WO2020224004A1 - 一种蛇形线式质谱仪连续性变压取样装置及方法 - Google Patents
一种蛇形线式质谱仪连续性变压取样装置及方法 Download PDFInfo
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- WO2020224004A1 WO2020224004A1 PCT/CN2019/087702 CN2019087702W WO2020224004A1 WO 2020224004 A1 WO2020224004 A1 WO 2020224004A1 CN 2019087702 W CN2019087702 W CN 2019087702W WO 2020224004 A1 WO2020224004 A1 WO 2020224004A1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
- H01J49/0409—Sample holders or containers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
- H01J49/0422—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components for gaseous samples
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- the invention belongs to the technical field of gas analysis, and particularly relates to a continuous variable pressure sampling device and method for a serpentine line mass spectrometer.
- Mass spectrometer also known as mass spectrometer, is an instrument that analyzes and detects different components in gas. It is a type of material composition that separates and detects material composition based on the principle that charged particles can be deflected in an electromagnetic field, according to the difference in mass of material atoms, molecules or molecular fragments instrument. Mass spectrometer measurement technology has been widely used in pharmaceuticals, food, medicine, geology, steel production, vacuum system leak detection, environmental simulation, manned aerospace and other industrial fields and scientific and technological research, which is important for the development of modern technology and the construction of national economy Both play an important role.
- the analysis chamber of the mass spectrometer must work in a specific high vacuum state, and the initial pressure of the analyzed gas is often close to the uncertain value of the ambient atmospheric pressure; especially the mass spectrometer applied to the gas composition monitoring in various vacuum equipment is The pressure of the measured gas may change from normal pressure to high vacuum state. Therefore, the mass spectrometer must be equipped with a gas sampling device so that the gases at different pressures can be decompressed and transported to the analysis chamber in a high vacuum state under the premise of keeping the composition unchanged.
- the present invention provides a continuous variable pressure sampling device and method for a serpentine line mass spectrometer.
- the invention can continuously sample under the condition of gas pressure changes, fills the gap in this aspect of the gas analysis industry, and is also applicable to the work of continuous sampling under gas pressure changes in other industries.
- the technical solution is as follows:
- a continuous variable pressure sampling device for a serpentine line mass spectrometer comprising a housing and a mass spectrometer system.
- An inner plate is slidably installed inside the housing, and a serpentine line groove is opened on the surface of the inner plate.
- the cross-sectional area is gradually increased from the inlet end to the outlet end, the surface of the inner plate is attached to the surface of the inner upper wall of the outer shell, and the upper inner wall of the outer shell is provided with a vent groove, and the longitudinal length of the vent groove is equal to the serpentine type
- the extended width of the groove, while the ventilation groove is provided with an air inlet, and the air inlet penetrates the upper wall of the housing and is connected to the air inlet pipe and the air inlet valve in sequence.
- the air outlet end of the serpentine groove is provided with an air outlet pipe that penetrates the inner plate,
- the lower end of the air outlet pipe is connected to one end of the pipeline, and the other end of the pipeline passes through the right shell wall of the housing to connect to the mass spectrometer system.
- a threaded hole is opened in the middle of the inner plate, and the threaded hole is equipped with a screw.
- the other end penetrates through the side wall of the remote mass spectrometer system of the housing and is equipped with the output end of the reducer.
- the input end of the reducer is equipped with the output end of the motor.
- the bottom end of the housing is fixedly installed with a bottom plate, and the upper surface of the bottom plate is fixedly installed with evenly distributed Spring bearing groove, the upper end of the spring bearing groove rolling bearing bearing, the pipeline between the casing and the mass spectrometry system is installed with a throttle valve and a vacuum pump in sequence, and the pipeline between the vacuum pump and the throttle valve is installed with a vacuum gauge.
- the length of the threaded hole opened in the middle of the inner plate is slightly longer than the arrangement length of the serpentine groove, the thread surface length of the screw is slightly longer than the arrangement length of the serpentine groove, and the upper end of the rolling bearing is slightly higher than the inner plate lower surface.
- a closed groove is opened outside the serpentine groove area on the upper surface of the inner plate, and a rubber sealing ring is clamped in the closed groove.
