WO2021124428A1 - Dispositif de traitement sous vide - Google Patents

Dispositif de traitement sous vide Download PDF

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Publication number
WO2021124428A1
WO2021124428A1 PCT/JP2019/049305 JP2019049305W WO2021124428A1 WO 2021124428 A1 WO2021124428 A1 WO 2021124428A1 JP 2019049305 W JP2019049305 W JP 2019049305W WO 2021124428 A1 WO2021124428 A1 WO 2021124428A1
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WIPO (PCT)
Prior art keywords
vacuum processing
information
component
processing apparatus
input
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PCT/JP2019/049305
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English (en)
Japanese (ja)
Inventor
帆琴 橋本
繁治 南
陽司 宮田
政博 森月
Original Assignee
株式会社日立ハイテク
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Priority to PCT/JP2019/049305 priority Critical patent/WO2021124428A1/fr
Publication of WO2021124428A1 publication Critical patent/WO2021124428A1/fr

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof

Definitions

  • the present invention relates to a vacuum processing apparatus that processes a substrate-like sample such as a semiconductor wafer while introducing a processing chamber gas into the processing chamber in which the inside of the processing chamber in the vacuum container is depressurized.
  • a vacuum container having a processing chamber inside that holds the sample in a decompressed inner space and processes the sample. It is provided with a unit for processing including, and a unit for transport which is connected to the unit for processing and in which the untreated and processed samples are transported in the space inside the vacuum vessel in which the pressure is reduced, and these are connected to each other. It is configured. It is known that such a vacuum processing apparatus has a configuration in which a plurality of parts are detachably connected or connected to each other as a module which is a group.
  • the gas type introduced into the processing chamber when processing the film on the surface of the sample the pressure in the processing chamber, the strength of the electric or magnetic field for forming plasma in the processing chamber, and the high frequency power.
  • a module containing parts necessary for realizing the conditions and obtaining the desired processing result can be installed or unnecessary parts can be removed. It is common.
  • the modified module is included in order for the newly attached / removed vacuum processing apparatus to perform the desired operation.
  • a software option that is information including data indicating the specifications of the vacuum processing device as a hard wafer, and a control that describes the operation for controlling the operation of the vacuum processing device based on the information shown in this software option. It is necessary to change the program of. Such changes have resulted in a wide variety of sample specifications such as the film structure and film type of the sample surface in the manufacture of semiconductor devices in recent years, in order to respond to such changes in sample specifications with a single vacuum processing device.
  • the specifications of the vacuum processing device such as the configuration and combination of modules of the vacuum processing device, which are required to be changed according to the sample specifications, are frequently changed, the time (downtime) during which the sample processing by the vacuum processing device is stopped increases. Therefore, there is a problem that the processing efficiency is impaired.
  • Patent Document 1 JP-A-2010-199510
  • Patent Document 1 JP-A-2010-199510
  • the interface between the input / output board and the device to be controlled is different from the interface between the module controller and the input / output board, so that the control device of the module controller itself can be supported.
  • a module that enables the operation of a control device to be controlled and the detection (monitoring) of the state of the operation is disclosed only by accessing the driver. According to this conventional technology, even if the specifications of the module are changed or the equipment is added to the module, the equipment to be connected can be added or changed without changing the position or configuration of the input / output board and the control program. It will be possible.
  • An object of the present invention is to provide a vacuum processing apparatus having an improved operating rate.
  • the above object is a vacuum processing apparatus having at least one vacuum processing unit including a vacuum container having a processing chamber inside for processing the wafer to be processed arranged inside by using the plasma formed inside.
  • the component Before and after mounting the component configured to be mountable and removable in the vacuum processing apparatus, the component is identified using data of any of an image, a barcode, an ID number, and a drawing obtained in advance, and the identified component is identified. This is achieved by providing a control unit that reads out the software and data required for the operation of the vacuum processing apparatus in the state in which the vacuum processing apparatus is attached and adjusts the operation of the vacuum processing apparatus using the software and data.
  • a vacuum processing apparatus having at least one vacuum processing unit having a vacuum container having a processing chamber inside for processing the wafer to be processed arranged inside by using the plasma formed inside.
  • the component was identified and identified using any data of the image, barcode, ID number, or drawing of the component acquired in advance before and after mounting the component configured to be mountable and removable in the vacuum processing apparatus. This is achieved by reading out the software and data required for the operation of the vacuum processing apparatus with the components attached, and adjusting the operation of the vacuum processing apparatus using the software and data.
  • the device when there is a hardware modification of the device, the device itself changes the software option by giving the device information on the parts used in the modification, so that the operating rate of the device does not decrease. Can provide functionality.
  • FIG. 1 is a top view schematically showing an outline of the overall configuration of the vacuum processing apparatus according to the embodiment of the present invention.
  • FIG. 5 is a schematic diagram schematically illustrating an mode of inputting input component information of the vacuum processing apparatus according to the embodiment shown in FIG. 1.
  • FIG. 5 is a schematic diagram schematically illustrating an mode of inputting input component information of the vacuum processing apparatus according to the embodiment shown in FIG. 1. It is a figure which shows the outline of the structure of the parts information database of the vacuum processing apparatus which concerns on embodiment of this invention schematically.
  • FIG. 5 is a diagram schematically showing a screen displayed on a monitor of a control unit when a new component is attached to the vacuum processing apparatus according to the embodiment shown in FIG. 4 and a specification is changed.
  • FIG. 5 is a schematic diagram schematically illustrating an mode of inputting input component information of the vacuum processing apparatus according to the embodiment shown in FIG. 1.
  • FIG. 5 is a diagram schematically showing a screen displayed on a monitor of a control unit when a new component is attached to the vacuum processing apparatus according to the embodiment shown in FIG. 4 and a specification is changed.
  • FIG. 5 is a diagram schematically showing a screen displayed on a display when an image is input as component information in the vacuum processing apparatus according to the embodiment shown in FIG. 4.
  • FIG. 5 is a diagram schematically showing a screen displayed on a display of a control unit when a barcode is selected as information on parts to be input in the vacuum processing apparatus according to the embodiment shown in FIG.
  • FIG. 5 is a diagram schematically showing a screen displayed on a display of a control unit when an ID number is selected as information of a component to be input in the vacuum processing apparatus according to the embodiment shown in FIG.
  • FIG. 5 is a diagram schematically showing a screen displayed on a display of a control unit when a drawing is selected as information on parts to be input in the vacuum processing apparatus according to the embodiment shown in FIG.
  • FIG. 5 is a diagram schematically showing a screen displayed on a display of a control unit when a drawing is selected as information on parts to be input in the vacuum processing apparatus according to the embodiment shown in FIG.
  • FIG. 5 is a diagram schematically showing a screen displayed on a display of a control unit when a modification work is selected on a screen for selecting a method for changing device specifications in the vacuum processing apparatus according to the embodiment shown in FIG.
