WO2021200338A1 - 加圧用プレート及び加圧装置 - Google Patents

加圧用プレート及び加圧装置 Download PDF

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Publication number
WO2021200338A1
WO2021200338A1 PCT/JP2021/011718 JP2021011718W WO2021200338A1 WO 2021200338 A1 WO2021200338 A1 WO 2021200338A1 JP 2021011718 W JP2021011718 W JP 2021011718W WO 2021200338 A1 WO2021200338 A1 WO 2021200338A1
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WO
WIPO (PCT)
Prior art keywords
facing surface
pressurizing
degassing
groove
pressurizing plate
Prior art date
Application number
PCT/JP2021/011718
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English (en)
French (fr)
Japanese (ja)
Inventor
駿 歌川
善幸 江嶋
小橋　聖治
西村　浩二
Original Assignee
デンカ株式会社
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Application filed by デンカ株式会社 filed Critical デンカ株式会社
Priority to JP2022511957A priority Critical patent/JPWO2021200338A1/ja
Publication of WO2021200338A1 publication Critical patent/WO2021200338A1/ja

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D3/00—Charging; Discharging; Manipulation of charge
    • F27D3/12—Travelling or movable supports or containers for the charge
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D5/00—Supports, screens or the like for the charge within the furnace
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D7/00—Forming, maintaining or circulating atmospheres in heating chambers
    • F27D7/06—Forming or maintaining special atmospheres or vacuum within heating chambers

Definitions

  • the present invention relates to a pressurizing plate and a pressurizing device used when pressurizing and holding an object that generates gas during a treatment such as degreasing treatment.
  • a green sheet is formed by the doctor blade method.
  • a plurality of green sheets are laminated and a degreasing step is performed, and after the degreasing step, the green sheet is put into a sintering furnace and sintered (see Patent Document 1).
  • the degreasing step for example, the laminated body of the green sheet is heated to a predetermined temperature, the binder in the green sheet is gasified and discharged, and then the sintering step is carried out.
  • An object of the present invention is to solve the above problems, and an object of the present invention is to provide a pressurizing plate and a pressurizing device capable of efficiently discharging gas generated during a process such as a degreasing step.
  • the present inventors have come up with the idea that the processing time may be shortened by pressurizing and holding an object that generates gas during processing such as a degreasing process by creating a vacuum atmosphere. Therefore, the present inventors further studied this idea, and found that by devising the shape of the member holding the object in between, the gas remaining in the object can be effectively removed. We came up with the present invention with the knowledge that it can be reduced.
  • the present invention is a pressurizing plate that directly or indirectly contacts an object that generates gas during processing, and includes an opposing surface that is arranged to face the object, and the gas passes through the facing surface.
  • a degassing part is provided.
  • a degassing portion is formed on the facing surface arranged so as to face the object, and the gas generated in the object is not completely shielded by the pressurizing plate, and the degassing is performed. It is discharged more efficiently by the part.
  • the above-mentioned degassing portion may be a through hole penetrating to the opposite surface opposite to the opposite surface. Since the through hole penetrates from the facing surface facing the object to the opposite surface, the gas generated in the object can be efficiently discharged.
  • the above-mentioned degassing portion may be a groove formed on the facing surface and at least a part thereof leads to the outer edge of the facing surface. Since the groove extends to the outer edge of the facing surface, the gas generated in the object reaches the outer edge of the facing surface through the groove and is efficiently discharged to the outside.
  • the above-mentioned degassing portion may include a through hole penetrating to the opposite surface opposite to the facing surface and a groove formed on the facing surface and communicating with the through hole.
  • the gas generated in the object reaches the through hole through the groove, passes through the through hole, and is efficiently discharged to the outside. Further, at least a part of this groove may lead to the outer edge of the facing surface. If the groove leads to the outer edge of the facing surface, it can be more easily discharged to the outside by passing through the outer edge.
  • the above-mentioned groove has a lattice shape in which a plurality of vertical grooves and a plurality of horizontal grooves intersect in a plan view, and the above-mentioned through hole may be provided at the intersection of the vertical groove and the horizontal groove.
  • the facing surface is provided with a land portion that is a region other than the groove and comes into direct or indirect contact with the object, and the area of the land portion may be smaller than the area of the groove in a plan view. .. Since the area of the groove is larger than the area of the land part, the gas generated in the object is more easily discharged.
  • the degassing portion may be a protruding portion that is erected from the facing surface and that directly or indirectly contacts the object to form a gap between the object and the facing surface.
  • the gas generated in the object is efficiently discharged to the outside through the gap formed by the protrusion.
  • the present invention is a pressurizing device that pressurizes and holds an object, and sandwiches the object between a base portion that directly or indirectly contacts the object and supports the object and the base portion. It is provided with a holding portion and a pressurizing structure for pressurizing an object through the holding portion, and at least one of the base portion and the holding portion is provided with an facing surface facing the object, and gas is supplied to the facing surface. A degassing section is provided to pass through.
