WO2021095461A1 - 圧電素子 - Google Patents
圧電素子 Download PDFInfo
- Publication number
- WO2021095461A1 WO2021095461A1 PCT/JP2020/039534 JP2020039534W WO2021095461A1 WO 2021095461 A1 WO2021095461 A1 WO 2021095461A1 JP 2020039534 W JP2020039534 W JP 2020039534W WO 2021095461 A1 WO2021095461 A1 WO 2021095461A1
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- Prior art keywords
- piezoelectric
- layer
- electrode
- piezoelectric element
- piezoelectric layer
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Images
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
- H04R17/005—Piezoelectric transducers; Electrostrictive transducers using a piezoelectric polymer
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
- H04R17/02—Microphones
- H04R17/025—Microphones using a piezoelectric polymer
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/852—Composite materials, e.g. having 1-3 or 2-2 type connectivity
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/875—Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/88—Mounts; Supports; Enclosures; Casings
- H10N30/883—Further insulation means against electrical, physical or chemical damage, e.g. protective coatings
Definitions
- the present invention relates to a piezoelectric element.
- the speakers used in these thin displays are also required to be lighter and thinner. Further, in a flexible display having flexibility, flexibility is also required in order to integrate into the flexible display without impairing lightness and flexibility. As such a lightweight, thin and flexible speaker, it is considered to adopt a sheet-shaped piezoelectric element (electroacoustic conversion film) having a property of expanding and contracting in response to an applied voltage.
- a sheet-shaped piezoelectric element electroacoustic conversion film
- Patent Document 1 has a piezoelectric layer having dielectric property, two thin film electrodes formed on both sides of the piezoelectric layer, and two protective layers formed on each of the two thin film electrodes.
- An electroacoustic conversion film in which a piezoelectric layer, two thin film electrodes, and two protective layers have the same shape and are bonded to each other, a piezoelectric layer, two thin film electrodes, and two. Described is an electroacoustic conversion film in which the two protective layers overlap each other in the stacking direction and the piezoelectric layer and the two thin film electrodes do not adhere to each other.
- Patent Document 1 when the composition to be the piezoelectric layer is applied onto the thin film electrode, a non-adhesive portion that is not adhered to the piezoelectric layer is formed on the thin film electrode by providing a region to which the composition is not applied. To do. It is described that this unbonded portion is used as an electrode lead-out portion and is connected to wiring.
- the sheet-shaped piezoelectric element is required to be thin in order to be used in a flexible display or the like.
- a piezoelectric element having an electrode extraction portion as described in Patent Document 1 a conductive foil extending the electrode extraction portion is connected to the electrode extraction portion, or a thin film electrode of the electrode extraction portion is the other.
- An insulating sheet or the like for preventing contact with the thin film electrode is attached. Therefore, there is a problem that the thickness in the vicinity of the electrode lead-out portion becomes thick. Further, since the portion in the vicinity of the electrode lead-out portion becomes thicker than other regions and the thickness becomes non-uniform, there is a possibility that it becomes difficult to adhere the piezoelectric element when laminating it on another article.
- Patent Document 1 when the composition to be the piezoelectric layer is applied onto the thin film electrode, a region where the composition is not applied is provided so that the thin film electrode is provided with an unbonded portion which is not adhered to the piezoelectric layer. Although it is formed, at that time, in order for the applied composition to maintain a predetermined layered state, the composition needs to be increased in viscosity to some extent. However, if the viscosity of the composition is too high, the edge portion 121 of the composition layer (piezoelectric layer) 120 may be in a raised state as shown in FIG.
- the sheet-shaped piezoelectric element is desired to be manufactured by so-called roll-to-roll (hereinafter, also referred to as RtoR) from the viewpoint of manufacturing efficiency and the like.
- RtoR roll-to-roll
- a long sheet-like material is sent out from a roll on which a long sheet-like material is wound, and various treatments are continuously performed while transporting the sheet-like material, and after the treatment.
- This is a manufacturing method in which a sheet-like material is wound on a roll.
- the edge portion 121 of the composition layer (piezoelectric layer) 120 when the edge portion 121 of the composition layer (piezoelectric layer) 120 is in a raised state, the edge portion 121 is raised when the sheet-like material after the composition layer 120 is applied is wound up. There is a risk of stacking and a large difference in thickness from other areas, resulting in winding failure.
- the thin film electrode may be deformed when the thin film electrode and the laminated body of the protective layer are laminated on the upper portion.
- An object of the present invention is to solve such a problem of the prior art, that the thickness of the piezoelectric element can be made thin and uniform, and winding failure is unlikely to occur during manufacturing, and the thin film electrode. It is an object of the present invention to provide a piezoelectric element which is less likely to be deformed.
- a piezoelectric element having a piezoelectric layer, electrode layers formed on both sides of the piezoelectric layer, and a protective layer laminated on the surface of the electrode layer opposite to the surface on the piezoelectric layer side.
- the electrode layer has an exposed portion where the piezoelectric layer is not formed at least at a part of the end portion.
- the piezoelectric layer is a piezoelectric element having a gradually decreasing portion whose thickness gradually decreases toward the exposed portion at an end portion adjacent to the exposed portion.
- a piezoelectric element in which the thickness of the piezoelectric element can be made thin and uniform, winding failure is unlikely to occur during manufacturing, and deformation of the thin film electrode is unlikely to occur.
- FIG. 5 is a cross-sectional view taken along the line AA of the piezoelectric element of FIG. It is a figure which shows the part of the cross section of the piezoelectric layer of FIG. 1 enlarged. It is sectional drawing which shows typically an example of the piezoelectric element of this invention. It is sectional drawing which shows typically an example of the piezoelectric element of this invention. It is sectional drawing which shows typically an example of the piezoelectric element of this invention. It is sectional drawing which shows typically an example of the piezoelectric element of this invention. It is sectional drawing which shows typically an example of the piezoelectric element of this invention. It is a conceptual diagram for demonstrating an example of the manufacturing method of a piezoelectric element.
- the description of the constituent elements described below may be based on typical embodiments of the present invention, but the present invention is not limited to such embodiments.
- the numerical range represented by using "-" means a range including the numerical values before and after "-" as the lower limit value and the upper limit value.
- the piezoelectric element of the present invention is A piezoelectric element having a piezoelectric layer, electrode layers formed on both sides of the piezoelectric layer, and a protective layer laminated on the surface of the electrode layer opposite to the surface on the piezoelectric layer side.
- the electrode layer has an exposed portion where the piezoelectric layer is not formed at least at a part of the end portion.
- the piezoelectric layer is a piezoelectric element having a gradually decreasing portion whose thickness gradually decreases toward the exposed portion at an end portion adjacent to the exposed portion.
- FIG. 1 shows a plan view schematically showing an example of the piezoelectric element of the present invention.
- FIG. 2 shows a cross-sectional view taken along the line AA of the piezoelectric element of FIG.
- FIG. 3 shows an enlarged view of a part of the sectional view taken along line BB of the piezoelectric element of FIG.
- the piezoelectric element 10 shown in FIGS. 1 to 3 has a piezoelectric layer 20 which is a sheet-like material having piezoelectricity, a lower electrode 24 laminated on one surface of the piezoelectric layer 20, and a lower electrode laminated on the lower electrode 24.
- the piezoelectric layer 20 contains the piezoelectric particles 36 in the matrix 34 containing the polymer material (see FIG. 2).
- the matrix 34 and the piezoelectric particles 36 in the piezoelectric layer 20 are not shown.
- the lower electrode 24 and the upper electrode 26 are the electrode layers in the present invention.
- the lower protective layer 28 and the upper protective layer 30 are protective layers in the present invention.
- the piezoelectric element 10 (piezoelectric layer 20) is polarized in the thickness direction as a preferred embodiment.
- the lower electrode 24 and the lower protective layer 28 project outward (downward in FIG. 1) in a convex shape at the lower left end in FIG. It has a lower drawer 29.
- the upper electrode 26 and the upper protective layer 30 project outward (downward in FIG. 1) in a convex shape from the upper electrode 26 and the upper protective layer 30 at the lower right end in FIG. Has.
- the piezoelectric layer 20 is not formed on the electrode layers of the lower drawer portion 29 and the upper drawer portion 31, respectively, and the electrode layer is exposed.
