WO2022042471A1 - 加热器和加热基座 - Google Patents

加热器和加热基座 Download PDF

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Publication number
WO2022042471A1
WO2022042471A1 PCT/CN2021/114024 CN2021114024W WO2022042471A1 WO 2022042471 A1 WO2022042471 A1 WO 2022042471A1 CN 2021114024 W CN2021114024 W CN 2021114024W WO 2022042471 A1 WO2022042471 A1 WO 2022042471A1
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WO
WIPO (PCT)
Prior art keywords
vertical plate
elastic
heating
seat body
base
Prior art date
Application number
PCT/CN2021/114024
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English (en)
French (fr)
Inventor
李冬冬
Original Assignee
北京北方华创微电子装备有限公司
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Filing date
Publication date
Application filed by 北京北方华创微电子装备有限公司 filed Critical 北京北方华创微电子装备有限公司
Priority to JP2023511854A priority Critical patent/JP7403716B2/ja
Priority to EP21860306.6A priority patent/EP4207259A1/en
Priority to KR1020237005404A priority patent/KR102642732B1/ko
Publication of WO2022042471A1 publication Critical patent/WO2022042471A1/zh
Priority to US18/174,336 priority patent/US20230223282A1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67103—Apparatus for thermal treatment mainly by conduction
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67109—Apparatus for thermal treatment mainly by convection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/02—Details
    • H05B3/06—Heater elements structurally combined with coupling elements or holders
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
    • H05B3/22—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible

Definitions

  • the present invention relates to the technical field of semiconductor process equipment, in particular to a heater and a heating base.
  • the current heater usually includes a heating plate and a base for supporting the heating plate.
  • the heating plate will generate heat when powered on.
  • a vertical plate is arranged on the edge of the base for The heating plate is supported, and there is a certain gap between the heating plate and the base, and the vertical plate and the heating plate are usually connected by welding.
  • the temperature of the heating plate is usually high, a part of the heat of the heating plate will be transferred to the vertical plate, which will cause the vertical plate to expand and deform when heated. The failure of the disk connection results in a poor overall structural performance of the heater.
  • the invention discloses a heater and a heating base to solve the problem that the existing vertical plate after expansion and deformation is prone to failure in connection with the heating plate, resulting in poor overall structural strength of the heater.
  • the present invention adopts the following technical solutions:
  • an embodiment of the present invention discloses a heater for semiconductor processing equipment, comprising a heating body and a base for supporting the heating body, the base comprising a base body and a vertical plate connected to each other, the base
  • the main body is opposite to the heating main body and arranged at intervals, the vertical plate is located between the seat body and the heating main body, and is fixedly connected with the heating main body, the vertical plate, the seat body and the vertical plate
  • At least one of the connections between the plate and the seat body is provided with an elastic bending structure, and the elastic bending structure is used to generate elastic deformation when the upright plate and/or the seat body undergoes expansion deformation to keep the vertical plate connected to the heating body.
  • an embodiment of the present invention discloses a heating base, which includes an insulating disk, a corrugated tube, and the above-mentioned heater disclosed in the embodiment of the present application, wherein a first center hole is provided in the base, and the insulating disk is arranged at the bottom of the base and is sealed with the base to seal the first central hole; and the insulating disk is provided with a second central hole opposite to the first central hole, the A bellows is sealingly connected to a side of the insulating disc facing away from the heater to seal the second central hole.
  • the embodiment of the present invention discloses a heater, which includes a heating body and a base, the base includes a seat body and a vertical plate connected to each other, the vertical plate is located between the seat body and the heating body, and is fixedly connected with the heating body, the vertical plate, At least one of the seat body and the connection between the vertical plate and the seat body is provided with an elastic bending structure, and the elastic bending structure is used for elastic deformation when the vertical plate and/or the seat body is expanded and deformed. The plate remains attached to the heating body.
  • the elastic bending structure can adapt to absorb the vertical plate and the vertical plate through its own elastic deformation. / or the expansion force generated by the base body, so as to prevent the connection failure between the base and the heating body, and ensure that the heater has a high overall structural strength.
  • FIG. 1 is a schematic structural diagram of a heater disclosed in an embodiment of the present invention.
  • FIG. 2 is another schematic structural diagram of the heater disclosed in the embodiment of the present invention.
  • FIG. 3 is a schematic structural diagram of a heating base disclosed in an embodiment of the present invention.
  • an embodiment of the present invention discloses a heater, which is applied to a semiconductor process equipment.
  • the heater can support and heat a workpiece in a semiconductor process, so that the temperature of the workpiece reaches the temperature of the process.
  • the temperature is required to ensure that the processing process can be carried out efficiently and reliably.
  • the heater includes a heating body 100 and a base for supporting the heating body 100 , and the base includes a base body and a vertical plate 220 connected to each other.
  • the heating body 100 can be made of a material with good thermal conductivity such as metal, and the heating body 100 can be connected to a power source through a wire, so that the heating body 100 can generate heat in an energized state to play a heating role.
  • the heating body 100 is, for example, a disk body, and the shape of the disk body can be a square or a circle, and the thickness of the heating body 100 can be determined according to the actual situation.
  • the seat body and the heating body 100 are opposite to each other and arranged at an interval.
  • the interval can reduce the heat transfer of the heating body 100 to the seat body, and ensure that the temperature of the heating body 100 is more consistent, so that the temperature of the workpiece is uniform. same.
  • the heating main body 100 By placing the vertical plate 220 between the base body and the heating main body 100 and fixedly connected to the heating main body 100, the heating main body 100 can be supported. At the same time, since the thickness of the vertical plate 220 is relatively small, such as a thin-walled structure, the vertical plate 220 can be reduced.
  • the heat conduction cross-sectional area of the plate 220 reduces the heat conduction efficiency between the heating main body 100 and the vertical plate 220, thereby further reducing the heat transferred from the heating main body 100 to the entire base through the vertical plate 220, ensuring that the temperature at any position on the heating main body 100 can be basically the same.
  • the base body and the vertical plate 220 can be made of materials with relatively high structural strength such as metal.
  • the shape and size of the seat body may be the same as the heating body 100 correspondingly.
  • the vertical plate 220 is connected at the outer edge of the seat body, and in the case that the heating main body 100 and the vertical plate 220 are both made of metal materials, the vertical plate 220 and the heating main body 100 can be fixedly connected by welding .
  • the vertical plate 220 is an annular structure, and the thickness (ie, radial thickness) of the vertical plate 220 may be between 2mm-4mm.
  • the shape of the vertical plate 220 is the same as the shape of the outer edge of the heating body 100 and the seat body, so as to increase the area of the area enclosed by the vertical plate 220 as much as possible, improve the accommodating space of the internal components of the heater, and make the The external structure of the entire heater is more regular.
  • the vertical plate 220 may also be a rectangular annular structure.
  • the plate 220 can also be a circular ring structure.
  • At least one of the vertical plate 220 , the seat body, and the connection between the vertical plate 220 and the seat body is provided with an elastic bending structure 300 , and the elastic bending structure 300 is used when the vertical plate 220 and/or the seat body are expanded and deformed , the vertical plate 220 is kept connected with the heating main body 100 by generating elastic deformation.
