WO2020124791A1 - 触控面板及其制造方法 - Google Patents

触控面板及其制造方法 Download PDF

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Publication number
WO2020124791A1
WO2020124791A1 PCT/CN2019/076705 CN2019076705W WO2020124791A1 WO 2020124791 A1 WO2020124791 A1 WO 2020124791A1 CN 2019076705 W CN2019076705 W CN 2019076705W WO 2020124791 A1 WO2020124791 A1 WO 2020124791A1
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WIPO (PCT)
Prior art keywords
electrodes
electrode
prismatic
touch panel
panel according
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Ceased
Application number
PCT/CN2019/076705
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English (en)
French (fr)
Inventor
冯校亮
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Wuhan China Star Optoelectronics Semiconductor Display Technology Co Ltd
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Wuhan China Star Optoelectronics Semiconductor Display Technology Co Ltd
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Application filed by Wuhan China Star Optoelectronics Semiconductor Display Technology Co Ltd filed Critical Wuhan China Star Optoelectronics Semiconductor Display Technology Co Ltd
Priority to US16/468,677 priority Critical patent/US20200201486A1/en
Publication of WO2020124791A1 publication Critical patent/WO2020124791A1/zh
Anticipated expiration legal-status Critical
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Classifications

    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices

Definitions

  • the present application relates to the field of touch technology, in particular to a touch panel and a manufacturing method thereof.
  • the touch electrodes all choose to use a metal grid structure, and their flexibility and electrical conductivity meet the needs of the flexible display screen.
  • the metal wire due to the opacity of the metal, when making the metal grid, the metal wire must be placed in the non-display area or the metal wire should be made very thin. Both methods will place high requirements on the process and equipment, making equipment investment Huge, indirectly caused the increase in product costs.
  • Indium tin oxide Indium Tin Oxide (ITO) is a common choice as a touch electrode for non-flexible screens.
  • ITO Indium Tin Oxide
  • ITO Indium Tin Oxide
  • using indium tin oxide as a touch electrode has the problem of high brittleness. The indium tin oxide electrode cannot adapt to the flexibility of the flexible screen to the touch electrode Claim.
  • the purpose of the present application is to provide a touch panel and a manufacturing method thereof.
  • the touch unit of the touch panel has good flexibility.
  • a touch panel, the touch panel includes:
  • a plurality of first electrodes, the first electrodes are formed on the substrate;
  • a plurality of second electrodes, the second electrodes are formed on the insulating layer, and the second electrodes are alternately connected in series with the first electrodes through the via holes to form a touch unit.
  • the touch unit is a prismatic electrode.
  • the shape of the first electrode constituting the prismatic electrode is at least one of square, rectangular, prismatic, circular, trapezoidal, and triangular
  • the shape of the second electrode is at least one of square, rectangular, prismatic, trapezoidal, circular, and triangular.
  • the prismatic electrode includes a first prismatic pattern composed of a plurality of the first electrodes and a second prismatic pattern formed by the plurality of second electrodes.
  • the portion where the vertical projection on the substrate coincides with the vertical projections of the plurality of first electrodes constituting the first prismatic pattern and the plurality of second electrodes constituting the second prismatic pattern on the substrate Completely coincide.
  • two adjacent prismatic electrodes in the same row are electrically connected by a first bridge line, and two adjacent prismatic electrodes in the same row are electrically connected by a second bridge line.
  • the first bridge line and the first electrode are manufactured through the same process and in the same layer
  • the second bridge line and the second electrode are manufactured through the same process and in the same layer
  • the first Two ends of a bridge line are respectively connected to the second electrodes in the two adjacent prismatic electrodes in the same row through the via holes to electrically connect the two adjacent prismatic electrodes in the same row
  • the two ends of the second bridge line are respectively connected to the first electrodes in the two adjacent prismatic electrodes in the same row through the via holes to make the two adjacent prismatic in the same row
  • the electrodes are electrically connected.
  • the insulating layer is an organic insulating layer.
  • the size of the first electrode is 1-40,000 square microns
  • the size of the second electrode is 1-40,000 square microns.
  • the preparation material of the first electrode is metal oxide or metal
  • the preparation material of the second electrode is metal oxide or metal
  • the metal oxide is indium tin oxide.
  • a method for manufacturing a touch panel includes the following steps:
  • a plurality of second electrodes are formed on the insulating layer, and the second electrodes are alternately connected in series with the first electrodes through the via holes to form a touch unit.
  • the touch unit includes a prismatic electrode.
  • the shape of the first electrode constituting the prismatic electrode is at least one of square, rectangular, prismatic, circular, trapezoidal, and triangular, constituting the prismatic electrode
  • the shape of the second electrode is at least one of square, rectangle, prism, trapezoid, circle and triangle.
  • the prismatic electrode includes a first prismatic pattern composed of a plurality of the first electrodes and a second prismatic pattern formed by the plurality of second electrodes, and the via A vertical projection on the substrate and a vertical projection of the plurality of first electrodes constituting the first prism pattern and the plurality of second electrodes constituting the second prism pattern on the substrate The parts that overlap coincide completely.
  • two adjacent prismatic electrodes in the same row are electrically connected by a first bridge line, and two adjacent prismatic electrodes in the same row are electrically connected by a second bridge line connection.
  • the first bridge line and the first electrode are manufactured in the same layer and the same layer
  • the second bridge line and the second electrode are manufactured in the same layer and the same layer
  • Both ends of the first bridge line are respectively connected to the second electrodes in the two adjacent prismatic electrodes in the same row through the via holes, so that the two adjacent prismatic electrodes in the same row Electrically connected
  • the two ends of the second bridge line are respectively connected to the first electrodes in the two adjacent prismatic electrodes in the same column through the via holes, so that the two adjacent electrodes in the same column
  • the prismatic electrodes are electrically connected.
