WO2020231011A1 - 기판처리장치 - Google Patents

기판처리장치 Download PDF

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Publication number
WO2020231011A1
WO2020231011A1 PCT/KR2020/004743 KR2020004743W WO2020231011A1 WO 2020231011 A1 WO2020231011 A1 WO 2020231011A1 KR 2020004743 W KR2020004743 W KR 2020004743W WO 2020231011 A1 WO2020231011 A1 WO 2020231011A1
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WO
WIPO (PCT)
Prior art keywords
flow path
substrate processing
coupled
blade
processing apparatus
Prior art date
Application number
PCT/KR2020/004743
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English (en)
French (fr)
Korean (ko)
Inventor
정규재
Original Assignee
프리시스 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 프리시스 주식회사 filed Critical 프리시스 주식회사
Priority to JP2021559586A priority Critical patent/JP7291975B2/ja
Publication of WO2020231011A1 publication Critical patent/WO2020231011A1/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
    • H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
    • H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
    • H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover

Definitions

  • the present invention relates to a substrate processing apparatus, and more particularly, to a substrate processing apparatus including a valve module installed in a flow path through which gas exhausted from a process chamber in which substrate processing is performed.
  • a substrate processing apparatus such as CVD (Chemical Vapor Deposition)
  • CVD Chemical Vapor Deposition
  • process gases having various compositions are supplied into a process chamber to perform a substrate treatment.
  • the substrate treatment device is installed in the flow path between the process chamber and the exhaust pump for vacuum formation and gas exhaust. It includes a valve module.
  • the valve module plays an important role in maintaining a process environment for processing a substrate, and thus a technology for extending the life of the valve module and improving maintainability is required.
  • an object of the present invention is to minimize the vertical height of the valve module installed in the flow path by installing the support frame on the front side as well as the side and rear portions of the blade for opening and closing the flow path, thereby reducing the weight and size of the valve module It is to provide a substrate processing apparatus that can improve the durability of the.
  • an object of the present invention is an opening and closing member for guiding the movement of the valve housing or the opening and closing member in which the valve housing is made of aluminum or an aluminum alloy, and the opening and closing member and a driving unit for driving the movement of the opening and closing member are installed. It is to provide a substrate processing apparatus capable of reducing the weight of the valve module and facilitating maintenance of the valve module at a lower cost by configuring the guide unit to be detachably coupled.
  • the present invention is created to achieve the object of the present invention as described above, and the process chamber 100 for forming a substrate processing space (S); An exhaust pump 200 for exhausting the gas in the substrate processing space S to the outside; A first passage part 310 coupled to the process chamber 100 and communicating with the substrate processing space S; A second flow path part 320 coupled to the exhaust pump 200; Disclosed is a substrate processing apparatus including a valve module 400 installed between the first passage part 310 and the second passage part 320 to open and close a passage 402 through which gas flows.
  • the valve module 400 includes an opening/closing member 410 installed to be movable back and forth across the flow path 402 to open and close the flow path 402, and driving the front and rear movement of the opening/closing member 410
  • a protective member 440 may be included to prevent the gas flowing through 402 from penetrating into the inner space.
  • the opening and closing member 410 surrounds the entire edge of the blade portion 412 and the blade portion 412 covering the flow path 402 when moving forward, and is coupled to at least a portion of the edge of the blade portion 412 It may include a reinforcing frame portion 415.
  • the reinforcing frame portion 415 is coupled to both side surfaces 412b of the blade portion 412 and guide rollers 411 for guiding the front and rear movement of the blade portion 412 in the valve housing 430
  • a pair of side frame portions 414 are installed, and both ends of the blade portion 412 at the front portion 412a side are coupled to the pair of side frame portions 414, respectively, and a support frame portion 416 ), and both ends of the blade portion 412 at the rear portion 412c side are coupled to the pair of side frame portions 414, respectively, and a rear frame portion that transmits the driving force by the first driving portion 420 ( 418).
  • the reinforcing frame part 415 may have a planar shape such that the blade part 412 is located inside the reinforcing frame part 415.
  • the valve housing 430 includes a first flow path forming body part 432 coupled to the first flow path part 310 and having a first through hole 431 forming a part of the flow path 402, A second flow path formed with a second through hole 433 coupled to the second flow path part 320 and forming a part of the flow path 402 and spaced apart from the first through hole 431 to form a gap It may include a body portion 434.
