WO2021054055A1 - Module d'inspection, module d'inversion et dispositif d'inspection - Google Patents

Module d'inspection, module d'inversion et dispositif d'inspection Download PDF

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Publication number
WO2021054055A1
WO2021054055A1 PCT/JP2020/031843 JP2020031843W WO2021054055A1 WO 2021054055 A1 WO2021054055 A1 WO 2021054055A1 JP 2020031843 W JP2020031843 W JP 2020031843W WO 2021054055 A1 WO2021054055 A1 WO 2021054055A1
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WIPO (PCT)
Prior art keywords
module
inspected
inspection
unit
control unit
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PCT/JP2020/031843
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English (en)
Japanese (ja)
Inventor
真稔 島田
佐藤　祐介
慎也 谷口
Original Assignee
株式会社Ｓｃｒｅｅｎホールディングス
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Publication of WO2021054055A1 publication Critical patent/WO2021054055A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q7/00—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications

Definitions

  • the present invention relates to an inspection module, an inversion module and an inspection device.
  • an inspection device in which a part having a three-dimensional shape used in a drive unit of an automobile or the like and its surroundings is an inspection object (also referred to as a work) (for example, Patent Document 1 and the like).
  • the inspection device is designed for each specification according to the user's request. It is not easy to provide an inspection device that meets the needs of users.
  • the present invention has been made in view of the above problems, and an object of the present invention is to provide a technique for easily manufacturing an inspection device that flexibly responds to a user's request.
  • the inspection module includes a transport unit, a sensor unit, a moving mechanism, a detection unit, and a control unit.
  • the transport unit transports the object to be inspected between the inspection module and the outside of the inspection module.
  • the sensor unit performs processing for inspection of at least one of imaging and measurement of the object to be inspected.
  • the moving mechanism moves the position of the sensor unit relative to the object to be inspected.
  • the detection unit is for obtaining information on the posture and position of the object to be inspected.
  • the control unit adjusts the relative position of the sensor unit with respect to the object to be inspected by the moving mechanism based on the information obtained by the detection unit.
  • the inspection module according to the second aspect is the inspection module according to the first aspect, and the sensor unit includes an imaging unit with the object to be inspected as a subject.
  • the inspection module according to the third aspect is the inspection module according to the first or second aspect, and the transport unit includes a belt conveyor.
  • the reversing module according to the fifth aspect is the reversing module according to the fourth aspect, and the transport unit includes a belt conveyor.
  • the inspection device includes two or more modules connected to each other.
  • the two or more modules include a first module and a second module.
  • the first module includes a first transport unit, a first sensor unit, a first movement mechanism, a first detection unit, and a first control unit.
  • the first transport unit transports the object to be inspected between the first module and the outside of the first module.
  • the first sensor unit performs processing for inspection of at least one of imaging and measurement of the object to be inspected.
  • the first moving mechanism moves the position of the first sensor unit relative to the object to be inspected.
  • the first detection unit is for obtaining information relating to the posture and position of the object to be inspected.
  • the first control unit adjusts the relative position of the first sensor unit with respect to the object to be inspected by the moving mechanism based on the information obtained by the first detection unit.
  • the second module includes a second transport unit, a second sensor unit, a second moving mechanism, a second detection unit, and a second control unit.
  • the second transport unit transports the object to be inspected between the second module and the outside of the second module.
  • the second sensor unit performs processing for inspection of at least one of imaging and measurement of the object to be inspected.
  • the second moving mechanism moves the position of the second sensor unit relative to the object to be inspected.
  • the second detection unit is for obtaining information relating to the posture and position of the object to be inspected.
  • the second control unit adjusts the relative position of the second sensor unit with respect to the object to be inspected by the second moving mechanism based on the information obtained by the second detection unit.
  • the inspection device is the inspection device according to the eighth aspect, and the second control unit uses the information obtained by using the first detection unit and the second detection unit. Based on the information obtained in the above, the second moving mechanism adjusts the relative position of the second sensor unit with respect to the object to be inspected, or the first control unit causes the first detection unit. The relative position of the first sensor unit with respect to the object to be inspected is adjusted by the first moving mechanism based on the information obtained by using the second detection unit and the information obtained by using the second detection unit. Let me.
  • the inspection device is an inspection device according to any one of the sixth to ninth aspects, and transports the object to be inspected located in each of the two or more modules. It is transported to the module on the downstream side of the above at the same time.
  • the inspection device according to the eleventh aspect is an inspection device according to any one of the sixth to tenth aspects, and the first transport section and the second transport section each include a belt conveyor.
  • the inspection module for example, by moving the sensor unit relative to the object to be inspected, one sensor unit is used for inspection of one or more locations of the object to be inspected. Can be processed. Therefore, for example, an inspection device can be manufactured by appropriately combining two or more modules including one or two or more inspection modules. Further, for example, even if at least one of the posture and the position of the inspected object deviates when the inspected object is carried into the inspection module from another module, the relative of the sensor unit to the inspected object according to the deviation. Position can be adjusted. Therefore, for example, it is possible to easily manufacture an inspection device that flexibly meets the user's request such as the shape and size of the object to be inspected, the space for installing the device, and the budget.
  • one imaging unit can take an image of one or more locations of the object to be inspected. It can be carried out. Therefore, for example, an inspection device can be manufactured by appropriately combining two or more modules including one or two or more imaging modules. Further, for example, even if at least one of the posture and the position of the inspected object deviates when the inspected object is carried into the inspection module from another module, the relative of the imaging unit to the inspected object according to the deviation. Position can be adjusted.
  • the inspection module for example, when the inspected object is transferred from the belt conveyor of the adjacent module to the belt conveyor of the inspection module, at least one of the posture and the position of the inspected object is changed. Even if there is a deviation, the relative position of the sensor unit with respect to the object to be inspected can be adjusted according to the deviation.
  • the inversion module for example, two or more inversion modules including an inspection module for performing an inspection process for an inspected object and an inversion module for inversion of the inspected object.
  • the inspection device can be manufactured by appropriately combining the modules. Further, for example, even if at least one of the posture and the position of the object to be inspected is deviated when the object to be inspected is carried from another module to the reversing module, the holding portion is relative to the object to be inspected according to the deviation. By adjusting the position, the object to be inspected can be held and inverted by the holding portion. Therefore, for example, it is possible to easily manufacture an inspection device that flexibly meets the user's request such as the shape and size of the object to be inspected, the space for installing the device, and the budget.
  • the reversing module for example, when the object to be inspected is transferred from the belt conveyor of the adjacent module to the belt conveyor of the reversing module, at least one of the posture and the position of the object to be inspected is displaced. However, the relative position of the holding portion with respect to the object to be inspected can be adjusted according to the deviation.
  • two or more modules including a first module for performing an inspection process for an inspected object and a second module for inverting the inspected object.
  • the inspection device can be manufactured by appropriately combining the above modules. Further, for example, even if at least one of the posture and the position of the object to be inspected deviates when the object to be inspected is carried from another module to the first module, the relative of the sensor unit to the object to be inspected according to the deviation. Position can be adjusted. Further, for example, even if at least one of the posture and the position of the object to be inspected is deviated when the object to be inspected is carried from another module to the second module, the relative of the holding portion to the object to be inspected according to the deviation. Position can be adjusted. Therefore, for example, it is possible to easily manufacture an inspection device that flexibly meets the user's request such as the shape and size of the object to be inspected, the space for installing the device, and the budget.
  • the inspection device for example, when the object to be inspected is carried into the second module after the first module, it is obtained in the second module by using the detection unit in the first module.
  • the information is used to adjust the relative position of the holding part with respect to the object to be inspected, and when the object to be inspected is carried into the first module after the second module, in the first module, in the second module.
  • the position of the sensor unit relative to the object to be inspected can be adjusted by using the information obtained by using the detection unit. This can reduce, for example, the configuration and time required to obtain the information.
  • an inspection device in which two or more modules including a first module and a second module for performing inspection processing on an object to be inspected are appropriately combined. Can be manufactured. Further, for example, even if at least one of the posture and the position of the object to be inspected is displaced when the object to be inspected is carried from another module to the first module or the second module, the sensor for the object to be inspected is displaced according to the deviation. The relative position of the parts can be adjusted. Therefore, for example, it is possible to easily manufacture an inspection device that flexibly meets the user's request such as the shape and size of the object to be inspected, the space for installing the device, and the budget.