  • the insulating layer is an organic insulating layer.
  • the size of the first electrode is 1-40,000 square microns
  • the size of the second electrode is 1-40,000 square microns
  • the first electrode is made of metal oxide or metal
  • the second electrode is made of metal oxide or metal
  • the metal oxide is indium tin oxide.
  • the present application provides a touch panel and a method for manufacturing the same.
  • a plurality of first electrodes and a plurality of second electrodes in small layers and located in different layers are alternately connected in series through via holes to form a touch unit, so that the touch of the touch panel
  • the control unit is flexible.
  • FIG. 1 is a schematic diagram of a touch unit on a conventional touch panel
  • FIG. 2 is a flowchart of a first embodiment of a method for manufacturing a touch panel of the present application
  • 3A-3E are schematic diagrams during the manufacturing process of the touch panel in FIG. 2.
  • Substrate 22 First electrode 23, 102 First bridge line 24 Insulation layer 25 Via 26 Second electrode 27, 103 Second bridge line 10 Touch unit 100 Transmitter electrode 101 Receive electrode
  • FIG. 1 it is a schematic diagram of a touch unit 10 on a conventional touch panel.
  • the touch unit 10 is a double-layer mutual-capacity touch electrode, which includes a transmitting electrode 100 and a receiving electrode 101.
  • the transmitting electrode 100 is a prismatic electrode
  • the two adjacent transmitting electrodes 100 are connected by a first bridge line 102
  • the receiving electrode 101 is a prismatic electrode
  • the two adjacent receiving electrodes 101 are connected by a second bridge line 103
  • the first bridge line 102 and the second bridge line 103 An insulating layer (not shown) is provided therebetween to insulate the transmitting electrode 100 and the receiving electrode 101.
  • the preparation materials of the transmitting electrode 100 and the receiving electrode 101 are indium tin oxide or a material that is easily bent and broken many times, the flexibility of the touch unit 10 is poor, which makes the touch unit 10 unsuitable for a flexible screen.
  • FIG. 2 is a flowchart of a first embodiment of a method for manufacturing a touch panel of the present application.
  • the manufacturing method includes the following steps:
  • the substrate 21 may be a flexible substrate or a rigid substrate.
  • Flexible substrates include but are not limited to polyimide (Polyimide, PI) substrate, cycloolefin polymer (Cyclo Olefin Polymer (COP) substrate, polyethylene terephthalate (PET) substrate, flexible organic light-emitting diode display (Organic Light-Emitting Display (OLED); rigid substrates include but are not limited to glass substrates, thin film transistor array substrates, liquid crystal panels and rigid OLEDs.
  • the first electrodes 22 are arranged on the substrate 21 in an array.
  • the first electrode 22 may be formed on the substrate 21 through a yellow photolithography process, a screen printing process, or other processes.
  • the first electrode 22 may be an indium tin oxide (Indium Tin Oxide) electrode, a metal mesh (Matal mesh), or other electrodes, that is, the first electrode 22 is made of metal oxide, metal, or other materials.
  • the shape of the first electrode 22 includes a square, a rectangle, a prism, a trapezoid, a circle, a triangle, or other irregular shapes, which is not specifically limited in this application.
  • the present application takes the first electrode 22 as a square indium tin oxide electrode.
  • the first electrodes 22 arranged in a plurality of arrays form a plurality of first prisms arranged in a row array and a column array Pattern, the size of the first prism pattern arranged in the column array is larger than that of the first prism pattern arranged in the row array, and the first bridge line 23 is arranged between two adjacent first prism patterns arranged in the row array,
  • the first bridge line 23 and the first electrode 22 are manufactured in the same process and in the same layer, as shown in FIG. 3A.
  • an ITO film layer is formed on the substrate 21 by a sputtering deposition process, and then a photoresist layer is formed on the ITO film layer, after the photoresist layer is exposed to light through the first mask plate, the exposure is treated with a developing solution After the photoresist layer, part of the photoresist layer is removed, the remaining photoresist layer covers the ITO film layer, the ITO film layer not covered by the photoresist layer is removed by an etching process, and then the remaining photoresist layer is removed to form A plurality of first electrodes 22 and first bridge lines 23 arranged in an array.
  • the size of the first electrode 22 is 1-200 microns square, that is, the size of the first electrode 22 is 1 to 40,000 square microns; the size of the first electrode 22 can be smaller to improve bending resistance, and the size of the first electrode 22 is 10-150 microns square, for example, the size of the first electrode 22 is 20 microns square, 50 microns square, 80 microns square or 120 microns square.
  • the small size of the first electrode 22 is beneficial to avoid cracks when the first electrode 22 is bent, that is, to improve the flexibility of the first electrode 22.
  • An insulating layer 24 provided with a plurality of vias 25 is formed on the plurality of first electrodes 22 and the substrate 21, and the vias 25 are provided above the first electrode 22.
  • Plasma enhanced chemical vapor deposition Plasma enhanced chemical vapor deposition (Plasma Enhanced Chemical Vapor) Deposition, PECVD), Chemical Vapor Deposition (Chemical Vapor Deposition, CVD), Atom Layer Deposit (ALD), sputter deposition, vacuum evaporation, inkjet printing (Ink-Jet Printing) or one of spin coating to form a full-surface insulating layer 24 on the first electrode 22 and the substrate 21;
  • a yellow photolithography process is used to form a plurality of vias 25 on the insulating layer 24.
  • the vias 25 are located above each first electrode 22.
  • the yellow photolithography process is the same as that in step S11 and will not be described in detail here.
  • the number and position of the vias 25 above each first electrode 22 depend on the shape of the first electrode 22, the position of the first electrode 22 in the first prismatic pattern, the shape of the second electrode formed later, and so on.