  • the elastic bending structure 300 can also adaptively undergo a certain elastic deformation by itself. The expansion force generated by the vertical plate 220 and/or the base body is absorbed, so that the connection failure between the base and the heating main body 100 can be prevented, and the overall structural strength of the heater is ensured.
  • the elastic bending structure 300 is configured to be capable of elastic deformation in a first direction, and the first direction is parallel to the radial direction of the heating body 100 , namely the direction A shown in FIG. 1 , the The direction A is generally the main expansion and deformation direction of the vertical plate 220 and/or the seat body.
  • the elastic bending structure 300 can be elastically deformed accordingly, so that the vertical plate 220 can be elastically deformed. It remains connected to the heating body 100 .
  • the elastic bending structure 300 is configured to be capable of elastic deformation in both the first direction and the second direction, wherein the second direction is parallel to the axial direction of the heating body 100 , that is, the vertical direction of the direction A.
  • the elastic bending structure 300 can provide a certain elastic deformation capability for the base, thereby improving the flexibility of installation and adapting to more application scenarios.
  • the elastic bending structure 300 may have various structures.
  • the elastic bending structure 300 includes at least one of at least one first bending part and at least one second bending part, wherein the first bending part is formed from the first bending part.
  • the reference plane protrudes toward the inner side of the interval between the seat body and the heating body 100 , and the first reference plane is the vertical plate 220 where the first bending portion is located, the seat body and the connection between the vertical plate 200 and the seat body. At least one of the surfaces opposite the spacer.
  • the elastic bending structure 300 includes a first bending portion, which is disposed on the seat body.
  • the seat body includes a center portion 211 and an edge portion 212 .
  • the edge portion 212 is disposed around the center portion 211 , and The first bent portion is connected between the center portion 211 and the edge portion 212 , and the edge portion 212 is fixedly connected with the vertical plate 220 .
  • the first bending portion protrudes toward the inner side of the space from the surface of the seat body on which the first bending portion is located and the space opposite to the space (ie, the first reference plane).
  • the vertical direction of the direction A in FIG. 1 protrudes toward the inner side of the space.
  • first bent portion By making the above-mentioned first bent portion protrude toward the inner side of the space along the vertical direction of direction A in FIG.
  • the lateral expansion force generated when more vertical plates 220 and/or the seat body are heated can be absorbed.
  • the main force for connection failure between the base and the heating body 100 is the lateral expansion force
  • the above-mentioned first bending portion is an annular bending portion arranged around the axis of the heating body 100 and is connected between the central portion 211 and the edge portion 212 , and The outer periphery of the first bending portion is connected with the inner periphery of the edge portion 212 , the inner periphery of the first bending portion is connected with the outer periphery of the center portion 211 , and the outer periphery of the edge portion 212 is connected with the lower portion of the ring-shaped vertical plate 220 . Edge connection, the upper edge of the vertical plate 220 is also connected to the outer edge of the heating body 100 .
  • the first bending portion of the above structure can provide more superior elastic deformation ability, thereby preventing the connection failure between the vertical plate 220 and the heating main body 100 In this case, the connection reliability between the heating main body 100 and the base is guaranteed to be higher.
  • a gap is provided between the first bending portion and the heating body 100 to prevent the heat of the heating body 100 from being easily transferred due to the first bending portion and the heating body 100 being in contact with each other.
  • the temperature at the position corresponding to the first bending portion in the heating body 100 is lower than the temperature at other positions in the heating body 100, resulting in the heater being unable to provide all parts of the workpiece. Consistent heating effect.
  • the structure of the second bending part is the same as that of the first bending part, but only the protruding direction is opposite.
  • One side of the space is protruding
  • the second reference surface is at least one of the vertical plate 220 where the second bending portion is located, the seat body and the connection between the vertical plate 220 and the seat body, and the surface away from the space.
  • the elastic bending structure 300 includes a second bending portion, which is connected between the center portion 211 and the edge portion 212 of the seat body, and extends from the seat body where the second bending portion is located and the seat body.
  • the surfaces facing away from the space ie, the second reference surface
  • the above-mentioned second bending portion is an annular bending portion arranged around the axis of the heating body 100 .
  • the second bending portion By making the above-mentioned second bending portion protrude toward the side away from the space along the vertical direction of the direction A in FIG.
  • the lateral expansion force generated when more vertical plates 220 and/or the seat body are heated can be absorbed.
  • the main force that causes the connection failure between the base and the heating body 100 is the lateral expansion force, by making the second bending part protrude toward the side away from the interval along the vertical direction of the direction A in FIG. With fewer types of second bending parts, it can be ensured that the connection failure between the base and the heating main body 100 will not occur basically, and the processing difficulty of the heater is reduced.
  • the elastic bending structure 300 by arranging the elastic bending structure 300 on the seat body, not only the vertical plate 220 can be made into an integrated structure, so that the vertical plate 220 can have high structural strength and support stability, and the seat body and the vertical plate can be reduced.
  • the connection between the plates 220 is difficult, and the elastic bending structure 300 is located in the seat body, so that the elastic bending structure 300 has a certain gap between the vertical plate 220 and the vertical plate 220, thereby preventing the vertical plate
  • the existence of 220 restricts the elastic deformation of the elastic bending structure 300 .
  • the elastic bending structure 300 can also be used to absorb the lateral expansion force generated by the seat body itself to a certain extent, and further reduce the friction between the upright plate 220 and the heating body 100 due to the expansion of the seat body.
  • the connection relationship is adversely affected.
  • one of the first and second bent portions protrude along the vertical direction of the direction A in FIG. 1 , one of the first and second bent portions can be The direction of elastic deformation is perpendicular to the vertical plate 220, so that the lateral expansion force generated by the vertical plate 220 and the base body can be absorbed by the elastic bending structure 300 basically, and the connection failure of the base and the heating body 100 is not easy to occur.
  • the elastic bending structure 300 does not directly contact the heating body 100, that is, , the heating main body 100 and the elastic bending structure 300 are separated by one of the vertical plate 220 and the seat body, so that the heat transferred from the heating main body 100 to the elastic bending structure 300 can be reduced as much as possible, so that the elastic bending structure 300 itself can be reduced as much as possible.
  • the expansion amplitude caused by heating is smaller, so as to absorb the expansion force generated by the heating of the vertical plate 220 and/or the base body as much as possible, so as to ensure higher reliability of the connection between the base and the heating body 100 .
  • the respective structures of the first bending portion and the second bending portion may adopt any bending structure capable of elastic deformation.
  • the first bending portion is in the axial direction of the heating body 100 .
  • the orthographic shape of the section ie, the section shown in FIGS. 1 and 2
  • the orthographic shape of the second bent portion on the axial section of the heating body 100 includes a U shape. Since the U-shaped bending structure is a smooth transition structure, the above-mentioned first bending part and the second bending part have stronger elastic ability, and are less likely to fail to recover deformation when subjected to a large expansion force even broken.
  • the above-mentioned smooth transition structure is not limited to the U-shape, which is not particularly limited in the present invention.
  • the present invention is not limited to the use of the first bending portion and the second bending portion in FIG. 1 and FIG. 2 , and any number of the first bending portion and any number of the second bending portion can also be used.
