WO2018110953A1

WO2018110953A1 - Substrate processing apparatus and method using the same

Info

Publication number: WO2018110953A1
Application number: PCT/KR2017/014585
Authority: WO
Inventors: Saeng Hyun Cho
Original assignee: Applied Materials, Inc.
Priority date: 2016-12-12
Filing date: 2017-12-12
Publication date: 2018-06-21
Also published as: TW201830573A; KR20180077172A; JP2020501005A; CN109923688A; CN109923688B

Abstract

Disclosed herein is a substrate processing apparatus including: a process chamber (10) for providing a process environment isolated from an outside, at least one distance measuring unit (500) for measuring a distance between a substrate (S) and a mask (350) installed in the process chamber (10) contactlessly, and a press mechanism for bring the substrate (S) and the mask (350) into tight contact by moving them relative to each other while the distance measuring unit (500) is measuring the distance therebetween. The substrate processing apparatus can align the substrate (S) with the mask (350) and bring them into tight contact much accurately and reliably, thereby increasing the yield of the substrate processing.

Description

SUBSTRATE PROCESSING APPARATUS AND METHOD USING THE SAME

The present disclosure relates to a substrate processing apparatus and a substrate processing method using the same.

A substrate processing apparatus performs a deposition process, an etching process and the like in order to produce a wafer for fabricating semiconductor, a substrate for fabricating an LCD, a substrate for fabricating an OLED, and the like. The substrate processing apparatus have a variety of configurations depending on the type, conditions of substrate processing, etc.

Examples of such substrate processing apparatuses include a deposition apparatus. The deposition apparatus forms a thin film on the surface of a substrate by performing CVD, PVD, evaporation deposition, etc.

To produce a substrate for fabricating an OLED, it is common to use a process of evaporating a deposition material such as an organic material, an inorganic material and a metal to form a thin film on the surface of a substrate.

A deposition apparatus for forming a thin film by evaporating a deposition material includes a deposition chamber in which a substrate for deposition is loaded, and a source disposed inside the deposition chamber to heat the deposition material to evaporate it toward the substrate. As the deposition material is evaporated, the thin film is formed on the surface of a substrate.

The source used in the deposition apparatus for OLEDs is installed inside the deposition chamber to heat the deposition material to evaporate the deposition material toward the substrate. Such sources may have a variety of configurations, such as those disclosed in Korean Patent Laid-Open Publication Nos. 10 - 2009 - 0015324 and 10 - 2004 - 0110718.

As shown in FIG. 1, in a deposition apparatus for OLEDs, an anode, a cathode, an organic layer, etc. in predetermined patterns are formed by using a substrate S combined with a mask 350.

Accordingly, it is necessary to align the substrate S with the mask 350 before a deposition process. In the related art, the substrate S is aligned with the mask 350 outside a process chamber 10, and then they are transferred into the process chamber 10 to perform a deposition process.

Unfortunately, while transferring the substrate S and the mask 350 into the process chamber after aligning them with each other outside the process chamber 10, the substrate S and the mask 350 may be deviated from each other, thereby causing a deposition defect.

Specifically, when the substrate is transferred and subjected to a deposition process as it is vertically orientated, the substrate S and the mask 350 may slightly move relative to each other. This results in defects in the deposition process, and accordingly there is a problem that the deposition process may fail.

In order to prevent such defects in the deposition process, it is necessary to bring the substrate S in tight contact with the mask 350 or having the substrate S adhere to the mask 350 in the process chamber 10. However, there is so far no means to detect whether the substrate S is in tight contact with the mask 350. Accordingly, if the substrate processing is performed even though the substrate S is not in tight contact with the mask 350, there may arise problems such as that a deposition material is deposited even on the bottom surface of the substrate.

In view of the above, an object of the present disclosure is to provide a substrate processing apparatus that can accurately measure the gap between a substrate and a mask to thereby perform excellent substrate processing.

According to an aspect of the present disclosure, there is provided a substrate processing apparatus including: a process chamber 10 for providing a process environment isolated from an outside, at least one distance measuring unit 500 for measuring a distance between a substrate S and a mask 350 installed in the process chamber 10 contactlessly, and a press mechanism for bring the substrate S and the mask 350 into tight contact or adhere to each other by moving them relative to each other while the distance measuring unit 500 is measuring the distance therebetween.

The substrate S may be attracted and fixed by the electrostatic chuck 340 and may be located between the mask 350 and the distance measuring unit 500.

The distance measuring unit 500 may include an optical sensor for measuring a distance using light.

A through hole 342 may be formed through the electrostatic chuck 340 so that the light irradiated from the optical sensor reaches the mask 350.

The substrate S may cover at least a part of the through hole 342.

The optical sensor may include a light-emitting unit that irradiates light to the bottom surface of the substrate S exposed via the through hole 342, and a light-receiving unit that receives light reflected off the substrate S and the mask 350 after having passed the through-hole 342.

The optical sensor may be a confocal sensor.

The optical sensor may be a laser displacement sensor for irradiating a laser beam of a short wavelength.

The distance measuring unit 500 may include a first distance measuring unit for measuring a relative distance to the mask 350, and a second distance measuring unit for measuring a relative distance to the substrate S.

The first distance measuring unit may irradiate a laser beam onto a bottom surface of a mask sheet 351 of the mask 350 or a bottom surface of a mask frame 352 to which the mask sheet 351 is fixed, to measure the relative distance to the mask 350.

A through hole 342 may be formed through the electrostatic chuck 340 so that a laser beam irradiated from the first distance measuring unit reaches the mask 350.

The substrate S may cover at least a part of the through hole 342, and the second distance measuring unit may irradiate a laser beam onto a bottom surface of the substrate S exposed via the through hole 342 to measure the relative distance to the substrate S.

