WO2022071629A1 - Électrode de référence destinée à un capteur de mesure d'ions et son procédé de fabrication - Google Patents

Électrode de référence destinée à un capteur de mesure d'ions et son procédé de fabrication Download PDF

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Publication number
WO2022071629A1
WO2022071629A1 PCT/KR2020/016911 KR2020016911W WO2022071629A1 WO 2022071629 A1 WO2022071629 A1 WO 2022071629A1 KR 2020016911 W KR2020016911 W KR 2020016911W WO 2022071629 A1 WO2022071629 A1 WO 2022071629A1
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WO
WIPO (PCT)
Prior art keywords
benzene
fluorine
graphene
reference electrode
ions
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PCT/KR2020/016911
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English (en)
Korean (ko)
Inventor
조승민
조민구
김기수
오홍기
송광섭
조다애
조해신
Original Assignee
(주)엠씨케이테크
금오공과대학교 산학협력단
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Publication of WO2022071629A1 publication Critical patent/WO2022071629A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/28—Electrolytic cell components
    • G01N27/30—Electrodes, e.g. test electrodes; Half-cells
    • G01N27/301—Reference electrodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/28—Electrolytic cell components
    • G01N27/30—Electrodes, e.g. test electrodes; Half-cells
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/28—Electrolytic cell components
    • G01N27/30—Electrodes, e.g. test electrodes; Half-cells
    • G01N27/333—Ion-selective electrodes or membranes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G01N27/4146—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS involving nanosized elements, e.g. nanotubes, nanowires

