WO2022080273A1 - Récipient rempli de gaz et procédé de stockage de (e)-1,1,1,4,4,4-hexafluoro-2-butène - Google Patents

Récipient rempli de gaz et procédé de stockage de (e)-1,1,1,4,4,4-hexafluoro-2-butène Download PDF

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Publication number
WO2022080273A1
WO2022080273A1 PCT/JP2021/037427 JP2021037427W WO2022080273A1 WO 2022080273 A1 WO2022080273 A1 WO 2022080273A1 JP 2021037427 W JP2021037427 W JP 2021037427W WO 2022080273 A1 WO2022080273 A1 WO 2022080273A1
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WO
WIPO (PCT)
Prior art keywords
hexafluoro
butene
filled
filling container
gas
Prior art date
Application number
PCT/JP2021/037427
Other languages
English (en)
Japanese (ja)
Inventor
陽祐 谷本
淳 鈴木
Original Assignee
昭和電工株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 昭和電工株式会社 filed Critical 昭和電工株式会社
Priority to EP21880012.6A priority Critical patent/EP4230607A1/fr
Priority to IL302117A priority patent/IL302117A/en
Priority to CN202180069583.1A priority patent/CN116472259A/zh
Priority to KR1020237012171A priority patent/KR20230058526A/ko
Priority to JP2022556931A priority patent/JPWO2022080273A1/ja
Publication of WO2022080273A1 publication Critical patent/WO2022080273A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/70—Containers, packaging elements or packages, specially adapted for particular articles or materials for materials not otherwise provided for
    • B65D85/84—Containers, packaging elements or packages, specially adapted for particular articles or materials for materials not otherwise provided for for corrosive chemicals
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C1/00—Pressure vessels, e.g. gas cylinder, gas tank, replaceable cartridge
    • F17C1/10—Pressure vessels, e.g. gas cylinder, gas tank, replaceable cartridge with provision for protection against corrosion, e.g. due to gaseous acid
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C17/00—Preparation of halogenated hydrocarbons
    • C07C17/38—Separation; Purification; Stabilisation; Use of additives
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C21/00—Acyclic unsaturated compounds containing halogen atoms
    • C07C21/02—Acyclic unsaturated compounds containing halogen atoms containing carbon-to-carbon double bonds
    • C07C21/18—Acyclic unsaturated compounds containing halogen atoms containing carbon-to-carbon double bonds containing fluorine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/002—Details of vessels or of the filling or discharging of vessels for vessels under pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2203/00—Vessel construction, in particular walls or details thereof
    • F17C2203/06—Materials for walls or layers thereof; Properties or structures of walls or their materials
    • F17C2203/0634—Materials for walls or layers thereof
    • F17C2203/0636—Metals
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/03—Mixtures
    • F17C2221/032—Hydrocarbons
    • F17C2221/035—Propane butane, e.g. LPG, GPL
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/05—Applications for industrial use
    • F17C2270/0518—Semiconductors

