WO2021106554A1 - 試料保持具 - Google Patents
試料保持具 Download PDFInfo
- Publication number
- WO2021106554A1 WO2021106554A1 PCT/JP2020/041937 JP2020041937W WO2021106554A1 WO 2021106554 A1 WO2021106554 A1 WO 2021106554A1 JP 2020041937 W JP2020041937 W JP 2020041937W WO 2021106554 A1 WO2021106554 A1 WO 2021106554A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- sample holder
- extending
- support
- holder according
- main body
- Prior art date
Links
- 239000000758 substrate Substances 0.000 claims description 27
- 239000007789 gas Substances 0.000 description 26
- 230000002093 peripheral effect Effects 0.000 description 9
- 239000000463 material Substances 0.000 description 7
- 238000005304 joining Methods 0.000 description 6
- 239000000919 ceramic Substances 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 229910010293 ceramic material Inorganic materials 0.000 description 4
- 239000011810 insulating material Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 239000007769 metal material Substances 0.000 description 4
- 238000001179 sorption measurement Methods 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- -1 for example Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- RUDFQVOCFDJEEF-UHFFFAOYSA-N yttrium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
- H01L21/6833—Details of electrostatic chucks
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
- H01J37/32449—Gas control, e.g. control of the gas flow
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32715—Workpiece holder
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68757—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a coating or a hardness or a material
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N13/00—Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
Definitions
- the present disclosure relates to a sample holder for holding a sample such as a semiconductor wafer, which is used in a manufacturing process of a semiconductor integrated circuit, a manufacturing process of a liquid crystal display device, or the like.
- Patent Document 1 An example of the prior art is described in Patent Document 1.
- the sample holder of the present disclosure has a plate-shaped substrate having a sample holding surface and a joint surface for joining the back surface of the substrate opposite to the sample holding surface, and a flow path extending to at least the joint surface. It is provided with a support provided with.
- the support has a first portion in which the flow path extends parallel to the joint surface, and a second portion in which the flow path is branched and connected to the first portion and extends in a direction perpendicular to the joint surface to open to the joint surface.
- the sample holder has a tubular main body portion located along the second portion and a tubular main body portion connected to the main body portion and having a tubular extending portion extending to the first portion. It is configured to have a shaped member.
- the sample holder used in a semiconductor manufacturing apparatus or the like which is the basic configuration of the sample holder of the present disclosure, supports a substrate made of an insulator on which a sample such as a wafer is placed and held, and the substrate. It is configured by joining a support made of a conductor such as metal with a bonding material.
- a flow path for supplying a plasma generating gas such as helium to the upper surface of the substrate, which is a holding surface of the sample, is provided from the outside.
- the electrostatic chuck described in Patent Document 1 As a sample holder used in a semiconductor manufacturing apparatus or the like, for example, the electrostatic chuck described in Patent Document 1 is known.
- the electrostatic chuck described in Patent Document 1 includes a dielectric substrate having an internal electrode and a metal base plate, and is provided with a through hole penetrating the dielectric substrate and the base plate.
- a ceramic porous body is arranged.
- a ceramic porous body is arranged in the through hole of the base plate to improve the insulating property.
- sample processing has come to be performed using high-power plasma.
- the plasma output is increased, the plasma irradiated to the sample is discharged into the flow path via the plasma generating gas that fills the flow path in the support (base plate). I sometimes did.
- FIG. 1 is a plan view of the sample holder of the first embodiment.
- FIG. 2 is a cross-sectional view of the sample holder at the cut plane line XX shown in FIG.
- the sample holder 100 includes a base 10, a support 20, and a tubular member 30.
- the substrate 10 is a ceramic body having a first surface 10a and a second surface 10b opposite to the first surface 10a, the first surface 10a is a sample holding surface for holding a sample, and the second surface 10b is. , The back surface to be joined to the support 20.
- the substrate 10 is a plate-shaped member, and the outer shape is not limited, and may be, for example, a disk shape or a square plate shape.
- the substrate 10 is made of, for example, a ceramic material.
- the ceramic material may be, for example, alumina, aluminum nitride, silicon nitride, yttria, or the like.