Definitions

  • the present invention relates to a reference electrode for an ion measurement sensor including graphene containing a fluorine functional group treated with fluorine-benzene, and a method for manufacturing the same.
  • An ion measuring sensor that detects ions in a solution containing ions requires a reference electrode capable of applying a constant potential in the solution.
  • the Ag/AgCl reference electrode which is a generally used standard electrode, contains a bar-shaped glass material and a silver bar, it is easy to break, expensive, and difficult to manufacture micro-sized electrodes.
  • An object of the present invention is to provide a reference electrode for an ion measuring sensor with improved reproducibility and reliability without exhibiting sensitivity to not only hydrogen ions present in a solution but also sodium ions, calcium ions, potassium ions, and the like.
  • An object of the present invention is to provide a reference electrode for an ion measurement sensor manufactured by one printing and application.
  • An object of the present invention is to provide a reference electrode for an ion measuring sensor that is easily manufactured by being compatible with a semiconductor manufacturing process for manufacturing the ion measuring sensor.
  • An object of the present invention is to provide a reference electrode for an ion measuring sensor manufactured without being limited by equipment/space/processing area.
  • An object of the present invention is to provide a reference electrode for a micro-sized ion measuring sensor.
  • a reference electrode for an ion measuring sensor includes graphene including a fluorine functional group treated with fluorine-benzene.
  • the graphene according to an embodiment of the present invention may be non-oxidized graphene or reduced graphene oxide (rGo).
  • the graphene containing the fluorine functional group treated with the fluorine-benzene according to an embodiment of the present invention is a fluorine-benzene (Fluoro-benzene) solution in which non-oxidized graphene powder or reduced graphene oxide powder is dispersed. may have been formed.
  • the graphene containing the fluorine functional group treated with the fluorine-benzene according to an embodiment of the present invention is a fluorine-benzene solution on a non-oxidized graphene sheet or a reduced graphene oxide sheet. It may be formed by coating.
  • the reference electrode for an ion measurement sensor may further include a substrate, and the fluorine-benzene-treated non-oxidized graphene or reduced graphene oxide-containing fluorine functional group is a sheet. It may be formed on the substrate in the form.
  • Ions of the ion measuring sensor may be, for example, hydrogen ions, sodium ions, calcium ions, potassium ions, magnesium ions, nitrate ions, sulfate ions, chlorine ions, halogen ions, ammonium ions, and the like.
  • a method for manufacturing a reference electrode for an ion measurement sensor includes depositing a gold (Au) electrode on a substrate; and coating the graphene containing the fluorine functional group treated with the fluoro-benzene on the substrate or a gold (Au) electrode deposited on the substrate; including, wherein the fluorine functional group is included
  • the non-oxide graphene or reduced graphene oxide containing the fluorine functional group treated with the fluorine-benzene is applied on the substrate in powder form, and the fluorine-benzene (Fluoro-benzene) is applied on the substrate.
  • -benzene)-treated graphene containing a fluorine functional group is formed by dispersing non-oxidized graphene powder or reduced graphene oxide powder in a fluoro-benzene solution (fluoro-benzene).
  • a method for manufacturing a reference electrode for an ion measurement sensor includes: forming a graphene sheet on a substrate; depositing a gold (Au) electrode on a portion of the graphene sheet ; and applying a fluoro-benzene solution on the graphene sheet to prepare graphene containing a fluorine functional group treated with fluoro-benzene; including, the graphene
  • the fin sheet is a non-oxidized graphene sheet or a reduced graphene oxide sheet.
  • the present invention provides a reference electrode for an ion measuring sensor with improved reproducibility and reliability without exhibiting sensitivity to not only hydrogen ions present in a solution but also sodium ions, calcium ions, potassium ions, and the like.
  • the present invention provides a reference electrode for an ion measuring sensor that is manufactured without being limited by equipment/space/processing area.
  • An object of the present invention is to provide a reference electrode for a miniaturized ion measuring sensor.
  • Example 1 illustrates a process for preparing reduced graphene oxide powder containing a fluorine functional group according to Example 1 of the present invention.
  • Example 2 shows an ion measuring sensor to which a reference electrode according to Example 1 of the present invention is applied.
  • Example 4 is a graph comparing the sensitivity to ions of the reference electrode according to Comparative Example and Example 1 of the present invention.
  • Example 5 is a graph comparing the sensitivity to ions of the reference electrode according to Comparative Example and Example 1 of the present invention.
  • Example 7 shows a graphene sheet manufacturing process including a fluorine functional group according to Example 2 of the present invention.
  • Example 8 shows a reference electrode according to Example 2 of the present invention.
  • FIG 11 is a graph showing the result of characteristic change with respect to the ion concentration of the reference electrode according to Comparative Example and Example 2 of the present invention.
  • Example 12 is a graph comparing the sensitivity to ions of the reference electrode according to Comparative Example and Example 2 of the present invention.