A protrusion may be formed in the through hole 342 of the electrostatic chuck 340, the protrusion 344 may protrude inwardly of the through hole along its inner circumference to form a step portion 345, and the second distance measuring unit may irradiate a laser beam onto the step portion 345 formed by the protrusion 344 to measure the relative distance to the substrate S.

A blocking member 346 may be installed in the through hole 342 of the electrostatic chuck 340, the blocking member 346 may block a part of the through hole 342, and the second distance measuring unit may irradiate a laser beam onto the blocking member 346 to measure the relative distance to the substrate S.

A plurality of through holes 342 may be formed along edges of the electrostatic chuck 340.

The substrate processing apparatus may include a controller for controlling the adhesion driving portion based on a gap between the substrate S and the mask 350 measured by the distance measuring unit 500.

The substrate processing apparatus may further include: a mask clamper 100 installed in the process chamber 10 to clamp the mask 350; and a substrate clamper 200 installed in the process chamber 10 to clamp a substrate carrier 320, the substrate S being attracted and fixed by the electrostatic chuck 340 to the substrate carrier, and the adhesion driving portion is installed on the mask clamper 110 and/or the substrate clamper 200 to move the substrate and the mask relative to each other so that the substrate S is brought into tight contact with the mask 350.

The substrate processing apparatus may further include: an aligner 400 for moving the substrate carrier 320 relative to the mask 350 clamped by the mask clamper 110 to align the substrate S clamped by the substrate clamper 200 with the mask 350 clamped by the mask clamper 100.

According to another aspect of the present disclosure, there is provided a substrate processing method using the substrate processing apparatus, including: moving the substrate relative to the mask so that they are brought into tight contact with each other while measuring the distance between the substrate S and the mask 350 by the distance measuring unit 500.

The substrate processing method may include: aligning the substrate S with the mask 350 before the substrate S is brought into tight contact with the mask 350.

The substrate processing method may include: after the aligning, performing substrate processing if it is determined that the distance between the substrate S and the mask 350 measured by the distance measuring unit 500 is equal to or less than a predetermined distance, and bringing the substrate S and the mask 350 into tight contact again if it is determined that the distance between the substrate S and the mask 350 is greater than the predetermined distance.

According to an exemplary embodiment of the present disclosure, a substrate processing apparatus includes a distance measuring unit 500 for measuring the distance between the substrate S and the mask 350 contactlessly when the substrate S and the mask 350 come in tight contact with each other, so that the process of aligning the substrate S with the mask 350 and bringing them into tight contact can be performed much easily and reliably, thereby greatly improving the yield of the substrate processing.

In particular, when the substrate S and the mask 350 are brought into contact as they are vertically oriented, the contact states between the substrate S and the mask 350 may different from location to location. Therefore, by locating the distance measuring units 500 at positions where accurate measurement of the contact state is required, such as positions corresponding to the vertices of the rectangular substrate, it is possible to accurately measure the distance between the substrate S and the mask 350 at the positions.

Further, in the related art, the contact state between the substrate S and the mask 350 is sensed by a camera, and thus it is not easy to sense the contact state. In contrast, according to an exemplary embodiment of the present disclosure, an optical sensor, especially a confocal sensor or a laser sensor is used to measure the distance between the substrate S and the mask 350 contactlessly, and thus the contact state between the substrate S and the mask 350 can be measured accurately and reliably.

Moreover, according to an exemplary embodiment of the present disclosure, an alignment structure for fixing and aligning the substrate S and the mask 350 with each other as they are vertically oriented, allowing for excellent substrate processing as the substrate S and the mask 350 are vertically oriented.

FIG. 1 is a cross-sectional view showing an example of an existing OLED deposition apparatus;

FIGS. 2A to 2C are cross-sectional views showing an aligner structure of a substrate processing apparatus according to an exemplary embodiment of the present disclosure, especially showing a process of aligning a substrate and a mask and bringing them into tight contact;

FIG. 3A is a plan view showing through holes of the electrostatic chuck in the aligner structure of FIG. 2C;

FIG. 3B is a cross-sectional view showing a distance measuring unit according to a first exemplary embodiment in the aligner structure of FIG. 2C;

FIG. 4 is a cross-sectional view showing a distance measuring unit according to a second exemplary embodiment in the aligner structure of FIG. 2C;

FIG. 5 is a cross-sectional view showing a distance measuring unit according to a third exemplary embodiment in the aligner structure of FIG. 2C;

FIG. 6 is a cross-sectional view showing a distance measuring unit according to a fourth exemplary embodiment in the aligner structure of FIG. 2C;

FIGS. 7A and 7B are cross-sectional views showing the structure and operation of a mask clamper;

FIGS. 8A and 8B are cross-sectional views showing the structure and operation of a substrate clamper;

FIG. 9 is a side view showing an aligner in the aligner structure of FIGS. 2A to 2C; and

FIG. 10 is a plan view showing a process of aligning a substrate with a substrate carrier.

Hereinafter, exemplary embodiments of the present disclosure will be described with reference to the accompanying drawings. FIGS. 2A to 2C are cross-sectional views showing an aligner structure of a substrate processing apparatus according to an exemplary embodiment of the present disclosure, especially showing a process of aligning a substrate and a mask and bringing them into tight contact. FIG. 3A is a plan view showing through holes of the electrostatic chuck according to a first exemplary embodiment in the aligner structure of FIG. 2C. FIG. 3B is a cross-sectional view showing a distance measuring unit according to the first exemplary embodiment in the aligner structure of FIG. 2C. FIG. 4 is a cross-sectional view showing a distance measuring unit according to a second exemplary embodiment in the aligner structure of FIG. 2C. FIG. 5 is a cross-sectional view showing a distance measuring unit according to a third exemplary embodiment in the aligner structure of FIG. 2C. FIG. 6 is a cross-sectional view showing a distance measuring unit according to a fourth exemplary embodiment in the aligner structure of FIG. 2C. FIGS. 7A and 7B are cross-sectional views showing the structure and operation of a mask clamper. FIGS. 8A and 8B are cross-sectional views showing the structure and operation of a substrate clamper. FIG. 9 is a side view showing an aligner in the aligner structure of FIGS. 2A to 2C. FIG. 10 is a plan view showing a process of aligning a substrate with a substrate carrier.

