TWI891799B - 真空泵 - Google Patents

真空泵

Info

Publication number
TWI891799B
TWI891799B TW110118227A TW110118227A TWI891799B TW I891799 B TWI891799 B TW I891799B TW 110118227 A TW110118227 A TW 110118227A TW 110118227 A TW110118227 A TW 110118227A TW I891799 B TWI891799 B TW I891799B
Authority
TW
Taiwan
Prior art keywords
vacuum pump
base element
void
gap
corrugated
Prior art date
Application number
TW110118227A
Other languages
English (en)
Chinese (zh)
Other versions
TW202202735A (zh
Inventor
西伯巴蘭 凱樂山姆
Original Assignee
英商愛德華有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 英商愛德華有限公司 filed Critical 英商愛德華有限公司
Publication of TW202202735A publication Critical patent/TW202202735A/zh
Application granted granted Critical
Publication of TWI891799B publication Critical patent/TWI891799B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F04C29/042—Heating; Cooling; Heat insulation by injecting a fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/06—Cooling; Heating; Prevention of freezing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/5813—Cooling the control unit
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D1/00—Heat-exchange apparatus having stationary conduit assemblies for one heat-exchange medium only, the media being in contact with different sides of the conduit wall, in which the other heat-exchange medium is a large body of fluid, e.g. domestic or motor car radiators
    • F28D1/02—Heat-exchange apparatus having stationary conduit assemblies for one heat-exchange medium only, the media being in contact with different sides of the conduit wall, in which the other heat-exchange medium is a large body of fluid, e.g. domestic or motor car radiators with heat-exchange conduits immersed in the body of fluid
    • F28D1/03—Heat-exchange apparatus having stationary conduit assemblies for one heat-exchange medium only, the media being in contact with different sides of the conduit wall, in which the other heat-exchange medium is a large body of fluid, e.g. domestic or motor car radiators with heat-exchange conduits immersed in the body of fluid with plate-like or laminated conduits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F13/00—Arrangements for modifying heat-transfer, e.g. increasing, decreasing
    • F28F13/06—Arrangements for modifying heat-transfer, e.g. increasing, decreasing by affecting the pattern of flow of the heat-exchange media
    • F28F13/12—Arrangements for modifying heat-transfer, e.g. increasing, decreasing by affecting the pattern of flow of the heat-exchange media by creating turbulence, e.g. by stirring, by increasing the force of circulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F3/00—Plate-like or laminated elements; Assemblies of plate-like or laminated elements
    • F28F3/02—Elements or assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with recesses, with corrugations
    • F28F3/04—Elements or assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with recesses, with corrugations the means being integral with the element
    • F28F3/042—Elements or assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with recesses, with corrugations the means being integral with the element in the form of local deformations of the element
    • F28F3/046—Elements or assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with recesses, with corrugations the means being integral with the element in the form of local deformations of the element the deformations being linear, e.g. corrugations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F3/00—Plate-like or laminated elements; Assemblies of plate-like or laminated elements
    • F28F3/02—Elements or assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with recesses, with corrugations
    • F28F3/04—Elements or assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with recesses, with corrugations the means being integral with the element
    • F28F3/048—Elements or assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with recesses, with corrugations the means being integral with the element in the form of ribs integral with the element or local variations in thickness of the element, e.g. grooves, microchannels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F3/00—Plate-like or laminated elements; Assemblies of plate-like or laminated elements
    • F28F3/12—Elements constructed in the shape of a hollow panel, e.g. with channels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/20—Manufacture essentially without removing material
    • F04C2230/23—Manufacture essentially without removing material by permanently joining parts together
    • F04C2230/231—Manufacture essentially without removing material by permanently joining parts together by welding
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/30—Casings or housings

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)
  • Glass Compositions (AREA)
  • Surgical Instruments (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Compressor (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
TW110118227A 2020-05-20 2021-05-20 真空泵 TWI891799B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB2007489.4 2020-05-20
GB2007489.4A GB2596275A (en) 2020-05-20 2020-05-20 Cooling element

Publications (2)

Publication Number Publication Date
TW202202735A TW202202735A (zh) 2022-01-16
TWI891799B true TWI891799B (zh) 2025-08-01

Family

ID=71135193

Family Applications (1)

Application Number Title Priority Date Filing Date
TW110118227A TWI891799B (zh) 2020-05-20 2021-05-20 真空泵