  • the parts can be freely combined and distributed on at least one of the vertical plate 220 , the seat body and the connection between the vertical plate 220 and the seat body according to specific needs.
  • the present invention does not specifically limit the specific size parameters of the first bending portion and the second bending portion.
  • the structures, dimensions, etc. of different bent portions may be the same or different.
  • two adjacent bending parts may be connected to each other, and may also be spaced apart from each other, which is not limited here.
  • the present invention is not limited to arranging one of the first bent portion and the second bent portion between the center portion 211 and the edge portion 212 of the seat body.
  • the vertical plate 220 One of the first bending part and the second bending part can also be provided on the upper part, and the protruding direction of the two is, for example, parallel to the direction A in FIG. 1 or has an included angle; and/or, the vertical plate 220 and the seat body One of the first bent portion and the second bent portion may also be provided at the connection between them, and the protruding directions of the two are, for example, perpendicular to the direction A in FIG. 1 or have an included angle.
  • the outer peripheral edge of the first bending portion is connected to the lower edge of the ring-shaped vertical plate 220, and the inner The peripheral edge is connected to the outer edge of the seat body, and the upper edge of the upright plate 220 of the annular structure is also connected to the outer edge of the heating body 100 .
  • the elastic bending structure 300 is not limited to the first bending part and the second bending part in FIG. 1 and FIG. 2 , and the elastic bending structure 300 can also be any elastic that can generate elastic deformation Taking the elastic member as a specific structural member of a spring as an example, the spring can produce expansion and contraction deformation in the axial direction, and can also produce lateral deviation in the radial direction, so that no matter what orientation is combined into the base, it can be Provide a certain elastic deformation ability for the base, thereby improving the flexibility of installation to adapt to more application scenarios.
  • the elastic bending structure 300 may be formed by a sheet metal process; or, a metal plate may be used to form the elastic bending structure 300 in advance, and then the elastic bending structure 300 and the vertical plate may be formed by welding or the like. 220 , at least one of the connections between the seat body and the vertical plate 220 and the seat body is fixedly connected.
  • the elastic bending structure 300 is located at the connection between the vertical plate 220 and the seat body, three independent parts of the vertical plate 220, the seat body and the elastic bending structure 300 can be formed in advance, and the The two ends of the elastic bending structure 300 are respectively connected to the vertical plate 220 and the base body, so that the three independent parts can be formed into a whole.
  • the vertical plate 220 or the seat body can be formed into two independent parts, and the two ends of the elastic bending structure 300 are respectively connected to the vertical plate by welding 220 or two parts of the seat body, so that the vertical plate 220 or the two parts of the seat body and the elastic bending structure 300 are formed as a whole.
  • the seat body and the elastic bending structure 300 may be formed by integral molding, for example, the elastic bending structure 300 may be formed at a preset position of the base material of an integral structure by means of sheet metal or the like, The rest of the base material is the seat body.
  • the two parts of the seat body located on the inner and outer sides of the elastic bending structure 300 are the center part 211 and the edge part 212 respectively.
  • the center part 211 is connected with the edge part 212 by the elastic bending structure 300, and the edge part 212
  • the vertical plate 220 is fixedly connected with the heating body 100 .
  • the center portion 211 , the edge portion 212 and the elastic bending structure 300 can be formed by separate molding, and then the three are connected together by welding, so that the elastic bending structure 300 is fixed on the seat body .
  • the size of the edge portion 212 can be determined according to the actual situation, which is not limited here.
  • the elastic bending structure 300 can also be an annular structure, which can ensure the reliable connection between the elastic bending structure 300 and the vertical plate 220 and the whole seat body
  • the elastic bending structure 300 can provide the function of absorbing lateral expansion force for the seat body along its own circumferential direction, so as to further ensure that the seat body and/or the vertical plate 220 will not be heated when heated. This results in a connection failure between the base and the heating body 100 .
  • the seat body and the heating body 100 are connected to each other through the vertical plate 220, and the seat body and the heating body 100 are spaced apart from each other to minimize the heat transferred from the heating body 100 to the seat body.
  • the wall thickness of the elastic bending structure 300 is d, and 2mm ⁇ d ⁇ 4mm
  • the wall thickness of the edge portion 212 can also meet the above requirements, so as to reduce the vertical plate by reducing the cross-sectional area of the edge portion 212 and the elastic bending structure 300
  • the heat conduction efficiency between 220 and the base body further prevents the heat on the heating body 100 from being transferred to the base too much, ensures that the temperature at any position on the heating body 100 is basically equal, and provides uniform heating for the workpiece. .
  • an insulating disk 510 can be provided on the side of the base away from the heating body 100 in the heater disclosed in the embodiment of the present invention, and the insulating disk 510 is made of insulating materials such as ceramics, for example, The insulating disk 510 can ensure that the heater is at a floating potential.
  • the insulating disk 510 and the base can be fixed to each other by screws, and in order to isolate the inner space of the heater, a sealing ring 530 can usually be provided between the base and the insulating disk 510 .
  • the side of the base away from the heating body 100 may be provided with an installation groove 214, and the sealing ring 530 may be accommodated in the installation groove 214.
  • the cross-sectional area of the groove 214 enables the sealing ring 530 to be squeezed and installed in the installation groove 214 by means of the pressing force between the base and the insulating disc 510 , so as to ensure that the base and the insulating disc 510 form a sealing relationship.
  • the sealing ring 530 can usually be made of elastic materials such as rubber. During the operation of the heater, a part of the heat generated by the heating body 100 will be transferred to the base. In order to ensure that the sealing ring 530 will not be deformed or even damaged by the high temperature, the base A cooling channel 215 can usually be provided at the position corresponding to the installation groove 214. When the heater is working, by passing a cooling liquid such as water into the cooling channel 215, the cooling can be provided for the area where the sealing ring 530 is located in the base. , to ensure that the sealing ring 530 can provide a permanent sealing effect.
  • the heat on the heating body 100 can be transferred to the seat through the vertical plate 220 .
  • the difficulty of the body is higher, thereby further ensuring that the temperature of the area where the sealing ring 530 is located in the seat body is relatively low, and the sealing effect and service life of the sealing ring 530 are improved.
  • the heating body 100 is provided with a first through hole 110
  • the seat body is provided with a second through hole 213 opposite to the first through hole 110
  • the first through hole 110 and the second through hole 213 are used for the thimble to pass through .
  • the ejector pin can extend from one side of the heater to the other side of the heater through the first through hole 110 and the second through hole 213, so that when the heater is lowered, it can be supported by the ejector pin.
  • the workpiece to be processed ensures that the workpiece will not fall.
  • the heater Since the air pressure in the space between the heating body 100 and the seat body in the heater is usually close to atmospheric pressure, and the side where the heating body 100 is located in the heater must be in a vacuum environment, in order to ensure the space in the heater and the heating in the heater.
  • the side where the main body 100 is located is isolated from each other, and the heater further includes an elastic pipe piece 410 , two ends of the elastic pipe piece 410 are sealed and connected with the heating main body 100 and the seat body, respectively, for connecting the first through hole 110 and the second through hole 213 respectively. Seal.