  • the object since the object is pressurized and held, the object can be held stably, and further, at least one of the base portion and the sandwiching portion is provided with a degassing portion on the facing surface facing the object. Therefore, the gas generated in the object is not completely shielded by the base portion or the sandwiching portion, and is efficiently discharged by the degassing portion.
  • the base portion and the sandwiching portion may be provided with facing surfaces facing the object, and degassing portions may be provided on both the facing surface of the base portion and the facing surface of the sandwiching portion.
  • the gas generated in the object is not completely shielded by the base portion and the sandwiching portion, and is efficiently discharged by the degassing portion provided in each of the base portion and the sandwiching portion.
  • the holding portion in the above pressurizing device is a pressurizing plate, and the pressurizing structure compresses a plurality of compression springs arranged on the pressurizing plate, a movable portion that abuts on the plurality of compression springs, and a movable portion. It may be provided with a support portion that movably supports the spring in the compression direction and holds the movable portion against the reaction force of the compression spring. Since the pressurizing plate is placed on the object, it becomes easy to pressurize the object from a wide range.
  • a plurality of compression springs arranged on the pressurizing plate can be collectively pressurized by the movable portion, workability is improved, and the pressing force applied to the object from the pressurizing plate can be easily equalized. It is advantageous for stably holding the object in a pressurized state.
  • the above pressurizing plate may have a facing surface provided with a degassing portion.
  • the gas generated in the object is no longer completely shielded by the pressurizing plate and is efficiently discharged by the degassing portion.
  • the above-mentioned sandwiching portion is an upper pressurizing plate having a facing surface
  • a base portion is a lower pressurizing plate having an facing surface
  • an upper gas is placed on the facing surface of the upper pressurizing plate.
  • a venting portion is provided
  • a lower degassing portion is provided on the facing surface of the lower pressurizing plate
  • the upper degassing portion is erected from the facing surface of the upper pressurizing plate.
  • it is a protruding portion that directly or indirectly abuts on the object
  • the lower degassing portion may be provided with a through hole and a groove communicating with the through hole. The gas generated in the object is efficiently discharged from the gap formed by the protrusion of the upper pressurizing plate, and further efficiently discharged from the through hole and groove of the lower pressurizing plate.
  • the holding portion in the above pressurizing device is a plurality of compression springs arranged on the object, the base portion includes an opposing surface provided with a degassing portion, and the pressurizing structure abuts on the compression spring.
  • a movable portion and a support portion that movably supports the movable portion in the compression direction of the compression spring and holds the movable portion against the reaction force of the compression spring may be provided.
  • the movable portion that compresses the compression spring is held at a predetermined position by the support portion, and the object can be stably held in a pressurized state.
  • the gas generated during the processing of the object can be efficiently discharged.
  • FIG. It is a figure which concerns on the modification of the pressurizing plate
  • FIG. It is a figure which concerns on another modification of the pressurizing plate
  • (a) is a plan view which shows the facing surface
  • (b) is a cross-sectional view along line bb of (a) figure.
  • a plurality of green sheets used for manufacturing a substrate are laminated and a degreasing process is performed, and a firing process is performed after the degreasing process.
  • the degreasing step for example, the laminated body of the green sheet is heated to a predetermined temperature, and the binder in the green sheet is gasified and discharged.
  • the predetermined temperature is a temperature at which a low-polymerization binder and a high-polymerization binder can be decomposed, for example, about 500 ° C.
  • this predetermined temperature is a very low temperature as compared with the high temperature region when firing the substrate, and therefore, a metal material such as stainless steel is used as the material of the degreasing pressurizing jig (an example of the pressurizing device).
  • a metal material such as stainless steel is used as the material of the degreasing pressurizing jig (an example of the pressurizing device).
  • the degreasing pressurizing jig (hereinafter referred to as “pressurizing jig”) according to the present embodiment holds the laminated body of green sheets in a pressurized state in the degreasing step and the firing step. First, the pressurizing jig will be described, and the pressurizing plate will be described in detail later.
  • the laminated body B of the green sheet G is placed, and the laminated body B is directly or indirectly in contact with the laminated body B.
  • a bottom member 2 (an example of a base portion) that supports B is provided.
  • the pressurizing jig 1A directly or indirectly contacts the laminated body B and pressurizes the laminated body B through the middle member 3 and the middle member 3 that sandwich the laminated body B with the bottom member 2. It has a pressure structure 6A.
  • the bottom member 2 and the middle member 3 are specific examples of the pressurizing plate that directly or indirectly abuts on the laminated body B.
  • "direct contact” means a form in which two members are in contact with each other.
  • indirectly abutting means an aspect in which another member is interposed between the two members, and the other member has the permeability of the gas generated during the treatment. That is, in both “direct” and “indirect” cases, it means that the gas generated from one member has the possibility of reaching the other member.
