CN114730106A - 一种电光调制器及其制造方法、芯片 - Google Patents

一种电光调制器及其制造方法、芯片 Download PDF

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Publication number
CN114730106A
CN114730106A CN202080080540.9A CN202080080540A CN114730106A CN 114730106 A CN114730106 A CN 114730106A CN 202080080540 A CN202080080540 A CN 202080080540A CN 114730106 A CN114730106 A CN 114730106A
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China
Prior art keywords
electro
optical
ridge structure
waveguide
optic
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Pending
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CN202080080540.9A
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English (en)
Inventor
陈宏民
孙梦蝶
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Huawei Technologies Co Ltd
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Huawei Technologies Co Ltd
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Publication date
Application filed by Huawei Technologies Co Ltd filed Critical Huawei Technologies Co Ltd
Publication of CN114730106A publication Critical patent/CN114730106A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)

Abstract

本申请公开了一种电光调制器及其制造方法、芯片，该方法包括提供衬底(10)，在衬底(10)上形成有介质层(100)，介质层(100)中形成有输入波导(112)和输出波导(113)(S101)，在介质层(100)表面上键合电光晶体膜层(120)，电光晶体的电光调制效率高于输入波导(112)和输出波导(113)的电光调制效率，电光晶体膜层(120)包括脊形结构(121)(S102)，脊形结构(121)可以包括输入耦合部分和输出耦合部分，输入耦合部分用于将和输入波导(112)对准中的信号耦合至脊形结构(121)，输出耦合部分和部分用于将脊形结构(121)中的信号耦合至输出波导(113)对准，在脊形结构(121)两侧形成金属电极(130)(S103)。电光晶体具有较高的调制效率，因此电光调制的效率得到了提高，同时本申请实施例简化了制造工艺。

Description

PCT国内申请，说明书已公开。

Claims (18)

  1. PCT国内申请，权利要求书已公开。
CN202080080540.9A 2020-01-13 2020-01-13 一种电光调制器及其制造方法、芯片 Pending CN114730106A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/CN2020/071841 WO2021142588A1 (zh) 2020-01-13 2020-01-13 一种电光调制器及其制造方法、芯片

Publications (1)

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CN114730106A true CN114730106A (zh) 2022-07-08

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CN (1) CN114730106A (zh)
WO (1) WO2021142588A1 (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115840304A (zh) * 2021-09-18 2023-03-24 华为技术有限公司 一种电光调制器及其制造方法、光通信系统

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR0134763B1 (ko) * 1992-04-21 1998-04-23 다니이 아끼오 광도파로소자와 그 제조방법
US6528776B1 (en) * 1999-11-19 2003-03-04 New Focus, Inc. Electro optic converter having a passive waveguide and exhibiting impedance mismatch
CN108241225A (zh) * 2016-12-23 2018-07-03 天津领芯科技发展有限公司 一种低驱动电压铌酸锂电光调制器及其制造方法
CN109298551A (zh) * 2018-11-28 2019-02-01 中国电子科技集团公司第四十四研究所 一种基于铌酸锂厚膜的高速电光调制器及其制备方法
CN110161625B (zh) * 2019-05-17 2021-03-30 上海交通大学 硅基铌酸锂薄膜电光调制器阵列集成的方法
CN110187526A (zh) * 2019-05-17 2019-08-30 上海交通大学 硅基铌酸锂薄膜电光调制器阵列

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