- the lower drawer portion 29 and the upper drawer portion 31 are exposed portions in the present invention.
- the thickness of the piezoelectric layer 20 gradually decreases toward the exposed portion at the exposed portion, that is, the end portion adjacent to the lower drawer portion 29 and the upper drawer portion 31 (in FIG. 3). , A region of width indicated by W). Hereinafter, this region is referred to as a gradual reduction portion.
- the width of the surface in contact with the lower electrode 24 is larger than the width of the surface in contact with the upper electrode 26, and the end surface is inclined. You can also.
- the gradual reduction portion has a shape that curves outward in a convex shape when viewed in a cross section in the direction in which the thickness gradually decreases, but the shape is not limited to this, and is linear. It may have a concavely curved shape.
- the thickness of the piezoelectric layer 20 is outside in the entire area of the end side (the lower side in FIG. 1) having the lower drawer portion 29 and the upper drawer portion 31. It is gradually decreasing toward (having a gradual decrease part). Further, on the side facing the end side (the upper side in FIG. 1), the piezoelectric layer 20 may or may not have a gradually decreasing portion. Further, in the illustrated example, on the side side adjacent to the end side having the lower drawer portion 29 and the upper drawer portion 31 (both end sides in the left-right direction in FIG. 1), as shown in FIG. 2, the piezoelectric layer 20 is gradually reduced. Does not have. That is, in the left-right direction of FIG. 1, the width of the surface in contact with the lower electrode 24 is substantially the same as the width of the surface in contact with the upper electrode 26.
- the conductive sheet 40 is laminated on the lower electrode 24 of the lower drawer portion 29. Further, as a preferred embodiment, the conductive sheet 40 is provided so as to be folded back in the protruding direction of the lower drawer portion 29 so as to sandwich the lower electrode 24 and the lower protective layer 28. Similarly, a conductive sheet 42 is laminated on the upper electrode 26 of the upper drawer portion 31. Further, as a preferred embodiment, the conductive sheet 42 is provided so as to be folded back in the protruding direction of the upper drawer portion 31 so as to sandwich the upper electrode 26 and the upper protective layer 30.
- the conductive sheets 40 and 42 are sheet-like materials formed of a conductive metal material such as copper foil. Further, the conductive sheets 40 and 42 may have an adhesive layer having conductivity, and may be adhered to the lower drawer portion 29 and the upper drawer portion 31 via the adhesive layer. Copper, aluminum, gold, silver and the like are preferably exemplified as the materials of the conductive sheets 40 and 42.
- an insulating member 44 is laminated on a part of the lower electrode 24 of the lower drawer portion 29, and the insulating member 44 is laminated on a part of the upper electrode 26 of the upper drawer portion 31. Is laminated with insulating members 46.
- the insulating member 44 is provided so as to cover the gradually decreasing portion of the piezoelectric layer 20 from the region adjacent to the piezoelectric layer 20 (gradual reduction portion) of the lower electrode 24 of the lower drawing portion 29. ..
- the insulating member 44 includes the entire area of the lower drawer portion 29 in the direction orthogonal to the protrusion of the lower drawer portion 29 in the surface direction (hereinafter, also referred to as the width direction in the left-right direction in FIG. 1). Further, in the illustrated example, as a preferred embodiment, the insulating member 46 has an upper electrode 26 from a region adjacent to the gradually decreasing portion of the upper electrode 26 of the upper drawer portion 31 to a position where the piezoelectric layer 20 and the upper electrode 26 are in contact with each other. It is provided to cover it. The insulating member 46 includes the entire area of the upper drawer portion 31 in the direction orthogonal to the protrusion of the upper drawer portion 31 in the surface direction (hereinafter, also referred to as the width direction in the left-right direction in FIG. 1).
- the insulating members 44 and 46 are sheet-like materials formed of an insulating material such as a polyimide tape. Alternatively, the insulating members 44 and 46 may be insulating layers formed by applying and curing a liquid insulating material. As the materials of the insulating members 44 and 46, PI (polyimide), PET (polyethylene terephthalate), PEN (polyethylene naphthalate), PP (polypropylene) and the like are preferably exemplified.
- both electrodes and the protective layer which are thin films, can be reinforced, and wiring and connection by soldering or the like can be facilitated.
- the electrode and the protective layer are more preferably reinforced, and soldering for connecting the wiring is performed. You can also select the surface.
- the lower electrode 24 and the upper electrode 26 can be insulated from.
- the insulating member 46 in the configuration in which the upper electrode 26 is pulled out by the upper pull-out portion 31, even if the upper pull-out portion 31 hangs down and comes into contact with the end face of the piezoelectric element, the upper electrode 26 and the lower electrode 24 Can be insulated. That is, by having such insulating members 44 and 46, the insulating property between the lower electrode 24 and the upper electrode 26 can be ensured, and the electrode layer can be pulled out as described above.
- the sheet-shaped piezoelectric element is required to be thin in order to be used in a flexible display or the like.
- the conductive foil extending the electrode extraction portion is connected to the electrode extraction portion, or the thin film electrode of the electrode extraction portion comes into contact with the other thin film electrode.
- An insulating sheet or the like is attached to prevent this. Therefore, there is a problem that the thickness in the vicinity of the electrode lead-out portion becomes thick. In particular, when a part of the insulating sheet is sandwiched between the electrode layer and the piezoelectric layer, the thickness tends to be large. Further, since the portion near the electrode lead-out portion becomes thicker than the other regions and the thickness becomes non-uniform, there is a problem that it may be difficult to adhere the piezoelectric element when laminating it on another article. ..
- the above-mentioned extraction portion is formed by providing a region to which the composition is not applied when the composition to be the piezoelectric layer is applied onto the electrode layer. At that time, in order for the applied composition to maintain a predetermined layered state, the composition needs to have a high viscosity to some extent. However, if the viscosity of the composition is too high, the edge portion 121 of the composition layer (piezoelectric layer) 120 may be in a raised state as shown in FIG.
- the sheet-shaped piezoelectric element is desired to be manufactured by so-called roll-to-roll (hereinafter, also referred to as RtoR) from the viewpoint of manufacturing efficiency and the like.
- roll-to-roll hereinafter, also referred to as RtoR
- the edge portion 121 of the composition layer (piezoelectric layer) 120 is in a raised state
- the raised edges 121 are piled up when the sheet-like material after the composition layer 120 is applied is wound up.
- the electrode layer may be deformed when the laminated body (sheet-like material) of the upper electrode and the upper protective layer is laminated. ..
- the piezoelectric element of the present invention has a gradual reduction portion in which the thickness of the piezoelectric layer gradually decreases toward the exposed portion at an end portion adjacent to the exposed portion. Since it has a gradual reduction portion, when a conductive sheet and / or an insulating member is provided in the extraction portion (exposed portion), each member is arranged in the space between the electrode layer (upper electrode) of the gradual reduction portion and the piezoelectric layer. Therefore, it is possible to prevent the thickness in the vicinity of the drawer portion from becoming thicker than in other regions. Further, since it is possible to prevent the portion in the vicinity of the drawing portion from becoming thicker than the other region, it is possible to facilitate the adhesion when the piezoelectric element is laminated on another article.
- the composition to be the piezoelectric layer when the composition to be the piezoelectric layer is applied onto the electrode layer at the time of manufacturing the piezoelectric element by RtoR, it is applied so as to form a gradual reduction portion, so that the lamination after application is performed. Since there is no swelling at the edge when the body is wound up, it is possible to suppress the occurrence of winding failure. Further, since the edge portion of the composition layer (piezoelectric layer) does not bulge, it is possible to suppress the deformation of the upper electrode when the laminated body (sheet-like material) of the upper electrode and the upper protective layer is laminated.
- the width of the gradually decreasing portion in the direction in which the thickness gradually decreases toward the exposed portion is preferably 0.1 mm to 0.8 mm, more preferably 0.2 mm to 0.5 mm.
- the width (direction orthogonal to the protruding direction of the lower drawer portion 29 in the plane direction, FIG. 1 left-right direction) and length (direction orthogonal to the width direction) of the lower drawer portion 29 and the upper drawer portion 31 are determined by the piezoelectric element 10. At the time of mounting, the size at which the electrodes can be pulled out and the conductivity with the outside can be ensured may be appropriately set. Further, as the shape of the lower pull-out portion 29 and the upper pull-out portion 31, various shapes in which the electrode can be pulled out can be used in addition to the rectangle shown in the illustrated example.