  • the laminated body B of the green sheet G is an example of an object to be pressurized by the pressurizing jig 1A.
  • the green sheet G is a sheet formed mainly of ceramic powder and a binder.
  • a laminated body B of the green sheets G is formed.
  • the laminated body B is placed on the bottom member 2 via the lower BN (boron nitride) setter 4.
  • the lower BN setter 4 includes, for example, a bottom BN setter 41 laminated on the bottom member 2 and a lower BN setter 42 laminated on the bottom BN setter 41.
  • the bottom BN setter 41 and the bottom BN setter 42 have a degree of permeability to which the gas generated by the decomposition of the binder passes in the degreasing step.
  • the laminated body B according to the present embodiment is placed on the bottom member 2 via the lower BN setter 4, and shows an example of a form in which the laminated body B is indirectly in contact with the bottom member 2.
  • the laminated body B may be brought into direct contact with the bottom member 2 without interposing the lower BN setter 4.
  • the upper part of the laminated body B is in contact with the middle member 3 via the upper BN (boron nitride) setter 5.
  • the upper BN setter 5 is in contact with the upper surface of the laminated body B, and the middle member 3 is in contact with the upper surface of the upper BN setter 5.
  • the upper BN setter 5 has a degree of permeability to which the gas generated by the decomposition of the binder passes in the degreasing step.
  • the laminated body B according to the present embodiment is in contact with the middle member 3 via the upper BN setter 5. That is, this embodiment shows an example of a mode in which the laminated body B is indirectly in contact with the middle member 3. However, the laminated body B may be in direct contact with the middle member 3 without interposing the upper BN setter 5.
  • the pressurizing structure 6A includes a plurality of coil springs 7A (an example of a compression spring) arranged on the middle member 3 and an upper member 8A (movable portion) that interferes with the plurality of coil springs 7A.
  • the upper member 8A can move in the compression direction of the coil spring 7A.
  • the pressure structure 6A includes a support portion 9A that holds the upper member 8A against the reaction force of the coil spring 7A.
  • the support portion 9A is screwed onto a plurality of columns 91 that are erected from the bottom member 2 and penetrate the middle member 3 and the upper member 8A, a male threaded portion 92 formed at least above the column 91, and a male threaded portion 92. It is provided with a fastening nut 93, which is combined and interferes with the upper member 8A from above the upper member 8A to hold the upper member 8A in a predetermined position.
  • the support column 91 may be, for example, a full-threaded bolt, and is screwed into a fixing nut 20 fixed to the bottom member 2 and fixed at a predetermined position.
  • the middle member 3 is formed with a guide hole 30 through which the support column 91 penetrates.
  • the upper member 8A is formed with a guide hole 80 through which the support column 91 penetrates. The middle member 3 and the upper member 8A move up and down while being guided by the support column 91.
  • the upper member 8A includes a lower surface that comes into contact with the coil spring 7A and an upper surface that receives interference from the fastening nut 93.
  • the fastening nut 93 is fastened (screwed) to the male screw portion 92 of the support column 91, and abuts and interferes with the upper surface of the upper member 8A.
  • the upper member 8A descends while receiving the repulsive force of the coil spring 7A. This descent compresses the coil spring 7A.
  • the upper member 8A pressurizes the laminated body B via the coil spring 7A and the middle member 3, and sandwiches and holds the laminated body B with the bottom member 2.
  • the middle member 3 since the middle member 3 is arranged on the laminated body B, it becomes easy to pressurize the laminated body B from a wide range. Further, since the plurality of coil springs 7A arranged on the middle member 3 can be collectively pressurized by the upper member 8A, workability is improved. Further, the pressing force applied to the laminated body B from the middle member 3 is easily equalized, which is advantageous in stably holding the laminated body B in a pressurized state. In particular, in the pressurizing jig 1A, for example, it is not necessary to individually compress and adjust a plurality of compression springs, so that the work load when manually performing is greatly improved, and the compression springs are being adjusted during adjustment. Inefficiencies that cause deviations are unlikely to occur. It is also possible to omit the middle member 3 in the present embodiment, and when the middle member 3 is omitted, substantially a plurality of coil springs 7A correspond to the "holding portion".
  • the bottom member 2 which is an example of the "lower pressurizing plate” will be described with reference to FIGS. 3, 4 and 5.
  • the bottom member 2 includes a bottom plate portion 21.
  • One surface of the bottom plate portion 21 is a facing surface 2a (see FIGS. 3A and 4) arranged to face the laminated body B, and the opposite surface is the opposite surface 2b ((in FIG. 3). b) FIG. 5).
  • One or more reinforcing ribs 27 are provided on the opposite surface 2b.
  • the reinforcing rib 27 is provided, for example, so as to surround the opposite surface 2b along the outer edge 2c of the bottom plate portion 21. Further, the reinforcing ribs 27 are arranged so that, for example, linear plate members arranged on the opposite surface 2b intersect with each other.
