WO2021182033A1 - Dispositif de mesure, programme et procédé de mesure - Google Patents

Dispositif de mesure, programme et procédé de mesure Download PDF

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Publication number
WO2021182033A1
WO2021182033A1 PCT/JP2021/005748 JP2021005748W WO2021182033A1 WO 2021182033 A1 WO2021182033 A1 WO 2021182033A1 JP 2021005748 W JP2021005748 W JP 2021005748W WO 2021182033 A1 WO2021182033 A1 WO 2021182033A1
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WIPO (PCT)
Prior art keywords
light
measurement
mirror
light source
unit
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PCT/JP2021/005748
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English (en)
Japanese (ja)
Inventor
洋介 村木
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株式会社Ｘｔｉａ
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Priority to JP2022505865A priority Critical patent/JPWO2021182033A1/ja
Publication of WO2021182033A1 publication Critical patent/WO2021182033A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Definitions

  • the present invention relates to a measuring device, a program, and a measuring method.
  • An optical measuring device is used to measure the inner diameter of the object to be measured having an opening in a non-contact manner.
  • Patent Document 1 in order to measure the inner diameter of an opening in a non-contact manner, a large number of measurement points are measured by the measurement head while changing the measurement head so as to straddle the direction orthogonal to the axis orthogonal to the rotation axis without a positioning guide. Is disclosed as one data group, and an apparatus for measuring the inner diameter based on the minimum value of each data group is disclosed.
  • the present invention has been made in view of such circumstances, and an object of the present invention is to provide a measuring device capable of measuring an object to be measured with higher accuracy.
  • a measuring device includes a first light source, a mirror, a light detecting unit, a displacement detecting unit, and a measuring unit.
  • the first light source is configured to output measurement light.
  • the mirror is configured to rotate about an axis of rotation towards the first light source.
  • the measurement light is reflected so as to face a desired direction, and the measurement surface is continuously irradiated with the measurement light.
  • the photodetector is configured to detect the specular reflection component of the light reflected on the measurement surface of the measurement light.
  • the displacement detection unit is configured to detect the displacement between the mirror and the rotation axis that occurs during rotation.
  • the measuring unit is configured to continuously calculate the distance between the mirror and one point on the measuring surface based on the specular reflection component and the displacement, thereby measuring the shape of the measuring surface.
  • the object to be measured can be measured with high accuracy.
  • FIG. It is an overall block diagram of the measuring apparatus 1.
  • FIG. It is a figure of the arranged mirror 4. It is a figure which shows the state which the shaft 5 is bent during measurement. It is a schematic diagram which shows the optical path of the measurement light and the reference light. It is a block diagram which shows the hardware composition of the measuring apparatus 1.
  • FIG. It is a block diagram which shows the hardware structure of an information processing apparatus 3. It is a functional block diagram which shows the function which the control part 33 in an information processing apparatus 3 has. It is a figure which looked at the reference light when the shaft 5 was not rotated from the upper surface and the side surface of the shaft 5. It is a figure which looked at the reference light at the time of rotation of a shaft 5 from the upper surface and the side surface of a shaft 5.
  • Each image data of the reference light reflected by the mirror 4 is shown. It is a figure which showed an example which irradiates the upper surface 41 of the mirror 4 with the measurement light from the 1st light source 21 which concerns on embodiment, and measures the length L. It is an activity diagram of the method of calculating the deflection angle ⁇ of the shaft 5 which concerns on embodiment. It is an activity diagram of the measurement method of the distance to the measurement surface 7 which concerns on embodiment.
  • FIG. 1 is an overall configuration diagram of the measuring device 1.
  • the measuring device 1 includes a measuring unit 2, a mirror 4, a shaft 5, and a bearing 6.
  • the measuring device 1 three-dimensionally measures the measuring surface 7 along the central axis of the object to be measured in a non-contact manner.
  • the information processing device 3 is electrically connected to the measurement unit 2 so that the detection signals of the photodetector 23 and the reference light detection unit 24 can be input. Each component will be described in more detail below.
  • the measurement unit 2 includes a first light source 21, a second light source 22, a light detection unit 23, a reference light detection unit 24, a first beam splitter B1, and a second beam splitter B2.
