WO2021057921A1 - 一种真空镀膜装置 - Google Patents

一种真空镀膜装置 Download PDF

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Publication number
WO2021057921A1
WO2021057921A1 PCT/CN2020/117882 CN2020117882W WO2021057921A1 WO 2021057921 A1 WO2021057921 A1 WO 2021057921A1 CN 2020117882 W CN2020117882 W CN 2020117882W WO 2021057921 A1 WO2021057921 A1 WO 2021057921A1
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Prior art keywords
nozzle
crucible
steel plate
vacuum coating
coating device
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PCT/CN2020/117882
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English (en)
French (fr)
Inventor
任三兵
樊俊飞
李山青
熊斐
汪义如
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宝山钢铁股份有限公司
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Application filed by 宝山钢铁股份有限公司 filed Critical 宝山钢铁股份有限公司
Priority to US17/763,837 priority Critical patent/US20220325401A1/en
Priority to EP20869963.7A priority patent/EP4029968A4/en
Priority to KR1020227010370A priority patent/KR20220053646A/ko
Priority to JP2022519383A priority patent/JP7412543B2/ja
Publication of WO2021057921A1 publication Critical patent/WO2021057921A1/zh

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Definitions

  • the invention relates to the technical field of vacuum coating, and more specifically, to a vacuum coating device.
  • PVD Physical vapor deposition
  • electric heating resistance or induction
  • EBPVD electron beam gun heating
  • the key issue in the vacuum coating process is how to obtain a uniform coating with consistent thickness through the arrangement of nozzles.
  • the current public information abroad mainly includes the following schemes:
  • Patent applications BE1009321A6 and BE1009317A61 respectively disclose the crucible nozzle structure as shown in Figure 1 and Figure 2.
  • a cover 2 is added to the upper part of the crucible 1, so that a nozzle structure is formed between the upper cover 2 and the furnace wall for direct injection of evaporated metal.
  • the filter plate 3 is added to the evaporation crucible, and then the metal vapor is sprayed from the slit nozzle on the top.
  • the nozzle design process of these two devices one adopts the Laval nozzle structure, and the other adopts the shrinking nozzle, and the orientation of the nozzle is one side jet and the other vertical jet.
  • Patent applications JPS59177370A and US4552092A also disclose related evaporation crucible and nozzle structures.
  • Figure 3 shows a crucible nozzle structure with automatic liquid metal replenishment.
  • the nozzle 4 uses a wider outlet, and a heater 5 is also arranged on the upper part of the crucible for heating.
  • the crucible nozzle structure shown in Figure 4 is expanded by an arc 6 on one side and sprayed sideways.
  • a heating tube 7 is also arranged on the outside of the crucible wall for wall heating.
  • Patent application WO2018/020311A1 discloses a split crucible nozzle structure, as shown in Figure 5, in this device, the bottom of the crucible is connected to a molten metal supply tank 8, and the upper part of the supply tank 8 transfers the metal vapor through a split pipe 9 It is sent to the tubular distributor and the steam nozzle at the front end, and then the nozzle sprays the metal steam to the metal sheet at a high speed.
  • Patent application CN103249860A discloses a split flow distributor and nozzle structure. As shown in Figure 6, steam is sent to the upper horizontal pipe 10 through a vertical pipe. The top of the horizontal pipe 10 is provided with a porous nozzle to remove metal steam. Spray evenly on the surface of the sheet metal.
  • Patent application CN101175866A discloses a metal vapor distributor and nozzle form.
  • the cross-sectional form of the nozzle is shown in Fig. 7.
  • the distributor pipe 11 is wound with a wire to heat the pipe.
  • the nozzle has a square shell, as shown in Fig. 8.
  • a ring-shaped pipe made of another material is nested inside the square shell 12 for the injection of metal steam, and the steam outlet used by the nozzle is a porous type.
  • the purpose of the present invention is to provide a vacuum coating device, which can form a uniform coating with uniform thickness and improve the yield of coating.
  • the yield refers to the ratio of the effective coating thickness on the surface of the steel sheet to the strip width.
  • the effective coating thickness can be understood as a coating with a thickness of 1-20 ⁇ m, and the thickness deviation (dmax-dmin) ⁇ 25%.
  • a vacuum coating device the vacuum coating device is located below the steel plate, and includes a crucible, an induction heater is arranged on the outside of the crucible, and a flow box is connected to the top of the crucible through a steam pipe, and the steam pipe is provided with a pressure regulator Valve, the flow distribution box body is provided with a horizontal stabilizing plate, the top of the flow distribution box body is connected with a nozzle, and the nozzle is arranged with a baffle plate along the steam ejection direction.
  • the distance Da from the nozzle outlet to the steel plate is 10-200mm; based on the actual installable distance between the nozzle and the steel plate, the distance between the nozzle and the steel plate is generally ⁇ 10mm; when Da ⁇ 200mm, the expansion angle of steam injection increases, and the spray If the range is larger, the thickness of the coating is reduced, resulting in that the coating cannot play the role of corrosion resistance; in addition, when Da ⁇ 200mm, the speed of steam spraying to the steel plate will also decrease, resulting in poor adhesion and density of the coating .