  • the elastic tube 410 is a tubular structure, and the elastic direction of the elastic tube 410 is consistent with the axial direction of the first through hole 110 , so as to ensure that the inner space of the heater will not communicate with the space on the side where the heating body 100 is located.
  • the heat on the heating body 100 will be transferred to the elastic tube 410 .
  • the axial direction is consistent, so that the elastic pipe piece 410 can absorb the expansion force through its own elastic deformation under the condition of heating, so as to ensure that the connection reliability between the elastic pipe piece 410 and the heating body 100 and between the elastic pipe piece 410 and the seat body is relatively high .
  • a certain lateral relative displacement can be generated between the opposite ends of the elastic tube 410, thereby further preventing the heating main body 100 from appearing on the side where the heating main body 100 is located. In the case of vacuum failure.
  • the elastic pipe piece 410 can be a metal pipe piece, and opposite ends of the elastic pipe piece 410 can be respectively fixed on the heating body 100 and the base body by welding.
  • the opposite ends of the elastic pipe piece 410 are equipped with There is an annular flange 420 to improve the connection reliability between the elastic pipe piece 410 and the heating body 100 and the seat body.
  • the elastic pipe member 410 may include a plurality of annular elastic wave plates, the elastic wave plates may be steel wave plates, and the plurality of elastic wave plates are connected in sequence along the axial direction of the elastic pipe member to form a continuous A tube, and any two adjacent elastic wave plates are arranged to be able to be folded or unfolded with each other along the axial direction of the elastic tube.
  • the length of the elastic wave plate and the included angle between two adjacent wave plates can be determined according to actual needs.
  • the number of elastic tubes 410 may also be multiple, so that each first through hole 110 can pass through one elastic tube 410 and the corresponding second through holes 213 are sealed with each other.
  • the elastic bending structure 300 is located between the elastic pipe member 410 and the vertical plate 220 , that is to say, based on the seat body, the elastic bending structure 300 is located further outside the elastic pipe member 410 , because the seat body is closer to the heating body
  • the temperature of the part 100 is higher, and the seat body is connected to the heating body 100 through the vertical plate 220, so the temperature of the part of the seat body that is closer to the vertical plate is generally higher.
  • the elastic bending structure 300 can absorb more lateral expansion force, so that the elastic pipe piece 410 absorbs as little lateral expansion force as possible, so that the elastic pipe piece 410 faces between opposite ends.
  • the lateral displacement is smaller, and the connection reliability between the elastic tube 410 and the heating main body 100 and the seat body is relatively high.
  • the lateral expansion force acting on the elastic tube 410 can be further reduced to ensure higher structural stability of the elastic tube 410 .
  • the heat of heating the main body 100 can also be transferred to the elastic tube member 410.
  • the elastic tube member 410 is a stainless steel structural member, that is, the elastic wave plate can be made of stainless steel, and the wall of the elastic wave plate can be made of stainless steel.
