WO2021200455A1 - 積層圧電素子および電気音響変換器 - Google Patents

積層圧電素子および電気音響変換器 Download PDF

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Publication number
WO2021200455A1
WO2021200455A1 PCT/JP2021/012200 JP2021012200W WO2021200455A1 WO 2021200455 A1 WO2021200455 A1 WO 2021200455A1 JP 2021012200 W JP2021012200 W JP 2021012200W WO 2021200455 A1 WO2021200455 A1 WO 2021200455A1
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Prior art keywords
piezoelectric element
laminated
piezoelectric
diaphragm
laminated piezoelectric
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PCT/JP2021/012200
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English (en)
French (fr)
Japanese (ja)
Inventor
輝男 芦川
裕介 香川
平口　和男
三好　哲
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Fujifilm Corp
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Fujifilm Corp
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Priority to EP21780794.0A priority Critical patent/EP4129497A4/en
Priority to CN202180022200.5A priority patent/CN115298842A/zh
Priority to JP2022512021A priority patent/JP7386324B2/ja
Priority to KR1020227033021A priority patent/KR20220145379A/ko
Publication of WO2021200455A1 publication Critical patent/WO2021200455A1/ja
Priority to US17/955,610 priority patent/US20230026623A1/en
Anticipated expiration legal-status Critical
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0611—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H04R17/005—Piezoelectric transducers; Electrostrictive transducers using a piezoelectric polymer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0688—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction with foil-type piezoelectric elements, e.g. PVDF
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/206—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using only longitudinal or thickness displacement, e.g. d33 or d31 type devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/852—Composite materials, e.g. having 1-3 or 2-2 type connectivity
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/857—Macromolecular compositions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R2217/00—Details of magnetostrictive, piezoelectric, or electrostrictive transducers covered by H04R15/00 or H04R17/00 but not provided for in any of their subgroups
    • H04R2217/01—Non-planar magnetostrictive, piezoelectric or electrostrictive benders
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes

Definitions

  • the present invention relates to a laminated piezoelectric element used for an exciter or the like, and an electroacoustic converter using this laminated piezoelectric element.
  • So-called excitons which vibrate articles and make sounds when they are attached to various articles in contact with each other, are used for various purposes. For example, in an office, by attaching an exciter to a conference table, a whiteboard, a screen, or the like during a presentation or a conference call, sound can be produced instead of a speaker.
  • a guide sound, a warning sound, music, and the like can be sounded by attaching an exciter to the console, the A pillar, the ceiling, and the like.
  • a vehicle approach notification sound can be emitted from the bumper or the like by attaching an exciter to the bumper or the like.
  • variable element that generates vibration in such an exciter a combination of a coil and a magnet, a vibration motor such as an eccentric motor and a linear resonance motor, and the like are known. It is difficult to reduce the thickness of these variable elements.
  • the vibration motor has drawbacks such as a mass body needs to be increased in order to increase the vibration force, frequency modulation for adjusting the degree of vibration is difficult, and a response speed is slow.
  • Patent Document 1 describes a piezoelectric layer (piezoelectric film) extending in one direction, a first electrode layer (electrode film) provided on one surface of the piezoelectric layer, and the other surface of the piezoelectric layer.
  • the piezoelectric film having the provided second electrode layer is bent at least once in the stretching direction, and is formed on a main body portion on which the bent portion is a side surface and a side surface on which the first electrode layer of the main body portion is exposed.
  • a laminated piezoelectric element used for an exciter or the like, which has a first reinforcing electrode and a second reinforcing electrode formed on a side surface where a second electrode layer of a main body is exposed.
  • An object of the present invention is to solve such a problem of the prior art, and a laminated piezoelectric element in which a plurality of layers of piezoelectric films are laminated by folding back a piezoelectric film having electrode layers provided on both sides of the piezoelectric layer. It is an object of the present invention to provide a laminated piezoelectric element capable of preventing damage such as peeling of an electrode layer at a folded portion, and an electroacoustic converter using the laminated piezoelectric element.
  • a piezoelectric film having a piezoelectric layer containing piezoelectric particles in a matrix containing a polymer material, electrode layers provided on both sides of the piezoelectric layer, and a protective layer provided over the electrode layer is folded back. It is made by stacking In the adjacent two-layer piezoelectric film laminated by folding, the thickness of the central portion in the folding direction is the central thickness, the length from the end to the center of the folding portion in the folding direction is L, and the folding portion in the folding direction. When the region of 1/3 of the length L is defined as the folded portion from the end portion to the central portion, the folded portion has a portion thicker than the central thickness.
  • the laminated piezoelectric element according to [1] which has a sticking layer for sticking two adjacent piezoelectric films laminated by folding back.
  • a protruding portion from which the piezoelectric film protrudes is provided at an end portion of the laminated piezoelectric element in the longitudinal direction.
  • An electroacoustic converter comprising the laminated piezoelectric element according to any one of [1] to [8] and a diaphragm to which the laminated piezoelectric element is fixed.
  • the electroacoustic transducer according to [9] wherein the diaphragm is flexible.
  • the diaphragm has a quadrangular shape in which at least one set of two opposing sides is fixed, and when the distance between the fixed ends on the two opposing sides is L, the laminated piezoelectric element is attached to the diaphragm.
  • the electroacoustic transducer according to [12] or [13], wherein the spring constant of the diaphragm is 1 ⁇ 10 4 to 1 ⁇ 10 7 N / m.
  • a laminated piezoelectric element in which a plurality of layers are laminated by folding back a piezoelectric film, a laminated piezoelectric element capable of preventing damage such as peeling of an electrode layer at the folded portion, and the laminated piezoelectric element are used.
  • a piezoelectric converter is provided.
  • FIG. 1 It is a figure which conceptually shows an example of the laminated piezoelectric element of this invention. It is a figure which conceptually shows an example of the piezoelectric film which comprises the laminated piezoelectric element shown in FIG. It is a conceptual diagram for demonstrating an example of the manufacturing method of a piezoelectric film. It is a conceptual diagram for demonstrating an example of the manufacturing method of a piezoelectric film. It is a conceptual diagram for demonstrating an example of the manufacturing method of a piezoelectric film. It is a conceptual diagram for demonstrating an example of the manufacturing method of a piezoelectric film. It is a conceptual diagram for demonstrating an example of the laminated piezoelectric element of this invention. It is a conceptual diagram for demonstrating another example of the laminated piezoelectric element of this invention.
  • FIG. 26 It is a conceptual diagram for demonstrating another example of the war record acoustic transducer of this invention. It is a conceptual diagram for demonstrating another example of the war record acoustic transducer of this invention. It is a conceptual diagram for demonstrating another example of the war record acoustic transducer of this invention. It is a conceptual diagram for demonstrating another example of the war record acoustic transducer of this invention.
  • the description of the constituent elements described below may be based on a typical embodiment of the present invention, but the present invention is not limited to such an embodiment.
  • the numerical range represented by using "-" means a range including the numerical values before and after "-" as the lower limit value and the upper limit value.
  • the drawings shown below are conceptual diagrams for explaining the present invention. Therefore, the thickness, size, shape, positional relationship, etc. of each component are not necessarily the same as the actual ones.
  • FIG. 1 conceptually shows an example of the laminated piezoelectric element of the present invention.
  • the laminated piezoelectric element 10 shown in FIG. 1 is a state in which one piezoelectric film 12 is folded four times to form a state in which five layers of piezoelectric films 12 are laminated.
  • the piezoelectric film 12 has electrode layers 24 and 26 on both sides of the piezoelectric layer 20, covers both electrode layers 24 and 26, and has protective layers 28 and 30.
  • the folded portion 40 of the piezoelectric film 12 is thicker than the central portion.
  • the folded-back portion 40 has a gap or is filled with a patch.
  • the laminated piezoelectric element 10 of the present invention has such a configuration to prevent peeling of the electrode layer and the protective layer at the folded-back portion 40.
  • the laminated piezoelectric element 10 shown in FIG. 1 has five layers of the piezoelectric film 12 laminated by folding the piezoelectric film 12 four times, but the present invention is not limited to this. That is, the laminated piezoelectric element of the present invention may be one in which the piezoelectric film 12 is folded three times or less to laminate two to four layers of the piezoelectric film 12. Alternatively, the laminated piezoelectric element of the present invention may be one in which the piezoelectric film 12 is laminated in 6 layers or more by folding back the piezoelectric film 5 times or more. The laminated piezoelectric element of the present invention preferably has three or more layers of the piezoelectric film 12 laminated by folding back the piezoelectric film 12 twice or more. Further, the laminated piezoelectric element of the present invention may be a laminate of a plurality of laminated piezoelectric elements obtained by folding the piezoelectric film 12 once or more.
  • FIG. 2 conceptually shows the piezoelectric film 12 by a cross-sectional view.
  • the piezoelectric film 12 includes a piezoelectric layer 20 which is a sheet-like material having piezoelectricity, a first thin film electrode 24 laminated on one surface of the piezoelectric layer 20, and a first thin film electrode. It has a first protective layer 28 laminated on 24, a second thin film electrode 26 laminated on the other surface of the piezoelectric layer 20, and a second protective layer 30 laminated on the second thin film electrode 26. .. As will be described later, the piezoelectric film 12 is polarized in the thickness direction.
  • the piezoelectric layer 20 is preferably made of a polymer composite piezoelectric material in which the piezoelectric particles 36 are dispersed in a matrix 34 containing a polymer material, as conceptually shown in FIG. It will be.
  • the matrix 34 preferably contains a polymer material having viscoelasticity at room temperature, and more preferably made of a polymer material having viscoelasticity at room temperature. That is, the matrix 34 is preferably a viscoelastic matrix having viscoelasticity at room temperature.
  • "normal temperature” refers to a temperature range of about 0 to 50 ° C.
  • the polymer composite piezoelectric body (piezoelectric layer 20) preferably has the following requirements.
  • (I) Flexibility For example, when gripping in a state of being loosely bent like a document like a newspaper or a magazine for carrying, it is constantly subjected to a relatively slow and large bending deformation of several Hz or less from the outside. become. At this time, if the polymer composite piezoelectric body is hard, a correspondingly large bending stress is generated, cracks are generated at the interface between the polymer matrix and the piezoelectric particle, and there is a possibility that it will eventually lead to fracture. Therefore, the polymer composite piezoelectric body is required to have appropriate softness. Further, if the strain energy can be diffused to the outside as heat, the stress can be relaxed. Therefore, it is required that the loss tangent of the polymer composite piezoelectric body is appropriately large.
