WO2021143516A1 - Bulk acoustic wave filter and signal processing device - Google Patents
Bulk acoustic wave filter and signal processing device Download PDFInfo
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- WO2021143516A1 WO2021143516A1 PCT/CN2020/140936 CN2020140936W WO2021143516A1 WO 2021143516 A1 WO2021143516 A1 WO 2021143516A1 CN 2020140936 W CN2020140936 W CN 2020140936W WO 2021143516 A1 WO2021143516 A1 WO 2021143516A1
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/70—Multiple-port networks for connecting several sources or loads, working on different frequencies or frequency bands, to a common load or source
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
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Abstract
A bulk acoustic wave filter and a signal processing device, which relate to the field of filters. The bulk acoustic wave filter comprises one series branch and a plurality of parallel branches. The series branch is formed by sequentially connecting a plurality of series bulk acoustic wave resonators (S11, S12, S13, S14); one of the parallel branches is connected to a connection node between two adjacent series bulk acoustic wave resonators (S11, S12, S13, S14); each parallel branch comprises a first parallel bulk acoustic wave resonator (P1a, P2a, P3a), a second parallel bulk acoustic wave resonator (P1b, P2b, P3b), and a first inductor (L1a, L2a, L3a); the first parallel bulk acoustic wave resonators (P1a, P2a, P3a), the second parallel bulk acoustic wave resonators (P1b, P2b, P3b), and the first inductors (L1a, L2a, L3a) are sequentially connected in series, and the second parallel bulk acoustic wave resonators (P1b, P2b, P3b) and the first inductors (L1a, L2a, L3a) are simultaneously connected in parallel to at least one of the second inductors (L1b, L2b, L3b) ; there is a transformer (M1) between at least two of the second inductors (L1b, L2b, L3b) that are adjacent and connected to different parallel branches; and the first inductors (L1a, L2a, L3a) and the second inductors (L1b, L2b, L3b) are all grounded. Out-of-band suppression of the bulk acoustic wave filter is improved.
Description
本发明涉及体声波滤波器技术领域，尤其是涉及一种体声波滤波器和信号处理设备。The present invention relates to the technical field of bulk acoustic wave filters, in particular to a bulk acoustic wave filter and signal processing equipment.
随着移动通信技术的快速发展，许多射频器件在通信领域得到广泛应用，例如，在手机终端上会需要大量的滤波器，主要用来滤除不需要的射频信号，改善通信质量，提高用户体验。通信系统随着业务的拓展除了对滤波器性能上有较高的要求外，还对滤波器的体积尺寸提出较高的要求，而体声波滤波器刚好可以满足其要求。体声波滤波器利用压电晶体的压电效应产生谐振。由于其谐振由机械波产生，而非电磁波作为谐振来源，机械波的波长比电磁波波长短很多。因此，体声波谐振器及其组成的滤波器体积相对传统的电磁滤波器尺寸大幅度减小。另一方面，由于压电晶体的晶向生长目前能够良好控制，谐振器的损耗极小，品质因数高，能够应对陡峭过渡带和低插入损耗等复杂设计要求。由于体声波滤波器具有的尺寸小、高滚降、低插损等特性，以此为核心的滤波器在通讯系统中得到了广泛的应用。With the rapid development of mobile communication technology, many radio frequency devices are widely used in the communication field. For example, a large number of filters are required on mobile phone terminals to filter out unwanted radio frequency signals, improve communication quality, and improve user experience. . With the expansion of business, the communication system not only has higher requirements on the performance of the filter, but also put forward higher requirements on the size of the filter, and the bulk acoustic wave filter can just meet its requirements. The bulk acoustic wave filter uses the piezoelectric effect of the piezoelectric crystal to generate resonance. Because its resonance is generated by mechanical waves, instead of electromagnetic waves as the source of resonance, the wavelength of mechanical waves is much shorter than that of electromagnetic waves. Therefore, the volume of the bulk acoustic wave resonator and the filter composed of it is greatly reduced compared with the traditional electromagnetic filter. On the other hand, since the crystal orientation growth of the piezoelectric crystal can be well controlled at present, the loss of the resonator is extremely small, the quality factor is high, and it can cope with complex design requirements such as steep transition band and low insertion loss. Due to the small size, high roll-off, and low insertion loss of the BAW filter, the filter with this as the core has been widely used in communication systems.
目前通信系统向着多频段、多体制、多模式方向发展，使用的频段越来越密集，为了提高通信质量，减少各频段之间的干扰，势必对滤波器的带外抑制提出了更高的要求，通常采用增加滤波器的级数来提高带外抑制，但其带来的弊端是会引入更多的损耗，恶化带内插损，因此在不恶化滤波器插损的情况下，如何提高体声波滤波器的带外抑制仍是亟待解决的问题。At present, the communication system is developing in the direction of multi-frequency band, multi-system and multi-mode, and the frequency bands used are becoming more and more dense. In order to improve the communication quality and reduce the interference between the frequency bands, it is bound to put forward higher requirements for the out-of-band suppression of the filter. , Usually increase the number of filter stages to improve the out-of-band suppression, but the disadvantage is that it will introduce more loss and worsen the in-band insertion loss. Therefore, how to improve the body without worsening the filter insertion loss. The out-of-band suppression of acoustic wave filters is still a problem to be solved urgently.