  • the bottom plate portion 21 is provided with a plurality of through holes 22 arranged at equal intervals.
  • the through hole 22 penetrates from the facing surface 2a to the opposite surface 2b of the bottom plate portion 21.
  • a groove 25 is provided on the facing surface 2a of the bottom plate portion 21.
  • the groove 25 is a substantially rectangular shape having a pair of side portions and a bottom portion in a cross-sectional view, and the width of the bottom portion is larger than the height of the side portions.
  • the groove 25 includes, for example, a plurality of vertical groove portions 23 and a plurality of horizontal groove portions 24.
  • the bottom plate portion 21 is rectangular
  • the vertical groove portion 23 is formed parallel to the short side of the bottom plate portion 21
  • the horizontal groove portion 24 is formed parallel to the long side.
  • the plurality of vertical groove portions 23 and the plurality of horizontal groove portions 24 intersect in a plan view, and are formed substantially in a grid pattern.
  • the end portion 23a of the vertical groove portion 23 and the end portion 24a of the lateral groove portion 24 communicate with the outer edge 2c of the bottom plate portion 21 (opposing surface 2a), and are opened outward without being closed by the outer edge 2c of the bottom plate portion 21.
  • the groove 25 communicates with the through hole 22 at the intersection of the vertical groove portion 23 and the horizontal groove portion 24, and the inside of the groove 25 communicates with the through hole 22.
  • the vertical groove portion 23 according to the present embodiment is linear in a plan view
  • the horizontal groove portion 24 is linear in a plan view.
  • the linear shape is an example of the linear shape. Therefore, the linear shape includes not only a straight line shape but also a non-linear shape that is curved or bent.
  • the groove portion substantially parallel to the one vertical groove portion 23 is the vertical groove portion 23.
  • the groove portion that is not parallel to the vertical groove portion 23 but intersects the vertical groove portion 23 is the horizontal groove portion 24, and in the present embodiment, the plurality of horizontal groove portions 24 are substantially parallel.
  • the vertical groove portion 23 and the horizontal groove portion 24 form a lattice shape orthogonally to each other.
  • the lattice shape formed by the intersection of the vertical groove portion 23 and the horizontal groove portion 24 is not limited to the mode in which the vertical groove portion 23 and the horizontal groove portion 24 are orthogonal to each other, and also includes a mode in which the vertical groove portion 23 and the horizontal groove portion 24 intersect diagonally.
  • the lattice shape is not limited to the form formed by the intersection of the linear vertical groove portion 23 and the linear horizontal groove portion 24, and also includes a form in which at least one of them is formed by a non-linear form.
  • the bottom member 2 is arranged so that the facing surface 2a faces upward.
  • a groove 25 is provided on the facing surface 2a.
  • the region where the groove 25 is not provided, that is, the region other than the groove 25 is the land portion 2d (see FIG. 2), and the land portion 2d abuts on the lower BN setter 4.
  • the gas generated during the treatment in the degreasing step passes from the laminated body B through the lower BN setter 4 and reaches the bottom member 2.
  • the gas is discharged through the through hole 22 and the groove 25 of the bottom member 2.
  • the through hole 22 and the groove 25 function as a "lower degassing portion".
  • the middle member 3 is an example of a “lower pressure plate” and includes a middle plate portion 31.
  • the middle plate portion 31 has both surfaces, one surface is a facing surface 3a (see FIG. 1) arranged to face the laminated body B, and the opposite surface is the opposite surface 3b.
  • the middle plate portion 31 is provided with a plurality of through holes 32 arranged at equal intervals.
  • the through hole 32 penetrates from the facing surface 3a to the opposite surface 3b of the middle plate portion 31.
  • a plurality of projecting portions 33 are provided on the facing surface 3a of the middle plate portion 31.
  • the protruding portion 33 is a rectangular block body erected from the facing surface 3a.
  • the plurality of projecting portions 33 are provided side by side at equal intervals in the vertical direction and the horizontal direction.
  • the plurality of through holes 32 and the plurality of protrusions 33 are arranged in a staggered manner in a mutual relationship.
  • the plurality of through holes 32 are provided so as to avoid the protruding portion 33, and communicate with the gap 35 formed by the protruding portion 33.
  • the middle member 3 is arranged so that the facing surface 3a faces downward.
  • a protrusion 33 is provided on the facing surface 3a.
  • the protruding portion 33 is in contact with the upper BN setter 5, that is, is indirectly in contact with the laminated body B.
  • the region where the protrusion 33 is not formed forms a gap 35 with the upper BN setter 5.
  • the gas generated during the treatment in the degreasing step passes through the upper BN setter 5 and reaches the middle member 3.
  • the gas is discharged through the through hole 32 and the gap 35 of the middle member 3.