  • the thickness is less than 0.15mm.
  • an embodiment of the present invention further discloses a heating base
  • the heating base includes an insulating disk 510, a bellows 520 and any of the above heaters, wherein,
  • the base of the heater is provided with a first central hole 560
  • the insulating disk 510 is disposed at the bottom of the base and is sealedly connected with the base to seal the first central hole 560 .
  • the insulating disk 510 is provided with a second central hole 570 opposite to the first central hole 560
  • the bellows 520 is sealingly connected to the side of the insulating disk 510 away from the heater to seal the second central hole 570 .
  • a mounting groove 214 may be provided on the side of the base away from the heating main body 100 , and a sealing ring 530 may be provided in the mounting groove 214 , so that the purpose of sealing the base and the insulating disk 510 can be achieved by means of the sealing ring 530 .
  • the bellows 520 is sealingly connected to the side of the insulating disk 510 away from the heating main body 100.
  • the bellows 520 can also be sealed with the insulating disk 510 by means of the sealing ring 530.
  • the bellows 520 can face the insulating disk.
  • One side surface of 510 is provided with a sinking groove structure similar to the mounting groove 214.
  • the bellows 520, the insulating disk 510 and the heater can be assembled by screws 550.
  • the screws 550 By passing the screws 550 through the bellows 520 and the insulating disk 510 and connecting them to the base of the heater, the bellows 520 can be ensured.
  • the insulating disk 510 and the heater form a stable and reliable fixed connection relationship.
  • an insulating washer 540 may be provided between the screw 550 and the screw hole.

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Abstract

本发明公开一种加热器和加热基座，加热器用于半导体工艺设备，包括加热主体和用于支撑所述加热主体的底座，所述底座包括相互连接的座本体和立板，所述座本体与所述加热主体相对且间隔设置，所述立板位于所述座本体与所述加热主体之间，且与所述加热主体固定连接，所述立板、所述座本体和所述立板与所述座本体的连接处中的至少一者设置有弹性折弯结构，所述弹性折弯结构用于在所述立板和/或所述座本体发生膨胀变形时，通过产生弹性形变来使所述立板与所述加热主体保持连接。采用上述技术方案可以解决目前膨胀变形后的立板容易出现与加热盘连接失效的情况，导致加热器的整体结构强度较差的问题。

Description

加热器和加热基座 技术领域
本发明涉及半导体工艺设备技术领域，尤其涉及一种加热器和加热基座。
背景技术
在半导体的加工过程中，通常需要借助加热器对半导体进行加热，使半导体的温度达到预设温度，以提升工艺性能。目前的加热器通常包括加热盘和用于支撑加热盘的底座，该加热盘在通电的情况下会产生热量，为了尽量减少加热盘的热量传递至底座，在底座边缘设置有立板，用于支撑加热盘，且使加热盘与底座之间具有一定的间隙，立板与加热盘之间通常采用焊接的方式连接。但是，在加热器工作的过程中，由于加热盘的温度通常较高，加热盘的一部分热量会传递至立板上，导致立板受热发生膨胀变形，膨胀变形后的立板极容易出现与加热盘连接失效的情况，导致加热器的整体结构性能较差。
发明内容
本发明公开一种加热器和加热基座，以解决目前膨胀变形后的立板容易出现与加热盘连接失效的情况，导致加热器的整体结构强度较差的问题。
为了解决上述问题，本发明采用下述技术方案：
第一方面，本发明实施例公开一种加热器，用于半导体工艺设备，包括加热主体和用于支撑所述加热主体的底座，所述底座包括相互连接的座本体和立板，所述座本体与所述加热主体相对且间隔设置，所述立板位于所述座本体与所述加热主体之间，且与所述加热主体固定连接，所述立板、所述座 本体和所述立板与所述座本体的连接处中的至少一者设置有弹性折弯结构，所述弹性折弯结构用于在所述立板和/或所述座本体发生膨胀变形时，通过产生弹性形变来使所述立板与所述加热主体保持连接。
第二方面，本发明实施例公开一种加热基座，其包括绝缘盘、波纹管和本申请实施例公开的上述加热器，其中，所述底座中设置有第一中心孔，所述绝缘盘设置在所述底座底部，且与所述底座密封连接，以密封所述第一中心孔；并且，所述绝缘盘中设置有与所述第一中心孔相对设置的第二中心孔，所述波纹管密封连接于所述绝缘盘背离所述加热器的一侧，以密封所述第二中心孔。
本发明采用的技术方案能够达到以下有益效果：
本发明实施例公开一种加热器，其包括加热主体和底座，底座包括相互连接的座本体和立板，该立板位于座本体与加热主体之间，且与加热主体固定连接，立板、座本体和立板与座本体的连接处中的至少一者设置有弹性折弯结构，该弹性折弯结构用于在立板和/或座本体发生膨胀变形时，通过产生弹性形变来使立板与加热主体保持连接。在上述加热器的工作过程中，即便加热主体产生的热量传递至立板，使立板出现一定程度的膨胀变形，弹性折弯结构也能够适应性地通过自身发生一定的弹性形变吸收立板和/或座本体产生的膨胀力，从而可以防止底座与加热主体之间出现连接失效的情况，保证加热器具有较高的整体结构强度。
附图说明
此处所说明的附图用来提供对本发明的进一步理解，构成本发明的一部分，本发明的示意性实施例及其说明用于解释本发明，并不构成对本发明的不当限定。在附图中：
图1为本发明实施例公开的加热器的一种结构示意图；
图2为本发明实施例公开的加热器的另一种结构示意图；
图3为本发明实施例公开的加热基座的结构示意图。
附图标记说明：
100-加热主体、110-第一贯穿孔；
211-中心部、212-边缘部、213-第二贯穿孔、214-安装槽、215-冷却通道、220-立板；
300-弹性折弯结构；
410-弹性管件、420-法兰；
510-绝缘盘、520-波纹管、530-密封圈、540-绝缘件、550-螺钉、560-第一中心孔、570-第二中心孔。
具体实施方式