  • the first electrode 22 is located between two adjacent first prismatic patterns, and there is a via 25 above the corner of the first electrode 22 at the other two opposite top corners of the first prismatic pattern; There are two vias 25 above the first electrode 22 located on the edge of the first prismatic pattern, this via 25 is located above the corner of the adjacent first electrode 25; the first electrode inside the first prismatic pattern There are four vias 25 above the 22, and the vias 25 are located at the four corners of the first electrode 25, respectively.
  • the size of the via hole 25 is smaller than the size of the first electrode 22, which is not limited in this application.
  • the insulating layer 24 is an organic insulating layer, an inorganic insulating layer, or an overlapping layer of the organic insulating layer and the inorganic insulating layer.
  • Materials for preparing the organic insulating layer include but are not limited to polyimide and polyacrylate; materials for preparing the inorganic insulating layer include but are not limited to silicon nitride, silicon oxide or silicon oxynitride.
  • a plurality of second electrodes 26 are formed on the insulating layer 24.
  • the second electrodes 26 are alternately connected in series with the first electrodes 22 through the via holes 25 to form a touch unit.
  • the touch unit is one of a double-layer mutual capacitance electrode, a single-layer mutual capacitance electrode, and a single-layer self-capacitance electrode.
  • the touch unit is a double-layer mutual capacitance electrode.
  • the second electrodes 26 are arranged on the insulating layer 24 in an array.
  • the second electrode 26 may be an indium tin oxide (Indium Tin Oxide) electrode, a metal mesh (Matal mesh), or other electrodes, that is, the preparation material of the second electrode 26 is metal oxide, metal, or other materials.
  • the second electrode 26 may be formed on the insulating layer 24 through a yellow photolithography process, a screen printing process, or other processes and alternately serially connected with the first electrode 22 through a via 25 to form a touch unit.
  • the shape of the second electrode 26 includes a square, a rectangle, a prism, a circle, a trapezoid, a triangle, or other irregular shapes, which is not specifically limited in this application.
  • the shape of the second electrode 26 may be the same as or different from the shape of the first electrode 22, and the preparation material of the second electrode 26 may be the same as or different from the preparation material of the first electrode 22.
  • the second electrode is a square indium tin oxide electrode.
  • an entire ITO film layer is formed on the insulating layer 24, and the ITO film layer is processed through a yellow photolithography process to form a plurality of arrayed second electrodes 26 and second bridge lines 27, and a plurality of second electrodes 26
  • Forming a second prism pattern arranged in a row array and a column array the size of the second prism pattern arranged in a row array is larger than the size of the second prism pattern arranged in a column array, the second prism arranged in a row
  • the first prism pattern arranged in columns have the same size and the arrangement of the second electrodes 26 in the second prism pattern arranged in rows is the same as the arrangement of the first electrodes 22 in the first prism pattern arranged in columns
  • the arrangement is the same, the second prismatic pattern arranged in a column array has the same size as the first prism pattern in a row array, and the arrangement of the second electrodes 26 in the second pris
  • the second prismatic pattern composed of the plurality of second electrodes 26 is located above the first prismatic pattern formed by the plurality of first electrodes 22, and a second The second bridge connection 27, the second bridge connection 27 and the second electrode 26 are manufactured in the same process and on the same layer.
  • the second bridge connection 27 is located above the first bridge connection 23 and the two lines are perpendicular to each other, as shown in FIG. 3B .
  • the size of the second electrode 26 is 1-200 microns square, that is, the size of the second electrode 26 is 1-40,000 square microns; the size of the second electrode 26 can be smaller to improve bending resistance, and the size of the second electrode 26 is 10-150 microns square, for example, the size of the second electrode 26 is 20 microns square, 50 microns square, 80 microns square or 120 microns square.
  • the small size of the second electrode 26 is beneficial to avoid cracks when the second electrode 26 is bent, that is, to improve the flexibility of the second electrode 26.
  • FIG. 3C is a partial schematic view of the first electrode 22 and the second electrode 26 alternately connected in series on the touch panel to form a touch unit.
  • the first prismatic pattern composed of a plurality of first electrodes 22 and a plurality of The second prismatic pattern composed of the second electrode 26 constitutes a plurality of prismatic electrodes arranged in a row array and arranged in a row array.
  • the prismatic electrodes constitute a double-layer mutual-capacity touch unit, and the via 25 is perpendicular to the substrate 21
  • the portion where the projection coincides with the vertical projections of the plurality of first electrodes 22 constituting the first prismatic pattern and the plurality of second electrodes 26 constituting the second prismatic pattern on the substrate 21 completely overlaps.
  • FIG. 3D is a cross-sectional view of FIG. 3C along the A-A tangent direction
  • FIG. 3E is a cross-sectional view of FIG. 3C along the B-B tangent direction.
  • Both ends of the first bridge line 23 are respectively connected to the second electrode 26 in the two adjacent prismatic electrodes in the same row through a via 25 to electrically connect the two adjacent prismatic electrodes in the same row.
  • the two ends of the wiring 27 are respectively connected to the first electrodes 22 in the two adjacent prismatic electrodes in the same column through the via holes 25 to electrically connect the two adjacent prismatic electrodes in the same column, that is, the adjacent ones in the same row
  • the two prismatic electrodes are electrically connected through the first bridge line 23, and the two adjacent prismatic electrodes in the same row are electrically connected through the second bridge line 27.
  • the interaction force between the first electrode 22 and the second electrode 26 alternately connected in series is small, and the stress generated by the touch unit during bending is dispersed in multiple The first electrode 22 and the plurality of second electrodes 26, and the size of the first electrode 22 and the second electrode 26 is significantly reduced relative to the size of the receiving electrode 100 and the transmitting electrode 101 constituting the conventional touch unit, making the first The electrode 22 and the second electrode 26 have increased bending resistance, so the touch unit composed of the first electrode 22 and the second electrode 26 has flexibility and can avoid cracks during the bending process.
