process for evaluating the first evaluation item of the lens L based on a plurality of captured images acquired by the image pickup control.
  • the first evaluation item is scratches (linear defects), bumps (dotted or circular defects), spiders, and stains that are a complex of these defects, which are widely known as lens defects. .. Scratches, bumps, spiders, and stains are the major defects in the lens, but may be other endpoints.
  • the evaluation regarding the first evaluation item of the lens L is, for example, ranking the lens L based on the feature amount (length, width, etc.) of the scratched region detected from the captured image, and the lumps detected from the captured image.
  • the lens L is ranked based on the feature amount (size, etc.) of the region, and the lens L is ranked based on the feature amount (area, brightness, etc.) of the cloudy region detected from the captured image, and is detected from the captured image. It means to rank the lens L based on the feature amount (size, etc.) of the dirty area.
  • Ranking means classifying the lens L into ranks such as non-defective products, defective products, and products that require re-inspection.
  • the size can be calculated, for example, by (long side + short side) / 2 of the minimum rectangle surrounding the defect. Further, as the size, the area of the minimum rectangle surrounding the defect may be calculated.
  • Scratches, bumps, spiders, and stains are visually recognized by irradiating light from one side in the optical axis direction of the lens L and observing the transmitted light of this light from the other side in the optical axis direction of the lens L.
  • the region where the line light source 22 is not reflected has low brightness and is uniform if there are no scratches, bumps, spiders, or stains in the region. If scratches, bumps, spiders, or stains are present in this region, the brightness becomes high at the site where the defect is present. Therefore, in the region of the captured image that does not include the line light source 22 (the region where the line light source 22 is not reflected), the presence or absence of scratches, bumps, spiders, or stains is detected by detecting the portion where the brightness is higher than the threshold value. Can be determined. In the transmitted light inspection process, scratches, bumps, spiders, or stains are detected based on this idea, and the first evaluation item is evaluated based on the feature amount of each defect.
  • FIG. 2 is a schematic diagram showing an example of the positional relationship between the image pickup unit 30, the mounting unit 10, and the line light source 22 during the transmitted light inspection process.
  • the integrated control unit 40 performs the above position control so as to be in the state ST1 of FIG. 2, rotates the mounting unit 10 in this state ST1, and when the mounting unit 10 is in each rotation position.
  • To image the lens L the lens L is imaged once every time the mounting portion 10 is rotated by 12 degrees, and the mounting portion is rotated once. That is, in the above image pickup control, a total of 29 times of imaging are performed.
  • the imaging interval (angle) and the number of shootings can be set arbitrarily. Further, the mounting portion does not necessarily have to make one rotation.
  • the integrated control unit 40 further performs the above position control so as to be in the state ST2 of FIG. 2, in this state ST2, the mounting unit 10 is rotated once, and the mounting unit 10 is in each rotation position.
  • the overall control unit 40 detects the defect of the first evaluation item from each of the 58 captured images obtained by 29 times of imaging in the state ST1 and 29 times of the imaging in the state ST2, and is based on the detection result. Then, the lens L is ranked.
  • the optical axis of the image pickup unit 30 is parallel to the optical axis K of the lens L (in the example of FIG. 2, the positions of the directions X and Y of both optical axes match) and the line.
  • the irradiation direction of the line light from the light source 22 is inclined with respect to the optical axis K.
  • FIG. 3 shows the irradiation range AR1 to which the line light of the lens L is irradiated in the state ST1.
  • the line light is obliquely irradiated to the central portion (second region) in the direction X of the lens L.
  • the central portion is a region including the optical axis of the lens L and having a width in the direction X.
  • the line light is irradiated to the entire inspection target region (specifically, the region having an effective diameter) of the lens L.
  • the state ST2 shown in FIG. 2 is a state in which only the position of the line light source 22 is changed with respect to the state ST1.
  • FIG. 3 shows the irradiation range AR2 to which the line light of the lens L is irradiated in the state ST2.
  • the line light is obliquely irradiated to the region (first region) at one end of the direction X of the lens L.
  • the mounting portion 10 makes one rotation in the state ST2
  • the line light is irradiated to the entire peripheral region outside the radial direction of the inspection target region of the lens L.
  • the irradiation range AR1 reaches from one end to the other end in the direction Y of the lens L, but the present invention is not limited to this.
  • the irradiation range AR1 may be set at the center of the direction X and the direction Y of the lens L.
  • the mounting portion 10 makes one rotation in the state ST1a, and the mounting portion 10 makes one rotation in the state ST2, so that the entire inspection target region of the lens L can be irradiated with the line light.
  • the irradiation range AR2 may be set between one end and the center of the direction X of the lens L, for example, as in the state ST2a of FIG. Even in this case, the mounting portion 10 makes one rotation in the state ST1 or the state ST1a, and the mounting portion 10 makes one rotation in the state ST2a, so that the entire inspection target region of the lens L can be irradiated with the line light. ..
  • the position of the line light source 22 is determined so that the line light source 22 is not reflected in the irradiation range AR1 in the captured image when the lens L is imaged by the image pickup unit 30.
  • the position of such a line light source 22 varies depending on the shape of the lens L to be inspected, and is determined according to the shape of the subject.
  • the position of the line light source 22 is determined so that the line light source 22 is not reflected in the irradiation range AR2 in the image captured image when the lens L is imaged by the image pickup unit 30.
  • the position of such a line light source 22 varies depending on the shape of the lens L to be inspected, and is determined according to the shape of the subject.
