WO2020158569A1 - ワーク保持治具及び表面処理装置 - Google Patents
ワーク保持治具及び表面処理装置 Download PDFInfo
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- WO2020158569A1 WO2020158569A1 PCT/JP2020/002315 JP2020002315W WO2020158569A1 WO 2020158569 A1 WO2020158569 A1 WO 2020158569A1 JP 2020002315 W JP2020002315 W JP 2020002315W WO 2020158569 A1 WO2020158569 A1 WO 2020158569A1
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- work
- dummy
- dummy plate
- conductive
- clamper
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/06—Suspending or supporting devices for articles to be coated
- C25D17/08—Supporting racks, i.e. not for suspending
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/007—Current directing devices
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/008—Current shielding devices
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D21/00—Processes for servicing or operating cells for electrolytic coating
Definitions
- the present invention relates to a work holding jig and a surface treatment device used for surface treatment such as electrolytic plating.
- a continuous plating device in which a work is held down by a work holding jig, immersed in a processing solution in a processing tank, and electrolytically plated while the work is continuously conveyed (Patent Documents 1 and 2).
- the work holding jig holds the work and sets the work as a cathode.
- the work holding jig holds the work by the upper clamper and the lower clamper, and is electrically connected to the rectifier through the conductive upper clamper and the lower clamper work to set the work as the cathode.
- the work is electrolytically plated in this manner, there is a problem that the lower edge portion where the work is held by the lower clamper is locally thick-film plated only near the lower clamper which is completely immersed in the treatment liquid. Only the clamp region at the tip of the upper clamper is submerged in the treatment liquid, and the same problem as the problem pointed out for the lower clamper occurs.
- Some aspects of the present invention aim to adjust the current flowing to the edge of the work in the vicinity of the region clamped by the clamper to enhance the in-plane uniformity of the work to be surface treated.
- One aspect of the present invention is a work holding jig in which a work to be surface-treated is suspended and held, the work is immersed in a treatment liquid, and the work is electrically connectable to a rectifier.
- a support part capable of conducting with the rectifier, A conductive clamper that is supported by the support portion and clamps an edge portion of the work,
- the clamper is A fixed portion fixed to the support portion, A movable portion that is swingably supported with respect to the fixed portion and clamps the edge portion of the workpiece between the fixed portion and a first surface of the fixed portion; A third surface facing a second surface of the fixing portion opposite to the first surface, a fourth surface opposite to the third surface, a base end portion, and a tip end portion.
- a conductive dummy plate whose base end is supported by the fixing part such that the fourth surface is parallel to the second surface of the fixing part,
- An insulating adjustment member that covers the fourth surface of the dummy plate and is movably supported by the dummy plate;
- the adjusting member relates to a work holding jig that adjusts an exposed conductive area on the fourth surface side of the tip portion of the dummy plate.
- the exposed conductive surface on the side of the fourth surface at the tip of the dummy plate is surface-treated together with the work.
- the current consumed for the surface treatment on the dummy plate is adjusted.
- the electric current flowing to the edge of the work through the fixing portion of the clamper is adjusted.
- the current flowing to the lower edge of the work through the fixing part of the clamper increases, and it is the edge of the work near the area that contacts the fixing part and the side that contacts the fixing part. Current concentrates on the surface of. As a result, the surface treatment locally proceeds in that area.
- the in-plane uniformity of the surface-treated work can be improved by adjusting the current flowing in the local region of the edge of the work.
- the jig according to one embodiment of the present invention may be continuously or intermittently conveyed in the treatment tank, or may be supported so as to be able to move in and out of the treatment tank without being conveyed.
- the dummy plate is insulation-coated except for the fourth surface of the tip portion. This prevents the surface of the dummy plate other than the fourth surface at the tip end thereof from being uselessly surface-treated.
- the dummy plate can change a fixing position of the base end portion with respect to the fixing portion in a direction parallel to a movable direction of the adjusting member.
- Can be This makes it possible to adjust the overlapping area between the dummy plate and the second surface of the clamper or the main surface of the work in a side view as seen from the direction orthogonal to the main surface of the work.
- the position adjustment also adjusts the current consumed for the surface treatment of the dummy plate.
- the support portion may be a lower frame arranged below the work, and the clamper is supported by the lower frame, It may be a conductive lower clamper that clamps the lower edge of the work. This makes it possible to adjust the current flowing in the local region at the lower edge of the work to enhance the in-plane uniformity of the work to be surface-treated.
- the supporting portion may be an upper frame arranged above the work, and the clamper is supported by the upper frame, It may be a conductive upper clamper that clamps the upper edge of the work. This makes it possible to adjust the current flowing in the local region of the upper edge of the work to improve the in-plane uniformity of the surface-treated work.
- Yet another aspect of the present invention is A work holding jig according to any one of (1) to (5) described above, A power supply unit connected to the rectifier and in contact with the work holding jig; A surface treatment bath provided with an anode connected to the rectifier at least at a position facing the fourth surface of the dummy plate; Have The work holding jig relates to a surface treatment device including a contact portion that is in contact with the power feeding portion and is in conduction with the lower frame.
- the in-plane uniformity of the surface-treated workpiece can be increased by the effects of the above-described aspects (1) to (5).
- the power supply unit provided in the surface treatment apparatus and contacting the jig is a power supply rail.
- the power supply can be a fixed contact that contacts the conductive member of the jig.
