WO2021143516A1 - Filtre à ondes acoustiques de volume et dispositif de traitement de signaux - Google Patents

Filtre à ondes acoustiques de volume et dispositif de traitement de signaux Download PDF

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Publication number
WO2021143516A1
WO2021143516A1 PCT/CN2020/140936 CN2020140936W WO2021143516A1 WO 2021143516 A1 WO2021143516 A1 WO 2021143516A1 CN 2020140936 W CN2020140936 W CN 2020140936W WO 2021143516 A1 WO2021143516 A1 WO 2021143516A1
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acoustic wave
bulk acoustic
parallel
wave resonator
series
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PCT/CN2020/140936
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English (en)
Chinese (zh)
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庞慰
徐利军
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诺思(天津)微系统有限责任公司
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Publication of WO2021143516A1 publication Critical patent/WO2021143516A1/fr

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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/70—Multiple-port networks for connecting several sources or loads, working on different frequencies or frequency bands, to a common load or source
    • H03H9/703—Networks using bulk acoustic wave devices
    • H03H9/706—Duplexers
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters

Definitions

  • the present invention relates to the technical field of bulk acoustic wave filters, in particular to a bulk acoustic wave filter and signal processing equipment.
  • the communication system not only has higher requirements on the performance of the filter, but also put forward higher requirements on the size of the filter, and the bulk acoustic wave filter can just meet its requirements.
  • the bulk acoustic wave filter uses the piezoelectric effect of the piezoelectric crystal to generate resonance. Because its resonance is generated by mechanical waves, instead of electromagnetic waves as the source of resonance, the wavelength of mechanical waves is much shorter than that of electromagnetic waves.
  • the volume of the bulk acoustic wave resonator and the filter composed of it is greatly reduced compared with the traditional electromagnetic filter.
  • the crystal orientation growth of the piezoelectric crystal can be well controlled at present, the loss of the resonator is extremely small, the quality factor is high, and it can cope with complex design requirements such as steep transition band and low insertion loss. Due to the small size, high roll-off, and low insertion loss of the BAW filter, the filter with this as the core has been widely used in communication systems.
  • the communication system is developing in the direction of multi-frequency band, multi-system and multi-mode, and the frequency bands used are becoming more and more dense.
  • the frequency bands used are becoming more and more dense.
  • it is bound to put forward higher requirements for the out-of-band suppression of the filter.
  • the disadvantage is that it will introduce more loss and worsen the in-band insertion loss. Therefore, how to improve the body without worsening the filter insertion loss.
  • the out-of-band suppression of acoustic wave filters is still a problem to be solved urgently.
  • the present invention provides a bulk acoustic wave filter to solve the above technical problem.
  • the purpose of the present invention is to provide a bulk acoustic wave filter and signal processing equipment to improve the out-of-band suppression of the bulk acoustic wave filter.
  • the present invention provides a bulk acoustic wave filter, including: a series branch and a plurality of parallel branches;
  • the series branch is composed of a plurality of series-connected bulk acoustic wave resonators connected in sequence;
  • One of the parallel branches is connected to a connection node between two adjacent series bulk acoustic wave resonators
  • Each parallel branch includes a first parallel bulk acoustic wave resonator, a second parallel bulk acoustic wave resonator, and a first inductor, the first parallel bulk acoustic wave resonator, the second parallel bulk acoustic wave resonator, and the first The inductors are connected in series in sequence, and the second parallel bulk acoustic wave resonator and the first inductor are simultaneously connected in parallel with at least one of the second inductors;
  • Both the first inductor and the second inductor are grounded.
  • the bulk acoustic wave filter according to the present invention may also have the following additional technical features:
  • the performance of the first parallel bulk acoustic wave resonator and the second parallel bulk acoustic wave resonator of each parallel branch are the same.
  • the areas of the first parallel bulk acoustic wave resonator and the second parallel bulk acoustic wave resonator of each parallel branch are equal.
  • both the first parallel bulk acoustic wave resonator and the second parallel bulk acoustic wave resonator are loaded with a mass load.
  • the mass loads loaded by the first parallel bulk acoustic wave resonator and the second parallel bulk acoustic wave resonator are different.