Country Status (9)

Country Link
US (1) US20230204045A1 (https=)
EP (1) EP4153864B1 (https=)
JP (1) JP2023527723A (https=)
KR (1) KR20230010193A (https=)
CN (1) CN115516209A (https=)
GB (1) GB2596275A (https=)
IL (1) IL298345A (https=)
TW (1) TWI891799B (https=)
WO (1) WO2021234363A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102733266B1 (ko) * 2024-03-26 2024-11-25 한화시스템 주식회사 이종 소재 냉각판과 그 제조방법

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003193977A (ja) * 2001-10-19 2003-07-09 Denso Corp 気体圧縮装置
DE202013009654U1 (de) * 2013-10-31 2015-02-03 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
TWM497714U (zh) * 2014-12-02 2015-03-21 Teco Elec & Machinery Co Ltd 具有外接式油分離裝置之滿液式冷凝器
CN104454461A (zh) * 2013-08-20 2015-03-25 英格索尔-兰德公司 具有热激活性热交换器的压缩机系统
WO2018174735A2 (en) * 2017-03-22 2018-09-27 Osemlak Zenon Heat exchanger channel that uses the heat of the phase transition of the substance into a solid.
US20200106146A1 (en) * 2018-09-28 2020-04-02 Robert Bosch Gmbh Cooling plate for the temperature control of at least one battery cell and a battery system

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JPS59231397A (ja) * 1983-06-10 1984-12-26 Matsushita Refrig Co タ−ビユレ−タ
KR950007378B1 (ko) * 1990-04-06 1995-07-10 가부시끼 가이샤 히다찌 세이사꾸쇼 진공펌프
JP3154247B2 (ja) * 1993-04-20 2001-04-09 古河電気工業株式会社 水冷式コールドプレートおよびその製造方法
JP2002098454A (ja) * 2000-07-21 2002-04-05 Mitsubishi Materials Corp 液冷ヒートシンク及びその製造方法
JP2002141164A (ja) * 2000-10-31 2002-05-17 Miyaden Co Ltd 大電力高周波誘導加熱用トランジスタインバータ装置
JP2002276587A (ja) * 2001-03-19 2002-09-25 Boc Edwards Technologies Ltd ターボ分子ポンプ
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DE102005012040A1 (de) * 2005-03-16 2006-09-21 Gebr. Becker Gmbh & Co Kg Rotor und Schraubenvakuumpumpe
JP5069244B2 (ja) * 2005-11-09 2012-11-07 イグゼティック ヒュッケスヴァーゲン ゲゼルシャフト ミット ベシュレンクテル ハフツング 円筒形の冷却ブシュを備えたポンプ
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JP6886631B2 (ja) * 2016-06-01 2021-06-16 大日本印刷株式会社 熱交換器用金属プレートおよびその製造方法、ならびに熱交換器およびその製造方法
CN106099242B (zh) * 2016-07-04 2019-06-14 上海蔚来汽车有限公司 电池冷却换热器
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Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003193977A (ja) * 2001-10-19 2003-07-09 Denso Corp 気体圧縮装置
CN104454461A (zh) * 2013-08-20 2015-03-25 英格索尔-兰德公司 具有热激活性热交换器的压缩机系统
DE202013009654U1 (de) * 2013-10-31 2015-02-03 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
TWM497714U (zh) * 2014-12-02 2015-03-21 Teco Elec & Machinery Co Ltd 具有外接式油分離裝置之滿液式冷凝器
WO2018174735A2 (en) * 2017-03-22 2018-09-27 Osemlak Zenon Heat exchanger channel that uses the heat of the phase transition of the substance into a solid.
US20200106146A1 (en) * 2018-09-28 2020-04-02 Robert Bosch Gmbh Cooling plate for the temperature control of at least one battery cell and a battery system

Also Published As

Publication number Publication date
CN115516209A (zh) 2022-12-23
IL298345A (en) 2023-01-01
KR20230010193A (ko) 2023-01-18
EP4153864B1 (en) 2025-07-02
GB2596275A (en) 2021-12-29
US20230204045A1 (en) 2023-06-29
EP4153864A1 (en) 2023-03-29
GB202007489D0 (en) 2020-07-01
TW202202735A (zh) 2022-01-16
JP2023527723A (ja) 2023-06-30
WO2021234363A1 (en) 2021-11-25

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