Classifications

• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
  • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
  • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
  • F04C29/04—Heating; Cooling; Heat insulation
  • F04C29/042—Heating; Cooling; Heat insulation by injecting a fluid
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
  • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
  • F04D29/00—Details, component parts, or accessories
  • F04D29/58—Cooling; Heating; Diminishing heat transfer
  • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
  • F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
  • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
  • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
  • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
  • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
  • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
  • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
  • F04B39/06—Cooling; Heating; Prevention of freezing
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
  • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
  • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
  • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
  • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
  • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
  • F04C29/04—Heating; Cooling; Heat insulation
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
  • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
  • F04D19/00—Axial-flow pumps
  • F04D19/02—Multi-stage pumps
  • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
  • F04D19/042—Turbomolecular vacuum pumps
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
  • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
  • F04D29/00—Details, component parts, or accessories
  • F04D29/58—Cooling; Heating; Diminishing heat transfer
  • F04D29/5813—Cooling the control unit
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
  • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
  • F04D29/00—Details, component parts, or accessories
  • F04D29/58—Cooling; Heating; Diminishing heat transfer
  • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F28—HEAT EXCHANGE IN GENERAL
  • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
  • F28D1/00—Heat-exchange apparatus having stationary conduit assemblies for one heat-exchange medium only, the media being in contact with different sides of the conduit wall, in which the other heat-exchange medium is a large body of fluid, e.g. domestic or motor car radiators
  • F28D1/02—Heat-exchange apparatus having stationary conduit assemblies for one heat-exchange medium only, the media being in contact with different sides of the conduit wall, in which the other heat-exchange medium is a large body of fluid, e.g. domestic or motor car radiators with heat-exchange conduits immersed in the body of fluid
  • F28D1/03—Heat-exchange apparatus having stationary conduit assemblies for one heat-exchange medium only, the media being in contact with different sides of the conduit wall, in which the other heat-exchange medium is a large body of fluid, e.g. domestic or motor car radiators with heat-exchange conduits immersed in the body of fluid with plate-like or laminated conduits
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F28—HEAT EXCHANGE IN GENERAL
  • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
  • F28F13/00—Arrangements for modifying heat-transfer, e.g. increasing, decreasing
  • F28F13/06—Arrangements for modifying heat-transfer, e.g. increasing, decreasing by affecting the pattern of flow of the heat-exchange media
  • F28F13/12—Arrangements for modifying heat-transfer, e.g. increasing, decreasing by affecting the pattern of flow of the heat-exchange media by creating turbulence, e.g. by stirring, by increasing the force of circulation
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F28—HEAT EXCHANGE IN GENERAL
  • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
  • F28F3/00—Plate-like or laminated elements; Assemblies of plate-like or laminated elements
  • F28F3/02—Elements or assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with recesses, with corrugations
  • F28F3/04—Elements or assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with recesses, with corrugations the means being integral with the element
  • F28F3/042—Elements or assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with recesses, with corrugations the means being integral with the element in the form of local deformations of the element
  • F28F3/046—Elements or assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with recesses, with corrugations the means being integral with the element in the form of local deformations of the element the deformations being linear, e.g. corrugations
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F28—HEAT EXCHANGE IN GENERAL
  • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
  • F28F3/00—Plate-like or laminated elements; Assemblies of plate-like or laminated elements
  • F28F3/02—Elements or assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with recesses, with corrugations
  • F28F3/04—Elements or assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with recesses, with corrugations the means being integral with the element
  • F28F3/048—Elements or assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with recesses, with corrugations the means being integral with the element in the form of ribs integral with the element or local variations in thickness of the element, e.g. grooves, microchannels
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F28—HEAT EXCHANGE IN GENERAL
  • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
  • F28F3/00—Plate-like or laminated elements; Assemblies of plate-like or laminated elements
  • F28F3/12—Elements constructed in the shape of a hollow panel, e.g. with channels
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
  • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
  • F04C2220/00—Application
  • F04C2220/10—Vacuum
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
  • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
  • F04C2230/00—Manufacture
  • F04C2230/20—Manufacture essentially without removing material
  • F04C2230/23—Manufacture essentially without removing material by permanently joining parts together
  • F04C2230/231—Manufacture essentially without removing material by permanently joining parts together by welding
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
  • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
  • F04C2240/00—Components
  • F04C2240/30—Casings or housings

