WO2020168643A1 - 喷嘴以及涂布装置 - Google Patents

喷嘴以及涂布装置 Download PDF

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Publication number
WO2020168643A1
WO2020168643A1 PCT/CN2019/087682 CN2019087682W WO2020168643A1 WO 2020168643 A1 WO2020168643 A1 WO 2020168643A1 CN 2019087682 W CN2019087682 W CN 2019087682W WO 2020168643 A1 WO2020168643 A1 WO 2020168643A1
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WO
WIPO (PCT)
Prior art keywords
cavity
baffle
coating liquid
nozzle
coating
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Application number
PCT/CN2019/087682
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English (en)
French (fr)
Inventor
陈敬华
王江
刘继承
康凯
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深圳市华星光电技术有限公司
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Publication of WO2020168643A1 publication Critical patent/WO2020168643A1/zh

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating

Definitions

  • the present invention relates to the field of display technology, in particular to flat panel display manufacturing, in particular to nozzles and coating devices.
  • a coating device is used to spray liquid on the substrate to complete the substrate coating process.
  • the coating device 100 implements liquid distribution by arranging multiple pipes 102 outside the pipe 101, and then connects the pipe 102 to the slit nozzle 103 for subsequent discharge of the liquid.
  • Multiple pipelines will occupy a large space, and the injection of the coating liquid from the middle will cause the liquid flow on both sides to be smaller than the middle.
  • the purpose of the present invention is to provide a nozzle and a coating device.
  • the nozzle and the coating device can be provided with a shunt structure in the cavity, so as to avoid setting multiple pipelines outside the pipeline, and solve the problem of multiple pipelines in the prior art. Large space and uneven liquid flow.
  • the embodiment of the present invention provides a nozzle for applying a coating liquid on the surface of a substrate, wherein the nozzle includes:
  • a shunt structure the shunt structure is arranged in the cavity, the shunt structure is used to evenly distribute the coating liquid in the cavity, and the shunt structure includes:
  • a plurality of baffles are arranged in a staggered manner in the cavity, and a splitting port is formed between two adjacent baffles in the horizontal direction, and the coating liquid flows to the cavity through the splitting port Flow at both ends;
  • a plurality of rectangular blocks are arranged in an array in the cavity, and a splitting port is formed between two adjacent rectangular blocks in the horizontal direction, and the coating liquid flows to the cavity through the splitting port Flow at both ends of the body;
  • a plurality of nozzles are used for coating the coating liquid on the surface of the substrate.
  • the cavity is divided into n layers, where n is a positive integer, the cavity is divided into 2n regions in the horizontal direction of the nth layer, the xth region and the (x+1)th
  • the position between the regions is the x-th diversion position in the horizontal direction in the cavity, where x is a positive integer and x is not greater than (2n-1);
  • the nozzle includes n-layer diversion ports, and the n-th layer diversion The port is set at the (2k-1)th shunt position, where k is a positive integer and not greater than.
  • the nozzle further includes an inlet for passing the coating liquid, and the inlet is connected to the baffle in the first region of the first layer in the cavity.
  • the baffle includes:
  • a first baffle, the first baffle is used to block the coating liquid
  • the second baffle is arranged on the first baffle, and the second baffle is used to carry the coating liquid.
  • the thickness of the second baffle is smaller than the thickness of the first baffle.
  • the thickness of the first baffle is equal to the separation distance between two adjacent layers of second baffles.
  • the embodiment of the present invention also provides another nozzle for coating the coating liquid on the surface of the substrate, wherein the nozzle includes:
  • a shunt structure the shunt structure is arranged in the cavity, and the shunt structure is used to evenly distribute the coating liquid in the cavity;
  • a plurality of nozzles are used for coating the coating liquid on the surface of the substrate.
  • the shunt structure includes:
  • a plurality of baffles are arranged in a staggered manner in the cavity, and a splitting port is formed between two adjacent baffles in the horizontal direction, and the coating liquid flows to the cavity through the splitting port Flow at both ends.
  • the cavity is divided into n layers, where n is a positive integer, the cavity is divided into 2n regions in the horizontal direction of the nth layer, the xth region and the (x+1)th
  • the position between the regions is the x-th diversion position in the horizontal direction in the cavity, where x is a positive integer and x is not greater than (2n-1);
  • the nozzle includes n-layer diversion ports, and the n-th layer diversion The port is set at the (2k-1)th shunt position, where k is a positive integer and not greater than.
  • the nozzle further includes an inlet for passing the coating liquid, and the inlet is connected to the baffle in the first region of the first layer in the cavity.
  • the baffle includes:
  • a first baffle, the first baffle is used to block the coating liquid
  • the second baffle is arranged on the first baffle, and the second baffle is used to carry the coating liquid.
  • the thickness of the second baffle is smaller than the thickness of the first baffle.
  • the thickness of the first baffle is equal to the separation distance between two adjacent layers of second baffles.
  • An embodiment of the present invention also provides a coating device, the coating device includes a nozzle, and the nozzle includes:
  • a shunt structure the shunt structure is arranged in the cavity, and the shunt structure is used to evenly distribute the coating liquid in the cavity;
  • a plurality of nozzles are used for coating the coating liquid on the surface of the substrate.
