WO2021233268A1 - 光调制器及其控制方法 - Google Patents

光调制器及其控制方法 Download PDF

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Publication number
WO2021233268A1
WO2021233268A1 PCT/CN2021/094214 CN2021094214W WO2021233268A1 WO 2021233268 A1 WO2021233268 A1 WO 2021233268A1 CN 2021094214 W CN2021094214 W CN 2021094214W WO 2021233268 A1 WO2021233268 A1 WO 2021233268A1
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Prior art keywords
waveguide
mode
optical signal
output
coupling
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PCT/CN2021/094214
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English (en)
French (fr)
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杜江兵
种海宁
沈微宏
何祖源
汤宁峰
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中兴通讯股份有限公司
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Priority to US17/999,265 priority Critical patent/US20230194907A1/en
Priority to JP2022570672A priority patent/JP7450069B2/ja
Priority to EP21809142.9A priority patent/EP4152082A4/en
Publication of WO2021233268A1 publication Critical patent/WO2021233268A1/zh

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
    • G02F1/025—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/14—Mode converters
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/15—Function characteristic involving resonance effects, e.g. resonantly enhanced interaction

Definitions

  • the embodiments of the present application relate to, but are not limited to, the field of optoelectronic devices, and in particular, to an optical modulator and a control method thereof.
  • silicon-based integrated optoelectronic technology has the advantages of high integration, CMOS process compatibility, and large-scale mass production. It has become the mainstream research direction of integration in the field of optical communications.
  • the embodiments of the present application provide a light modulator and a control method thereof.
  • an embodiment of the present application provides an optical modulator.
  • the optical modulator includes: an input waveguide configured to receive an initial optical signal; a tunable ring resonator, coupled to the input waveguide, configured to The initial optical signal undergoes resonance processing and outputs the first optical signal; the feedback loop waveguide is coupled to the adjustable ring resonator and is configured to receive and transmit the first optical signal; the first mode converter is connected to the The feedback loop waveguide is coupled and connected, and is configured to perform mode conversion processing on the first optical signal and output a second optical signal; the adjustable ring resonator is also configured to perform resonance processing on the second optical signal and output a third optical signal.
  • an embodiment of the present application provides an optical modulator control method, including: receiving an initial optical signal through an input waveguide; performing resonance processing on the initial optical signal through a tunable ring resonator and outputting a first optical signal;
  • the first optical signal is received through the feedback loop waveguide and transmitted to the first mode converter;
  • the first mode converter is configured to perform mode conversion processing on the first optical signal and output the second optical signal;
  • the tunable ring resonant cavity performs resonance processing on the second optical signal and outputs a third optical signal; receiving and outputting the third optical signal through an output waveguide.
  • Fig. 1 is a schematic structural diagram of an optical modulator provided by an embodiment of the present application.
  • FIG. 2A is a schematic diagram of a cross-sectional structure of a silicon-based optoelectronic modulation module module in an embodiment of the present application
  • 2B is a schematic diagram of a cross-sectional structure of a silicon-based optoelectronic modulation module module in another embodiment of the present application;
  • FIG. 3A is a schematic structural diagram of the first/second mode converter in an embodiment of the present application.
  • FIG. 3B is a schematic structural diagram of the first/second mode converter in another embodiment of the present application.
  • 4A is a schematic diagram of simulation of modulating a first optical signal in TE0 mode according to another embodiment of the present application.
  • 4B is a schematic diagram of simulation of modulating a second optical signal in TM0 mode according to another embodiment of the present application.
  • 5A is a schematic diagram of resonance spectrum simulation provided by another embodiment of the present application.
  • 5B is a schematic diagram of simulation of resonance spectrum drift provided by another embodiment of the present application.
  • 6A is a schematic diagram of simulation of modulating a first optical signal in TE0 mode according to another embodiment of the present application.
  • 6B is a schematic diagram of simulation of modulating a second optical signal in TE1 mode according to another embodiment of the present application.
  • FIG. 7A is a schematic diagram of resonance spectrum simulation provided by another embodiment of the present application.
  • FIG. 7B is a schematic diagram of a simulation of resonance spectrum drift provided by another embodiment of the present application.
  • mode multiplexing is a technology that effectively increases the transmission capacity of a single channel. Multiple modes are transmitted in the same fiber/optical waveguide channel, which greatly increases the density of optical signals in the same channel and makes the total transmission capacity Realize multiplication.
  • the research of mode multiplexing devices has also become mature, which can effectively improve the transmission density of on-chip interconnection.
  • the temperature-induced wavelength shift of the micro-ring modulator will make the operation of the optical modulator unstable.
  • the modulation is improved.
  • the efficiency can be achieved by increasing the silicon doping concentration, but it will increase the light absorption loss in the waveguide, and the extinction is relatively low.
  • the embodiments of the present application provide an optical modulator and a control method thereof, which can perform secondary superposition resonance adjustment on an optical signal through a tunable ring resonator, so as to improve the extinction ratio of the optical signal.
  • the optical modulator includes: an input waveguide 100 configured to receive an initial optical signal; a tunable ring resonator 300, coupled to the input waveguide 100, is configured to perform resonance and modulation processing on the initial optical signal and Output the first optical signal; the feedback loop waveguide 200 is coupled to the adjustable ring resonator 300 and is configured to receive and transmit the first optical signal; the first mode converter 400, the first mode converter 400 and the feedback loop waveguide 200 In the coupling connection, the first mode converter 400 is configured to perform mode conversion processing on the first optical signal and output the second optical signal; the adjustable ring resonator 300 is also configured to perform resonance and modulation processing on the second optical signal and output The third optical signal; the output waveguide 501, the output waveguide 501 is coupled to the adjustable ring resonator 300, and is configured to receive and output the third optical signal.
  • the initial optical signal is received through the input waveguide 100 and transmitted to the ring resonant cavity 300, and the initial optical signal resonates in the ring resonant cavity 300. Since the initial optical signal is a continuous optical signal, after the ring resonator 300 performs resonance processing on the initial optical signal, the amplitude of the optical signal at a specific frequency will be amplified to generate the first optical signal.
  • the first optical signal is transmitted to the first mode converter 400 through the loop feedback loop waveguide 200, and the first mode converter 400 performs mode conversion processing on the first optical signal and outputs the second optical signal.
  • the third optical signal passes through and The tunable ring cavity 300 is coupled to the output waveguide 501 to output. That is, by multiplexing the ring resonator 300 to perform resonance processing on the initial optical signal and the second optical signal and amplify the amplitude of the optical signal of a specific frequency, a third optical signal with a higher extinction ratio is obtained. That is, the tunable ring resonant cavity is mode-multiplexed to modulate the optical signals of multiple modes at the same time, so as to improve the extinction ratio of the optical signals.
  • the first mode converter 400 can convert the first optical signal into optical signals of different orthogonal modes or optical signals of different order modes. Since the second optical signal and the initial optical signal are optical signals of different modes, and the ring resonator 300 can support multi-mode optical signal transmission, when the second optical signal and the initial optical signal are transmitted in the middle ring resonator 300, each Transmission without interference or crosstalk.
  • the ring cavity 300 may be a circular microring cavity or a racetrack type microring cavity.
  • the curved waveguide of the microring cavity supports the transmission of more than two modes in the microring cavity.
  • the effective refractive index in the cavity of the ring resonator 300 is adjusted by the first photoelectric modulation module and the second photoelectric modulation module, so that the optical signal accumulates phase changes during transmission in the cavity and converts the phase changes into intensity through interference effects. Change to modulate the resonant wavelength of the optical signal in the cavity.
  • the optical modulator further includes: a second mode converter 500.
  • the input end of the second mode converter 500 is coupled to the output waveguide 501 and is configured to perform mode conversion processing on the third optical signal and output the second mode converter 500.
  • Four optical signals to make the output signal of the optical modulator the optical signal of the target mode.
  • the initial optical signal, the first optical signal, and the fourth optical signal are the first mode optical signal
  • the second optical signal and the third optical signal are the second mode optical signal
  • the initial optical signal of the first mode is resonated and modulated by the adjustable ring resonator to generate the first optical signal of the first mode; the first optical signal of the first mode is converted by the first mode converter 400 To generate the second optical signal in the second mode; resonate and modulate the second optical signal in the second mode through the adjustable ring cavity to generate the third optical signal in the second mode; The third optical signal of the second mode is subjected to mode conversion processing to generate the fourth optical signal of the first mode.
  • the first mode and the second mode can be any light mode.
  • the description will be made by taking the TE0 mode as the first mode and the TE1 mode or the TM0 mode as the second mode as an example.
  • the first mode converter 400 and the second mode converter 500 are the same mode converters that are set in opposite directions.
  • the initial optical signal and the first optical signal are the optical signals in TE0 mode.
  • the first optical signal is mode-converted by the first mode converter 400 and the second optical signal in TE1 mode or TM0 mode is output, and passes through the adjustable ring resonator. 300 performs resonance processing on the second optical signal to generate a third optical signal.
  • the input end of the second mode converter 500 is coupled to the output waveguide 501 to perform mode conversion processing on the third optical signal and output the fourth optical signal.
  • the third optical signal is an optical signal in TE1 mode or TM0 mode
  • the fourth optical signal is an optical signal in TE0 mode.
  • the third optical signal of TE1 mode or TM0 mode when the third optical signal of TE1 mode or TM0 mode is transmitted to the first mode converter 400 via the feedback loop waveguide 200, the third optical signal will suffer loss to ensure that the input signal of the first mode converter 400 is the first optical signal. ;
  • the first optical signal of the TE0 mode is transmitted to the second mode converter 500 via the output waveguide 501, the first optical signal will experience optical loss to ensure that the output signal of the second mode converter 500 is the fourth optical signal.
  • the third optical signal in the TE1 mode or the TM0 mode is gradually lost during transmission.
  • the adjustable ring resonant cavity includes a first coupling area and a second coupling area; the adjustable ring resonant cavity is coupled to the input waveguide 100 through the first coupling area, and the adjustable ring resonant cavity is connected to the input waveguide 100 through the first coupling area.
  • the feedback loop waveguide 200 is coupled and connected; the first mode converter 400 is coupled to the adjustable ring resonant cavity through the second coupling region, and the adjustable ring resonant cavity is coupled to the output waveguide 501 through the second coupling region.
  • the first coupling region is coupled to the input waveguide 100 and connected to the feedback loop waveguide 200, so that the initial optical signal can be input from the input waveguide 100 into the ring resonator 300, and the first optical signal can be input from the ring resonator 300 to the feedback loop waveguide 200
  • the second coupling region is coupled to the output waveguide 501 so that the second optical signal can be input from the output waveguide 501 to the ring resonator 300, and the fourth optical signal can be output from the ring resonator 300 to the output waveguide 501.
  • the first mode converter 400 and the second mode converter 500 respectively include: a silicon substrate layer; a silicon dioxide under-cladding layer arranged on one side of the silicon substrate layer; and a silicon waveguide layer, which is arranged on the silicon dioxide under-cladding layer away from The silicon substrate layer side; the silicon dioxide upper cladding layer is arranged on the side of the silicon waveguide layer away from the silicon dioxide lower cladding layer.
  • the adjustable ring resonant cavity further includes: a first photoelectric modulation module, a second photoelectric modulation module, and a ring resonant cavity 300; the first photoelectric modulation module is configured to adjust the refractive index of the first region of the ring resonant cavity 300; The two optoelectronic modulation modules are configured to adjust the refractive index of the second region of the ring cavity 300.
  • the ring resonator 300 includes a first straight waveguide 303, a second straight waveguide 304, a first half-ring waveguide 301, and a second half-ring waveguide 302.
  • the first half-ring waveguide 301 is connected to the first straight waveguide 303 and the second straight waveguide respectively.
  • One end of 304 is connected, and the second half-ring waveguide 302 is respectively connected to the other ends of the first straight waveguide 303 and the second straight waveguide 304 to form a ring waveguide.
  • the first photoelectric modulation module and the second photoelectric modulation module adjust the refractive index of different regions of the ring cavity 300 respectively.
  • the initial optical signal and the second optical signal accumulate phase changes during the transmission process of the first area and the second area, and the first direct waveguide 303 in the ring cavity 300 , Interference occurs in the second straight waveguide 304 respectively to convert the phase change into the intensity change.
  • the first straight waveguide 303 and the second straight waveguide 304 are respectively the first coupling region and the second coupling region; the first half-ring waveguide 301 and the second half-ring waveguide 302 are the first Area, second area.
  • the number of photoelectric modulation modules is increased to synchronously modulate the effective refractive index of multiple regions in the ring cavity 300 to modulate the phase change of the optical signal in the ring cavity 300.
  • a ring-shaped photoelectric modulation module is provided to synchronously modulate the effective refractive index of all regions of the resonant cavity.
  • the first area may be the first half-ring waveguide 301 and the second area may be the second half-ring waveguide 302.