  • the height Db of the deflector is 10 ⁇ 199mm; the height is determined by the distance between the nozzle outlet and the steel plate.
  • the deflector height is 10mm; when the nozzle is farther from the steel plate, the deflector The limit distance of the board height is 199mm.
  • Da ⁇ Db when the width of the steel plate is smaller than the effective width of the nozzle outlet, the baffle can be flush with the height of the edge of the steel plate.
  • the distance Dc from the top of the deflector to the steel plate is 1-190 mm; for example, when Db is 199 mm, Dc is 1 mm, and when Db is 10 mm, Dc may be 10 mm.
  • the angle Dd between the baffle and the nozzle outlet is 60°-135°.
  • Dd can be selected to be less than 90°, such as 60°, according to the production needs, and a uniform thickness of coating can be obtained at this time;
  • a large expansion angle such as 135°, can be used according to production needs to improve the uniformity of the coating thickness at the edge of the steel plate.
  • the angle is greater than 135°, the speed and range of the jet at the edge of the steel plate cannot be satisfied.
  • the pressure stabilizing plate adopts a porous medium stabilizing plate.
  • This type of stabilizing plate filters gas through irregular pores similar to honeycombs, and can use different porosity to change the airflow distribution according to production needs, so as to achieve Uniform purpose.
  • the stabilizing plate has a porous structure, and the shape of the pores is rectangle, circle, or triangle, or the pore shape can be any polygon or circle.
  • the direction of the pores along the rising direction of the steam can be a straight line, a curve or a multilayer structure. Since the pressure stabilizing plate has a certain thickness, the direction of the pores refers to the path of steam passing through the thickness direction of the stabilizing plate. The distribution can be changed, and the ascending path can also be changed by the pore direction.
  • the multi-layer structure refers to a structure in which the pores guide the steam to rise in steps, such as an airflow step formed by multiple sets of broken lines. This structure will increase the resistance to airflow, but can make the steam more evenly distributed.
  • the nozzle outlet is provided in a slit type or a porous type, preferably a slit type.
  • the slit-type nozzle outlet is arranged in a linear shape or a curved shape.
  • the slit type here means that the outlet of the nozzle forms a whole slit instead of multiple small slits arranged at intervals. This is because if the steam is ejected from each small slit, it will diffuse outward to a certain extent. , The area where the steam overlaps makes the thickness of the coating film larger, and a uniform coating cannot be formed.
  • the outlet of the porous nozzle is arranged in a rectangular, circular or trapezoidal shape.
  • the nozzle is made of graphite, ceramic or inert metal material, and is wear-resistant and high-temperature resistant.
  • the yield can reach more than 90%, and when the above relationship is not satisfied, the yield cannot reach 90%.
  • both the flow distribution box and the steel plate are placed in the vacuum chamber.
  • the invention provides a vacuum coating device for improving the yield of vacuum coating.
  • the metal vapor is obtained by melting and evaporating the metal material in the crucible, and the steam enters the flow box body through the pipeline, and the flow box body is arranged with a stabilizing plate And related devices, the metal vapor forms a uniform air flow through the nozzle.
  • a deflector is set at the nozzle.
  • a uniform flow field is formed between the deflector and the steel strip to be coated.
  • the flow field is distributed between the deflector and the steel strip. To adjust the deflection of the flow field at the edge of the steel strip, so as to improve the yield of the strip steel coating.
  • the invention has low investment, simple operation, and can be output as a complete set with vacuum coating technology in the future.
  • Figure 1 is a schematic diagram of the patent application BE1009321A6;
  • Figure 2 is a schematic diagram of the patent application BE1009317A61
  • FIG. 3 is a schematic diagram of the patent application JPS59177370A
  • Figure 4 is a schematic diagram of the patent application US4552092A
  • Figure 5 is a schematic diagram of patent application WO2018/020311A1;
  • Figure 6 is a schematic diagram of patent application CN103249860A
  • Figure 7 is a schematic diagram of patent application CN101175866A
  • Fig. 8 is a schematic diagram of the square housing in Fig. 7;
  • Figure 9 is a schematic diagram of the structure of the vacuum coating device of the present invention.
  • Figure 10 is a side view of the vacuum coating device of Figure 9
  • Fig. 11 is an enlarged view of the flow distribution box, the baffle and the steel plate in the vacuum coating device of Fig. 9.
  • the present invention provides a vacuum coating device, the vacuum coating device can improve the yield of vacuum coating, the vacuum coating device is located below the steel plate 100 when in use, the vacuum coating device includes Crucible 13, the crucible 13 contains molten metal 14, and the outside of the crucible 13 is provided with an induction heater 15. After heating the metal material in the crucible 13, the molten metal 14 and the metal vapor 22 are obtained, and the power of the induction heater 15 Adjustable to control the pressure of the metal vapor 22 in the crucible 13. The top of the crucible 13 is connected to a flow box 17 through a steam pipe 16.