In a substrate processing apparatus according to an exemplary embodiment of the present disclosure, a substrate S and a mask 350 are separately transferred into a process chamber 10, and then the substrate S and the mask 350 are brought into tight contact with each other or adhered to each other, to perform the substrate processing. The substrate processing apparatus is applicable to all kinds of apparatuses that performs substrate processing by using a mask 350 and aligns the substrate S with and the mask 350, such as a deposition apparatus for evaporating a deposition material to deposit it, and a deposition apparatus for performing an atomic layer deposition process.

The substrate processing apparatus according to an exemplary embodiment of the present disclosure includes a process chamber 10 for providing a process environment isolated from the outside, at least one distance measuring unit 500 for measuring the distance between a substrate S and a mask 350 installed in the process chamber 10 contactlessly, and a adhesion driving portion for bring the substrate S and the mask 350 into tight contact by moving them relative to each other while the distance measuring unit 500 is measuring the distance therebetween.

According to the substrate processing apparatus, the substrate S and the mask 350 are transferred into the process chamber 10 separately, the transferred substrate S and mask 350 are fixed in the process chamber 10, the fixed substrate S and mask 350 are aligned with each other by moving them relative to each other, and the aligned substrate S and mask 350 are brought into tight contact. Then, the substrate processing apparatus performs substrate processing.

The substrate S and the mask 350 may be transferred into and fixed in the process chamber 10 as they are vertically orientated with respect to the ground.

On the contrary, the substrate S and the mask 350 may be transferred into and fixed in the process chamber 10 as they are horizontally orientated with respect to the ground.

Preferably, the substrate S is transferred as it is fixed on a substrate carrier 320.

The substrate carrier 320 is an element to move the substrate S fixed thereon and may have a variety of structures depending on the mechanism to fix the substrate S thereon.

According to an exemplary embodiment of the present disclosure, the substrate carrier 320 may include an electrostatic chuck 340 for attracting and fixing a substrate by electrostatic force, a frame 360 coupled with the electrostatic chuck 340 such that the top surface of the electrostatic chuck 340 is exposed upwardly, and a DC power supply (not shown) installed in the frame 360 to supply DC power to the electrostatic chuck 340 and control the supply.

The electrostatic chuck 340 attracts and fixes a substrate S while the substrate carrier 320 transfers the substrate S by the electromagnetic force. The electrostatic chuck 340 generates the electromagnetic force by receiving power from the DC power supply installed in the substrate carrier 320 or from an external DC power source.

The DC power supply unit is installed in the frame 360 to supply of DC power to the electrostatic chuck 340 and controls the supply of DC power. The DC power supply may have a variety of configurations depending on the power supply system and the installation structure.

Since the substrate carrier 320 is installed to move the substrate S by attracting and fixing it thereon in the substrate processing system including the process chamber 10, the DC power supply is required to supply power to the electrostatic chuck 340 for a sufficient time to perform the process. Preferably, the DC power supply is wirelessly controlled.

To this end, the DC power supply may include a rechargeable battery (not shown) for supplying power to the electrostatic chuck 340, and a wireless communications unit for wireless communications and control with an external controller.

The rechargeable battery is charged with DC power so as to supply DC power to the electrostatic chuck 340.

The wireless communications unit performs the control of the supply of DC power to the electrostatic chuck 340, and other control over the substrate carrier 100, etc. based on wireless communications with an external controller.

The DC power supply is at least partially detachably installed to the substrate carrier 320.

Also, the rechargeable battery is operated under a very low pressure, that is, atmospheric pressure, which is higher than the process pressure. Thus, the environment surrounding the rechargeable battery has to be isolated from the outside.

Accordingly, it is desired that the DC power supply includes a housing structure that provides a sealed internal space where the rechargeable battery is installed so as to isolate the rechargeable battery from the external process environment.

The frame 360 is coupled with the electrostatic chuck 340 at the edge of the electrostatic chuck 340 to expose the top surface of the electrostatic chuck 340 and may have a variety of configurations.

The substrate carrier 320 may be moved by a roller, magnetic levitation, etc. The mechanism is not particularly limited herein as long as the substrate carrier 320 can be moved into and out of the process chamber 10.

To this end, the process chamber 10 includes an element for moving the substrate carrier 320 depending on the mechanism for moving the substrate carrier 320.

The substrate carrier 320 may be guided into and out of the process chamber 10 by a substrate guide member 610 installed in the process chamber 10.

The mask 350 may also be transferred into the process chamber 10 in a variety of ways.

According to an exemplary embodiment of the present disclosure, the mask 350 may be transferred by a roller, magnetic levitation, etc. The mechanism is not particularly limited herein as long as the mask 350 can be moved into and out of the process chamber 10.

To this end, the process chamber 10 includes an element for transferring the mask 350 depending on the mechanism for moving the mask 350.

The mask 350 is brought into contact with the substrate S to perform substrate processing such as patterned deposition.

According to an exemplary embodiment of the present disclosure, the mask 350 may be composed of a mask sheet 351 having patterned apertures 354 therein, and a mask frame 352 on which the mask sheet 351 is fixed.

The mask 350 may be coupled with a mask carrier 370 that transfers the mask sheet 351 and the mask frame 352 fixed thereon.

