WO2020193255A1 - Dispositif pour générer une répartition de puissances volumiques spatialement modulable à partir d'un rayonnement laser - Google Patents

Dispositif pour générer une répartition de puissances volumiques spatialement modulable à partir d'un rayonnement laser Download PDF

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Publication number
WO2020193255A1
WO2020193255A1 PCT/EP2020/057115 EP2020057115W WO2020193255A1 WO 2020193255 A1 WO2020193255 A1 WO 2020193255A1 EP 2020057115 W EP2020057115 W EP 2020057115W WO 2020193255 A1 WO2020193255 A1 WO 2020193255A1
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Prior art keywords
fiber
laser beams
laser
optical
arrangement
Prior art date
Application number
PCT/EP2020/057115
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German (de)
English (en)
Inventor
Thomas WESTPHALEN
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Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.
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Publication of WO2020193255A1 publication Critical patent/WO2020193255A1/fr

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/103—Scanning systems having movable or deformable optical fibres, light guides or waveguides as scanning elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
    • B22F10/30—Process control
    • B22F10/36—Process control of energy beam parameters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F12/00—Apparatus or devices specially adapted for additive manufacturing; Auxiliary means for additive manufacturing; Combinations of additive manufacturing apparatus or devices with other processing apparatus or devices
    • B22F12/22—Driving means
    • B22F12/226—Driving means for rotary motion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F12/00—Apparatus or devices specially adapted for additive manufacturing; Auxiliary means for additive manufacturing; Combinations of additive manufacturing apparatus or devices with other processing apparatus or devices
    • B22F12/40—Radiation means
    • B22F12/44—Radiation means characterised by the configuration of the radiation means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/20—Apparatus for additive manufacturing; Details thereof or accessories therefor
    • B29C64/264—Arrangements for irradiation
    • B29C64/268—Arrangements for irradiation using laser beams; using electron beams [EB]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y30/00—Apparatus for additive manufacturing; Details thereof or accessories therefor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/12—Scanning systems using multifaceted mirrors
    • G02B26/123—Multibeam scanners, e.g. using multiple light sources or beam splitters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/12—Scanning systems using multifaceted mirrors
    • G02B26/124—Details of the optical system between the light source and the polygonal mirror
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0905—Dividing and/or superposing multiple light beams
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/003—Alignment of optical elements
    • G02B7/005—Motorised alignment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
    • B22F10/20—Direct sintering or melting
    • B22F10/28—Powder bed fusion, e.g. selective laser melting [SLM] or electron beam melting [EBM]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F12/00—Apparatus or devices specially adapted for additive manufacturing; Auxiliary means for additive manufacturing; Combinations of additive manufacturing apparatus or devices with other processing apparatus or devices
    • B22F12/40—Radiation means
    • B22F12/49—Scanners
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y50/00—Data acquisition or data processing for additive manufacturing
    • B33Y50/02—Data acquisition or data processing for additive manufacturing for controlling or regulating additive manufacturing processes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00—Technologies related to metal processing
    • Y02P10/25—Process efficiency

