WO2020203317A1 - 超音波放射器具及び超音波装置 - Google Patents

超音波放射器具及び超音波装置 Download PDF

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Publication number
WO2020203317A1
WO2020203317A1 PCT/JP2020/012086 JP2020012086W WO2020203317A1 WO 2020203317 A1 WO2020203317 A1 WO 2020203317A1 JP 2020012086 W JP2020012086 W JP 2020012086W WO 2020203317 A1 WO2020203317 A1 WO 2020203317A1
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WIPO (PCT)
Prior art keywords
flat plate
plate elements
ultrasonic
elements
support
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Ceased
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PCT/JP2020/012086
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English (en)
French (fr)
Japanese (ja)
Inventor
出 佐藤
真 都甲
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Kyocera Corp
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Kyocera Corp
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Priority to JP2021511427A priority Critical patent/JP7190028B2/ja
Publication of WO2020203317A1 publication Critical patent/WO2020203317A1/ja
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    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
    • A61N7/00—Ultrasound therapy
    • A61N7/02—Localised ultrasound hyperthermia
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers

Definitions

  • the present disclosure relates to an ultrasonic radiation device that emits ultrasonic waves toward an object such as a human body, and an ultrasonic device having the ultrasonic radiation device.
  • Patent Documents 1 and 2 There are known ultrasonic devices that emit ultrasonic waves toward an object such as the human body (for example, Patent Documents 1 and 2). Such an ultrasonic device is used, for example, as an ultrasonic therapy device for irradiating an affected area or the like with ultrasonic waves to perform treatment, or as an ultrasonic diagnostic device for acquiring a secondary cross-sectional image of the affected area or the like. There is.
  • an ultrasonic therapy device for example, a device used for HIFU (High Intensity Focused Ultrasound) treatment is known.
  • HIFU High Intensity Focused Ultrasound
  • the surface on which the ultrasonic waves are radiated may be formed in a concave shape so as to focus the ultrasonic waves in a predetermined focusing region.
  • Patent Documents 1 and 2 disclose a technique of arranging a vibrating element that generates a vibration that generates ultrasonic waves along a concave surface.
  • the ultrasonic radiating instrument has a plurality of flat plate elements.
  • the plurality of flat plate elements each have a radiating surface that emits ultrasonic waves, and the radiating surfaces are arranged in parallel with each other toward a common focusing region.
  • Each of the plurality of flat plate elements has a plurality of vibrating elements that generate vibrations that generate ultrasonic waves at a plurality of positions in the radiation surface.
  • the ultrasonic device includes the ultrasonic radiating device and a drive control unit that supplies AC power having a frequency within the frequency band of ultrasonic waves to the flat plate element.
  • FIG. 8 (a) and 8 (b) are schematic views for explaining the effect of the ultrasonic wave generating portion of FIG.
  • FIG. 1 is a schematic view showing a schematic configuration of the ultrasonic device 1 according to the first embodiment.
  • the ultrasonic device 1 is used for HIFU treatment, for example.
  • the ultrasonic device 1 focuses ultrasonic waves on the affected part 103 (or a foreign substance such as a stone; the same applies hereinafter) of the patient 101.
  • the affected area 103 is denatured by the heat generated by this.
  • the ultrasonic device 1 may be configured for any part of the human body as a treatment target, or may be configured for any disease as a treatment target.
  • the frequency and intensity of the ultrasonic waves radiated by the ultrasonic device 1 and the dimensions of each part of the ultrasonic device 1 may be appropriately set.
  • the ultrasonic wave is generally a sound wave of 20 kHz or higher. There is no general upper limit on the frequency of ultrasonic waves, but it may be, for example, 5 GHz.
  • the ultrasonic device 1 is arranged adjacent to the patient 101, and is directed to the ultrasonic radiation device 3 (hereinafter, may be simply referred to as “radiation device 3”) and the radiation device 3 that directly bear the radiation of ultrasonic waves. It has a device main body 5 that supplies power and the like.
  • the radiating instrument 3 has a generating unit 7 that generates ultrasonic waves, and a bag 9 that is interposed between the generating unit 7 and the patient 101.
  • the generating unit 7 emits ultrasonic waves from, for example, the concave surface 7a facing the patient 101 side.
  • the shape of the concave surface 7a is, for example, a shape obtained by cutting out a part of a spherical surface (inner surface thereof). Therefore, the ultrasonic waves radiated from the concave surface 7a are focused near the center of the sphere (from another viewpoint, the affected portion 103).
  • the bag 9 is filled with a liquid LQ at least when the ultrasonic device 1 is used.
  • the liquid LQ contributes to mitigating abrupt changes in acoustic impedance between the concave surface 7a and the body surface of the patient 101.
  • latitude line and meridian may be used following the concept of a virtual line on the surface of the earth for convenience.
  • the liquid LQ is, for example, water. Further, for example, the liquid LQ may contain water and an appropriate additive.
  • the additive may be, for example, for adjusting the acoustic impedance.
  • the acoustic impedance of the liquid LQ is, for example, 1 ⁇ 10 6 kg / (m 2 ⁇ s) or more and 2 ⁇ 10 6 kg / (m 2 ⁇ s) or less, or 1.3 ⁇ 10 6 kg / (m 2 ⁇ s). ) Or more 1.7 ⁇ 10 6 kg / (m 2 ⁇ s) or less.
  • water about 1.5 ⁇ 10 6 kg / (m 2 ⁇ s)
  • air about 0, fat: about 1.4 ⁇ 10 6 kg / (m 2).
  • ⁇ S muscle: about 1.7 ⁇ 10 6 kg / (m 2 ⁇ s).
  • FIG. 2 is a schematic diagram for explaining the configuration of a main part of the generating unit 7.
  • the upper side of the paper is the patient 101 side. That is, FIG. 2 is a perspective view of the generating portion 7 as viewed from the concave surface 7a side.
  • the generating unit 7 has, for example, a plurality of flat plate elements 11 that emit ultrasonic waves, and a support 13 that holds the plurality of flat plate elements 11.
  • the support 13 has, for example, a frame shape (frame shape, skeleton structure shape), and holds the outer edges of the plurality of flat plate elements 11 so as to expose the plurality of flat plate elements 11 to the patient 101 side.
  • the generating unit 7 may have, for example, a housing having an appropriate shape that covers the illustrated configuration from the side opposite to the patient 101.
  • the flat plate element 11 is roughly formed in a flat plate shape. From another aspect, the flat plate element 11 faces the patient 101 side and has a substantially planar radiation surface 11a that emits ultrasonic waves.
  • the plurality of flat plate elements 11 are arranged in parallel with each other so that the radial surface 11a faces a common focusing region (affected portion 103) and is inclined to each other, forming the concave surface 7a described above. Therefore, the concave surface 7a is not composed of a curved surface, but is composed of a combination of a plurality of planes (radiating surface 11a). As described above, the radial surface 11a is flat, but may have minute inclinations and irregularities due to manufacturing errors and the like.
  • the arrangement pattern of the plurality of flat plate elements 11 may be appropriately set.
  • the plurality of flat plate elements 11 are arranged in the circumferential direction of the concave surface 7a (direction along the outer circumference of the concave surface 7a) to form an annular element row 8 (indicated by an arrow).
  • the element rows 8 may be provided in a plurality of rows (for example, concentrically) in a plurality of rings in a plan view of the concave surface 7a (in the illustrated example), or may be provided in only one row.
  • the pitch of the flat plate elements 11 in each element row 8 may or may not be constant (in the illustrated example).
  • the number of flat plate elements 11 included in each element row 8 may be appropriately set.
  • this number may be the same as or different from each other in the plurality of element rows 8.
  • the positions of the flat plate elements 11 in the circumferential direction of the concave surface 7a may be the same or different from each other in all the element rows 8 or in the element rows 8 adjacent to each other. It may be the same for a part of the element train 8 and may be different for the other part.
  • the annular shape means a shape surrounding a predetermined region, and is not limited to a circular shape, and may be, for example, a polygon.
  • the multiple annular shape in the above means double or more, and means that in at least two annular shapes, one annular shape surrounds the other annular shape. Concentric means that the center of the inner ring (or the center of gravity) and the center of the outer ring are approximately aligned.
  • each element row 8 is 19, 24, and 29 in order from the element row 8 inside the concave surface 7a.
  • 19 and 29 are odd numbers and are prime numbers. Therefore, it can be said that one or more element rows 8 composed of the plurality of flat plate elements 11 include rows in which the number of flat plate elements 11 is an odd number (but a plurality) and / or a prime number (excluding 2). it can.
  • the position of the flat plate element 11 in the circumferential direction of the concave surface 7a is determined with respect to at least a part of the flat plate elements 11.
  • the element rows 8 are different from each other.
  • the innermost region of the concave surface 7a (the central portion 65 described later) is a non-arranged region of the flat plate element 11.
  • Appropriate electronic components and the like may be arranged in such a region.
  • a visual sensor for detecting the position of a marker attached to the body surface of the patient 101 to indicate the position of the affected area 103, and / or a plurality of flat plate elements 11.
  • a receiving unit may be provided to receive the reflected wave of the emitted ultrasonic waves.
  • the innermost region of the concave surface 7a may have an opening.
  • FIG. 3 is a plan view of the flat plate element 11.
  • the planar shape of the flat plate element 11 and the dimensions of the planar shape may be appropriately set.
  • the plurality of flat plate elements 11 may have the same shape and size, or may include two or more types of flat plate elements 11 having different shapes and / or sizes.
  • the planar shape of the flat plate element 11 may be a shape in which the gap between adjacent flat plate elements 11 is relatively small (a shape in which a spherical surface is divided) (examples of FIGS. 2 and 3). , It does not have to be such a shape. As the latter, for example, a circular shape can be mentioned.