  • a blind spot area that cannot be imaged by the image pickup unit 30 may occur near the peripheral edge of the inspection target area of the lens L, or an image captured by the lens L.
  • the vicinity of the peripheral edge of the inspection target region of the lens L in the above there may be a region where the brightness is not sufficiently low.
  • the position of the image pickup unit 30 and the line light source so that the vicinity of the peripheral edge of the inspection target area of the lens L can be imaged by the image pickup unit 30 and the brightness of the image captured image near this peripheral edge is sufficiently low.
  • the position of 22 is changed.
  • the overall control unit 40 tilts the optical axis of the image pickup unit 30 with respect to the optical axis K of the lens L, and the line light from the line light source 22 is the direction X of the lens L.
  • the position of the image pickup unit 30 and the position of the line light source 22 are controlled so that the region (third region) different from the state ST2 at one end is irradiated.
  • the overall control unit 40 rotates the mounting unit 10 once in this state ST3, and images the lens L when the mounting unit 10 is at each rotation position (rotation position of N times 12 degrees).
  • the integrated control unit 40 is the first from each of the 87 captured images obtained by 29 times of imaging in the state ST1, 29 times of imaging in the state ST2, and 29 times of imaging in the state ST3. A defect of one evaluation item is detected, and the lens L is ranked based on the detection result.
  • the lens may have a blind spot area that cannot be imaged by the image pickup unit 30.
  • the position of the imaging unit 30 and the position of the line light source 22 are controlled so that defects existing in the blind spot region can be imaged. Additional imaging may be performed.
  • the state ST1 in FIG. 2 shows a state in which the position of the imaging unit 30 is the first imaging position and the position of the line light source 22 is the second irradiation position.
  • the state ST2 in FIG. 2 shows a state in which the position of the imaging unit 30 is the first imaging position and the position of the line light source 22 is the first irradiation position.
  • the state ST3 in FIG. 2 shows a state in which the position of the imaging unit 30 is the second imaging position.
  • the first reflected light inspection process includes position control that controls the position of the flat light source 21 and the position of the image pickup unit 30 to positions determined according to the lens information of the lens L, and the flat light source whose position is determined by this position control.
  • Imaging control in which the image pickup unit 30 operates the 21 and the image pickup unit 30 to image the lens L irradiated with flat light a plurality of times while rotating the mounting unit 10, and a plurality of image pickup images acquired by this image pickup control.
  • This is a process including an evaluation process for evaluating the second evaluation item of the lens L based on the above.
  • the second evaluation item is coat removal (peeling of the antireflection coating provided on the outer surface), discoloration (color unevenness of the coat, or a part having an appearance different from the normal part, etc.), which is widely known as a defect of the lens. It is a defect that can be observed by the specularly reflected light. Coat removal and discoloration are the main defects of the lens, but other evaluation items may be used.
  • the evaluation regarding the second evaluation item of the lens L is, for example, ranking the lens L based on the feature amount (size) of the coat-missing region detected from the captured image, and the feature amount of the discolored region detected from the captured image. It means to rank the lens L based on (size, color information (RGB, HSV), etc.).
  • the size can be calculated, for example, by (long side + short side) / 2 of the minimum rectangle surrounding the defect. Further, as the size, the area of the minimum rectangle surrounding the defect may be calculated.
  • RGB is an abbreviation for Red, Green, and Blue.
  • HSV is an abbreviation for Hue, Saturation, and Value.
  • Coat removal and discoloration are visually recognized by irradiating light from one side in the optical axis direction of the lens L and observing the reflected light of this light from one side in the optical axis direction of the lens L.
  • the region where the flat light source 21 is reflected is in a state where there is no uneven brightness unless there is a coat omission in that region. If there is a coat omission in this region, an increase in brightness occurs at the site where the coat is missing.
  • the presence or absence of the coat omission can be determined by determining the presence or absence of the region where the brightness is equal to or higher than the threshold value.
  • the region where the flat light source 21 is reflected will be in a state where there is no luminance unevenness or color unevenness if there is no discoloration in that region. If discoloration is present in this region, uneven brightness or uneven color occurs in the presence portion. Therefore, in the region including the flat light source 21 in the captured image, the presence or absence of discoloration can be determined by determining the presence or absence of a region having a higher brightness than the periphery or a region having a color tint different from that of the periphery. In the first reflected light inspection process, coat omission and discoloration are detected based on this idea, and the second evaluation item is evaluated based on the feature amount of each defect.
  • FIG. 4 is a schematic diagram showing an example of the positional relationship between the image pickup unit 30, the mounting unit 10, and the flat light source 21 during the first reflected light inspection process.
  • the overall control unit 40 performs the above position control so as to be in the state ST4 of FIG. 4, in this state ST4, the mounting unit 10 is rotated once, and the mounting unit 10 is in each rotation position.
  • the lens L is imaged when it is at (rotation position of N times 12 degrees).
  • the overall control unit 40 performs the above position control so as to be in the state ST5 of FIG. 4, and in this state ST5, the mounting unit 10 is rotated once, and the mounting unit 10 is rotated at each rotation position (N times 12 degrees).
  • the lens L is imaged when it is in the rotational position of.
  • the overall control unit 40 detects the defect of the second evaluation item from each of the 58 captured images obtained by 29 times of imaging in the state ST4 and 29 times of the imaging in the state ST5, and is based on the detection result. Then, the lens L is ranked.
  • the optical axis of the image pickup unit 30 is tilted with respect to the optical axis K of the lens L, and the direction in which the perpendicular line of the light emitting surface of the flat light source 21 extends is tilted with respect to the optical axis K. It is in a state of being.