  • the shunt structure includes:
  • a plurality of baffles, the plurality of baffles are arranged in the cavity in layers, and a splitting port is formed between two adjacent baffles in the horizontal direction, and the coating liquid flows to the cavity through the splitting port Flow at both ends of the body.
  • the cavity is divided into n layers, where n is a positive integer, the cavity is divided into 2n regions in the horizontal direction of the nth layer, the xth region and the (x+1)th The position between the regions is the x-th shunt position in the horizontal direction in the cavity, where x is a positive integer, and x is not greater than (2n-1);
  • the nozzle includes an n-layer splitting port, and the n-th splitting port is arranged at the (2k-1)-th splitting position, where k is a positive integer and not greater than.
  • the nozzle further includes an inlet for passing the coating liquid, and the inlet is connected to the baffle in the first region of the first layer in the cavity.
  • the baffle includes:
  • a first baffle, the first baffle is used to block the coating liquid
  • the second baffle is arranged on the first baffle, and the second baffle is used to carry the coating liquid.
  • the thickness of the second baffle is smaller than the thickness of the first baffle.
  • the thickness of the first baffle is equal to the separation distance between two adjacent layers of second baffles.
  • the present invention provides a nozzle and a coating device.
  • the coating device and the cavity of the nozzle are provided with a flow dividing structure.
  • the flow dividing structure includes a first baffle for blocking the coating liquid and a first baffle for carrying the coating liquid.
  • the second baffle is formed between the first baffle and the second baffle.
  • the splitting structure can improve the uniformity of the flow of the coating liquid, so that the coating liquid is evenly coated on the substrate surface, which can improve the product Yield rate.
  • Figure 1 is a schematic cross-sectional view of the nozzle structure in the prior art.
  • FIG. 2 is a schematic cross-sectional view of the structure of a nozzle provided by an embodiment of the present invention.
  • FIG. 3 is a schematic diagram of the divided areas in the cavity of the nozzle provided by an embodiment of the present invention.
  • FIG. 4 is a schematic cross-sectional view of the structure of another nozzle provided by an embodiment of the present invention.
  • FIG. 5 is a schematic cross-sectional view of another nozzle structure provided by an embodiment of the present invention.
  • the terms “thickness” and “width” are neutral terms, and do not mean that the value is biased toward thick or thin, while “larger” and “smaller” mean that the value is biased toward greater or greater value relative to the overall value range. The small party.
  • the "horizontal positive direction” refers to a horizontal right direction
  • the “vertical negative direction” refers to a vertical downward direction.
  • the present invention provides a coating device, which includes a nozzle as shown in FIGS. 2 to 5.
  • Fig. 2 shows a schematic cross-sectional view of the structure of a nozzle provided by an embodiment of the present invention.
  • the nozzle 200 includes a cavity 201, a flow dividing structure 202 arranged in the cavity 201, a nozzle 203 and a feed port 204.
  • the diversion structure 202 includes a plurality of baffles 2021 and a plurality of diversion ports 2022.
  • the plurality of baffles 2021 are arranged in a staggered manner in the cavity 201, and two baffles are adjacent in the horizontal direction.
  • a split port 2022 is formed between 2021, and the coating liquid flows in from the feed port 204 of the nozzle 200, and flows to both ends of the cavity 201 through the split port 2022, as shown by the arrow in FIG. 2, and finally passes The nozzle 203 is coated on the surface of the substrate.
  • the feed port 204 is connected to the baffle in the first area of the first layer in the cavity, so that the coating liquid first passes through the baffle in the first area of the first layer in the cavity, and then After the flow dividing structure 202 flows into the plurality of nozzles 203, it is avoided that the coating liquid directly flows into the nozzles 203 to cause uneven coating.
  • the nozzles 203 are arranged at equal intervals at the lower end of the cavity 201 so that the coating liquid is evenly coated on the surface of the substrate.
  • the thicknesses of the plurality of baffles 2021 are the same, and the distance between the baffles 2021 in the same column between adjacent layers is not zero, and the baffles 2021 are used to carry the coating liquid,
  • the shunt 2022 is used to change a part of the flow direction of the coating liquid. Therefore, the combination of the two can make the coating liquid evenly distributed in the cavity.
  • the cavity is divided into n layers, where n is a positive integer, and the cavity is divided into 2n regions in the horizontal direction of the nth layer, one of the xth region and the (x+1)th region
  • the position between is the x-th shunt position in the horizontal direction in the cavity, where x is a positive integer and x is not greater than (2n-1);
  • the nozzle includes n-layer shunt ports, and the n-th shunt port is arranged at The (2k-1)-th shunt position, where k is a positive integer and not greater than.
  • Fig. 3 shows a schematic diagram of the divided areas in the cavity of the nozzle provided by the embodiment of the present invention. As shown in the figure, the cavity is divided into n layers, and the n layers are respectively 301, 302, 303...30n in FIG. 3, and n layers of shunt ports are correspondingly provided.