- FIG. 7 is a characteristic diagram of a comparative example showing the current flowing through the jig in FIG. 6. It is a figure which shows the jig
- FIG. 6 is a view on arrow DD of FIG. 5. It is a front view of a 1st side dummy member. It is a figure which shows the upper support structure of the 1st and 2nd side dummy member. It is a top view of the upper part support structure of the 1st and 2nd side dummy member. It is a figure which shows the lower part support structure of the 1st and 2nd side dummy member.
- FIG. 1 is a vertical cross-sectional view of a surface treatment apparatus, for example, a continuous plating treatment apparatus.
- a plurality of transfer jigs 30 each holding a work 20 such as a circuit board are cyclically transferred in a direction perpendicular to the paper surface of FIG.
- two parallel straight conveyance paths 110 and 120 of the circulation conveyance path 100 are shown.
- the two linear conveyance paths 110 and 120 are connected at both ends to form a loop-shaped circulation conveyance path 100.
- a plating tank (in a broad sense, a surface treatment tank) 200 for surface-treating, for example, plating the work 20 held by each of the plurality of work holding jigs 30, and a plurality of untreated work 20 are transferred.
- a carry-in section (not shown) for carrying in the jig 30 and a carry-out section (not shown) for carrying out the processed work 20 from the plurality of work holding jigs 30 are provided.
- the plating tank 200 is provided along the second linear transport path 120, and the carry-in section and the carry-out section are provided in the first straight transport path 110.
- the circulation transport path 100 further includes a pretreatment tank group 230 arranged on the upstream side of the plating tank 200 and a posttreatment tank group (not shown) arranged on the downstream side of the plating tank 200.
- the continuous plating apparatus 10 has a plating bath (in a broad sense, a surface treatment bath) 200 that contains a plating liquid (a treatment liquid in a broad sense) and has an upper end opening 201.
- the continuous plating apparatus 10 is parallel to the longitudinal direction of the plating tank 200 at a position deviating from above the upper end opening 201 of the plating tank 200. It has at least one, for example, two first guide rails 130 and second guide rails 140 extending along the first direction (direction perpendicular to the paper surface).
- the plurality of transfer jigs 30 are arranged in the treatment liquid of the plating bath 200 to hold the works 20, and are supported by the first and second guide rails 130 and 140.
- each of the plurality of work holding jigs 30 is roughly divided into a transport unit 300 and a work holding unit 500.
- the transport section 300 includes a horizontal arm section 301, a first guided section 310, and a second guided section 320.
- the first guided portion 310 is supported on one end side of the horizontal arm portion 301 and guided by the first guide rail 130.
- the second guided portion 320 is supported by the other end of the horizontal arm portion 301 and guided by the second guide rail 140.
- the first guided portion 310 includes rollers 311, 312, 313 that are in rolling contact with the upper surface and both side surfaces of the first guide rail 130.
- the second guided portion 320 includes a roller 321 that contacts the upper surface of the second guide rail 140.
- the work 20 is used as a cathode, and the plating tank 200 is provided with anode boxes 202 and 203 for accommodating the anodes 410L and 410R on both sides of the transfer path of the work 20.
- An electric field is formed between the cathode and the anode by a rectifier (not shown) to electrolyze the plating solution, and the work 20 is electroplated. Therefore, it is necessary to energize the work 20 being conveyed.
- a power supply unit for example, a power supply rail 210 is provided to supply power to the work 20.
- the power supply rail 210 of the present embodiment as shown in FIG. 210D.
- Each of the plurality of work holding jigs 30 has a power-supplied portion 340 (FIGS. 2 and 3) that is in contact with any one of the four divided power supply rails 210A to 210D to supply power.
- FIG. 4 shows details of the power-supplied part 340.
- the contact portion 340 includes a conductive contact portion (current collector) 341 that comes into contact with the power supply rail 210 on the support plate 330 fixed to the horizontal arm portion 301.
- the contact portion 341 is connected to the support plate 330 by a parallel link mechanism 342 having two parallel links 342A and 342B.
- the two links 342A and 342B are always urged to move clockwise in the clockwise direction by torsion coil springs 343 and 343 which are urging members.
- the contact portion 341 can be brought into contact with the power supply rail 210 with an appropriate contact pressure.
- the two parallel links 342A and 342B are inclined such that the upper fulcrum precedes and the lower fulcrum follows in the transport direction A of the jig 30.
- the contact portion 341 travels in a form in which it is pulled by the work holding jig 30, so the travel is stable.
- the work holding unit 500 includes a plurality of conductive upper clampers 510 that clamp the upper edge 20a of the rectangular work 20, and a conductive upper clamp 510 that clamps the lower edge 20b of the rectangular work 20.
- a plurality of lower clampers 520, and a frame body 530 which is arranged so as to surround the rectangular work 20 and supports the plurality of upper clampers 510 and the plurality of lower clampers 520.
- the frame body 530 includes a conductive upper frame 531 that supports the plurality of upper clampers 510, a conductive lower frame 532 that supports the plurality of lower clampers 520, both ends of the upper frame 531 and both ends of the lower frame 532. And a pair of conductive vertical frames 533 and 534 connecting the parts to each other.
- the pair of vertical frames 533 and 534 are electrically insulated from both ends of the upper frame 531 while being electrically connected to both ends of the lower frame 532.
- the upper frame 531 and/or the lower frame 532 is also referred to as a support portion that supports the clamper (the upper clamper 510 and/or the lower clamper 520).
- a conductive member that is provided in the work holding jig 30 and is a conductive member that can be electrically connected to the rectifier and the work 20 is the first and second branched conductive members. And a common conductive member electrically connected to the first and second branched conductive members.
- two pair of contact portions 341 are arranged at intervals in the conveyance direction A of the work holding jig 30.