  • Example 14 shows a manufacturing process of a reference electrode according to Example 2 of the present invention.
  • Embodiment 15 is a reference electrode according to Embodiment 2 of the present invention and an example of application thereof to a G-ISFET.
  • 16 is an example of a method for measuring ions in a solution by applying a reference electrode according to Example 2 of the present invention to a G-ISFET.
  • the fluorine functionalization degree increases as the atomic ratio of fluorine atoms forming a C-F bond to carbon atoms increases, and as the fluorine functionalization degree increases, reproducibility and reliability as a reference electrode increase.
  • the graphene according to an embodiment of the present invention may be non-oxidized graphene or reduced graphene oxide (rGo).
  • the graphene when it is reduced graphene oxide, as an example, it may be prepared by reducing graphene oxide and then introducing a fluorine functional group to the surface of the reduced graphene oxide.
  • the fluorine functional group may be introduced to the graphene oxide surface and then reduced, or may be prepared by simultaneously attaching and reducing the functional group.
  • the method of manufacturing graphene containing fluorine functional groups by fluorine-benzene treatment enables fluorine functionalization within a short time compared to fluorine plasma treatment techniques, and fluorine functionalization of large-area graphene is convenient. can do.
  • the reference electrode for an ion measurement sensor is, as an example, a graphene powder containing a fluorine functional group treated with fluorine-benzene, or a fluorine-benzene treated It may include a graphene sheet (sheet) containing a fluorine functional group.
  • the graphene containing the fluorine functional group exists in the form of powder, it can be used in the form of ink to have a reference electrode function through a single printing and application process.
  • the graphene powder may be dispersed in an amount of 30 to 70 mg in 1 ml of a fluoro-benzene solution, or 40 to 60 mg in 1 ml.
  • the electrode must be manufactured by repeated application, and if it exceeds the above weight range, application is difficult due to viscosity.
  • reproducibility and reliability are increased, and ion sensitivity can be effectively controlled.
  • the reference electrode for an ion measurement sensor may further include a substrate, and the fluorine-benzene-treated non-oxidized graphene or reduced graphene oxide containing a fluorine functional group is powder It may be applied to the substrate in the form of.
  • the thickness of the coating layer may vary depending on the concentration of the solution in which the graphene powder is dispersed.
  • the thickness of the coating layer may be 10 ⁇ m to 1,000 ⁇ m, and the degree of fluorine functionalization increases in the weight range to increase reproducibility and reliability as a reference electrode, and ion sensitivity can be effectively controlled.
  • non-oxidized graphene or reduced graphene oxide is applied on a substrate in powder form to form a reference electrode
  • non-oxidized graphene or reduced graphene containing a fluorine functional group is applied only by one application or printing process. It is possible to form a graphene oxide reference electrode.
  • the process using graphene powder is compatible with semiconductor manufacturing processes such as a stencil technique, so that a reference electrode for an ion measurement sensor can be manufactured in a simple and economical process.
  • a gold electrode may be deposited on the substrate, and non-oxidized graphene or reduced graphene oxide containing a fluorine functional group treated with fluoro-benzene may also be formed on the gold electrode in the form of powder. .
  • the gold electrode is for forming an ohmic contact when a voltage is applied to a reference electrode including graphene including a fluorine functional group.
  • a protective layer or an insulating layer for protecting the gold electrode from an ion solution may be formed on the gold electrode.
  • the protective layer may be formed of an epoxy resin or a similar polymer material.
  • the fluorine-benzene (Fluoro-benzene)-treated graphene containing a fluorine functional group is coated with a fluorine-benzene solution on a non-oxidized graphene sheet or a reduced graphene oxide sheet. It may be formed as a result (see FIG. 8).
  • the graphene may be non-oxidized graphene. This is because, when the graphene surface is oxidized, electrons are lost in the hexagonal rings of graphene and the free electron cloud is reduced, so that the ⁇ - ⁇ interaction can be more active in the non-oxidized graphene.
  • the reference electrode for an ion measurement sensor may further include a substrate, and the fluorine-benzene-treated non-oxidized graphene or reduced graphene oxide-containing fluorine functional group is a sheet. It may be formed on the substrate in the form.
  • the graphene including the fluorine functional group exists in the form of a sheet
  • the graphene sheet formed on the substrate is fluorine-functionalized by fluorine-benzene treatment.
  • the graphene sheet including the fluorine functional group may include a fluoro-benzene solution on the graphene sheet formed on the substrate.
  • This may be fluorine-functionalized by a process such as applying a fluoro-benzene solution to the graphene sheet formed on the substrate (see FIG. 7 ).
  • the substrate may be a material selected from the group consisting of silicon, glass, metal, plastic, and ceramic, but is not particularly limited thereto.
  • the substrate may be selected from the group consisting of silicon, glass, polystyrene, polymethylacrylate, polycarbonate, and ceramic.
  • the method of applying fluorine-benzene solution to the graphene sheet formed on the substrate for fluorine functionalization is possible in a short period of time compared to the fluorine plasma treatment technique.