  • the nth layer is divided into 2n regions in the horizontal direction, and the position between the xth region and the (x+1)th region is defined as the position of the cavity in the horizontal direction
  • the x-th shunt position where x is a positive integer, and x is not greater than (2n-1).
  • the second layer 302 is taken as an example.
  • the second layer 302 is divided into a first area 3021, a second area 3022, a third area 3023, and a fourth area 3024.
  • the first area 3021 and the second area 3022 The positions between are the first shunt position 30211 of the cavity in the horizontal direction, and the positions between the second area 3022 and the third area 3023 are the second shunt position 30212 and the second area of the cavity in the horizontal direction.
  • the position between the third area 3023 and the fourth area 3024 is the third shunt position 30213 of the cavity in the horizontal direction.
  • the n-th layer diversion port is arranged at the (2k-1)th diversion position of the layer, where k is a positive integer and not greater than.
  • the second layer diversion port is taken as an example, and the second layer diversion port is set at the first diversion position 30211 and the second diversion position 30212 of the layer.
  • the location where the n-th layer diversion port is set specifically refers to the location where the center point of the n-th layer shunt port is set.
  • the lower limit of n is 1, and the upper limit of n is related to the width of the cavity 201.
  • the upper limit of n can take a larger value.
  • the upper limit of n can take a small value, such as 3, 4.
  • the number of layers (density) of the shunt structure 202 and the width of the shunt 2022 can be set according to actual conditions in combination with the width of the cavity 201 and the flow rate of the coating liquid.
  • the flow dividing structure 202 is composed of a block of baffles 2021, so the flow dividing structure 202 is fixed to the cavity 201 through the front and rear edges, left and/or right edges of the baffle 2021. internal.
  • the front and rear edges of the baffle 2021 can be fixed on the inner wall of the cavity 201, so as to ensure that the coating liquid passes through each layer of the baffle 2021 to the nozzle 203 strictly in turn, avoiding the The coating liquid directly drops to the nozzle 203 from the inflow port without passing through the shunt structure 202, resulting in uneven coating.
  • Fig. 4 shows a schematic cross-sectional view of the structure of another nozzle provided by an embodiment of the present invention.
  • the nozzle 400 includes a cavity 401, a flow dividing structure 402, a spout 403, and a feed port 404 provided in the cavity 401.
  • the flow dividing structure 402 includes a plurality of baffles 4021 and two adjacent ones in the horizontal direction. Diversion ports 4022 formed between the baffles 4021.
  • the baffle 4021 includes a first baffle 40211 and a second baffle 40212, and the first baffle 40211 is used to block the coating liquid, so The second baffle 40212 is used to carry the coating liquid, and the second baffle 40212 is disposed on the first baffle 40211.
  • the first baffle 40211 and the second baffle 40212 are arranged adjacent to each other, and the branch opening 4022 is arranged in the same horizontal direction. Between the second baffle 40212.
  • the thickness of the first baffle 40211 is greater than the thickness of the second baffle 40212.
  • the thickness of the first baffle 40211 is equal to the separation distance between the two adjacent layers of second baffles. Specifically, for example, the thickness of 405 in the first baffle 40211 in FIG. It is equal to the separation distance between two adjacent layers 407 and 408 in the second baffle 40212; for example, the thickness of the first baffle 40211 of the first layer and the nth layer is the same as the thickness of the first and nth layers. It is standard that the first baffle 40211 can contact the inner wall above or below the cavity 401. It is understandable that if the cavity 401 is a cylinder, the thickness of the first baffle 40211 of the first layer is It is not uniform. In this way, the first baffle 40211 can sufficiently block the coating liquid, so that the coating liquid can all flow to the two ends of the next layer of baffle through the shunt opening 4022, which improves the coating liquid Utilization rate.
  • first baffles 40211 of adjacent layers in the same vertical direction may be integrally formed, for example, 405 and 406 in the first baffle 40211 in FIG. 4 may be integrally formed; the adjacent layers in the same vertical direction
  • the first baffle 40211 and the second baffle 40212 may also be integrally formed.
  • 405 and 407 in FIG. 4 may be integrally formed. Therefore, 405, 406, and 407 in the figure can also be integrally formed, which not only saves manufacturing steps, but also enhances the fluency and rigor of the shunt structure 402, and improves the utilization rate of the coating liquid.
  • FIG. 5 shows a schematic cross-sectional view of another nozzle structure provided by an embodiment of the present invention.
  • the nozzle 500 includes a cavity 501, a shunt structure 502 arranged in the cavity 501, a spout 503, and a feed port 504.
  • the shunt structure 502 includes a plurality of rectangular blocks 5021, and the plurality of rectangular blocks 5021 are arranged in an array
  • a split port 5022 is formed between two adjacent rectangular blocks 5021 in the horizontal direction, and the coating liquid flows in from the feed port 504 of the nozzle 500 and flows to the place through the split port 5022.
  • the two ends of the cavity 501 flow, as shown by the arrows in FIG. 5, and are finally coated on the surface of the substrate through the nozzle 503.