  • the first photoelectric modulation module and the second photoelectric modulation module are both silicon-based photoelectric modulation module modules;
  • the silicon-based photoelectric modulation module modules include the first P-type heavily doped Region 6061, first N-type heavily doped region 6064, first P-type lightly doped region 6062, first N-type lightly doped region 6063;
  • first P-type lightly doped region 6062 is set in the first P-type heavily doped region The side of the doped region 6061; the first N-type lightly doped region 6063 is disposed on the side of the first P-type lightly doped region 6062 away from the first P-type heavily doped region 6061;
  • the first N-type heavily doped region 6064 is disposed on The first N-type lightly doped region 6063 is away from the side of the first P-type lightly doped region 6062.
  • the ring resonant cavity 300 is a ridge waveguide.
  • the first area of the ring resonant cavity 300 is composed of a first P-type lightly doped area 6062 and a first N-type lightly doped area 6063, and a first P-type lightly doped area 6063.
  • the doped region 6062 and a first N-type lightly doped region 6063 can form a ridge waveguide.
  • the first P-type heavily doped region 6061 and the first N-type heavily doped region 6064 are respectively slab waveguides, and the first P-type heavily doped region 6061 is electrically connected to the first P-type lightly doped region 6062.
  • the N-type heavily doped region 6064 is electrically connected to the first N-type lightly doped region 6063 so that the slab waveguide and the ridge wave are electrically connected to form a first photoelectric modulation module, and the first P-type lightly doped region 6062 A depletion region is formed around the junction interface with the first N-type lightly doped region 6063.
  • the ridge waveguide and the first half-ring waveguide 301 may have the same structure, and the resonance and modulation processing of the optical signal in the tunable ring cavity can be realized through multiplexing.
  • the second region of the adjustable ring cavity 300 is composed of a first P-type lightly doped region 6062 and a first N-type lightly doped region 6063, and a first P-type lightly doped region 6062 and a first An N-type lightly doped region 6063 can constitute a ridge waveguide.
  • the first P-type heavily doped region 6061 and the first N-type heavily doped region 6064 are respectively slab waveguides, and the first P-type heavily doped region 6061 is electrically connected to the first P-type lightly doped region 6062.
  • the N-type heavily doped region 6064 is electrically connected to the first N-type lightly doped region 6063 so that the slab waveguide and the ridge wave are electrically connected to form a second photoelectric modulation module, and the first P-type lightly doped region 6062 A depletion region is formed around the junction interface with the first N-type lightly doped region 6063.
  • the ridge waveguide and the second half-ring waveguide 302 may have the same structure, and the resonance and modulation processing of the optical signal in the tunable ring resonator 300 can be realized through multiplexing.
  • the first P-type heavily doped region 6061, the first N-type heavily doped region 6064, the first P-type lightly doped region 6062, and the first N-type lightly doped region 6063 are arranged in the same layer to form A silicon waveguide layer 606.
  • the first photoelectric modulation module and the second photoelectric modulation module further include: an upper cladding layer 603 disposed on the upper surface of the silicon waveguide layer 606; a lower cladding layer disposed on the lower surface 604 of the silicon waveguide layer 606;
  • the upper cladding layer 603 is provided with a plurality of first electrodes 601 and a plurality of second electrodes 602 on the side away from the silicon waveguide layer 606, and the plurality of first electrodes 601 and a plurality of second electrodes 602 are distributed in a semi-circular shape.
  • the upper cladding layer 603 is provided with a first metal via 6011 and a second metal via 6021. Through the first metal via 6011 and the second metal via 6021, the first P-type heavily doped region 6061 and the first N-type heavily doped region 6064 are respectively connected to the first electrode 601 and the second electrode 602 respectively.
  • the first electrode 601 and the second electrode 602 are electrically connected to an external electrical signal source to apply an electrical modulation signal to the first P-type heavily doped region 6061, the first N-type heavily doped region 6064, thereby adjusting the first
  • the carrier concentration in the P-type lightly doped region 6062 and the first N-type lightly doped region 6063 changes the effective refractive index of the light transmission mode in the waveguide.
  • the ridge waveguide of the microring cavity supports multi-mode transmission. Among them, the main material of the waveguide layer is silicon with a total thickness of 340nm, the ridge height of the ridge waveguide is 290nm, the width of the ridge waveguide is 500nm, and the height of the slab waveguide is 50nm. .
  • specific parameters (such as waveguide thickness, ridge height, and width) in the waveguide layer can be adaptively adjusted according to specific modulation requirements.
  • the first P-type lightly doped region 6062 includes at least two surfaces, and the first N-type lightly doped region 6063 covers the first P-type lightly doped region At least two surfaces of 6062; or, the first N-type lightly doped region 6063 includes at least two surfaces, and the first P-type lightly doped region 6062 covers at least two surfaces of the first N-type lightly doped region 6063.
  • the first N-type lightly doped region 6063 covers at least two surfaces of the first P-type lightly doped region 6062 to form an L-type PN junction doped structure.
  • the overlap area between the optical signal mode field and the depletion region can be increased, so as to effectively improve the first photoelectric modulation mode.
  • the modulation efficiency of the group, and the use of the L-type PN junction doping structure can increase the refractive index variation range of the region where the ring cavity 300 is modulated.
  • the first P-type lightly doped region 6062 covers at least two surfaces of the first N-type lightly doped region 6063 to form an L-type PN junction doped structure.
  • the overlap area between the optical signal mode field and the depletion region can be increased, so as to effectively improve the first photoelectric modulation mode.
  • the group modulation efficiency, and the use of the L-type PN junction doping structure can increase the refractive index variation range of the region where the ring cavity 300 is modulated.
  • the input waveguide 100 includes: a single-mode input waveguide 101, a first tapered waveguide 102, and a multi-mode input waveguide 103;
  • the first tapered waveguide 102 is connected to the multimode input waveguide 103, and the other end of the first tapered waveguide 102 is connected to the single-mode input waveguide 101.
  • the single-mode input waveguide 101 receives the initial optical signal reception, and transmits the initial optical signal to the multi-mode input waveguide 103 via the first tapered waveguide 102.
  • the multimode input waveguide 103 is coupled with the tunable ring resonator 300, and the initial optical signal is transmitted to the tunable ring resonator 300 to perform resonance processing on the initial optical signal and generate a first optical signal.
  • the feedback loop waveguide 200 includes: a feedback multimode waveguide 201, an arc waveguide 202, and a second tapered waveguide 203; one end of the feedback multimode waveguide 201 is connected to the multimode input waveguide 103, and the other end of the feedback multimode waveguide 201 is connected to the second One end of the tapered waveguide 203 is connected; the other end of the second tapered waveguide 203 is connected with one end of the arc waveguide 202; the other end of the arc waveguide 202 is connected with the first mode converter 400.
  • the feedback multimode waveguide 201 is coupled to the tunable ring resonator to receive the first optical signal, and is incident into the arc waveguide 202 via the second tapered waveguide 203; the first optical signal is incident to the second optical signal via the arc waveguide 202 A mode converter 400.
  • the arc waveguide 202 includes: a silicon substrate layer 605; a silicon dioxide under-cladding layer, which is arranged on the side of the silicon substrate layer 605; a silicon waveguide layer 606, which is arranged on a side of the silicon dioxide under-cladding layer away from the silicon substrate layer 605;
  • the silicon dioxide upper cladding layer 603 is arranged on the side of the silicon waveguide layer 606 away from the silicon dioxide lower cladding layer.
  • the feedback multimode waveguide 201 and the multimode input waveguide 103 can be an integral structure, and the same multimode waveguide is multiplexed to realize the output function of the initial optical signal and the output function of the first optical signal.
  • the arc waveguide 202 includes: a silicon substrate layer; a silicon dioxide under-cladding layer, which is arranged on the side of the silicon substrate layer; a silicon waveguide layer, which is arranged on a side of the silicon dioxide under-cladding layer away from the silicon substrate layer; and a silicon dioxide upper-cladding layer , Arranged on the side of the silicon waveguide layer away from the silicon dioxide under-cladding layer.
  • the arc waveguide 202 is a single-mode waveguide, which only supports the transmission of optical signals in the TE0 mode. Therefore, optical signals of other modes will experience optical loss during the transmission of the arc waveguide 202, making the input signal of the first mode converter 400 Only the optical signal in TE0 mode.
  • the silicon waveguide layer 606 is provided with a ridge waveguide or a strip waveguide.
  • a transition waveguide is provided between the arc waveguide 202 and the first mode converter 400 for optical signal matching.
  • the transition waveguide can be a tapered waveguide that linearly transitions from a ridge waveguide to a strip waveguide.
  • the first mode converter 400 includes: a first input single-mode waveguide 401, one end of the first input single-mode waveguide 401 is connected to the feedback loop waveguide 200; Coupling waveguide 402, one end of the first single-mode coupling waveguide 402 is connected to the other end of the first input single-mode waveguide 401; the first multi-mode coupling waveguide 403 is coupled to the first single-mode coupling waveguide 402; the first conversion taper The waveguide 404, one end of the first conversion tapered waveguide 404 is connected to the first multimode coupling waveguide 403; the first output multimode waveguide 405, one end of the first output multimode waveguide 405 and the other end of the first conversion tapered waveguide 404 Connected, the other end of the first output multimode waveguide 405 is connected to the output waveguide 501.
  • the first output multimode waveguide 405 and the output waveguide 501 may be an integral structure, and the same multimode waveguide is multiplexed to realize the output function of the second optical signal and the output function of the third optical signal.
  • the first single-mode coupling waveguide 402 is coupled to the first multi-mode coupling waveguide 403 and meets the phase matching condition, and the first optical signal is transmitted to the first single-mode coupling waveguide through the first input single-mode waveguide 401 In 402, after being transmitted through a certain coupling length, the first optical signal is coupled to the first multimode coupling waveguide 403 and converted into optical signals of other modes and transmitted to the first conversion tapered waveguide 404.
  • the first conversion tapered waveguide 404 performs mode conversion processing on the first optical signal of other modes and outputs the second optical signal, which is coupled to the tunable ring resonator via the first output multimode waveguide 405, and the tunable ring resonator 300 pairs The second optical signal undergoes resonance processing to generate a third optical signal.
  • the first optical signal is in the TE0 mode, and after coupling and transmission through the first multimode coupling waveguide 403 and the first single-mode coupling waveguide 402, an optical signal in the TE1 mode is generated;
  • the second optical signal in the TM0 mode is transmitted and gradually converted into the second optical signal in the TM0 mode, and the second optical signal in the TM0 mode is coupled into the adjustable ring cavity 300 via the first output multimode waveguide 405.
  • the first mode converter 400 includes: a first input single-mode waveguide 401, one end of the first input single-mode waveguide 401 is connected to the feedback loop waveguide 200; a first single-mode coupling waveguide 402, One end of the first single-mode coupling waveguide 402 is connected to the other end of the first input single-mode waveguide 401; the first multi-mode coupling waveguide 403 is coupled to the first single-mode coupling waveguide 402; the first output multi-mode waveguide 405, the first One end of an output multimode waveguide 405 is connected to one end of the first multimode coupling waveguide 403, and the other end of the first output multimode waveguide 405 is connected to the output waveguide 501.
  • the first single-mode coupling waveguide 402 is coupled to the first multi-mode coupling waveguide 403 and meets the phase matching condition, and the first optical signal is transmitted to the first single-mode coupling waveguide through the first input single-mode waveguide 401 In 402, and after being transmitted through a certain coupling length, the first optical signal is coupled to the first multimode coupling waveguide 403 and converted into a second optical signal of other modes and transmitted to the first output multimode waveguide 405; the second optical signal It is coupled to the tunable ring resonator 300 via the first output multimode waveguide 405, and the tunable ring resonator 300 performs resonance processing on the second optical signal to generate a third optical signal.
  • the first optical signal is in TE0 mode, and after coupling and transmission through the first multimode coupling waveguide 403 and the first single mode coupling waveguide 402, the second optical signal of TE1 mode is generated, and the second optical signal is generated through the first output multimode waveguide 405.
  • the second optical signal in the TE1 mode is coupled into the adjustable ring cavity 300.
  • the second mode converter 500 includes: a second input multimode waveguide, one end of the second input multimode waveguide is connected to the output waveguide; a second conversion tapered waveguide, one end of the second conversion tapered waveguide is connected to the output waveguide The other end of the second input multimode waveguide is connected; the second multimode coupling waveguide, one end of the second multimode coupling waveguide is connected to the other end of the second conversion tapered waveguide; the second single mode coupling waveguide, the second single mode coupling The waveguide is coupled to the second multi-mode coupling waveguide; the second output single-mode waveguide, one end of the second output single-mode waveguide is connected to one end of the second single-mode coupling waveguide.
  • the second single-mode coupling waveguide is coupled to the second multi-mode coupling waveguide and meets the phase matching condition
  • the third optical signal is transmitted through the second input multi-mode waveguide to the second converted tapered waveguide, and is Second, the tapered waveguide transmits a certain distance and then converts the optical signal into another mode and transmits it to the second multi-mode coupling waveguide. After being transmitted through a certain coupling length, the optical signal of other mode is coupled to the second single-mode coupling waveguide. Converted to the fourth optical signal.