  • the first light source 21 is configured to output the measurement light.
  • the first light source 21 is configured to irradiate the slope 42 of the mirror 4, which will be described later, with the measurement light along the direction of the rotation axis.
  • the optical axis of the measurement light output from the first light source 21 coincides with the central axis of the object to be measured.
  • the measurement light is, for example, laser light, and more preferably, the first light source 21 is an optical comb light source.
  • the second light source 22 irradiates the upper surface 41 of the mirror 4 with reference light along the direction of the rotation axis of the shaft 5.
  • the optical axis of the reference light output by the second light source 22 is separated by a distance ⁇ from the optical axis of the measurement light output by the first light source 21.
  • the light detection unit 23 includes a reference light detection unit 23a and a measurement light detection unit 23b.
  • the reference light detection unit 23a detects a part of the measurement light reflected by the reference light beam splitter B1a and extracts the reference signal data.
  • the photodetector is configured to detect a component of the measurement light reflected on the measurement surface 7 that is mirror-reflected by the mirror 4. That is, the measurement light detection unit 23b detects the specularly reflected measurement light and extracts the measurement signal data.
  • the reference light detection unit 24 detects the reference light that the reference light output by the second light source 22 is reflected by the upper surface 41 of the mirror 4.
  • the reference light is preferably visible light, but may be infrared light or ultraviolet light. That is, the reference light detection unit 24 detects the first reference reflected light G1 and the second reference reflected light G2, which will be described later.
  • the reference light detection unit 24 is, for example, an optical image sensor, and may be a CCD (Charge Couple Devices) image sensor or a CMOS (Completion Metal Semiconductor) image sensor.
  • the first beam splitter B1 has a reference light beam splitter B1a and a measurement light beam splitter B1b. Both of these are arranged in the measuring unit 2.
  • the reference light beam splitter B1a reflects a part of the light emitted from the first light source 21 toward the reference light detection unit 23a.
  • the measurement light beam splitter B1b transmits the remaining light as the measurement light, and reflects the measurement light that has entered from the reflection path toward the measurement light detection unit 23b.
  • the second beam splitter B2 is arranged in the measuring unit 2.
  • the second beam splitter B2 reflects the reference light output from the second light source 22, and transmits the reference light entering from the reflection path toward the reference light detection unit 24.
  • FIG. 2 is a view of the arranged mirror 4. As shown in FIG. 2, the mirror 4 is installed on the lower surface 51 inside the shaft 5.
  • the mirror 4 includes an upper surface 41 orthogonal to the rotation axis and a slope 42 inclined with respect to the upper surface 41.
  • the upper surface 41 reflects the reference light output from the second light source 22 perpendicularly to the lower surface 51 inside the shaft 5. That is, the upper surface 41 is provided horizontally with respect to the installation surface of the mirror 4.
  • the slope 42 reflects the measurement light substantially at right angles to the optical axis. According to such a configuration, the measurement surface 7 of the object to be measured can be continuously irradiated with the measurement light while the shaft 5 is rotating.
  • FIG. 3 is a diagram showing a state in which the shaft 5 is bent during measurement. Since the shaft 5 has the mirror 4 on the lower surface 51, the center of gravity of the shaft 5 deviates from the central axis of the shaft 5. That is, eccentricity occurs because the center of gravity and the rigid center are separated. Due to this eccentricity, centrifugal force is generated during rotation, and deflection occurs in the direction perpendicular to the rotation axis.
  • the deflection angle ⁇ is an angle formed by the tangent line of the flexed shaft 5 and the central axis of the shaft 5.
  • the tangent line of the flexed shaft 5 may be regarded as the same as the central axis of the shaft 5.
  • FIG. 4 is a schematic diagram showing the optical paths of the measurement light and the reference light.
  • FIG. 4A shows a case where there is no deflection angle ⁇
  • FIG. 4B shows a case where there is a deflection angle ⁇ .
  • the measurement light is reflected by the mirror 4 so as to be perpendicular to the central axis of the shaft 5, and travels toward the measurement surface 7.
  • the measurement light is reflected by the measurement surface 7 and travels in the opposite direction to the photodetector 23 in the incident path.
  • the reference light is reflected by the upper surface 41 of the mirror 4 and travels in the opposite direction to the reference light detection unit 24.
