WO2020209374A1 - 光学系 - Google Patents

光学系 Download PDF

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Publication number
WO2020209374A1
WO2020209374A1 PCT/JP2020/016169 JP2020016169W WO2020209374A1 WO 2020209374 A1 WO2020209374 A1 WO 2020209374A1 JP 2020016169 W JP2020016169 W JP 2020016169W WO 2020209374 A1 WO2020209374 A1 WO 2020209374A1
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WO
WIPO (PCT)
Prior art keywords
optical system
prism
laser
incident
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2020/016169
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English (en)
French (fr)
Japanese (ja)
Inventor
聡 葛原
恒夫 内田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Intellectual Property Management Co Ltd
Original Assignee
Panasonic Intellectual Property Management Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Intellectual Property Management Co Ltd filed Critical Panasonic Intellectual Property Management Co Ltd
Priority to JP2021513723A priority Critical patent/JP7493156B2/ja
Priority to EP20787636.8A priority patent/EP3955043A4/en
Priority to CN202080007633.9A priority patent/CN113260893B/zh
Publication of WO2020209374A1 publication Critical patent/WO2020209374A1/ja
Priority to US17/404,468 priority patent/US12352940B2/en
Anticipated expiration legal-status Critical
Priority to JP2024075698A priority patent/JP7738281B2/ja
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0856—Catadioptric systems comprising a refractive element with a reflective surface, the reflection taking place inside the element, e.g. Mangin mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/02—Catoptric systems, e.g. image erecting and reversing system
    • G02B17/04—Catoptric systems, e.g. image erecting and reversing system using prisms only
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/08—Anamorphotic objectives
    • G02B13/10—Anamorphotic objectives involving prisms
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/004—Systems comprising a plurality of reflections between two or more surfaces, e.g. cells, resonators
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0864—Catadioptric systems having non-imaging properties
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0911—Anamorphotic systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/04—Prisms
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners

Definitions

  • the present disclosure relates to an optical system using a prism.
  • Patent Document 1 discloses an optical system having a scanning device that scans in two directions, respectively. This optical system is described as transmitting a scanned laser using a mirror. When a laser is transmitted using a mirror, it is difficult to reduce the size of the optical system because there is a layer of air between the mirrors.
  • the laser light may disappear if there are scratches or dust inside the prism at the imaging point of the light incident on the prism. There is.
  • the present disclosure provides an optical system that can be miniaturized in size and that is less affected by scratches in the prism.
  • the optical system of the present disclosure includes a prism having an incident surface, an exit surface, and one or more reflecting surfaces, and has a first intermediate imaging position of a light flux in the first direction inside the prism.
  • the intermediate imaging position is different from the second intermediate imaging position of the light flux in the second direction orthogonal to the first direction.
  • the optical system of the present disclosure includes a prism having an incident surface, an exit surface, and one or more reflecting surfaces, and has a first intermediate imaging position of a light flux in a first direction inside the prism.
  • the luminous flux in the second direction orthogonal to the direction does not perform intermediate imaging.
  • the size of the prism in the present disclosure can be reduced, and the influence of scratches in the prism can be reduced.
  • Sectional drawing which shows the structure of the optical system in Embodiment 1.
  • the figure which shows the pupil diameter of a laser beam at an intermediate imaging position (Px) The figure which shows the pupil diameter of a laser beam at an intermediate imaging position (Py)
  • the figure which shows the pupil diameter of the laser beam emitted from a prism The figure which shows the intermediate imaging position of the X component of a laser beam
  • Sectional drawing which shows the structure of the optical system in Embodiment 2.
  • Sectional drawing which shows the structure of the optical system in the modification of Embodiment 2.
  • Sectional drawing which shows the structure of the optical system in the modification of Embodiment 2.
  • FIG. 1 is a cross-sectional view showing the configuration of the optical system 1 according to the present disclosure.
  • the optical system 1 includes a laser element 11, a first scanning element 13, a prism 15, and a second scanning element 17.
  • the laser element 11 is, for example, a semiconductor laser.
  • the laser emitted from the laser element 11 is parallel light having different pupil diameters in the X direction and the Y direction.
  • the pupil diameter 11a of the laser beam R immediately after irradiation from the laser element 11 has an elliptical shape extending in the X direction.
  • the laser beam R emitted from the laser element 11 is scanned in the X direction by the first scanning element 13 and incident on the incident surface 15a of the prism 15.
  • the first scanning element 13 scans the incident laser light in the X direction as the first direction.
  • the first scanning element 13 is, for example, a mirror that is rotationally driven with the Y direction as the rotation axis by piezoelectric drive.
  • the first scanning element is, for example, a vertical scanner. As a result, parallel light is diffused in the X direction.
  • the prism 15 has an incident surface 15a and an exit surface 15d.
  • the prism 15 further has one or more reflecting surfaces between the optical paths from the incident surface 15a to the exit surface 15d.
  • the first reflecting surface 15b and the second reflecting surface 15c And have.
  • the entrance surface 15a and the exit surface 15d have, for example, a flat plate shape.
  • the prism 15 is made of, for example, resin or glass.
  • the incident surface 15a faces the first scanning element 13, and the laser beam R scanned in the X direction by the first scanning element 13 is incident on the prism 15 through the incident surface 15a.
  • the incident surface 15a and the first reflecting surface 15b face each other, and the laser beam incident from the incident surface 15a is reflected in the prism 15 by the first reflecting surface 15b.
  • the laser beam reflected by the first reflecting surface 15b is reflected again in the prism 15 by the second reflecting surface 15c arranged to face the emitting surface 15d.
  • the laser light reflected by the second reflecting surface 15c travels to the emitting surface 15d and is emitted from the emitting surface 15d to the outside of the prism 15.
  • the first reflecting surface 15b and the second reflecting surface 15c have different curvatures in the X direction as the first direction and the Y direction as the second direction, respectively. Therefore, the first reflecting surface 15b and the second reflecting surface 15c have a free curved surface shape.
  • first reflecting surface 15b and the second reflecting surface 15c are eccentric with respect to the incident light, respectively. This makes it possible to separate the optical path of the incident light without using an optical element such as a beam splitter. Further, the first reflecting surface 15b and the second reflecting surface 15c each have a concave shape with respect to the incident light.
  • the second scanning element 17 scans the laser beam emitted from the prism 15 in the Y direction and projects it on the projection surface 19.
  • the second scanning element 17 is, for example, a mirror that is rotationally driven with the X direction as the rotation axis by piezoelectric drive.
  • the second scanning element 17 is, for example, a horizontal scanner. Further, the second scanning element 17 scans in synchronization with the first scanning element 13, whereby a two-dimensional image can be projected on the projection surface 19.
  • the first scanning element 13, the incident surface 15a of the prism 15, the first reflecting surface 15b of the prism 15, and the second reflecting surface of the prism 15 are arranged in the order of the optical path from the laser element 11.
  • the 15c, the exit surface 15d of the prism 15, and the second scanning element 17 are arranged. Therefore, the prism 15 is arranged between the optical paths from the first scanning element 13 to the second scanning element 17.
  • the optical system 1 has an intermediate imaging position in the X direction of the light flux of the laser beam R between the first reflecting surface 15b in the prism 15 and the second reflecting surface 15c in the prism 15.
  • Has Px The intermediate imaging position Px does not intersect at the same position as the luminous flux of the laser beam R in the Y direction orthogonal to the X direction. Therefore, the pupil diameter 11c of the laser beam R at the intermediate imaging position Px has a linear shape.
  • the focal lengths of Rx which is a component of the laser light R in the X direction