  • FIG. 5 is a diagram schematically showing a screen displayed on a display of a control unit when a modification work is selected on a screen for selecting a method for changing device specifications in the vacuum processing apparatus according to the embodiment shown in FIG. It is a figure which shows typically the screen which shows the specification before and after changing the specification of the vacuum processing apparatus which concerns on the Example shown in FIG.
  • FIG. 5 is a flowchart showing a flow of processing for changing specifications by newly mounting parts in the vacuum processing apparatus according to the embodiment shown in FIG. It is a flowchart which shows the flow of the process which selects the modification work and changes the specification in the vacuum processing apparatus which concerns on Example shown in FIG.
  • FIG. 1 is a top view schematically showing an outline of the overall configuration of the vacuum processing apparatus according to the embodiment of the present invention.
  • the vacuum processing apparatus 100 is roughly divided into an atmospheric side block 101 which is a front part (left side in the figure) and a rear part (right side in the figure) connected to the block 101. It is configured to include a certain vacuum side block 102 and a control unit 103 communicably connected to the atmosphere side block 101 by a cable.
  • the atmospheric block 101 includes an atmospheric transport chamber 104 for transporting a sample (hereinafter referred to as a wafer) such as a semiconductor wafer to be processed under atmospheric pressure or a pressure having a value close to the atmospheric pressure to the vacuum side block 102, and the atmospheric transport chamber. It is provided with load ports 105, 106, 107 connected to a side wall on the front side (left in the figure) of 104 and arranged side by side in the left-right direction (vertical direction in the figure) when viewed from the front. On the upper surface of these load ports, a wafer for products or a cassette for wafers in which a dummy wafer used for cleaning or the like is housed is placed and connected to the atmospheric transport chamber 104.
  • a wafer such as a semiconductor wafer to be processed under atmospheric pressure or a pressure having a value close to the atmospheric pressure to the vacuum side block 102
  • load ports 105, 106, 107 connected to a side wall on the front side (left in the figure) of 104 and
  • a wafer storage container 109 that is connected to the left and right ends of the side wall on the back surface of the air transport chamber 104 in the left-right direction and can store wafers in a stack with an upper and lower space like a cassette. Is arranged so as to communicate with the inside of the atmospheric transport chamber 104, and wafers before or after processing and dummy wafers are stored depending on the processing process.
  • the unprocessed wafers carried out from the cassette are conveyed to the alignment mechanism 108 connected to the inside of the atmosphere transfer chamber 104 on the left and right side walls of the atmosphere transfer chamber 104, and each wafer is conveyed.
  • a notch for positioning which is formed in advance at a predetermined position on the peripheral edge of the wafer, is oriented in a predetermined direction and then transported from the inside of the atmospheric transfer chamber 104 to the vacuum side block 102, or conversely, on the vacuum side.
  • the processed wafer is transported from the inside of the block 102 to the inside of the atmospheric transport chamber 104 and returned to the original position of the original cassette of the wafer, or is stored in the wafer storage container 109 and then returned to the original position of the original cassette. Be returned.
  • the vacuum side block 102 is connected to the atmospheric transport chamber 104 on the side wall on the back surface of the atmospheric transport chamber 104, and is between the atmospheric pressure and a predetermined vacuum degree or a pressure having a value close to the atmospheric pressure with the wafer housed inside.
  • the load lock chamber 111 which exchanges wafers between the inside of the atmospheric transport chamber 104 and the decompressed vacuum side block 102, and the load lock chamber 111, which are connected to each other behind the load lock chamber 111, are arranged and depressurized. It is provided with at least one vacuum transfer chamber 110 in which the wafer is conveyed inside the inner space.
  • the vacuum side block 102 includes a plurality of (two in this embodiment) vacuum processing chambers 112 and 113 provided with a vacuum container having a processing chamber inside which the wafer is conveyed and processed. It is connected to one vacuum transfer chamber 110. Further, in the vacuum side block 102, as shown in the figure, a wafer communicating between the two of the connected vacuum transfer chamber 110, the load lock chamber 111, and the respective vacuum processing chambers 112 and 113 is provided.
  • Each of the gate valves 114, 115, 116, 117, and 118 as a unit having a valve that moves up and down the opening of the gate, which is a passage to be conveyed inside, to open and airtightly close, is arranged. Two vacuum vessels or internal chambers are connected to each other.
  • the control unit 103 and the vacuum processing device 100 are communicably connected by a LAN cable via a HUB.
  • the communication cable is connected to the connector arranged in the atmosphere transport chamber 104 of the atmosphere side block 101, and the vacuum processing device 100 or the multiple parts and modules mounted on these are connected to the control unit 103. Data and signals that command operations are communicated between them.
  • control unit 103 is a controller that controls the operation of the vacuum processing device 100 performed to process the wafer and manages the specifications of the plasma processing device 100, and the user operates the vacuum processing device 100.
  • Input devices such as keyboards and mice that are operated when inputting commands and settings of their specifications, and monitors such as LCDs and CRTs that display information on the plasma processing device 100 such as operating conditions and specifications on the screen. It is equipped with a device for output.
  • a modification verification mechanism 119 that detects information on software options that are changed according to hardware specifications that have changed due to changes in the module of the vacuum processing apparatus 100, etc., and a modified verification mechanism 119 that detects the detected software options.
  • the control unit 103 of this embodiment includes a keyboard for a monitor and an input, a mouse and an arithmetic unit that is a microprocessor made of a semiconductor device, a connector to which a cable that enables communication with a storage device such as a hard disk, RAM, or ROM is connected. It is shown as a terminal having an interface and a housing in which they are communicably connected to each other and housed inside.
  • the information of the parts to be changed in the hardware specifications of the vacuum processing apparatus 100 will be described in which the image, the barcode, the ID number and the drawing of the parts are used.
  • the information is not limited to these, and other information that can be used to identify the parts may be used.
  • such information is given to the control unit 103 and stored as input component information 122 in a storage device such as a hard disk or RAM inside the control device 103.
  • the input component information 122 is stored in a storage device arranged outside the control device 103, and is a wired or wireless communication means between the storage device and the control unit 103 or the modification verification mechanism 119 inside the storage device. It may be configured so that information can be transmitted and received via.
  • the modification verification mechanism 119 arranged inside the control unit 103 compares the input component information 122 with the component information in the component information database 121, and describes the module to be changed or the internal component thereof from the component information database 121. Data is extracted and read out. Further, as described above, the user can select which of the four types of the information to be input as the input component information 122 is the image, barcode, ID number, and drawing of the component. The details of these four types of data input methods will be described with reference to FIG. 2 below.
  • the specification change mechanism 120 based on the data of the part detected by the modification verification mechanism 119, the information of the software option required when the part or the module including the part is attached to the vacuum processing apparatus 100, or the information thereof.
  • change the software option information of the device according to the contents and operate the information of the newly installed parts or the modules including them and the installed parts or modules properly.
