WO2020222310A1 - Dispositif de coulissement - Google Patents

Dispositif de coulissement Download PDF

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Publication number
WO2020222310A1
WO2020222310A1 PCT/JP2020/018359 JP2020018359W WO2020222310A1 WO 2020222310 A1 WO2020222310 A1 WO 2020222310A1 JP 2020018359 W JP2020018359 W JP 2020018359W WO 2020222310 A1 WO2020222310 A1 WO 2020222310A1
Authority
WO
WIPO (PCT)
Prior art keywords
sliding
filler
embossed
embossed body
working surface
Prior art date
Application number
PCT/JP2020/018359
Other languages
English (en)
Japanese (ja)
Inventor
崇之 齋藤
正弘 西本
郁夫 光島
雅樹 金子
Original Assignee
デクセリアルズ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by デクセリアルズ株式会社 filed Critical デクセリアルズ株式会社
Priority to US17/606,897 priority Critical patent/US20220250110A1/en
Priority to CN202080032353.3A priority patent/CN113727784A/zh
Priority to KR1020217035431A priority patent/KR102646472B1/ko
Priority claimed from JP2020080837A external-priority patent/JP2020182940A/ja
Publication of WO2020222310A1 publication Critical patent/WO2020222310A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C19/00—Apparatus specially adapted for applying particulate materials to surfaces
    • B05C19/04—Apparatus specially adapted for applying particulate materials to surfaces the particulate material being projected, poured or allowed to flow onto the surface of the work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work

Definitions

  • the present invention relates to a sliding device that supplies or eliminates a sliding processed object to the surface of a sliding object.
  • an electrode for a biosensor is produced by supplying a paste for an electrode to a recess having a predetermined pattern formed on a film substrate and removing the excess paste with a wiping device (Patent Document 1).
  • blades are used to supply the paste to the recesses and to wipe off excess paste, respectively.
  • a blade or a squeegee is used when supplying a filler to a recess or a hole on the surface of a base material and removing an excess filler from the surface of the base material.
  • the present invention uses an embossed body or the like having a predetermined concave pattern formed on the surface as a sliding object, and a filler in the concave portion on the surface of the sliding object.
  • a sliding processed material such as, etc.
  • the sliding processed material is uniformly supplied to the entire recess of the region where the sliding processed material is supplied to the sliding object (hereinafter referred to as the sliding target region).
  • the excess sliding object can be excluded from the sliding object, and the extra sliding object that is finally excluded from the sliding object among the sliding processed objects supplied to the sliding object.
  • the sliding object When the amount of the moving object is reduced, the sliding object is prevented from being damaged or deformed due to excessive collision or rubbing against each other, and the surface of the sliding object is flat.
  • supplying the sliding object to the surface of the sliding object means that when the sliding object is an embossed body and the sliding object is a granular material, the sliding object is placed in a recess on the surface of the embossed body. Including adding granules as in. Further, when the sliding processed material is a liquid material, it also includes forming a coating film of the liquid material on the surface of the sliding object with a uniform thickness. Further, in the present invention, eliminating the sliding processed object from the surface of the sliding object means supplying a liquid substance as the sliding object when granular substances are attached to the sliding object. Includes eliminating granules.
  • the present inventor uses a sliding portion provided with a plurality of sliding bodies having a flat working surface with respect to the sliding object while the squeegee makes line contact with the sliding object, and the sliding body is first.
  • the sliding portion is moved in the second direction while moving in the direction, the relative movement amount of the sliding processed object with respect to the sliding object during the sliding process increases, and the sliding processed object slides. It was conceived that it is uniformly supplied to the moving object, that excess sliding object is excluded from the sliding object, and that the surface of the sliding object can be cleaned when the sliding object is not supplied. And completed the present invention.
  • the sliding portion provided with a plurality of sliding bodies having a flat working surface and the sliding body are regularly moved with respect to the sliding object in parallel with the working surface
  • It has a drive mechanism that moves the sliding portion parallel to the working surface of the sliding body and regularly moves with respect to the sliding object in a direction different from the moving direction of the sliding body.