  • the flexible polymer composite piezoelectric material used as an exciter is required to behave hard against vibrations of 20 Hz to 20 kHz and soft against vibrations of several Hz or less. Further, the loss tangent of the polymer composite piezoelectric body is required to be appropriately large for vibrations of all frequencies of 20 kHz or less. Further, it is preferable that the spring constant can be easily adjusted by laminating according to the rigidity (hardness, stiffness, spring constant) of the mating material (diaphragm) to be attached. The thinner the sticking layer 14 shown in 1, the more energy efficient it can be.
  • a polymer solid has a viscoelastic relaxation mechanism, and a large-scale molecular motion causes a decrease in storage elastic modulus (Young's modulus) (relaxation) or a maximum loss elastic modulus (absorption) as the temperature rises or the frequency decreases.
  • Young's modulus storage elastic modulus
  • laxation maximum loss elastic modulus
  • absorption maximum loss elastic modulus
  • main dispersion the relaxation caused by the micro-Brownian motion of the molecular chain in the amorphous region
  • the temperature at which this main dispersion occurs is the glass transition point (Tg), and the viscoelastic relaxation mechanism appears most prominently.
  • the polymer composite piezoelectric body (piezoelectric layer 20), by using a polymer material having a glass transition point at room temperature, in other words, a polymer material having viscoelasticity at room temperature, for vibration of 20 Hz to 20 kHz.
  • a polymer composite piezoelectric material that is hard and behaves softly against slow vibrations of several Hz or less is realized.
  • the polymer material having viscoelasticity at room temperature various known materials can be used.
  • a polymer material having a maximum value of tangent Tan ⁇ at a frequency of 1 Hz by a dynamic viscoelasticity test of 0.5 or more is used at room temperature, that is, at 0 to 50 ° C.
  • the polymer material having viscoelasticity at room temperature preferably has a storage elastic modulus (E') at a frequency of 1 Hz as measured by dynamic viscoelasticity, which is 100 MPa or more at 0 ° C. and 10 MPa or less at 50 ° C.
  • E' storage elastic modulus
  • the polymer material having viscoelasticity at room temperature is more preferably having a relative permittivity of 10 or more at 25 ° C.
  • a voltage is applied to the polymer composite piezoelectric body, a higher electric field is applied to the piezoelectric particles in the polymer matrix, so that a large amount of deformation can be expected.
  • the polymer material has a relative permittivity of 10 or less at 25 ° C.
  • polymer material having viscoelasticity at room temperature satisfying such conditions examples include cyanoethylated polyvinyl alcohol (cyanoethylated PVA), polyvinyl acetate, polyvinylidene chloride core acrylonitrile, polystyrene-vinyl polyisoprene block copolymer, and polyvinylmethyl. Examples thereof include ketones and polybutyl methacrylate. Further, as these polymer materials, commercially available products such as Hybler 5127 (manufactured by Kuraray Co., Ltd.) can also be preferably used.
  • Hybler 5127 manufactured by Kuraray Co., Ltd.
  • the polymer material it is preferable to use a material having a cyanoethyl group, and it is particularly preferable to use cyanoethylated PVA.
  • these polymer materials may use only 1 type, and may use a plurality of types in combination (mixing).
  • a plurality of polymer materials may be used in combination, if necessary. That is, in the matrix 34, in addition to a polymer material having viscoelasticity at room temperature such as cyanoethylated PVA for the purpose of adjusting dielectric properties and mechanical properties, other dielectric polymer materials are added as needed. It may be added.
  • dielectric polymer material examples include polyvinylidene fluoride, vinylidene fluoride-tetrafluoroethylene copolymer, vinylidene fluoride-trifluoroethylene copolymer, and vinylidene fluoride-trifluoroethylene copolymer.
  • fluoropolymers such as polyvinylidene fluoride-tetrafluoroethylene copolymer, vinylidene cyanide-vinyl acetate copolymer, cyanoethyl cellulose, cyanoethyl hydroxysaccharose, cyanoethyl hydroxycellulose, cyanoethyl hydroxypurrane, cyanoethyl methacrylate, cyanoethyl acrylate, cyanoethyl.
  • Cyano groups such as hydroxyethyl cellulose, cyanoethyl amylose, cyanoethyl hydroxypropyl cellulose, cyanoethyl dihydroxypropyl cellulose, cyanoethyl hydroxypropyl amylose, cyanoethyl polyacrylamide, cyanoethyl polyacrylate, cyanoethyl pullulan, cyanoethyl polyhydroxymethylene, cyanoethyl glycidol pullulan, cyanoethyl saccharose and cyanoethyl sorbitol.
  • polymers having a cyanoethyl group synthetic rubbers such as nitrile rubber and chloroprene rubber, and the like are exemplified. Among them, a polymer material having a cyanoethyl group is preferably used. Further, in the matrix 34 of the piezoelectric layer 20, the dielectric polymer added in addition to the material having viscoelasticity at room temperature such as cyanoethylated PVA is not limited to one type, and a plurality of types may be added. ..
  • the matrix 34 contains a thermoplastic resin such as vinyl chloride resin, polyethylene, polystyrene, methacrylic resin, polybutene, and isobutylene for the purpose of adjusting the glass transition point Tg, and A phenol resin, a urea resin, a melamine resin, an alkyd resin, and a thermosetting resin such as mica may be added. Further, for the purpose of improving the adhesiveness, a tackifier such as rosin ester, rosin, terpene, terpene phenol, and petroleum resin may be added.
  • a tackifier such as rosin ester, rosin, terpene, terpene phenol, and petroleum resin may be added.
  • the amount added when a material other than the polymer material having viscoelasticity at room temperature such as cyanoethylated PVA is added is not particularly limited, but is 30 mass in proportion to the matrix 34. % Or less is preferable.
  • the characteristics of the polymer material to be added can be exhibited without impairing the viscoelastic relaxation mechanism in the matrix 34, so that the dielectric constant can be increased, the heat resistance can be improved, and the adhesion to the piezoelectric particles 36 and the electrode layer can be improved. In this respect, favorable results can be obtained.
  • the piezoelectric particles 36 are made of ceramic particles having a perovskite-type or wurtzite-type crystal structure.
  • the ceramic particles constituting the piezoelectric particles 36 include lead zirconate titanate (PZT), lead lanthanate lanthanate titanate (PLZT), barium titanate (BaTIO 3 ), zinc oxide (ZnO), and the like.
  • PZT lead zirconate titanate
  • PLA 3 lead lanthanate lanthanate titanate
  • BaTIO 3 barium titanate
  • ZnO zinc oxide
  • Examples thereof include a solid solution (BFBT) of barium titanate and bismuth ferrite (BiFe 3).
  • the particle size of the piezoelectric particles 36 is not limited, and may be appropriately selected depending on the size of the piezoelectric film 12 and the application of the laminated piezoelectric element 10.
  • the particle size of the piezoelectric particles 36 is preferably 1 to 10 ⁇ m. By setting the particle size of the piezoelectric particles 36 in this range, favorable results can be obtained in that the piezoelectric film 12 can achieve both high piezoelectric characteristics and flexibility.
  • the piezoelectric particles 36 in the piezoelectric layer 20 are uniformly and regularly dispersed in the matrix 34, but the present invention is not limited to this. That is, the piezoelectric particles 36 in the piezoelectric layer 20 may be irregularly dispersed in the matrix 34 as long as they are preferably uniformly dispersed. Further, the piezoelectric particles 36 may or may not have the same particle size.
  • the piezoelectric film 12 there is no limitation on the amount ratio of the matrix 34 and the piezoelectric particles 36 in the piezoelectric layer 20, the size and thickness of the piezoelectric film 12 in the plane direction, the use of the laminated piezoelectric element 10, and the use of the laminated piezoelectric element 10.
  • the characteristics may be appropriately set according to the characteristics required for the piezoelectric film 12.
  • the volume fraction of the piezoelectric particles 36 in the piezoelectric layer 20 is preferably 30 to 80%, more preferably 50% or more, and therefore more preferably 50 to 80%.
  • the thickness of the piezoelectric layer 20 is not particularly limited, and depends on the application of the laminated piezoelectric element 10, the number of laminated piezoelectric films in the laminated piezoelectric element 10, the characteristics required for the piezoelectric film 12, and the like. , It may be set as appropriate. The thicker the piezoelectric layer 20, the more advantageous it is in terms of rigidity such as the strength of the so-called sheet-like material, but the voltage (potential difference) required to expand and contract the piezoelectric film 12 by the same amount increases.
  • the thickness of the piezoelectric layer 20 is preferably 8 to 300 ⁇ m, more preferably 8 to 200 ⁇ m, further preferably 10 to 150 ⁇ m, and particularly preferably 15 to 100 ⁇ m.
  • the piezoelectric layer 20 is preferably polarized (polled) in the thickness direction.
  • the polarization treatment will be described in detail later.
  • the piezoelectric film 12 of the illustrated example has a first thin film electrode 24 on one surface of such a piezoelectric layer 20, a first protective layer 28 on the surface thereof, and a piezoelectric layer.
  • the second thin film electrode 26 is provided on the other surface of the 20 and the second protective layer 30 is provided on the surface thereof.
  • the first thin film electrode 24 and the second thin film electrode 26 form an electrode pair.
  • the piezoelectric film 12 has, for example, an electrode drawing portion for drawing out the electrodes from the first thin film electrode 24 and the second thin film electrode 26, and the electrode is drawn out.
  • the unit is connected to the power supply 16.
  • the piezoelectric film 12 may have an insulating layer or the like that covers the area where the piezoelectric layer 20 is exposed to prevent a short circuit or the like.
  • the piezoelectric film 12 sandwiches both sides of the piezoelectric layer 20 between electrode pairs, that is, the first thin film electrode 24 and the second thin film electrode 26, and this laminated body is sandwiched between the first protective layer 28 and the second protective layer 30. It has a structure that is sandwiched between.
  • the region held by the first thin film electrode 24 and the second thin film electrode 26 is expanded and contracted according to the applied voltage.
  • the first thin film electrode 24 and the first protective layer 28, and the first and second in the second thin film electrode 26 and the second protective layer 30 are for convenience in order to explain the piezoelectric film 12. The name is given according to the drawing. Therefore, the first and second piezoelectric films 12 have no technical meaning and are irrelevant to the actual usage state.
