WO2020234947A1 - 真空ポンプ - Google Patents
真空ポンプ Download PDFInfo
- Publication number
- WO2020234947A1 WO2020234947A1 PCT/JP2019/019799 JP2019019799W WO2020234947A1 WO 2020234947 A1 WO2020234947 A1 WO 2020234947A1 JP 2019019799 W JP2019019799 W JP 2019019799W WO 2020234947 A1 WO2020234947 A1 WO 2020234947A1
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- WIPO (PCT)
- Prior art keywords
- face
- pump
- rotor
- rotor end
- convex portion
- Prior art date
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/20—Rotors
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2210/00—Working fluid
- F05B2210/10—Kind or type
- F05B2210/12—Kind or type gaseous, i.e. compressible
Definitions
- the present invention relates to a vacuum pump in which a pair of pump rotors rotate in opposite directions while maintaining a minute clearance along the peripheral wall of the pump chamber to discharge fluid.
- Vacuum pumps such as mechanical booster pumps do not use a sealing liquid in the pumping part, and a pair of pump rotors rotate in opposite directions without contact while maintaining a minute gap along the peripheral wall of the pump chamber, and are constant.
- the structure is such that a large amount of gas is transported from the intake side to the exhaust side to obtain a vacuum.
- This type of vacuum pump is capable of vacuum exhaust with less contamination by oil vapor, and is used for the purpose of creating a clean vacuum space in semiconductor manufacturing processes such as etching and CVD.
- the gas sucked into the vacuum pump accumulates products on the surface of the peripheral wall of the pump and the surface of the rotor facing each other in a minute gap. , Sticking occurs. Due to the products accumulated and stuck to these surfaces clogging the minute gaps, the rotation of the pump rotor stops, the rotational driving force of the pump rotor increases, and the motor that rotationally drives the pump rotor is in an excessive current state. This causes adverse effects such as the pump stopping. Further, when the pump is restarted after the pump is stopped, the pump may not be restarted because the rotor bites or slides on the accumulated / fixed product.
- Patent Document 1 proposes a vacuum pump capable of continuing operation without overloading the motor even if a product is deposited inside the pump chamber.
- the end of the pump rotor on the exhaust side has a truncated cone shape, and the gap between the outer peripheral edge portion of the pump rotor and the pump casing is increased.
- a recess is formed in the exhaust side portion of the pump casing to widen the gap between the pump rotor and the pump rotor.
- a wide gap is formed in a small area on the exhaust side of the pump chamber in order to avoid adverse effects caused by accumulation and sticking of products.
- the gap is increased in a wide range, the exhaust performance of the vacuum pump deteriorates. Therefore, it is desired to be able to avoid the harmful effects caused by the accumulation and sticking of the product while ensuring the required exhaust performance (gas sealing property).
- an object of the present invention is to provide a vacuum pump capable of more reliably preventing adverse effects caused by accumulation and sticking of products without affecting exhaust performance.
- the vacuum pump of the present invention With the pump room A pair of pump rotors rotatably arranged around a parallel rotation center line in the pump chamber, The rotor end faces on both sides in the direction of the rotation center line in each pump rotor, It is located on both sides of the pump chamber in the direction of the rotation center line, and has end faces on the pump chamber side facing each of the rotor end faces. A rotor end face convex portion and a rotor end face concave portion are formed on each of the rotor end faces. As the rotor end face convex portion, an outer peripheral edge side convex portion is formed along the outer peripheral edge of the rotor end face over the entire circumference of the outer peripheral edge.
- the rotor end face recess is formed in a portion of the rotor end face surrounded by the outer peripheral edge side convex portion. Between the rotor end face facing the pump chamber side end face and the pump chamber side end face, the rotor end face convex portion faces the pump chamber side end face at the first gap, and the rotor end face recess is wider than the first gap.
- the second gap faces the end face on the indoor side of the pump.
- the outer peripheral edge side convex portion formed on the rotor end face of the pump rotor faces the end face on the pump chamber side with a narrow first gap.
- a gas seal portion having a narrow first gap is formed over the entire circumference of the outer peripheral edge of the rotating pump rotor.
- the pump exhaust performance is ensured.
- the rotor end face recess surrounded by the outer peripheral edge side convex portion faces the pump chamber side end face with a second gap wider than the first gap.