  • a sliding device that performs a sliding process on the surface of a sliding object by using the sliding body of the sliding portion.
  • the sliding body is moved in the first direction with respect to the sliding object, and the sliding portion provided with the sliding body is moved in the second direction.
  • the amount of movement per unit time with respect to the sliding object at any point in the working surface of the sliding body is increased as compared with the case where the sliding body is moved in only one direction, and the sliding body moves on the sliding object.
  • the amount of moving sliding processed material also increases.
  • the sliding body does not make line contact with the sliding object like a squeegee, but uses a flat surface as an action surface for the sliding object. Therefore, when a sliding processed object is supplied to this sliding device, it slides.
  • the processed object not only moves on the sliding object by being pushed by the side surface of the sliding body, but also moves by being captured by the working surface which is the bottom surface of the sliding body. Therefore, according to the sliding device of the present invention, the amount of the sliding processed object itself and the amount of movement of the sliding processed object that is moved by the sliding body on the sliding object are increased. Therefore, the sliding object can be uniformly supplied to the sliding object area, the excess sliding object can be excluded from the sliding object area, and the sliding object can be treated with the sliding object. The required supply amount of the sliding processed material can be reduced.
  • the filler when the embossed body is used as a sliding object and the filler is used as a sliding object, the filler can be uniformly put into the recesses on the surface of the embossed body, which is unnecessary in the portions other than the recesses.
  • the adhering filler can be eliminated, and the amount of the filler charged into the embossed body, which is required to uniformly put the filler in the recesses of the embossed body, can be reduced.
  • FIG. 4A It is explanatory drawing of the filler supply action by a sliding body when an embossed body is a sliding object and a filler is a sliding processed object. It is explanatory drawing of the removal action of the excess filler by a sliding body when an embossed body is a sliding object and a filler is a sliding processed object.
  • FIG. 1 is a schematic side view of a sliding device 1 according to an embodiment of the present invention.
  • the sliding device 1 has a sliding portion 4, and the sliding portion 4 has an embossed body W having a recess on its surface as a sliding object and a filler F as a sliding processed object. It is preferable that the sliding portions 4 are arranged side by side in the transport direction (arrow Z) of the embossed body W as needed.
  • the sliding portion 4 is provided with a plurality of sliding bodies 6 having a flat working surface 6A, and their positional relationship is adjusted so that the working surface 6A and the surface of the embossed body W are in contact with each other.
  • the sliding device 1 parallels the sliding body 6 to the working surface 6A as a drive mechanism for moving the sliding portion 4 in a second direction different from the first direction while moving the sliding body 6 in the first direction. While the sliding body 6 is being moved by the first driving mechanism 20 and the first driving mechanism 20, the entire sliding portion 4 including the plurality of sliding bodies 6 is parallel to the working surface 6A. It has a second drive mechanism 30 that moves regularly.
  • the drive source of the first drive mechanism and the drive source of the second drive mechanism may be common or separate. Further, in the sliding device of the present invention, an integrated drive mechanism may be provided as a drive mechanism for moving the sliding body and the sliding portion as described above.
  • the sliding device 1 has a processed material charging means for charging the filler F to a predetermined portion of the surface W2 of the embossed body W, and if necessary, the filler F charged into the embossed body W is charged by the sliding portion 4. It is possible to have a squeegee in which the filler F is spread to some extent on the embossed body W before spreading.
  • the filler F is uniformly supplied to the embossed body W by the sliding body 6 driven by the first drive mechanism 20 and the second drive mechanism 30, and the filler enters the recess of the embossed body W, resulting in excess.
  • the filler F is removed from the surface of the embossed body W except for the recesses.
  • the supplied filler F enters the recess W3 of the embossed body at a high rate, and the filler F to be eliminated is not generated or becomes small.