- the upstream contact portion 341 in the transport direction A is referred to as a first contact portion 341A
- the downstream contact portion 341 in the transport direction A is referred to as a second contact portion 341B.
- One end of each of the pair of first cables 350A and 350B is electrically connected to the first and second contact portions 341A and 341B.
- the other ends of the pair of first cables 350A and 350B are commonly connected to the common connection unit 360.
- the common connection part 360 which is a common conductive member, is fixed to the first conductive member 361 to which the other ends of the pair of first cables 350A and 350B are electrically connected in common, and to both ends of the first conductive member 361.
- a pair of second conductive members 362 and 363 may be included.
- the pair of second conductive members 362 and 363 are located at the same distance L from the position where the other ends of the pair of first cables 350A and 350B are electrically commonly connected to the first conductive member 361, and the first conductive member is located. It is fixed to both ends of 361.
- one of the pair of first cables 350A and 350 is provided on the surface of the first conductive member 361.
- the other side may be connected to the back surface of the first conductive member 361.
- a pair of first connecting portions 370A and 370B that electrically connect both end portions of the upper frame 531 and the common connecting portion 360, and both end portions of the lower frame 532 are electrically connected.
- a pair of second connecting portions 380A and 380B electrically connecting the pair of vertical frames 533 and 534 connected to each other and the common connecting portion 360.
- the pair of vertical frames 533 and 534 are electrically insulated from the upper frame 531.
- the first branch conductive member is formed of a member that electrically connects the common connecting portion 360 to one of the plurality of upper clampers 510 via one of the pair of first connecting portions 370A and 370B and the upper frame 531. It In this case, the second branch conductive member electrically connects the common connection portion 360 to the other of the plurality of upper clampers 510 via the other of the pair of first connection portions 370A and 370B and the upper frame 531. It is formed by a member that allows
- the first branch conductive member is configured such that the common connecting portion 360 is connected to the plurality of lower clampers via one of the pair of second connecting portions 380A and 380B, one of the pair of vertical frames 533 and 534, and the lower frame 532. It is formed of a member that is electrically connected to one of 520.
- the common connection portion 360 is connected to the plurality of lower sides via the other of the pair of second connection portions 380A and 380B, the other of the pair of vertical frames 533 and 534, and the lower frame 532.
- the clamper 520 is formed of a member that is electrically connected to another one of the clampers 520.
- the common connection part 360 which is a common conductive member, has a resistance value of 10 3 times or more of the maximum resistance difference ⁇ R ⁇ between the first and second branch conductive members, and is larger than copper and aluminum. Includes high resistance material of value r.
- the pair of second conductive members 362 and 363 are formed of a high resistance material
- the first conductive member 361 is formed of a low resistance member.
- the high resistance material examples include stainless steel (SUS).
- SUS stainless steel
- the volume resistivity ( ⁇ m) of SUS304 is 73.7, which is more than an order of magnitude higher than 1.7 ⁇ m for copper and 2.8 ⁇ m for aluminum. Since the measured maximum resistance difference ⁇ R ⁇ is 10 to 20 m ⁇ , the resistance value r of this high resistance material satisfies r ⁇ R ⁇ 10 3 .
- titanium of 53.3 ⁇ m is also suitable as a high resistance material.
- the voltage E is adjusted so as to be ⁇ I.
- the resistance R of the closed loop system includes the high resistance value r of the pair of second conductive members which are common conductive members and have a larger resistance value than copper or aluminum which is generally low in resistance.
- the rectifier regulates to a relatively large voltage V and supplies a constant current I.
- the currents (or electrons) flowing through the first and second branch conductive members are combined at the common connection portion 360, and the variation voltage corresponding to the variation ⁇ R ⁇ in resistance between the first and second branch conductive members. If the current I is applied at a voltage E that greatly exceeds ⁇ V, the resistance variation ⁇ R ⁇ can be ignored.
- FIG. 6 schematically shows a jig of a comparative example in which the common connection portion 360 does not include a material having a high resistance value r as in the present embodiment.
- the currents A1 and A2 measured while the work holding jig was conveyed in the conveyance direction A of FIG. 6 fluctuated up and down with respect to the branch set current value as shown in FIG. Before and after the times T1 and T2, as disclosed in Japanese Patent Application Laid-Open No. 2009-132999, the jig is transferred from one power feeding rail to the other power feeding rail via the joint between the power feeding rails, so that it contacts one power feeding rail.
- the rectifier performs control such that the current value of the contact portion that is in contact with the power supply rail is gradually reduced and the current value of the contact portion that is in contact with the other power supply rail is gradually increased.
- the rectifier controls the output according to the set current.
- the currents A1 and A2 of the comparative example shown in FIG. 7 fluctuate little by little in the constant current control section and largely fluctuate in the current gradual decrease/gradual increase control.
- FIG. 8 schematically shows the jig 30 of the present embodiment in which the common connection portion 360 contains a material having a high resistance value r.
- the current gradual decrease/increase control was performed as at times T1 and T2 shown in FIG. 7, and the output control was performed in accordance with the set current in the other sections.
- the pair of first connecting portions may include the pair of metal plates 370A and 370B, while the pair of second connecting portions may include the pair of second cables 380A and 380B.
- the resistance value from the common connection portion 360 to the upper clamper 510 can be made larger than the resistance value from the common connection portion 360 to the lower clamper 520.
- a current larger than the upper clamper 510, which is entirely immersed in the treatment liquid, by the amount of the current consumed for the surface treatment is applied to the lower clamper.
- the work can be energized via 520.
- FIG. 9 by making the currents A5, A6 flowing through the lower clamper 520 larger than the currents A3, A4 flowing through the upper clamper 510, as a result, the current flowing up and down in the work 20 can be made substantially constant. ..
