WO2021201146A1 - Vanne d'asservissement de fluide et dispositif d'asservissement de fluide - Google Patents

Vanne d'asservissement de fluide et dispositif d'asservissement de fluide Download PDF

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Publication number
WO2021201146A1
WO2021201146A1 PCT/JP2021/013962 JP2021013962W WO2021201146A1 WO 2021201146 A1 WO2021201146 A1 WO 2021201146A1 JP 2021013962 W JP2021013962 W JP 2021013962W WO 2021201146 A1 WO2021201146 A1 WO 2021201146A1
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Prior art keywords
servo valve
movable plate
fluid servo
nozzle
fluid
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PCT/JP2021/013962
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English (en)
Japanese (ja)
Inventor
琢巳 岡田
丸山　照雄
寛 滝本
敏喜 山口
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特許機器株式会社
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Priority claimed from JP2020064128A external-priority patent/JP7477860B2/ja
Priority claimed from JP2020064127A external-priority patent/JP2021162087A/ja
Application filed by 特許機器株式会社 filed Critical 特許機器株式会社
Publication of WO2021201146A1 publication Critical patent/WO2021201146A1/fr

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid

Definitions

  • the present invention relates to a fluid servo valve provided with a fluid servo valve and a fluid servo valve that control the pressure or flow rate of a fluid by shifting a movable plate between a pair of nozzles.
  • an active vibration isolation table using a pneumatic actuator is used.
  • the position, speed, and acceleration of the stage on which the ultra-precision equipment is placed are detected by various sensors, and the internal pressure of the pneumatic actuator is controlled based on the output signals of each sensor.
  • the flow rate of compressed air is adjusted by changing the valve drive current applied to the electromagnet of the fluid servo valve and displacing the position of the movable plate between the pair of nozzles.
  • This fluid servo valve is a supply nozzle for supplying a fluid, an exhaust nozzle provided so as to face the supply nozzle coaxially, and a movable plate arranged between the supply nozzle and the exhaust nozzle, and has a predetermined value. It is provided with a disk having the following thickness and an electromagnet provided on the exhaust nozzle side to attract the disk. Further, this fluid servo valve is configured so that the magnetic flux magnetic saturation phenomenon occurs in the disk within the application range of the valve drive current.
  • the fluid servo valve that has already been proposed utilizes the magnetic saturation phenomenon, and as shown in the graph of FIG. 16, the displacement characteristic (pressure) of the movable plate with respect to the valve drive current even in the range of the current value as described above. Or the flow rate characteristic) can be linearized.
  • the characteristics required for the fluid servo valve used in the active vibration isolation table differ greatly depending on the application.
  • vibration isolation performance of ⁇ 20 dB or less may be required in the frequency range of 0.5 Hz to 1.0 Hz.
  • a fluid servo valve whose flow rate change rate is small with respect to the valve drive current is required.
  • the inner diameter of the supply / exhaust nozzle, the stroke of the movable plate, etc. are reduced to reduce the flow rate of the fluid output from the fluid servo valve.
  • the present invention has been made in view of the above-mentioned problems, and is a fluid servo valve capable of linearizing the control pressure characteristic with respect to the valve drive current even when the movable plate is separated from the electromagnet that exerts the magnetic attraction action. It is an object of the present invention to provide a fluid servo device including such a fluid servo valve.
  • Another object of the present invention is to provide a fluid servo valve that can reduce the number of places that require high-precision machining and assembly, and has a good yield at the time of mass production, while being used for minute flow rate control.
  • the fluid servo valve according to the present invention has a supply nozzle that communicates with the supply side flow path and discharges the fluid from the tip portion, and an exhaust nozzle that communicates with the exhaust side flow path and sucks the fluid from the tip portion.
  • a movable plate provided between the tip portions of the supply nozzle and the exhaust nozzle, and an electromagnet that deforms at least a part of the movable plate and displaces it between the supply nozzle and the exhaust nozzle.
  • the effective cross-sectional area of the supply nozzle is different from the effective cross-sectional area of the exhaust nozzle.
  • the effective cross-sectional area of the supply nozzle and the effective cross-sectional area of the exhaust nozzle are different from each other. Even in the range where the magnetic attraction action is sharply reduced, the control pressure characteristic and the flow rate characteristic with respect to the valve drive current can be linearized.
  • the configuration on the supply nozzle side can be easily miniaturized, and even when the movable plate is located at a position away from the electromagnet, the said In order to improve the linearity of the flow rate or pressure of the fluid with respect to the valve drive current applied to the electromagnet, the electromagnet is provided on the exhaust nozzle side with respect to the movable plate, and the effective cross-sectional area of the supply nozzle. However, it may be larger than the effective cross-sectional area of the exhaust nozzle.
  • the effective supply nozzles arranged farther from the electromagnet while aligning the outer diameter dimensions of the nozzles.
  • the cross-sectional area can be made larger than the effective cross-sectional area of the exhaust nozzle.
  • the effective cross-sectional area of the exhaust nozzle is reduced to make the supply nozzle relatively
  • the effective cross-sectional area can be increased.
  • control pressure faithfully proportional to the minute amplitude input can be obtained, 2.5 ⁇ A when the effective cross-sectional area of the supply nozzle is A in and the effective cross-sectional area of the exhaust nozzle is A out.
  • Examples are those configured to satisfy in / A out ⁇ 4.0.
  • the supply nozzle includes a displacement portion that is displaced between the tip portions of the supply nozzle and the exhaust nozzle by force, and a fixed portion whose position is fixed with respect to the supply nozzle and the exhaust nozzle. It suffices that the tip of the head is disposed so as to protrude by a predetermined amount of protrusion from the fixed portion on the exhaust nozzle side.
  • the effective cross-sectional area of the supply nozzle is set to A in
  • the effective cross-sectional area of the exhaust nozzle is set to A in.
  • the movable plate may yield or break even if the force due to the pressure difference applied to the movable plate increases. Can be prevented.
  • the protrusion amount the X 0, the rigidity of the movable plate when the k 1.0 ⁇ a in / a in a range of out ⁇ 3.0, 28 ⁇ m ⁇ X 0 ⁇ 56 ⁇ m, 2.75 ⁇ 10 4 N / m ⁇ k ⁇ 3.30 ⁇ 10 4
  • the one set to N / m can be mentioned.
  • the magnetic material component forming the closed-loop magnetic circuit in the closed-loop magnetic circuit formed so as to pass through at least the movable plate among the magnetic currents generated by the electromagnet includes a linear region in which the characteristics of the magnetic flux density with respect to the magnetization force are roughly proportional to each other, and a magnetic saturation region in which the inclination angle of the magnetic flux density with respect to the magnetization force changes slightly as compared with the linear region. It may be configured so that the magnetic flux density of the magnetic flux flowing through the magnetic material component falls within the magnetic saturation region when the current energizing the electromagnet is increased within the displaceable range of the movable plate.
  • the movable plate may be configured so that the magnetic flux density of the magnetic flux falls within the magnetic saturation region.
  • the fluid servo valve communicates with the supply side flow path, and at least a part of the supply nozzle to which the fluid is discharged from the tip portion and the fluid discharged from the supply nozzle circulates to the controlled object.
  • a throttle is formed in the control flow path, for example, even if the inner diameters of the supply nozzle and the exhaust nozzle and the stroke of the movable plate are configured on a scale for large flow rate applications. , The flow rate flowing through the control flow path can be miniaturized.