  • the flow box 17 and the steel plate 100 are both placed in vacuum In the chamber 23, the steam pipe 16 is provided with a pressure regulating valve 18, and the crucible 13 isolates the gas in the crucible 13 from the flow box 17 and the vacuum chamber 23 through the pressure regulating valve 18
  • the flow distribution box 17 is provided with a horizontal stabilizing plate 19, the top of the flow distribution box 17 is connected with a nozzle 20, and the top of the nozzle 20 is arranged with a baffle 21 along the direction of steam ejection.
  • the pressure regulating valve 18 on the steam pipe 16 is opened, the metal vapor 22 reaches the steel plate 100 through the stabilizing plate 19 and the nozzle 20 to form a coating .
  • the function of the baffle 21 is to make the air flow passing through the nozzle outlet perpendicular to the steel plate 100 to avoid the occurrence of drift, thereby increasing the yield of the steel plate 100.
  • the distance Da from the outlet of the nozzle 20 to the steel plate 100 is 10-200 mm;
  • the height Db of the deflector 21 is 10-199mm
  • the distance Dc from the top of the deflector 21 to the steel plate 100 is 1 to 190 mm;
  • the angle Dd between the baffle 21 and the outlet of the nozzle 20 is 60°-135°.
  • the internal pressure of the nozzle 20 during operation is 500-500,000 Pa.
  • the nozzle 20 is made of graphite, ceramic or inert metal materials, and other materials that are resistant to high temperature, wear resistance, and can be processed.
  • the nozzle outlet is set in a slit type or a porous type, the slit nozzle outlet is set in a straight or curved shape, and the porous nozzle outlet is set in a rectangular, circular or trapezoidal shape.
  • the voltage stabilizing plate 19 has a porous structure, and the shape of the pores is rectangle, circle, or triangle, or any polygon or circle, which is not particularly limited in this application; the pore direction is a straight line, a curve, or a multilayer structure.
  • the molten metal 14 may contain metals such as zinc, magnesium, aluminum, tin, nickel, copper, and iron, in addition to low melting point (less than 2000° C.) oxides of these elements.
  • the steel plate 100 is cleaned by plasma or other devices before vacuum coating, and the preheating temperature reaches 80-300°C.
  • the metal vapor 22 flows along the steam pipe 16.
  • the pressure of the high-speed flow formed by the metal vapor is reduced and stabilized due to the action of the stabilizing plate 19
  • the pore direction of the pressing plate distributes the high-speed flow, so that the metal vapor flows out evenly along the pores on the stabilizing plate 19, and then flows out evenly from the nozzle 20 on the top of the flow distribution box 17;
  • the metal vapor 22 flows out at a higher speed. At this time, a moving steel plate 100 is arranged above it. The temperature of the metal vapor 22 is relatively high. When encountering a steel plate 100 with a lower temperature, it will quickly It solidifies, and the metal plating film 24 is formed.
  • the surface of the steel plate 100 is galvanized, and the width of the steel plate 100 is 1000 mm. After washing and drying, the steel plate 100 is heated to 120°C.
  • the induction heater 15 is used to evaporate the zinc, and the power of the induction heater is controlled, so that the pressure in the crucible 13 rises to 20000 Pa, before the pressure regulating valve 18 is closed.
  • the pressure regulating valve 18 is opened, and the metal vapor 22 enters the flow box 17 through the steam pipe 16.
  • the pressure regulator plate 19 inside the flow box 17 is porous structure or adopts porous medium to stabilize the pressure.
  • the internal working pressure of the distribution box 17 is 5000 Pa
  • the nozzle 20 is made of graphite
  • the nozzle outlet is a linear slit.
  • the shape of the deflector 21 is rectangular, and the relevant parameters are as follows:
  • the yield of steel plate reached 95%. .