  • the present invention is useful not only as a device for filling the recesses of the embossed body with a filler, but also as a device for removing excess filler existing in a place other than the recesses, and recovers and re-collects the removed filler. It can also be used when using it.
  • the sliding object W can be various plates, films, three-dimensional objects, etc. having a surface parallel to the working surface 6A of the sliding body 6, and the sliding device 1 is a type of the sliding object.
  • a support mechanism and a transport mechanism for the sliding object W can be appropriately provided depending on the form and the like.
  • the sliding object is a plate, a film, or the like
  • a pedestal for supporting the plate a drive device as a transport mechanism, a take-up device, or the like can be provided.
  • a plate-shaped embossed body is used as the sliding object W.
  • the embossed body W has a plurality of recesses W3 on the surface W2 of the long embossed body W1.
  • the embossed body W may have surface irregularities formed so that the filler F is held at a predetermined position.
  • the embossed body W When the embossed body W has a plate shape, its length (length in the transport direction) may be, for example, less than 1 m, 1 m or more, or 5 m or more. When the embossed body W is in the form of a film, the length may be 5 m or more, or 100 m or more. From the viewpoint of handling, the upper limit of the length can be usually 5000 m or less, 1000 m or less, or 300 m or less when the embossed body is a scroll (wound around a core).
  • the thickness of the embossed body W is determined by transporting the embossed body W to the sliding portion 4 by the transporting means 3 and bringing the embossed body W and the sliding body 6 into contact with each other, or by maintaining the distance between them at a predetermined size. There are no particular restrictions as long as the dynamic processing can be performed without any trouble.
  • the material of the embossed body W is not limited to resin.
  • the surface of glass or metal may be processed, or it may have a laminated structure of a plurality of kinds of materials selected from various resins, glass or metal.
  • the individual layers constituting the embossed body W or the entire embossed body may be rigid, flexible or elastic, and may exhibit adhesiveness at room temperature (25 ° C. ⁇ 15 ° C.). Therefore, the resin materials that form the embossed body are, for example, organic materials for chemical equipment materials in the Chemical Handbook (first edition, application edition), physics and chemistry handbook (fourth edition), engineering plastic technology association (http://enpla.jp/).
  • thermoplastic resins and thermosetting resins according to desired physical properties can be appropriately selected.
  • metal material various general-purpose materials can be used as well.
  • the embossed body W can be a sliding object regardless of whether it is a single-layer body or a laminated body, even if it has flexibility and adhesiveness.
  • the embossed body W has a laminated structure of a plurality of types of layers, even if an adhesive layer or a similar resin layer is interposed between a layer having surface irregularities such as recesses W3 and a layer underlying the embossed body W.
  • the layer having surface irregularities may be a rigid layer, an elastic body or a plastic body, and when the temperature at the time of sliding treatment is room temperature, it is possible to retain the surface irregularities at room temperature. It may be a highly viscous viscous body or a viscoelastic body.
  • the adhesive layer or a similar layer located below the layer having surface irregularities may have a viscosity equal to or higher than that of the layer having surface irregularities, or may have a lower viscosity than the layer having surface irregularities, and may be liquid or It can also be a viscous body close to that. Accordingly, the viscosity of the layers that underlie a layer having surface irregularities is in the range of 0.1Pa ⁇ s ⁇ 10 4 Pa ⁇ s at room temperature as an example. This value is measured by a known vibration viscometer, rotational viscometer, and viscoelasticity measuring device (for example, a rheometer manufactured by TA Instruments). In the present invention, even if the embossed body W is a laminated body of layers having various materials and physical properties as described above, the filler is housed in the recess without applying an excessive load that causes deformation or damage to the filler. Can be done.
  • the processing method for forming surface irregularities such as recesses W3 on the surface of the embossed W is not particularly limited as long as the dimensions can be controlled in ⁇ m units.
  • methods such as cutting, punching, etching, laminating of porous layers, and printing can be used.
  • the unevenness provided in advance on the master may be transferred to the layer forming the surface of the embossed body W.