Definitions

  • the present invention relates to a gas-filled filling container and a method for storing (E) -1,1,1,4,4,4-hexafluoro-2-butene.
  • Patent Document 1 discloses a technique for storing 2-fluorobutane, 2-fluoro-2-methylpropane, and 2-fluoropentane that can be used as dry etching gas while maintaining high purity for a long period of time. There is.
  • the present invention relates to a gas-filled filled container in which the purity of the filled (E) -1,1,1,4,4,4-hexafluoro-2-butene does not easily decrease over a long period of time, and (E)-.
  • An object of the present invention is to provide a storage method for 1,1,1,4,4,4-hexafluoro-2-butene.
  • one aspect of the present invention is as follows [1] to [13].
  • [1] A gas-filled filling container in which the filling container is filled with (E) -1,1,1,4,4,4-hexafluoro-2-butene.
  • the portion in contact with the filled (E) -1,1,1,4,4,4-hexafluoro-2-butene has a copper concentration of 0.5% by mass.
  • a gas-filled filling container made of less than metal.
  • the portion in contact with the filled (E) -1,1,1,4,4,4-hexafluoro-2-butene has a copper concentration of 0.
  • the gas-filled filling container according to [1] or [2], wherein the metal is at least one of manganese steel and chromium molybdenum steel.
  • the filling container includes a cylinder containing the (E) -1,1,1,4,4,4-hexafluoro-2-butene and the (E) -1,
  • the gas-filled filling container according to any one of [1] to [5], comprising a valve for opening and closing a flow path for flowing 1,1,4,4,4-hexafluoro-2-butene to the outside. .. [7] Any one of [1] to [6] in which the purity of the (E) -1,1,1,4,4,4-hexafluoro-2-butene to be filled is 99.90% by volume or more.
  • the portion of the filled container to which the (E) -1,1,1,4,4,4-hexafluoro-2-butene comes into contact has a copper concentration of less than 0.5% by mass.
  • the portion where the filled portion (E) -1,1,1,4,4,4-hexafluoro-2-butene comes into contact has a copper concentration of 0.4% by mass.
  • the purity of the filled (E) -1,1,1,4,4,4-hexafluoro-2-butene is unlikely to decrease over a long period of time.
  • (E) -1,1,1,4,4,4-hexafluoro-2-butene is isomerized when it comes into contact with metallic copper, a copper alloy, or a copper compound. It has been found that reactions such as polymerization and decomposition occur to reduce the purity, and the present invention has been completed.
  • (E) -1,1,1 It defines the material of the filling container for filling 1,4,4,4-hexafluoro-2-butene.
  • the gas-filled filling container according to the present embodiment is a gas-filled filling container in which the filling container is filled with (E) -1,1,1,4,4,4-hexafluoro-2-butene.
  • the portion of the filled container in contact with the filled (E) -1,1,1,4,4,4-hexafluoro-2-butene has a copper concentration of 0.5 mass. It is made of metal that is less than%.
  • the method for storing (E) -1,1,1,4,4,4-hexafluoro-2-butene is as follows: (E) -1,1,1,4,4,4-.
  • Hexafluoro-2-butene is a method of filling a filling container and storing it.
  • the filled (E) -1,1,1,4,4,4-hexafluoro-2-butene is used.
  • the contact portion is made of a metal having a copper concentration of less than 0.5% by mass.
  • the portion of the filling container that is in contact with the filled (E) -1,1,1,4,4,4-hexafluoro-2-butene is a metal having a copper concentration of less than 0.5% by mass. Since it is formed, reactions such as isomerization, polymerization, and decomposition are unlikely to occur in the packed (E) -1,1,1,4,4,4-hexafluoro-2-butene. Therefore, even if the gas-filled filling container according to the present embodiment is stored for a long period of time, the purity of the filled (E) -1,1,1,4,4,4-hexafluoro-2-butene is high. Hard to drop. Therefore, a gas-filled filled container filled with high-purity (E) -1,1,1,4,4,4-hexafluoro-2-butene has high purity even after long-term storage. Easy to maintain.
  • the above copper means a copper element. If the metal forming the contact portion of the filled (E) -1,1,1,4,4,4-hexafluoro-2-butene in the filling container contains copper, the copper is used. , Metallic copper, a copper alloy, or a copper compound such as a copper salt.