- the external dimensions of the substrate 10 can be, for example, a diameter (or side length) of 200 to 500 mm and a thickness of 2 to 15 mm.
- the sample holder 100 of this example may be an electrostatic chuck that holds a sample by an electrostatic force.
- the sample holder 100 includes an adsorption electrode 40 inside the substrate 10.
- the adsorption electrode 40 has two electrodes. One of the two electrodes is connected to the positive electrode of the power supply, and the other is connected to the negative electrode. Each of the two electrodes has a substantially semicircular shape, and is located inside the substrate 10 so that the semicircular strings face each other. When these two electrodes are combined, the outer shape of the entire suction electrode 40 is circular.
- the center of the outer shape of the circular shape formed by the entire suction electrode 40 can be set to be the same as the center of the outer shape of the ceramic body having the same circular shape.
- the adsorption electrode 40 has, for example, a metal material.
- a metal material such as platinum, tungsten or molybdenum is used.
- the sample holder 100 is used, for example, by generating plasma above the first surface 10a of the substrate 10, which is the sample holding surface.
- Plasma can be generated by exciting a gas located between the electrodes by applying a high frequency between a plurality of electrodes provided outside, for example. The supply of gas for plasma generation will be described later.
- the support 20 is made of metal and is a member for supporting the substrate 10.
- the metal material for example, aluminum can be used.
- the outer shape of the support 20 is not particularly limited, and may be circular or square.
- the external dimensions of the support 20 can be, for example, a diameter (or side length) of 200 to 500 mm and a thickness of 10 to 100 mm.
- the support 20 may have the same outer shape as the substrate 10, may have a different outer shape, may have the same outer dimensions, or may have different outer dimensions.
- the support 20 and the substrate 10 are joined via the bonding layer 50.
- the first surface 20a of the support 20 is a joint surface facing the second surface 10b of the base 10, and the first surface 20a of the support 20 and the second surface 10b of the base 10 are It is joined by the joining layer 50.
- the bonding layer 50 for example, an adhesive made of a resin material can be used.
- the resin material for example, a silicone resin or the like can be used.
- a gas flow path 21 extending to at least the first surface 20a, which is a joint surface, is provided inside the support 20 .
- the gas flow path 21 is branched and connected to a first portion 21a extending parallel to the joining surface 20a of the support 20 and a first portion 21a, extending in a direction perpendicular to the joining surface 20a, and opening to the joining surface 20a. It has two portions 21b.
- the first portion 21a is provided, for example, in an annular shape concentric with the center of the joint surface 20a.
- the second portion 21b is branched and connected to the first portion 21a, for example, and is provided in a vertical hole shape extending from the first portion 21a to the joint surface 20a.
- the gas flow path 21 further opens into the second surface 20b of the support 20 and extends in a direction perpendicular to the joint surface 20a, and extends parallel to the joint surface 20a of the support 20 to form a third portion 21c. It has a fourth portion 21d that connects the portion 21c and the first portion 21a.
- the third portion 21c is provided, for example, in a vertical hole shape at the center of the joint surface 20a.
- the fourth portion 21d is provided in a straight line extending outward from the center of the joint surface 20a in parallel with the joint surface 20a.
- the substrate 10 is provided with a through hole 11 penetrating from the first surface 10a to the second surface 10b.
- the through hole 11 of the substrate 10 and the second portion 21b of the support 20 communicate with each other.
- the plasma generating gas flows into the third portion 21c from the outside, flows through the fourth portion 21d, and reaches the first portion 21a.
- the plasma generating gas flows through the first portion 21a along the circumferential direction, rises in the second portion 21b, and reaches the first surface 20a. Further, it flows into the through hole 11 in the base 10 communicating with the second portion 21b, rises in the through hole 11, and is supplied onto the first surface 10a of the base 10 through the opening of the first surface 10a of the base 10.
- the plasma generating gas for example, helium gas or the like can be used.
- the gas flow path 21 is provided in the metal support 20, and when the plasma reaches the second portion 21b through the plasma generating gas in the through hole 11 of the substrate 10 during the plasma treatment, It discharges to the inner wall of the second portion 21b.