  • the surface of the embossed body W is metal, surface irregularities can be formed by cutting.
  • the surface unevenness of the embossed body W is formed of resin, the surface unevenness may be formed by various printing methods, or layers having surface unevenness or holes may be laminated.
  • the opening shape of the recess W3 and the shape of the spherical object may or may not match. It is preferable that the opening shape of the recess W3 and the shape of the spherical object have similarities or similarities. For example, when the opening shape of the recess W3 is a rectangle consisting of sides having a ratio of 1: 1.2, if the maximum diameter of the spherical object is the same as 1, which is the short side of the recess W3, it is accommodated with an appropriate margin. Will be done. Further, when the material of the embossed body W1 is resin or the like and deformation is allowed, the opening shape of the recess W3 matches the spherical object, and even if the size is the same, it can be accommodated.
  • the opening diameter of the recess W3 may be made larger than the particle size of one filler F, and a plurality of fillers may be accommodated in one recess W3.
  • the filler F is made to enter the recess W3 together with the minute filler on the surface.
  • the above relationship applies to the size of the filler F to which the minute filler is attached and the opening diameter.
  • the arrangement pattern of the recesses W3 of the embossed body W is not particularly limited.
  • it can be a regular array with a predetermined repeating pattern. More specifically, for example, as shown in FIG. 4A, a hexagonal grid can be used.
  • a lattice arrangement such as a square lattice, a rectangular lattice, or an orthorhombic lattice may be used.
  • a plurality of lattices having different shapes may be combined.
  • a row of fillers in which fillers are linearly arranged at predetermined intervals may be arranged in parallel at predetermined intervals.
  • the repeating pattern may exist continuously, or the regions in which the repeating pattern is formed may be repeated at intervals. When there is a certain repeating pattern, it is preferable for the convenience of product management that there is a marking or a slight change (for example, the shape of the opening is different to the extent that it does not affect the filling of the filler). There is also.
  • the sliding object is not limited to the one having the above-mentioned surface irregularities, but may have a fine surface, a flat surface, a easily scratched surface, or the like.
  • the sliding processed material used in the present invention is appropriately selected from powders, fillers such as granules, liquids such as solvents, and the like, depending on the application of the sliding object to which the sliding processed material is supplied.
  • a liquid By using a liquid as a sliding object, the surface of the sliding object can be cleaned.
  • the filler When the filler is used as a sliding product, the filler may be mixed with a liquid, but it is preferably not in the form of a paste.
  • the filler F is used as the sliding processed product.
  • the filler may contain one or more kinds of powders and granules.
  • the individual powders and granules may be independent or aggregated aggregates.
  • the filler F may be one in which a smaller filler is attached to the surface thereof, or the surface thereof may be coated with a smaller filler.
  • the agglomerate may be crushed by the sliding body 6, and may be supplied as the agglomerate as long as the recess W3 has a size capable of accommodating the agglomerate.
  • the material for forming the filler F can be appropriately selected depending on the use of the embossed body W that supplies the filler F or the article produced from the embossed body W that supplies the filler F.
  • an inorganic filler metal, metal
  • It can be an oxide, a metal nitride, etc.), an organic filler (resin, rubber, etc.), or a composite filler composed of an organic-inorganic composite material composed of an organic material and an inorganic material.
  • the organic material and the inorganic material may be mixed, the surface of the organic material may be coated with the inorganic material, or the surface of the inorganic material may be coated with the organic material.
  • the organic material and the inorganic material may exist in a complex manner. Further, if necessary, two or more kinds of fillers can be used in combination as the filler F.
  • the surface of the filler F may or may not be smooth. For example, minute ridges may be formed.
  • the filler F when the embossed body W is used as an optical film or a matte film, silica filler, titanium oxide filler, styrene filler, acrylic filler, melamine filler, various titanium salts and the like are used as the filler F. be able to.
  • the filler F may be a material similar to the pigment in order to give the embossed body a light-shielding property and a color.