  • the first protective layer 28 and the second protective layer 30 have a role of covering the first thin film electrode 24 and the second thin film electrode 26 and imparting appropriate rigidity and mechanical strength to the piezoelectric layer 20. Is responsible for. That is, in the piezoelectric film 12, the piezoelectric layer 20 composed of the matrix 34 and the piezoelectric particles 36 exhibits extremely excellent flexibility with respect to slow bending deformation, but is rigid depending on the application. And mechanical strength may be insufficient.
  • the piezoelectric film 12 is provided with a first protective layer 28 and a second protective layer 30 to supplement the piezoelectric film 12.
  • the first protective layer 28 and the second protective layer 30 are not limited, and various sheet-like materials can be used.
  • various resin films are preferably exemplified.
  • PET polyethylene terephthalate
  • PP polypropylene
  • PS polystyrene
  • PC polycarbonate
  • PPS polyphenylene sulfide
  • PMMA polymethylmethacrylate
  • PEI Polyetherimide
  • PEI polyimide
  • PEN polyethylene naphthalate
  • TAC triacetyl cellulose
  • a resin film made of a cyclic olefin resin or the like are preferably used.
  • the thickness of the first protective layer 28 and the second protective layer 30 there is no limitation on the thickness of the first protective layer 28 and the second protective layer 30. Further, the thicknesses of the first protective layer 28 and the second protective layer 30 are basically the same, but may be different. Here, if the rigidity of the first protective layer 28 and the second protective layer 30 is too high, not only the expansion and contraction of the piezoelectric layer 20 is restrained, but also the flexibility is impaired. Therefore, the thinner the first protective layer 28 and the second protective layer 30, the more advantageous it is, except when mechanical strength and good handleability as a sheet-like material are required.
  • the thickness of the first protective layer 28 and the second protective layer 30 is twice or less the thickness of the piezoelectric layer 20, it is possible to ensure both rigidity and appropriate flexibility. A favorable result can be obtained in terms of points.
  • the thickness of the first protective layer 28 and the second protective layer 30 is preferably 100 ⁇ m or less. 50 ⁇ m or less is more preferable, and 25 ⁇ m or less is further preferable.
  • a first thin film electrode 24 is provided between the piezoelectric layer 20 and the first protective layer 28, and a second thin film electrode 26 is provided between the piezoelectric layer 20 and the second protective layer 30. It is formed.
  • the first thin film electrode 24 is also referred to as a first electrode 24, and the second thin film electrode 26 is also referred to as a second electrode 26.
  • the first electrode 24 and the second electrode 26 are provided to apply a voltage to the piezoelectric layer 20 (piezoelectric film 12).
  • the materials for forming the first electrode 24 and the second electrode 26 are not limited, and various conductors can be used. Specifically, metals such as carbon, palladium, iron, tin, aluminum, nickel, platinum, gold, silver, copper, titanium, chromium and molybdenum, alloys thereof, laminates and composites of these metals and alloys, In addition, indium tin oxide and the like are exemplified. Among them, copper, aluminum, gold, silver, platinum, and indium tin oxide are preferably exemplified as the first electrode 24 and the second electrode 26.
  • the method of forming the first electrode 24 and the second electrode 26 and the vapor deposition method such as vacuum deposition and sputtering, the film formation by plating, and the foil formed of the above materials.
  • vapor deposition method vacuum film deposition method
  • sputtering the film formation by plating
  • foil formed of the above materials Various known methods such as a method of attaching the above can be used.
  • thin films such as copper and aluminum formed by vacuum deposition are preferably used as the first electrode 24 and the second electrode 26 because the flexibility of the piezoelectric film 12 can be ensured.
  • a copper thin film produced by vacuum deposition is preferably used.
  • the thickness of the first electrode 24 and the second electrode 26 There is no limitation on the thickness of the first electrode 24 and the second electrode 26. Further, the thicknesses of the first electrode 24 and the second electrode 26 are basically the same, but may be different.
  • the product of the thickness of the first electrode 24 and the second electrode 26 and the Young's modulus is less than the product of the thickness of the first protective layer 28 and the second protective layer 30 and the Young's modulus. It is suitable because it does not significantly impair the flexibility.
  • the first protective layer 28 and the second protective layer 30 are PET (Young's modulus: about 6.2 GPa) and the first electrode 24 and the second electrode 26 are copper (Young's modulus: about 130 GPa).
  • the thickness of the first electrode 24 and the second electrode 26 is preferably 1.2 ⁇ m or less, more preferably 0.3 ⁇ m or less, and above all, 0. It is preferably 1 ⁇ m or less.
  • the piezoelectric film 12 sandwiches the piezoelectric layer 20 formed by dispersing the piezoelectric particles 36 in a matrix 34 containing a polymer material having viscoelasticity at room temperature between the first electrode 24 and the second electrode 26. Further, the laminated body has a structure in which the first protective layer 28 and the second protective layer 30 are sandwiched. In such a piezoelectric film 12, it is preferable that the maximum value of the loss tangent (Tan ⁇ ) at a frequency of 1 Hz by dynamic viscoelasticity measurement exists at room temperature, and the maximum value of 0.1 or more is present at room temperature. More preferred.
  • the piezoelectric film 12 is subjected to a relatively slow and large bending deformation of several Hz or less from the outside, the strain energy can be effectively diffused to the outside as heat. It is possible to prevent cracks from occurring at the interface of.
  • the piezoelectric film 12 preferably has a storage elastic modulus (E') at a frequency of 1 Hz as measured by dynamic viscoelasticity measurement of 10 to 30 GPa at 0 ° C. and 1 to 10 GPa at 50 ° C.
  • E' storage elastic modulus
  • the piezoelectric film 12 can have a large frequency dispersion in the storage elastic modulus (E') at room temperature. That is, it can behave hard for vibrations of 20 Hz to 20 kHz and soft for vibrations of several Hz or less.
  • the product of the thickness and the storage elastic modulus (E') at a frequency of 1 Hz measured by dynamic viscoelasticity is 1.0 ⁇ 10 6 to 2.0 ⁇ 10 6 N / m at 0 ° C. , It is preferably 1.0 ⁇ 10 5 to 1.0 ⁇ 10 6 N / m at 50 ° C.
  • the piezoelectric film 12 can be provided with appropriate rigidity and mechanical strength as long as the flexibility and acoustic characteristics are not impaired.
  • the piezoelectric film 12 preferably has a loss tangent (Tan ⁇ ) of 0.05 or more at 25 ° C. and a frequency of 1 kHz in the master curve obtained from the dynamic viscoelasticity measurement.
  • Ton ⁇ loss tangent
  • the frequency characteristics of the speaker using the piezoelectric film 12 become smooth, and the amount of change in sound quality when the minimum resonance frequency f 0 changes with the change in the curvature of the speaker can be reduced.
  • a sheet-like object 12a in which the first electrode 24 is formed on the first protective layer 28 is prepared.
  • the sheet-like material 12a may be produced by forming a copper thin film or the like as the first electrode 24 on the surface of the first protective layer 28 by vacuum vapor deposition, sputtering, plating or the like.
  • the first protective layer 28 with a separator temporary support
  • PET or the like having a thickness of 25 to 100 ⁇ m can be used.
  • the separator may be removed after the second electrode 26 and the second protective layer 30 are thermocompression bonded, and before any member is laminated on the first protective layer 28.
  • a polymer material having viscoelasticity at room temperature such as cyanoethylated PVA is dissolved in an organic solvent, and piezoelectric particles 36 such as PZT particles are further added and stirred to prepare a dispersed coating material. ..
  • a polymer material having viscoelasticity at room temperature such as cyanoethylated PVA
  • the organic solvent is not limited, and various organic solvents such as dimethylformamide (DMF), methylethylketone, and cyclohexanone can be used.
  • the paint is cast (coated) on the sheet-like material 12a to evaporate the organic solvent and dry it.
  • a laminated body 12b having the first electrode 24 on the first protective layer 28 and forming the piezoelectric layer 20 on the first electrode 24 is produced.
  • the first electrode 24 is an electrode on the base material side when the piezoelectric layer 20 is applied, and does not indicate the vertical positional relationship in the laminated body.
  • the casting method of this paint is not particularly limited, and all known coating methods (coating devices) such as a slide coater and a doctor knife can be used.
  • the viscoelastic material is a material that can be melted by heating, such as cyanoethylated PVA
  • the viscoelastic material is heated and melted to prepare a melt obtained by adding / dispersing the piezoelectric particles 36 to the viscoelastic material, and extruding the material.
  • the first electrode 24 is provided on the first protective layer 28 as shown in FIG. 4 by extruding the sheet-like material 12a shown in FIG. 3 into a sheet shape and cooling the sheet-like material 12a.
  • a laminated body 12b formed by forming a piezoelectric layer 20 on the electrode 24 may be produced.
  • a polymer piezoelectric material such as PVDF may be added to the matrix 34 in addition to the viscoelastic material such as cyanoethylated PVA.
  • the polymer piezoelectric materials to be added to the paint described above may be dissolved.
  • the polymer piezoelectric material to be added may be added to the heat-melted viscoelastic material described above and heat-melted.
  • the method for polarization treatment of the piezoelectric layer 20 is not limited, and known methods can be used.
  • electric field polling in which a DC electric field is directly applied to an object to be polarized is exemplified.
  • the first electrode 24 may be formed before the polarization treatment, and the electric field polling treatment may be performed using the first electrode 24 and the second electrode 26.
  • the polarization treatment is performed in the thickness direction of the piezoelectric layer 20 rather than in the plane direction.
  • a calendar treatment may be performed in which the surface of the piezoelectric layer 20 is smoothed by using a heating roller or the like. By performing this calendar processing, the thermocompression bonding process described later can be smoothly performed.
  • a sheet-like material 12c in which the second electrode 26 is formed on the second protective layer 30 is prepared. do.
  • the sheet-like material 12c may be produced by forming a copper thin film or the like as the second electrode 26 on the surface of the second protective layer 30 by vacuum vapor deposition, sputtering, plating or the like.
  • the second electrode 26 is directed toward the piezoelectric layer 20, and the sheet-like material 12c is laminated on the laminated body 12b that has undergone the polarization treatment of the piezoelectric layer 20.
  • the laminate of the laminate 12b and the sheet-like material 12c is thermocompression-bonded with a heating press device or a heating roller or the like so as to sandwich the second protective layer 30 and the first protective layer 28, and piezoelectric.
  • a film 12 is produced.
  • the laminated piezoelectric element 10 of the present invention is formed by laminating a plurality of layers by folding back the piezoelectric film 12.
