WO2022049787A1 - 基板保持ハンドおよび基板搬送ロボット - Google Patents
基板保持ハンドおよび基板搬送ロボット Download PDFInfo
- Publication number
- WO2022049787A1 WO2022049787A1 PCT/JP2020/041030 JP2020041030W WO2022049787A1 WO 2022049787 A1 WO2022049787 A1 WO 2022049787A1 JP 2020041030 W JP2020041030 W JP 2020041030W WO 2022049787 A1 WO2022049787 A1 WO 2022049787A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- blade
- tilt
- frame
- mounting member
- substrate
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 103
- 238000004140 cleaning Methods 0.000 description 6
- 230000003028 elevating effect Effects 0.000 description 5
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J11/00—Manipulators not otherwise provided for
- B25J11/0095—Manipulators transporting wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/0004—Gripping heads and other end effectors with provision for adjusting the gripped object in the hand
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/0014—Gripping heads and other end effectors having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/0052—Gripping heads and other end effectors multiple gripper units or multiple end effectors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/009—Gripping heads and other end effectors with pins for accurately positioning the object on the gripping head
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
- H01L21/67781—Batch transfer of wafers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
Abstract
Description
本実施形態では、以下のような効果を得ることができる。
なお、今回開示された実施形態は、すべての点で例示であって制限的なものではないと考えられるべきである。本発明の範囲は、上記した実施形態の説明ではなく請求の範囲によって示され、さらに請求の範囲と均等の意味および範囲内でのすべての変更(変形例)が含まれる。
2 アーム
31 フレーム
32 ブレード
32a 主面
33 取付部材
34 傾き調整機構
34a 傾き調整ピン
35 締結部材
100 基板搬送ロボット
W 基板
C1 所定の回転軸線
Claims (9)
- フレームと、
基板を支持するブレードと、
前記ブレードを支持するとともに、前記ブレードを前記フレームに取り付けるための取付部材と、
前記フレームに対する前記取付部材の傾きを調整することにより、前記ブレードの側方視における水平方向に対する傾きを調整可能な傾き調整機構と、を備える、基板保持ハンド。 - 前記傾き調整機構は、傾き調整ピンを含み、
前記傾き調整ピンは、前記取付部材に挿入されるとともに、前記取付部材を水平方向のうち前記フレームと前記ブレードとが並ぶ前後方向に直交する側方に延びる所定の回転軸線周りに回転可能に支持し、前記側方に延びるように設けられている、請求項1に記載の基板保持ハンド。 - 前記取付部材は、前記ブレードの基端部の一方側および他方側を前記フレームにそれぞれ取り付けるための一対の取付部材を含み、
前記傾き調整ピンは、前記一対の取付部材に対応する一対の傾き調整ピンを含み、
前記傾き調整機構は、前記一対の傾き調整ピンを回転中心として前記一対の取付部材を前記所定の回転軸線周りに回転させることにより、前記ブレードの側方視における水平方向に対する傾きを調整可能である、請求項2に記載の基板保持ハンド。 - 前記傾き調整ピンは、前記フレームに支持されるとともに、前記フレームの側方から突出して前記取付部材に挿入されるように設けられている、請求項2に記載の基板保持ハンド。
- 前記傾き調整機構は、前記傾き調整ピンを回転中心として前記取付部材を前記所定の回転軸線周りに回転させることにより、前記取付部材の傾きを調整した状態で、締結部材により前記取付部材を前記フレームに締結固定することにより、前記ブレードの側方視における水平方向に対する傾きを調整可能である、請求項2に記載の基板保持ハンド。
- 前記ブレードは、前記基板を各々支持する複数のブレードを含み、
前記取付部材は、前記複数のブレードを共通に支持し、
前記傾き調整機構は、前記フレームに対する前記取付部材の傾きを調整することにより、前記複数のブレードの側方視における水平方向に対する傾きを一括して調整可能である、請求項1に記載の基板保持ハンド。 - 前記複数のブレードは、前記ブレードの主面に垂直な方向に所定のピッチで並んで配置されており、
前記傾き調整機構は、前記ブレードの主面に垂直な方向における前記複数のブレード間のピッチを維持した状態で、前記複数のブレードの側方視における水平方向に対する傾きを一括して調整可能である、請求項6に記載の基板保持ハンド。 - 前記取付部材は、前記フレームの側面に側方から取り付けられている、請求項1に記載の基板保持ハンド。
- 基板保持ハンドと、
前記基板保持ハンドを移動させるアームと、を備え、
前記基板保持ハンドは、
フレームと、
基板を支持するブレードと、
前記ブレードを支持するとともに、前記ブレードを前記フレームに取り付けるための取付部材と、
前記フレームに対する前記取付部材の傾きを調整することにより、前記ブレードの側方視における水平方向に対する傾きを調整可能な傾き調整機構と、を含む、基板搬送ロボット。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US18/024,419 US20230311339A1 (en) | 2020-09-03 | 2020-11-02 | Substrate holding hand and substrate conveying robot |
JP2022546870A JP7427796B2 (ja) | 2020-09-03 | 2020-11-02 | 基板保持ハンドおよび基板搬送ロボット |
KR1020237008333A KR20230048134A (ko) | 2020-09-03 | 2020-11-02 | 기판 유지 핸드 및 기판 반송 로봇 |