  • the configuration other than the control flow path can be made to have the same structure as the fluid servo valve for large flow rate applications, and the machining accuracy and assembly accuracy of each part can be relaxed. As a result, even a fluid servo valve for minute flow rate control can improve the yield at the time of mass production as compared with the conventional case.
  • the basic structure such as the supply nozzle, the exhaust nozzle, and the movable plate can be shared between the small flow rate application and the large flow rate application, the increase in the number of parts is so large while realizing a variation that can cover a wide flow rate control range. It can be prevented from occurring.
  • the flow rate control range and resolution can be miniaturized, for example, to achieve excellent vibration isolation performance when applied to an active vibration isolation table. Can contribute.
  • the inner diameter of the inflow port in the control flow path is formed to be smaller than the inner diameter of other parts.
  • control flow path may have a cylindrical shape having a constant inner diameter other than the vicinity of the inflow port.
  • a closing plate for closing the inflow port of the formed control flow path is further provided.
  • the closing plate may be formed with a throttle hole having a diameter smaller than the inner diameter of the control flow path, and may be arranged so that the inlet of the control flow path and the throttle hole communicate with each other.
  • the configuration on the supply nozzle side can be easily miniaturized, and even when the movable plate is located at a position away from the electromagnet, the said In order to improve the linearity of the flow rate or pressure of the fluid with respect to the valve drive current applied to the electromagnet, the electromagnet is provided on the exhaust nozzle side with respect to the movable plate, and the effective cross-sectional area of the supply nozzle. However, it may be larger than the effective cross-sectional area of the exhaust nozzle.
  • the supply nozzles arranged farther from the electromagnet while having substantially the same outer diameter dimension of each nozzle.
  • the effective cross-sectional area can be made larger than the effective cross-sectional area of the exhaust nozzle.
  • the effective cross-sectional area of the exhaust nozzle is reduced to make the supply nozzle relatively
  • the effective cross-sectional area can be increased.
  • the effective cross-sectional area of the supply nozzle is A in and the effective cross-sectional area of the exhaust nozzle is A.
  • it may be configured so as to satisfy 1.5 ⁇ A in / A out ⁇ 5.0. More preferably, it may be configured so as to satisfy 2.5 ⁇ A in / A out ⁇ 4.0.
  • the magnetic material component forming the closed-loop magnetic circuit in the closed-loop magnetic circuit formed so as to pass through at least the movable plate among the magnetic currents generated by the electromagnet includes a linear region in which the characteristics of the magnetic flux density with respect to the magnetization force are roughly proportional to each other, and a magnetic saturation region in which the inclination angle of the magnetic flux density with respect to the magnetization force changes slightly as compared with the linear region. It may be configured so that the magnetic flux density of the magnetic flux flowing through the magnetic material component falls within the magnetic saturation region when the current energizing the electromagnet is increased within the displaceable range of the movable plate.
  • the movable plate may be configured so that the magnetic flux density of the magnetic flux falls within the magnetic saturation region.
  • a fluid servo valve according to the present invention, a pneumatic actuator connected to the fluid servo valve, a sensor for detecting a displacement or vibration state of a controlled object, and a control for controlling the fluid servo valve based on the output of the sensor.
  • the fluid servo device is equipped with a device, the fluid servo valve can realize linearity of flow rate or pressure with respect to a wide range of valve drive currents, so that (1) a wide control range centered on the operating point can be obtained. Therefore, (2) a highly accurate feed-forward signal that cancels the disturbance can be generated to realize highly accurate vibration suppression control, and (3) the amplitude dependence of the gain / phase characteristics in the vicinity of the operating point can be reduced.
  • a fluid servo valve according to the present invention, a pneumatic actuator connected to the fluid servo valve, a sensor for detecting a displacement or vibration state of a controlled object, and a control for controlling the fluid servo valve based on the output of the sensor.
  • the fluid servo device is equipped with a device, the fluid servo valve can realize linearity of flow rate or pressure with respect to a wide range of valve drive currents, so that (1) a wide control range centered on the operating point can be obtained. Therefore, (2) a highly accurate feed-forward signal that cancels the disturbance can be generated to realize highly accurate vibration suppression control, and (3) the amplitude dependence of the gain / phase characteristics in the vicinity of the operating point can be reduced.
  • the linearity of the flow rate or pressure of the fluid with respect to the valve drive current can be improved even in the region where the movable plate is separated from the electromagnet.
  • good linearity can be achieved over the entire valve drive current range.
  • a fluid servo device using such a fluid servo valve with good linearity can realize a wide control range and high-precision FF control.
  • the characteristics that the output transmission characteristics (gain / phase characteristics) with respect to the input do not depend on the magnitude of the input amplitude can be obtained.
  • the fluid servo valve according to the present invention since the throttle is formed in the control flow path, the supply nozzle, the exhaust nozzle, and the movable plate have the same structure as the fluid servo valve for a large flow rate. It is possible to realize a minute flow rate while configuring with. Therefore, even if it is a fluid servo valve for a minute flow rate, the required component accuracy and assembly accuracy can be relaxed as compared with the conventional case. Therefore, although it is a fluid servo bubble for minute flow rate control, the yield at the time of mass production can be improved.
  • a fluid servo valve suitable for various flow rate control ranges can be configured only by adjusting the throttle formed in the control flow path. Therefore, even if the variation regarding the flow rate range of the fluid servo valve is increased, the basic structure can be shared and the yield can be kept high.
  • FIG. 1 Schematic exploded perspective view of the fluid servo valve according to the first embodiment of the present invention.
  • the schematic partial enlarged view which shows the closed loop magnetic circuit of the fluid servo valve in 1st Embodiment.
  • the schematic diagram which shows the positional relationship between each nozzle of the fluid servo valve and a movable plate in 1st Embodiment.
  • the graph which shows the analysis result of the input voltage-output voltage characteristic with respect to the effective cross-sectional area ratio of each nozzle of the fluid servo valve in 1st Embodiment.
  • the graph which shows the analysis result of the relationship between the input voltage waveform and the output pressure waveform to the fluid servo valve in 1st Embodiment.
  • the schematic diagram which shows the position of the movable plate at the time of measuring the effective cross-sectional area of each nozzle.
  • the schematic diagram which shows the structure for measuring the effective cross-sectional area of each nozzle.
  • FIG. 6 is a schematic partially enlarged view showing a closed loop magnetic circuit of a fluid servo valve according to a fifth embodiment.
  • the graph which shows the difference of the flow rate characteristic with respect to the valve drive voltage of the conventional fluid servo valve and the 5th embodiment.
  • the fluid servo valve 100 is used to control the flow rate of compressed air, for example, in order to control the internal pressure of a pneumatic actuator provided on an active vibration isolation table.
  • the fluid servo valve 100 is formed in a substantially rectangular shape, and a supply side valve body in which a supply side flow path 12 for supplying compressed air is formed inside the fluid servo valve 100.
  • the exhaust side valve body 2 which has a roughly two-stage cylindrical shape and has an exhaust side flow path 22 for exhausting a part of the supplied compressed air to the outside, and the supply side valve body 1 and the exhaust side. It includes a movable plate 3 sandwiched between the valve body 2 and the valve body 2.
  • the supply-side valve body 1 has a supply-side flow path 12 which is a through hole formed along the central axis and the supply-side valve body 1 is displaced outward in a predetermined distance radial direction from the central axis. It is provided with a control flow path 13 which is a through hole penetrated in parallel with the flow path 12.