  • Graphene of the area can be easily functionalized with fluorine.
  • graphene is functionalized directly with a fluoro-benzene solution, it is not limited in equipment, space, and processing area compared to plasma processing techniques.
  • fluorine functionalization is possible within a short time, and graphene of a large area can be conveniently functionalized with fluorine.
  • a gold (Au) electrode may be deposited on the substrate or on the non-oxidized graphene or reduced graphene oxide sheet including the fluorine functional group.
  • the gold electrode is for forming an ohmic contact when a voltage is applied to a reference electrode including graphene including a fluorine functional group.
  • a protective layer or an insulating layer for protecting the gold electrode from an ion solution may be formed on the gold electrode.
  • the protective layer may be formed of an epoxy resin or a similar polymer material.
  • Ions of the ion measuring sensor to which the reference electrode is applied according to an embodiment of the present invention may be hydrogen ions, sodium ions, calcium ions, or potassium ions. Since the present invention treats non-oxidized graphene or reduced graphene oxide with a fluorine-benzene solution for functionalization with fluorine, it does not show sensitivity to H + as well as K + , Na + , and Ca 2 + ions. It is possible to provide a stable reference electrode even for long-term use.
  • the ion measuring sensor may be an ion sensing field effect transistor (ISFET) based ion measuring sensor.
  • ISFET ion sensing field effect transistor
  • the ion sensing field effect transistor may include a substrate; insulating layer; a source electrode and a drain electrode spaced apart from each other; It may include a channel layer disposed between the source electrode and the drain electrode (see FIGS. 15 and 16 ).
  • a method for manufacturing a reference electrode for an ion measurement sensor includes depositing a gold (Au) electrode on a substrate; and coating the graphene containing the fluorine functional group treated with the fluoro-benzene on the substrate or a gold (Au) electrode deposited on the substrate; including, wherein the fluorine functional group is included
  • the non-oxide graphene or reduced graphene oxide containing the fluorine functional group treated with the fluorine-benzene is applied on the substrate in powder form, and the fluorine-benzene (Fluoro-benzene) is applied on the substrate.
  • -benzene)-treated graphene containing functional groups is formed by dispersing non-oxidized graphene powder or reduced graphene oxide powder in a fluoro-benzene solution. Its preparation method has been described above.
  • the method for manufacturing a reference electrode for an ion measurement sensor includes forming a graphene sheet on a substrate; gold (Au) on a part of the graphene sheet depositing an electrode; and applying a fluoro-benzene solution on the graphene sheet to prepare graphene containing a fluorine functional group treated with fluoro-benzene; including, the graphene
  • the fin sheet is a non-oxidized graphene sheet or a reduced graphene oxide sheet (see FIG. 14 ). Its preparation method has been described above.
  • Example 1 Preparation of a reference electrode including a material containing reduced graphene oxide powder containing a fluorine functional group by fluorine-benzene treatment.
  • an insulating film forming process may be required depending on the shape of the gold electrode.
  • the insulating film region may be formed of an epoxy or similar polymer material when manufactured in the same form as the structure shown in FIG. 14 .
  • Comparative Example 1-2 Preparation of a reference electrode comprising pure reduced graphene oxide powder not containing a fluorine functional group.
  • Pure reduced graphene oxide powder that does not contain fluorine functional groups was prepared as a dispersed graphene ink based on an organic solvent.
  • an organic solvent such as acetone, ethanol, methanol, or dimethylformamide may be used as a solution for dispersing the pure reduced graphene oxide powder.
  • an insulating film forming process may be required depending on the shape of the gold electrode.
  • an insulating film may be formed of an epoxy or similar polymer material when manufactured in the same form as the structure shown in FIG. 14 .
  • Example 1 As in Comparative Example 1-1 using Ag/AgCl, a small amount of V GS deviation was exhibited weekly in the increase and decrease of the sodium ion concentration. Therefore, it can be confirmed that the reduced pure graphene reference electrode containing fluorine functional groups treated with fluorine-benzene does not have sensitivity to changes in sodium ion concentration.
  • Example 2 Preparation of a reference electrode including a non-oxidized graphene sheet including a fluorine functional group by fluorine-benzene treatment.
  • an electrode was formed on the graphene sheet by depositing gold in an area except for the size of 500 * 5000 um.
  • the size of the sheet exposed to the solution may be changed according to measurement conditions and manufacturing processes.
  • the fluorine-benzene treatment may be performed after forming the insulating layer.
  • Comparative Example 2 Preparation of a reference electrode comprising a pure non-oxidized graphene sheet not containing a fluorine functional group
  • An electrode was formed on the graphene sheet by depositing gold in the region except for the size of 500 * 5000 um. Thereafter, an insulating film was formed on the gold electrode part using an epoxy or similar polymer material. In this case, the size of the sheet exposed to the solution may be changed according to measurement conditions and manufacturing processes.
  • Example 2 and Comparative Example 2 can be confirmed by Raman spectroscopy.
  • Example 2 As compared to Comparative Example 2, it can be confirmed that there is no sensitivity according to the change in acidity.