- a tubular member 30 made of an insulating material is provided.
- the tubular member 30 of the present embodiment has a tubular main body 31 located along the second portion 21b, and a tubular extending portion 32 that is connected to the main body 31 and extends to the first portion 21a. ..
- the tubular member 30 of the present embodiment has a cylindrical shape, and the main body portion 31 and the extending portion 32 are integrated.
- the tubular member 30 covers the inner peripheral surface of the second portion 21b, and the tip 32a further projects to the first portion 21a.
- the tubular member 30 also covers a part of the inner peripheral surface of the first portion 21a by the extending portion 32.
- a space is provided between the tip 32a of the extending portion 32 and the bottom surface of the first portion 21a.
- the gas that has flowed through the first portion 21a along the circumferential direction flows into the tubular member 30 from the tip 32a side of the extending portion 32. Then, it rises in the tubular member 30 and flows into the through hole 11 in the substrate 10.
- a ceramic material can be used as the insulating material constituting the tubular member 30, for example.
- the ceramic material include alumina and aluminum nitride.
- FIG. 3A is an enlarged cross-sectional view of the periphery of the second portion of the second embodiment.
- FIG. 3B is an enlarged cross-sectional view taken along the cutting plane line YY shown in FIG. 3A.
- the present embodiment is the same as the first embodiment except that the configuration of the tubular member 30A is different. Therefore, the same reference numerals are given to the same configurations, and the description thereof will be omitted.
- the tip 32a of the extending portion 32A reaches the bottom surface 22 of the first portion 21a. Then, since the tip 32a is blocked, the extending portion 32A has a through hole or a notch for communicating the internal space thereof with the first portion 21a of the gas flow path 21.
- the extension portion 32A is provided with a notch 32b having a notch in the peripheral wall.
- the cutouts 32b are provided at two locations with the central axis of the extending portion 32A in between so that the plasma generating gas flows through the annular first portion 21a.
- the gas flowing through the first portion 21a from the right side toward the paper surface of FIG. 3B flows into the internal space of the extension portion 32A from the notch 32b on the right side, and a part of the gas rises in the internal space of the extension portion 32A.
- a part flows out from the notch 32b on the left side to the first portion 21a.
- the gas that has flowed out to the first portion 21a flows through the first portion 21a to the next extension portion 32A.
- the extending portion 32A reaches the bottom surface 22 of the first portion 21a, the portion covering the inner peripheral surface of the first portion 21a is larger than that of the first embodiment, and the first portion 21a It is possible to further suppress the discharge.
- the shape and size of the notch 32b are not particularly limited. For example, it may be a part of a circle (including an ellipse) such as a semicircle, or a polygonal shape including a rectangular shape. Further, what is provided in the extending portion 32 may be a through hole, and the shape and size are not particularly limited. For example, it may have a circular shape (including an ellipse or the like) or a polygonal shape including a rectangular shape.
- FIG. 4 is an enlarged cross-sectional view of the periphery of the extension portion of the third embodiment.
- the present embodiment is the same as the second embodiment except that the configuration of the tubular member 30B is different. Therefore, the same reference numerals are given to the same configurations, and the description thereof will be omitted.
- the tubular member 30B of the present embodiment further has a bottom surface portion 33 that closes the tip end 32a side of the extension portion 32A.
- the bottom surface portion 33 may be made of an insulating material, and may be the same material as the main body portion 31 and the extending portion 32, or may be different materials.
- the bottom surface portion 33 closes the tip end 32a side of the extension portion 32A and covers the bottom surface of the first portion 21a. Since the extending portion 32A has the same configuration as that of the second embodiment, the extending portion 32A has a through hole or a notch. Even if the bottom surface portion 33 closes the tip end 32a side of the extension portion 32A, the plasma generating gas can flow through the first portion 21a and the extension portion 32 as in the second embodiment. Since the bottom surface portion 33 also covers the bottom surface 22 of the first portion 21a, the portion covering the inner peripheral surface of the first portion 21a is further larger than that of the second embodiment, and the discharge in the first portion 21a is further suppressed. Is possible.