  • the inspection process for a plurality of locations of the objects to be inspected may be shared and carried out in two or more inspection modules. It is possible to increase the number of objects to be inspected that have been processed for inspection discharged from the inspection device per hour.
  • the inspection device for example, when the object to be inspected is carried into the second module after the first module, in the second module, the first detection unit in the first module is used. Using the obtained information, the position of the second sensor unit relative to the object to be inspected is adjusted, and when the object to be inspected is carried into the first module after the second module, in the first module, The position of the first sensor unit relative to the object to be inspected can be adjusted by using the information obtained by using the second detection unit in the second module. This can reduce, for example, the configuration and time required to obtain the information.
  • the inspection device for example, by simultaneously transporting the object to be inspected between all the modules to the adjacent module on the downstream side, the inspection device is discharged from the inspection device per unit time.
  • the number of objects to be inspected that have been processed can be increased.
  • the inspection device for example, when the object to be inspected is transferred from the belt conveyor of one module to the belt conveyor of the next module, at least one of the posture and the position of the object to be inspected is displaced.
  • the relative position of the sensor unit or the holding unit with respect to the object to be inspected can be adjusted according to the deviation.
  • FIG. 1A is a perspective view schematically showing the appearance of the inspection device according to the first example of the first embodiment.
  • FIG. 1B is a diagram showing a schematic configuration of an inspection device according to a first example of the first embodiment.
  • FIG. 2A is a perspective view showing a state of manufacturing the inspection device according to the first example of the first embodiment.
  • FIG. 2B is a diagram schematically showing a state of manufacturing the inspection device according to the first example of the first embodiment.
  • FIG. 3A is a diagram showing an example of a main physical configuration of the inspection module.
  • FIG. 3B is a diagram showing an example of the main physical configuration of the inversion module.
  • FIG. 4 is a diagram showing an example of a partial functional configuration of the inspection device according to the first embodiment.
  • FIG. 1A is a perspective view schematically showing the appearance of the inspection device according to the first example of the first embodiment.
  • FIG. 1B is a diagram showing a schematic configuration of an inspection device according to a first example of the first embodiment
  • FIG. 5 is a diagram showing an example of a partial functional configuration of the inspection device according to the first embodiment.
  • FIG. 6 is a diagram showing an example of a partial functional configuration of the inspection device according to the first embodiment.
  • FIG. 7 is a diagram showing an example of a partial functional configuration of the inspection device according to the first embodiment.
  • FIG. 8 is a diagram showing an example of a partial functional configuration of the inspection device according to the first embodiment.
  • FIG. 9 is a diagram showing an example of a partial functional configuration of the inspection device according to the first embodiment.
  • FIG. 10 is a diagram showing an example of a partial functional configuration of the inspection device according to the first embodiment.
  • FIG. 11A is a diagram showing a schematic configuration of an inspection device according to a second example composed of a combination of a plurality of modules.
  • FIG. 11A is a diagram showing a schematic configuration of an inspection device according to a second example composed of a combination of a plurality of modules.
  • FIG. 11B is a diagram showing a schematic configuration of an inspection device according to a third example, which is composed of a combination of a plurality of modules.
  • FIG. 12A is a diagram showing a schematic configuration of an inspection device according to a fourth example composed of a combination of a plurality of modules.
  • FIG. 12B is a diagram showing a schematic configuration of an inspection device according to a fifth example, which is composed of a combination of a plurality of modules.
  • FIG. 12C is a diagram showing a schematic configuration of an inspection device according to a sixth example composed of one module.
  • FIG. 13 is a diagram showing a timing chart relating to an example of an operation targeting one object to be inspected in the inspection device according to the first example of the first embodiment.
  • FIG. 12A is a diagram showing a schematic configuration of an inspection device according to a fourth example composed of a combination of a plurality of modules.
  • FIG. 12B is a diagram showing a schematic configuration of an inspection device according to a fifth example
  • FIG. 14 is a diagram showing a timing chart relating to an example of an operation targeting a plurality of objects to be inspected in the inspection device according to the first example of the first embodiment.
  • FIG. 15 is a diagram showing a schematic configuration of an example of an inspection device composed of a combination of a plurality of modules including a transfer module having a curved belt conveyor.
  • FIG. 16 is a diagram showing a schematic configuration of another example of an inspection device composed of a combination of a plurality of modules including a transfer module having a curved belt conveyor.
  • FIG. 17A is a diagram showing a schematic configuration of an example of an inspection device composed of a combination of a plurality of modules including a transfer module having a transfer robot.
  • FIG. 17B is a diagram showing a schematic configuration of another example of an inspection device composed of a combination of a plurality of modules including a transfer module having a transfer robot.
  • FIG. 18A is a diagram showing an example of an acquisition mode of information relating to the posture and position of the object to be inspected in one module on the upstream side.
  • FIG. 18B is a diagram showing an example of an acquisition mode of information relating to the posture and position of the object to be inspected in one module on the downstream side.
  • the expression indicating the shape not only expresses the shape strictly geometrically, but also, for example, unevenness or unevenness or within a range in which the same effect can be obtained.
  • a shape having a chamfer or the like shall also be represented.
  • the expressions “equipped”, “equipped”, “equipped”, “included”, or “have” one component are not exclusive expressions that exclude the existence of other components.
  • the expression “concatenation” includes a state in which two elements are in contact with each other and a state in which the two elements are separated from each other with another element in between.
  • FIG. 1A is a perspective view schematically showing the appearance of the inspection device 1 according to the first example of the first embodiment.
  • FIG. 1B is a diagram showing a schematic configuration of the inspection device 1 according to the first example of the first embodiment.
  • FIG. 2A is a perspective view showing a state in which the inspection device 1 according to the first example of the first embodiment is manufactured.
  • FIG. 2B is a diagram schematically showing a state in which the inspection device 1 according to the first example of the first embodiment is manufactured.
  • the inspection device 1 includes, for example, an input module 11, four inspection modules 12, an inversion module 13, and an discharge module 14. There is. More specifically, in the inspection device 1, for example, the input module 11, the first inspection module (also referred to as the first inspection module) 121, and the second inspection module (second inspection module) 122, inversion module 13, third inspection module (also referred to as third inspection module) 123, fourth inspection module (also referred to as fourth inspection module) 124, and discharge. Module 14 and the module 14 are located in the + X direction in a state of being connected in the order described in this description.
  • the loading module 11, the inspection module 12, the reversing module 13, and the discharging module 14 are also abbreviated as “modules” as appropriate.
  • the plurality of modules 11, 12, 13, 14 can be manufactured separately.
  • the inspection apparatus 1 can be manufactured by connecting the plurality of modules 11, 12, 13, and 14 to each other in the + X direction. Therefore, for example, an inspection device can be manufactured by appropriately combining two or more modules including one or two or more inspection modules 12.
  • the connection between the modules 11, 12, 13 and 14 can be realized by, for example, a member for connection and a fastening member such as a screw.
  • Modules 11, 12, 13 and 14 have, for example, a tubular portion (also referred to as a tubular portion) having an internal space on which an object to be inspected (also referred to as an inspected object or a work) W0 is placed and conveyed on the upper portion. Has).
  • This tubular portion is positioned so as to penetrate in the + X direction, for example.
  • the loading module 11 has a tubular portion 11tb
  • the inspection module 12 has a tubular portion 12tb
  • the reversing module 13 has a tubular portion 13tb
  • the discharging module 14 Has a tubular portion 14tb.
  • one tubular portion (cylindrical portion) 1tb forming a path (also referred to as a transport path) Rt1 capable of transporting the inspected object W0 between the plurality of modules 11, 12, 13, and 14 is formed.
  • a plurality of modules 11, 12, 13, 14 are connected to each other.
  • a two-dot chain line arrow is drawn along the transport path Rt1 along the + X direction.