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  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
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  • Mechanical Engineering (AREA)
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Abstract

本发明公开了一种真空镀膜装置，包括坩埚，坩埚外侧设有感应加热器，所述坩埚顶部通过蒸汽管道连有布流箱体，所述蒸汽管道内设有调压阀，所述布流箱体内设有一水平向的稳压板，所述布流箱体顶部连有喷嘴，所述喷嘴顶部沿蒸汽喷出的方向布置有导流板；所述喷嘴出口至所述钢板的距离Da为10～200mm；所述导流板的高度Db为10～199mm；所述导流板顶部至所述钢板的距离Dc为1～190mm；所述导流板与所述喷嘴出口之间的夹角Dd为60°～135°。本发明提高镀膜的收得率，并形成厚度一致的均匀镀层。

Description

一种真空镀膜装置 技术领域
本发明涉及真空镀膜技术领域，更具体地说，涉及一种真空镀膜装置。
背景技术
物理蒸发镀(PVD)是指在真空条件下加热被镀金属，使之以气态的方式沉积到基材上形成镀膜的工艺技术。根据加热方式的不同又分为电加热(电阻或感应式)和电子束枪加热(EBPVD)等。真空镀膜作为表面改性和镀膜工艺，已经在电子、玻璃、塑料等行业得到了广泛的应用，真空镀膜技术主要优点在于环保、良好的镀膜性能和可镀物质的多样性。连续带钢运用真空镀膜技术的优势在于镀膜生产连续化、大面积、高速率、大规模等几个方面，从上世纪八十年代开始，世界各大钢铁公司都对此技术进行了大量的研究。随着热镀锌和电镀锌技术的成熟，该技术正在受到空前的重视，并被认为是创新型的表面镀膜工艺。
真空镀膜过程中的关键问题是如何通过喷嘴的布置得到厚度一致的均匀的镀层。国外目前公开的资料中，主要包含以下几个方案：
1)蒸发坩埚与布流喷嘴一体式结构
专利申请BE1009321A6、BE1009317A61分别公开了如图1、图2的坩埚喷嘴结构。在图1的结构中，坩埚1上部加上盖2，使得上盖2和炉壁之间形成喷嘴结构，用于蒸发金属的直接喷射。在图2的结构中，则在蒸发坩埚中添加过滤板3，而后由顶部的狭缝喷嘴喷射金属蒸汽。在这两个装置的喷嘴设计过程中，一个采用了拉瓦尔喷嘴结构，另一个采用了收缩喷嘴，而喷嘴的朝向位置一个是侧向喷射，另一个是垂直喷射。
专利申请JPS59177370A、US4552092A中亦公开了相关蒸发坩埚及喷嘴结构。图3给出了一种带自动补充金属液的坩埚喷嘴结构，喷嘴4采用较宽的出口，在坩埚上部也布置了加热器5用于加热。图4给出的坩埚喷嘴结构由一侧的弧形6展开，侧向喷射，在坩埚壁的外侧同样布置了加热 管7用于壁面的加热。
2)蒸发坩埚与布流喷嘴分体式结构
专利申请WO2018/020311A1公布了一种分体式坩埚喷嘴结构，如图5所示，在该装置中，坩埚的底部连接一个金属液供给槽8，供给槽8的上部通过分体式管道9将金属蒸汽送至管状的分配器和前端的蒸汽喷嘴中，而后，喷嘴将金属蒸汽以高速喷射至金属板材。
专利申请CN103249860A公开了一种分体式布流器及喷嘴结构，如图6所示，通过一个竖直管道将蒸汽送至上部水平管道10中，水平管道10顶部具有多孔喷嘴，用以将金属蒸汽均匀地喷涂在金属板材表面。
专利申请CN101175866A公开了一种金属蒸汽布流器及喷嘴形式，如图7所示的喷嘴的截面形式，布流器管道11外部缠绕导线从而实现对管道的加热，喷嘴具有方形外壳，如图8所示，方形外壳12内部嵌套了另一种材质的环形管道，用于金属蒸汽的喷射，喷嘴使用的蒸汽出口形式为多孔式。
上述这些专利申请都涉及喷嘴的具体形式，但是并不能表明利用这些喷嘴能形成厚度一致的均匀镀层，此外对于镀膜的收得率并没有关注。
发明内容
针对现有技术中存在的上述缺陷，本发明的目的是提供一种真空镀膜装置，该真空镀膜装置能够形成厚度一致的均匀镀层，提高镀膜收得率。收得率是指钢板表面有效镀膜厚度的宽度与带钢宽度之比，有效镀膜厚度可以理解为厚度为1～20μm的镀膜，厚度偏差(dmax-dmin)≤25％。
为实现上述目的，本发明采用如下技术方案：
一种真空镀膜装置，所述真空镀膜装置位于钢板的下方，包括坩埚，其外侧设有感应加热器，所述坩埚顶部通过蒸汽管道连有布流箱体，所述蒸汽管道上设有调压阀，所述布流箱体内设有一水平向的稳压板，所述布流箱体顶部连有喷嘴，所述喷嘴沿蒸汽喷出的方向布置有导流板。