  • a substantially thin disk-shaped recess is formed on the inner surface of the supply-side valve body 1, and a supply-side gap 14 is formed between the supply-side valve body 1 and the movable plate 3.
  • a supply nozzle 11 is provided on the side of the supply side flow path 12 facing the movable plate 3.
  • the exhaust side valve body 2 is provided with an exhaust side flow path 22 which is a through hole formed along the central axis.
  • An exhaust nozzle 21 is provided on the inner surface side of the exhaust side valve body 2 in the exhaust side flow path 22 so as to face the movable plate 3. That is, the supply nozzle 11 and the exhaust nozzle 21 are arranged coaxially side by side, and the central portion of the movable plate 3 is arranged between the tip portions of the nozzles.
  • the exhaust side valve body 2 accommodates an electromagnet 4 having a substantially cylindrical shape and the above-mentioned exhaust nozzle 21 and exhaust side flow path 22 formed on the central axis, and the electromagnet 4 inside, and a supply side valve body. It is composed of a substantially cylindrical outer cover 2C which is fixed to 1 and sandwiches the movable plate 3.
  • the movable plate 3 has a supply side nozzle 11 by balancing each force acting on the movable plate 3, including at least an attractive force by an electromagnet 4 provided in the exhaust side valve body 2 and an elastic restoring force of the movable plate 3.
  • the movable plate 3 is positioned between the tip of the valve and the tip of the exhaust side supply nozzle 21 at a desired position without contacting each tip.
  • the movable plate 3 is positioned at a point where the attractive force of the electromagnet 4 and the force generated on the movable plate 3 due to the pressure difference between the front and back surfaces of the movable plate 3 and the elastic restoring force of the movable plate 3 are balanced. Further, in order to facilitate adjusting the balance of such forces, the inner diameters of the supply side nozzle 11 and the exhaust side nozzle 21 are configured to taper continuously or stepwise at least at the tip portion.
  • the inner diameter of the tip of the supply nozzle 11 is formed to be larger than the inner diameter of the exhaust nozzle 21. That is, the effective cross-sectional area of the supply nozzle 11 arranged on the side opposite to the electromagnet 4 with respect to the movable plate 3 is the effective disconnection of the exhaust nozzle 21 arranged on the same side as the electromagnet 4 with respect to the movable plate 3. It is configured to be larger than the area. As described above, the characteristics of the supply nozzle 11 and the exhaust nozzle 21 are asymmetrical with respect to the midpoint of each nozzle.
  • the electromagnet 4 forms a closed-loop magnetic circuit MC of a magnetic flux generated by applying a valve drive current to the coil bobbin 41, the coil 42 wound around the coil bobbin 41, and the coil 42. It is equipped with a yoke 43.
  • the coil bobbin 41 is made of a non-magnetic material
  • the yoke 43 is made of a magnetic material.
  • the yoke 43 has a substantially cylindrical shape, and has a central shaft portion 44 in which the coil bobbin 41 is fitted on the outer peripheral surface thereof, and a thin disk shape that extends radially outward from the base end side of the central shaft portion 44.
  • a bottom surface 45 fixed by an outer cover and bolts, a substantially thin cylindrical outer peripheral portion 46 extending in the axial direction from the outer circumference of the bottom surface portion 45, and a roughly thin-walled two-stage extending radially inward from the tip side of the outer peripheral portion 46. It is composed of a top surface portion 47 having a cylindrical shape.
  • An exhaust side gap portion 23 is formed between the top surface portion 47 and the movable plate 3.
  • the central shaft portion 44 has a hollow cylindrical shape, and the exhaust side flow path 22 is formed by the internal cavity. Further, the exhaust nozzle 21 described above is formed at the tip of the central shaft portion 44. Further, the first magnetic pole 48 is formed by an annular ridge having three notches formed so as to surround the exhaust nozzle 21. In addition, the top surface portion 47 has a second magnetic pole 49 formed by an annular ridge projecting from the center portion so as to be close to the movable plate 3 side.
  • the magnetic flux generated by the coil 42 is "inside the central shaft portion 44-> the first magnetic pole 48-> the exhaust side gap portion 23-> the movable plate 3-> the exhaust side gap portion 23-> the second magnetic pole 49-> the top surface portion 47-> the outer peripheral portion 46->
  • a closed-loop magnetic circuit MC is formed so that the magnetic flux circulates through the path of the bottom surface portion 45 ⁇ the central shaft portion 44.
  • the magnetic flux density of the magnetic flux in the movable plate 3 of the magnetic flux is configured to cause magnetic saturation depending on the material of the movable plate 3, the thickness and shape of the movable plate 3, and the like.
  • the magnetic characteristics of the magnetic material components forming the closed-loop magnetic circuit MC are compared with the linear region in which the characteristics of the magnetic flux density with respect to the magnetization force are roughly proportional to each other and the gradient angle of the magnetic flux density with respect to the magnetization force in the linear region.
  • a region that changes slightly is a magnetic saturation region.
  • the thickness and shape of the movable plate 3 forming a part of the closed-loop magnetic circuit MC are such that when the valve drive current is within a predetermined range, the characteristics of the magnetic flux density with respect to the magnetization force in the movable plate 3 fall into the above-mentioned magnetic saturation region. Is set to.
  • the displacement of the movable plate 3 changes substantially in proportion to the change in the valve drive current.
  • the movable plate 3 causes magnetic saturation.
  • the movable plate 3 is a thin disk-shaped disc as shown in FIGS. 1 and 2, and is displaced between the tip portions of the supply nozzle 11 and the exhaust nozzle 21 by the magnetic attraction force of the electromagnet 4. It is configured. More specifically, in the movable plate 3, the outer edge portion is sandwiched and fixed between the supply side valve body 1 and the exhaust side valve body 2, and the maximum displacement to the central portion due to the elastic deformation of the unfixed portion. Is configured to occur.
  • the displacement portion 31 which is the central portion of the movable plate 3 is the position where the displacement portion 31 is maximally displaced by the magnetic attraction force of the electromagnet 4.
  • the outer edge portion of the movable plate 3 is a fixed portion 32 whose position is fixed with respect to the supply nozzle 11 and the exhaust nozzle 21.
  • the fixed portion 32 is a portion that is pressed and sandwiched between the supply-side valve body 1 and the exhaust-side valve body 2, and is a portion that is supported by the fixed end in the movable plate 3.
  • fluid flow holes 33 for passing compressed air which is a fluid
  • the fluid flow holes 33 are arranged spirally with respect to the center of the movable plate 3. Further, the fluid flow hole 33 is formed so that the slit width becomes smaller from the outer edge side to the center side.
  • the axial spring rigidity of the movable plate 3 can be arbitrarily set by the spiral shape of the fluid flow hole 33.
  • FIG. 4 shows the length of the movable plate 3 in the radial direction in a deformed manner.
  • the tip of the supply nozzle 11 projects toward the exhaust nozzle 21 by a predetermined amount of protrusion with respect to the fixed portion 32 of the movable plate 3. Therefore, in a state where the magnetic attraction force is not acting on the movable plate 3, the movable plate 3 is slightly deformed so that the displacement portion 31 projects toward the exhaust nozzle 21 with respect to the fixed portion 32 of the movable plate 3. ing.
