WO2021251521A1 - Module de robinet-vanne et chambre d'étanchéité - Google Patents

Module de robinet-vanne et chambre d'étanchéité Download PDF

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Publication number
WO2021251521A1
WO2021251521A1 PCT/KR2020/007537 KR2020007537W WO2021251521A1 WO 2021251521 A1 WO2021251521 A1 WO 2021251521A1 KR 2020007537 W KR2020007537 W KR 2020007537W WO 2021251521 A1 WO2021251521 A1 WO 2021251521A1
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WO
WIPO (PCT)
Prior art keywords
support member
sealing plate
gate valve
valve module
opening
Prior art date
Application number
PCT/KR2020/007537
Other languages
English (en)
Korean (ko)
Inventor
송동욱
Original Assignee
엘지전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지전자 주식회사 filed Critical 엘지전자 주식회사
Priority to PCT/KR2020/007537 priority Critical patent/WO2021251521A1/fr
Priority to KR1020227025134A priority patent/KR20220120613A/ko
Publication of WO2021251521A1 publication Critical patent/WO2021251521A1/fr

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like

Definitions

  • Embodiments relate to gate valve modules and closed chambers.
  • a glove box or an airtight chamber applied to a semiconductor or display manufacturing process must be closed to the outside to keep its interior space in a specific gas atmosphere.
  • a gate valve for controlling the entry and exit of the workpiece to be processed is provided in the sealing chamber.
  • the gate valve opens and closes the valve to transfer the work-in-progress between the closed chamber and the outside or between the closed chamber and another closed chamber to maintain an airtight state in the closed chamber.
  • the various components of the gate valve become bulky and the load increases, and due to the non-uniform load applied to the wall by these components, the wall is bent over time, thereby reducing the sealing performance of the hermetic chamber. In this case, even if the gate valve is sealed on the wall, the gate valve and the wall do not come into contact with each other, causing a sealing failure of the sealed chamber.
  • the embodiments aim to solve the above and other problems.
  • Embodiments provide an easy-to-mount gate valve module and hermetic chamber.
  • Embodiments provide a gate valve module and a closed chamber that can improve sealing performance.
  • the embodiment provides a gate valve module and an airtight chamber that can prevent warping of the wall.
  • Embodiments provide a gate valve module and a closed chamber that can immediately respond to a change in mounting position.
  • the gate valve module includes: a first support member including an opening; a sealing plate for opening and closing the opening; a first driving unit installed on one side of the first supporting member to vertically move the sealing plate in a vertical direction; and a second driving unit that moves the sealing plate back and forth in a horizontal direction.
  • the hermetic chamber includes: a wall including a first opening; and a gate valve module.
  • the gate valve module may include a support member coupled to the wall and including a second opening; a sealing plate for opening and closing the second opening; a first driving unit installed on one side of the support member to vertically move the sealing plate in a vertical direction; and a second driving unit that moves the sealing plate back and forth in a horizontal direction.
  • various components that is, the gate valve module in which the parts are modularized is fastened to the closed chamber, so that the gate valve module can be easily mounted.
  • the wall of the hermetic chamber is not bent, thereby improving sealing performance. It has the advantage that it can be
  • the gate valve module is modularized and the corresponding gate module is fastened to the newly changed position, so that it is possible to immediately respond to a change in the mounting position.
  • FIG. 1 shows a closed chamber according to an embodiment.
  • FIG. 2 shows a gate valve module according to an embodiment.
  • FIG. 5 is a side view illustrating a gate valve module according to an embodiment.
  • FIG. 7 is an enlarged view of area A of FIG. 6 .
  • Fig. 8 shows the sealing member installed on the sealing plate.
  • 9 to 12 show a state in which the gate valve module according to the embodiment operates in a closed state.
  • the terminology used in the embodiments of the present invention is for describing the embodiments and is not intended to limit the present invention.
  • the singular form may also include the plural form unless otherwise specified in the phrase, and when it is described as "at least one (or more than one) of B and (and) C", it can be combined with A, B, and C. It may include one or more of all combinations.
