WO2022092822A1 - Dispositif de chargement de substrat pour multiples fours de diffusion - Google Patents

Dispositif de chargement de substrat pour multiples fours de diffusion Download PDF

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Publication number
WO2022092822A1
WO2022092822A1 PCT/KR2021/015253 KR2021015253W WO2022092822A1 WO 2022092822 A1 WO2022092822 A1 WO 2022092822A1 KR 2021015253 W KR2021015253 W KR 2021015253W WO 2022092822 A1 WO2022092822 A1 WO 2022092822A1
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WO
WIPO (PCT)
Prior art keywords
transfer unit
moving
moving assembly
paddle
driving means
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PCT/KR2021/015253
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English (en)
Korean (ko)
Inventor
이재용
박미성
윤철
Original Assignee
주식회사 한화
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Application filed by 주식회사 한화 filed Critical 주식회사 한화
Publication of WO2022092822A1 publication Critical patent/WO2022092822A1/fr

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Definitions

  • the present invention relates to a loading apparatus for a plurality of diffusion furnaces that allows a plurality of boat apparatuses to be loaded and processed.
  • Solar cells are produced through texturing process, diffusion process, oxide film removal process, barrier coating process, electrode printing process, P-N junction separation process, etc.
  • a diffusion process during the manufacturing process a plurality of substrates are put into a high-temperature diffusion furnace and a source gas is introduced to induce a P-N junction to the substrate.
  • a substrate loading device may be required to rapidly process more substrates for solar cells.
  • the problem to be solved by the present invention is a substrate loading apparatus used when a plurality of substrates are put into a high-temperature diffusion furnace during the diffusion process.
  • An object of the present invention is to provide a plurality of diffusion substrate loading apparatus capable of processing two extended diffusion paths.
  • the solution of the present invention includes: a first transfer unit capable of loading/unloading a paddle loaded with a boat on which a plurality of substrates are mounted into the diffusion path; a second transfer unit capable of moving the paddle up and down when the boat is loaded/unloaded into the diffusion path; a third transfer unit capable of moving the first transfer unit and the second transfer unit in a horizontal direction; including,
  • a plurality of diffusion paths may be provided, and a substrate loading apparatus may be provided for loading/unloading the boats each having a substrate seated on the plurality of diffusion paths.
  • the present invention relates to a first transfer unit capable of loading and unloading a paddle loaded with a boat on which a substrate is placed into the diffusion furnace, and a second transfer unit capable of moving the paddle up and down when the boat is loaded and unloaded into the diffusion furnace.
  • a substrate loading apparatus including a third transfer unit capable of moving a first transfer unit and a second transfer unit in a horizontal direction, wherein one substrate loading apparatus is provided to two diffusion path apparatuses extending in the horizontal direction, respectively. The substrate can be loaded.
  • the diffusion process time can be reduced compared to the case of loading a substrate into one diffusion path with one substrate loading apparatus, and the space required for the diffusion process can be reduced, thereby increasing the production volume per process space.
  • the present invention stacks a pair of diffusion furnaces in a plurality of columns in the vertical direction, and provides a substrate loading device for each of the plurality of columns to perform loading and unloading operations for a boat on which a substrate is mounted. of substrates can be processed.
  • FIG. 1 is a perspective view of a diffusion furnace and a loading device of the present invention.
  • FIG. 2 is a perspective view of a loading device of the present invention.
  • FIG. 3 is a plan view of the loading device of the present invention.
  • FIG. 4 is a front view of the loading device of the present invention.
  • FIG. 5 is an enlarged perspective view of a part of the loading device of the present invention.
  • Figure 6 is a plan view schematically showing the power transmission means of the first transfer unit of the loading device of the present invention.
  • FIG. 7 is a front view schematically showing the power transmission means of the second transfer unit of the loading device of the present invention.
  • FIG. 8 is a side view schematically showing the power transmission means of the third transfer unit of the loading device of the present invention.