现有技术中，蒸汽从喷嘴喷出后会向边缘扩散，使边缘蒸汽分布不够密集，导致金属蒸汽在钢板的中部区域和边缘区域形成镀膜的厚度不一致， 后续需要额外的步骤将钢板边缘镀层不均的部分裁掉，裁切比例通常达到15％～20％，这不仅导致镀膜的收得率差，还提高了生产成本。本申请的技术方案通过导流板限制蒸汽从喷嘴到达钢板的路径，避免金属蒸汽向外扩散，将蒸汽集中在钢板经过的区域，从而使镀膜均匀。
所述喷嘴出口至所述钢板的距离Da为10～200mm；基于喷嘴距离钢板的实际可安装距离，喷嘴与钢板的距离一般≥10mm；而当Da≥200mm时，蒸汽喷射扩张角增大，喷射范围较大，镀层厚度减小，导致镀层不能起到抗侵蚀的作用；此外，当Da≥200mm时，蒸汽喷射至钢板的速度也随之减小，导致镀层的粘结性和致密度变差。
所述导流板的高度Db为10～199mm；该高度是由喷嘴出口与钢板的距离决定，当喷嘴距离钢板较近时，导流板高度取10mm；当喷嘴距离钢板较远时，导流板高度的极限距离取199mm。通常来说，在本申请的技术方案中，Da≥Db。也就是说，当钢板的宽度小于喷嘴出口的有效宽度时，导流板可以和钢板边部的高度平齐。
所述导流板顶部至所述钢板的距离Dc为1～190mm；例如，当Db为199mm时，Dc为1mm，当Db为10mm时，Dc可以为10mm。
当喷嘴内压力为500-100000Pa，而喷嘴所处的外环境压力在10 -4～10Pa之间时，所述导流板与所述喷嘴出口之间的夹角Dd为60°～135°。当钢板的宽度小于喷嘴出口的宽度时，或者需要镀膜的钢板的有效宽度小于喷嘴出口宽度时，可以依生产需要选用Dd小于90°，例如60°，此时能得到厚度均匀的镀层；而当钢板的宽度大于喷嘴出口宽度时，可依生产需要采用大扩张角，例如135°来改善钢板边部镀层厚度的均匀性。但是角度大于135°时，则无法满足钢板边部射流的速度和范围。
所述稳压板采用多孔介质稳压板，该种类型的稳压板通过类似蜂窝状的不规则孔隙过滤气体，并可根据生产需要，采用不同的孔隙率来改变气流分布，从而达到使气流均匀的目的。
或者，所述稳压板为多孔结构，孔隙形状为矩形、圆形或三角形，或者说孔隙形状可以为任何多边形和圆形。孔隙走向沿蒸汽上升的方向可以为直线、曲线或多层结构。由于稳压板具有一定的厚度，孔隙走向即指蒸 汽穿过稳压板厚度方向的路径，也就是说，蒸汽穿过稳压板时，不仅蒸汽的分布可以通过孔隙在稳压板上位置的分布来改变，其上升的路径也可通过孔隙走向来改变。所述多层结构是指孔隙走向引导蒸汽呈阶梯上升的结构，例如由多组折线形成的气流台阶，该结构会增加对气流阻力，但能够使蒸汽更均匀地分布。
所述喷嘴出口设置为狭缝型或多孔型，优选为狭缝型。
所述狭缝型喷嘴出口设置为直线形或者曲线形。这里的狭缝型是指喷嘴的出口形成一个整体的狭缝，而不是多个间隔设置的细小狭缝组成，这是因为蒸汽若从每个细小狭缝喷出时都会一定程度地向外扩散，蒸汽重叠的区域使镀膜厚度变大，无法形成均匀的镀层。
所述多孔型喷嘴出口设置为矩形、圆形或梯形。
所述喷嘴为石墨、陶瓷或者惰性金属材质制成，耐磨、耐高温。
所述Da、Db、Dc和Dd之间的关系如下：
Da＝Db+Dc；
当Da＝100～200mm，Db＝(1/5～1/2)Da时，Dd＝60°～90°；
当Da＝100～200mm，Db＝(1/2～2/3)Da时，Dd＝70°～110°；
当Da＝100～200mm，Db＝(2/3～4/5)Da时，Dd＝80°～135°；
当Da＝10～100mm，Db＝(1/5～1/2)Da时，Dd＝60°～100°；
当Da＝10～100mm，Db＝(1/2～2/3)Da时，Dd＝70°～120°；
当Da＝10～100mm，Db＝(2/3～4/5)Da时，Dd＝80°～135°。
满足上述关系时，收得率可达到90％以上，不满足上述关系时，收得率无法达到90％。
进一步地，还包括真空室，所述布流箱体和所述钢板均置于所述真空室内。采用该技术方案，一方面能防止喷嘴耐材和钢板镀层的氧化，另一方面能够形成内外压力差，使喷嘴出口喷出的蒸汽达到超音速。
本发明所提供的一种提高真空镀膜收得率的真空镀膜装置，金属蒸汽由坩埚内的金属材料熔化蒸发获得，蒸汽通过管道进入到布流箱体，布流箱体中布置有稳压板及相关装置，金属蒸汽通过喷嘴形成了均匀的气流，在喷嘴处设置导流板，导流板与待镀膜钢带之间形成有均匀的流场分布， 并通过调节导流板与钢带之间的距离，来调整钢带边部流场的偏斜程度，从而提高带钢镀膜的收得率。本发明投入少，操作简单，未来可以和真空镀膜技术成套输出。
