WO2022079846A1 - 光偏向器 - Google Patents
光偏向器 Download PDFInfo
- Publication number
- WO2022079846A1 WO2022079846A1 PCT/JP2020/038839 JP2020038839W WO2022079846A1 WO 2022079846 A1 WO2022079846 A1 WO 2022079846A1 JP 2020038839 W JP2020038839 W JP 2020038839W WO 2022079846 A1 WO2022079846 A1 WO 2022079846A1
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- WO
- WIPO (PCT)
- Prior art keywords
- conductor
- dielectric
- insulators
- optical deflector
- ktn crystal
- Prior art date
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- 239000012212 insulator Substances 0.000 claims abstract description 121
- 239000004020 conductor Substances 0.000 claims abstract description 41
- 230000005284 excitation Effects 0.000 claims abstract description 36
- 230000005540 biological transmission Effects 0.000 claims abstract description 4
- 230000003287 optical effect Effects 0.000 claims description 92
- 239000003989 dielectric material Substances 0.000 claims description 10
- 239000013078 crystal Substances 0.000 description 155
- 229910052751 metal Inorganic materials 0.000 description 80
- 239000002184 metal Substances 0.000 description 80
- 239000000463 material Substances 0.000 description 9
- 238000010586 diagram Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000001678 irradiating effect Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004793 Polystyrene Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000000382 optic material Substances 0.000 description 2
- 239000004417 polycarbonate Substances 0.000 description 2
- 229920000515 polycarbonate Polymers 0.000 description 2
- 229920002223 polystyrene Polymers 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
Definitions
- the present invention relates to an optical deflector using a dielectric of a normal dielectric phase.
- the optical deflector can change the traveling direction of light by applying a voltage, and is used in various optical devices such as a laser printer and a wavelength sweep light source.
- Patent Document 1 discloses a wavelength sweeping light source provided with an optical deflector using a KTN (KTa 1-x Nb x O 3 , 0 ⁇ x ⁇ 1) crystal as an electro-optical material and capable of stable operation for a long time. Has been done.
- KTN KTN
- an internal electric field is generated by charge injection, and light can be deflected at high speed and wide angle.
- Patent Document 2 the time required for electron injection into the trap to reach a steady state is shortened by applying an AC voltage superimposed on a DC voltage to the KTN in the optical deflector and irradiating the excitation light.
- the technology to be used is disclosed.
- Patent Document 3 discloses a light deflector 90 having a temperature control mechanism as well as a light irradiation mechanism.
- the optical deflector 90 includes sensors 906 and 907 in the anode-side metal block 902 and the cathode-side metal block 903, respectively, and the temperature is controlled by the Pelche elements 908 and 909, respectively.
- the temperature in KTN901 can be inclined, and the dielectric constant can be inclined.
- the electro-optic material for example, KTN crystal
- the electro-optic material is simply sandwiched between the cathode-side metal block and the anode-side metal block, so that the position and orientation of the electro-optical material are not always stable.
- the electro-optical material can be arranged so as to face any direction. As shown in FIG. 11, even if the incident end surface 9011 of the electro-optic material 901 is designed to be perpendicular to the incident light 92 (dotted line in the figure), the incident end surface 9011 is arbitrary with respect to the incident light 92. It may be arranged at an angle (solid line in the figure). In this case, since the characteristics of the optical deflector 90 vary depending on the angle of the incident end surface 9011, when the angle of the incident end surface 9011, in other words, the orientation of the electro-optical material 901, changes arbitrarily when the optical deflector 90 is manufactured, light The characteristics of the deflector 90 cannot be reproduced.
- the position and orientation of the electro-optical material 901 may change due to vibration due to the electric distortion of the electro-optical material 901 when the optical deflector 90 is driven. This becomes a problem because it makes the characteristics of the optical deflector 90 at the time of driving unstable.
- the optical deflector according to the present invention has a dielectric that is a normal dielectric phase and has a trap for accumulating charges inside, and transmits the dielectric.
- An optical deflector that deflects light by applying a voltage in a direction perpendicular to the transmission direction of the dielectric, in order of a first conductor, the dielectric, a second conductor, and the like.
- the first conductor comprises two insulators between the first conductor and the second conductor that abut on both sides of the dielectric parallel to the direction of application of the voltage.
- a voltage is applied between the conductor and the second conductor, and the temperatures of the first conductor and the second conductor are independently controlled, and one of the dielectrics is controlled.
- the side surface is characterized in that the excitation light is irradiated through one of the insulators.
- the optical deflector according to the present invention has a dielectric that is a normal dielectric phase and has a trap for accumulating charges inside, and allows light transmitted through the dielectric to be transmitted through the dielectric.
- An optical deflector that applies a voltage in a direction perpendicular to the direction to deflect it, in order of a first conductor, a plurality of the dielectrics, a second conductor, and at least two of the dielectrics.
- two insulators that are fitted to the base end portion of one dielectric and the base end portions of the other dielectrics are provided, and the two insulators sandwich the plurality of the dielectrics.