Definitions

  • the present invention relates to a
  • the process speed is limited by various influences.
  • the machining process itself can limit the speed. This is the case, for example, in the selective laser melting (SLM) process, in which the metal powder can be remelted in practice at a maximum speed of approx. 1 m / s.
  • SLM selective laser melting
  • the available laser power or the inertia of the scanning device can also limit the process speed.
  • increasing the process speed is very important when laser processing is used in an industrial environment.
  • DOE optical element
  • the partial beams cannot be modulated spatially and temporally separately from one another, so that the range of applications of this technology is limited.
  • Each diode laser is guided by its own optical system and its own galvanometer scanner.
  • Processing plane are directed.
  • the processing head is moved over the processing plane with the aid of a movement device, while the intensity of the laser beams, which are separated from one another, can be modulated independently of one another to achieve the desired
  • the object of the present invention is to provide a device for generating a spatially modulatable power density distribution
  • the task is with the device according to
  • the proposed device has either a fiber arrangement of several optical fibers arranged next to one another in a fiber receptacle or a receiving device for a plurality of fiber plugs or
  • Fiber collimators with firmly connected optical fibers next to one another, whereby in all cases the fiber exit surfaces of the optical fibers form a one- or two-dimensional array.
  • the device also has an optical arrangement with which the optical fibers emerge from the fiber exit surfaces
  • Laser beams can be focused on a target plane, and a scanning device common to all laser beams, with which the laser beams can be guided or moved over the target plane.
  • the device is characterized by a rotating device with which at least the fiber receptacle or receiving device or a distribution of the laser beams resulting from the one or two-dimensional array around a axis running parallel to the laser beams, preferably around one with respect to the distribution of the
  • Laser beams central axis or axis of symmetry is rotatable.
  • the proposed device enables the power density distribution of the
  • Laser beams are guided through a common beam shaping and by means of a common scanning device, for example a dynamic beam deflection unit, are guided over the target plane, which corresponds to the workpiece surface during laser material processing.
  • the optical output power of the individual optical fibers can be individually modulated via the underlying laser sources or modulators connected upstream of them, so that individual laser spots can be switched on or off for processing. In this way, e.g. the total track width of the intensity distribution generated in the target plane from the individual laser spots can be varied.
  • This intensity distribution or power density distribution in the target plane can be achieved by the rotating device in the proposed device rotated and thus additionally adjusted. This is especially true when producing an elongated one
  • Optical fibers of great advantage, since, for example, the total track width when guiding the intensity distribution in the target plane first in one direction and then in the direction perpendicular thereto by corresponding rotation of the intensity profile
  • the rotation of the beam profile can be corrected, which as
  • Orientation of the beam profile can be set so that a laser processing from two orthogonal
  • Manufacturing processes such as Selective Laser Melting (SLM) are advantageous in order to increase the strength of the additively manufactured components.
  • SLM Selective Laser Melting
  • An advantageous possibility consists in making the rotation via an optical device which is arranged in the beam path of the laser beams and is rotated accordingly.
  • This is preferably a Dove prism that has a
  • Dove prism instead of the Dove prism, other optical arrangements can also be used, for example a suitable mirror arrangement which is designed to be rotatable accordingly.
  • the rotation itself is preferably implemented using a suitable rotary drive, for example an electric motor.
  • the scanning device can be a conventional dynamic beam deflection system such as a galvanometer or polygon scanner.
  • a portal axis system can also be used to move the laser beams over the target plane.
  • the scanning device can also consist of a combination
  • Device is a fiber arrangement of several in a fiber holder side by side
  • optical fibers used.
  • the optical fibers are close to one another in the fiber receptacle
  • the thickness of the fiber jacket is preferably less than four times the thickness of the fiber jacket and preferably corresponds to twice the thickness of the fiber jacket.
  • Design then has the optical arrangement preferably a collimator and focusing optics.
  • Fiber exit surfaces which are arranged and dimensioned in such a way that laser radiation emitted from the fiber exit surfaces overlaps in a first plane (in the direction of the laser beams) behind the microlenses.
  • the fill factor is significantly higher due to the larger diameter of the fiber cores with the same spacing between the individual fiber cores, so that in this case the arrangement of the microlenses and the first
  • optical arrangement can be completely dispensed with.
  • the use of a fiber receptacle for many optical fibers lying close together has the disadvantage that an exchange of individual fibers is not possible or only possible with great effort.