附图说明
图1是专利申请BE1009321A6的示意图；
图2是专利申请BE1009317A61的示意图；
图3是专利申请JPS59177370A的示意图；
图4是专利申请US4552092A的示意图；
图5是专利申请WO2018/020311A1的示意图；
图6是专利申请CN103249860A的示意图；
图7是专利申请CN101175866A的示意图；
图8是图7中方形外壳的示意图；
图9是本发明真空镀膜装置的结构示意图；
图10是图9真空镀膜装置的侧视图
图11是图9真空镀膜装置中布流箱体、导流板与钢板的放大图。
具体实施方式
下面结合附图和实施例进一步说明本发明的技术方案。
请结合图9至图10所示，本发明提供一种真空镀膜装置，该真空镀膜装置能够提高真空镀膜收得率，所述真空镀膜装置在使用时位于钢板100的下方，该真空镀膜装置包括坩埚13，坩埚13内盛有金属液14，坩埚13外侧设有感应加热器15，对所述坩埚13内金属材料加热后，得到所述金属液14及金属蒸汽22，感应加热器15的功率可调，用以控制所述坩埚13内金属蒸汽22的压力，所述坩埚13顶部通过蒸汽管道16连有布流箱体17，所述布流箱体17和所述钢板100均置于真空室23内，所述蒸汽管道16上设有调压阀18，所述坩埚13通过所述调压阀18隔绝所述坩埚13内与所述布流箱体17及所述真空室23的气体流通，所述布流箱体17内设有一水平向的稳压板19，所述布流箱体17顶部连有喷嘴20，所述喷嘴20顶 部沿蒸汽喷出的方向布置有导流板21，以提高收得率，当所述蒸汽管道16上的所述调压阀18打开后，所述金属蒸汽22通过所述稳压板19、所述喷嘴20到达所述钢板100上，形成镀膜。
较佳的，所述导流板21的作用是尽可能的使得通过所述喷嘴出口的气流垂直射向所述钢板100，避免发生偏流，从而增加所述钢板100的收得率。
其中，所述喷嘴20的出口至所述钢板100的距离Da为10～200mm；
所述导流板21的高度Db为10～199mm；
所述导流板21顶部至所述钢板100的距离Dc为1～190mm；
所述导流板21与所述喷嘴20出口之间的夹角Dd为60°～135°。
进一步地，所述Da、Db、Dc和Dd之间的关系如下：
Da＝Db+Dc；
当Da＝100～200mm，Db＝(1/5～1/2)Da时，Dd＝60°～90°；
当Da＝100～200mm，Db＝(1/2～2/3)Da时，Dd＝70°～110°；
当Da＝100～200mm，Db＝(2/3～4/5)Da时，Dd＝80°～135°；
当Da＝10～100mm，Db＝(1/5～1/2)Da时，Dd＝60°～100°；
当Da＝10～100mm，Db＝(1/2～2/3)Da时，Dd＝70°～120°；
当Da＝10～100mm，Db＝(2/3～4/5)Da时，Dd＝80°～135°。
较佳的，所述喷嘴20工作时的内部压力为500～500000Pa。
较佳的，所述喷嘴20为石墨、陶瓷或者惰性金属材质制成，以及其它耐高温、耐磨、并能进行加工的材料。
较佳的，所述喷嘴出口设置为狭缝型或多孔型，所述狭缝型喷嘴出口设置为直线形或者曲线形，所述多孔型喷嘴出口设置为矩形、圆形或梯形。
较佳的，所述稳压板19为多孔结构，孔隙形状为矩形、圆形或三角形，或者说任意多边形或圆形，本申请并不特别限制；孔隙走向为直线、曲线或多层结构。
较佳的，所述金属液14可包含的范围为锌、镁、铝、锡、镍、铜、铁等金属，此外还包含这些元素的低熔点(低于2000℃)氧化物。
较佳的，钢板100在真空镀膜前经过等离子等装置清洗，预热温度达 到80～300℃。
本发明真空镀膜装置具体使用步骤如下：
1)金属块体在坩埚13中受到感应加热器15的作用熔化成金属液14，金属液14在更高的过热度和低压下开始汽化，逐步形成金属蒸汽22；
2)开始阶段，与坩埚13相连的蒸汽管道16上的调压阀18处于关闭状态；
3)随着金属液14不断地汽化，坩埚13内腔的蒸汽压力不断增大，当坩埚13内腔达到一定压力时，例如5000～500000Pa，开启调压阀18，使其保持固定的压力流出；
4)增大感应加热器15的功率，从而弥补因调压阀18开启而减小的压力，调整感应加热器15的功率，使得坩埚13内腔的压力保持在恒定范围；
5)调压阀18开启后，金属蒸汽22沿蒸汽管道16流动，当进入到布流箱体17时，由于稳压板19的作用，使得由金属蒸汽形成的高速流的压力降低，并且稳压板的孔隙走向对高速流进行分配，使金属蒸汽均匀地沿稳压板19上的孔隙流出，随后从布流箱体17顶部的喷嘴20均匀地流出；