基于此，本发明提供了一种体声波滤波器以解决上述的技术问题。Based on this, the present invention provides a bulk acoustic wave filter to solve the above technical problem.
发明内容Summary of the invention
本发明的目的在于提供一种体声波滤波器和信号处理设备，以提高体声波滤波器带外抑制。The purpose of the present invention is to provide a bulk acoustic wave filter and signal processing equipment to improve the out-of-band suppression of the bulk acoustic wave filter.
具体地，本申请是通过如下技术方案实现的：Specifically, this application is implemented through the following technical solutions:
第一方面，本发明提供了一种体声波滤波器，包括：一条串联支路和多条并联支路；In the first aspect, the present invention provides a bulk acoustic wave filter, including: a series branch and a plurality of parallel branches;
所述串联支路由若干串联体声波谐振器依次相连组成；The series branch is composed of a plurality of series-connected bulk acoustic wave resonators connected in sequence;
相邻两个所述串联体声波谐振器之间的连接节点上连接一条所述并联支路；One of the parallel branches is connected to a connection node between two adjacent series bulk acoustic wave resonators;
每条并联支路包括第一并联体声波谐振器、第二并联体声波谐振器和第一电感，所述第一并联体声波谐振器、所述第二并联体声波谐振器和所述第一电感依次串联，并且所述第二并联体声波谐振器和所述第一电感同时与至少一个所述第二电感并联；Each parallel branch includes a first parallel bulk acoustic wave resonator, a second parallel bulk acoustic wave resonator, and a first inductor, the first parallel bulk acoustic wave resonator, the second parallel bulk acoustic wave resonator, and the first The inductors are connected in series in sequence, and the second parallel bulk acoustic wave resonator and the first inductor are simultaneously connected in parallel with at least one of the second inductors;
至少两个相邻的、与不同并联支路连接的所述第二电感之间存在互感；Mutual inductance exists between at least two adjacent second inductors connected to different parallel branches;
所述第一电感和所述第二电感均接地。Both the first inductor and the second inductor are grounded.
另外，根据本发明的体声波滤波器，还可具有如下附加的技术特征：In addition, the bulk acoustic wave filter according to the present invention may also have the following additional technical features:
可选的，每条并联支路的所述第一并联体声波谐振器和所述第二并联体声波谐振器的性能相同。Optionally, the performance of the first parallel bulk acoustic wave resonator and the second parallel bulk acoustic wave resonator of each parallel branch are the same.
可选的，每条并联支路的所述第一并联体声波谐振器和所述第二并联体声波谐振器的面积相等。Optionally, the areas of the first parallel bulk acoustic wave resonator and the second parallel bulk acoustic wave resonator of each parallel branch are equal.
可选的，所述第一并联体声波谐振器和所述第二并联体声波谐振器均加载质量负载。Optionally, both the first parallel bulk acoustic wave resonator and the second parallel bulk acoustic wave resonator are loaded with a mass load.
可选的，所述第一并联体声波谐振器和所述第二并联体声波谐振器加载的质量负载不同。Optionally, the mass loads loaded by the first parallel bulk acoustic wave resonator and the second parallel bulk acoustic wave resonator are different.
可选的，每条并联支路的所述第一并联体声波谐振器和所述第二并联体声波谐振器的性能不同。Optionally, the performance of the first parallel bulk acoustic wave resonator and the second parallel bulk acoustic wave resonator of each parallel branch is different.
可选的，每条并联支路的所述第一并联体声波谐振器和所述第二并联体声波谐振器的面积不相等。Optionally, the areas of the first parallel bulk acoustic wave resonator and the second parallel bulk acoustic wave resonator of each parallel branch are not equal.
第二方面，本发明还提供了一种信号处理设备，包括：信号输入电路、信号输出电路和如上所述的体声波滤波器；所述信号输入电路与所述体声波滤波器相连接，所述体声波滤波器与所述信号输出电路相连接。In a second aspect, the present invention also provides a signal processing device, including: a signal input circuit, a signal output circuit, and the above-mentioned bulk acoustic wave filter; the signal input circuit is connected to the bulk acoustic wave filter, and The bulk acoustic wave filter is connected to the signal output circuit.
本发明提供的所述体声波滤波器，把每条并联之路的谐振器拆分成两个串联在一起的谐振器，从这两个串联在一起的谐振器中间连接节点上引入一个接地电感，这些新引入的电感之间还存在互耦。所以，这些新引入的耦合电感会使谐振器形成更多的谐振器点，合理利用这些谐振点，可以改善带外抑制。The bulk acoustic wave filter provided by the present invention splits the resonator of each parallel road into two series-connected resonators, and introduces a grounding inductor from the intermediate connection node of the two series-connected resonators , There is mutual coupling between these newly introduced inductors. Therefore, these newly introduced coupling inductors will cause the resonator to form more resonator points, and rational use of these resonance points can improve out-of-band suppression.
