WO2022038548A1 - Creuset d'évaporation pour évaporation de métaux - Google Patents

Creuset d'évaporation pour évaporation de métaux Download PDF

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Publication number
WO2022038548A1
WO2022038548A1 PCT/IB2021/057619 IB2021057619W WO2022038548A1 WO 2022038548 A1 WO2022038548 A1 WO 2022038548A1 IB 2021057619 W IB2021057619 W IB 2021057619W WO 2022038548 A1 WO2022038548 A1 WO 2022038548A1
Authority
WO
WIPO (PCT)
Prior art keywords
cavity
evaporation boat
outer contour
contour
upper side
Prior art date
Application number
PCT/IB2021/057619
Other languages
English (en)
Inventor
Bernd Ruisinger
Georg P. Victor
Frank A. MESCHKE
Bernd SCHEUTHLE
Original Assignee
3M Innovative Properties Company
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Company filed Critical 3M Innovative Properties Company
Priority to EP21758467.1A priority Critical patent/EP4200458A1/fr
Priority to CN202180050736.8A priority patent/CN115885056A/zh
Publication of WO2022038548A1 publication Critical patent/WO2022038548A1/fr

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/581—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/64—Burning or sintering processes
    • C04B35/645—Pressure sintering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/38—Non-oxide ceramic constituents or additives
    • C04B2235/3804—Borides
    • C04B2235/3813—Refractory metal borides
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/94—Products characterised by their shape
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/95—Products characterised by their size, e.g. microceramics