  • the third optical signal is an optical signal in the TM0 mode transmitted in the second conversion tapered waveguide and gradually converted into the TE1 mode; the optical signal in the TE1 mode is coupled and transmitted via the second multimode coupling waveguide and the second single mode coupling waveguide. Then, a TE0 mode optical signal is generated in the second single-mode coupling waveguide.
  • the second mode converter 500 includes: a second input multimode waveguide, one end of the second input multimode waveguide is connected to the output waveguide; a second multimode coupling waveguide, one end of the second multimode coupling waveguide is connected to the output waveguide The other end of the second input multimode waveguide is connected; the second single-mode coupling waveguide, the second single-mode coupling waveguide is connected to the second multi-mode coupling waveguide; the second output single-mode waveguide, one end of the second output single-mode waveguide is connected to the first One end of the two single-mode coupled waveguides is connected.
  • the second single-mode coupling waveguide is coupled to the second multi-mode coupling waveguide and meets the phase matching condition
  • the third optical signal is transmitted through the second input multi-mode waveguide to the second multi-mode coupling waveguide and passes through a certain After the coupling length is transmitted, the third optical signal is coupled into the second single-mode coupling waveguide and converted into fourth optical signals of other modes.
  • the third optical signal is a TE1 mode optical signal.
  • the TE1 mode optical signal is coupled and transmitted through the second multimode coupling waveguide and the second single-mode coupling waveguide, the TE0 mode light is generated in the second single-mode coupling waveguide. Signal.
  • the optical modulator includes: an input waveguide 100 configured to receive an initial optical signal; a tunable ring resonator, a tunable ring resonator, and The input waveguide 100 is coupled and connected, and is configured to perform resonance processing on the initial optical signal and output a first optical signal; the feedback loop waveguide 200, which is coupled and connected to the adjustable ring resonator, is configured to receive and transmit the first optical signal; The mode converter 400, the first mode converter 400 is coupled to the feedback loop waveguide 200, and the first mode converter 400 is configured to perform mode conversion processing on the first optical signal and output the second optical signal; the adjustable ring resonator is also It is configured to perform resonance processing on the second optical signal and output the third optical signal; the output waveguide 501 is coupled to the adjustable ring resonator, and is configured to receive and output the third optical signal; the second mode converter 500.
  • the input end of the second mode converter 500 is coupled to the output waveguide 501, and is configured to perform mode conversion processing on the third optical signal and output the fourth optical signal, so that the output signal is the optical signal of the target mode.
  • the tunable ring resonant cavity is mode multiplexed to modulate multiple modes of optical signals at the same time, so as to improve the extinction ratio of the optical signals.
  • the first mode converter 400 and the second mode converter 500 are the same mode converters that are set in opposite directions.
  • the adjustable ring resonant cavity includes: a first photoelectric modulation module, a second photoelectric modulation module, and a ring resonant cavity 300; the first photoelectric modulation module is configured to adjust the refractive index of the first region of the ring resonant cavity 300; The photoelectric modulation module is configured to adjust the refractive index of the second region of the ring cavity 300.
  • the first photoelectric modulation module and the second photoelectric modulation module are both silicon-based photoelectric modulation modules;
  • the silicon-based photoelectric modulation module includes: a first P-type heavily doped region 6061, a first N-type heavily doped region 6064, The first P-type lightly doped region 6062, the first N-type lightly doped region 6063;
  • the first P-type lightly doped region 6062 is disposed on the side of the first P-type heavily doped region 6061;
  • the region 6063 is disposed on the side of the first P-type lightly doped region 6062 away from the first P-type heavily doped region 6061;
  • the first N-type heavily doped region 6064 is disposed on the first N-type lightly doped region 6063 away from the first P Type lightly doped region 6062 side.
  • the tunable ring cavity 300 is a ridge waveguide, and the first region and the second region of the tunable ring cavity 300 are each composed of a first P-type lightly doped region 6062 and a first N-type lightly doped region 6063 And a first P-type lightly doped region 6062 and a first N-type lightly doped region 6063 can form a ridge waveguide.
  • the first P-type heavily doped region 6061 and the first N-type heavily doped region 6064 are respectively slab waveguides, and the first P-type heavily doped region 6061 is electrically connected to the first P-type lightly doped region 6062.
  • the N-type heavily doped region 6064 is electrically connected to the first N-type lightly doped region 6063 so that the slab waveguide and the ridge wave are conductively connected to form a PN junction optical modulator, and the first P-type lightly doped region 6062 A depletion region is formed around the junction interface with the first N-type lightly doped region 6063.
  • the first mode converter 400 includes: a first input single-mode waveguide 401, a first single-mode coupling waveguide 402, a first multi-mode coupling waveguide 403, a first conversion tapered waveguide 404, and a first output multi-mode waveguide 405;
  • One end of the input single-mode waveguide 401 is connected to the feedback loop waveguide 200, the other end of the first input single-mode waveguide 401 is connected to the first single-mode coupling waveguide 402;
  • one end of the first converted tapered waveguide 404 is connected to the first multi-mode coupling waveguide 403 connection, the other end of the first conversion tapered waveguide 404 is connected to one end of the first output multimode waveguide 405, and the other end of the first output multimode waveguide 405 is connected to the output waveguide 501; wherein, the first single-mode coupled waveguide 402 It is coupled to the first multimode coupling waveguide 403.
  • the second mode converter 500 includes: a second input multimode waveguide, a second single mode coupling waveguide, a second multimode coupling waveguide, a second conversion tapered waveguide, and a second output single mode waveguide; the second input multimode waveguide One end is connected to the output waveguide 501, the other end of the second input multimode waveguide is connected to one end of the second conversion tapered waveguide; the other end of the second conversion tapered waveguide is connected to the second multimode coupling waveguide; the second single mode coupling One end of the waveguide is connected to the second output single-mode waveguide; wherein the second single-mode coupling waveguide is coupled to the second multi-mode coupling waveguide.
  • the initial optical signal is a continuous optical signal in the TE0 mode.
  • the initial optical signal is received by the single-mode input waveguide 101, and the initial optical signal is transmitted to the multi-mode input waveguide 103 via the first tapered waveguide 102.
  • the multimode input waveguide 103 is coupled with the ring resonator 300, and the initial optical signal is transmitted to the ring resonator 300 to perform resonance processing on the initial optical signal and generate a first optical signal.
  • the first optical signal is in TE0 mode.
  • an electrical modulation signal is applied to the first P-type heavily doped region 6061, the first N-type heavily doped region 6064 through a plurality of electrodes to adjust the first P-type lightly doped region 6062, the first N-type lightly doped region 6064
  • the carrier concentration in the region 6063 in turn changes the effective refractive index of the propagating light mode in the waveguide.
  • the first optical signal accumulates phase changes during the transmission process of the ring resonator 300, and interferes in the first straight waveguide 303 and the second straight waveguide 304 of the ring resonator 300 respectively to convert the phase change into an intensity change, thereby modulating
  • the resonant wavelength in the ring cavity 300 can be adjusted.
  • the first optical signal of TE0 mode is converted into the second optical signal of TM0 mode by the first mode converter 400, and the second optical signal of TM0 mode is coupled into the ring cavity 300 via the first output multimode waveguide 405;
  • the resonant cavity 300 performs resonance processing on the second optical signal and generates a third optical signal to obtain a third optical signal with a high extinction ratio.
  • the third optical signal is in the TM0 mode.
  • the tunable ring resonant cavity is mode multiplexed to modulate multiple modes of optical signals at the same time, so as to improve the extinction ratio of the optical signals.
  • the third optical signal in the TM0 mode is converted into the fourth optical signal in the TE0 mode by the second mode converter 500 to obtain the optical signal in the TE0 mode with a high extinction ratio.
  • the abscissa is the applied voltage value (the absolute value of the voltage, in V) of the first optoelectronic modulation module and the second optoelectronic modulation module respectively, the ordinate on the left is the effective refractive index, and the ordinate on the right is The coordinate is the unit power loss (unit is dB/cm).
  • L41 is the relationship curve between the applied voltage value and the effective refractive index of the TE0 mode
  • L43 is the relationship curve between the applied voltage value and the effective refractive index of the TM0 mode
  • L42 is the relationship between the applied voltage value and the TE0 mode unit power loss (unit: dB/cm) Curve
  • L43 is the relationship curve between the applied voltage value and the unit power loss in TM0 mode.
  • the effective refractive index of the TE0 mode gradually increases, and the unit power loss becomes smaller;
  • the applied voltage value of the photoelectric modulation module gradually increases.
  • the effective refractive index of the TM0 mode gradually increases, and the unit power loss becomes smaller.
  • the optical signals in the TE0 mode and the TM0 mode are The phase change is accumulated in the ring cavity 300.
  • the optical signals of the TE0 mode and the TM0 mode interfere in the first straight waveguide 303 and the second straight waveguide 304 respectively to convert the phase change into the intensity change, thereby changing the resonance wavelength in the tunable ring cavity 300.
  • the abscissa is the wavelength (unit is nm), and the ordinate is the signal power (unit is dB).
  • LTE0 and LTM0 are curves of resonance wavelengths in different modes
  • LTE0+TM0 is the total resonance spectrum
  • L1 to LN are curves of the relationship between different applied voltages and resonance wavelengths.
  • the resonance wavelengths of the TE0 mode and the TM0 mode are completely overlapped. Therefore, the initial wavelength of the TE0 mode can be resonated to obtain the first optical signal of the TE0 mode, and the first optical signal of the TE0 mode can be obtained by the first mode converter 400.
  • An optical signal is converted into a second optical signal in the TM0 mode, and the second optical signal in the TM0 mode is coupled to the tunable ring resonator 300 via the first output multimode waveguide 405; the tunable ring resonator 300 responds to the second optical signal Perform resonance processing and generate a third optical signal to obtain a third optical signal with a high extinction ratio. That is, the optical signal is obtained by performing secondary resonance processing on the optical signal to obtain an optical signal with a high extinction ratio, and the optical signal of two different modes is resonantly processed through the same adjustable ring resonator 300.
  • an optical signal with a high extinction ratio is obtained by resonating the TE0 mode and the TM0 mode respectively.
  • the resonance peak gradually shifts.
  • the reverse voltage applied to the corresponding curve of L1 is 0V
  • the reverse voltage applied to the corresponding curve of LN is 10V.
  • the resonance wavelength gradually increases.
  • the optical modulator includes: an input waveguide 100 configured to receive an initial optical signal; a tunable ring resonator 300, a tunable ring resonator 300 is coupled to the input waveguide 100, and is configured to perform resonance processing on the initial optical signal and output the first optical signal; the feedback loop waveguide 200, coupled to the adjustable ring resonator 300, is configured to receive and transmit the first optical signal ; The first mode converter 400, the first mode converter 400 is coupled to the feedback loop waveguide 200, and the first mode converter 400 is configured to perform mode conversion processing on the first optical signal and output the second optical signal; adjustable ring The resonant cavity 300 is further configured to perform resonance processing on the second optical signal and output a third optical signal; the output waveguide 501 is coupled to the adjustable ring resonant cavity 300 and configured to receive and output the third optical signal; The second mode converter 500, the input end of the second mode converter 500 is coupled to the output waveguide
  • the first mode converter 400 and the second mode converter 500 are the same mode converters that are set in opposite directions.
  • the tunable ring cavity 300 is a ridge waveguide, and the first region and the second region of the tunable ring cavity 300 are each composed of a first P-type lightly doped region 6062 and a first N-type lightly doped region 6063 And a first P-type lightly doped region 6062 and a first N-type lightly doped region 6063 can form a ridge waveguide.
  • the first P-type heavily doped region 6061 and the first N-type heavily doped region 6064 are respectively slab waveguides, and the first P-type heavily doped region 6061 is electrically connected to the first P-type lightly doped region 6062.
  • the N-type heavily doped region 6064 is electrically connected to the first N-type lightly doped region 6063 so that the slab waveguide and the ridge wave are conductively connected to form a PN junction optical modulator, and the first P-type lightly doped region 6062 A depletion region is formed around the junction interface with the first N-type lightly doped region 6063.
  • the first mode converter 400 includes: a first input single-mode waveguide 401, a first single-mode coupling waveguide 402, a first multi-mode coupling waveguide 403, and a first output multi-mode waveguide 405; one end of the first input single-mode waveguide 401 is connected to The feedback loop waveguide 200 is connected, the other end of the first input single-mode waveguide 401 is connected to the first single-mode coupling waveguide 402; one end of the first output multi-mode waveguide 405 is connected to the first multi-mode coupling waveguide 403, the first output is multiple The other end of the mode waveguide 405 is connected to the output waveguide 501; wherein the first single-mode coupling waveguide 402 is coupled to the first multi-mode coupling waveguide 403.