  • the feed inlet 504 is connected to the rectangular block 5021 in the first row and the first row of the rectangular block 5021 in the cavity 501, and the other rectangular blocks 5021 in the first column in the rectangular block 5021 array are on the left
  • the sides are connected to the inner wall of the cavity 501, so that the coating liquid flows into the plurality of nozzles 503 after passing through the surrounding gaps of the rectangular block 5021, so as to prevent the coating liquid from directly flowing into the The nozzle 503 causes uneven coating.
  • the nozzles 503 are arranged at equal intervals at the lower end of the cavity 501 so that the coating liquid is evenly coated on the surface of the substrate.
  • the size of the rectangular blocks 5021 in each row decreases in the positive horizontal direction of the nozzle, and the size of the rectangular blocks 5021 in each column decreases in the vertical negative direction of the nozzle. In this way, it can be ensured that the flow rate of the coating liquid at each location in the array of rectangular blocks 5021 is equivalent, and the flow rate of the coating liquid when it reaches the nozzle 503 is equivalent, thereby improving the uniformity of coating.
  • the shunt structure 502 is composed of rectangular blocks 5021, so the shunt structure 502 is fixed to the cavity 501 through the front and rear edges, left and/or right edges of the rectangular block 5021 internal.
  • the front and rear edges of the rectangular block 5021 can be fixed on the inner wall of the cavity 501, so as to ensure that the coating liquid passes through each layer of the rectangular block 5021 to the nozzle 503 strictly in turn, avoiding the The coating liquid directly drops to the nozzle 503 from the inflow port without passing through the shunt structure 502, causing uneven coating.
  • the present invention provides a nozzle and a coating device.
  • the nozzle and the cavity of the coating device are provided with a shunt structure.
  • the shunt structure includes a first baffle for blocking the coating liquid and a first baffle for carrying the coating liquid.
  • the second baffle, the first baffle and the second baffle form a flow divider.
  • the flow divider structure can avoid setting multiple pipelines outside the pipeline, which solves the problem that the multiple pipelines in the prior art occupy large space and liquid The problem of uneven flow.