  • the blade part 412 may enter between the first through hole 431 and the second through hole 433 when moving forward.
  • the protection member 440 has a ring shape surrounding the circumference of the flow path 402 and is in close contact with the first flow path forming body part 432 and is perpendicular to the arrangement plane of the blade part 412. It may be installed to be reciprocated along the first direction.
  • the valve module 400 may further include a second driving part for driving the movement of the protection member 440 in the first direction.
  • the protection member 440 is in close contact with the second flow path forming body part 434 when the flow path 402 is opened, and when the flow path 402 is closed, the blade part 412 is the second flow path forming body part.
  • the blade part 412 may be pressed so as to be in close contact with the 434.
  • Each of the pair of side frame portions 414 may include a first coupling block 510 and a second coupling block 520 coupled so that the side portion 412b of the blade portion 412 is interposed therebetween. have.
  • An end of the support frame part 416 may be interposed between the first coupling block 510 and the second coupling block 520.
  • Each of the pair of side frame parts 414 passes through the side part 412b of the blade part 412 and is fixed between the first and second combining blocks 510 and 520.
  • Each of the pair of side frame portions 414 is the first coupling block at a position not overlapping with the side portion 412b of the blade portion 412, the guide roller 411, and the fixing pin 532
  • a plurality of bolting members 540 for bolting 510 and the second coupling block 520 to each other may be included.
  • any one of the first coupling block 510 and the second coupling block 520 extends in a longitudinal direction toward the rear frame portion 418 to form an extension surface ES, and the rear frame portion 418 may be coupled to the extension surface ES.
  • the valve housing 430 may include a first air port through which air flows and an air injection chamber 436 communicating with the second air port inside the first flow path forming body part 432.
  • the protection member 440 has a ring shape surrounding the circumference of the flow path 402 and blocks a gap between the first through hole 431 and the second through hole 433, and A first air injection chamber 436a in which the first air port is located and a first air injection chamber 436a in which the first air port is located and a second air port are located extending outwardly from the longitudinal end of the blocking ring part 442. It may include a partition 444 partitioned into two air injection chambers 436b.
  • the valve housing 430 may be made of aluminum or aluminum alloy.
  • valve housing 430 a region corresponding to the flow path 402 is opened and a hollow first housing coupled to the first flow path forming body part 432 and the second flow path forming body part 434 ( 430a) and detachably coupled to one side of the first housing 430a and extending along the front and rear moving direction of the opening and closing member 410 to form an inner space for the front and rear movement of the opening and closing member 410 It may include a hollow second housing (430b).
  • the valve module 400 may further include an opening/closing member guide unit detachably installed on the valve housing 430 to guide the movement of the opening/closing member 410 back and forth.
  • the substrate processing apparatus includes a reinforcing frame part surrounding the entire edge of the blade part that opens and closes the flow path, thereby preventing the deformation of the blade part despite the reduction in weight and thickness of the blade part to maintain the shape and stably support the blade part. There is an advantage that can be done.
  • the substrate processing apparatus minimizes the vertical height of the valve module installed in the flow path by installing the support frame on the front side as well as the side and rear portions of the blade for opening and closing the flow path, thereby reducing the weight and size of the valve module. While there is an advantage that can improve the durability of the valve module.
  • the substrate processing apparatus has the advantage of greatly increasing the life of the valve module by installing a protection member that prevents damage to the valve module due to penetration of gas flowing through the flow path into the inner space of the valve module. .
  • the substrate processing apparatus has the advantage of securing a large adhesion force using the protective member even when using less driving force by installing the protective member on the process chamber side with respect to the valve module.
  • the substrate treatment apparatus is configured to guide the movement of the valve housing or the opening/closing member in which the valve housing is made of aluminum or aluminum alloy, and the opening/closing member and the driving unit for driving the movement of the opening/closing member are installed.
  • the opening/closing member guide part for detachable connection, there is an advantage that the valve module can be lightened and maintenance of the valve module can be facilitated at a lower cost.
  • FIG. 1 is a cross-sectional view showing a substrate processing apparatus according to an embodiment of the present invention.