为使本发明的目的、技术方案和优点更加清楚，下面将结合本发明具体实施例及相应的附图对本发明技术方案进行清楚、完整地描述。显然，所描述的实施例仅是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。
以下结合附图，详细说明本发明各个实施例公开的技术方案。
如图1和图2所示，本发明实施例公开一种加热器，其应用于半导体工艺设备，该加热器能够承载并加热半导体工艺中的被加工件，使被加工件的温度达到工艺所需温度，保证加工工艺能够高效可靠地进行。加热器包括加热主体100和用于支撑该加热主体100的底座，该底座包括相互连接的座本体和立板220。
其中，加热主体100可以采用金属等导热性较好的材料制成，加热主体100可以通过导线与电源连接，使得加热主体100在通电状态下能够产生热 量，以起到加热作用。具体地，加热主体100例如为盘体，该盘体的形状可以为方形或圆形等，加热主体100的厚度可以根据实际情况确定。
座本体与加热主体100相对且间隔设置，该间隔可以减少加热主体100的热量传递至座本体上，保证加热主体100上各处的温度更为一致，以使被加工件上各处的温度均相同。
通过使立板220位于座本体与加热主体100之间，且与加热主体100固定连接，可以支撑加热主体100，同时由于立板220的厚度相对较小，例如为薄壁结构，这样可以减少立板220的导热截面积，降低加热主体100与立板220之间的热传导效率，从而可以进一步减少加热主体100通过立板220传递至整个底座的热量，保证加热主体100上任意位置处的温度能够基本相同。
具体地，为了保证底座能够为加热主体100提供可靠的支撑效果，座本体和立板220均可以采用金属等结构强度相对较高的材料制成。座本体的形状和尺寸可以与加热主体100对应相同。可选的，立板220连接在座本体的外边缘处，并且在加热主体100与立板220均采用金属材料制成的情况下，立板220和加热主体100之间可以通过焊接的方式固定连接。
在一些可选的实施例中，立板220为环状结构，立板220的厚度(即，径向厚度)可以在2mm-4mm之间。优选地，立板220的形状与加热主体100和座本体的外缘的形状相同，以尽可能地增大立板220围成的区域的面积，提升加热器内部器件的容纳空间，且可以使整个加热器的外部结构更规整。例如，加热主体100和座本体的外缘的形状均为矩形，则立板220也可以为矩形环状结构，在加热主体100和座本体的外缘的形状均为圆形的情况下，立板220也可以为圆形环状结构，通过使立板220的形状与加热主体100和座本体的外缘的形状相同，可以使加热主体100和座本体之间的连接可靠性更高。
立板220、座本体和立板220与座本体的连接处中的至少一者设置有弹性折弯结构300，该弹性折弯结构300用于在立板220和/或座本体发生膨胀变形时，通过产生弹性形变来使立板220与加热主体100保持连接。在上述加热器的工作过程中，即便加热主体100产生的热量传递至立板220，使立板220出现一定程度的膨胀变形，弹性折弯结构300也能够适应性地通过自身发生一定的弹性形变吸收立板220和/或座本体产生的膨胀力，从而可以防止底座与加热主体100之间出现连接失效的情况，保证加热器具有较高的整体结构强度。
在一些可选的实施例中，弹性折弯结构300被设置为能够在第一方向上产生弹性形变，第一方向平行于加热主体100的径向，即图1中示出的方向A，该方向A一般为立板220和/或座本体的主要膨胀变形方向，当立板220和/或座本体发生膨胀变形时，弹性折弯结构300可以随之产生弹性形变，从而可以使立板220与加热主体100保持连接。优先的，弹性折弯结构300被设置为能够在该第一方向和第二方向上均产生弹性形变，其中，第二方向平行于加热主体100的轴向，即方向A的垂直方向。这样，弹性折弯结构300无论以何种方位结合至底座中，均可以为底座提供一定的弹性形变能力，从而提高了安装的灵活性，以适应更多的应用场景。
弹性折弯结构300可以有多种结构，例如，弹性弯折结构300包括至少一个第一弯折部和至少一个第二弯折部中的至少一者，其中，第一弯折部自第一基准面朝向座本体与加热主体100之间的间隔内一侧凸出，该第一基准面为第一弯折部所位于的立板220、座本体和立板200与座本体的连接处中的至少一者，与间隔相对的表面。例如，如图1所示，弹性弯折结构300包括一第一弯折部，其设置在座本体上，该座本体例如包括中心部211和边缘部212，边缘部212环绕中心部211设置，且第一弯折部连接在中心部211和边缘部212之间，并且，边缘部212与立板220固定连接。并且，第一弯 折部自该第一弯折部所位于的座本体与间隔相对的表面(即，第一基准面)朝向间隔内一侧凸出，具体地，上述第一弯折部沿图1中方向A的垂直方向朝间隔内一侧凸出。通过使第一弯折部朝向间隔内一侧凸出，可以使加热主体100和座本体之间的间隔得到有效利用，无需使第一弯折部占据加热器之外的空间，还可以防止加热器之外的部件和结构对第一弯折部的正常工作产生不利影响。
通过使上述第一弯折部沿图1中方向A的垂直方向朝间隔内一侧凸出，还可以保证第一弯折部的弹性形变方向垂直于立板220，这使得第一弯折部能够吸收更多立板220和/或座本体受热时产生的横向膨胀力。另外，由于底座和加热主体100之间产生连接失效的主要作用力为横向膨胀力，通过使上述第一弯折部沿图1中方向A的垂直方向朝间隔内一侧凸出，可以借助数量和种类更少的第一弯折部即能够保证底座和加热主体100之间基本不会出现连接失效的情况，降低加热器的加工难度。
在一些可选的实施例中，如图1所示，上述第一弯折部为围绕加热主体100的轴线环绕设置的环形弯折部，且连接在中心部211和边缘部212之间，并且第一弯折部的外周缘与边缘部212的内周缘连接，第一弯折部的内周缘与中心部211的外边缘连接，边缘部212的外周缘与环状结构的立板220的下边缘连接，立板220的上边缘还连接在加热主体100的外边缘。这样，在立板220和/或座本体受热发生形变的过程中，上述结构的第一弯折部可以提供更为优越的弹性形变能力，从而防止立板220和加热主体100之间产生连接失效的情况，保证加热主体100和底座之间的连接可靠性更高。
在一些可选的实施例中，上述第一弯折部与加热主体100之间设有间隙，以防止因第一弯折部与加热主体100相互接触，使得加热主体100的热量较容易地传递至第一弯折部上，导致加热主体100中与第一弯折部对应的位置处的温度低于加热主体100中的其他位置处的温度，造成加热器无法为被加 工件上各处提供一致的加热效果。
第二弯折部的结构与上述第一弯折部的结构相同，而仅仅是凸出方向相反，具体地，第二弯折部自第二基准面朝向背离座本体与加热主体100之间的间隔一侧凸出，该第二基准面为第二弯折部所位于的立板220、座本体和立板220与座本体的连接处中的至少一者，与间隔相背离的表面。例如，如图2所示，弹性弯折结构300包括一第二弯折部，其连接在座本体的中心部211和边缘部212之间，且自该第二弯折部所位于的座本体与间隔相背离的表面(即，第二基准面)朝向背离间隔一侧凸出。可选的，上述第二弯折部为围绕加热主体100的轴线环绕设置的环形弯折部。
通过使上述第二弯折部沿图1中方向A的垂直方向朝背离间隔一侧凸出，还可以保证第二弯折部的弹性形变方向垂直于立板220，这使得第二弯折部能够吸收更多立板220和/或座本体受热时产生的横向膨胀力。另外，由于底座和加热主体100之间产生连接失效的主要作用力为横向膨胀力，通过使上述第二弯折部沿图1中方向A的垂直方向朝背离间隔一侧凸出，可以借助数量和种类更少的第二弯折部即能够保证底座和加热主体100之间基本不会出现连接失效的情况，降低加热器的加工难度。
此外，通过将弹性折弯结构300设置在座本体上，不仅可以使立板220为一体式结构，从而可以保证立板220具有较高的结构强度和支撑稳定性，而且还可以降低座本体和立板220之间的连接难度，且通过使弹性折弯结构300位于座本体，使得弹性折弯结构300在垂直于立板220的方向与立板220之间具有一定的间隙，进而可以防止立板220的存在限制弹性折弯结构300发生弹性形变。并且，采用上述技术方案的情况下，还可以在一定程度上借助弹性折弯结构300吸收座本体自身产生的横向膨胀力，进一步降低因座本体发生膨胀而对立板220和加热主体100之间的连接关系产生不利影响。进一步地，通过使上述第一弯折部和第二弯折部中的一者沿图1中方向A的垂 直方向凸出，可以使上述第一弯折部和第二弯折部中的一者的弹性形变方向垂直于立板220，使得立板220和座本体受热产生的横向膨胀力能够基本全部被弹性折弯结构300所吸收，保证底座和加热主体100不易发生连接失效的情况。