- a voltage is applied between the first conductor and the second conductor, and the plurality of dielectrics are irradiated with excitation light via one of the insulators. It is characterized in that the transmitted light is reflected and emitted a plurality of times at the end faces of the plurality of dielectric bodies.
- FIG. 1 is a front view showing a configuration of an optical deflector according to a first embodiment of the present invention.
- FIG. 2 is a top view showing a part of the configuration of the optical deflector according to the first embodiment of the present invention.
- FIG. 3A is a diagram for explaining a light deflector according to a second embodiment of the present invention.
- FIG. 3B is a top view showing a part of the configuration of the optical deflector according to the second embodiment of the present invention.
- FIG. 4 is a top view showing a part of the configuration of the optical deflector according to the modified example of the second embodiment of the present invention.
- FIG. 5 is a front view showing the configuration of the optical deflector according to the third embodiment of the present invention.
- FIG. 6A is a diagram for explaining a light deflector according to a third embodiment of the present invention.
- FIG. 6B is a top view showing a part of the configuration of the optical deflector according to the third embodiment of the present invention.
- FIG. 7A is a diagram for explaining a light deflector according to a fourth embodiment of the present invention.
- FIG. 7B is a top view showing a part of the configuration of the optical deflector according to the fourth embodiment of the present invention.
- FIG. 8A is a top view showing a part of the configuration of the optical deflector according to the first embodiment of the present invention.
- FIG. 8B is a side perspective view showing a part of the configuration of the optical deflector according to the first embodiment of the present invention.
- FIG. 9A is a diagram for explaining the optical deflector according to the present invention.
- FIG. 9B is a top view showing a part of the configuration of the optical deflector according to the present invention.
- FIG. 10 is a front view showing the configuration of a conventional optical deflector.
- FIG. 11 is a diagram for explaining a conventional optical deflector.
- the optical deflector 10 includes an anode-side metal block 102, a KTN crystal 101, and a cathode-side metal block 103 in this order, and the KTN crystal 101 and the anode-side metal block 102 are provided.
- conductive elastic bodies 104 and 105 are provided between the KTN crystal 101 and the cathode side metal block 103, respectively.
- insulators 112 and 113 are provided between the anode-side metal block 102 and the cathode-side metal block 103.
- the KTN crystal 101 has two sides parallel to the yz plane parallel to the traveling direction (y direction) of the light transmitted (deflected) through the KTN crystal 101.
- the insulator 112 is arranged in contact with one side surface of the KTN crystal 101.
- the insulator 113 is arranged in contact with the other side surface of the KTN crystal 101.
- the insulators 112 and 113 are arranged so as to sandwich the KTN crystal 101 and the conductive elastic bodies 104 and 105 in the x direction.
- the conductive elastic bodies 104 and 105 are arranged to prevent destruction due to deformation of the KTN crystal when a voltage is applied, and a material that absorbs the deformation of the KTN crystal such as a carbon sheet is used.
- the anode-side metal block 102 is provided with a temperature sensor 106, and a Pelche element (temperature control element) 108 and a heat sink 110 are provided on the surface of the anode-side metal block 102 facing the surface on the KTN crystal 101 side.
- the cathode side metal block 103 includes a temperature sensor 107, and a Pelche element (temperature control element) 109 and a heat sink 111 are provided on the surface of the cathode side metal block 103 facing the surface on the KTN crystal 101 side.
- the Pelche elements (temperature control elements) 108 and 109 are arranged in the anode side metal block 102 and the cathode side metal block 103 so that heat (temperature) can be transferred to the anode side metal block 102 and the cathode side metal block 103, respectively. Just do it.
- the Pelche controller (temperature control unit, not shown) controls the Pelche elements 108 and 109 to control the temperature.
- the excitation light source 11 is arranged to irradiate the KTN crystal 101 with the excitation light 1.
- the insulators 112 and 113 are electrically insulators.
- the insulator 112 is transparent with respect to the excitation light 1 emitted from the excitation light source 11.
- being transparent does not mean that the transmittance can be regarded as 100%, but has a finite transmittance enough to transmit the optical power required to excite the electrons trapped in the KTN crystal 101. It means that it is.
- ultraviolet light to purple light
- light having a center wavelength of 400 nm to 405 nm is preferable.
- insulator 112 examples include quartz glass, acrylic, polycarbonate, polystyrene and the like.
- the insulator 113 does not have to be transparent with respect to the excitation light 1 emitted from the excitation light source 11. Of course, it may be transparent.
- FIG. 2 shows a top view of a portion of the optical deflector 10 composed of a KTN crystal 101, an anode-side metal block 102, a conductive elastic body 104, and insulators 112 and 113.
- the conductive elastic body 104 is not shown because it is arranged directly under the KTN crystal 101.
- the conductive elastic body 105 (not shown) is arranged on the KTN crystal 101.