- the lower drawer portion 29 and the upper drawer portion 31 are arranged so that their positions in the plane direction do not overlap, as a preferable embodiment. As a result, it is possible to prevent the lower electrode 24 or the conductive sheet 40 of the lower drawer portion 29 from coming into contact with the upper electrode 26 or the conductive sheet 42 of the upper drawer portion 31 to cause a short circuit.
- the lower drawer portion 29 and the upper drawer portion 31 may be arranged at positions where the positions in the surface direction overlap.
- the insulating member 48 that covers the surface of the lower drawer 29 on the lower electrode 24 side is arranged, and the insulating member 50 that covers the surface of the upper drawer 31 on the upper electrode 26 side is arranged. Is preferably arranged.
- the insulating member 48 is arranged on the surface side of the conductive sheet 40 facing the upper electrode 26.
- the insulating member 50 is arranged on the surface side of the conductive sheet 42 facing the lower electrode 24.
- the wiring U may be connected to the surface other than the area covered by the insulating member.
- the insulating member 48 is arranged on the surface side of the conductive sheet 40 arranged in the lower drawer portion 29 facing the upper electrode 26, and the conductive sheet is arranged in the upper drawer portion 31.
- the insulating member 50 is arranged on the surface side of the 42 facing the lower electrode 24, but the present invention is not limited to this, and the lower electrode 24 or the conductive sheet 40 of the lower drawer 29 and the upper drawer 31 are provided. It suffices if it is possible to prevent short-circuiting due to contact with the upper electrode 26 or the conductive sheet 42 of the above.
- the insulating member 48 is arranged so as to cover the surface of the folded conductive sheet 40 facing outward (the surface opposite to the lower drawer portion 29 side).
- the insulating member 50 may be arranged so as to cover the surface of the folded conductive sheet 42 facing outward (the surface opposite to the upper drawer portion 31 side).
- the wiring U may be connected to the inner surface of the folded conductive sheet.
- the lower drawer portion 29 and the upper drawer portion 31 are provided on the same end side (lower side in FIG. 1), but the present invention is not limited to this, and the lower portion is not limited to this.
- the drawer portion 29 and the upper drawer portion 31 may be provided on different ends.
- the lower drawer portion 29 is formed at the lower end side in FIG. 1
- the upper drawer portion 31 is formed at the end facing the end edge, that is, at the upper end edge in FIG. May be.
- the conductive sheets 40 and 42 can be used in various shapes in which the electrodes can be pulled out, in addition to the rectangle shown in the illustrated example. That is, the size and shape of the conductive sheets 40 and 42 can ensure conductivity with the lower drawer portion 29 and the upper drawer portion 31 according to the size and shape of the lower drawer portion 29 and the upper drawer portion 31. The size and shape that can be connected to the wiring at the time of mounting may be appropriately set.
- the conductive sheets 40 and 42 are electrically connected to the surface of the lower electrode 24 of the lower drawer 29 and the surface of the upper electrode 26 of the upper drawer 31 without folding back.
- the conductive sheets 40 and 42 may be laminated so as to be used.
- the insulating member 48 is a surface of the conductive sheet 40 arranged in the lower drawer portion 29 facing the upper electrode 26. Placed on the side. Further, the wiring U is connected to the surface of the conductive sheet 40 opposite to the surface on which the insulating member 48 is arranged. Similarly, the insulating member 50 is arranged on the surface side of the conductive sheet 42 arranged in the upper drawer portion 31 facing the lower electrode 24. Further, the wiring U is connected to the surface of the conductive sheet 42 opposite to the surface on which the insulating member 50 is arranged.
- the gradual reduction portion is formed in the entire area of the piezoelectric layer 20 on the end side having the lower drawer portion 29 and the upper drawer portion 31, but is not limited to this, and the lower portion is formed.
- the configuration may be such that only the region portion adjacent to the drawer portion 29 and the upper drawer portion 31 has a gradual reduction portion.
- the gradual reduction portion is formed on the end side of the piezoelectric layer 20 having the lower drawer portion 29 and the upper drawer portion 31, but is not limited to this, and is formed on the other end side.
- a gradual reduction portion may be formed on the entire circumference of the end portion of the piezoelectric layer 20.
- the conductive sheet 40 arranged in the lower drawer portion 29 and the conductive sheet 42 arranged in the upper drawer portion 31 each have two folded portions.
- the configurations are such that the parts are separated from each other, but the present invention is not limited to this.
- the conductive sheet 40 arranged in the lower drawer portion 29 and the conductive sheet 42 arranged in the upper drawer portion 31 are in contact with each other at two portions sandwiching the folded portion. It may be configured as such.
- the conductive sheets 40 and 42 have two portions sandwiching the folded-back portion. May be in contact with each other.
- such a piezoelectric element 10 generates (reproduces) sound due to vibration in response to an electric signal in various acoustic devices (audio equipment) such as speakers, microphones, and pickups used in musical instruments such as guitars. It is also used to convert sound vibrations into electrical signals.
- the piezoelectric element can also be used for a pressure sensitive sensor, a power generation element, and the like.
- the piezoelectric element 10 when used for a speaker, it may be used as a sound generated by the vibration of the film-shaped piezoelectric element 10 itself.
- the piezoelectric element 10 may be attached to a diaphragm and used as an exciter that vibrates the diaphragm by the vibration of the piezoelectric element 10 to generate sound.
- each component of the piezoelectric element of the present invention will be described.
- the piezoelectric layer 20 may be a layer made of a known piezoelectric material.
- the piezoelectric layer 20 is preferably a polymer composite piezoelectric body containing the piezoelectric particles 36 in the matrix 34 containing the polymer material.
- the material of the matrix 34 (matrix and binder) of the polymer composite piezoelectric body constituting the piezoelectric layer 20 it is preferable to use a polymer material having viscoelasticity at room temperature.
- the piezoelectric element 10 of the present invention is suitably used for a speaker having flexibility such as a speaker for a flexible display.
- the polymer composite piezoelectric body (piezoelectric layer 20) used for the flexible speaker preferably has the following requirements. Therefore, it is preferable to use a polymer material having viscoelasticity at room temperature as a material satisfying the following requirements.
- room temperature refers to a temperature range of about 0 to 50 ° C.
- (Ii) Sound quality A speaker vibrates piezoelectric particles at a frequency in the audio band of 20 Hz to 20 kHz, and the vibration energy causes the entire polymer composite piezoelectric body (piezoelectric element) to vibrate as a unit, thereby reproducing sound. To. Therefore, in order to increase the transmission efficiency of vibration energy, the polymer composite piezoelectric material is required to have an appropriate hardness. Further, if the frequency characteristic of the speaker is smooth, the amount of change in sound quality when the minimum resonance frequency changes with the change in curvature also becomes small. Therefore, the loss tangent of the polymer composite piezoelectric material is required to be moderately large.
- the polymer composite piezoelectric material is required to behave hard against vibrations of 20 Hz to 20 kHz and soft against vibrations of several Hz or less. Further, the loss tangent of the polymer composite piezoelectric body is required to be appropriately large for vibrations of all frequencies of 20 kHz or less.
- polymer solids have a viscoelastic relaxation mechanism, and large-scale molecular motion decreases (Relaxation) or maximizes loss elastic modulus (absorption) as the temperature rises or the frequency decreases.
- Relaxation large-scale molecular motion decreases
- absorption loss elastic modulus
- main dispersion the relaxation caused by the micro-Brownian motion of the molecular chain in the amorphous region is called main dispersion, and a very large relaxation phenomenon is observed.
- the temperature at which this main dispersion occurs is the glass transition point (Tg), and the viscoelastic relaxation mechanism appears most prominently.
- the polymer composite piezoelectric body (piezoelectric layer 20), by using a polymer material having a glass transition point at room temperature, in other words, a polymer material having viscoelasticity at room temperature, for vibration of 20 Hz to 20 kHz.
- a polymer composite piezoelectric material that is hard and behaves softly against slow vibrations of several Hz or less is realized.
- the polymer material having viscoelasticity at room temperature various known materials can be used as long as they have dielectric properties.