  • the shaft 5 rotates during measurement, a deflection angle ⁇ is generated. Since the measuring unit 2 is fixed, the optical axis coincides with the central axis of the object to be measured, but the central axis of the shaft 5 is deviated by a deflection angle ⁇ . As a result, the lower surface 51 of the shaft 5 is displaced in the horizontal direction by ⁇ from the lower surface 51 when not rotating. Ideally, the measurement light is reflected by the mirror 4 so as to be perpendicular to the optical axis and travels toward the measurement surface 7. However, when the deflection angle ⁇ is generated during the measurement, the measurement light travels in the direction in which the posture of the mirror 4 deviates from the deflection angle ⁇ . Therefore, a measurement error occurs, and it is necessary to correct the measurement distance. This will be described in detail in the displacement detection unit 332 described later.
  • the lower surface 51 is configured to be perpendicular to the axis of the shaft 5 so that the mirror 4 maintains a horizontal posture when the shaft 5 is not rotated. Further, since the mirror 4 and the lower surface 51 are joined, the mirror 4 is prevented from moving in the horizontal direction with respect to the lower surface 51 during the rotation of the shaft 5.
  • bearing 6 rotatably supports the shaft 5 with respect to the measuring unit 2.
  • one bearing 6 is shown as a cantilever at one end of the shaft 5, but a plurality of bearings 6 may be arranged. Since the load is applied in the direction perpendicular to the shaft of the shaft 5, the bearing 6 is a radial bearing and may be either a rolling bearing or a slide bearing.
  • the measurement surface 7 is an inner surface of an object to be measured having a circular opening.
  • the inner surface is a cylinder.
  • the optical axis of the first light source 21 and the central axis of the object to be measured coincide with each other before the start of measurement.
  • the measuring device 1 three-dimensionally measures the distance from the central axis of the object to be measured to the measuring surface 7.
  • FIG. 5 is a block diagram showing a hardware configuration of the measuring device 1.
  • the information processing device 3 is a component of the measuring device 1.
  • FIG. 6 is a block diagram showing a hardware configuration of the information processing device 3.
  • FIG. 7 is a functional block diagram showing a function carried out by the control unit 33 in the information processing device 3.
  • the information processing device 3 has a communication unit 31, a storage unit 32, and a control unit 33 (acquisition unit 331, displacement detection unit 332, measurement unit 333, result storage unit 334, and display control unit 335).
  • the components are electrically connected inside the information processing device 3 via the communication bus 30.
  • each component will be further described.
  • the communication unit 31 performs wireless LAN network communication, mobile communication such as LTE / 3G, Bluetooth (registered trademark) communication, and the like as necessary. May be included. That is, it is more preferable to carry out as a set of these plurality of communication means.
  • the first light source 21, the second light source 22, the light detection unit 23, and the reference light detection unit 24 are configured to be communicable according to a predetermined communication standard.
  • the communication unit 31 is configured to receive the data detected by the light detection unit 23 and the reference light detection unit 24. Further, the communication unit 31 is configured to be able to transmit information for the first light source 21 and the second light source 22 to output light. With such a configuration, the measuring device 1 can control the distance from the central axis of the object to be measured to the measuring surface 7 in three dimensions.
  • the storage unit 32 stores various information defined by the above description. This is, for example, as a storage device such as a solid state drive (SSD), or a random access memory (Random Access Memory:) that stores temporarily necessary information (arguments, arrays, etc.) related to program operations. It can be implemented as a memory such as RAM). Moreover, these combinations may be used.
  • the storage unit 32 stores the data detected by the light detection unit 23 and the reference light detection unit 24. Further, the storage unit 32 stores the acquisition program, the displacement detection program, the measurement program, the result storage program, and the display control program. In addition to this, the storage unit 32 stores various programs related to the information processing device 3 executed by the control unit 33.
  • Control unit 33 The control unit 33 processes and controls the entire operation related to the information processing device 3.
  • the control unit 33 is, for example, a central processing unit (CPU) (not shown).
