WO2020143260A1 - 一种抛光液输送摆臂及抛光设备 - Google Patents

一种抛光液输送摆臂及抛光设备 Download PDF

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Publication number
WO2020143260A1
WO2020143260A1 PCT/CN2019/111085 CN2019111085W WO2020143260A1 WO 2020143260 A1 WO2020143260 A1 WO 2020143260A1 CN 2019111085 W CN2019111085 W CN 2019111085W WO 2020143260 A1 WO2020143260 A1 WO 2020143260A1
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WO
WIPO (PCT)
Prior art keywords
polishing
swing arm
fluid delivery
arm according
falling point
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PCT/CN2019/111085
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English (en)
French (fr)
Inventor
靳阳
李伟
尹影
李思
Original Assignee
北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所）
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Application filed by 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） filed Critical 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所）
Publication of WO2020143260A1 publication Critical patent/WO2020143260A1/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B29/00—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
    • B24B29/02—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents designed for particular workpieces

Definitions

  • the present application relates to the technical field of polishing, and in particular to a polishing fluid delivery swing arm and polishing equipment.
  • Chemical mechanical polishing is a process commonly used in the manufacture of high-density integrated circuits. When polishing, it is necessary to transport the polishing liquid to the corresponding position. Among them, the work of transporting the polishing liquid is completed by the polishing liquid conveying swing arm.
  • the position of the polishing fluid outlet is fixed relative to the swing arm. According to the different requirements of the polishing process, the falling point of the polishing liquid on the polishing pad needs to be adjusted accordingly.
  • the existing method needs to adjust the position of the polishing liquid delivery swing arm in order to achieve the adjustment of the falling point of the slurry on the polishing pad.
  • the present application is to overcome the shortcomings of the prior art, and to provide a polishing fluid delivery swing arm and polishing equipment to solve at least one problem in the prior art.
  • a polishing fluid delivery swing arm including an arm body, a polishing fluid delivery tube configured to deliver polishing fluid is provided on the arm body;
  • a slurry falling point adjustment block is slidably disposed on the arm body, and the slurry falling point adjustment block is configured to fix the discharge end of the polishing liquid delivery tube.
  • the slurry falling point adjusting block is provided with a through-through hole configured to allow the polishing liquid delivery tube to penetrate therein, wherein the discharge end of the polishing liquid delivery tube is connected from the through Through the hole.
  • the penetration hole includes a first sub-hole and a second sub-hole that communicate with each other;
  • the second sub-hole is arranged vertically and directly facing the polishing pad.
  • the number of the through holes is set in multiples.
  • outlet ends of the plurality of second sub-holes on the slurry falling point adjustment block are distributed on a straight line.
  • outlet ends of the plurality of second sub-holes on the slurry falling point adjustment block are distributed on the same circumference.
  • the penetration holes and the delivery pipes are provided in one-to-one correspondence.
  • the arm body is provided with a first installation groove configured to install the polishing liquid delivery tube;
  • the slurry falling point adjustment block is located in the first installation groove, a slide path is provided at the bottom of the first installation groove, and the slurry falling point adjustment block is slidably connected to the slide path.
  • it also includes a drive motor and a transmission mechanism
  • the driving motor is connected to the arm body, and the driving motor is connected to the slurry falling point adjustment block through the transmission mechanism, and is configured to slide the slurry falling point adjustment block in the first mounting groove .
  • the transmission mechanism includes a gear and a straight rack
  • the gear is connected to the output shaft of the drive motor, the straight rack is fixedly connected to the outer wall of the slurry falling point adjustment block, and the gear is meshed with the straight rack.
  • a first stopper is provided on the arm body, and the first stopper is configured to restrict the slurry falling point adjustment block to keep it relatively fixed with the slideway.
  • the arm body is further provided with a cleaning fluid delivery tube configured to transport cleaning fluid;
  • the cleaning liquid delivery pipe is provided with a spray head communicating with its inner cavity, the spray head has a plurality of nozzles, and the nozzles of each spray head are provided with nozzles;
  • the nozzle is provided with a spray liquid channel communicating with the spray head, and the spray liquid channel is configured to cause the cleaning liquid sprayed by the spray head to flow along its inner wall; wherein, along the spray direction of the nozzle, the The cross-sectional area or length of the inner wall of the liquid ejection channel gradually increases.
  • the cross section of the inner wall of the liquid ejection channel is perpendicular to the ejection direction of the nozzle.
  • the spray head is rotatably connected to the cleaning liquid delivery tube.
  • it also includes a vertically arranged rotating shaft, and the arm body is fixed on the top of the rotating shaft.
  • the arm body is provided with a second installation groove configured to install the cleaning liquid delivery tube, wherein the cleaning liquid delivery tube is slidably connected to the second installation groove.
  • a second stopper is provided on the arm body, and the second stopper is configured to restrict the cleaning liquid delivery tube from remaining relatively fixed with the second installation groove.
  • the polishing liquid delivery tube is provided as a flexible hose.
  • the polishing liquid delivery tube is configured as a corrugated tube or a spiral tube.
  • the present application also provides: a polishing device, including the polishing liquid delivery swing arm as described in any one of the above.
  • the present application proposes a polishing fluid delivery swing arm, including an arm body, a polishing fluid delivery tube configured to deliver polishing fluid is provided on the arm body, and a slurry falling point adjustment is provided on the arm body slidingly Block, slurry falling point adjustment block is configured to fix the discharge end of the polishing liquid delivery tube.