  • terms such as first, second, A, B, (a), (b), etc. may be used. These terms are only for distinguishing the component from other components, and are not limited to the essence, order, or order of the component by the term.
  • a component when it is described that a component is 'connected', 'coupled' or 'connected' to another component, the component is not only directly connected, coupled or connected to the other component, but also with the component It may also include a case of 'connected', 'coupled' or 'connected' due to another element between the other elements.
  • the upper (above) or lower (below) when it is described as being formed or disposed on “above (above) or under (below)" of each component, the upper (above) or lower (below) is not only when two components are in direct contact with each other, but also one Also includes a case in which another component as described above is formed or disposed between two components.
  • up (up) or down (down) it may include not only the upward direction but also the meaning of the downward direction based on one component.
  • the gate valve module may be fastened to the wall of the closed chamber.
  • the opening of the wall is opened and closed by the control of the gate valve module, so that a semiconductor wafer or a display panel may be transferred into the sealed chamber or transferred to the outside in the sealed chamber. That is, when a semiconductor wafer or a display panel is transferred, the gate valve module may be operated in an open state, and in other cases, the gate valve module may be operated in a closed state.
  • various components such as a first supporting member, a first driving unit, a sealing plate, a second supporting member, a second driving unit, etc. may be modularized in the gate valve module to constitute a single product.
  • the gate valve module composed of a single product is not only easy to transport, but also fastens to the wall of the sealed chamber, so that the opening and closing function of the gate valve can be easily performed.
  • the gate valve module of the embodiment is easy to assemble or mount on the wall.
  • the gate valve module of the embodiment is fastened in face-to-face contact with the wall, so that the load of the gate valve module is evenly spread on the wall to prevent bending of the wall, thereby improving sealing performance.
  • the gate valve module of the embodiment is composed of a single product and only the corresponding gate valve module needs to be mounted in the corresponding position when the mounting position is changed, it is possible to immediately respond to the change in the mounting position.
  • FIG. 1 shows a closed chamber according to an embodiment
  • FIG. 2 shows a gate valve module according to an embodiment
  • 3 shows a door assembly
  • FIG. 4 is an enlarged view of a part of the door assembly
  • 5 is a side view illustrating a gate valve module according to an embodiment
  • 6 shows the relationship between the door assembly and the stopper
  • FIG. 7 is an enlarged view of area A of FIG. 6
  • Fig. 8 shows the sealing member installed on the sealing plate.
  • the gate valve module 100 may be fastened to the wall 20 of the closed chamber 10 .
  • the hermetic chamber 10 may be composed of a plurality of frames and a plurality of walls. That is, the closed chamber 10 may be manufactured by connecting a plurality of frames to each other and fastening a wall to these frames.
  • At least one of the plurality of walls 20 may include an opening 22 through which the work-in-progress can be transported.
  • the opening 22 has a size larger than the size of the work-in-progress, so that the work-in-process can be easily transferred into or out of the closed chamber 10 through the opening 22 .
  • the gate valve module 100 of the embodiment may include a first support member 110 , a first driving unit 120 , and a door assembly 130 .
  • the first support member 110 may be fastened to at least one wall 20 among a plurality of walls of the closed chamber 10 .
  • the size of the first support member 110 may be the same as or smaller than the size of the wall 20 .
  • the area in which the first support member 110 is fastened to the wall 20 increases. It is possible to prevent bending of the wall 20 due to the load of the valve module 100 .
  • the first support member 110 may have a plate shape.
  • the first support member 110 may be formed of a material having excellent strength.
  • the first support member 110 may be formed of, for example, stainless steel, aluminum, or an aluminum alloy.
  • the first support member 110 may be referred to as a support plate, a support plate, a support frame, or the like.
  • the first support member 110 may have a plate shape.
  • both the first side surface of the first support member 110 and the second side opposite to the first side surface may have a flat surface, but the present invention is not limited thereto.
  • the first side may be a surface facing the wall 20 of the closed chamber 10
  • the second side may be a surface to which the first driving unit 120 is fastened.
  • the first support member 110 may be fastened in contact with the wall 20 having a flat surface in a face-to-face manner.