  • the compressed air supplied from the supply nozzle 11 flows into the supply-side gap 14, and a part of the compressed air flows out from the control flow path 13 to the pneumatic actuator. Further, the rest of the compressed air that has flowed into the supply-side gap 14 flows into the exhaust-side gap 23 through the fluid flow hole 33 of the movable plate 3. The compressed air in the exhaust side gap 23 is sucked from the exhaust nozzle 21 and is exhausted to the outside through the exhaust side flow path 22. Further, the position of the movable plate 3 between the supply nozzle 11 and the exhaust nozzle 21 is controlled by the magnetic attraction force of the electromagnet 4, so that the flow rate of the compressed air supplied from the control flow path 13 to the pneumatic actuator is controlled. NS.
  • the position of the movable plate 3 is determined at a position where the attractive force of the electromagnet and the restoring force of the spring of the movable plate are in equilibrium.
  • the larger the opening area of the supply nozzle 11 and the smaller the opening area of the exhaust nozzle 21, the larger the control pressure Pa that satisfies the condition of Q in Q out.
  • the fluid servo valve 100 of the first embodiment brings about the non-linearity of the valve displacement characteristic by making the flow rate characteristics of the supply nozzle 11 and the exhaust nozzle 21 asymmetric in the region where the valve displacement characteristic with respect to the valve drive current is non-linear. It “offsets" the impact.
  • the control pressure Pa maintains a large value even when the movable plate 3 is located away from the electromagnet 4, that is, when the movable plate 3 is close to the supply nozzle 11. Due to this asymmetric nozzle effect, the non-linearity of the control pressure characteristic with respect to the current of the conventional valve can be eliminated even in the region of I ⁇ I max / 2.
  • the operating point is, for example, a value set to the median current value or voltage value in the application range of the valve drive current or the valve drive voltage applied to the fluid servo valve 100.
  • the operating point may be set by deviating from the median value.
  • the characteristic curve diagram shown in FIG. 5 was obtained in consideration of the above (1) and (2).
  • the protrusion amount is set larger and the rigidity of the movable plate 3 is set larger.
  • the protrusion amount is X 0 and the rigidity of the movable plate 3 is k
  • 28 ⁇ m ⁇ X 0 ⁇ 56 ⁇ m 28 ⁇ m ⁇ X 0 ⁇ 56 ⁇ m
  • 2.75 ⁇ 10 4 N / m ⁇ k in the range of 1.0 ⁇ A in / A out ⁇ 3.0.
  • ⁇ 3.30 x 10 4 N / m should be set.
  • the following can be seen by drawing an envelope (shown by the alternate long and short dash line) on each characteristic curve (shown by the solid line).
  • the control pressure characteristic with respect to the voltage is non-linear.
  • the control pressure characteristic with respect to the voltage is linear over a wide range.
  • the graph of FIG. 7 is a model representation of the waveform of the control pressure, which is an output signal when the valve drive voltage is input to the fluid servo valve 100 as an input signal.
  • the center value of the voltage signal at the operating point G is set to the center value of the maximum voltage (5V in the embodiment).
  • the output pressure waveform has the following characteristics according to the magnitude of the amplitude of the input signal. That is, (1) In the case of a minute amplitude input, the output pressure waveform is vertically asymmetric. That is, the waveform is accompanied by harmonic distortion. (2) In the case of a large amplitude input, the output pressure waveform has a limiter characteristic, that is, the waveform is saturated, so that there is a limit to the size of the lower limit value of the control input.
  • FIG. 8 is a graph for obtaining an appropriate value of the opening area ratio A in / A out of the asymmetric nozzle composed of the supply nozzle 11 and the exhaust nozzle 21 having different effective cross-sectional areas, which were found by the above-mentioned research.
  • a verification experiment was conducted by mounting the fluid servo valve 100 of the first embodiment on a pneumatic actuator of an active vibration isolation table. As a result, the following became clear. (1) If the range of 1.8 ⁇ A in / A out ⁇ 4.9 is set, a control pressure faithfully proportional to the minute amplitude input can be obtained. It was suitable for vibration isolation control that handles only slight vibrations. (2) If the range is set to 2.5 ⁇ A in / A out ⁇ 4.0, large amplitude input can be supported. A sufficient effect was obtained by applying it to feedforward control that cancels large load fluctuations with a pressure waveform of opposite phase. In other words, even with a large amplitude input, the output control pressure waveform can be prevented from exhibiting the limiter characteristics as shown in FIG. 7.
  • the effective cross-sectional area of the supply nozzle 11 provided on the side opposite to the electromagnet 4 with respect to the movable plate 3 is set to the electromagnet 4 with respect to the movable plate 3. Since it is set to be larger than the effective cross-sectional area of the exhaust nozzle 21 provided on the same side, the movable plate 3 is set at the position farthest from the electromagnet 4, that is, in the initial state where the movable plate 3 is separated from the supply nozzle 11. Can also linearize the control pressure characteristics with respect to the valve drive current.
  • the fluid servo valve 100 of the first embodiment utilizes the magnetic saturation phenomenon of the magnetic flux flowing in the movable plate 3, the control pressure characteristic with respect to the valve drive current even when the movable plate 3 is on the exhaust nozzle 21 side. Can be linearized.
  • control pressure characteristic with respect to the valve drive current can be linearized in the entire displacement region of the movable plate 3.
  • the flow rate or pressure of the fluid output from the control flow path 13 can be faithfully proportional to the valve drive current or voltage input as shown in the analysis results of FIGS. 7 and 8. Therefore, for example, by using such a fluid servo valve 100 for controlling the active vibration isolation table, highly accurate feedforward control can be realized, and vibration of a controlled object such as an on-board object can be accurately controlled.
  • the movable plate 3 is driven only by the magnetic attraction force of the electromagnet 4. Therefore, permanent magnets are not provided in the supply side valve body 1 and the exhaust side valve body. Therefore, the supply side valve body 1, the movable plate 3, and the exhaust side valve body 2 are arranged side by side along the central axis, and the supply side valve body 1 and the exhaust side valve body are assembled by simply fixing them with bolts. be able to. Therefore, it is easier to assemble than a fluid servo valve that uses a permanent magnet and an electromagnet 4 and uses a flapper that swings between the supply nozzle 11 and the exhaust nozzle 21 as a movable plate 3 by a magnetic attraction force.
  • the fluid servo valve 100 of the first embodiment when the exhaust side valve body 2 is fixed to the supply side valve body, it is only necessary to sandwich the movable plate 3 formed as a thin plate disc between them. Therefore, the cumulative error of assembly with respect to the movable plate 3 is unlikely to occur, and the accuracy required for each component can be reduced. In addition, since it has a simple structure and is easy to assemble, it is easy to equalize the performance between the fluid servo valves 100.
  • the fluid servo valve 100 of the second embodiment is different from the fluid servo valve 100 of the first embodiment in the following points. That is, the fluid servo valve 100 of the second embodiment is different in that the inner diameters of the supply valve and the exhaust valve are set to the same diameter, whereas the throttle 5 is provided in the exhaust side flow path 22. ing.
  • the throttle 5 is composed of, for example, a closing plate provided so as to block the inside of the exhaust side flow path 22 and a hole having a diameter smaller than the inner diameter of the tip end portion of the exhaust nozzle 21.
  • control pressure characteristic can be linearized with respect to the valve drive current in the entire displacement range of the movable plate 3 as in the first embodiment.
  • the diameter of the hole of the diaphragm 5 provided in the exhaust side flow path 22 can be changed to absorb, for example, a manufacturing error of each nozzle, and a desired ratio of effective cross-sectional areas can be realized. Further, since the fluid servo valve 100 having various characteristics can be realized only by changing the diaphragm 5, it is easy to realize a variation of the product while suppressing the number of types of parts.
  • the definition of the effective cross-sectional area (effective flow rate area) of the nozzle is supplemented.