  • Ry which is a component in the Y direction
  • the intermediate imaging position Px of the X component Rx of the laser light R and the intermediate connection of the Y component Ry are formed. It is different from the image position Py.
  • the focal lengths of the X component Rx and the Y component Ry are different, the enlargement ratios of the prism 15 when emitted from the exit surface 15d are also different. That is, the optical system 1 has different optical magnifications in the X direction and the Y direction. For example, in the present embodiment, since the focal length is larger in the Y direction than in the X direction, the optical magnification in the Y direction is larger than that in the X direction.
  • the intermediate imaging position Px of the X component Rx of the laser beam R is not the same as the intermediate imaging position Py of the Y component Ry of the laser beam R.
  • the pupil diameter 11b of the laser beam R at the intermediate imaging position Px has a linear shape extending in the Y direction. As a result, it is possible to prevent the pupil diameter 11b of the laser beam R from disappearing when there is dust or scratches on the intermediate imaging position Px.
  • the pupil diameter 11c of the laser light R exists before the X component Rx of the laser light R is imaged.
  • the pupil diameter 11c of the laser beam R at the intermediate imaging position Py also has a linear shape extending in the X direction. Since the optical magnification of the optical system 1 is larger in the Y direction than in the X direction, the pupil diameter 11d of the laser beam R emitted from the emission surface 15d is formed in a circular shape as shown in FIG. ..
  • the relationship between ⁇ x2 and the second projection pupil diameter ⁇ y2 in the Y direction is 0.1 ⁇ ( ⁇ x1 ⁇ ⁇ y1) / ( ⁇ x2 ⁇ ⁇ y2) ⁇ 0.8 Is.
  • the optical system 1 has an intermediate imaging position Py in the Y direction, but does not have an intermediate imaging action in the Y direction as shown in FIG. 7, and the intermediate imaging position.
  • a configuration without Py may be used.
  • the curvature of the first reflecting surface 15b may be designed so that the Y component Ry of the laser beam R reflected by the first reflecting surface 15b gradually expands.
  • the first scanning element 13 is a combination of a vertical scanner and the second scanning element 17 is a horizontal scanner, but the first scanning element 13 is a horizontal scanner and the second scanning element 17. May be a combination of vertical scanners.
  • the prism 15 has two reflecting surfaces, a first reflecting surface 15b and a second reflecting surface 15c, but may have only the first reflecting surface 15b. It may have at least two or more reflective surfaces.
  • the optical system 1 includes a prism 15 having an incident surface 15a, an emitting surface 15d, and one or more reflecting surfaces 15b and 15c.
  • the prism 15 has an intermediate imaging position Px of the X component Rx of the laser beam R which is a luminous flux in the X direction, and the intermediate imaging position Px is the luminous flux of the laser beam R which is the luminous flux in the Y direction orthogonal to the X direction. It is different from the intermediate imaging position Py of the Y component Ry.
  • the intermediate imaging position Px of the X component Rx of the laser beam R has scratches or dust
  • the intermediate imaging position Px has a long shape in the Y direction, so that the pupil diameter 11b of the laser beam R disappears. It is possible to prevent this from happening and reduce the effects of scratches and dust.
  • the intermediate imaging position Py of the Y component Ry of the laser beam R is scratched or dusty
  • the intermediate imaging position Py becomes a long shape in the X direction, so that the pupil diameter 11c of the laser beam R disappears. It is possible to prevent this from happening and reduce the effects of scratches and dust.
  • the optical path length can be shortened by the index of the prism 15, and the optical system 1 can be miniaturized.
  • the optical system 1 further includes a first scanning element 13 that scans the incident light in the X direction and a second scanning element 17 that scans the incident light in the Y direction, and is a prism.
  • Reference numeral 15 is arranged between the optical paths from the first scanning element 13 to the second scanning element 17.
  • the first scanning element 13 scans the light in the direction of the luminous flux in the X direction
  • the second scanning element 17 scans the light in the direction of the luminous flux in the Y direction, so that the optical magnification can be adjusted according to the scanning direction. it can.
  • FIG. 8 is a diagram showing the configuration of the optical system 1A according to the second embodiment.
  • the optical system 1A of the present embodiment further includes an astigmatism correction element 31 and a diopter correction element 33 in addition to the optical system 1 of the first embodiment.
  • the optical system 1 according to the first embodiment and the optical system 1A of the present embodiment are common.
  • the astigmatism correction element 31 is arranged on the optical path before the prism 15 is incident or after it is emitted. In the present embodiment, the astigmatism correction element 31 is arranged on the optical path between the first scanning element 13 and the incident surface 15a of the prism 15.
  • the astigmatism correction element 31 is an element having a curvature in the Y direction and substantially no curvature in the X direction.
  • the astigmatism correction element 31 has a larger refractive power in the direction perpendicular to the scanning direction (Y direction) than the refractive power in the scanning direction (X direction) of the first scanning element 13.
  • the astigmatism correction element 31 has, for example, a cylindrical shape, a toroidal shape, a free curved surface shape, or a combination of these shapes.
  • the astigmatism correction element 31 may be a lens or a mirror.
  • the astigmatism correction element 31 is, for example, a cylindrical lens.
  • the diopter correction element 33 is arranged on the optical path before or after the prism 15 is incident or emitted. In the present embodiment, it is arranged on an optical path between the exit surface 15d of the prism 15 and the second scanning element 17. Since the diopter correction element 33 has a rotationally symmetric refractive power, the resolution in both the X direction and the Y direction can be adjusted by moving along the optical path. Therefore, the resolution in the X direction and the Y direction can be adjusted by moving along the optical path of the laser beam R emitted from the exit surface 15d.
  • the diopter correction element 33 is, for example, a spherical lens or an aspherical lens.
  • the arrangement of the astigmatism correction element 31 and the diopter correction element 33 is not limited to the example shown in FIG.