The mask carrier 370 is an element to move the mask sheet 351 and the mask frame 352 fixed thereon and may have a variety of structures depending on the mechanism to fix the mask 350 thereon.

The mask carrier 370 may be guided into and out of the process chamber 10 by a mask guide member 620 installed in the process chamber 10.

An additional element required for the substrate processing may be installed in the process chamber 10. For example, when the substrate processing is an atomic layer deposition process, a structure for injecting gas such as a source gas and a reaction gas may be installed in the process chamber 10 in addition to the source 30.

The process chamber 10 is not particularly limited herein as long as it can provide a processing environment for performing the evaporation deposition process.

The process chamber 10 may be formed of a container having an internal space with a gate through which the substrate S can pass.

The container may include exhaust means for maintaining a predetermined pressure at the inner space.

At least one source 30 is installed in the process chamber 10. The source 30 is not particularly limited herein as long as it can heat a deposition material so that the deposition material is evaporated toward the substrate S.

The source 30 evaporates a deposition material including at least one of an organic material, an inorganic material and a metallic material. It may include, for example, a vessel containing a deposition material, and a heater for heating the vessel.

To perform such substrate processing, the process chamber 10 has an aligner structure for fixing and aligning the substrate S with the mask 350, and for and bringing them into tight contact.

The aligner structure may align the substrate S and the mask 350 by moving the mask 350 while the substrate S is fixed, or by moving the substrate S while the mask 350 is fixed, or by moving both the substrate S and the mask 350, and so on.

Hereinafter, an example of the aligner structure for fixing and aligning the substrate S with the mask 350 and for and bringing them into tight contact will be described.

The aligner structure may include a mask clamper 100 installed in the process chamber 10 for clamping the mask 350, a substrate clamper 200 for clamping the substrate carrier on which the substrate S is attracted and fixed by the electrostatic chuck 340, an aligner 400 for moving the substrate carrier 320 relative to the mask 350 to align the substrate S clamped by the substrate clamper 200 with the mask 350 clamped by the mask clamper 110, and the above-described adhesion driving portion for bringing the substrate S and the mask 350 aligned by the aligner 400 into tight contact.

The mask clamper 100 is installed in the process chamber 10 to clamp the mask 350. The mask clamper 100 may have a variety of configurations depending on the mechanism for clamping the mask 350.

According to an exemplary embodiment of the present disclosure, the mask clamper 100 may clamp the mask 350 by magnetic force, screwing, fitting, or the like.

In particular, the mask 350 is coupled with the mask clamper 100 such that they are moved and coupled in the direction perpendicular to the surface of the mask 350 transferred into the process chamber 10.

More specifically, the mask clamper 100 may include an insertion portion 110 in which a projection 310 rising from the bottom surface of the mask 350 is inserted, and a holding portion 120 for holding the coupling between the projection 310 and the insertion portion 110 after the projection 310 is inserted into the insertion portion 110.

The projection 310 rising from the bottom surface of the mask 350 is to be inserted into the insertion portion 110 and may have a variety of configurations depending on the coupling mechanism.

Alternatively, a recessed groove instead of the projection 310 may be formed so that the insertion portion 110 is inserted into the bottom surface of the mask 350.

The insertion portion 110 may be coupled with the projection 310 rising from the bottom surface of the mask 350 and may have a recessed groove 111.

As shown in FIGS. 7A and 7B, the insertion portion 110 is moved in the direction perpendicular to the surface of the mask 350 transferred to the process chamber 10 so that the projection 310 is inserted into the insertion portion 110.

The holding portion 120 maintains the coupling between the projection 310 and the insertion portion 110 after the projection 310 is inserted into the insertion portion 110. The holding portion 120 may have a variety of configurations.

According to an exemplary embodiment of the present disclosure, the holding portion 120 may include ball members 121 fitted into two or more holes 311 formed along the outer peripheral surface of the projection 310, and a pressing member 123 pressing the ball members 121 into the holes 311 when the projection 310 is inserted into the recess groove 111 of the insertion portion 110.

The pressing member 123 is installed movably in the longitudinal direction (x-axis direction) in the housing forming the insertion portion 110 and can move to press the ball members 121 into the holes 311.

According to an exemplary embodiment of the present disclosure, there may be an inclined surface in contact with the ball members 121, such that the pressing member 123 may be moved in the longitudinal direction (x-axis direction) of the projection 310 to press the ball members 121 into the holes 311.

In addition, the pressing member 123 is moved in the longitudinal direction (x-axis direction) in the housing forming the insertion portion 110 by a hydraulic device (not shown) or the like.

It is necessary to fix the pressing member 123 in the housing forming the insertion portion 110 as it presses the ball members 121 into the holes 311 so as to maintain the pressing state.

To this end, the pressing member 123 may be fixed by a fixing member 125 installed around the housing forming the insertion portion 110.

The fixing member 125 is installed around the housing forming the insertion portion 110 to fix the pressing member 123. Specifically, the fixing member 125 may be formed as a ring-like tube and may be expanded by hydraulic or pneumatic pressure inside it, such that it presses the pressing member 123 directly or indirectly to fix it.

With the above-described configuration, the holding portion 120 can maintain the coupling between the projection 310 and the insertion portion 110 by pressing the ball members 121 into the holes 311, such that the position of the projection 310 can be accurately corrected. By doing so, the aligner 400 can align the mask 350 with the substrate S quickly and accurately.

The substrate clamper 200 is installed in the process chamber 10 to clamp the substrate carrier 320 on which the substrate S is attracted and fixed by the electrostatic chuck 340. The substrate clamper 200 may have a variety of configurations depending on the mechanism for clamping the substrate S.

According to an exemplary embodiment of the present disclosure, the substrate clamper 200 may clamp the substrate carrier 320 by magnetic force, screwing, fitting, or the like.