  • FIG. 5 shows a light reflection region of the lens L in which the reflected light of the flat light emitted from the flat light source 21 is incident on the image pickup unit 30 in a sufficient amount in the state ST4 by the frame AR3.
  • the state ST4 there is a light reflection region in which a sufficient amount of flat light is reflected toward the image pickup unit 30 at the center of the lens L in the direction X and the direction Y.
  • the state ST5 shown in FIG. 4 is a state in which the positions of the image pickup unit 30 and the flat light source 21 are changed with respect to the state ST4.
  • FIG. 5 shows a light reflection region of the lens L in which the reflected light of the flat light emitted from the flat light source 21 is incident on the image pickup unit 30 in a sufficient amount in the state ST5 by the frame AR4.
  • the state ST5 at one end of the lens L in the direction X, there is a light reflection region in which a sufficient amount of flat light is reflected toward the image pickup unit 30.
  • the mounting portion 10 makes one rotation in the state ST5
  • a sufficient amount of reflected light can be imaged by the imaging unit 30 from the peripheral portion on the outer side in the radial direction of the inspection target region of the lens L.
  • the positions of the image pickup unit 30 and the flat light source 21 are determined so that a sufficient amount of reflected light is incident on the image pickup unit 30 from the entire inspection target area of the lens L.
  • the combination of the position of the imaging unit 30 and the position of the flat light source 21 varies depending on the shape of the lens L to be inspected, and is determined according to the shape of the subject.
  • the lens L when the lens L is a concave lens, the lens L is imaged in the states ST6 and ST7 of FIG.
  • the frame AR5 and the frame AR6 shown in FIG. 6 indicate a light reflection region of the lens L in which a sufficient amount of reflected light of the flat light emitted from the flat light source 21 is incident on the image pickup unit 30.
  • the mounting unit 10 may invert the front and back of the lens L, and then control the position of the imaging unit 30 and the position of the flat light source 21 to perform imaging.
  • the second reflected light inspection process includes a position control that controls the positions of the spot light source 23 and the image pickup unit 30 to a position determined according to the lens information of the lens L, and a spot light source 23 whose position is determined by this position control. Based on the image pickup control in which the image pickup unit 30 is operated and the lens L irradiated with the spot light is imaged a plurality of times by the image pickup unit 30 while rotating the mounting unit 10, and a plurality of image pickup images acquired by this image pickup control. This is a process including an evaluation process for evaluating the third evaluation item of the lens L.
  • the third evaluation item is a black ink defect that can occur only on a lens having a black ink part.
  • Ink defect refers to a state in which a part of the ink-painted portion is thin or peeled off.
  • the evaluation regarding the third evaluation item of the lens L means that the lens L is ranked based on the feature amount (length or area) of the black defect region detected from the captured image.
  • the black defect is visually recognized by irradiating the blackened portion of the lens L with light from one side in the optical axis direction of the lens L and observing the reflected light of this light from one side in the optical axis direction of the lens L.
  • the blackened portion in the captured image of the lens L is in a low brightness state if there is no black ink defect.
  • the brightness is increased at the location where the ink defect is present. Therefore, it is possible to determine the presence or absence of black ink defects by searching for a region having high luminance in the region including the black-painted portion of the captured image.
  • the black defect is detected based on such an idea, and the third evaluation item is evaluated based on the detection result.
  • FIG. 7 is a schematic diagram showing an example of the positional relationship between the image pickup unit 30, the mounting unit 10, and the spot light source 23 during the second reflected light inspection process.
  • the lens L shown in FIG. 7 is provided with a black-painted portion BL.
  • the overall control unit 40 performs the above position control so as to be in the state ST8 of FIG. 7, in this state ST8, the mounting unit 10 is rotated once, and the mounting unit 10 is in each rotation position.
  • the lens L is imaged when it is at (rotation position of N times 12 degrees).
  • the mounting portion 10 rotates once in the state ST8, the reflected light from the entire black-painted portion BL of the lens L can be imaged by the image pickup unit 30.
  • 12 degrees is an example, and the imaging interval (angle) and the number of shootings can be set arbitrarily.
  • the overall control unit 40 detects the defect of the third evaluation item from each of the blackened parts of the 29 images obtained by the 29 times of imaging in the state ST8, and based on the detection result, sets the lens L. Rank.
  • the lens structure has a lens structure in which the reflected light of the spot light cannot be imaged from the entire black-painted portion BL of the lens L only in the state ST8, or a part of the black-painted portion BL is totally illuminated in the state ST8. In some cases. In this case, imaging is performed under another condition in which the positions of the imaging unit 30 and the spot light source 23 are changed, for example, as in the state ST9.
  • the integrated control unit 40 detects a defect from each of the black-painted portions BL of the 58 captured images obtained by 29 times of imaging in the state ST8 and 29 times of imaging in the state ST9.
  • the lens L is ranked based on the detection result.
  • the positions of the image pickup unit 30 and the spot light source 23 are determined so that the reflected light from the entire black-painted portion BL of the lens L is incident on the image pickup unit 30.
  • the combination of the position of the imaging unit 30 and the position of the spot light source 23 varies depending on the shape of the lens L to be inspected, and is determined according to the shape of the subject.
  • FIG. 8 is a flowchart for explaining the operation of the visual inspection apparatus 100 during the transmitted light inspection process.
  • the inspection is performed under the two conditions of the state ST1 and the state ST2 shown in FIG. 2 will be described as an example.