为了更清楚地说明本发明具体实施方式或现有技术中的技术方案，下面将对具体实施方式或现有技术描述中所需要使用的附图作简单地介绍。在附图中：In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings that need to be used in the specific embodiments or the description of the prior art. In the attached picture:
图1为传统体声波滤波器拓扑结构；Figure 1 shows the topology of a traditional bulk acoustic wave filter;
图2为本申请实施例一所示的体声波滤波器拓扑结构；FIG. 2 is a topological structure of a bulk acoustic wave filter shown in Embodiment 1 of the application;
图3为图1中具有互耦的电感电路的等效电路；Fig. 3 is an equivalent circuit of the inductance circuit with mutual coupling in Fig. 1;
图4为另一个实施例所示的体声波滤波器拓扑结构；FIG. 4 is a topology structure of a bulk acoustic wave filter shown in another embodiment;
图5为并联支路的阻抗曲线；Figure 5 shows the impedance curve of the parallel branch;
图6为滤波器仿真对比结果图；Figure 6 is a comparison result diagram of filter simulation;
图7为图6的局部放大图；Figure 7 is a partial enlarged view of Figure 6;
图8为本申请实施例二所示的体声波滤波器拓扑结构；FIG. 8 is the topology structure of the bulk acoustic wave filter shown in the second embodiment of the application;
图9为本申请实施例三所示的体声波滤波器拓扑结构。FIG. 9 is the topology structure of the bulk acoustic wave filter shown in the third embodiment of the application.
下面将参照附图更详细地描述本公开的示例性实施方式。虽然附图中显示了本公开的示例性实施方式，然而应当理解，可以以各种形式实现本公开而不应被这里阐述的实施方式所限制。相反，提供这些实施方式是为了能够更透彻地理解本公开，并且能够将本公开的范围完整的传达给本领域的技术人员。Hereinafter, exemplary embodiments of the present disclosure will be described in more detail with reference to the accompanying drawings. Although the drawings show exemplary embodiments of the present disclosure, it should be understood that the present disclosure can be implemented in various forms and should not be limited by the embodiments set forth herein. On the contrary, these embodiments are provided to enable a more thorough understanding of the present disclosure and to fully convey the scope of the present disclosure to those skilled in the art.
现有技术对比例Existing technology comparison
现有技术对比例如图1，该结构为传统体声波滤波器拓扑结构，包含一条串联支路和多条并联支路，串联支路由若干串联体声波谐振器依次相连组成。每条并联支路由一个并联谐振器和电感组成。具体到图1中，该拓扑结构为4-3梯形结构，主要由4个串联谐振器、3个并联谐振器、3个电感组成。其中串联体声波谐振器包括S11、S12、S13、S14，并联谐振器包括P11、P12、P13，电感包括L1、L2、L3。串联谐振器S11、S12、S13、S14依次串联连接，形成串联支路，该串联支路两端分别接到节点1和2上。并联谐振器P11一端接于串联谐振器S11和S12之间，另一端通过电感L1接地，形成第一并联支路；并联谐振器P12一端接于串联谐振器S12和S13之间，另一端通过电感L2接地，形成第二并联支路；并联谐振器P13一端接于串联谐振器S13和S14之间，另一端通过电感L3接地，形成第三并联支路。该滤波器的并联谐振器P11、P12、P13需要加载质量负载，使其并联谐振频率和串联谐振器S11、S12、S13、S14的串联谐振频率接近，由此形成一个带通滤波器，但这种经典的拓扑结构，由于引入的电感比较单一，在滤波器带外形成的抑制点数量较少，所以在某些带外频段，抑制较差。The prior art comparison is shown in Fig. 1. This structure is a traditional bulk acoustic wave filter topology structure, which includes a series branch and multiple parallel branches, and the series branch is composed of a series of serial bulk acoustic wave resonators connected in sequence. Each parallel branch is composed of a parallel resonator and inductor. Specifically in Figure 1, the topological structure is a 4-3 ladder structure, mainly composed of 4 series resonators, 3 parallel resonators, and 3 inductors. The series bulk acoustic wave resonator includes S11, S12, S13, and S14, the parallel resonator includes P11, P12, and P13, and the inductance includes L1, L2, and L3. The series resonators S11, S12, S13, and S14 are sequentially connected in series to form a series branch. The two ends of the series branch are connected to nodes 1 and 2 respectively. One end of the parallel resonator P11 is connected between the series resonators S11 and S12, and the other end is grounded through the inductor L1 to form the first parallel branch; one end of the parallel resonator P12 is connected between the series resonators S12 and S13, and the other end is through the inductor L2 is grounded to form a second parallel branch; one end of the parallel resonator P13 is connected between the series resonators S13 and S14, and the other end is grounded through an inductor L3 to form a third parallel branch. The parallel resonators P11, P12, and P13 of the filter need to be loaded with a mass load so that the parallel resonance frequency is close to the series resonance frequency of the series resonators S11, S12, S13, and S14, thus forming a band pass filter, but this A classic topology, because the introduced inductance is relatively simple, the number of suppression points formed outside the filter band is small, so in some out-of-band frequency bands, the suppression is poor.