- the product accumulated in the rotor end face recess may be sandwiched between the peripheral end face of the pump chamber and the rotor end face of the pump rotor, which may hinder the rotation of the pump rotor. Absent.
- the outer peripheral edge side convex portion that functions as a gas seal portion may be formed with a narrow width, and the rotor end face portion having a large area inside thereof may be formed on the end face on the pump chamber side with a wide second gap. Can be confronted.
- the area of the portion facing the end surface on the indoor side of the pump can be reduced by a narrow first gap in order to secure the gas sealing property, and the wide area is used in order to avoid the harmful effects caused by the accumulation and accumulation of the product.
- the area of the portion facing the end face on the indoor side of the pump can be increased by the two gaps. Therefore, it is possible to obtain a vacuum pump that can surely eliminate the harmful effects caused by the accumulation and sticking of products while maintaining the exhaust performance.
- the convex portion on the outer peripheral edge side of the rotor end face of the pump rotor that rotates while maintaining a narrow first gap with respect to the end face on the pump chamber side serves as a scraping portion for scraping the product accumulated and fixed on the end face on the pump chamber side. Also works, it is possible to suppress or prevent the accumulation of products on the end face on the side of the pump chamber.
- the present invention it is desirable to form a wider gap portion in the portion on the exhaust port side where a large amount of products are likely to accumulate. For this reason, it is desirable to form a recess on the end face on the pump chamber side.
- the recess is formed on the end surface on the indoor side of the pump at a position on the exhaust side with respect to the rotation center line of the pump rotor.
- This concave portion is a third gap wider than the first gap and faces the convex portion on the end face of the rotor.
- the rotor end face moves along the end face on the pump chamber side via a state facing the recess formed therein.
- a gap wider than the second gap is formed between the rotor end face and the recess. Since a large gap is formed on the exhaust side in this way, the product is clogged between the end face on the pump chamber side and the rotor end face of the pump rotor on the exhaust port side where the amount of accumulated product is large. The harmful effects can be reliably avoided.
- a linear convex portion extending linearly from one outer peripheral edge of the rotor end face to the other outer peripheral edge can be formed at the major axis position of the rotor end face.
- the linear convex portion is an end face portion that protrudes toward the end face on the indoor side of the pump rather than the convex portion on the outer peripheral edge side.
- the pump chamber can be composed of a tubular casing body and side plates attached to both ends of the casing body.
- a pump chamber is formed between the inner peripheral surface of the case body and the inner end surface of each plate of the side plate.
- the inner end face of each plate of the side plates defines the inner end face of the pump chamber.
- the rotor end face convex portion and the rotor end face concave portion may be formed on the rotor end face of the pump rotor of each stage.
- the inner end face recess may be formed on the end face on the pump chamber side of the pump chamber of each stage.
- (A) is a schematic cross-sectional view when the two-stage vacuum pump to which the present invention is applied is cut along the line AA
- (b) is a schematic cross-sectional view when the two-stage vacuum pump is cut along the line BB.
- (C) is a schematic end view of the two-stage vacuum pump on the motor side.
- (A), (b) and (c) are end views, cross-sectional views and opposite end views showing the pump rotor of the rear stage of the two-stage vacuum pump of FIG. 1, and (d) and (e) are It is an end view and the sectional view which shows the motor side side plate of the two-stage vacuum pump of FIG.
- (A) is a schematic partial cross-sectional view showing the pump chamber of the latter stage of the two-stage vacuum pump of FIG. 1, and (b) is an explanatory view showing the pump chamber of the latter stage.
- (A) is an end view showing another example of the pump rotor
- (b) is a cross-sectional view when the pump rotor is cut along the bb line of (a)
- (c) is an end view on the opposite side of (a).
- (D) is a cross-sectional view when cut along the dd line of (c)
- (e) is an explanatory view showing an outer peripheral surface of the pump rotor.
- the vacuum pump according to the embodiment of the present invention will be described below with reference to the drawings.
- the vacuum pump described below is a two-stage vacuum pump, but the present invention is similarly applicable to a single-stage vacuum pump and a multi-stage vacuum pump having three or more stages.
- the following example is a case where a Mayu type rotor is used as the pump rotor.