  • the tubular portion 1tb includes a tubular portion 11tb of the input module 11, a tubular portion 12tb of the first inspection module 121, a tubular portion 12tb of the second inspection module 122, and an inversion module 13.
  • the tubular portion 13tb of the third inspection module 123, the tubular portion 12tb of the fourth inspection module 124, and the tubular portion 14tb of the discharge module 14 are connected in this order in the + X direction. It is configured in the state that it is.
  • the inspection device 1 for example, from the input module 11, the first inspection module 121, the second inspection module 122, the reversing module 13, the third inspection module 123, the fourth inspection module 124, and the discharge module 14 are in this order.
  • the upper surface portion located in the + Z direction and the side surface portion located in the ⁇ Y direction in each of the tubular portions 11tb, 12tb, 13tb, and 14tb may or may not be transparent, for example.
  • the charging module 11 is a module in which the object to be inspected W0 is charged from the outside of the inspection device 1.
  • the input module 11 is located first in the transport path Rt1 of the object to be inspected W0 among two or more modules including one or two or more inspection modules 12 included in the inspection device 1, for example. ..
  • the charging module 11 has a belt conveyor which is a transport unit Cv1 capable of transporting the object to be inspected W0, and each inspection module 12 has the object to be inspected W0.
  • the reversing module 13 has a belt conveyor which is a transport unit Cv3 capable of transporting the inspected object W0, and the discharge module 14 conveys the inspected object W0. It has a belt conveyor which is a possible transport unit Cv4.
  • the belt conveyor has, for example, a pulley that rotates according to a driving force of a driving unit such as a motor, a roller, and a belt that is located along the pulley and the outer periphery of the roller.
  • the charging module 11 has an openable / closable portion (also referred to as an opening / closing portion) 11oc at the end portion of the tubular portion 11tb opposite to the inspection module 12 in the ⁇ X direction.
  • the opening / closing unit 11oc has, for example, a door or shutter that can be opened / closed.
  • the unit to be inspected W0 is charged into the charging module 11 via, for example, the opening / closing unit 11oc.
  • the worker Op0 throws the inspected object W0 into the throwing module 11.
  • the operator Op0 places the object to be inspected W0 on the belt according to the mark drawn or projected on the belt of the belt conveyor as the transport unit Cv1.
  • a sensor that detects the object to be inspected W0 placed on the belt may detect that the object to be inspected W0 has been charged into the charging module 11.
  • a robot or the like provided outside the inspection device 1 may inject the object to be inspected W0 into the injection module 11.
  • the object to be inspected W0 placed on the belt of the belt conveyor as the transport unit Cv1 is located outside the loading module 11 in the + X direction by the transport unit Cv1.
  • Can be delivered to the transport unit Cv2 also referred to as the transport unit Cv21).
  • the inspection module 12 is, for example, a module that performs imaging as an inspection process for an object to be inspected W0.
  • the first inspection module 121 is, for example, a process for inspection of the object to be inspected W0 delivered from the transport unit Cv1 of the input module 11 to the transport unit Cv21 of the first inspection module 121. Imaging can be performed.
  • the object to be inspected W0 imaged by the first inspection module 121 is located outside the first inspection module 121 in the + X direction from the first inspection module 121 by the transport unit Cv21. Can be delivered to the transport unit Cv2 (also referred to as the transport unit Cv22).
  • the posture and position of the inspected object W0 are displaced. In some cases.
  • the second inspection module 122 is, for example, a process for inspection of the object to be inspected W0 delivered from the transport unit Cv21 of the first inspection module 121 to the transport unit Cv22 of the second inspection module 122. Imaging can be performed.
  • the object to be inspected W0 imaged by the second inspection module 122 is a transport portion of the reversing module 13 located outside the second inspection module 122 in the + X direction from the second inspection module 122 by the transport unit Cv22. It can be delivered to Cv3.
  • the posture and position of the inspected object W0 may deviate. ..
  • the third inspection module 123 is for inspection, for example, targeting the object to be inspected W0 delivered from the transport unit Cv3 of the reversing module 13 to the transport unit Cv2 (also referred to as the transport unit Cv23) of the third inspection module 123. Imaging can be performed as a process of.
  • the object to be inspected W0 imaged by the third inspection module 123 is located outside the third inspection module 123 in the + X direction from the third inspection module 123 by the transport unit Cv23. Can be delivered to the transport unit Cv2 (also referred to as the transport unit Cv24).
  • the fourth inspection module 124 targets the object to be inspected W0 delivered from the transport unit Cv23 of the third inspection module 123 to the transport unit Cv24 of the fourth inspection module 124, and serves as an inspection process. Imaging can be performed.
  • the object to be inspected W0 imaged by the fourth inspection module 124 is the transport portion of the discharge module 14 located outside the fourth inspection module 124 in the + X direction from the fourth inspection module 124 by the transport unit Cv24. It can be delivered to Cv4.
  • FIG. 3A is a diagram showing an example of a main physical configuration of the inspection module 12.
  • the inspection module 12 includes, for example, a sensor unit 12s, a moving mechanism 12t, and a detection unit 12d.
  • the sensor unit 12s can perform imaging as an inspection process for the object to be inspected W0, for example.
  • the inspection module 12 may have one sensor unit 12s, or may have two or more sensor units 12s.
  • the inspection module 12 has two sensor units 12s including a first sensor unit 12s1 and a second sensor unit 12s2.
  • an image pickup unit having an image pickup device such as a charge-coupled device (CCD) is applied to the sensor section 12s.
  • This imaging unit can take an image of at least a part of the object to be inspected W0 as a subject.
  • the sensor unit 12s may have illumination, for example.
  • illumination for illumination, for example, planar illumination using a light emitting diode (LED) or the like is applied.
  • LED light emitting diode
  • the moving mechanism 12t can move the relative position of the sensor unit 12s with respect to the object to be inspected W0, for example.
  • the inspection module 12 may have one moving mechanism 12t or two or more moving mechanisms 12t according to the number of sensor units 12s, for example.
  • the inspection module 12 includes a first moving mechanism 12t1 and a second moving mechanism 12t2 arranged so as to face each other in the ⁇ Y direction so as to sandwich the transport portion Cv2. It has two moving mechanisms 12t.
  • the first moving mechanism 12t1 can move the relative position of the first sensor unit 12s1 with respect to the object to be inspected W0.
  • the second moving mechanism 12t2 can move the relative position of the second sensor unit 12s2 with respect to the object to be inspected W0. Thereby, for example, even if the inspected object W0 becomes large, the inspected object W0 can be imaged from multiple directions by moving the sensor unit 12s by the moving mechanism 12t.
  • the object W0 to be inspected may have a size of, for example, about 550 mm in length, about 550 mm in width, and about 200 mm in height.
  • the inspection apparatus 1 may be combined with one or more inspection modules 12. Can be manufactured.
  • the reference portion Pt0 has, for example, a rotating portion Pr1 that rotatably holds the first movable portion Pt1 about the first axis Pl1 along the + Z direction.
  • the first movable portion Pt1 has, for example, a second rotating portion Pr2 that rotatably holds the second movable portion Pt2 about the second axis Pl2 along the horizontal direction.
  • the second movable portion Pt2 has, for example, a third rotating portion Pr3 that holds the third movable portion Pt3 rotatably around the third axis Pl3 along the horizontal direction.
  • the third movable portion Pt3 has, for example, a fourth rotating portion Pr4 that rotatably holds the fourth movable portion Pt4 around the fourth axis Pl4 that is perpendicular to the third axis Pl3.
  • the fourth movable portion Pt4 has, for example, a fifth rotating portion Pr5 that holds the fifth movable portion Pt5 rotatably around the fifth axis Pl5 that is perpendicular to the fourth axis Pl4.
  • the fifth movable portion Pt5 has, for example, a sixth rotating portion Pr6 that holds the sixth movable portion Pt6 rotatably around the sixth axis Pl6 that is perpendicular to the fifth axis Pl5.
  • the sensor unit 12s is fixed to the sixth movable unit Pt6.
  • the detection unit 12d can obtain information related to the posture and position of the object to be inspected W0, for example.
  • the inspection module 12 may have one detection unit 12d, or may have two or more detection units 12d.