In particular, the substrate carrier 320 is coupled with the substrate clamper 200 such that they are moved and coupled in the direction perpendicular to the surface of the substrate carrier 320 transferred into the process chamber 10.

More specifically, the substrate clamper 200 may include an insertion portion 110 in which a projection 321 rising from the bottom surface of the substrate carrier 320 is inserted, and a holding portion 220 for holding the coupling between the projection 321 and the insertion portion 210 after the projection 321 is inserted into the insertion portion 210.

The projection 321 rising from the bottom surface of the substrate carrier 320 is to be inserted into the insertion portion 210 and may have a variety of configurations depending on the coupling mechanism.

Alternatively, a recessed groove instead of the projection 321 may be formed so that the insertion portion 210 is inserted into the bottom surface of the substrate carrier 320.

The insertion portion 210 may be coupled with the projection 321 rising from the bottom surface of the substrate carrier 320 and may have a recessed groove 211.

As shown in FIGS. 8A and 8B, the insertion portion 210 is moved in the direction perpendicular to the surface of the substrate carrier 320 transferred to the process chamber 10 so that the projection 321 is inserted into the insertion portion 210.

The holding portion 220 maintains the coupling between the projection 321 and the insertion portion 210 after the projection 321 is inserted into the insertion portion 210. The holding portion 220 may have a variety of configurations.

According to an exemplary embodiment of the present disclosure, the holding portion 220 may include ball members 221 fitted into two or more holes 322 formed along the outer peripheral surface of the projection 321, and a pressing member 223 pressing the ball members 221 into the holes 322 when the projection 321 is inserted into the recessed groove 211 of the insertion portion 210.

The pressing member 223 is installed movably in the longitudinal direction (x-axis direction) in the housing forming the insertion portion 210 and can move to press the ball members 221 into the holes 322.

According to an exemplary embodiment of the present disclosure, there may be an inclined surface in contact with the ball members 221, such that the pressing member 223 may be moved in the longitudinal direction (x-axis direction) of the projection 321 to press the ball members 221 into the holes 322.

In addition, the pressing member 223 is moved in the longitudinal direction (x-axis direction) in the housing forming the insertion portion 210 by a hydraulic device (not shown) or the like.

It is necessary to fix the pressing member 223 in the housing forming the insertion portion 210 as it presses the ball members 221 into the holes 322 so as to maintain the pressing state.

To this end, the pressing member 223 may be fixed by a fixing member 225 installed around the housing forming the insertion portion 210.

The fixing member 225 is installed around the housing forming the insertion portion 210 to fix the pressing member 223. Specifically, the fixing member 225 may be formed as a ring-like tube and may be expanded by hydraulic or pneumatic pressure inside it, such that it presses the pressing member 223 directly or indirectly to fix it.

With the above-described configuration, the holding portion 220 can maintain the coupling between the projection 321 and the insertion portion 210 by pressing the ball members 221 into the holes 321, such that the position of the projection 321 can be accurately corrected. By doing so, the aligner 400 can align the mask 350 with the substrate S quickly and accurately.

The aligner 400 moves the substrate carrier 320 relative to the mask 350 to align the substrate S clamped by the substrate clamper 200 with the mask 350 clamped by the mask clamper 110. The aligner may have a variety of configurations depending on the alignment manner.

According to an exemplary embodiment of the present disclosure, as shown in FIG. 9, the aligner 400 may include a first linear moving part 410, a second linear moving part 420 and a third linear moving part 440 that move the mask 350 or the substrate S in the direction parallel to the substrate S.

The first linear moving part 410, the second linear moving part 420 and the third linear moving part 440 may be perpendicular to one another and may move the mask 350 or the substrate S in the direction parallel to the substrate S. They may have a variety of configurations depending on the mechanism for linearly moving the substrate S or the mask 350, such as a screw jack system, a belt system and a piezoelectric system.

The first linear moving part 410, the second linear moving part 420 and the third linear moving part 440 may linearly move in the directions parallel to the respective sides of the rectangular substrate S, conforming to the shape of the rectangular substrate S.

Since the mask 350 and the substrate S are fixed and aligned with each other as they are vertically oriented, there may be an error in alignment due to backlash in mechanical linear driving by a screw jack, for example.

In order to prevent the alignment error due to the backlash, the linear moving directions of the first linear moving part 410, the second linear moving part 420 and the third linear moving part 430 may be perpendicular to one another and may have an inclination with respect to the vertical direction, as shown in FIG. 9.

As the first linear moving part 410, the second linear moving part 420 and the third linear moving part 430 are inclined with respect to the vertical direction, weights of all of the first linear moving part 410, the second linear moving part 430 and the third linear moving part 430 act in the vertical direction, thereby preventing the alignment error due to the backlash.

The aligner 400 may be installed in the substrate clamper 200 and/or the mask clamper 110.

Specifically, more than one substrate clampers 200 and more than one mask clampers 110 may be installed at a plurality of points for the substrate S and the mask 350, respectively. The aligner 400 may be configured to align the substrate clampers 200 or the mask clampers 100 together.

For another example, more than one substrate clampers 200 and more than one mask clampers 110 may be installed at a plurality of points for the substrate S and the mask 350, respectively. The aligner 400 may be configured to align the substrate clampers 200 or the mask clampers 100 individually.

As mentioned earlier, if the substrate S and the mask 350 are not precisely aligned with each other, there may be an error in forming a pattern on the substrate S, thereby lowering the yield. Therefore, it is very important to align the substrate S with the mask 350 before performing the substrate processing.

Incidentally, for substrate processing, the substrate S is transferred alone or by being fixed on the substrate carrier 320, while the latter is more typical.

If the substrate S is not accurately fixed on the substrate carrier 320, a subsequent process of aligning it with the mask 350 may be delayed, or a failure may occur in performing the substrate processing.