  • the concentration of copper contained in the metal needs to be less than 0.5% by mass, preferably 0.4% by mass or less. Then, in order to further suppress reactions such as isomerization, polymerization and decomposition of (E) -1,1,1,4,4,4-hexafluoro-2-butene, the content is 0.1% by mass or less. More preferably, it is more preferably 0.01% by mass or less. There is no particular lower limit for the concentration of copper, but it may be 0.001% by mass or more.
  • the method for measuring the concentration of copper is not particularly limited, but it can be measured by X-ray Photoelectron Spectroscopy (XPS analysis method).
  • the filling container in the gas-filled filling container according to the present embodiment and the filling container in the storage method of (E) -1,1,1,4,4,4-hexafluoro-2-butene according to the present embodiment are , It is preferable to have a cylinder and a valve.
  • the cylinder is a member containing (E) -1,1,1,4,4,4-hexafluoro-2-butene.
  • the cylinder is preferably an integrally molded seamless container.
  • the valve opens and closes a flow path through which (E) -1,1,1,4,4,4-hexafluoro-2-butene inside the cylinder flows to the outside, and flows through the flow path (E)-. It is a member that controls the flow of 1,1,1,4,4,4-hexafluoro-2-butene.
  • the part where the filled (E) -1,1,1,4,4,4-hexafluoro-2-butene comes into contact for example, the cylinder (especially the inner surface of the cylinder) and the valve are made of steel. It is preferably formed.
  • the steel include at least one of stainless steel, manganese steel, and chromium molybdenum steel.
  • Cylinders made of manganese steel and chrome molybdenum steel are defined by, for example, JIS standard JIS G3429 (seamless steel pipe for high pressure gas container) STH11, STH12 (manganese steel pipe), STH21, STH22 (chrome molybdenum steel pipe). There is a cylinder made from steel pipe.
  • the valve is preferably made of steel like the bomb, but is plated with nickel or the like, and (E) -1,1,1,4,4,4-hexafluoro-.
  • a valve made of a copper alloy such as brass or Monel (registered trademark) can be used as long as the 2-butene does not come into direct contact with the valve.
  • the purity (purity before filling in the filling container) of (E) -1,1,1,4,4,4-hexafluoro-2-butene to be filled in the filling container shall be 99.90% by volume or more. Is more preferable, 99.95% by volume or more is more preferable, and 99.99% by volume or more is further preferable. If the filling container is filled with the high-purity (E) -1,1,1,4,4,4-hexafluoro-2-butene as described above, the purity hardly decreases during storage, so that it can be used for a long period of time. High purity is easily maintained even after storage.
  • the purity of (E) -1,1,1,4,4,4-hexafluoro-2-butene before filling in a filling container is set to purity X, and the mixture is allowed to stand in the filling container at 23 ° C. for 30 days.
  • the purity Y can be 99.90% by volume or more. ..
  • the difference between the purity X and the purity Y (purity X-purity Y) can be less than 0.02 percentage point.
  • the method for filling the filling container with (E) -1,1,1,4,4,4-hexafluoro-2-butene is not particularly limited, but is, for example, (E) -1,1,1. Vacuuming 1,4,4,4-hexafluoro-2-butene through a filling line purged with an inert gas selected from nitrogen gas (N 2 ), argon (Ar), and helium (He). Examples thereof include a method of filling the filled container.
  • the purging treatment may be either a batch purging treatment in which the filling line is filled with the inert gas and then evacuated, or a flow purging method in which the inert gas is continuously flowed through the filling line.
  • the filling line is preferably composed of pipes whose inner surface has been treated by passivation or electrolytic polishing.
  • Examples of the product of the reaction caused by the contact between (E) -1,1,1,4,4,4-hexafluoro-2-butene and copper include (Z) -1, which is produced by cis-trans isomerization. 1,1,4,4,4-hexafluoro-2-butene, 1,2,3,4-tetrakis (trifluoromethyl) cyclobutane produced by dimerization, (E) -1, produced by polymerization, Examples thereof include polymers of 1,1,4,4,4-hexafluoro-2-butene.
  • Example 1 A seamless container having a capacity of 10 L and made of manganese steel having a copper concentration of 0.4% by mass was prepared as a cylinder. The inner surface of the cylinder was shot blasted, pickled, and washed with water, and further dried. Then, a valve made of SUS316L having a copper concentration of less than 0.005% by mass was attached to a cylinder to form a filling container. Then, the inside of this filling container was evacuated in a heated state.