  • Information such as the value of the software option of the above is newly added or modified, and the information of the specification of the changed vacuum processing device 100 is stored in the storage device in the control unit 103. At that time, the information indicating the specifications before mounting the new parts and modules is replaced with the changed information as old information.
  • parts information database 121 images, barcodes, and images of parts that can be mounted and operated in advance on the vacuum processing apparatus 100 or as parts inside the module and whose software options need to be changed due to the mounting.
  • the control unit 103 detects each part of the vacuum processing apparatus 100, such as the vacuum processing chambers 112 and 113, the load lock chamber 111, and the load port 105, the equipment that constitutes these and provides the functions, or the state of operation thereof. It is connected to multiple sensors so that it can communicate regardless of wired or wireless communication means, receives signals indicating the operating status from these, and operates appropriately according to the software algorithm stored in the internal storage device. It is a controller that transmits a command signal for adjusting to the vacuum processing apparatus 100 and adjusts the operation of processing the wafer as a process of manufacturing the semiconductor device in the vacuum processing apparatus 100.
  • control unit 103 reads information indicating the hardware specifications of the vacuum processing apparatus 100, and based on the value of the software option included in the information, the operating state of each unit and each device indicated by the received signal. Is determined, and the command signal for adjusting the above operation is calculated by the arithmetic unit and transmitted via the interface.
  • the information is read to detect the change of the software option included in the information, and the vacuum processing apparatus 100 is based on the change.
  • the operation of the vacuum processing device 100 can be adjusted according to the changed specifications.
  • the modification verification mechanism 119, the specification change mechanism 120, the component information database 121, and the input component information 122, which are arranged inside the control unit 103 and perform different functions and operations, are configured to be detachable from the control unit 103 main body. It may be configured as a group of units, or may form a part of a group of units. Further, a plurality of parts may be composed of the same parts constituting the control unit 103, and for example, the same parts in a single semiconductor device may provide different functions or operations as a result of the operation.
  • FIGS. 2 and 3 are schematic views schematically illustrating an input mode of the input component information 122 shown in FIG.
  • FIG. 2A shows an input method of input component information 122 by reading an image
  • FIG. 2B shows an input method of input component information 122 by reading a barcode
  • FIG. 3A shows input by inputting a component ID number
  • FIG. 3B shows an input method of the component information 122
  • FIG. 3B is a diagram showing an input method of the input component information 122 by reading the drawing.
  • this figure illustrates an example of inputting the information of the parts before mounting, it is also possible to input the information from the parts after mounting as long as each input information can be read.
  • a component 200 which is a component to be a subject and is scheduled to be mounted on the vacuum processing apparatus 100, is prepared.
  • the component 200 may be mounted on the device itself or may form at least a part of a module mounted on the device, and by mounting the component 200, the component 200 can be used as hardware of the vacuum processing device 100.
  • the software options which are information indicating the changes and their magnitude, need to be changed.
  • the component 200 is installed on a table 201 having a transparent and flat surface without dirt or foreign matter.
  • the same one will be used in other examples described below.
  • the orientation of the component 200 placed on the upper surface of the table 201 may be essentially any position or orientation of the surface, but the component 200 may have a surface with buttons or a screen. If the shape of the surface has a surface that can be judged at a glance, it is desirable to arrange the surface so that the surface is on the upper surface.
  • the camera 202 uses a digital camera having a lens for photographing the component 200 and a USB port to which a USB cable can be connected.
  • a USB cable 203 connects the USB port of the camera 202 to the control unit 103, and a signal of information captured by the camera 202 is transmitted to the control unit 103.
  • the camera 202 is used to shoot the parts 200.
  • a person holds the camera 202 in his hand and shoots from the six side directions (top surface direction, left side surface direction, right side surface direction, front direction, back direction, bottom surface direction) of the component.
  • the bottom surface direction a picture is taken through the glass from the lower side of the table 201.
  • the purpose is to reduce the risk of foreign matter adhering to the part 200 by minimizing the number of times a person touches the part as much as possible. There is no particular rule regarding the shooting order in the six-sided direction.
  • the input of such component information is for identifying the component 200 by giving an image of the component 200 as the component information. Therefore, it is not necessary to attach an identification label or the like to the surface of the component, and it can also be used for a component used in a place where the generation of foreign matter on the wafer is a problem such as inside a processing chamber. Further, by acquiring the image as the information of the component 200, particularly by acquiring the information as information by the user and storing it as data in the control unit 103, whether or not the component 200 is used is appropriate or not based on the result of detecting the scratch of the component 200. It is possible to prevent the operation efficiency of the vacuum processing apparatus 100 and the yield of wafer processing from being impaired by determining.
  • the component 200 cannot be photographed from six directions after being attached to the vacuum processing apparatus 100. Although it is possible to use only the surface that can be photographed by the camera 202 as information, it is preferable to perform the above-mentioned imaging before attaching the component 200 in order to verify the component with high accuracy.
  • a barcode 204 which is individually associated with the component 200 and has information described in advance, is attached to the component 200.
  • the component 200 is placed on the table 201 so that the barcode 204 can be visually confirmed on the table 201.
  • a barcode reader 205 having a barcode reading function for reading a barcode into the control unit 103 is connected to the control unit 103 via a USB cable 203.
  • the reading portion of the barcode reader 205 is brought close to the barcode 204 of the component 200, and the signal of the result of reading the information of each component 200 by the barcode reader 205 is input to the control unit 103 as the input component information and stored. ..
  • the part 200 is identified from the information read as the part information from the barcode 204 to which the information including the type, shape, attributes of the material, etc. is given to each part 200, and the shapes are similar. Even if it is, it is possible to accurately identify or verify the component 200 and reflect it in the operation of the vacuum processing apparatus 100 as a corresponding software option. If the barcode 204 can be read after the component 200 is attached to the vacuum processing apparatus 100, the component identification and information should be input to the control unit 103 after the component 200 is attached to the vacuum processing apparatus 100. Is also possible.
  • the component 200 is given an ID number 306 that is individually associated with the component 200 in advance. In this figure, it is shown to be mounted on the upper surface of the table 201, but if the ID number 306 is known, the component 200 is attached to the vacuum processing device 100 and the ID number is given to the control unit 103. 306 may be input to the control unit 103. In this embodiment, when the operator inputs the ID number 306 to the control unit 103 using the input device of the control unit 103, the information of the component corresponding to the ID number 306 is stored in the control unit 103.
  • the component 200 can be identified and verified even when the USB cable cannot be used. As a software option corresponding to the above, it can be reflected in the operation of the vacuum processing apparatus 100.
  • the drawing is selected as the input data
  • the component 200 is shown to be mounted on the table 201, but the component 200 may be mounted on the vacuum processing apparatus 100.
  • the data 308 of the drawing in which the information of the part 200 such as the name, shape, dimension, and material of the part 200 is described in advance is located in the control unit 103 or another place where the control unit 103 is communicably arranged. It is stored inside the storage device.
  • the user inputs the drawing data 308 of the component 200 as the input drawing information 309 using the input device of the control unit 103, and stores the data 308 in the control unit 103 as the input component information 309.