- Upper Dummy Plate/Lower Dummy Plate As shown in FIG. 5, when the upper frame 531 and/or the lower frame 532 is a conductive supporting portion, the upper and/or lower clampers 510 and 520 are added to the supporting portion. , A conductive upper dummy plate 610 and/or a conductive lower dummy plate 620.
- the upper dummy plate 610 is arranged close to the upper edge portion 20a of the work 20 in a region of the upper edge portion 20a of the work 20 that is not held by the upper clamper 510.
- the lower dummy plate 620 is arranged close to the lower edge portion 20b of the work 20 in a region of the lower edge portion 20b of the work 20 that is not held by the lower clamper 520.
- Each of the upper dummy plate 610 and the conductive lower dummy plate 620 is movably supported on at least one surface, for example, the front and back surfaces so as to cover the front surface and the back surface, respectively, and the exposed conductive areas of the dummy plates 610 and 620 respectively.
- An adjusting insulating plate 630 may be included.
- FIG. 10 An enlarged upper dummy plate 610 is shown in FIG.
- the structure shown in FIG. 10 is also used for the lower dummy plate 620.
- the upper dummy plate 610 is fixed to the upper frame 351 by, for example, a screw 612 via a hinge 611 formed integrally with or separately from the upper dummy plate 610.
- the insulating plate 630 that covers both surfaces of the upper dummy plate 610 may include one or both of an insulating plate 630A that covers the surface of the upper dummy plate 610 and an insulating plate 630B that covers the back surface of the upper dummy plate 610.
- the insulating plates 620A and 620B are inserted into the longitudinal long holes 631A and 631B (only the long hole 631A is shown in FIG. 10) provided in the insulating plates 630A and 630B and the hole 612 provided in the upper dummy plate 610.
- the upper dummy plate 610 is fastened together with the bolt 641 and the nut 642 screwed to the bolt 641.
- Each of the insulating plates 620A and 620B can adjust the vertical position with respect to the upper dummy plate 610 (lower dummy plate 620) within the range of the long holes 631A and 631B.
- the exposed area S1 of the conductive surface where the tip portion 610A of the upper dummy plate 610 is exposed can be adjusted independently for the front surface and the back surface.
- the current consumed for the surface treatment on the upper dummy plate 610 is adjusted.
- the current flowing through the upper clamper 510 to the upper edge portion 20a of the work 20 is adjusted.
- the current flowing through the upper edge portion 20a of the work 20 can be adjusted to enhance the in-plane uniformity of the surface-treated work.
- the current flowing through the lower edge portion 20b of the work 20 can be adjusted to increase the in-plane uniformity of the surface-treated work.
- the upper dummy plate 610 can be bent via a hinge 611 between a first position P1 shown by a solid line in FIG. 12 and a second position P2 shown by a chain line. At the first position P1, the upper dummy plate 610 is arranged in parallel with the work 20 by approaching a region of the upper edge portion 20a of the work 20 that is not held by the upper clamper 510. Second Position At the first position P2, the upper dummy plate 610 is not parallel to the main surface of the work 20, and intersects the main surface of the work 20 at a right angle, for example.
- the upper dummy plate 610 When the surface treatment is performed on the work 20, the upper dummy plate 610 is set to the first position P1. On the other hand, when the work 20 is attached/detached to/from the work holding jig 30, the upper dummy plate 610 is set to the second position P2. By setting the upper dummy plate 610 to the second position P2, a gap is secured between the upper edge portion 20a of the work 20 and the upper frame 351. Thereby, the upper edge of the work 20 can be clamped by the automatic machine at a position different from the upper clamper 510 of the work holding jig 30.
- the upper dummy plate 610 may be pushed by an automatic machine to move the upper dummy plate 610 from the first position P1 toward the second position P2 in the arrow F1 direction.
- the upper dummy plate 610 may be pushed by the thousandth roller 1100 of the arm 1000 provided and moving in the automatic machine.
- the lower dummy plate 620 can be bent between the first position P1 and the second position P2.
- the upper dummy plate 610 may be urged to move to the first position P1 by a spring property of the hinge 611 itself or an urging member such as a leaf spring or a coil spring provided on the hinge 611. This makes it possible to return the upper dummy plate 610 from the second position P2 to the first position P1 in the direction of arrow F2 without applying a return external force. Similarly, the lower dummy plate 620 can be returned in the arrow F2 direction from the second position P2 to the first position P1 without applying a return external force.
- the work holding jig has upper, lower, left, and right clampers that clamp the four sides of the rectangular work 20, a dummy plate and an insulating plate may be provided on each of the four side clampers.
- the dummy plate and adjusting member provided on one or both of the upper clamper 510 and the lower clamper 520 will be described by taking the lower clamper 520 as an example.
- the dummy plate and the adjustment member provided on the upper clamper 510 are understood by replacing the “lower clamper 520” with the “upper clamper 510” and the “lower frame 532” with the “upper frame 531” in the following description. It
- FIG. 13 shows the dummy plate 700 and the adjusting member 720 provided on the lower clamper 520.
- the lower clamper 520 includes a fixed portion 521 fixed to the lower frame 532, and a movable portion 523 supported so as to be swingable with respect to the fixed portion 521.
- the fixed portion 521 has a first surface 521A and a second surface 521B opposite to the first surface 521A.
- the second surface 521B of the fixing portion 521 comes into surface contact with the lower frame 532, and is fixed to the lower frame 532 with bolts 522.
- the fixed portion 521 has two side walls 521C which stand upright from the first surface 521A.