Particularly, in some processes, the substrate S may be flipped over, i.e., turned over or vertically oriented as it is fixed on the substrate 320, and thus the coupling and alignment between the substrate S and the substrate carrier 320 is very important.

Accordingly, it is desirable to perform alignment between the substrate carrier 320 and the substrate S when the substrate S is mounted on the substrate carrier 320.

FIG. 10 is a plan view showing a process of aligning the substrate S with the substrate carrier 320.

Specifically, as the substrate S and the substrate carrier 320 are oriented vertically while being spaced apart from each other before the substrate S is mounted on the substrate carrier 320, the substrate S is aligned with the substrate carrier 320 by using a first mark M1 on the substrate S and a second mark M2 on the substrate carrier 320.

The process of aligning the substrate S with the substrate carrier 320 is substantially the same as or similar to the process of aligning between the mask 350 and the substrate S described above, and thus a detailed description thereof will be omitted.

The adhesion driving portion brings the substrate S and the mask 350 aligned by the aligner 400 into tight contact. The adhesion driving portion may include a linear driving part that is installed in the substrate clamper 200 and/or the mask clamper 110 to bring the mask 350 and the substrate S into tight contact.

Incidentally, if the substrate S and the mask 350 are not in tight contact with each other, there may be formed a space between the substrate S and the mask 350, such that particles such as the deposition material or by-products may be introduced into the space. As a result, the substrate processing may fail.

Particularly, when the substrate processing is performed as the substrate S and the mask 350 are introduced into the process chamber 10 as they are vertically oriented, it is important to check if the substrate S and the mask 350 are in tight contact, since the mask 350 is not pressed by its own weight.

In view of the above, according to an exemplary embodiment of the present disclosure, the substrate processing apparatus includes a distance measuring unit 500 that measures the distance between the substrate S and the mask 350 contactlessly in order to determine whether they are in tight contact when they are brought into contact by the adhesion driving portion.

The distance measuring unit 500 measures the distance between the substrate S and the mask 350 contactlessly. The distance measuring unit 500 may have a variety of configurations.

A variety of contactless distance sensors may be used as long as they can measure the distance between the substrate S and the mask 350 contactlessly.

For example, the distance measuring unit 500 may include an optical sensor that measures distance using light including monochromatic light such as a laser, light in the visible range, and the like.

The distance measuring unit 500 may be disposed on one side of the electrostatic chuck 340 so that the substrate S is positioned between the distance measuring unit 500 and the mask 350.

That is, the substrate S may be placed between the mask 250 and the distance measuring unit 500 as it is attracted and fixed by the electrostatic chuck 340.

For example, the distance measuring unit 500 may be installed outside the process chamber 10 with respect to one side surface of the process chamber 10 located between the distance measuring unit 500 and the electrostatic chuck 340.

A window glass may be installed on the side surface of the process chamber 10 located between the distance measuring unit 500 and the electrostatic chuck 340, so that light irradiated from the distance measuring unit 500 can be transmitted through the window glass.

Hereinafter, the distance measuring unit 500 according to a first exemplary embodiment of the present disclosure will be described in detail with reference to FIG. 3B.

According to the first exemplary embodiment, a through hole 342 may be formed in the electrostatic chuck 340 so that the light irradiated from an optical sensor of the distance measuring unit 500 reaches the mask 350.

As shown in FIG. 3A, more than one through holes 342 may be formed in the electrostatic chuck 340 along the periphery of the electrostatic chuck 340.

When the substrate S and the mask 350 are brought into tight contact as they are vertically oriented, the contact states between the substrate S and the mask 350 may be different on the upper side and the lower side. Therefore, it is preferable that the through holes 342 are formed at positions corresponding to the vertices of the rectangular substrate S that require accurate sensing of the contact state.

When more than one through holes 342 are formed, more than one distance measuring units 500 may be installed.

The substrate S may cover some or all of the through holes 342.

According to the first exemplary embodiment, the optical sensor of the distance measuring unit 500 may include a light-emitting unit that irradiates light to the bottom surface of the substrate S exposed via the through-hole 342, and a light-receiving unit that receives light reflected off the substrate S and the mask 350 after having passed the through-hole 342.

The optical sensor may be a variety of optical sensors such as a confocal sensor or a laser displacement sensor for irradiating a laser beam of a short wavelength.

When a confocal sensor is employed as the optical sensor, light emitted from the light-emitting unit passes the through-hole 342, then transmits the substrate S made of a transparent material such as glass, and then is reflected off the bottom surface of the substrate S, the top surface of the substrate S and the bottom surface of the mask 350 (the mask sheet 351 of the mask 350 or the bottom surface of the mask frame 352 to which the mask sheet 351 is fixed).

The light-receiving unit receives the light reflected off the bottom surface of the substrate S, the top surface of the substrate S and the bottom surface of the mask 350, and measures the distances to the bottom surface of the substrate S, the top surface of the substrate S and the bottom surface of the mask 350 simultaneously based on the intensities of different wavelengths of the received light.

In this manner, the distance D between the substrate S and the mask 350 can be measured.

Particularly, when a confocal sensor is employed as the optical sensor, the distances to the bottom surface of the substrate S, the top surface of the substrate S and the bottom surface of the mask 350 can be measured simultaneously, such that the distance between the substrate S and the mask 350 (the mask sheet 351 or the mask frame 352) can be obtained.

In addition, the confocal sensor can measure the distance between the substrate S and the mask 350 (the mask sheet 351 or the mask frame 352) with a high precision, so that the mask 350 and the substrate S can be precisely aligned and come in tight contact.

Moreover, as the confocal sensor can precisely measure the distance, a less number of sensors may be installed for measuring the distance between the substrate S and the mask 350 compared to other distance measuring units, as described above.