- the lower end of the shell and the outer edge of the bottom plate are both welded with flanges, the flange of the shell and the flange of the bottom plate are installed by bolts, and the contact surface of the flange is attached with a sealing rubber layer.
- a sampling method for a continuous variable pressure sampling device of a serpentine line mass spectrometer comprising the following steps:
- Step 1 Close the intake valve, open the throttle valve, and turn on the vacuum pump to vacuum.
- the gas pressure in the gas path gradually drops to the maximum working pressure of the mass spectrometer, start the vacuum pump in the mass spectrometer system to speed up the vacuuming speed.
- the gas path for analyzing gas components is cleaned until the vacuum reaches the optimal working pressure of the mass spectrometer;
- Step 2 Start the motor, move the inner plate to the position closest to the mass spectrometer, make the vent groove on the upper wall of the shell communicate with the smallest section of the inlet end of the serpentine groove, open the inlet valve, and the analyzed gas enters the gas passage;
- Step 3 According to the feedback control of the vacuum degree measured by the vacuum gauge, the inner plate is gradually moved away from the mass spectrometer, so that the length of the gas path of the serpentine groove connected with the air groove on the upper wall of the housing is gradually reduced. The flow rate gradually increases, and the gas flow rate and vacuum in the channel meet the requirements of the mass spectrometer;
- Step 4 When the pressure of the gas to be analyzed in the intake pipe changes, the motor is feedback controlled according to the vacuum degree measured by the vacuum gauge.
- the sample gas pressure When the sample gas pressure is high, move the inner plate toward the mass spectrometer to increase the gas passage and reduce the pressure , Return to the working pressure of the mass spectrometer; when the sampling gas pressure is low, move the inner plate away from the mass spectrometer to shorten the gas passage, increase the pressure, and return to the working pressure of the mass spectrometer to always ensure the sampling gas collected in the channel It has stable pressure and flow to ensure that the vacuum is in line with the working vacuum of the mass spectrometer;
- This working process is a continuous process, and this equipment can continuously detect gas components online.
- the present invention can enable the analyzed gas to continuously flow into the sampling system and update in time, thereby realizing the function of continuous gas sampling and continuous online detection of the analyzed gas Capability, fast response time and high sensitivity, overcome the shortcomings of intermittent gas sampling.
- variable cross-section and variable length gas sampling channel structure proposed by the present invention can flexibly adjust the conductance of the gas sampling channel in a large range.
- the position of the inner plate can be adjusted by feedback to make the gas sampling channel have proper conductance, so as to always ensure a stable gas pressure and flow at the outlet of the sampling channel, and ensure that the mass spectrometer is in good condition Working status.
- the invention breaks through the limitation that the traditional online sampling method can only be applied to a single pressure, and can work normally under the condition of a wide range of gas pressure changes.
- the present invention turns a very long gas pipeline into a gas path engraved in a serpentine curve on a flat plate, greatly reducing the volume of the equipment and occupying space; a fully enclosed seal is arranged around the serpentine groove in the inner plate
- the ring is pressed against the upper surface of the inner wall of the shell by applying a force to the inner plate by a spring, which can ensure the airtightness of the gas sampling channel and reduce the entry of external air into the sampling channel, thereby improving the measurement accuracy of the sampling device.
- variable cross-section and variable-length serpentine groove-shaped gas channel proposed in the present invention can be designed and processed in sections according to actual working conditions, and its cross-sectional area and length can be designed and processed, thereby changing the relationship between the channel flow guide and the moving position of the inner plate, so that It is suitable for practical applications with different pressure sections and different flow requirements, and can specifically improve the adjustment accuracy of a certain pressure section. Therefore, the gas sampling device proposed by the present invention has a wider application range and higher measurement accuracy.
- Fig. 1 is a structural principle diagram of a continuous variable pressure sampling device for a serpentine line mass spectrometer of the present invention
- Figure 2 is a schematic diagram of the structure of a continuous variable pressure sampling device for a serpentine line mass spectrometer
- Fig. 3 is a schematic diagram of the structure of the inner plate of the continuous variable pressure sampling device of the serpentine line mass spectrometer
- a bottom plate is fixedly installed at the lower end of the housing, the upper surface of the bottom plate is fixedly installed with uniformly distributed spring bearing grooves, and the upper end of the spring bearing grooves are rolling-mounted bearings.