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Abstract

Une électrode de référence destinée à un capteur de mesure d'ions selon un mode de réalisation de la présente invention comprend du graphène portant un groupe fonctionnel fluoré traité par fluorobenzène et ne présente pas de réactivité non seulement aux ions hydrogène, mais également aux ions sodium, aux ions calcium, aux ions potassium, etc. présents dans une solution, et ainsi, peut être fournie en tant qu'électrode de référence d'un capteur de mesure d'ions avec une reproductibilité et une fiabilité améliorées.
PCT/KR2020/016911 2020-09-29 2020-11-26 Électrode de référence destinée à un capteur de mesure d'ions et son procédé de fabrication WO2022071629A1 (fr)

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KR1020200127003A KR102626203B1 (ko) 2020-09-29 2020-09-29 이온 측정 센서용 기준전극 및 이의 제조방법
KR10-2020-0127003 2020-09-29

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Citations (5)

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Publication number Priority date Publication date Assignee Title
CN102757035B (zh) * 2011-04-26 2014-02-19 海洋王照明科技股份有限公司 一种石墨烯的制备方法
CN104211048A (zh) * 2013-06-05 2014-12-17 中国科学院上海有机化学研究所 一种氟化石墨烯的制备方法
KR20150111668A (ko) * 2014-03-26 2015-10-06 한국과학기술원 불화암모늄을 이용한 ｎ－도핑된 그래핀 및 전기소자의 제조방법，그에 의한 그래핀 및 전기소자
KR101606148B1 (ko) * 2014-10-29 2016-03-25 서울대학교 산학협력단 불소 원자가 결합된 그래핀 산화물을 포함하는 가스센서 및 이의 제조방법
KR20190074652A (ko) * 2017-12-20 2019-06-28 금오공과대학교 산학협력단 그래핀 기준전극 제조 방법

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8975326B2 (en) * 2010-03-15 2015-03-10 Lei Zhai Carbon nanotube or graphene-based aerogels
KR102081891B1 (ko) 2013-02-15 2020-02-26 삼성전자주식회사 그래핀 소자 및 이를 포함하는 전자 기기

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102757035B (zh) * 2011-04-26 2014-02-19 海洋王照明科技股份有限公司 一种石墨烯的制备方法
CN104211048A (zh) * 2013-06-05 2014-12-17 中国科学院上海有机化学研究所 一种氟化石墨烯的制备方法
KR20150111668A (ko) * 2014-03-26 2015-10-06 한국과학기술원 불화암모늄을 이용한 ｎ－도핑된 그래핀 및 전기소자의 제조방법，그에 의한 그래핀 및 전기소자
KR101606148B1 (ko) * 2014-10-29 2016-03-25 서울대학교 산학협력단 불소 원자가 결합된 그래핀 산화물을 포함하는 가스센서 및 이의 제조방법
KR20190074652A (ko) * 2017-12-20 2019-06-28 금오공과대학교 산학협력단 그래핀 기준전극 제조 방법

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