  • the planar shape of the flat plate element 11 is a trapezoidal shape, which is an example of a shape in which the gap between the flat plate elements 11 is relatively small.
  • the concave surface 7a can be formed so as to reduce the gap between the flat plate elements 11 even with a polygon other than the trapezoidal shape, for example, a regular polyhedron (Platonic solid), a semi-regular polyhedron (Archimedean solid), and a Platonic solid.
  • a regular polyhedron Platonic solid
  • a semi-regular polyhedron Archimedean solid
  • Platonic solid As well as the dome shape realized in various technical fields.
  • the trapezoid of the flat plate element 11 has, for example, an upper base 11d inside the concave surface 7a and a lower base 11e outside the concave surface 7a, as indicated by reference numeral 3 in FIG. It is an isosceles trapezoid having a pair of legs 11f.
  • the length of the upper base 11d, the length of the lower base 11e, and the height h of the trapezoid may be appropriately set, and any length may be set to another length. On the other hand, it may be long. In the illustrated example, the height of the trapezoid is larger than the length of the upper base 11d and the length of the lower base 11e, respectively.
  • the degree of the difference may be appropriately set, and for example, the height of the trapezoid may be 1.1 times or more the length of the lower base 11e. Further, for example, the trapezoid is congruent (same shape and size) among the plurality of flat plate elements 11.
  • the trapezoid of the flat plate element 11 can be grasped as a superordinate concept.
  • the flat plate element 11 has a first edge portion (upper base 11d), a second edge portion (lower base 11e), and a pair of third edge portions (a pair of legs 11f).
  • the first edge portion constitutes an inner portion of the concave surface 7a of the outer edge of the flat plate element 11.
  • the second edge portion constitutes an outer portion of the concave surface 7a of the outer edge of the flat plate element 11 and faces the first edge portion, and is longer than the first edge portion.
  • a pair of third edges connect both ends of the first edge and both ends of the second edge.
  • the first edge portion (upper base 11d) and the second edge portion (lower base 11e) are not limited to straight lines, and are, for example, circular arcs having a center on the center side of the concave surface 7a. There may be.
  • the plurality of flat plate elements 11 are arranged in the circumferential direction of the concave surface 7a to form an annular element row 8.
  • trapezoidal legs 11f are adjacent to each other with adjacent flat plate elements 11.
  • the adjacent legs 11f may or may not be parallel to each other. In the latter case, the distance between the legs 11f may be relatively wide on either the inside or the outside of the concave surface 7a.
  • the trapezoidal upper base 11d of the flat plate element 11 of one element row 8 and the trapezoidal lower base 11e of the flat plate element 11 of the other element row 8 are adjacent to each other.
  • the gap between adjacent flat plate elements 11 when the gap between adjacent flat plate elements 11 is reduced, the planar shape of the flat plate elements 11 and the arrangement pattern of the plurality of flat plate elements 11 are related to each other. Therefore, when the gap between the flat plate elements 11 is reduced by a shape other than the trapezoidal shape, it is clear that the arrangement may be other than the arrangement of the flat plate elements 11 of the present embodiment. On the contrary, in the arrangement of the flat plate elements 11 similar to the present embodiment, the gap between the flat plate elements 11 can be reduced by a shape other than the isosceles trapezoid. Such shapes include, for example, triangles and non-isopod trapezoids. In the case of a triangle, the plurality of triangles may be arranged in the circumferential direction of the concave surface 7a while being alternately oriented in the element row 8.
  • one flat plate element 11 has a plurality of piezoelectric elements 15 (vibration elements).
  • the piezoelectric element 15 is a portion that generates vibration that generates ultrasonic waves.
  • the number, position, planar shape, size, and the like of the piezoelectric elements 15 may be appropriately set.
  • the plurality of piezoelectric elements 15 are distributed and arranged at a substantially uniform density along the plane direction (direction along the plane; the same applies hereinafter) of the flat plate element 11. More specifically, the plurality of piezoelectric elements 15 are arranged vertically and horizontally at a constant pitch. However, the plurality of piezoelectric elements 15 may be half-pitch-shifted between adjacent rows, may be arranged along a plurality of concentric circles, may be arranged radially, or may be uniformly arranged. It may be arranged at a density other than that. The relative relationship between the arrangement direction of the plurality of piezoelectric elements 15 and the direction in which each portion of the outer edge of the flat plate element 11 extends may also be appropriately set.
  • the area of the arrangement region of the plurality of piezoelectric elements 15 (for example, the smallest convex polygon in which the plurality of piezoelectric elements 15 fit) is exposed from, for example, the area of the flat plate element 11 (or the support 13 when viewed from the patient 101 side). Area) may be 1/5 or more, 1/2 or more, 2/3 or more, or 4/5 or more. 4/5 or more may be regarded as a state in which a plurality of piezoelectric elements 15 are arranged on the entire surface of the flat plate element 11.
  • the arrangement region of the plurality of piezoelectric elements 15 is located in an appropriate range such as the central side or the outer edge side in the flat plate element 11. Good.
  • the shape of the arrangement area is also arbitrary.
  • the planar shape of the piezoelectric element 15 is circular. From another point of view, the planar shape is axisymmetric or rotationally symmetric. However, the planar shape may be another shape such as an ellipse or a polygon, or may be an asymmetrical shape. When the planar shape of the piezoelectric element 15 is not circular, the relative orientation between the planar shape and the planar shape of the flat plate element 11 may be appropriately set.
  • FIG. 4 is a cross-sectional view taken along the line IV-IV of FIG.
  • the lower part of the paper is the patient 101 side.
  • a part of the support 13 is also shown.
  • the thickness of some or all layers is exaggerated.
  • the flat plate element 11 has an element substrate 19 having a piezoelectric element 15 and a cavity member 21 overlapped with the element substrate 19 on the patient 101 side.
  • the element substrate 19 vibrates as the region of the piezoelectric element 15 bends and deforms. This vibration is transmitted to the fluid located on the patient 101 side of the element substrate 19, and ultrasonic waves are generated.
  • the cavity member 21 has a plurality of cavities 21c (openings, holes) individually overlapping the plurality of piezoelectric elements 15 in the element substrate 19. The cavity 21c contributes to increasing the degree of directivity of ultrasonic waves, for example.
  • the main surface (the widest surface of the plate, the front and back surfaces) of the flat plate element 11 has irregularities due to the provision of the plurality of cavities 21c and the second electrode 33 (individual electrode) described later, and is flat. Absent. As can be understood from this, when the flat plate element 11 has a flat plate shape, it does not have to be strictly a flat plate.
  • the flat plate element 11 may be regarded as a flat plate shape by having a flat layer (for example, 23, 25, and 27 described later) having a constant thickness as a main component.
  • the flat plate element 11 may be regarded as a flat plate shape when the tops (or the deepest portions of the concave portions) of the plurality of convex portions fit on the same plane on each of the two main surfaces. Further, for example, the flat plate element 11 has a flat plate shape when the arithmetic mean roughness of the unevenness of each main surface is 5% or less, 2% or less, or 1% or less with respect to the equivalent circle diameter obtained from the area of the flat plate element 11. Can be regarded as. In FIG. 4, the unevenness of the main surface of the flat plate element 11 is exaggerated.
  • the element substrate 19 includes, for example, the vibration layer 23, the first conductor layer 25, the piezoelectric layer 27, and the second conductor layer 29 in this order from the patient 101 side (cavity member 21 side).
  • the first conductor layer 25 includes, for example, the first electrode 31.
  • the second conductor layer 29 includes, for example, a plurality of second electrodes 33.
  • the first electrode 31 and the second electrode 33 sandwich the piezoelectric layer 27.
  • the element substrate 19 may include an appropriate layer such as an insulating layer covering the second conductor layer 29.
  • "layer” is a concept including "board”.
  • the region regarded as the piezoelectric element 15 may be appropriately defined.
  • the region of the element substrate 19 that overlaps the cavity 21c (more strictly, the region that overlaps the opening surface of the cavity 21c on the element substrate 19 side) is defined as the piezoelectric element 15.
  • the region overlapping the second electrode 33 (individual electrode) can be defined as the piezoelectric element 15.
  • Each piezoelectric element 15 has a first surface 15a facing the cavity 21c side (patient 101 side) and a second surface 15b facing the opposite side of the cavity 21c.
  • the first surface 15a is composed of, for example, a surface of the vibrating layer 23 on the cavity member 21 side.
  • the second surface 15b is exposed from, for example, the second conductor layer 29 of the surface of the second conductor layer 29 opposite to the cavity member 21 and the surface of the piezoelectric layer 27 opposite to the cavity member 21. It is composed of the area.
  • the second surface 15b may be formed by the insulating layer.
  • the first surface 15a is a surface on which ultrasonic waves toward the patient 101 side are generated by the vibration of the piezoelectric element 15, and is a radiation surface of the ultrasonic waves in the piezoelectric element 15. Further, the first surface 15a is flat and constitutes a part of the radiation surface 11a of the flat plate element 11. That is, the planar radiating surface 11a of the flat plate element 11 is formed by the planar radiating surfaces of the plurality of piezoelectric elements 15 (vibrating elements). The first surface 15a may have a minute inclination or unevenness due to a manufacturing error or the like.
  • the vibrating layer 23 for example, extends substantially over the element substrate 19. In other words, the vibrating layer 23 is formed in a solid shape having a width extending over the plurality of piezoelectric elements 15. The thickness of the vibrating layer 23 is substantially constant.
  • the vibrating layer 23 may be integrally formed over the entire area, or may be divided and formed.
  • the vibrating layer 23 overlaps with the cavity member 21.