- the pipeline between the housing and the mass spectrometry system is installed with a throttle valve and a vacuum pump in sequence. Install a vacuum gauge on the pipeline between the vacuum pump and the throttle valve.
- the present invention provides a serpentine line mass spectrometer continuous pressure sampling device, which includes a housing 6 and a mass spectrometry system 15.
- the housing 6 is the main installation and protection foundation of the device, and the mass spectrometry system 15
- the housing 6 is slidably installed with an inner plate 9 to provide a basis for the opening of the serpentine groove 10, and at the same time to realize the change of the relative position of the serpentine groove 10 and the ventilation groove 18 through movement
- the upper surface of the inner plate 9 is provided with a serpentine line groove 10, which arranges the original linear gas passage in a serpentine manner to reduce the occupied space.
- the serpentine line groove 10 is opened. 10 Gradually increase the cross-sectional area from the inlet end to the outlet end, and continuously change the cross-sectional area of the vent groove to achieve ventilation control.
- the upper surface of the inner plate 9 fits the surface of the inner upper wall of the outer shell 6 and matches the inner plate 9
- the upper surface constitutes a complete closed air path, and the upper wall surface of the shell 6 is provided with a vent groove 18, through the cooperation with the serpentine groove 10, the air inlet position of the serpentine groove 10 is changed, and the vent groove
- the longitudinal length of 18 is equal to the extension width of the serpentine groove 10, which ensures that the serpentine groove 10 is all contained in the ventilating groove 18 during the movement, thereby ensuring the air intake effect, and the ventilating groove 18 is provided with an air inlet.
- the air inlet penetrates through the upper wall of the housing 6 and then connects the air inlet pipe and the air inlet valve 8 in sequence.
- the air outlet end of the serpentine groove 10 is provided with an air outlet pipe 11 passing through the inner plate 9 to export the gas to the pipeline 12, and
- the lower end of the gas outlet pipe 11 is connected to one end of the pipeline 12, and the gas is introduced into the mass spectrometry system 15 through the pipeline 12.
- the other end of the pipeline 12 passes through the right wall of the housing 6 and then connects to the mass spectrometry system 15.
- a threaded hole 20 is opened in the middle of the inner plate 9 to cooperate with the screw 5. The rotation of the screw 5 makes the inner plate 9 move in the housing 6.
- the threaded hole 20 is equipped with a screw 5 to reduce the power
- the other end of the lead screw 5 penetrates the left shell wall of the outer shell 6 and is equipped with the output end of the reducer 2 to reduce the speed of the motor output to ensure the stability of the movement of the inner plate 9.
- the input end of 2 is equipped with the output end of the motor 1 to provide power for the operation of the device.
- the bottom end of the housing 6 is fixedly installed with the bottom plate 4 to close the housing 6 and at the same time provide the installation foundation for the upper structure.
- the top surface of the bottom plate 4 is fixedly installed with The evenly distributed spring bearing grooves 17 provide an installation basis for the rolling bearing 21, and at the same time, through the elastic characteristics, the rolling bearing 21 can better fit the upper surface of the inner plate 9.
- the upper end of the spring bearing groove 17 is installed with the rolling bearing 21, and the inner plate is lowered by rolling.
- the pipeline between the housing 6 and the mass spectrometer system 15 is installed with a throttle valve 13 and a vacuum pump 16 in sequence to control the gas flow rate of the device.
- a vacuum gauge 14 is installed in the pipeline to monitor the vacuum in the device.
- the pipeline is made of hard tubing to ensure that the pipeline will not be deformed when the vacuum occurs.
- the length of the threaded hole 20 opened in the middle of the inner plate 9 is slightly longer than the horizontal arrangement length of the serpentine groove 10, and the threaded surface length of the lead screw 5 is slightly longer than the length of the threaded hole 20 to ensure that the lead screw 5 can better drive
- the inner plate 9 moves while avoiding the lead screw 5 from separating from the inner plate 9.