  • FIG. 9 is a perspective view in which the diffusion furnace and the loading device of FIG. 1 are stacked in five rows.
  • FIG. 10 is a side view of FIG. 9 ;
  • FIG. 1 is a schematic perspective view of a diffusion furnace unit and a loading apparatus of the present invention
  • FIG. 2 is a perspective view of a loading apparatus of the present invention
  • FIG. 3 is a plan view of the loading apparatus of the present invention
  • FIG. 4 is a loading apparatus of the present invention is a front view
  • Figure 5 is a partially enlarged perspective view of the loading device of the present invention.
  • the diffusion path device 10 may include a plurality of diffusion paths that can be horizontally expanded and arranged, for example, a first diffusion path 12 and a second diffusion path ( 14) can be achieved.
  • the substrate loading apparatus 1 of the present invention is a first transfer unit 100 capable of loading/unloading the paddle 130 on which the boat 120 on which the substrate S is seated is loaded into the diffusion furnace apparatus 10 .
  • the second transfer unit 200, the first transfer unit 100 and the second transfer unit 200 that can move the paddle 130 up and down
  • a third transfer unit 300 capable of moving in a horizontal direction (y-direction) may be included.
  • the first transfer unit 100 includes a first moving assembly 110 capable of moving the boat 120 on which the substrate S is seated into the diffusion path, and a first moving assembly 110 capable of moving the first moving assembly 110 . It may be composed of one driving means 160 .
  • the first moving assembly 110 includes a boat 120 on which the substrate S is seated, a paddle 130 on which the boat 120 can be loaded, a base member 140 provided on the bottom of the paddle 130 to support it, It may include a connection frame 150 that is connected to the base member 140 and can be connected to the fixed frame 212 .
  • grooves in which a plurality of thin substrates S can be inserted may be provided at predetermined intervals.
  • the substrate S is the boat 120 . It may be provided in a line by being inclined at a predetermined angle from the vertical.
  • the plurality of substrates S may be transferred to a diffusion workshop where a diffusion process is performed in a state in which they are seated on the boat 120 . It can be mounted on the paddle 130 of the substrate loading apparatus 1 by an unmanned automated facility in the spreading workshop.
  • the paddle 130 includes a paddle seating part 132 on which the boat 120 on which the substrate S is mounted can be loaded, and a paddle fixing part 134 capable of fixing the paddle 130 to the first moving assembly 110 . ) can be provided.
  • a height from the bottom of the paddle seating part 132 may be lower than a height from the bottom of the paddle fixing part 134 .
  • the paddle fixing part 134 and the upper surface of the upper surface of the paddle seating part 132 may be inclinedly connected.
  • the upper surfaces of the paddle seating part 132 and the paddle fixing part 134 are provided at the same height as described above, the upper surfaces of the paddle seating part 132 and the paddle fixing part 134 are inclined with a difference in height.
  • the added height of the paddle 130 and the boat 120 on which the substrate S is seated is lowered, and the boat 120 enters the diffusion path through the substrate loading device 1 of the present invention and loads/unloads. When loaded, a space necessary for the paddle 130 to enter the diffusion path may be further secured.
  • the paddle seating part 132 may be provided with a groove having a unique shape into which the boat 120 can be loaded.
  • a groove having the same shape that can be fitted into the groove of the paddle seating part 132 may be provided on the bottom of the boat 120 .
  • the paddle fixing part 134 may be firmly fixed up and down by the two clamps 142 , and the clamp 142 may face the upper surface of the base member 140 by the connecting member 144 .
  • the shape of the paddle 130 may be elongated in the diffusion path entry direction (x-direction).
  • the boat 120 on which the plurality of substrates S are seated is provided in the paddle seating part 132 , and the paddle seating part 132 may be provided to be connected to the paddle fixing part 134 .
  • the end of the paddle fixing unit 134 corresponding to the end of the paddle 130 and the fixing frame 212 are connected to each other, so that the base member 140 . After fixing the paddle 130 to the connection frame 150, it may be more stable.