- the shape of the pump rotor is not limited to the eyebrows type.
- FIG. 1 shows a two-stage vacuum pump according to the present embodiment
- FIG. 1A is a schematic cross-sectional view when the pump is cut in a horizontal plane including the central axis of the pump (position of lines AA in FIG. 1C).
- 1 (b) is a schematic cross-sectional view when the pump is cut in a horizontal plane including the central axis of the pump (position of the line BB in FIG. 1 (c)), and
- FIG. 1 (c) is an end view of the motor side. Is.
- the two-stage vacuum pump 1 (hereinafter, simply referred to as a vacuum pump 1) includes a front-stage pump chamber 2a, a rear-stage pump chamber 2b, a motor 3, and a gear chamber 4.
- the motor 3 is arranged on the side of the pump chamber 2b in the rear stage
- the gear chamber 4 is arranged on the side of the pump chamber 2a in the front stage, sandwiching the pump chambers 2a and 2b.
- the pump chambers 2a and 2b are formed from a tubular casing main body 6, a motor side side plate 7 that closes one end thereof, and a gear chamber side side plate 8 that closes the other end of the casing main body 6. It is configured.
- the inside of the casing body 6 is partitioned in the direction of the pump center axis 1a by the partition plate 9.
- a large volume is formed between the inner peripheral surface portion 6a of the casing main body 6, the pump indoor side end surface 8a which is the end surface of the gear chamber side side plate 8, and the pump indoor side end surface 9a which is one end surface of the partition plate 9.
- the pump chamber 2a on the vacuum side of the previous stage is formed.
- the volume is between the inner peripheral surface portion 6b of the casing main body 6, the pump indoor side end surface 90 which is the other end surface of the partition plate 9, and the pump indoor side end surface 70 which is the end surface of the motor side side plate 7.
- a small pump chamber 2b (final pump chamber) on the atmosphere side in the latter stage is formed.
- the pump chamber 2a communicates with the intake port 10 formed in the casing main body 6, and the pump chamber 2b communicates with the exhaust port 11 formed in the casing main body 6.
- the exhaust side of the pump chamber 2a communicates with the intake side of the pump chamber 2b via a communication passage 12 formed in the casing main body 6.
- a motor 3 is attached to the side plate 7 on the motor side.
- the gear chamber 4 on the opposite side is sealed by the gear chamber side side plate 8 and the gear cover 13 attached thereto.
- a rotor shaft 14 on the driving side and a rotor shaft 15 on the driven side are arranged so as to penetrate the partition plate 9.
- the rotor shafts 14 and 15 extend in parallel at regular intervals.
- the rotation center line of the rotor shaft 14 on the drive side is the pump center axis 1a.
- Pump rotors 16a and 16b and pump rotors 30a and 30b are attached to the rotor shafts 14 and 15, respectively.
- the pair of pump rotors 16a and 16b are located in the pump chamber 2a in the front stage, and the pair of pump rotors 30a and 30b are located in the pump chamber 2b in the rear stage. Since the pump rotors 30a and 30b have the same shape, they may be collectively referred to as the pump rotor 30 in the following description.
- the shaft end portion 14a on the motor side of the rotor shaft 14 on the drive side is supported by a bearing 21 attached to the side plate 7 on the motor side, and extends to the side of the motor 3 and is connected to the motor shaft 22.
- the shaft end portion 14b on the gear chamber side of the rotor shaft 14 is supported by a bearing 23 attached to the side plate 8 on the gear chamber side and extends to the inside of the gear chamber 4.
- the shaft end portion 15a on the motor side of the driven rotor shaft 15 is supported by a bearing 24 attached to the motor side side plate 7, and the shaft end portion 15b on the gear chamber side is attached to the gear chamber side side plate 8. It is supported by the bearing 25 and extends to the inside of the gear chamber 4.
- the shaft ends 14b and 15b on the gear chamber side of both rotor shafts 14 and 15 are connected via a gear train 26, and when the rotor shaft 14 rotates, the rotor shaft 15 rotates synchronously in the opposite direction. ing.
- FIG. 2A is an end view showing a pump rotor 30 in the subsequent stage of the vacuum pump 1
- FIG. 2B is a sectional view thereof
- FIG. 2C is an end view on the opposite side thereof.