  • the laminated piezoelectric element 10 shown in FIG. 1 has a configuration in which a piezoelectric film 12 adjacent to each other in the stacking direction, which is laminated by folding back, is attached with a bonding layer 14 (adhesive agent).
  • various known adhesive layers 14 can be used as long as the adjacent piezoelectric film 12 can be attached. Therefore, the adhesive layer 14 has fluidity when bonded, and then becomes a solid. Even a layer made of an adhesive is a soft solid gel-like (rubber-like) when bonded, and then gels. It may be a layer made of a pressure-sensitive adhesive whose state does not change, or a layer made of a material having the characteristics of both an adhesive and a pressure-sensitive adhesive.
  • the laminated piezoelectric element 10 of the present invention vibrates the diaphragm 50 by expanding and contracting a plurality of laminated piezoelectric films 12, for example, as described later, to generate sound.
  • the adhesive layer 14 is preferably an adhesive layer made of an adhesive, which can obtain a solid and hard adhesive layer 14 rather than the adhesive layer made of an adhesive.
  • an adhesive layer made of a thermoplastic type adhesive such as a polyester adhesive and a styrene-butadiene rubber (SBR) adhesive is preferably exemplified.
  • Adhesion unlike adhesion, is useful when seeking high adhesion temperatures.
  • the thermoplastic type adhesive has "relatively low temperature, short time, and strong adhesion" and is suitable.
  • the laminated piezoelectric element 10 of the present invention is made by folding and laminating a piezoelectric film 12. Therefore, in the piezoelectric film 12 of the present invention, in the adjacent piezoelectric film 12, the first electrode 24 and the first protective layer 28 face each other, and the second electrode 26 and the second protective layer 30 face each other. Therefore, in the adjacent piezoelectric film 12, one or more through holes are provided in the facing first protective layer 28, and one or more through holes are provided in the facing second protective layer 30 to fill the through holes. Then, the adjacent piezoelectric film 12 may be attached to the conductive attachment layer 14.
  • the through holes formed in the protective layer may be filled with a conductive material such as silver paste, and then the adjacent piezoelectric film 12 may be attached to the conductive attachment layer 14.
  • a conductive material such as silver paste
  • the adhesive layer 14 having conductivity is not limited, and known ones can be used. Therefore, the conductive adhesive layer 14 may be an adhesive or an adhesive that constitutes the adhesive layer 14 itself, or may be a non-conductive adhesive and adhesive.
  • the adhesive layer 14 may be an adhesive layer 14 in which metal particles, a conductive filler, a metal fiber, or the like are dispersed in an agent or the like to make it conductive. Further, a silver paste that is cured by drying, such as Dotite manufactured by Fujikura Kasei Co., Ltd., can also be used. Further, the through hole may be formed by a known method, for example, by laser processing, or by removing the protective layer by solvent etching, mechanical polishing, or the like.
  • the thickness of the sticking layer 14 is not limited, and a thickness capable of exhibiting sufficient sticking force (adhesive force, adhesive force) is provided according to the material for forming the sticking layer 14. , It may be set as appropriate.
  • the sticking layer 14 is thick and has high rigidity, the expansion and contraction of the piezoelectric film 12 may be restricted.
  • the laminated piezoelectric element 10 of the present invention can make the adhesive layer 14 thin.
  • the sticking layer 14 is preferably thinner than the piezoelectric layer 20. That is, in the laminated piezoelectric element 10 of the present invention, the sticking layer 14 is preferably hard and thin. Specifically, the thickness of the sticking layer 14 is preferably 0.1 to 50 ⁇ m, more preferably 0.1 to 30 ⁇ m, and even more preferably 0.1 to 10 ⁇ m after sticking.
  • the spring constant of the sticking layer 14 is preferably equal to or less than the spring constant of the piezoelectric film 12.
  • the spring constant is "thickness x Young's modulus". Specifically, the product of the thickness of the adhesive layer 14 and the storage elastic modulus (E') at a frequency of 1 Hz by dynamic viscoelasticity measurement is 2.0 ⁇ 10 6 N / m or less at 0 ° C., 50. It is preferably 1.0 ⁇ 10 6 N / m or less at ° C.
  • the internal loss at a frequency of 1 Hz by the dynamic viscoelasticity measurement of the adhesive layer is 1.0 or less at 25 ° C. in the case of the adhesive layer 14 made of an adhesive, and in the case of the adhesive layer 14 made of an adhesive. It is preferably 0.1 or less at 25 ° C.
  • the sticking layer 14 is provided as a preferred embodiment and is not an essential component. Therefore, the laminated piezoelectric element of the present invention does not have the bonding layer 14, and the piezoelectric films 12 constituting the laminated piezoelectric element are laminated by using known crimping means, fastening means, fixing means, and the like.
  • the laminated piezoelectric element may be formed in close contact with each other. For example, when the piezoelectric film 12 is rectangular, the four corners may be fastened with members such as bolts and nuts to form a laminated piezoelectric element, or the four corners and the central portion may be fastened with members such as bolts and nuts.
  • the laminated piezoelectric film 12 may be fastened to form a laminated piezoelectric element.
  • the laminated piezoelectric film 12 may be fixed by attaching an adhesive tape to the peripheral portion (end face) to form a laminated piezoelectric element.
  • the individual piezoelectric films 12 expand and contract independently, and in some cases, each layer of each piezoelectric film 12 bends in the opposite direction to form a gap. It ends up.
  • the laminated piezoelectric element of the present invention has a sticking layer 14 for sticking adjacent piezoelectric films 12 to each other like the laminated piezoelectric element 10 of the illustrated example.
  • a power supply 16 for applying a driving voltage for expanding and contracting the piezoelectric film 12 is connected to the first electrode 24 and the second electrode 26 of the piezoelectric film 12.
  • the power supply 16 is not limited and may be a DC power supply or an AC power supply.
  • the drive voltage capable of appropriately driving each piezoelectric film 12 may be appropriately set according to the thickness of the piezoelectric layer 20 of each piezoelectric film 12, the forming material, and the like.
  • the method of drawing out the electrodes from the first electrode 24 and the second electrode 26 is not limited, and various known methods can be used.
  • a method of connecting a conductor such as a copper foil to the first electrode 24 and the second electrode 26 to pull out the electrode to the outside, and a through hole in the first protective layer 28 and the second protective layer 30 by a laser or the like examples thereof include a method of forming the through holes, filling the through holes with a conductive material, and pulling out the electrodes to the outside.
  • suitable electrode extraction methods include the methods described in JP-A-2014-209724 and the methods described in JP-A-2016-015354.
  • a protruding portion where the piezoelectric film 12 protrudes from the laminated piezoelectric element 10 may be provided, and the first electrode 24 and the second electrode 26 of the protruding portion may be connected to an external power source. This point will be described in detail later.
  • the laminated piezoelectric element 10 of the present invention has a structure in which a plurality of layers of the piezoelectric film 12 are laminated by folding back the piezoelectric film 12.
  • the laminated piezoelectric element 10 of the present invention has a folded portion in a two-layer piezoelectric film 12 that is folded and laminated, that is, a two-layer piezoelectric film 12 that is laminated by being folded and adjacent to the stacking direction. , Has a portion thicker than the thickness of the central portion.
  • the thickness of the central portion in the folding direction is the central thickness
  • the length from the end portion to the central portion of the folded portion in the folding direction is L
  • the folding direction is the region of 1/3 of the length L.
  • the thickness of the central portion C in the folding direction that is, the central thickness.
  • the thickness t As shown in the illustrated example, when the laminated piezoelectric element 10 has a sticking layer 14 for sticking two adjacent layers of piezoelectric films 12 which are folded and laminated, the thickness t of the central portion C is folded back.
  • the sum of the thickness of the two adjacent piezoelectric films 12 laminated and the thickness of the adhesive layer 14 between them, that is, "thickness t of the central portion C thickness of the piezoelectric film 12 + thickness of the adhesive layer 14 Thickness + thickness of piezoelectric film 12 ”.
  • the thickness t of the central portion C is the total thickness of the two adjacent layers of piezoelectric films 12 folded and laminated, that is, "center”.
  • the thickness t of the portion C the thickness of the piezoelectric film 12 + the thickness of the piezoelectric film 12 ”.
  • the length from the end portion on the tip end side of the folding back in the folding direction to the central portion C is defined as L.
  • a region of 1/3 of the length L is defined as the folded portion 40 from the end portion on the tip end side of the folded portion in the folded direction.
  • the laminated piezoelectric element 10 of the present invention has a portion in which the thickness of all the folded portions 40 obtained by folding the piezoelectric film 12 is larger than the thickness t of the central portion C.
  • the thickness t is the thickness of the piezoelectric film 12 in the stacking direction.
  • the central portion C in the folding direction is a central portion in the folding direction of the piezoelectric film 12 in a planar shape when the laminated piezoelectric element 10 is viewed in the stacking direction.
  • the laminating direction is a direction orthogonal to the main surface (maximum surface) of the piezoelectric film 12.
  • the laminated piezoelectric element 10 of the present invention is formed between the piezoelectric films 12 forming the folded-back portion 40, that is, between the piezoelectric films 12 which are folded back and adjacent to each other, as shown in FIG. It has a gap 40a.
  • the adhesive layer 14 that is, the adhesive after curing is attached. Filled with agent.
  • the configuration having a gap 40a between the piezoelectric films 12 forming the folded-back portion 40 is, for example, an arbitrary part of the folded-back portion 40 or as conceptually shown in FIG. It suffices that a plurality of parts have voids 40a. That is, there is no limitation on the position of the gap 40a in the folded portion 40.
  • the laminated piezoelectric element 10 of the present invention is formed by returning a single sheet-like material in a bellows shape.
  • the shape of the folded portion, the maximum thickness of the folded portion, and the maximum thickness of the folded portion in the direction orthogonal to the folding direction, and The thickness of the central portion C is almost the same over the entire area.
  • the direction orthogonal to the folding direction is the direction orthogonal to the paper surface in FIGS. 1 and 6 to 8.
  • the laminated piezoelectric element 10 of the present invention such an observation may be performed on an arbitrary one cross section in the folding direction, and all the folded portions may satisfy the above conditions in the arbitrary one cross section.
  • the sample to be observed is embedded in a transparent resin such as an epoxy resin, and the laminated piezoelectric element 10 is cross-sectioned in the folded direction using a microtome and ion milling. You can do it.
  • an osmium coat may be provided on the cut surface, if necessary.