  • the overall control unit 40 acquires the lens information of the lens L, and determines the state ST1 and the state ST2 based on the lens information. Then, the overall control unit 40 first controls the position of the image pickup unit 30 and the position of the line light source 22 so as to be in the state ST1 (step S1).
  • the overall control unit 40 rotationally drives the mounting unit 10 and causes the imaging unit 30 to take an image of the lens L mounted on the mounting unit 10 every time the rotation angle of the mounting unit 10 increases by 12 degrees.
  • the captured image of the lens L is acquired from the imaging unit 30 and saved (step S2).
  • the overall control unit 40 controls the position of the image pickup unit 30 and the position of the line light source 22 so as to be in the state ST2 (step S3).
  • the overall control unit 40 rotationally drives the mounting unit 10 and causes the imaging unit 30 to take an image of the lens L mounted on the mounting unit 10 every time the rotation angle of the mounting unit 10 increases by 12 degrees.
  • the captured image of the lens L is acquired from the imaging unit 30 and saved (step S4).
  • the overall control unit 40 has scratches and scratches based on a total of 58 captured images including the 29 captured images saved in step S2 and the 29 captured images saved in step S4.
  • the lens L is evaluated for each of the four first evaluation items of, spider, and stain (step S5).
  • the overall control unit 40 sets the reference number “N” to 1 (step S11), and for the first default area in the “N” th image taken out of the 29 images saved in step S2.
  • the defect detection process is performed (step S12).
  • the first default area is an area where the line light is not reflected in the captured image and the brightness is sufficiently low, and is predetermined according to the lens information.
  • the first default area may be an area specified by the user.
  • the defect detection process is a process of detecting a region having a brightness equal to or higher than the threshold value as a defect by binarizing or differentiating the pixel value of the first default region.
  • Defect detection processing algorithms are prepared for each defect type of scratches, bumps, spiders, and stains.
  • the integrated control unit 40 individually executes four types of defect detection processes for one captured image.
  • the integrated control unit 40 calculates the feature amount of the defect for each defect type detected in the defect detection process in step S12, and saves this (step S13).
  • the feature amount of the scratch defect detected from the Nth captured image will be referred to as the scratch feature amount Pk (N).
  • the feature amount of the lump defect detected from the Nth captured image is referred to as a lump feature amount Pb (N).
  • the feature amount of the spider defect detected from the Nth captured image is referred to as a spider feature amount Pc (N).
  • the feature amount of the stain defect detected from the Nth captured image is referred to as a stain feature amount Py (N).
  • the scratch feature amount Pk (N), the lump feature amount Pb (N), the spider feature amount Pc (N), and the stain feature amount Py (N) are collectively referred to as the feature amount P (N).
  • the integrated control unit 40 holds the maximum value of the feature amount P (N) as evaluation data (step S14).
  • the integrated control unit 40 holds the maximum value of the scratch feature amount Pk (N) as scratch evaluation data for evaluating scratch defects.
  • the integrated control unit 40 holds the maximum value of the lump feature amount Pb (N) as the lump evaluation data for evaluating the lump defect.
  • the integrated control unit 40 holds the maximum value of the spider feature amount Pc (N) as spider evaluation data for evaluating spider defects.
  • the integrated control unit 40 holds the maximum value of the stain feature amount Py (N) as stain evaluation data for evaluating stain defects.
  • the integrated control unit 40 holds, for example, the lowest value that can be considered as a feature amount as evaluation data for the defect type in which no defect is detected.
  • the overall control unit 40 increases the reference number “N” by one (step S15), and the first default area in the “N” th captured image among the 29 captured images saved in step S2. Defect detection processing is performed on the image (step S16).
  • the integrated control unit 40 calculates the feature amount P (N) of the defect for each defect type detected in the defect detection process in step S16, and saves this (step S17).
  • the overall control unit 40 determines whether or not the maximum value of the feature quantities P (N) calculated in step S17 is larger than the evaluation data for each defect type of scratches, bumps, spiders, and stains. (Step S18).
  • step S17 When there is a defect type in which the maximum value of the feature amount P (N) calculated in step S17 is larger than the evaluation data, the overall control unit 40 uses this maximum value to generate the evaluation data of the defect type. Update (step S19).
  • the integrated control unit 40 holds this maximum value as the latest scratch evaluation data.
  • the integrated control unit 40 does not update the scratch evaluation data.
  • the integrated control unit 40 When the maximum value of the stuff feature amount Pb (N) is larger than the stuff evaluation data, the integrated control unit 40 holds this maximum value as the latest stuff evaluation data. The integrated control unit 40 does not update the item evaluation data when the maximum value of the item feature amount Pb (N) is equal to or less than the item evaluation data.
  • the integrated control unit 40 When the maximum value of the spider feature amount Pc (N) is larger than the spider evaluation data, the integrated control unit 40 holds this maximum value as the latest spider evaluation data. When the maximum value of the spider feature amount Pc (N) is equal to or less than the spider evaluation data, the integrated control unit 40 does not update the spider evaluation data.
  • the overall control unit 40 holds this maximum value as the latest stain evaluation data.
  • the integrated control unit 40 does not update the stain evaluation data when the maximum value of the stain feature amount Py (N) is equal to or less than the stain evaluation data.
  • step S19 the overall control unit 40 returns the process to step S15 when the reference number “N” is less than 29 (step S20: NO), and when the reference number “N” is 29 (step S20: NO). YES), the process of step S21 is performed.
  • step S21 the overall control unit 40 sets the reference number “M” to 1.
  • step S22 the overall control unit 40 performs defect detection processing on the second predetermined area in the “M” th image captured image out of the 29 captured images saved in step S4 (step S22).