Definitions

  • the present disclosure relates to an evaporation boat for evaporation of metals.
  • the most common method for coating flexible substrates such as polymeric films or papers with metals is the so-called vacuum web coating using physical vapor depositing technology.
  • the coated flexible substrates serve a wide field of applications such as food packaging, for decorative purposes and manufacturing of capacitors.
  • the substrate to be coated is passed over a cooled metal drum where it is exposed to metal vapor.
  • the metal is deposited in a thin layer on the substrate.
  • a series of ceramic evaporation boats aligned along the entire width of the film to be coated, are placed in cooled copper clamps and heated up by direct current flow in a vacuum of typically 10'4 mbar to temperatures of 1400 - 1550 °C.
  • Metal wire is continuously fed to the surface of the evaporation boat where it is melted and vaporized.
  • the most common metal used in this process is aluminum.
  • the ceramic evaporation boat typically consists of a mixture of titanium diboride (TiB2) and boron nitride (BN), sometimes aluminum nitride (AIN) is used in addition.
  • the evaporation boat is a prismatic shaped body with a rectangular cross-sectional area, a length of about 120 to 150 mm, a width of 25 to 40 mm and a height of 8 to 12 mm, with a cavity on the upper side of the evaporation boat which is filled with liquid metal to be evaporated.
  • Coating an aluminum layer on plastic films improves barrier properties of the substrate, e.g., impermeability to oxygen, aromatic substances, light, heat or moisture.
  • the barrier properties of coated films are comparable to aluminum foil, but with lower production costs.
  • pinholes Defects in the metallized film, so-called pinholes, affect the barrier properties in an undesired way. It is therefore essential to avoid pinholes as much as possible.
  • DE 10 2008 016 619 B3 discloses an evaporation boat having a plurality of recesses in the vaporizing surface, the opening in each recess having an area/perimeter ratio of greater than or equal to 1.5 mm.
  • the shape of the recesses can be for example circular, rectangular, triangular or elliptical.
  • the main benefit of this evaporation boat is described as improved wetting of aluminum in both longitudinal and cross direction of the vaporizing surface of the evaporation boat.
  • a disadvantage of this evaporation boat is that it does not allow a pinhole free operation, i.e., an operation with little or no pinholes.
  • EP 1 688 514 A1 discloses an evaporation boat with several grooves in the cavity of the evaporation boat to improve the wetting of liquid aluminum on the upper surface of the evaporation boat from which metal is evaporated.
  • a disadvantage of this evaporation boat is the uneven wetting of liquid aluminum in the cavity if the so-called wire feeding point, i.e., the point where the aluminum wire hits the cavity, is not in the center of the cavity. As a result of the uneven wetting, a pinhole free operation is not possible.
  • the present disclosure relates to an evaporation boat for evaporation of metals, wherein the evaporation boat has an upper side, an underside, two lateral surfaces and two clamping surfaces, and wherein metal is evaporated from the upper side of the evaporation boat, and wherein the upper side of the evaporation boat comprises a cavity, and wherein the cavity has an outer contour at the upper side of the evaporation boat, and wherein the outer contour of the cavity has a shortest circumscribing contour, and wherein the outer contour has a circumferential length, and wherein the shortest circumscribing contour has a circumferential length, and wherein the ratio of the circumferential length of the shortest circumscribing contour to the circumferential length of the outer contour is less than 1, preferably at most 0.8.
  • Figures 1A - ID show various views of a reference evaporation boat
  • the upper side of the evaporation boat disclosed herein comprises a cavity.
  • the cavity comprises a recess in the upper side of the evaporation boat. Under operation of the evaporation boat, the cavity is wetted with liquid metal to be evaporated.
  • the ratio of the circumferential length of the shortest circumscribing contour to the circumferential length of the outer contour is at most 0.8. In some embodiments, the ratio of the circumferential length of the shortest circumscribing contour to the circumferential length of the outer contour is at most 0.75, or at most 0.70, or at most 0.65, or at most 0.60.
  • the ratio of the circumferential length of the shortest circumscribing contour to the circumferential length of the outer contour may be at least 0.1. In some embodiments, the ratio of the circumferential length of the shortest circumscribing contour to the circumferential length of the outer contour is at least 0.2, or at least 0.35.
  • the ratio of the circumferential length of the shortest circumscribing contour to the circumferential length of the outer contour is at least 0.1 and at most 0.8. In some embodiments, the ratio of the circumferential length of the shortest circumscribing contour to the circumferential length of the outer contour is at least 0.2 and at most 0.8. In some embodiments, the ratio of the circumferential length of the shortest circumscribing contour to the circumferential length of the outer contour is at least 0.35 and at most 0.70.
  • the cavity comprises one single recess in the upper side of the evaporation boat, and the area enclosed by the outer contour of the cavity is a continuous area.
  • one single recess it is meant that there is only one recess on the upper side of the evaporation boat which is fdled with liquid metal to be evaporated, and there are no other recesses on the upper side of the evaporation boat besides the one single recess.
  • the cavity consists of one single recess in the upper side of the evaporation boat, and the area enclosed by the outer contour of the cavity is a continuous area.
  • the cavity of an evaporation boat as disclosed herein may be composed of 4 individual recesses.
  • One of the four individual recesses may be located close to one of the two clamping regions of the evaporation boat, a second one of the four individual recesses may be located close to the other one of the two clamping regions, and the third and the fourth individual recess may be located in the central region of the evaporation boat, i.e., in the region between the two recesses near the clamping regions.
  • the clamping regions of the evaporation boat are located near the clamping surfaces of the evaporation boat.
  • the outer contour of the cavity of the evaporation boat disclosed herein comprises a plurality of extensions which are directed inwardly, i.e., towards the area enclosed by the outer contour.
  • the plurality of extensions can also be regarded as extensions of the shortest circumscribing contour of the outer contour of the cavity, i.e., as extensions extending inwardly, i.e., towards the area enclosed by the outer contour, from the shortest circumscribing contour of the outer contour.
  • the plurality of extensions extending inwardly from the shortest circumscribing contour of the outer contour of the cavity result from extensions of the bulk material of the evaporation boat which is outside of the outer contour of the cavity, the extensions being directed towards the area enclosed by the outer contour.
  • a plurality of extensions means at least 2 extensions.
  • the outer contour may comprise at least 4, at least 6, at least 8, at least 10, at least 12, at least 20 or at least 50 extensions. Typically, the outer contour comprises at most 100 extensions.