  • the first support member 110 may be replaced with the wall 20 . That is, the first support member 110 may be directly coupled to the frames. In this case, since the wall 20 is omitted and the first support member 110 is directly fastened to the frames, assembly may be further facilitated. In addition, the door assembly 130 does not need to be positioned with the wall 20 so that the opening 22 of the wall 20 and the opening 112 of the door assembly 130 correspond to each other.
  • the first driving unit 120 may be installed on the second side surface of the first supporting member 110 to vertically move the door assembly 130 in a vertical direction.
  • the door assembly 130 may be raised in a vertical direction by the first driving unit 120 .
  • the door assembly 130 may descend in a vertical direction by the first driving unit 120 .
  • the first driving unit 120 may include a first cylinder 121 , a second cylinder 122 , a first shaft 123 , and a second shaft 124 .
  • first cylinder 121 and the first shaft 123 may be included in the 1-1 driving unit, and the second cylinder 122 and the second shaft 124 may be included in the 1-2 driving unit.
  • first cylinder 121 is installed on the second side surface of the first support member 110
  • second cylinder 122 is installed on the second side surface of the first support member 110 and the first cylinder (121) may be spaced apart.
  • first cylinder 121 may be installed adjacent to one end of the first support member 110
  • second cylinder 122 may be installed adjacent to the other end of the first support member 110 .
  • the first cylinder 121 of the first support member 110 corresponding to an area adjacent to one end of the wall 20 is It is installed in the first region, and the second cylinder 122 may be installed in the second region of the first support member 110 corresponding to the region adjacent to the other end of the wall 20 .
  • the first cylinder 121 and the second cylinder 122 may be mounted on a second side opposite to the first side of the first support member 110 .
  • the first side surface of the first support member 110 may be a surface facing the wall 20 .
  • first cylinder 121 and the second cylinder 122 may be disposed below the opening 112 .
  • the first cylinder 121 may vertically move the first shaft 123 in a vertical direction.
  • the first shaft 123 may move up and down in the vertical direction in the first cylinder 121 .
  • One side of the first shaft 123 may be located inside the first cylinder 121
  • the other side of the first shaft 123 may be located outside the first cylinder 121 . Accordingly, as the other side of the first shaft 123 is raised along the vertical direction by the first cylinder 121 , a portion of one side of the first shaft 123 moves from the inside to the outside of the first cylinder 121 . can be raised to
  • the second cylinder 122 may vertically move the second shaft 124 in a vertical direction.
  • the second shaft 124 may move up and down in the vertical direction in the second cylinder 122 .
  • One side of the second shaft 124 may be located inside the second cylinder 122
  • the other side of the second shaft 124 may be located outside the second cylinder 122 . Accordingly, as the other side of the second shaft 124 is raised along the vertical direction by the second cylinder 122 , a portion of one side of the second shaft 124 is moved from the inside to the outside of the second cylinder 122 . can be raised to
  • Each of the first cylinder 121 and the second cylinder 122 may drive the first shaft 123 and the second shaft 124 using air.
  • the first cylinder 121 may have the same shape and/or the same size as the second cylinder 122 , but is not limited thereto.
  • the first shaft 123 may have the same shape and/or the same length as the second shaft 124 , but is not limited thereto. Accordingly, when the first shaft 123 and the second shaft 124 are raised in the vertical direction, the maximum rising point of the end of the first shaft 123 and the maximum rising point of the end of the second shaft 124 are can be the same.
  • the first cylinder 121 and the second cylinder 122 are driven at the same time, and accordingly, the first shaft 123 and the second shaft 124 may also move up and down at the same time.
  • the second shaft 124 may be spaced apart from the first shaft 123 , and each of the first shaft 123 and the second shaft 124 may be spaced apart from the second side surface of the first support member 110 . Accordingly, even if the first shaft 123 and the second shaft 124 move up and down, they do not come into contact with the second side surface of the first support member 110 , thereby preventing defects due to the contact.