  • Either the exhaust side flow path 22 is not provided with a throttle as in the fluid servo valve 100 of the first embodiment, or the exhaust side flow path 22 is provided with a throttle as in the fluid servo valve 100 of the second embodiment. Even so, the effective cross-sectional areas of the supply nozzle 11 and the exhaust nozzle 21 can be actually measured by the experimental method described below.
  • the valve drive voltage is maximized and the exhaust nozzle 21 is closed by the movable plate 3.
  • the effective cross-sectional area A in is calculated based on the supply pressure Ps of the supply nozzle 11 at this time and the measured flow rate of the fluid flowing through the control flow path 13 open to the atmosphere.
  • the valve drive voltage is set to zero and the supply nozzle 11 is closed by the movable plate 3.
  • the effective cross-sectional area A out is calculated based on the supply pressure Ps of the control flow path 13 and the measured flow rate of the fluid flowing through the exhaust side flow path 22 at this time.
  • those specified in JIS B 8390 may be used.
  • the experimental apparatus includes a pressure measuring mechanism PM including a pressure regulator P1 and a pressure sensor P2 connected to the supply side flow path 12 or the control flow path 13 of the fluid servo valve 100, and the fluid servo valve 100. It includes a flow rate measuring mechanism FM connected to the control flow path 13 or the exhaust side flow path 22.
  • the exhaust side flow path 22 is throttled
  • the supply side flow path 12 can also be throttled in the same manner.
  • the effective cross-sectional area A in may be calculated by the above-mentioned actual measurement method.
  • the fluid servo valve 100 of the first embodiment was composed of only axisymmetric parts.
  • the fluid servo valve 100 of the third embodiment is a closed-loop magnetic circuit MC, which is a combination of various iron cores such as prisms, cylinders, horseshoe-shaped and annular parts, rectangular thin plate materials, and square blocks, in addition to axisymmetric parts. And a fluid circuit is formed.
  • the block arranged on the upper side is the supply side valve body 1 in which the supply side flow path 12 and the control flow path 13 are formed, and the block arranged on the lower side is the exhaust side valve body. It is 2.
  • the supply side flow path 12 through which compressed air flows and the exhaust side flow path 22 are arranged so as to be coaxial with each other at the outer edge portion.
  • the movable plate 3 is a rectangular thin plate whose one end is fixed to the supply side valve body 1, and the free end side is arranged between each tip of the supply side nozzle and the exhaust nozzle 21 in the state of a cantilever. Has been done.
  • the exhaust side valve body 2 has an arm portion 4A provided in the yoke 43 so that the magnetic poles face the central portion of the movable plate 3, and a core material bolted to the arm portion 4A and the supply side valve body 1. It consists of a part 4B.
  • the inner diameter of the supply nozzle 11 is formed larger than the inner diameter of the exhaust nozzle 21, and is configured as an asymmetric nozzle.
  • the magnetic flux is configured in the circulation quantity in the order of the core material portion 4B, the arm portion 4A, the inside of the movable plate 3, and the core material portion 4B.
  • the movable plate 3 having the thinnest thickness among the members constituting the closed-loop magnetic circuit MC is configured so that the magnetic saturation phenomenon occurs within the displacement range of the movable plate 3.
  • the supply nozzle 11 and the exhaust nozzle 21 are configured as asymmetric nozzles while utilizing the magnetic saturation phenomenon, so that the entire displacement range of the movable plate 3 is covered. Therefore, the control pressure characteristic with respect to the valve drive current can be linearized.
  • the coil 42 of the electromagnet 4 may be configured to be exposed to the outside from the accommodation space formed between the supply side valve body 1 and the exhaust side valve body 2. Further, as shown in FIG. 13, the shape of the core material portion 4B of the exhaust side valve body 2 may be changed so that the fixed end of the movable plate 3 is bolted to the exhaust side valve body 2. As shown in FIG. 14, a thin portion or a notch 34 may be formed in a part of the movable plate 3 so that the displacement portion 31 is displaced more greatly with respect to the magnetic attraction force of the electromagnet 4.
  • the active vibration isolation table which is the fluid servo device 200 may be configured by using the fluid servo valve 100 described in each of the above-described embodiments.
  • the active vibration isolation table is provided on the table ST on which the load to be vibration-isolated or vibration-suppressed is placed, and the air pressure provided on the leg of the table ST and connected to the fluid servo valve 100.
  • It includes an actuator AS, a sensor SN that detects the displacement or vibration state of the table ST that is a controlled object, and a controller CN that controls the fluid servo valve 100 based on the output of the sensor SN.
  • the position, speed, and acceleration of the table ST are detected by a plurality of sensors SN provided for the table ST and the foundation, and their output signals are input to the controller CN.
  • the function of the controller CN is realized by using a computer, for example, and the fluid servo valve 100 is set so that the disturbance influence such as the vibration of the foundation is canceled based on the output of each sensor SN input. It is controlled by feedforward control. That is, the controller CN controls the pressure or flow rate of the compressed air supplied from the fluid servo valve 100 connected to the source of the compressed air to the pneumatic actuator AS via the control flow path 13.
  • the fluid servo valve 100 is used to control the flow rate of compressed air, for example, in order to control the internal pressure of a pneumatic actuator provided on an active vibration isolation table.
  • a pneumatic actuator provided on an active vibration isolation table.
  • it is assumed that it is used especially for an active vibration isolation table for an electron microscope, and the vibration isolation performance of -20 dB or less can be exhibited in the frequency range of 0.5 Hz to 1.0 Hz.
  • the fluid servo valve 100 is configured to realize minute flow rate control.
  • the fluid servo valve 100 is formed in a substantially rectangular shape, and the supply side valve body in which the supply side flow path 12 for supplying compressed air is formed inside the fluid servo valve 100.
  • the exhaust side valve body 2 which has a roughly two-stage cylindrical shape and has an exhaust side flow path 22 for exhausting a part of the supplied compressed air to the outside, and the supply side valve body 1 and the exhaust side. It includes a movable plate 3 sandwiched between the valve body 2 and the valve body 2.
  • the supply-side valve body 1 has a supply-side flow path 12 which is a through hole formed along the central axis and is displaced outward in a predetermined distance radial direction from the central axis to the supply side. It is provided with a control flow path 13 which is a through hole penetrated in parallel with the flow path 12.
  • a substantially thin disk-shaped recess is formed on the inner surface of the supply-side valve body 1, and a supply-side gap 14 is formed between the supply-side valve body 1 and the movable plate 3. Further, a supply nozzle 11 is provided on the side of the supply side flow path 12 facing the movable plate 3.
  • the exhaust side valve body 2 is provided with an exhaust side flow path 22 which is a through hole formed along the central axis.
  • An exhaust nozzle 21 is provided on the inner surface side of the exhaust side valve body 2 in the exhaust side flow path 22 so as to face the movable plate 3. That is, the supply nozzle 11 and the exhaust nozzle 21 are arranged coaxially side by side, and the central portion of the movable plate 3 is arranged between the tip portions of the nozzles.
  • the exhaust side valve body 2 accommodates an electromagnet 4 having a substantially cylindrical shape and the above-mentioned exhaust nozzle 21 and exhaust side flow path 22 formed on the central axis, and the electromagnet 4 inside, and a supply side valve body. It is composed of a substantially cylindrical outer cover 2C which is fixed to 1 and sandwiches the movable plate 3.
  • the supply nozzle 11 and the exhaust nozzle 21 have the same inner diameter, and these form a symmetrical nozzle.