  • one surface of the connecting frame 150 may be provided to be connected to one end of the base member 140 coupled to the paddle 130 .
  • connection frame 150 may be provided to face the fixing frame 212 in order by the coupling member 152 , the guide rod 154 , and the connection member 156 .
  • connection frame 150 may face one surface of the base member 140 , and the other end of the connection frame 150 may face one end of the coupling member 152 .
  • the coupling member 152 may be provided to face the center and both ends of the other surface of the connection frame 150 .
  • the three coupling members 152 provided to face the center and both ends of the other surface of the connection frame 150 may be arranged in two rows symmetrically in the vertical direction (z direction).
  • the other end of the coupling member 152 may face the guide rod 154 .
  • the other end of the coupling member 152 facing the guide rod 154 may have a grip shape surrounding the guide rod 154 .
  • the first moving assembly 110 when the first moving assembly 110 is moved by the first driving means 160 , the first moving assembly 110 is connected to the guide rod 154 .
  • ) may be provided in a structure that can be slid along.
  • the three coupling members 152 in each row may be provided to be fastened side by side to each guide rod 154 in a line.
  • the guide rods 154 may be provided with a predetermined length in the fixing frame 212 in two rows in the vertical direction (z direction).
  • the first moving assembly 110 may be driven by the first driving means 160 to enter the diffusion path along the guide rod 154 .
  • One end of the connecting member 156 may face the guide rod 154 , and the other end of the connecting member 156 may face the fixing frame 212 . Accordingly, when the first moving assembly 110 is operated by the first driving means 160 , the guide rod 154 may be provided to be connected to the fixed frame 212 by the connecting member 156 .
  • the second transfer unit 200 may include a second moving assembly 210 and a second driving means 220 ,
  • the second transfer unit 200 elevates the first moving assembly 110 up and down to allow the paddle 130 to load and unload the boat 120 on which the substrate S is seated in the diffusion furnace. .
  • the vertical movement of the first moving assembly 110 by the second transfer unit 200 causes the paddle seat 132 to enter the boat 120 on which the substrate S is seated into the diffusion path, and the paddle 130 . It may be sufficient to be able to move away from the boat 120 and escape inside the diffusion furnace.
  • the second moving assembly 210 may include a fixed frame 212 connected to the first moving assembly 110 , and a connecting member 214 connecting the second driving means 220 and the fixed frame 212 . .
  • the second driving means 220 includes a second motor 230 , a gear box 240 for changing a rotation direction of the second motor 230 , and a power transmission shaft 250 capable of transmitting power of the second motor 230 . ), the power transmission gear 252 provided at both ends of the power transmission shaft 250, the elevating member 262, the elevating member 262 having a toothed portion 262a to rotate in engagement with the teeth of the power transmission gear 252. It may include a connection block 260 that is coupled and interlocked.
  • connection block 260 of the second driving means 220 may be connected to the fixing frame 212 by the connection member 214 .
  • One end of the lifting member 262 having the teeth 262a formed thereon may be provided to be connected to the third transfer unit 300 .
  • the fixed frame 212 connected to the second driving means 220 may be driven up and down. Since the fixed frame 212 and the first moving assembly 110 are fixedly connected, as a result, the paddle 130 may be driven up and down by the second driving means 220 .
  • the third transfer unit 300 may horizontally move the first transfer unit 100 and the second transfer unit 200 in the diffusion path expansion direction (y-direction).
  • the third transfer unit 300 drives the first transfer unit 100 , the third transfer assembly 310 connected to the second transfer unit 200 , and the third transfer assembly 310 in the horizontal direction (y-direction). It may include a third driving means 360 that can be activated.
  • the third driving means 360 includes a third motor 362 , a motor shaft 364 , a third belt 366 connected to the motor shaft 364 and connected to the driven pulley 368 , a driven pulley 368 ; It may include a support member 369 that faces the third belt 366 and connects to the moving unit 330 .