- a polymer material having a maximum loss tangent value of 0.5 or more at a frequency of 1 Hz by a dynamic viscoelasticity test at room temperature, that is, 0 ° C. to 50 ° C. is used.
- the polymer material preferably has a storage elastic modulus (E') at a frequency of 1 Hz measured by dynamic viscoelasticity measurement of 100 MPa or more at 0 ° C. and 10 MPa or less at 50 ° C.
- E' storage elastic modulus
- the polymer material has a relative permittivity of 10 or more at 25 ° C.
- a voltage is applied to the polymer composite piezoelectric body, a higher electric field is applied to the piezoelectric particles in the matrix, so that a large amount of deformation can be expected.
- the polymer material has a relative permittivity of 10 or less at 25 ° C.
- polymer material satisfying such conditions examples include cyanoethylated polyvinyl alcohol (cyanoethylated PVA), polyvinyl acetate, polyvinylidene chloride core acrylonitrile, polystyrene-vinyl polyisoprene block copolymer, polyvinyl methyl ketone, and polybutyl. Methacrylate and the like are exemplified. Further, as these polymer materials, commercially available products such as Hybler 5127 (manufactured by Kuraray Co., Ltd.) can also be preferably used.
- Hybler 5127 manufactured by Kuraray Co., Ltd.
- the polymer material it is preferable to use a material having a cyanoethyl group, and it is particularly preferable to use cyanoethylated PVA.
- these polymer materials may use only 1 type, and may use a plurality of types in combination (mixing).
- a plurality of polymer materials may be used in combination, if necessary. That is, in addition to the polymer material having viscoelasticity at room temperature, other dielectric polymer materials may be added to the matrix 34 for the purpose of adjusting the dielectric properties and mechanical properties. ..
- dielectric polymer material examples include polyvinylidene fluoride, vinylidene fluoride-tetrafluoroethylene copolymer, vinylidene fluoride-trifluoroethylene copolymer, and vinylidene fluoride-trifluoroethylene copolymer.
- fluoropolymers such as polyvinylidene fluoride-tetrafluoroethylene copolymer, vinylidene cyanide-vinyl acetate copolymer, cyanoethyl cellulose, cyanoethyl hydroxysaccharose, cyanoethyl hydroxycellulose, cyanoethyl hydroxypurrane, cyanoethyl methacrylate, cyanoethyl acrylate, cyanoethyl.
- Cyano groups such as hydroxyethyl cellulose, cyanoethyl amylose, cyanoethyl hydroxypropyl cellulose, cyanoethyl dihydroxypropyl cellulose, cyanoethyl hydroxypropyl amylose, cyanoethyl polyacrylamide, cyanoethyl polyacrylate, cyanoethyl pullulan, cyanoethyl polyhydroxymethylene, cyanoethyl glycidol pullulan, cyanoethyl saccharose and cyanoethyl sorbitol.
- a polymer having a cyanoethyl group a synthetic rubber such as a nitrile rubber or a chloroprene rubber, and the like are exemplified.
- a polymer material having a cyanoethyl group is preferably used.
- the dielectric polymer material added in addition to the polymer material having viscoelasticity at room temperature such as cyanoethylated PVA is not limited to one type, and a plurality of types are added. You may.
- the matrix 34 contains a thermoplastic resin such as vinyl chloride resin, polyethylene, polystyrene, methacrylic resin, polybutene, and isobutylene, and phenol for the purpose of adjusting the glass transition point.
- a resin, a urea resin, a melamine resin, an alkyd resin, and a thermosetting resin such as mica may be added.
- a tackifier such as rosin ester, rosin, terpene, terpene phenol, and petroleum resin may be added.
- the amount of the material other than the viscoelastic polymer material such as cyanoethylated PVA added to the matrix 34 of the piezoelectric layer 20 is not particularly limited, but is 30% by mass or less in proportion to the matrix 34. It is preferable to do so. As a result, the characteristics of the polymer material to be added can be exhibited without impairing the viscoelastic relaxation mechanism in the matrix 34, so that the dielectric constant can be increased, the heat resistance can be improved, and the adhesion to the piezoelectric particles 36 and the electrode layer can be improved. In this respect, favorable results can be obtained.
- the piezoelectric layer 20 is a polymer composite piezoelectric body containing piezoelectric particles 36 in such a matrix 34.
- the piezoelectric particles 36 are made of ceramic particles having a perovskite-type or wurtzite-type crystal structure. Examples of the ceramic particles constituting the piezoelectric particles 36 include lead zirconate titanate (PZT), lead lanthanate lanthanate titanate (PLZT), barium titanate (BaTIO 3 ), zinc oxide (ZnO), and zinc oxide (ZnO). Examples thereof include a solid solution (BFBT) of barium titanate and bismuth ferrite (BiFe 3). Only one type of these piezoelectric particles 36 may be used, or a plurality of types may be used in combination (mixed).
- the particle size of the piezoelectric particles 36 is not limited, and may be appropriately selected depending on the size and application of the polymer composite piezoelectric body (piezoelectric element 10).
- the particle size of the piezoelectric particles 36 is preferably 1 to 10 ⁇ m. By setting the particle size of the piezoelectric particles 36 in this range, it is possible to obtain preferable results in that the polymer composite piezoelectric body (piezoelectric element 10) can achieve both high piezoelectric characteristics and flexibility.
- the piezoelectric particles 36 in the piezoelectric layer 20 are uniformly and regularly dispersed in the matrix 34, but the present invention is not limited to this. That is, the piezoelectric particles 36 in the piezoelectric layer 20 may be irregularly dispersed in the matrix 34 as long as they are preferably uniformly dispersed.
- the amount ratio of the matrix 34 and the piezoelectric particles 36 in the piezoelectric layer 20 is not limited, and the size and thickness of the piezoelectric layer 20 in the plane direction and the polymer It may be appropriately set according to the use of the composite piezoelectric body, the characteristics required for the polymer composite piezoelectric body, and the like.
- the volume fraction of the piezoelectric particles 36 in the piezoelectric layer 20 is preferably 30 to 80%, more preferably 50% or more, and therefore more preferably 50 to 80%.
- the thickness of the piezoelectric layer 20 is not limited, and may be appropriately set according to the application of the polymer composite piezoelectric body, the characteristics required for the polymer composite piezoelectric body, and the like.
- the thickness of the piezoelectric layer 20 is preferably 10 to 300 ⁇ m, more preferably 20 to 200 ⁇ m, and even more preferably 30 to 150 ⁇ m.
- the piezoelectric element 10 of the illustrated example has a lower electrode 24 on one surface of the piezoelectric layer 20, a lower protective layer 28 on the surface thereof, and an upper portion on the other surface of the piezoelectric layer 20. It has an electrode 26 and has an upper protective layer 30 on its surface.
- the upper electrode 26 and the lower electrode 24 form an electrode pair.
- the piezoelectric element 10 has a configuration in which both sides of the piezoelectric layer 20 are sandwiched between electrode pairs, that is, the upper electrode 26 and the lower electrode 24, and the laminate is sandwiched between the lower protective layer 28 and the upper protective layer 30. Have. In this way, in the piezoelectric element 10, the region held by the upper electrode 26 and the lower electrode 24 is expanded and contracted according to the applied voltage.
- the lower protective layer 28 and the upper protective layer 30 cover the upper electrode 26 and the lower electrode 24, and also play a role of imparting appropriate rigidity and mechanical strength to the piezoelectric layer 20. That is, in the piezoelectric element 10, the piezoelectric layer 20 composed of the matrix 34 and the piezoelectric particles 36 exhibits extremely excellent flexibility with respect to slow bending deformation, but on the other hand, depending on the application, rigidity or Mechanical strength may be insufficient.
- the piezoelectric element 10 is provided with a lower protective layer 28 and an upper protective layer 30 to supplement the piezoelectric element 10.
- the lower protective layer 28 and the upper protective layer 30 are not limited, and various sheet-like materials can be used, and as an example, various resin films are preferably exemplified.
- various resin films are preferably exemplified.
- PET polyethylene terephthalate
- PP polypropylene
- PS polystyrene
- PC polycarbonate
- PPS polyphenylene sulfide
- PMMA polymethylmethacrylate
- PET polyethylene terephthalate
- PET polypropylene
- PS polystyrene
- PC polycarbonate
- PPS polyphenylene sulfide
- PMMA polymethylmethacrylate
- PEI Polyetherimide
- PI Polystyrene
- PEN Polyethylene Naphthalate
- TAC Triacetyl Cellulose
- a resin film made of a cyclic olefin resin or the like are preferably used.