  • the door assembly 130 may be fastened to the first shaft 123 and the second shaft 124 . Accordingly, when the first shaft 123 and the second shaft 124 are vertically moved by the first cylinder 121 and the second cylinder 122, respectively, the door assembly 130 also includes the first shaft 123 and The second shaft 124 may move up and down. For example, when the first shaft 123 and the second shaft 124 are raised, the door assembly 130 may also be raised by the first shaft 123 and the second shaft 124 . For example, when the first shaft 123 and the second shaft 124 are lowered, the door assembly 130 may also be lowered by the first shaft 123 and the second shaft 124 .
  • the door assembly 130 may include a second support member 140 , a second driving unit 150 , and a sealing plate 160 .
  • the second support member 140 may support the second driving unit 150 and the sealing plate 160 .
  • the second support member 140 may have a plate shape.
  • the second support member 140 may be formed of a material having excellent strength.
  • the second support member 140 may be formed of stainless steel, aluminum, or an aluminum alloy.
  • the second support member 140 may be referred to as a support plate, a support plate, a support frame, or the like.
  • the second support member 140 may be fastened to the upper side of the first shaft 123 using the first bracket 141 and fastened to the upper side of the second shaft 124 using the second bracket 142 . have.
  • first bracket 141 may be fastened to one side of the second support member 140 , and the other side of the first bracket 141 may be fastened to the upper side of the first shaft 123 .
  • first bracket 141 may be fastened to one side of the second support member 140
  • second bracket 142 may be fastened to the other side of the second support member 140
  • the other side of the second bracket 142 may be fastened to the upper side of the second shaft 124 .
  • the second support member 140 is fastened to the first shaft 123 and the second shaft 124 through the first bracket 141 and the second bracket 142, and the first shaft 123 and It may be linked to the vertical movement of the second shaft 124 . That is, when the first shaft 123 and the second shaft 124 are raised, the second support member 140 may also be raised. For example, when the first shaft 123 and the second shaft 124 are lowered, the second support member 140 may also be lowered.
  • the second driving unit 150 may be installed on the second supporting member 140 .
  • the second driving unit 150 may move the sealing plate 160 back and forth in a horizontal direction.
  • the sealing plate 160 may be coupled to the second driving unit 150 , but may not be coupled to the second supporting member 140 . Accordingly, the sealing plate 160 may be moved back and forth only by the second driving unit 150 .
  • the second driving unit 150 may include a plurality of cylinders 151 and a plurality of shafts 155 .
  • the plurality of cylinders 151 may be arranged in a line along the longitudinal direction of the second support member 140 .
  • the plurality of cylinders 151 may be disposed to be spaced apart from each other.
  • the plurality of cylinders 151 may be coupled to the second support member 140 .
  • a portion of the plurality of cylinders 151 may be disposed outside the second support member, and other portions of the plurality of cylinders 151 may pass through the second support member.
  • a portion of the plurality of cylinders 151 may be fastened to the second support member 140 using, for example, brackets 163 to 165 .
  • a plurality of holes may be formed in the second support member 140 so that other portions of the plurality of cylinders 151 pass therethrough.
  • other portions of the plurality of cylinders 151 pass through the plurality of holes of the second support member 140 , and portions of the plurality of cylinders 151 use brackets 163 to 165 to the second support member ( 140) may be engaged.
  • the bracket 163 may be fastened to the second support member 140 in a horizontal direction from an upper side of the second support member 140 , that is, in a longitudinal direction of the second support member 140 .
  • the bracket 164 may be fastened to the second support member 140 in a horizontal direction from the lower side of the second support member 140 , that is, in a longitudinal direction of the second support member 140 .
  • the bracket 163 and the bracket 164 may be disposed to be spaced apart from each other.
  • the bracket 165 may be fastened to the second support member 140 between the bracket 163 and the bracket 164 .
  • the bracket 165 may be disposed in a vertical direction between the bracket 163 and the bracket 164 . Accordingly, a portion of the plurality of cylinders 151 is surrounded by the brackets 163 to 165 and may be fastened to the brackets 163 to 165 .
  • Each of the plurality of shafts 155 may be moved back and forth in a horizontal direction inside other portions of the plurality of cylinders 151 passing through the second support member 140 by the plurality of cylinders 151 .