  • the third moving assembly 310 is connected to the first transfer unit 100 and the second transfer unit 200 so that the moving unit 330 capable of moving in the horizontal direction (y-direction) and the moving unit 330 face each other. It may include a guide rail 320 that can move in a horizontal direction in one state.
  • the moving unit 330 may include a support frame 350 facing one surface of the lifting member 262 of the second transfer unit 200 , and a moving plate 340 facing a lower surface of the support frame 350 . .
  • the moving plate 340 is coupled to the lower portion of the support frame 350, and a separate moving plate 340 shown on the guide rail 320 is shown for convenience of explanation, and two moving plates (340) may not be provided. If three or more diffusion paths are provided in the horizontal direction (y-direction) according to design or convenience, the process may be performed while repeatedly moving the substrate loading apparatus 1 in the horizontal direction (y-direction), A plurality of substrate loading apparatuses 1 of the present invention may be symmetrically provided on the guide rail 320 in order to shorten the process time.
  • connection piece 342 and a support member 344 that can support when the moving part 330 moves in the horizontal direction (y-direction) may be provided on both sides of the moving plate 340 constituting the moving unit 330 . .
  • a flexible alignment member 370 may be provided on one side of the support frame 350 .
  • each driving means 160, 220, 360 a plurality of wires connected to each driving means 160, 220, 360 may be disturbed or twisted while moving, so the inside of the alignment member 370 is By arranging the wires, it is possible to prevent disorder or twisting during the operation of each driving means 160 , 220 , 360 .
  • the guide rail 320 may provide a path in which the first transfer unit 100 and the second transfer unit 200 move in the horizontal direction (y-direction).
  • a guide ball 322 for allowing the support member 369 connecting the third driving means 360 and the moving part 330 to move along the guide rail 320 may be provided.
  • the guide ball 322 may be provided in the center of the upper surface of the guide rail 320 .
  • Power by the third driving means 360 may be transmitted to the moving unit 330 by the support member 369 . Accordingly, the moving part 330 may be moved in the horizontal direction (y-direction) along the guide rail 320 by the third driving means 360 .
  • the support member 344 may be provided on a portion of the upper surface of the guide rail 320 so that the moving part 330 can move along the guide rail 320 by the third driving means 360 .
  • One surface of the connecting piece 342 may face the support member 344 , and the other surface of the connecting piece 342 may face the moving plate 340 .
  • the support member 344 and the connecting piece 342 may be provided symmetrically with respect to the guide ball 322 to face the moving plate 340 .
  • the third transfer unit 300 is connected to both ends of the fixed frame 212 in the longitudinal direction (x direction), and the fixed frame 212 and the two third transfer units 300 are in a 'C' shape. It is provided so that the first transfer unit 100 and the second transfer unit 200 can move stably when moving in the horizontal direction (x-direction).
  • the first moving assembly 110 faces the fixed frame 212
  • the fixed frame 212 faces the lifting member 262 of the second transfer unit 200
  • the lifting member 262 is the third moving assembly Since it faces the support frame 350 of the 310 , as the moving part 330 moves by the third driving means 360 , the first moving assembly 110 , the fixed frame 212 , and the second transferring unit (200) can all move.
  • the boat 120 on which the substrate S is seated may be transported and reached to the diffusion workshop where the diffusion process is performed during the solar cell process.
  • the paddle seating part 132 of the paddle 130 of the first transfer unit 100 faces one of the two third transfer units 300
  • the paddle fixing part 134 may be provided to face the other of the two third transfer units 300 to be aligned with the fixing frame 212 in parallel.
  • a fixed frame 212 of the second moving assembly coupled to the connection frame 150 of the first moving assembly 110 may be provided.
  • the unit 200 may be provided in an upward direction.
  • the first diffusion path 12 longitudinal direction (x direction) and the paddle 130 of the loading device are aligned in a line so that the paddle 130 carrying the boat 120 on which the substrate S is seated can enter the diffusion path. may be defined as a first position.