  • the vibrating layer 23 may be regarded as being supported by the peripheral portion of the cavity 21c in the cavity member 21.
  • the vibrating layer 23 is formed of, for example, an insulating material or a semiconductor material.
  • the material of the vibrating layer 23 may be an inorganic material or an organic material. More specifically, for example, the material of the vibrating layer 23 may be the same or different piezoelectric material as the material of the piezoelectric layer 27 (described later). Further, for example, the material of the vibrating layer 23 may be silicon (Si), silicon dioxide (SiO 2 ), silicon nitride (SiN) or sapphire (Al 2 O 3 ).
  • the vibrating layer 23 may be formed by laminating a plurality of layers made of different materials. For example, the vibrating layer 23 may be composed of a silicon layer and a SiO 2 layer that overlaps the upper surface and / or the lower surface thereof.
  • the first conductor layer 25 includes only the first electrode 31 in the illustrated example.
  • the first electrode 31 is a common electrode having a width extending over the plurality of piezoelectric elements 15.
  • the common electrode is, for example, formed in a solid shape over substantially the entire element substrate 19, and its thickness is substantially constant.
  • the first electrode 31 is electrically connected to, for example, a wiring (for example, a cable) (for example, a cable) arranged on the opposite side of the flat plate element 11 from the bag 9 via a through conductor (not shown) penetrating the piezoelectric layer 27. It is connected.
  • the material of the first conductor layer 25 may be, for example, an appropriate metal. For example, gold (Au), silver (Ag), palladium (Pd), platinum (Pt), aluminum (Al), nickel (Ni), copper (Cu) or chromium (Cr) or alloys containing these are used. Good.
  • the first conductor layer 25 may be formed by laminating a plurality of layers made of different materials. Further, the material of the first conductor layer 25 may be obtained by firing a conductive paste containing a metal as described above. That is, the material of the first conductor layer 25 may contain an additive (inorganic insulator from another viewpoint) such as glass powder and / or ceramic powder.
  • the piezoelectric layer 27 extends over substantially the entire element substrate 19.
  • the piezoelectric layer 27 is formed in a solid shape having a width extending over the plurality of piezoelectric elements 15.
  • the thickness of the piezoelectric layer 27 is substantially constant.
  • the material of the piezoelectric layer 27 may be a single crystal, a polycrystalline material, an inorganic material, an organic material, or a ferroelectric substance. It may or may not be a pyroelectric body.
  • the inorganic material include lead zirconate titanate-based material and lead-free inorganic piezoelectric material.
  • lead-free inorganic piezoelectric material include a perovskite-type compound material.
  • the organic material include PVDF (polyvinylidene fluoride).
  • the material of the piezoelectric layer 27 may be, for example, a pressure electromagnetic plate (sintered body from another viewpoint) or a piezoelectric thin film.
  • the piezoelectric plate is a plate-shaped inorganic polycrystal composed of a plurality of crystal particles (and grain boundaries) having piezoelectricity, and is also called a piezoelectric ceramic plate.
  • the crystal particles that make up the piezoelectric plate usually have a small aspect ratio and are isotropically distributed.
  • the piezoelectric thin film is a thin-film inorganic single crystal, inorganic polycrystal, or organic material (polymer) having piezoelectricity.
  • the polycrystalline piezoelectric thin film is usually composed of columnar crystals extending in the thickness direction. Piezoelectric thin films usually have high orientation, thereby having high piezoelectric properties.
  • the polarization axis (also referred to as an electric axis or an X axis in a single crystal) is in the thickness direction of the piezoelectric layer 27 (with the first electrode 31). It is substantially parallel to the direction opposite to the second electrode 33).
  • the region of the piezoelectric layer 27 other than the region constituting the piezoelectric element 15 may or may not be polarized. Further, when it is polarized, it may be polarized in the same direction as the region constituting the piezoelectric element 15, or may be polarized in a different direction.
  • the second conductor layer 29 may have, for example, a plurality of second electrodes 33 described above, as well as wiring (not shown) connected to the plurality of second electrodes 33.
  • the plurality of second electrodes 33 are connected to, for example, other wiring (for example, a cable) arranged on the side opposite to the bag 9 of the flat plate element 11 via a wiring (not shown) included in the second conductor layer 29. It is electrically connected.
  • the plurality of second electrodes 33 are, for example, individual electrodes provided for each piezoelectric element 15.
  • the individual electrodes referred to here mean that a plurality of electrodes have shapes that are separated from each other, and it is not necessary that potentials that are different from each other can be applied.
  • two or more second electrodes 33 may be connected to each other.
  • the connection may be made by, for example, a wiring (not shown) included in the second conductor layer 29, or may be made by other means (for example, a bonding wire).
  • the plurality of second electrodes 33 may be capable of applying different potentials individually or for each group including two or more second electrodes 33.
  • the planar shape and size of the second electrode 33 may be an appropriate shape.
  • the planar shape of the second electrode 33 may be similar to or similar to the planar shape of the piezoelectric element 15 (opening shape of the cavity 21c), may be different, and may be circular or elliptical. It may be a shape or a polygon.
  • the outer edge of the second electrode 33 may be entirely located inside the opening edge of the cavity 21c, or the entire edge may be substantially the same. , The whole may be located on the outside, or only a part may be located on the same or inside.
  • the second electrode 33 is a circle located inside the opening edge of the circular cavity 21c.
  • the material of the second conductor layer 29 may be the same as or different from the material of the first conductor layer 25. Further, in any case, the description of the material of the first conductor layer 25 described above may be referred to the description of the material of the second conductor layer 29.
  • a pressure wave is formed in the medium (for example, fluid) around the piezoelectric element 15. Then, by inputting an electric signal (drive signal) whose voltage changes with a predetermined waveform to the first electrode 31 and the second electrode 33, the waveform of the electric signal (frequency and amplitude in another viewpoint) is reflected. Ultrasonic waves are generated.
  • the vibration of the above-mentioned deflection deformation is an out-of-plane vibration in the primary mode in which the center of the plan view is the antinode of the vibration and the outer edge (for example, near the edge of the cavity 21c) is the vibration node. (Bending vibration).
  • the piezoelectric element 15 is configured such that, for example, the resonance frequency is located in the frequency band of ultrasonic waves.
  • the resonance frequency is set, for example, by selecting the material of the layer constituting the piezoelectric element 15 (selecting Young's modulus and density from another viewpoint), and setting the diameter of the piezoelectric element 15 and the thickness of each layer (from another viewpoint). It is done by setting the mass and bending rigidity).
  • the influence of the fluid around the piezoelectric element 15 and the influence of the rigidity of the portion supporting the piezoelectric element 15 may be taken into consideration.
  • the electric signal may be, for example, a voltage application that displaces the piezoelectric element 15 toward the cavity 21c and a voltage application that displaces the piezoelectric element 15 toward the cavity 21c. That is, the electric signal may have polarities (positive and negative) inverted (the directions of the voltage (electric field) alternate in the direction of the polarization axis of the piezoelectric layer 27). Further, for example, the electric signal may be such that only the voltage application that displaces the piezoelectric element 15 to the cavity 21c side or the voltage application that displaces the piezoelectric element 15 to the side opposite to the cavity 21c is repeated. In this case, ultrasonic waves are generated by repeating bending and elimination of bending by a restoring force.
  • the cavity member 21 is, for example, a member having a constant thickness and having a width extending over a plurality of piezoelectric elements 15 when the cavity 21c is ignored.
  • the material of the cavity member 21 is arbitrary, for example, it may be an insulating material, a semiconductor material, a conductive material, an inorganic material, or an organic material. It may be a piezoelectric material, or it may be the same as the material of any layer in the element substrate 19.
  • metal, resin, and ceramic can be mentioned.
  • the cavity member 21 may be composed of a plurality of materials or a plurality of layers.
  • the cavity member 21 may be formed by forming an insulating layer on a metal layer (including a metal plate) overlapping the element substrate 19, or may be made of a glass epoxy resin obtained by impregnating glass fibers with an epoxy resin. May be.
  • the shape of the cavity 21c may be set as appropriate.
  • the shape of the cavity 21c may be such that the shape of the cross section (cross section parallel to the element substrate 19) is constant regardless of the position of the cavity 21c in the penetrating direction (illustration example).
  • the shape may have a tapered surface whose diameter increases or decreases toward the 19th side.
  • the region of the element substrate 19 that overlaps with the cavity 21c is the piezoelectric element 15. Therefore, the description of the planar shape of the piezoelectric element 15 described above is used to explain the shape of the cross section of the cavity 21c. May be done.
  • the depth of the cavity 21c (the length in the penetrating direction; from another point of view, the thickness of the cavity member 21) may be appropriately set.
  • the depth of the cavity 21c may be 1/20 or more, 1/10 or more, 1/2 or more, or 1 times or more the diameter of the cavity 21c (for example, a circle-equivalent diameter if it is not circular). It may be 10 times or less, 5 times or less, 1 time or less, 1/2 or less or 1/10 or less, and the above lower limit and upper limit may be appropriately combined as long as there is no contradiction.
  • the support 13 has, for example, a shape that holds the outer edges of the plurality of flat plate elements 11. More specifically, the support 13 has a shape similar to, for example, the shape of a gap (boundary in another viewpoint) between adjacent flat plate elements 11. Then, as shown in FIG. 4, the outer edge side portion of the flat plate element 11 is overlapped with the inner surface 13a (the surface on the affected portion 103 side) or the outer surface 13b (the surface opposite to the affected portion 103) of the support 13. Is fixed.
  • the flat plate element 11 may be arranged on either the inner surface 13a or the outer surface 13b of the support 13.
  • an embodiment in which the flat plate element 11 is arranged on the outer surface 13b is taken as an example.