  • the inspection module 12 has one detection unit 12d located in the + Z direction as the upward direction of the transport unit Cv2.
  • an image pickup device having a charge-coupled device (CCD) or the like is applied to the detection unit 12d.
  • the detection unit 12d may have illumination, for example.
  • the information obtained by the detection unit 12d is used, for example, to adjust the relative position of the sensor unit 12s with respect to the object to be inspected W0 by the moving mechanism 12t.
  • the holding unit 13h can hold the inspected object W0 in order to invert the inspected object W0, for example.
  • the reversing module 13 may have one holding portion 13h, or may have two or more holding portions 13h.
  • the reversing module 13 has one holding portion 13h.
  • a hand having two or more fingers capable of holding the object to be inspected W0 is applied to the holding portion 13h.
  • the moving mechanism 13t can reverse the inspected object W0 by moving the holding portion 13h while the inspected object W0 is held by the holding portion 13h, for example.
  • the reversing module 13 may have, for example, one moving mechanism 13t for one holding portion 13h. More specifically, for example, when one holding portion 13h is present, the reversing module 13 may have one moving mechanism 13t, and when two or more holding portions 13h are present. May have two or more moving mechanisms 13t. In the example of FIG. 3B, the reversing module 13 has one moving mechanism 13t arranged on the side of the transport portion Cv3.
  • the discharge module 14 is, for example, a module in which the object to be inspected W0 is discharged from the inside of the inspection device 1 to the outside of the inspection device 1.
  • the discharge module 14 is located at the end of the transport path Rt1 of the object to be inspected W0 among two or more modules including one or two or more inspection modules 12 included in the inspection device 1, for example. ..
  • the discharge module 14 has, for example, a portion (opening / closing portion) 14oc of the tubular portion 14tb that can be opened / closed at an end portion in the + X direction opposite to the inspection module 12.
  • the opening / closing unit 14oc has, for example, a door or shutter that can be opened / closed.
  • the inspected portion W0 is discharged to the outside of the discharge module 14 via, for example, the opening / closing unit 14oc.
  • the worker Op0 discharges the inspected object W0 to the outside of the discharge module 14.
  • a robot or the like provided outside the inspection device 1 may discharge the inspected object W0 from the inside of the discharge module 14 to the outside.
  • FIG. 4 is a block diagram mainly showing an example of the functional configuration of the input module 11.
  • FIG. 5 is a block diagram mainly showing an example of the functional configuration of the inspection module 12 (specifically, the first inspection module 121).
  • FIG. 6 is a block diagram mainly showing an example of the functional configuration of the inspection module 12 (specifically, the second inspection module 122).
  • FIG. 7 is a block diagram mainly showing an example of the functional configuration of the inversion module 13.
  • FIG. 8 is a block diagram mainly showing an example of the functional configuration of the inspection module 12 (specifically, the third inspection module 123).
  • FIG. 9 is a block diagram mainly showing an example of the functional configuration of the inspection module 12 (specifically, the fourth inspection module 124).
  • FIG. 10 is a block diagram mainly showing an example of the functional configuration of the discharge module 14.
  • the input module 11 includes, for example, the integrated control unit C0, the input unit 11i, the transport control unit Cc1, and the connection unit 11h, which are electrically connected via the wiring Wr1. Have. Further, the input module 11 has, for example, an output unit 11d connected to the overall control unit C0 and a transfer unit Cv1 connected to the transfer control unit Cc1.
  • the integrated control unit C0 can control the operation of the inspection device 1 in an integrated manner, for example.
  • the integrated control unit C0 has, for example, a calculation unit, a memory, a storage unit, and the like.
  • the arithmetic unit is composed of, for example, one or more central processing units (CPU) and the like.
  • the memory is composed of, for example, a volatile storage medium such as RAM (Random Access Memory).
  • the storage unit is composed of, for example, a non-volatile storage medium such as a hard disk drive (Hard Disk Drive HDD) or a solid state drive (Solid State Drive: SSD).
  • the storage unit can store, for example, a program, various types of information, and the like.
  • the arithmetic unit realizes various functions by reading and executing a program stored in the storage unit, for example.
  • the RAM is used as, for example, a workspace, and information that is temporarily generated or acquired is stored.
  • At least a part of the functions of the functional configuration realized by the integrated control unit C0 may be configured by hardware such as a dedicated electronic circuit, for example.
  • the transport control unit Cc1 can control the operation of the transport unit Cv1, for example.
  • the transport control unit Cc1 has, for example, a configuration similar to that of a computer including a calculation unit, a memory, and a storage unit.
  • the transfer control unit Cc1 can realize the function of the transfer control unit Cc1 by, for example, executing the program in the storage unit in the calculation unit.
  • the transport control unit Cc1 can control the operation of the transport unit Cv1 by controlling the rotation of at least one pulley on the belt conveyor, for example.
  • At least a part of the functions of the functional configuration realized by the transport control unit Cc1 may be configured by hardware such as a dedicated electronic circuit, for example.
  • connection portion 11h is, for example, a portion that electrically connects to a module other than the input module 11 among a plurality of modules constituting the inspection device 1.
  • the connection portion 11h is, for example, a hub type in which the wirings Wr2 of a plurality of modules are electrically connected separately, but is a type in which the wirings Wr2 of a plurality of modules are electrically connected in series. There may be.
  • the portion of the wiring Wr2 in the module of interest is drawn with a solid line, and the portion of the module not of interest is drawn with a chain double-dashed line.
  • the inspection module 12 has two sensor control units Cs2 and two movement control units Ct2.
  • the inspection module 12 includes, for example, the first sensor control unit Cs2 (also referred to as the first sensor control unit Cs21) and the second sensor control unit Cs2 (also referred to as the second sensor control unit Cs22). 2 including two sensor control units Cs2 including, a first movement control unit Ct2 (also referred to as a first movement control unit Ct21) and a second movement control unit Ct2 (also referred to as a second movement control unit Ct22). It has two movement control units Ct2. In this case, as shown in FIG.
  • the inspection module 12 has two sensor units 12s including a first sensor unit 12s1 and a second sensor unit 12s2, and has a first sensor unit 12s. It has two moving mechanisms 12t including a moving mechanism 12t1 and a second moving mechanism 12t2.
  • the first sensor unit 12s1 is connected to the first sensor control unit Cs21
  • the second sensor unit 12s2 is connected to the second sensor control unit Cs22.
  • the first movement mechanism 12t1 is connected to the first movement control unit Ct21
  • the second movement mechanism 12t2 is connected to the second movement control unit Ct22.
  • one sensor control unit Cs2 and one movement control unit Ct2 may be present.
  • Each of the transport control unit Cc2, the detection control unit Cd2, the sensor control unit Cs2, and the movement control unit Ct2 has a configuration similar to that of a computer including, for example, a calculation unit, a memory, and a storage unit.
  • the transfer control unit Cc2 can realize the function of the transfer control unit Cc2 by, for example, executing the program in the storage unit in the calculation unit.
  • the transport control unit Cc2 can control the operation of the transport unit Cv2 by controlling the rotation of at least one pulley on the belt conveyor, for example.
  • At least a part of the functions of the functional configuration realized by the transport control unit Cc2 may be configured by hardware such as a dedicated electronic circuit.
  • the detection control unit Cd2 can realize the function of the detection control unit Cd2 by, for example, executing the program in the storage unit in the calculation unit.
  • the detection control unit Cd2 can control the operation of the detection unit 12d and acquire information related to the posture and position of the object to be inspected W0 obtained by the detection unit 12d.
  • the detection control unit Cd2 may perform calculations based on information related to the posture and position of the object to be inspected W0, for example.
  • the detection control unit Cd2 captures an image (also referred to as an actual image) of the object to be inspected W0 obtained from the detection unit 12d, and a reference posture and position of the object to be inspected W0 prepared in advance.
  • the master image may be, for example, an image that actually captures the object W0 to be inspected, or an image drawn by computer graphics.
  • a method of detecting and matching feature points, template matching, and the like can be used.
  • the calculation for detecting the deviation amount of the object to be detected W0 from the reference posture and position may be performed by another control unit such as the integrated control unit C0.