  • FIG. 2 is a perspective view showing a valve module of the substrate processing apparatus of FIG. 1.
  • 3A to 3D are cross-sectional views in the AA direction of FIG. 2, illustrating an operation process of the valve module.
  • FIG. 4 is a perspective view showing an opening/closing member and a first driving part of the valve module of FIG. 2.
  • FIG. 5 is an exploded perspective view of the opening and closing member of the valve module of FIG. 4.
  • FIG. 6 is a perspective view showing a protection member of the valve module of FIG. 2.
  • a substrate processing apparatus includes a process chamber 100 for forming a substrate processing space S, as shown in FIGS. 1 to 6; An exhaust pump 200 for exhausting gas from the substrate processing space S to the outside; A first passage part 310 coupled to the process chamber 100 and communicating with the substrate processing space S; A second flow path part 320 coupled to the exhaust pump 200; It includes a valve module 400 installed between the first flow passage 310 and the second flow passage 320 to form a flow passage 402 through which gas flows.
  • the process chamber 100 may be configured in a variety of configurations to form a sealed substrate processing space (S).
  • the chamber body 110 having an opening formed on the upper side and the opening of the chamber body 110 It may be configured to include an upper lead 120 that is detachably coupled to form a sealed substrate processing space (S) together with the chamber body (110).
  • one or more gates 111 for introducing and discharging the substrate 10 may be formed on one side of the process chamber 100.
  • a power supply system for substrate processing, an exhaust system for pressure control and exhaust of the substrate processing space S, and the like may be connected or installed.
  • a gas injection unit 130 for injecting a process gas into the substrate processing space S may be installed in the process chamber 100.
  • the gas injection unit 130 is a configuration for injecting various process gases for a process into the processing space (S), and various configurations are possible.
  • the gas injection unit 130 is disposed on the upper lead 120 It is installed and may include one or more diffusion plates for diffusing the process gas introduced through the gas supply line (not shown), and a plurality of injection holes for injecting the diffused process gas toward the processing space S.
  • a substrate support unit 150 supporting the substrate 10 introduced into the substrate processing space S may be installed.
  • the substrate support unit 150 is installed in the process chamber 100 to support the substrate 10, and various configurations are possible.
  • the substrate 10 is supported on the upper surface.
  • a substrate support plate coupled to the substrate support plate and a substrate support shaft that is coupled to the substrate support plate and penetrates the chamber wall of the process chamber 100 and is coupled to the substrate vertical drive unit (not shown) to move upward.
  • the substrate support plate may be formed of a plate having a shape corresponding to the planar shape of the substrate 10, and a heater unit (not shown) for heating the substrate may be incorporated.
  • the substrate support shaft is coupled to the bottom surface of the substrate support plate, penetrates the chamber wall of the process chamber 100, and is coupled to the substrate up and down drive unit (not shown) to move upward and in various configurations.
  • the substrate vertical drive unit (not shown) may be configured to move the substrate support shaft upwardly and may be configured in various ways, and may include a motor, a linear guide, a screw, a nut, and the like according to the configuration of the device.
  • the exhaust pump 200 is a configuration for exhausting gas in the substrate processing space S to the outside, and various configurations are possible. For example, if a vacuum can be formed in the substrate processing space S, various vacuum pumps may be applied. I can.
  • a first flow path part 310 and a second flow path part 320 connecting the process chamber 100 and the exhaust pump 200 may be installed between the process chamber 100 and the exhaust pump 200.
  • the first flow path 310 may be configured as a pipe coupled to one or more exhaust ports formed in the process chamber 100 to communicate with the substrate processing space S, and the second flow path 320 may be Various configurations are possible as a pipe coupled to the exhaust pump 200.
  • the first flow path part 310 and the second flow path part 320 are active species (active gas) activated by remote plasma into the process chamber 100 and the process chamber 100.
  • active gas active gas
  • it can be installed between remote plasma sources (not shown) to supply ).
  • the valve module 400 is installed between the first passage part 310 and the second passage part 320 to open and close the passage 402 through which the gas flows, thereby controlling the flow of the gas flowing along the passage 402.
  • Various configurations are possible with the configuration for.