  • a plurality of first electrodes and a plurality of second electrodes located in different layers are connected in series alternately to form a touch unit, so that the touch unit constituting the touch panel has flexibility.
  • the present application also provides a touch panel manufactured by the above manufacturing method, the touch panel includes:
  • a plurality of first electrodes, the first electrodes are formed on the substrate;
  • An insulating layer is formed on the plurality of first electrodes and the substrate, the insulating layer is provided with a plurality of vias, the vias are located above the first electrode;
  • a plurality of second electrodes are formed on the insulating layer.
  • the second electrodes are alternately connected in series with the first electrodes through the via holes to form a touch unit.
  • the touch unit includes prismatic electrodes, and the prismatic electrodes are arranged in an array in rows and columns.
  • the touch unit may also be a square electrode, a rectangular electrode, or another shape of electrode.
  • the shape of the first electrode constituting the prismatic electrode is at least one of square, rectangular, prismatic, circular, trapezoidal and triangular
  • the shape of the second electrode constituting the prismatic electrode is square or rectangular , At least one of prismatic, trapezoidal, circular and triangular.
  • the prismatic electrode includes a first prismatic pattern composed of a plurality of first electrodes and a second prismatic pattern formed by a plurality of second electrodes.
  • the vertical projection of the via hole on the substrate is composed of the first prismatic shape
  • the first prismatic pattern composed of a plurality of first electrodes is arranged in an array in rows and columns
  • the second prismatic pattern composed of a plurality of second electrodes is arranged in an array in rows and columns, the second prism The pattern is located directly above the first prismatic pattern.
  • two adjacent prismatic electrodes in the same row are electrically connected by a first bridge line
  • two adjacent prismatic electrodes in the same column are electrically connected by a second bridge line.
  • the first bridge line and the first electrode are manufactured through the same process and in the same layer
  • the second bridge line and the second electrode are manufactured through the same process and in the same layer
  • the first bridge line and the two adjacent in the same row The second electrode in the prismatic electrode is connected through a via hole to electrically connect two adjacent prismatic electrodes in the same row
  • the second bridge line passes through the first electrode in the two adjacent prismatic electrodes in the same column
  • the holes are connected to electrically connect two adjacent prismatic electrodes in the same row.
  • the first electrode when the shape of the first electrode is square and the shape of the second electrode is square, the first electrode located on the edge of the first prismatic pattern and between the top corners of two adjacent first prismatic patterns Two vias are provided above, four vias are provided above the first electrode inside the first prismatic pattern, and one via is provided above the first electrode at the other vertex of the first prismatic pattern.
  • the first electrode is made of metal oxide or metal
  • the second electrode is made of metal oxide or metal.
  • the metal oxide is indium tin oxide.
  • the size of the first electrode and the second electrode is small, and the first electrode and the second electrode of different sizes and different layers are alternately connected in series to form a touch unit, so that the touch unit has flexibility.
  • the size of the first electrode is 1-200 microns square; the size of the first electrode can be smaller to improve bending resistance, the size of the first electrode is 10-150 microns square, for example, the first electrode
  • the size is 20 microns square, 50 microns square, 80 microns square or 120 microns square.
  • the size of the second electrode is 1-200 microns square; the size of the second electrode 26 can be smaller to improve bending resistance, the size of the second electrode is 10-150 microns square, for example, the size of the second electrode is 20 microns Square, 50 micron square, 80 micron square or 120 micron square.
  • the insulating layer is an organic insulating layer, an inorganic insulating layer, or an overlapping layer of the organic insulating layer and the inorganic insulating layer.
  • Materials for preparing the organic insulating layer include but are not limited to polyimide and polyacrylate; materials for preparing the inorganic insulating layer include but are not limited to silicon nitride, silicon oxide or silicon oxynitride.
  • the insulating layer is an organic insulating layer. While the organic insulating layer isolates the first electrode and the second electrode, when the touch panel is applied to a flexible screen, the foldability of the first electrode and the second electrode is further improved, that is, the first The flexibility of the touch unit composed of the electrode and the second electrode is further improved.
  • the insulating layer is composed of two organic insulating layers and an inorganic insulating layer between the two intermediate layers.
  • the insulation between the first electrode and the second electrode is further improved; on the other hand, the flexibility of the touch unit composed of the first electrode and the second electrode is further improved.
  • the touch panel further includes a second insulating layer, and the second insulating layer is formed on the plurality of second electrodes.
  • the second insulating layer is an organic insulating layer, an inorganic insulating layer, or an overlapping layer of the organic insulating layer and the inorganic insulating layer.
  • Materials for preparing the organic insulating layer include but are not limited to polyimide and polyacrylate; materials for preparing the inorganic insulating layer include but are not limited to silicon nitride, silicon oxide or silicon oxynitride.
  • the second insulating layer is an organic insulating layer.
  • the above-mentioned touch panel has a plurality of first electrodes and a plurality of second electrodes that are small in size and located in different layers alternately connected in series to form a touch unit, so that the touch unit constituting the touch panel has flexibility.
  • the plurality of first electrodes and the plurality of second electrodes on different layers are alternately connected in series to form a touch unit so that the thickness and area of the touch unit are increased, thereby reducing the resistance of the touch unit and improving the touch signal Sensitivity, which helps reduce touch energy consumption;
  • multiple first electrodes and multiple second electrodes are made of different layers and are provided with insulating layer intervals between each other, with better insulation effect, and there will be no electrode short circuit phenomenon, thereby improving Process stability, reduce the difficulty of process production.