  • At least a part of the functions of the functional configuration realized by the detection control unit Cd2 may be configured by hardware such as a dedicated electronic circuit, for example.
  • the sensor control unit Cs2 can realize the function of the sensor control unit Cs2 by, for example, executing a program in the storage unit in the calculation unit.
  • the sensor control unit Cs2 can control the operation of the sensor unit 12s and acquire information (also referred to as imaging information) obtained by imaging the object to be inspected W0 by the sensor unit 12s.
  • the sensor control unit Cs2 can output the imaging information related to the object to be inspected W0 to the integrated control unit C0 as it is or after performing various information processing via the wiring Wr2 and the wiring Wr1.
  • the imaging information as a result of imaging as a process for inspection of the object to be inspected W0 can be acquired.
  • the movement control unit Ct2 can realize the function of the movement control unit Ct2 by, for example, executing the program in the storage unit in the calculation unit.
  • the movement control unit Ct2 can control the operation of the movement mechanism 12t, for example.
  • the movement control unit Ct2 can adjust the relative position of the sensor unit 12s with respect to the object to be inspected W0 by the movement mechanism 12t, for example, based on the information obtained by the detection unit 12d.
  • the movement control unit Ct2 is based on, for example, the amount of deviation detected by the detection control unit Cd2 or the like from the information related to the posture and position of the object to be inspected W0 obtained by using the detection unit 12d.
  • the position of the sensor unit 12s relative to the object to be inspected W0 is adjusted by 12t. If such a configuration is adopted, for example, when the inspected object W0 is carried into the inspection module 12 from another module, even if at least one of the posture and the position of the inspected object W0 deviates, the deviation will occur.
  • the relative position of the sensor unit 12s with respect to the object to be inspected W0 can be adjusted accordingly. More specifically, for example, when the inspected object W0 is transferred from the belt conveyor of the adjacent module onto the belt conveyor of the inspection module 12, even if at least one of the posture and the position of the inspected object W0 deviates.
  • the relative position of the sensor unit 12s with respect to the object to be inspected W0 can be adjusted according to the deviation. Further, for example, it is easier and faster to adjust the relative position of the sensor unit 12s with respect to the inspected object W0 by the moving mechanism 12t than to adjust the posture and the position of the inspected object W0. obtain.
  • This makes it possible to easily manufacture the inspection device 1 that flexibly meets the user's request such as the shape and size of the object to be inspected W0, the space for installing the device, and the budget.
  • At least a part of the functions of the functional configuration realized by the movement control unit Ct2 may be configured by hardware such as a dedicated electronic circuit, for example.
  • the inversion module 13 includes, for example, a transfer control unit Cc3, a detection control unit Cd3, and an inversion control unit Cr3, which are electrically connected to each other via wiring Wr2.
  • the reversing module 13 includes, for example, a detecting unit 13d connected to the detection control unit Cd3, a transporting unit Cv3 connected to the transport control unit Cc3, a holding unit 13h connected to the reversing control unit Cr3, and a moving mechanism 13t. And have.
  • the inversion module 13 has one inversion control unit Cr3.
  • the reversing module 13 has one holding portion 13h and one moving mechanism 13t.
  • the inversion module 13 may have two holding units 13h and two moving mechanisms 13t, and two inversion control units Cr3 may be present.
  • Each of the transport control unit Cc3, the detection control unit Cd3, and the inversion control unit Cr3 has a configuration similar to that of a computer including, for example, a calculation unit, a memory, and a storage unit.
  • the detection control unit Cd3 can realize the function of the detection control unit Cd3 by, for example, executing the program in the storage unit in the calculation unit.
  • the detection control unit Cd3 can, for example, control the operation of the detection unit 13d and acquire information related to the posture and position of the object to be inspected W0 obtained by the detection unit 13d.
  • the detection control unit Cd3 may perform calculations based on information related to the posture and position of the object to be inspected W0, for example.
  • the detection control unit Cd3 relates to an image (actual image) of the object to be inspected W0 obtained from the detection unit 13d and a reference posture and position of the object to be inspected W0 prepared in advance.
  • the image (master image) By comparing with the image (master image), it is possible to detect the amount of deviation of the object to be detected W0 from the reference posture and position.
  • a method of detecting and matching feature points, template matching, and the like can be used for comparison between the actual image and the master image.
  • the calculation for detecting the deviation amount of the object to be detected W0 from the reference posture and position may be performed by another control unit such as the integrated control unit C0.
  • the detection control unit Cd3 At least a part of the functions of the functional configuration realized by the detection control unit Cd3 may be configured by hardware such as a dedicated electronic circuit, for example.
  • the relative position of the holding portion 13h with respect to the object to be inspected W0 can be adjusted according to the deviation. Thereby, for example, even if at least one of the posture and the position of the object to be inspected W0 is deviated, the object to be inspected W0 can be held and inverted by the holding portion 13h.
  • At least a part of the functions of the functional configuration realized by the inversion control unit Cr3 may be configured by hardware such as a dedicated electronic circuit.
  • the discharge module 14 has, for example, a transfer control unit Cc4 electrically connected to the wiring Wr2 and a transfer unit Cv4 connected to the transfer control unit Cc4.
  • the transport control unit Cc4 has, for example, a configuration similar to that of a computer including a calculation unit, a memory, and a storage unit.
  • the transfer control unit Cc4 can realize the function of the transfer control unit Cc4 by, for example, executing the program in the storage unit in the calculation unit.
  • the transport control unit Cc4 can control the operation of the transport unit Cv4 by controlling the rotation of at least one pulley on the belt conveyor, for example.
  • At least a part of the functions of the functional configuration realized by the transport control unit Cc4 may be configured by hardware such as a dedicated electronic circuit, for example.
  • the first module is the first inspection module 12 (first inspection module 121), and the second module is the second inspection module 12 (second inspection module 122).
  • the first inspection module 121 includes, for example, a transport unit Cv21 as a first transport unit, a sensor unit 12s as a first sensor unit, a movement mechanism 12t as a first movement mechanism, and a first. It has a detection unit 12d as a detection unit and a movement control unit Ct2 as a first control unit.
  • the second inspection module 122 includes, for example, a transport unit Cv22 as a second transport unit, a sensor unit 12s as a second sensor unit, a movement mechanism 12t as a second movement mechanism, and a second detection unit. 12d, and a movement control unit Ct2 as a second control unit.
  • the inspection apparatus 1 may appropriately combine two or more modules including the first module and the second module for performing inspection processing on the object to be inspected W0, respectively. Can be manufactured. Further, for example, the posture and position of the inspected object W0 when the inspected object W0 is carried into the first inspection module 121 as the first module or the second inspection module 122 as the second module from another module. Even if at least one of the two is displaced, the relative position of the sensor unit 12s with respect to the object to be inspected W0 can be adjusted according to the deviation.
  • the inspection device 1 that flexibly meets the user's request such as the shape and size of the object to be inspected W0, the space for installing the device, and the budget. Further, for example, when the object to be inspected W0 is transferred from the conveyor belt of the module to the conveyor belt of the next module, even if at least one of the posture and the position of the object to be inspected W0 is displaced, the object to be inspected is inspected according to the deviation. The relative position of the sensor unit 12s with respect to the object W0 can be adjusted.
  • the first module is the inspection module 12 and the second module is the inversion module 13.
  • the inspection module 12 includes, for example, a transport unit Cv21 as a first transport unit, a sensor unit 12s, a movement mechanism 12t as a first movement mechanism, and a detection unit 12d as a first detection unit.
  • a movement control unit Ct2 as a first control unit.
  • the reversing module 13 includes, for example, a transport unit Cv3 as a second transport unit, a holding unit 13h, a movement mechanism 13t as a second movement mechanism, a detection unit 13d as a second detection unit, and a second control. It has an inversion control unit Cr3 as a unit.
  • the inspection device 1 can be manufactured by appropriately combining the modules of the above. Further, for example, even if at least one of the posture and the position of the object to be inspected W0 deviates when the object to be inspected is carried into the inspection module 12 as the first module from another module, the object to be inspected is inspected according to the deviation. The relative position of the sensor unit 12s with respect to the object W0 can be adjusted.