Definitions

• the present invention relates to a cooling element for a vacuum pump and a vacuum pumping such a cooling element.
• the aluminum blocks are assembled to the housing of the vacuum pump by alloy steel bolts at room temperature.
• the cooling block temperature cycles between usually 20 to 160 °C. Since the alloy steel bolts have a lower thermal expansion than the aluminum, stress is induced into the bolts causing fatigue failure on the bolt. Thus, cooling effect can be diminished, and service of the vacuum pump may become necessary.
• the cooling element for vacuum pump comprises a base element wherein by the base element an internal void is de fined. Further, an inlet is connected to the base element and is in fluid connec tion with the void. An outlet is connected to the base element and is in fluid connection with the void such that a coolant can flow from the inlet through the void to the outlet to dissipate the heat transferred from the housing of the vac uum pump to the coolant. Therefore, the base element is connectable to the housing of the vacuum pump. Due to the coolant flowing through the internal void of the base element heat produced by the vacuum pump is dissipated and reliably carried away from the vacuum pump.
• the void is tubular.
• the base element is provided by a pipe for ease of construction.
• the pipes can be shaped in different forms in order to provide a sufficient length to transfer heat from the vacuum pump to the coolant.
• the void has a flat shape.
• flat means that the height of the void is smaller than the width of the void.
• the width is more than twice as large as the height, preferably more than four-times as large as the height and even more preferably more than 10-times as large as the height.
• the height of the void is less than 3 mm, preferably less than 2 mm and even more preferably less than 1 mm.
• the width of the void can be several tens of mm, preferably more than 25 mm and more prefer ably more than 40 mm.
• the base element has flat shape thereby reduction of the amount of material and thus the costs of fabrication may be achieved.
• the shape of the base element may be adapted to the shape of the void.
• the term flat has the same meaning, i.e. that the base element has a height which is much smaller than the width of the element.
• the void has a length exceeding the width of the void, preferably exceeding the width of the a factor of two, more preferably by a factor of 4 and most preferably by a factor of 8.
• the coolant may have a sufficient time in order to take up the heat from the vacuum pump which is then dissipated by the coolant.
• the base element comprises a bottom surface to be directly attached to the surface of the housing of the vacuum pump.
• the base element is in direct contact with the housing of the vacuum pump which may provide suffi cient heat conductivity in order to transfer the heat from the housing of the vacuum pump to the bottom surface of the base element, to the coolant in the internal void that is defined by the base element.
• the bottom sur face is flat in order provide full contact with the surface of the housing of the vacuum pump.
• the material thickness between the bottom surface of the base element and the void is less than 3 mm, preferably less than 2 mm and more preferably less than 1 mm.
• sufficient heat conductivity may be provided.
• the base element is made from stainless steel, there might be sufficient heat conductivity due to the small material thickness of the bottom of the base element.
• the internal void comprises at least one corrugated surface to create turbulent flow within the void.
• the corrugated surface might be pro vided at least at the upper surface which is at the opposite site of the bottom surface away from the surface of the housing of the vacuum pump. More pref erably, the upper surface as well as the bottom surface might comprise a cor rugated surface.
• the corrugated surface can be provided by grooves which are arranged perpendicular to the direction of flow through the void.
• the corrugated surface might be provided by ribs arranged per pendicular to the direction of flow.
• the corrugated surface can be built as grooves or ribs. If two corrugated surfaces are present, the two surfaces can be built both with grooves or both with ribs or one corrugated surface can be built as ribs and one corrugated surface can be built as grooves.
• the corrugated surface of the upper surface is built as grooves wherein the corrugated surface of the bottom surface is built as ribs.
• the bottom surface may be built as grooves or ribs in order to ensure turbulent flow within the void. By the turbulent flow in the void heat transfer to coolant might be improved.
• the features of the corrugated surface of the upper surface and the features of the corrugated surface of the bottom surface are arranged alternat ing along the direction of flow.
• a turbulator element is disposed within the void to create turbulent flow within the void.
• the turbulator element is built as wire mesh introduced into the void as separate element.
• the turbulator element can be easily introduced into the pipes in order to ensure turbulent flow within the pipes enhancing the heat transfer to the coolant.
• the base element is built as one piece.
• the base element is composed of two pieces or more which are glued, welded, screwed or otherwise leaktight attached together.
• the base element is fabricated by 3D printing.
• the base element is built in one piece by 3D printing it may provide the possibility to create internal voids with complex shapes such as a corrugated surface.
• 3D printing facilitates fabrication of the cooling element.
• the base element is surrounded by a connecting element.
• the connecting element connects the base element with the housing of the vacuum pump.
• the connecting element is made from aluminum wherein the connecting element is directly connected to the housing of the vacuum pump.
• the base element can be cast-in or pressed-in into the connecting element to provide sufficient contact between the base ele ment and the connecting element.
• the base element is made of stainless steel.
• stainless steel provides the benefit of being in urge and long-lasting.
• the cooling element is attached by alloy steel screws, cool ing element and screws have the same or similar thermal expansion.
• ther mal stress induced might be reduced.
• the present invention relates to a vacuum pump comprising a housing and cooling element as previously described.
• FIG. 1 a perspective view of the cooling element in accordance to the present invention
• Figure 2 a cross section of the cooling element according to figure 1 ,
• FIG. 3 another embodiment of the cooling element according to the present invention.
• Figure 4 an exemplary turbulator element.
• the cooling element 10 comprises a base element 12 which is according to Figure 1 built as flat base element 12. Further, to the base element an inlet 14 and an outlet 16 is connected. A coolant is flowing through the inlet 14 as depicted by the arrow 18, flowing through an internal void 20 built in the base element ( Figure 2) and leaving the cooling element 10 through the outlet 16 as depicted by the arrow 22. Therein the base element 12 comprises a bottom surface 24 which is in direct contact with the surface 26 of the housing 28 of the vacuum pump as depicted in figure 2.
• the cooling element 10 might be built from stainless steel. Even though stainless steel has a low heat conductivity, enough heat is transferred from the vacuum pump to the coolant since the material thickness D between the bottom surface 24 of the cooling element 10 and the lower surface of the internal void 20 is small and in particular less than 2 mm.
• an upper surface 30 of the internal void 20 is built as corrugated surface by a plurality of grooves 32 which are perpen dicular to the direction of flow (as indicated by arrow 34).
• the lower surface 31 of the internal void 20 also comprises a corrugated surface as de picted in Fig. 2, wherein the corrugated surface in Fig. 2 is built by ribs 33 arranged perpendicular to the direction of flow and interchangeably arranged to the grooves 32 of the upper surface 30.
• the base element 12 is built as one piece by 3D printing. Thereby, the complex shape of the void 20 can be easily achieved and further a leak tight design is provided.
• the method of fabrication of the cooling element comprises the steps of: a) Printing a base element by 3D printing from stainless steel, wherein the base element comprises an internal void; and b) Attaching an inlet and an outlet to the base element in fluid communica tion to the internal void either also by 3D printing of any other method, such as welding, brazing or the like.
• cooling element may have the features as described above or below.
• Figure 3 shows another embodiment wherein the base element 12 comprises a first corrugated surface 32 as the embodiment of Figures 1 and 2 and also has a second corrugated surface 36 opposite to the first corrugated surface 32 wherein both are built identically by grooves.
• the opposite surface i.e. the lower surface defining the void in between are built as corrugated surfaces.
• the base element 12 is placed into a connecting element 38 which is then connected to the surface 26 of a housing 28 of the vacuum pump.
• the base element 12 might be casted into the connecting element 28 which is preferably made from aluminum.
• both surfaces can be built as corru gated surfaces enhancing the possibility to take up heat by the coolant.
• the flat base element is parallel arranged in the connecting element 38 to the surface 26 of the housing of the vacuum pump.
• parallel means that the bottom surface 24 and/or the top surface 30 of the base element 12 are parallel to the surface of the housing of the vacuum pump.
• the base element 12 can be arranged perpendicular within the connecting element 38 relative to the surface of the housing of the vacuum pump.
• Figure 4 shows a wire mesh turbulator as turbulator element 40 which can be introduced into the void, in particular, if the void is built as pipe in order to ensure turbulent flow within the void, i.e. pipe.