需要说明的是，无论弹性折弯结构300是设置在立板220上或者座本体上，还是设置在立板220与座本体的连接处，弹性折弯结构300与加热主体100不直接接触，即，利用立板220和座本体中的一者隔断加热主体100和弹性折弯结构300，从而可以尽量降低加热主体100传递至弹性折弯结构300上的热量，进而可以使弹性折弯结构300自身受热发生的膨胀幅度更小，以能够尽可能多地吸收立板220和/或座本体受热而产生的膨胀力，保证底座和加热主体100之间的连接可靠性更高。
上述第一弯折部和第二弯折部各自的结构可以采用任意能够产生弹性形变的弯折结构，例如，在一些可选的实施例中，第一弯折部在加热主体100的轴向截面(即，图1和图2所示截面)上的正投影形状包括U形；第二弯折部在加热主体100的轴向截面上的正投影形状包括U形。由于U形的弯折结构为平滑过渡结构，这使得上述第一弯折部和第二弯折部的弹性能力更强，且在受到较大的膨胀力的作用时更不容易出现无法恢复形变甚至被折断的情况。当然，在实际应用中，上述平滑过渡结构并不局限于U形，本发明对此没有特别的限制。
需要说明的是，本发明并不局限于采用图1和图2中的第一弯折部和第二弯折部，还可以将任意数量的第一弯折部和任意数量的第二弯折部自由组合，并根据具体需要分布在立板220、座本体和立板220与座本体的连接处中的至少一者。并且，本发明对第一弯折部和第二弯折部的具体尺寸参数没有特别的限制。此外，不同的弯折部的结构、尺寸等可以相同，也可以不同。另外，相邻的两个弯折部可以相互连接，也可以相互间隔，此处不作限定。
还需要说明的是，本发明并不局限于将第一弯折部和第二弯折部中的一者设置在座本体的中心部211和边缘部212之间，在实际应用中，立板220上也可以设置第一弯折部和第二弯折部中的一者，二者的凸出方向例如与图1中的方向A平行或者具有夹角；和/或，立板220与座本体之间的连接处也可以设置第一弯折部和第二弯折部中的一者，二者的凸出方向例如与图1中的方向A垂直或者具有夹角。以第一弯折部设置在立板220与座本体之间的连接处为例，第一弯折部的外周缘与环状结构的立板220的下边缘连接，第一弯折部的内周缘与座本体的外边缘连接，环状结构的立板220的上边缘还连接在加热主体100的外边缘。
另外需要说明的是，弹性折弯结构300并不局限于采用图1和图2中的第一弯折部和第二弯折部，弹性折弯结构300也可以为能够产生弹性形变的任意弹性件，以该弹性件为弹簧这一具体结构件为例，弹簧既可以产生轴向上的伸缩变形，也可以产生径向上的横向偏移，从而无论以何种方位结合至底座中，均可以为底座提供一定的弹性形变能力，从而提高了安装的灵活性，以适应更多的应用场景。
在一些可选的实施例中，弹性折弯结构300可以采用钣金工艺形成；或者，可以预先采用金属板材形成弹性折弯结构300，再通过焊接等方式，将弹性折弯结构300与立板220、座本体和立板220与座本体的连接处中的至少一者固定连接。例如，在弹性折弯结构300位于立板220和座本体之间的连接处的情况下，可以预先形成立板220、座本体和弹性折弯结构300三个独立的部分，通过焊接的方式将弹性折弯结构300的两端分别连接在立板220和座本体上，从而实现将三个独立的部分构成一个整体。在弹性折弯结构300位于立板220或座本体的情况下，可以将立板220或座本体形成两个独立的部分，通过焊接的方式将弹性折弯结构300的两端分别连接在立板220或者座本体的两个部分上，从而实现将立板220或者座本体的两个部分与弹性折 弯结构300构成一个整体。
在一些可选的实施例中，可以采用一体成型的方式形成座本体和弹性折弯结构300，例如采用钣金等方式在一整体结构的基材的预设位置处形成弹性折弯结构300，而基材上的剩余部分则为座本体。其中，座本体的位于弹性弯折结构300内、外两侧的两个部分即分别为中心部211和边缘部212，中心部211通过弹性折弯结构300与边缘部212相互连接，边缘部212通过立板220与加热主体100固定连接。或者，中心部211、边缘部212和弹性折弯结构300均可以采用分体成型的方式形成，之后再借助焊接等方式将三者连接在一起，从而使弹性折弯结构300固定于座本体上。更具体地，边缘部212的尺寸可以根据实际情况确定，此处不作限定。
显然，在弹性折弯结构300位于座本体上的情况下，弹性折弯结构300也可以为环状结构件，这可以保证弹性折弯结构300和立板220与整个座本体之间的连接可靠性均相对较高，并且，还使得弹性折弯结构300可以为座本体沿自身周向的各处提供吸收横向膨胀力的作用，从而进一步保证座本体和/或立板220受热时，不会造成底座和加热主体100之间出现连接失效的情况。
如上所述，座本体通过立板220与加热主体100相互连接，且座本体和加热主体100相互间隔，以尽量减少加热主体100传递至座本体的热量。在弹性折弯结构300设置在座本体上的情况下，为了进一步降低加热主体100传递至底座上的热量，可选地，弹性折弯结构300的壁厚值为d，且使2mm≤d≤4mm，可选地，在座本体包括边缘部212的情况下，也可以使边缘部212的壁厚满足上述要求，从而通过减小边缘部212和弹性折弯结构300的截面积的方式，降低立板220与座本体之间的导热效率，进一步防止加热主体100上的热量被过多地传递至底座上，保证加热主体100上任意位置处的温度基本相等，且为被加工件提供均匀的加热作用。
另外，为了保证加热器在工作过程中不接地，可以在本发明实施例公开的加热器中底座背离加热主体100的一侧设置绝缘盘510，该绝缘盘510例如采用陶瓷等的绝缘材料制作，绝缘盘510能够保证加热器为悬浮电位。绝缘盘510和底座之间可以通过螺钉相互固定，且为了隔绝加热器内部空间，底座和绝缘盘510之间通常可以设置有密封圈530。
具体地，底座背离加热主体100的一侧，也即座本体背离加热主体100的表面可以设置有安装槽214，密封圈530可以容纳在安装槽214内，且通过使密封圈530的截面积大于安装槽214的截面积，借助底座和绝缘盘510之间的挤压力，可以使密封圈530被挤压安装在安装槽214内，从而保证底座和绝缘盘510之间形成密封配合关系。
密封圈530通常可以采用橡胶等弹性材料制成，在加热器工作过程中，加热主体100产生的热量的一部分会传递至底座上，为了保证密封圈530不会受高温影响而变形甚至损毁，底座上对应于安装槽214的位置处通常可以设置有冷却通道215，在加热器工作时，通过在冷却通道215内通入水等冷却液，可以为底座中密封圈530所在的区域提供冷却降温的作用，保证密封圈530能够持久地提供密封作用。
基于上述实施例，通过使弹性折弯结构300设置在座本体上，且使弹性折弯结构300和边缘部212的厚度均相对较小，可以使加热主体100上的热量通过立板220传递至座本体的难度更高，从而进一步保证座本体中密封圈530所在的区域处的温度相对较低，提升密封圈530的密封效果和使用寿命。
进一步地，加热主体100中设有第一贯穿孔110，座本体中设有与第一贯穿孔110相对的第二贯穿孔213，第一贯穿孔110和第二贯穿孔213用于供顶针通过。在加热器的工作过程中，顶针可以通过第一贯穿孔110和第二贯穿孔213自加热器的一侧伸出至加热器的另一侧，从而在加热器下降时，能够借助上述顶针支撑被加工件，保证被加工件不会出现跌落的情况。由于 加热器中加热主体100和座本体之间的空间的气压通常与大气压接近，而加热器中加热主体100所在的一侧则必须为真空环境，为了保证加热器内的空间与加热器中加热主体100所在的一侧相互隔绝，加热器还包括弹性管件410，该弹性管件410的两端分别与加热主体100与座本体密封连接，用以分别对第一贯穿孔110和第二贯穿孔213进行密封。该弹性管件410为管状结构件，且弹性管件410的弹性方向与第一贯穿孔110的轴向一致，从而保证加热器的内部空间不会与加热主体100所在的一侧空间相互连通。
同时，由于弹性管件410的相背两端分别与加热主体100和座本体连接，从而加热主体100上的热量会传递至弹性管件410上，通过使弹性管件410的弹性方向与第一贯穿孔110的轴向一致，使得弹性管件410在受热的情况下能够通过自身发生弹性形变的方式吸收膨胀力，保证弹性管件410与加热主体100以及弹性管件410和座本体之间的连接可靠性相对较高。另外，在采用上述结构的弹性管件410连接加热主体100和座本体的情况下，弹性管件410的相背两端之间还可以产生一定的横向相对位移，从而进一步防止加热主体100所在一侧出现真空失效的情况。