  • the object to be inspected is inspected according to the deviation.
  • the relative position of the holding portion 13h with respect to the object W0 can be adjusted. Therefore, for example, it is possible to easily manufacture the inspection device 1 that flexibly meets the user's request such as the shape and size of the object to be inspected W0, the space for installing the device, and the budget.
  • FIG. 11A is a diagram showing a schematic configuration of the inspection device 1A according to the second example, which is composed of a combination of a plurality of modules.
  • FIG. 11B is a diagram showing a schematic configuration of the inspection device 1B according to the third example, which is composed of a combination of a plurality of modules.
  • the inspection device 1A according to the second example and the inspection device 1B according to the third example are examples of inspection devices including the reversing module 13, respectively.
  • the first inspection module 121 performs imaging, which is a process for inspection, on one surface (for example, the front surface) of the object to be inspected W0, and the inversion module 13 inspects.
  • the second inspection module 122 can perform imaging, which is a process for inspection, on the other surface (for example, the back surface) of the object W0 to be detected.
  • the inspection device 1A according to the second example having such a configuration has, for example, a separately manufactured input module 11, two inspection modules 12, an inversion module 13, and an discharge module 14 in the + X direction. Can be manufactured by connecting to each other in.
  • the inspection device 1B according to the third example includes, for example, an input module 11, one inspection module 12, and an inversion module 13, as shown in FIG. 11B. More specifically, for example, the input module 11, the inspection module 12 (first inspection module 121), and the inversion module 13 are located in a state of being connected in the + X direction in the order described in this description. ..
  • the inspection device 1B according to the third example for example, the object to be inspected W0 is conveyed from the charging module 11 in the order of the first inspection module 121, the reversing module 13, the first inspection module 121, and the charging module 11. Then, the inspection of the object to be inspected W0 can be performed.
  • the first inspection module 121 performs imaging, which is a process for inspection, on one surface (for example, the front surface) of the object to be inspected W0, and the inversion module 13 inspects.
  • the first inspection module 121 can perform imaging, which is an inspection process, on the other surface (for example, the back surface) of the object W0 to be detected.
  • the input module 11 can serve as, for example, the discharge module 14.
  • the inspection device 1B according to the third example having such a configuration connects, for example, a separately manufactured input module 11, one inspection module 12, and an inversion module 13 to each other in the + X direction. Can be manufactured by
  • the first inspection module 121 and the second inspection module 122 target one surface (for example, the front surface or the back surface) of the object to be inspected W0, which is an imaging process for inspection. It can be performed.
  • the inspection device 1C according to the fourth example having such a configuration connects, for example, the separately manufactured input module 11, the two inspection modules 12, and the discharge module 14 to each other in the + X direction. Can be manufactured by
  • the first inspection module 121 can perform imaging, which is a process for inspection, on one surface (for example, the front surface or the back surface) of the object to be inspected W0.
  • the inspection device 1D according to the fifth example having such a configuration connects, for example, the separately manufactured input module 11, one inspection module 12, and the discharge module 14 to each other in the + X direction. Can be manufactured by
  • the input module 11 may be omitted, or the discharge module 14 may be omitted.
  • two or more separately manufactured modules including one or two or more inspection modules 12 for performing an inspection process on the object W0 to be inspected may be appropriately combined.
  • Inspection devices 1C and 1D can be manufactured. Thereby, for example, the inspection devices 1C and 1D that flexibly meet the user's request such as the shape and size of the object to be inspected W0, the space for installing the device, and the budget can be easily manufactured.
  • the inspection device 1E according to the sixth example includes, for example, one inspection module 12 as shown in FIG. 12 (c). More specifically, the inspection device 1E according to the sixth example has, for example, a configuration in which the input module 11 and the discharge module 14 are omitted from the inspection device 1E according to the fifth example.
  • one inspection module 12 covers one surface (for example, the front surface or the back surface) of the object to be inspected W0. Imaging, which is a process for inspection, can be performed.
  • FIG. 13 is a diagram showing a timing chart relating to an operation of one inspected object W0 in the inspection device 1 according to the first example of the first embodiment.
  • the period during which the operation for one object W0 to be inspected in the inspection device 1 is performed is a period Pd11, a period Pd12 (period Pd121), and a period Pd12 (period) that are continuous in time. It is composed of Pd122), period Pd13, period Pd12 (period pd123), period Pd12 (period Pd124) and period Pd14.
  • the period Pd11 is a period in which the object to be inspected W0 is located in the charging module 11.
  • the period Pd12 (period Pd121) is a period in which the object to be inspected W0 is located in the first inspection module 12 (first inspection module 121).
  • the period Pd12 (period Pd122) is a period in which the object to be inspected W0 is located in the second inspection module 12 (second inspection module 122).
  • the period Pd13 is a period in which the object to be inspected W0 is located in the inversion module 13.
  • the period Pd12 (period Pd123) is a period in which the object to be inspected W0 is located in the third inspection module 12 (third inspection module 123).
  • the period Pd12 (period Pd124) is a period in which the object to be inspected W0 is located in the fourth inspection module 12 (fourth inspection module 124).
  • the period Pd14 is a period during which the inspected object W0 is located in the discharge module 14.
  • the period Pd 11 is a period (also referred to as a charging period) Pin during which the operation of charging the object W0 to be inspected into the charging module 11 is performed, the charging module 11 and the first inspection module 12. It is composed of the first half of Ptr during the period (also referred to as the transfer period) for transporting the inspected object W0 to and from (the first inspection module 121).
  • the period Pd12 (Pd121) includes the latter half of the transport period Ptr for transporting the inspected object W0 between the input module 11 and the first inspection module 12 (first inspection module 121), and the subject by the detection unit 12d.
  • the period Pas for acquiring information related to the position and orientation of the inspection object W0 and adjusting the position of the sensor unit 12s based on the information (also referred to as the sensor unit adjustment period) and the inspection object W0 by the sensor unit 12s were targeted.
  • a period of one or more imaging as an inspection process also called an imaging period
  • Pca a first inspection module 12
  • second inspection module 12 second inspection module 12
  • the object to be inspected W0 is conveyed between the first inspection module 12 (first inspection module 121) and the second inspection module 12 (second inspection module 122).
  • the inspected object W0 is transported between the latter half of the transport period Ptr, the sensor unit adjustment period Pas, the imaging period Pca, the second inspection module 12 (second inspection module 122), and the inversion module 13.
  • Period (transportation period) It is composed of the first half of Ptr and.
  • the period Pd 13 includes the latter half of the transport period Ptr for transporting the inspected object W0 between the second inspection module 12 (second inspection module 122) and the inversion module 13, and the inspected object W0 by the detection unit 13d.
  • the inspected object W0 is inverted by the period (also referred to as the holding unit adjustment period) Pah for acquiring information related to the position and posture of the holding unit 13h and adjusting the position of the holding unit 13h based on the information, and the holding unit 13h and the moving mechanism 13t.
  • Period to be inspected also referred to as inversion period
  • the inspected object W0 is transported between the latter half of the transport period Ptr, the sensor unit adjustment period Pas, the imaging period Pca, the fourth inspection module 12 (fourth inspection module 124), and the discharge module 14.
  • Period (transportation period) It is composed of the first half of Ptr and.
  • the period Pd 14 includes the latter half of the transport period Ptr for transporting the inspected object W0 between the fourth inspection module 12 (fourth inspection module 124) and the discharge module 14, and the inspected object W0 from the discharge module 14.
  • Pdi which is the period during which the operation of discharging is performed (also referred to as the discharging period).
  • the input period Pin is 6 seconds
  • the transport period Ptr is 4 seconds
  • the sensor unit adjustment period Pas and the holding unit adjustment period Pah are 1 second
  • the imaging period Pca is 5 seconds
  • the inversion period Pre is 5.
  • the second is set
  • the discharge period Pdi is set to 6 seconds.
  • imaging is performed five times as an inspection process for one location of the object to be inspected W0, which requires one second in each of the four imaging periods Pca.
  • the period during which the operation for one inspected object W0 in the inspection device 1 shown in FIG. 13 is performed is 66 seconds.