- FIG. 5 is an enlarged cross-sectional view of the periphery of the extension portion of the fourth embodiment.
- the present embodiment is the same as the third embodiment except that the configuration of the first portion 21a is different. Therefore, the same reference numerals are given to the same configurations, and the description thereof will be omitted.
- the first portion 21a of the present embodiment has a recess 23 in which the bottom surface portion 33 is accommodated on the side opposite to the connection position with the second portion 21b.
- the inner surface 33a of the bottom surface portion 33 is located closer to the joint surface 20a than the bottom surface 22 of the first portion 21a.
- the extending portion 32A extending into the first portion 21a is fixed. Since the inner surface 33a of the bottom surface 33 is above the bottom surface 22 of the first portion 21a, the inner surface of the recess 23 is covered by the bottom surface 33, and it is prevented from being exposed from the notch 32b. This makes it possible to suppress the discharge in the first portion 21a, particularly the discharge on the inner surface of the recess 23.
- FIG. 6 is an enlarged cross-sectional view of the periphery of the extension portion of the fifth embodiment.
- the present embodiment is the same as the fourth embodiment except that the configuration of the first portion 21a is different. Therefore, the same reference numerals are given to the same configurations, and the description thereof will be omitted.
- the first portion 21a of the present embodiment has a recess 23A as in the fourth embodiment, and the corner portion of the recess 23A is curved.
- the electric field is concentrated on the square and discharge is likely to occur.
- the corner portion of the recess 23A is curved, the concentration of the electric field is suppressed, and the discharge on the inner surface of the recess 23A can be suppressed.
- FIG. 7 is an enlarged cross-sectional view of the periphery of the extension portion of the sixth embodiment.
- the present embodiment is the same as the fifth embodiment except that the configuration of the tubular member 30C is different. Therefore, the same reference numerals are given to the same configurations, and the description thereof will be omitted.
- the corners of the recess 23A are curved and the corners of the bottom surface 33A are curved as in the fifth embodiment.
- the corner portion of the bottom surface portion 33A has a curved surface shape along the corner portion of the recess 23A. Since the bottom surface 33A fits inside the recess 23A so that the outer surface of the bottom surface 33A and the inner surface of the recess 23A come into contact with each other, the inner surface of the recess 23A is covered and discharge can be suppressed.
- FIG. 8 is an enlarged cross-sectional view of the periphery of the extension portion of the seventh embodiment.
- the present embodiment is the same as the third embodiment except that the configuration of the tubular member 30D is different. Therefore, the same reference numerals are given to the same configurations, and the description thereof will be omitted.
- the tubular member 30C of the present embodiment the main body portion 31 and the extending portion 32 are separately formed.
- the main body 31 and the extension 32 may be made of an insulating material, and the main body 31 and the extension 32 may be the same material or different materials. Further, the main body portion 31 and the extending portion 32 may be fixed with an adhesive or the like.
- the end faces 31a and 32c of the main body 31 and the extension 32 facing each other intersect with a virtual plane orthogonal to the axial direction, respectively.
- the end surface 31a of the main body 31 and the end surface 32c of the extension 32 are both inclined surfaces of the tubular member 30D with respect to the axial direction.
- the end surface 31a of the main body 31 is an inclined surface facing outward in the radial direction
- the end surface 32c of the extending portion 32 is an inclined surface facing inward in the radial direction.
- the creepage distance from the internal space of the tubular member 30D through which the plasma generating gas flows to the inner peripheral surface of the first portion 21a and the inner peripheral surface of the second portion 21b becomes longer, and it becomes possible to suppress the discharge.
- FIG. 9 is an enlarged cross-sectional view of the periphery of the extension portion of the eighth embodiment.
- the present embodiment is the same as the seventh embodiment except that the configuration of the tubular member 30E is different. Therefore, the same reference numerals are given to the same configurations and the description thereof will be omitted.
- the tubular member 30E of the present embodiment has a portion in which the end faces of the main body portion 31 and the extending portion 32 facing each other are parallel to each other in the axial direction.