  • the control unit 33 realizes various functions related to the information processing device 3 by reading a predetermined program stored in the storage unit 32. Specifically, the acquisition function, the displacement detection function, the measurement function, the result storage function, and the display control function are applicable. That is, the information processing by the software (stored in the storage unit 32) is concretely realized by the hardware (control unit 33), so that the acquisition unit 331, the displacement detection unit 332, the measurement unit 333, and the result storage unit are realized. It can be executed as 334 and display control unit 335. Although it is described as a single control unit 33 in FIG.
  • control unit 33 it is not actually limited to this, and it may be implemented so as to have a plurality of control units 33 for each function. Moreover, it may be a combination thereof.
  • the acquisition unit 331, the displacement detection unit 332, the measurement unit 333, the result storage unit 334, and the display control unit 335 will be described in more detail.
  • the acquisition unit 331 In the acquisition unit 331, information processing by software (stored in the storage unit 32) is specifically realized by hardware (control unit 33).
  • the acquisition unit 331 is configured to acquire the data detected by the light detection unit 23 and the reference light detection unit 24 via the communication unit 31.
  • the displacement detection unit 332 is configured to detect the displacement between the mirror 4 and the rotation shaft that occurs when the shaft 5 rotates. Specifically, the displacement detection unit 332 is configured to calculate the displacement based on the first reference reflected light G1 and the second reference reflected light G2. That is, the displacement detection unit 332 detects the amount of deflection during rotation of the shaft 5 based on the reference signal data and the measurement signal data acquired by the acquisition unit 331. In other words, the deflection angle ⁇ is calculated using the L (the sum of the length of the shaft 5 and the distance from the shaft 5 to the reference light detection unit 24 (see FIG. 3)) and the amount of deflection stored in the storage unit 32. do.
  • L the sum of the length of the shaft 5 and the distance from the shaft 5 to the reference light detection unit 24 (see FIG. 3)
  • the first reference reflected light G1 is the one in which the reference light is reflected by the mirror 4 in the state where there is no displacement. Since the upper surface 41 of the mirror 4 is perpendicular to the rotation axis, the reference light is reflected in the same path as the incident path. Therefore, the reference light detection unit 24 detects the reflected first reference reflected light G1 at the incident position.
  • FIG. 9 is a view of the reference light during rotation of the shaft 5 as viewed from the upper surface and the side surface of the shaft 5.
  • the central axis of the shaft 5 deviates from the central axis of the object to be measured and the optical axis of the measurement light by the deflection angle ⁇ . Therefore, the upper surface 41 of the mirror 4 is also displaced by the deflection angle ⁇ . Therefore, the reference light is also reflected by a path different from the incident path by ⁇ .
  • the second reference reflected light G2 is the one in which the reference light is reflected by the mirror 4 in a state where there is a displacement. Therefore, the reference light detection unit 24 detects the reflected second reference reflected light G2 at a position deviated from the first reference reflected light G1.
  • FIG. 10 shows each image data of the reference light reflected by the mirror 4.
  • FIG. 10A is image data of the first reference reflected light G1.
  • FIG. 10B is image data of the second reference reflected light G2.
  • the reference light detection unit 24 detects the first reference reflected light G1 at the same position as the reflection position.
  • the mirror 4 tilts by the bending angle ⁇ . Therefore, the reference light detection unit 24 detects the second reference reflected light G2 at a position deviated from the first reference reflected light G1 by the amount of deflection.
  • the reference light detection unit 24 detects only the locus of the reference light reflected by the upper surface 41 of the mirror 4.
  • the second reference reflected light G2 draws a locus around the first reference reflected light G1 within an angle of ⁇ a.
  • the locus is the radius of r from the center of the first reference reflected light G1.
  • ⁇ a is determined by the shape of the mirror 4, the mounting position, and the distance from the optical axis of the measurement light.
  • the displacement detection unit 332 calculates the radius r of the locus which is the displacement based on the first reference reflected light G1 and the second reference reflected light G2, the length L (the length of the shaft 5 and the reference light detection from the shaft 5).
  • the deflection angle ⁇ can be calculated from the relationship between the distance to the portion 24 and the sum (see FIG. 3).
  • the reference light detection unit 24 is a CCD camera
  • the distance per pixel is stored in the storage unit 32 in advance when calculating r.