  • the period during which the operation for one object W0 to be inspected in the inspection device 1D according to the fifth example shown in FIG. 12B is performed is a 6-second input period Pin and 4 A transport period of Ptr per second, a sensor unit adjustment period of 1 second, Pas, an imaging period of 20 seconds, Pca, in which imaging is performed 20 times for one location of the object W0 to be inspected, which requires 1 second, and 4 seconds. It is assumed that it is composed of a transport period Ptr and a discharge period Pdi for 6 seconds. In this case, the period during which the operation for one object W0 to be inspected is performed is 41 seconds. In other words, it is possible to inspect the object to be inspected W0 at one pace every 41 seconds.
  • FIG. 14 is a timing chart relating to the operation of a plurality of objects to be inspected W0 in the inspection device 1 according to the first example of the first embodiment.
  • the integrated control unit C0 sets the input module 11 and the inspected object W0 located in each of the plurality of modules located between the input module 11 and the discharge module 14 in the transport path Rt1. It shall be controlled so that it is transported to the module on the downstream side at the same time.
  • a plurality of inspected objects W0 to be continuously inspected are the first inspected object W0 (also referred to as the first inspected object W01) and the second inspected object W0 (the first inspected object W0).
  • 2 Inspected object W02 3rd inspected object W0 (also referred to as 3rd inspected object W03), 4th inspected object W0 (also referred to as 4th inspected object W04) and 5th Inspected object W0 (also referred to as fifth inspected object W05).
  • 3rd inspected object W0 also referred to as 3rd inspected object W03
  • 4th inspected object W0 also referred to as 4th inspected object W04
  • 5th Inspected object W0 also referred to as fifth inspected object W05.
  • the timing of the operation related to the first object to be inspected W01 is indicated by a rectangle with the hatching of the first diagonal line
  • the timing of the operation related to the second object to be inspected W02 is the hatching of the second diagonal line
  • the timing of the operation related to the third object W03 is indicated by the rectangle with the hatching of the sand
  • the timing of the operation related to the fourth object W04 is indicated by the black rectangle.
  • the timing of the operation related to the fifth object W05 to be inspected is indicated by a white rectangle.
  • the period during which the operation for each object W0 to be inspected in the inspection device 1 is performed is one charging period Pin (6 seconds) and six transport periods Ptr (4 seconds each). , 4 sensor unit adjustment period Pas (1 second each), 1 holding unit adjustment period Pah (1 second), 4 imaging period Pca (5 seconds each), and 1 inversion period Pre (5 seconds). And one discharge period Pdi (6 seconds).
  • the inspected object W0 imaged as an inspection process is discharged from the inspection device 1 at a pace of once every 10 seconds.
  • imaging can be completed as an inspection process for the object W0 to be inspected at a pace of 1 in 10 seconds.
  • the pace at which imaging as an inspection process for the object W0 to be inspected can be completed can be shortened.
  • imaging as an inspection process for the inspected object W0 is completed. The pace can be shortened.
  • the number of inspection modules 12 constituting the inspection device is increased to perform imaging as an inspection process for the object W0 to be inspected. It is possible to shorten the pace of completion. In other words, for example, as the number of a plurality of objects to be inspected W0 to be continuously inspected increases, the processing for inspection of a plurality of locations in the inspected object W0 is shared among the two or more inspection modules 12. By carrying out this procedure, it is possible to increase the number of objects W0 to be inspected that have been processed for inspection and are discharged from the inspection device per unit time. That is, the tact in the inspection device can be improved.
  • the space or budget for installing the inspection device is insufficient, it is conceivable to increase the number of inspection modules 12 constituting the inspection device within an acceptable range.
  • the number of inspection objects W0 can be increased.
  • the inspection module 12 for example, since the sensor unit 12s can be moved relative to the object to be inspected W0, imaging as one sensor unit 12s It is possible to perform imaging as a process for inspection on one place or two or more places of the object to be inspected.
  • the inspection devices 1, 1A, 1B, 1C, and 1D can be manufactured by appropriately combining two or more modules including one or two or more inspection modules 12. Therefore, for example, in response to the user's request such as the shape and size of the inspected object W0, the space for installing the device, and the budget, all the configurations for processing the inspected object W0 are incorporated.
  • the sensor for the object to be inspected W0 corresponds to the deviation.
  • the relative position of the imaging unit as the unit 12s can be adjusted. Therefore, for example, it is possible to easily manufacture the inspection devices 1, 1A, 1B, 1C, and 1D that flexibly meet the user's request such as the shape and size of the object to be inspected W0, the space for installing the device, and the budget. it can.
  • Inspection devices 1, 1A and 1B can be manufactured by appropriately combining two or more modules including. Therefore, for example, in response to the user's request such as the shape and size of the inspected object W0, the space for installing the device, and the budget, all the configurations for processing the inspected object W0 are incorporated. It is not necessary to redesign the specifications of the device from scratch.
  • the holding portion for the inspected object W0 can be adjusted.
  • the object to be inspected W0 can be held and inverted by the holding portion 13h. Therefore, for example, the inspection devices 1, 1A, and 1B that flexibly meet the user's request such as the shape and size of the object to be inspected, the space for installing the device, and the budget can be easily manufactured.
  • an inspection module 12 as a first module for performing an inspection process for the object W0 to be inspected, and an inspection module 12 to be inspected.
  • Inspection devices 1, 1A, and 1B can be manufactured by appropriately combining two or more modules including an inversion module 13 as a second module for inversion of the object W0. Further, for example, even if at least one of the posture and the position of the object to be inspected W0 deviates when the object to be inspected is carried into the inspection module 12 as the first module from another module, the object to be inspected is inspected according to the deviation. The relative position of the sensor unit 12s with respect to the object W0 can be adjusted.
  • the object to be inspected W0 is inspected according to the deviation.
  • the relative position of the holding portion 13h with respect to the object W0 can be adjusted. Therefore, for example, the inspection devices 1, 1A, and 1B that flexibly meet the user's request such as the shape and size of the object to be inspected, the space for installing the device, and the budget can be easily manufactured.
  • the inspection devices 1, 1A, 1C for example, two or more including a first module and a second module for performing inspection processing for the object to be inspected W0, respectively.
  • the inspection devices 1, 1A and 1C can be manufactured by appropriately combining the above modules. Further, for example, the posture and position of the inspected object W0 when the inspected object W0 is carried into the first inspection module 121 as the first module or the second inspection module 122 as the second module from another module. Even if at least one of the two is displaced, the relative position of the sensor unit 12s with respect to the object to be inspected W0 can be adjusted according to the deviation.
  • the inspection device 1 that flexibly meets the user's request such as the shape and size of the object to be inspected W0, the space for installing the device, and the budget. Further, for example, as the number of a plurality of objects to be inspected W0 to be continuously inspected increases, the processing for inspection of a plurality of locations in the inspected object W0 is shared and carried out in two or more inspection modules 12. By doing so, it is possible to increase the number of objects W0 to be inspected that have been processed for inspection and are discharged from the inspection devices 1, 1A and 1C per unit time.
  • the sensor unit 12s may, for example, perform processing for inspection of at least one of imaging and measurement of the object to be inspected W0.
  • the measurement for the object to be inspected W0 for example, the measurement of the flow rate or the pressure of the gas in the hole of the object to be inspected W0 can be considered.
  • the sensor unit 12s is appropriately combined with, for example, a valve for adjusting the amount of gas supplied, a flow meter for measuring the gas flowing through the hole, a pressure gauge for measuring the pressure of the gas flowing through the hole, and the like. Can be realized with.
  • a plurality of modules connected to each other may include a transport module (also referred to as a transport module) 15 for changing the transport direction of the object to be inspected W0.
  • a transport module also referred to as a transport module
  • a belt conveyor also referred to as a curved belt conveyor
  • a transport robot that can appropriately change the transport direction of the object to be inspected W0, and the like can be applied to the transport module 15.
  • FIG. 15 is a diagram showing a schematic configuration of an example of an inspection device 1F composed of a combination of a plurality of modules including a transport module 15 having a curved belt conveyor.
  • FIG. 16 is a diagram showing a schematic configuration of an example of an inspection device 1G composed of a combination of a plurality of modules including a transport module 15 having a curved belt conveyor.