本申请体声波滤波器实施例一 Embodiment 1 of the bulk acoustic wave filter of the present application
本申请实施例中提供的一种体声波滤波器，如图2，该实施例与对比例 的主要区别在于对每个并联谐振器都进行了串联拆分，并且从两个串联体声波谐振器之间的节点上引入一个接地电感，并且前两个并联支路引入的接地电感之间有互耦。具体到图2中，该拓扑结构仍为4-3梯形结构，包括1条串联支路和3条并联支路，主要由4个串联体声波谐振器、6个并联体声波谐振器、6个电感组成。其中串联体声波谐振器包括S11、S12、S13、S14，第一并联体声波谐振器包括P1a、P2a、P3a，第二并联体声波谐振器包括P1b、P2b、P3b，第一电感为L1a、L2a、L3a，第二电感为L1b、L2b、L3b，串联体声波谐振器S11、S12、S13、S14依次串联连接，形成串联支路，该串联支路两端分别接到节点1和2上。第一并联体声波谐振器P1a、第二并联体声波谐振器P1b串联连接后一端接到串联体声波谐振器S11和S12之间，另一端通过第一电感L1a接地，形成第一并联支路，第一并联支路中的第一并联体声波谐振器P1a、第二并联体声波谐振器P1b性能完全一样，面积相等，另外从第一并联体声波谐振器P1a、第二并联体声波谐振器P1b之间的节点引入一个第二电感L1b到地。第一并联体声波谐振器P2a、第二并联体声波谐振器P2b串联连接后一端接到串联体声波谐振器S12和S13之间，另一端通过第一电感L2a接地，形成第二并联支路，第二并联支路中的第一并联体声波谐振器P2a、第二并联体声波谐振器P2b性能完全一样，面积相等，另外从第一并联体声波谐振器P2a、第二并联体声波谐振器P2b的节点引入一个第二电感L2b到地。第一并联支路中的第二电感L1b和第二并联支路中的第二电感L2b存在互感M1。第一并联体声波谐振器P3a、第二并联体声波谐振器P3b串联连接后一端接到串联体声波谐振器S13和S14之间，另一端通过第一电感L3a接地，形成第三并联支路，第三并联支路中的第一并联体声波谐振器P3a、第二并联体声波谐振器P3b性能完全一样，面积相等，另外从第一并联体声波谐振器P3a、第二并联体声波谐振器P3b之间的节点引入一个第二电感L3b到地。该滤波器的并联体声波谐振器P1a、P1b、P2a、P2b、P3a、P3b需要加载质量负载，使其并联谐振频率和 串联体声波谐振器S11、S12、S13、S14的串联谐振频率接近，由此形成一个带通滤波器。该实施例中具有互耦的电感电路可以等效为一个π型电路网络如图3，等效为一个串联电感和两个并联电感组成的电路，把这个等效电路代入图2，可以得到图4，对比图2和图4发现，其实两个电感之间的耦合等效为串联体声波谐振器S12并联一个第三电感L3c,我们知道一个谐振器并联电感会在串联体声波谐振器以下频率出现一个并联谐振点，所以对滤波器而言，会改善了通带以下某个频段的带外抑制。对于本实施例中的每条并联支路，由于从两个并联体声波谐振器之间又引入了一个接地电感，所以会使并联支路出现更多的谐振器点，图5为并联支路的阻抗曲线对比图，其中虚线为常规的并联支路，即一个谐振器串接一个电感接地，实线为本实施例提出的并联支路方案，对比可以看出，本实施例中的并联支路多出了2个串联谐振点11和13，其中11在串联体声波谐振器以下，13在并联体声波谐振器以上。所以会进一步提高滤波器通带以外的带外抑制。A bulk acoustic wave filter provided in an embodiment of the present application is shown in Fig. 2. The main difference between this embodiment and the comparative example is that each parallel resonator is split in series, and from two series bulk acoustic wave resonators A grounding inductance is introduced at the node between, and there is mutual coupling between the grounding inductances introduced by the first two parallel branches. Specifically in Figure 2, the topological structure is still a 4-3 trapezoidal structure, including 1 series branch and 3 parallel branches, mainly composed of 4 series bulk acoustic resonators, 6 parallel bulk acoustic resonators, and 6 Inductance composition. The series bulk acoustic wave resonator includes S11, S12, S13, S14, the first parallel bulk acoustic wave resonator includes P1a, P2a, P3a, the second parallel bulk acoustic wave resonator includes P1b, P2b, P3b, and the first inductance is L1a, L2a , L3a, the second inductance is L1b, L2b, L3b, the series bulk acoustic wave resonators S11, S12, S13, S14 are connected in series in sequence to form a series branch, and the two ends of the series branch are connected to nodes 1 and 2 respectively. After the first parallel bulk acoustic wave resonator P1a and the second parallel bulk acoustic wave resonator P1b are connected in series, one end is connected between the series bulk acoustic wave resonators S11 and S12, and the other end is grounded through the first inductor L1a to form a first parallel branch. The first parallel bulk acoustic wave resonator P1a and the second parallel bulk acoustic wave resonator P1b in the first parallel branch have exactly the same performance and the same area. In addition, from the first parallel bulk acoustic wave resonator P1a, the second parallel bulk acoustic wave resonator P1b The node between introduces a second inductor L1b to ground. After the first parallel bulk acoustic wave resonator P2a and the second parallel bulk acoustic wave resonator P2b are connected in series, one end is connected between the series bulk acoustic wave resonators S12 and S13, and the other end is grounded through the first inductor L2a to form a second parallel branch. The first parallel bulk acoustic wave resonator P2a and the second parallel bulk acoustic wave resonator P2b in the second parallel branch have exactly the same performance and the same area. In addition, from the first parallel bulk acoustic wave resonator P2a, the second parallel bulk acoustic wave resonator P2b The node introduces a second inductor L2b to ground. The second inductance L1b in the first parallel branch and the second inductance L2b in the second parallel branch have a mutual inductance M1. After the first parallel bulk acoustic wave resonator P3a and the second parallel bulk acoustic wave resonator P3b are connected in series, one end is connected between the series bulk acoustic wave resonators S13 and S14, and the other end is grounded through the first inductor L3a to form a third parallel branch. The first parallel