  • the extensions may be located along the complete shortest circumscribing contour of the cavity. It is also possible that the extension may only be located along one or more portions of the shortest circumscribing contour.
  • the outer contour of the cavity is regularly shaped in the form of a corrugated contour. In some embodiments, the outer contour of the cavity is irregularly shaped with extensions of different shape and size.
  • the lateral surface of the cavity has a height.
  • the height of the lateral surface of the cavity is measured perpendicularly to the plane of the upper side of the evaporation boat outside of the outer contour of the cavity.
  • the height of the lateral surface of the cavity corresponds to the depth of the cavity and typically is from 0.5 mm to 5 mm, preferably from 1 to 3 mm.
  • the lateral surface of the cavity comprises extensions of the lateral surface of the cavity.
  • the bottom surface of the cavity is not parallel to the upper side of the evaporation boat, and the depth of the cavity may be different at different positions of the bottom surface of the cavity.
  • the depth of the cavity may be larger near the outer contour of the cavity and may be smaller in the central region of the cavity, i.e., at positions more distant from the outer contour. It is possible that the depth of the cavity is 3 mm, for example, near the outer contour of the cavity, and the depth of the cavity is 1 mm or even 0 mm, for example, in the central region of the cavity.
  • the bottom surface of the cavity may also have several peaks and depressions.
  • the cavity may have a wave-shaped bottom surface.
  • the bottom surface of the cavity may also have peaks and depressions distributed in other regular patterns.
  • the bottom surface of the cavity may also be a freeform surface, having irregularly distributed peaks and depressions.
  • the cavity comprises a recess in the upper side of the evaporation boat and a central region.
  • the recess is located along the outer contour of the cavity, and the central region is enclosed by the recess.
  • the depth of the cavity measured at positions of the recess may be from 0.5 to 5 mm and is different from the depth of the cavity measured at positions of the central region.
  • the depth of the cavity measured at positions of the central region may be from 0 to 5 mm.
  • the depth of the cavity measured at positions of the recess is measured at a position having the largest depth, i.e., the depth of the cavity measured at positions of the recess is to be understood as the maximum depth of the recess of the cavity.
  • the depth of the cavity measured at positions of the central region is different at different positions of the central region, the depth of the cavity measured at positions of the central region is measured at a position having the largest depth, i.e., the depth of the cavity measured at positions of the central region is to be understood as the maximum depth of the central region of the cavity.
  • the cavity has a meander-shaped form.
  • the meander-shaped form has rounded comers.
  • the outer contour of the meandershaped cavity may be formed by sections of circular lines connected by straight lines.
  • the outer contour of the meander-shaped cavity has the form of a meander-shaped line, preferably with rounded comers.
  • the meander-shaped line is along the two lateral surfaces of the evaporation boat.
  • the cavity has a meander-shaped form, preferably a meander-shaped form having rounded comers, and the evaporation boat has a longitudinal axis, and the cavity has a minimal width in a direction perpendicular to the longitudinal axis, and the minimal width of the cavity in a direction perpendicular to the longitudinal axis is at least 3 mm, preferably at least 5 mm, more preferably at least 7 mm.
  • the outer contour of the cavity of the evaporation boat disclosed herein comprises a plurality of extensions which are directed inwardly.
  • the plurality of extensions are extensions extending inwardly from the shortest circumscribing contour of the outer contour.
  • the extensions are located along the regions of the shortest circumscribing contour of the cavity which are near the two lateral surfaces of the evaporation boat.
  • the outer contour of the cavity may comprise at least four, preferably at least six, more preferably at least eight extensions which are directed inwardly. Half of the number of the extensions may be located along each of the two lateral surfaces of the evaporation boat.
  • the width of the extensions in a direction parallel to the longitudinal axis of the evaporation boat is at least 1 mm.
  • the width of the extensions in a direction parallel to the longitudinal axis of the evaporation boat is at most 10 mm.
  • the distance of two adjacent extensions may be at least 2 mm, preferably at least 5 mm, more preferably at least 7 mm, in a direction parallel to the longitudinal axis of the evaporation boat.
  • the distance of two adjacent extensions may be constant in a direction parallel to the longitudinal axis of the evaporation boat.
  • the length of the extensions in a direction perpendicular to the longitudinal axis of the evaporation boat is at least 1 mm, preferably at least 5 mm, more preferably at least 10 mm.
  • the length of the extensions in a direction perpendicular to the longitudinal axis of the evaporation boat is at most the maximal width of the cavity minus 3 mm, preferably minus 5 mm, more preferably minus 10 mm.
  • the length of the extensions in a direction perpendicular to the longitudinal axis of the evaporation boat is measured from the shortest circumscribing contour of the outer contour of the cavity to the end of the extension in a direction perpendicular to the longitudinal axis of the evaporation boat.
  • the lengths of the individual extensions of the plurality of extensions may be identical for all extensions of the outer contour of the cavity, or may be different for the individual extensions of the outer contour of the cavity.
  • the average length of the extensions, i.e., the arithmetic mean value of the length of the individual extensions, in a direction perpendicular to the longitudinal axis of the evaporation boat may be from 10 to 90%, or from 20 to 80%, or from 30 to 70%, or from 40 to 60% of the maximum width of the cavity.
  • the average length of the extensions in a direction perpendicular to the longitudinal axis of the evaporation boat is from 30 to 70%, more preferably from 40 to 60% of the maximum width of the cavity.
  • the average length of the extensions in a direction perpendicular to the longitudinal axis of the evaporation boat is half of the maximum width of the cavity.
  • the individual extensions of the plurality of extensions may have two or three or more different lengths. At least one, preferably at least two, of the extensions have a length in a direction perpendicular to the longitudinal axis of the evaporation boat of at least 50%, preferably of at least 60%, of the maximum width of the cavity.
  • the first of the three different lengths of the extensions in a direction perpendicular to the longitudinal axis of the evaporation boat corresponds to from 10 to 90% of the maximum width of the cavity.
  • the second of the three different lengths of the extensions in a direction perpendicular to the longitudinal axis of the evaporation boat corresponds to the first of the three lengths minus 0. 1 to 10 mm, preferably minus 3 to 7 mm.
  • the third of the three different lengths of the extensions in a direction perpendicular to the longitudinal axis of the evaporation boat corresponds to the first of the three lengths plus 0.1 to 10 mm, preferably plus 3 to 7 mm.