  • a receiving device for several fiber connectors or fiber collimators with permanently connected optical fibers ie for conventional connections to optical fibers, in particular permanently connected fiber collimators or standardized fiber stretchers (eg QBH) is used. Following this receiving device, an optical device is then arranged with which the mutual spacing of the
  • Arrangement and scanning device is reduced. This can be done for example by a suitable arrangement of several mirrors and / or prisms and / or lenses.
  • This scaling device makes the large
  • Optical fibers and lasers remain modular and with
  • the proposed device is particularly suitable for parallelized laser material processing.
  • the device is not limited to the field of laser material processing and can also be used for other applications in which parallel scanning of an object is also possible Laser radiation of a modulatable power density distribution is necessary or advantageous.
  • the device With a common scanning device, the device has a low level of complexity, which is mechanically less susceptible, takes up less space and can be implemented more cost-effectively than arrangements with a large number of scanning devices.
  • a polygon scanner e.g. With a varying tilt angle of the individual mirror facets, a considerable increase in, for example, removal, structuring or marking processes can be achieved.
  • the modulation can e.g. can be implemented via acousto or electro-optical switches, the frequencies of over 1
  • the device is in terms of the type of beam sources and thus also in terms of
  • diode lasers coupled into multimode fibers can be used.
  • singlemode fiber lasers and ultra-short pulse lasers coupled into photonic fibers can be used.
  • Fig. 1 is a schematic representation of a
  • first embodiment of the proposed device shows a schematic representation of an exemplary fiber arrangement in the fiber receptacle of the first embodiment
  • Fig. 3 is a schematic representation of the
  • Fig. 4 is a cross-sectional view of
  • Fig. 5 is a schematic representation of the
  • Fig. 6 is a schematic representation of the
  • FIG. 7 shows a schematic illustration of a fiber arrangement that can be rotated about the axis of symmetry
  • Fig. 8 is a schematic representation of the
  • Fig. 9 is a schematic representation of the
  • Fig. 10 is a schematic representation of the
  • FIG. 9 shows a schematic representation of the parallel processing using a galvanometer scanner
  • Fig. 12 is a schematic representation of the
  • FIG. 17 is a view perpendicular to FIG. 16 of FIG.
  • the proposed device enables
  • Optical fibers F i arranged side by side in a one- or two-dimensional fiber arrangement.
  • the laser beams 6 emerging from these fibers F i are arranged side by side in a one- or two-dimensional fiber arrangement.
  • a rotary device 1 with which the distribution of the laser beams 6 can be rotated about an axis running parallel to the laser beams. This is followed by a collimation in a collimator 2 and the dynamic beam deflection or beam guidance with a scanner 3.
  • the workpiece 5 is focused via an F-theta lens 4.
  • the rotating device 1 in this example is rotatable optical device realized, but can also by rotating the
  • Fig. 2 shows in figure a) an example of an arrangement of the optical fibers F i in a row in the fiber receptacle A.
  • the fibers are embedded in this fiber receptacle A and each have a jacket M and core K, as shown in excerpts enlarged in the right illustration b) of the figure.
  • Optical fiber channels can be modulated individually so that individual laser spots can be switched on or off for processing. In this way, e.g. the total track width of the laser processing on the workpiece can be varied.
  • the fiber cores are arranged in the fiber arrangement with a distance ⁇ x or ⁇ y, the lower limit being predetermined by the thickness of the cladding M of the fibers. With a typical cladding diameter of approx. 200 ⁇ m and a singlemode fiber core diameter of approx. 10 ⁇ m, the result would be
  • a (micro) lens ML is used in front of each fiber to solve this problem
  • This figure shows the assembled fiber arrangement FA with the lens arrangement LA placed in front of it.
  • E ' there is an almost complete distribution of intensity.
  • E represents the exit plane of the laser radiation from the optical fibers F i .
  • the spot diameter is in plane E '
  • the microlenses behind the fiber facets (fiber exit surfaces) can be combined to form a (monolithic) lens arrangement LA, which can be mounted on the fiber receptacle A as a unit.
  • lens-fiber arrangement FLA This arrangement of fibers and lenses is referred to below as a lens-fiber arrangement FLA.
  • the lenses and the lens arrangement can e.g. made of diamond
  • the fill factor that is to say the ratio of core diameter to cladding diameter
  • the fiber facets can be mapped directly - or a plane in the near field of the facer facets - in the plane E '''of the workpiece, for example directly via the collimator KO and F-theta lens.
  • the fiber arrangement FA or the fiber-lens arrangement can be rotated by at least 90 ° around the axis of symmetry R (cf. FIG. 8) by means of a rotary device or rotary axis DA, as in FIG c) schematic
  • Traces S i of the laser beams on the workpiece can easily be superimposed crosswise with suitable guidance.
  • the cross-overlaying is common in the SLM process, for example, in order to increase the component strength.
  • continuous multispot trajectories can be driven by the rotation.
  • the rotation of the fiber arrangement can also reduce the effective track spacing and the total track width (cf. sub-figures b) and d) of FIG. 7), which is particularly important when using multimode fibers.
  • a rotation through the angle ⁇ > 0 ° causes the rotation along the