- the thickness of the lower protective layer 28 and the upper protective layer 30 there is also no limitation on the thickness of the lower protective layer 28 and the upper protective layer 30. Further, the thicknesses of the lower protective layer 28 and the upper protective layer 30 are basically the same, but may be different. Here, if the rigidity of the lower protective layer 28 and the upper protective layer 30 is too high, not only the expansion and contraction of the piezoelectric layer 20 is restricted, but also the flexibility is impaired. Therefore, the thinner the lower protective layer 28 and the upper protective layer 30, the more advantageous it is, except when mechanical strength and good handleability as a sheet-like material are required.
- the thickness of the lower protective layer 28 and the upper protective layer 30 is preferably 3 ⁇ m to 50 ⁇ m, more preferably 4 ⁇ m to 20 ⁇ m, and even more preferably 4 ⁇ m to 10 ⁇ m.
- the thickness of the lower protective layer 28 and the upper protective layer 30 is twice or less the thickness of the piezoelectric layer 20, it is possible to ensure both rigidity and appropriate flexibility. In terms of points, favorable results can be obtained.
- the thickness of the piezoelectric layer 20 is 50 ⁇ m and the lower protective layer 28 and the upper protective layer 30 are made of PET
- the thickness of the lower protective layer 28 and the upper protective layer 30 is preferably 100 ⁇ m or less, more preferably 50 ⁇ m or less. , 25 ⁇ m or less is more preferable.
- a lower electrode 24 is formed between the piezoelectric layer 20 and the lower protective layer 28, and an upper electrode 26 is formed between the piezoelectric layer 20 and the upper protective layer 30.
- the lower electrode 24 and the upper electrode 26 are provided to apply a driving voltage to the piezoelectric layer 20.
- the materials for forming the lower electrode 24 and the upper electrode 26 are not limited, and various conductors can be used. Specifically, alloys such as carbon, palladium, iron, tin, aluminum, nickel, platinum, gold, silver, copper, titanium, chromium and molybdenum, laminates and composites of these metals and alloys, and Examples thereof include indium tin oxide. Among them, copper, aluminum, gold, silver, platinum, and indium tin oxide are preferably exemplified as the lower electrode 24 and the upper electrode 26.
- a vapor phase deposition method such as vacuum deposition and sputtering, a film formation by plating, and a foil formed of the above materials
- Various known methods such as a method of sticking can be used.
- thin films such as copper and aluminum formed by vacuum deposition are preferably used as the lower electrode 24 and the upper electrode 26 because the flexibility of the piezoelectric element 10 can be ensured.
- a copper thin film produced by vacuum deposition is preferably used.
- the thickness of the lower electrode 24 and the upper electrode 26 There is no limitation on the thickness of the lower electrode 24 and the upper electrode 26. Further, the thicknesses of the lower electrode 24 and the upper electrode 26 are basically the same, but may be different.
- the lower electrode 24 and the upper electrode 26 are preferably thin film electrodes.
- the thickness of the lower electrode 24 and the upper electrode 26 is thinner than the protective layer, preferably 0.05 ⁇ m to 5 ⁇ m, more preferably 0.05 ⁇ m to 2 ⁇ m, and even more preferably 0.1 ⁇ m to 1 ⁇ m.
- the piezoelectric element 10 if the product of the thickness of the lower electrode 24 and the upper electrode 26 and the Young's modulus is less than the product of the thickness of the lower protective layer 28 and the upper protective layer 30 and the Young's modulus, the piezoelectric element 10 is flexible. It is suitable because it does not significantly impair the properties.
- the lower protective layer 28 and the upper protective layer 30 are made of PET (Young's modulus: about 6.2 GPa) and the lower electrode 24 and the upper electrode 26 are made of copper (Young's modulus: about 130 GPa)
- the lower protective layer 28 is used.
- the thickness of the lower electrode 24 and the upper electrode 26 is preferably 1.2 ⁇ m or less, more preferably 0.3 ⁇ m or less, and particularly preferably 0.1 ⁇ m or less.
- the piezoelectric element 10 preferably has a maximum value of loss tangent (Tan ⁇ ) at a frequency of 1 Hz as measured by dynamic viscoelasticity measurement at room temperature, and more preferably has a maximum value of 0.1 or more at room temperature.
- Tan ⁇ loss tangent
- the piezoelectric element 10 preferably has a storage elastic modulus (E') at a frequency of 1 Hz measured by dynamic viscoelasticity measurement of 10 GPa to 30 GPa at 0 ° C. and 1 GPa to 10 GPa at 50 ° C.
- E' storage elastic modulus
- the piezoelectric element 10 can have a large frequency dispersion in the storage elastic modulus (E'). That is, it can behave hard for vibrations of 20 Hz to 20 kHz and soft for vibrations of several Hz or less.
- the product of the thickness and the storage elastic modulus at a frequency of 1 Hz by dynamic viscoelasticity measurement is 1.0 ⁇ 10 5 to 2.0 ⁇ 10 6 (1.0E + 05 to 2. It is preferably 0E + 06) N / m, and preferably 1.0 ⁇ 10 5 to 1.0 ⁇ 10 6 (1.0E + 05 to 1.0E + 06) N / m at 50 ° C.
- the piezoelectric layer 20 can be provided with appropriate rigidity and mechanical strength as long as the flexibility and acoustic characteristics are not impaired.
- the piezoelectric element 10 preferably has a loss tangent of 0.05 or more at 25 ° C. and a frequency of 1 kHz in the master curve obtained from the dynamic viscoelasticity measurement. The same applies to the piezoelectric layer 20 with respect to this condition. As a result, the frequency characteristics of the speaker using the piezoelectric element 10 become smooth, and the change in sound quality when the minimum resonance frequency f 0 changes with the change in the curvature of the speaker can be reduced.
- the storage elastic modulus (Young's modulus) and the loss tangent of the piezoelectric element 10 and the piezoelectric layer 20 may be measured by a known method.
- the measurement may be performed using a dynamic viscoelasticity measuring device DMS6100 manufactured by SII Nanotechnology Inc. (manufactured by SII Nanotechnology Inc.).
- the measurement frequency is 0.1 Hz to 20 Hz (0.1 Hz, 0.2 Hz, 0.5 Hz, 1 Hz, 2 Hz, 5 Hz, 10 Hz and 20 Hz)
- the measurement temperature is -50 to 150 ° C.
- the temperature rise rate is 2 ° C./min (in a nitrogen atmosphere)
- the sample size is 40 mm ⁇ 10 mm (including the clamp region)
- the inter-chuck distance is 20 mm, respectively.
- a sheet-like object 10a in which the lower electrode 24 is formed on the lower protective layer 28 is prepared.
- the sheet-like material 10a may be produced by forming a copper thin film or the like as the lower electrode 24 on the surface of the lower protective layer 28 by vacuum deposition, sputtering, plating or the like.
- the lower protective layer 28 with a separator temporary support
- PET or the like having a thickness of 25 ⁇ m to 100 ⁇ m can be used.
- the separator may be removed after the upper electrode 26 and the upper protective layer 30 are thermocompression-bonded and before any member is laminated on the lower protective layer 28.
- a polymer material to be a matrix material is dissolved in an organic solvent, piezoelectric particles 36 such as PZT particles are added, and the mixture is stirred to prepare a dispersed composition.
- organic solvent there are no restrictions on the organic solvent other than the above substances, and various organic solvents can be used.
- the composition is cast (coated) on the sheet-like material 10a to evaporate the organic solvent and dry it.
- a laminated body 10b having a lower electrode 24 on the lower protective layer 28 and forming a piezoelectric layer 20 on the lower electrode 24 is produced.
- the lower electrode 24 is an electrode on the base material side when the piezoelectric layer 20 is applied, and does not indicate the vertical positional relationship in the laminated body.
- a region where the composition is not applied is provided on at least one end side of the sheet-like material 10a. This area is the area to be the exposed part (lower drawer part). Further, at the end of the piezoelectric layer 20 adjacent to this region, a gradual reduction portion whose thickness gradually decreases toward the exposed portion is formed.