bulk acoustic wave resonator P3a and the second parallel bulk acoustic wave resonator P3b in the third parallel branch have exactly the same performance and the same area. In addition, from the first parallel bulk acoustic wave resonator P3a, the second parallel bulk acoustic wave resonator P3b The node between introduces a second inductor L3b to ground. The parallel bulk acoustic wave resonators P1a, P1b, P2a, P2b, P3a, and P3b of the filter need to be loaded with a mass load, so that the parallel resonance frequency is close to the series resonance frequency of the series bulk acoustic wave resonators S11, S12, S13, and S14. This forms a band pass filter. The inductance circuit with mutual coupling in this embodiment can be equivalent to a π-type circuit network as shown in Figure 3, which is equivalent to a circuit composed of a series inductor and two parallel inductors. Substituting this equivalent circuit into Figure 2, you can get the diagram 4. Comparing Figure 2 and Figure 4, it is found that the coupling between the two inductors is actually equivalent to the series bulk acoustic wave resonator S12 in parallel with a third inductor L3c. We know that the parallel inductance of a resonator will be below the frequency of the series bulk acoustic wave resonator. There is a parallel resonance point, so for the filter, it will improve the out-of-band rejection of a certain frequency band below the passband. For each parallel branch in this embodiment, since a grounding inductance is introduced between the two parallel bulk acoustic wave resonators, more resonator points will appear in the parallel branch. Figure 5 shows the parallel branch. In the impedance curve comparison diagram of, the dotted line is a conventional parallel branch, that is, a resonator is connected in series with an inductance to ground, and the solid line is the parallel branch scheme proposed in this embodiment. It can be seen from the comparison that the parallel branch in this embodiment There are two more series resonance points 11 and 13, of which 11 is below the series bulk acoustic wave resonator, and 13 is above the parallel bulk acoustic wave resonator. Therefore, the out-of-band rejection outside the passband of the filter will be further improved.
对于该实施例，我们进行了滤波器仿真对比，滤波器频率覆盖2.575GHz-2.635GHz，结果如图6和图7，图7为图6的局部放大图，虚线为对比例的结果，实线为第一实施例的结果，从仿真结果来看，在滤波器通带的左侧2.43GHz-2.535GHz频段，抑制有5-20dB的改善，在滤波器通带的右侧，带外抑制有10-20dB的改善，同时在滤波器通带内插损没有恶化。For this example, we performed a filter simulation comparison, the filter frequency covers 2.575GHz-2.635GHz, the results are shown in Figure 6 and Figure 7, Figure 7 is a partial enlarged view of Figure 6, the dotted line is the result of the comparison, the solid line For the results of the first embodiment, from the simulation results, in the 2.43GHz-2.535GHz frequency band on the left side of the filter passband, there is a 5-20dB improvement in suppression, and on the right side of the filter passband, there is an out-of-band suppression 10-20dB improvement, while the interpolation loss in the filter passband does not deteriorate.
本申请体声波滤波器实施例二 Embodiment 2 of the bulk acoustic wave filter of the present application
本申请实施例中还提供另一种体声波滤波器如图8，该拓扑结构仍为4-3梯形结构，包括1条串联支路和3条并联支路，主要由4个串联体声波谐振器、6个并联体声波谐振器、6个电感组成。其中串联体声波谐振器包括S11、S12、S13、S14，第一并联体声波谐振器包括P1a、P2a、P3a，第二并联体声波谐振器包括P1b、P2b、P3b，第一电感为L1a、L2a、L3a，第 二电感为L1b、L2b、L3b，串联体声波谐振器S11、S12、S13、S14依次串联连接，形成串联支路，该串联支路两端分别接到节点1和2上。第一并联体声波谐振器P1a、第二并联体声波谐振器P1b串联连接后一端接到串联体声波谐振器S11和S12之间，另一端通过第一电感L1a接地，形成第一并联支路，第一并联支路中的第一并联体声波谐振器P1a、第二并联体声波谐振器P1b性能不一致，面积不等，另外从第一并联体声波谐振器P1a、第二并联体声波谐振器P1b之间的节点引入一个第二电感L1b到地。第一并联体声波谐振器P2a、第二并联体声波谐振器P2b串联连接后一端接到串联体声波谐振器S12和S13之间，另一端通过第一电感L2a接地，形成第二并联支路，第二并联支路中的第一并联体声波谐振器P2a、第二并联体声波谐振器P2b性能不一致，面积不等，另外从第一并联体声波谐振器P2a、第二并联体声波谐振器P2b的节点引入一个第二电感L2b到地。第一并联支路中的第二电感L1b和第二并联支路中的第二电感L2b存在互感M1。第一并联体声波谐振器P3a、第二并联体声波谐振器P3b串联连接后一端接到串联体声波谐振器S13和S14之间，另一端通过第一电感L3a接地，形成第三并联支路，第三并联支路中的第一并联体声波谐振器P3a、第二并联体声波谐振器P3b性能不一致，面积不等，另外从第一并联体声波谐振器P3a、第二并联体声波谐振器P3b之间的节点引入一个第二电感L3b到地。该滤波器的并联体声波谐振器P1a、P1b、P2a、P2b、P3a、P3b需要加载质量负载，使其并联谐振频率和串联体声波谐振器S11、S12、S13、S14的串联谐振频率接近，由此形成一个带通滤波器。