  • a throttle 13N is formed at the inflow port of the control flow path 13 that opens on the inner surface side of the supply side valve body 1. Further, the outlet side of the control flow path 13 that opens to the outer surface side of the supply side valve body 1 is used as a connection port to which a pipe to a pneumatic actuator or the like to be controlled is connected. As shown in FIG. 18, the inner diameter of the control flow path 13 is constant except for the throttle 13N formed at the inflow port. The throttle diameter of the throttle 13N of the control flow path 13 is appropriately changed according to the flow rate range of the compressed air to be controlled by the fluid servo valve 100.
  • the fluid servo valve 100 of the fifth embodiment is designed to share parts with a fluid servo valve of another lineup configured for a large flow rate, for example, at least the outer shape of each part other than the control flow path 13. Most of the dimensions are standardized.
  • the throttle 13N of the control flow path 13 is not provided, and the control flow path 13 is formed as a straight pipe. Further, as the flow rate range to be controlled becomes smaller, the aperture diameter of the aperture N of the control flow path 13 is formed to be smaller.
  • the electromagnet 4 includes a coil bobbin 41, a coil 42 wound around the coil bobbin 41, and a closed-loop magnetic circuit MC of magnetic flux generated by applying a valve drive current to the coil 42.
  • the yoke 43 and the yoke 43 are provided.
  • the coil bobbin 41 is made of a non-magnetic material
  • the yoke 43 is made of a magnetic material.
  • the yoke 43 has a substantially cylindrical shape, and has a central shaft portion 44 in which the coil bobbin 41 is fitted on the outer peripheral surface thereof, and a thin disk shape that extends radially outward from the base end side of the central shaft portion 44.
  • a bottom surface 45 fixed by an outer cover and bolts, a substantially thin cylindrical outer peripheral portion 46 extending in the axial direction from the outer circumference of the bottom surface portion 45, and a roughly thin-walled two-stage extending radially inward from the tip side of the outer peripheral portion 46. It is composed of a top surface portion 47 having a cylindrical shape.
  • An exhaust side gap portion 23 is formed between the top surface portion 47 and the movable plate 3.
  • the central shaft portion 44 has a hollow cylindrical shape, and the exhaust side flow path 22 is formed by the internal cavity. Further, the exhaust nozzle 21 described above is formed at the tip of the central shaft portion 44. Further, as shown in FIG. 19B, the first magnetic pole 48 is formed by an annular ridge having three notches formed so as to surround the exhaust nozzle 21. In addition, as shown in FIG. 19A, the top surface portion 47 has a second magnetic pole 49 formed by an annular ridge projecting from the center portion so as to be close to the movable plate 3 side.
  • the magnetic flux generated by the coil 42 is "inside the central shaft portion 44-> the first magnetic pole 48-> the exhaust side gap portion 23-> the movable plate 3-> the exhaust side gap portion 23-> the second magnetic pole 49-> the top surface portion 47-> the outer peripheral portion 46.
  • a closed-loop magnetic circuit MC is formed so that the magnetic flux circulates through the path of the bottom surface portion 45 and the central shaft portion 44.
  • the magnetic flux density of the magnetic flux in the movable plate 3 of the magnetic flux is configured to cause magnetic saturation depending on the material of the movable plate 3, the thickness and shape of the movable plate 3, and the like.
  • the magnetic characteristics of the magnetic material components forming the closed-loop magnetic circuit MC are compared with the linear region in which the characteristics of the magnetic flux density with respect to the magnetization force are roughly proportional to each other and the gradient angle of the magnetic flux density with respect to the magnetization force in the linear region.
  • a region that changes slightly is a magnetic saturation region.
  • the thickness and shape of the movable plate 3 forming a part of the closed-loop magnetic circuit MC are such that when the valve drive current is within a predetermined range, the characteristics of the magnetic flux density with respect to the magnetization force in the movable plate 3 fall into the above-mentioned magnetic saturation region. Is set to.
  • the movable plate 3 When the movable plate 3 is closer to the electromagnet 4 side than the predetermined position between the supply nozzle 11 and the exhaust nozzle 21, the steep displacement of the movable plate 3 with respect to the valve drive current is suppressed by the magnetic saturation phenomenon. .. That is, the displacement of the movable plate 3 is configured to change substantially in proportion to the change in the valve drive current.
  • the movable plate 3 is a thin disk-shaped disc, and is displaced between the tip portions of the supply nozzle 11 and the exhaust nozzle 21 by the magnetic attraction force of the electromagnet 4. It is configured. More specifically, in the movable plate 3, the outer edge portion is sandwiched and fixed between the supply side valve body 1 and the exhaust side valve body 2, and the maximum displacement to the central portion due to the elastic deformation of the unfixed portion. Is configured to occur.
  • the displacement portion 31 which is the central portion of the movable plate 3 is the position where the displacement portion 31 is maximally displaced by the magnetic attraction force of the electromagnet 4.
  • the outer edge portion of the movable plate 3 is a fixed portion 32 whose position is fixed with respect to the supply nozzle 11 and the exhaust nozzle 21.
  • the fixed portion 32 is a portion that is pressed and sandwiched between the supply-side valve body 1 and the exhaust-side valve body 2, and is a portion that is supported by the fixed end in the movable plate 3.
  • the displacement portion 31 is a portion where the force generated by the pressure on the supply side and the exhaust side and the magnetic attraction force by the electromagnet 4 act to cause displacement due to film deformation.
  • the face plate portion of the movable plate 3 is formed with four fluid flow holes 33 through which compressed air, which is a fluid, passes from the supply side gap portion 14 to the exhaust side gap portion 23, and each fluid flow hole 34 is movable. It is arranged spirally with respect to the center of the plate 3.
  • the fluid flow hole 34 is formed so that the slit width becomes smaller from the outer edge side to the center side.
  • the movable plate 3 is driven only by the magnetic attraction force of the electromagnet 4. Therefore, permanent magnets are not provided in the supply side valve body 1 and the exhaust side valve body. Therefore, in a state where the supply side valve body 1, the movable plate 3, and the exhaust side valve body 2 are arranged along the central axis, it is only necessary to fix the supply side valve body 1 and the exhaust side valve body 2 with bolts. Can be assembled.
  • the compressed air supplied from the supply nozzle 11 flows into the supply-side gap 14, and a part of the compressed air flows out from the control flow path 13 to the pneumatic actuator. Further, the rest of the compressed air that has flowed into the supply-side gap 14 flows into the exhaust-side gap 23 through the fluid flow hole 34 of the movable plate 3. The compressed air in the exhaust side gap 23 is sucked from the exhaust nozzle 21 and is exhausted to the outside through the exhaust side flow path 22. Further, the position of the movable plate 3 between the supply nozzle 11 and the exhaust nozzle 21 is controlled by the magnetic attraction force of the electromagnet 4, so that the flow rate of the compressed air supplied from the control flow path 13 to the pneumatic actuator is controlled. NS.
  • the operating point is, for example, a value set to the median current value or voltage value in the application range of the valve drive current or the valve drive voltage applied to the fluid servo valve 100.
  • the operating point may be set by deviating from the median value.
  • control flow path 13 is not provided with the throttle 13N and is configured as a large flow rate fluid servo valve, and the control flow path 13 is provided with the throttle 13N to provide the fluid of the fifth embodiment.
  • the graph of FIG. 20 shows the comparison result of the flow rate of the compressed air flowing out from the control flow path 13 when the servo valve 100 is configured.