  • the present invention provides a nozzle and a coating device, the coating device and the nozzle cavity are provided with a flow dividing structure, the flow dividing structure includes a first baffle for blocking the coating liquid And the second baffle for carrying the coating liquid, a splitting port is formed between the first baffle and the second baffle.
  • the splitting structure can improve the uniformity of the flow of the coating liquid, thereby making the coating liquid evenly coated on The surface of the substrate can improve the yield of the product.

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Abstract

一种喷嘴以及涂布装置，该喷嘴包括：腔体、设置在腔体内的分流结构以及喷口，腔体用于传导涂布液，分流结构用于将徒步也均匀分布在腔体内，喷口用于将涂布液涂布在基板表面。

Description

喷嘴以及涂布装置 技术领域
本发明涉及显示技术领域，尤其涉及平板显示制造，具体涉及喷嘴以及涂布装置。
 背景技术
目前在玻璃基板的生产制造过程中，都会利用涂布装置对基板吐液来完成基板的涂布制程。如图1所示，现有技术中，涂布装置100通过在管道101外面设置多个管路102来实现分流液体，再将管路102接到狭缝喷嘴103上进行后续的吐液。多个管路会占用较大的空间，并且涂布液从中间注入会导致两边液体流量较中间会小。
综上所述，现有的涂布装置中，存在占用空间大以及液体流量不均匀的问题。
 技术问题
本发明目的在于提供一种喷嘴和涂布装置，该喷嘴和涂布装置可以在腔体内设置有分流结构，以避免在管道外面设置多个管路，解决了现有技术中多个管路占用空间大以及液体流量不均匀的问题。
 技术解决方案
本发明实施例提供一种喷嘴，用于将涂布液涂布于基板表面，其中，所述喷嘴包括：
腔体，用于传导所述涂布液；
分流结构，所述分流结构设置在所述腔体内，所述分流结构用于将所述涂布液均匀分布在所述腔体内，所述分流结构包括：
多个挡板，所述多个挡板交错排列于所述腔体内，水平方向上相邻的两个挡板之间形成分流口，所述涂布液通过所述分流口往所述腔体两端流动；或者
多个矩形块，所述多个矩形块阵列排布于所述腔体内，水平方向上相邻的两个矩形块之间形成分流口，所述涂布液通过所述分流口往所述腔体两端流动；
多个喷口，用于将所述涂布液涂布在所述基板表面。
在一实施例中，所述腔体划分为n层，其中n为正整数，所述腔体在第n层的水平方向上划分为2n个区域，第x个区域和第(x+1)个区域之间的位置为所述腔体内在水平方向上的第x分流位置，其中x为正整数，且x不大于（2n-1）；所述喷嘴包括n层分流口，第n层分流口设置于所述第（2k-1）分流位置，其中k为正整数，且不大于。
在一实施例中，所述喷嘴还包括入口，所述入口用于通入所述涂布液，所述入口连接所述腔体内第1层的第1个区域的挡板。
在一实施例中，所述挡板包括：
第一挡板，所述第一挡板用于阻挡所述涂布液；
第二挡板，所述第二挡板设置在所述第一挡板上，所述第二挡板用于承载所述涂布液。
在一实施例中，所述第二挡板的厚度小于所述第一挡板的厚度。
在一实施例中，所述第一挡板的厚度等于所述相邻的两层第二挡板之间的间隔距离。
本发明实施例还提供另一种喷嘴，用于将涂布液涂布于基板表面，其中，所述喷嘴包括：
腔体，用于传导所述涂布液；
分流结构，所述分流结构设置在所述腔体内，所述分流结构用于将所述涂布液均匀分布在所述腔体内；
多个喷口，用于将所述涂布液涂布在所述基板表面。
在一实施例中，所述分流结构包括：
多个挡板，所述多个挡板交错排列于所述腔体内，水平方向上相邻的两个挡板之间形成分流口，所述涂布液通过所述分流口往所述腔体两端流动。
在一实施例中，所述腔体划分为n层，其中n为正整数，所述腔体在第n层的水平方向上划分为2n个区域，第x个区域和第(x+1)个区域之间的位置为所述腔体内在水平方向上的第x分流位置，其中x为正整数，且x不大于（2n-1）；所述喷嘴包括n层分流口，第n层分流口设置于所述第（2k-1）分流位置，其中k为正整数，且不大于。
在一实施例中，所述喷嘴还包括入口，所述入口用于通入所述涂布液，所述入口连接所述腔体内第1层的第1个区域的挡板。
在一实施例中，所述挡板包括：
第一挡板，所述第一挡板用于阻挡所述涂布液；
第二挡板，所述第二挡板设置在所述第一挡板上，所述第二挡板用于承载所述涂布液。
在一实施例中，所述第二挡板的厚度小于所述第一挡板的厚度。
在一实施例中，所述第一挡板的厚度等于所述相邻的两层第二挡板之间的间隔距离。
本发明实施例还提供一种涂布装置，所述涂布装置包括喷嘴，所述喷嘴包括：
腔体，用于传导所述涂布液；
分流结构，所述分流结构设置在所述腔体内，所述分流结构用于将所述涂布液均匀分布在所述腔体内；
多个喷口，用于将所述涂布液涂布在所述基板表面。
在一实施例中，所述分流结构包括：
多个挡板，所述多个挡板分层设置于所述腔体内，水平方向上相邻的两个挡板之间形成分流口，所述涂布液通过所述分流口往所述腔体两端流动。