  • the second default area is an area where the line light is not reflected in the captured image and the brightness is sufficiently low, and is predetermined according to the lens information.
  • the second default area may be an area designated by the user.
  • the integrated control unit 40 calculates the feature amount of the defect for each defect type detected in the defect detection process in step S22, and saves this (step S23).
  • the feature amount of the scratch defect detected from the Mth captured image will be referred to as the scratch feature amount Pk (M).
  • the feature amount of the lump defect detected from the Mth captured image is referred to as a lump feature amount Pb (M).
  • the feature amount of the spider defect detected from the Mth captured image is referred to as a spider feature amount Pc (M).
  • the feature amount of the stain defect detected from the Mth captured image is referred to as a stain feature amount Py (M).
  • the scratch feature amount Pk (M), the lump feature amount Pb (M), the spider feature amount Pc (M), and the stain feature amount Py (M) are collectively referred to as the feature amount P (M).
  • the overall control unit 40 determines whether or not the maximum value of the feature quantities P (M) calculated in step S23 is larger than the evaluation data for each defect type of scratches, bumps, spiders, and stains. (Step S24).
  • step S23 When there is a defect type in which the maximum value of the feature amount P (M) calculated in step S23 is larger than the evaluation data, the overall control unit 40 uses this maximum value to generate the evaluation data of the defect type. Update (step S25).
  • the integrated control unit 40 holds this maximum value as the latest scratch evaluation data.
  • the integrated control unit 40 does not update the scratch evaluation data.
  • the integrated control unit 40 When the maximum value of the stuff feature amount Pb (M) is larger than the stuff evaluation data, the integrated control unit 40 holds this maximum value as the latest stuff evaluation data. The integrated control unit 40 does not update the item evaluation data when the maximum value of the item feature amount Pb (M) is equal to or less than the item evaluation data.
  • the integrated control unit 40 When the maximum value of the spider feature amount Pc (M) is larger than the spider evaluation data, the integrated control unit 40 holds this maximum value as the latest spider evaluation data. When the maximum value of the spider feature amount Pc (M) is equal to or less than the spider evaluation data, the integrated control unit 40 does not update the spider evaluation data.
  • the overall control unit 40 holds this maximum value as the latest stain evaluation data.
  • the integrated control unit 40 does not update the stain evaluation data when the maximum value of the stain feature amount Py (M) is equal to or less than the stain evaluation data.
  • step S25 when the reference number “M” is less than 29 (step S26: NO), the overall control unit 40 increases the reference number “M” by one (step S27), and then processes in step S22. Return. When the reference number “M” is 29 (step S26: YES), the overall control unit 40 performs the process of step S28.
  • step S28 the integrated control unit 40 compares the evaluation data for each defect type with the threshold value, ranks the lens L, and saves the result.
  • the overall control unit 40 has an evaluation rank of the lens L for scratch defects, an evaluation rank of lens L for scratch defects, an evaluation rank of lens L for spider defects, and an evaluation rank of lens L for stain defects. To save each.
  • FIG. 11 is a flowchart for explaining the operation of the visual inspection apparatus 100 during the first reflected light inspection process.
  • the integrated control unit 40 performs the operation shown in FIG.
  • FIG. 11 is a flowchart for explaining the operation of the visual inspection apparatus 100 during the first reflected light inspection process.
  • the inspection is performed under the two conditions of the state ST4 and the state ST5 shown in FIG. 4 will be described as an example.
  • the overall control unit 40 acquires the lens information of the lens L, and determines the state ST4 and the state ST5 based on the lens information. Then, the overall control unit 40 first controls the position of the image pickup unit 30 and the position of the flat light source 21 so as to be in the state ST4 (step S6).
  • the overall control unit 40 rotationally drives the mounting unit 10 and causes the imaging unit 30 to take an image of the lens L mounted on the mounting unit 10 every time the rotation angle of the mounting unit 10 increases by 12 degrees.
  • the captured image of the lens L is acquired from the imaging unit 30 and saved (step S7).
  • the overall control unit 40 controls the position of the image pickup unit 30 and the position of the flat light source 21 so as to be in the state ST5 (step S8).
  • the overall control unit 40 rotationally drives the mounting unit 10 and causes the imaging unit 30 to take an image of the lens L mounted on the mounting unit 10 every time the rotation angle of the mounting unit 10 increases by 12 degrees.
  • the captured image of the lens L is acquired from the imaging unit 30 and saved (step S9).
  • the general control unit 40 determines that the coat is missing based on a total of 58 captured images including the 29 captured images saved in step S7 and the 29 captured images saved in step S9.
  • the lens L is evaluated for each of the two second evaluation items of discoloration (step S10).
  • step S10 is the same as the contents shown in FIGS. 9 and 10. That is, the integrated control unit 40 holds the maximum value of the feature amounts of the coat loss defects extracted from each of the 59 captured images as the coat loss evaluation data, and is extracted from each of the 59 captured images. The maximum value of the features of the burn defect is retained as the burn evaluation data.
  • the integrated control unit 40 compares the uncoated evaluation data with the threshold value, determines the evaluation rank of the lens L for the uncoated defect, compares the discolored evaluation data with the threshold value, and compares the lens with the discolored defect.
  • the evaluation rank of L is judged, and the judgment result is saved.
  • the integrated control unit 40 determines, for example, the defect type having the worst evaluation rank, and outputs the evaluation rank of the defect type as the final result.
  • the overall control unit 40 further executes a second reflected light inspection process and also evaluates ink defects.