  • drawing data 308 including a plurality of information is stored as input component information 122 of the control unit 103.
  • information of the input component information 122 in which the dimensions and the like are described numerically, accurate verification can be performed even for components having similar shapes and different sizes.
  • FIG. 4 is a diagram schematically showing an outline of the configuration of a component information database of the vacuum processing apparatus according to the embodiment of the present invention.
  • the control unit 103 of this embodiment has at least two types of databases as the parts information database 121.
  • Each of the plurality of vacuum processing devices 400, 401, and 402 owned by the user has the same configuration as the vacuum processing device 100 shown in FIG. 1, and the atmosphere inside the building owned by the specifier such as a clean room.
  • the front surfaces of the side blocks 101 are arranged in parallel so as to be aligned in a straight line.
  • each of the vacuum processing devices 400, 401, and 402 has a control unit 103, and has a parts information database 403, 404, 405 in which information on parts according to the respective specifications is stored.
  • these parts information databases 403, 404, and 405 correspond to the vacuum processing device A 400, the vacuum processing device B 401, and the vacuum processing device C 402, respectively.
  • the control units 103 of the vacuum processing devices 400, 401, and 402 are connected to the parts information databases 403, 404, and 405 so as to be communicable with the modification verification mechanism, similarly to the vacuum processing device 100 shown in FIG. It has 119 and a specification change mechanism 120.
  • the modified specification management source 406 shown in this figure is a computer such as a PC server of a manufacturer of these vacuum processing devices or a manufacturer such as a distributor who sold them, and the modified specification management source 406 is a computer of these vacuum processing devices.
  • a terminal including an input device such as a keyboard and a mouse and an output device such as a screen for displaying information is provided.
  • the modified specification management source 406 and the vacuum processing devices 400, 401, and 402 are connected so as to be able to transmit and receive information via a communication means such as Ethernet (registered trademark) by wire or wireless.
  • the modification specification management source component information database 407 including the specification information as the hardware of each of the vacuum processing devices 400, 401, and 402 is stored. Therefore, internal data is transmitted to and received from each of the vacuum processing devices 400, 401, and 402 via the communication interface of the modified specification management source 406 and the communication means connected to the communication interface.
  • the parts information databases 403, 404, and 405 possessed by the vacuum processing device A 400, the vacuum processing device B 401, and the vacuum processing device C 402 are included in the control unit 103 as described with reference to FIG.
  • Information on parts including the types of software options that are changed by the work and installation and their set values is stored.
  • the modification specification management source parts information database 407 contains information on parts that differ according to the specifications of the hardware of all the vacuum processing devices manufactured or sold by the manufacturer including the vacuum processing devices 400, 401, and 402. It is changed by the information that each part itself has, such as images, barcodes, ID numbers, drawing data, etc. of all parts that can be mounted and used, and the work required for mounting in all vacuum processing equipment, and its modification. It stores information on the types of software options and the operations that accompany the mounting and mounting of parts, including set values. Depending on the part, it is possible that the barcode cannot be attached in a size or shape, or that the drawing does not exist. For such parts, only the data that can be registered is registered and stored in the modification specification management source part information database 407.
  • the modified specification management source parts information database 407 Information data about the part is added to. After that, when the vacuum processing devices 400, 401, 402 and the modification specification management source 406 are communicably connected through a communication path such as a network, any control unit 103 of each vacuum processing device is modified. Modification of specification management source 406 Receives information on new parts stored in the specification management source parts information database 407 and stores it in any of the parts information databases 403, 404, 405 of the vacuum processing device. , Get information about new parts and update the contents of the database.
  • 5 and 6 are diagrams schematically showing a screen displayed on the monitor of the control unit when a new component is attached to the vacuum processing apparatus according to the embodiment shown in FIG. 4 and the specifications are changed.
  • the vacuum processing device A 400 is mounted with a new component or a module including the new component, and the specifications of the vacuum processing device 400 are changed.
  • the user first operates the component information registration program stored in the storage device inside the control unit 103 by using the input device of the control unit 103. After starting the operation, the component information registration program displays the device specification change method selection screen shown in FIG. 5A on the display device.
  • the device specification change method selection screen shown in FIG. 5 (a) of this example can be broadly divided into changing (attribute) information about the component or module itself, and mounting and mounting of the component and software options. Select either to change the information (related to the operation) such as the value.
  • each is referred to as a change by modifying a single part and a modification of the modification work, and the modification change button 500 for selecting each on the modification method selection screen and the modification button 501 for selecting the modification work are used as device specifications. It is displayed together with the Close button 502 that ends the change.
  • the user can change the device specifications on the device specification change method selection screen shown in FIG. 5 (a). Changes by a single part and 2. You can select and change the modification work by pressing any of the buttons 501 and 502 indicating these.
  • the hardware specifications of the vacuum processing apparatus 400 are changed, the case where one part is used is shown, but the case where a plurality of parts are used can be selected.
  • any of the buttons indicated by reference numerals 500 and 501 is selected and pressed by the input device on the screen, the input information selection screen of FIG. 5B is displayed on the display. Will be done. Further, when the Close button 502 of FIG. 5A is selected and pressed on the screen, the device specification change is completed.
  • the screen on the display shown in FIG. 5B shows an input information selection screen for inputting a plurality of information on the attributes of newly registered parts.
  • an image button 503, a barcode button 504, an ID number button 505, a drawing button 506, which are options for information of parts to be input, and a Cancel button 507 for interrupting input information selection are shown.
  • the input information selection screen of this figure is any of the four attribute information of the image, barcode, ID number, and drawing of the part as the information of the part input for changing the specifications. It is a screen where you can select.
  • a screen for inputting the corresponding information is displayed on the display.
  • the candle button 507 is pressed on the screen, the screen returns to the screen shown in FIG. 5A and is displayed.
  • the modification verification mechanism 119 When the information to be input in FIG. 5B is selected and the information of each part is input according to the procedure corresponding to the screens shown in FIGS. 7 and later, the information is input to the modification verification mechanism 119 according to the part information registration program.
  • the information of the parts is transmitted, and the modification verification mechanism 119 sequentially reads out the information stored in the parts information database 403 and compares it with the input information of the parts to determine whether or not they match.
  • the part into which the information is input is identified as the part corresponding to the information in the parts information database 403 that matches the information, and the result of the identification is shown in FIG. 5 (c) on the display. It is displayed as a parts list screen to show.
  • a parts list display area 508, an additional selection button 509, and a specification change button 510 are displayed.
  • the part name is displayed in the part list display area 508. If there are a plurality of parts to be mounted when the hardware specifications of the vacuum processing apparatus 400 are changed, the input information selection screen of FIG. 5B is displayed again by pressing the additional selection button 409, and another You can choose to enter information about the part.
  • a part name is added to the part list display area 408 and these are displayed as a list on the list. The user can add parts information by pressing the additional selection button 509 on the parts list screen of FIG. 5C until all the parts used for changing the specifications are displayed in the parts list display area 408. It can be repeated.