- the KTN crystal 101 has an incident end surface 1011 (parallel to the xz plane) perpendicular to the incident direction (y direction) of the light transmitted (deflected) through the optical deflector, and an exit end surface 1012 facing the incident end surface 1011. Have. Further, it has side surfaces 1013 and 1014 that are perpendicular to the incident end surface 1011 and the emitted end surface 1012 and parallel to the plane (yz plane) parallel to the voltage application direction.
- the KTN crystal 101 and the conductive elastic bodies 104 and 105 have substantially the same shape on the xy plane.
- Insulators 112 and 113 are in contact with the side surfaces 1013 and 1014 of the KTN crystal 101.
- the positions of the KTN crystal 101 in the x-direction and the z-direction and the angle of the incident end face with respect to the incident light in other words, the KTN crystal.
- the orientation of 101 is uniquely determined with respect to the insulators 112 and 113.
- the positions and angles (directions) of the conductive elastic bodies 104 and 105 arranged above and below the KTN crystal 101 are also uniquely determined with respect to the insulators 112 and 113.
- the positions and orientations of the insulators 112 and 113 are uniquely determined with respect to the metal block 102 on the anode side, the positions and the incident light of the KTN crystal 101 and the conductive elastic bodies 104 and 105 in the x and z directions are taken.
- the angle of the end face is uniquely determined with respect to the metal block 102 on the anode side.
- the insulators 112 and 113 and the anode-side metal block 102 may be adhered to each other. It may be fixed by the method of.
- the position of the KTN crystal 101 in the y direction cannot be uniquely determined, but the positions of the KTN crystal 101 in the x and z directions and the incident end face with respect to the incident light.
- the angle can be uniquely determined.
- the temperatures of the anode-side metal block 102 and the cathode-side metal block 103 are independently controlled.
- the thermal resistance between the two is large so that the temperature controls do not interfere with each other, it is desirable that the thermal conductivity of the insulators 112 and 113 is small.
- the thermal conductivity of the above-mentioned insulators 112 and 113 is 1.4 W / (m ⁇ K) for quartz glass, 0.21 W / (m ⁇ K) for acrylic, 0.19 W / (m ⁇ K) for polycarbonate, and polystyrene, respectively. It is 0.10 to 0.14 W / (m ⁇ K).
- the thermal conductivity of the KTN crystal 101 is about 10 to 20 W / (m ⁇ K) at room temperature. Therefore, since the thermal conductivity of the insulators 112 and 113 is sufficiently smaller than the thermal conductivity of the KTN crystal 101 which is a KTN crystal, the arrangement of the insulators 112 and 113 is such that the metal block 102 on the anode side and the metal on the cathode side are arranged. The effect on the thermal resistance with the block 103 is small enough.
- the positions of the KTN crystal 101 in the x-direction and the z-direction and the angle of the incident end face with respect to the incident light can be uniquely determined, so that the light can be determined.
- the reproducibility of the characteristics of the optical deflector 10 can be improved when the deflector 10 is manufactured, and the stability of the characteristics when the optical deflector 10 is driven can be improved.
- the optical deflector according to the second embodiment of the present invention has substantially the same configuration as that of the first embodiment, but the shape of the insulator is different.
- FIG. 3A shows a KTN crystal 201, an anode-side metal block 202, a conductive elastic body 204, and an insulator 212, 213, which are members of the optical deflector 20 according to the present embodiment.
- the insulators 212 and 213 have a notch that fits into the KTN crystal 201.
- the shape of the KTN crystal 201 is a rectangular parallelepiped. It has an incident end face 2011 (parallel to the xz plane) perpendicular to the incident direction (y direction) of light transmitted (deflected) through the light deflector, and an exit end face 2012 facing the incident end surface 2011. Further, it has side surfaces 2013 and 2014 that are perpendicular to the incident end surface 2011 and the emitted end surface 2012 and parallel to the plane (yz plane) parallel to the voltage application direction.
- the KTN crystal 201 and the conductive elastic body 204 have substantially the same shape on the xy plane.
- the shape of the insulator 212 is a rectangular parallelepiped, and has a notch 2121 on the surface of the KTN crystal 201 side.
- the notch 2121 has a groove shape and a rectangular cross-sectional shape.
- the width (y direction) of the notch 2121 is substantially the same as the length (y direction) of the side surface 2013 of the KTN crystal 201.
- the depth (x direction) of the notch 2121 of the insulator 212 may be about 0.1 mm to 0.5 mm, and may be a predetermined depth that can be fitted with the KTN crystal 201.
- the conductive elastic body 204, the KTN crystal 201, and the conductive elastic body 205 are arranged in this order on the anode side metal block 202, and the KTN crystal 201 and the conductivity are arranged in this order.
- Insulators 212 and 213 are fitted and arranged on the elastic bodies 204 and 205.
- FIG. 3B is a top view, and the conductive elastic body 204 is not shown because it is arranged directly under the KTN crystal 201. Further, in the configuration of the optical deflector 20, the conductive elastic body 205 (not shown) is arranged on the KTN crystal 201.
- the side surface 2013 of the KTN crystal 201 and a part of each of the incident end faces 2011 and the exit end faces 2012 on both sides of the side surface 2013 are fitted with the notch 2121 of the insulator 212.