  • the displacement detection unit 332 calculates r from the number of pixels from the center of the first reference reflected light G1 to the locus of the second reference reflected light G2 and the distance per pixel.
  • the deflection angle ⁇ can be obtained by the following equation. If this radius r is regarded as the amount of deflection of the shaft 5, the following equation 1 is obtained.
  • the deflection angle ⁇ is stored in the storage unit 32 after calculation.
  • the measurement unit 333 continuously calculates the distance between the mirror 4 and one point on the measurement surface 7 based on the measurement light reflected from the slope 42 of the mirror 4 and the displacement obtained from the deflection angle ⁇ , and measures the distance accordingly. It is configured to measure the shape of the surface 7. That is, the measuring unit 333 measures from the center of the object to be measured based on the deflection angle ⁇ calculated from the data detected by the reference light detecting unit 24 and the distance from the first light source 21 to the slope 42 of the mirror 4. Calculate the true distance R to surface 7.
  • the measuring unit 333 measures the true distance R by correcting the distance R'to the measuring surface 7 measured by the photodetecting unit 23 by using the deflection angle ⁇ .
  • the measurement light As shown in FIGS. 3 and 4B, when the mirror 4 is tilted by ⁇ due to the deflection of the shaft 5, the measurement light also shifts by ⁇ and advances to the measurement surface 7. A part of the scattered light reflected by the measurement surface 7 travels to the photodetector 23 along the same path as the incident path. Therefore, the relationship between the true distance R and the distance R'when having the deflection angle ⁇ is the following equation 2. Since the deflection angle ⁇ has already been calculated, R is calculated from this equation.
  • the measuring unit 333 irradiates the first light source 21 with light.
  • the measurement unit 333 measures the round-trip time ⁇ of the light from the reference signal data detected by the reference light detection unit 23a and the measurement signal data detected by the measurement light detection unit 23b.
  • the distance D to the measurement surface 7 of the object to be measured can be obtained as shown in Equation 3.
  • n is the average refractive index of the optical path
  • c is the speed of light in vacuum.
  • the measurement unit 333 calculates the distance R'from the central axis of the object to be measured to the measurement surface 7 excluding the distance from the first beam splitter B1 to the mirror 4 from the distance D. Further, the measuring unit 333 corrects the distance R'by Equation 2 using the deflection angle ⁇ to calculate the true distance R.
  • FIG. 11 is a diagram showing an example in which the upper surface 41 of the mirror 4 is irradiated with the measurement light from the first light source 21 according to the embodiment to measure the length L.
  • the measurement unit 2 is divided into an upper measurement unit 2a and a lower measurement unit 2b, and the central axis of the upper measurement unit 2a provided with the first light source 21 is a distance ⁇ with respect to the central axis of the shaft 5.
  • the first light source 21 is arranged on the upper surface 41.
  • the first light source 21 may be configured to be able to irradiate the upper surface 41 of the mirror 4 with the measurement light along the direction of the rotation axis.
  • the measurement unit 333 makes a point on the first light source 21 and the upper surface 41 based on the reflection component on the upper surface 41. Measure the distance continuously.
  • the length L measured directly by irradiating the measurement light from the first light source 21 to the upper surface 41 of the mirror 4 in the shaft 5 is larger than the length L calculated based on the design data of the shaft 5. High accuracy. Therefore, the measurement unit 2 can measure the shape of the measurement surface 7 with higher accuracy.
  • the distance for moving the central axis of the upper measurement unit 2a including the first light source 21 with respect to the central axis of the shaft 5 is determined. Not limited.
  • the measurement unit 2 is divided into an upper measurement unit 2a and a lower measurement unit 2b.
  • the upper measurement unit 2a includes a first light source 21, a second light source 22, a light detection unit 23, and a first beam splitter B1
  • the lower measurement unit 2b includes a bearing 6. That is, the central axis of the lower measurement unit 2b is arranged coaxially with the central axis of the shaft 5 fitted to the bearing 6.
  • a moving unit 9 is attached between the upper measurement unit 2a and the lower measurement unit 2b. As a result, the upper measurement unit 2a can be moved in a plane relative to the lower measurement unit 2b.
  • the moving portion 9 includes an upper surface moving portion 91 and a lower surface moving portion 92.