  • the plurality of shafts 155 may be coupled to the sealing plate 160 . Accordingly, the sealing plate 160 may move back and forth together with the plurality of shafts 155 .
  • the sealing plate 160 is also moved forward together with the first support member 110 .
  • the opening 112 of the support member 110 may be closed.
  • the sealing plate 160 is also moved rearwardly to the first support member 110 . 1
  • the opening 112 of the support member 110 may be opened.
  • the first driving unit 120 may be operated first, and then the second driving unit 150 may be operated.
  • each of the first and second cylinders 121 and 122 lifts the first and second shafts 123 and 124 in a vertical direction to include the sealing plate 160.
  • the door assembly 130 may also be raised together.
  • each of the plurality of cylinders 151 is moved forward along the horizontal direction through the sealing plate 160 through the shaft 155 , and by the sealing plate 160 , the first The opening 112 of the support member 110 may be closed, so that the opening 22 of the wall 20 may be closed.
  • a more detailed operation will be described later.
  • the sealing plate 160 may be a member for opening and closing the opening 112 of the first support member 110 .
  • the sealing plate 160 may have a plate shape.
  • the sealing plate 160 may be formed of a material having excellent strength.
  • the sealing plate 160 may be formed of stainless steel, aluminum, or an aluminum alloy.
  • the sealing plate 160 may have a size larger than the size of the opening 112 of the first supporting member 110 to safely close the opening 112 of the first supporting member 110 .
  • the sealing plate 160 may have a size smaller than the size of the second support member 140 , but is not limited thereto.
  • the sealing member 170 may be installed on one side of the sealing plate 160 .
  • One side of the sealing plate 160 may be a surface facing the first support member 110 .
  • the sealing member 170 may be installed on one side of the sealing plate 160 corresponding to the adjacent region of the first supporting member 110 adjacent to the periphery of the opening 112 of the first supporting member 110 . have. That is, when the sealing plate 160 closes the opening 112 of the first supporting member 110 , the sealing member 170 installed on one side of the sealing plate 160 is the opening of the first supporting member 110 . A perimeter of 112 may be tangent to an adjacent adjacent region.
  • a groove is formed in one side of the sealing plate 160 corresponding to an adjacent area adjacent to the periphery of the opening 112 of the first supporting member 110, and the sealing member 170 is inserted into the groove. and may be fixed.
  • the sealing plate 160 may have a closed loop shape disposed along the outer edge of the sealing plate 160 .
  • the sealing plate 160 may be supported by the second support member 140 using the plurality of support pins 161 and the plurality of guide parts 162 .
  • the guide part 162 may be installed on the rear surface of the second support member 140 , that is, on a surface opposite to the front surface of the second support member 140 facing the sealing plate 160 .
  • the guide part 162 may be fastened to the rear surface of the second support member 140 .
  • the guide part 162 may have an empty hole therein.
  • the second support member 140 may have a hole corresponding to the hole of the guide part 162 .
  • one side of the support pin 161 is fastened to the rear surface of the sealing plate 160 , that is, the surface opposite to the front surface of the sealing plate 160 facing the first support member 110 , and The other side may be inserted into the hole of the second support member 140 and the hole of the guide part 162 .
  • the sealing plate 160 is freely movable back and forth in the horizontal direction by the hole of the second support member 140 and the support pin 161 inserted into the hole of the guide part 162 .
  • the sealing plate 160 may be supported by the second support member 140 by the support pin 161 inserted into the hole of the second support member 140 and the hole of the guide part 162 . Accordingly, when the sealing plate 160 is moved forward toward the opening 112 of the first support member 110 by the plurality of cylinders 151 , the support pin 161 is also horizontal in the hole of the guide part 162 . It can be moved forward along the direction.
  • the sealing plate 160 when the sealing plate 160 is moved rearwardly away from the opening 112 of the first support member 110 by the plurality of cylinders 151 , the support pins 161 in the hole of the guide part 162 . It can also be moved rearward along the horizontal direction.