  • the second mode converter 500 includes: a second input multimode waveguide, a second single mode coupling waveguide, a second multimode coupling waveguide, a second conversion tapered waveguide, and a second output single mode waveguide; the second input multimode waveguide One end is connected to the output waveguide 501, the other end of the second input multimode waveguide is connected to one end of the second conversion tapered waveguide; the other end of the second conversion tapered waveguide is connected to the second multimode coupling waveguide; the second single mode coupling One end of the waveguide is connected to the second output single-mode waveguide; wherein the second single-mode coupling waveguide is coupled to the second multi-mode coupling waveguide.
  • the initial optical signal is a continuous optical signal in the TE0 mode.
  • the initial optical signal is received by the single-mode input waveguide 101, and the initial optical signal is transmitted to the multi-mode input waveguide 103 via the first tapered waveguide 102.
  • the multimode input waveguide 103 is coupled with the tunable ring resonator 300, and the initial optical signal is transmitted to the tunable ring resonator 300 to perform resonance processing on the initial optical signal and generate a first optical signal.
  • the first optical signal is in TE0 mode.
  • an electrical modulation signal is applied to the first P-type heavily doped region 6061, the first N-type heavily doped region 6064 through a plurality of electrodes to adjust the first P-type lightly doped region 6062, the first N-type lightly doped region 6064
  • the carrier concentration in the region 6063 in turn changes the effective refractive index of the propagating light mode in the waveguide.
  • the first optical signal accumulates phase changes during the transmission of the tunable ring resonator 300, and interferes in the first straight waveguide 303 and the second straight waveguide 304 of the tunable ring resonator 300 to convert the phase change into intensity. Change, thereby modulating the resonant wavelength in the tunable ring cavity 300.
  • the first optical signal in TE0 mode is converted into a second optical signal in TE1 mode by the first mode converter 400, and the second optical signal in TE1 mode is coupled to the adjustable ring cavity 300 via the first output multimode waveguide 405;
  • the adjustable ring resonant cavity 300 performs resonance processing on the second optical signal and generates a third optical signal to obtain a third optical signal with a high extinction ratio.
  • the third optical signal is in TE1 mode.
  • the third optical signal in the TE1 mode is converted into the fourth optical signal in the TE0 mode by the second mode converter 500 to obtain the optical signal in the TE0 mode with a high extinction ratio.
  • the abscissa is the applied voltage value (the absolute value of the voltage, in V) of the first optoelectronic modulation module and the second optoelectronic modulation module respectively, the ordinate on the left is the effective refractive index, and the ordinate on the right is The coordinate is the unit power loss (unit is dB/cm).
  • L61 is the relationship curve between applied voltage value and TE0 mode effective refractive index
  • L63 is the relationship curve between applied voltage value and TE1 mode effective refractive index
  • L62 is the relationship curve between applied voltage value and TE0 mode unit power loss
  • L43 is the applied voltage value The relationship curve with the unit power loss in TE1 mode.
  • the effective refractive index of the TE0 mode gradually increases, and the unit power loss becomes smaller;
  • the applied voltage value of the photoelectric modulation module gradually increases.
  • the effective refractive index of the TE1 mode gradually increases, and the unit power loss decreases.
  • the optical signals of the TE0 mode and the TE1 mode are changed.
  • the phase change is accumulated in the adjustable ring cavity 300.
  • the optical signals of the TE0 mode and the TE1 mode interfere in the first straight waveguide 303 and the second straight waveguide 304 respectively to convert the phase change into the intensity change, thereby changing the resonance wavelength in the tunable ring cavity 300.
  • the abscissa is the wavelength (unit is nm), and the ordinate is the signal power (unit is dB).
  • LTE0 and LTE1 are curves of resonance wavelengths in different modes
  • LTE0+TE1 is the total resonance spectrum
  • L1 to LN are curves of the relationship between different applied voltages and resonance wavelengths.
  • the resonance wavelengths of the TE0 mode and the TE1 mode are completely overlapped. Therefore, the initial wavelength of the TE0 mode can be resonated to obtain the first optical signal of the TE0 mode, and the first optical signal of the TE0 mode can be obtained by the first mode converter 400.
  • An optical signal is converted into a second optical signal in TM0 mode, and the second optical signal in TE1 mode is coupled to the tunable ring resonator 300 via the first output multimode waveguide 405; the tunable ring resonator 300 responds to the second optical signal Perform resonance processing and generate a third optical signal to obtain a third optical signal with a high extinction ratio. That is, the optical signal is obtained by performing secondary resonance processing on the optical signal to obtain an optical signal with a high extinction ratio, and the optical signal of two different modes is resonantly processed through the same adjustable ring resonator 300.
  • L1 to LN are the relationship curves between different applied voltages and resonance wavelength. Among them, the reverse voltage applied to the corresponding curve of L1 is 0V, and the reverse voltage applied to the corresponding curve of LN is 10V.
  • the resonance wavelength gradually increases.
  • an optical modulator control method including: receiving the initial optical signal through the input waveguide 100; resonating the initial optical signal through the adjustable ring resonator 300 and outputting the first optical signal; and outputting the first optical signal through the feedback loop waveguide 200 receives the first optical signal and transmits it to the first mode converter 400; the first mode converter 400 is configured to perform mode conversion processing on the first optical signal and output the second optical signal, and passes through the adjustable ring resonator 300 Perform resonance processing on the second optical signal and output a third optical signal; receive and output the third optical signal through the output waveguide 501.
  • the initial optical signal is received through the input waveguide 100 and transmitted to the tunable ring resonator 300, and the initial optical signal resonates in the tunable ring resonator 300. Since the initial optical signal is a continuous optical signal, after the tunable ring resonator 300 performs resonance processing on the initial optical signal, the amplitude of the optical signal at a specific frequency will be amplified to generate the first optical signal.
  • the first optical signal is transmitted to the first mode converter 400 through the loop feedback loop waveguide 200, and the first mode converter 400 performs mode conversion processing on the first optical signal and outputs the second optical signal.
  • the third optical signal passes through and The tunable ring cavity 300 is coupled to the output waveguide 501 to output. That is, the tunable ring resonator 300 is multiplexed to simultaneously perform resonance processing on the initial optical signal and the second optical signal to amplify the amplitude of the optical signal of a specific frequency, thereby obtaining a third optical signal with a better extinction ratio.
  • the first mode converter 400 can convert the first optical signal into optical signals of different orthogonal modes or optical signals of different order modes. Since the second optical signal and the initial optical signal are optical signals of different modes, and the tunable ring resonator 300 can support multi-mode optical signal transmission, the second optical signal and the initial optical signal are transmitted in the middle tunable ring resonator 300. , The two transmit separately without interference or crosstalk.
  • the microring cavity can be a circular adjustable ring cavity 300 or a racetrack type microring cavity.
  • the curved waveguide of the microring cavity supports the transmission of more than two modes in the microring cavity.
  • the tunable ring resonant cavity is mode multiplexed to modulate multiple modes of optical signals at the same time, so as to improve the extinction ratio of the optical signals.
  • the optical modulator control method further includes: performing mode conversion processing on the third optical signal through the second mode converter 500 and outputting the fourth optical signal; the input end of the second mode converter 500 is coupled to the output waveguide 501.
  • the first mode converter 400 and the second mode converter 500 are the same mode converters that are set in opposite directions.
  • the initial optical signal and the first optical signal are the optical signals in TE0 mode.
  • the first optical signal is mode-converted by the first mode converter 400 and the second optical signal in TE1 mode or TM0 mode is output, and passes through the adjustable ring resonator. 300 performs resonance processing on the second optical signal to generate a third optical signal.
  • the input end of the second mode converter 500 is coupled to the output waveguide 501 to perform mode conversion processing on the third optical signal and output the fourth optical signal.
  • the third optical signal is an optical signal in TE1 mode or TM0 mode
  • the fourth optical signal is an optical signal in TE0 mode.
  • the third optical signal of TE1 mode or TM0 mode when transmitted to the first mode converter 400 via the feedback loop waveguide 200, the third optical signal will suffer loss to ensure that the output signal of the first mode converter 400 is the first optical signal. ;
  • the first optical signal of the TE0 mode is transmitted to the second mode converter 500 via the output waveguide 501, the first optical signal will experience optical loss to ensure that the output signal of the second mode converter 500 is the fourth optical signal.
  • the optical modulator control method further includes: adjusting the refractive index of the first region of the adjustable ring resonator 300 by setting the first photoelectric modulation module; adjusting the refractive index of the adjustable ring resonator 300 by setting the second photoelectric modulation module The refractive index of the second region.
  • the first photoelectric modulation module and the second photoelectric modulation module adjust the refractive index of different regions of the adjustable ring cavity 300 respectively.
  • the initial optical signal and the second optical signal accumulate the phase change during the transmission process of the first area and the second area, and the phase change in the adjustable ring cavity 300 Interference occurs in the waveguide 303 and the second straight waveguide 304 respectively to convert the phase change into the intensity change.
  • the optical modulator control method further includes: the initial optical signal, the first optical signal, and the fourth optical signal are in the TE0 mode; the second optical signal and the third optical signal are in either of the TM0 mode or the TE1 mode.
  • the optical signal is converted by the first mode converter 400 and the second mode converter 500, so that the optical signals of different modes resonate in the adjustable ring resonator 300 without mutual interference.
  • the first mode converter 400 and the second mode converter 500 are the same mode converters that are set in opposite directions.
  • the initial optical signal and the first optical signal are the optical signals in TE0 mode.
  • the first optical signal is mode-converted by the first mode converter 400 and the second optical signal in TE1 mode or TM0 mode is output, and passes through the adjustable ring resonator. 300 performs resonance processing on the second optical signal to generate a third optical signal.
  • the input end of the second mode converter 500 is coupled to the output waveguide 501 to perform mode conversion processing on the third optical signal and output the fourth optical signal.
  • the third optical signal is an optical signal in TE1 mode or TM0 mode
  • the fourth optical signal is an optical signal in TE0 mode.
  • the embodiment of the application includes: performing resonance processing on the initial optical signal and outputting the first optical signal through the adjustable ring resonator, the first mode converter performing the mode conversion processing on the first optical signal and outputting the second optical signal, and passing the
  • the adjustable ring resonant cavity performs resonance processing on the second optical signal and outputs a third optical signal
  • the adjustable ring resonant cavity performs secondary superposition resonance and modulation processing on the optical signal to improve the extinction ratio of the optical signal. That is, the tunable ring resonant cavity is mode-multiplexed to modulate the optical signals of multiple modes at the same time, so as to improve the extinction ratio of the optical signals.
  • the device embodiments described above are merely illustrative, and the units described as separate components may or may not be physically separated, that is, they may be located in one place, or they may be distributed on multiple network units. Some or all of the modules can be selected according to actual needs to achieve the objectives of the solutions of the embodiments.
  • computer storage medium includes volatile and non-volatile implementations in any method or technology configured to store information (such as computer-readable instructions, data structures, program modules, or other data). Lost, removable and non-removable media.
  • Computer storage media include but are not limited to RAM, ROM, EEPROM, flash memory or other memory technologies, CD-ROM, digital versatile disk (DVD) or other optical disk storage, magnetic cassettes, magnetic tapes, magnetic disk storage or other magnetic storage devices, or Any other medium that is set to store desired information and can be accessed by a computer.
  • communication media usually contain computer-readable instructions, data structures, program modules, or other data in a modulated data signal such as carrier waves or other transmission mechanisms, and may include any information delivery media. .