- the upper end of the rolling bearing 21 is slightly higher than the lower surface of the inner plate 9 to ensure sufficient pressing force and sufficient air tightness.
- a closed groove 19 is opened outside the serpentine groove area on the upper surface of the inner plate 9, and a rubber sealing ring 7 is clamped in the closed groove 19 to increase the sealing performance.
- the lower end of the housing 6 and the outer edge of the bottom plate 4 are welded with a flange 3, the flange 3 of the housing 6 and the flange 3 of the bottom plate 4 are installed by bolts, and the contact surface of the flange 3 is attached with a sealing rubber layer , To achieve effective combined installation, while ensuring sufficient air tightness.
- a sampling method for a continuous variable pressure sampling device of a serpentine line mass spectrometer comprising the following steps:
- Step 1 Close the intake valve 8, open the shutoff valve 13, and open the vacuum pump 16 to vacuum.
- the gas pressure in the gas passage gradually drops to the maximum working pressure of the mass spectrometer, start the vacuum pump 16 in the mass spectrometer system 15 to speed up the vacuum Speed, vacuuming also cleans the gas path for analyzing gas components until the vacuum reaches the optimal working pressure of the mass spectrometer;
- Step 2 Start the motor 1, move the inner plate 9 to the position closest to the mass spectrometer, make the upper wall ventilation groove 18 of the housing 6 communicate with the smallest section of the inlet end of the serpentine groove 10, open the inlet valve 8, and Analysis gas enters the gas path;
- Step 3 According to the feedback control of the vacuum degree measured by the vacuum gauge 14, the inner plate 9 is gradually moved away from the mass spectrometer to make the gas passage of the serpentine groove 10 connected to the air groove 18 on the upper wall of the housing 6 The length gradually decreases, the gas flow rate gradually increases, and the gas flow rate and vacuum degree in the channel meet the requirements of the mass spectrometer;