  • the second diffusion path 14 longitudinal direction (x direction) and the paddle 130 of the loading device are aligned in a line so that the paddle 130 carrying the boat 120 on which the substrate S is mounted can enter the diffusion path. may be defined as a second position.
  • the paddle 130 of the loading device is provided at the first position by the third transfer unit 300 that can move the loading device in the horizontal direction (y-direction). can be
  • the boat 120 on which the first substrate S is seated may be provided on the upper surface of the paddle seat 132 of the paddle 130 of the loading device.
  • a door (not shown) of the first diffusion passage 12 may be opened, and when the first moving unit 100 is driven by the first driving means 160 , the paddle 130 moves to the first diffusion passage 12 . ) can move in the inward direction (x direction).
  • the empty paddle 130 may leave the diffusion path outside the first diffusion path.
  • the door of (12) can be closed.
  • the first transfer unit 100 and the second transfer unit 200 may be moved in the horizontal direction (y-direction) by the third transfer unit 300 to be provided at the second position.
  • a loading device may be provided in the above preparation step.
  • the boat 120 on which the second substrate S is seated may be provided on the upper surface of the paddle seat 132 of the paddle 130 of the loading device.
  • a door (not shown) of the second diffusion passage 14 may be opened, and the first moving unit is driven by the first driving means 160 to move the paddle 130 in the inner direction ( x direction).
  • the empty paddle 130 may leave the diffusion path, and the first diffusion path ( 12) can be closed.
  • the first transfer unit 100 and the second transfer unit 200 may be moved in the horizontal direction (y-direction) by the third transfer unit 300 to be provided at the first position.
  • the substrate loading apparatus 1 may be prepared in the above preparation step.
  • the above process may be repeated by an automated process.
  • the first driving means 160 includes a first motor 161 , a motor shaft 162 , and a first belt 163 connecting the motor shaft 162 and the driven pulley 164 .
  • a driven pulley 164, a second belt 165 that is connected between the driven pulley 164 to move the first moving assembly 110, and the second belt 165 and the first moving assembly 110 are connected It may include a fixing piece 166 that can be made.
  • the rotational power of the first motor 161 may be transmitted to a pulley (not shown) provided at one end of the first motor 161 to be synchronized with the first motor 161 .
  • the first belt 163 rotatably wound around the pulley may be rotatably wound around the driven pulley 164 .
  • the driven pulley 164 may consist of two pulleys.
  • the two driven pulleys 164 may be provided so that the other driven pulley is vertically connected to the end of one driven pulley.
  • the driven pulley rotatably connected by the first belt 163 may be synchronously connected to the other synchronized driven pulley to transmit power, and the second belt 165 rotatably connected to the other driven pulley is the substrate loading device (1). ) may be rotatably connected to the driven pulley 164 provided at a predetermined position of the fixed frame 212 in a place symmetrical to the longitudinal direction (x direction).
  • the position of the two driven pulleys 164 connected by the second belt 165 is a position where the paddle 130 carrying the boat 120 enters the diffusion furnace and loads the boat 120 into the diffusion furnace and the boat When unloading 120 and only the empty paddle 130 departs from the diffusion path, it may be any one of positions retracted parallel to the fixed frame 212 for horizontal movement.
  • a fixing piece 166 capable of being fixed to the first moving assembly 110 may be provided on a portion of the second belt 165 .
  • the first belt 163 and the second belt 165 are driven by the driving of the first motor 161 , and the first moving assembly 110 aligned at the first or second position is a guide rod. It can be driven back and forth along the longitudinal direction (x direction) of the substrate loading apparatus 1 along the second belt 165 in a sliding manner along the 154 .
  • FIG. 7 is a front view schematically showing the power transmission means of the second transfer unit 200 of the loading device of the present invention.
  • the rotational force of the second motor 230 may be changed in a rotational direction by the gearbox 240 .