- the method of applying the composition only to a part of the region on the lower electrode 24 side of the laminated body 10b is not particularly limited.
- a slit opening for discharging the composition is used.
- the width of the lower electrode 24 may be adjusted to be smaller than the width of the lower electrode 24.
- the coating may be performed by masking the region of the end portion that is the uncoated portion of the composition.
- the tapering portion can be formed by adjusting the viscosity of the composition to be applied.
- a dielectric polymer material may be added to the matrix 34 in addition to the viscoelastic material such as cyanoethylated PVA.
- the polymer materials to be added to the composition described above may be dissolved.
- the laminated body 10b having the lower electrode 24 on the lower protective layer 28 and forming the piezoelectric layer 20 on the lower electrode 24 is produced, it is preferable to perform the polarization treatment (polling) of the piezoelectric layer 20.
- the method for polarization treatment of the piezoelectric layer 20 is not limited, and known methods can be used.
- a calendar treatment may be performed in which the surface of the piezoelectric layer 20 is smoothed by using a heating roller or the like. By performing this calendar processing, the thermocompression bonding process described later can be smoothly performed.
- a sheet-like material 10c in which the upper electrode 26 is formed on the upper protective layer 30 is prepared.
- the sheet-like material 10c may be produced by forming a copper thin film or the like as the upper electrode 26 on the surface of the upper protective layer 30 by vacuum deposition, sputtering, plating or the like.
- the upper electrode 26 is directed toward the piezoelectric layer 20, and the sheet-like material 10c is laminated on the laminated body 10b that has completed the polarization treatment of the piezoelectric layer 20.
- the laminate of the laminate 10b and the sheet-like material 10c is thermocompression-bonded with a heating press device or a heating roller or the like so as to sandwich the upper protective layer 30 and the lower protective layer 28.
- the sheet-like material 10c may have a size and a shape such that when it is laminated on the laminated body 10b, a part of the sheet-like material 10c becomes an exposed portion that is not adhered to the piezoelectric layer 20.
- the composition of the laminated body 10b is applied as shown in FIGS. 12 and 13 before laminating the sheet-shaped material 10c on the laminated body 10b.
- the insulating member 44 is provided so as to cover the unexposed area, that is, a part of the exposed portion and the gradually decreasing portion of the piezoelectric layer 20.
- the insulating member 44 is a sheet-like material (insulating sheet)
- the insulating sheet may be attached to a part of the exposed portion and the gradually decreasing portion of the piezoelectric layer 20, and is a liquid insulating material.
- the insulating material may be applied and cured to form the insulating member 44.
- insulation is performed at positions corresponding to the exposed portion of the sheet-shaped material 10c and the gradually decreasing portion of the piezoelectric layer 20.
- a member 46 is provided.
- a piezoelectric element in which an electrode layer and a protective layer are laminated on both sides of the piezoelectric layer 20 is produced.
- the produced piezoelectric element may be cut into a desired shape according to various uses.
- a drawer portion having a desired shape can be formed by cutting into a shape that leaves at least a part of the exposed portion.
- Such a piezoelectric element may be manufactured using a cut sheet-like sheet, or may be manufactured by roll-to-roll (RtoR).
- RtoR roll-to-roll
- the electrode layer (upper electrode) may be deformed when the sheet-like material 10c is laminated on the laminated body 10b.
- the composition to be the piezoelectric layer 20 when the composition to be the piezoelectric layer 20 is applied on the lower electrode 24 at the time of manufacturing the piezoelectric element by RtoR, it is applied so that a gradual reduction portion is formed.
- the laminated body 10b after coating is wound, there is no swelling at the edge portion, so that it is possible to suppress the occurrence of winding failure.
- the edge portion of the piezoelectric layer 20 does not have a bulge, it is possible to prevent the upper electrode 26 from being deformed when the sheet-shaped objects 10c are laminated.
- the composition when the composition is applied to the sheet-like material 10a by RtoR, a method of continuously applying the composition in the longitudinal direction while transporting the long sheet-like material 10a in the longitudinal direction can be considered.
- a long piezoelectric layer is formed in the longitudinal direction of the long sheet-like object 10a. Therefore, it is preferable that the exposed portion and the tapering portion are formed at at least one end in the width direction (direction orthogonal to the longitudinal direction) of the long sheet-shaped object 10a.
- the composition When the composition is applied to the sheet-like material 10a by RtoR, the composition is intermittently applied in the longitudinal direction while transporting the long sheet-like material 10a in the longitudinal direction, and the composition is applied on the sheet-like material 10a.
- a plurality of piezoelectric layers may be formed on the surface. For example, when the planar shape of each piezoelectric layer is substantially quadrangular, a tapering portion may be formed on each of the four end side sides of each piezoelectric layer.
- the piezoelectric element 10 when a voltage is applied to the lower electrode 24 and the upper electrode 26, the piezoelectric particles 36 expand and contract in the polarization direction according to the applied voltage. As a result, the piezoelectric element 10 (piezoelectric layer 20) shrinks in the thickness direction. At the same time, the piezoelectric element 10 expands and contracts in the in-plane direction due to the pore ratio. This expansion and contraction is about 0.01 to 0.1%. In the in-plane direction, it expands and contracts isotropically in all directions. As described above, the thickness of the piezoelectric layer 20 is preferably about 10 to 300 ⁇ m. Therefore, the expansion and contraction in the thickness direction is very small, about 0.3 ⁇ m at the maximum.
- the piezoelectric element 10 that is, the piezoelectric layer 20, has a size much larger than the thickness in the plane direction. Therefore, for example, if the length of the piezoelectric element 10 is 20 cm, the piezoelectric element 10 expands and contracts by a maximum of about 0.2 mm when a voltage is applied. Further, when pressure is applied to the piezoelectric element 10, electric power is generated by the action of the piezoelectric particles 36. By utilizing this, the piezoelectric element 10 can be used for various purposes such as a speaker, a microphone, and a pressure-sensitive sensor, as described above.
- a general piezoelectric element made of a polymer material such as PVDF has in-plane anisotropy in the piezoelectric characteristics, and has anisotropy in the amount of expansion and contraction in the plane direction when a voltage is applied.
- the piezoelectric layer made of a polymer composite piezoelectric material containing piezoelectric particles in a matrix containing a polymer material has no in-plane anisotropy in the piezoelectric characteristics and is isotropic in all directions in the in-plane direction. Expands and contracts.
- the piezoelectric element 10 that expands and contracts isotropically and two-dimensionally, it is possible to vibrate with a larger force than when a general piezoelectric element such as PVDF that expands and contracts greatly in only one direction is laminated. , Can generate louder and more beautiful sound.
- the configuration is such that one piezoelectric element 10 is provided, but the present invention is not limited to this, and a plurality of piezoelectric elements 10 of the present invention may be laminated. Further, the piezoelectric element 10 of the present invention may have a long shape and may be folded back once or more, preferably a plurality of times in the longitudinal direction to form a stack of a plurality of layers of the piezoelectric element 10.