  • the position of the discharge end of the polishing liquid delivery tube can be adjusted by moving the slurry falling point adjustment block, thereby making it possible to adjust the falling point of the polishing liquid on the polishing pad without moving the arm body.
  • FIG. 1 is a first shaft side view of a polishing liquid delivery swing arm in an embodiment of this application
  • FIG. 2 is a side view of a first axis of a polishing liquid delivery swing arm in an embodiment of the present application
  • FIG. 3 is a schematic diagram of the positional relationship between a polishing liquid delivery swing arm and a polishing pad in an embodiment of the present application;
  • FIG. 4 is a schematic diagram of a slurry falling point adjustment block in an embodiment of the present application.
  • FIG. 5 is a schematic diagram showing that the outlet ends of the second sub-holes on a slurry falling point adjusting block in the embodiment of the present application are linearly distributed;
  • FIG. 6 is a schematic diagram showing that the outlet ends of the second sub-holes on a slurry falling point adjusting block in the embodiment of the present application are distributed in a ring shape.
  • the terms “including”, “having” and their homologous words are only intended to indicate specific features, numbers, steps, operations, elements, components or combinations of the foregoing, And should not be understood as first excluding the presence or addition of one or more other features, numbers, steps, operations, elements, components, or combinations of the foregoing items or one or more features, numbers, steps, operations, elements, components Or the possibility of a combination of the foregoing.
  • the expression "A or/and B" includes any or all combinations of the words listed simultaneously, for example, may include A, may include B, or may include both A and B.
  • Expressions used in various embodiments of the present application may modify various constituent elements in various embodiments, but the corresponding constituent elements may not be limited.
  • the above expression does not limit the order and/or importance of the described elements.
  • the above expression is only for the purpose of distinguishing one element from other elements.
  • the first user device and the second user device indicate different user devices, although both are user devices.
  • the first element may be referred to as the second element, and similarly, the second element may also be referred to as the first element.
  • a polishing fluid delivery swing arm including an arm body 1 provided with a cleaning fluid delivery tube 2 configured to deliver cleaning fluid and a polishing fluid delivery mechanism ⁇ 3 ⁇ The polishing liquid delivery tube 3.
  • a slurry falling point adjustment block 7 is also slidably disposed on the arm body 1, and the slurry falling point adjustment block 7 is configured to fix the discharge end of the polishing liquid delivery tube 3. Since the discharge end of the polishing liquid delivery tube 3 is fixed to the slurry falling point adjustment block 7, the position of the discharge end of the polishing liquid delivery tube 3 can be adjusted by moving the slurry falling point adjustment block 7.
  • the slurry falling point adjustment block 7 may be provided with a through hole 8 configured to allow the polishing liquid delivery tube 3 to penetrate therein.
  • the slurry falling point adjustment block 7 can The discharge end of the polishing liquid delivery tube 3 is installed and fixed, wherein the discharge end of the polishing liquid delivery tube 3 passes through the through hole 8. As shown in FIG. 2, after the discharge end of the polishing liquid delivery tube 3 passes through the slurry falling point adjustment block 7, it then extends from the opening at the bottom of the arm body 1 and faces the polishing pad.
  • polishing liquid When the polishing liquid is transferred into the polishing liquid delivery tube 3, the polishing liquid will flow out from the discharge end of the polishing liquid delivery tube 3 and drip on the polishing pad under the action of gravity.
  • the punch-through hole 8 may include a first sub-hole 10 and a second sub-hole 11 that communicate with each other, wherein the second sub-hole 11 is vertically arranged and faces the polishing pad.
  • the polishing liquid conveying pipe 3 penetrates through the first sub-hole 10 and then exits from the outlet end of the second sub-hole 11, thereby ensuring that the discharge end of the polishing liquid conveying pipe 3 is directly facing the polishing pad.
  • the number of the through holes 8 may be provided in multiple numbers, and the through holes 8 correspond to the delivery tubes in one-to-one correspondence. The number and position of the through holes 8 may be set as required.
  • the outlet end of the second sub-hole 11 on the slurry falling point adjustment block 7 can be distributed on a straight line; as shown in FIG. 6, the second sub-hole on the slurry falling point adjustment block 7
  • the outlet end of 11 can be distributed on the same circumference. Due to the different shapes and sizes of the polishing pads of different specifications, the position of the second sub-hole 11 can be set so that the polishing liquid from each polishing liquid delivery tube 3 can be dropped in a linear or annular distribution. On the polishing pad, so that the polishing liquid can be dispersed on the polishing pad under the action of centrifugal force.
  • the distribution form of the outlet end of the second sub-hole 11 on the slurry falling point adjusting block 7 can also be set as required.
  • the arm body 1 may be provided with a first installation groove configured to install the polishing liquid delivery tube 3, and at the same time, the slurry falling point adjustment block 7 is also located in the first installation groove, wherein a slide track may be provided at the bottom of the first installation groove
  • the slurry falling point adjusting block 7 is slidably connected with the slideway.
  • the bottom of the slurry falling point adjusting block 7 may be provided with a protrusion, and the protrusion is inserted into the slideway and slidingly connected thereto.
  • Sliding the slurry falling point adjusting block 7 along the slideway causes the position where the discharge end of the polishing liquid delivery tube 3 is aligned to change, so as to facilitate the dropping of the polishing liquid to the corresponding position on the polishing pad.