- the end surface 31a of the main body 31 and the end surface 32c of the extension 32 are both stepped surfaces.
- the end surface 31a of the main body 31 is a stepped surface that is high in the radial direction
- the end surface 32c of the extending portion 32 is a stepped surface that is high in the radial direction.
- the surface between the surface located outward in the radial direction and the surface located inward in the radial direction is a portion parallel to the axial direction.
- the creepage distance from the internal space of the tubular member 30E through which the plasma generating gas flows to the inner peripheral surface of the first portion 21a and the inner peripheral surface of the second portion 21b is further longer than that of the seventh embodiment, and discharge is suppressed. It becomes possible.
- the shape of the gas flow path 21 in the support 20 is not limited to the shape of each of the above embodiments.
- the first portion 21a is not limited to an annular shape, but may have a rectangular shape, a comb-shaped shape, a mianda shape, or the like.
- the positions of the second portion 21b are not limited to equal intervals, and may be randomly arranged.
- the third portion 21c and the fourth portion 21d can also be changed as appropriate.
- the shape of the tubular member 30 is not limited to a cylindrical shape, and may be a polygonal tubular shape or the like.
- the main body portion 31 and the extending portion 32 of the tubular member 30 may have the same shape or different shapes.
- the sample holder of the present disclosure has a plate-shaped substrate having a sample holding surface and a joint surface for joining the back surface of the substrate opposite to the sample holding surface, and a flow path extending to at least the joint surface. It is provided with a support provided with.
- the support has a first portion in which the flow path extends parallel to the joint surface, and a second portion in which the flow path is branched and connected to the first portion and extends in a direction perpendicular to the joint surface to open to the joint surface.
- the sample holder has a tubular main body portion located along the second portion and a tubular main body portion connected to the main body portion and having a tubular extending portion extending to the first portion. It is configured to have a shaped member.
- the tubular member since the tubular member has an extending portion, it is possible to suppress electric discharge in the supporting body.
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Nonlinear Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
10a 第1面
10b 第2面
11 貫通孔
20 支持体
20a 第1面
20b 第2面
21 ガス流路
21a 第1部分
21b 第2部分
21c 第3部分
21d 第4部分
22 底面
23 凹部
23A 凹部
30 筒状部材
30A 筒状部材
30B 筒状部材
30C 筒状部材
30D 筒状部材
30E 筒状部材
31 本体部
31a 端面
32 延出部
32A 延出部
32a 先端
32c 端面
33 底面部
33A 底面部
33a 内面
40 吸着電極
50 接合層
100 試料保持具
Claims (9)
- 試料保持面を有する板状の基体と、
前記基体の前記試料保持面とは反対側の裏面と接合する接合面を有し、少なくとも前記接合面にまで延びる流路が設けられた支持体であって、前記流路が、前記支持体の前記接合面に平行に延びる第1部分、および該第1部分に分岐接続し、前記接合面に垂直な方向に延びて、前記接合面に開口する第2部分を有する支持体と、
前記第2部分に沿って位置する筒状の本体部、および前記本体部に連なり、前記第1部分に延出する筒状の延出部を有する筒状部材と、を備える試料保持具。 - 前記延出部は、内部空間と前記第1部分とを連通させる貫通孔または切り欠きを有する、請求項1記載の試料保持具。
- 前記筒状部材は、前記延出部の先端側を塞ぐ底面部をさらに有する、請求項2記載の試料保持具。
- 前記第1部分は、前記第2部分との接続位置と反対側に、前記底面部が収まる凹部を有しており、前記底面部の内面は、前記第1部分の底面より前記接合面側に位置する、請求項3記載の試料保持具。
- 前記凹部の隅部が曲面状である、請求項4記載の試料保持具。
- 前記底面部の角部が曲面状である、請求項4または5記載の試料保持具。