  • the control unit 103 detects that the specification change button 510 is pressed according to the part information registration program, the identified parts are newly mounted on the vacuum processing device 400 or as a replacement. Judging that it will be done, command the modification verification mechanism 119 to read the work required to mount the part identified from the information inside the parts information database 403, and command the specification change mechanism 120 to read the parts information database.
  • the information indicating the operation such as the value of the software option is read from the internal information. Furthermore, the specification is changed as the information of the identified parts by associating the input component attribute information with the information indicating the operation such as the work required for mounting the read and identified parts and the value of the software option. A command is transmitted to the mechanism 120 to store it as information (specification information) indicating specifications as hardware.
  • the device specification changing screen shown in this figure is a process in which the control unit 103 that detects that the specification change button 510 is pressed changes the information indicating the specifications of the vacuum processing device 400 stored in the internal storage device. An indicator 511 indicating the progress is displayed.
  • the parts identified based on the result of comparison using the input part information and the information stored in the part information database 403 are newly or replaced in the vacuum processing apparatus 400.
  • the information of the identified component is registered as a part of the information indicating the updated hardware specifications, and the information indicating the updated hardware specifications is stored in the storage device inside the control unit 103. Stored in.
  • the area of the part indicated by the diagonal line increases to the right as the process of changing the specification information progresses, and when all the indicators 511 are in the diagonal line state, it is indicated that the process is completed.
  • the specification change end screen shown in FIG. 6B is displayed on the display, indicating that the specification change as information has been completed normally. If an error occurs during the processing of this specification change and the process ends, an error or the occurrence of an error is displayed.
  • the specification change end screen shown in FIG. 6B is a screen indicating that the specification change of the device has been completed, and the process of changing the specification of the device is completed by pressing the OK button 612 on the screen.
  • FIG. 7 is a diagram schematically showing a screen displayed on a display when an image is input as component information in the vacuum processing apparatus according to the embodiment shown in FIG.
  • the component image input initial screen shown in FIG. 7A is displayed on the display.
  • ⁇ top view>, ⁇ bottom view>, ⁇ left side view>, ⁇ right side view>, as image types, are displayed below "part image input”.
  • a part candidate display area 702 that displays the image or name of a part candidate detected from the input image arranged on the right side of the area 701, and a button 703 that returns to the input information selection that can change the input information to other information.
  • the image of the component and the image or name of the detected component candidate are displayed immediately after the initial screen for inputting the component image is first displayed. It is in a state where it has not been done.
  • the button 703 for returning to the input information selection is selected, the screen returns to the input information selection screen shown in FIG. 5B, and the information of the component to be input again can be selected.
  • the confirmation button 704 shown in this figure is in an inactive state (status) that cannot be selected and pressed on the screen while the component is not displayed in the component candidate display area 702.
  • the ⁇ or ⁇ item shown below each item indicating the image type name indicates the image input state 705. If it is " ⁇ ”, the image is not input, if it is " ⁇ ”, the image is being shot, and " ⁇ input”. If it is "Completed”, it means that the image has been input.
  • the state in which the image input state 705 is selected will be described using the image input state display screen of FIG. 7B.
  • the selected image input state 705 is changed to the display indicating that the image is being taken with " ⁇ ".
  • the screen displayed on the display becomes the image input status screen.
  • the items of the captured image display area 701 correspond to the image input state 505 selected in the rectangular image type name display area 706 adjacent to the right side of the rectangular area arranged in two rows in the vertical direction.
  • the image type name of the item is displayed.
  • the photographed image can be received by the control unit 103 and stored as information inside.
  • an image of a component corresponding to the item corresponding to the image input state 705 selected on the image input status display screen shown in FIG. 7 (b) is captured, and the control unit 103 Indicates a state in which the information of the component information registration program is stored and stored in a memory such as a RAM or a storage device such as a hard disk.
  • the photographed component image 707 is transmitted to the control unit 103 and displayed in the photographed image display area 701 on the display device.
  • the image input state 705 becomes " ⁇ input completed", indicating that the image has been input.
  • the last shot image is displayed and input as the shooting component 507.
  • the modification verification mechanism 119 of the control unit 103 reads information from the component information database 403 and stores the information in the component information database 403. Each image is compared with all the input images, and it is determined whether or not the two images match. As a result of this comparison, the component determined to match the input image with the plurality of image types is identified as the component for which the image has been input. The name of the identified part is displayed in the part candidate display area 702 as the part candidate name 708.
  • the confirmation button 704 becomes active and can be selected and pressed on the screen. If there are a plurality of candidate parts, by selecting an additional image in the part image input area 700 again, the information of the image of each part in the part information database 403 by the modification verification mechanism 119 and the additionally input image Comparison and judgment are performed.
  • the maximum number of input images is 6, and the more types are input, the higher the accuracy of identification of the relevant part can be. Normally, the number of part candidate names 708 displayed in the part candidate display area 702. Will be less.
  • a plurality of candidates may be displayed in the part candidate display area 502 even if all six types of images are input.
  • the component can be identified by inputting other input information of the image.
  • the user selects a part name determined to be applicable from the displayed part candidate names 708, and presses the confirmation button 704 on the screen to confirm the identification of the part, and the display shows FIG. 5 (c).
  • the parts list screen is displayed again.
  • FIG. 8 is a diagram schematically showing a screen displayed on the display when a barcode is selected as input information as component information in the vacuum processing apparatus according to the embodiment shown in FIG.
  • the component barcode reading initial screen shown in FIG. 8 (a) is displayed on the display.
  • the corresponding component barcode reading initial screen shown in FIG. 8A shows a component display area 800, a button 801 for returning to input information selection, and a confirmation button 802.
  • the corresponding component display area 800 is displayed as "Reading " and the confirmation button 602 is in an inactive state that cannot be selected and pressed on the screen. ..
  • the barcode as component information is performed according to the procedure shown in FIG. 2B. Enter.
  • the button 801 to return to the screen for selecting the information to be input is pressed, the input information selection screen shown in FIG. 5B is displayed again, and it is possible to reselect other types of information to be input. It becomes.
  • the component barcode reading screen shown in FIG. 8B shows a state in which the control unit 103 receives information as a result of scanning the barcode on the surface of the vote attached to the target component using a barcode reader. ing.
  • the control unit 103 receives information as a result of scanning the barcode on the surface of the vote attached to the target component using a barcode reader.
  • the modification verification mechanism 119 reads out the information indicating the barcode of each component stored in the component information database 403 according to the algorithm described in the component information registration program, and compares it with the received barcode information of the component. Determine if they match.
  • the modification verification mechanism 119 determines that the parts stored in the parts information database 403 determined to match are the parts of the input barcode, and transmits the part name to the control unit 103.
  • the control unit 103 displays the received part name as the part name 603 in the corresponding part display area 600 according to the part information registration program, and activates the confirmation button 602 to enable selection and pressing on the screen. ..