  • the laminated piezoelectric element 10 of the present invention has such a configuration, so that the first electrode 24 and the first protective layer 28, and the second electrode 26 and the second protective layer 30 are piezoelectric bodies in the folded-back portion 40. It is possible to obtain the desired piezoelectric performance by preventing peeling from the layer 20 and breaking of the first electrode 24 and the second electrode.
  • Patent Document 1 As described in Patent Document 1, by laminating a plurality of piezoelectric films to form a laminated body, the rigidity of the piezoelectric film as a whole is increased, the piezoelectric effect is improved, and excellent piezoelectric characteristics are exhibited. can.
  • a laminated body as described in Patent Document 1, by folding back and laminating one piezoelectric film, the structure is simplified and the production becomes easy.
  • one piezoelectric film is folded back, it is not necessary to supply driving power to each piezoelectric film as in the case of laminating a plurality of piezoelectric films, and connection with an external power source is also available.
  • the outside of the piezoelectric film is in an elongated state and the inside is in a contracted state in the folded portion. .. Therefore, stress is applied to the electrode layer at the folded portion, and the electrode layer may break on the outside of the folded portion. Further, inside the folded back, the electrode layer may be peeled off from the piezoelectric layer due to the contracted stress and may be lifted. If the electrode layer is broken, electric power is concentrated on that portion, causing inconvenience such as heat generation. Further, if the electrode layer is peeled off, the piezoelectric layer can be driven, and the relative permittivity of the peeled portion changes, so that the desired piezoelectric characteristics cannot be obtained.
  • the piezoelectric film 12 that is folded and laminated that is, the piezoelectric film 12 that is adjacent by folding, has a folded portion 40 thicker than the thickness t of the central portion C.
  • the folded-back portion 40 has a gap, or is filled with the sticking layer 14. Therefore, in the laminated piezoelectric element 10 of the present invention, the folding back of the piezoelectric film 12 at the folded-back portion 40 becomes gentle. That is, the laminated piezoelectric element 10 of the present invention can increase the curvature of the folded piezoelectric film 12 at the folded portion 40.
  • the laminated piezoelectric element 10 of the present invention can reduce the stress applied to the electrodes and the protective layer at the folded-back portion 40. Therefore, in the laminated piezoelectric element 10 of the present invention, the first electrode 24 and the first protective layer 28, and the second electrode 26 and the second protective layer 30 are separated from the piezoelectric layer 20 at the folded-back portion 40. , And the breakage of the first electrode 24 and the second electrode 26 can be prevented. As a result, the laminated piezoelectric element 10 of the present invention can stably exhibit the desired piezoelectric performance.
  • the folded-back portion 40 may have a portion thicker than the thickness t of the central portion C.
  • the larger the difference between the thickness of the folded portion 40 and the thickness t of the central portion C the more preferable the peeling of the piezoelectric layer 20 from the first electrode 24 and the second electrode 26. Can be prevented.
  • the maximum thickness t max of the folded-back portion 40 is preferably 1.1 times or more, more preferably 1.5 times or more the thickness t of the central portion C. 2 times or more is more preferable. If the thickness of the folded-back portion 40 is too thick, the laminated piezoelectric element 10 becomes unnecessarily thick, and in the laminated piezoelectric element 10, the difference in thickness between the position corresponding to the folded-back portion 40 and the central portion C becomes large. May cause inconvenience. Considering this point, the maximum thickness t max of the folded-back portion 40 is preferably 10 times or less the thickness t of the central portion C. The thickness t of the central portion C may be measured by observing in the same manner as the thickness of the folded portion 40 described above.
  • Such a laminated piezoelectric element 10 of the present invention can be manufactured by various methods.
  • the laminated piezoelectric element 10 having a gap 40a in the vicinity of the outer end portion of the folded-back portion 40 as shown in FIG. 6 may be manufactured as shown in FIG. 9 as an example.
  • the adhesive 14a to be the adhesive layer 14 is applied to the piezoelectric film 12, and the columnar rod-shaped body 42 is brought into contact with the piezoelectric film 12.
  • the piezoelectric film 12 is folded back with the rod-shaped body 42 as a fulcrum and laminated on the adhesive 14a.
  • the adhesive 14a is cured, the folded piezoelectric film 12 is attached, and then the rod-shaped body 42 is pulled out as shown in the lower row.
  • the laminated piezoelectric element 10 in which the vicinity of the outer end portion of the folded portion 40 is a gap 40a can be manufactured.
  • the rod-shaped body 42 hinders the vibration of the piezoelectric film 12, and the weight is partially increased. As a result, the piezoelectric characteristics of the laminated piezoelectric element are changed, and the desired performance cannot be obtained. Moreover, since the rod-shaped body 42 inhibits the vibration of the piezoelectric film 12, the first electrode 24 and the second electrode 26, and one or more of the first protective layer 28 and the second protective layer 30 may be damaged. There is also. Therefore, in this manufacturing method, it is always necessary to remove the rod-shaped body 42.
  • the laminated piezoelectric element 10 in which the folded-back portion 40 is filled with the adhesive layer 14 may be manufactured as shown in FIG. 10 as an example.
  • the adhesive 14a to be the adhesive layer 14 is applied to the piezoelectric film 12.
  • the adhesive 14a is made thicker than the thickness of the adhesive layer 14 assumed in the laminated piezoelectric element 10.
  • the piezoelectric film 12 is folded back and laminated on the adhesive 14a.
  • the roller 46 presses the laminated piezoelectric film 12 from the center side toward the end of the folded portion.
  • the folded-back portion 40 can be filled with the adhesive 14a. Then, the adhesive 14a is cured to form the adhesive layer 14. By repeating this, the laminated piezoelectric element 10 in which the folded-back portion 40 is filled with the sticking layer 14 can be manufactured.
  • the laminated piezoelectric element 10 of the present invention has a structure in which a plurality of layers of the piezoelectric film 12 are laminated by folding back the piezoelectric film 12, and the folded and laminated piezoelectric film 12 has a folded portion.
  • 40 has a portion thicker than the central portion. Therefore, when the laminated piezoelectric element 10 of the present invention is folded three or more times and the folded portions 40 are laminated, the end portion of the laminated piezoelectric element 10 in the folded direction depends on the thickness of the folded portion 40. However, it may be thicker than the central part.
  • the laminated piezoelectric element of the present invention is adjacent to the laminated direction of the piezoelectric film 12 as in the laminated piezoelectric element 10A conceptually shown in FIG. 11 when the piezoelectric film 12 is folded back three times or more. It is preferable that the position of the end portion of the folded-back portion 40 is different from that in the folded-back direction of the piezoelectric film 12. That is, it is preferable that the position of the end portion of the folded-back portion 40 adjacent to the laminated direction of the piezoelectric film 12 is shifted in the folded-back direction of the piezoelectric film 12. As a result, the thickness of the laminated piezoelectric element 10A can be made uniform over the entire surface.
  • the amount of deviation of the position of the end portion in the folded-back direction is not limited, and the amount of deviation that makes the thickness of the laminated piezoelectric element uniform in the plane direction may be appropriately set. Therefore, at least in the folded-back portion 40 adjacent to the stacking direction, the position of the maximum thickness t max may be different in the folded-back direction.
  • the laminated piezoelectric element of the present invention may be a laminate of a plurality of laminated piezoelectric elements obtained by folding the piezoelectric film 12 once or more. Similarly, in this case as well, it is preferable to shift the position of the end portion in the folded-back direction in the folded-back portion adjacent to the stacking direction.
  • the laminated piezoelectric element 10 of the present invention is attached (fixed) to the diaphragm 50 by the attachment layer 52, and sounds are generated from the diaphragm 50. Used as an exciter for.
  • the diaphragm 50 and the laminated piezoelectric element 10 are in contact with each other and fixed via the bonding layer 52, and the laminated piezoelectric element 10 serves as an exciter for generating sound from the diaphragm 50.
  • FIG. 12 shows an example of the electroacoustic transducer of the present invention.
  • the piezoelectric layer 20 constituting the piezoelectric film 12 in which a plurality of layers are laminated is formed by dispersing the piezoelectric particles 36 in the matrix 34. Further, the first electrode 24 and the second electrode 26 are provided so as to sandwich the piezoelectric layer 20 in the thickness direction.
  • the piezoelectric particles 36 expand and contract in the polarization direction according to the applied voltage.
  • the piezoelectric film 12 shrinks in the thickness direction.
  • the piezoelectric film 12 expands and contracts in the plane direction due to the pore ratio. This expansion and contraction is about 0.01 to 0.1%.
  • the thickness of the piezoelectric layer 20 is preferably about 8 to 300 ⁇ m. Therefore, the expansion and contraction in the thickness direction is very small, about 0.3 ⁇ m at the maximum.
  • the piezoelectric film 12 that is, the piezoelectric layer 20
  • the piezoelectric film 12 has a size much larger than the thickness in the plane direction. Therefore, for example, if the length of the piezoelectric film 12 is 20 cm, the piezoelectric film 12 expands and contracts by a maximum of about 0.2 mm when a voltage is applied.
  • the diaphragm 50 is attached to the laminated piezoelectric element 10 by the attachment layer 52. Therefore, the expansion and contraction of the piezoelectric film 12 causes the diaphragm 50 to bend, and as a result, the diaphragm 50 vibrates in the thickness direction.
  • the diaphragm 50 emits a sound due to the vibration in the thickness direction. That is, the diaphragm 50 vibrates according to the magnitude of the voltage (driving voltage) applied to the piezoelectric film 12, and generates a sound corresponding to the driving voltage applied to the piezoelectric film 12.
  • a general piezoelectric film made of a polymer material such as PVDF the molecular chains are oriented with respect to the stretching direction by stretching in the uniaxial direction after the polarization treatment, and as a result, a large piezoelectric property is exhibited in the stretching direction. It is known to be obtained. Therefore, a general piezoelectric film has in-plane anisotropy in the piezoelectric characteristics, and has anisotropy in the amount of expansion and contraction in the plane direction when a voltage is applied.
  • the piezoelectric film 12 made of a polymer composite piezoelectric body in which the piezoelectric particles 36 are dispersed in the matrix 34 has a large piezoelectric film 12 without a stretching treatment after the polarization treatment. Since the characteristics are obtained, the piezoelectric characteristics have no in-plane anisotropy and expand and contract isotropically in all directions in the plane direction. That is, in the laminated piezoelectric element 10 of the present invention, the piezoelectric film 12 expands and contracts isotropically and two-dimensionally.
  • the laminated piezoelectric element 10 of the present invention in which such a piezoelectric film 12 that expands and contracts isotropically and two-dimensionally is laminated, when a general piezoelectric film such as PVDF that expands and contracts significantly in only one direction is laminated.