- Piezoelectric element 10a 10c Sheet-like material 10b Laminated body 20 Piezoelectric layer 24 Lower electrode 26 Upper electrode 28 Lower protective layer 29 Lower drawer 30 Upper protection layer 31 Upper drawer 34 Matrix 36 Piezoelectric particles 40, 42 Conductive sheet 44 , 46, 48, 50 Insulation member W Width of piezo
Abstract
Description
しかしながら、特許文献1に記載されるような電極引き出し部を有する圧電素子において、電極引き出し部には、電極引き出し部を延長する導電性の箔が接続されたり、電極引き出し部の薄膜電極が他方の薄膜電極と接触することを防止するための絶縁シート等が貼着される。そのため、電極引き出し部の近傍は厚みが厚くなってしまうという問題があった。また、電極引き出し部の近傍の部分が他の領域よりも厚くなって厚さ不均一になるため、圧電素子を他の物品に積層する際に、密着しにくくなるおそれがある。
[1] 圧電層、圧電層の両面に形成される電極層、および、電極層の、圧電層側の面とは反対側の面に積層される保護層を有する圧電素子であって、
電極層は、少なくとも一部の端部において圧電層が形成されていない暴露部を有し、
圧電層は、暴露部と隣接する端部において、暴露部に向かって厚さが漸減する漸減部を有する圧電素子。
[2] 漸減部の、暴露部に向かって厚さが漸減する方向における幅は、0.01mm~2mmである[1]に記載の圧電素子。
[3] 暴露部の電極層の少なくとも一部を覆う絶縁部材を有する[1]または[2]に記載の圧電素子。
[4] 絶縁部材が圧電層の漸減部を覆っている[3]に記載の圧電素子。
[5] 暴露部が、電極層の面方向において、外向きに凸状に突出している[1]~[4]のいずれかに記載の圧電素子。
[6] 暴露部の電極層に接続される導電性シートを有する[1]~[5]のいずれかに記載の圧電素子。
[7] 圧電層は、高分子材料を含むマトリックス中に圧電体粒子を含む高分子複合圧電体からなる[1]~[6]のいずれかに記載の圧電素子。
なお、本明細書において、「~」を用いて表される数値範囲は、「~」の前後に記載される数値を下限値および上限値として含む範囲を意味する。
本発明の圧電素子は、
圧電層、圧電層の両面に形成される電極層、および、電極層の、圧電層側の面とは反対側の面に積層される保護層を有する圧電素子であって、
電極層は、少なくとも一部の端部において圧電層が形成されていない暴露部を有し、
圧電層は、暴露部と隣接する端部において、暴露部に向かって厚さが漸減する漸減部を有する圧電素子である。
後述するが、圧電素子10(圧電層20)は、好ましい態様として、厚さ方向に分極されている。
図3に示す例では、圧電層20は、厚さが漸減する方向において、下部電極24と接する面の幅が、上部電極26と接する面の幅よりも大きく、端面が傾斜しているということもできる。
また、図示例において、下部引き出し部29および上部引き出し部31を有する端辺と隣接する辺側(図1の左右方向の両端辺側)では、図2に示すように、圧電層20は漸減部を有していない。すなわち、図1の左右方向においては、下部電極24と接する面の幅が、上部電極26と接する面の幅と略同じである。
漸減部を有するため、引き出し部(暴露部)に導電性シートおよび/または絶縁部材を設けた場合に、漸減部の電極層(上部電極)と圧電層との間の空間に各部材を配置することができるので、引き出し部近傍の厚さが他の領域よりも厚くなることを抑制できる。
また、引き出し部の近傍の部分が他の領域よりも厚くなることを抑制できるため、圧電素子を他の物品に積層する際に、密着しやすくできる。
また、下部引き出し部29および上部引き出し部31の形状は、図示例の矩形以外にも、電極の引出しが可能な各種の形状が利用可能である。
また、漸減部は、圧電層20の、下部引き出し部29と上部引き出し部31とを有する端辺側に形成される構成としたが、これに限定はされず、他の端辺側に形成されていてもよく、圧電層20の端部の全周に漸減部が形成されてもよい。
また、圧電素子は、これ以外にも、感圧センサおよび発電素子等にも利用可能である。
以下、本発明の圧電素子の各構成要素について説明する。
圧電層20は、公知の圧電体からなる層であればよい。本発明において、圧電層20は、高分子材料を含むマトリックス34に、圧電体粒子36を含む高分子複合圧電体であるのが好ましい。
本発明の圧電素子10は、フレキシブルディスプレイ用のスピーカーなど、フレキシブル性を有するスピーカー等に好適に用いられる。ここで、フレキシブル性を有するスピーカーに用いられる高分子複合圧電体(圧電層20)は、次の用件を具備したものであるのが好ましい。従って、以下の要件を具備する材料として、常温で粘弾性を有する高分子材料を用いるのが好ましい。
なお、本明細書において、「常温」とは、0~50℃程度の温度域を指す。
例えば、携帯用として新聞や雑誌のように書類感覚で緩く撓めた状態で把持する場合、絶えず外部から、数Hz以下の比較的ゆっくりとした、大きな曲げ変形を受けることになる。この時、高分子複合圧電体が硬いと、その分大きな曲げ応力が発生し、マトリックスと圧電体粒子との界面で亀裂が発生し、やがて破壊に繋がる恐れがある。従って、高分子複合圧電体には適度な柔らかさが求められる。また、歪みエネルギーを熱として外部へ拡散できれば応力を緩和することができる。従って、高分子複合圧電体の損失正接が適度に大きいことが求められる。
(ii) 音質
スピーカーは、20Hz~20kHzのオーディオ帯域の周波数で圧電体粒子を振動させ、その振動エネルギーによって高分子複合圧電体(圧電素子)全体が一体となって振動することで音が再生される。従って、振動エネルギーの伝達効率を高めるために高分子複合圧電体には適度な硬さが求められる。また、スピーカーの周波数特性が平滑であれば、曲率の変化に伴い最低共振周波数が変化した際の音質の変化量も小さくなる。従って、高分子複合圧電体の損失正接は適度に大きいことが求められる。
高分子複合圧電体(圧電層20)において、ガラス転移点が常温にある高分子材料、言い換えると、常温で粘弾性を有する高分子材料をマトリックスに用いることで、20Hz~20kHzの振動に対しては硬く、数Hz以下の遅い振動に対しては柔らかく振舞う高分子複合圧電体が実現する。特に、この振舞いが好適に発現する等の点で、周波数1Hzでのガラス転移温度が常温、すなわち、0~50℃にある高分子材料を、高分子複合圧電体のマトリックスに用いるのが好ましい。
これにより、高分子複合圧電体が外力によってゆっくりと曲げられた際に、最大曲げモーメント部におけるマトリックスと圧電体粒子との界面の応力集中が緩和され、良好な可撓性が得られる。
これにより、高分子複合圧電体が外力によってゆっくりと曲げられた際に発生する曲げモーメントが低減できると同時に、20Hz~20kHzの音響振動に対しては硬く振る舞うことができる。
しかしながら、その反面、良好な耐湿性の確保等を考慮すると、高分子材料は、比誘電率が25℃において10以下であるのも、好適である。
なお、これらの高分子材料は、1種のみを用いてもよく、複数種を併用(混合)して用いてもよい。
すなわち、マトリックス34には、誘電特性や機械的特性の調節等を目的として、常温で粘弾性を有する高分子材料に加え、必要に応じて、その他の誘電性高分子材料を添加しても良い。
中でも、シアノエチル基を有する高分子材料は、好適に利用される。
また、圧電層20のマトリックス34において、シアノエチル化PVA等の常温で粘弾性を有する高分子材料に加えて添加される誘電性高分子材料は、1種に限定はされず、複数種を添加してもよい。
さらに、粘着性を向上する目的で、ロジンエステル、ロジン、テルペン、テルペンフェノール、および、石油樹脂等の粘着付与剤を添加しても良い。
これにより、マトリックス34における粘弾性緩和機構を損なうことなく、添加する高分子材料の特性を発現できるため、高誘電率化、耐熱性の向上、圧電体粒子36および電極層との密着性向上等の点で好ましい結果を得ることができる。
圧電体粒子36は、ペロブスカイト型またはウルツ鉱型の結晶構造を有するセラミックス粒子からなるものである。
圧電体粒子36を構成するセラミックス粒子としては、例えば、チタン酸ジルコン酸鉛(PZT)、チタン酸ジルコン酸ランタン酸鉛(PLZT)、チタン酸バリウム(BaTiO3)、酸化亜鉛(ZnO)、および、チタン酸バリウムとビスマスフェライト(BiFe3)との固溶体(BFBT)等が例示される。
これらの圧電体粒子36は、1種のみを用いてもよく、複数種を併用(混合)して用いてもよい。