  • the driving motor is connected to the arm body 1, and the driving motor is connected to the slurry falling point adjustment block 7 through the transmission mechanism, and is configured such that the slurry falling point adjustment block 7 is installed at the first Slide inside the slot.
  • the transmission mechanism includes a gear and a straight rack; the gear is connected to the output shaft of the drive motor, the straight rack is fixedly connected to the outer wall of the slurry falling point adjustment block 7, and the gear is meshed with the straight rack.
  • the transmission mechanism may adopt a worm gear structure; the worm gear is connected to the output shaft of the drive motor, the worm gear is fixedly connected to the outer wall of the slurry falling point adjustment block 7, and the worm gear meshes with the worm gear.
  • a driving motor may be installed on the arm body 1, and a gear may be fixed on the output shaft of the driving motor, and at the same time, the outer wall of the slurry falling point adjusting block 7 A straight rack meshed with the gear can be fixedly arranged on the upper part. After the driving motor is started, the straight rack and the slurry falling point adjustment block 7 can be driven to slide in the first installation groove through the gear.
  • a linear stepping motor can be installed on the arm body 1, and the slurry falling point adjusting block 7 is connected to the output shaft of the stepping motor, and the linear stepping motor can be started The slurry falling point adjusting block 7 is driven to slide in the first installation groove.
  • the polishing liquid delivery tube 3 may be a flexible tube and has scalability, and specifically, a corrugated tube or a spiral tube may be used. Since the polishing liquid delivery tube 3 is flexible, it can adjust its length according to the distance from the polishing pad.
  • the arm body 1 is provided with a first stopper, and the first stopper is configured to restrict the slurry falling point adjusting block 7 to keep it relatively fixed with the slideway.
  • the cleaning liquid delivery tube 2 provided on the arm body 1 is used to transport the cleaning liquid, and the cleaning pad is cleaned by the cleaning liquid.
  • the cleaning liquid can generally be an aqueous liquid.
  • the cleaning liquid conveying pipe 2 is provided with a spray head 4 communicating with its inner cavity.
  • a spray head 4 communicating with its inner cavity.
  • the nozzle 5 is not shown in FIG. 1.
  • the nozzle 5 is provided with a spray liquid channel communicating with the spray head 4, and the spray liquid channel is configured to cause the cleaning liquid sprayed by the spray head 4 to flow along its inner wall.
  • the area or length of the cross section of the inner wall of the liquid ejection channel gradually increases along the ejection direction of the nozzle 5.
  • the cross section of the inner wall of the liquid ejection channel is perpendicular to the ejection direction of the nozzle 5.
  • CMP Chemical mechanical polishing
  • the process of chemical mechanical polishing is as follows: the polishing disk drives the polishing pad to rotate; the bottom of the polishing head absorbs the crystal, and the polishing head is pressed down under the action of external force, so that the circular crystal is ground on the polishing pad; the bottom of the dresser is installed Grinding wheel discs, which polish the polishing pad by rotation; the polishing liquid is transported to the corresponding position above the polishing pad and dripped on the polishing pad. Under the action of centrifugal force, the polishing liquid spreads on the surface of the polishing pad; at the same time, Aqueous liquid (cleaning liquid) is transported to clean the polishing pad, thereby removing the abrasives dropped during the grinding process.
  • Aqueous liquid cleaning liquid
  • the polishing fluid and the cleaning fluid can be transported, thereby simplifying the structure of the polishing equipment.
  • the pressurized cleaning fluid is input into the inner cavity of the cleaning fluid delivery tube 2, and the cleaning fluid will be ejected through the spray head 4 provided on the cleaning fluid delivery tube 2.
  • spray head 4 There are several spray heads 4, correspondingly, each spray head 4 There will be a spray of cleaning fluid.
  • the nozzles 5 may be provided at the water outlet end of each spray head 4, wherein the spray head 4 may be connected to the spray head 4 in a plug-in or screw connection manner.
  • the liquid discharge channel on the nozzle 5 may be provided in a truncated cone shape or a cone shape.
  • the inner wall of the liquid discharge channel has a circular cross section.
  • the nozzle 5 has a fan shape, wherein the cross section of the inner wall of the liquid discharge channel on the nozzle 5 may be set to have an arc shape.
  • the number of spray heads 4 can be set according to needs, and can be specifically 1, 2, 5, 8, 13, etc. Among them, the more the number of the spray heads 4 is, the larger the cleaning liquid can cover and clean the range, and the spray heads 4 can be arranged at equal intervals.
  • the spray head 4 is rotatably connected to the cleaning liquid delivery tube 2. In this way, the user can rotate the spray head 4 as needed to adjust the spray direction of the corresponding spray head 4 (nozzle 5), so that the polishing pad can be cleaned more conveniently.
  • a spherical spray head 4 can be used as the spray head 4.
  • the cleaning liquid delivery tube 2 can be provided with a spherical groove corresponding to the spherical spray head 4. Inserting the spherical spray head 4 into the spherical groove can realize the universal rotation of the spray head 4.
  • the connection between the spray head 4 and the cleaning liquid delivery tube 2 may be provided with a sealing member such as a gasket to prevent water leakage.
  • the polishing liquid conveying swing arm may further include a vertically arranged rotating shaft 6 and the arm body 1 is fixed to the rotating shaft 6 the top of.
  • the rotating shaft 6 can be driven by a motor, and its rotating axis is parallel to the vertical line.