  • the performance of the first parallel bulk acoustic wave resonator and the second parallel bulk acoustic wave resonator of each parallel branch is different.
  • the areas of the first parallel bulk acoustic wave resonator and the second parallel bulk acoustic wave resonator of each parallel branch are not equal.
  • the present invention also provides a signal processing device, including: a signal input circuit, a signal output circuit, and the above-mentioned bulk acoustic wave filter; the signal input circuit is connected to the bulk acoustic wave filter, and The bulk acoustic wave filter is connected to the signal output circuit.
  • the bulk acoustic wave filter provided by the present invention splits the resonator of each parallel road into two series-connected resonators, and introduces a grounding inductor from the intermediate connection node of the two series-connected resonators , There is mutual coupling between these newly introduced inductors. Therefore, these newly introduced coupling inductors will cause the resonator to form more resonator points, and rational use of these resonance points can improve out-of-band suppression.
  • Figure 1 shows the topology of a traditional bulk acoustic wave filter
  • FIG. 2 is a topological structure of a bulk acoustic wave filter shown in Embodiment 1 of the application;
  • Fig. 3 is an equivalent circuit of the inductance circuit with mutual coupling in Fig. 1;
  • FIG. 4 is a topology structure of a bulk acoustic wave filter shown in another embodiment
  • Figure 5 shows the impedance curve of the parallel branch
  • Figure 6 is a comparison result diagram of filter simulation
  • Figure 7 is a partial enlarged view of Figure 6;
  • FIG. 8 is the topology structure of the bulk acoustic wave filter shown in the second embodiment of the application.
  • FIG. 9 is the topology structure of the bulk acoustic wave filter shown in the third embodiment of the application.
  • FIG. 1 This structure is a traditional bulk acoustic wave filter topology structure, which includes a series branch and multiple parallel branches, and the series branch is composed of a series of serial bulk acoustic wave resonators connected in sequence. Each parallel branch is composed of a parallel resonator and inductor.
  • the topological structure is a 4-3 ladder structure, mainly composed of 4 series resonators, 3 parallel resonators, and 3 inductors.
  • the series bulk acoustic wave resonator includes S11, S12, S13, and S14
  • the parallel resonator includes P11, P12, and P13
  • the inductance includes L1, L2, and L3.
  • the series resonators S11, S12, S13, and S14 are sequentially connected in series to form a series branch.
  • the two ends of the series branch are connected to nodes 1 and 2 respectively.
  • One end of the parallel resonator P11 is connected between the series resonators S11 and S12, and the other end is grounded through the inductor L1 to form the first parallel branch;
  • one end of the parallel resonator P12 is connected between the series resonators S12 and S13, and the other end is through the inductor L2 is grounded to form a second parallel branch;
  • one end of the parallel resonator P13 is connected between the series resonators S13 and S14, and the other end is grounded through an inductor L3 to form a third parallel branch.
  • the parallel resonators P11, P12, and P13 of the filter need to be loaded with a mass load so that the parallel resonance frequency is close to the series resonance frequency of the series resonators S11, S12, S13, and S14, thus forming a band pass filter, but this A classic topology, because the introduced inductance is relatively simple, the number of suppression points formed outside the filter band is small, so in some out-of-band frequency bands, the suppression is poor.
  • FIG. 2 A bulk acoustic wave filter provided in an embodiment of the present application is shown in Fig. 2.
  • each parallel resonator is split in series, and from two series bulk acoustic wave resonators
  • a grounding inductance is introduced at the node between, and there is mutual coupling between the grounding inductances introduced by the first two parallel branches.
  • the topological structure is still a 4-3 trapezoidal structure, including 1 series branch and 3 parallel branches, mainly composed of 4 series bulk acoustic resonators, 6 parallel bulk acoustic resonators, and 6 Inductance composition.
  • the series bulk acoustic wave resonator includes S11, S12, S13, S14, the first parallel bulk acoustic wave resonator includes P1a, P2a, P3a, the second parallel bulk acoustic wave resonator includes P1b, P2b, P3b, and the first inductance is L1a, L2a , L3a, the second inductance is L1b, L2b, L3b, the series bulk acoustic wave resonators S11, S12, S13, S14 are connected in series in sequence to form a series branch, and the two ends of the series branch are connected to nodes 1 and 2 respectively.
  • first parallel bulk acoustic wave resonator P1a and the second parallel bulk acoustic wave resonator P1b are connected in series, one end is connected between the series bulk acoustic wave resonators S11 and S12, and the other end is grounded through the first inductor L1a to form a first parallel branch.