  • Feed direction VR reduces the effective track width.
  • the individual tracks S i then also lie closer together or overlap more. If the fiber arrangement FA completely in the direction of the
  • all beam sources or spots are superimposed in one track.
  • This can e.g. can be used to cut a workpiece, e.g. a sheet metal, after laser structuring with a higher power density.
  • the manufacture of the fiber arrangement FA can be any material.
  • channels are produced in the fiber receptacle A, made for example of quartz, into which the optical fibers are then inserted and glued or fused.
  • Ordinary multi-mode and singlemode fibers and also photonic fibers (PCF), e.g. Hollow core fibers are used in the device.
  • PCF photonic fibers
  • CW fiber lasers for additive manufacturing and laser polishing
  • USP lasers for material removal and structuring.
  • the fiber receptacle can also contain cooling channels in addition to the fiber channels, which can also be introduced into the fiber receptacle using the SLE method.
  • the cooling channels can, for example, be flowed through with (optionally colored) water.
  • Fig. 8 shows in the partial images a) and b) a schematic representation of the assembled lens and fiber arrangement FLA with the attached fiber bundle FB, which can be rotated about the axis of symmetry R by means of an axis of rotation DA.
  • the axis of rotation DA can be
  • Fig. 9 is an embodiment of the parallel
  • the intensity distribution generated by the lens arrangement FLA (in plane E ') is here via the lenses L 1 and L 2
  • the focusing time ZS is variable (z-shift), so that in this case no F-theta lens is required.
  • Mirror facets SF i of the polygon scanner PS are tilted with an increasing angle.
  • the multi-line Z 1 on the workpiece WS is traversed by means of the mirror facet SF 1 in the feed direction VR (partial illustration a) of FIG. 9).
  • the multi-line Z 2 is followed by the tilted mirror facet SF 2 (partial image b) of FIG. 9) and so on, as in FIGS. 9 and 10
  • FIG. 11 shows an embodiment for applications in the field of selective laser melting (SLM).
  • SLM selective laser melting
  • Scanner GS shown. As in the previous example, pre-focusing takes place without an F-theta lens. With the exception of the different scanning devices, the structure of the device is identical to that of FIG. 9. By rotating the fiber and lens arrangement
  • orthogonal tracks in the process level E '' '(surface of the work piece WS) can be followed in this embodiment, as is indicated by way of example in the two partial images a) and b) of FIG. 11.
  • component strength in SLM processes can be increased.
  • a third embodiment, in particular for applications in the field of selective laser melting (SLM), is shown by way of example in partial illustration a) of FIG.
  • the parallel processing takes place by means of a portal axis system, consisting of the linear axes P x , P y and P z .
  • the laser radiation is transmitted via the optical system OS to the
  • the (metal) powder is fused along the tracks S i . Due to the fiber and lens arrangement, which can be rotated by means of the axis of rotation DA, continuous curved paths can be driven, as in this is indicated in the right partial illustration b) of FIG.
  • the proposed device can also be used for other applications, for example for build-up welding.
  • An example of this application is shown schematically in FIG. The
  • Laser radiation from the fiber and lens arrangement FLA is here by means of the lenses L 1 , L 2 and the
  • the optical system OS is focused on the workpiece WS through a suitably designed powder nozzle PD, as shown in the left part of FIG.
  • the material application MAT is then applied onto the workpiece WS with the aid of the laser radiation by means of a powder jet PS that can optionally be spatially modulated
  • the width of the material application can be adjusted.
  • the nozzle PD has an elongated outlet opening for the powder in order to generate a powder jet which is correspondingly elongated in cross section.
  • the rotating device for rotating the elongated distribution of the laser radiation is not shown in the figure.
  • the nozzle PD is rotated synchronously with the distribution of the laser radiation, preferably by rotating the whole
  • embedded fibers can also emit the radiation
  • FIG. 14 shows a schematic representation of an exemplary structure when using
  • Fiber connectors 8 (upper part of the figure) or
  • Fiber collimators 9 (lower part of the figure) with permanently connected optical fibers F. In both cases, following the receiving device for the
  • Fiber connector or fiber collimators a device 7 for beam scaling required to the far
  • FIG. 15 shows two configurations according to FIG.
  • FIG. 16 shows an exemplary structure for the beam scaling and beam rotation of FIGS. 14 and
  • emerging laser beams 6 are first collimated in the collimators KO1, KO2, KO3 and via a suitable mirror arrangement with the mirrors SP1, SP2 and SP3 brought closer to each other to increase the beam fill factor. Further scaling in the x and y directions takes place via the subsequently suitably arranged prisms Pr1 to Pr4. A rotation of the beam arrangement about the z-axis is then made possible via the Dove prism Pr5 in a corresponding axis of rotation DA. 17 shows the same structure again from the y direction. These figures show an exemplary structure of the beam scaling device from FIGS
  • Coupling into the fibers used laser is always quickly and easily possible.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Health & Medical Sciences (AREA)
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  • Automation & Control Theory (AREA)
  • Plasma & Fusion (AREA)
  • Laser Beam Processing (AREA)