  • the arm body 1 When installing the polishing fluid delivery swing arm, the arm body 1 should be located above the polishing pad, where the spray head 4 and nozzle 5 on the cleaning fluid delivery tube 2 are located directly above the polishing pad, between the center of the polishing pad and the rotating shaft 6 The vertical distance is the largest.
  • the spray head 4 farthest from the rotating shaft 6, that is, the spray head 4 with the smallest vertical distance from the center of the polishing pad 9, the spray direction It faces the side away from the rotating shaft 6 and is biased or facing the center of the polishing pad 9.
  • the ejection direction of the remaining contact heads may be directly facing the polishing pad 9 or may be biased toward the center of the polishing pad 9.
  • the arm body 1 in order to install the cleaning liquid delivery tube 2, may also be provided with a second installation slot configured to install the cleaning solution delivery tube 2, wherein the cleaning solution delivery tube 2 and the second installation slot Slidably connected.
  • the cleaning liquid delivery tube 2 By sliding the cleaning liquid delivery tube 2 in the second installation groove, the area sprayed by the spray head 4 and the nozzle 5 can be adjusted to facilitate the configuration of polishing pads of different specifications.
  • the high-pressure cleaning liquid needs to be transported in the cleaning liquid conveying pipe 2.
  • the cleaning liquid conveying pipe 2 can be made of plastic, copper, steel, etc., so that the cleaning liquid conveying pipe 2 has a certain The hardness will not be deformed by the action of water pressure, and at the same time, the cleaning liquid delivery pipe 2 with a certain hardness can be more convenient to install the spray head 4.
  • the cleaning liquid delivery pipe 2 may be displaced by the influence of water pressure or external force.
  • a second stopper is provided on the arm body 1, and the second stopper is configured to restrict the cleaning liquid delivery tube 2 to keep it relatively fixed with the second installation groove.
  • the first stopper and the second stopper may use bolts or locking bolts.
  • the arm body 1 may be provided with a socket or a screw hole configured to install the first stopper and the second stopper.
  • the top surface of the arm body 1 may be set to a flat surface and not perpendicular to the rotating shaft 6. In this way, when the water liquid falls on the top surface of the arm body 1, the water liquid will fall down by the action of gravity.