  • the diaphragm 50 can be vibrated with a large force, and a louder and more beautiful sound can be generated.
  • the laminated piezoelectric element of the present invention is a laminated piezoelectric element having a plurality of layers by folding back such a piezoelectric film 12.
  • adjacent piezoelectric films 12 are further bonded to each other by a bonding layer 14. Therefore, even if the rigidity of each piezoelectric film 12 is low and the stretching force is small, the rigidity is increased by laminating the piezoelectric films 12, and the stretching force of the laminated piezoelectric element 10 is increased.
  • the diaphragm 50 is sufficiently bent with a large force to sufficiently bend the diaphragm 50 in the thickness direction. It can be vibrated to generate sound in the diaphragm 50.
  • the preferable thickness of the piezoelectric layer 20 is about 300 ⁇ m at the maximum, so that even if the voltage applied to each piezoelectric film 12 is small, it is sufficient.
  • the piezoelectric film 12 can be expanded and contracted.
  • the adhesive layer 52 for attaching the laminated piezoelectric element 10 and the diaphragm 50 is not limited, and various known pressure-sensitive adhesives and adhesives are used. Is available. As an example, the same as the above-mentioned adhesive layer 14 is exemplified.
  • the preferred sticking layer 52 (sticking agent) is also the same as the sticking layer 14.
  • the diaphragm 50 is not limited, and various articles can be used.
  • the vibrating plate 50 include plate materials such as resin plates and glass plates, advertising / announcement media such as signs, office equipment and furniture such as tables, whiteboards and projection screens, and organic electroluminescence (OLED (OLED).
  • OLED organic electroluminescence
  • Display devices such as displays and liquid crystal displays, vehicle members such as consoles, A-pillars, ceilings and bumpers, and building materials such as walls of houses are exemplified.
  • the diaphragm 50 to which the laminated piezoelectric element 10 of the present invention is attached preferably has flexibility, and more preferably windable.
  • a flexible panel-shaped display device such as a flexible display panel is particularly preferably exemplified. Further, it is more preferable that the display device can also be wound up.
  • the electroacoustic converter of the present invention responds to the winding curvature of the diaphragm 50 so that the laminated piezoelectric element 10 does not peel off from the diaphragm 50 when the diaphragm 50 is wound.
  • the laminated piezoelectric element 10 also bends together with the diaphragm 50. Since the piezoelectric film 12 has suitable flexibility, the laminated piezoelectric element 10 of the present invention also basically exhibits good flexibility. At this time, the winding curvature of the diaphragm 50 is basically a specific curvature, but the winding curvature of the diaphragm 50 may be variable. A configuration in which the laminated piezoelectric element protrudes from the end portion in the longitudinal direction and has a protruding portion 58 having a length in the longitudinal direction of 10% or more of the longitudinal direction of the laminated piezoelectric element, which will be described later, is such a winding. In the electroacoustic converter of the present invention using the possible diaphragm 50, the effect can be particularly exhibited and the sound pressure can be improved.
  • the laminated piezoelectric element 10 may be attached to the back side of the display device, that is, the non-image display surface side of the display device. preferable.
  • the size of the sticking layer 52 in the plane direction is preferably the same size as or smaller than the size of the planar shape of the laminated piezoelectric element 10.
  • the display device when the display device is used as the diaphragm 50, the display device itself such as a flexible display panel may be used as the diaphragm 50, or a plate-shaped display device provided in the display device.
  • the plate-shaped member that engages with the member or the display device may be the diaphragm 50.
  • the electroacoustic converter of the present invention when used as a display device, the electroacoustic converter of the present invention may be incorporated in the display device, or the diaphragm 50 of the electroacoustic converter of the present invention may be used as a display device.
  • the plate-shaped member provided in the above may be vibrated, or the electroacoustic converter of the present invention may be incorporated in a casing or the like together with the display device.
  • the laminated piezoelectric element 10 is attached to the diaphragm 50 so that the longitudinal direction coincides with the winding direction of the diaphragm 50. It is preferable to be worn.
  • the longitudinal direction and the lateral direction of the laminated piezoelectric element will be described in detail later.
  • the diaphragm 50 when the diaphragm 50 can be wound up, a drive current is applied to the laminated piezoelectric element 10 in a state where the diaphragm 50 is not wound up, and the diaphragm 50 is wound up. At that time, it is preferable that the laminated piezoelectric element 10 is not energized. Further, in the electroacoustic converter of the present invention, when the diaphragm 50 is electrically driven like a display device, the laminated piezoelectric element 10 and / or the diaphragm without winding the diaphragm 50.
  • the drive current When the drive current is applied to the 50 and the diaphragm 50 is wound, it is preferable not to energize the laminated piezoelectric element 10 and / or the diaphragm 50.
  • a method for switching between energization and de-energization various known methods can be used.
  • the electroacoustic transducer of the present invention is formed by attaching (fixing) the laminated piezoelectric element 10 to the diaphragm 50 by using the attachment layer 52.
  • the end portion (end side) of the diaphragm 50 may be fixed to a wall or the like, and / or the end portion may be fixed by a fixing means such as a beam.
  • the shape of the diaphragm 50 is not limited, but it is often a quadrangle.
  • a display device such as an organic electroluminescence display can be suitably used as the diaphragm 50.
  • the diaphragm 50 is usually rectangular.
  • the diaphragm 50 is a rectangle such as a rectangle or a square
  • the two opposite sides are fixed by the fixing means 70 as conceptually shown in FIG.
  • the diaphragm 50 is often supported.
  • the distance between the two fixing means 70 for fixing the two opposite sides of the quadrangular diaphragm 50 that is, the distance between the fixed ends of the diaphragm 50 is L.
  • the laminated piezoelectric element 10 is attached to the diaphragm 50 at a distance of 0.1 ⁇ L or more.
  • the fixing of the diaphragm 50 suppresses the expansion and contraction of the laminated piezoelectric element 10 described above, and the diaphragm 50 is vibrated more preferably to produce a sound having a higher sound pressure. It becomes possible to output.
  • the end portion of the laminated piezoelectric element 10 projects outward of the sticking layer 52 in the surface direction, the end portion of the sticking layer 52 is used. It is regarded as the end of the laminated piezoelectric element 10. That is, at this time, the laminated piezoelectric element is attached so that the end portion of the attachment layer 52 is separated from the fixed end of the diaphragm 50 by 0.1 ⁇ L or more. On the contrary, when the end portion of the laminated piezoelectric element 10 is located inside the bonding layer 52 in the surface direction, the end portion of the laminated piezoelectric element 10 is 0.1 ⁇ L or more from the fixed end of the diaphragm 50.
  • the laminated piezoelectric elements may be attached so as to be separated from each other.
  • FIG. 26 shows a simulation result of the relationship between the distance from the fixed end of the diaphragm to the laminated piezoelectric element and the displacement of the diaphragm when laminated piezoelectric elements of various sizes are attached to the square diaphragm. show.
  • a stainless steel square plate having a size of 10 ⁇ 10 mm and a thickness of 0.3 mm was used, and the ends (end sides) of the two opposite sides were fixed.
  • a square piezoelectric film 12 shown in FIG. 2 was laminated in four layers, and each layer was attached by an attachment layer.
  • the laminated piezoelectric element was provided with a sticking layer on the entire surface, and the laminated piezoelectric element was stuck to the center of the diaphragm by matching the directions of the respective sides. Therefore, if the size of the laminated piezoelectric element is different, the distance from the fixed end of the diaphragm to the laminated piezoelectric element is different.
  • the area ratio of 100% is a case where the laminated piezoelectric element is attached to the entire surface from the fixed end to the fixed end of the diaphragm.
  • the area ratio of 60% is a case where the laminated piezoelectric element is attached to the diaphragm at a distance of 0.2 ⁇ L mm from the fixed end of the diaphragm, as shown in the upper part of FIG. 27.
  • the area ratio of 20% is a case where the laminated piezoelectric element is attached to the diaphragm at a distance of 0.4 ⁇ L mm from the fixed end of the diaphragm, as shown in the lower part of FIG. 27.
  • the broken line is the region where the laminated piezoelectric element does not exist in the diaphragm
  • the solid line is the region where the laminated piezoelectric element is attached to the diaphragm.
  • the area ratio is 100%, that is, when the laminated piezoelectric element is attached from the fixed end to the fixed end of the diaphragm, the displacement of the diaphragm, that is, the vibration is small.
  • the diaphragm can be vibrated sufficiently large by attaching the laminated piezoelectric element to the diaphragm at an area ratio of 80%, that is, 0.1 ⁇ L mm away from the fixed end of the diaphragm.
  • the laminated piezoelectric element is attached to the diaphragm at a distance of 0.2 ⁇ L mm from the fixed end of the diaphragm.
  • the diaphragm 50 is displaced more greatly, that is, a higher sound pressure is obtained.
  • the diaphragm is laminated on the diaphragm at a distance of 0.1 ⁇ L mm or more from the fixed end of the diaphragm.
  • the diaphragm 50 is sufficiently large. It is displaced, that is, a sufficiently high sound pressure is obtained.
  • the area ratio is 20%, that is, as shown in the lower part of FIG. 27, the laminated piezoelectric element is attached to the diaphragm at a distance of 0.4 ⁇ L mm from the fixed end of the diaphragm.
  • the diaphragm 50 is displaced sufficiently larger than when the area ratio is 100%, that is, a sufficiently high sound pressure is obtained. Therefore, in the electroacoustic converter of the present invention, when fixing the two opposite sides of the quadrangular diaphragm, the laminated piezoelectric element is attached to the diaphragm at a distance of 0.4 ⁇ L mm or less from the fixed end of the diaphragm. By doing so, it is possible to preferably vibrate the diaphragm and output a sound having a high sound pressure.
  • the fixing means 70 for fixing the side of the diaphragm 50 there is no limitation on the fixing means 70 for fixing the side of the diaphragm 50, and various known fixing means for fixing the side (end side) of the plate-like object (sheet-like object, film). Means are available.
  • a beam that can support the sides of a plate (including a cantilever), a fixing member used to support the sides of a projection screen, and a wound sheet such as a cartridge can be pulled out and
  • An example is a fixing mechanism for a sheet-like object provided at a sheet drawer port of a container that can be freely wound.
  • the fixing of the diaphragm 50 is not limited to the use of the fixing means 70.