The embodiment of the application also provides another bulk acoustic wave filter as shown in Figure 8. The topology is still a 4-3 ladder structure, including 1 series branch and 3 parallel branches, mainly composed of 4 series bulk acoustic wave resonances. It consists of 6 parallel bulk acoustic wave resonators and 6 inductors. The series bulk acoustic wave resonator includes S11, S12, S13, S14, the first parallel bulk acoustic wave resonator includes P1a, P2a, P3a, the second parallel bulk acoustic wave resonator includes P1b, P2b, P3b, and the first inductance is L1a, L2a , L3a, the second inductance is L1b, L2b, L3b, the series bulk acoustic wave resonators S11, S12, S13, S14 are connected in series in sequence to form a series branch, and the two ends of the series branch are connected to nodes 1 and 2 respectively. After the first parallel bulk acoustic wave resonator P1a and the second parallel bulk acoustic wave resonator P1b are connected in series, one end is connected between the series bulk acoustic wave resonators S11 and S12, and the other end is grounded through the first inductor L1a to form a first parallel branch. The first parallel bulk acoustic wave resonator P1a and the second parallel bulk acoustic wave resonator P1b in the first parallel branch are inconsistent in performance and have different areas. In addition, from the first parallel bulk acoustic wave resonator P1a and the second parallel bulk acoustic wave resonator P1b The node between introduces a second inductor L1b to ground. After the first parallel bulk acoustic wave resonator P2a and the second parallel bulk acoustic wave resonator P2b are connected in series, one end is connected between the series bulk acoustic wave resonators S12 and S13, and the other end is grounded through the first inductor L2a to form a second parallel branch. The first parallel bulk acoustic wave resonator P2a and the second parallel bulk acoustic wave resonator P2b in the second parallel branch are inconsistent in performance and have different areas. In addition, from the first parallel bulk acoustic wave resonator P2a and the second parallel bulk acoustic wave resonator P2b The node introduces a second inductor L2b to ground. The second inductance L1b in the first parallel branch and the second inductance L2b in the second parallel branch have a mutual inductance M1. After the first parallel bulk acoustic wave resonator P3a and the second parallel bulk acoustic wave resonator P3b are connected in series, one end is connected between the series bulk acoustic wave resonators S13 and S14, and the other end is grounded through the first inductor L3a to form a third parallel branch. The first parallel bulk acoustic wave resonator P3a and the second parallel bulk acoustic wave resonator P3b in the third parallel branch are inconsistent in performance and have different areas. In addition, from the first parallel bulk acoustic wave resonator P3a and the second parallel bulk acoustic wave resonator P3b The node between introduces a second inductor L3b to ground. The parallel bulk acoustic wave resonators P1a, P1b, P2a, P2b, P3a, and P3b of the filter need to be loaded with a mass load, so that the parallel resonance frequency is close to the series resonance frequency of the series bulk acoustic wave resonators S11, S12, S13, and S14. This forms a band pass filter.
第二实施例与第一实施例主要区别在于，每条并联支路的并联体声波谐振器的性能不需要一样，可以面积不等，所加质量负载也可以不同。The main difference between the second embodiment and the first embodiment is that the performance of the parallel bulk acoustic resonator of each parallel branch does not need to be the same, and the area can be different, and the applied mass load can also be different.
本申请体声波滤波器实施例三Embodiment 3 of the bulk acoustic wave filter of the present application
本申请实施例中还提供另一种体声波滤波器如图9，该拓扑结构仍为 4-3梯形结构，包括1条串联支路和3条并联支路，主要由4个串联体声波谐振器、6个并联体声波谐振器、7个电感组成。其中串联体声波谐振器包括S11、S12、S13、S14，第一并联体声波谐振器包括P1a、P2a、P3a，第二并联体声波谐振器包括P1b、P2b、P3b，第一电感为L1a、L2a、L3a，第二电感为L1b、L2b、L2c、L3b，串联体声波谐振器S11、S12、S13、S14依次串联连接，形成串联支路，该串联支路两端分别接到节点1和2上。第一并联体声波谐振器P1a、第二并联体声波谐振器P1b串联连接后一端接到串联体声波谐振器S11和S12之间，另一端通过第一电感L1a接地，形成第一并联支路，第一并联支路中的第一并联体声波谐振器P1a、第二并联体声波谐振器P1b性能完全一样，面积相等，另外从第一并联体声波谐振器P1a、第二并联体声波谐振器P1b之间的节点引入一个第二电感L1b到地。第一并联体声波谐振器P2a、第二并联体声波谐振器P2b串联连接后一端接到串联体声波谐振器S12和S13之间，另一端通过第一电感L2a接地，形成第二并联支路，第二并联支路中的第一并联体声波谐振器P2a、第二并联体声波谐振器P2b性能完全一样，面积相等，另外从第一并联体声波谐振器P2a、第二并联体声波谐振器P2b的节点引入一个第二电感L2b到地。第一并联支路中的第二电感L1b和第二并联支路中的第二电感L2b存在互感M1。第一并联体声波谐振器P2a、第二并联体声波谐振器P2b之间的节点另外再引入一个第二电感L2c到地。第一并联体声波谐振器P3a、第二并联体声波谐振器P3b串联连接后一端接到串联体声波谐振器S13和S14之间，另一端通过第一电感L3a接地，形成第三并联支路，第三并联支路中的第一并联体声波谐振器P3a、第二并联体声波谐振器P3b性能完全一样，面积相等，另外从第一并联体声波谐振器P3a、第二并联体声波谐振器P3b之间的节点引入一个第二电感L3b到地，第二并联支路中的第二电感L2c和第三并联支路中的第二电感L3b存在互感M2。该滤波器的并联体声波谐振器P1a、P1b、P2a、P2b、P3a、P3b需要加载质量负载，使其并联谐振频率和 串联体声波谐振器S11、S12、S13、S14的串联谐振频率接近，由此形成一个带通滤波器。