6)由于在喷嘴20顶部布置有导流板21，减小了镀膜过程中蒸汽喷出喷嘴20后发生的偏流，使得金属蒸汽22经过钢板100后从能够从钢板两侧流出，从而提高了镀膜的收得率；
7)由于喷嘴出口狭小，使得金属蒸汽22流出时形成了较大的速度，此时在其上方布置了运动的钢板100，金属蒸汽22温度较高，遇到温度较低的钢板100时，迅速凝固，形成了金属镀膜24。
实施例
钢板100表面蒸镀锌，钢板100宽度为1000mm，进行清洗干燥后，将钢板100加热至120℃。采用感应加热器15将锌蒸发，并控制感应加热器的功率，使得坩埚13内的压力升至20000Pa，此前调压阀18处于关闭状态。当坩埚13内气体压力达到20000Pa后，打开调压阀18，金属蒸汽22通过蒸汽管道16进入到布流箱体17，布流箱体17内部稳压板19为多孔结构或采用多孔介质稳压板，布流箱体17内部工作压力为5000Pa，喷 嘴20材质为石墨，喷嘴出口为直线形狭缝。
导流板21的外形采用长方形，相关参数如下：
Da＝120mm；
Db＝70mm；
Dc＝50mm；
Dd＝90°。
钢板的收得率达到了95％。。
本技术领域中的普通技术人员应当认识到，以上的实施例仅是用来说明本发明，而并非用作为对本发明的限定，只要在本发明的实质精神范围内，对以上所述实施例的变化、变型都将落在本发明的权利要求书范围内。

Claims (8)

  1. 一种真空镀膜装置，其特征在于：包括坩埚，所述坩埚外侧设有感应加热器，所述坩埚顶部通过蒸汽管道连有布流箱体，所述蒸汽管道内设有调压阀，所述布流箱体内设有一水平向的稳压板，所述布流箱体顶部连有喷嘴，所述喷嘴顶部沿蒸汽喷出的方向布置有导流板；
    所述喷嘴出口至所述钢板的距离Da为10～200mm；
    所述导流板的高度Db为10～199mm；
    所述导流板顶部至所述钢板的距离Dc为1～190mm；
    所述导流板与所述喷嘴出口之间的夹角Dd为60°～135°。
  2. 如权利要求1所述的真空镀膜装置，其特征在于：所述稳压板为多孔结构，孔隙形状为矩形、圆形或三角形，孔隙走向为直线、曲线或多层结构。
  3. 如权利要求1所述的真空镀膜装置，其特征在于：所述喷嘴具有喷嘴出口，所述喷嘴出口设置为狭缝型或多孔型。
  4. 如权利要求3所述的真空镀膜装置，其特征在于：所述狭缝型的喷嘴出口设置为直线形或者曲线形。
  5. 如权利要求3所述的真空镀膜装置，其特征在于：所述多孔型的喷嘴出口设置为矩形、圆形或梯形。
  6. 如权利要求3所述的真空镀膜装置，其特征在于：所述喷嘴为石墨、陶瓷或者金属材质制成。
  7. 如权利要求1所述的真空镀膜装置，其特征在于：所述Da、Db、Dc和Dd之间的关系如下：
    Da＝Db+Dc；
    当Da＝100～200mm，Db＝(1/5～1/2)Da时，Dd＝60°～90°；
    当Da＝100～200mm，Db＝(1/2～2/3)Da时，Dd＝70°～110°；
    当Da＝100～200mm，Db＝(2/3～4/5)Da时，Dd＝80°～135°；
    当Da＝10～100mm，Db＝(1/5～1/2)Da时，Dd＝60°～100°；
    当Da＝10～100mm，Db＝(1/2～2/3)Da时，Dd＝70°～120°；
    当Da＝10～100mm，Db＝(2/3～4/5)Da时，Dd＝80°～135°。
  8. 如权利要求1所述的真空镀膜装置，其特征在于：还包括真空室，所述布流箱体和所述钢板均置于所述真空室内。
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Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4552092A (en) 1984-09-19 1985-11-12 Mitsubishi Jukogyo Kabushiki Kaisha Vacuum vapor deposition system
BE1009317A6 (fr) 1995-05-10 1997-02-04 Centre Rech Metallurgique Dispositif et installation pour revetir une bande d'acier.
BE1009321A6 (fr) 1995-05-17 1997-02-04 Centre Rech Metallurgique Dispositif de revetement d'une bande d'acier galvanisee.