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Abstract

本申请公开一种触控面板及其制造方法，尺寸小且位于不同层的多个第一电极和多个第二电极通过过孔交替地串接以形成触控单元，使得触控面板的触控单元具有柔性。

Description

触控面板及其制造方法 技术领域
本申请涉及触控技术领域，尤其涉及一种触控面板及其制造方法。
 背景技术
随着柔性屏产品的出现，显示屏的显示器件和触控器件逐渐向具有柔性的方向发展。为了适应柔性屏对于柔性特质的要求，触控电极都选择使用金属网格结构，其柔性和导电性能适应柔性显示屏的需求。但是，由于金属具有不透明性，在制作金属网格时必须将金属线置于非显示区域或者将金属线制作得很细，这两种方法都会对工艺和设备提出很高的要求，使得设备投资巨大，间接造成产品成本的提升。将氧化铟锡（Indium Tin Oxide，ITO）作为非柔性屏的触控电极是一种常用的选择，然而，采用氧化铟锡作为触控电极存在脆性大的问题，氧化铟锡电极不能适应柔性屏对触控电极的柔性要求。
 技术问题
本申请的目的在于提供一种触控面板及其制造方法，该触控面板的触控单元具有良好的柔性。
 技术解决方案
一种触控面板，所述触控面板包括：
一基板；
多个第一电极，所述第一电极形成于所述基板上；
一绝缘层，所述绝缘层形成于多个所述第一电极和所述基板上，所述绝缘层上设置有多个过孔，所述过孔位于所述第一电极的上方；
多个第二电极，所述第二电极形成于所述绝缘层上，所述第二电极通过所述过孔与所述第一电极交替地串接以形成触控单元。
在上述触控面板中，所述触控单元为棱形电极。
在上述触控面板中，组成所述棱形电极的所述第一电极的形状为正方形、长方形、棱形、圆形、梯形以及三角形中的至少一种，组成所述棱形电极的所述第二电极的形状为正方形、长方形、棱形、梯形、圆形以及三角形中的至少一种。
在上述触控面板中，所述棱形电极包括多个所述第一电极组成的第一棱形图案和多个所述第二电极形成的第二棱形图案，所述过孔在所述基板上的垂直投影与组成所述第一棱形图案的多个所述第一电极和组成所述第二棱形图案的多个所述第二电极在所述基板上的垂直投影重合的部分完全重合。
在上述触控面板中，同一行的相邻两个所述棱形电极通过第一桥接线电性连接，同一列的相邻两个所述棱形电极通过第二桥接线电性连接。
在上述触控面板中，所述第一桥接线与所述第一电极通过同一制程且同层制作，所述第二桥接线与所述第二电极通过同一制程且同层制作，所述第一桥接线的两端分别与位于同一行相邻两个所述棱形电极中的所述第二电极通过所述过孔连接以使同一行的相邻两个所述棱形电极电性连接，所述第二桥接线的两端分别与位于同一列相邻两个所述棱形电极中的所述第一电极通过所述过孔连接以使同一列的相邻两个所述棱形电极电性连接。
在上述触控面板中，所述绝缘层为有机绝缘层。
在上述触控面板中，所述第一电极的尺寸为1-40000平方微米，所述第二电极的尺寸为1-40000平方微米。
在上述触控面板中，所述第一电极的制备材料为金属氧化物或金属，所述第二电极的制备材料为金属氧化物或金属。
在上述触控面板中，所述金属氧化物为氧化铟锡。
一种触控面板的制造方法，所述制造方法包括如下步骤：
提供一基板；
于所述基板上形成多个第一电极；
于多个所述第一电极和所述基板上形成设置有多个过孔的绝缘层，所述过孔设置于所述第一电极的上方；
于所述绝缘层上形成多个第二电极，所述第二电极通过所述过孔与所述第一电极交替地串接以形成触控单元。
在上述触控面板的制造方法中，所述触控单元包括棱形电极。
在上述触控面板的制造方法中，组成所述棱形电极的所述第一电极的形状为正方形、长方形、棱形、圆形、梯形以及三角形中的至少一种，组成所述棱形电极的所述第二电极的形状为正方形、长方形、棱形、梯形、圆形以及三角形中的至少一种。
在上述触控面板的制造方法中，所述棱形电极包括多个所述第一电极组成的第一棱形图案和多个所述第二电极形成的第二棱形图案，所述过孔在所述基板上的垂直投影与组成所述第一棱形图案的多个所述第一电极和组成所述第二棱形图案的多个所述第二电极在所述基板上的垂直投影重合的部分完全重合。
在上述触控面板的制造方法中，同一行的相邻两个所述棱形电极通过第一桥接线电性连接，同一列的相邻两个所述棱形电极通过第二桥接线电性连接。
在上述触控面板的制造方法中，所述第一桥接线与所述第一电极通过同一制程且同层制作，所述第二桥接线与所述第二电极通过同一制程且同层制作，所述第一桥接线的两端分别与位于同一行相邻两个所述棱形电极中的所述第二电极通过所述过孔连接以使同一行的相邻两个所述棱形电极电性连接，所述第二桥接线的两端分别与位于同一列相邻两个所述棱形电极中的所述第一电极通过所述过孔连接以使同一列的相邻两个所述棱形电极电性连接。
在上述触控面板的制造方法中，所述绝缘层为有机绝缘层。
在上述触控面板的制造方法中，所述第一电极的尺寸为1-40000平方微米，所述第二电极的尺寸为1-40000平方微米。
在上述触控面板的制造方法中，所述第一电极的制备材料为金属氧化物或金属，所述第二电极的制备材料为金属氧化物或金属。
在上述触控面板的制造方法中，所述金属氧化物为氧化铟锡。
 有益效果
本申请提供一种触控面板及其制造方法，尺寸小且位于不同层的多个第一电极和多个第二电极通过过孔交替地串接以形成触控单元，使得触控面板的触控单元具有柔性。