  • the gate valve module 100 of the embodiment may include guide members 181 and 182 .
  • the guide member may include a first guide member 181 and a second guide member 182 .
  • the first guide member 181 is installed in the first area of the second side of the first supporting member 110
  • the second guide member 182 is the second side of the second side of the first supporting member 110 . It can be installed in 2 areas. For example, since the second area is spaced apart from the first area, the second guide member 182 may also be spaced apart from the first guide member 181 .
  • first guide member 181 may be disposed adjacent to the first shaft 123 and may be disposed parallel to the first shaft 123 .
  • second guide member 182 may be disposed adjacent to the second shaft 124 and disposed parallel to the second shaft 124 .
  • the first guide member 181 and the second guide member 182 may be disposed in parallel with the opening 112 interposed therebetween.
  • the first guide member 181 may be disposed on one side of the opening 112
  • the second guide member 182 may be disposed on the other side of the opening 112 .
  • the door assembly 130 when the door assembly 130 rises according to the first guide member 181 and the second guide member 182 , the door assembly 130 may be disposed to correspond to the opening 112 .
  • the door assembly 130 and the opening 112 may overlap each other.
  • the sealing plate 160 and the opening 112 may overlap each other.
  • the door assembly 130 when the door assembly 130 descends according to the first guide member 181 and the second guide member 182 , the door assembly 130 may be positioned lower than the opening 112 . That is, the door assembly 130 may not correspond to the opening 112 and the door assembly 130 and the opening 112 may not overlap each other.
  • each of the first guide member 181 and the second guide member 182 may be a guide rail having a long axis in a vertical direction.
  • the second support member 140 may move up and down along the first guide member 181 and the second guide member 182 by using the first moving part 183 and the second moving part 184, respectively.
  • first moving part 183 may be fastened to one side of the second support member 140 and move up and down along the first guide member 181 .
  • second moving part 184 may be coupled to the other side of the second support member 140 to move up and down along the second guide member 182 .
  • first moving part 183 may be fixed to one side of the second supporting member 140 , and the other side of the first moving part 183 may be fastened to the first guide member 181 in a sliding manner.
  • the second supporting member ( 140) may be moved up and down in the vertical direction.
  • one side of the second moving part 184 may be fixed to the other side of the second support member 140 , and the other side of the second moving part 184 may be fastened to the second guide member 182 in a sliding manner.
  • the second moving unit 184 fixed to the second supporting member 140 by the first driving unit slides up and down along the second guide member 182
  • the second supporting member 140 moves It may move up and down in a vertical direction.
  • the gate valve module 100 of the embodiment may include at least one or more stoppers 190 and 191 . Although two stoppers 190 and 191 are shown in the drawing, one stopper or three or more stoppers may be provided.
  • the stoppers 190 and 191 may be members to stop the sealing plate 160 from rising at a predetermined height.
  • the stoppers 190 and 191 may be positioned higher than the opening 112 of the first support member 110 .
  • the first stopper 190 may be installed in a first area of the first support member 110 higher than the opening 112 .
  • the second stopper 191 may be installed in a second area of the first support member 110 higher than the opening 112 . Since the first area of the first support member 110 and the second area of the first support member 110 are spaced apart from each other, the first stopper 190 and the second stopper 191 may be spaced apart from each other.
  • lower sides of the stoppers 190 and 191 may be positioned higher than at least the opening 112 .
  • the first shaft 123 and the second shaft 124 are raised in the vertical direction by the first cylinder 121 and the second cylinder 122, respectively, the first shaft 123 and the second shaft 124
  • the sealing plate 160 of the door assembly 130 coupled to the can also be raised.
  • the sealing plate 160 rises to a predetermined height, the upper surface of the sealing plate 160 is in contact with the lower surfaces of the stoppers 190 and 191 so that the sealing plate 160 is no longer raised by the stoppers 190 and 191. do.
  • the predetermined height at which the sealing plate 160 is raised may be an optimal height for the sealing plate 160 to close the opening 112 of the first supporting member 110 .
  • the upper surface of the sealing plate 160 may be in surface contact with the lower surface of the stoppers 190 and 191, but is not limited thereto.