  • the support 13 holding the edge portion of the flat plate element 11 has an opening 13h for exposing a plurality of piezoelectric elements 15 to the affected portion 103 side for each flat plate element 11. Can be caught.
  • the shape and area of the opening 13h may be appropriately set.
  • the area of the opening 13h is 60% or more or 80% or more of the area of the flat plate element 11.
  • the support 13 is composed of, for example, three portions substantially concentrically formed in a plan view of the concave surface 7a.
  • One is a lattice portion 61 which is configured in a lattice pattern and extends over an annular region (arrangement region of a plurality of flat plate elements 11) as a whole.
  • the other one is an annular edge 63 connected to the outside of the grid 61.
  • the remaining one is a central portion 65 connected to the inside of the grid portion 61. The outer edge of the plurality of flat plate elements 11 is held by these portions.
  • the lattice portion 61 is a portion located between (boundary) between the flat plate elements 11 adjacent to each other and holding the edge portions adjacent to each other. Therefore, the shape is substantially the same as the shape of the boundary between the plurality of flat plate elements 11.
  • the edge portion 63 is a portion of the outer edges of the plurality of flat plate elements 11 that holds an edge portion (lower bottom 11e of the flat plate element 11 of the outermost element row 8) that is the outer edge of the entire plurality of flat plate elements 11. Therefore, the shape of the edge portion 63 is a shape having at least an annular inner edge.
  • the central portion 65 is a portion of the outer edges of the plurality of flat plate elements 11 that holds an edge portion (upper bottom 11d of the flat plate element 11 of the innermost element row 8) that is the inner edge of the entire plurality of flat plate elements 11. .. Therefore, the shape of the central portion 65 is a shape having at least an annular outer edge. Specifically, it is as follows.
  • the lattice portion 61 has, for example, a plurality of partition portions 67 arranged in the circumferential direction of the concave surface 7a, and one or more (two in the illustrated example) annular portions 69 extending in the circumferential direction of the concave surface 7a. There is.
  • the annular portion 69 is a second partition portion that intersects the plurality of partition portions 67.
  • the partition portion 67 holds the adjacent edge portions (legs 11f) of the flat plate elements 11 adjacent to each other in each element row 8.
  • the annular portion 69 holds the upper base 11d and the lower base 11e of the element rows 8 adjacent to each other.
  • the partition portion 67 corresponding to the element row 8 on the innermost circumference is hung between the outer edge of the central portion 65 and the annular portion 69 on the innermost circumference.
  • the partition portion 67 corresponding to the outermost element row 8 is hung between the outermost annular portion 69 and the inner edge of the edge portion 63.
  • the partition portions 67 corresponding to the other element rows 8 are hung on the annular portions 69 adjacent to each other.
  • the element row 8 may be only one row. In this case, the partition portion 67 is hung between the central portion 65 and the edge portion 63. That is, the annular portion 69 is unnecessary.
  • the number and position of the partition portion 67 and the annular portion 69, the approximate planar shape, and the approximate dimensions in the direction along the concave surface 7a are based on the description of the number, position, the planar shape, and the dimensions in the direction along the concave surface 7a of the plurality of flat plate elements 11. It may be inferred. Therefore, these descriptions may be omitted here as appropriate.
  • the shapes and / or dimensions of the plurality of partition portions 67 corresponding to each element row 8 may be the same as each other (illustration example). They may be different from each other. Further, in the element rows 8, the shapes and / or dimensions of the plurality of partition portions 67 (directions along the concave surface 7a and / or directions intersecting the concave surface 7a) may be the same or different from each other. It may be (illustrated example).
  • the shapes and / or dimensions of the plurality of annular portions 69 may be the same as each other or different from each other (diameters are naturally different from each other). different).
  • the shape of the partition portion 67 is, for example, a rod shape extending linearly in the radial direction of the concave surface 7a (the direction from the center of the concave surface 7a toward the outer periphery and along the meridian) in the plan view of the concave surface 7a.
  • the length of the partition portion 67 in the direction from the inside to the outside of the concave surface 7a is the width (the length in the circumferential direction of the concave surface 7a) and the thickness (the length in the direction orthogonal to the concave surface 7a). It has a relatively long shape.
  • the width of the partition portion 67 may be larger than the length in the radial direction, or the partition portion 67 may have a plate shape in which the length behind the concave surface 7a is sufficiently longer than the width.
  • the shape of the cross section of the partition portion 67 (the cross section orthogonal to the length direction of the rod; the cross section substantially orthogonal to the meridian of the concave surface 7a) may be an appropriate shape, and is, for example, roughly rectangular.
  • the shape of the annular portion 69 is, for example, roughly a long shape (curved rod shape) extending in a circumferential shape. From another viewpoint, the annular portion 69 has a width (length in the radial direction of the concave surface 7a in the plan view of the concave surface 7a) and a thickness (length in the direction orthogonal to the concave surface 7a) along the circumferential direction of the concave surface 7a. ), It has a longer shape. However, the annular portion 69 may have a plate shape in which the length behind the concave surface 7a is sufficiently longer than the width.
  • the inner edge and / or the outer edge of the annular portion 69 may be circular (may be curved), or may be formed on the upper bottom 11d or the lower bottom 11e of the flat plate element 11. It may be a polygonal shape having parallel sides.
  • the shape of the cross section of the annular portion 69 (the cross section orthogonal to the length direction; the cross section substantially orthogonal to the latitude line of the concave surface 7a) may be an appropriate shape, and is, for example, roughly rectangular.
  • the shape and dimensions of the edge portion 63 may be appropriately set as long as the lower bottom 11e (edge portion on the outer peripheral side) of the outermost flat plate element 11 can be held.
  • the edge 63 has an annular flat plate shape. Its inner and outer edges are generally circular.
  • the inner edge of the edge portion 63 may have a circular shape (may be curved), or may have a polygonal shape having a side parallel to the lower base 11e of the outermost flat plate element 11.
  • Examples of the shape of the edge portion 63 other than the illustrated example include a shape similar to or similar to that of the annular portion 69 (curved rod shape), and a plate shape that is not a flat plate.
  • the non-flat plate shape has, for example, a curved / bent portion and / or a portion having different plate thicknesses.
  • the shape and dimensions of the central portion 65 may be appropriately set as long as the upper bottom 11d (edge portion on the inner peripheral side) of the flat plate element 11 on the innermost circumference can be held.
  • the edge 63 has a substantially circular flat plate shape.
  • the outer edge may have a circular shape (may be curved), or may have a polygonal shape having a side parallel to the upper base 11d of the flat plate element 11 on the innermost circumference.
  • Examples of the shape of the central portion 65 other than the illustrated example include a shape similar to or similar to that of the annular portion 69 (curved rod shape), and a plate shape that is not a flat plate.
  • the plate shape that is not a flat plate is as described above.
  • the central portion 65 is unnecessary, and the lattice portion 61 may extend to the center of the concave surface 7a.
  • various electronic components and the like may be provided in the region on the central side of the concave surface 7a.
  • the central portion 65 may be shaped in consideration of the functions of the electronic components and the like. For example, when an ultrasonic sensor or an ultrasonic receiving unit is provided, the central portion 65 may have an opening through which ultrasonic waves pass.
  • the material of the support 13 may be appropriate.
  • the material of the support 13 may be metal, ceramic or resin, or a combination thereof.
  • FIG. 5 is a perspective view showing a part of an example of the outer surface 13b (the surface opposite to the affected portion 103) of the support 13.
  • the support 13 is in a state before the flat plate element 11 is attached.
  • the change in the width of the partition portion 67 is not drawn for easy illustration.
  • a recess 13r into which the flat plate element 11 is roughly fitted may be formed on the surface (here, the outer surface 13b) of the support 13 on which the flat plate element 11 is arranged.
  • the support 13 may be provided with a positioning portion for positioning the flat plate element 11. In this case, the positioning accuracy of the flat plate element 11 with respect to the support 13 can be improved, and thus the accuracy of ultrasonic focusing can be improved.
  • the depth of the recess 13r may be smaller, equal to, or larger than the thickness of the flat plate element 11.
  • the play between the inner peripheral surface of the recess 13r and the outer peripheral surface (side surface) of the flat plate element 11 may be appropriately set.
  • a convex portion located around the arrangement region of the flat plate element 11 may be provided instead of the concave portion 13r. Further, the support 13 does not have to have such a positioning portion.
  • the cross-sectional shape of the partition portion 67 and the annular portion 69 is a shape in which a convex portion is formed on the outer surface 13b side in a substantially rectangular shape because the concave portion 13r is provided.
  • the existence of the concave portion 13r (and the convex portion around the concave portion) is basically ignored.
  • FIG. 6 is a plan view or a developed view showing an enlarged area VI of FIG.
  • the plurality of element rows 8 are referred to as element rows 8A, 8B, and 8C in order from the inside of the concave surface 7a (lower side of the paper surface, side of the central portion 65).
  • the partition portion 67 has a width (a length in the circumferential direction of the concave surface 7a and a length in the left-right direction of the paper surface) in the direction from the inside to the outside of the concave surface 7a ( It is the radial direction of the concave surface 7a, and is different depending on the position in the vertical direction of the paper surface. For convenience, it may be the length direction. More specifically, for example, the width of the partition portion 67 in the element trains 8B and 8C becomes narrower toward the outside of the concave surface 7a. The rate of change is constant.
  • the partition portion 67 in the element trains 8B and 8C has an isopod shape in which the inside of the concave surface 7a is on the lower bottom side.
  • the degree of inclination of the trapezoidal legs may be set appropriately.
  • the width of the partition portion 67 changes in the thickness direction of the partition portion 67 (the direction perpendicular to the paper surface)
  • the dimension of the portion having the largest width may be regarded as the width.