  • the user selects and presses the confirmation button 602 on the screen, so that the part whose name is displayed is identified as the part into which the barcode is input.
  • the parts list screen of FIG. 5C is displayed again on the display.
  • FIG. 9 is a diagram schematically showing a screen displayed on the display of the control unit when an ID number is selected as information of a component to be input in the vacuum processing apparatus according to the embodiment shown in FIG.
  • the component ID number input initial screen shown in FIG. 9A shows an ID number input area 900, a search button 901, a corresponding component display area 902, a button 903 for returning to input information selection, and a confirmation button 904.
  • the wording "ID number input here " is displayed in the ID number input area 900, and when the ID number is not input, the search button 901 can be selected and pressed on the screen. It is in an inactive state where it cannot be activated, nothing is displayed in the corresponding component display area 902, and the confirmation button 904 is also in an inactive state where it cannot be selected and pressed on the screen.
  • the input information selection screen shown in FIG. 5B is displayed, and it is possible to reselect other input information.
  • the user can select the ID number input area 900 on the component ID number input initial screen and input the component ID number 905 in the ID number input area 700. This state is shown in FIG. 9 (b).
  • the search button 901 is activated, and the user can select and press the search button 901 on the screen.
  • the ID number search result display screen shown in FIG. 9C is displayed on the display.
  • the control unit 103 causes each component stored in the component information database 403 in the modification verification mechanism 119 according to the algorithm of the component information registration program.
  • the information of the component ID number of the above is read out and compared with the ID number 905 of the component input in the ID number input area 900 to determine whether or not the information matches. Then, when there is a part determined to match the input part ID number 905, the part name in the information of the part is displayed in the part display area 902 as the part name 906.
  • the confirmation button 904 is activated, and the user can select and press it on the screen.
  • the user selects and presses the confirmation button 904
  • the parts selected by the user are confirmed, the parts entered in the parts information registration program are identified, and the parts list screen shown in FIG. 5C is displayed on the display. Is displayed again.
  • FIGS. 10 and 11 are diagrams schematically showing a screen displayed on the display of the control unit when a drawing is selected as information of parts to be input in the vacuum processing apparatus according to the embodiment shown in FIG.
  • the drawing button 506 When the drawing button 506 is pressed on the input information selection screen of FIG. 5 (b), the component drawing reading initial screen shown in FIG. 10 (a) is displayed on the display.
  • a drawing input area 1000 On the component drawing reading initial screen, a drawing input area 1000, a reference button 1001, a search button 1002, a corresponding component display area 1003, a button 1004 for returning to input information selection, and a confirmation button 1005 are displayed.
  • a user who intends to input drawing data first selects and presses the reference button 1001 on the screen to select the drawing selection screen shown in FIG. 10B. Is displayed on the display.
  • a data structure such as a tree structure of information stored in a storage device in the control unit 103 is visualized and displayed as a hierarchy of libraries, folders, etc. in a rectangular shape.
  • File list that is a rectangular area where information such as files arranged in the lower hierarchy of the navigation window 1006 (upper left side in the figure) and any folder selected in this navigation window 1006 is displayed.
  • 1007 upper right side in the drawing
  • an OK button 1008 for confirming the data selected by the user on the drawing selection screen, and a Cancel button 1009 for canceling the selection of the drawing are displayed.
  • the user first selects the folder in which the drawing data is saved on the screen from the navigation window 1006 in order to select the drawing data of the part to be input.
  • the displayed folder name or the figure associated with the folder name is selected by an operation such as clicking on the screen.
  • the data of the saved drawings in the selected folder is displayed as a list such as a list in the file list 1007 arranged on the right side of the navigation window 1006.
  • the user selects the drawing data corresponding to the part to be input from the displayed file list 1007 in the same manner as the operation in the navigation window 1006, and presses the OK button 1008 to select the user.
  • the drawings of the parts to be used are confirmed, and the parts drawing input screen shown in FIG. 11A is displayed on the display. Further, when the user selects and presses the Cancel button 1009, the component drawing reading initial screen of FIG. 10A is displayed again on the display without confirming the drawing.
  • the name of the drawing selected and confirmed on the drawing selection screen of FIG. 10B is the drawing input area 1000 of the parts drawing reading initial screen shown in FIG. 10A. Is displayed in. Since the name of the drawing selected by the user on the drawing selection screen is displayed in the drawing input area 1000, the search button 1002 is activated, and the user selects and presses the search button 1002 on the screen. , The control unit 103 extracts the drawing of the selected name and the corresponding component by referring to the component information stored in the component information database 403 according to the algorithm of the component information registration program.
  • FIG. 11B shows a drawing search result display screen.
  • the control unit 103 uses the modification verification mechanism 119 according to the algorithm of the parts information registration program, and each of them is stored in the parts information database.
  • the drawing data of the component information is read out, and the data of the drawing is compared with the drawing data 1110 input to the drawing input area 1000 to determine whether or not they match.
  • the part name of the information of the part is displayed in the reading part display area 1003 as the part name 1111 of the drawing search result display screen. That is, on the drawing search result display screen of FIG. 11B, the display of the part name 1111 is added to the reading part display area 1003 of the part drawing input screen of FIG. 11A.
  • the confirmation button 1005 is activated on the drawing search result display screen.
  • the user selects on the screen and presses the confirmation button 1005
  • the parts selected by the user are confirmed and the parts input to the parts information registration program are identified, and the display shows the parts shown in FIG. 5 (c).
  • the parts list screen is displayed again.
  • FIGS. 12 and 13 schematically show a screen displayed on the display of the control unit when the modification work is selected on the device specification change method selection screen in the vacuum processing apparatus according to the embodiment shown in FIG. It is a figure which shows.
  • FIG. 12A has the same configuration as the device specification changing method selection screen shown in FIG. 5A.
  • the modification work selection screen shown in FIG. 12B is displayed.
  • the procedure described in this embodiment when changing the hardware specifications of the vacuum processing apparatus 400, a case where there are a plurality of parts related to the change will be described, but selection is possible even when there is a single part. Is.
  • the remodeling work selection screen shown in FIG. 12B includes a remodeling work selection area 1200, an OK button 1201 for confirming the remodeling work, and a Cancel button 1202 for interrupting the remodeling work selection.
  • the type of remodeling work can be selected as the information to be input for changing the specifications of the vacuum processing apparatus 400.
  • the remodeling work required for changing the specifications classified by type as an item is displayed as a list, and is arranged at the left end of the place where the name of each work item is shown.
  • the check box on the screen When the operator or the user selects and presses the check box on the screen to check it, the work of the modification of the name is selected.
  • the display is shown in FIG. 12 (c).
  • the modification procedure screen is displayed. Further, when the Cancel button 1202 is selected and pressed on the screen, the device specification changing method selection screen shown in FIG. 12A is displayed again.