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Abstract

一种光调制器及其控制方法，其中，光调制器包括：输入波导(100)，用于接收初始光信号；可调环形谐振腔(300)，可调环形谐振腔(300)与输入波导(100)耦合连接，用于对初始光信号进行谐振及调制处理并输出第一光信号；反馈回路波导(200)，与可调环形谐振腔(300)耦合连接，用于接收并传输第一光信号；第一模式转换器(400)，第一模式转换器(400)与反馈回路波导(200)耦合连接，用于对第一光信号进行转模处理并输出第二光信号；可调环形谐振腔(300)还用于对第二光信号进行谐振及调制处理并输出第三光信号；输出波导(501)，输出波导(501)与可调环形谐振腔(300)耦合连接，用于接收并输出第三光信号。

Description

光调制器及其控制方法
相关申请的交叉引用
本申请基于申请号为202010437061.X、申请日为2020年05月21日的中国专利申请提出，并要求该中国专利申请的优先权，该中国专利申请的全部内容在此引入本申请作为参考。
技术领域
本申请实施例涉及但不限于光电子器件领域，尤其涉及一种光调制器及其控制方法。
背景技术
随着光电子技术的发展，硅基集成光电子技术具有集成度高、CMOS工艺兼容、可大规模批量生产等优点，已成为光通信领域集成化的主流研究方向。
现代社会对数据通信容量的需求持续不断地攀升，对光通信模块(如光调制器)的指标(如消光比)要求越来越高。然而，在一些情形下的光调制器存在消光比较低的问题。
发明内容
本申请实施例提供了光调制器及其控制方法。
第一方面，本申请实施例提供了一种光调制器，光调制器包括：输入波导，被设置为接收初始光信号；可调环形谐振腔，与所述输入波导耦合连接，被设置为对所述初始光信号进行谐振处理并输出第一光信号；反馈回路波导，与可调环形谐振腔耦合连接，被设置为接收并传输所述第一光信号；第一模式转换器，与所述反馈回路波导耦合连接，被设置为对第一光信号进行转模处理并输出第二光信号；所述可调环形谐振腔还被设置为对所述第二光信号进行谐振处理并输出第三光信号；输出波导，与所述可调环形谐振腔耦合连接，被设置为接收并输出所述第三光信号。
第二方面，本申请实施例提供了一种光调制器控制方法，包括：通过输入波导接收初始光信号；通过可调环形谐振腔对所述初始光信号进行谐振处理并输出第一光信号；通过反馈回路波导接收所述第一光信号并传输至第一模式转换器；通过所述第一模式转换器被设置为对第一光信号进行转模处理并输出第二光信号；通过所述可调环形谐振腔对所述第二光信号进行谐振处理并输出第三光信号；通过输出波导接收并输出所述第三光信号。
本申请的其它特征和优点将在随后的说明书中阐述，并且，部分地从说明书中变得显而易见，或者通过实施本申请而了解。本申请的目的和其他优点可通过在说明书、权利要求书以及附图中所特别指出的结构来实现和获得。
附图说明
附图用来提供对本申请技术方案的进一步理解，并且构成说明书的一部分，与本申请的实施例一起用于解释本申请的技术方案，并不构成对本申请技术方案的限制。
图1是本申请一实施例提供的光调制器结构示意图；
图2A是本申请一实施例中的硅基光电调制模组模组的截面结构示意图；
图2B是本申请另一实施例中的硅基光电调制模组模组的截面结构示意图；
图3A是本申请一实施例中的第一/第二模式转换器结构示意图；
图3B是本申请另一实施例中的第一/第二模式转换器结构示意图；
图4A是本申请另一实施例提供的对TE0模式的第一光信号进行调制的仿真示意图；
图4B是本申请另一实施例提供的对TM0模式的第二光信号进行调制的仿真示意图；
图5A是本申请另一实施例提供的谐振光谱仿真示意图；
图5B是本申请另一实施例提供的谐振光谱漂移仿真示意图；
图6A是本申请另一实施例提供的对TE0模式的第一光信号进行调制的仿真示意图；
图6B是本申请另一实施例提供的对TE1模式的第二光信号进行调制的仿真示意图；
图7A是本申请另一实施例提供的谐振光谱仿真示意图；
图7B是本申请另一实施例提供的谐振光谱漂移仿真示意图。
附图标记：100、输入波导；101、单模输入波导；102、第一拉锥波导；103、多模输入波导；200、反馈回路波导；201、反馈多模波导；202、弧形波导；203、第二拉锥波导；300、环形谐振腔；301、第一半环波导；302、第二半环波导；303、第一直波导；304、第二直波导；400、第一模式转换器；401、第一输入单模波导；402、第一单模耦合波导；403、第一多模耦合波导；404、第一转换拉锥波导；405、第一输出多模波导；500、第二模式转换器；501、输出波导；601、第一电极；602、第二电极；6011、第一金属过孔；6021、第二金属过孔；603、上包层；604、下表面；605、硅衬底层；606、硅波导层；6061、第一P型重掺杂区域；6062、第一P型轻掺杂区域；6063、第一N型轻掺杂区域；6064、第一N型重掺杂区域。
具体实施方式
为了使本申请的目的、技术方案及优点更加清楚明白，以下结合附图及实施例，对本申请进行进一步详细说明。应当理解，此处所描述的具体实施例仅用以解释本申请，并不用于限定本申请。不冲突的情况下，本申请中的实施例及实施例中的特征可以相互任意组合。
需要说明的是，虽然在装置示意图中进行了功能模块划分，在流程图中示出了逻辑顺序，但是在某些情况下，可以以不同于装置中的模块划分，或流程图中的顺序执行所示出或描述的步骤。说明书和权利要求书及上述附图中的术语“第一”、“第二”等是用于区别类似的对象，而不必用于描述特定的顺序或先后次序。
随着光电子技术的发展，硅基集成光电子技术具有集成度高、CMOS工艺兼容、可大规模批量生产等优点，已成为光通信领域集成化的主流研究方向。在光通信系统中，模式复用是一种有效提升单个通道传输容量的技术，通过多个模式在同一光纤/光波导信道中传输，大大提升了同一信道中光信号的密度，使总传输容量实现倍增。在片上集成光互连系统中，模式复用器件的研究也已日趋成熟，可有效提升片上互连的传输密度。
现代社会对数据通信容量的需求持续不断地攀升，对光通信模块(如光调制器)的指标(如消光比)要求越来越高。然而，在一些情形下的光调制器存在消光比较低的问题。
例如，由于硅材料对温度变化的敏感性，微环调制器由温度引起的波长漂移会使光调制器的工作具有不稳定性，对载流子耗尽型微环调制器来说，提升调制效率可通过增加硅掺杂浓度的方法实现，但会增加波导内光的吸收损耗，且消光比较低。
基于此，本申请实施例提供了光调制器及其控制方法，能够通过可调环形谐振腔对光信号进行二次叠加谐振调节，以提高光信号的消光比。
请参照图1，光调制器，包括：输入波导100，被设置为接收初始光信号；可调环形谐振腔300，与输入波导100耦合连接，被设置为对初始光信号进行谐振及调制处理并输出第一光信号；反馈回路波导200，与可调环形谐振腔300耦合连接，被设置为接收并传输第一光信号；第一模式转换器400，第一模式转换器400与反馈回路波导200耦合连接，第一模式转换器400被设置为对第一光信号进行转模处理并输出第二光信号；可调环形谐振腔300还被设置为对第二光信号进行谐振及调制处理并输出第三光信号；输出波导501，输出波导501与可调环形谐振腔300耦合连接，被设置为接收并输出第三光信号。
通过输入波导100接收初始光信号并传输至环形谐振腔300中，初始光信号在环形谐振腔300中发生谐振。由于初始光信号为连续光信号，在环形谐振腔300对初始光信号进行谐振处理后，特定频率的光信号的振幅会被放大并产生第一光信号。第一光信号通过环反馈回路波导200传输至第一模式转换器400，第一模式转换器400对第一光信号进行转模处理并输出第二光信号。通过将第二光信号再次耦合至可调环形谐振腔300中，并进行谐振处理以对第二光信号中特定频率的光信号的振幅进行放大从而产生第三光信号，第三光信号通过与可调环形谐振腔300耦合连接的输出波导501输出。即通过对环形谐振腔300进行复用以对初始光信号、第二光信号进行谐振处理并放大特定频率的光信号的振幅，从而获得具有更高消光比的第三光信号。 即通过对可调环形谐振腔进行模式复用以对多个模式的光信号同时进行调制，以提高光信号的消光比。
其中，第一模式转换器400可将第一光信号转换为不同正交模式的光信号或者不同阶模的光信号。由于第二光信号与初始光信号为不同模式的光信号，且环形谐振腔300可支持多模式光信号传输，故第二光信号与初始光信号在中环形谐振腔300传输时，两者各自传输且不发生干涉或串扰。环形谐振腔300可为圆形微环谐振腔或跑道型微环谐振腔，微环谐振腔的弯曲波导支持两种以上模式在微环谐振腔传输。
此外，通过第一光电调制模组、第二光电调制模组调节环形谐振腔300腔内的有效折射率，以使得光信号在腔内传输时积累相位变化并通过干涉效应将相位变化转变为强度变化以对腔内的光信号谐振波长进行调制。
在一些实施例中，光调制器还包括：第二模式转换器500，第二模式转换器500的输入端与输出波导501耦合连接，被设置为对第三光信号进行转模处理并输出第四光信号，以使得光调制器的输出信号为目标模式的光信号。
其中，初始光信号、第一光信号、第四光信号为第一模式光信号，第二光信号、第三光信号为第二模式光信号。
通过可调环形谐振腔对第一模式的初始光信号进行谐振及调制处理以生成第一模式的第一光信号；通过第一模式转换器400对第一模式的第一光信号进行转模处理以生成第二模式的第二光信号；通过可调环形谐振腔对第二模式的第二光信号进行谐振及调制处理以生成第二模式的第三光信号；通过第二模式转换器500对第二模式的第三光信号进行转模处理以生成第一模式的第四光信号。
需要说明的是，第一模式、第二模式可为任意的光模式。以下，以第一模式为TE0模式、第二模式为TE1模式或TM0模式为例进行说明。
在一些具体实施例中，第一模式转换器400与第二模式转换器500为相同且反向设置的模式转换器。初始光信号与第一光信号为TE0模式的光信号，通过第一模式转换器400将第一光信号进行模式转换并输出TE1模式或TM0模式的第二光信号，并通过可调环形谐振腔300对第二光信号进行谐振处理以产生第三光信号。第二模式转换器500的输入端与输出波导501耦合连接以对第三光信号进行转模处理并输出第四光信号。其中，第三光信号为TE1模式或TM0模式的光信号，第四光信号为TE0模式的光信号。通过设置第一模式转换器400与第二模式转换器500，以使得初始光信号及第四光信号具有相同模式，即光调制器的输出信号与输入信号具有相同模式。
此外，TE1模式或TM0模式的第三光信号经由反馈回路波导200传输至第一模式转换器400时，第三光信号会出现损耗以保证第一模式转换器400的输入信号为第一光信号；TE0模式的第一光信号经由输出波导501传输至第二模式转换器500时，第一光信号会出现光损耗以保证第二模式转换器500的输出信号为第四光信号。通过在反馈回路波导200中设置仅支持TE0模式传输的单模波导以对TE1模式或TM0模式的第三光信号在传输过程中逐渐被损耗。
在一些实施例中，可调环形谐振腔包括第一耦合区和第二耦合区；可调环形谐振腔通过第一耦合区与输入波导100耦合连接，可调环形谐振腔通过第一耦合区与反馈回路波导200耦合连接；第一模式转换器400通过第二耦合区与可调环形谐振腔耦合连接，可调环形谐振腔通过第二耦合区与输出波导501耦合连接。
通过第一耦合区与输入波导100耦合、反馈回路波导200连接，以使得初始光信号可由输入波导100输入至环形谐振腔300中，第一光信号可由环形谐振腔300中输入至反馈回路波导200；通过第二耦合区与输出波导501耦合连接，以使得第二光信号可由输出波导501输入至环形谐振腔300中，第四光信号可由环形谐振腔300中输出至输出波导501。
其中，第一模式转换器400、第二模式转换器500分别包括：硅衬底层；二氧化硅下包层，设置于硅衬底层一侧；硅波导层，设置于二氧化硅下包层远离硅衬底层一侧；二氧化硅上包层，设置于硅波导层远离二氧化硅下包层一侧。
可调环形谐振腔还包括：第一光电调模组、第二光电调模组、环形谐振腔300；第一光电调制模组被设 置为调节环形谐振腔300的第一区域的折射率；第二光电调制模组被设置为调节环形谐振腔300的第二区域的折射率。环形谐振腔300包括：第一直波导303、第二直波导304、第一半环波导301、第二半环波导302，第一半环波导301分别与第一直波导303、第二直波导304的一端连接，第二半环波导302分别与第一直波导303、第二直波导304的另一端连接，以构成一环形波导。
其中，第一光电调制模组、第二光电调制模组分别调节环形谐振腔300不同区域的折射率。通过调节第一区域、第二区域的折射率以使得初始光信号、第二光信号在第一区域、第二区域传输过程中积累相位变化，并在环形谐振腔300中的第一直波导303、第二直波导304中分别发生干涉，以将相位变化转换为强度变化。