- 2 (d) and 2 (e) are end views and cross-sectional views showing the motor side side plate 7.
- FIG. 3A is a schematic partial cross-sectional view showing the pump chamber 2b in the subsequent stage
- FIG. 3B is an explanatory view showing the pump chamber 2b in the latter stage.
- the pump rotor 30 has a Mayu-shaped contour shape as a whole.
- the pump rotor 30 includes a rotor outer peripheral surface 31 having a constant width, and rotor end surfaces 32 and 33 on both sides.
- a shaft hole 34 having a circular cross section penetrates through the center of the pump rotor 30 in the thickness direction thereof. Both ends of the shaft hole 34 are open to the rotor end faces 32 and 33.
- the rotor outer peripheral surface 31 faces the inner peripheral surface portion 6b of the casing main body 6 which is the inner peripheral surface of the pump chamber 2b with a minute gap.
- One rotor end face 32 faces the inner end face of the partition plate 9 which is one end face 90 on the pump chamber side of the pump chamber 2b with a minute gap from the direction of the pump center axis 1a.
- the other rotor end face 33 faces the inner end face of the motor side side plate 7, which is the other end face 70 on the pump chamber side of the pump chamber 2b, with a minute gap from the direction of the pump center axis 1a.
- the pump rotor 30 When the pump rotor 30 rotates, the rotor outer peripheral surface 31 moves along the inner peripheral surface portion 6b of the pump chamber 2b while maintaining a constant minute gap.
- the rotor end faces 32 and 33 on both sides of the pump rotor 30 move along the pump chamber side end faces 70 and 90 while maintaining a minute first gap ⁇ 1 and the remaining part is wide. While maintaining the second gap ⁇ 2, the pump moves along the end faces 70 and 90 on the indoor side of the pump.
- the shapes of the rotor end faces 32 and 33 of the pump rotor 30 will be described. First, the rotor end face 32 facing the pump chamber side end face 90, which is the inner end face of the partition plate 9, will be described.
- the rotor end face 32 is formed with a rotor end face convex portion 32a and a rotor end face concave portion 32b.
- the rotor end face concave portion 32b is an end face portion recessed by a predetermined dimension with respect to the rotor end face convex portion 32a.
- the convex surface of the rotor end face convex portion 32a is defined by a plane orthogonal to the pump central axis 1a
- the concave surface of the rotor end face concave portion 32b is also defined by a plane orthogonal to the pump central axis 1a. It is also possible to define the convex surface by a convex curved surface and the concave surface by a concave curved surface.
- the outer peripheral edge side convex portion 32c is formed along the outer peripheral edge of the rotor end face 32 over the entire circumference of the outer peripheral edge.
- the inner peripheral edge side convex portion 32d is formed so as to surround the entire circumference of the shaft hole 34 on the rotor end surface 32.
- the outer peripheral edge side convex portion 32c and the inner peripheral edge side convex portion 32d are convex portions having a predetermined width and the same height, and are connected to each other at a portion on the outer peripheral side of the shaft hole 34.
- the outer peripheral edge side convex portion 32c and the inner peripheral edge side convex portion 32d each have a rotationally symmetric shape around the center of the rotor end surface 32.
- the rotor end face recess 32b is formed in a portion of the rotor end face 32 surrounded by the outer peripheral edge side convex portion 32c and the inner peripheral edge side convex portion 32d.
- the rotor end face recess 32b is a circular recess having a constant depth, and is formed at a rotationally symmetric position around the center of the rotor end face 32.
- the rotor end face recess 32b faces the inner end face 90 with a second gap ⁇ 2 wider than the first gap ⁇ 1.
- the shape of the rotor end surface 33 of the pump rotor 30 facing the pump indoor side end surface 70, which is the inner end surface of the motor side side plate 7, will be described.
- the shape of the rotor end face 33 is basically the same as that of the rotor end face 32, and the rotor end face convex portion 33a and the rotor end face concave portion 33b are formed.
- the rotor end face concave portion 33b is a retracted end face portion with respect to the rotor end face convex portion 33a.
- the convex surface of the rotor end face convex portion 33a is defined by a plane orthogonal to the pump central axis 1a, and the concave surface of the rotor end face concave portion 33b is also defined by a plane orthogonal to the pump central axis 1a. It is also possible to define the convex surface by a convex curved surface and the concave surface by a concave curved surface.