  • the gap 35 leads to the outer edge 3c of the middle plate portion 31 (opposing surface 3a), passes through the outer edge 3c (see FIG. 6) of the middle plate portion 31, and is open to the outside.
  • the gas passes through the gap 35 of the middle member 3 and is discharged.
  • the through hole 32 and the gap 35 function as an "upper degassing portion".
  • the bottom member 2 and the middle member 3 have been described above as specific examples of the pressurizing plate. Although the bottom member 2 and the middle member 3 have different forms, it is also possible to form the same unified form.
  • the bottom member 2 may be provided with a protruding portion 33 to approximate the shape on the facing surface 3a of the middle member 3.
  • the groove 25 may be provided in the middle member 3 to approximate the shape on the facing surface 2a of the bottom member 2.
  • the shape may be such that at least one of the through holes 22 and 32 of the bottom member 2 and the middle member 3 is omitted.
  • whether to grasp as a form in which the groove 25 is provided or as a form in which the protrusion 33 is provided is determined by, for example, the entire area of the facing surfaces 2a and 3a (see FIGS. 4 and 6). It can be distinguished by using the smaller area occupied as a reference. For example, in the facing surface 2a shown in FIG. 4, since the area of the groove 25 is smaller than the area of the land portion 2d, it can be grasped as a form in which the groove 25 is provided. Further, on the facing surface 3a shown in FIG. 6, since the area of the protruding portion 33 is smaller than the area other than the protruding portion 33, it can be grasped as a form in which the protruding portion 33 is provided.
  • FIGS. 9 and 10 a modified example of the pressurizing plate will be described with reference to FIGS. 9 and 10.
  • the pressurizing plate according to this modification can be applied to one or both of the bottom member 2 and the middle member 3 described above.
  • the figure (a) of FIG. 9 and the figure (a) of FIG. 10 are plan views showing the facing surfaces 3a, and the regions shown by hatching indicate regions that overlap or are projected on the laminated body B.
  • FIG. 9 (b) is a cross-sectional view taken along line bb of FIG. 9 (a)
  • FIG. 10 (b) is a cross-sectional view taken along line bb of FIG. 10 (a). be.
  • a plurality of through holes 32 are formed in the pressurizing plate 3A according to the first modification.
  • No groove 25 or protrusion 33 is formed on the facing surface 3a of the pressurizing plate 3A, and the through hole 32 functions independently as a degassing portion.
  • the region where the facing surface 3a of the pressurizing plate 3A overlaps the laminated body B is small. That is, it is desirable that the total area of the plurality of through holes 32 is large when the facing surface 3a is viewed in a plan view. It is desirable to ensure strength.
  • the pressurizing plate 3A When the pressurizing plate 3A is used as the bottom member 2, care must be taken so that the base portion that supports the bottom member 2 from below does not completely block the through hole 32 of the pressurizing plate 3A. For example, it is desirable to provide a groove that serves as an escape route for gas in the base portion, or to provide a groove that serves as an escape route for gas on the lower surface of the pressurizing plate 3A.
  • the pressurizing plate 3B includes a plurality of grooves 34 formed on the facing surface 3a. No through hole is formed in the pressurizing plate 3B, and the groove 34 functions independently as a degassing portion.
  • the groove 34 is provided in a straight line, and both end portions 34a lead to the outer edge 3c of the facing surface 3a of the pressurizing plate 3B.
  • the plurality of grooves 34 are provided side by side in substantially parallel without intersecting each other.
  • the form of the degassing portion is limited to the above form.
  • the shapes of the through holes 22 and 32 are not circular, but may be polygonal or any other shape.
  • the number of through holes 22 and 32 may be one, and the shapes and sizes of the plurality of through holes 22 and 32 may be different.
  • the shapes of the grooves 25 and 34 in a plan view are not limited to a linear shape or a grid shape, and may be a curved shape or a bent shape. Further, the shapes and sizes of the plurality of grooves 25 and 34 may be different.
  • the protruding portion 33 may be a single number, or the region other than the protruding portion 33 may be a gap 35 that functions as a degassing portion. Further, the shapes and sizes of the plurality of protrusions 33 may be different. Further, the shape of the protruding portion 33 is not limited to a rectangular block shape, and may be, for example, a columnar shape, a prismatic shape, a conical shape, or a needle shape. Further, the protruding portions 33 are connected in a band shape, and may have a U-shaped shape, a C-shaped shape, an L-shaped shape, an annular shape (doughnut shape), or the like.
  • the grooves 25 and 34 and the gap 35 that function as the degassing portion may be interrupted in the middle without reaching the outer edges 2c and 3c of the facing surfaces 2a and 3a.
  • the laminated body B extends to the outside outside the region overlapping the lower BN setter 4 or the upper BN setter 5, or communicates with the through holes 32 and 32.
  • only the protruding portion may be formed without forming the through hole, or all of the through hole, the groove and the protruding portion may be formed.