- the sides of the conductive elastic bodies 204 and 205 also fit into the notch 2121 of the insulator 212.
- the side surface 2014 of the KTN crystal 201 and a part of each of the incident end faces 2011 and the exit end faces 2012 on both sides of the side surface 2014 are fitted with the notch 2131 of the insulator 213.
- the side surfaces of the conductive elastic bodies 204 and 205 also fit into the notch 2131 of the insulator 213.
- the position of the KTN crystal 201 and the angle of the incident end face with respect to the incident light can be determined by the insulator 212 and 213. Is uniquely determined for. Therefore, if the position and orientation (angle of the surface of the notch) of the insulators 212 and 213 are uniquely determined with respect to the metal block 202 on the anode side, the position of the KTN crystal 201 and the angle of the incident end surface with respect to the incident light (KTN crystal). The orientation of 201) is uniquely determined with respect to the metal block 202 on the anode side.
- the insulator 212 and 213 and the anode-side metal block 202 may be adhered to each other. It may be fixed by the method of.
- the insulator 212 is transparent with respect to the excitation light emitted from the excitation light source, as in the first embodiment. Further, the insulator 213 does not have to be transparent with respect to the excitation light emitted from the excitation light source, and may of course be transparent.
- the optical deflector As described above, in the optical deflector according to the present embodiment, not only the positions of the KTN crystal 201 in the x-direction and the z-direction and the angle of the incident end face with respect to the incident light, but also the position of the KTN crystal 201 in the y-direction are uniquely determined. be able to.
- the optical deflector not only the positions of the KTN crystal 201 in the x-direction and the z-direction and the angle of the incident end face with respect to the incident light (direction of the KTN crystal 201) but also the y-direction of the KTN crystal 201. Since the position can be uniquely determined, the reproducibility of the characteristics of the optical deflector can be improved when the optical deflector is manufactured, and the stability of the characteristics when the optical deflector is driven can be improved.
- the excitation light source is arranged so as to be integrated with the optical deflector.
- the excitation light source 31 is arranged on the surface facing the surface in contact with the KTN crystal 201.
- the excitation light 1 emitted from the excitation light source 31 irradiates the KTN crystal 201.
- the first embodiment of the present invention will be described with reference to FIGS. 5 to 6B.
- the optical deflector according to the third embodiment of the present invention has substantially the same configuration as that of the second embodiment, but the shape and arrangement of the conductive elastic body are different.
- the optical deflector 40 includes, in order, an anode-side metal block, a conductive elastic body, a KTN crystal, a conductive elastic body, and a cathode-side metal block.
- the KTN crystal 401 has two sides parallel to the yz plane parallel to the traveling direction (y direction) of the light transmitted (deflected) through the KTN crystal 401.
- the insulator 412 is arranged in contact with one side surface of the KTN crystal 401.
- the insulator 413 is arranged in contact with the other side surface of the KTN crystal 401. In other words, the insulators 412 and 413 are arranged so as to sandwich the KTN in the x direction.
- FIG. 6A shows KTN crystals 401, an anode-side metal block 402, a conductive elastic body 404, and insulators 412 and 413, which are members of the optical deflector.
- the insulators 412 and 413 have a notch that fits the KTN crystal 401, as in the second embodiment.
- the anode-side metal block 402 and the conductive elastic body 404 have substantially the same shape on the xy plane.
- the conductive elastic body 404 and the KTN crystal 401 are arranged in order on the anode side metal block 402, and the insulators 412 and 413 are fitted and arranged on the KTN crystal 401.
- FIG. 6B is a top view, and the anode-side metal block 402 is not shown because it is arranged directly under the conductive elastic body 404.
- the side surface 4013 of the KTN crystal 401 and a part of each of the incident end faces 4011 and the exit end faces 4012 on both sides of the side surface 4013 are fitted with the notch 4121 of the insulator 412.
- the side surface 4014 of the KTN crystal 401 and a part of each of the incident end faces 4011 and the exit end faces 4012 on both sides of the side surface 4014 are fitted with the notch 4131 of the insulator 413.
- the position of the KTN crystal 401 and the angle of the incident end face with respect to the incident light can be determined by the insulators 412 and 413. Is uniquely determined for. Therefore, if the position and orientation (angle of the surface of the notch) of the insulators 412 and 413 are uniquely determined with respect to the metal block 402 on the anode side, the position of the KTN crystal 401 and the angle of the incident end surface with respect to the incident light (KTN crystal). The orientation of 401) is uniquely determined with respect to the metal block 402 on the anode side.
- the insulators 412 and 413 and the conductive elastic body 404 are adhered and conductive.
- the elastic body 404 and the metal block 402 on the anode side may be adhered to each other, or may be fixed by other methods.
- the optical deflector As described above, in the optical deflector according to the present embodiment, not only the positions of the KTN crystal 401 in the x and z directions and the angle of the incident end face with respect to the incident light, but also the position of the KTN crystal 401 in the y direction is uniquely determined. be able to.