If other optical sensors are employed, a number of through holes 342 are formed at a number of locations along the edge of the substrate S, and the optical sensors are installed in the through holes 342, respectively, to measure the distance. In contrast, by employ the confocal sensors as the optical sensors, the distance between the substrate S and the mask 350 can be measured by installing the sensors at one or two locations since the optical sensor can measure the distance precisely.

The distance at the positions where the distance measuring unit 500 employing the confocal sensor is not installed can be corrected through warm-up operation, experiments, and the like.

Hereinafter, a distance measuring unit 500 according to a second exemplary embodiment of the present disclosure will be described in detail with reference to FIG. 4, focusing on differences from the first exemplary embodiment.

According to the second exemplary embodiment, the distance measuring unit 500 may include a first distance measuring unit installed in the process chamber 10 to measure a relative distance to the mask 350, and a second distance measuring unit installed in the process chamber 10 to measure a relative distance to the substrate S.

Unlike the first exemplary embodiment in which the single distance measuring unit 500 measures the distance between the substrate S and the mask 350, the distance measuring unit according to the second embodiment includes the first distance measuring unit and the second distance measuring unit.

The distance measuring unit 500 may measures the distance between the substrate S and the mask 350 based on a relative distance L1 between the first distance measuring unit and the mask 350 and a relative distance L2 between the second distance measuring unit and the substrate S.

Preferably, the first distance measuring unit and the second distance measuring unit are installed on the same virtual measurement reference line R perpendicular to the relative distances L1 and L2 for measuring the distance precisely.

The first distance measuring unit may irradiate a laser beam onto the bottom surface of the mask sheet 351 of the mask 350 or the bottom surface of the mask frame 352 to which the mask sheet 351 is fixed, to measure the relative distance L1 to the mask 350.

The first distance measuring unit may irradiate a laser beam onto the bottom surface of the mask 350 exposed via the through hole 342 formed in the electrostatic chuck 340, or may irradiate a laser beam onto the bottom surface of the mask 350 that is extended beyond the periphery of the electrostatic chuck 340 and accordingly is not covered by the electrostatic chuck 340 (especially the bottom surface of the mask frame 342).

The second distance measuring unit may irradiate a laser beam onto the bottom surface of the substrate S exposed via the through hole 342 or the bottom surface of the electrostatic chuck 340, to measure the relative distance L2 to the substrate S.

Therefore, the distance D between the substrate S and the mask 350 may be obtained by the relative distance L1 from the first distance measuring unit to the mask 350 and the relative distance L2 from the second distance measuring unit to the substrate S, as expressed in Equation 1 below:

[Equation 1]

D = L1 - L2 - T

where T denotes the thickness of the substrate S.

Hereinafter, a distance measuring unit 500 according to a third exemplary embodiment of the present disclosure will be described in detail with reference to FIG. 5, focusing on differences from the first and second embodiments.

According to the third exemplary embodiment, a protrusion 344 may be formed in the through hole 342 of the electrostatic chuck 340, which protrudes inwardly of the through hole 342 along its inner circumference to form a step portion 345, as shown in FIG. 5.

The second distance measuring unit may irradiate a laser beam to the step portion 345 formed by the protrusion 344 to measure the relative distance to the substrate S.

Therefore, the distance D between the substrate S and the mask 350 may be obtained by the relative distance L1 from the first distance measuring unit to the mask 350 and the relative distance L2 from the second distance measuring unit to the substrate S, as expressed in Equation 2 below:

[Equation 2]

D = L1 - L2 - T - t

where T denotes the thickness of the substrate S, t denotes the thickness of the protrusion 344.

Hereinafter, a distance measuring unit 500 according to a fourth exemplary embodiment of the present disclosure will be described in detail with reference to FIG. 6, focusing on differences from the first to third second embodiments.

According to the fourth exemplary embodiment, a blocking member 346 may be installed in the through hole 342 of the electrostatic chuck 340, which blocks a part of the through hole 342, as shown in FIG. 6.

The second distance measuring unit may irradiate a laser beam onto the blocking member 346 to measure the relative distance to the substrate S.

Therefore, the distance D between the substrate S and the mask 350 may be obtained by the relative distance L1 from the first distance measuring unit to the mask 350 and the relative distance L2 from the second distance measuring unit to the substrate S, as expressed in Equation 3 below:

[Equation 3]

D = L1 - L2 - T - S

where T denotes the thickness of the substrate S, S denotes the thickness of the blocking member 346.

The blocking member 346 is a target for measuring the distance, onto which the laser beam from the second distance measuring unit is irradiated. The blocking member 346 may be, but is not limited to, made of glass or quartz.

The blocking member 346 may be installed in the through-hole 342 in various shapes and in various manners as long as it can block a part of the through-hole 342.

For example, the blocking member 346 may be a ring-shaped member installed at the inner circumference or the end of the through-hole 342.

The blocking member 346 is preferably installed at the end of the side of the through-hole 342 on which the substrate S is attracted for accurate distance measurement. It is, however, to be understood that this is merely illustrative.

The distance measuring unit 500 measures the distance between the substrate S and the mask 350 to sense the contact state between the substrate S and the mask 350. The distance information may be utilized in controlling the electrostatic chuck 340, the adhesion driving portion, etc.

Accordingly, the substrate processing apparatus according to an exemplary embodiment of the present disclosure may include a controller for controlling the adhesion driving portion based on the distance between the substrate S and the mask 350 measured by the distance measuring unit 500.

To this end, it is necessary to transmit the distance information sensed by each distance measuring unit 500 to the controller (not shown) of the substrate processing apparatus.

The distance measuring unit 500 installed in the process chamber 10 may include a wired communications unit for transmitting the distance information measured by the distance measuring unit 500 to a controller installed outside the process chamber 10, or a communications unit for performing wireless communications (not shown).