在一实施例中，所述腔体划分为n层，其中n为正整数，所述腔体在第n层的水平方向上划分为2n个区域，第x个区域和第(x+1)个区域之间的位置为所述腔体内在水平方向上的第x分流位置，其中x为正整数，且x不大于（2n-1）；
所述喷嘴包括n层分流口，第n层分流口设置于所述第（2k-1）分流位置，其中k为正整数，且不大于。
在一实施例中，所述喷嘴还包括入口，所述入口用于通入所述涂布液，所述入口连接所述腔体内第1层的第1个区域的挡板。
在一实施例中，所述挡板包括：
第一挡板，所述第一挡板用于阻挡所述涂布液；
第二挡板，所述第二挡板设置在所述第一挡板上，所述第二挡板用于承载所述涂布液。
在一实施例中，所述第二挡板的厚度小于所述第一挡板的厚度。
在一实施例中，所述第一挡板的厚度等于所述相邻的两层第二挡板之间的间隔距离。
 有益效果
本发明提供了一种喷嘴以及涂布装置，该涂布装置和喷嘴的腔体内设置有分流结构，该分流结构包括用于阻挡所述涂布液的第一挡板和用于承载涂布液的第二挡板，第一挡板和第二挡板之间形成分流口，该分流结构可以提高涂布液流动的均匀性，进而使得涂布液均匀涂布在基板表面，可以提高产品的良品率。
 附图说明
下面通过附图来对本发明进行进一步说明。需要说明的是，下面描述中的附图仅仅是用于解释说明本发明的一些实施例，对于本领域技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。
图1为现有技术中喷嘴的结构的截面示意图。
图2为本发明实施例提供的喷嘴的结构的截面示意图。
图3为本发明实施例提供的喷嘴的腔体内划分区域的示意图。
图4为本发明实施例提供的另一喷嘴的结构的截面示意图。
图5为本发明实施例提供的又一喷嘴的结构的截面示意图。
 本发明的最佳实施方式
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整的描述。显然，所描述的实施例仅仅是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域技术人员在没有作出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。
在本发明的描述中，需要理解的是，术语“上”、“下”、“内”、“垂直”、“水平”、“前”、“后”等指示的方位或位置关系为基于附图所示的方位或位置关系，其中，“上”、“下”只是表面在物体上方，具体指代正上方、斜上方、上表面都可以，只要居于物体水平之上即可，而“表面”、“接壤”则是指代两个物体相互直接接触，以上方位或位置关系仅是为了便于描述本发明和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本发明的限制。
需要注意的是，术语“厚度”、“宽度”是中性词，不表示偏向厚或薄，而“较大”、“较小”则表示数值相对于整体取值范围而言，偏向大或者小的一方。另外，“水平正方向”指水平向右的方向，“垂直负方向”指垂直向下的方向。
另外，还需要说明的是，附图提供的仅仅是和本发明关系比较密切的结构和/或步骤，省略了一些与发明关系不大的细节，目的在于简化附图，使发明点一目了然，而不是表明实际中装置和/或方法就是和附图一模一样，不作为实际中装置和/或方法的限制。
本发明提供一种涂布装置，所述涂布装置包括如图2~5所示的喷嘴。
如图2，表示本发明实施例提供的喷嘴的结构的截面示意图。喷嘴200包括腔体201、设置在所述腔体201内的分流结构202、喷口203以及进料口204。
如图所示，所述分流结构202包括多个挡板2021以及多个分流口2022，所述多个挡板2021交错排列于所述腔体201内，水平方向上相邻的两个挡板2021之间形成分流口2022，涂布液从所述喷嘴200的进料口204流入，并且通过所述分流口2022往所述腔体201两端流动，如图2中箭头所示，最终通过所述喷口203涂布于基板表面。
其中，所述进料口204连接所述腔体内第1层的第1个区域的挡板，使得所述涂布液先经过所述腔体内第1层的第1个区域的挡板，再通过所述分流结构202以后流入到所述多个喷口203，避免所述涂布液直接流入到所述喷口203造成涂布不均匀。
其中，所述喷口203在所述腔体201下端等间隔排列，使得所述涂布液均匀涂布于基板表面。
其中，所述多个挡板2021的厚度相同，并且相邻层之间的同一列的所述挡板2021之间的距离不为零，所述挡板2021用于承载所述涂布液，所述分流口2022用于改变部分所述涂布液的流动方向，因此，两者相结合可以使得涂布液均匀分布在所述腔体内。
特别的，所述腔体划分为n层，其中n为正整数，所述腔体在第n层的水平方向上划分为2n个区域，第x个区域和第(x+1)个区域之间的位置为所述腔体内在水平方向上的第x分流位置，其中x为正整数，且x不大于（2n-1）；所述喷嘴包括n层分流口，第n层分流口设置于所述第（2k-1）分流位置，其中k为正整数，且不大于。
如图3，表示本发明实施例提供的喷嘴的腔体内划分区域的示意图。如图所示，将所述腔体划分为n层，所述n层分别为图3中的301、302、303......30n，对应设置有n层分流口。
对于第n层而言，在所述第n层水平方向上划分为2n个区域，定义第x个区域和第(x+1)个区域之间的位置为所述腔体在水平方向上的第x分流位置，其中，x为正整数，且x不大于（2n-1）。图3中以第2层302为例，所述第2层302划分为第1区域3021、第2区域3022、第3区域3023、第4区域3024，其中，第1区域3021和第2区域3022之间的位置为所述腔体在水平方向上的第1分流位置30211、第2区域3022和第3区域3023之间的位置为所述腔体在水平方向上的第2分流位置30212、第3区域3023和第4区域3024之间的位置为所述腔体在水平方向上的第3分流位置30213。