- the optical deflector 40 not only the positions of the KTN crystal 401 in the x-direction and the z-direction and the angle of the incident end face with respect to the incident light (direction of the KTN crystal 401) but also the y-direction of the KTN crystal 401. Since the position of the light deflector can be uniquely determined, the reproducibility of the characteristics of the optical deflector 40 can be improved when the optical deflector 40 is manufactured, and the characteristics of the optical deflector 40 when driven can be improved. Stability can be improved.
- a fourth embodiment of the present invention will be described with reference to FIGS. 7A to 7B.
- the optical deflector according to the fourth embodiment of the present invention has substantially the same configuration as that of the second embodiment, but the shape and configuration of the KTN crystal are different, and the shape of the insulator is also different.
- FIG. 7A shows two KTN crystals 501a and 501b, an anode-side metal block 502, and insulators 512 and 513, which are members of the optical deflector 50 according to the fourth embodiment.
- the insulators 512 and 513 have notches that fit the KTN crystals 501a and 501b, respectively.
- the KTN crystal 501a and the KTN crystal 501b have the same shape and are pentagonal prisms.
- the angle between the ridge angle of the tip portion and the two ridge angles of the base end portion is 90 °, and the angle of the ridge angles of the two side surfaces is 135 °.
- the notch of the insulators 512 and 513 has a ridge angle of 90 °, which is an angle equivalent to the ridge angle of the proximal ends of the KTN crystals 501a and 501b.
- KTN crystals 501a and 501b are sequentially arranged on the anode-side metal block 502, and the insulators 512 and 513 are fitted and arranged on the KTN crystals 501a and 501b.
- the KTN crystals 501a and 501b are arranged on the anode side metal block 502, and the insulators 512 and 513 are arranged so as to sandwich the KTN crystals 501a and 501b.
- the end face and one side surface of the base end portion of the KTN crystal 501a abut on the end face of the notch of the insulator 512, and one ridge angle of the base end portion of the KTN crystal 501a and the cut of the insulator 512. Fits with the notch ridge angle.
- the end face and one side surface of the base end portion of the KTN crystal 501b abut on the end face of the notch of the insulator 513, and the one ridge angle of the base end portion of the KTN crystal 501b and the notch of the insulator 513. Fits with the ridge angle.
- one end face is brought into contact with each other.
- the other end face of the KTN crystal 501b that is not abutted becomes the incident end face, and the incident light 51 is incident.
- the other end face of the KTN crystal 501a that is not abutted becomes the emission end face, and the emission light 52 is emitted.
- the incident light 51 is repeatedly reflected three times at an angle of 45 ° with the end face (including the side surface) in the KTN crystal 501b, and is emitted from the KTN crystal 501b. After that, it is incident on the KTN crystal 501a through the abutting end faces of the KTN crystals 501b and 501a, and is repeatedly reflected three times at an angle of 45 ° with the end face (including the side surface) in the KTN crystal 501a to be emitted from the exit end face.
- the positions of the KTN crystals 501a and 501b and the angle of the incident end face with respect to the incident light 51 are uniquely determined for the insulators 512 and 513. Therefore, if the positions and orientations (angles of the cutout surfaces) of the insulators 512 and 513 are uniquely determined with respect to the anode-side metal block 502, the positions of the KTN crystals 501a and 501b and the angles of the incident end faces with respect to the incident light (the angles of the incident end faces).
- the orientation of the KTN crystals 501a and 501b) is uniquely determined with respect to the anode-side metal block 502.
- the insulators 512 and 513 and the anode-side metal block 502 may be adhered to each other. It may be fixed by the method of.
- the optical deflector 50 not only the positions of the KTN crystals 501a and 501b in the x and z directions and the angle of the incident end face with respect to the incident light 51 but also the positions of the KTN crystals 501a and 501b in the y direction are uniquely determined. be able to.
- the optical deflector 50 not only the positions of the KTN crystals 501a and 501b in the x and z directions and the angle of the incident end face with respect to the incident light (directions of the KTN crystals 501a and 501b) but also the KTN crystal. Since the positions of 501a and 501b in the y direction can be uniquely determined, the reproducibility of the characteristics of the optical deflector 50 can be further improved when the optical deflector 50 is manufactured, and the characteristics of the optical deflector 50 when driven can be stabilized. Can improve sex.
- the KTN crystal can be miniaturized (see JP-A-2016-38465).
- the shapes of the two KTN crystals which are the dielectric elements of the normal dielectric phase, are pentagonal prisms having the same shape, but the shape is not limited to this, and different shapes may be used. It may be a polygonal prism. The shape may be such that the ridge angle of the base end portion of the KTN crystal can be fitted with the ridge angle of the notch of the insulator. Further, the number is not limited to two, and any number may be used.
- the end faces of the tips of each of the plurality of KTN crystals are in contact with each other, and the incident light is reflected multiple times at the end faces in one KTN crystal, and then reflected multiple times at the end faces in the other KTN crystals through the abutting end faces.
- It may be a shape that emits light.