  • the modification procedure screen shown in FIG. 12 (c) includes a modification procedure display area 1203, a procedure completion check area 1204, and a specification change button 1205.
  • the specification change button 1205 is inactive in the initial state when the modification procedure display area 1203 is first displayed, and the operator or the specification person cannot select and press it on the screen. There is.
  • the modification verification mechanism 119 of the control unit 103 performs the modification work of FIG. 12 (b) from the information stored in the parts information database 403.
  • the information indicating the work content of the item selected in the selection area 1200 is read out, and the items indicating the work content included in the read information are numbered in the vertical direction as a list showing the work procedure. Are displayed in order of the number. The operator or the user can proceed with the work of changing the specifications of the vacuum processing apparatus 400 according to the procedure displayed on the display.
  • the worker or the user selects and checks the completion check area 1204, which is the area on the right side of each item of the procedure on the screen, every time each procedure of the modification procedure display area 1203 is completed.
  • the modified procedure display area 1203 that has been checked is deemed to have completed the work by the specification change mechanism 120, and the display is changed to a grayed out display.
  • the operator or user proceeds with the work in order until all the modification procedure display areas 1203 are checked out and grayed out, and when the procedure completion check area 1204 is checked after the last procedure is completed,
  • the specification change button 1205 is activated and can be selected and pressed on the screen.
  • the device specification changing screen shown in FIG. 13A is displayed on the display and the specification change process of the vacuum processing device 400 is started.
  • the same process as that described with reference to FIG. 6 is performed, and FIG. 13 (a) has the same configuration as the device specification changing screen shown in FIG. 6 (a).
  • the indicator 1311 on the device specification changing screen of FIG. 13A changes the process. Along with this, the area of the shaded area increases to the right.
  • FIG. 13 (b) has the same configuration as that of FIG. 6 (b) as in FIG. 13 (a).
  • FIG. 14 is a diagram schematically showing a screen showing specifications before and after the specification of the vacuum processing apparatus according to the embodiment shown in FIG. 4 is changed.
  • the screen of this figure shows a screen displaying the flow paths and flow rates of a plurality of types of gases supplied to the processing chamber of the vacuum processing apparatus 400, and a parameter setting screen for setting the flow rates of each of these gases.
  • the pipe through which the H 2 gas flows the flow rate controller that adjusts the gas flow rate on the pipe, and the valve that opens and closes the pipe. Is shown on the screen when the specification is changed to add to the vacuum processing apparatus 400.
  • FIG. 14A is a screen displayed on the display of the control unit 103 before the specification is changed.
  • the valve 1400 arranged on the pipe 1405 that flows inside for each type of gas and the flow controller (Mass Flow Controller, MFC) in which the name of each gas type is described are described.
  • 1001 is displayed, indicating a mechanism for introducing each type of gas into the processing chamber of the vacuum processing apparatus 400 at a predetermined flow rate by opening and closing the valve 1000 on the apparatus.
  • the arrangement of the pipes for supplying gas between O 2 and Ar already mounted on the vacuum processing apparatus 400 is displayed as an image.
  • the current set values of the O 2 and Ar gases are displayed together with the items for which the flow rate and the like can be set.
  • FIG. 14B is a screen after the specification has been changed to add a configuration for supplying H2 gas.
  • the modification verification mechanism 119 identifies the parts related to the addition of the configuration for supplying the H 2 gas, and specifies the specifications.
  • the change mechanism 120 changes the associated software options.
  • the control unit 103 detects a change in the specification to which the configuration for supplying H 2 gas as hardware is added, and further reads out the set value of the software option changed accordingly, and the control unit 103 reads out the setting value of the software option changed accordingly.
  • valves 1402 and H 2 of H2 gas on a display unit to display a control display screen pipe 1405 is added and a flow regulator 1403 is displayed. Also, the parameter setting screen, the setting items of the flow rate or the like of the added H 2 gas is displayed, the initial setting value of the items related to H2 gas is entered.
  • FIG. 15 is a flowchart showing a flow of processing for changing specifications by newly mounting parts on the vacuum processing apparatus according to the embodiment shown in FIG.
  • step 1500 the operator inputs a command from the input device of the control unit 103 and processes the vacuum processing apparatus 400 as one of the steps of manufacturing the wafer into a semiconductor device.
  • the operation mode is shifted to the maintenance mode in which maintenance such as maintenance and inspection can be performed on the vacuum processing apparatus 400.
  • the operator After confirming that the vacuum processing apparatus 400 has stopped processing the wafers for mass-producing semiconductor devices and has shifted to the maintenance mode, the operator applies a component information registration program, which is software for changing the specifications of the apparatus in step 1101. It is read from the storage device in the control unit 103 and started.
  • step 1102 either the change button 500 by modifying a single part or the modification operation is selected and the change button 501 is selected.
  • the change button 500 by modifying a single part is selected.
  • the details of the processing when the modification operation is selected and the change button 501 is selected will be described with reference to FIG.
  • the part to be newly mounted in step 1503 The operator selects any one of four types of input information: an image, a barcode, an ID number, and a drawing.
  • the operator inputs the component information in step 1504.
  • One of the screens shown in FIGS. 7 to 11 is displayed according to the type of input information selected in step 1503, and data related to the component is input according to the procedure for input on each screen. ..
  • step 1505 the part is searched based on the input part data.
  • the modification verification mechanism 119 shown in FIG. 1 reads the information stored in the parts information database 403 and searches for the input parts. That is, each of the information read from the component information database 403 is compared with the input data of the component information to determine whether or not they match.
  • the parts corresponding to the matching information are regarded as parts related to the information input in step 1504, and the parts are displayed on the display as a search result.
  • step 1506 if the information of the part that matches the information of the part input in the previous step 1504 is not detected, the dimensions are different if the information input in 1504 is an image, and scratches or stains if the information is a barcode. It is possible that the input information is defective, such as. Therefore, in step 1507, in the inputtable input information registered in advance in the component information database 403 for the component, all the information is confirmed while switching the input information. If there is input information that has not been confirmed yet, the process returns to step 1503, the type of information to be input is switched to another, and the information is input and searched again.
  • step 1507 If it is determined in step 1507 that all the inputable input information registered in the parts information database has been confirmed in advance, it is possible that the parts information database 403 has not been registered due to a new part or omission of registration. There is. Therefore, in step 1508, a confirmation inquiry is made to the modification specification management source 406. It is determined whether or not the component is registered in the modification specification management source component information database 407 (step 1509), and if it is determined that the component is registered, the process proceeds to step 1510 and the information of the component is input to the component of each device. After registering in the information database 403, the process returns to step 1503, and the component information is input and the component search is performed again.
  • step 1509 If the part is not registered in the modification specification management source part information database 307 in step 1509, the input information related to the part must be registered in the modification specification management source part image database 407. Therefore, in order to interrupt the process of changing the specifications of the vacuum processing apparatus 400, the operator proceeds to step 1515 and ends the component information registration program for changing the specifications of the vacuum processing apparatus 400.