  • Each fluid servo valve has the same configuration except for the throttle 13N of the control flow path 13.
  • the fluid servo valve 100 of the fifth embodiment of the above can be configured. That is, at least the dimensions of the configuration such as the supply nozzle 11, the exhaust nozzle 21, the movable plate 3, the electromagnet 4, the supply side gap 14, and the exhaust side gap 23 can be made common regardless of the large flow rate or the minute flow rate, and the control flow path can be shared.
  • the flow rate control range and resolution can be adjusted with the 13 diaphragms 13N.
  • the disk displacement (displacement of the movable plate 3) with respect to the valve drive voltage applied to the electromagnet 4 of the conventional fluid servo valve for large flow rate and the fluid servo valve 100 of the fifth embodiment is output from the control flow path.
  • the analysis result of the change characteristic of the control pressure, which is the pressure of the compressed air, is shown in the graph of FIG.
  • the fluid servo valve 100 of the fifth embodiment minimizes only the flow rate and resolution of the compressed air flowing out of the control flow path 13 while keeping the stroke and pressure characteristics of the disk (movable plate 3) unchanged. Can be converted.
  • the minute flow rate control can be realized only by forming the throttle 13N in the control flow path 13 in this way, the inner diameters of the supply nozzle 11 and the exhaust nozzle 21 can be further miniaturized as in the conventional case, and the stroke and control of the movable plate 3 can be controlled. There is no need to reduce the resolution. Therefore, unlike the conventional fluid servo valve for minute flow rate, high component accuracy and assembly accuracy are not required, and the yield can be improved even at the time of mass production.
  • the fluid servo valve 100 of the sixth embodiment has a different configuration of the supply nozzle 11 and the exhaust nozzle 21 as compared with the fifth embodiment. Specifically, as shown in the enlarged view of each tip of the supply nozzle 11 and the exhaust nozzle 21 in FIG. 22, the inner diameter of the tip of the supply nozzle 11 is formed to be larger than the inner diameter of the exhaust nozzle 21, respectively.
  • the effective cross-sectional area of is different. That is, the effective cross-sectional area of the supply nozzle 11 arranged on the side opposite to the electromagnet 4 with respect to the movable plate 3 is the effective disconnection of the exhaust nozzle 21 arranged on the same side as the electromagnet 4 with respect to the movable plate 3. It is configured to be larger than the area. As described above, the characteristics of the supply nozzle 11 and the exhaust nozzle 21 are asymmetrical with respect to the midpoint of each nozzle.
  • the displacement portion 31 of the movable plate 3 is relative to the tip of the supply nozzle 11. It is configured so that it comes into contact with each other and the opening is closed. Specifically, the tip of the supply nozzle 11 projects toward the exhaust nozzle 21 by a predetermined amount of protrusion with respect to the fixed portion 32 of the movable plate 3.
  • the opening area A in of the supply nozzle 11 is kept constant and the opening area A out of the exhaust nozzle 21 is changed is shown.
  • the characteristics of the control flow rate with respect to the valve drive voltage can be linearized by increasing the effective cross-sectional area ratio and making the characteristics of the supply nozzle 11 and the exhaust nozzle 21 asymmetric.
  • the graph of FIG. 24 shows the result of analyzing the relationship between the effective cross-sectional area ratio (opening area ratio) of each of the supply nozzle 11 and the exhaust nozzle 21 and the control pressure. A similar tendency is observed for the control pressure, and by making the characteristics of the supply nozzle 11 and the exhaust nozzle 21 asymmetric, the characteristics of the control pressure with respect to the valve drive voltage can be linearized.
  • FIG. 24 shows the characteristics of the control pressure Pa with respect to the effective cross-sectional area ratio A in / A out.
  • the control pressure range in which linearity can be maintained that is, the appropriate range of the effective cross-sectional area ratio satisfying 0.1 MPa ⁇ Pa ⁇ 0.4 MPa is 1.5 ⁇ A in / A out ⁇ 5.0. Furthermore, in the experimental results of mounting this valve on the active vibration isolation table, it was found that if the range of 2.5 ⁇ A in / A out ⁇ 4.0 is set, feedforward control of large amplitude input can be supported. That is, the best effect was obtained in the feedforward control that cancels a large load fluctuation with a pressure waveform having an opposite phase.
  • the fluid servo valve 100 of the seventh embodiment is different from the fluid servo valve 100 of the sixth embodiment in the following points. That is, in the fluid servo valve 100 of the seventh embodiment, the inner diameters of the supply nozzle 11 and the exhaust nozzle 21 are set to the same diameter, whereas the throttle is provided in the exhaust side flow path 22. It's different.
  • This throttle is composed of, for example, a closing plate 5 provided so as to block the inside of the exhaust side flow path 22, and a hole 51 having a diameter smaller than the inner diameter of the tip end portion of the exhaust nozzle 21.
  • FIG. 27 shows a case where the configuration of the fluid servo valve 100 in which the throttle is formed in both the control flow path 13 and the exhaust side flow path 22 is replaced with an equivalent electric circuit.
  • fluid analysis was performed on the characteristics of the control flow rate and the control pressure with respect to the diameter of the hole 51 of the block plate 5.
  • the characteristics of the control flow rate and the control pressure with respect to the valve drive voltage can be linearized in the seventh embodiment as in the sixth embodiment.
  • the characteristics of the supply nozzle 11 and the exhaust nozzle 21 are set to be the same, by adjusting the diameter of the hole 51 of the closing plate 5 provided in the exhaust side flow path 22, the control characteristics are linearized and minute. Flow rate control can be realized.
  • the control pressure with respect to the voltage is non-linear when the movable plate 3 is close to the exhaust nozzle 21, that is, near the maximum voltage (10V), depending on the condition of the diameter of the hole 51 of the closing plate 5. It turned out that it may be.
  • the reason for this is that the intermediate pressure of the gap 44 in the exhaust flow path between the exhaust nozzle 21 and the hole 51 of the closing plate changes depending on the position of the movable plate 3. This change in the intermediate pressure slightly affects the displacement characteristics of the movable plate 3 when the movable plate 3 is close to the exhaust nozzle 21.
  • this servo valve may be applied in the range of 0 ⁇ V ⁇ V X. This method can be applied even when the control flow path 13 throttle is not provided.
  • the definition of the effective cross-sectional area (effective flow rate area) of the nozzle is supplemented.
  • Either the exhaust side flow path 22 is not provided with a throttle as in the fluid servo valve 100 of the sixth embodiment, or the exhaust side flow path 22 is provided with a throttle as in the fluid servo valve 100 of the seventh embodiment. Even so, the effective cross-sectional areas of the supply nozzle 11 and the exhaust nozzle 21 can be actually measured by the experimental method described below.
  • the valve drive voltage is maximized and the exhaust nozzle 21 is closed by the movable plate 3.
  • the effective cross-sectional area A in is calculated based on the supply pressure Ps of the supply nozzle 11 at this time and the measured flow rate of the fluid flowing through the control flow path 13 open to the atmosphere.
  • the valve drive voltage is set to zero and the supply nozzle 11 is closed by the movable plate 3.
  • the effective cross-sectional area A out is calculated based on the supply pressure Ps of the control flow path 13 and the measured flow rate of the fluid flowing through the exhaust side flow path 22 at this time.
  • those specified in JIS B 8390 may be used.