The communications unit transmits the distance information measured by the distance measuring unit 500 to the controller installed outside the process chamber 10 in a wired or wireless manner. The communications unit may have a variety of configurations.

The configurations of the distance measuring unit 500 described above may be equally applied to substrate processing apparatuses for processing substrates S at either vertical orientation or horizontal orientation.

Hereinafter, a substrate processing method using the substrate processing apparatus having the above-described configurations will be described. According to the substrate processing method, the substrate S and the mask 350 may be moved relative to each other to be brought into tight contact while the distance therebetween is measured by the distance measuring unit 500.

The distance between the substrate S and the mask 350 may be measured by a first distance measurement process for measuring a relative distance to the mask 350, and a second distance measurement process for measuring a relative distance to the substrate S.

The first distance measurement process and the second distance measurement process are performed by the distance measuring unit 500 described above, and the detailed description thereof will be omitted.

Specifically, the substrate processing method may include the steps of: introducing the substrate S and the mask 350 into the process chamber 10; measuring the position of the substrate S (the distance to the substrate S) and the position of the mask 350 (the distance to the mask 350) by using the distance measuring unit 500 before aligning the substrate S with the mask 350 by using the aligner 400; aligning the substrate S with the mask 350 after moving the substrate S and the mask 350 relative to each other up to a predetermined gap G therebetween while measuring the distance between the substrate S and the substrate 350; and bringing the substrate S and the mask 350 into tight contact after the aligning.

The substrate processing method may include determining the distance (gap) between the substrate S and the mask 350 by the distance measuring unit 500 after the bringing them into tight contact, and performing substrate processing only if it is determined that the distance (gap) is equal to or less than a predetermined distance.

Preferably, the gap G ranges from 50 to 500 ㎛, and the reference distance ranges from 0 to 100 ㎛.

After the measuring the distance between the substrate S and the mask 350, a deposition process by evaporation of the deposition material, a deposition process for performing an atomic layer deposition process, and the like may be performed.

If the distance between the substrate S and the mask 350 measured by the distance measuring unit 500 is greater than the predetermined distance, the above-described substrate processing method may be performed again.

Claims

A substrate processing apparatus, comprising:

a process chamber providing process environment isolated from an outside;

at least one distance measuring unit measuring an interval between a substrate and a mask transported into the process chamber in a contactless manner; and

an adhesion driving portion having the substrate and the mask adhere to each other so that the interval is equal to or less than a preset reference distance.
The substrate processing apparatus of claim 1, wherein the distance measuring unit includes an optical sensor, and

the substrate is disposed between the mask and the optical sensor.
The substrate processing apparatus of claim 2, wherein the substrate is adsorbed and fixed by an electrostatic chuck, and

the electrostatic chuck is provided with a through hole penetrating therethrough so that light irradiated from the optical sensor reaches the mask.
The substrate processing apparatus of claim 3, wherein the substrate covers at least a part of the through hole.
The substrate processing apparatus of claim 2, wherein the substrate is made of a light transmitting material, and

the optical sensor is a confocal sensor.
The substrate processing apparatus of claim 2, wherein the optical sensor is a laser displacement sensor that irradiates a short-wavelength laser beam.
The substrate processing apparatus of claim 3, wherein the distance measuring unit includes a first distance measuring unit that irradiates a laser beam to one surface of the mask exposed through the through hole to measure a relative distance with respect to the mask, and

a second distance measuring unit that irradiates the laser beam to one surface of the substrate exposed through the through hole or one surface of the electrostatic chuck to measure a relative distance with respect to the substrate.
The substrate processing apparatus of claim 7, wherein the first distance measuring unit measures a relative distance with respect to the mask by irradiating a laser beam to a bottom surface of a mask sheet of the mask or one surface of a mask frame to which the mask sheet is fixed.
The substrate processing apparatus of claim 7, wherein the through hole is provided with a protrusion protruding inwardly of the through hole along an inner circumferential edge thereof to form a step portion, and

the second distance measuring unit irradiates the laser beam to the step portion formed by the protrusion to measure the relative distance with respect to the substrate.
The substrate processing apparatus of claim 7, wherein the through hole of the electrostatic chuck is provided with a blocking member covering a part of the through hole, and

the second distance measuring unit irradiates the laser beam to the blocking member to measure the relative distance with respect to the substrate.
The substrate processing apparatus of claim 3, wherein the through hole is formed in plural along an edge of the electrostatic chuck.
The substrate processing apparatus of any one of claims 1 to 11, further comprising:

a mask clamper installed in the process chamber to clamp the mask;

a substrate clamper installed in the process chamber to clamp a substrate carrier to which the substrate is adsorbed and fixed by the electrostatic chuck; and

an aligner aligning the substrate and the mask by a relative movement between the clamped mask and the clamped substrate carrier,

wherein the adhesion driving portion is installed on at least any one of the mask clamper and the substrate clamper.
A substrate processing apparatus, comprising:

a process chamber providing process environment isolated from an outside;

at least one distance measuring unit measuring an interval between a substrate and a mask each vertically transported and installed into the process chamber in a contactless manner;

an aligner aligning the substrate and the mask by a relative movement between the substrate and the mask; and

an adhesion driving portion having the substrate and the mask adhere to each other so that the interval between the aligned substrate and mask is equal to or less than a preset reference distance.
A substrate processing method, comprising:

vertically transporting a substrate and a mask , respectively, to introduce the substrate and the mask into a process chamber;

aligning the substrate and the mask by a relative movement between the substrate and the mask; and

having the substrate and the mask adhere to each other so that an interval between the substrate and the mask measured in a contactless manner is equal to or less than a preset reference distance.
The substrate processing method of claim 14, further comprising:

having the substrate and the mask adhere to each other up to the preset interval before the substrate and the mask are aligned.