  • the difference in length between the first and second of the three lengths is identical to the difference in length between the first and third of the three lengths.
  • the first, second and third of the three different lengths of the extensions in a direction perpendicular to the longitudinal axis of the evaporation boat are from 12 to 22 mm, 7 to 17 mm, and 17 to 27 mm, respectively.
  • the cavity of the evaporation boat comprises one single recess in the upper side of the evaporation boat, and the area enclosed by the outer contour of the cavity is a continuous area, and the area enclosed by the outer contour of the cavity does not comprise an area lying in the same plane as the surface area of the upper side of the evaporation boat which is outside of the outer contour of the cavity, and the evaporation boat has a longitudinal axis, and the cavity has a minimal width in a direction perpendicular to the longitudinal axis, and the minimal width of the cavity in a direction perpendicular to the longitudinal axis is at least 3 mm, preferably at least 5 mm, more preferably at least 7 mm, and the outer contour of the cavity comprises at least four extensions which are directed inwardly, the at least four extensions being extensions extending inwardly from the shortest circumscribing contour of the outer contour, and the width of the extensions in a direction parallel to the longitudinal axis of the evaporation boat is at least 1 mm
  • the upper side of the evaporation boat may be point-symmetrical to the center point of the upper side of the evaporation boat. In some embodiments, the upper side of the evaporation boat is point- symmetrical to the center point of the upper side of the evaporation boat, and the upper side of the evaporation boat is not mirror-symmetrical to the middle axis of the upper side of the evaporation boat.
  • the surface area of the lateral surface of the cavity is larger than the lateral surface of the cavity for a standard evaporation boat.
  • the increased surface area of the lateral surface of the cavity compared to a standard evaporation boat is due to the extensions of the outer contour of the cavity, i.e., due to the increased circumferential length of the outer contour of the cavity compared to a standard evaporation boat.
  • the increased lateral surface area of the cavity of the evaporation boat as disclosed herein is an additional surface area from which molten metal can be evaporated. Therefore, the evaporation rate per area unit, for example per mny, is locally increased at the outer contour of the cavity, due to the increased lateral surface of the cavity.
  • the wetted surface area is wider than for a standard evaporation boat, i.e., the wetted surface area is broader in a direction perpendicular to the longitudinal axis.
  • the suction effect caused by the increased surface area of the lateral surface of the cavity leads to a wider area wetted by molten metal even if the bottom surface of the cavity is smaller than for a standard cavity.
  • the suction effect caused by the increased surface area of the lateral surface of the cavity also helps to improve the distribution of molten metal within the cavity, whereas for standard evaporation boats fluid displacement is the main mechanism for spreading the molten metal across the cavity.
  • the pool of molten metal is thinner for the evaporation boat disclosed herein, compared to a standard evaporation boat with a standard cavity, when the same feeding rate of metal wire and the same total evaporation rate is used. Due to the thinner pool of molten metal, the evaporation boat as disclosed herein has less tendency for overheating and pin-hole formation. A further advantage is that the thinner pool of molten metal improves the energy efficiency and reduces the power consumption of the evaporation boat, as the parallel resistance of the pool of molten metal is increased.
  • At least one part of the evaporation boat has a cross-sectional area with a triangular shape.
  • the triangular cross-sectional area is perpendicular to the longitudinal axis of the evaporation boat, i.e., typically parallel to the clamping surfaces.
  • the underside of the evaporation boat corresponds to the two lateral surfaces of the evaporation boat which are inclined against the upper side of the evaporation boat.
  • At least one part of the evaporation boat has a cross-sectional area having the form of a halved ellipse.
  • the underside of the evaporation boat has the form of a halved ellipse.
  • the two lateral surfaces of the evaporation boat correspond to a right and a left part of the halved ellipse of the underside of the evaporation boat.
  • Figure 1A shows a plan view of the upper side 2 of a reference evaporation boat 1.
  • Figure IB shows a 3D view of the evaporation boat 1 of Figure 1A.
  • Figure 1C shows a cross-sectional view of the evaporation boat 1 of Figures 1A - IB at the sectional line denoted in Figures 1A and IB by “1C”.
  • Metal is evaporated from the upper side 2 of the evaporation boat 1.
  • the upper side 2 has a rectangular shape.
  • the underside 3 of the evaporation boat 1 also has a rectangular shape.
  • Figure IB one of the two lateral surfaces 14 and one of the two clamping surfaces 15 of the reference evaporation boat 1 are also shown.
  • the upper side 2 of the evaporation boat 1 of Figure 1A comprises a cavity 4.
  • the cavity 4 is a recess in the upper side of the evaporation boat. Under operation of the evaporation boat, the cavity is wetted with liquid metal to be evaporated.
  • the cavity 4 has an outer contour 5 at the upper side 2 of the evaporation boat 1.
  • the cavity 4 has a bottom surface 11 and a lateral surface 12 along the outer contour 5 of the cavity 4.
  • the lateral surface 12 of the cavity 4 is extending from the outer contour 5 of the cavity 4 at the upper side 2 of the evaporation boat 1 to the bottom surface 11 of the cavity 4.
  • the bottom surface 11 is parallel to the underside 3 of the evaporation boat 1.
  • the angle which is enclosed by the surface area of the upper side 2 of the evaporation boat 1 which is outside of the outer contour 5 of the cavity 4 and the lateral surface 12 of the cavity 4 is 90°.
  • the outer contour 5 of the cavity 4 corresponds to the shortest circumscribing contour 6 of the outer contour 5 of the cavity 4.
  • the shortest circumscribing contour 6 is the shortest contour which circumscribes the outer contour 5.
  • the circumferential length of the shortest circumscribing contour 6 corresponds to the circumferential length of the outer contour 5, and the ratio of the circumferential length of the shortest circumscribing contour 6 to the circumferential length of the outer contour 5 is 1.0.
  • the ratio of the area enclosed by the outer contour 5 of the cavity 4 to the total surface area of the upper side 2 of the evaporation boat 1 as shown in Figures 2B and 2E is 0.28.
  • the area enclosed by the outer contour 5 of the cavity 4 may also be larger than shown in Figures 2B and 2E, and the ratio of the area enclosed by the outer contour 5 of the cavity 4 to the total surface area of the upper side 2 of the evaporation boat 1 may also be up to 0.7 or up to 0.95.
  • Figure 2F schematically shows a plan view of the upper side 2 of the evaporation boat 1 of Figure 2B under operation.
  • the upper side 2 of the evaporation boat has been wetted by molten aluminum.
  • the area 13 which is wetted by molten aluminum is schematically shown as a hatched area.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Structural Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