  • the diopter correction element 33 may be arranged on the optical path between the laser element 11 and the first scanning element 13.
  • the astigmatism correction element 31 may be arranged on the optical path between the laser element 11 and the first scanning element 13.
  • the astigmatism correction element 31 and the diopter correction element 33 may be arranged on the optical path of the laser element 11 and the first scanning element.
  • the optical system 1A including the astigmatism correction element 31 can adjust the resolution in either the X direction or the Y direction, it moves along the optical path of the laser beam R emitted from the emission surface 15d. The deviation of the resolution in the X direction or the Y direction can be corrected.
  • Embodiments 1 and 2 have been described as examples of the techniques disclosed in this application. However, the technique in the present disclosure is not limited to this, and can be applied to embodiments in which changes, replacements, additions, omissions, etc. have been made. It is also possible to combine the components described in the first and second embodiments to form a new embodiment.
  • the laser beam R emitted from the laser element 11 is scanned by the first scanning element 13 and the second scanning element 17 in the X and Y directions, respectively, to project an image. It is not limited to.
  • the display element 41 may be arranged instead of the laser element 11, and the first scanning element 13 and the second scanning element 17 may be omitted.
  • the resolution of the display element 41 can be increased to project onto the projection surface 19. Further, the rate of increasing the resolution in each of the X direction and the Y direction can be changed.
  • the optical system of the present disclosure includes a prism having an incident surface, an exit surface, and one or more reflecting surfaces, and has a first intermediate imaging position of a light flux in the first direction inside the prism.
  • the 1 intermediate imaging position is different from the second intermediate imaging position of the luminous flux in the second direction orthogonal to the first direction.
  • the first intermediate imaging position of the luminous flux in the first direction is not the second intermediate imaging position of the luminous flux in the second direction in the prism, the first intermediate imaging position of the luminous flux in the first direction in the prism is formed. Even if scratches or dust are present in a part of the intermediate imaging position, the influence on the luminous flux in the first direction can be reduced. Further, by using a prism, the optical path can be shortened as compared with using a mirror, so that the optical system can be miniaturized.
  • the optical system of the present disclosure includes a prism having an incident surface, an exit surface, and one or more reflecting surfaces, and has a first intermediate imaging position of a light flux in the first direction inside the prism.
  • the light flux in the second direction orthogonal to the first direction does not perform intermediate imaging.
  • the intermediate imaging position of the luminous flux in the first direction is not the intermediate imaging position of the luminous flux in the second direction in the prism, it is one of the intermediate imaging positions of the luminous flux in the first direction in the prism. Even if there are scratches or dust on the portion, the influence on the light flux in the first direction can be reduced. Further, by using a prism, the optical path can be shortened as compared with using a mirror, so that the optical system can be miniaturized.
  • a first scanning element that scans incident light in a first direction and a second scanning element that scans incident light in a second direction are provided.
  • the prism is arranged between the optical paths from the first scanning element to the second scanning element.
  • the optical system has different optical magnifications in the first direction and the second direction. Therefore, the magnification of the light flux emitted from the prism can be changed in the first direction and the second direction, respectively.
  • the focal length is larger in the second direction than in the first direction.
  • the reflecting surface of the prism has different curvatures in the first direction and the second direction.
  • the reflecting surface of the prism is eccentric with respect to the incident light.
  • the prism has at least two reflecting surfaces.
  • At least two reflecting surfaces have a concave shape with respect to incident light.
  • the optical system does not have an intermediate imaging action in the second direction.
  • a laser element that irradiates the incident surface of the prism with laser light is provided.
  • the laser irradiated by the laser element has different pupil diameters in the first direction and the second direction.
  • the first exit pupil diameter ⁇ x1 in the first direction and the second exit pupil diameter ⁇ y1 in the second direction emitted from the laser element pass through the exit surface of the prism.
  • the relationship between the first projection pupil diameter ⁇ x2 in the first direction and the second projection pupil diameter ⁇ y2 in the second direction to reach the throwing slope is 0.1 ⁇ ( ⁇ x1 ⁇ ⁇ y1) / ( ⁇ x2 ⁇ ⁇ y2) ⁇ 0.8. Is.
  • a non-point aberration correction element is provided on the optical path before or after the prism is incident, and the reflecting surface of the prism has different curvatures in the first direction and the second direction.
  • the astigmatism correction element has a larger refractive power in the direction perpendicular to the scanning direction than the refractive power in the scanning direction of the first scanning element.
  • the astigmatism correction element has a cylindrical shape, a toroidal shape, a free curved surface shape, or a combination of these shapes.
  • the astigmatism correction element is a lens.
  • the astigmatism correction element is a mirror.
  • the optical systems of (19) and (16) include diopter correction elements arranged on the optical path before or after the prism is incident.
  • the diopter correction element has a rotationally symmetric refractive power.
  • the optical system of (21) and (16) includes a laser element that irradiates the incident surface of the prism with laser light.
  • the diopter correction element is arranged on the optical path from the laser element to the first scanning element.
  • the diopter correction element is a spherical lens or an aspherical lens.
  • the reflecting surface of the prism is eccentric with respect to the incident light.
  • the present disclosure is applicable to an optical device using a refractive optics such as a prism.
  • Optical system 11 Laser element 11a Eye diameter 13 First scanning element 15 Prism 15a Incident surface 15b First reflecting surface 15c Second reflecting surface 15d Emitting surface 17 Second scanning element 19 Projecting surface 31 Astigmatism correction element 33 Diopter correction Element 41 Display element