在一些实施例中，第一直波导303、第二直波导304分别为第一耦合区、第二耦合区；第一半环波导301、第二半环波导302为环形谐振腔300的第一区域、第二区域。
在一些实施例中，通过增加光电调制模组的数量以对环形谐振腔300内的多个区域的有效折射率进行同步调制，以调制环形谐振腔300腔内光信号的相位变化。进一步地，通过设置环形光电调制模组以对谐振腔所有区域的有效折射率进行同步调制。
在一些实施例中，第一区域可为第一半环波导301，第二区域可为第二半环波导302。
请参照图2A，第一光电调制模组和第二光电调制模组均为硅基光电调制模组模组；硅基光电调制模组模组包括依次排列设置的：第一P型重掺杂区域6061、第一N型重掺杂区域6064、第一P型轻掺杂区域6062、第一N型轻掺杂区域6063；第一P型轻掺杂区域6062设置于第一P型重掺杂区域6061一侧；第一N型轻掺杂区域6063设置于第一P型轻掺杂区域6062远离第一P型重掺杂区域6061一侧；第一N型重掺杂区域6064设置于第一N型轻掺杂区域6063远离第一P型轻掺杂区域6062一侧。
其中，环形谐振腔300为脊型波导，环形谐振腔300的第一区域由一个第一P型轻掺杂区域6062和一个第一N型轻掺杂区域6063构成，且一个第一P型轻掺杂区域6062和一个第一N型轻掺杂区域6063可构成脊型波导。第一P型重掺杂区域6061、第一N型重掺杂区域6064分别为平板型波导，且第一P型重掺杂区域6061与第一P型轻掺杂区域6062电连接，第一N型重掺杂区域6064与第一N型轻掺杂区域6063电连接以使得平板型波导与脊型波导电连接，以构成第一光电调制模组，且第一P型轻掺杂区域6062和第一N型轻掺杂区域6063结合界面周围形成耗尽区。其中，脊型波导与第一半环波导301可为同一结构，且通过复用以实现可调环形谐振腔腔内光信号的谐振及调制处理。
此外，可调环形谐振腔300的第二区域由一个第一P型轻掺杂区域6062和一个第一N型轻掺杂区域6063构成，且一个第一P型轻掺杂区域6062和一个第一N型轻掺杂区域6063可构成脊型波导。第一P型重掺杂区域6061、第一N型重掺杂区域6064分别为平板型波导，且第一P型重掺杂区域6061与第一P型轻掺杂区域6062电连接，第一N型重掺杂区域6064与第一N型轻掺杂区域6063电连接以使得平板型波导与脊型波导电连接，以构成第二光电调制模组，且第一P型轻掺杂区域6062和第一N型轻掺杂区域6063结合界面周围形成耗尽区。其中，脊型波导与第二半环波导302可为同一结构，且通过复用以实现可调环形谐振腔300腔内光信号的谐振及调制处理。
在本实施例中，第一P型重掺杂区域6061、第一N型重掺杂区域6064、第一P型轻掺杂区域6062、第一N型轻掺杂区域6063同层设置以形成一硅波导层606。第一光电调制模组、第二光电调制模组还包括：设置于硅波导层606上表面的上包层603；设置于硅波导层606下表面604的下包层；设置于下包层远离硅波导层606一侧的衬底层。其中，衬底层为硅衬底层605，上包层603、下包层为二氧化硅包层。
此外，上包层603远离硅波导层606一侧设有若干第一电极601、若干第二电极602，且若干第一电极601、若干第二电极602呈半环形分布。上包层603中设有第一金属过孔6011、第二金属过孔6021。通过第一金属过孔6011、第二金属过孔6021，以使得第一P型重掺杂区域6061、第一N型重掺杂区域6064分别与第一电极601、第二电极602对应连接。通过第一电极601、第二电极602与外部电信号源电连接，以将电调制信号施加至第一P型重掺杂区域6061、第一N型重掺杂区域6064中，从而调节第一P型轻掺杂区域6062、第一N型轻掺杂区域6063中的载流子浓度，进而改变波导内传输光模式的有效折射率。微环谐振腔的脊型波 导支持多种模式传输，其中，波导层主要材料为硅，总厚度为340nm，脊型波导的脊高为290nm，脊型波导的宽度为500nm，平板波导高为50nm。
在一些实施例中，根据具体调制要求，可对波导层中的具体参数(例如波导厚度、脊高、宽度)进行适应性调整。
请参照图2B，如图2B所示，在一些实施例中，第一P型轻掺杂区域6062包括至少两个表面，第一N型轻掺杂区域6063覆盖第一P型轻掺杂区域6062的至少两个表面；或者，第一N型轻掺杂区域6063包括至少两个表面，第一P型轻掺杂区域6062覆盖第一N型轻掺杂区域6063的至少两个表面。
其中，第一N型轻掺杂区域6063覆盖第一P型轻掺杂区域6062的至少两个表面，以构成L型PN结掺杂结构。通过使得第一N型轻掺杂区域6063覆盖第一P型轻掺杂区域6062的至少两个表面，可提高光信号模场与耗尽区的交叠面积，以有效提高第一光电调制模组的调制效率，且采用L型PN结掺杂结构可增加环形谐振腔300被调制的区域的折射率变化范围。
在一些实施例中，第一P型轻掺杂区域6062覆盖第一N型轻掺杂区域6063的至少两个表面，以构成L型PN结掺杂结构。通过使得第一P型轻掺杂区域6062覆盖第一N型轻掺杂区域6063的至少两个表面，可提高光信号模场与耗尽区的交叠面积，以有效提高第一光电调制模组调制效率，且采用L型PN结掺杂结构可增加环形谐振腔300被调制的区域的折射率变化范围。
请再参照图1，输入波导100包括：单模输入波导101、第一拉锥波导102、多模输入波导103；
第一拉锥波导102的一端与多模输入波导103连接，第一拉锥波导102的另一端与单模输入波导101连接。由单模输入波导101接收初始光信号接收，并经由第一拉锥波导102将初始光信号传输至多模输入波导103。通过多模输入波导103与可调环形谐振腔300耦合，将初始光信号传输至可调环形谐振腔300以对初始光信号进行谐振处理并产生第一光信号。
反馈回路波导200包括：反馈多模波导201、弧形波导202、第二拉锥波导203；反馈多模波导201的一端与多模输入波导103连接，反馈多模波导201的另一端与第二拉锥波导203的一端连接；第二拉锥波导203的另一端与弧形波导202的一端连接；弧形波导202的另一端与第一模式转换器400连接。其中，反馈多模波导201与可调环形谐振腔耦合连接以接收第一光信号，并经由第二拉锥波导203入射至弧形波导202中；第一光信号经由弧形波导202入射至第一模式转换器400中。
其中，弧形波导202包括：硅衬底层605；二氧化硅下包层，设置于硅衬底层605一侧；硅波导层606，设置于二氧化硅下包层远离硅衬底层605一侧；二氧化硅上包层603，设置于硅波导层606远离二氧化硅下包层一侧。
其中，反馈多模波导201与多模输入波导103可为一体结构，通过对同一多模波导进行复用，以实现初始光信号的输出功能及第一光信号的输出功能。
弧形波导202包括：硅衬底层；二氧化硅下包层，设置于硅衬底层一侧；硅波导层，设置于二氧化硅下包层远离硅衬底层一侧；二氧化硅上包层，设置于硅波导层远离二氧化硅下包层一侧。其中，弧形波导202为单模波导，只支持TE0模式的光信号传输，因此，其他模式的光信号在弧形波导202传输过程中会发生光损耗，使得第一模式转换器400的输入信号仅为TE0模式的光信号。
硅波导层606设有脊型波导或条形波导。当硅波导层606设置的波导为条形波导时，弧形波导202与第一模式转换器400之间设有过渡波导以进行光信号匹配。其中，过渡波导可为脊型波导线性过渡到条型波导的拉锥型波导。
请参照图1、图3A，在一些实施例中，第一模式转换器400包括：第一输入单模波导401，第一输入单模波导401的一端与反馈回路波导200连接；第一单模耦合波导402，第一单模耦合波导402的一端与第一输入单模波导401的另一端连接；第一多模耦合波导403，与第一单模耦合波导402耦合连接；第一转换拉锥波导404，第一转换拉锥波导404的一端与第一多模耦合波导403连接；第一输出多模波导405，第一输出多模波导405的一端与第一转换拉锥波导404的另一端连接，第一输出多模波导405的另一端与输出波导501 连接。
其中，第一输出多模波导405与输出波导501可为一体结构，通过对同一多模波导进行复用，以实现第二光信号的输出功能及第三光信号的输出功能。
在一些具体实施例中，第一单模耦合波导402与第一多模耦合波导403耦合连接并满足相位匹配条件，第一光信号经由第一输入单模波导401传输至第一单模耦合波导402中，并经由一定的耦合长度传输后，第一光信号耦合至第一多模耦合波导403中并转换为其他模式的光信号传输至第一转换拉锥波导404。第一转换拉锥波导404对其他模式的第一光信号进行转模式处理并输出第二光信号，经由第一输出多模波导405耦合至可调环形谐振腔中，可调环形谐振腔300对第二光信号进行谐振处理以产生第三光信号。
例如，第一光信号为TE0模式，经由第一多模耦合波导403、第一单模耦合波导402进行耦合传输后，产生TE1模式的光信号；TE1模式的光信号在第一转换拉锥波导404中传输并逐渐转换为TM0模式的第二光信号，并经由第一输出多模波导405将TM0模式的第二光信号耦合至可调环形谐振腔300中。
参照图3B，在一些实施例中，第一模式转换器400包括：第一输入单模波导401，第一输入单模波导401的一端与反馈回路波导200连接；第一单模耦合波导402，第一单模耦合波导402的一端与第一输入单模波导401的另一端连接；第一多模耦合波导403，与第一单模耦合波导402耦合连接；第一输出多模波导405，第一输出多模波导405的一端与第一多模耦合波导403的一端连接，第一输出多模波导405的另一端与输出波导501连接。
在一些具体实施例中，第一单模耦合波导402与第一多模耦合波导403耦合连接并满足相位匹配条件，第一光信号经由第一输入单模波导401传输至第一单模耦合波导402中，并经由一定的耦合长度传输后，第一光信号耦合至第一多模耦合波导403中并转换为其他模式的第二光信号传输至第一输出多模波导405；第二光信号经由第一输出多模波导405耦合至可调环形谐振腔300中，可调环形谐振腔300对第二光信号进行谐振处理以产生第三光信号。
例如，第一光信号为TE0模式，经由第一多模耦合波导403、第一单模耦合波导402进行耦合传输后，产生TE1模式的第二光信号，并经由第一输出多模波导405将TE1模式的第二光信号耦合至可调环形谐振腔300中。
在一些实施例中，第二模式转换器500包括：第二输入多模波导，第二输入多模波导的一端与输出波导连接；第二转换拉锥波导，第二转换拉锥波导的一端与第二输入多模波导的另一端连接；第二多模耦合波导，第二多模耦合波导的一端与第二转换拉锥波导的另一端连接；第二单模耦合波导，第二单模耦合波导与第二多模耦合波导耦合连接；第二输出单模波导，第二输出单模波导的一端与第二单模耦合波导的一端连接。
在一些具体实施例中，第二单模耦合波导与第二多模耦合波导耦合连接并满足相位匹配条件，第三光信号经由第二输入多模波导传输第二转换拉锥波导，并在第二转换拉锥波导传输一定距离后转换为其他模式的光信号并传输至第二多模耦合波导，并经由一定的耦合长度传输后，其他模式的光信号耦合至第二单模耦合波导中并转换为第四光信号。
例如，第三光信号为TM0模式在第二转换拉锥波导中传输并逐渐转换为TE1模式的光信号；TE1模式的光信号经由第二多模耦合波导、第二单模耦合波导进行耦合传输后，在第二单模耦合波导中产生TE0模式的光信号。
在一些实施例中，第二模式转换器500包括：第二输入多模波导，第二输入多模波导的一端与输出波导连接；第二多模耦合波导，第二多模耦合波导的一端与第二输入多模波导的另一端连接；第二单模耦合波导，第二单模耦合波导与第二多模耦合波导连接；第二输出单模波导，第二输出单模波导的一端与第二单模耦合波导的一端连接。
在一些具体实施例中，第二单模耦合波导与第二多模耦合波导耦合连接并满足相位匹配条件，第三光信号经由第二输入多模波导传输第二多模耦合波导，并经由一定的耦合长度传输后，第三光信号被耦合至第二单模耦合波导中并转换为其他模式的第四光信号。
例如，第三光信号为TE1模式的光信号，TE1模式的光信号经由第二多模耦合波导、第二单模耦合波导进行耦合传输后，在第二单模耦合波导中产生TE0模式的光信号。
请一并参照图1、图2A、图3A，在一具体实施例中，光调制器，包括：输入波导100，被设置为接收初始光信号；可调环形谐振腔，可调环形谐振腔与输入波导100耦合连接，被设置为对初始光信号进行谐振处理并输出第一光信号；反馈回路波导200，与可调环形谐振腔耦合连接，被设置为接收并传输第一光信号；第一模式转换器400，第一模式转换器400与反馈回路波导200耦合连接，第一模式转换器400被设置为对第一光信号进行转模处理并输出第二光信号；可调环形谐振腔还被设置为对第二光信号进行谐振处理并输出第三光信号；输出波导501，输出波导501与可调环形谐振腔耦合连接，被设置为接收并输出第三光信号；第二模式转换器500，第二模式转换器500的输入端与输出波导501耦合连接，被设置为对第三光信号进行转模处理并输出第四光信号，以使得输出信号为目标模式的光信号。通过对可调环形谐振腔进行模式复用以对多个模式的光信号同时进行调制，以提高光信号的消光比。