 附图说明
图1为传统触控面板上触控单元的示意图；
图2为本申请触控面板的制造方法的第一实施例的流程图；
图3A-3E为图2中触控面板的制造过程中的示意图。
附图标注如下：
21基板 22第一电极 23、102 第一桥接线 24绝缘层 25过孔 26第二电极 27、103第二桥接线  10触控单元100 发射电极 101接收电极
 本发明的实施方式
下面将结合本申请实施例中的附图，对本申请实施例中的技术方案进行清楚、完整地描述。显然，所描述的实施例仅仅是本申请一部分实施例，而不是全部的实施例。基于本申请中的实施例，本领域技术人员在没有作出创造性劳动前提下所获得的所有其他实施例，都属于本申请保护的范围。
如图1所示，其为传统触控面板上触控单元10的示意图，触控单元10为双层互容触控电极，其包括发射电极100和接收电极101，发射电极100为棱形电极，相邻两个发射电极100通过第一桥接线102连接，接收电极101为棱形电极，相邻两个接收电极101通过第二桥接线103连接，第一桥接线102和第二桥接线103之间设置有绝缘层(未示出)以使发射电极100和接收电极101之间绝缘。发射电极100和接收电极101的制备材料为氧化铟锡或者多次弯折易断裂的材料时，触控单元10的柔性差，导致触控单元10不适用于柔性屏。
请参阅图2，其为本申请触控面板的制造方法的第一实施例的流程图，该制造方法包括如下步骤：
S10:提供一基板21。
在本实施例中，基板21可以是柔性基板，也可以是硬质基板。柔性基板包括但不限于聚酰亚胺（Polyimide, PI）基板、环烯烃聚合物（Cyclo Olefin Polymer, COP）基板、聚对苯二甲酸乙二酯(Polyethylene Terephthalate, PET)基板、柔性有机发光二极管显示器（Organic Light- Emitting Display, OLED）；硬质基板包括但不限于玻璃基板、薄膜晶体管阵列基板、液晶面板及硬质OLED。
S11: 于基板21上形成多个第一电极22。
在本实施例中，第一电极22阵列排布在基板21上。第一电极22可以通过黄光光刻工艺、网印工艺或者其他工艺形成于基板21上。第一电极22可以是氧化铟锡（Indium Tin Oxide）电极、金属网格（Matal mesh）或者其他电极，即第一电极22的制备材料为金属氧化物、金属或者其他材料。第一电极22的形状包括正方形、长方形、棱形、梯形、圆形、三角形或者其他不规则形状，本申请不做具体的限定。
为了说明本申请的技术方案，本申请以第一电极22为正方形氧化铟锡电极进行说明，多个阵列排布的第一电极22组成多个按行阵列和按列阵列排列的第一棱形图案，按列阵列排列的第一棱形图案的尺寸大于按行阵列排列的第一棱形图案，按行阵列排列的相邻两个第一棱形图案之间设置有第一桥接线23，第一桥接线23与第一电极22通过同一制程且同层制作，具体如图3A所示。
具体地，通过溅射沉积工艺于基板21上形成一ITO膜层，再在ITO膜层上形成一光阻层，通过第一掩膜版对光阻层进行曝光处理后，用显影液处理曝光后的光阻层，部分光阻层被去除，剩下的光阻层覆盖ITO膜层，将未被光阻层覆盖的ITO膜层通过刻蚀制程去除，再去除剩余的光阻层以形成多个阵列排布的第一电极22和第一桥接线23。第一电极22的尺寸为1-200微米见方，即第一电极22的尺寸为1-40000平方微米；第一电极22的尺寸可以更小以提高耐弯折性，第一电极22的尺寸为10-150微米见方，例如，第一电极22的尺寸为20微米见方、50微米见方、80微米见方或120微米见方。第一电极22的尺寸小有利于避免第一电极22在弯折时产生裂纹，即有利于提高第一电极22的柔性。
S12:于多个第一电极22和基板21上形成设置有多个过孔25的绝缘层24，过孔25设置于第一电极22的上方。
具体地，采用等离子体增强化学气相沉积（Plasma Enhanced Chemical Vapor Deposition, PECVD）、化学气相沉积（Chemical Vapor Deposition, CVD）、原子层沉积（Atom Layer Depositon, ALD）、溅射沉积、真空蒸镀、喷墨打印（Ink-Jet Printing）或旋涂中的一种以于第一电极22和基板21上形成一整面的绝缘层24；
接着，采用黄光光刻工艺在绝缘层24上形成多个过孔25，过孔25位于每个第一电极22的上方，黄光光刻工艺与步骤S11中相同，此处不做详细描述。
每个第一电极22上方过孔25的数目以及位置取决于第一电极22的形状、第一电极22位于第一棱形图案中的位置以及后续形成的第二电极的形状等。对于步骤S11中形成的多个第一电极22组成的第一棱形图案，位于同一第一棱形图案的相对的两个顶角处的第一电极22的上方分别设置有两个过孔25，此两个过孔25处于第一电极22相对的两个转角处，此两个过孔25中的一个过孔25用于与后续形成的第二桥接线连接，此两个顶角处的第一电极22位于相邻的两个第一棱形图案之间，而此第一棱形图案中的其他两个相对的顶角处的第一电极22的转角的上方有一个过孔25；位于第一棱形图案边缘上的第一电极22的上方有两个过孔25，此过孔25位于第一电极25相邻的转角处的上方；位于第一棱形图案内部的第一电极22的上方有四个过孔25，此过孔25分别位于第一电极25的四个转角处。过孔25的尺寸小于第一电极22的尺寸，本申请不作具体的限定。