  • the diaphragm 50 may be fixed by directly sticking the end portion (end face) of the diaphragm 50 to a wall, a plate-like object serving as a support, or the like using a sticking agent or the like. .. In this case, the end of the diaphragm becomes the fixed end of the diaphragm 50.
  • the electroacoustic transducer of the present invention is not limited to having one laminated piezoelectric element 10.
  • an electroacoustic converter when the sound is reproduced in stereo, that is, in two channels, as conceptually shown in FIG. 23, the distance between the fixed ends is separated in the L direction, and the two laminated piezoelectric elements 10 are separated. May be attached to the diaphragm 50.
  • the laminated piezoelectric element 10 is separated from the fixed end of the diaphragm 50 by 0.1 ⁇ L or more, where L is the distance between the two fixing means 70, that is, the distance between the fixed ends of the diaphragm 50. , It is preferable to attach it to the diaphragm 50.
  • all four sides of the rectangular (square) diaphragm 50 may be fixed, for example, like a picture frame.
  • the laminated piezoelectric element 10 corresponds to each of the fixing means 70a for fixing one opposite two sides and the fixing means 70b for fixing the other two opposing sides. It is preferable to determine the fixed position of.
  • the distance between the two fixing means 70b for fixing the other opposite sides of the diaphragm 50 that is, the distance between the fixed ends of the diaphragm 50 on the opposite sides is defined as L2.
  • the diaphragm 50 is separated from the end of the fixing means 70a, that is, the fixed end by the fixing means 70a by 0.1 ⁇ L1 or more, and the end of the fixing means 70b, that is, the fixing. It is preferable to attach the laminated piezoelectric element 50 at a position separated from the fixed end by the means 70b by 0.1 ⁇ L2 or more.
  • the electroacoustic converter of the present invention even when all four sides of the rectangular diaphragm 50 are fixed, it is not limited to having only one laminated piezoelectric element 10.
  • audio may be reproduced in stereo and reproduced in 2.5 channels such as providing a center speaker.
  • two laminated piezoelectric elements 10 for stereo reproduction are provided in the vicinity of the ends in the direction of the distance L1 between the long fixed ends, and the center speaker is provided in the center.
  • the laminated piezoelectric element 10 for this purpose may be provided.
  • the laminated piezoelectric element 10 has a distance L1 between the fixed ends by the fixing means 70a for fixing one opposite side and a distance L2 between the fixed ends by the fixing means 70b for fixing the other opposite side.
  • three laminated piezoelectric elements 50 are attached at positions separated from the fixed end by the fixing means 70a by 0.1 ⁇ L1 or more and separated from the fixed end by the fixing means 70b by 0.1 ⁇ L2 or more. It is preferable to do so.
  • the laminated piezoelectric element 10 is attached to the diaphragm at a distance of 1 ⁇ L or more.
  • the distance from the fixed end of the diaphragm 50 to the laminated piezoelectric element 10 is more preferably 0.15 ⁇ L or more in terms of obtaining a higher sound pressure, that is, a displacement amount of the diaphragm 50, and 0. 2 ⁇ L or more is more preferable.
  • the laminated piezoelectric element 10 of a required size cannot be attached to the vibrating plate 50, and the required number of laminated piezoelectric elements 10 cannot be attached. Can not be attached to the vibrating plate 50, multi-channel reproduction such as stereo reproduction becomes difficult, and when the number of channels is increased, the distance between the laminated piezoelectric elements 10 is too close and cross talk may occur. There is sex. Considering this point, the distance from the fixed end of the diaphragm 50 to the laminated piezoelectric element 10 is preferably 0.4 ⁇ L or less, more preferably 0.3 ⁇ L or less.
  • the effect of fixing the diaphragm 50 on the vibration of the diaphragm depends on the rigidity of the diaphragm 50, and the higher the rigidity of the diaphragm 50, the greater the influence. That is, the effect of separating the fixed position of the laminated piezoelectric element 10 from the fixed end of the diaphragm 50 can be obtained more when the rigidity of the diaphragm 50 is high. Considering this point, the two opposite sides of the rectangular diaphragm 50 are fixed, and the laminated piezoelectric element 10 is attached to the diaphragm 50 at a distance of 0.1 ⁇ L or more from the fixed end of the diaphragm 50.
  • the rigidity of the diaphragm 50 is high to some extent. Specifically, when the two opposing sides of the diaphragm 50 are fixed and the fixed position of the laminated piezoelectric element 10 is separated from the fixed end of the diaphragm 50 by 0.1 ⁇ L or more, the diaphragm 50
  • the spring constant is preferably 1 ⁇ 10 4 to 1 ⁇ 10 7 N / m, more preferably 1 ⁇ 10 5 to 1 ⁇ 10 6 N / m.
  • the spring constant of a plate-shaped object such as a diaphragm can be calculated by multiplying the Young's modulus of the forming material by the thickness of the plate-shaped object.
  • the shape of the diaphragm is not limited to rectangles and squares, and various quadrangles such as rhombuses, trapezoids, and parallelograms can be used.
  • the distance L between the fixed ends is set as in L1, L2, L3 ....
  • the laminated piezoelectric element 10 is separated from the fixed end by 0.1 ⁇ L1 or more, and when the distance between the fixed ends is L2, the laminated piezoelectric element 10 is separated.
  • the laminated piezoelectric element 10 is separated from the fixed end by 0.1 ⁇ L3 or more so as to be separated from the fixed end by 0.1 ⁇ L3 or more.
  • the attachment position of the laminated piezoelectric element 10 on the vibrating plate 50a may be determined.
  • the quadrangle of the diaphragm 50 is not limited to a perfect quadrangle. That is, in the present invention, the quadrangular diaphragm 50 may have a chamfered corner, a curved (R-shaped, round) corner, or an oval shape.
  • the fixing of the two opposing sides in the quadrangular diaphragm is not limited to the entire area of the side, and one of the sides depends on the rigidity of the diaphragm, the size of the diaphragm, and the like.
  • the area of the part may be fixed. In this case, it is preferable to fix a region of 50% or more of one side, more preferably a region of 70% or more of one side, and further fixing a region of 90% or more of one side. It is preferable to fix the entire area of one side, and it is particularly preferable.
  • the area not chamfered may be the entire area of one side, or chamfered. It may be the entire area of one side including the area where the above is performed.
  • the shape of the diaphragm is not limited to a quadrangle, and diaphragms having various shapes such as a circle, an ellipse, and a polygon other than a quadrangle can be used.
  • diaphragms having various shapes such as a circle, an ellipse, and a polygon other than a quadrangle can be used.
  • the preferable effect that a high sound pressure or the like can be obtained by attaching the laminated piezoelectric element 10 to the diaphragm at a certain distance from the fixed end of the diaphragm is a preferable effect.
  • various diaphragms other than the square shape regardless of the shape of the diaphragm.
  • the diaphragm has a polygonal shape having opposite sides such as a hexagon and an octagon
  • the diaphragm is fixed on the two opposite sides, and the fixed ends are fixed as in the case of the quadrangular diaphragm 50. It is preferable to set the distance L and attach the laminated piezoelectric element 10 to the diaphragm 50 at a distance of 0.1 ⁇ L or more from the fixed end.
  • the circular diaphragm 50b as conceptually shown in FIG. 29, it is conceivable to provide a circular (annular) fixing means 70c so as to surround the entire circumference of the diaphragm 50b.
  • the inner diameter ⁇ of the fixing means 70c is set as the distance L between the fixed ends, and the position is 0.1 ⁇ L or more away from the fixed end of the diaphragm 50.
  • the laminated piezoelectric element 10 may be attached.
  • the circular diaphragm 50b as shown in FIG.
  • the diaphragm is an arc-shaped fixing means such as the fixing means 70d and the fixing means 70e which are overlapped with the annular fixing means 70c and shown by a hatch in FIG. 29. It is also conceivable to fix 50b. Similarly, at this time as well, the laminated piezoelectric element 10 is attached at a position separated by 0.1 ⁇ L or more from the fixed end of the diaphragm 50b, where the inner diameter ⁇ of the arc of the fixing means is the distance L between the fixed ends. Just do it.
  • the diaphragm is a polygon with no opposite sides, such as a triangle or a pentagon. In this case, it is conceivable to fix one side of the polygon and the opposing vertices. For example, as conceptually shown in FIG. 30, when the diaphragm 50c is a triangle, it is conceivable to fix one side of the triangle with the fixing means 70 and fix the apex facing the one side with the fixing means 70f. Be done.
  • the perpendicular line P is lowered from the apex fixed by the fixing means 70f to the opposite side to be fixed, and the distance of the perpendicular line from the apex to the side to be fixed is defined as the distance L between the fixed ends, and the diaphragm 50c.
  • the laminated piezoelectric element 10 may be attached at a position separated from the fixed end (one of which is the apex) by 0.1 ⁇ L or more.
  • a laminated piezoelectric element in which a plurality of piezoelectric films are laminated by folding back one piezoelectric film can be considered to have two configurations.
  • the first configuration is such that the bent portion of the piezoelectric film due to folding is along the longitudinal direction of the laminated piezoelectric element. That is, the first configuration is such that the bent portion of the piezoelectric film due to folding back coincides with the longitudinal direction of the laminated piezoelectric element.
  • the second configuration is such that the bent portion of the piezoelectric film due to folding is along the lateral direction of the laminated piezoelectric element.
  • the second configuration is such that the bent portion of the piezoelectric film due to folding back coincides with the lateral direction of the laminated piezoelectric element.
  • the laminated piezoelectric element in which the piezoelectric films are folded and laminated has a structure in which the ridges formed by folding the piezoelectric film coincide with the longitudinal direction of the laminated piezoelectric element and a configuration in which the ridges formed by folding the piezoelectric film coincide with the lateral direction of the laminated piezoelectric element. Can be considered.
  • the longitudinal direction and the lateral direction of the laminated piezoelectric element are specifically the longitudinal direction and the lateral direction in the planar shape of the laminated piezoelectric element observed in the laminating direction of the piezoelectric film 12.
  • the planar shape of the laminated piezoelectric element observed in the laminating direction of the piezoelectric film 12 is, in other words, a shape when the laminated piezoelectric element is observed from a direction orthogonal to the main surface of the piezoelectric film 12.
  • a laminated piezoelectric element having a size of 20 ⁇ 5 cm is produced by laminating five layers of piezoelectric films by folding back one piezoelectric film
  • the following two configurations can be considered.
  • the laminated piezoelectric element shown below in order to simplify the drawing, the change in the thickness at the folded portion is omitted, and the thickness of the piezoelectric film 12 to be folded and laminated in a plurality of layers is shown uniformly.