Abstract

Selon la présente invention, avec un dispositif pour générer une répartition de puissances volumiques spatialement modulable à partir de plusieurs faisceaux laser, un logement de fibres (A) avec des fibres guides de lumière (F) disposées les unes à côté des autres ou un système de logement (FS) pour plusieurs connecteurs de fibre ou collimateurs à fibres (KO) avec des fibres guides de lumière (F) solidarisées sont installés les uns à côté des autres. Des surfaces de sortie de fibre des fibres guides de lumière (F) forment un réseau à une ou deux dimensions. Les faisceaux laser (6) sortant des surfaces de sortie de fibre sont dirigés par un dispositif optique commun (2, 4, 10) et un système de balayage commun (3) vers un plan cible et menés sur le plan cible. Le dispositif comprend un système tournant (1) avec lequel au moins le logement de fibres (A) ou le système de logement ou une répartition correspondante des faisceaux laser (6) peut être tourné autour d'un axe (R) s'étendant parallèlement aux faisceaux laser (6). Le dispositif permet un usinage de matériaux parallélisé au laser avec une grande flexibilité.
PCT/EP2020/057115 2019-03-25 2020-03-16 Dispositif pour générer une répartition de puissances volumiques spatialement modulable à partir d'un rayonnement laser WO2020193255A1 (fr)

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DE102019204032.2 2019-03-25
DE102019204032.2A DE102019204032B4 (de) 2019-03-25 2019-03-25 Vorrichtung zur Erzeugung einer räumlich modulierbaren Leistungsdichteverteilung aus Laserstrahlung

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DE102020125425B4 (de) 2020-09-29 2024-03-14 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein Verfahren zum Betrieb einer Vorrichtung zur Abtastung einer Zielebene mit mehreren Laserstrahlen
DE102022133073A1 (de) 2022-12-13 2024-06-13 Trumpf Laser Ag Laserbearbeitungsanlage zur Bearbeitung eines Werkstücks mittels eines Ausgangslaserstrahls

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US20070165987A1 (en) * 2006-01-17 2007-07-19 Ricoh Printing Systems, Ltd. Multi-beam light source, method for manufacturing the same, light scanning unit using the same, and image forming apparatus using the same
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