圧電体粒子36の粒径は、1~10μmが好ましい。圧電体粒子36の粒径をこの範囲とすることにより、高分子複合圧電体(圧電素子10)が高い圧電特性とフレキシビリティとを両立できる等の点で好ましい結果を得ることができる。
すなわち、圧電層20中の圧電体粒子36は、好ましくは均一に分散されていれば、マトリックス34中に不規則に分散されていてもよい。
圧電層20中における圧電体粒子36の体積分率は、30~80%が好ましく、50%以上がより好ましく、従って、50~80%とするのが、さらに好ましい。
マトリックス34と圧電体粒子36との量比を上記範囲とすることにより、高い圧電特性と可撓性とを両立できる等の点で好ましい結果を得ることができる。
圧電層20の厚さは、10~300μmが好ましく、20~200μmがより好ましく、30~150μmがさらに好ましい。
圧電層20の厚さを、上記範囲とすることにより、剛性の確保と適度な柔軟性との両立等の点で好ましい結果を得ることができる。
図2に示すように、図示例の圧電素子10は、圧電層20の一面に、下部電極24を有し、その表面に下部保護層28を有し、圧電層20の他方の面に、上部電極26を有し、その表面に上部保護層30を有してなる構成を有する。ここで、上部電極26と下部電極24とが電極対を形成する。
このように、圧電素子10において、上部電極26および下部電極24で挾持された領域は、印加された電圧に応じて伸縮される。
中でも、優れた機械的特性および耐熱性を有するなどの理由により、ポリエチレンテレフタレート(PET)、ポリプロピレン(PP)、ポリスチレン(PS)、ポリカーボネート(PC)、ポリフェニレンサルファイト(PPS)、ポリメチルメタクリレート(PMMA)、ポリエーテルイミド(PEI)、ポリイミド(PI)、ポリエチレンナフタレート(PEN)、トリアセチルセルロース(TAC)、および、環状オレフィン系樹脂等からなる樹脂フィルムが、好適に利用される。
ここで、下部保護層28および上部保護層30の剛性が高過ぎると、圧電層20の伸縮を拘束するばかりか、可撓性も損なわれる。そのため、機械的強度やシート状物としての良好なハンドリング性が要求される場合を除けば、下部保護層28および上部保護層30は、薄いほど有利である。
ここで、圧電素子10においては、下部保護層28および上部保護層30の厚さが、圧電層20の厚さの2倍以下であれば、剛性の確保と適度な柔軟性との両立等の点で好ましい結果を得ることができる。
例えば、圧電層20の厚さが50μmで下部保護層28および上部保護層30がPETからなる場合、下部保護層28および上部保護層30の厚さは、100μm以下が好ましく、50μm以下がより好ましく、25μm以下がさらに好ましい。
下部電極24および上部電極26は、圧電層20に駆動電圧を印加するために設けられる。
下部電極24および上部電極26の厚さには、制限はない。また、下部電極24および上部電極26の厚さは、基本的に同じであるが、異なってもよい。
例えば、下部保護層28および上部保護層30がPET(ヤング率:約6.2GPa)で、下部電極24および上部電極26が銅(ヤング率:約130GPa)からなる組み合わせの場合、下部保護層28および上部保護層30の厚さが25μmだとすると、下部電極24および上部電極26の厚さは、1.2μm以下が好ましく、0.3μm以下がより好ましく、中でも0.1μm以下とするのが好ましい。
これにより、圧電素子10が外部から数Hz以下の比較的ゆっくりとした、大きな曲げ変形を受けたとしても、歪みエネルギーを効果的に熱として外部へ拡散できるため、マトリックスと圧電体粒子との界面で亀裂が発生するのを防ぐことができる。
これにより、圧電素子10が貯蔵弾性率(E’)に大きな周波数分散を有することができる。すなわち、20Hz~20kHzの振動に対しては硬く、数Hz以下の振動に対しては柔らかく振る舞うことができる。
これにより、圧電素子10が可撓性および音響特性を損なわない範囲で、適度な剛性と機械的強度を備えることができる。
これにより、圧電素子10を用いたスピーカーの周波数特性が平滑になり、スピーカーの曲率の変化に伴い最低共振周波数f0が変化した際の音質の変化を小さくできる。
測定条件としては、一例として、測定周波数は0.1Hz~20Hz(0.1Hz、0.2Hz、0.5Hz、1Hz、2Hz、5Hz、10Hzおよび20Hz)が、測定温度は-50~150℃が、昇温速度は2℃/分(窒素雰囲気中)が、サンプルサイズは40mm×10mm(クランプ領域込み)が、チャック間距離は20mmが、それぞれ、例示される。
下部保護層28が非常に薄く、ハンドリング性が悪い時などは、必要に応じて、セパレータ(仮支持体)付きの下部保護層28を用いても良い。なお、セパレータとしては、厚さ25μm~100μmのPET等を用いることができる。セパレータは、上部電極26および上部保護層30を熱圧着した後、下部保護層28に何らかの部材を積層する前に、取り除けばよい。
上記物質以外の有機溶媒としては制限はなく各種の有機溶媒が利用可能である。
マトリックス34に、これらの高分子材料を添加する際には、上述した組成物に添加する高分子材料を溶解すればよい。
なお、この分極処理の前に、圧電層20の表面を加熱ローラ等を用いて平滑化する、カレンダー処理を施してもよい。このカレンダー処理を施すことで、後述する熱圧着工程がスムーズに行える。
さらに、この積層体10bとシート状物10cとの積層体を、上部保護層30と下部保護層28とを挟持するようにして、加熱プレス装置や加熱ローラ対等で熱圧着する。
なお、シート状物10cは、積層体10bに積層した際に、一部が圧電層20と接着されない暴露部となるような大きさおよび形状を有していればよい。
また、RtoRでシート状物10aに組成物を塗布する場合には、長尺なシート状物10aを長手方向に搬送しながら、長手方向に間欠的に組成物を塗布してシート状物10a上に複数の圧電層を形成してもよい。例えば、各圧電層の平面形状が略四角形状の場合、各圧電層には4つの端辺側それぞれに漸減部が形成され得る。
上述したように、圧電層20の厚さは、好ましくは10~300μm程度である。従って、厚さ方向の伸縮は、最大でも0.3μm程度と非常に小さい。
これに対して、圧電素子10すなわち圧電層20は、面方向には、厚さよりもはるかに大きなサイズを有する。従って、例えば、圧電素子10の長さが20cmであれば、電圧の印加によって、最大で0.2mm程度、圧電素子10は伸縮する。
また、圧電素子10に圧力を加えると、圧電体粒子36の作用によって、電力を発生する。
これを利用することで、圧電素子10は、上述のように、スピーカー、マイクロフォン、および、感圧センサ等の各種の用途に利用可能である。
これに対して、高分子材料を含むマトリックス中に圧電体粒子を含む高分子複合圧電体からなる圧電層は、圧電特性に面内異方性がなく、面内方向では全方向に等方的に伸縮する。
このような等方的に二次元的に伸縮する圧電素子10によれば、一方向にしか大きく伸縮しないPVDF等の一般的な圧電素子を積層した場合に比べ、大きな力で振動することができ、より大きく、かつ、美しい音を発生できる。
本発明の圧電素子10を複数枚、積層した構成としてもよい。また、本発明の圧電素子10を長尺な形状として、長手方向に、1回以上、好ましくは複数回、折り返すことにより、圧電素子10を複数層、積層した構成としてもよい。
10a、10c シート状物
10b 積層体
20 圧電層
24 下部電極
26 上部電極
28 下部保護層
29 下部引き出し部
30 上部保護層
31 上部引き出し部
34 マトリックス
36 圧電体粒子
40、42 導電性シート
44、46、48、50 絶縁部材
W 漸減部の幅
Claims (7)
- 圧電層、前記圧電層の両面に形成される電極層、および、前記電極層の、前記圧電層側の面とは反対側の面に積層される保護層を有する圧電素子であって、
前記電極層は、少なくとも一部の端部において前記圧電層が形成されていない暴露部を有し、
前記圧電層は、前記暴露部と隣接する端部において、前記暴露部に向かって厚さが漸減する漸減部を有する圧電素子。 - 前記漸減部の、前記暴露部に向かって厚さが漸減する方向における幅は、0.01mm~2mmである請求項1に記載の圧電素子。
- 前記暴露部の前記電極層の少なくとも一部を覆う絶縁部材を有する請求項1または2に記載の圧電素子。
- 前記絶縁部材が前記圧電層の前記漸減部を覆っている請求項3に記載の圧電素子。
- 前記暴露部が、前記電極層の面方向において、外向きに凸状に突出している請求項1~4のいずれか一項に記載の圧電素子。
- 前記暴露部の前記電極層に接続される導電性シートを有する請求項1~5のいずれか一項に記載の圧電素子。
- 前記圧電層は、高分子材料を含むマトリックス中に圧電体粒子を含む高分子複合圧電体からなる請求項1~6のいずれか一項に記載の圧電素子。
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