  • the first parallel bulk acoustic wave resonator P1a and the second parallel bulk acoustic wave resonator P1b in the first parallel branch have exactly the same performance and the same area.
  • the second parallel bulk acoustic wave resonator P1b The node between introduces a second inductor L1b to ground.
  • the first parallel bulk acoustic wave resonator P2a and the second parallel bulk acoustic wave resonator P2b are connected in series, one end is connected between the series bulk acoustic wave resonators S12 and S13, and the other end is grounded through the first inductor L2a to form a second parallel branch.
  • the first parallel bulk acoustic wave resonator P2a and the second parallel bulk acoustic wave resonator P2b in the second parallel branch have exactly the same performance and the same area.
  • the second parallel bulk acoustic wave resonator P2b The node introduces a second inductor L2b to ground.
  • the second inductance L1b in the first parallel branch and the second inductance L2b in the second parallel branch have a mutual inductance M1.
  • first parallel bulk acoustic wave resonator P3a and the second parallel bulk acoustic wave resonator P3b are connected in series, one end is connected between the series bulk acoustic wave resonators S13 and S14, and the other end is grounded through the first inductor L3a to form a third parallel branch.
  • the first parallel bulk acoustic wave resonator P3a and the second parallel bulk acoustic wave resonator P3b in the third parallel branch have exactly the same performance and the same area.
  • the second parallel bulk acoustic wave resonator P3b The node between introduces a second inductor L3b to ground.
  • the parallel bulk acoustic wave resonators P1a, P1b, P2a, P2b, P3a, and P3b of the filter need to be loaded with a mass load, so that the parallel resonance frequency is close to the series resonance frequency of the series bulk acoustic wave resonators S11, S12, S13, and S14. This forms a band pass filter.
  • the inductance circuit with mutual coupling in this embodiment can be equivalent to a ⁇ -type circuit network as shown in Figure 3, which is equivalent to a circuit composed of a series inductor and two parallel inductors. Substituting this equivalent circuit into Figure 2, you can get the diagram 4. Comparing Figure 2 and Figure 4, it is found that the coupling between the two inductors is actually equivalent to the series bulk acoustic wave resonator S12 in parallel with a third inductor L3c. We know that the parallel inductance of a resonator will be below the frequency of the series bulk acoustic wave resonator. There is a parallel resonance point, so for the filter, it will improve the out-of-band rejection of a certain frequency band below the passband.
  • FIG. 5 shows the parallel branch.
  • the dotted line is a conventional parallel branch, that is, a resonator is connected in series with an inductance to ground
  • the solid line is the parallel branch scheme proposed in this embodiment. It can be seen from the comparison that the parallel branch in this embodiment There are two more series resonance points 11 and 13, of which 11 is below the series bulk acoustic wave resonator, and 13 is above the parallel bulk acoustic wave resonator. Therefore, the out-of-band rejection outside the passband of the filter will be further improved.
  • the embodiment of the application also provides another bulk acoustic wave filter as shown in Figure 8.
  • the topology is still a 4-3 ladder structure, including 1 series branch and 3 parallel branches, mainly composed of 4 series bulk acoustic wave resonances. It consists of 6 parallel bulk acoustic wave resonators and 6 inductors.
  • the series bulk acoustic wave resonator includes S11, S12, S13, S14, the first parallel bulk acoustic wave resonator includes P1a, P2a, P3a, the second parallel bulk acoustic wave resonator includes P1b, P2b, P3b, and the first inductance is L1a, L2a , L3a, the second inductance is L1b, L2b, L3b, the series bulk acoustic wave resonators S11, S12, S13, S14 are connected in series in sequence to form a series branch, and the two ends of the series branch are connected to nodes 1 and 2 respectively.
  • first parallel bulk acoustic wave resonator P1a and the second parallel bulk acoustic wave resonator P1b are connected in series, one end is connected between the series bulk acoustic wave resonators S11 and S12, and the other end is grounded through the first inductor L1a to form a first parallel branch.
  • the first parallel bulk acoustic wave resonator P1a and the second parallel bulk acoustic wave resonator P1b in the first parallel branch are inconsistent in performance and have different areas.
  • first parallel bulk acoustic wave resonator P1a and the second parallel bulk acoustic wave resonator P1b The node between introduces a second inductor L1b to ground.
  • first parallel bulk acoustic wave resonator P2a and the second parallel bulk acoustic wave resonator P2b are connected in series, one end is connected between the series bulk acoustic wave resonators S12 and S13, and the other end is grounded through the first inductor L2a to form a second parallel branch.
  • the first parallel bulk acoustic wave resonator P2a and the second parallel bulk acoustic wave resonator P2b in the second parallel branch are inconsistent in performance and have different areas.