  • titanium oxide, magnesium titanate, zinc titanate, bismuth titanate, lanthanum oxide, calcium titanate, strontium titanate, barium titanate, lead zirconate titanate are used as filler F.
  • Barium, lead zirconate titanate, and mixtures thereof can be used.
  • the filler F can act as a spacer.
  • the support base 2 has a flat upper surface on which the embossed body W is placed, and the surface of the embossed body W being conveyed is brought into contact with the working surface 6A of the sliding body 6 or a predetermined gap is formed. To face each other.
  • the material of the squeegee for example, rubber, engineering plastic, metal, fiber, etc. can be used, and in the case of a non-metal material, the hardness can be shore A5 to 100. Further, the length of the squeegee in the transport direction of the embossed body can be 1 to 50 mm, the roughness of the tip surface of the squeegee can be Ra0.05 to 100, and the pressing force applied to the squeegee can be 0.001 to 1 kgf / cm. ..
  • the sliding processed object is not spread at the portion where the moving direction is sharply bent, and the filler F is ejected from the sliding target region and is wasted.
  • the transfer means 3 further increases the amount of movement of the above-mentioned point P with respect to the sliding object W. Therefore, the ductility of the sliding processed object F in the sliding object W is further improved.
  • the amount of movement of this point P is too small, the sliding processed object F cannot be sufficiently spread on the sliding object W.
  • a sliding object W and a sliding processed object F are appropriately selected and set in the sliding device according to the intended use. Further, the drive speeds of the first drive mechanism 20 and the second drive mechanism 30 are adjusted. Further, when the sliding object W is conveyed by the conveying means 3 during the sliding process using the sliding device 1, the conveying speed thereof is also adjusted.
  • the filler F is a sliding object, and the filler F is uniformly put into the recesses W3 of the embossed body regularly arranged on the surface of the embossed body W.
  • the embossed body W is placed on the support base 2, the support base 2 is set on the transport means 3, and the transport means 3, the first drive mechanism 20 and the second drive mechanism 30 of the sliding portion 4 are placed.
  • the embossed body W is a film, it is preferable to use a winding mechanism or the like as described above.
  • the present invention by using the first drive device and the second drive device, it is possible to increase the amount of movement of any point P in the working surface 6A of the sliding body 6 per unit time.
  • the filler F on the embossed body W can be slid by the sliding body 6. It is uniformly supplied onto the embossed body W, and the efficiency of entering the recess W3 of the embossed body is also improved.
  • the ratio (filling rate) of the number of fillers F filled in the recesses W3 to the number of recesses W3 of the embossed body W is preferably 90% or more, more preferably 95% or more. More preferably, it can be 97% or more, particularly 99.5% or more.
  • the filling rate can be obtained by the same method as the residual rate as described later. As described above, the present invention is not necessarily limited to approximating the filling rate to 100%.
  • the number of fillers remaining on the embossed body W without entering the recess W3 and the recess W3 in the unit area can be preferably 2% or less, more preferably 1% or less, still more preferably 0.5% or less.
  • the layer provided on the surface of the embossed body after supplying the filler, or the material to be moved when the filler supplied to the surface of the embossed body is moved to another material may include a material other than resin.
  • the material other than the resin can be appropriately selected from various materials in the same manner as the material of each layer when the embossed body has a laminated structure.
  • a sliding process of spraying a solvent as a sliding object may be performed to remove excess filler existing in the recesses of the embossed body. According to the present invention, such a sliding process can be performed so that the arrangement state of the filler is maintained.
  • the above-mentioned treatment after supplying the filler to the embossed body can be performed regardless of the processing method and the surface material of the surface unevenness of the embossed body W. Therefore, it can be applied when the surface unevenness of the embossed body is formed by laminating either a layer having surface unevenness or a layer having holes. Further, it can be applied when the layer having surface irregularities or the layer having holes is made of various materials as in the case of the material of each layer when the embossed body has a laminated structure. For example, when the surface of the embossed body W is formed of a metal layer having holes, the filler that has entered the holes is moved to another material in order to protect the arrangement state of the filler that has entered the holes. Therefore, the above-mentioned processing can be performed.