La présente invention concerne un creuset d'évaporation pour l'évaporation de métaux et l'utilisation dudit creuset d'évaporation pour l'évaporation de métaux choisis dans le groupe constitué par l'aluminium, le cuivre et l'argent.
PCT/IB2021/057619 2020-08-19 2021-08-18 Creuset d'évaporation pour évaporation de métaux WO2022038548A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP21758467.1A EP4200458A1 (fr) 2020-08-19 2021-08-18 Creuset d'évaporation pour évaporation de métaux
CN202180050736.8A CN115885056A (zh) 2020-08-19 2021-08-18 用于蒸发金属的蒸发舟

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP20191717.6 2020-08-19
EP20191717 2020-08-19

Publications (1)

Publication Number Publication Date
WO2022038548A1 true WO2022038548A1 (fr) 2022-02-24

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PCT/IB2021/057619 WO2022038548A1 (fr) 2020-08-19 2021-08-18 Creuset d'évaporation pour évaporation de métaux

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EP (1) EP4200458A1 (fr)
CN (1) CN115885056A (fr)
WO (1) WO2022038548A1 (fr)

Citations (8)

* Cited by examiner, † Cited by third party
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US5198032A (en) * 1991-08-27 1993-03-30 Leybold Aktiengesellschaft Apparatus for vapor depositing on tape having grooved evaporator cell
JPH0773460A (ja) * 1993-08-31 1995-03-17 Kao Corp 磁気記録媒体の製造装置
EP1688514A1 (fr) 2003-11-20 2006-08-09 Denki Kagaku Kogyo Kabushiki Kaisha Element chauffant a vaporisation de metaux et procede correspondant
US20070110412A1 (en) * 2005-11-04 2007-05-17 General Electric Company Container for evaporation of metal and method to manufacture thereof
DE102008016619B3 (de) 2008-04-01 2009-11-05 Kennametal Sintec Keramik Gmbh Verdampferkörper
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