  • the experimental apparatus includes a pressure measuring mechanism PM including a pressure regulator P1 and a pressure sensor P2 connected to the supply side flow path 12 or the control flow path 13 of the fluid servo valve 100, and the fluid servo valve 100. It includes a flow rate measuring mechanism FM connected to the control flow path 13 or the exhaust side flow path 22.
  • the supply side flow path 12 can be similarly throttled.
  • the effective cross-sectional area A in may be calculated by the above-mentioned actual measurement method.
  • the fluid servo valve 100 of the fifth to seventh embodiments was composed of only axisymmetric parts.
  • the fluid servo valve 100 of the eighth embodiment is a closed-loop magnetic circuit MC, which is a combination of various iron cores such as prisms, cylinders, horseshoe-shaped and annular parts, rectangular thin plate materials, and square blocks, in addition to axisymmetric parts. And a fluid circuit is formed.
  • the block arranged on the upper side is the supply side valve body 1 in which the supply side flow path 12 and the control flow path 13 are formed, and the block arranged on the lower side is the exhaust side valve body. It is 2.
  • the supply side flow path 12 through which compressed air flows and the exhaust side flow path 22 are arranged coaxially with each other at the outer edge of each valve body.
  • the movable plate 3 is a rectangular thin plate whose one end is fixed to the supply side valve body 1, and the free end side is arranged between each tip of the supply side nozzle and the exhaust nozzle 21 in the state of a cantilever. Has been done.
  • the exhaust side valve body 2 has an arm portion 4A provided in the yoke 43 so that the magnetic poles face the central portion of the movable plate 3, and a core material bolted to the arm portion 4A and the supply side valve body 1. It consists of a part 4B.
  • the inner diameter of the supply nozzle 11 is formed larger than the inner diameter of the exhaust nozzle 21, and is configured as an asymmetric nozzle.
  • the closed-loop magnetic circuit MC including the movable plate 3 is configured such that the magnetic flux circulates in the order of the core material portion 4B, the arm portion 4A, the inside of the movable plate 3, and the core material portion 4B.
  • the movable plate 3 having the thinnest thickness among the members constituting the closed-loop magnetic circuit MC is configured so that the magnetic saturation phenomenon occurs within the displacement range of the movable plate 3.
  • control flow path 13 is formed with a throttle 13N on the inflow port side.
  • the controlled flow rate of the compressed air can be miniaturized because the throttle 13N is formed in the control flow path 13. Further, the flow rate control range can be adjusted according to the diaphragm diameter of the diaphragm 13N formed in the control flow path 13. Therefore, it is possible to easily create variations of the fluid servo valve 100 having various flow control ranges while making the configurations of the supply nozzle 11 and the exhaust nozzle 21 common.
  • the coil 42 of the electromagnet 4 may be configured to be exposed to the outside from the accommodation space formed between the supply side valve body 1 and the exhaust side valve body 2.
  • the shape of the core material portion 4B of the exhaust side valve body 2 may be changed so that the fixed end of the movable plate 3 is bolted to the exhaust side valve body 2.
  • a thin-walled portion or a notch 34 may be formed in a part of the movable plate 3 so that the displacement portion 31 is displaced more greatly with respect to the magnetic attraction force of the electromagnet 4.
  • the fluid servo valve may be provided with an electromagnet on the valve body on the supply side.
  • the effective cross-sectional area of the exhaust nozzle provided on the side opposite to the electromagnet with respect to the movable plate may be made larger than the effective cross-sectional area of the supply-side nozzle. That is, by making the effective cross-sectional area of the nozzle on the side away from the electromagnet with respect to the movable plate larger than the effective cross-sectional area of the other nozzle, the movable plate is displaced to a position farther from the operating point from the electromagnet.
  • the control pressure characteristics can be linearized in the present state.
  • the movable plate is not limited to a thin-walled disk-shaped disc and a thin-walled rectangular parallelepiped plate member, and may have various shapes. Further, the fluid servo valve according to the present invention may be configured so that the magnetic saturation phenomenon does not occur in the closed loop magnetic circuit.
  • the position of the movable plate when the valve drive current is not applied to the electromagnet is not limited to the position where the supply nozzle can be closed.
  • the movable plate may be separated from the tip of the supply nozzle in a state where the valve drive current is not applied to the electromagnet.
  • the effective cross-sectional areas of the supply side nozzle and the exhaust side nozzle asymmetric for example, adjust by reducing the flow path diameter of the supply side flow path or the exhaust side flow path and acting as a flow path resistance. May be good.
  • the entire flow path diameter may be formed smaller than the supply side flow path and the exhaust side flow path.
  • the closing plate described in the seventh embodiment may be used to form a throttle in the control flow path. For example, if a closing plate is provided so as to block the outlet of the control flow path that opens on the inner surface of the supply-side valve body, a control flow path suitable for minute flow rate control can be realized by retrofitting.
  • the fluid servo valve according to the present invention is not limited to the one used for controlling the pneumatic actuator. It may be used in applications that require control of the pressure and flow rate of other fluids.
  • the fluid servo device according to the present invention is not limited to the active vibration isolation table, and may be, for example, a passive vibration isolation table or other device in which only feedback control is performed.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Magnetically Actuated Valves (AREA)

Abstract

Afin de fournir une vanne d'asservissement de fluide au moyen de laquelle il est possible de linéariser les caractéristiques de pression de commande par rapport au courant d'entraînement de vanne même lorsqu'une plaque mobile est séparée d'un électroaimant qui présente un effet d'attraction magnétique, la vanne d'asservissement de fluide selon l'invention comprend : une buse d'alimentation (11) qui est reliée à un trajet d'écoulement côté alimentation (12) et dans laquelle un fluide est évacué à partir d'une section pointe ; une buse d'échappement (21) qui est reliée à un trajet d'écoulement côté échappement (22) et dans laquelle le fluide est aspiré à partir d'une section pointe ; une plaque mobile (3) disposée entre les sections pointe respectives de la buse d'alimentation (11) et de la buse d'échappement (21) ; et un électroaimant (4) qui amène au moins une partie de la plaque mobile (3) à se déformer et à être déplacée entre la buse d'alimentation (11) et la buse d'échappement (22). De plus, la surface de section transversale effective de la buse d'alimentation (11) est amenée à être différente de la surface de section transversale effective de la buse d'échappement (21).
PCT/JP2021/013962 2020-03-31 2021-03-31 Vanne d'asservissement de fluide et dispositif d'asservissement de fluide WO2021201146A1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2020064128A JP7477860B2 (ja) 2020-03-31 2020-03-31 流体サーボバルブ及び流体サーボ装置
JP2020-064127 2020-03-31
JP2020064127A JP2021162087A (ja) 2020-03-31 2020-03-31 流体サーボバルブ及び流体サーボ装置
JP2020-064128 2020-03-31

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09503847A (ja) * 1993-10-07 1997-04-15 エルページェ システムズ ソレノイドバルブと該ソレノイドバルブを用いたマッサージ装置
JP2004176858A (ja) * 2002-11-28 2004-06-24 Ckd Corp 高圧電磁弁
JP2018025233A (ja) * 2016-08-09 2018-02-15 特許機器株式会社 流体サーボバルブ及び流体サーボ装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09503847A (ja) * 1993-10-07 1997-04-15 エルページェ システムズ ソレノイドバルブと該ソレノイドバルブを用いたマッサージ装置
JP2004176858A (ja) * 2002-11-28 2004-06-24 Ckd Corp 高圧電磁弁
JP2018025233A (ja) * 2016-08-09 2018-02-15 特許機器株式会社 流体サーボバルブ及び流体サーボ装置

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