  • the node introduces a second inductor L2b to ground.
  • the second inductance L1b in the first parallel branch and the second inductance L2b in the second parallel branch have a mutual inductance M1.
  • first parallel bulk acoustic wave resonator P3a and the second parallel bulk acoustic wave resonator P3b are connected in series, one end is connected between the series bulk acoustic wave resonators S13 and S14, and the other end is grounded through the first inductor L3a to form a third parallel branch.
  • the first parallel bulk acoustic wave resonator P3a and the second parallel bulk acoustic wave resonator P3b in the third parallel branch are inconsistent in performance and have different areas.
  • the parallel bulk acoustic wave resonators P1a, P1b, P2a, P2b, P3a, and P3b of the filter need to be loaded with a mass load, so that the parallel resonance frequency is close to the series resonance frequency of the series bulk acoustic wave resonators S11, S12, S13, and S14. This forms a band pass filter.
  • the main difference between the second embodiment and the first embodiment is that the performance of the parallel bulk acoustic resonator of each parallel branch does not need to be the same, and the area can be different, and the applied mass load can also be different.
  • the embodiment of the present application also provides another bulk acoustic wave filter as shown in Figure 9.
  • the topology is still a 4-3 ladder structure, including 1 series branch and 3 parallel branches, mainly composed of 4 series bulk acoustic wave resonances. It is composed of 6 parallel bulk acoustic wave resonators and 7 inductors.
  • the series bulk acoustic wave resonator includes S11, S12, S13, S14, the first parallel bulk acoustic wave resonator includes P1a, P2a, P3a, the second parallel bulk acoustic wave resonator includes P1b, P2b, P3b, and the first inductance is L1a, L2a , L3a, the second inductance is L1b, L2b, L2c, L3b, the series bulk acoustic wave resonators S11, S12, S13, S14 are connected in series to form a series branch. The two ends of the series branch are connected to nodes 1 and 2 respectively .
  • first parallel bulk acoustic wave resonator P1a and the second parallel bulk acoustic wave resonator P1b are connected in series, one end is connected between the series bulk acoustic wave resonators S11 and S12, and the other end is grounded through the first inductor L1a to form a first parallel branch.
  • the first parallel bulk acoustic wave resonator P1a and the second parallel bulk acoustic wave resonator P1b in the first parallel branch have exactly the same performance and the same area.
  • the second parallel bulk acoustic wave resonator P1b The node between introduces a second inductor L1b to ground.
  • the first parallel bulk acoustic wave resonator P2a and the second parallel bulk acoustic wave resonator P2b are connected in series, one end is connected between the series bulk acoustic wave resonators S12 and S13, and the other end is grounded through the first inductor L2a to form a second parallel branch.
  • the first parallel bulk acoustic wave resonator P2a and the second parallel bulk acoustic wave resonator P2b in the second parallel branch have exactly the same performance and the same area.
  • the second parallel bulk acoustic wave resonator P2b The node introduces a second inductor L2b to ground.
  • the second inductance L1b in the first parallel branch and the second inductance L2b in the second parallel branch have a mutual inductance M1.
  • the node between the first parallel bulk acoustic wave resonator P2a and the second parallel bulk acoustic wave resonator P2b additionally introduces a second inductor L2c to the ground.
  • the first parallel bulk acoustic wave resonator P3a and the second parallel bulk acoustic wave resonator P3b in the third parallel branch have exactly the same performance and the same area.
  • the second parallel bulk acoustic wave resonator P3b A second inductance L3b is introduced to the ground between the nodes, and there is a mutual inductance M2 between the second inductance L2c in the second parallel branch and the second inductance L3b in the third parallel branch.
  • the parallel bulk acoustic wave resonators P1a, P1b, P2a, P2b, P3a, and P3b of the filter need to be loaded with a mass load, so that the parallel resonance frequency is close to the series resonance frequency of the series bulk acoustic wave resonators S11, S12, S13, and S14. This forms a band pass filter.
  • a second inductor L2c is introduced from the node between the first parallel bulk acoustic wave resonator P2a and the second parallel bulk acoustic wave resonator P2b to the ground, and the second parallel branch There is a mutual inductance M2 between the second inductance L2c in and the second inductance L3b in the third parallel branch.
  • An embodiment of the present application also provides a signal processing device, including: a signal input circuit, a signal output circuit, and the above-mentioned bulk acoustic wave filter; the signal input circuit is connected to the bulk acoustic wave filter, and the body The acoustic wave filter is connected to the signal output circuit.