  • the first configuration as conceptually shown in FIG. 13, five layers of piezoelectric film 12La are laminated by folding back a 20 ⁇ 25 cm rectangular piezoelectric film 12La four times in a direction of 25 cm by 5 cm each.
  • the laminated piezoelectric element 56A in the first configuration, as conceptually shown in FIG. 13, five layers of piezoelectric film 12La are laminated by folding back a 20 ⁇ 25 cm rectangular piezoelectric film 12La four times in a direction of 25 cm by 5 cm each.
  • the bent portion of the piezoelectric film 12La due to folding is along the direction of 20 cm, which is the longitudinal direction of the laminated piezoelectric element 56A. That is, in the laminated piezoelectric element 56A, the ridge line formed by folding back the piezoelectric film 12La coincides with the longitudinal direction of the laminated piezoelectric element 56A.
  • the second configuration as conceptually shown in FIG. 14, five layers of piezoelectric films 12Lb are laminated by folding back a 100 ⁇ 5 cm rectangular piezoelectric film 12Lb four times in a direction of 100 cm by 20 cm each.
  • the laminated piezoelectric element 56B is the bent portion of the piezoelectric film 12La due to folding along the direction of 20 cm, which is the longitudinal direction of the laminated piezoelectric element 56A. That is, in the laminated piezoelectric element 56A, the ridge line formed by folding back the piezoelectric film 12La coincides with the longitudinal direction of the laminated piezoelectric element 56A.
  • the bent portion of the piezoelectric film 12Lb due to folding is along the direction of 5 cm, which is the lateral direction of the laminated piezoelectric element 56B. That is, in the laminated piezoelectric element 56B, the ridge line formed by folding back the piezoelectric film 12Lb coincides with the lateral direction of the laminated piezoelectric element 56B.
  • the laminated piezoelectric element in which the piezoelectric films are folded and laminated has a structure in which the bent portion due to the folding of the piezoelectric film is along the longitudinal direction of the laminated piezoelectric element or a configuration in which the laminated piezoelectric element is laminated in the lateral direction.
  • the laminated piezoelectric element may be provided with an extraction wiring connected to the first electrode 24 and the second electrode 26 to reach the outside of the laminated piezoelectric element in order to connect to an external device such as a power supply device.
  • the lead-out wiring does not necessarily have to physically protrude to the outside, which means that the lead-out wiring is electrically drawn out from the electrode.
  • the lead-out wiring can be formed by using the method described above. For example, the lead-out wiring is provided at the end of the piezoelectric film or in a region protruding to the outside by exposing the first electrode 24 and the second electrode 26 and connecting them here without providing the piezoelectric layer 20. ..
  • the protective film and the electrode layer are peeled off at the end of the piezoelectric film or a region protruding to the outside, and a copper foil tape or the like is inserted between the piezoelectric layer 20 and the electrode layer. It is provided as such.
  • a through hole is provided in the protective layer of the piezoelectric film at the end of the piezoelectric film or in a region protruding to the outside, and a conductive member such as silver paste is used in the through hole to provide a conductive member. Is formed, and a copper foil tape or the like is connected to this conductive member to be provided.
  • the piezoelectric layer 20 of the piezoelectric film 12 has a preferable thickness of 8 to 300 ⁇ m and is very thin. Therefore, in order to prevent a short circuit, it is preferable that the lead-out wiring is provided at different positions in the surface direction of the piezoelectric film. That is, it is preferable that the lead-out wiring is provided so as to be offset in the plane direction of the piezoelectric film.
  • the piezoelectric film 12 is provided with a protruding portion protruding from the laminated piezoelectric element, and a lead-out wiring is connected to this protruding portion.
  • a protruding portion protruding from the laminated piezoelectric element for example, if the bent portion of the piezoelectric film 12La due to folding is a laminated piezoelectric element 56A along the longitudinal direction, a protruding island-shaped protruding portion 58 is provided at one end in the folding direction, as conceptually shown in FIG. , The lead wire 62 and the lead wire 64 may be connected here.
  • the bent portion of the piezoelectric film 12Lb due to folding is a laminated piezoelectric element 56B along the lateral direction, as conceptually shown in FIG. 16, one end in the folding direction is extended to form a protruding portion 58. , The lead wire 62 and the lead wire 64 may be connected to this protruding portion. Further, if the bent portion of the piezoelectric film 12Lb due to folding is the laminated piezoelectric element 56B along the lateral direction, as conceptually shown in FIG.
  • the end portion in the direction orthogonal to the folding direction that is, the piezoelectric film 12Lb
  • a protruding island-shaped protruding portion 58 may be provided at an end portion in the longitudinal direction of the above, and the drawer wiring 62 and the drawer wiring 64 may be connected here.
  • the protruding portion of the piezoelectric film protrudes from the end portion in the longitudinal direction of the laminated piezoelectric element, and the length of the protruding portion 58 in the longitudinal direction of the laminated piezoelectric element is determined by the laminated piezoelectric element. It is preferably 10% or more of the length in the longitudinal direction of the element. In the following description, the length of the protruding portion in the longitudinal direction of the laminated piezoelectric element is also simply referred to as “the length of the protruding portion”.
  • the length of the protruding portion 58 in the lateral direction is the lateral direction of the laminated piezoelectric element. It is preferably 50% or more of the length of.
  • the laminated piezoelectric element 56B is a laminated piezoelectric element in which the bent portion of the piezoelectric film 12Lb due to folding is along the lateral direction of the laminated piezoelectric element (see FIGS. 14 and 17). Therefore, as shown in FIG. 18, the longitudinal direction of the laminated piezoelectric element 56B is a direction orthogonal to the folding direction of the piezoelectric film 12La. That is, the longitudinal direction of the laminated piezoelectric element 56B coincides with the longitudinal direction of the piezoelectric film 12La. As shown in FIG. 18, the length of the laminated piezoelectric element 56B in the longitudinal direction is L.
  • the protrusion 58 has a length La in the longitudinal direction of 10% or more of the length L, that is, “La ⁇ L / 10”.
  • the current density in the path through which the drive current flows from the lead wiring to the laminated piezoelectric element can be reduced, so that the voltage drop can be reduced and the piezoelectric characteristics can be improved.
  • the above-mentioned electroacoustic converter can improve the sound pressure.
  • the length La of the protruding portion 58 is more preferably 50% or more, more preferably 70% or more, and particularly preferably 90% or more of the length L in the longitudinal direction of the laminated piezoelectric element. Most preferably, it is equal to or longer than the length of the planar shape of the laminated piezoelectric element 56B in the longitudinal direction. Therefore, in the case where the bent portion of the piezoelectric film 12La shown in FIGS. 13 and 15 due to folding is the laminated piezoelectric element 56A along the longitudinal direction, one end in the folding direction is the same as in the laminated piezoelectric element 56B shown in FIG.
  • the portion is extended to form a protruding portion, and the lead wire 62 and the lead wire 64 are connected to the protruding portion.
  • the length La of the protruding portion coincides with the length L of the laminated piezoelectric element in the longitudinal direction. That is, in this case, the protruding portion covers the entire area in the longitudinal direction of the laminated piezoelectric element.
  • the protruding portion 58 may be provided on any layer of the piezoelectric film that is folded back and laminated, but is preferably provided on the uppermost layer or the lowest layer in terms of piezoelectric efficiency and the like. Further, the protrusions may be provided in a plurality of layers such as the uppermost layer and the lowermost layer of the piezoelectric film, and the uppermost layer and the intermediate layer and the lowermost layer, or may be provided in all the layers of the piezoelectric film. When the protrusions 58 are provided in a plurality of layers of the piezoelectric film, all of the protrusions 58 may be provided at the lateral end of the laminated piezoelectric element, or all of the protrusions 58 may be provided at the longitudinal end. Alternatively, the protruding portion 58 at the end in the lateral direction and the protruding portion 58 at the end in the longitudinal direction may be mixed.
  • the five layers of the laminated piezoelectric film 12Lb and all the layers may protrude from the end portions in the longitudinal direction to provide the protruding portion 58.
  • a laminated piezoelectric element 56B may be manufactured by using a piezoelectric film 12Lb provided with a protruding portion 58 according to a folded portion (dashed line) as shown in FIG. 20.
  • two or more projecting portions 58, particularly all projecting portions 58 may be connected and provided.
  • the protruding portion 58 is a portion protruding from the sticking layer 14 at the end portion in the longitudinal direction of the laminated piezoelectric element 56B. The same applies to the laminated piezoelectric element 56A shown in FIG. 21, which will be described later.
  • the uppermost layer in the drawing extends the piezoelectric film 12La in the folding direction and protrudes from the end portion in the longitudinal direction of the laminated piezoelectric element 56A.
  • the second layer, the third layer surface, the fourth layer, and the bottom layer may be provided with a protruding portion 58 protruding from the end portion in the lateral direction of the laminated piezoelectric element 56A.
  • the protruding portion 58 protruding from the short end of the laminated piezoelectric element 56A is the second layer, the third layer surface, and the fourth layer, and the lowermost layer is also in the folded direction like the uppermost layer.
  • the piezoelectric film 12La may be extended to form a protruding portion 58 projecting from the longitudinal end of the laminated piezoelectric element 56A.
  • the present invention is not limited to the above-mentioned examples, and various improvements and changes are made without departing from the gist of the present invention. Of course, it is also good.

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PCT/JP2021/012200 2020-03-31 2021-03-24 積層圧電素子および電気音響変換器 Ceased WO2021200455A1 (ja)

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EP21780794.0A EP4129497A4 (en) 2020-03-31 2021-03-24 LAYERED PIEZOELECTRIC ELEMENT AND ELECTROACOUSTIC TRANSDUCER
CN202180022200.5A CN115298842A (zh) 2020-03-31 2021-03-24 层叠压电元件及电声换能器
JP2022512021A JP7386324B2 (ja) 2020-03-31 2021-03-24 積層圧電素子および電気音響変換器
KR1020227033021A KR20220145379A (ko) 2020-03-31 2021-03-24 적층 압전 소자 및 전기 음향 변환기
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WO2023048022A1 (ja) * 2021-09-24 2023-03-30 富士フイルム株式会社 圧電素子および圧電スピーカー
US20240036424A1 (en) * 2021-06-10 2024-02-01 Shenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd. Display panel and display device

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KR20220145379A (ko) 2022-10-28
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TW202143516A (zh) 2021-11-16
CN115298842A (zh) 2022-11-04

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