KR20220145379A - 적층 압전 소자 및 전기 음향 변환기 - Google Patents

적층 압전 소자 및 전기 음향 변환기 Download PDF

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Publication number
KR20220145379A
KR20220145379A KR1020227033021A KR20227033021A KR20220145379A KR 20220145379 A KR20220145379 A KR 20220145379A KR 1020227033021 A KR1020227033021 A KR 1020227033021A KR 20227033021 A KR20227033021 A KR 20227033021A KR 20220145379 A KR20220145379 A KR 20220145379A
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KR
South Korea
Prior art keywords
piezoelectric element
piezoelectric
laminated
diaphragm
layer
Prior art date
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KR1020227033021A
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English (en)
Korean (ko)
Inventor
데루오 아시카와
유스케 가가와
가즈오 히라구치
데츠 미요시
Original Assignee
후지필름 가부시키가이샤
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Publication of KR20220145379A publication Critical patent/KR20220145379A/ko
Withdrawn legal-status Critical Current

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    • H01L41/083—
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H04R17/005—Piezoelectric transducers; Electrostrictive transducers using a piezoelectric polymer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0611—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0688—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction with foil-type piezoelectric elements, e.g. PVDF
    • H01L41/09—
    • H01L41/193—
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/206—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using only longitudinal or thickness displacement, e.g. d33 or d31 type devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/852—Composite materials, e.g. having 1-3 or 2-2 type connectivity
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/857—Macromolecular compositions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R2217/00—Details of magnetostrictive, piezoelectric, or electrostrictive transducers covered by H04R15/00 or H04R17/00 but not provided for in any of their subgroups
    • H04R2217/01—Non-planar magnetostrictive, piezoelectric or electrostrictive benders
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Composite Materials (AREA)
  • Materials Engineering (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
KR1020227033021A 2020-03-31 2021-03-24 적층 압전 소자 및 전기 음향 변환기 Withdrawn KR20220145379A (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2020061719 2020-03-31
JPJP-P-2020-061719 2020-03-31
JP2020206068 2020-12-11
JPJP-P-2020-206068 2020-12-11
PCT/JP2021/012200 WO2021200455A1 (ja) 2020-03-31 2021-03-24 積層圧電素子および電気音響変換器

Publications (1)

Publication Number Publication Date
KR20220145379A true KR20220145379A (ko) 2022-10-28

Family

ID=77928771

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020227033021A Withdrawn KR20220145379A (ko) 2020-03-31 2021-03-24 적층 압전 소자 및 전기 음향 변환기

Country Status (7)

Country Link
US (1) US20230026623A1 (https=)
EP (1) EP4129497A4 (https=)
JP (1) JP7386324B2 (https=)
KR (1) KR20220145379A (https=)
CN (1) CN115298842A (https=)
TW (1) TW202143516A (https=)
WO (1) WO2021200455A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113433746A (zh) * 2021-06-10 2021-09-24 深圳市华星光电半导体显示技术有限公司 显示面板和显示装置
JPWO2023048022A1 (https=) * 2021-09-24 2023-03-30

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015070110A (ja) 2013-09-30 2015-04-13 株式会社村田製作所 圧電デバイスおよび圧電デバイスの製造方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5647199A (en) * 1979-09-26 1981-04-28 Toray Ind Inc Polymer piezoelectric transducer of multilayered lamination type
JPS5787700A (en) * 1980-11-20 1982-06-01 Nec Corp Transmitter and receiver
JPS59178782A (ja) * 1983-03-29 1984-10-11 Kureha Chem Ind Co Ltd 高分子バイモルフ構造体
US4725994A (en) * 1984-06-14 1988-02-16 Kabushiki Kaisha Toshiba Ultrasonic transducer with a multiple-folded piezoelectric polymer film
WO2002015378A1 (en) 2000-08-11 2002-02-21 Ecchandes Inc. Overlapping type piezoelectric stator, overlapping type piezoelectric acturator and applications thereof
JP2008096371A (ja) * 2006-10-16 2008-04-24 Seiko Epson Corp インクジェットヘッド
JP6025477B2 (ja) 2012-09-25 2016-11-16 帝人株式会社 圧電スピーカー
JP2014168132A (ja) 2013-01-31 2014-09-11 Teijin Ltd 高分子圧電スピーカー
JP6005089B2 (ja) 2013-03-29 2016-10-12 富士フイルム株式会社 電気音響変換フィルム
JP6199245B2 (ja) 2014-06-30 2017-09-20 富士フイルム株式会社 電気音響変換フィルムおよび電気音響変換フィルムの導通方法
JP6505845B2 (ja) 2015-08-20 2019-04-24 富士フイルム株式会社 電気音響変換フィルム
JP6510148B2 (ja) * 2016-07-27 2019-05-08 富士フイルム株式会社 ピックアップセンサおよび生体センサ
JP2019007749A (ja) 2017-06-20 2019-01-17 ヤマハ株式会社 圧力センサー

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015070110A (ja) 2013-09-30 2015-04-13 株式会社村田製作所 圧電デバイスおよび圧電デバイスの製造方法

Also Published As

Publication number Publication date
EP4129497A1 (en) 2023-02-08
US20230026623A1 (en) 2023-01-26
JP7386324B2 (ja) 2023-11-24
EP4129497A4 (en) 2023-08-30
JPWO2021200455A1 (https=) 2021-10-07
TW202143516A (zh) 2021-11-16
CN115298842A (zh) 2022-11-04
WO2021200455A1 (ja) 2021-10-07

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