  • the valve module 400 drives an opening/closing member 410 installed to be movable back and forth across the flow path 402 in order to open and close the flow path 402 and the front and rear movement of the opening/closing member 410
  • the first driving unit 420, the opening and closing member 410, and the first driving unit 420 are installed, and the valve housing 430 and the flow path 402 are provided with an internal space for moving the opening and closing member 410 forward and backward. It may include a protection member 440 for preventing the flowing gas from penetrating into the internal space.
  • the opening/closing member 410 is configured to be movable back and forth across the flow path 402 to open and close the flow path 402, and may be formed of various shapes and materials.
  • the opening/closing member 410 surrounds the entire edge of the blade portion 412 and the blade portion 412 covering the flow path 402 when moving forward, and is coupled to at least a portion of the edge of the blade portion 412 It may include a reinforcing frame portion 415.
  • the blade part 412 is a plate covered across the flow path 402 by moving forward, and may be formed of various materials and shapes.
  • the blade portion 412 may include a front portion 412a, both side portions 412b, and a rear portion 412c, based on a moving plane (based on the drawing, an X-Y plane) for moving backward and forward.
  • a moving plane based on the drawing, an X-Y plane
  • the reference before and after may be determined according to the forward and backward direction of the blade unit 412 in the moving plane.
  • the blade part 412 is required to ensure durability while repeatedly performing a quick opening and closing operation (forward and backward stroke), so that the valve module 400 is not deformed by an external force in order to reduce the weight and size (minimize the thickness). It is preferable that the plate is made of a thin plate having elasticity within the range, and may be made of, for example, a SUS material.
  • the reinforcing frame portion 415 is a frame that surrounds the entire edge of the blade portion 412 and is coupled to at least a portion of the edge of the blade portion 412 and may be formed of various shapes and materials.
  • the reinforcing frame part 415 may have a planar shape such that the blade part 412 is positioned inside the reinforcing frame part 415.
  • the reinforcing frame portion 415 is coupled to the blade portion 412 in a manner that surrounds the entire edge of the blade portion 412, so that the blade portion 412 is deformed despite the reduction in weight and thickness of the blade portion 412 There is an advantage of maintaining the shape by preventing and enabling stable support of the blade portion 412.
  • the reinforcing frame portion 415 is coupled to both side surfaces 412b of the blade portion 412 and guide rollers for guiding the front and rear movement of the blade portion 412 in the valve housing 430 (
  • a pair of side frame portions 414 on which 411 is installed, and a support frame portion 416 having both ends coupled to the pair of side frame portions 414 at the front portion 412a side of the blade portion 412 ), and both ends of the blade portion 412 at the rear portion 412c side are coupled to a pair of side frame portions 414, respectively, and the rear frame portion 418 for transmitting the driving force by the first driving portion 420 Can include.
  • pair of side frame parts 414, support frame parts 416, and rear frame parts 418 may be combined with each other to form a ⁇ shape.
  • the pair of side frame portions 414 are coupled to both side surface portions 412b of the blade portion 412 and guide rollers 411 for guiding the front and rear movement of the blade portion 412 in the valve housing 430
  • the is installed for example, it may be a rod-shaped block extending along the forward and backward direction of the blade unit 412.
  • one or more guide rollers 411 may be installed, and an opening/closing member 410 is provided by the guide roller 411 in the valve housing. It can be moved back and forth within 430.
  • Each of the pair of side frame portions 414 may include a first coupling block 510 and a second coupling block 520 coupled so that the side portion 412b of the blade portion 412 is interposed therebetween. .
  • the side portion 412b of the blade portion 412 may be inserted between the coupling surface of the first coupling block 510 and the second coupling block 520.
  • the side portion 412b interposed between the coupling surface of the first coupling block 510 and the second coupling block 520 may extend outward toward the side frame portion 414.
  • each of the pair of side frame portions 414 is fixed between the first coupling block 510 and the second coupling block 520 through the side portion 412b of the blade portion 412
  • An elastic spring member installed on the fixing pin 532 between the pin 532 and at least one of the first coupling block 510 and the second coupling block 520 and the side portion 412b of the blade portion 412 ( 534) may be included.
  • the blade portion 412 may be displaced while receiving a restoring force between the first coupling block 510 and the second coupling block 520.