CN202080103710.0A CN116325108A (zh) | 2020-09-03 | 2020-11-02 | 基板保持机械手和基板搬运机器人 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020-148494 | 2020-09-03 | ||
JP2020148494 | 2020-09-03 |
Publications (1)
Publication Number | Publication Date |
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WO2022049787A1 true WO2022049787A1 (ja) | 2022-03-10 |
Family
ID=80490961
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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PCT/JP2020/041030 WO2022049787A1 (ja) | 2020-09-03 | 2020-11-02 | 基板保持ハンドおよび基板搬送ロボット |
Country Status (6)
Country | Link |
---|---|
US (1) | US20230311339A1 (ja) |
JP (1) | JP7427796B2 (ja) |
KR (1) | KR20230048134A (ja) |
CN (1) | CN116325108A (ja) |
TW (1) | TWI779382B (ja) |
WO (1) | WO2022049787A1 (ja) |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11165863A (ja) * | 1997-12-02 | 1999-06-22 | Dainippon Screen Mfg Co Ltd | 基板搬送装置 |
JPH11312723A (ja) * | 1998-04-30 | 1999-11-09 | Dainippon Screen Mfg Co Ltd | 基板搬送装置および方法 |
JP2003019687A (ja) * | 2001-07-03 | 2003-01-21 | Aitec:Kk | ロボットハンドの駆動装置 |
JP2007283436A (ja) * | 2006-04-17 | 2007-11-01 | Nachi Fujikoshi Corp | ロボット、ロボットシステム及びハンド装置の姿勢制御方法 |
JP2010067871A (ja) * | 2008-09-12 | 2010-03-25 | Dainippon Screen Mfg Co Ltd | 基板搬送装置およびそれを備えた基板処理装置 |
WO2017037976A1 (ja) * | 2015-09-03 | 2017-03-09 | 川崎重工業株式会社 | 基板移載装置 |
JP2019519913A (ja) * | 2016-05-05 | 2019-07-11 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 亀裂が低減されたロボットサブアセンブリ、エンドエフェクタアセンブリ、及び方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003203962A (ja) | 2002-01-07 | 2003-07-18 | Kondo Seisakusho:Kk | ウエハ把持装置 |
JP5553065B2 (ja) | 2011-09-22 | 2014-07-16 | 株式会社安川電機 | 基板搬送用ハンドおよび基板搬送ロボット |
JP7137047B2 (ja) * | 2018-03-15 | 2022-09-14 | シンフォニアテクノロジー株式会社 | Efem、及び、efemにおけるガス置換方法 |
TWI805795B (zh) * | 2018-07-20 | 2023-06-21 | 美商應用材料股份有限公司 | 基板定位設備與方法 |
-
2020
- 2020-11-02 JP JP2022546870A patent/JP7427796B2/ja active Active
- 2020-11-02 KR KR1020237008333A patent/KR20230048134A/ko unknown
- 2020-11-02 WO PCT/JP2020/041030 patent/WO2022049787A1/ja active Application Filing
- 2020-11-02 CN CN202080103710.0A patent/CN116325108A/zh active Pending
- 2020-11-02 TW TW109138070A patent/TWI779382B/zh active
- 2020-11-02 US US18/024,419 patent/US20230311339A1/en active Pending
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11165863A (ja) * | 1997-12-02 | 1999-06-22 | Dainippon Screen Mfg Co Ltd | 基板搬送装置 |
JPH11312723A (ja) * | 1998-04-30 | 1999-11-09 | Dainippon Screen Mfg Co Ltd | 基板搬送装置および方法 |
JP2003019687A (ja) * | 2001-07-03 | 2003-01-21 | Aitec:Kk | ロボットハンドの駆動装置 |
JP2007283436A (ja) * | 2006-04-17 | 2007-11-01 | Nachi Fujikoshi Corp | ロボット、ロボットシステム及びハンド装置の姿勢制御方法 |
JP2010067871A (ja) * | 2008-09-12 | 2010-03-25 | Dainippon Screen Mfg Co Ltd | 基板搬送装置およびそれを備えた基板処理装置 |
WO2017037976A1 (ja) * | 2015-09-03 | 2017-03-09 | 川崎重工業株式会社 | 基板移載装置 |
JP2019519913A (ja) * | 2016-05-05 | 2019-07-11 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 亀裂が低減されたロボットサブアセンブリ、エンドエフェクタアセンブリ、及び方法 |
Also Published As
Publication number | Publication date |
---|---|
TWI779382B (zh) | 2022-10-01 |
US20230311339A1 (en) | 2023-10-05 |
JP7427796B2 (ja) | 2024-02-05 |
TW202211366A (zh) | 2022-03-16 |
CN116325108A (zh) | 2023-06-23 |
JPWO2022049787A1 (ja) | 2022-03-10 |
KR20230048134A (ko) | 2023-04-10 |
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