- a conductive elastic body may be provided, and if the conductive elastic body is provided, destruction can be suppressed.
- the optical deflector 60 according to the present embodiment has substantially the same configuration as the optical deflector 20 according to the second embodiment, but the insulator and the metal block on the anode side are fixed by using a guide pin or a screw. It is different in that it does.
- one of the conductive elastic bodies 604 and the KTN crystal 601 is arranged in order on the anode side metal block 602, and the insulator 612 is arranged on the side surface of the KTN crystal 601. , 613 are arranged, and the KTN crystal 601 and the insulators 612 and 613 are fitted.
- the excitation light source 61 is arranged so as to be integrated with the light deflector 60. As shown in FIG. 8A, in the insulator 612 transparent to the excitation light, the excitation light source 61 is arranged on the surface facing the surface in contact with the KTN crystal 601. The excitation light emitted from the excitation light source 61 irradiates the KTN crystal 601.
- the insulators 612 and 613 are each provided with one through hole 62 for passing a screw. Further, the insulators 612 and 613 are provided with two through holes 63 for passing the guide pins 64.
- one of the conductive elastic bodies 604 is provided with a through hole for passing a screw and a through hole for passing a guide pin 64 directly under the through holes 62 and 63 of the insulators 612 and 613, respectively. There is.
- the anode-side metal block 602 has four guide pins 64 on the upper surface and a hole (screw hole) 65 in which two screw grooves are formed.
- the guide pin 64 of the metal block 602 on the anode side inserts the through hole 63 of the insulators 612 and 613 and the through hole of one conductive elastic body 604 immediately below the through hole 63, respectively.
- a through hole having a shaft substantially the same as the central axis of the guide pin 64 of the anode side metal block 602 is formed in the insulators 612 and 613 and one of the conductive elastic bodies 604 immediately below the insulators.
- the guide pin 64 inserts the through hole.
- the central axis of the guide pin 64 is perpendicular to the cross section of the guide pin 64 and is a straight line passing through the center point of the cross section.
- the central axis of the through hole is perpendicular to the surface where the insulators 612 and 613 and the conductive elastic body 604 are in contact with each other, and is a straight line passing through the center point of the through hole.
- substantially the same includes “same”, and includes a difference such that the positions and angles of the insulators 612 and 613 are uniquely determined with respect to the metal block 602 on the anode side.
- the sizes and shape of the cross section of the through holes formed in the insulators 612 and 613 and one of the conductive elastic bodies 604 are almost the same as the size and shape of the cross section of the guide pin 64, the positions of the insulators 612 and 613.
- the angle is uniquely determined with respect to the metal block 602 on the anode side.
- the other conductive elastic body and the cathode side metal block are sequentially arranged on the KTN crystal 601 and the insulators 612 and 613 (not shown).
- the other conductive elastic body and the metal block on the cathode side are provided with through holes for passing screws so as to be directly above the through holes 62 of the insulators 612 and 613.
- the through hole having the axis substantially the same as the central axis of the screw hole 65 of the anode side metal block 602 is the cathode side metal block, the other conductive elastic body, the insulators 612, 613, and one of them. It is formed in the conductive elastic body 604, and the screw is inserted into the through hole, inserted into the screw hole 65, and screwed into the screw groove formed in the screw hole 65.
- the central axis of the screw hole 65 is perpendicular to the cross section of the screw hole 65 and is a straight line passing through the center point of the cross section.
- the central axis of the through hole is perpendicular to the surface where the insulators 612 and 613 and the conductive elastic body 604 are in contact with each other, and is a straight line passing through the center point of the through hole.
- substantially the same includes “same”, and includes a difference such that the positions and angles of the insulators 612 and 613 are uniquely determined with respect to the metal block 602 on the anode side.
- the insulators 612 and 613 are fixed to the anode-side metal block 602, and the positions and angles of the insulators 612 and 613 are uniquely determined with respect to the anode-side metal block 602, so that the position and orientation of the KTN crystal 601 can be changed. Uniquely determined.
- the guide pin or the screw does not interfere with the irradiation.
- the positions of the through hole 62, the screw hole 65, the through hole for the guide pin 63, and the guide pin are not arranged between the excitation light source and the KTN crystal.
- the positions of the through holes, the screw holes, and the guide pins may be arranged at any position, not limited to the arrangement in the present embodiment.
- a KTN crystal having an electrode spacing of 2 mm was used as the KTN crystal 201.
- the KTN crystal has a rectangular parallelepiped shape, and its size is 4.0 (y direction) ⁇ 3.2 (x direction) ⁇ 2.0 (z direction) mm 3 .
- An electrode film made of Ti / Pt / Au was deposited on a surface of 4.0 ⁇ 3.2 mm 2 .
- the temperature of the metal block 202 on the anode side was controlled by controlling the Pelche element with the Pelche controller, and the temperature of the metal block 202 on the anode side was set to 37.58 ° C. If the temperature of the cathode side metal block 203 is also set to 37.58 ° C., the relative permittivity of the KTN crystal, which is the KTN crystal 201, is 17,500.