- the outer peripheral edge side convex portion 33c is formed along the outer peripheral edge of the rotor end face 33 over the entire circumference of the outer peripheral edge.
- the inner peripheral edge side convex portion 33d is formed so as to surround the entire circumference of the shaft hole 34 on the rotor end surface 33.
- the outer peripheral edge side convex portion 33c and the inner peripheral edge side convex portion 33d are convex portions having a predetermined width and the same height, and are connected to each other at a portion on the outer peripheral side of the shaft hole 34.
- the outer peripheral edge side convex portion 33c and the inner peripheral edge side convex portion 33d each have a rotationally symmetric shape.
- the rotor end face recess 33b is formed in a portion of the rotor end face 33 surrounded by the outer peripheral edge side convex portion 33c and the inner peripheral edge side convex portion 33d.
- the rotor end face recess 33b is a circular recess having a constant depth, and is formed at a rotationally symmetric position around the center of the rotor end face 33.
- the pump chamber side end surface 70 is defined by a plane orthogonal to the pump center axis 1a.
- a pair of circular cross-section shaft holes 71 and 72 extending through the shaft ends 14a and 15a of the rotor shafts 14 and 15 are opened at symmetrical positions on the end surface 70 on the pump chamber side.
- a recess 74 having a constant depth is formed between the shaft holes 71 and 72 and the exhaust passage recess 73.
- the exhaust passage recess 73 and the recess 74 are connected to each other and are flat recesses having a depth sufficient for the thickness of the product deposited from the end surface 70 on the pump chamber side.
- a portion 70a of the pump chamber side end surface 70 having a predetermined width is interposed between the inner end surface recess 74 and the shaft holes 71 and 72.
- the rotor end face convex portion 33a that is, the outer peripheral edge side convex portion 33c and the inner peripheral edge side convex portion 33d is a minute first gap ⁇ 1 and is the pump indoor side end face. Confront 70.
- the rotor end face recess 33b faces the pump chamber side end face 70 with a second gap ⁇ 2 wider than the first gap ⁇ 1. Further, when the rotor end face recess 33b of the rotor end face 33 faces the recess 74 formed in the pump chamber side end face 70, a third gap ⁇ 3 wider than the second gap ⁇ 2 is formed between them.
- the rotor end face convex portion 32a (outer peripheral edge side convex portion 32c, along the outer peripheral edge and the inner peripheral edge of the rotor end faces 32, 33 on both sides of the pump rotor 30).
- 32d) and 33a (outer peripheral edge side convex portion 33c, inner peripheral edge side convex portion 33d) are formed, and rotor end face concave portions 32b and 33b are formed between them.
- the rotor end face recesses 32b and 33b (stepped portions) excluding the rotor end face convex portions 32a and 33a that function as gas seal portions have a large second gap ⁇ 2 with respect to the facing pump chamber side end faces 70 and 90. .. Therefore, the risk of accumulation and sticking of products between the rotor end faces 32 and 33 and the pump chamber side end faces 70 and 90 can be significantly reduced.
- the area of the rotor end face convex portions 32a and 33a (portions that function as gas sealing portions) facing the pump chamber side end faces 70 and 90 can be reduced by the narrow first gap ⁇ 1 in the rotor end faces 32 and 33. Therefore, the increase in the rotational resistance of the pump rotor 30 due to the product can be suppressed, and the risk of the pump rotor 30 stopping rotating can be reduced. Further, the area of the rotor end face convex portions 32a and 33a that function as the gas sealing portion of the rotor end faces 32 and 33 can be reduced even at the time of restarting with the product intervening after the pump is stopped. As a result, the contact area with the product is also reduced, so that the torque required for rotation is reduced, and improvement in restartability can be expected.
- a recess 74 is formed in the portion of the end surface 70 on the indoor side of the pump that communicates with the exhaust port 11.
- the widest third gap ⁇ 3 is formed between the recess 74 and the rotor end surface 33 of the pump rotor 30. Since a wide gap is formed in the portion on the exhaust port side where more products are generated than in other portions, the harmful effects caused by the accumulation and sticking of the products can be surely eliminated.