  • defects scratches, bumps, spiders, and defects (scratches, bumps, spiders, and scratches) that can be visually recognized by transmitting line light through the lens L and observing the region of the lens L in which the line light source 22 is not reflected are observed. Dirt) can be detected with high accuracy by the transmitted light inspection process. Further, according to the visual inspection apparatus 100, defects (coat omission and discoloration) that can be visually recognized by reflecting flat light on the lens L and observing the region of the lens L in which the flat light is reflected are first. It can be detected with high accuracy by the reflected light inspection process. Further, according to the visual inspection apparatus 100, defects (black defects) that can be visually recognized by observing the reflected light when the blackened portion of the lens L is irradiated with the spot light are highly accurate by the second reflected light inspection process. Can be detected.
  • a plurality of conditions for example, in which the combination of the relative positions of the mounting unit 10, the lighting unit 20, and the imaging unit 30 and the shape of the light emitted from the lighting unit 20 are different (for example).
  • State ST1, state ST2, state ST4, and state ST5 it cannot be detected by imaging using only single-shaped illumination light or imaging only reflected light from the subject.
  • Various kinds of defects that may occur in the lens L can be detected with high accuracy.
  • the visual inspection device 100 when evaluating the same defect type (for example, a scratch defect), 29 captured images in which the positions of the illumination unit 20 and the image pickup unit 30 are the same but the rotation positions of the mounting unit 10 are different. Scratch defects are detected from each of the above. Then, the lens L is evaluated for the scratch defect based on the maximum value among the feature quantities of all the scratch defects detected.
  • the same defect type for example, a scratch defect
  • the appearance of scratch defects existing on the lens L from the imaging unit 30 may change depending on the rotational position of the mounting unit 10. This is because the way the line light is applied to the scratch defect changes depending on the rotation position.
  • the lens L is evaluated based on the maximum value of the feature amount of the scratch defect detected from each of the 29 captured images. Therefore, even though a large scratch is present, it is possible to prevent the feature amount of the scratch from being determined as a small value. As a result, the lens L can be evaluated with high accuracy.
  • the visual inspection device 100 in order to detect a defect of the same type, two conditions (state ST1 and state ST2, or state ST4 and state ST5) in which the combination of the position of the image pickup unit 30 and the position of the illumination unit 20 are different are different. ) Is used for imaging. Therefore, a defect that cannot be detected by only one of the two conditions depending on how the light hits can be detected by the other of the two conditions. Therefore, the defect detection accuracy can be improved.
  • the subject to be inspected by the visual inspection apparatus 100 is not limited to the lens L. If it is an object having light transmission property, it is possible to detect defects of this object by placing this object on the mounting portion 10. In this case, the optical axis K of the lens L described above may be read as the central axis of this object.
  • the spot light source 23 does not have to be fixed to the image pickup unit 30.
  • a mechanism for moving the spot light source 23 in the direction X and the direction Z and rotating the spot light source 23 around an axis extending in the direction Y is separately provided.
  • the spot light source 23 may be replaced with a surface light source that irradiates surface light. Ink defects can be detected by irradiating the blackened portion of the lens L with light and imaging the reflected light of the light. Therefore, a surface light source can be used instead of the spot light source 23. In this case, the flat light source 21 may be moved to the position of the spot light source 23 during the second reflected light inspection process. By doing so, the number of light sources included in the lighting unit 20 can be reduced to two, and the device can be miniaturized and the cost can be reduced.
  • the image pickup unit 30, the flat light source 21, and the line light source 22 are movable, so that the state ST1 and the state ST2 and the state ST3 can be switched, and the state ST4 and the state ST5 can be switched.
  • a plurality of image pickup units 30, a flat light source 21, and a line light source 22 are fixedly arranged so as to be in any of the states ST1, state ST2, state ST3, state ST4, and state ST5. Select and operate one of the plurality of image pickup units 30, select and operate one of the plurality of line light sources 22, and select and operate one of the plurality of flat light sources 21. You may do so.
  • the mounting unit 10 is moved or tilted to move or tilt the state ST1, the state ST2, and the state ST3. It may be possible to switch between states ST4 and ST5. That is, any configuration may be moved as long as the relative positions of the mounting unit 10 (lens L), the lighting unit 20, and the imaging unit 30 can be changed. Further, the case where the mounting portion 10 is used as an example of the holding portion in the visual inspection apparatus 100 has been described, but if the above inspection can be performed without damaging the lens L, the holding portion is different. It may be the configuration of. For example, the holding portion may be configured to sandwich the lens.
  • the holding unit, the lighting unit, and the driving unit that changes the relative positions of the imaging unit,
  • a processor that controls the image pickup unit to image the subject a plurality of times by changing the relative position and the shape of the illumination light is provided.
  • the processor causes the image pickup unit to image the subject including the reflected light reflected by the subject and the subject including the transmitted light transmitted by the illumination light transmitted through the subject. Inspection equipment.
  • the drive unit is a visual inspection device including a rotation mechanism that rotates the holding unit to a plurality of rotation positions.
  • the drive unit is an visual inspection device including a drive mechanism for moving the illumination unit and the image pickup unit with respect to the holding unit.
  • the visual inspection apparatus according to any one of (1) to (3).
  • the side on which the image pickup unit is arranged is the first side and the side opposite to the first side is the second side with respect to the holding unit.
  • the above processor Control to image the subject by the image pickup unit in a state where the holding portion is irradiated with the illumination light of the first shape from the second side.
  • An visual inspection device that controls the image pickup unit to image the subject in a state where the holding unit is irradiated with the illumination light of the second shape from the first side.