- the lower edge portion 20b of the work 20 is locally clamped between the swinging movable portion 523 and the first surface 521A of the fixed portion 521.
- the movable portion 523 can swing around a pin 524 supported by the two side walls 521C of the fixed portion 521.
- a coil spring 525 is inserted through the pin 524.
- the movable portion 523 is urged to move toward the fixed portion 521 by the coil spring 525.
- the movable portion 523 is electrically connected to the lower frame 532 via the fixed portion 521, the pin 524 or the coil spring 525.
- the coil spring 525 may be changed to a leaf spring or the like.
- the conductive dummy plate 700 includes a third surface 700A that faces the second surface 521B of the fixing portion 521, and a fourth surface 700B that is opposite to the third surface 700A. Further, one end of the dummy plate 700 is referred to as a base end 701, and the other end thereof is referred to as a tip end 704. In the dummy plate 700, the base surface 701 is supported by the fixing portion 521 such that the fourth surface 700B is parallel to the second surface 521B of the fixing portion 521.
- two elongated holes 702 and 703 can be formed in the base end portion 701 of the dummy plate 4700.
- a bolt 710 is inserted into each of the elongated holes 702 and 703 to fasten the bolt 710 to the lower frame 532.
- the long holes 702 and 703 allow the dummy plate 700 to adjust the fixed position in the direction of arrow C in FIG.
- the insulating adjusting member 720 covers a part of the fourth surface 700B of the dummy plate 700 and is superimposed on the dummy plate 700.
- the only conductive surface not always covered by the adjusting member 720 may be the tip 704.
- the other surface not covered by the adjusting member 720 is insulation-coated.
- the adjustment member 720 is provided with, for example, two elongated holes 721 and 722.
- a bolt 730 is inserted into each of the long holes 721 and 722 to fasten the bolt 730 to the dummy plate 700.
- the elongated holes 702 and 703 allow the adjustment member 720 to adjust the fixed position in the direction of arrow C in FIG. Thereby, the adjustment member 720 can adjust the exposed conductive area S2 on the fourth surface 700B side of the tip portion 704 of the dummy plate 700.
- the exposed conductive surface on the fourth surface 700B side of the tip portion 704 of the dummy plate 700 is surface-treated.
- the current consumed for the surface treatment on the dummy plate 700 is adjusted.
- the current flowing through the lower edge portion 20b of the work 20 via the fixing portion 521 of the lower clamper 520 is adjusted.
- the adjusting member 720 the current flowing to the lower edge portion 20b of the work 20 via the fixing portion 521 of the lower clamper 520 increases. This is because the resistance value between the movable portion 523 and the lower frame 532 is relatively large as described above.
- the electric current does not concentrate on the lower edge portion 20b of the work 20 near the area in contact with the movable portion 523 and the surface 20b1 (FIG. 13) on the side in contact with the movable portion 523.
- the surface treatment of the work 20 locally progresses in the region near the fixed portion 521.
- the current flowing in the local region 20b2 of the lower edge portion 20b of the work 20 can be adjusted to enhance the in-plane uniformity of the surface-treated work.
- the fixing positions of the base end portion 701 of the dummy plate 700 with respect to the fixing portion 521 can be changed in the direction parallel to the arrow C direction in which the adjusting member 720 can be moved by the elongated holes 702 and 703.
- the overlapping area of the dummy plate 700 and the second surface 521B of the fixing portion 521 of the lower clamper 520 or the main surface of the work and the dummy plate 700 can be adjusted in a side view viewed from the direction orthogonal to the main surface of the work 20.
- You can The position adjustment also adjusts the current consumed for the surface treatment of the dummy plate 700.
- the treatment liquid Q in the treatment tank 200 shown in FIG. 1 is set to the liquid level L shown in FIG. Therefore, the entire lower clamper 520 is submerged in the treatment liquid Q. Therefore, in the dummy plate 700, except for the fourth surface 700B at the tip portion 704, as shown by the hatching in FIGS. 13 and 14, other surfaces not covered by the adjusting member 720 are insulation-coated. As a result, the surface of the dummy plate 700 other than the fourth surface 700B of the tip portion 704 is not wastefully surface-treated.
- the structure of the dummy plate 700 and the adjusting member 720 provided on the lower clamper 520 described above can be applied to the dummy plate and the adjusting member provided on the upper clamper 510.
- the upper clamper 510 differs from the lower clamper 520 in that the entire upper clamper 510 does not sink into the processing liquid Q from the position of the liquid level L of the processing liquid Q shown in FIG. For this reason, in the dummy plate provided on the upper clamper 510, the insulating coating region may be narrowed only to the region immersed in the treatment liquid Q. This is because the area that is not immersed in the treatment liquid Q is not subjected to the surface treatment, so that it is not necessary to perform the insulating coating.
- the work holding jig 30 includes conductive first and second side dummy members 800A arranged close to both edge portions of the work 20. , 800B.
- FIG. 15 which is a view taken along the line DD in FIG. 5
- the first side dummy member 800A is arranged between the side edge portion 20d of the work 20 and the vertical frame 534.
- the second side dummy member 800B is arranged between the side edge portion 20c of the work 20 and the vertical frame 534.
- first branch conductive members electrically connected to the second conductive member 362 of the common conductive member 360, branched from the common conductive member 360, and electrically connected to the work 20 through the upper clamper 510 are provided. It is defined by the first connecting portions 370A and 370B and the upper frame 531 connected to both ends thereof.
- the work holding jig 30 is further electrically connected to the common conductive member 360, is branched from the common conductive member 360, and is electrically connected to the first and second side dummy members 800A and 800B. It further has 900 (900A, 900B).