  • the width of the partition portion 67 in the element train 8A is constant in the length direction.
  • the width of the partition portion 67 may differ depending on the position in the length direction.
  • the shape of the partition portion 67 is, for example, a shape in which the width becomes wider toward the outside of the concave surface 7a (for example, trapezoidal shape), contrary to the illustrated example. Can be mentioned. Further, for example, a shape in which the width change is not continuous can be mentioned. In other words, a shape in which a step is formed on the side surface, such as a partition portion 67 whose side surface (the portion serving as a trapezoidal leg in FIG. 6) is stepped, can be mentioned. Further, for example, a shape having a curved side surface can be mentioned.
  • At least one of the shapes and dimensions of the plurality of partition portions 67 is different from each other in the plurality of element rows 8. More specifically, in the illustrated example, in each partition portion 67, the width inside the concave surface 7a (the end on the central side in the radial direction) is w1, and the width on the outside of the concave surface 7a (the end on the outer peripheral side in the radial direction). When w2 is set to w2, w1-w2 is larger as the partition portion 67 located outside the concave surface 7a (the partition portion 67 in the element row 8 located on the outer peripheral side in the radial direction).
  • w1 w2 in the innermost partition 67, and w1-w2 ⁇ 0 in all the partition 67.
  • the relationship that w1-w2 becomes larger as the outer partition portion 67 is satisfied is satisfied in the embodiment where w1-w2 ⁇ 0. It doesn't matter.
  • w1 and w2 may be set so that w1-w2 ⁇ 0 at least in the outermost element row 8.
  • the width w2 (minimum width from another viewpoint) of the partition portion 67 is substantially the same among the plurality of element rows 8.
  • the widths w2 of the element rows 8 may be different from each other.
  • the method of fixing the flat plate element 11 to the support 13 may be appropriate.
  • the flat plate element 11 and the support 13 are joined by a joining material 17 interposed between them.
  • the bonding material 17 may be an organic material, an inorganic material, an insulating material, or a conductive material.
  • the bonding material 17 may be made of resin or metal.
  • the bonding material 17 may be a material that becomes an elastic body after curing (for example, an elastic adhesive).
  • the bonding material 17 may be made of silicone or urethane. These may be one-component or two-component.
  • the bonding material 17 as an elastic body may have an elongation rate of 35% or more when torn in a tensile test after curing.
  • the flat plate elements 11 may be separated from each other (example shown in FIG. 5) or may be in contact with each other. Further, the flat plate elements 11 may be directly fixed to each other (for example, a bonding material 17 which is in close contact with both may be provided), or may not be directly fixed to each other.
  • the frequency of ultrasonic waves, the dimensions of each part of the radiating instrument 3, and the like may be appropriately set.
  • the frequency of the ultrasonic wave generated by the radiating instrument 3 may be 0.5 MHz or more and 2 MHz or less.
  • the diameter of the generating portion 7 (diameter in the plane including the outer edge of the concave surface 7a) may be 50 mm or more and 200 mm or less.
  • the equivalent circle diameter of the flat plate element 11 or the length of one side of the trapezoid may be 5 mm or more and 20 mm or less.
  • the equivalent circle diameter of the piezoelectric element 15 may be 0.2 mm or more and 2 mm or less.
  • the thickness of the element substrate 19 may be 50 ⁇ m or more and 200 ⁇ m or less.
  • the thickness of the vibrating layer 23 and the thickness of the piezoelectric layer 27 may be 20 ⁇ m or more and 100 ⁇ m or less within a range consistent with the thickness of the element substrate 19.
  • the thickness of each of the first conductor layer 25 (first electrode 31) and the second conductor layer 29 (second electrode 33) may be 0.05 ⁇ m or more and 5 ⁇ m or less.
  • the thickness of the support 13 may be equal to or greater than the thickness of the element substrate 19.
  • the shape, size and material of the bag 9 may be appropriately set.
  • the shape of the bag 9 may be a shape that bulges outward as a whole, such as a spherical shape.
  • the radiating instrument 3 when it is intended for a specific part of the human body, it has a shape having a convex portion and / or a concave portion in accordance with the concave portion and / or the convex portion of the specific portion. May be good.
  • the material of the bag 9 has at least the property of not allowing the liquid LQ to pass through (so-called water-shielding property) and flexibility. Further, the material of the bag 9 may be an elastic body.
  • a thermosetting elastomer as a material for the bag 9, a thermosetting elastomer (so-called rubber), a thermoplastic elastomer (elastomer in a narrow sense), and a resin not containing these elastomers (resin in a narrow sense, but having flexibility) are used. You can.
  • the thermosetting elastomer include vulcanized rubber (rubber in a narrow sense) and a thermosetting resin-based elastomer.
  • the bag 9 is filled with the liquid LQ at least when the ultrasonic device 1 is used.
  • the bag 9 (radiating device 3) may be, for example, one in which the liquid LQ is sealed at the distribution stage, or one in which the liquid LQ is sealed at the time of use. Further, the bag 9 (radiating device 3) may or may not have, for example, an openable / closable port for supplying (and / or discharging) the liquid LQ into the bag 9. It may be a thing.
  • Various known structures may be used for the opening / closing structure of the port.
  • the bag 9 has an opening 9a on the generating portion 7 side. Then, a part of the generating portion 7 including the concave surface 7a is in contact with the liquid LQ in the bag 9 through the opening 9a. On the other hand, a part of the generating portion 7 including the surface opposite to the concave surface 7a is not in contact with the liquid LQ of the bag 9, but is in contact with the gas (for example, air) around the radiating instrument 3.
  • the gas for example, air
  • the structure for reducing the leakage of the liquid LQ from between the edge portion of the opening 9a and the generating portion 7 may be various known sealing structures.
  • the bag 9 and the generating portion 7 may be closely joined by being adhered by an adhesive or being welded or welded by melting at least one of the bag 9 and the generating portion 7.
  • a string or a ring is formed around the opening 9a of the bag 9 from the outside in a state where the inner peripheral surface near the opening 9a of the bag 9 is pressed against the outer peripheral surface of the generating portion 7. It may be tightened by a shaped fastener.
  • a ring-shaped packing is pressed from the outside near the opening 9a of the bag 9, and a string or a string or a string or a string or a packing is pressed from the outside.
  • the packing may be tightened with a ring-shaped fastener.
  • the bag 9 is provided with an inflexible (rigid) ring-shaped member constituting the vicinity of the opening 9a, a female screw is provided inside the ring-shaped member, and a male screw is provided on the outer surface of the generating portion 7. , Both may be screwed together. Then, packing may be appropriately arranged in this screwing structure.
  • the support 13 and the flat plate element 11 are shown as the configuration of the generating portion 7.
  • the bag 9 may be attached to, for example, the edge 63 of the support 13.
  • the edge portion 63 is shown as a flat plate-shaped member in FIG. 2, it may have a shape suitable for fixing to the bag 9. Further, a member having an appropriate shape may be provided between the edge portion 63 and the bag 9.
  • the connection position between the generating portion 7 and the opening 9a is located between the concave surface 7a and the back surface thereof, but the connection position is located on the patient 101 side or the like with respect to the concave surface 7a. Alternatively, it may be located on the side opposite to the patient 101 from the back surface of the concave surface 7a.
  • the bag 9 may wrap around the generating portion 7 on the opposite side of the patient 101, and the liquid LQ may wrap around the generating portion 7 on the opposite side of the patient 101.
  • a cover surrounding the second surface 15b of the piezoelectric element 15 may be provided to isolate the second surface 15b of the piezoelectric element 15 from the liquid LQ.
  • FIG. 7 is an enlarged view of a part of FIG.
  • the first surface 15a on the patient 101 side is in contact with the liquid LQ
  • the second surface 15b on the opposite side is in contact with the gas GS (for example, air).
  • the gas GS for example, air
  • the apparatus main body 5 includes, for example, a drive control unit 41 for inputting a drive signal to the radiation device 3, a moving unit 43 for moving the radiation device 3, and an input unit 45 for receiving a user's input operation. It has an output unit 47 that presents information to the user.
  • the drive control unit 41 is connected to the first electrode 31 of the generation unit 7 and the plurality of second electrodes 33 via, for example, a cable 49.
  • the drive control unit 41 has a drive unit 51 that inputs a drive signal to the first electrode 31 and the second electrode 33, and a control unit 53 that controls the drive unit 51.
  • the division of roles between the drive control unit 41 and the electric circuit in the radiating appliance 3 may be appropriately set. For example, a part or all of the operation of the drive unit 51 described below may be performed by the radiating device 3. From another point of view, a part or all of the drive unit 51 may be provided in the radiating device 3.
  • the drive unit 51 converts power from a commercial power source or the like into AC power having a waveform (for example, frequency and voltage (amplitude)) specified by the control unit 53 and inputs the power to the first electrode 31 and the second electrode 33.
  • the drive signal is AC power having a frequency substantially equal to the frequency of the ultrasonic wave intended to be radiated and having a voltage corresponding to the amplitude of the intended ultrasonic wave.
  • the drive signal may have an appropriate shape such as a square wave (pulse), a sine wave, a triangular wave, or a sawtooth wave.
  • control unit 53 includes a computer including a CPU (Central Processing Unit), a ROM (Read Only Memory), a RAM (Random Access Memory), an external storage device, and the like.
  • a functional unit that performs various controls is constructed.
  • the control unit 53 sets the waveform (for example, frequency and voltage (amplitude)) of the drive signal output by the drive unit 51 based on the signal from the input unit 45, and also sets the waveform of the drive signal from the drive unit 51. Controls the start and stop of output.
  • waveform for example, frequency and voltage (amplitude)
  • the moving unit 43 includes, for example, a holding mechanism for holding the radiating device 3 and a drive source (for example, a motor) for applying power to move the radiating device 3 to the holding mechanism. ing.