  • the visual inspection apparatus according to any one of (1) to (3).
  • the above-mentioned multiple shapes of light include linear light, When the side on which the image pickup unit is arranged is the first side and the side opposite to the first side is the second side with respect to the holding unit.
  • the linear light is emitted from the second side,
  • the transmitted light is an appearance inspection device that is the linear light transmitted through the subject.
  • the visual inspection device When the processor irradiates the linear light, the position of the illumination unit is set to the first irradiation position where the linear light is irradiated to the first region of the end portion of the subject, and the subject. A visual inspection device that controls the second irradiation position where the linear light is irradiated to the second region away from the end portion of the above.
  • the processor irradiates the linear light from the first irradiation position to cause the image pickup unit to image the subject, and the image pickup unit uses the image pickup unit to image the subject.
  • the linear light is irradiated from the second irradiation position to cause the imaging unit to image the subject, and the imaging unit is in the second imaging position.
  • An visual inspection device that irradiates a third region different from the first region at the end portion of the subject with linear light to cause the imaging unit to image the subject.
  • the visual inspection apparatus according to any one of (1) to (8).
  • the light having a plurality of shapes includes planar light, and the light has a planar shape.
  • the reflected light is an appearance inspection device including the planar light reflected by the subject.
  • the visual inspection device is a visual inspection device that changes the combination of the planar light and the relative position to two or more types in which the position of the illumination unit and the position of the image pickup unit are different to image the subject including the reflected light. ..
  • the visual inspection apparatus according to any one of (1) to (10).
  • the subject is a lens
  • the processor is an visual inspection device that acquires information on the shape of the lens and changes the position of the illumination unit and the position of the image pickup unit according to the shape of the lens.
  • the visual inspection apparatus according to any one of (1) to (11).
  • the plurality of shapes of light include planar light, linear light, and point-like light.
  • the processor has a position of the illumination unit when irradiating the planar light, a position of the illumination unit when irradiating the linear light, and a position of the illumination unit when irradiating the point light. And, a visual inspection device that controls different positions.
  • the visual inspection apparatus includes a surface light source that irradiates planar light, a linear light source that irradiates linear light, and a point light source that irradiates point light.
  • a visual inspection device in which the point light source moves in conjunction with the image pickup unit, and the surface light source and the line light source move independently.
  • the illumination unit includes a surface light source that irradiates planar light, a linear light source that irradiates linear light, and a point light source that irradiates point light.
  • the surface light source, the line light source, and the point light source are visual inspection devices that operate independently.
  • the visual inspection apparatus according to any one of (1) to (14).
  • the drive unit includes a rotation mechanism for rotating the holding unit.
  • the processor is a visual inspection device that images a subject a plurality of times while rotating the holding unit in a state where a combination of the shape of the illumination light, the position of the lighting unit, and the position of the imaging unit is determined. ..
  • the visual inspection apparatus detects a specific part (defect area) from each of a plurality of captured images acquired from the image pickup unit for each combination having a common shape of the illumination light, and the feature amount among the detected specific parts is A visual inspection device that evaluates the subject based on the feature amount of the maximum specific part.
  • the holding unit, the lighting unit, and the driving unit that changes the relative positions of the imaging unit,
  • a processor that controls the image pickup unit to image the subject a plurality of times by changing the relative position and the shape of the illumination light is provided.
  • the processor is an appearance inspection device that changes the positions of both the illumination unit and the image pickup unit so that the image pickup unit can image the subject.
  • the processor has the illumination light of the first shape from the second side. Control to image the subject by the image pickup unit while the holding unit is irradiated with light, and by the image pickup unit while the holding unit is irradiated with the illumination light of the second shape from the first side.
  • a visual inspection device that controls and controls the imaging of the subject.
  • a holding unit that holds a subject an illuminating unit that can irradiate the holding unit with illumination light of a plurality of shapes, an imaging unit that captures the image of the holding unit, the holding unit, the illuminating unit, and A visual inspection method for inspecting the appearance of a subject using a driving unit that changes the relative position of the imaging unit.
  • a control step is provided in which the relative position and the shape of the illumination light are changed to control the image pickup unit to image the subject a plurality of times.
  • the image pickup unit is made to image the subject including the reflected light reflected by the subject and the subject including the transmitted light transmitted by the illumination light through the subject.
  • a holding unit that holds a subject, an illuminating unit that can irradiate the holding unit with illumination light of a plurality of shapes, an imaging unit that captures the image of the holding unit, the holding unit, the illuminating unit, and A visual inspection method for inspecting the appearance of a subject using a driving unit that changes the relative position of the imaging unit.
  • a control step is provided in which the relative position and the shape of the illumination light are changed to control the image pickup unit to image the subject a plurality of times.
  • a visual inspection method in which the positions of both the illumination unit and the image pickup unit are changed so that the image pickup unit can image the subject.
  • a holding unit that holds a subject an illuminating unit that can irradiate the holding unit with illumination light of a plurality of shapes, an imaging unit that captures the image of the holding unit, the holding unit, the illuminating unit, and A visual inspection program for inspecting the appearance of a subject using a driving unit that changes the relative position of the imaging unit.
  • the computer is made to execute a control step of changing the relative position and the shape of the illumination light to control the image pickup unit to image the subject a plurality of times.
  • the image pickup unit is made to image the subject including the reflected light reflected by the subject and the subject including the transmitted light transmitted by the illumination light through the subject.