  • the gear box 240 may be made of a bevel gear or the like, and since the power transmission shaft 250 is connected to both sides of the gear box 240 , the rotational force of the second motor 230 is transmitted through the gear box 240 on both sides. of the power transmission shaft 250, and the power transmission shaft 250 thereto may be rotated.
  • a connection block 260 is provided at an end of each power transmission shaft 250 , and a power transmission gear 252 and a power transmission gear 252 connected to one end of the power transmission shaft 250 are provided inside the connection block 260 . ) is provided with an elevating member 262 that engages, and at this time, since the power transmission gear 252 is coupled to the end of the power transmission shaft 250 , the power transmission gear 252 according to the rotation of the power transmission shaft 250 . ) can also be rotated at the same time.
  • the elevating member 262 Since the power transmission gear 252 is engaged with the elevating member 262 , the rotational force of the power transmitting gear 252 is transmitted to the elevating member 262 , and the elevating member 262 may be lifted up and down in the vertical direction.
  • connection block 260 coupled to the elevating member 262 may also be lifted at the same time.
  • the connecting block 260 Since the connecting block 260 is connected to the fixed frame 212 , the fixed frame 212 connected to the first moving assembly 110 may move up and down according to the lifting operation of the connecting block 260 .
  • the first moving assembly 110 and the fixed frame 212 connected thereto may move up and down.
  • connection block 260 may be positioned at both ends of the fixed frame 212 in the longitudinal direction (x-direction) of the fixed frame 212 , symmetrically with respect to the second motor 230 .
  • the second motor 230 and the gear box 240 may be located in the center of the fixed frame 212 , and the power transmission shaft 250 from the gear box 240 is symmetrical on both sides with respect to the second motor 230 . It may be connected to the connection block 260 to be so.
  • connection blocks 260 are symmetrically positioned at both ends of the fixed frame 212 , the fixed frame 212 can be stably elevated during the lifting operation of the fixed frame 212 according to the driving of the second motor 230 .
  • the first moving assembly 110 may also stably move up and down according to the lifting operation of the fixed frame 212 .
  • the paddle 130 provided in the first moving assembly 110 is driven up and down so that the boat 120 on which the substrate S is seated is moved to the first diffusion path 12 .
  • it may be loaded/unloaded inside the second diffusion path 14 .
  • FIG. 8 is a side view schematically showing the power transmission means of the third transfer unit 300 of the loading device of the present invention.
  • the third motor 362 and the driven pulley 368 may be positioned at both inner ends of the guide rail 320 in the longitudinal direction (y-direction) of the guide rail 320 .
  • a portion of the third belt 366 may be rotatably connected to the motor shaft 364 , and a portion of the third belt 366 may be rotatably connected to the driven pulley 368 .
  • One end of the support member 369 may be connected to the third belt 366 , and the other end of the support member 369 may be connected to the moving unit 330 .
  • the third belt 366 may operate in the longitudinal direction (y-direction) of the guide rail 320 , and the moving unit 330 may also operate in the longitudinal direction ( y direction).
  • the lifting member 262 may face the support frame 350 , and the connecting block 260 connected to the lifting member 262 is fixed to the frame 212 by the connecting member 214 . ), and the fixed frame 212 may face the first moving assembly 110 .
  • the third belt 366 connected to the motor shaft 364 may move in the horizontal direction (y-direction), and at this time, at a predetermined position of the third belt 366, Since the support member 369 connected to the moving part 330 is provided, the support member 369 may move along the guide rail 320 .
  • a guide ball 322 is formed in the guide rail 320 , and since the support member 369 is provided through the guide ball 322 , when the third belt 366 moves, the support member 369 is a guide It can move smoothly while being guided along the ball 322 .
  • the fixed frame 212 and the first moving assembly 110 coupled through the moving part 330 and the connecting member 214 can operate in the horizontal direction (y-direction) along the guide rail 320 . .
  • the third driving means 360 may drive the first transfer unit 100 and the second transfer unit 200 in the horizontal direction (y-direction), and the paddle 130 is mounted on the substrate S.