  • a moving unit 43 may have the same configuration as, for example, an articulated robot, a SCARA robot, or a Cartesian robot.
  • the moving unit 43 moves the radiating device 3 relative to the patient 101 based on a control command from the control unit 53. This relative movement may include, for example, the movement of the radiating device 3 closer to the patient 101 and / or the movement for positioning to position the focus of the ultrasound on the affected area 103.
  • the control unit 53 controls the moving unit 43 based on a signal from the input unit 45 and / or a signal from a sensor (not shown) that identifies the position of the affected area 103 or the like.
  • the moving unit 43 may not be provided, or the driving source in the moving part 43 may not be provided, and the radiating instrument 3 may be transported and positioned by human power.
  • the input unit 45 includes, for example, a keyboard, a mouse, a mechanical switch and / or a touch panel.
  • the input unit 45 receives, for example, an operation for setting the frequency and amplitude of the ultrasonic wave radiated from the radiating apparatus 3, and an operation for instructing the start and stop of the ultrasonic wave radiation.
  • the output unit 47 includes, for example, a display device and / or a speaker. The output unit 47 presents, for example, information on the frequency and amplitude of the ultrasonic wave currently set.
  • the ultrasonic radiating instrument 3 has a plurality of flat plate elements 11.
  • Each of the plurality of flat plate elements 11 has a radiation surface 11a that emits ultrasonic waves, and the radiation surface 11a is arranged in parallel with each other toward a common focusing region (affected portion 103).
  • Each of the plurality of flat plate elements 11 has a plurality of vibration elements (piezoelectric elements 15) that generate vibrations that generate ultrasonic waves at a plurality of positions within the radiation surface 11a.
  • the generating unit 7 can focus the ultrasonic waves toward the center of curvature of the concave surface.
  • the flat plate element 11 can be manufactured by the same method as the method for manufacturing a normal circuit board or the like. As a result, manufacturing costs are reduced. Further, for example, it becomes easy to evenly irradiate the focused ultrasonic wave to a relatively wide focusing region (affected portion 103).
  • FIGS. 8 (a) and 8 (b) are schematic views for explaining the effect of irradiating the above-mentioned wide focusing region with ultrasonic waves. Specifically, FIGS. 8 (a) and 8 (b) schematically show the state of focusing of ultrasonic waves in the present embodiment and the comparative example.
  • the radial surface 151a is composed of, for example, a single plate-shaped lens member, and a plurality of piezoelectric elements 15 (strictly, those corresponding to the piezoelectric elements 15; not shown here) are formed behind the lens member. It is arranged. Then, the lens member focuses the ultrasonic waves generated by the plurality of piezoelectric elements 15 on the focal point P1.
  • the focal point P1 is theoretically a point, and ultrasonic waves are focused in a relatively narrow range.
  • the ultrasonic waves radiated from the flat plate element 11 are applied to the focusing region R1 with the same width (beam width) radiated from the flat plate element 11. Then, the ultrasonic waves of the plurality of flat plate elements 11 are focused. Therefore, the focusing region R1 is theoretically a region having a width similar to the width of the ultrasonic wave radiated from the flat plate element 11. Then, within the width of the focusing region R1, the intensity of the ultrasonic waves is almost the same. Depending on the size of the affected area 103, the type of disease, and the like, the formation of such a focused region R1 is efficient and / or safe.
  • each flat plate element 11 has a plurality of piezoelectric elements 15, the resonance frequency of the piezoelectric element 15 and the area of the flat plate element 11 can be set separately. As a result, it is easy to obtain a desired drive frequency and a desired beam width. As a result, it becomes easy to obtain the effect of the flat plate element 11 described with reference to FIG. 8A at a desired drive frequency.
  • the radiating appliance 3 has a support 13 that holds the outer edges of the plurality of flat plate elements 11 in an arrangement in which the plurality of radiating surfaces 11a form the concave surface 7a.
  • the plurality of flat plate elements 11 are arranged in a plurality of rows in the circumferential direction of the concave surface 7a to form a plurality of annular element rows 8.
  • the support 13 has a plurality of partition portions 67 arranged in the circumferential direction, and each partition portion 67 is an edge portion (adjacent to each other) of the flat plate elements 11 adjacent to each other in the circumferential direction. (See leg 11f).
  • the width of the concave surface 7a of each of the plurality of partition portions 67 in the circumferential direction differs depending on the position from the inside to the outside of the concave surface 7a. That is, assuming that the direction along the outer circumference of the concave surface 7a is the circumferential direction and the direction from the center of the concave surface 7a to the outer circumference is the radial direction, a plurality of flat plate elements 11 are arranged and configured along the circumferential direction of the concave surface 7a. A plurality of annular element rows 8 are provided in the radial direction.
  • the support 13 has a plurality of partition portions 67 located between the flat plate elements 11 adjacent to each other in the circumferential direction in each of the element rows 8, and the partition portions 67 are adjacent to each other in the circumferential direction. It holds the edges of the flat plate elements 11 that are adjacent to each other.
  • Each of the plurality of partition portions 67 in at least one element row 8 has a different length in the circumferential direction depending on the position in the radial direction in each partition portion 67.
  • the vibration energy of the piezoelectric element 15 when transmitted to the partition portion 67, the probability that the partition portion 67 vibrates significantly at a specific frequency can be reduced.
  • the degeneracy of the vibration mode can be solved by the decrease in symmetry in the shape of the partition portion 67, and the resonance frequencies of the plurality of vibration modes can be made different from each other. As a result, it is possible to reduce the probability that the amplitude will increase at a specific frequency.
  • the edge portions (legs 11f) of the flat plate elements 11 adjacent to each other in the circumferential direction are linear, and the concave surfaces 7a of each of the plurality of partition portions 67 are in the circumferential direction.
  • the concave surfaces 7a of each of the plurality of partition portions 67 are in the circumferential direction.
  • it has one or more annular element rows 8 in the radial direction, and the edges of the flat plate elements 11 adjacent to each other in the circumferential direction are linear, and a plurality of partition portions 67
  • Each of the above has a different length in the circumferential direction depending on the position in the radial direction in each partition portion 67.
  • both edges may be parallel to each other to maximize the area of the flat plate elements 11. It is conceivable (such aspects may also be included in the art according to the present disclosure). Further, it is conceivable that the width of the partition portion 67 located at the boundary of such a flat plate element 11 is constant (such an aspect may also be included in the technique according to the present disclosure). However, in the present embodiment, the width of the partition portion 67 is intentionally made not constant, and the effect of solving the degeneracy of the vibration mode is obtained.
  • At least one of the shapes and dimensions of the plurality of partition portions 67 is different from each other in the plurality of element rows 8.
  • each partition portion 67 the same effect as that of reducing the probability that the amplitude becomes large at a specific frequency due to the decrease in symmetry in the shape of each partition portion 67 is exerted on the entire support 13.
  • the resonance frequency of the partition portion 67 in one element row 8 and the resonance frequency of the partition portion 67 in the other element row 8 deviate from each other, so that the partition in both element rows 8 at a specific frequency. The probability that both parts 67 vibrate greatly is reduced.
  • the partition portion 67 located outside the concave surface 7a is w1.
  • -W2 is large. That is, in each of the plurality of partition portions 67, when the circumferential length at the central end in the radial direction is w1 and the circumferential length at the outer peripheral end in the radial direction is w2, the outer circumference in the radial direction.
  • the w1-w2 is larger as the partition portion 67 in the element row 8 located on the side is larger.
  • the flat plate element 11 has a trapezoidal shape.
  • the outer edge of the flat plate element 11 is the first edge portion (upper bottom 11d) forming the inner side (center side in the radial direction) of the concave surface 7a of the outer edge, and the outer edge.
  • the second edge (lower bottom 11e) which constitutes the outer side (outer peripheral side in the radial direction) of the concave surface 7a, faces the first edge, and is longer than the first edge, and the first edge. It has a pair of third edge portions (legs 11f) that connect both ends of the portion and both ends of the second edge portion. The length of the second edge is shorter than the distance between the first edge and the second edge (height of the trapezoid).
  • the flat plate element 11 can be arranged on the concave surface 7a at a high density.
  • the concave surface 7a is a portion of less than half of the spherical surface, the curvature of the latitude line is larger than the curvature of the meridian line. Therefore, when trying to approximate a plurality of connected planes (flat plate element 11) to a spherical surface, it is better to increase the number of divisions of the spherical surface in the direction along the latitude line than in the direction along the meridian.
  • the shape formed by the parallel plane is similar to a spherical surface.
  • the gap between the flat plate elements 11 arranged along the spherical surface can be reduced. That is, the flat plate element 11 can be arranged at a high density.
  • one or more rows of element rows 8 include rows in which the number of flat plate elements 11 is an odd number (element rows 8 on the innermost circumference and the outermost circumference in the example of FIG. 2).
  • the element row 8 of one or more rows is a row in which the number of flat plate elements 11 is a prime number (a prime number that is not an even number, that is, a prime number excluding 2) (in the example of FIG. 2, the innermost circumference and the outermost circumference). 8) is included.
  • each of the plurality of flat plate elements 11 has an element substrate 19 and a cavity member 21.
  • the element substrate 19 includes a plurality of piezoelectric elements 15, and the surface on the focusing region R1 side is flat over the plurality of piezoelectric elements 15.
  • the cavity member 21 overlaps the surface of the element substrate 19 on the focusing region R1 side, and has a plurality of openings (cavities 21c) that individually overlap the plurality of piezoelectric elements 15.
  • the plurality of flat plate elements 11 overlap the support 13 from the side opposite to the focusing region R1 side.