The embodiment of the present application also provides another bulk acoustic wave filter as shown in Figure 9. The topology is still a 4-3 ladder structure, including 1 series branch and 3 parallel branches, mainly composed of 4 series bulk acoustic wave resonances. It is composed of 6 parallel bulk acoustic wave resonators and 7 inductors. The series bulk acoustic wave resonator includes S11, S12, S13, S14, the first parallel bulk acoustic wave resonator includes P1a, P2a, P3a, the second parallel bulk acoustic wave resonator includes P1b, P2b, P3b, and the first inductance is L1a, L2a , L3a, the second inductance is L1b, L2b, L2c, L3b, the series bulk acoustic wave resonators S11, S12, S13, S14 are connected in series to form a series branch. The two ends of the series branch are connected to nodes 1 and 2 respectively . After the first parallel bulk acoustic wave resonator P1a and the second parallel bulk acoustic wave resonator P1b are connected in series, one end is connected between the series bulk acoustic wave resonators S11 and S12, and the other end is grounded through the first inductor L1a to form a first parallel branch. The first parallel bulk acoustic wave resonator P1a and the second parallel bulk acoustic wave resonator P1b in the first parallel branch have exactly the same performance and the same area. In addition, from the first parallel bulk acoustic wave resonator P1a, the second parallel bulk acoustic wave resonator P1b The node between introduces a second inductor L1b to ground. After the first parallel bulk acoustic wave resonator P2a and the second parallel bulk acoustic wave resonator P2b are connected in series, one end is connected between the series bulk acoustic wave resonators S12 and S13, and the other end is grounded through the first inductor L2a to form a second parallel branch. The first parallel bulk acoustic wave resonator P2a and the second parallel bulk acoustic wave resonator P2b in the second parallel branch have exactly the same performance and the same area. In addition, from the first parallel bulk acoustic wave resonator P2a, the second parallel bulk acoustic wave resonator P2b The node introduces a second inductor L2b to ground. The second inductance L1b in the first parallel branch and the second inductance L2b in the second parallel branch have a mutual inductance M1. The node between the first parallel bulk acoustic wave resonator P2a and the second parallel bulk acoustic wave resonator P2b additionally introduces a second inductor L2c to the ground. After the first parallel bulk acoustic wave resonator P3a and the second parallel bulk acoustic wave resonator P3b are connected in series, one end is connected between the series bulk acoustic wave resonators S13 and S14, and the other end is grounded through the first inductor L3a to form a third parallel branch. The first parallel bulk acoustic wave resonator P3a and the second parallel bulk acoustic wave resonator P3b in the third parallel branch have exactly the same performance and the same area. In addition, from the first parallel bulk acoustic wave resonator P3a, the second parallel bulk acoustic wave resonator P3b A second inductance L3b is introduced to the ground between the nodes, and there is a mutual inductance M2 between the second inductance L2c in the second parallel branch and the second inductance L3b in the third parallel branch. The parallel bulk acoustic wave resonators P1a, P1b, P2a, P2b, P3a, and P3b of the filter need to be loaded with a mass load, so that the parallel resonance frequency is close to the series resonance frequency of the series bulk acoustic wave resonators S11, S12, S13, and S14. This forms a band pass filter.
该实施例与第一实施例的主要区别是从第一并联体声波谐振器P2a、第二并联体声波谐振器P2b之间的节点另外再引入一个第二电感L2c到地，第二并联支路中的第二电感L2c和第三并联支路中的第二电感L3b存在互感M2。The main difference between this embodiment and the first embodiment is that a second inductor L2c is introduced from the node between the first parallel bulk acoustic wave resonator P2a and the second parallel bulk acoustic wave resonator P2b to the ground, and the second parallel branch There is a mutual inductance M2 between the second inductance L2c in and the second inductance L3b in the third parallel branch.
信号处理设备实施例Signal processing device embodiment
本申请实施例中还提供一种信号处理设备，包括：信号输入电路、信号输出电路和如上所述的体声波滤波器；所述信号输入电路与所述体声波滤波器相连接，所述体声波滤波器与所述信号输出电路相连接。An embodiment of the present application also provides a signal processing device, including: a signal input circuit, a signal output circuit, and the above-mentioned bulk acoustic wave filter; the signal input circuit is connected to the bulk acoustic wave filter, and the body The acoustic wave filter is connected to the signal output circuit.