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  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

Filtre à ondes acoustiques de volume et dispositif de traitement de signaux, se rapportant au domaine des filtres. Le filtre à ondes acoustiques de volume comprend une branche en série et une pluralité de branches parallèles. La branche en série est formée par connexion séquentielle d'une pluralité de résonateurs à ondes acoustiques de volume en série (S11, S12, S13, S14) ; l'une des branches parallèles est connectée à un nœud de connexion entre deux résonateurs à ondes acoustiques de volume en série adjacents (S11, S12, S13, S14) ; chaque branche parallèle comprend un premier résonateur à ondes acoustiques de volume parallèle (P1a, P2a, P3a), un second résonateur à ondes acoustiques de volume parallèle (P1b, P2b, P3b) et une première bobine d'induction (L1a, L2a, L3a) ; les premiers résonateurs à ondes acoustiques de volume parallèles (P1a, P2a, P3a), les seconds résonateurs à ondes acoustiques de volume parallèles (P1b, P2b, P3b) et les premières bobines d'induction (L1a, L2a, L3a) sont séquentiellement connectés en série, et les seconds résonateurs à ondes acoustiques de volume parallèles (P1b, P2b, P3b) et les premières bobines d'induction (L1a, L2a, L3a) sont simultanément connectés en parallèle à au moins l'une des secondes bobines d'induction (L1b, L2b, L3b) ; un transformateur (M1) se trouve entre au moins deux des secondes bobines d'induction (L1b, L2b, L3b) qui sont adjacentes et connectées à des branches parallèles différentes ; et les premières bobines d'induction (L1a, L2a, L3a) et les secondes bobines d'induction (L1b, L2b, L3b) sont toutes mises à la terre. La suppression hors bande du filtre à ondes acoustiques de volume est améliorée.
PCT/CN2020/140936 2020-01-15 2020-12-29 Filtre à ondes acoustiques de volume et dispositif de traitement de signaux WO2021143516A1 (fr)

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CN111200418B (zh) * 2020-01-15 2021-01-08 诺思(天津)微系统有限责任公司 体声波滤波器和信号处理设备
CN111934648A (zh) * 2020-07-31 2020-11-13 上海芯波电子科技有限公司 一种基于saw-baw技术组合应用的滤波器组件
CN113676153A (zh) * 2021-08-09 2021-11-19 成都频岢微电子有限公司 一种高抑制度电路结构及高隔离度双工器、多工器
CN117097297B (zh) * 2022-11-20 2024-04-05 北京芯溪半导体科技有限公司 一种滤波器、双工器、多工器和通信设备
CN116318039A (zh) * 2023-03-13 2023-06-23 北京芯溪半导体科技有限公司 滤波器的拓扑结构、滤波器及通讯设备

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