  • a polishing device including the above-mentioned polishing liquid delivery swing arm; since the technical effect of the polishing device provided in this embodiment is the same as the technical effect of the polishing liquid delivery swing arm provided in the above embodiment, this I will not repeat them here.
  • modules in the device in the implementation scenario may be distributed in the device in the implementation scenario according to the description of the implementation scenario, or may be changed accordingly in one or more devices different from the implementation scenario.
  • the modules in the above implementation scenarios can be combined into one module, or can be further split into multiple sub-modules.
  • the polishing fluid delivery swing arm provided by the embodiment of the present application can adjust the position of the discharge end of the polishing fluid delivery tube by moving the slurry falling point adjustment block, thereby making it possible without moving the arm body Adjust the falling point of the polishing liquid on the polishing pad.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

一种抛光液输送摆臂及抛光设备，包括臂体（1），所述臂体（1）上设置有配置成输送抛光液的抛光液输送管（3）；所述臂体（1）上滑动设置有浆料落点调节块（7），所述浆料落点调节块（7）配置成固定所述抛光液输送管（3）的出料端。通过移动浆料落点调节块（7）就可以实现抛光液输送管（3）的出料端位置的调节，由此使得在不移动臂体（1）的前提下就可以调整抛光液在抛光垫上的落点。

Description

一种抛光液输送摆臂及抛光设备
相关申请的交叉引用
本申请要求于2019年01月11日提交中国专利局的申请号为201910027857.5、名称为“一种抛光液输送摆臂及抛光设备”的中国专利申请的优先权，其全部内容通过引用结合在本申请中。
技术领域
本申请涉及抛光技术领域，尤其涉及一种抛光液输送摆臂及抛光设备。
背景技术
化学机械抛光是常用于制造高密度集成电路的一种工艺，在进行抛光时需要输送抛光液到相应位置，其中，输送抛光液的工作都是通过抛光液输送摆臂完成。
目前的抛光液输送摆臂，抛光液出口位置相对于摆臂是固定的。根据抛光工艺的不同要求，抛光液在抛光垫上的落点需要随之调整，现有的方法需要调整抛光液输送摆臂的位置，才能实现浆液在抛光垫上落点的调节。
申请内容
本申请在于克服现有技术的缺陷，提供一种抛光液输送摆臂及抛光设备，用以解决现有技术中存在的至少一个问题。
为解决上述问题，本申请提供了：一种抛光液输送摆臂，包括臂体，所述臂体上设置有配置成输送抛光液的抛光液输送管；
所述臂体上滑动设置有浆料落点调节块，所述浆料落点调节块配置成 固定所述抛光液输送管的出料端。
可选地，所述浆料落点调节块上设置有配置成使所述抛光液输送管穿入其中的穿接通孔，其中，所述抛光液输送管的出料端从所述穿接通孔中穿出。
可选地，所述穿接通孔包括有相互连通的第一子孔和第二子孔；
其中，所述第二子孔竖直设置且正对于抛光垫。
可选地，所述穿接通孔的数量设置有多个。
可选地，所述浆料落点调节块上多个所述第二子孔的出口端分布在一条直线上。
可选地，所述浆料落点调节块上多个所述第二子孔的出口端分布同一圆周上。
可选地，所述穿接通孔与所述输送管一一对应设置。
可选地，所述臂体上设置有配置成安装所述抛光液输送管的第一安装槽；
所述浆料落点调节块位于所述第一安装槽内，所述第一安装槽的底部设置有滑道，所述浆料落点调节块与所述滑道可滑动地连接。
可选地，还包括驱动电机和传动机构；
所述驱动电机与臂体连接，且所述驱动电机通过所述传动机构与所述浆料落点调节块连接，配置成使所述浆料落点调节块在所述第一安装槽内滑动。
可选地，所述传动机构包括齿轮和直齿条；
所述齿轮与所述驱动电机的输出轴连接，所述直齿条与所述浆料落点调节块的外壁固定连接，所述齿轮与所述直齿条相啮合。
可选地，所述臂体上设置有第一止动件，所述第一止动件配置成限制 所述浆料落点调节块使其与所述滑道保持相对固定。
可选地，所述臂体上还设置有配置成输送清洗液的清洗液输送管；
所述清洗液输送管上设置有与其内腔相连通的喷头，所述喷头有若干个，各所述喷头的出水端均设置有喷嘴；
所述喷嘴上设置有与所述喷头相连通的喷液通道，所述喷液通道配置成使所述喷头喷射出的清洗液沿其内壁流动；其中，沿所述喷嘴的喷射方向，所述喷液通道的内壁的横截面的面积或长度逐渐增大。