  • the old boat 120 may be moved from the first position to the second position.
  • the first diffusion path 12 and the second diffusion path 14 extended in the horizontal direction may be stacked as one set to have a predetermined height.
  • the diffusion furnace apparatus 10 may be extended by being arranged vertically, and may be provided in, for example, five rows. Accordingly, in one embodiment, two horizontally and five vertically may be arranged to provide a total of 10 diffusion paths. A loading device may be provided for each vertically extended diffuser device 10 .
  • a substrate S is loaded/loaded into the first diffusion path 12 and the second diffusion path 14, which are diffusion paths extending in two horizontal directions (y-direction) with one substrate loading device 1 can be unloaded.
  • the time of the diffusion process can be reduced compared to the case of loading the substrate S into one diffusion path with one substrate loading device 1, and the space required for the diffusion process is reduced to increase production per process space. can have an effect.

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  • Manufacturing & Machinery (AREA)
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Abstract

La présente invention peut fournir un dispositif de chargement de substrat comprenant : une première unité de transfert pouvant charger et décharger, à l'intérieur et à l'extérieur d'un four de diffusion, une palette chargée avec une nacelle sur laquelle une pluralité de substrats sont placés ; une deuxième unité de transfert capable de déplacer la palette vers le haut et vers le bas lorsque la nacelle est chargée dans le four de diffusion et déchargée hors du four de diffusion ; une troisième unité de transfert pouvant déplacer la première unité de transfert et la deuxième unité de transfert dans une direction horizontale, le four de diffusion étant disposé dans une pluralité, et le dispositif de chargement de substrat effectue une opération de chargement et de déchargement des nacelles ayant chacune un substrat placé sur celle-ci dans et hors de la pluralité de fours de diffusion.
PCT/KR2021/015253 2020-10-28 2021-10-27 Dispositif de chargement de substrat pour multiples fours de diffusion WO2022092822A1 (fr)

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KR10-2020-0141413 2020-10-28
KR1020200141413A KR102384690B1 (ko) 2020-10-28 2020-10-28 복수의 확산로용 기판 로딩 장치

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KR102531704B1 (ko) * 2022-10-18 2023-05-11 (주)한화 보트 로딩 장치 및 이를 포함하는 웨이퍼 처리 시스템

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JP2639723B2 (ja) * 1988-02-05 1997-08-13 東京エレクトロン株式会社 ボート搬送方法及び熱処理装置
JPH11135513A (ja) * 1997-10-31 1999-05-21 Toshiba Ceramics Co Ltd ボート供給装置
KR100746575B1 (ko) * 2006-09-11 2007-08-06 세메스 주식회사 기판 이송 장치 및 이를 이용한 기판의 이송 방법
KR20120040866A (ko) * 2010-10-20 2012-04-30 주식회사 지오스 웜 및 웜휠 기어를 이용하여 전체적으로 업 및 다운 구동되는 웨이퍼 기판 로더부
JP6232164B2 (ja) * 2015-03-25 2017-11-15 株式会社日立国際電気 基板処理装置および半導体装置の製造方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2639723B2 (ja) * 1988-02-05 1997-08-13 東京エレクトロン株式会社 ボート搬送方法及び熱処理装置
JPH11135513A (ja) * 1997-10-31 1999-05-21 Toshiba Ceramics Co Ltd ボート供給装置
KR100746575B1 (ko) * 2006-09-11 2007-08-06 세메스 주식회사 기판 이송 장치 및 이를 이용한 기판의 이송 방법
KR20120040866A (ko) * 2010-10-20 2012-04-30 주식회사 지오스 웜 및 웜휠 기어를 이용하여 전체적으로 업 및 다운 구동되는 웨이퍼 기판 로더부
JP6232164B2 (ja) * 2015-03-25 2017-11-15 株式会社日立国際電気 基板処理装置および半導体装置の製造方法

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