  • the present invention can be provided with various peripheral devices as long as the sliding device of the present invention is provided.
  • a conveyor-type transport mechanism or fixing mechanism that continuously sends them to the sliding device, and a plate-shaped embossed body after the sliding process are placed in a predetermined place.
  • a recovery device for collecting can be provided, and when the sliding object W is a film-shaped embossed body, a mechanism for sending the rolled film-shaped embossed body to the sliding device or a film-shaped embossed body after the sliding process is provided. It can be provided with a winding mechanism for winding.
  • a mechanism for providing the above-mentioned resin layer or resin film, which protects the arrangement state of the filler, can be provided on the surface of the embossed body to which the filler is supplied.
  • the present invention also includes a device in which an inspection mechanism (camera or sensing device) for confirming the filled state, residual state, or presence state of the spread filler in the sliding device is incorporated.
  • Example 1 Device Configuration As the sliding device 1, a device having two sliding portions 4 and arranging them side by side in the transport direction (arrow Z) of the thin film embossed body W was produced.
  • the working surface 6A and the surface material 6B of each sliding body 6 were formed from a bottomed tubular molded body (thickness 20 mm) of polytetrafluoroethylene, and a sponge was put therein as an elastic material 6C.
  • the outer shape of the sliding body 6 is cylindrical, and the diameter of the working surface 6A is 80 mm.
  • Five sliding bodies 6 are provided in one sliding portion 4 (the closest contact distance between the sliding bodies 6 is 14 mm, and these are arranged radially around the central axis of the sliding portions 4 and are respectively arranged by the first drive mechanism 20.
  • the sliding body 6 was rotated around the central axis, and the sliding portion 4 was rotated around the central axis of the sliding portion 4 by the second drive mechanism 30.
  • the central shaft and the sliding portion of each sliding portion 6 The distance between the central axes of 4 is 80 mm, the width of the sliding target area is the width of one sliding portion 4, and the central axes of the two sliding portions 4 arranged in the transport direction of the sliding object W. The distance between them was 300 mm.
  • the filling rate is 1 mm ⁇ in the central region of the sliding target region of the embossed body W (60% of the central portion in the width direction of the sliding target region) after the embossed body W has been slid for 100 m or more in the transport direction.
  • Ten arbitrary regions of 1 mm were extracted, and the number of particles contained in the recess W3 in each region was measured and calculated. Further, the residual ratio was calculated by measuring the number of particles remaining on the embossed body W without entering the recess W3 in the same region.
  • the sliding processing start point of the embossed body, the point 1.5 m downstream from the start point, the point 10 m downstream from the start point, and thereafter.
  • the filling rate and the residual rate were measured at points from the start point to 100 m (12 points in total) every 10 m on the downstream side, the filling rate was 97% or more and the residual rate was 2% or less. It was confirmed.
  • the number of fillers F supplied per unit area of the sliding target region of the embossed body W is set to be 1.4 times or more and 1.5 times or less the number of recesses W3 of the embossed body W in the unit area.
  • the excess ratio of the filler in each sliding test was measured.
  • the surplus rate is the ratio of the number of fillers F supplied per unit area of the sliding target area of the embossed body W to the number of recesses W3 per unit area as the supply rate Ns (%).
  • the filling rate (%) (100 ⁇ N1 / N0)
  • the surplus rate supply rate- It is a numerical value calculated by the filling rate.
  • the relationship between the contact length of the sliding body and the excess ratio of the filler is shown in FIG. 8B.
  • the relationship between the rotational speed of the sliding body in the first drive mechanism 20 and the contact length of the sliding body is shown in FIG. 9 for each line speed.