  • the upper surface moving portion 91 is configured to be movable relative to the lower surface moving portion 92.
  • the upper measurement unit 2a attached to the upper surface of the upper surface moving portion 91 can move in a plane relative to the lower measuring unit 2b attached to the lower surface of the lower surface moving portion 92.
  • the moving portion 9 may be an XY stage including a stage opening 93.
  • the XY stage is provided with a movement mechanism such as a feed screw, a rack and pinion, etc. on the X-axis and the Y-axis, whereby the upper measurement unit 2a attached to the upper surface of the XY stage is attached to the lower surface of the XY stage. It is moved in a plane relative to the lower measurement unit 2b.
  • the first light source 21 provided in the upper measurement unit 2a irradiates the upper surface 41 of the mirror 4 with the measurement light through the stage opening 93.
  • the moving unit 9 may be a feed screw individually attached to the first light source 21 and the first beam splitter B1. By moving the individual components without dividing the measurement unit 2, the first light source 21 can irradiate the upper surface 41 of the mirror 4 with the measurement light.
  • the structure is not limited as long as the first light source 21 can irradiate the upper surface 41 of the mirror 4 with the measurement light.
  • result storage unit 3334 In the result storage unit 334, information processing by software (stored in the storage unit 32) is specifically realized by hardware (control unit 33).
  • the result storage unit 334 stores data related to measurement such as the true distance R from the central axis of the object to be measured to the measurement surface 7, the deflection angle ⁇ used for correcting the measurement distance, or the rotation speed of the shaft 5. It is stored in the storage unit 32.
  • Display control unit 335 In the display control unit 335, information processing by software (stored in the storage unit 32) is specifically realized by hardware (control unit 33).
  • the display control unit 335 determines the true distance R from the central axis of the object to be measured to the measurement surface 7, the deflection angle ⁇ used to correct the measurement distance, the rotation speed of the shaft 5, etc. during or after the inspection.
  • the data related to the measurement of the above is displayed on the display device 8. Since these data display the measurement status at the production site in real time, they are useful for quickly grasping and identifying the problem of the measurement surface 7 of the object to be measured, and for quick countermeasures and the like.
  • Measurement Method Section 2 describes a measurement method using the measurement device 1 described in Section 1.
  • the measurement method includes a measurement light output step, a light detection step, a displacement detection step, and a measurement step.
  • the measurement light output step the measurement light is output from the first light source 21 and reflected by the mirror 4 so as to face a desired direction. This is continuously irradiated on the measurement surface 7.
  • the mirror 4 is configured to rotate about a rotation axis toward the first light source 21.
  • the specular reflection component of the light reflected on the measurement surface 7 of the measurement light is detected.
  • the displacement detection step the displacement between the mirror 4 and the rotation axis that occurs during rotation is detected.
  • the distance between the mirror 4 and one point on the measurement surface 7 is continuously calculated based on the specular reflection component and the displacement. As a result, the shape of the measuring surface 7 is measured. Specifically, this measurement method will be described in two parts.
  • FIG. 12 is an activity diagram of a method for calculating the deflection angle ⁇ of the shaft 5 according to the embodiment. Hereinafter, description will be given with reference to this figure.
  • the user adjusts the shaft 5 so that the reference light is applied to the upper surface 41 of the mirror 4.
  • the first light source 21 outputs the reference light toward the upper surface 41 of the mirror 4.
  • the reference light detection unit 24 detects the reflected light of the reference light. When the reference light detection unit 24 is a CCD camera, the reference light detection unit 24 captures the first reference reflected light G1 and the second reference reflected light G2 which are reflected lights.
  • the user confirms whether the shaft 5 is not rotating or is rotating.
  • the user rotates the shaft 5 when the shaft 5 is not rotated.
  • the acquisition unit 331 acquires images obtained by capturing the first reference reflected light G1 and the second reference reflected light G2.
  • the result storage unit 334 stores images obtained by capturing the first reference reflected light G1 and the second reference reflected light G2.
  • the displacement detection unit 332 obtains the number of pixels from the center point of the first reference reflected light G1 to the position of the second reference reflected light G2 in the captured image, and calculates the amount of deflection r from the number of pixels. Further, the displacement detection unit 332 determines the deflection angle ⁇ based on the length L (the sum of the length of the shaft 5 and the distance from the shaft 5 to the reference light detection unit 24 (see FIG.