- the formed region portion of the recess 74 on the exhaust side where the widest third gap is formed is separated from the intake side by the gas seal portion of the first gap ⁇ 1.
- the separated state is maintained. That is, a recess so that the intake side and the exhaust side are separated in the pump chamber 2b by the narrow first gap ⁇ 1 defined by the rotor end surface convex portion 33a formed on the rotor end surface 33 of the pump rotor 30. 74 is formed.
- a state in which the intake side and the exhaust side communicate with each other is not formed through the wide gaps ⁇ 2 and ⁇ 3. Therefore, it is possible to eliminate the harmful effects caused by the accumulation and sticking of the product while avoiding the deterioration of the exhaust performance of the vacuum pump 1.
- outer peripheral edge side convex portions 32c and 33c are formed along the outer peripheral edges of the rotor end faces 32 and 33. It is also expected that the products deposited during the rotation of the rotor and deposited on the end faces 70 and 90 on the indoor side of the pump are scraped off by the convex portions 32c and 33c on the outer peripheral side that move along the end faces 70 and 90 on the indoor side of the pump.
- FIG. 4 shows a pump rotor that can be used in place of the pump rotor 30.
- the pump rotor 30A has a structure that enhances the effect of scraping off products by the rotor end faces 32 and 33.
- FIG. 4A is an end view showing the pump rotor 30A
- FIG. 4B is a cross-sectional view taken along the line bb of FIG. 4A
- FIG. 4C is FIG. It is an end view on the opposite side to (a)
- (d) is a cross-sectional view when it is cut along the dd line of (c).
- FIG. 4E is an explanatory view showing the outer peripheral surface of the pump rotor 30A, and a part thereof is taken out and shown in an enlarged manner.
- a linear convex portion 35 is formed on the rotor end surface 33.
- the alternate long and short dash line L indicates the major axis position of the rotor end face 33.
- the linear convex portion 35 is a linear convex portion having a constant width, and extends from one outer peripheral edge end 33e of the rotor end surface 33 to the other outer peripheral edge 33f at the long axis position L. Further, the linear convex portion 35 projects closer to the pump indoor side end surface 70 than the rotor end surface convex portion 33a (outer peripheral edge side convex portion 33c, inner peripheral edge side convex portion 33d).
- the linear convex portion 35 moves along the end surface 70 on the pump chamber side in a fourth gap narrower than the first gap ⁇ 1.
- the fourth gap is made as narrow as possible so that the linear convex portion 35 does not come into contact with the end surface 70 on the pump chamber side.