- the temperature of the cathode side metal block 203 was set to 39.08 ° C. That is, the temperature was set 1.5 ° C. higher than the temperature of the metal block 202 on the anode side.
- the shape of the KTN crystal is a rectangular parallelepiped, but the present invention is not limited to this.
- the shape of the KTN crystal may be a polygonal prism.
- the shape may be such that the lateral portion (end face or ridge angle) of the KTN crystal can be fitted to the notch of the insulator.
- the incident light may be reflected at the end face in the KTN crystal a plurality of times and then emitted.
- both of the two insulators have notches are shown, but the present invention is not limited to this. If one of at least two insulators has a notch and is fitted with the KTN crystal, the position and orientation of the KTN crystal can be uniquely determined.
- the incident surface of the KTN crystal is perpendicular to the incident light, but the present invention is not limited to this.
- the incident angle may be a finite angle other than 0 °.
- the KTN crystal 701 is a rectangular parallelepiped.
- the insulators 712 and 713 have a notch that fits into the KTN crystal 701.
- the KTN crystal 701 is arranged on the anode-side metal block 702, and the insulators 712 and 713 are arranged so as to sandwich the KTN crystal 701.
- the incident light 71 is incident on the KTN crystal 701.
- the output light 72 After refracting according to Snell's law on the incident surface, it propagates in the KTN crystal 701, and after refracting according to Snell's law on the emitting surface, the output light 72 is emitted. With such a configuration, it is possible to reduce the influence of the return light.
- a through hole may be provided in the direction of irradiating the insulator with the excitation light, and the KTN crystal may be irradiated with the excitation light through the through hole.
- a conductive elastic body is provided both between the KTN crystal and the metal block on the anode side and between the KTN crystal and the metal block on the cathode side.
- a conductive elastic body may be provided between either one.
- the effect in the embodiment of the present invention can be obtained even if the conductive elastic body is not provided.
- KTN crystals are used as the electro-optical material
- KLTN K 1-y Li y Ta 1-x Nb x O
- Any dielectric phase may be used as long as it is a dielectric phase and has a trap for accumulating electric charges inside.
- the present invention can be applied to various optical devices such as laser printers and wavelength sweep light sources.
- Optical deflector 11 Excitation light source 101 KTN crystal 102 Anode side metal block 103 Cathode side metal block 104, 105 Conductive elastic body 106, 107 Temperature sensor 108, 109 Pelche element (temperature control element) 110, 111 Heat sink 112, 113 Insulator
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Abstract
Description
本発明の第1の実施の形態係る光偏向器について図1~図2を参照して説明する。
本実施の形態に係る光偏向器10は、図1に示すように、順に、陽極側金属ブロック102、KTN結晶101、陰極側金属ブロック103を備え、KTN結晶101と陽極側金属ブロック102との間、KTN結晶101と陰極側金属ブロック103との間それぞれに導電性弾性体104、105を備える。
本発明の第2の実施の形態について図3A~図4を参照して説明する。
本発明の第2の実施の形態に係る光偏向器は、第1の実施の形態と略同様の構成を有するが、絶縁体の形状が異なる。