  • the guide roller 411 may be installed on a coupling surface between the first coupling block 510 and the second coupling block 520 at a position where it does not interfere with the side portion 412b of the blade portion 412. .
  • the guide roller 411 is installed between the first coupling block 510 and the second coupling block 520, so that the overall thickness of the side frame portion 414 may be minimized.
  • each of the pair of side frame portions 414 is a first coupling block 510 at a position that does not overlap with the side portion 412b of the blade portion 412, the guide roller 411, and the fixing pin 532.
  • the second coupling block 520 may include a plurality of bolting members 540 for bolting to each other.
  • the bolting member 540 is a member for bolting the first coupling block 510 and the second coupling block 520 and may be formed of various shapes and materials.
  • the bolting member 540 is in a state in which the first coupling block 510 and the second coupling block 520 are coupled, and the first coupling block (
  • the bolting region may be formed to completely surround the bolting member 540 so as not to protrude to the outside of the 510 and the second coupling block 520.
  • any one of the first coupling block 510 and the second coupling block 520 may extend in the longitudinal direction toward the rear frame portion 418 to be described later to form an extension surface ES.
  • the rear frame portion 418 to be described later may be coupled to the extension surface ES.
  • the second coupling block 520 may extend toward the rear frame portion 418 to form an extension surface ES, and the rear frame portion 418 May be bonded to the extension surface ES.
  • the rear frame part 418 is formed so that the top surface is aligned with the top surface of the first coupling block 510, so that the rear frame part 414 can be molded and coupled to the side frame part 414 without bending, thereby providing a compact structure. Can be implemented.
  • the support frame part 416 may have various configurations in which both ends of the blade part 412 are coupled to a pair of side frame parts 414, respectively.
  • the support frame part 416 is located on the side of the front part 412a of the blade part 412 in a plane, but has a pair of side frames at both ends in a state spaced apart from the edge of the front part 412a by a predetermined distance. Each may be coupled to the unit 414.
  • an end of the support frame part 416 may be interposed between the first coupling block 510 and the second coupling block 520.
  • the support frame portion 416 by performing a function of connecting and supporting a pair of side frame portions 414 with each other, changes the shape of the opening and closing member 410 even when the blade portion 412 is formed very thin. There is an advantage that can be maintained without and improved durability.
  • support frame part 416 may have various shapes depending on the shape of the blade part 412.
  • the rear frame part 418 has both ends of the blade part 412 at the rear part 412c side, respectively, coupled to a pair of side frame parts 414 and transmitting driving force by the first driving part 420 Various configurations are possible.
  • the rear frame portion 418 is located on the side of the rear portion 412c of the blade portion 412 in a plan view, but has a pair of side frame portions at both ends in a state spaced apart from the edge of the rear portion 412c by a predetermined distance ( 414), respectively.
  • the rear frame part 418 performs a function of connecting and supporting a pair of side frame parts 414 with each other, and a clamping part 418a directly/indirectly connected to the first driving part 420 at the central part By providing, it is possible to transmit the driving force through the first driving unit 420 to the opening and closing member 410.
  • a plurality of arm portions 492 installed in a row between the first driving portion 420 and the clamping portion 418a, and a link coupling portion 494 that hingesably couples the neighboring arm portions 492. ) can be installed.
  • the arm part 492 closest to the rear frame part 418 is coupled to the clamping part 418a so that the driving force through the first driving part 420 can be transmitted to the opening/closing member 410 through the plurality of arm parts 492. have.
  • valve module 400 may further include an opening/closing member guide part which is detachably installed on the valve housing 430 and guides the movement of the opening/closing member 410 back and forth.
  • the opening/closing member guide part may contact the guide roller 411 installed on the side frame part 414 to provide a path through which the guide roller 411 moves.
  • the opening/closing member guide portion may be composed of a guide rail installed along the front and rear moving direction of the opening/closing member 410, and may be made of aluminum or aluminum alloy material for weight reduction.
  • the opening/closing member guide part is detachably installed on the valve housing 430, when maintenance is required, maintenance such as replacing only the corresponding component may be possible.
  • the first driving unit 420 is a driving unit that drives the front and rear movement of the opening/closing member 410, and of course, various driving sources such as an actuator such as pneumatic/hydraulic or a motor may be applied.