  • Each of the inspection device 1F and the inspection device 1G has a first transfer module 151 arranged between the second inspection module 122 and the reversing module 13 with respect to the inspection device 1 according to the first example described above.
  • a second transport module 152 arranged between the reversing module 13 and the third inspection module 123 has an additional configuration.
  • the object to be inspected W0 is conveyed from the second inspection module 122 to the reversing module 13 via the curved belt conveyor of the first transfer module 151, the object to be inspected is to be inspected. At least one of the posture and position of W0 is likely to deviate significantly.
  • the reversing module 13 can adjust the relative position of the holding portion 13h with respect to the inspected object W0 according to the deviation of at least one of the posture and the position of the inspected object W0.
  • the inspection module 12 can adjust the relative position of the sensor unit 12s with respect to the inspected object W0 according to the deviation of at least one of the posture and the position of the inspected object W0. Therefore, for example, it is possible to easily manufacture the inspection devices 1F and 1G that flexibly meet the user's request such as the shape and size of the object to be inspected W0, the space for installing the device, and the budget.
  • FIG. 17A is a diagram showing a schematic configuration of an example of an inspection device 1H composed of a combination of a plurality of modules including a transfer module 15 having a transfer robot.
  • the inspection device 1H places a transfer robot between the input module 11, the first inspection module 121, the second inspection module 122, and the third inspection module 123.
  • the transport module 15 to have is located.
  • the transport module 15 may be used for the first inspection module 121, the second inspection module 122, and the third inspection.
  • the object to be inspected W0 can be conveyed to the inspection module 12 of any one of the modules 123.
  • FIG. 17B is a diagram showing a schematic configuration of an example of an inspection device 1I composed of a combination of a plurality of modules including a transfer module 15 having a transfer robot.
  • the inspection device 1I has a first input module 11 (also referred to as a first input module 111), a second input module 11 (second input module 112), and a first input module for inspection.
  • a transfer module 15 having a transfer robot is located between the module 121 and the second inspection module 122.
  • the inspected object W0 appropriately carried in from the two input modules 11 is subjected to the first inspection module 121 and the first inspected module W0 by the transport module 15 according to the shape and size of the inspected object W0.
  • the object to be inspected W0 can be conveyed to the inspection module 12 of any one of the two inspection modules 122.
  • the method of acquiring information on the posture and position of the object to be inspected W0 by the detection unit 12d includes, for example, a method of measuring a three-dimensional surface shape or an object using a displacement sensor.
  • a method of measuring the distance to an object or the like may be applied.
  • a pattern light projection method, a light cutting method, white light interference, and the like can be applied to the method for measuring the three-dimensional shape.
  • an optical displacement sensor based on the detection principle of triangular ranging can be applied to the displacement sensor.
  • the width of the belt of the belt conveyor is widened to accommodate the transportation of the large object W0 to be inspected, it is necessary to increase the diameters of the pulleys and rollers that support the belts, and they are adjacent to each other.
  • Large triangular columnar grooves are likely to occur between the modules and between the belt conveyors.
  • a member having a slippery surface may be arranged so as to fill the triangular columnar groove.
  • a belt conveyor also referred to as a knife edge conveyor
  • a member for sharpening the end portion may be used to make it difficult to form a triangular columnar groove between the belt conveyors.
  • the movement control unit Ct2 as the first control unit is relative to the transport path Rt1.
  • Information obtained by using the detection unit 12d as the second detection unit of the inspection module 12 (for example, the second inspection module 122) as the second module on the upstream side, and the inspection module 12 as the first module.
  • the first sensor for the object to be inspected W0 by the movement mechanism 12t as the first movement mechanism.
  • the relative position of the sensor unit 12s as a unit may be adjusted.
  • the imaging information related to the inspected object W0 obtained by the detection unit 12d of the first module as shown in FIG. 18A, eight feature points (1st to 8th feature points) in the inspected object W0.
  • the positions of P1 to P8) are detected, and then, from the imaging information related to the inspected object W0 obtained by the detection unit 12d of the second module, 4 in the inspected object W0 as shown in FIG. 18B.
  • the positions of one feature point (first feature point P1a, fourth feature point P4a, fifth feature point P5a, eighth feature point P8a) are detected, and the other four feature points (second feature point P2a, third feature point P2a, third) are detected.
  • the positions of the feature points P3a, the sixth feature point P6a, and the seventh feature point P7a) are estimated from the relationship of the eight feature points (1st to 8th feature points P1 to P8) obtained for the first module.
  • the configuration is conceivable. Even with such a configuration, for example, for each of the first module and the second module, the amount of deviation in the posture and position of the object to be inspected W0 due to rotational movement, parallel movement, or the like can be detected.
  • the reversing control unit Cr3 as the second control unit is relatively upstream in the transport path Rt1.
  • the relative position of the holding unit 13h with respect to the object to be inspected W0 may be adjusted by the moving mechanism 13t as the second moving mechanism based on the information obtained by using the detecting unit 13d.
  • the movement control unit Ct2 as the first control unit is relative to the transport path Rt1.
  • the relative position of the sensor unit 12s with respect to the object to be inspected W0 may be adjusted by the moving mechanism 12t as the first moving mechanism.
  • the reversing as the second module is carried out.
  • the relative position of the holding portion 13h with respect to the inspected object W0 is adjusted by using the information obtained by using the detection unit 12d in the inspection module 12 as the first module, and the inspected object W0 becomes
  • the detection unit 13d in the inversion module 13 as the second module in the inspection module 12 as the first module is carried into the inspection module 12 as the first module, the detection unit 13d in the inversion module 13 as the second module in the inspection module 12 as the first module.
  • the relative position of the sensor unit 12s with respect to the object to be inspected W0 can be adjusted by using the information obtained by using. This can reduce, for example, the configuration and time required to obtain the information.
  • the integrated control unit C0 may exist in a module other than the input module 11.
  • the integrated control unit C0 may exist in any of the input module 11, the inspection module 12, the reversing module 13, and the discharge module 14.

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  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Attitude Control For Articles On Conveyors (AREA)

Abstract

Afin de fabriquer facilement un dispositif d'inspection qui répond de manière flexible aux exigences de l'utilisateur, un module d'inspection est pourvu d'une unité de transport, d'une unité de capteur, d'un mécanisme de déplacement, d'une unité de détection et d'une unité de commande. L'unité de transport permet de transporter un objet inspecté entre le module d'inspection et l'extérieur du module d'inspection. L'unité de capteur effectue au moins un processus d'inspection parmi un processus d'imagerie et un processus de mesure dont l'objet inspecté est le sujet. Le mécanisme de déplacement déplace la position de l'unité de capteur par rapport à l'objet inspecté. L'unité de détection est destinée à obtenir des informations qui se rapportent à l'attitude et à la position de l'objet inspecté. L'unité de commande règle la position de l'unité de capteur par rapport à l'objet inspecté au moyen du mécanisme de déplacement, sur la base des informations obtenues par l'unité de détection.
PCT/JP2020/031843 2019-09-20 2020-08-24 Module d'inspection, module d'inversion et dispositif d'inspection WO2021054055A1 (fr)

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EP4302799A1 (fr) 2021-03-25 2024-01-10 TERUMO Kabushiki Kaisha Dispositif d'administration de solution médicamenteuse
KR102417612B1 (ko) * 2021-10-28 2022-07-06 주식회사 케이엔케이 부품 검사 시스템 및 그 제어방법

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JPH06222012A (ja) * 1992-12-01 1994-08-12 Hitachi Ltd 画像処理装置及び画像処理方法及び半導体パッケージ外観検査装置
JPH09306977A (ja) * 1996-05-14 1997-11-28 Komatsu Ltd ウエハ検査装置等におけるウエハの位置決め方法
JP2000162144A (ja) * 1998-11-30 2000-06-16 Nikon Corp 外観検査方法及び外観検査装置
JP2001088073A (ja) * 1999-09-16 2001-04-03 Denso Corp 外観検査装置
JP2007152533A (ja) * 2005-12-08 2007-06-21 Olympus Medical Systems Corp ワークチャック切り粉除去装置及び方法
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