可选地，所述喷液通道的内壁的横截面垂直于所述喷嘴的喷射方向。
可选地，所述喷头与所述清洗液输送管可转动地连接。
可选地，还包括竖直设置的转轴，所述臂体固定于所述转轴的顶部。
可选地，所述臂体上设置有配置成安装所述清洗液输送管的第二安装槽，其中，所述清洗液输送管与所述第二安装槽可滑动地连接。
可选地，所述臂体上设置有第二止动件，所述第二止动件配置成限制所述清洗液输送管使其与所述第二安装槽保持相对固定。
可选地，所述抛光液输送管设置为具有伸缩性的软管。
可选地，所述抛光液输送管设置为波纹管或螺旋管。
本申请还提供了：一种抛光设备，包括如上任一项所述的抛光液输送摆臂。
本申请的有益效果至少包括：本申请提出一种抛光液输送摆臂，包括臂体，臂体上设置有配置成输送抛光液的抛光液输送管，臂体上滑动设置有浆料落点调节块，浆料落点调节块配置成固定抛光液输送管的出料端。通过移动浆料落点调节块就可以实现抛光液输送管的出料端的位置的调节，由此使得在不移动臂体的前提下就可以调整抛光液在抛光垫上的落点。
附图说明
为了更清楚地说明本申请实施例的技术方案，下面将对实施例中所需要使用的附图作简单地介绍，应当理解，以下附图仅示出了本申请的某些实施例，因此不应被看作是对范围的限定，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他相关的附图。
图1为本申请实施例中一种抛光液输送摆臂的第一轴侧图；
图2为本申请实施例中一种抛光液输送摆臂的第一轴侧图；
图3为本申请实施例中一种抛光液输送摆臂与抛光垫的位置关系示意图；
图4为本申请实施例中一种浆料落点调节块的示意图；
图5为本申请实施例中一种浆料落点调节块上第二子孔的出口端呈直线分布的示意图；
图6为本申请实施例中一种浆料落点调节块上第二子孔的出口端呈环形分布的示意图。
图中：1-臂体；2-清洗液输送管；3-抛光液输送管；4-喷头；5-喷嘴；6-转轴；7-浆料落点调节块；8-穿接通孔；9-抛光垫；10-第一子孔；11-第二子孔。
具体实施方式
在下文中，将更全面地描述本申请的各种实施例。本申请可具有各种实施例，并且可在其中做出调整和改变。然而，应理解：不存在将本申请的各种实施例限于在此公开的特定实施例的意图，而是应将本申请理解为涵盖落入本申请的各种实施例的精神和范围内的所有调整、等同物和/或可选方案。
在下文中，可在本申请的各种实施例中使用的术语“包括”或“可包 括”指示所公开的功能、操作或元件的存在，并且不限制一个或更多个功能、操作或元件的增加。此外，如在本申请的各种实施例中所使用，术语“包括”、“具有”及其同源词仅意在表示特定特征、数字、步骤、操作、元件、组件或前述项的组合，并且不应被理解为首先排除一个或更多个其它特征、数字、步骤、操作、元件、组件或前述项的组合的存在或增加一个或更多个特征、数字、步骤、操作、元件、组件或前述项的组合的可能性。
在本申请的各种实施例中，表述“A或/和B”包括同时列出的文字的任何组合或所有组合，例如，可包括A、可包括B或可包括A和B二者。
在本申请的各种实施例中使用的表述(诸如“第一”、“第二”等)可修饰在各种实施例中的各种组成元件，不过可不限制相应组成元件。例如，以上表述并不限制所述元件的顺序和/或重要性。以上表述仅用于将一个元件与其它元件区别开的目的。例如，第一用户装置和第二用户装置指示不同用户装置，尽管二者都是用户装置。例如，在不脱离本申请的各种实施例的范围的情况下，第一元件可被称为第二元件，同样地，第二元件也可被称为第一元件。
应注意到：在本申请中，除非另有明确的规定和定义，“安装”、“连接”、“固定”等术语应做广义理解，可以是直接连接，也是可以通过中间媒介间接相连；可以是两个元件内部的连通。对于本领域的普通技术人员而言，可以根据具体情况理解上述术语在本申请中的具体含义。
在本申请中，本领域的普通技术人员需要理解的是，文中指示方位或者位置关系的术语为基于附图所示的方位或者位置关系，仅是为了便于描述本申请和简化描述，而不是指示或暗示所指的装置或者元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本申请的限制。
在本申请的各种实施例中使用的术语仅配置成描述特定实施例的目的并且并非意在限制本申请的各种实施例。除非另有限定，否则在这里使用的所有术语(包括技术术语和科学术语)具有与本申请的各种实施例所属领域普通技术人员通常理解的含义相同的含义。所述术语(诸如在一般使用的词典中限定的术语)将被解释为具有与在相关技术领域中的语境含义相同的含义并且将不被解释为具有理想化的含义或过于正式的含义，除非在本申请的各种实施例中被清楚地限定。
参阅图1和图2，在本实施例中，提出一种抛光液输送摆臂，包括臂体1，臂体1上设置有配置成输送清洗液的清洗液输送管2和配置成输送抛光液的抛光液输送管3。
臂体1上还滑动设置有浆料落点调节块7，浆料落点调节块7配置成固定抛光液输送管3的出料端。由于抛光液输送管3的出料端与浆料落点调节块7相固定，所以通过移动浆料落点调节块7就可以实现抛光液输送管3出料端位置的调节。
如图4所示，在本实施例中，浆料落点调节块7上可设置有配置成使抛光液输送管3穿入其中的穿接通孔8，通过浆料落点调节块7可以对抛光液输送管3的出料端进行安装和固定，其中，抛光液输送管3的出料端从穿接通孔8中穿出。如图2所示，抛光液输送管3的出料端从浆料落点调节块7中穿出后，再从臂体1底部的开口伸出并朝向抛光垫。
当抛光液输送到抛光液输送管3中后，抛光液便会从抛光液输送管3的出料端掉流出并在重力的作用下滴落在抛光垫上。
在本实施例中，穿接通孔8可包括有相互连通的第一子孔10和第二子孔11，其中，第二子孔11竖直设置且正对于抛光垫。抛光液输送管3从第一子孔10穿入，再从第二子孔11的出口端穿出，从而保证抛光液输送管3 的出料端正对于抛光垫。
穿接通孔8的数量可以设置有多个，穿接通孔8与输送管一一对应，其中，穿接通孔8的数量及位置均可以根据需要进行设置。