- the first dummy conduction member 900A of the second branch conduction member 900 is branched from the common conductive member 360 and is electrically connected to the first side dummy member 800A.
- the second dummy conduction member 900B of the second branch conduction member 900 is branched from the common conductive member 360 and is electrically connected to the second side dummy member 800B.
- the common conductive member 360 that can be electrically connected to the rectifier is electrically connected to the work 20 by the upper clamper 510 via the first branch conductive members 370A, 370B, 531.
- the common conductive member 360 is electrically connected to the first and second side dummy members 800A and 800B via the second branch conductive member 900 (900A and 900B).
- the total current flowing through the work 20 and the first and second side dummy members 800A and 800B can be set by a rectifier.
- the vertical frames 533 and 534 are insulation-coated.
- the first and second side dummy members 800A and 800B Without the first and second side dummy members 800A and 800B, the electric field is concentrated on both side edge portions 20c and 20d of the work 20, and a large amount of current flows to both side edge portions 20c and 20d of the work 20. If the vertical frames 533 and 534 are not coated with insulation, current is consumed to plate the conductive vertical frames 533 and 534, and the current flowing through the side edges 20c and 20d of the work 20 is reduced. Therefore, the first dummy conduction member 900A and the second dummy conduction member 900B are provided so that the currents flowing through both side edge portions 20c and 20d of the work 20 can be adjusted.
- the resistance value of the second branch conducting member 900 (900A, 900B) with respect to the first branch conducting members 370A, 370B, 531, it is independent of the current flowing through the work 20.
- the current flowing through the first and second side dummy members 800A and 800B can be set.
- the first and second side dummy members which are arranged close to the side edge portions 20c and 20d of the work 20, are also surface-treated to adjust the current flowing through the side edge portions 20c and 20d of the work 20, The in-plane uniformity of the surface-treated work can be improved.
- the currents flowing through the first and second side dummy members 800A and 800B can be set independently. As a result, the current flowing through the one side edge portion 20c and the other side edge portion 20d of the work 20 can be adjusted.
- the first dummy conductive member 900A includes, for example, a cable 910A having one end connected to the second conductive member 362 of the common conductive member 360, a conductive plate 920A connected to the other end of the cable 910A, and one end being a conductive plate. And a cable 930A connected to the other side and connected to the first side dummy member 800A.
- the second dummy conduction member 900B has a cable 910B, a conductive plate 920B and a cable 930B.
- the first and second dummy conduction members 900A and 900B can have first and second variable resistors.
- the first variable resistor provided in the first dummy conduction member 900A is composed of a long hole 921A provided in the conductive plate 920A and a movable contact portion 922A that moves along the long hole 921A.
- the long hole 921A has a longitudinal direction in a direction (horizontal direction in FIG. 5) in which the distance from the connection portion of the cable 910A increases.
- the resistance value can be changed by changing the position of the movable contact portion 922A connected to the cable 930A.
- the first variable resistor provided in the second dummy conduction member 900B is also composed of the elongated hole 921B and the movable contact portion 922B.
- the resistance value of the first dummy conducting member 900A and the resistance value of the second side dummy member 800B can be adjusted within a predetermined range by adjusting the resistance values with the first and second variable resistors. It can be adjusted arbitrarily.
- the positions of the movable contact portion 922A and the movable contact portion 922B are manually or automatically adjusted.
- the first dummy conductive member 900A is conductive with the upper portion of the first side dummy member 800A
- the second dummy conductive member 900B is the second dummy dummy member 800B.
- the widths W1, W2 and W3 parallel to the thickness direction of the work 20 are higher than the lower part. Is preferably narrow (W1 ⁇ W2 ⁇ W3). The width may be changed stepwise or continuously.
- the upper portions of the first and second side dummy members 800A and 800B are closer to the rectifier, the upper portions tend to be surface-treated more than the lower portions. Due to this, the upper portions of both side edge portions 20c and 20d of the work 20 tend to be difficult to be surface-treated (the plating thickness becomes thin).
- the plating thickness becomes thin.
- the first and second side dummy support portions provided on the work holding jig 30 will be described with reference to FIGS. 17 to 19.
- the first and second side dummy support portions are provided with, for example, as shown in FIG. 15, first and second side dummy members 800A and 800B, which are indicated by arrows E in the width direction of the work 20.
- first and second side dummy members 800A and 800B which are indicated by arrows E in the width direction of the work 20.
- Direction and the direction of arrow F which is the thickness direction of the work 20, can be changed.
- 17 and 18 are a front view and a plan view of a supporting portion that supports the upper portion of the first side dummy member 800A.
- Two attachment pieces 820A extending toward the inside of the work holding jig 30 are provided on the upper portion of the vertical frame 534.
- An upper support piece 830A that supports the upper portion of the first side dummy member 800A is arranged between the two attachment pieces 820A.
- the two mounting pieces 820A have a long hole 821 whose longitudinal direction is in the arrow E direction.
- a bolt 835 inserted through the elongated hole 821 is screwed into the upper support piece 830A. By loosening the bolt 835, the upper support piece 830A can move in the direction of arrow E together with the first side dummy member 800A.
- the bolt 835 is tightened, the upper support piece 830A is fixed to the two mounting pieces 820A.
- the upper support piece 830A has a long hole 831 penetrating vertically and having a longitudinal direction in the arrow F direction.