  • the valve housing 430 is a housing in which an opening/closing member 410 and a first driving part 420 are installed and an internal space for moving the opening/closing member 410 back and forth is formed, and various configurations are possible.
  • the valve housing 430 includes a first flow path forming body part 432 coupled to the first flow path part 310 and having a first through hole 431 forming a part of the flow path 402 and , A second flow path that is coupled to the second flow path part 320 and has a second through hole 433 which forms a part of the flow path 402 and is spaced apart from the first through hole 431 to form a gap G It may include a forming body part 434.
  • the blade part 412 may enter between the first through hole 431 and the second through hole 433 when moving forward. That is, the space between the first through hole 431 and the second through hole 433 may be used as a space for the forward and backward movement of the blade unit 412.
  • the first passage forming body part 432 may have a first flange 432a formed at an end facing the first passage part 310 to be coupled to the first passage part 310.
  • the second flow path forming body part 434 may have a second flange 434a formed at an end facing the second flow path part 320 to be coupled to the second flow path part 320.
  • valve housing 430 a region corresponding to the flow path 402 is opened and a hollow first housing 430a coupled to the first flow path forming body part 432 and the second flow path forming body part 434 ) And, a second hollow type that is detachably coupled to one side of the first housing 430a and extends along the front and rear moving direction of the opening and closing member 410 to form an inner space for the front and rear movement of the opening and closing member 410 It may further include a housing 430b.
  • first housing 430a an area corresponding to the flow path 402 is opened, and the first flow path forming body part 432 and the second flow path forming body part 434 are coupled to the upper and lower surfaces of the open area.
  • the type housing Various configurations are possible with the type housing.
  • the first housing 430a may be provided with a space for moving the protection member 440 to be described later, and a means for controlling the pressure of the flow path 402.
  • first housing 430a may be an embodiment in which a plurality of plates are combined, such as welding or detachment, rather than a single member.
  • the second housing 430b is coupled to one side of the first housing 430a and is formed to extend along the front and rear moving direction of the opening and closing member 410 to form an inner space for the front and rear movement of the opening and closing member 410
  • Various configurations are possible with the type housing.
  • the second housing 430b may be coupled to one side of the first housing 430a in various ways, for example, may be welded or detachably coupled.
  • a first driving part 420 for driving the opening/closing member 410 may be coupled to the second housing 430b.
  • the second housing 430b similarly to the first housing 430a, is also possible in an embodiment in which a plurality of members rather than a single member are combined in various ways such as welding or detachment.
  • the valve housing 430 may be made of aluminum or an aluminum alloy material, and each component constituting the valve housing 430 is detachably coupled. It is desirable to be.
  • valve housing 430 is made of SUS material and manufactured by welding, it is difficult to reduce weight due to the heavy weight, and there is a problem that maintenance of some components is impossible as each element is combined by a welding method. .
  • valve housing 430 and the opening/closing member guide part are made of aluminum or aluminum alloy material, and each component part is made detachable, thereby reducing weight and improving maintainability. There is an advantage.
  • the protection member 440 is configured to prevent the gas flowing through the flow path 402 from penetrating into the inner space of the valve housing 430 and may be configured in various ways.
  • the protection member 440 is formed in a ring shape surrounding the circumference of the flow path 402, as shown in FIGS. 3A to 3D and 6, and is in close contact with the first flow path forming body part 432 It may be installed so as to be reciprocally moved along a first direction (Z-axis direction based on the drawing) perpendicular to the arrangement plane (XY plane based on the drawing) of the blade unit 412.
  • valve module 400 may further include a second driving unit (not shown) for driving the movement of the protection member 440 in the first direction.
  • the valve housing 430 in particular, the first housing 430a, is an air injection chamber 436 communicating with the first and second air ports through which air flows in and out. May be provided inside the first flow path forming body part 432 side.
  • the air injection chamber 436 is a space for moving the protective member 440 in the first direction while providing pneumatic pressure for the movement of the protective member 440 in the first direction, and the first flow path forming body part 432 It may be formed inside the side, more specifically, in a space between the first housing 430a and the first passage forming body 432.
  • the protection member 440 may be installed to be movable between the first housing 430a and the first flow path forming body 432.