  • the support 13 has an opening 13h that overlaps the entire plurality of piezoelectric elements 15 for each flat plate element 11.
  • a wave in a direction greatly inclined with respect to the normal line of the first surface 15a to the first surface 15a of the piezoelectric element 15 is blocked (for example, reflected) by the inner surface of the cavity 21c. Therefore, the directivity of the ultrasonic waves radiated from the flat plate element 11 can be improved. Further, the inner surface of the opening 13h of the support 13 can also exert the same effect. Further, since the plurality of cavities 21c are individually overlapped with the plurality of piezoelectric elements 15, it is possible to reduce the possibility that ultrasonic waves from the plurality of piezoelectric elements 15 interfere with each other. As a result, for example, the probability that an ultrasonic component of unintended amplitude, frequency or direction will occur is reduced.
  • the cavity member 21 overlaps the element substrate 19, for example, vibration around the region (piezoelectric element 15) of the element substrate 19 overlapping the cavity 21c is suppressed, and the piezoelectric element 15 resonates. Contributes to increasing the frequency. As a result, it becomes easy to generate ultrasonic waves, which are sound waves having a relatively high frequency, and / or to generate sound waves having a relatively high frequency in the frequency band of ultrasonic waves.
  • the radiating device 3 has a bag 9 in which a liquid is sealed.
  • the surface of the plurality of flat plate elements 11 on the focusing region R1 side is in contact with the liquid in the bag 9.
  • the surface of the plurality of flat plate elements 11 opposite to the focusing region R1 is in contact with the gas.
  • the radiating surface 11a of the flat plate element 11 (from another viewpoint, the first surface 15a of the piezoelectric element 15) is in direct contact with the liquid LQ
  • the vibration generated in the piezoelectric element 15 is directly in contact with the liquid LQ. Is told to.
  • the patient 101 can be efficiently irradiated with ultrasonic waves via the liquid LQ.
  • ultrasonic waves are reflected at the interface between the first surface 15a and the solid and / or the interface between the solid and the liquid LQ. Or, the ultrasonic waves leak through the solid in the plane direction of the first surface 15a.
  • FIG. 9 is a cross-sectional view corresponding to FIG. 4, showing the configuration of the radiating instrument 203 according to the second embodiment.
  • the radiation device 203 is different from the radiation device 3 of the first embodiment only in the shape of the support (and the joining material 17).
  • the support 13 of the first embodiment has an opening 13h that overlaps the plurality of piezoelectric elements 15 for each flat plate element 11, whereas the support 213 according to the present embodiment has a plurality of openings. It has a plurality of openings 213h that individually overlap the piezoelectric element 15.
  • the planar shape and the dimensions of the opening 213h in the planar view may be the same as the planar shape of the cavity 21c and the dimensions in the planar view (illustrated example), or may be different. Further, in any case, the description of the shape and size of the cavity 21c may be incorporated into the shape and size of the opening 213h.
  • the bonding material 17 having the same reference numerals as those in the first embodiment has an opening that overlaps the cavity 21c and the opening 213h, although it is not particularly designated.
  • the planar shape and dimensions of the opening are basically the same as the planar shape and dimensions of the cavity 21c and / or the opening 213h. However, they may be different. Further, it is the same as in the first embodiment that the bonding material 17 does not necessarily have to be provided.
  • the support 213 holds the edge of the flat plate element 11 as in the support 13 of the first embodiment. However, the support 213 does not have a portion that can be conceptualized as a partition portion 67 and an annular portion 69.
  • the plurality of flat plate elements 11 overlap the support 213 from the side opposite to the focusing region R1 (see FIG. 8A).
  • the support 213 has a plurality of openings 213h that individually overlap the plurality of piezoelectric elements 15.
  • the opening 213h of the support 213 has the same effect as the cavity 21c.
  • the effect already described for the cavity 21c is improved.
  • the effect of reducing the probability that ultrasonic waves from a plurality of piezoelectric elements 15 interfere with each other is improved.
  • the effect of suppressing the vibration around the piezoelectric element 15 in the element substrate 19 and increasing the resonance frequency of the piezoelectric element 15 is improved.
  • the displacement of the portion where the cavity member 21 is not joined to the support 13 is constrained by the support 213, and the probability that unnecessary vibration occurs is reduced.
  • the joint area between the cavity member 21 and the support 213 increases, both of them reinforce each other. As a result, for example, the probability that unnecessary vibration will occur in the support 213 can be reduced.
  • FIG. 10 is a cross-sectional view corresponding to FIG. 4, showing the configuration of the radiation device 303 according to the third embodiment.
  • the radiating instrument 303 is different from the radiating instrument 203 of the second embodiment only in that the cavity member 21 is not provided. From another viewpoint, in the third embodiment, the flat plate element 311 is configured only by the element substrate 19.
  • the element substrate 19 and the support 213 overlap each other via a bonding material 17 in contact with both.
  • the bonding material 17 does not have to be provided as in the first embodiment.
  • the element substrate 19 and the support 213 may be in direct contact with each other.
  • the number of members can be reduced to simplify the structure. As a result, for example, cost reduction is expected.
  • the element substrate 19 and the support 213 are combined. Regarding the positional relationship, the error at each joint is integrated.
  • the present embodiment since there is only one bond between the element substrate 19 and the support 213, the misalignment between the two is reduced.
  • FIG. 11 is a cross-sectional view corresponding to FIG. 4, showing the configuration of the radiation device 403 according to the fourth embodiment.
  • FIG. 11 shows an example of a structure in which a plurality of second electrodes 33 and an electric circuit in the radiation device 403 are connected. A drive signal from the drive unit 51 is input to the plurality of second electrodes 33 via this connection structure.
  • the flat plate element 311 of the third embodiment is shown as the configuration of the flat plate element.
  • the connection structure shown in this embodiment may be applied to the first or second embodiment.
  • the second conductor layer 29 may have wiring (not shown) connected to the plurality of second electrodes 33 in addition to the plurality of second electrodes 33.
  • a plurality of drawer electrodes 71 which is an example of such wiring, are shown.
  • the extraction electrode 71 is provided for each of the second electrodes 33.
  • the extraction electrode 71 has a shape extending from the second electrode 33 with a width smaller than the diameter of the second electrode 33, for example.
  • the specific length, width, and extending direction of the extraction electrode 71 may be appropriately set.
  • the extraction electrode 71 extends to the outside of the opening 213h (cavity 21c in the first and second embodiments; the same applies hereinafter), for example.
  • Bump 73 is arranged on at least a part of the extraction electrode 71.
  • the bump 73 may be composed of, for example, a conductive bonding material such as solder, or may be composed of an appropriate one or more metals (for example, Cu, Ag and / or Ti, etc.) that are not used as the bonding material. It may have been done. Solder includes lead-free solder.
  • the bump 73 is arranged on, for example, a portion of the extraction electrode 71 located outside the opening 213h. The bump 73 may not be provided.
  • the extraction electrode 71 (at least a part thereof; a portion located outside the opening 213h in the illustrated example) and the bump 73 constitute a receiving terminal 75 into which a drive signal is input.
  • the receiving terminal 75 is located between the plurality of piezoelectric elements 15 in the plan view of the flat plate element 311. In other words, the receiving terminal 75 is located in the non-arranged region of the plurality of piezoelectric elements 15 in the convex polygon, assuming the smallest circular or convex polygon including the plurality of piezoelectric elements 15. .. At least a part of the receiving terminal 75 may be located in a region between the piezoelectric elements 15 adjacent to each other. In this case, the piezoelectric elements 15 adjacent to each other may be the piezoelectric elements 15 adjacent to each other in any of the vertical direction, the horizontal direction, and the oblique direction in the example of FIG.
  • a wiring for example, a cable
  • a cable for example, a cable
  • the radiation device 403 is configured to be connected to the extraction electrode 71 (reception terminal 75), and is located on the back surface of the flat plate element 311 opposite to the focusing region R1 (FIG. 8A). It has a member 77 and a pogo pin 79 that electrically connects the flat plate element 311 and the back surface member 77.
  • the back member 77 is configured to include, for example, a rigid type printed wiring board.
  • the printed wiring board has, for example, an insulating substrate 80 facing the flat plate element 311 and a wiring 83 (conductor layer) overlapping the surface of the substrate 80 on the flat plate element 311 side.
  • the drive signal from the drive unit 51 is supplied to the wiring 83 via the cable 49 (FIG. 1), and is input to the second electrode 33 via the pogo pin 79.
  • the material and basic structure of the printed wiring board may be the same as various known printed wiring boards.
  • the back member 77 is fixed to the support 213 by, for example, a fixture (for example, a screw) (not shown), and is fixed to the flat plate element 311.
  • the back member 77 may have a special structure that does not include a general printed wiring board.
  • the back surface member 77 has, for example, a structure (rigid type) that can be regarded as a substantially rigid body, and also has a conductor (wiring 83) exposed on the flat plate element 311 side.
  • the back surface member 77 may be fixed to a housing located on the side opposite to the focusing region R1 with respect to the support 213 and the plurality of flat plate elements 311 or may be a member treated as a part of the housing. Good.
  • the back member 77 may be provided for each flat plate element 311 or may be provided in common for a plurality of (all or a part of the radiation fixture 403) flat plate elements 311 or one. A plurality may be provided for the flat plate element 311.
  • the pogo pin 79 is a component having various other names such as a contact probe and a spring pin.
  • the pogo pin 79 has, for example, a plunger 85, a barrel 87 accommodating a rear end side (upper part of the figure) of the plunger 85, and a plunger 85 relative to the barrel 87 at the tip of the plunger 85. It has a spring 89 that urges the side (lower part of the figure).
  • the plunger 85 is axially movable with respect to the barrel 87. As a result, the pogo pin 79 is stretchable as a whole.