Landscapes

• Engineering & Computer Science (AREA)
• Mechanical Engineering (AREA)
• General Engineering & Computer Science (AREA)
• Physics & Mathematics (AREA)
• Thermal Sciences (AREA)
• Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
• Cooling Or The Like Of Electrical Apparatus (AREA)
• Glass Compositions (AREA)
• Surgical Instruments (AREA)
• Non-Positive Displacement Air Blowers (AREA)
• Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
• Compressor (AREA)
• Structures Of Non-Positive Displacement Pumps (AREA)

Priority Applications (6)

Applications Claiming Priority (2)

Publications (1)

Family

ID=71135193

Family Applications (1)

Country Status (9)

Families Citing this family (1)

Citations (5)

Family Cites Families (24)

• 2020
  • 2020-05-20 GB GB2007489.4A patent/GB2596275A/en not_active Withdrawn
• 2021
  • 2021-05-18 WO PCT/GB2021/051188 patent/WO2021234363A1/en not_active Ceased
  • 2021-05-18 KR KR1020227038566A patent/KR20230010193A/ko active Pending
  • 2021-05-18 US US17/999,140 patent/US20230204045A1/en not_active Abandoned
  • 2021-05-18 CN CN202180036079.1A patent/CN115516209A/zh active Pending
  • 2021-05-18 JP JP2022569524A patent/JP2023527723A/ja active Pending
  • 2021-05-18 EP EP21729594.8A patent/EP4153864B1/en active Active
  • 2021-05-18 IL IL298345A patent/IL298345A/en unknown
  • 2021-05-20 TW TW110118227A patent/TWI891799B/zh active

Patent Citations (5)

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