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Optical Elements Other Than Lenses (AREA)
PCT/JP2020/016169 2019-04-12 2020-04-10 光学系 Ceased WO2020209374A1 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2021513723A JP7493156B2 (ja) 2019-04-12 2020-04-10 光学系
EP20787636.8A EP3955043A4 (en) 2019-04-12 2020-04-10 OPTICAL SYSTEM
CN202080007633.9A CN113260893B (zh) 2019-04-12 2020-04-10 光学系统
US17/404,468 US12352940B2 (en) 2019-04-12 2021-08-17 Optical system
JP2024075698A JP7738281B2 (ja) 2019-04-12 2024-05-08 光学系

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019-076468 2019-04-12
JP2019076468 2019-04-12

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US17/404,468 Continuation US12352940B2 (en) 2019-04-12 2021-08-17 Optical system

Publications (1)

Publication Number Publication Date
WO2020209374A1 true WO2020209374A1 (ja) 2020-10-15

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PCT/JP2020/016169 Ceased WO2020209374A1 (ja) 2019-04-12 2020-04-10 光学系

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US (1) US12352940B2 (enExample)
EP (1) EP3955043A4 (enExample)
JP (2) JP7493156B2 (enExample)
CN (1) CN113260893B (enExample)
WO (1) WO2020209374A1 (enExample)

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US12352940B2 (en) 2025-07-08
US20210373305A1 (en) 2021-12-02
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JPWO2020209374A1 (enExample) 2020-10-15

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