  • the protection member 440 is formed in a ring shape surrounding the circumference of the flow path 402 and blocks a gap G between the first through hole 431 and the second through hole 433. ), and a second air injection chamber 436 in which the first air injection chamber 436a and the second air port are located, extending outwardly to the longitudinal end of the blocking ring 442 It may include a partition portion 444 partitioned into the air injection chamber (436b).
  • the blocking ring part 442 is a ring-shaped member having a length longer than the gap G between the first through hole 431 and the second through hole 433, and the first housing 430a and the first flow path forming body It may be installed to be movable between the parts 432.
  • the inner surface of the blocking ring part 442 is in close contact with the first flow path forming body part 432 through the O-ring member O, and the outer surface of the blocking ring part 442 is the first housing. It may be in close contact with 430a.
  • a groove 441 for installing the O-ring member O may be formed on the inner or outer circumferential surface of the blocking ring part 442.
  • the partition part 444 extends outwardly to the longitudinal end of the blocking ring part 442 to form the air injection chamber 436 into a first air injection chamber 436a and a second airport in which the first air port is located. It is a flange that divides into the second air injection chamber 436b where is located, and various shapes are possible.
  • the partition 444 may correspond to a piston that is moved according to the air inflow and outflow from the air injection chamber 436 to the first airport or the second air port. .
  • An O-ring member O for sealing between the first air injection chamber 436a and the second air port of the air injection chamber 436 may be provided at an edge end of the partition part 444.
  • the air injection chamber 436 is a first air injection chamber 436a in which the first air port is located and a second air injection chamber 436b in which the second air port is located, based on the partition part 444. Can be partitioned.
  • the blocking member The 440 can be moved upward (+Z direction), and on the contrary, air flows out from the first air injection chamber 436a through the first air port, and the second air injection chamber ( When air is introduced into 436b), the blocking member 440 may be moved in a downward direction (-Z direction).
  • the air injection line 437 is connected to the first and second air ports, and the air injection line 437 is controlled to control air inflow and outflow. Means can be installed.
  • the valve module 400 passes through the flow path 402 to form a vacuum atmosphere in the processing space S before performing the substrate processing in the substrate processing apparatus or to exhaust the process byproducts of the processing space S to the outside after performing the substrate processing. ) Open.
  • the opening/closing member 410 When the valve module 400 is opening the flow path 402, as shown in FIG. 3A, the opening/closing member 410 is in a rearwardly moved state, and the blocking member 440 is an arrangement plane of the blade unit 412.
  • the first direction -Z-axis direction based on the drawing
  • the drawing reference XY plane By moving downwards along the first direction (-Z-axis direction based on the drawing) perpendicular to (the drawing reference XY plane), it is possible to maintain a state in close contact with the second passage forming body part 434.
  • the rearward movement of the opening and closing member 410 means that the blade part 412 is moved in a direction away from the flow path 402.
  • the protection member 440 may be in close contact with the second flow path forming body part 434 when the flow path 402 is opened.
  • an O-ring member O may be provided on a contact surface of the blocking ring part 442 that is in close contact with the second flow path forming body part 434.
  • a gas flow may be formed from the process chamber 100 side to the exhaust pump 200 side along the flow path 402.
  • the blocking ring part 442 of the blocking member 440 is in close contact with the second flow path forming body part 434 to block the gap G between the first through hole 431 and the second through hole 433 As such, the gas flowing along the flow path 402 is prevented from penetrating into the inner space of the valve housing 430, so that contamination or damage of the valve module 400 may be prevented.
  • valve module 400 may block the flow path 402 in order to complete the evacuation of the process chamber 100 or close the processing space S in which the vacuum atmosphere is formed.
  • the blocking member 440 is separated from the second flow path forming body 434 and the arrangement plane of the blade unit 412 (Fig. It moves upward along the first direction (Z-axis direction based on the drawing) perpendicular to the reference XY plane).
  • the gap G between the first through hole 431 and the second through hole 433 may be opened.
  • the blocking member 440 opens the gap G between the first through hole 431 and the second through hole 433, and as shown in FIG. 3C, the blade part 412 is a flow path 402 It moves forward toward and may enter the flow path 402 through the gap G between the first through hole 431 and the second through hole 433.