  • the result storage unit 334 stores the calculated deflection angle ⁇ in the storage unit 32.
  • the information processing device 3 completes the calculation of the deflection angle ⁇ .
  • the user stops the rotation of the shaft 5.
  • the user stops the output of the second light source 22.
  • FIG. 13 is an activity diagram of a method for measuring the distance to the measurement surface 7 according to the embodiment.
  • the user activates the measuring device 1.
  • the shaft 5 rotates.
  • the rotation speed is the same as the rotation speed of the shaft 5 when the deflection angle ⁇ is calculated in advance.
  • the first light source 21 irradiates the slope 42 of the mirror 4 with the measurement light.
  • the reference light detection unit 23a detects a part of the measurement light reflected by the reference light beam splitter B1a as the reference light.
  • the measurement light detection unit 23b detects the measurement light reflected by the measurement light beam splitter B1b.
  • the first light source 21 stops the output of the measurement light.
  • the acquisition unit 331 acquires the reference signal data and the measurement signal data.
  • the measurement unit 333 reads the deflection angle ⁇ stored in the storage unit 32.
  • the measurement unit 333 calculates the round-trip time ⁇ of the measurement light from the reference signal data and the measurement signal data, and measures the distance R'from the central axis of the object to be measured to the measurement surface 7.
  • the measuring unit 333 corrects the measured distance using the deflection angle ⁇ , and calculates the true distance R.
  • the result storage unit 334 stores the measured three-dimensional data including the true distance R in the storage unit 32.
  • the information processing device 3 confirms whether the reference signal data and the measurement signal data have been input.
  • the measuring device 1 stops the rotation of the shaft 5.
  • Modification Example Section 3 describes a modification of the measuring device 1. That is, the above-described embodiment may be implemented according to the following aspects.
  • the reference light emitted from the second light source 22 may pass through the upper surface 41 and the lower surface 43 of the mirror 4 and be reflected by the lower surface 51 of the shaft 5.
  • the lower end of the shaft 5 may be a mirror surface, the second light source 22 and the reference light detection unit 24 may be arranged below the shaft 5, and the reference light may be output from the second light source 22 toward the lower end.
  • the shaft 5 does not have to be a cylinder.
  • the bottom surface may be a prism such as a triangle, a quadrangle, or a pentagon.
  • a camera may be arranged below in a direction perpendicular to the central axis of the shaft 5, the contours of the shaft 5 being stopped and rotating may be imaged, and the difference between the contours of both images may be defined as the amount of deflection r.
  • the measuring unit 333 measures the true distance R from the central axis of the object to be measured to the measurement surface 7, it may be corrected by the deflection angle ⁇ measured in advance, but the second light source 22 may be corrected in real time. It is also possible to irradiate the reference light from the source and detect and correct the deflection angle ⁇ .
  • a dichroic mirror capable of separating the reflection component and the transmission component depending on the wavelength band may be adopted.
  • the wavelength band of the measurement light output by the first light source 21 becomes the reflection component
  • the wavelength band of the reference light output by the second light source 22 becomes the transmission component.
  • the distance measurement is not limited to the above-mentioned method, and an optical modulation method, a matching method, an optical comb interference measurement method, or the like may be appropriately adopted.
  • the user may manually adjust the position of the mirror 4, but the position of the mirror 4 may be adjusted by automatically detecting the first reference reflected light G1 by the measuring device 1.
  • a program may be provided that causes a computer to execute the above-mentioned measurement method. This program may be pre-installed, may be installed after the fact, such a program may be stored in an external storage medium, or may be operated by cloud computing.
  • the mirror includes an upper surface orthogonal to the rotation axis and a slope inclined with respect to the upper surface, and the first light source measures the slope along the rotation axis direction.
  • a device that is configured to irradiate light further includes a second light source, and the second light source is configured to irradiate the upper surface with reference light along the direction of the rotation axis.
  • the first light source is configured to be able to irradiate the measuring light on the upper surface of the mirror along the direction of the rotation axis, and the measuring unit is a reflection component on the upper surface. Based on this, the distance between the first light source and one point on the upper surface is continuously measured.