  • the green sheet G forming the laminate B contains a binder. If the laminate B is fired while the binder is contained, the quality of the laminate B is deteriorated and the furnace body is damaged. Therefore, the firing step cannot be performed with the binder contained. Therefore, a degreasing step of removing the binder is carried out before the firing step.
  • the laminated body B is introduced into the degreasing furnace while being held by the pressurizing jig 1A.
  • the temperature in the furnace is about 500 ° C., which is lower than that in the firing step, and the binder is decomposed in the degreasing step, gasified and discharged from the laminate B.
  • the gas generated by the heat treatment in the degreasing step passes through the lower BN setter 4 and the upper BN setter 5 and reaches the bottom member 2 or the middle member 3. Since the bottom member 2 or the middle member 3 is formed with through holes 22, 32, grooves 25, and gaps 35 that function as degassing portions, gas can be effectively discharged. Even in the embodiment in which only the through holes 22 and 32 are provided in the bottom member 2, the gas can be effectively discharged if the base portion that supports the bottom member 2 from below has a portion that serves as an escape route for the gas.
  • the laminated body B is held in a state of being pressurized by the pressurizing jig 1A. Therefore, even if the degreasing step is carried out in a vacuum atmosphere, the laminated body B is not easily displaced and stable treatment can be carried out. As a result, the processing efficiency of degassing is improved, and it becomes easy to remove the gas at an early stage. Further, the pressing force in the degreasing step is overwhelmingly larger than the pressing force applied to the laminate B when joining the semiconductor substrates, and therefore, the pressing force when joining the semiconductor substrates is essential. Different to.
  • the pressing force of 1 ⁇ 10 3 N / mm 2 to 1 ⁇ 10 6 N / mm 2 , more preferably 1 ⁇ 10 4 N / mm 2 to 1 ⁇ 10 5 N / mm 2 is the laminate B. Is given to.
  • the binder is decomposed and a part of it is discharged as gas, but carbon content may remain in the laminate B.
  • dry air is supplied into the furnace this time, reacted with the carbon component, and discharged from the laminate B as carbon dioxide or carbon monoxide.
  • the degreasing step is completed by the above steps. After the degreasing step, the laminate B is removed from the pressurizing jig 1A and proceeds to the firing step.
  • the pressurizing jig 1B (an example of the pressurizing device) according to the second embodiment will be described.
  • the pressurizing jig 1B according to the second embodiment has substantially the same structure and elements as the pressurizing jig 1A. Therefore, substantially the same structure and elements as the pressurizing jig 1A are designated by the same reference numerals, and detailed description thereof will be omitted.
  • the pressurizing jig 1B has a plurality of bottom members 2 with which the laminate B is in direct or indirect contact, and a plurality of bottom members 2 which are in direct or indirect contact with the laminate B and sandwich the laminate B between the bottom members 2. It includes a compression spring 7B and a pressurizing structure 6B that pressurizes the laminate B via the compression spring 7B.
  • the compression spring 7B is formed by, for example, two leaf springs arranged one above the other. The technical significance of "contacting directly or indirectly" in this embodiment is the same as that in the above-described embodiment.
  • the laminated body B is placed on the bottom member 2 via the lower BN setter 4. Further, the compression spring 7B arranged above the laminated body B is in contact with the laminated body B via the upper BN setter 5. That is, in the present embodiment, the laminated body B is indirectly in contact with the bottom member 2, and the compression spring 7B is indirectly in contact with the laminated body B.
  • the pressurizing jig 1B does not have a middle member, and a plurality of compression springs 7B are indirectly in contact with the laminated body B. In the present embodiment, the plurality of compression springs 7B correspond to the sandwiching portion.
  • the pressure structure 6B holds the movable plate 8B (movable part) that interferes with the compression spring 7B and is movable in the compression direction of the compression spring 7B, and the movable plate 8B against the reaction force of the compression spring 7B.
  • a support portion 9B and a support portion 9B are provided.
  • the support portion 9B includes a plurality of columns 91 erected from the bottom member 2, a frame 94 arranged so as to surround the laminated body B and fixed to the columns 91, and a tightening bolt 95 attached to the frame 94. It has.
  • the strut 91 is, for example, a full screw bolt.
  • the frame 94 surrounds the laminated body B from above in an inverted U shape, for example, a pair of leg portions 94a arranged on the side of the laminated body B, and a bridge plate portion 94b connected to both upper ends of the leg portions 94a. And have.
  • the bridge plate portion 94b is arranged above the laminate B, the compression spring 7B, and the movable plate 8B.
  • the bridge plate portion 94b is formed with a fixing hole through which the support column 91 penetrates and a female screw portion 94c through which the shaft portion of the tightening bolt 95 is screwed and penetrates.
  • a fixing hole of the bridge plate portion 94b is passed through the support column 91, and the frame 94 is fixed to the support column 91 by a nut 96.
  • the tightening bolt 95 is screwed from above into the female screw portion 94c of the bridge plate portion 94b.