- Step 4 When the pressure of the gas to be analyzed in the intake pipe changes, the motor 1 is feedback controlled according to the vacuum degree measured by the vacuum gauge 14.
- the sample gas pressure is high, the inner plate 9 is moved toward the mass spectrometer to increase the gas path. Reduce the pressure and return to the working pressure of the mass spectrometer; when the sample gas pressure is low, move the inner plate 9 away from the mass spectrometer to shorten the gas path, increase the pressure, and return to the working pressure of the mass spectrometer to always ensure collection in the channel
- the sampled gas has a stable pressure and flow rate to ensure that the vacuum degree matches the working vacuum degree of the mass spectrometer;
- This working process is a continuous process, and this equipment can continuously detect gas components online.
Abstract
一种蛇形线式质谱仪连续性变压取样装置，包括外壳（6）与质谱系统（15），外壳（6）内部滑动安装有上表面开设有蛇形线式槽（10）的内板（9），蛇形线式槽（10）由进气端向出气端逐渐增加截面面积，蛇形线式槽（10）的出气口经连接管路（12）穿透外壳（6）侧壁与质谱系统（15）连接，内板（9）下表面有弹簧与轴承支撑，使内板（9）上表面紧密贴合于开设有通气槽（18）的外壳（6）壳内上壁表面，通气槽（18）的进气口贯穿外壳（6）上壁与进气管路和进气阀（8）相连，驱动电机（1）通过丝杠机构带动内板（9）在外壳（6）内滑动。该装置结构紧凑，气密性好，具备对被分析气体连续在线取样能力；通过蛇形布局，以及内板（9）在外壳（6）内滑动，能改变蛇形线式槽（10）的气路长度和截面面积，从而具备对大范围变压气体的高精度取样分析的能力。
Description
本发明属于气体分析技术领域，尤其是涉及一种蛇形线式质谱仪连续性变压取样装置及方法。
质谱仪又称质谱计，是分析检测气体中不同成分的仪器，它是根据带电粒子在电磁场中能够偏转的原理，按物质原子、分子或分子碎片的质量差异进行分离和检测物质组成的一类仪器。质谱仪测量技术现已大量应用于药品、食品、医学、地质、钢铁生产、真空系统检漏、环境模拟、载人航天等工业领域和科学技术研究中，对于现代科技的发展和国民经济的建设都起着重要的作用。
质谱仪的分析室必须工作在特定的高真空状态下，而被分析气体的初始压强常常是接近环境大气压力的不确定值；特别是应用于各种真空设备内气体成分监测的质谱仪，被测气体的压强更是可能从常压一直变化到高真空状态。因此，质谱仪必须配置有气体取样装置，以便将处于不同压强的气体在保持成分构成不发生变化的前提下减压输送至高真空状态的分析室。现有的气体取样装置(如膨胀法取样)工作方式大多是间歇作业的，不能对气体样品进行在线连续取样；而能够连续取样的气体取样装置(如针阀节流取样)通常只适用于测量单一固定气压的工况，难以对压力大范围变化的工况进行连续取样。例如采用针阀作为一种微调阀，可以调节气流量，但是限于其自身结构，可调节压力范围有限，且可调节精度不够高。目前，随着科学研究和工业生产技术水平的持续进步，对气体分析技术的要求也不断提高，在气体压力大范围变化条件下实现气体成分的高精度在线连续监测，已成为迫切的实际需求，现有的质谱仪气体取样方法与装置，无法满足在气体压力变化的情况下实现高精度连续取样的要求，制约了气体分析质谱仪的发展和应用，迫切需要一种全新的气体取样装置及方法。