具体地，弹性管件410可以为金属管件，弹性管件410的相背两端可以通过焊接的方式分别固定在加热主体100和座本体上，可选地，弹性管件410的相背两端均配设有圆环形的法兰420，以提升弹性管件410与加热主体100和座本体之间的连接可靠性。
在一些可选的实施例中，弹性管件410可以包括多个环形的弹性波片，该弹性波片具体可以为钢质波片，多个弹性波片沿弹性管件的轴向依次连接构成连续的管件，并且任意相邻的两个弹性波片被设置为能够沿弹性管件的轴向相互折叠或者展开。在实际应用中，弹性波片的长度以及相邻的两个波片之间的夹角可以根据实际需求确定。
另外，在第一贯穿孔110和第二贯穿孔213均设置有多个的情况下，弹 性管件410的数量也可以设置有多个，以使各第一贯穿孔110均能够通过一个弹性管件410与对应的第二贯穿孔213相互密封连接。
可选地，弹性折弯结构300位于弹性管件410与立板220之间，也就是说，基于座本体而言，弹性折弯结构300相对弹性管件410更靠外，由于座本体中越靠近加热主体100的部分的温度越高，且座本体通过立板220与加热主体100连接，因此座本体中越靠近立板的部分的温度也通常更高，因此，通过采用上述技术方案，在立板220和/或座本体受热产生横向膨胀力的情况下，弹性折弯结构300能够吸收更多的横向膨胀力，进而使弹性管件410尽量少地吸收横向膨胀力，从而使弹性管件410相背两端之间的横向位移更小，保证弹性管件410与加热主体100和座本体之间的连接可靠性相对较高。
另外，基于上述实施例，在环状结构的弹性折弯结构300位于座本体上时，可以进一步减少横向膨胀力作用于弹性管件410，保证弹性管件410的结构稳定性更高。
如上所述，加热主体100的热量也可以传递至弹性管件410上，可选地，弹性管件410为不锈钢结构件，也即，弹性波片可以采用不锈钢材料制成，且使弹性波片的壁厚小于0.15mm，在上述材质的弹性管件410采用上述尺寸的情况下，能够保证加热主体100通过弹性管件410传递至底座上的热量符合工艺要求，且不会对加热主体100的加热效果产生不利影响，且可以保证弹性管件410具有满足需求的结构强度，保证加热器的内部空间与外界空间相互隔绝。当然，本领域技术人员可以根据上述实施例的基本要求，选定其他材料形成弹性管件410，且根据所选用的材料的导热系数对应确定弹性管件410的壁厚，保证加热主体100自弹性管件410传递至底座上的热量满足工艺要求。
基于上述任一实施例公开的加热器，如图3所示，本发明实施例还公开一种加热基座，该加热基座包括绝缘盘510、波纹管520和上述任一加热器， 其中，加热器的底座中设置有第一中心孔560，绝缘盘510设置在底座底部，且与底座密封连接，以密封第一中心孔560。并且，绝缘盘510中设置有与第一中心孔560相对设置的第二中心孔570，波纹管520密封连接于绝缘盘510背离加热器的一侧，以密封第二中心孔570。
具体地，与上述实施例相似地，可以在底座背离加热主体100的一侧设置安装槽214，且在安装槽214内设置密封圈530，从而借助密封圈530实现密封底座和绝缘盘510的目的。波纹管520密封连接在绝缘盘510背离加热主体100的一侧，相似地，波纹管520也可以借助密封圈530实现与绝缘盘510密封连接的目的，具体地，可以在波纹管520朝向绝缘盘510的一侧表面设置与安装槽214相类似的沉槽结构，通过在前述沉槽结构内设置密封圈530，在波纹管520与绝缘盘510组装为一体之后，亦可以保证波纹管520与绝缘盘510形成密封连接关系。
另外，波纹管520、绝缘盘510和加热器之间可以通过螺钉550实现组装目的，通过使螺钉550穿过波纹管520和绝缘盘510，且连接在加热器的底座上，能够保证波纹管520、绝缘盘510和加热器形成稳定可靠的固定连接关系。并且，为了保证加热器处于悬浮电位，螺钉550与螺钉孔之间可以设置有绝缘垫圈540。
本发明上文实施例中重点描述的是各个实施例之间的不同，各个实施例之间不同的优化特征只要不矛盾，均可以组合形成更优的实施例，考虑到行文简洁，在此则不再赘述。
以上所述仅为本发明的实施例而已，并不用于限制本发明。对于本领域技术人员来说，本发明可以有各种更改和变化。凡在本发明的精神和原理之内所作的任何修改、等同替换、改进等，均应包含在本发明的权利要求范围之内。

Claims (13)

  1. 一种加热器，用于半导体工艺设备，其特征在于，包括加热主体和用于支撑所述加热主体的底座，所述底座包括相互连接的座本体和立板，所述座本体与所述加热主体相对且间隔设置，所述立板位于所述座本体与所述加热主体之间，且与所述加热主体固定连接，所述立板、所述座本体和所述立板与所述座本体的连接处中的至少一者设置有弹性折弯结构，所述弹性折弯结构用于在所述立板和/或所述座本体发生膨胀变形时，通过产生弹性形变来使所述立板与所述加热主体保持连接。
  2. 根据权利要求1所述的加热器，其特征在于，所述弹性折弯结构被设置为能够在第一方向上产生弹性形变，或者能够在所述第一方向和第二方向上产生弹性形变，其中，所述第一方向平行于所述加热主体的径向；所述第二方向平行于所述加热主体的轴向。
  3. 根据权利要求1所述的加热器，其特征在于，所述弹性弯折结构包括至少一个第一弯折部和至少一个第二弯折部中的至少一者，其中，所述第一弯折部自第一基准面朝向所述座本体与所述加热主体之间的间隔内一侧凸出；所述第二弯折部自第二基准面朝向背离所述座本体与所述加热主体之间的间隔一侧凸出；其中，所述第一基准面为所述第一弯折部所位于的所述立板、所述座本体和所述立板与所述座本体的连接处中的至少一者，与所述间隔相对的表面；所述第二基准面为所述第二弯折部所位于的所述立板、所述座本体和所述立板与所述座本体的连接处中的至少一者，与所述间隔相背离的表面。
  4. 根据权利要求3所述的加热器，其特征在于，所述第一弯折部在所述加热主体的轴向截面上的正投影形状包括U形；所述第二弯折部在所述加 热主体的轴向截面上的正投影形状包括U形。
  5. 根据权利要求3所述的加热器，其特征在于，所述第一弯折部为围绕所述加热主体的轴线环绕设置的环形弯折部；所述第二弯折部为围绕所述加热主体的轴线环绕设置的环形弯折部。
  6. 根据权利要求3-5任意一项所述的加热器，其特征在于，所述弹性折弯结构设置在所述座本体上，且当所述弹性折弯结构包括至少一个所述第一弯折部时，所述座本体包括中心部和边缘部，所述边缘部环绕所述中心部设置，且至少一个所述第一弯折部连接在所述边缘部和所述中心部之间，所述边缘部与所述立板固定连接。
  7. 根据权利要求3-5任意一项所述的加热器，其特征在于，所述第一弯折部与所述加热主体之间设有间隙。
  8. 根据权利要求1或2所述的加热器，其特征在于，所述弹性折弯结构的壁厚值为d，其中，2mm≤d≤4mm。
  9. 根据权利要求1所述的加热器，其特征在于，所述加热主体中设有第一贯穿孔，所述座本体中设有与所述第一贯穿孔相对的第二贯穿孔，所述第一贯穿孔和所述第二贯穿孔用于供顶针通过；
    所述加热器还包括弹性管件，所述弹性管件的两端分别与所述加热主体与所述座本体密封连接，用以分别对所述第一贯穿孔和所述第二贯穿孔进行密封。
  10. 根据权利要求9所述的加热器，其特征在于，所述弹性折弯结构设置在所述座本体上，且位于所述弹性管件与所述立板之间。
  11. 根据权利要求9所述的加热器，其特征在于，所述弹性管件包括多个环形的弹性波片，多个所述弹性波片沿所述弹性管件的轴向依次连接构成连续的管件，并且任意相邻的两个弹性波片被设置为能够沿所述弹性管件的轴向相互折叠或者展开。
  12. 根据权利要求11所述的加热器，其特征在于，所述弹性波片的壁厚小于0.15mm。
  13. 一种加热基座，其特征在于，包括绝缘盘、波纹管和权利要求1-12中任意一项所述的加热器，其中，所述底座中设置有第一中心孔，所述绝缘盘设置在所述底座底部，且与所述底座密封连接，以密封所述第一中心孔；并且，所述绝缘盘中设置有与所述第一中心孔相对设置的第二中心孔，所述波纹管密封连接于所述绝缘盘背离所述加热器的一侧，以密封所述第二中心孔。
PCT/CN2021/114024 2020-08-25 2021-08-23 加热器和加热基座 WO2022042471A1 (zh)

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