- the bolt 810 inserted through the elongated hole 831 is screwed onto the upper portion of the first side dummy member 800A. If the bolt 810 is loosened, the first side dummy member 800A can move in the arrow F direction. If the bolt 810A is tightened, the first side dummy member 800A is fixed to the upper support piece 830A. Although illustration is omitted, the upper portion of the second side dummy member 800B is also supported in the same manner as the upper portion of the first side dummy member 800A.
- FIG. 19 shows a support portion that supports a lower portion of the first side dummy member 800A.
- Two attachment pieces 820A extending toward the inside of the work holding jig 30 are provided on the upper portion of the vertical frame 534.
- a lower support piece 830B that supports the lower portion of the first side dummy member 800A is arranged between the two attachment pieces 820A.
- the lower support piece 830B has the same structure as the upper support piece 830A, except for the structure that supports the connecting portion 850 described later. Further, the lower portion of the second side dummy member 800B is also supported in the same manner as the lower portion of the first side dummy member 800A.
- the first and second side dummy members 800A and 800B can be connected to the rectifier by connecting the cables 930A and 930B to the bolt 810 shown in FIG. 18, for example.
- the mounting piece 820A and/or the upper/lower supporting pieces 830A and 830B are formed of an insulator. ..
- the structure may be such that the first and second side dummy members 800A and 800B are moved only in the width direction E of the work 20.
- the surface treatment amount (plating film thickness) at 20d2 can be adjusted. For example, if the first side dummy member 800A is moved upward in FIG. 15, the plating film thickness on the surface 20d1 of the work 20 can be reduced. On the contrary, if the first side dummy member 800A is moved downward in FIG. 15, the plating film thickness of the back surface 20d2 of the work 20 can be reduced. Therefore, the structure may be such that the first and second side dummy members 800A and 800B are moved only in the thickness direction F of the work 20.
- a connecting member 850 that electrically connects the lower portion of the first side dummy member 800A and the lower portion of the second side dummy member 800B can be further provided.
- the connection member 850 By providing the connection member 850, the current easily flows under the first and second side dummy members 800A, 800B, and the current flowing from the upper part to the lower part of the side edges 20c, 20d of the work 20 is reduced. Adjustments can be made effectively.
- Both ends of the connecting member 850 are slidably supported by the two lower support pieces 830B shown in FIG. This allows the two lower support pieces 830B to move in the direction of arrow E shown in FIG. Further, both ends of the connection member 850 are electrically connected to the lower portions of the first and second side dummy members 800A and 800B by flexible conductive members. This allows the first and second side dummy members 800A and 800B to move in the directions of arrows E and F shown in FIG.
- Insulating plate (upper insulating plate, lower insulating plate, front insulating plate, back insulating plate), 700... Dummy plate, 700A... Third Surface, 700B... Fourth surface, 701... Base end portion, 704... Tip portion, 720... Adjusting member, 800A... First side dummy member, 800B... Second side dummy member, 850... Connecting member, 900 (900A) , 900B)... Second branch conducting member, 910A, 920A, 922A, 930A... First dummy conducting member, 910B, 920B, 922B, 930B... Second dummy conducting member, 920A, 921A, 922A... First Variable resistor, 920B, 921B, 922B... Second variable resistor, P1... First position, P2... Second position, S1, S2... Exposed conductive area