对于第n层分流口而言，所述第n层分流口设置于该层的所述第（2k-1）分流位置，其中k为正整数，且不大于。图3中以第2层分流口为例示意，第2层分流口设置于该层的第1分流位置30211和第2分流位置30212。
具体地，例如：
当n=1时，表示所述第一层分流口设置于所述腔体内第一层的第1分流位置；
当n=2时，表示所述第二层分流口设置于所述腔体内第二层的第1分流位置和第3分流位置；
当n=3时，表示所述第三层分流口设置于所述腔体内第三层的第1分流位置、第3分流位置、第5分流位置和第7分流位置。
其中，所述第n层分流口的设置的位置具体指代所述第n层分流口的中心点设置的位置。
可以理解的是，所述n的下限是1，n的上限与所述腔体201的宽度有关，例如当所述腔体201的宽度较大时，所述n的上限可以取较大值，如9、10；当所述腔体201的宽度较小时，所述n的上限可以取较小值，如3、4。可以根据实际情况，结合所述腔体201的宽度以及所述涂布液的流速来设置所述分流结构202的层数（疏密程度）以及所述分流口2022的宽度。
需要注意的是，所述分流结构202是由一块块挡板2021组成的，因此所述分流结构202通过所述挡板2021的前后边缘和左边缘和/或右边缘固定于所述腔体201内部。
其中，所述挡板2021的前后边缘可以固定在所述腔体201的内壁，这样可以保证所述涂布液严格依次通过每一层的所述挡板2021到达所述喷口203，避免所述涂布液从流入的端口未经过所述分流结构202而直接掉落至所述喷口203导致涂布不均匀。
如图4，表示本发明实施例提供的另一喷嘴的结构的截面示意图。喷嘴400包括腔体401、设置在所述腔体401内的分流结构402、喷口403以及进料口404，所述分流结构402包括多个挡板4021以及所述水平方向上相邻的两个挡板4021之间形成的分流口4022。
图4的实施例和图2的实施例的区别在于：所述挡板4021包括第一挡板40211和第二挡板40212，所述第一挡板40211用于阻挡所述涂布液，所述第二挡板40212用于承载所述涂布液，所述第二挡板40212设置在所述第一挡板40211上。根据上述描述，可以知道，同一水平位置上，所述第一挡板40211和第二挡板40212相邻设置，且所述分流口4022设置在同一水平方向上的所述第一挡板40211和第二挡板40212之间。
对应于上述功能，所述第一挡板40211的厚度大于所述第二挡板40212的厚度。
进一步的，所述第一挡板40211的厚度等于所述相邻的两层第二挡板之间的间隔距离，具体的，例如图4中的第一挡板40211中的405的厚度刚好可以等于第二挡板40212中相邻的两层407、408之间的间隔距离；又例如第1层和第n层的第一挡板40211的厚度分别以所述第1层和第n层的第一挡板40211能够与所述腔体401上方或者下方的内壁接触为标准，可以理解的是，如果所述腔体401是圆柱体，那么所述第1层的第一挡板40211的厚度是不均一的。这样，所述第一挡板40211可以充分阻挡所述涂布液，使得所述涂布液可以全部通过所述分流口4022往下一层挡板的两端流动，提高所述涂布液的利用率。
进一步的，所述同一垂直方向的相邻层的第一挡板40211可以一体成型，例如图4中的第一挡板40211中的405、406可以一体成型；所述同一垂直方向的相邻层的第一挡板40211与第二挡板40212也可以一体成型，例如图4中的405、407可以一体成型。因此，图中的405、406、407三者也可以一体成型，这样不仅可以节省制作步骤，而且可以增强所述分流结构402的流畅性与严谨性，提高所述涂布液的利用率。
如图5，表示本发明实施例提供的又一喷嘴的结构的截面示意图。喷嘴500包括腔体501、设置在所述腔体501内的分流结构502、喷口503以及进料口504，所述分流结构502包括多个矩形块5021，所述多个矩形块5021阵列排布于所述腔体501内，水平方向上相邻的两个矩形块5021之间形成分流口5022，涂布液从所述喷嘴500的进料口504流入，并且通过所述分流口5022往所述腔体501两端流动，如图5中箭头所示，最终通过所述喷口503涂布于基板表面。
其中，所述进料口504连接所述腔体501内矩形块5021阵列中位于第一列第一行的矩形块5021，所述矩形块5021阵列中位于第一列的其他矩形块5021的左侧面均连接在所述腔体501的内壁上，使得所述涂布液经过所述矩形块5021的周围间隙后流入到所述多个喷口503，避免所述涂布液直接流入到所述喷口503造成涂布不均匀。
其中，所述喷口503在所述腔体501下端等间隔排列，使得所述涂布液均匀涂布于基板表面。
特别的，所述每一排的矩形块5021的尺寸沿所述喷嘴的水平正方向依次减小，并且，所述每一列的矩形块5021的尺寸沿所述喷嘴的垂直负方向依次减小，这样可以保证涂布液在矩形块5021阵列中的每一处的流速相当，进而使得所述涂布液到达所述喷口503时的流速相当，提高涂布的均匀性。
需要注意的是，所述分流结构502是由一块块矩形块5021组成的，因此所述分流结构502通过所述矩形块5021的前后边缘和左边缘和/或右边缘固定于所述腔体501内部。
其中，所述矩形块5021的前后边缘可以固定在所述腔体501的内壁，这样可以保证所述涂布液严格依次通过每一层的所述矩形块5021到达所述喷口503，避免所述涂布液从流入的端口未经过所述分流结构502而直接掉落至所述喷口503造成涂布不均匀。
本发明提供了一种喷嘴以及涂布装置，该喷嘴以及涂布装置的腔体内设置有分流结构，该分流结构包括用于阻挡所述涂布液的第一挡板和用于承载涂布液的第二挡板，第一挡板和第二挡板之间形成分流口，该分流结构可以避免在管道外面设置多个管路，解决了现有技术中多个管路占用空间大以及液体流量不均匀的问题。
本发明的有益效果为：本发明提供了一种喷嘴以及涂布装置，该涂布装置和喷嘴的腔体内设置有分流结构，该分流结构包括用于阻挡所述涂布液的第一挡板和用于承载涂布液的第二挡板，第一挡板和第二挡板之间形成分流口，该分流结构可以提高涂布液流动的均匀性，进而使得涂布液均匀涂布在基板表面，可以提高产品的良品率。