  • the tip (lower end) of the shaft portion 95a of the tightening bolt 95 abuts and interferes with the movable plate 8B.
  • the tightening bolt 95 is tightened, the movable plate 8B descends while receiving the repulsive force of the compression spring 7B.
  • the compression spring 7B is compressed by this descent, and as a result, the laminated body B is pressed, and the laminated body B is sandwiched and held between the bottom member 2 and the laminated body B.
  • the pressurizing jig 1B includes a bottom member 2 which is an example of a pressurizing plate.
  • the bottom member 2 is provided with a plurality of through holes 22 and grooves 25.
  • the through hole 22 and the groove 25 function as a degassing portion.
  • an intermediate member (an example of a pressurizing plate) may be provided between the compression spring 7B and the laminate B or the upper BN setter 5.
  • the bottom member 2 and the middle member may be provided with various degassing portions as in the case of the pressurizing jig 1A.
  • the laminated body B since the laminated body B is pressed and held, the laminated body B can be stably held, and further, the laminated body B and the middle member 3 are laminated.
  • a structure (for example, through holes 22, 32, grooves 25, 34, gap 35) that functions as a degassing portion is provided on the facing surfaces 2a and 3a facing the body B, and the gas generated in the laminated body B is generated. It is no longer completely shielded by the bottom member 2 or the middle member 3, and is efficiently discharged by the degassing portion.
  • the pressurizing jig 1A a structure that functions as a degassing portion is provided on both the facing surface 2a of the bottom member 2 and the facing surface 3a of the middle member 3. Therefore, the gas generated in the laminated body B is not completely shielded by the bottom member 2 and the middle member 3, and is efficiently discharged by the degassing portions provided in each of the bottom member 2 and the middle member 3.
  • the gas generated in the laminated body B can be efficiently discharged. Further, since at least a part of the grooves 25 and 34 functioning as the degassing portion communicates to the outer edges 3c of the facing surfaces 2a and 3a, the gas generated in the laminated body B passes through the grooves 25 and 34 and passes through the facing surfaces 3a. It reaches the outer edge 3c and is efficiently discharged to the outside. Further, since the groove 25 communicates with the through hole 22, the gas generated in the laminated body B reaches the through hole 22 through the groove 25, passes through the through hole 22, and is efficiently discharged to the outside. NS.
  • the groove 25 related to the pressurizing jig 1A has a lattice shape in which a plurality of vertical groove portions 23 and a plurality of horizontal groove portions 24 intersect in a plan view, and the through hole 22 is a vertical groove portion 23 and a horizontal groove portion 24. It is provided at the intersection.
  • the through hole 22 is provided at the intersection of the vertical groove portion 23 and the horizontal groove portion 24, both the gas passing through the vertical groove portion 23 and the gas passing through the horizontal groove portion 24 can be efficiently discharged.
  • the area of the land portion 2d is smaller than the area of the groove 25 in a plan view.
  • the area of the groove 25 is larger than the area of the land portion 2d, so that the gas generated in the laminated body B is more easily discharged.
  • the pressurizing jig 1A includes a middle member 3 as a holding portion, a plurality of coil springs 7A as a pressurizing structure 6A, an upper member 8A (movable portion), and a support portion 9B.
  • a middle member 3 since the middle member 3 is arranged on the laminated body B, it becomes easy to pressurize the laminated body B from a wide range.
  • the plurality of coil springs 7A arranged on the middle member 3 can be collectively pressurized by the upper member 8A, the workability is improved, and the pressing force applied from the middle member 3 to the laminated body B is also uniform. It is easy to form, which is advantageous in stably holding the laminated body B in a pressurized state.
  • the middle member 3 (an example of the upper pressurizing plate) is provided with a protruding portion 33
  • the bottom member 2 an example of the lower pressurizing plate
  • the gas generated in the laminated body B is efficiently discharged from the gap 35 formed by the protruding portion 33 of the middle member 3, and further efficiently discharged from the through hole 22 and the groove 25 of the bottom member 2.
  • the pressurizing jig 1B is provided with a plurality of compression springs 7B as holding portions, and the bottom member 2 is provided with a facing surface 3a provided with a through hole 32 and a groove 25 (gas venting portion). Further, the pressurizing jig 1B includes a movable plate 8B and a support portion 9B as a pressurizing structure 6B. The movable plate 8B that compresses the compression spring 7B is held at a predetermined position by the support portion 9B, and the laminated body B can be stably held in a pressurized state.
  • the pressurizing plate according to each of the following Examples and Comparative Examples is applied as a bottom member and a middle member of a pressurizing jig, and the laminate is introduced into a degreasing furnace while being pressurized and held by the pressurizing jig to perform a degreasing step.
  • the laminated body was formed by stacking 30 green sheets, and further, the laminated body was used by stacking two layers vertically.