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Abstract
Description
前記整流器と導通可能な支持部と、
前記支持部に支持され、前記ワークの縁部をクランプする導電性のクランパーと、
を有し、
前記クランパーは、
前記支持部に固定される固定部と、
前記固定部に対して揺動可能に支持され、前記固定部の第1面との間で前記ワークの前記縁部をクランプする可動部と、
前記固定部の前記第1面とは反対側の第2面と対向する第3面と、前記第3面とは反対側の第4面と、基端部と、先端部と、を有し、前記第4面が前記固定部の前記第2面と平行になるようにして、前記基端部が前記固定部に支持される導電性のダミー板と、
前記ダミー板の前記第4面を覆って前記ダミー板に移動可能に支持される絶縁性の調整部材と、
を含み、
前記調整部材は、前記ダミー板の前記先端部における前記第4面側の露出導電面積を調整するワーク保持治具に関する。
上述された(1)~(5)のいずれかのワーク保持治具と、
整流器に接続され、前記ワーク保持治具と接触する給電部と、
前記整流器に接続される陽極を、少なくとも前記ダミー板の前記第4面と対向する位置に備えた表面処理槽と、
を有し、
前記ワーク保持治具は、前記給電部と接触し、かつ、前記下枠と導通する接触部を含む表面処理装置に関する。
図1は、表面処理装置例えば連続メッキ処理装置の縦断面図である。連続メッキ処理装置10は、回路基板等のワーク20をそれぞれ保持する複数の搬送治具30が、図1の紙面と垂直な方向に循環搬送される。図1では、循環搬送路100のうちのは平行な2つの直線搬送路110,120を示している。この2つの直線搬送路110,120は両端にて連結されてループ状の循環搬送路100を形成している。
ワーク保持部500は、図5に示すように、矩形ワーク20の上縁部20aをクランプする導電性の複数の上側クランパー510と、矩形ワーク20の下縁部20bをクランプする導電性の複数の下側クランパー520と、矩形ワーク20を囲んで配置され、複数の上側クランパー510及び複数の下側クランパー520を支持する枠体530と、を有する。
本実施形態では、ワーク保持治具30に設けられる導電部材であって、整流器及びワーク20と電気的に接続可能な導電部材が、第1及び第2の分岐導電部材と、第1及び第2の分岐導電部材と電気的に接続された共通導電部材とを含んでいる。
図6は、本実施形態のように共通接続部360に高抵抗値rの材料を含まない比較例の治具を模式的に示す。図6中の比較例の治具の搬送方向Aの上流側の接触部に流れる電流A1と、搬送方向Aの下流側の接触部に流れる電流A2とする。
図8は、共通接続部360に高抵抗値rの材料を含む本実施形態の治具30を模式的に示す。図8中の治具30の搬送方向Aの上流側の接触部341Aに流れる電流A1と、搬送方向Aの下流側の接触部341Bに流れる電流A2と、一対の第1接続部370A,370Bに流れる電流A3,A4と、一対の第2接続部380A,380Bに流れる電流A5,A6とする。
図5に示すように、上枠531及び/又は下枠532を導電性の支持部としたとき、支持部には上側及び/又は下側クランパー510,520加えて、導電性の上側ダミー板610及び/又は導電性の下側ダミー板620を有することができる。上側ダミー板610は、ワーク20の上縁部20aのうち上側クランパー510で保持されない領域にて、ワーク20の上縁部20aと接近して配置される。下側ダミー板620は、ワーク20の下縁部20bのうち下側クランパー520で保持されない領域にて、ワーク20の下縁部20bと接近して配置される。
以下、上側クランパー510及び下側クランパー520の一方又は双方に設けられるダミー板及び調整部材を、下側クランパー520を例に挙げて説明する。上側クランパー510に設けられるダミー板及び調整部材については、以下の説明中の「下側クランパー520」を「上側クランパー510」と、「下枠532」を「上枠531」と読み替えることで理解される。
図5に示すように、ワーク保持治具30は、ワーク20の両測縁部に接近して配置される導電性の第1及び第2のサイドダミー部材800A,800Bをさらに有することができる。図5のD-D矢視図である図15に示すように、第1のサイドダミー部材800Aは、ワーク20の側縁部20dと縦枠534との間に配置される。第2のサイドダミー部材800Bは、ワーク20の側縁部20cと縦枠534との間に配置される。
Claims (6)
- 表面処理されるワークを垂下して保持して、前記ワークを処理液中に浸漬させ、かつ、整流器と電気的に接続可能なワーク保持治具において、
前記整流器と導通可能な支持部と、
前記支持部に支持され、前記ワークの縁部をクランプする導電性のクランパーと、
を有し、
前記クランパーは、
前記支持部に固定される固定部と、
前記固定部に対して揺動可能に支持され、前記固定部の第1面との間で前記ワークの前記縁部をクランプする可動部と、
前記固定部の前記第1面とは反対側の第2面と対向する第3面と、前記第3面とは反対側の第4面と、基端部と、先端部と、を有し、前記第4面が前記固定部の前記第2面と平行になるようにして、前記基端部が前記固定部に支持される導電性のダミー板と、
前記ダミー板の前記第4面を覆って前記ダミー板に移動可能に支持される絶縁性の調整部材と、
を含み、
前記調整部材は、前記ダミー板の前記先端部における前記第4面側の露出導電面積を調整することを特徴とするワーク保持治具。 - 請求項1において、
前記ダミー板は、前記先端部における前記第4面を除いて、絶縁コーティングされていることを特徴とするワーク保持治具。 - 請求項1または2において、
前記ダミー板は、前記固定部に対する前記基端部の固定位置が、前記調整部材が移動可能な方向と平行な方向に変更可能であることを特徴とするワーク保持治具。 - 請求項1乃至3のいずれか一項において、
前記支持部は、前記ワークの下方に配置される下枠であり、
前記クランパーは、前記下枠に支持されて、前記ワークの下縁部をクランプする導電性の下側クランパーであることを特徴とするワーク保持治具。 - 請求項1乃至3のいずれか一項において、
前記支持部は、前記ワークの上方に配置される上枠であり、
前記クランパーは、前記上枠に支持されて、前記ワークの上縁部をクランプする導電性の上側クランパーであることを特徴とするワーク保持治具。 - 請求項1乃至5のいずれか一項に記載のワーク保持治具と、
整流器に接続され、前記ワーク保持治具と接触する給電部と、
前記整流器に接続される陽極を、少なくとも前記ダミー板の前記第4面と対向する位置に備えた表面処理槽と、
を有し、
前記ワーク保持治具は、前記給電部と接触し、かつ、前記支持部と導通する接触部を含むことを特徴とする表面処理装置。
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05148693A (ja) * | 1992-01-14 | 1993-06-15 | Toshiba Corp | 電気銅鍍金用治具 |
JP2006291337A (ja) * | 2005-04-14 | 2006-10-26 | Nippon Mektron Ltd | プリント基板のめっき方法 |
JP2013194309A (ja) * | 2012-03-22 | 2013-09-30 | Almex Pe Inc | ワーク保持治具及び表面処理装置 |
WO2018062259A1 (ja) * | 2016-09-29 | 2018-04-05 | アルメックスPe株式会社 | ワーク保持治具及び表面処理装置 |
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KR101500966B1 (ko) * | 2011-06-30 | 2015-03-10 | 아루멕쿠스 피이 가부시키가이샤 | 표면 처리 장치 및 워크 유지 지그 |
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05148693A (ja) * | 1992-01-14 | 1993-06-15 | Toshiba Corp | 電気銅鍍金用治具 |
JP2006291337A (ja) * | 2005-04-14 | 2006-10-26 | Nippon Mektron Ltd | プリント基板のめっき方法 |
JP2013194309A (ja) * | 2012-03-22 | 2013-09-30 | Almex Pe Inc | ワーク保持治具及び表面処理装置 |
WO2018062259A1 (ja) * | 2016-09-29 | 2018-04-05 | アルメックスPe株式会社 | ワーク保持治具及び表面処理装置 |
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