在本实施例中，绝缘层24为有机绝缘层、无机绝缘层或有机绝缘层和无机绝缘层的交叠层。有机绝缘层的制备材料包括但不限于聚酰亚胺和聚丙烯酸酯；无机绝缘层的制备材料包括但不限于氮化硅、氧化硅或氮氧化硅。
S13:于绝缘层24上形成多个第二电极26，第二电极26通过过孔25与第一电极22交替地串接以形成触控单元。
在本实施例中，触控单元为双层互容电极、单层互容电极以及单层自容电极中的一种。具体地，触控单元为双层互容电极。
在本实施例中，第二电极26阵列排布在绝缘层24上。第二电极26可以是氧化铟锡（Indium Tin Oxide）电极、金属网格（Matal mesh）或者其他电极，即第二电极26的制备材料为金属氧化物、金属或者其他材料。第二电极26可以通过黄光光刻工艺、网印工艺或者其他工艺形成于绝缘层24上且通过过孔25与第一电极22交替地串接以形成触控单元。第二电极26的形状包括正方形、长方形、棱形、圆形、梯形、三角形或者其他不规则形状，本申请不做具体的限定。第二电极26的形状可以与第一电极22的形状相同，也可以不同，第二电极26的制备材料可以与第一电极22的制备材料相同，也可以不同。
为了说明本申请的技术方案，第二电极为正方形氧化铟锡电极。具体地，在绝缘层24上形成一整面的ITO膜层，通过黄光光刻制程处理ITO膜层以形成多个阵列排布的第二电极26和第二桥接线27，多个第二电极26形成按行阵列排列和按列阵列排列的第二棱形图案，按行阵列排列的第二棱形图案的尺寸大于按列阵列排列的第二棱形图案的尺寸，按行排列的第二棱形图案与按列排列的第一棱形图案的尺寸相同且按行排列的第二棱形图案中第二电极26的排布方式与按列排列的第一棱形图案中第一电极22的排布方式相同，按列阵列排布的第二棱形图案与按行阵列第一棱形图案的尺寸相同且按列阵列排布的第二棱形图案中第二电极26的排布方式与按行阵列第一棱形图案中的第一电极22的排布方式相同。多个第二电极26组成的第二棱形图案位于多个第一电极22形成的第一棱形图案的上方，按列阵列排布的相邻两个第二棱形图案之间设置有第二桥接线27，第二桥接线27与第二电极26通过同一制程且同层制作，第二桥接线27位于第一桥接线23的上方且两者所在直线相互垂直，具体如图3B所示。第二电极26的尺寸为1-200微米见方，即第二电极26的尺寸为1-40000平方微米；第二电极26的尺寸可以更小以提高耐弯折性，第二电极26的尺寸为10-150微米见方，例如第二电极26的尺寸为20微米见方、50微米见方、80微米见方或120微米见方。第二电极26的尺寸小有利于避免第二电极26在弯折时出现裂纹，即提高第二电极26的柔性。
图3C为触控面板上的第一电极22和第二电极26交替串接以形成触控单元的局部示意图，由图3C可知，多个第一电极22组成的第一棱形图案和多个第二电极26组成的第二棱形图案组成多个按行阵列排列和按行阵列排列的棱形电极，棱形电极构成双层互容式触控单元，过孔25在基板21上的垂直投影与组成第一棱形图案的多个第一电极22和组成第二棱形图案的多个第二电极26在基板21上的垂直投影重合的部分完全重合。
如图3D以及图3E所示，图3D为图3C沿A-A切线方向的截面图，图3E为图3C沿B-B切线方向的截面图。第一桥接线23的两端分别与位于同一行相邻两个棱形电极中的第二电极26通过过孔25连接以使同一行的相邻两个棱形电极电性连接，第二桥接线27的两端分别与位于同一列相邻两个棱形电极中的第一电极22通过过孔25连接以使同一列的相邻两个棱形电极电性连接，即同一行的相邻两个棱形电极通过第一桥接线23电性连接，同一列的相邻两个棱形电极通过第二桥接线27电性连接。
该触控单元组成的触控面板应用于柔性屏时，交替串接的第一电极22和第二电极26之间的相互作用力小，弯折时触控单元弯曲产生的应力分散于多个第一电极22和多个第二电极26，而且，相对于组成传统触控单元的接收电极100和发射电极101的尺寸，第一电极22和第二电极26的尺寸明显减小，使得第一电极22和第二电极26产生耐弯折性增加，故由第一电极22和第二电极26组成的触控单元具有柔性，能够避免在弯折过程中产生裂纹。
上述方案通过尺寸小且位于不同层的多个第一电极和多个第二电极交替地串接以形成触控单元，使得组成触控面板的触控单元具有柔性。
本申请还提供一种上述制造方法制得的触控面板，该触控面板包括：
一基板；
多个第一电极，第一电极形成于基板上；
一绝缘层，绝缘层形成于多个第一电极和基板上，绝缘层上设置有多个过孔，过孔位于所述第一电极的上方；
多个第二电极，第二电极形成于绝缘层上，第二电极通过过孔与第一电极交替地串接以形成触控单元。
在本实施例中，触控单元包括棱形电极，棱形电极是按行和按列进行阵列排布。在其他实施例中，触控单元也可以为正方形电极、长方形电极或者其他形状的电极。
在本实施例中，组成棱形电极的第一电极的形状为正方形、长方形、棱形、圆形、梯形以及三角形中的至少一种，组成棱形电极的第二电极的形状为正方形、长方形、棱形、梯形、圆形以及三角形中的至少一种。