其中，第一模式转换器400与第二模式转换器500为相同且反向设置的模式转换器。
可调环形谐振腔包括：第一光电调制模组、第二光电调制模组、环形谐振腔300；第一光电调制模组被设置为调节环形谐振腔300的第一区域的折射率；第二光电调制模组被设置为调节环形谐振腔300的第二区域的折射率。
第一光电调制模组和第二光电调制模组均为硅基光电调制模组；硅基光电调制模组包括：第一P型重掺杂区域6061、第一N型重掺杂区域6064、第一P型轻掺杂区域6062、第一N型轻掺杂区域6063；第一P型轻掺杂区域6062设置于第一P型重掺杂区域6061一侧；第一N型轻掺杂区域6063设置于第一P型轻掺杂区域6062远离第一P型重掺杂区域6061一侧；第一N型重掺杂区域6064设置于第一N型轻掺杂区域6063远离第一P型轻掺杂区域6062一侧。
其中，可调环形谐振腔300为脊型波导，可调环形谐振腔300的第一区域、第二区域均由一个第一P型轻掺杂区域6062和一个第一N型轻掺杂区域6063构成，且一个第一P型轻掺杂区域6062和一个第一N型轻掺杂区域6063可构成脊型波导。第一P型重掺杂区域6061、第一N型重掺杂区域6064分别为平板型波导，且第一P型重掺杂区域6061与第一P型轻掺杂区域6062电连接，第一N型重掺杂区域6064与第一N型轻掺杂区域6063电连接以使得平板型波导与脊型波导电连接，以构成PN结型光调制器，且第一P型轻掺杂区域6062和第一N型轻掺杂区域6063结合界面周围形成耗尽区。
第一模式转换器400包括：第一输入单模波导401、第一单模耦合波导402、第一多模耦合波导403、第一转换拉锥波导404、第一输出多模波导405；第一输入单模波导401的一端与反馈回路波导200连接，第一输入单模波导401的另一端与第一单模耦合波导402连接；第一转换拉锥波导404的一端与第一多模耦合波导403连接，第一转换拉锥波导404的另一端与第一输出多模波导405的一端连接，第一输出多模波导405的另一端与输出波导501连接；其中，第一单模耦合波导402与第一多模耦合波导403耦合连接。第二模式转换器500包括：第二输入多模波导、第二单模耦合波导、第二多模耦合波导、第二转换拉锥波导、第二输出单模波导；第二输入多模波导的一端与输出波导501连接，第二输入多模波导的另一端与第二转换拉锥波导的一端连接；第二转换拉锥波导的另一端与第二多模耦合波导连接；第二单模耦合波导的一端与第二输出单模波导连接；其中，第二单模耦合波导与第二多模耦合波导耦接。
初始光信号为TE0模式的连续光信号，由单模输入波导101接收初始光信号接收，并经由第一拉锥波导102将初始光信号传输至多模输入波导103。通过多模输入波导103与环形谐振腔300耦合，将初始光信号传输至环形谐振腔300以对初始光信号进行谐振处理并产生第一光信号。其中，第一光信号为TE0模式。
具体地，通过若干电极对第一P型重掺杂区域6061、第一N型重掺杂区域6064施加电调制信号，以调节第一P型轻掺杂区域6062、第一N型轻掺杂区域6063中的载流子浓度，进而改变波导内传输光模式的有效折射率。第一光信号在环形谐振腔300传输过程中积累相位变化，并在环形谐振腔300的第一直波导303、第二直波导304中分别发生干涉，以将相位变化转换为强度变化，从而调制可调环形谐振腔300内的谐振波 长。
通过第一模式转换器400将TE0模式的第一光信号转换为TM0模式的第二光信号并经由第一输出多模波导405将TM0模式的第二光信号耦合至环形谐振腔300中；环形谐振腔300对第二光信号进行谐振处理并产生第三光信号，以获得具有高消光比的第三光信号。其中，第三光信号为TM0模式。通过对可调环形谐振腔进行模式复用以对多个模式的光信号同时进行调制，以提高光信号的消光比。
通过第二模式转换器500将TM0模式的第三光信号进行转换为TE0模式的第四光信号，以获得具有高消光比的TE0模式的光信号。
请参照图4A、4B，横坐标为分别第一光电调制模组、第二光电调制模组的施加电压值(电压绝对值，单位为V)，左侧纵坐标为有效折射率，右侧纵坐标为单位功率损耗(单位为dB/cm)。L41为施加电压值与TE0模式有效折射率的关系曲线，L43为施加电压值与TM0模式有效折射率的关系曲线，L42为施加电压值与TE0模式单位功率损耗(单位为dB/cm)的关系曲线，L43为施加电压值与TM0模式单位功率损耗的关系曲线。
如图4A所示，随着第一光电调制模组的施加电压值逐渐增加，在可调环形谐振腔300中，TE0模式的有效折射率逐渐增加，且单位功率损耗变小；随着第二光电调制模组的施加电压值逐渐增加，在可调环形谐振腔300中，TM0模式的有效折射率逐渐增加，且单位功率损耗变小。
通过改变第一光电调制模组、第二光电调制模组施加不同的电压值，以改变环形谐振腔300中第一区域、第二区域的有效折射率，使得TE0模式、TM0模式的光信号在环形谐振腔300中积累相位变化。TE0模式、TM0模式的光信号在第一直波导303、第二直波导304中分别发生干涉，以将相位变化转换为强度变化，从而改变可调环形谐振腔300内的谐振波长。
请一并参照图5A、5B，横坐标为波长(单位为nm)，纵坐标为信号功率(单位为dB)。LTE0、LTM0为不同模式谐振波长的曲线，LTE0+TM0为总谐振光谱，L1至LN为不同施加电压与谐振波长的关系曲线。
如图5A所示，TE0模式与TM0模式谐振波长完全重合，故可通过对TE0模式的初始波长进行谐振处理并获取TE0模式的第一光信号，通过第一模式转换器400将TE0模式的第一光信号转换为TM0模式的第二光信号并经由第一输出多模波导405将TM0模式的第二光信号耦合至可调环形谐振腔300中；可调环形谐振腔300对第二光信号进行谐振处理并产生第三光信号，以获得具有高消光比的第三光信号。即通过对光信号进行二次谐振处理，以获得高消光比的光信号，且通过同一可调环形谐振腔300对两种不同模式的光信号进行谐振处理。
如图5B所示，通过对分别TE0模式、TM0模式分别进行谐振以获得具有高消光比的光信号，该光信号光谱中，随着反置电压的增加，谐振峰逐渐发生漂移。其中，L1对应曲线施加的反置电压为0V，LN对应曲线施加的反置电压为10V。具体地，随着反置电压的增加，谐振波长逐渐增加。
请一并参照图1、图2B、图3B，在一具体实施例中，光调制器，包括：输入波导100，被设置为接收初始光信号；可调环形谐振腔300，可调环形谐振腔300与输入波导100耦合连接，被设置为对初始光信号进行谐振处理并输出第一光信号；反馈回路波导200，与可调环形谐振腔300耦合连接，被设置为接收并传输第一光信号；第一模式转换器400，第一模式转换器400与反馈回路波导200耦合连接，第一模式转换器400被设置为对第一光信号进行转模处理并输出第二光信号；可调环形谐振腔300还被设置为对第二光信号进行谐振处理并输出第三光信号；输出波导501，输出波导501与可调环形谐振腔300耦合连接，被设置为接收并输出第三光信号；第二模式转换器500，第二模式转换器500的输入端与输出波导501耦合连接，被设置为对第三光信号进行转模处理并输出第四光信号，以使得输出信号为目标模式的光信号。
其中，第一模式转换器400与第二模式转换器500为相同且反向设置的模式转换器。
其中，可调环形谐振腔300为脊型波导，可调环形谐振腔300的第一区域、第二区域均由一个第一P型轻掺杂区域6062和一个第一N型轻掺杂区域6063构成，且一个第一P型轻掺杂区域6062和一个第一N型轻掺杂区域6063可构成脊型波导。第一P型重掺杂区域6061、第一N型重掺杂区域6064分别为平板型波导， 且第一P型重掺杂区域6061与第一P型轻掺杂区域6062电连接，第一N型重掺杂区域6064与第一N型轻掺杂区域6063电连接以使得平板型波导与脊型波导电连接，以构成PN结型光调制器，且第一P型轻掺杂区域6062和第一N型轻掺杂区域6063结合界面周围形成耗尽区。
第一模式转换器400包括：第一输入单模波导401，第一单模耦合波导402，第一多模耦合波导403，第一输出多模波导405；第一输入单模波导401的一端与反馈回路波导200连接，第一输入单模波导401的另一端与第一单模耦合波导402连接；第一输出多模波导405的一端与第一多模耦合波导403的连接，第一输出多模波导405的另一端与输出波导501连接；其中，第一单模耦合波导402与第一多模耦合波导403耦合连接。
第二模式转换器500包括：第二输入多模波导、第二单模耦合波导、第二多模耦合波导、第二转换拉锥波导、第二输出单模波导；第二输入多模波导的一端与输出波导501连接，第二输入多模波导的另一端与第二转换拉锥波导的一端连接；第二转换拉锥波导的另一端与第二多模耦合波导连接；第二单模耦合波导的一端与第二输出单模波导连接；其中，第二单模耦合波导与第二多模耦合波导耦接。
初始光信号为TE0模式的连续光信号，由单模输入波导101接收初始光信号接收，并经由第一拉锥波导102将初始光信号传输至多模输入波导103。通过多模输入波导103与可调环形谐振腔300耦合，将初始光信号传输至可调环形谐振腔300以对初始光信号进行谐振处理并产生第一光信号。其中，第一光信号为TE0模式。
具体地，通过若干电极对第一P型重掺杂区域6061、第一N型重掺杂区域6064施加电调制信号，以调节第一P型轻掺杂区域6062、第一N型轻掺杂区域6063中的载流子浓度，进而改变波导内传输光模式的有效折射率。第一光信号在可调环形谐振腔300传输过程中积累相位变化，并在可调环形谐振腔300的第一直波导303、第二直波导304中分别发生干涉，以将相位变化转换为强度变化，从而调制可调环形谐振腔300内的谐振波长。
TE0模式的第一光信号通过第一模式转换器400转换为TE1模式的第二光信号并经由第一输出多模波导405将TE1模式的第二光信号耦合至可调环形谐振腔300中；可调环形谐振腔300以对第二光信号进行谐振处理并产生第三光信号，以获得具有高消光比的第三光信号。其中，第三光信号为TE1模式。
通过第二模式转换器500将TE1模式的第三光信号进行转换为TE0模式的第四光信号，以获得具有高消光比的TE0模式的光信号。
请参照图6A、6B，横坐标为分别第一光电调制模组、第二光电调制模组的施加电压值(电压绝对值，单位为V)，左侧纵坐标为有效折射率，右侧纵坐标为单位功率损耗(单位为dB/cm)。L61为施加电压值与TE0模式有效折射率的关系曲线，L63为施加电压值与TE1模式有效折射率的关系曲线，L62为施加电压值与TE0模式单位功率损耗的关系曲线，L43为施加电压值与TE1模式单位功率损耗的关系曲线。
如图6A所示，随着第一光电调制模组的施加电压值逐渐增加，在可调环形谐振腔300中，TE0模式的有效折射率逐渐增加，且单位功率损耗变小；随着第二光电调制模组的施加电压值逐渐增加，在可调环形谐振腔300中，TE1模式的有效折射率逐渐增加，且单位功率损耗变小。
通过改变第一光电调制模组、第二光电调制模组施加的电压值，以改变可调环形谐振腔300中第一区域、第二区域的有效折射率，使得TE0模式、TE1模式的光信号在可调环形谐振腔300中积累相位变化。TE0模式、TE1模式的光信号在第一直波导303、第二直波导304中分别发生干涉，以将相位变化转换为强度变化，从而改变可调环形谐振腔300内的谐振波长。
请一并参照图7A、7B，横坐标为波长(单位为nm)，纵坐标为信号功率(单位为dB)。LTE0、LTE1为不同模式谐振波长的曲线，LTE0+TE1为总谐振光谱，L1至LN为不同施加电压与谐振波长的关系曲线。
如图7A所示，TE0模式与TE1模式谐振波长完全重合，故可通过对TE0模式的初始波长进行谐振处理并获取TE0模式的第一光信号，通过第一模式转换器400将TE0模式的第一光信号转换为TM0模式的第二光信号并经由第一输出多模波导405将TE1模式的第二光信号耦合至可调环形谐振腔300中；可调环形谐振 腔300对第二光信号进行谐振处理并产生第三光信号，以获得具有高消光比的第三光信号。即通过对光信号进行二次谐振处理，以获得高消光比的光信号，且通过同一可调环形谐振腔300对两种不同模式的光信号进行谐振处理。
如图7B所示，通过对分别TE0模式、TE1模式分别进行谐振以获得具有高消光比的光信号，该光信号光谱中，随着反置电压的增加，谐振峰逐渐发生漂移。L1至LN为不同施加电压与谐振波长的关系曲线。其中，L1对应曲线施加的反置电压为0V，LN对应曲线施加的反置电压为10V。
具体地，随着反置电压的增加，谐振波长逐渐增加。
请再参图1，一种光调制器控制方法，包括：通过输入波导100接收初始光信号；通过可调环形谐振腔300对初始光信号进行谐振处理并输出第一光信号；通过反馈回路波导200接收第一光信号并传输至第一模式转换器400；通过第一模式转换器400被设置为对第一光信号进行转模处理并输出第二光信号，并通过可调环形谐振腔300对第二光信号进行谐振处理并输出第三光信号；通过输出波导501接收并输出第三光信号。