  • the length of contact of the sliding body is approximately 1500 mm to 3200 mm (gray filled area). Therefore, in order to bring the filling rate close to 100% and reduce the surplus rate, it is preferable to set the line speed within a predetermined range according to the rotation speed of the sliding body.
  • the squeegee (forming material: urethane, length (length in the direction perpendicular to the transport direction of the sliding object W) 120 mm, thickness 10 mm) was installed so that the lower side of the squeegee was in contact with the sliding object W (installation angle 70 °), the line speed was 2 m / min, the pressing was 0.1 MPa, and the filling rate of the filler was the same as in Example 1.
  • the surplus rate was measured.
  • the supply amount of the filler was gradually increased, the filling rate and the surplus rate were measured for each supply amount, and the supply amount at which the filling rate was 97% or more was determined.
  • This supply amount was about 4 times the supply amount of the same line speed (2 m / min) embodiment of Example 1, and the surplus rate was about 12 times.

Abstract

La présente invention concerne un dispositif de coulissement (1), qui effectue un procédé de coulissement sur la surface d'un objet W à faire coulisser, présente : une partie coulissante (4) qui est disposée avec un corps coulissant (6) ayant une surface de travail (6A) plate ; un premier mécanisme d'entraînement (20) qui déplace de manière régulière le corps coulissant (6) en parallèle de la surface de travail (6A) ; et un second mécanisme d'entraînement (30) qui déplace de manière régulière la partie coulissante (4) en parallèle de la surface de travail (6A) et dans un sens différent du mouvement par le premier mécanisme d'entraînement (20) tandis que le premier mécanisme d'entraînement (20) déplace le corps coulissant (6). En conséquence, un objet coulissant est uniformément alimenté à la surface de l'objet à faire coulisser, ou la surface de l'objet à faire coulisser est nettoyée.
PCT/JP2020/018359 2019-04-30 2020-04-30 Dispositif de coulissement WO2020222310A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US17/606,897 US20220250110A1 (en) 2019-04-30 2020-04-30 Sliding device
CN202080032353.3A CN113727784A (zh) 2019-04-30 2020-04-30 滑动装置
KR1020217035431A KR102646472B1 (ko) 2019-04-30 2020-04-30 슬라이딩 장치

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2019087139 2019-04-30
JP2019-087139 2019-04-30
JP2020080837A JP2020182940A (ja) 2019-04-30 2020-04-30 摺動装置
JP2020-080837 2020-04-30

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WO2020222310A1 true WO2020222310A1 (fr) 2020-11-05

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000296368A (ja) * 1999-04-13 2000-10-24 Seiko Epson Corp 洗浄装置
JP2002066467A (ja) * 2000-08-29 2002-03-05 Tokyo Electron Ltd 基板洗浄装置及び基板洗浄方法
JP2002134388A (ja) * 2000-10-23 2002-05-10 Matsushita Electric Ind Co Ltd レジスト吐出口洗浄方法および装置、並びにレジスト塗布方法および装置
JP2005052741A (ja) * 2003-08-04 2005-03-03 Seiko Epson Corp 塗布方法、塗布装置
JP2016111345A (ja) * 2014-12-01 2016-06-20 東京エレクトロン株式会社 現像処理方法、コンピュータ記憶媒体及び現像処理装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000296368A (ja) * 1999-04-13 2000-10-24 Seiko Epson Corp 洗浄装置
JP2002066467A (ja) * 2000-08-29 2002-03-05 Tokyo Electron Ltd 基板洗浄装置及び基板洗浄方法
JP2002134388A (ja) * 2000-10-23 2002-05-10 Matsushita Electric Ind Co Ltd レジスト吐出口洗浄方法および装置、並びにレジスト塗布方法および装置
JP2005052741A (ja) * 2003-08-04 2005-03-03 Seiko Epson Corp 塗布方法、塗布装置
JP2016111345A (ja) * 2014-12-01 2016-06-20 東京エレクトロン株式会社 現像処理方法、コンピュータ記憶媒体及び現像処理装置

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