  • This filling container was connected to a gas filling line connected to a tank made of SUS316 containing (E) -1,1,1,4,4,4-hexafluoro-2-butene.
  • the purity X of (E) -1,1,1,4,4,4-hexafluoro-2-butene in the tank analyzed by gas chromatography is 99.95% by volume.
  • the inner surface of this tank is electrolytically polished.
  • the gas filling line is subjected to batch purging treatment in which vacuuming is repeated after filling with nitrogen gas, and then (E) -1,1,1,4,4,4 via this gas filling line.
  • -Hexafluoro-2-butene 1 kg is transferred from the tank to the filling container, and the filling container is filled with (E) -1,1,1,4,4,4-hexafluoro-2-butene and filled with gas.
  • a filling container was obtained.
  • the internal pressure (gauge pressure) of the obtained gas-filled filling container was 0.06 MPaG.
  • the gas-filled filling container thus obtained was filled with (E) -1,1,1,4,4,4-hexafluoro-2-butene and then allowed to stand at 23 ° C. for 30 days, and then allowed to stand.
  • the purity Y of (E) -1,1,1,4,4,4-hexafluoro-2-butene in the gas-filled filled container was measured. As a result, there was no decrease in purity from the purity X before filling in the filling container, and it was 99.95% by volume. That is, the difference between purity X and purity Y (purity X-purity Y) was 0.00 percentage points.
  • Table 1 The results are shown in Table 1.
  • the analyzer and analytical conditions used for gas chromatography are as follows.
  • Equipment Gas Chromatograph GC-2014s manufactured by Shimadzu Corporation Column: CarboPak B 60/80 SP-1000 Column temperature: 150 ° C / 200 ° C Injection temperature: 200 ° C
  • Carrier gas Helium detector: Hydrogen flame ionization detector (FID)
  • the analyzer, analysis conditions, and spatter conditions used for XPS analysis are as follows.
  • Equipment X-ray photoelectron spectroscopy analyzer PHI5000 VersaProbeII manufactured by Albac Phi Co., Ltd.
  • Atmosphere Vacuum (less than 1.0 x 10 6 Pa)
  • X-ray source Monochromatic Al Ka (1486.6 eV)
  • Spectrometer Electrostatic concentric hemispherical spectroscope
  • Ion source for spatter Ar2,500 + Acceleration voltage of spatter: 10kV Spatter area: 2 mm x 2 mm Spatter time: 10 minutes
  • Examples 2 to 6 and Comparative Examples 1, 2, 4, 5 The same operation as in Example 1 was carried out except that the steels forming the seamless container used as the cylinder (the steel type and the concentration of copper are shown in Table 1) are different, and the container was allowed to stand at 23 ° C. for 30 days. The purity Y of (E) -1,1,1,4,4,4-hexafluoro-2-butene in the gas-filled filled container was measured. The results are shown in Table 1.
  • Example 7 In the gas-filled filling container after standing at 23 ° C. for 30 days, the same operation as in Example 1 was performed except that the nickel alloy film formed by the electroless plating method was formed on the inner surface of the cylinder. The purity Y of (E) -1,1,1,4,4,4-hexafluoro-2-butene was measured. The results are shown in Table 1. It was confirmed by XPS analysis that the concentration of copper on the surface of the nickel alloy coating was less than 0.05% by mass.
  • Example 3 The same operation as in Example 3 was performed except that a brass valve was used, and (E) -1,1,1,4 in the gas-filled filling container after standing at 23 ° C. for 30 days. The purity Y of 4,4-hexafluoro-2-butene was measured. The results are shown in Table 1. The concentration of copper in brass is 70% by mass.
  • Example 6 The same operation as in Example 6 was performed except that a brass valve was used, and (E) -1,1,1,4 in the gas-filled filling container after standing at 23 ° C. for 30 days. The purity Y of 4,4-hexafluoro-2-butene was measured. The results are shown in Table 1. The concentration of copper in brass is 70% by mass.
  • Example 7 The same operation as in Example 7 was performed except that a brass valve was used, and (E) -1,1,1,4 in the gas-filled filling container after standing at 23 ° C. for 30 days. The purity Y of 4,4-hexafluoro-2-butene was measured. The results are shown in Table 1. The concentration of copper in brass is 70% by mass.