  • the lower side of the stoppers 190 and 191 may have a flat circular plate, but is not limited thereto.
  • the lower side of the stoppers 190 and 191 may be formed of a material having elasticity, for example, a rubber material or a plastic material, but is not limited thereto.
  • the stoppers 190 and 191 are not provided, it is difficult to stop the sealing plate 160 at an optimal height for closing the opening 112 of the first support member 110 .
  • the sealing plate 160 when the sealing plate 160 is raised higher than the optimal height, the sealing plate 160 does not close all of the openings 112 of the first support member 110 and a part of the opening 112 is outside. Exposure to air may cause sealing failure.
  • the sealing plate 160 since the sealing plate 160 is stopped at a position corresponding to the opening 112 of the first support member 110 by the stoppers 190 and 191, thereafter, the sealing plate 160 is moved forward is moved to safely close the opening 112 of the first support member 110 to prevent sealing failure.
  • 9 to 12 show a state in which the gate valve module according to the embodiment operates in a closed state.
  • the door assembly 130 may be lowered in the vertical direction by the operation of the first driving unit 120 so that the door assembly 130 may be positioned below the opening 112 .
  • the door assembly 130 may be positioned below the opening 112 .
  • the opening 112 may be closed using the door assembly 130 .
  • the first shaft 123 and the second shaft 124 may be raised in the vertical direction by the operation of the first driving unit 120 . That is, the first shaft 123 may be raised in the vertical direction by the first cylinder 121 , and the second shaft 124 may be raised in the vertical direction by the second cylinder 122 .
  • the door assembly 130 may include a second support member 140 , a sealing plate 160 , and a second driving unit 150 .
  • one side of the second support member 140 and the first shaft 123 may be fastened by the first bracket 141 .
  • the other side of the second support member 140 and the second shaft 124 may be fastened by the second bracket 142 .
  • the door assembly 130 fastened to the first shaft 123 and the second shaft 124 may also be raised.
  • the second support member 140 may be raised until the sealing plate 160 reaches a position corresponding to the opening 112 of the first support member 110 . That is, when the sealing plate 160 reaches a position corresponding to the opening 112 of the first supporting member 110 , the upper surface of the sealing plate 160 may contact the lower surfaces of the stoppers 190 and 191 . For example, since the sealing plate 160 is no longer raised, the second support member 140 is also no longer raised, and accordingly, the operation of the first driving unit 120 may be stopped. Accordingly, the sealing plate 160 may be stopped at the opening 112 of the first support member 110 .
  • the sealing plate 160 may be positioned rearwardly spaced apart from the opening 112 of the first support member 110 .
  • the sealing plate 160 may be moved forward toward the opening 112 of the first supporting member 110 by the operation of the second driving unit 150 , that is, the second supporting member 110 .
  • the plurality of shafts 155 may be moved forward by the plurality of cylinders 151 coupled to the member 140 , and the sealing plate 160 coupled to the plurality of shafts 155 may be moved forward.
  • the sealing plate 160 may move away from the second support member 140 and approach the first support member 110 .
  • the plurality of support pins 161 coupled to the sealing plate 160 may be guided by the plurality of guide parts 162 to move forward. That is, the sealing plate 160 may be moved forward while being supported by the second support member 140 by the plurality of support pins 161 and the plurality of guide parts 162 .
  • the sealing plate 160 is moved forward to come into contact with the opening 112 of the first supporting member 110 , and the sealing plate 160 is continuously pressed, so that the sealing plate 160 closes the first supporting member 110 .
  • the opening 112 may be closed so that the hermetic chamber ( 10 in FIG. 1 ) may be blocked from the outside.
  • Closing of the opening 112 of the first supporting member 110 is again the first supporting member 110 in order for the workpiece to be moved between the sealed chamber (10 in FIG. 1) and the outside or between the sealed chamber 10 and another sealed chamber. This may continue until opening 112 is opened.
  • the opening operation of the opening 112 of the first supporting member 110 may be reversed from the closing operation of the opening 112 of the first supporting member 110 in FIGS. 9 to 12 .