发明概述
问题的解决方案
针对现有技术存在的问题，本发明提供一种蛇形线式质谱仪连续性变压取样装置及方法。本发明可以在气体压力变化的情况下连续取样，填补了气体分析行业在这一方面的空白，且对于其他行业中在气体压力变化的情况下连续取样的工作同样适用，其技术方案如下：
一种蛇形线式质谱仪连续性变压取样装置，包括外壳与质谱系统，所述外壳内部滑动安装内板，其内板上表面开设有蛇形线式槽，开设的蛇形线式槽由进气端向出气端逐渐增加截面面积，所述内板上表面贴合外壳壳内上壁表面，所述外壳壳内上壁面开设有通气槽，且通气槽的纵向长度等于蛇形线式槽的延展宽度，同时通气槽开设有进气口，且进气口贯穿外壳上壁后依次连接进气管与进气阀，所述蛇形线式槽出气端开设有贯穿内板的出气管，而出气管下端连接管路的一端，所述管路的另一端穿过外壳右壳壁后连接质谱系统，所述内板中部开设有螺纹孔，螺纹孔中配装有丝杠，而丝杠另一端贯穿外壳远质谱系统侧壳壁后配装减速器的输出端，所述减速器的输入端配装电动机的输出端，所述外壳下端固定安装底板，底板上表面固定安装有均匀分布的弹簧轴承槽，弹簧轴承槽上端滚动安装轴承，所述外壳与质谱系统之间的管路依次安装节流阀门与真空泵，所述真空泵上与节流阀门之间的管路安装真空规。
所述内板中部开设的螺纹孔的长度略长于蛇形线式槽的排布长度，丝杠的螺纹表面长度略长于蛇形线式槽的排布长度，所述滚动轴承上端略高于内板下表面。
所述内板上表面蛇形线槽区域外开设有封闭槽，所述封闭槽内卡装橡胶密封圈。
所述外壳下端与底板外缘均焊接有法兰，所述外壳的法兰与底板的法兰通过螺栓进行安装，所述法兰接触面贴合有密封橡胶层。
一种蛇形线式质谱仪连续性变压取样装置的取样方法，包括如下步骤：
步骤1：关闭进气阀门，打开节流阀门，开启真空泵抽真空，气体通路内的气 体压力逐渐下降到质谱仪的最大工作压强时，启动质谱系统内真空泵，加快抽真空的速度，抽真空的同时也清洁了分析气体成分的气体通路，直至真空度达到质谱仪的最佳工作压强；
步骤2：启动电动机，将内板移动至最靠近质谱仪位置，使外壳上壁通气槽与蛇形线式槽的进气端最小截面处相通，打开进气阀门，被分析气体进入气体通路；
步骤3：根据真空规测量到的真空度反馈控制电动机，将内板逐渐向远离质谱仪方向移动，使与外壳上壁通气槽接通的蛇形线式槽的气体通路长度逐渐变小，气体流量逐渐增大，通道内气体流量和真空度满足质谱仪工作的要求；
步骤4：当进气管中被分析气体压力变化时，根据真空规测量到的真空度反馈控制电动机，当取样气体压力大时，往质谱仪的方向移动内板，以增长气体通路，减小压力，恢复至质谱仪工作压力；当取样气体压力小时，往远离质谱仪的方向移动内板，以减短气体通路，增大压力，恢复至质谱仪工作压力，始终保证通道内收集到的取样气体具有稳定的压力和流量，保证真空度符合质谱仪工作真空度；
此工作过程是连续性过程，此设备可以连续在线检测气体成分。
发明的有益效果
与现有技术相比，本发明的有益效果是：
1、本发明通过流导可变的气体采样通道与真空泵的配合工作，可以使被分析气体能够持续流入采样系统，及时更新，从而实现了气体在线连续取样功能，具备了对分析气体连续在线检测能力，而且响应时间快，灵敏度高，克服了气体间歇采样的不足。
2、本发明提出的变截面、变长度的气体采样通道结构，配合可移动内板，能够灵活地大范围调节气体采样通道的流导。当被分析气体的压力出现变化时，通过反馈调节内板的位置，能够使气体采样通道具有合适的流导，从而始终保证在采样通道出口处具有稳定的气体压力和流量，保证质谱仪处于良好的工作状态。本发明突破了传统在线采样方法只能适用于单一压力下的限制，能在气 体压力大范围变化情况下正常工作。
3、本发明将很长的气体管路变成蛇形线式曲线刻制在平板上的气体通路，大大减小了设备体积和占用空间；在内板蛇形线式槽周围设置全封闭密封圈，利用弹簧对内板施加作用力将其紧压在外壳内壁上表面，能够确保气体采样通道的气密性，减少外部气体进入采样通道，从而提高采样装置的测量精度。