US20050034669A1 (en) * 2002-08-27 2005-02-17 General Electric Company Vapor deposition process and apparatus therefor
CN101175866A (zh) 2005-05-31 2008-05-07 科鲁斯技术有限公司 用于涂覆基材的设备及方法
CN103249860A (zh) 2010-12-13 2013-08-14 Posco公司 连续涂布设备
KR20140071821A (ko) * 2012-12-04 2014-06-12 주식회사 선익시스템 믹싱 영역이 포함된 선형 증발원
JP2015010257A (ja) * 2013-06-28 2015-01-19 株式会社日立ハイテクファインシステムズ 真空蒸着装置の蒸発源並びにそれを用いた真空蒸着装置及び真空蒸着方法
CN206289295U (zh) * 2016-11-30 2017-06-30 信利（惠州）智能显示有限公司 一种线性蒸发源
WO2018020311A1 (en) 2016-07-27 2018-02-01 Arcelormittal Apparatus and method for vacuum deposition
CN109321878A (zh) * 2017-07-31 2019-02-12 三星显示有限公司 用于制造显示装置的设备
CN109487216A (zh) * 2018-12-29 2019-03-19 深圳市华星光电半导体显示技术有限公司 线源装置和oled蒸镀机

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007092149A (ja) 2005-09-29 2007-04-12 Tokyo Electron Ltd 原料供給装置および蒸着装置
JP5063969B2 (ja) 2006-09-29 2012-10-31 東京エレクトロン株式会社 蒸着装置、蒸着装置の制御装置、蒸着装置の制御方法および蒸着装置の使用方法
EP2048261A1 (fr) * 2007-10-12 2009-04-15 ArcelorMittal France Générateur de vapeur industriel pour le dépôt d'un revêtement d'alliage sur une bande métallique
JP4782219B2 (ja) * 2009-07-02 2011-09-28 三菱重工業株式会社 真空蒸着装置
CN101988185A (zh) * 2010-12-14 2011-03-23 无锡虹彩科技发展有限公司 镀膜源、真空镀膜装置及其镀膜工艺
KR101942471B1 (ko) * 2012-06-15 2019-01-28 삼성디스플레이 주식회사 증착 장치 및 이를 이용한 유기 발광 표시장치의 제조방법
KR101461738B1 (ko) 2012-12-21 2014-11-14 주식회사 포스코 가열장치 및 이를 포함하는 코팅 시스템
KR101465615B1 (ko) * 2013-04-11 2014-11-27 한국표준과학연구원 증발 증착 장치
US20150040970A1 (en) * 2013-08-06 2015-02-12 First Solar, Inc. Vacuum Deposition System For Solar Cell Production And Method Of Manufacturing
KR102307431B1 (ko) * 2015-01-22 2021-09-30 삼성디스플레이 주식회사 복수의 모듈을 갖는 증착원
JP2017025355A (ja) 2015-07-16 2017-02-02 パナソニックＩｐマネジメント株式会社 蒸着装置及び蒸着方法
CN107735509B (zh) * 2015-07-28 2019-12-13 夏普株式会社 蒸镀源、蒸镀装置和蒸镀膜制造方法
CN106637088B (zh) * 2016-12-09 2019-05-24 合肥鑫晟光电科技有限公司 一种喷嘴挡板及蒸镀装置
CN206438173U (zh) * 2017-02-15 2017-08-25 京东方科技集团股份有限公司 蒸发源装置及蒸发镀膜设备
KR102369676B1 (ko) 2017-04-10 2022-03-04 삼성디스플레이 주식회사 표시 장치의 제조장치 및 표시 장치의 제조방법
US20180327895A1 (en) * 2017-05-12 2018-11-15 Junying MU Evaporation apparatus
CN107815648B (zh) * 2017-09-26 2019-11-05 上海升翕光电科技有限公司 一种线性蒸发源装置及蒸镀设备
CN207537525U (zh) * 2017-11-29 2018-06-26 信利（惠州）智能显示有限公司 一种可自动调整倾斜角度的线性蒸镀源挡板
CN108103442A (zh) * 2017-12-29 2018-06-01 上海升翕光电科技有限公司 一种oled线性蒸发源结构

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4552092A (en) 1984-09-19 1985-11-12 Mitsubishi Jukogyo Kabushiki Kaisha Vacuum vapor deposition system
BE1009317A6 (fr) 1995-05-10 1997-02-04 Centre Rech Metallurgique Dispositif et installation pour revetir une bande d'acier.
BE1009321A6 (fr) 1995-05-17 1997-02-04 Centre Rech Metallurgique Dispositif de revetement d'une bande d'acier galvanisee.
US20050034669A1 (en) * 2002-08-27 2005-02-17 General Electric Company Vapor deposition process and apparatus therefor
CN101175866A (zh) 2005-05-31 2008-05-07 科鲁斯技术有限公司 用于涂覆基材的设备及方法
CN103249860A (zh) 2010-12-13 2013-08-14 Posco公司 连续涂布设备
KR20140071821A (ko) * 2012-12-04 2014-06-12 주식회사 선익시스템 믹싱 영역이 포함된 선형 증발원
JP2015010257A (ja) * 2013-06-28 2015-01-19 株式会社日立ハイテクファインシステムズ 真空蒸着装置の蒸発源並びにそれを用いた真空蒸着装置及び真空蒸着方法
WO2018020311A1 (en) 2016-07-27 2018-02-01 Arcelormittal Apparatus and method for vacuum deposition
CN206289295U (zh) * 2016-11-30 2017-06-30 信利（惠州）智能显示有限公司 一种线性蒸发源
CN109321878A (zh) * 2017-07-31 2019-02-12 三星显示有限公司 用于制造显示装置的设备
CN109487216A (zh) * 2018-12-29 2019-03-19 深圳市华星光电半导体显示技术有限公司 线源装置和oled蒸镀机

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP4029968A4

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