- 前記本体部と、前記延出部とは、別体で構成されている、請求項1~6のいずれか1つに記載の試料保持具。
- 前記本体部と前記延出部の互いに対向する端面は、それぞれ軸線方向に直交する仮想平面と交差する、請求項7記載の試料保持具。
- 前記端面は、それぞれ前記軸線方向に平行な部分を有する、請求項8記載の試料保持具。
Priority Applications (4)
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JP2021561277A JP7303899B2 (ja) | 2019-11-25 | 2020-11-10 | 試料保持具 |
US17/777,890 US20220415691A1 (en) | 2019-11-25 | 2020-11-10 | Workpiece holding tool |
KR1020227016861A KR20220082907A (ko) | 2019-11-25 | 2020-11-10 | 시료 유지구 |
CN202080081297.2A CN114731122A (zh) | 2019-11-25 | 2020-11-10 | 试样保持件 |
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JP2019-212439 | 2019-11-25 | ||
JP2019212439 | 2019-11-25 |
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WO2021106554A1 true WO2021106554A1 (ja) | 2021-06-03 |
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PCT/JP2020/041937 WO2021106554A1 (ja) | 2019-11-25 | 2020-11-10 | 試料保持具 |
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US (1) | US20220415691A1 (ja) |
JP (1) | JP7303899B2 (ja) |
KR (1) | KR20220082907A (ja) |
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WO (1) | WO2021106554A1 (ja) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH0982683A (ja) * | 1995-09-12 | 1997-03-28 | Toshiba Corp | ドライエッチング装置 |
US20050105243A1 (en) * | 2003-11-17 | 2005-05-19 | Samsung Electronics Co., Ltd | Electrostatic chuck for supporting a substrate |
JP2008117850A (ja) * | 2006-11-01 | 2008-05-22 | Hitachi High-Technologies Corp | ウエハ載置用電極 |
WO2009005921A2 (en) * | 2007-06-29 | 2009-01-08 | Praxair Technology, Inc. | Polyceramic e-chuck |
WO2018216797A1 (ja) * | 2017-05-25 | 2018-11-29 | 日本碍子株式会社 | ウエハ用サセプタ |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
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US5720818A (en) * | 1996-04-26 | 1998-02-24 | Applied Materials, Inc. | Conduits for flow of heat transfer fluid to the surface of an electrostatic chuck |
US7848076B2 (en) * | 2007-07-31 | 2010-12-07 | Applied Materials, Inc. | Method and apparatus for providing an electrostatic chuck with reduced plasma penetration and arcing |
JP2010182763A (ja) * | 2009-02-04 | 2010-08-19 | Hitachi High-Technologies Corp | プラズマ処理装置 |
JP5633766B2 (ja) | 2013-03-29 | 2014-12-03 | Toto株式会社 | 静電チャック |
-
2020
- 2020-11-10 US US17/777,890 patent/US20220415691A1/en active Pending
- 2020-11-10 WO PCT/JP2020/041937 patent/WO2021106554A1/ja active Application Filing
- 2020-11-10 CN CN202080081297.2A patent/CN114731122A/zh active Pending
- 2020-11-10 JP JP2021561277A patent/JP7303899B2/ja active Active
- 2020-11-10 KR KR1020227016861A patent/KR20220082907A/ko not_active Application Discontinuation
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0982683A (ja) * | 1995-09-12 | 1997-03-28 | Toshiba Corp | ドライエッチング装置 |
US20050105243A1 (en) * | 2003-11-17 | 2005-05-19 | Samsung Electronics Co., Ltd | Electrostatic chuck for supporting a substrate |
JP2008117850A (ja) * | 2006-11-01 | 2008-05-22 | Hitachi High-Technologies Corp | ウエハ載置用電極 |
WO2009005921A2 (en) * | 2007-06-29 | 2009-01-08 | Praxair Technology, Inc. | Polyceramic e-chuck |
WO2018216797A1 (ja) * | 2017-05-25 | 2018-11-29 | 日本碍子株式会社 | ウエハ用サセプタ |
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CN114731122A (zh) | 2022-07-08 |
JPWO2021106554A1 (ja) | 2021-06-03 |
KR20220082907A (ko) | 2022-06-17 |
JP7303899B2 (ja) | 2023-07-05 |
US20220415691A1 (en) | 2022-12-29 |
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