  • the protection member 440 moves downward again to press the blade portion 412, as shown in FIG. 3D.
  • the blade part 412 can be in close contact with the second flow path forming body part 434, and the flow path 402 is completely sealed through the O-ring member O provided on the bottom surface of the blade part 412. It can be closed.
  • the protection member 440 may press the blade portion 412 so that the blade portion 412 comes into close contact with the second flow path forming body portion 434.
  • the blade part 412 is located at a distance from the second flow path forming body part 434 when the pressing force by the protection member 440 is not applied, but when the pressing force by the protection member 440 is applied, the blade part 412 ) It can be completely in close contact around the second flow path forming body part 434 by its own elastic deformation and the elastic spring member 534 between the blade part 412 and the side frame part 414.
  • the O-ring member (O) provided in the blocking ring part 442 is in close contact with the upper surface of the blade part 412, the first through hole 431 and the second through hole 433 where the blocking ring part 442 remains By blocking the gap G therebetween, the gas flowing along the flow path 402 is prevented from penetrating into the inner space of the valve housing 430, thereby preventing contamination or damage of the valve module 400.
  • the protection member 440 is installed on the side of the process chamber 100 based on the blade part 412, and the process chamber 100 side and the exhaust pump in a state in which a vacuum atmosphere is formed in the process chamber 100 Pressure from the process chamber 100 toward the exhaust pump 200 may be formed by the pressure difference between the 200 sides.
  • the protection member 440 can sufficiently press the blade part 412 even if a separate pressing force through the second driving part is not largely formed, so that the flow path 402 through the protection member 440 and the blade part 412 and There is an advantage that sealing for the gap G can be effectively achieved.
  • the protective member 440 is installed on the side of the process chamber 100 based on the blade part 412, when the blade part 412 closes the flow path 402, it is protected by the self-weight of the protective member 440 Since the member 440 can press the blade portion 412, there is also an advantage that sealing of the flow path 402 and the gap G through the protection member 440 and the blade portion 412 can be effectively achieved.
  • the pressing force on the blade portion 412 may be released by moving the blocking member 440 again upward.
  • the second flow path is again caused by the restoring force. It may be positioned at a distance from the forming body part 434.
  • the flow path 402 may be opened again as shown in FIG. 3A.

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  • Engineering & Computer Science (AREA)
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  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Sliding Valves (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
PCT/KR2020/004743 2019-05-10 2020-04-08 기판처리장치 WO2020231011A1 (ko)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100717865B1 (ko) * 2006-02-01 2007-05-14 주식회사 에스티에스 개선된 부식방지용 진공 게이트밸브
KR100979688B1 (ko) * 2010-02-03 2010-09-02 주식회사 에스알티 게이트 밸브
KR101570477B1 (ko) * 2009-01-12 2015-11-19 프리시스 주식회사 진공 게이트 밸브
KR20180072067A (ko) * 2016-12-21 2018-06-29 주식회사 원익아이피에스 스로틀밸브 및 그를 가지는 기판처리장치
KR101932219B1 (ko) * 2016-04-05 2018-12-24 주식회사 비츠로머티리얼 게이트 밸브

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008051171A (ja) * 2006-08-23 2008-03-06 S Vac Co Ltd 真空バルブ
KR101326861B1 (ko) * 2012-03-15 2013-11-12 (주)선린 기판 처리에 이용되는 게이트 개폐 장치
KR101842970B1 (ko) * 2016-01-05 2018-03-29 주식회사 마이크로텍 게이트 밸브의 개폐장치

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100717865B1 (ko) * 2006-02-01 2007-05-14 주식회사 에스티에스 개선된 부식방지용 진공 게이트밸브
KR101570477B1 (ko) * 2009-01-12 2015-11-19 프리시스 주식회사 진공 게이트 밸브
KR100979688B1 (ko) * 2010-02-03 2010-09-02 주식회사 에스알티 게이트 밸브
KR101932219B1 (ko) * 2016-04-05 2018-12-24 주식회사 비츠로머티리얼 게이트 밸브
KR20180072067A (ko) * 2016-12-21 2018-06-29 주식회사 원익아이피에스 스로틀밸브 및 그를 가지는 기판처리장치

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KR102204243B1 (ko) 2021-01-18

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