  • a holding unit that holds a subject an illuminating unit that can irradiate the holding unit with illumination light of a plurality of shapes, an imaging unit that images the holding unit, the holding unit, the illuminating unit, and A visual inspection program for inspecting the appearance of a subject using a driving unit that changes the relative position of the imaging unit.
  • the computer is made to execute a control step of changing the relative position and the shape of the illumination light to control the image pickup unit to image the subject a plurality of times.
  • an appearance inspection program in which the positions of both the illumination unit and the image pickup unit are changed so that the image pickup unit can image the subject.

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  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
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  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

L'invention concerne un dispositif d'inspection visuelle, un procédé d'inspection visuelle, et un programme d'inspection visuelle qui permettent d'évaluer avec précision un sujet présentant une transparence optique.　La présente invention comporte: une partie (10) de montage sur laquelle est montée une lentille L; une unité d'éclairage qui est capable d'irradier la partie (10) de montage avec une lumière d'éclairage présentant une pluralité de formes; une unité (30) de capture d'image qui capture une image de la partie (10) de montage; une unité d'entraînement qui modifie les positions relatives de la partie (10) de montage, de l'unité d'éclairage (20) et de l'unité (30) de capture d'image; et un processeur qui réalise une commande visant à amener l'unité (30) de capture d'image à capturer une image de la lentille L une pluralité de fois, tout en modifiant les positions relatives et la forme de la lumière d'éclairage. Le processeur fait en sorte que l'unité (30) de capture d'image capture une image de la lentille L comprenant une lumière réfléchie formée par réflexion de la lumière d'éclairage par la lentille L, ainsi qu'une image de la lentille L comprenant une lumière transmise formée par transmission de la lumière d'éclairage à travers la lentille L.
PCT/JP2021/042280 2020-11-27 2021-11-17 Dispositif d'inspection visuelle, procédé d'inspection visuelle et programme d'inspection visuelle WO2022113852A1 (fr)

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CN202180076730.8A CN116457645A (zh) 2020-11-27 2021-11-17 外观检查装置、外观检查方法及外观检查程序
JP2022565268A JPWO2022113852A1 (fr) 2020-11-27 2021-11-17

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Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1062354A (ja) * 1996-08-20 1998-03-06 Nachi Fujikoshi Corp 透明板の欠陥検査装置及び欠陥検査方法
JP2001235853A (ja) * 1999-10-13 2001-08-31 Applied Materials Inc 空中画像を使用するレチクル検査のための方法及び装置
JP2002005853A (ja) * 2000-06-20 2002-01-09 Canon Inc レンズ検査装置
JP2008032433A (ja) * 2006-07-26 2008-02-14 Olympus Corp 基板検査装置
JP2008076218A (ja) * 2006-09-21 2008-04-03 Olympus Corp 外観検査装置
JP2010256340A (ja) * 2009-03-31 2010-11-11 Hitachi High-Technologies Corp 高速検査方法とその装置
JP2013108816A (ja) * 2011-11-18 2013-06-06 N Tech:Kk 容器の検査装置
WO2014050609A1 (fr) * 2012-09-28 2014-04-03 Ｊｘ日鉱日石エネルギー株式会社 Dispositif pour inspecter un substrat ayant une surface rugueuse irrégulière et procédé d'inspection l'utilisant
JP2017032369A (ja) * 2015-07-31 2017-02-09 株式会社ニューフレアテクノロジー パターン検査装置及びパターン検査方法
JP2017062160A (ja) * 2015-09-24 2017-03-30 アイシン精機株式会社 欠陥検査装置および欠陥検査方法
WO2017170402A1 (fr) * 2016-03-31 2017-10-05 パナソニックＩｐマネジメント株式会社 Procédé d'inspection, système d'inspection et procédé de fabrication
JP2020042035A (ja) * 2019-11-13 2020-03-19 株式会社ニューフレアテクノロジー パターン検査装置及びパターン検査方法

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1062354A (ja) * 1996-08-20 1998-03-06 Nachi Fujikoshi Corp 透明板の欠陥検査装置及び欠陥検査方法
JP2001235853A (ja) * 1999-10-13 2001-08-31 Applied Materials Inc 空中画像を使用するレチクル検査のための方法及び装置
JP2002005853A (ja) * 2000-06-20 2002-01-09 Canon Inc レンズ検査装置
JP2008032433A (ja) * 2006-07-26 2008-02-14 Olympus Corp 基板検査装置
JP2008076218A (ja) * 2006-09-21 2008-04-03 Olympus Corp 外観検査装置
JP2010256340A (ja) * 2009-03-31 2010-11-11 Hitachi High-Technologies Corp 高速検査方法とその装置
JP2013108816A (ja) * 2011-11-18 2013-06-06 N Tech:Kk 容器の検査装置
WO2014050609A1 (fr) * 2012-09-28 2014-04-03 Ｊｘ日鉱日石エネルギー株式会社 Dispositif pour inspecter un substrat ayant une surface rugueuse irrégulière et procédé d'inspection l'utilisant
JP2017032369A (ja) * 2015-07-31 2017-02-09 株式会社ニューフレアテクノロジー パターン検査装置及びパターン検査方法
JP2017062160A (ja) * 2015-09-24 2017-03-30 アイシン精機株式会社 欠陥検査装置および欠陥検査方法
WO2017170402A1 (fr) * 2016-03-31 2017-10-05 パナソニックＩｐマネジメント株式会社 Procédé d'inspection, système d'inspection et procédé de fabrication
JP2020042035A (ja) * 2019-11-13 2020-03-19 株式会社ニューフレアテクノロジー パターン検査装置及びパターン検査方法

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