  • the mirror is a dichroic mirror capable of separating a reflected component and a transmitted component by a wavelength band, the wavelength band of the measured light serves as the reflected component, a second light source is further provided, and the second light source is provided.
  • the wavelength band of the reference light output by is the transmission component.
  • the displacement detecting unit is configured to calculate the displacement based on the first reference reflected light and the second reference reflected light, and here, the first reference reflected light is in a state where there is no such displacement.
  • the reference light is reflected by the mirror, and the second reference reflected light is the reference light reflected by the mirror in a state of having the displacement.
  • the measuring device further includes a shaft, the shaft is hollow, the measurement light and the reference light are passed from one end of the shaft, and the mirror is provided on the inner lower surface thereof.
  • the reference light is visible light.
  • the first light source is an optical comb light source. It is a measurement method and includes a measurement light output step, a light detection step, a displacement detection step, and a measurement step. In the measurement light output step, measurement light is output from a first light source, and this is desired by a mirror.
  • the measurement surface is continuously irradiated with light reflected in the direction of the above, where the mirror is configured to rotate about a rotation axis toward the first light source, and in the light detection step, the measurement light is The mirror surface reflection component of the reflected light with respect to the measurement surface is detected, the displacement between the mirror and the rotation axis generated during rotation is detected in the displacement detection step, and the mirror surface reflection component is detected in the measurement step.
  • a program that causes a computer to execute the measurement method is not the case.
  • Measuring device 2 Measuring unit 2a: Upper measuring unit 2b: Lower measuring unit 21: First light source 22: Second light source 23: Light detection unit 23a: Reference light detection unit 23b: Measurement light detection unit 24: Reference light detection Unit 3: Information processing device 30: Communication bus 31: Communication unit 32: Storage unit 33: Control unit 331: Acquisition unit 332: Displacement detection unit 333: Measurement unit 334: Result storage unit 335: Display control unit 4: Mirror 41: Top surface 42: Slope 43: Bottom surface 5: Shaft 51: Bottom surface 6: Bearing 7: Measurement surface 8: Display device 9: Moving unit 91: Top surface moving unit 92: Bottom surface moving unit 93: Stage opening B1: First beam splitter B1a : Reference light beam splitter B1b: Measurement light beam splitter B2: Second beam splitter G1: First reference reflected light G2: Second reference reflected light

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

Selon un mode de réalisation, la présente invention concerne un dispositif de mesure. Le dispositif de mesure comprend une première source de lumière, un miroir, une unité de photodétection, une unité de détection de déplacement et une unité de mesure. La première source de lumière émet une lumière de mesure. Le miroir tourne autour d'un axe de rotation orienté en direction de la première source de lumière. La lumière de mesure est réfléchie de façon à être orientée dans une direction souhaitée et est émise en continu sur une surface de mesure. L'unité de photodétection détecte la composante réfléchie de manière spéculaire de la lumière de mesure qui a été réfléchie par la surface de mesure. L'unité de détection de déplacement détecte un déplacement entre le miroir et l'axe de rotation qui se produit pendant la rotation. L'unité de mesure calcule successivement des distances entre le miroir et des points uniques sur la surface de mesure sur la base de la composante réfléchie de manière spéculaire et du déplacement et mesure en conséquence la forme de la surface de mesure.
PCT/JP2021/005748 2020-03-10 2021-02-16 Dispositif de mesure, programme et procédé de mesure WO2021182033A1 (fr)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015232539A (ja) * 2014-05-12 2015-12-24 並木精密宝石株式会社 光学式内面測定装置
JP2018179918A (ja) * 2017-04-20 2018-11-15 株式会社日立製作所 形状計測システム、及び、形状計測方法
JP2020148632A (ja) * 2019-03-13 2020-09-17 株式会社Ｘｔｉａ 内径測定装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015232539A (ja) * 2014-05-12 2015-12-24 並木精密宝石株式会社 光学式内面測定装置
JP2018179918A (ja) * 2017-04-20 2018-11-15 株式会社日立製作所 形状計測システム、及び、形状計測方法
JP2020148632A (ja) * 2019-03-13 2020-09-17 株式会社Ｘｔｉａ 内径測定装置

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