  • the sealing plate 160 in order to open the opening 112 of the first supporting member 110 , first, the sealing plate 160 is rearwardly moved along the horizontal direction by the operation of the second driving unit 150 . can be moved to That is, the sealing plate 160 fastened to the plurality of shafts 155 by the plurality of cylinders 151 may be moved rearward. In this case, the sealing plate 160 may move away from the first support member 110 and approach the second support member 140 . The sealing plate 160 may be stopped adjacent to the second support member 140 . Although the sealing plate 160 may be in contact with the second support member 140 , the present invention is not limited thereto.
  • the door assembly 130 including the sealing plate 160 may be lowered in a vertical direction by the operation of the first driving unit 120 . That is, the second support member 140 coupled to the first and second shafts 123 and 124 by the first and second cylinders 121 and 122 may be lowered in the vertical direction. In this case, the sealing plate 160 supported by the second support member 140 by the support pin 161 and the guide part 162 may also be lowered.
  • the first and second shafts 123 and 124 may be lowered and inserted into the first and second cylinders 121 and 122 .
  • the first and second shafts 123 and 124 may be stopped at positions where upper sides of the first and second shafts 123 and 124 are adjacent to upper sides of the first and second cylinders 121 and 122 . Accordingly, the door assembly 130 is positioned lower than the opening 112 of the first supporting member 110 , so that even if the workpiece is transported through the opening 112 , the workpiece is not obstructed by the door assembly 130 . can
  • the embodiment may be applied to fields that must be kept in a specific gas atmosphere by being blocked from the outside.
  • the embodiment may be applied to a semiconductor or display field, but is not limited thereto.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Sliding Valves (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

Ce module de robinet-vanne comprend : un premier élément de support comprenant une ouverture ; une plaque d'étanchéité qui ouvre ou ferme l'ouverture ; une première unité d'entraînement qui est disposée sur un côté du premier élément de support et déplace la plaque d'étanchéité verticalement ; et une seconde unité d'entraînement qui déplace la plaque d'étanchéité vers l'avant ou vers l'arrière le long d'une direction horizontale.
PCT/KR2020/007537 2020-06-10 2020-06-10 Module de robinet-vanne et chambre d'étanchéité WO2021251521A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PCT/KR2020/007537 WO2021251521A1 (fr) 2020-06-10 2020-06-10 Module de robinet-vanne et chambre d'étanchéité
KR1020227025134A KR20220120613A (ko) 2020-06-10 2020-06-10 게이트 밸브 모듈 및 밀폐 챔버

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/KR2020/007537 WO2021251521A1 (fr) 2020-06-10 2020-06-10 Module de robinet-vanne et chambre d'étanchéité

Publications (1)

Publication Number Publication Date
WO2021251521A1 true WO2021251521A1 (fr) 2021-12-16

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6390449B1 (en) * 1999-06-14 2002-05-21 Smc Kabushiki Kaisha Gate valve
KR100907815B1 (ko) * 2006-09-27 2009-07-16 주식회사 에이티에스엔지니어링 게이트 밸브
KR20100058210A (ko) * 2008-11-24 2010-06-03 주식회사 아토 기판처리장치
KR101814045B1 (ko) * 2014-04-30 2018-01-02 에스엠시 가부시키가이샤 게이트 밸브
KR101820271B1 (ko) * 2017-08-10 2018-01-18 박재균 실링 재료를 이용한 oled용 진공밸브

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6390449B1 (en) * 1999-06-14 2002-05-21 Smc Kabushiki Kaisha Gate valve
KR100907815B1 (ko) * 2006-09-27 2009-07-16 주식회사 에이티에스엔지니어링 게이트 밸브
KR20100058210A (ko) * 2008-11-24 2010-06-03 주식회사 아토 기판처리장치
KR101814045B1 (ko) * 2014-04-30 2018-01-02 에스엠시 가부시키가이샤 게이트 밸브
KR101820271B1 (ko) * 2017-08-10 2018-01-18 박재균 실링 재료를 이용한 oled용 진공밸브

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