  • step 1506 If a matching part is detected by the part search in step 1506, the process proceeds to step 1511 and the operator selects the corresponding part from the list of part names displayed on the screen of the display. If the input information selected in step 1503 is any of a barcode, ID number, and drawing, the number of detected parts is often one, but if the input information is an image, the shape. May be detected and displayed as matching the names of multiple similar parts. In this case, the operator visually confirms and selects the relevant part from the options.
  • step 1512 the procedure is repeated up to step 1511 after returning to step 1503 to select, input and search the part information, and select all the parts that need to be selected. Is repeated until is displayed in FIG. 5 (c).
  • step 1513 the specification change mechanism 120 shown in FIG. 1 acquires information on software option numbers and set values related to the selected component from the component information database 403.
  • step 1514 the specification change mechanism 120 searches for the software option number and changes the set value based on the information acquired in step 1513.
  • step 1514 the device specification change tool is terminated by the operator (step 1515), and the process of selecting and inputting the component information to change the specifications of the vacuum processing device 400 is performed. Is completed. After that, in step 1516, the operation mode of the vacuum processing apparatus 400 is changed to the operation mode for processing the wafer by the work vehicle.
  • FIG. 16 is a flowchart showing a flow of processing in which the modification work is selected and the specifications are changed in the vacuum processing apparatus according to the embodiment shown in FIG.
  • the first two steps after the start of the process are the same as steps 1500 and 1501 shown in the flow chat of FIG.
  • the screen shown in FIG. 5A is displayed, and the operator can select the modification work and select the change button 501.
  • step 1601 By selecting the remodeling work and selecting the change button 501 on the screen, the screen of the display of the control unit 103 is changed to the one shown in FIG. 12 (b), and the operator executes from the items displayed on the screen. You can choose the work of modification to do (step 1601).
  • the process proceeds to step 1602, and the procedure for performing the selected modification is displayed in order on the screen of the display as a list of items.
  • the first step-displayed procedure is fixed as a procedure for "confirming whether the device is in maintenance mode".
  • the items to be implemented after that are displayed by the modification verification mechanism 119 reading the procedure related to modification from the information stored in the parts information database 403.
  • the worker When the procedure is displayed, the worker performs the work according to the order of the items displayed in step 1603. As shown in Fig. 12 (c), every time one procedure is completed, the check box displayed on the right side of the item is checked to prevent work omissions and software with the same quality no matter who works. Options can be changed.
  • step 1605 it is determined whether or not all the work items have been completed, and if it is determined that all the work items have not been completed, the process returns to step 1603 and the work is repeated until all the items are completed.
  • the specification change button 1205 on the screen shown in FIG. 12C is activated so that the operator can select and press it on the screen. ..
  • the specification change button 1205 When the operator selects and presses the specification change button 1205, a process of changing the specifications of the vacuum processing apparatus 400 is performed (step 1606).
  • step 1206 the specification change mechanism 120 shown in FIG. 1 acquires the information of the software option number and the set value related to the work of changing the selected specification from the parts information database 403, and obtains the acquired information.
  • the information indicating the specifications of the vacuum processing device 400 in the storage device inside the control unit 103 is added and changed, and the information indicating the changed specifications is replaced with the information indicating the specifications of the vacuum processing device 400 inside the storage device. Overwrite. After that, the same steps as in steps 1514 to 1516 shown in FIG. 15 are carried out, and the process of selecting the modification work and changing the specifications is completed.
  • the device by giving the device information on the parts used in the modification, the device itself can detect and change the related software options, and it is quick and accurate according to the hardware modification. Software options can be changed. Further, the present invention can be applied not only when the device is modified but also when a new device is started up.
  • Vacuum processing device 101 ... Atmospheric side block 102 . Vacuum side block 103 ... Control unit 104 ... Atmospheric transport chamber 105-107 ... Load port 108 ... Alignment mechanism 109 ... Wafer storage container 110 ... Vacuum transport chamber 111 ... Load lock chamber 112 , 113 ... Vacuum processing chamber 114, 115, 116, 117, 118 ... Gate valve 119 ... Modification verification mechanism 120 ... Specification change mechanism 121 ... Parts information database 122 ... Input parts information 200 ... Parts 201 ... Stand 202 ... Camera 203 ... USB Cable 204 ... Bar code 205 ... Bar code reader 306 ...
  • Parts image input area 701 ... Captured image display area 702 ... Part candidate display area 703 ... Return to input information selection button 704 ... Confirm button 705 ... Image input state 706 ... Image type name display area 707 ... Part image 708 ... Part candidate name 800 ... Corresponding part display area 801 ... Return to input information selection Button 802 ... Confirm button 803 ... Part name 900 ... ID number input area 901 ... Search button 902 ... Corresponding part display area 903 ... Return to input information selection Button 904 ... Confirm button 905 ... ID number 906 ... Parts Name 1000 ... Drawing input area 1001 ... Reference button 1002 ... Search button 1003 ... Corresponding part display area 1004 ...

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Abstract

Dans l'état de la technique, des données ont été préparées, qui concernaient une option logicielle correspondant à des modifications de spécifications en tant que matériel d'un dispositif modifié par remodelage, et étant donné qu'il était nécessaire d'arrêter la production du dispositif et qu'une personne modifie manuellement des valeurs pour l'option logicielle, un problème s'est présenté en termes de diminution de la vitesse de fonctionnement ou de l'efficacité du dispositif. La présente invention surmonte le problème mentionné ci-dessus avec un dispositif de traitement sous vide qui a au moins une unité de traitement sous vide comprenant un récipient sous vide disposé sur le côté interne avec une chambre de traitement dans laquelle une tranche à traiter qui a été positionnée à l'intérieur est traitée à l'aide du plasma formé à l'intérieur, le dispositif de traitement sous vide comprenant une unité de commande qui, avant et après qu'un composant conçu pour être attaché et détaché a été attaché : identifie le composant à l'aide de données d'une image, d'un code à barres, d'un numéro d'identification, ou d'un dessin obtenu à l'avance ; lit le logiciel et les données requises pour une action du dispositif de traitement sous vide dans un état dans lequel le composant identifié a été attaché ; et règle le fonctionnement du dispositif de traitement sous vide à l'aide du logiciel et des données.
PCT/JP2019/049305 2019-12-17 2019-12-17 Dispositif de traitement sous vide WO2021124428A1 (fr)

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JP2013179298A (ja) * 2004-08-25 2013-09-09 Lam Research Corporation 基板処理システムにおけるスマートコンポーネント管理技術
JP2009152433A (ja) * 2007-12-21 2009-07-09 Tokyo Electron Ltd 情報処理装置、情報処理方法、およびプログラム
JP2009188091A (ja) * 2008-02-05 2009-08-20 Tokyo Electron Ltd 製造装置、情報処理方法、及びプログラム
JP2017177298A (ja) * 2016-03-31 2017-10-05 株式会社荏原製作所 基板処理装置の異常検出システム及び方法

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