具体的，如图5所示，浆料落点调节块7上第二子孔11的出口端可分布在一条直线上；如图6所示，浆料落点调节块7上第二子孔11的出口端可分布同一圆周上。由于不同规格抛光垫的形状及尺寸不同，所以可以通过设置第二子孔11的位置，以使得从各抛光液输送管3内的抛光液可以按直线分布或环形分布等形式的滴落的在抛光垫上，以方便抛光液可在离心力的作用下分散在抛光垫上。在其他具体实施例中，浆料落点调节块7上第二子孔11的出口端的分布形式还可根据需要进行设置。
臂体1上可设置有配置成安装抛光液输送管3的第一安装槽，同时，浆料落点调节块7也位于第一安装槽内，其中，第一安装槽的底部可设置滑道，浆料落点调节块7与滑道可滑动地连接。具体的，浆料落点调节块7的底部可设置有凸起，凸起插入滑道中并与之滑动连接。
沿滑道滑动浆料落点调节块7，使得抛光液输送管3的出料端所对准的位置发生改变，以方便抛光液的滴落至抛光垫上相应的位置。
可选地，还包括驱动电机和传动机构；驱动电机与臂体1连接，且驱动电机通过传动机构与浆料落点调节块7连接，配置成使浆料落点调节块7在第一安装槽内滑动。
可选地，传动机构包括齿轮和直齿条；齿轮与驱动电机的输出轴连接，直齿条与浆料落点调节块7的外壁固定连接，齿轮与直齿条相啮合。
或者，传动机构可以采用蜗轮蜗杆结构；蜗轮与驱动电机的输出轴连接，蜗轮与浆料落点调节块7的外壁固定连接，蜗轮与蜗杆啮合。
其中，为实现浆料落点调节块7的自动移动，可在臂体1上安装一驱 动电机，驱动电机的输出轴上可固定设置有齿轮，同时，在浆料落点调节块7的外壁上可固定设置有与齿轮相啮合的直齿条。启动驱动电机后，通过齿轮可驱使直齿条及浆料落点调节块7在第一安装槽内滑动。
另外，为实现浆料落点调节块7的自动移动，可以臂体1上安装一直线步进电机，并且步进电机的输出轴连接有浆料落点调节块7，启动直线步进电机能够驱动浆料落点调节块7在第一安装槽内滑动。
在本实施例中，抛光液输送管3可采用软管且具有可伸缩性，具体的，可以使用波纹管或螺旋管等。由于抛光液输送管3具有可伸缩性，所以使其可根据与抛光垫之间的距离调节自身的长短。
其中，臂体1上设置有第一止动件，第一止动件配置成限制浆料落点调节块7使其与滑道保持相对固定。
在抛光过程中，需对抛光垫进行清洗，以去除研磨过程中掉落的磨料。为此，需利用臂体1上设置的清洗液输送管2输送清洗液，通过清洗液完成对抛光垫的清洗。其中，在化学机械抛光中，清洗液一般可采用水液。
清洗液输送管2上设置有与其内腔相连通的喷头4，喷头4有若干个，各喷头4的出水端均设置有喷嘴5。为方便观察，图1中未示出喷嘴5。
喷嘴5上设置有与喷头4相连通的喷液通道，喷液通道配置成使喷头4喷射出的清洗液沿其内壁流动。其中，沿喷嘴5的喷射方向，喷液通道的内壁的横截面的面积或长度逐渐增大。
喷液通道的内壁的横截面垂直于喷嘴5的喷射方向。
化学机械抛光(Chemical Mechanical Polishing,CMP)是一种常配置成制造高密度集成电路的工艺。
化学机械抛光的工艺流程如下：抛光盘驱动抛光垫使其旋转；抛光头的底部吸附圆晶，在外力作用下抛光头被下压，从而使得园晶在抛光垫上 研磨；修整器的底部安装有砂轮盘，砂轮盘通过旋转对抛光垫进行修整；抛光液被输送到抛光垫上方对应的位置，并滴落在抛光垫上，在离心力的作用下，抛光液在抛光垫的表面散开；同时，输送水液(清洗液)以对抛光垫进行清洗，从而去除研磨过程中掉下的磨料。
在本实施例中，通过使用抛光液输送摆臂，就可以实现抛光液及清洗液的输送，从而简化了抛光设备的结构。
经过加压处理的清洗液输入至清洗液输送管2的内腔中，清洗液会通过设置在清洗液输送管2上的喷头4喷出，喷头4有若干个，相应的，每个喷头4都会有清洗液喷射出。
为了提高喷头4喷出的清洗液所覆盖的范围，各喷头4的出水端均可设置有喷嘴5，其中，喷头4可以插接或者螺纹连接的方式与喷头4相连。
当喷头4中喷出的清洗液进入到喷嘴5内部的喷液通道中后，会有部分清洗液沿喷液通道的内壁流动并喷出。由于沿喷嘴5的喷射方向，喷嘴5上的喷液通道的内壁的横截面的面积或长度逐渐增大，所以通过喷嘴5被喷出的清洗液所覆盖的面积会变大。
如图2所示，在本实施例中，喷嘴5上喷液通道可设置呈圆台形或锥形，此时，喷液通道的内壁的横截面呈圆形。
在其他具体实施例中，喷嘴5呈扇形，其中，喷嘴5上喷液通道的内壁的横截面可设置呈弧形。
喷头4的数量可以根据需要进行设置，具体可以为1个、2个、5个、8个、13个等等。其中，喷头4的数量越多，清洗液所能覆盖及清洗的范围就会越大，喷头4之间可等间距设置。
在本实施例中，喷头4与清洗液输送管2可转动地连接。如此，用户就可以根据需要转动喷头4，以调节相应的喷头4(喷嘴5)的喷射方向， 从而可以更加方便地对抛光垫进行清洗。
具体的，喷头4可使用球形喷头4，相应的，清洗液输送管2上可设置有与球形喷头4对应的球形槽，将球形喷头4插入球形槽内就可以实现喷头4的万向转动。其中，喷头4与清洗液输送管2的连接处可设置有密封垫等密封件，以防止漏水。
为调节臂体1的位置，以方便在抛光垫不同位置喷洒抛光液和清洗液，在本实施例中，抛光液输送摆臂还可以包括竖直设置的转轴6，臂体1固定于转轴6的顶部。转轴6可通过电机进行驱动，其转动轴心线与铅垂线平行。
在对抛光液输送摆臂进行安装时，臂体1应位于抛光垫上方，其中，清洗液输送管2上的喷头4及喷嘴5都位于抛光垫的正上方，抛光垫的中心与转轴6之间的垂直距离最大。
如图3所示，为了使喷洒出的清洗液可以覆盖到抛光垫9的中心，距离转轴6最远的喷头4，也即是与抛光垫9的中心垂直距离最小的喷头4，其喷射方向朝向远离转轴6的一侧，且偏向或正对于抛光垫9的中心。其余的碰头的喷射方向可正对于抛光垫9，也可偏向抛光垫9的中心。
在本实施例中，为对清洗液输送管2进行安装，臂体1上还可设置有配置成安装清洗液输送管2的第二安装槽，其中，清洗液输送管2与第二安装槽可滑动地连接。通过在第二安装槽内滑动清洗液输送管2，可以调节喷头4及喷嘴5所喷射的区域，以方便适配置成不同规格的抛光垫。清洗液输送管2内要输送高压的清洗液，为避免在水压的作用下发生变形，清洗液输送管2可采用塑料、铜材、钢材等制成，以使得清洗液输送管2具有一定的硬度，不会因水压作用而变形，同时，具有一定硬度的清洗液输送管2可以更加方便安装喷头4。