- the product adhering to and deposited on the end surface 70 on the indoor side of the pump is effectively scraped off by the linear convex portion 35. It is possible to surely eliminate adverse effects such as a product being clogged between the rotor end surface 33 and the pump chamber side end surface 70, which hinders the rotation of the rotor.
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Abstract
Description
ポンプ室と、
前記ポンプ室内に、平行な回転中心線周りに回転可能に配置した一対のポンプロータと、
各ポンプロータにおける前記回転中心線の方向の両側のロータ端面と、
前記ポンプ室における前記回転中心線の方向の両側に位置し、前記ロータ端面のそれぞれに対峙しているポンプ室内側端面と
を備えており、
前記ロータ端面のそれぞれには、ロータ端面凸部およびロータ端面凹部が形成されており、
前記ロータ端面凸部として、前記ロータ端面の外周縁に沿って当該外周縁の全周に亘って、外周縁側凸部が形成されており、
前記ロータ端面凹部は、前記ロータ端面における前記外周縁側凸部に囲まれた部分に形成されており、
対峙する前記ロータ端面と前記ポンプ室内側端面との間において、前記ロータ端面凸部は、第1隙間で、前記ポンプ室内側端面に対峙し、前記ロータ端面凹部は、前記第1隙間よりも広い第2隙間で前記ポンプ室内側端面に対峙している。
図1は本実施の形態に係る2段真空ポンプを示し、(a)はポンプ中心軸線を含む水平面(図1(c)のA-A線の位置)で切断した場合の概略断面図であり、図1(b)は、ポンプ中心軸線を含む水平面(図1(c)のB-B線の位置)で切断した場合の概略断面図であり、図1(c)はモータ側の端面図である。
図2(a)は真空ポンプ1の後段のポンプロータ30を示す端面図であり、図2(b)はその断面図であり、図2(c)はその反対側の端面図である。図2(d)および(e)は、モータ側サイドプレート7を示す端面図および断面図である。また、図3(a)は後段のポンプ室2bを示す概略部分断面図であり、図3(b)は後段のポンプ室2bを示す説明図である。
Claims (6)
- ポンプ室と、
前記ポンプ室内に、平行な回転中心線周りに回転可能に配置した一対のポンプロータと、
各ポンプロータにおける前記回転中心線の方向の両側のロータ端面と、
前記ポンプ室における前記回転中心線の方向の両側に位置し、前記ロータ端面のそれぞれに対峙しているポンプ室内側端面と
を備えており、
前記ロータ端面のそれぞれには、ロータ端面凸部およびロータ端面凹部が形成されており、
前記ロータ端面凸部として、前記ロータ端面の外周縁に沿って当該外周縁の全周に亘って、外周縁側凸部が形成されており、
前記ロータ端面凹部は、前記ロータ端面における前記外周縁側凸部に囲まれた部分に形成されており、
相互に対峙する前記ロータ端面と前記ポンプ室内側端面との間において、前記ロータ端面凸部は、第1隙間で、前記ポンプ室内側端面に対峙し、前記ロータ端面凹部は、前記第1隙間よりも広い第2隙間で前記ポンプ室内側端面に対峙している真空ポンプ。 - 請求項1において、
前記ポンプロータの各ロータ端面および前記ポンプ室内側端面には、ロータ軸が貫通して延びる軸穴がそれぞれ開口しており、
前記ロータ端面凸部として、前記ロータ端面に開口している前記軸穴の全周を取り囲む状態に、内周縁側凸部が形成されており、
前記ロータ端面凹部は、前記外周縁側凸部と前記内周縁側凸部との間に形成されている真空ポンプ。 - 請求項2において、
前記ポンプ室は、前記ポンプロータの前記回転中心線に直交する方向の一方の側において吸気側に連通し、他方の側において排気側に連通しており、
前記ポンプ室内側端面には、凹部が形成されており、
前記凹部は、前記ポンプ室内側端面において、前記ポンプロータの前記回転中心線に対して前記排気側であって、前記軸穴から離れた位置に形成されており、
前記凹部は、前記第1隙間よりも広い第3隙間で、前記ロータ端面凸部に対峙する真空ポンプ。 - 請求項1において、
前記ロータ端面凸部として、前記ロータ端面の長径位置において、当該ロータ端面の一方の外周縁端から他方の外周縁まで直線状に延びる直線状凸部が形成されており、
前記直線状凸部は、前記外周縁側凸部よりも前記ポンプ室内側端面の側に突出した端面部分である真空ポンプ。 - 請求項1において、
筒状のケーシング本体と、前記ケーシング本体の両端に取り付けたサイドプレートとを備えており、
前記ケーシング本体の内周面と、前記サイドプレートのそれぞれのプレート内側端面との間に、前記ポンプ室が形成されており、
前記サイドプレートのそれぞれの前記プレート内側端面によって、前記ポンプ室内側端面が規定されている真空ポンプ。 - 請求項1において、
前記ポンプ室として、少なくとも、吸気側の第1ポンプ室と排気側の第2ポンプ室を備えており、
前記第1ポンプ室および前記第2ポンプ室のそれぞれに、相互に対峙する前記ロータ端面および前記ポンプ室内側端面が備わっており、前記ロータ端面のそれぞれに、前記ロータ端面凸部および前記ロータ端面凹部が形成されている真空ポンプ。
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PCT/JP2019/019799 WO2020234947A1 (ja) | 2019-05-17 | 2019-05-17 | 真空ポンプ |
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WO2023119620A1 (ja) * | 2021-12-24 | 2023-06-29 | 樫山工業株式会社 | ドライ真空ポンプ |
WO2023119621A1 (ja) * | 2021-12-24 | 2023-06-29 | 樫山工業株式会社 | ドライ真空ポンプ |
CN116753167A (zh) * | 2023-04-19 | 2023-09-15 | 北京通嘉宏瑞科技有限公司 | 转子及真空泵 |
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KR20210132194A (ko) | 2021-11-03 |
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CN113795674A (zh) | 2021-12-14 |
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