  • the spring 89 extends the pogo pin by its restoring force.
  • the plunger 85 and the barrel 87 (and the spring 89) are made of, for example, metal (ie, a conductor).
  • the specific configuration of the pogo pin 79 is not limited to the illustrated example, and may be various known configurations or configurations to which known configurations are applied.
  • the spring 89 is housed in the barrel 87, but may not be housed.
  • the spring 89 and the plunger 85 are in direct contact with each other, but a sphere may be interposed between them.
  • the barrel 87 is fixed to the wiring 83, for example, and is electrically connected to the wiring 83.
  • the tip of the plunger 85 is in contact with the receiving terminal 75 (more specifically, the bump 73).
  • the spring 89 urges the plunger 85 toward the receiving terminal 75 by its restoring force. As a result, the wiring 83 and the receiving terminal 75 are electrically connected.
  • the barrel 87 and the wiring 83 may be fixed by an appropriate method. For example, both may be joined by a conductive bonding material such as solder. Further, for example, the barrel 87 may be fixed to the back surface member 77 in a state of being in contact with the wiring 83 by fitting, press-fitting and / or engaging. The tip of the plunger 85 may only be pressed against the bump 73 or may be joined.
  • the two or more second electrodes 33 may be given the same potential or different potentials from each other.
  • the plurality of pogo pins 79 are connected to the same wiring 83, and the same potential is applied to the plurality of second electrodes 33.
  • the plurality of pogo pins 79 may be connected to different wirings 83 (the plurality of second electrodes 33 may be provided with different potentials).
  • the radiation device 403 has a plurality of conductive components (pogo pins 79) electrically connected to the plurality of flat plate elements 311.
  • Each of the plurality of flat plate elements 311 has a receiving terminal 75 that is exposed on the side opposite to the focusing region R1 and is located between the plurality of vibrating elements (piezoelectric elements 15) in the plan view of the flat plate element 311.
  • Each of the plurality of pogo pins 79 has a supply terminal (plunger 85) that is in contact with the receiving terminal 75 from the side opposite to the focusing region R1 (including a joined mode), and the plunger 85 is directed toward the receiving terminal 75. It has an elastic member (spring 89) that is urged.
  • the reliability of the electrical connection of the flat plate element 311 is improved.
  • the piezoelectric element 15 As compared with a mode in which the bump 73 is formed of solder and the bump 73 is directly joined to the wiring 83 (the mode may also be included in the technique according to the present disclosure), the piezoelectric element 15 The stress caused by the vibration is absorbed by the spring 89. As a result, for example, the stress repeatedly applied to the bump 73, the extraction electrode 71 and / or the wiring 83 due to the vibration of the piezoelectric element 15 is relaxed, and the possibility of disconnection due to fatigue failure is reduced.
  • the receiving terminal 75 is pressed by the restoring force of the spring 89. Therefore, the vibration of the flat plate element 311 at the position of the receiving terminal 75 is likely to be reduced. As a result, for example, the deformation that repeatedly occurs in the extraction electrode 71 due to the vibration of the piezoelectric element 15 is reduced, and the probability that the wire breaks due to fatigue fracture is reduced.
  • the configuration of the conductive component (pogo pin 79) of this embodiment may be appropriately modified.
  • the tip of the plunger 85 may be widened.
  • the tip portion may have a larger diameter (cross section from another point of view) than the portion that is taken in and out of the barrel 87.
  • the probability that the receiving terminal 75 and the pogo pin 79 will not be in contact due to the misalignment is reduced. That is, the reliability of the connection between the two is improved.
  • the degree of diameter expansion of the tip portion in such an embodiment may be appropriately set.
  • one plunger 85 may have a tip portion having a size extending over a plurality of receiving terminals 75 and may be in contact with the plurality of receiving terminals 75.
  • the number of pogo pins 79 can be reduced.
  • the number of receiving terminals 75 that the tip end portion of one plunger 85 contacts may be appropriately set, and may be, for example, all receiving terminals 75 possessed by one flat plate element 311. It may be a part of the receiving terminals 75 included in the flat plate element 311.
  • a conductor having a width extending over the plurality of receiving terminals 75 may be interposed between the tip of one plunger 85 and the plurality of receiving terminals 75.
  • the receiving terminals 75 were individually provided for all the second electrodes 33. However, by connecting the plurality of (all or part of the flat plate element 311) of the second electrodes 33 to each other by the wiring included in the second conductor layer 29, the receiving terminals are commonly received for the plurality of second electrodes 33. 75 may be provided. Then, the pogo pin 79 may be pressed against the receiving terminal 75.
  • the conductive component is not limited to the pogo pin 79.
  • the entire spring terminal may be a leaf spring or a coil spring.
  • a part of the spring terminal in contact with the receiving terminal 75 may be regarded as a supply terminal, and the remaining part may be regarded as an elastic member.
  • the terminal structure including the elastic member as described above may be applied to the first electrode 31 as well.
  • a through conductor penetrating the piezoelectric layer 27 and having a lower end connected to the first electrode 31 and a receiving terminal connected to the upper end of the penetrating conductor are provided to receive the receiving. Pogo pins may be pressed against the terminals.
  • the pogo pin 79 is an example of a conductive component.
  • the plunger 85 is an example of a supply terminal.
  • the spring 89 is an example of an elastic member.
  • the ultrasonic radiation device and the ultrasonic device are not limited to those used for treatment.
  • it may be used in an ultrasonic diagnostic apparatus that captures a secondary image of a patient's cross section.
  • it may be used not only in the medical field but also in various fields for energy application and / or distance measurement.
  • the plurality of flat plate elements may not be arranged so as to form a concave surface.
  • the plurality of flat plate elements may be arranged on the same plane as a plurality of slats of a blind, and may be arranged at different angles with respect to the plane so as to face a common focusing region.
  • the vibrating element is not limited to the one in which the piezoelectric body itself bends and deforms.
  • the vibrating element may have a structure including a diaphragm forming a radial surface and a piezoelectric body behind the diaphragm that expands and contracts in a direction intersecting the radial surface to bend and deform the diaphragm.
  • the piezoelectric element in which the piezoelectric body itself bends and deforms is not limited to the unimorph type shown in the embodiment, and may be, for example, a bimorph type in which piezoelectric bodies having different polarization directions are laminated.
  • Ultrasonic device 1 ... Ultrasonic device, 3 ... Ultrasonic radiation device, 11 ... Flat plate element, 11a ... Radiation surface, 15 ... Piezoelectric element (vibration element), R1 ... Focusing area.

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PCT/JP2020/012086 2019-03-29 2020-03-18 超音波放射器具及び超音波装置 Ceased WO2020203317A1 (ja)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2024509097A (ja) * 2021-02-26 2024-02-29 アンスティチュ ナショナル ドゥ ラ サンテ エ ドゥ ラ ルシェルシュ メディカル 集束超音波の放出のための治療用超音波トランスデューサ
JP2024102263A (ja) * 2022-04-14 2024-07-30 平田機工株式会社 超音波治療装置及び流体回路セット

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06261908A (ja) * 1993-03-15 1994-09-20 Toshiba Corp 超音波送波器およびこの送波器を備えた結石破砕装置
JPH0871079A (ja) * 1994-09-06 1996-03-19 Toshiba Ceramics Co Ltd 超音波発生装置
JP2014514951A (ja) * 2011-05-18 2014-06-26 コーニンクレッカ フィリップス エヌ ヴェ モジュール式キャビテーション感知素子を持つ球面超音波ｈｉｆｕトランスデューサ

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008093799A1 (ja) * 2007-02-02 2008-08-07 Panasonic Corporation 超音波アクチュエータ
JP2011047905A (ja) * 2009-08-28 2011-03-10 Mitsubishi Heavy Ind Ltd 超音波振動子の設置方法
EP2498920B1 (en) * 2009-11-09 2016-09-14 Koninklijke Philips N.V. Curved ultrasonic hifu transducer with pre-formed spherical matching layer
KR101173276B1 (ko) * 2010-01-18 2012-08-13 주식회사 휴먼스캔 초음파 프로브
JP2015097733A (ja) * 2013-11-20 2015-05-28 セイコーエプソン株式会社 超音波デバイスおよびその製造方法並びに電子機器および超音波画像装置
JP2018157125A (ja) * 2017-03-21 2018-10-04 セイコーエプソン株式会社 圧電素子、超音波センサー、吐出ヘッド、超音波装置、液体吐出装置及び圧電素子の製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06261908A (ja) * 1993-03-15 1994-09-20 Toshiba Corp 超音波送波器およびこの送波器を備えた結石破砕装置
JPH0871079A (ja) * 1994-09-06 1996-03-19 Toshiba Ceramics Co Ltd 超音波発生装置
JP2014514951A (ja) * 2011-05-18 2014-06-26 コーニンクレッカ フィリップス エヌ ヴェ モジュール式キャビテーション感知素子を持つ球面超音波ｈｉｆｕトランスデューサ

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2024509097A (ja) * 2021-02-26 2024-02-29 アンスティチュ ナショナル ドゥ ラ サンテ エ ドゥ ラ ルシェルシュ メディカル 集束超音波の放出のための治療用超音波トランスデューサ
JP7840977B2 (ja) 2021-02-26 2026-04-06 アンスティチュ ナショナル ドゥ ラ サンテ エ ドゥ ラ ルシェルシュ メディカル 集束超音波の放出のための治療用超音波トランスデューサ
JP2024102263A (ja) * 2022-04-14 2024-07-30 平田機工株式会社 超音波治療装置及び流体回路セット
JP7620296B2 (ja) 2022-04-14 2025-01-23 平田機工株式会社 超音波治療装置及び流体回路セット

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