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Packages (AREA)
  • Medical Preparation Storing Or Oral Administration Devices (AREA)

Abstract

L'invention concerne un récipient rempli de gaz qui est rempli avec du (E)-1,1,1,4,4,4-hexafluoro-2-butène et dont la pureté est peu susceptible de diminuer pendant une longue période de temps. Le récipient rempli de gaz est obtenu par remplissage d'un récipient avec du (E)-1,1,1,4,4,4-hexafluoro-2-butène. La partie du récipient qui est en contact avec le (E)-1,1,1,4,4,4-hexafluoro-2-butène , avec lequel le récipient est rempli, est constitué de métal ayant une concentration en cuivre inférieure à 0,5 % en masse.
PCT/JP2021/037427 2020-10-15 2021-10-08 Récipient rempli de gaz et procédé de stockage de (e)-1,1,1,4,4,4-hexafluoro-2-butène WO2022080273A1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
EP21880012.6A EP4230607A1 (fr) 2020-10-15 2021-10-08 Récipient rempli de gaz et procédé de stockage de (e)-1,1,1,4,4,4-hexafluoro-2-butène
IL302117A IL302117A (en) 2020-10-15 2021-10-08 Container filled with gas and method of storage (E)-1,1,1,4,4,4-HEXAFLUORO-2-BUTENE
CN202180069583.1A CN116472259A (zh) 2020-10-15 2021-10-08 已充气填充容器和e-1,1,1,4,4,4-六氟-2-丁烯的保存方法
KR1020237012171A KR20230058526A (ko) 2020-10-15 2021-10-08 가스 충전 완료 충전 용기 및 (e)-1,1,1,4,4,4-헥사플루오로-2-부텐의 보관 방법
JP2022556931A JPWO2022080273A1 (fr) 2020-10-15 2021-10-08

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020173920 2020-10-15
JP2020-173920 2020-10-15

Publications (1)

Publication Number Publication Date
WO2022080273A1 true WO2022080273A1 (fr) 2022-04-21

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PCT/JP2021/037427 WO2022080273A1 (fr) 2020-10-15 2021-10-08 Récipient rempli de gaz et procédé de stockage de (e)-1,1,1,4,4,4-hexafluoro-2-butène

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EP (1) EP4230607A1 (fr)
JP (1) JPWO2022080273A1 (fr)
KR (1) KR20230058526A (fr)
CN (1) CN116472259A (fr)
IL (2) IL302117A (fr)
TW (1) TWI798872B (fr)
WO (1) WO2022080273A1 (fr)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6070165A (ja) * 1983-05-19 1985-04-20 ユニオン・カ−バイド・コ−ポレ−シヨン 気体貯蔵シリンダ用低合金鋼
JPH0860301A (ja) * 1994-08-11 1996-03-05 Nisshin Steel Co Ltd 抗菌性を有するマルテンサイト系ステンレス鋼及び製造方法
JP2003500551A (ja) * 1999-05-28 2003-01-07 レール・リキード−ソシエテ・アノニム・ア・ディレクトワール・エ・コンセイユ・ドゥ・スールベイランス・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード 耐蝕性容器およびガス供給システム
JP2018050074A (ja) * 2012-10-30 2018-03-29 レール・リキード−ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード エッチング耐性ポリマー層を堆積させる方法及びパターンエッチング構造の製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3249283A4 (fr) 2015-01-22 2018-08-08 Zeon Corporation Récipient rempli de gaz et contenant un composé d'hydrocarbure fluoré
CN108727155B (zh) * 2018-06-19 2021-01-01 北京宇极科技发展有限公司 E-1，1，1，4，4，4-六氟-2-丁烯的制备方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6070165A (ja) * 1983-05-19 1985-04-20 ユニオン・カ−バイド・コ−ポレ−シヨン 気体貯蔵シリンダ用低合金鋼
JPH0860301A (ja) * 1994-08-11 1996-03-05 Nisshin Steel Co Ltd 抗菌性を有するマルテンサイト系ステンレス鋼及び製造方法
JP2003500551A (ja) * 1999-05-28 2003-01-07 レール・リキード−ソシエテ・アノニム・ア・ディレクトワール・エ・コンセイユ・ドゥ・スールベイランス・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード 耐蝕性容器およびガス供給システム
JP2018050074A (ja) * 2012-10-30 2018-03-29 レール・リキード−ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード エッチング耐性ポリマー層を堆積させる方法及びパターンエッチング構造の製造方法

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Publication number Publication date
IL302117A (en) 2023-06-01
IL302118A (en) 2023-06-01
JPWO2022080273A1 (fr) 2022-04-21
TWI798872B (zh) 2023-04-11
CN116472259A (zh) 2023-07-21
KR20230058526A (ko) 2023-05-03
EP4230607A1 (fr) 2023-08-23
TW202222747A (zh) 2022-06-16

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