4、本发明提出的变截面变长度蛇形线式槽形气体通道，可以根据实际工况需要分段设计加工其截面面积和长度，从而改变通道流导随内板移动位置的变化关系，使其适合于不同压力段和不同流量要求的实际应用场合，并能专门提高某一压力段的调节精度。因此，本发明提出的气体采样装置，适用范围更加广泛，测量精度更高。
对附图的简要说明
图1为本发明的一种蛇形线式质谱仪连续性变压取样装置的结构原理图；
图2为蛇形线式质谱仪连续性变压取样装置的结构示意图；
图3为蛇形线式质谱仪连续性变压取样装置内板的结构示意图；
图中：1、电动机，2、减速器，3、法兰，4、底板，5、丝杠，6、外壳，7、橡胶密封圈，8、进气阀，9、内板，10、蛇形曲线槽，11、出气管、12、管路、13、截流阀门，14、真空规，15、质谱系统，16、真空泵，17、弹簧轴承槽、18、通气槽，19、封闭槽，20、螺纹孔，21、滚动轴承。
发明实施例
需要说明，本发明实施例中所有方向性指示(诸如上、下、左、右、前、后......)仅用于解释在某一特定姿态(如附图所示)下各部件之间的相对位置关系、运动情况等，如果该特定姿态发生改变时，则该方向性指示也相应地随之改变。
所述外壳下端固定安装底板，底板上表面固定安装有均匀分布的弹簧轴承槽，弹簧轴承槽上端滚动安装轴承，所述外壳与质谱系统之间的管路依次安装节流阀门与真空泵，所述真空泵上与节流阀门之间的管路安装真空规。
如图1至图3示，本发明提供了一种蛇形线式质谱仪连续性变压取样装置，包括外壳6与质谱系统15，外壳6为装置的主体安装基础与保护基础，质谱系统15进行待检测气体的质谱检测，所述外壳6内部滑动安装内板9，为蛇形线式槽10的开设提供基础，同时通过移动实现蛇形线式槽10与通气槽18相对位置的变化，其内板9上表面开设有蛇形线式槽10，将原有的直线式气体通路进行蛇形弯曲排布，降低占用空间，同时通过与通气槽位置的变化，开设的蛇形线式槽10由进气端向出气端逐渐增加截面面积，通过连续性的改变通气槽截面面积，实现通气量的控制，所述内板9上表面贴合外壳6壳内上壁表面，配合内板9上表面构成完整封闭气路，所述外壳6壳内上壁面开设有通气槽18，通过与蛇形线式槽10的配合，实现对蛇形线式槽10进气位置的变化，且通气槽18的纵向长度等于蛇形线式槽10的延展宽度，保证了移动过程中蛇形线式槽10全部纳在通气槽18内，继而保证进气效果，同时通气槽18开设有进气口，且进气口贯穿外壳6上壁后依次连接进气管与进气阀8，所述蛇形线式槽10出气端开设有贯穿内板9的出气管11，将气体导出至管路12，而出气管11下端连接管路12的一端，通过管路12将气体导入质谱系统15，所述管路12的另一端穿过外壳6右壳壁后连接质谱系统15，通过质谱系统15对气体进行质谱检测，所述内板9中部开设有螺纹孔20，配合丝杠5，通过丝杠5的转动使得内板9在外壳6内进行移动，螺纹孔20中配装有丝杠5，将动力传送至装置内，而丝杠5另一端贯穿外壳6左壳壁后配装减速器2的输出端，将电机输出的转速进行降速，保证对内板9移动的稳定性，所述减速器2的输入端配装电动机1的输出端，为装置的工作提供动力，所述外壳6下端固定安装底板4，对外壳6进行封闭，同时为上部结构提供安装基础，底板4上表面固定安装有均匀分布的弹簧轴承槽17，为滚动轴承21提供安装基础，同时通过弹性特性，使得滚动轴承21能够更好的贴合内板9上表面，弹簧轴承槽17上端安装滚动轴承21，通过滚动，降低内板9移动过程中的摩擦力，所述外壳6与质谱系统15之间的管路依次安装节流阀门13与真空泵16，控制装置的气体流速，所述真空泵16上与节流阀门13之间的管路安装真空规14，对装置内的真空度进行监测，同时管路采用硬质管材，继而保证真空度出现时，管路不会发生变形。
所述内板9中部开设的螺纹孔20的长度略长于蛇形线式槽10的横向排布长度， 丝杠5的螺纹表面长度略长于螺纹孔20长度，保证丝杠5能够更好的带动内板9进行移动，同时避免丝杠5脱离内板9，所述滚动轴承21上端略高于内板9下表面，保证足够的压合力，保证足够的气密性。
所述内板9上表面蛇形线式槽区域外开设有封闭槽19，所述封闭槽19内卡装橡胶密封圈7，增加密封性。
所述外壳6下端与底板4外缘均焊接有法兰3，所述外壳6的法兰3与底板4的法兰3通过螺栓进行安装，所述法兰3接触面贴合有密封橡胶层，实现有效的组合安装，同时保证足够的气密性。
一种蛇形线式质谱仪连续性变压取样装置的取样方法，包括如下步骤：