本実施の形態に係る光偏向器30では、励起光源が、光偏向器と一体となるように配置される。図4に示すように、励起光1に対して透明な絶縁体212において、KTN結晶201と接する面と対向する面に、励起光源31が配置される。励起光源31から出射される励起光1は、KTN結晶201に照射される。
本発明の第1の実施の形態について図5~図6Bを参照して説明する。本発明の第3の実施の形態に係る光偏向器は、第2の実施の形態と略同様の構成を有するが、導電性弾性体の形状、配置が異なる。
本実施の形態に係る光偏向器40は、図5に示すように、順に、陽極側金属ブロック、導電性弾性体、KTN結晶、導電性弾性体、陰極側金属ブロックを備える。
本発明の第4の実施の形態について図7A~図7Bを参照して説明する。本発明の第4の実施の形態に係る光偏向器は、第2の実施の形態と略同様の構成を有するが、KTN結晶の形状、構成が異なり、絶縁体の形状も異なる。
図7Aに、第4の実施の形態に係る光偏向器50の部材である、2個のKTN結晶501a、501b、陽極側金属ブロック502、絶縁体512、513を示す。絶縁体512、513はそれぞれ、KTN結晶501a、501bと嵌合する切り欠きを有する。
本発明の第1の実施例に係る光偏向器として、絶縁体の位置と角度を陽極側金属ブロックに対して一意に定める構成の一例を説明する。本実施例に係る光偏向器60は、第2の実施の形態に係る光偏向器20と略同様の構成を有するが、ガイドピンやねじを用いて、絶縁体と陽極側金属ブロックとを固定する点で異なる。
本発明の第2の実施例に係る光偏向器について説明する。本実施例に係る光偏向器には、第2の実施の形態に係る光偏向器20を用いた。
11 励起光源
101 KTN結晶
102 陽極側金属ブロック
103 陰極側金属ブロック
104、105 導電性弾性体
106、107 温度センサ
108、109 ペルチェ素子(温度制御素子)
110、111 ヒートシンク
112、113 絶縁体
Claims (8)
- 常誘電相であって、内部に電荷を蓄積するためのトラップを有する誘電体を有し、当該誘電体を透過する光を、当該誘電体の当該透過方向に垂直な方向に電圧を印加して偏向する光偏向器であって、
順に、第1の導電体と、
前記誘電体と、
第2の導電体と、
前記第1の導電体と前記第2の導電体との間で、前記誘電体の、前記電圧の印加方向に平行な両方の側面それぞれに当接する2個の絶縁体とを備え、
前記第1の導電体と前記第2の導電体との間に電圧が印加され、
前記第1の導電体と前記第2の導電体は、それぞれの温度が独立して制御され、
前記誘電体の一方の側面に、一方の前記絶縁体を介して励起光が照射されること
を特徴とする光偏向器。 - 前記2個の絶縁体のうち、少なくとも一方の絶縁体が切り欠きを有し、当該切り欠きが前記誘電体と嵌合すること
を特徴とする請求項1に記載の光偏向器。 - 前記誘電体の形状が、直方体であって、
前記切り欠きが、溝形状を有し、断面形状が矩形であり、
前記誘電体の側面が、前記切り欠きの端面に当接して嵌合すること
を特徴とする請求項2に記載の光偏向器。 - 常誘電相であって、内部に電荷を蓄積するためのトラップを有する誘電体を有し、当該誘電体を透過する光を、当該誘電体の当該透過方向に垂直な方向に電圧を印加して偏向する光偏向器であって、
順に、第1の導電体と、
複数の前記誘電体と、
第2の導電体と、
少なくとも2つの前記誘電体のうち、一の誘電体の基端部と他の誘電体の基端部それぞれと嵌合する2個の絶縁体とを備え、
前記2個の絶縁体が、前記複数の前記誘電体を挟み込むように配置され、
前記第1の導電体と前記第2の導電体との間に電圧が印加され、
一方の前記絶縁体を介して、前記複数の前記誘電体に、励起光が照射され、
前記透過する光が前記複数の誘電体内の端面で複数回反射して出射することを
特徴とする光偏向器。 - 前記第1の導電体が、前記誘電体側の面にガイドピンとねじ穴を有し、
前記絶縁体が、前記ねじ穴の第1の中心軸と略同一の軸を中心軸とする第1の貫通孔と、前記ガイドピンの第2の中心軸と略同一の軸を中心軸とする第2の貫通孔とを有し、
前記第2の導電体が、前記第1の中心軸と略同一の軸を中心軸とする第3の貫通孔を有し、
前記ガイドピンが、前記第2の貫通孔に挿通され、
ねじが、順に、前記第3の貫通孔、前記第1の貫通孔に挿通され、前記ねじ穴と螺合すること
を特徴とする請求項1から請求項4のいずれか一項に記載の光偏向器。 - 前記一方の前記絶縁体が透明であること
を特徴とする請求項1から請求項5のいずれか一項に記載の光偏向器。 - 前記誘電体と前記第1の導電体との間と、前記誘電体と前記第2の導電体との間との、少なくとも一方に導電性弾性体を備えること
を特徴とする請求項1から請求項6のいずれか一項に記載の光偏向器。 - 前記第1の導電体および前記第2の導電体それぞれに配置される温度制御素子と、
前記第1の導電体および前記第2の導電体それぞれに配置される温度センサと、
前記温度制御素子に接続する温度制御部と
前記励起光を出射する励起光源と
を備える請求項1から請求項7のいずれか一項に記載の光偏向器。
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JP2013195916A (ja) * | 2012-03-22 | 2013-09-30 | Nippon Telegr & Teleph Corp <Ntt> | 光偏向器の保持機構 |
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JP2017203847A (ja) * | 2016-05-10 | 2017-11-16 | 日本電信電話株式会社 | 光偏向器 |
JP2019215462A (ja) * | 2018-06-13 | 2019-12-19 | 日本電信電話株式会社 | 光偏向器 |
-
2020
- 2020-10-14 WO PCT/JP2020/038839 patent/WO2022079846A1/ja active Application Filing
- 2020-10-14 US US18/248,893 patent/US20240019757A1/en active Pending
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Patent Citations (7)
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JP2004363129A (ja) * | 2003-05-30 | 2004-12-24 | Keyence Corp | 光学結晶ホルダ、固体レーザ装置、及び光学結晶の固定方法固体レーザ結晶位置決め構造とその方法 |
JP2013195916A (ja) * | 2012-03-22 | 2013-09-30 | Nippon Telegr & Teleph Corp <Ntt> | 光偏向器の保持機構 |
JP2016038465A (ja) * | 2014-08-07 | 2016-03-22 | 日本電信電話株式会社 | 電気光学デバイス |
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JP2017203847A (ja) * | 2016-05-10 | 2017-11-16 | 日本電信電話株式会社 | 光偏向器 |
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