在工作时，清洗液输送管2可能会受到水压或者外力的影响而出现位置的偏移。为避免这种情况的发生，臂体1上设置有第二止动件，第二止动件配置成限制清洗液输送管2使其与第二安装槽保持相对固定。
在本实施例中，第一止动件和第二止动件可以采用插销或者锁紧螺栓等。其中，臂体1上可设置有配置成安装第一止动件和第二止动件的插孔或螺纹孔等。
在抛光过程中，水液可能发生喷溅的情况，为防止臂体1的顶部积水，在本实施例中，臂体1的顶面可设为平整面，且与转轴6不相垂直。如此，当水液落到臂体1的顶面上时，水液就会重力的作用下滑落。
在本实施例中，还提出一种抛光设备，包括上文中的抛光液输送摆臂；由于本实施例提供的抛光设备的技术效果与上述实施例提供的抛光液输送摆臂技术效果相同，此处不再赘述。
本领域技术人员可以理解附图只是一个优选实施场景的示意图，附图中的模块或流程并不一定是实施本申请所必须的。
本领域技术人员可以理解实施场景中的装置中的模块可以按照实施场景描述进行分布于实施场景的装置中，也可以进行相应变化位于不同于本实施场景的一个或多个装置中。上述实施场景的模块可以合并为一个模块，也可以进一步拆分成多个子模块。
上述实施例序号仅仅为了描述，不代表实施场景的优劣。
以上公开的仅为本申请的几个具体实施场景，但是，本申请并非局限于此，任何本领域的技术人员能思之的变化都应落入本申请的保护范围。
工业实用性
本申请实施例提供的一种抛光液输送摆臂，通过移动浆料落点调节块就可以实现抛光液输送管的出料端的位置的调节，由此使得在不移动臂体的前提下就可以调整抛光液在抛光垫上的落点。

Claims (20)

  1. 一种抛光液输送摆臂，其特征在于，包括臂体，所述臂体上设置有配置成输送抛光液的抛光液输送管；
    所述臂体上滑动设置有浆料落点调节块，所述浆料落点调节块配置成固定所述抛光液输送管的出料端。
  2. 根据权利要求1所述的抛光液输送摆臂，其特征在于，所述浆料落点调节块上设置有配置成使所述抛光液输送管穿入其中的穿接通孔，其中，所述抛光液输送管的出料端从所述穿接通孔中穿出。
  3. 根据权利要求2所述的抛光液输送摆臂，其特征在于，所述穿接通孔包括有相互连通的第一子孔和第二子孔；
    其中，所述第二子孔竖直设置且正对于抛光垫。
  4. 根据权利要求3所述的抛光液输送摆臂，其特征在于，所述穿接通孔的数量设置有多个。
  5. 根据权利要求4所述的抛光液输送摆臂，其特征在于，所述浆料落点调节块上多个所述第二子孔的出口端分布在一条直线上。
  6. 根据权利要求4所述的抛光液输送摆臂，其特征在于，所述浆料落点调节块上多个所述第二子孔的出口端分布同一圆周上。
  7. 根据权利要求4-6任一项所述的抛光液输送摆臂，其特征在于，所述穿接通孔与所述输送管一一对应设置。
  8. 根据权利要求1-7任一项所述的抛光液输送摆臂，其特征在于，所述臂体上设置有配置成安装所述抛光液输送管的第一安装槽；
    所述浆料落点调节块位于所述第一安装槽内，所述第一安装槽的底部设置有滑道，所述浆料落点调节块与所述滑道可滑动地连接。
  9. 根据权利要求8所述的抛光液输送摆臂，其特征在于，还包括驱动 电机和传动机构；
    所述驱动电机通过所述传动机构与所述浆料落点调节块连接，配置成使所述浆料落点调节块在所述第一安装槽内滑动。
  10. 根据权利要求9所述的抛光液输送摆臂，其特征在于，所述传动机构包括齿轮和直齿条；
    所述齿轮与所述驱动电机的输出轴连接，所述直齿条与所述浆料落点调节块的外壁固定连接，所述齿轮与所述直齿条相啮合。
  11. 根据权利要求8-10任一项所述的抛光液输送摆臂，其特征在于，所述臂体上设置有第一止动件，所述第一止动件配置成限制所述浆料落点调节块使其与所述滑道保持相对固定。
  12. 根据权利要求1-11任一项所述的抛光液输送摆臂，其特征在于，所述臂体上还设置有配置成输送清洗液的清洗液输送管；
    所述清洗液输送管上设置有与其内腔相连通的喷头，所述喷头有若干个，各所述喷头的出水端均设置有喷嘴；
    所述喷嘴上设置有与所述喷头相连通的喷液通道，所述喷液通道配置成使所述喷头喷射出的清洗液沿其内壁流动；其中，沿所述喷嘴的喷射方向，所述喷液通道的内壁的横截面的面积或长度逐渐增大。
  13. 根据权利要求12所述的抛光液输送摆臂，其特征在于，所述喷液通道的内壁的横截面垂直于所述喷嘴的喷射方向。
  14. 根据权利要求12或13所述的抛光液输送摆臂，其特征在于，所述喷头与所述清洗液输送管可转动地连接。
  15. 根据权利要求1-14任一项所述的抛光液输送摆臂，其特征在于，还包括竖直设置的转轴，所述臂体固定于所述转轴的顶部。
  16. 根据权利要求12-14任一项所述的抛光液输送摆臂，其特征在于， 所述臂体上设置有配置成安装所述清洗液输送管的第二安装槽，其中，所述清洗液输送管与所述第二安装槽可滑动地连接。
  17. 根据权利要求16所述的抛光液输送摆臂，其特征在于，所述臂体上设置有第二止动件，所述第二止动件配置成限制所述清洗液输送管使其与所述第二安装槽保持相对固定。
  18. 根据权利要求1-17任一项所述的抛光液输送摆臂，其特征在于，所述抛光液输送管设置为具有伸缩性的软管。
  19. 根据权利要求18所述的抛光液输送摆臂，其特征在于，所述抛光液输送管设置为波纹管或螺旋管。
  20. 一种抛光设备，其特征在于，包括权利要求1-19中任一项所述的抛光液输送摆臂。
PCT/CN2019/111085 2019-01-11 2019-10-14 一种抛光液输送摆臂及抛光设备 WO2020143260A1 (zh)

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