步骤1：关闭进气阀8门，打开截流阀门13，开启真空泵16抽真空，气体通路内的气体压力逐渐下降到质谱仪的最大工作压强时，启动质谱系统15内真空泵16，加快抽真空的速度，抽真空的同时也清洁了分析气体成分的气体通路，直至真空度达到质谱仪的最佳工作压强；
步骤2：启动电动机1，将内板9移动至最靠近质谱仪位置，使外壳6上壁通气槽18与蛇形线式槽10的进气端最小截面处相通，打开进气阀门8，被分析气体进入气体通路；
步骤3：根据真空规14测量到的真空度反馈控制电动机1，将内板9逐渐向远离质谱仪方向移动，使与外壳6上壁通气槽18接通的蛇形线式槽10的气体通路长度逐渐变小，气体流量逐渐增大，通道内气体流量和真空度满足质谱仪工作的要求；
步骤4：当进气管中被分析气体压力变化时，根据真空规14测量到的真空度反馈控制电动机1，当取样气体压力大时，往质谱仪的方向移动内板9，以增长气体通路，减小压力，恢复至质谱仪工作压力；当取样气体压力小时，往远离质谱仪的方向移动内板9，以减短气体通路，增大压力，恢复至质谱仪工作压力，始终保证通道内收集到的取样气体具有稳定的压力和流量，保证真空度符合质谱仪工作真空度；
此工作过程是连续性过程，此设备可以连续在线检测气体成分。
以上实施例仅用以说明本发明的技术方案而非对其限制，尽管参照上述实施例 对本发明进行了详细说明，领域的普通技术人员应当理解：依然可以对本发明的具体实施方式进行修改或者等同替换，而未脱离本发明精神和范围的任何修改或者等同替换，其均应涵盖在本权利要求范围当中。
Claims (5)
- 一种蛇形线式质谱仪连续性变压取样装置，包括外壳与质谱系统，所述外壳内部滑动安装内板，其内板上表面开设有蛇形线式槽，开设的蛇形线式槽由进气端向出气端逐渐增加截面面积，所述内板上表面贴合外壳壳内上壁表面，所述外壳壳内上壁面开设有通气槽，且通气槽的纵向长度等于蛇形线式槽的延展宽度，同时通气槽开设有进气口，且进气口贯穿外壳上壁后依次连接进气管与进气阀，所述蛇形线式槽出气端开设有贯穿内板的出气管，而出气管下端连接管路的一端，所述管路的另一端穿过外壳右壳壁后连接质谱系统，所述内板中部开设有螺纹孔，螺纹孔中配装有丝杠，而丝杠另一端贯穿外壳左壳壁后配装减速器的输出端，所述减速器的输入端配装电动机的输出端，所述外壳下端固定安装底板，底板上表面固定安装有均匀分布的弹簧轴承槽，弹簧轴承槽上端滚动安装轴承，所述外壳与质谱系统之间的管路依次安装节流阀门与真空泵，所述真空泵上与节流阀门之间的管路安装真空规。
- 根据权利要求1所述的一种蛇形线式质谱仪连续性变压取样装置，其特征在于，所述内板中部开设的螺纹孔的长度略长于蛇形线式槽的横向排布长度，丝杠的螺纹表面长度略长于螺纹孔长度，所述滚动轴承上端略高于内板下表面。
- 根据权利要求1所述的一种蛇形线式质谱仪连续性变压取样装置，其特征在于，所述内板上表面蛇形线槽区域外开设有封闭槽，所述封闭槽内卡装橡胶密封圈。
- 根据权利要求1所述的一种蛇形线式质谱仪连续性变压取样装置，其特征在于，所述外壳下端与底板外缘均焊接有法兰，所述外壳的法兰与底板的法兰通过螺栓进行安装，所述法兰接触面贴合有密封橡胶层。
- 权利要求1所述的一种蛇形线式质谱仪连续性变压取样装置的取样 方法，包括如下步骤：步骤1：关闭进气阀门，打开节流阀门，开启真空泵抽真空，气体通路内的气体压力逐渐下降到质谱仪的最大工作压强时，启动质谱系统内真空泵，加快抽真空的速度，抽真空的同时也清洁了分析气体成分的气体通路，直至真空度达到质谱仪的最佳工作压强；步骤2：启动电动机，将内板移动至最靠近质谱仪位置，使外壳上壁通气槽与蛇形线式槽的进气端最小截面处相通，打开进气阀门，被分析气体进入气体通路；步骤3：根据真空规测量到的真空度反馈控制电动机，将内板逐渐向远离质谱仪方向移动，使与外壳上壁通气槽接通的蛇形线式槽的气体通路长度逐渐变小，气体流量逐渐增大，通道内气体流量和真空度满足质谱仪工作的要求；步骤4：当进气管中被分析气体压力变化时，根据真空规测量到的真空度反馈控制电动机，当取样气体压力大时，往质谱仪的方向移动内板，以增长气体通路，减小压力，恢复至质谱仪工作压力；当取样气体压力小时，往远离质谱仪的方向移动内板，以减短气体通路，增大压力，恢复至质谱仪工作压力，始终保证通道内收集到的取样气体具有稳定的压力和流量，保证真空度符合质谱仪工作真空度；此工作过程是连续性过程，此设备可以连续在线检测气体成分。
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