通过输入波导100接收初始光信号并传输至可调环形谐振腔300中，初始光信号在可调环形谐振腔300中发生谐振。由于初始光信号为连续光信号，在可调环形谐振腔300对初始光信号进行谐振处理后，特定频率的光信号的振幅会被放大并产生第一光信号。第一光信号通过环反馈回路波导200传输至第一模式转换器400，第一模式转换器400对第一光信号进行转模处理并输出第二光信号。通过将第二光信号再次耦合至可调环形谐振腔300中，并进行谐振处理以对第二光信号中特定频率的光信号的振幅进行放大从而产生第三光信号，第三光信号通过与可调环形谐振腔300耦合连接的输出波导501输出。即通过对可调环形谐振腔300进行复用以同时对初始光信号、第二光信号进行谐振处理以放大特定频率的光信号的振幅，从而获得具有更好消光比的第三光信号。
其中，第一模式转换器400可将第一光信号转换为不同正交模式的光信号或者不同阶模的光信号。由于第二光信号与初始光信号为不同模式的光信号，且可调环形谐振腔300可支持多模式光信号传输，故第二光信号与初始光信号在中可调环形谐振腔300传输时，两者各自传输且不发生干涉或串扰。微环谐振腔可为圆可调环形谐振腔300或跑道型微环谐振腔，微环谐振腔的弯曲波导支持两种以上模式在微环谐振腔传输。通过对可调环形谐振腔进行模式复用以对多个模式的光信号同时进行调制，以提高光信号的消光比。
光调制器控制方法，还包括：通过第二模式转换器500对第三光信号进行转模处理并输出第四光信号；第二模式转换器500的输入端与输出波导501耦合连接。
在一些具体实施例中，第一模式转换器400与第二模式转换器500为相同且反向设置的模式转换器。初始光信号与第一光信号为TE0模式的光信号，通过第一模式转换器400将第一光信号进行模式转换并输出TE1模式或TM0模式的第二光信号，并通过可调环形谐振腔300对第二光信号进行谐振处理以产生第三光信号。第二模式转换器500的输入端与输出波导501耦合连接以对第三光信号进行转模处理并输出第四光信号。其中，第三光信号为TE1模式或TM0模式的光信号，第四光信号为TE0模式的光信号。通过设置第一模式转换器400与第二模式转换器500，以使得初始光信号及第四光信号具有相同模式，即光调制器的输出信号与输入信号具有相同模式。
此外，TE1模式或TM0模式的第三光信号经由反馈回路波导200传输至第一模式转换器400时，第三光信号会出现损耗以保证第一模式转换器400的输出信号为第一光信号；TE0模式的第一光信号经由输出波导501传输至第二模式转换器500时，第一光信号会出现光损耗以保证第二模式转换器500的输出信号为第四光信号。
光调制器控制方法，还包括：通过设置第一光电调制模组以调节可调环形谐振腔300的第一区域的折射率；通过设置第二光电调制模组以调节可调环形谐振腔300的第二区域的折射率。
其中，第一光电调制模组、第二光电调制模组分别调节可调环形谐振腔300不同区域的折射率。通过调节第一区域、第二区域的折射率以使得初始光信号、第二光信号在第一区域、第二区域传输过程中积累相位变化，并在可调环形谐振腔300中的第一直波导303、第二直波导304中分别发生干涉，以将相位变化转换 为强度变化。
光调制器控制方法，还包括：初始光信号、第一光信号及第四光信号处于TE0模式；第二光信号及第三光信号处于TM0模式或TE1模式中的任一种。通过第一模式转换器400、第二模式转换器500对光信号进行转换，以使得不同模式的光信号在可调环形谐振腔300进行谐振且不相互干扰。
在一些具体实施例中，第一模式转换器400与第二模式转换器500为相同且反向设置的模式转换器。初始光信号与第一光信号为TE0模式的光信号，通过第一模式转换器400将第一光信号进行模式转换并输出TE1模式或TM0模式的第二光信号，并通过可调环形谐振腔300对第二光信号进行谐振处理以产生第三光信号。第二模式转换器500的输入端与输出波导501耦合连接以对第三光信号进行转模处理并输出第四光信号。其中，第三光信号为TE1模式或TM0模式的光信号，第四光信号为TE0模式的光信号。通过设置第一模式转换器400与第二模式转换器500，以使得初始光信号及第四光信号具有相同模式，即光调制器的输出信号与输入信号具有相同模式。
本申请实施例包括：通过可调环形谐振腔对初始光信号进行谐振处理并输出第一光信号，第一模式转换器对第一光信号进行转模处理并输出第二光信号，并通过可调环形谐振腔对所述第二光信号进行谐振处理并输出第三光信号，通过可调环形谐振腔对光信号进行二次叠加谐振及调制处理，以提高光信号的消光比。即通过对可调环形谐振腔进行模式复用以对多个模式的光信号同时进行调制，以提高光信号的消光比。
以上所描述的装置实施例仅仅是示意性的，其中作为分离部件说明的单元可以是或者也可以不是物理上分开的，即可以位于一个地方，或者也可以分布到多个网络单元上。可以根据实际的需要选择其中的部分或者全部模块来实现本实施例方案的目的。
本领域普通技术人员可以理解，上文中所公开方法中的全部或某些步骤、系统可以被实施为软件、固件、硬件及其适当的组合。某些物理组件或所有物理组件可以被实施为由处理器，如中央处理器、数字信号处理器或微处理器执行的软件，或者被实施为硬件，或者被实施为集成电路，如专用集成电路。这样的软件可以分布在计算机可读介质上，计算机可读介质可以包括计算机存储介质(或非暂时性介质)和通信介质(或暂时性介质)。如本领域普通技术人员公知的，术语计算机存储介质包括在被设置为存储信息(诸如计算机可读指令、数据结构、程序模块或其他数据)的任何方法或技术中实施的易失性和非易失性、可移除和不可移除介质。计算机存储介质包括但不限于RAM、ROM、EEPROM、闪存或其他存储器技术、CD-ROM、数字多功能盘(DVD)或其他光盘存储、磁盒、磁带、磁盘存储或其他磁存储装置、或者可以被设置为存储期望的信息并且可以被计算机访问的任何其他的介质。此外，本领域普通技术人员公知的是，通信介质通常包含计算机可读指令、数据结构、程序模块或者诸如载波或其他传输机制之类的调制数据信号中的其他数据，并且可包括任何信息递送介质。
以上是对本申请的一些实施例进行了具体说明，但本申请并不局限于上述实施方式，熟悉本领域的技术人员在不违背本申请范围的前提下还可作出种种的等同变形或替换，这些等同的变形或替换均包含在本申请权利要求所限定的范围内。

Claims (16)

  1. 光调制器，包括：
    输入波导，被设置为接收初始光信号；
    可调环形谐振腔，与所述输入波导耦合连接，被设置为对所述初始光信号进行谐振及调制处理并输出第一光信号；
    反馈回路波导，与可调环形谐振腔耦合连接，被设置为接收并传输所述第一光信号；
    第一模式转换器，与所述反馈回路波导耦合连接，被设置为对第一光信号进行转模处理并输出第二光信号至所述可调环形谐振腔；
    所述可调环形谐振腔还被设置为对所述第二光信号进行谐振及调制处理并输出第三光信号；
    输出波导，与所述可调环形谐振腔耦合连接，被设置为接收并输出所述第三光信号。
  2. 根据权利要求1所述的光调制器，还包括：
    第二模式转换器，所述第二模式转换器的输入端与所述输出波导耦合连接，被设置为对所述第三光信号进行转模处理并输出第四光信号。
  3. 根据权利要求2所述的光调制器，其中，所述第一模式转换器与所述第二模式转换器为相同且反向设置的模式转换器。
  4. 根据权利要求1至3任一项所述的光调制器，其中，所述可调环形谐振腔包括第一耦合区和第二耦合区；
    所述可调环形谐振腔通过所述第一耦合区与所述输入波导耦合连接；所述可调环形谐振腔通过所述第一耦合区与所述反馈回路波导耦合连接；
    所述第一模式转换器通过所述第二耦合区与所述可调环形谐振腔耦合连接，所述可调环形谐振腔通过所述第二耦合区与所述输出波导耦合连接。
  5. 根据权利要求4所述的光调制器，其中，所述可调环形谐振腔还包括：第一光电调制模组、第二光电调制模组、环形谐振腔；
    所述第一光电调制模组被设置为调节所述环形谐振腔的第一区域的折射率；
    所述第二光电调制模组被设置为调节所述环形谐振腔的第二区域的折射率；
    所述第一区域分别与所述第一耦合区、所述第二耦合区连接，所述第二区域分别与所述第一耦合区、所述第二耦合区连接。
  6. 根据权利要求5所述的光调制器，其中，所述第一光电调制模组和第二光电调制模组均为硅基光电调制模组；
    所述硅基光电调制模组包括依次排列设置的：第一P型重掺杂区域、第一P型轻掺杂区域、第一N型轻掺杂区域和第一N型重掺杂区域。
  7. 根据权利要求6所述的光调制器，其中，所述第一P型轻掺杂区域包括至少两个表面，所述第一N型轻掺杂区域覆盖所述第一P型轻掺杂区域的至少两个表面；
    或者，
    所述第一N型轻掺杂区域包括至少两个表面，所述第一P型轻掺杂区域覆盖所述第一N型轻掺杂区域的至少两个表面。
  8. 根据权利要求1、2、3、5、6或7所述的光调制器，其中，所述输入波导包括：
    单模输入波导，被设置为接收初始光信号；
    第一拉锥波导，所述第一拉锥波导的另一端与所述单模输入波导连接；
    多模输入波导，所述多模输入波导与所述第一拉锥波导的另一端连接。
  9. 根据权利要求8所述的光调制器，其中，所述反馈回路波导包括：
    反馈多模波导，所述反馈多模波导的一端与所述多模输入波导连接；
    第二拉锥波导，所述第二拉锥波导的一端与所述反馈多模波导的另一端连接；
    弧形波导，所述弧形波导的一端与所述第二拉锥波导的另一端连接；
    其中，所述弧形波导的另一端与所述第一模式转换器连接。
  10. 根据权利要求1所述的光调制器，其中，所述第一模式转换器包括：
    第一输入单模波导，所述第一输入单模波导的一端与所述反馈回路波导连接；
    第一单模耦合波导，所述第一单模耦合波导的一端与所述第一输入单模波导的另一端连接；
    第一多模耦合波导，与所述第一单模耦合波导耦合连接；
    第一转换拉锥波导，所述第一转换拉锥波导的一端与所述第一多模耦合波导连接；
    第一输出多模波导，所述第一输出多模波导的一端与所述第一转换拉锥波导的另一端连接，所述第一输出多模波导的另一端与所述输出波导连接。
  11. 根据权利要求1所述的光调制器，其中，所述第一模式转换器包括：
    第一输入单模波导，所述第一输入单模波导的一端与所述反馈回路波导连接；
    第一单模耦合波导，第一单模耦合波导的一端与所述第一输入单模波导的另一端连接；
    第一多模耦合波导，与所述第一单模耦合波导耦合连接；
    第一输出多模波导，所述第一输出多模波导的一端与所述第一多模耦合波导的一端连接，所述第一输出多模波导的另一端与所述输出波导连接。
  12. 根据权利要求2所述的光调制器，其中，所述第二模式转换器包括：
    第二输入多模波导，所述第二输入多模波导的一端与所述输出波导连接；
    第二转换拉锥波导，所述第二转换拉锥波导的一端与所述第二输入多模波导的另一端连接；
    第二多模耦合波导，所述第二多模耦合波导的一端与所述第二转换拉锥波导的另一端连接；
    第二单模耦合波导，所述第二单模耦合波导与所述第二多模耦合波导耦合连接；
    第二输出单模波导，所述第二输出单模波导的一端与第二单模耦合波导的一端连接。
  13. 根据权利要求2所述的光调制器，其中，所述第二模式转换器包括：
    第二输入多模波导，所述第二输入多模波导的一端与所述输出波导连接；
    第二多模耦合波导，所述第二多模耦合波导的一端与所述第二输入多模波导的另一端连接；
    第二单模耦合波导，所述第二单模耦合波导与所述第二多模耦合波导连接；
    第二输出单模波导，所述第二输出单模波导的一端与第二单模耦合波导的一端连接。
  14. 一种光调制器控制方法，包括：
    通过输入波导接收初始光信号；
    通过可调环形谐振腔对所述初始光信号进行谐振及调制处理并输出第一光信号；
    通过反馈回路波导接收所述第一光信号并传输至第一模式转换器；
    通过所述第一模式转换器对第一光信号进行转模处理并输出第二光信号；
    通过所述可调环形谐振腔对所述第二光信号进行谐振及调制处理并输出第三光信号；
    通过输出波导接收并输出所述第三光信号。
  15. 根据权利要求14所述的光调制器控制方法，还包括：通过第二模式转换器对所述第三光信号进行转模处理并输出第四光信号。
  16. 根据权利要求15所述的光调制器控制方法，其中，所述第一模式转换器与所述第二模式转换器为相同且反向设置的模式转换器。
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