应当理解，虽然本说明书按照实施方式加以描述，但并非每个实施方式仅包含一个独立的技术方案，说明书的这种叙述方式仅仅是为清楚起见，本领域技术人员应当将说明书作为一个整体，各实施例中的技术方案也可以经适当组合，形成本领域技术人员可以理解的其他实施方式。It should be understood that although this specification is described in accordance with the implementation manners, not each implementation manner only includes an independent technical solution. This narration in the specification is only for the sake of clarity, and those skilled in the art should regard the specification as a whole. The technical solutions in the embodiments can also be appropriately combined to form other implementations that can be understood by those skilled in the art.
Claims (8)
- 一种体声波滤波器，包括：一条串联支路和多条并联支路；所述串联支路由若干串联体声波谐振器依次相连组成；相邻两个所述串联体声波谐振器之间的连接节点上连接一条所述并联支路；其特征在于，A bulk acoustic wave filter, comprising: a series branch and multiple parallel branches; the series branch is composed of a plurality of series bulk acoustic wave resonators connected in sequence; the connection between two adjacent series bulk acoustic wave resonators One of the parallel branches is connected to the node; it is characterized in that:每条并联支路包括第一并联体声波谐振器、第二并联体声波谐振器和第一电感，所述第一并联体声波谐振器、所述第二并联体声波谐振器和所述第一电感依次串联，并且所述第二并联体声波谐振器和所述第一电感同时与至少一个第二电感并联；Each parallel branch includes a first parallel bulk acoustic wave resonator, a second parallel bulk acoustic wave resonator, and a first inductor, the first parallel bulk acoustic wave resonator, the second parallel bulk acoustic wave resonator, and the first The inductors are connected in series in sequence, and the second parallel bulk acoustic wave resonator and the first inductor are simultaneously connected in parallel with at least one second inductor;至少两个相邻的、与不同并联支路连接的所述第二电感之间存在互感；Mutual inductance exists between at least two adjacent second inductors connected to different parallel branches;所述第一电感和所述第二电感均接地。Both the first inductor and the second inductor are grounded.
- 根据权利要求1所述的体声波滤波器，其特征在于，每条并联支路的所述第一并联体声波谐振器和所述第二并联体声波谐振器的性能相同。The bulk acoustic wave filter according to claim 1, wherein the first parallel bulk acoustic wave resonator and the second parallel bulk acoustic wave resonator of each parallel branch have the same performance.
- 根据权利要求2所述的体声波滤波器，其特征在于，每条并联支路的所述第一并联体声波谐振器和所述第二并联体声波谐振器的面积相等。The bulk acoustic wave filter according to claim 2, wherein the areas of the first parallel bulk acoustic wave resonator and the second parallel bulk acoustic wave resonator of each parallel branch are equal.
- 根据权利要求1所述的体声波滤波器，其特征在于，所述第一并联体声波谐振器和所述第二并联体声波谐振器均加载质量负载。The bulk acoustic wave filter according to claim 1, wherein the first parallel bulk acoustic wave resonator and the second parallel bulk acoustic wave resonator are both loaded with a mass load.
- 根据权利要求1所述的体声波滤波器，其特征在于，所述第一并联体声波谐振器和所述第二并联体声波谐振器加载的质量负载不同。The bulk acoustic wave filter according to claim 1, wherein the first parallel bulk acoustic wave resonator and the second parallel bulk acoustic wave resonator load different mass loads.
- 根据权利要求1所述的体声波滤波器，其特征在于，每条并联支路的所述第一并联体声波谐振器和所述第二并联体声波谐振器的性能不同。The bulk acoustic wave filter according to claim 1, wherein the performance of the first parallel bulk acoustic wave resonator and the second parallel bulk acoustic wave resonator of each parallel branch is different.
- 根据权利要求6所述的体声波滤波器，其特征在于，每条并联支路的所述第一并联体声波谐振器和所述第二并联体声波谐振器的面积不相等。7. The bulk acoustic wave filter of claim 6, wherein the areas of the first parallel bulk acoustic wave resonator and the second parallel bulk acoustic wave resonator of each parallel branch are not equal.
- 一种信号处理设备，其特征在于，包括：信号输入电路、信号输出电路和如权利要求1-7任一所述的体声波滤波器；所述信号输入电路与所述体声波滤波器相连接，所述体声波滤波器与所述信号输出电路相连接。A signal processing device, characterized by comprising: a signal input circuit, a signal output circuit, and the bulk acoustic wave filter according to any one of claims 1-7; the signal input circuit is connected to the bulk acoustic wave filter , The bulk acoustic wave filter is connected to the signal output circuit.
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| CN111200418B (en) * | 2020-01-15 | 2021-01-08 | 诺思(天津)微系统有限责任公司 | Bulk acoustic wave filter and signal processing apparatus |
| CN113676153A (en) * | 2021-08-09 | 2021-11-19 | 成都频岢微电子有限公司 | High-inhibition-degree circuit structure, high-isolation-degree duplexer and multiplexer |
| CN117097297B (en) * | 2022-11-20 | 2024-04-05 | 北京芯溪半导体科技有限公司 | Filter, duplexer, multiplexer and communication equipment |
| CN116318039A (en) * | 2023-03-13 | 2023-06-23 | 北京芯溪半导体科技有限公司 | Topological structure of filter, filter and communication equipment |
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| CN111200418A (en) | 2020-05-26 |
| CN111200418B (en) | 2021-01-08 |
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