以上对本发明实施例所提供的一种喷嘴以及包含所述喷嘴的涂布装置的结构进行了详细介绍，本文中应用了具体个例对本发明的原理及实施方式进行了阐述，以上实施例的说明只是用于帮助理解本发明的技术方案及其核心思想；本领域的普通技术人员应当理解：其依然可以对前述各实施例所记载的技术方案进行修改，或者对其中部分技术特征进行等同替换；而这些修改或者替换，并不使相应技术方案的本质脱离本发明各实施例的技术方案的范围。

Claims (20)

  1. 一种喷嘴，用于将涂布液涂布于基板表面，其中，所述喷嘴包括：
    腔体，用于传导所述涂布液；
    分流结构，所述分流结构设置在所述腔体内，所述分流结构用于将所述涂布液均匀分布在所述腔体内，所述分流结构包括：
    多个挡板，所述多个挡板交错排列于所述腔体内，水平方向上相邻的两个挡板之间形成分流口，所述涂布液通过所述分流口往所述腔体两端流动；或者
    多个矩形块，所述多个矩形块阵列排布于所述腔体内，水平方向上相邻的两个矩形块之间形成分流口，所述涂布液通过所述分流口往所述腔体两端流动；
    多个喷口，用于将所述涂布液涂布在所述基板表面。
  2. 如权利要求1所述的喷嘴，其中：
    所述腔体划分为n层，其中n为正整数，所述腔体在第n层的水平方向上划分为2n个区域，第x个区域和第(x+1)个区域之间的位置为所述腔体内在水平方向上的第x分流位置，其中x为正整数，且x不大于（2n-1）；
    所述喷嘴包括n层分流口，第n层分流口设置于所述第（2k-1）分流位置，其中k为正整数，且不大于。
  3. 如权利要求2所述的喷嘴，其中，所述喷嘴还包括入口，所述入口用于通入所述涂布液，所述入口连接所述腔体内第1层的第1个区域的挡板。
  4. 如权利要求3所述的喷嘴，其中，所述挡板包括：
    第一挡板，所述第一挡板用于阻挡所述涂布液；
    第二挡板，所述第二挡板设置在所述第一挡板上，所述第二挡板用于承载所述涂布液。
  5. 如权利要求4所述的喷嘴，其中，所述第二挡板的厚度小于所述第一挡板的厚度。
  6. 如权利要求5所述的喷嘴，其中，所述第一挡板的厚度等于所述相邻的两层第二挡板之间的间隔距离。
  7. 一种喷嘴，用于将涂布液涂布于基板表面，其中，所述喷嘴包括：
    腔体，用于传导所述涂布液；
    分流结构，所述分流结构设置在所述腔体内，所述分流结构用于将所述涂布液均匀分布在所述腔体内；
    多个喷口，用于将所述涂布液涂布在所述基板表面。
  8. 如权利要求7所述的喷嘴，其中，所述分流结构包括：
    多个挡板，所述多个挡板交错排列于所述腔体内，水平方向上相邻的两个挡板之间形成分流口，所述涂布液通过所述分流口往所述腔体两端流动。
  9. 如权利要求8所述的喷嘴，其中：
    所述腔体划分为n层，其中n为正整数，所述腔体在第n层的水平方向上划分为2n个区域，第x个区域和第(x+1)个区域之间的位置为所述腔体内在水平方向上的第x分流位置，其中x为正整数，且x不大于（2n-1）；
    所述喷嘴包括n层分流口，第n层分流口设置于所述第（2k-1）分流位置，其中k为正整数，且不大于。
  10. 如权利要求9所述的喷嘴，其中，所述喷嘴还包括入口，所述入口用于通入所述涂布液，所述入口连接所述腔体内第1层的第1个区域的挡板。
  11. 如权利要求10所述的喷嘴，其中，所述挡板包括：
    第一挡板，所述第一挡板用于阻挡所述涂布液；
    第二挡板，所述第二挡板设置在所述第一挡板上，所述第二挡板用于承载所述涂布液。
  12. 如权利要求11所述的喷嘴，其中，所述第二挡板的厚度小于所述第一挡板的厚度。
  13. 如权利要求12所述的喷嘴，其中，所述第一挡板的厚度等于所述相邻的两层第二挡板之间的间隔距离。
  14. 一种涂布装置，其中，所述涂布装置包括喷嘴，所述喷嘴包括：
    腔体，用于传导所述涂布液；
    分流结构，所述分流结构设置在所述腔体内，所述分流结构用于将所述涂布液均匀分布在所述腔体内；
    多个喷口，用于将所述涂布液涂布在所述基板表面。
  15. 如权利要求14所述的涂布装置，其中，所述分流结构包括：
    多个挡板，所述多个挡板交错排列于所述腔体内，水平方向上相邻的两个挡板之间形成分流口，所述涂布液通过所述分流口往所述腔体两端流动。
  16. 如权利要求15所述的涂布装置，其中：
    所述腔体划分为n层，其中n为正整数，所述腔体在第n层的水平方向上划分为2n个区域，第x个区域和第(x+1)个区域之间的位置为所述腔体内在水平方向上的第x分流位置，其中x为正整数，且x不大于（2n-1）；
    所述喷嘴包括n层分流口，第n层分流口设置于所述第（2k-1）分流位置，其中k为正整数，且不大于。
  17. 如权利要求16所述的涂布装置，其中，所述喷嘴还包括入口，所述入口用于通入所述涂布液，所述入口连接所述腔体内第1层的第1个区域的挡板。
  18. 如权利要求17所述的涂布装置，其中，所述挡板包括：
    第一挡板，所述第一挡板用于阻挡所述涂布液；
    第二挡板，所述第二挡板设置在所述第一挡板上，所述第二挡板用于承载所述涂布液。
  19. 如权利要求18所述的涂布装置，其中，所述第二挡板的厚度小于所述第一挡板的厚度。
  20. 如权利要求19所述的涂布装置，其中，所述第一挡板的厚度等于所述相邻的两层第二挡板之间的间隔距离。
PCT/CN2019/087682 2019-02-21 2019-05-21 喷嘴以及涂布装置 WO2020168643A1 (zh)

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