  • the temperature inside the degreasing furnace was raised to about 500 ° C. in a vacuum atmosphere, and then the temperature was maintained for about 6 hours while supplying 200 L / min of dry air to remove carbon.
  • Example 1 Corresponding to the first embodiment described above, a plurality of through holes and grid-like grooves were formed in the bottom member as a degassing portion.
  • the through hole was provided at the intersection of the vertical groove portion and the horizontal groove portion.
  • the diameter of the through hole was 15 mm, and the width of the groove was 15 mm.
  • the middle member is also provided with a degassing portion substantially similar to the bottom member.
  • the contact rate between the bottom member and the laminated body was 32%, and the contact rate between the middle member and the laminated body was 28%.
  • Example 2 A plurality of grooves (horizontal groove portions) were formed on the bottom member as a degassing portion.
  • a plurality of grooves are provided so as to be parallel to the long side of the rectangular bottom member and arranged at equal intervals in the direction along the short side.
  • the width of the groove was 10 mm.
  • the middle member is also provided with a degassing portion substantially similar to the bottom member.
  • the contact rate between the bottom member and the laminated body was 56%, and the contact rate between the middle member and the laminated body was 43%.
  • Example 3 A plurality of through holes were formed in the bottom member as a degassing portion.
  • the diameter of the through hole is 10 mm, and the middle member is also provided with a degassing portion substantially similar to the bottom member.
  • the contact rate between the bottom member and the laminated body was 66%, and the contact rate between the middle member and the laminated body was 61%.
  • Example 4 A plurality of through holes were formed in the bottom member as a degassing portion.
  • the diameter of the through hole is 15 mm, and the middle member is also provided with a degassing portion substantially similar to the bottom member.
  • the contact rate between the bottom member and the laminated body was 75%, and the contact rate between the middle member and the laminated body was 70%.
  • the amount of carbon remaining in the laminate was measured when Examples 1 to 4 and Comparative Example 1 were used.
  • the smaller the contact rate the larger the area of the degassing portion.
  • the amount of carbon in each of Examples 1 to 4 is smaller than the amount of carbon in Comparative Example 1. rice field. Specifically, the amount of residual carbon when Example 1 was used was 41% less than the amount of residual carbon when Comparative Example 1 was used, and the amount of residual carbon when Example 2 was used was comparative.
  • the amount of residual carbon when Example 1 was used was 21% less than the amount of residual carbon, and the amount of residual carbon when Example 3 was used was 17% less than the amount of residual carbon when Comparative Example 1 was used.
  • the amount of residual carbon when No. 4 was used was 13% less than the amount of residual carbon when Comparative Example 1 was used.
  • the pressurizing plate and the pressurizing device have been described above based on the respective embodiments and examples, the present disclosure is not limited to these embodiments and the like, and the configuration according to each embodiment is appropriately configured. May be combined with.
  • the bottom member may be provided with a degassing portion only on the middle member without providing a degassing portion.
  • the pressurizing structure is not limited to the above correspondence.
  • a leaf spring may be used as a compression spring instead of the coil spring, and in the second embodiment, the leaf spring may be used.
  • a coil spring may be used as the compression spring.
  • the structure of the support portion is not limited to each of the above-mentioned forms, and the form of the movable portion and the like is not limited to each of the above-mentioned forms.
  • the object is not limited to the laminated body of the green sheet, and may be another object or the like.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
PCT/JP2021/011718 2020-03-30 2021-03-22 加圧用プレート及び加圧装置 WO2021200338A1 (ja)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6335000U (enrdf_load_stackoverflow) * 1986-08-25 1988-03-07
JPH03103363A (ja) * 1989-09-14 1991-04-30 Showa Denko Kk セラミックス成形体の焼結方法および焼結用治具
JP2003095755A (ja) * 2001-09-20 2003-04-03 Sumitomo Metal Electronics Devices Inc 低温焼成セラミック回路基板の製造方法
JP2013075798A (ja) * 2011-09-30 2013-04-25 Nippon Shokubai Co Ltd セラミックシートの製造方法
JP2019158201A (ja) * 2018-03-09 2019-09-19 東京窯業株式会社 焼成治具

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02191194A (ja) * 1989-01-18 1990-07-27 Kirin Brewery Co Ltd 容器内液回収装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6335000U (enrdf_load_stackoverflow) * 1986-08-25 1988-03-07
JPH03103363A (ja) * 1989-09-14 1991-04-30 Showa Denko Kk セラミックス成形体の焼結方法および焼結用治具
JP2003095755A (ja) * 2001-09-20 2003-04-03 Sumitomo Metal Electronics Devices Inc 低温焼成セラミック回路基板の製造方法
JP2013075798A (ja) * 2011-09-30 2013-04-25 Nippon Shokubai Co Ltd セラミックシートの製造方法
JP2019158201A (ja) * 2018-03-09 2019-09-19 東京窯業株式会社 焼成治具

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