在本实施例中，棱形电极包括多个第一电极组成的第一棱形图案和多个第二电极形成的第二棱形图案，过孔在基板上的垂直投影与组成第一棱形图案的多个第一电极和组成第二棱形图案的多个第二电极在基板上的垂直投影重合的部分完全重合。多个第一电极组成的第一棱形图案是按行和按列进行阵列排布，多个第二电极组成的第二棱形图案是按行和按列进行阵列排布，第二棱形图案位于第一棱形图案的正上方。
在本实施例中，同一行的相邻两个棱形电极通过第一桥接线电性连接，同一列的相邻两个棱形电极通过第二桥接线电性连接。
在本实施例中，第一桥接线与第一电极通过同一制程且同层制作，第二桥接线与第二电极通过同一制程且同层制作，第一桥接线与位于同一行相邻两个棱形电极中的第二电极通过过孔连接以使同一行的相邻两个棱形电极电性连接，第二桥接线与位于同一列相邻两个棱形电极中的第一电极通过过孔连接以使同一列的相邻两个棱形电极电性连接。
在本实施例中，第一电极的形状为正方形且第二电极的形状为正方形时，位于第一棱形图案边缘上以及相邻两个第一棱形图案的顶角之间的第一电极上方设置有两个过孔，位于第一棱形图案内部的第一电极的上方设置有四个过孔，位于第一棱形图案的其他顶角的第一电极的上方设置有一个过孔。
在本实施例中，第一电极的制备材料为金属氧化物或金属，第二电极的制备材料为金属氧化物或金属。其中，金属氧化物为氧化铟锡。第一电极和第二电极的尺寸较小，通过将尺寸小且不同层的第一电极和第二电极交替地串接以形成触控单元，使得触控单元具有柔性。
在本实施例中，第一电极的尺寸为1-200微米见方；第一电极的尺寸可以更小以提高耐弯折性，第一电极的尺寸为10-150微米见方，例如，第一电极的尺寸为20微米见方、50微米见方、80微米见方或120微米见方。第二电极的尺寸为1-200微米见方；第二电极26的尺寸可以更小以提高耐弯折性，第二电极的尺寸为10-150微米见方，例如，第二电极的尺寸为20微米见方、50微米见方、80微米见方或120微米见方。
在本实施例中，绝缘层为有机绝缘层、无机绝缘层或有机绝缘层和无机绝缘层的交叠层。有机绝缘层的制备材料包括但不限于聚酰亚胺和聚丙烯酸酯；无机绝缘层的制备材料包括但不限于氮化硅、氧化硅或氮氧化硅。
绝缘层为有机绝缘层，有机绝缘层隔绝第一电极和第二电极的同时，能够使触控面板应用于柔性屏时，第一电极和第二电极的可折叠性进一步地提高，即第一电极和第二电极组成的触控单元的柔性进一步地提高。
绝缘层由两层有机绝缘层和位于两层中间层之间的无机绝缘层组成。一方面进一步地提高第一电极和第二电极之间的绝缘性，另一方面进一步地提高第一电极和第二电极组成的触控单元的柔性。
在本实施例中，触控面板还包括第二绝缘层，第二绝缘层形成于多个第二电极上。第二绝缘层为有机绝缘层、无机绝缘层或有机绝缘层和无机绝缘层的交叠层。有机绝缘层的制备材料包括但不限于聚酰亚胺和聚丙烯酸酯；无机绝缘层的制备材料包括但不限于氮化硅、氧化硅或氮氧化硅。为了进一步地提高触控单元的柔性，第二绝缘层为有机绝缘层。
上述触控面板通过尺寸小且位于不同层的多个第一电极和多个第二电极交替地串接以形成触控单元，使得组成触控面板的触控单元具有柔性。此外，位于不同层的多个第一电极和多个第二电极相互交替地串接以形成触控单元使得触控单元的厚度以及面积增大，从而降低触控单元的电阻，提升触控信号的灵敏度，有助于降低触控能耗；多个第一电极和多个第二电极不同层制作且相互间设置有绝缘层间隔，绝缘效果更好，不会存在电极短路的现象，从而提升工艺稳定性，降低工艺制作难度。
以上实施例的说明只是用于帮助理解本申请的技术方案及其核心思想；本领域的普通技术人员应当理解：其依然可以对前述各实施例所记载的技术方案进行修改，或者对其中部分技术特征进行等同替换；而这些修改或者替换，并不使相应技术方案的本质脱离本申请各实施例的技术方案的范围。

Claims (20)

  1.   一种触控面板，其中，所述触控面板包括：
    一基板；
    多个第一电极，所述第一电极形成于所述基板上；
    一绝缘层，所述绝缘层形成于多个所述第一电极和所述基板上，所述绝缘层上设置有多个过孔，所述过孔位于所述第一电极的上方；
    多个第二电极，所述第二电极形成于所述绝缘层上，所述第二电极通过所述过孔与所述第一电极交替地串接以形成触控单元。
  2. 根据权利要求1所述的触控面板，其中，所述触控单元包括棱形电极。
  3. 根据权利要求2所述的触控面板，其中，组成所述棱形电极的所述第一电极的形状为正方形、长方形、棱形、圆形、梯形以及三角形中的至少一种，组成所述棱形电极的所述第二电极的形状为正方形、长方形、棱形、梯形、圆形以及三角形中的至少一种。
  4. 根据权利要求3所述的触控面板，其中，所述棱形电极包括多个所述第一电极组成的第一棱形图案和多个所述第二电极形成的第二棱形图案，所述过孔在所述基板上的垂直投影与组成所述第一棱形图案的多个所述第一电极和组成所述第二棱形图案的多个所述第二电极在所述基板上的垂直投影重合的部分完全重合。
  5. 根据权利要求2所述的触控面板，其中，同一行的相邻两个所述棱形电极通过第一桥接线电性连接，同一列的相邻两个所述棱形电极通过第二桥接线电性连接。
  6. 根据权利要求5所述的触控面板，其中，所述第一桥接线与所述第一电极通过同一制程且同层制作，所述第二桥接线与所述第二电极通过同一制程且同层制作，所述第一桥接线的两端分别与位于同一行相邻两个所述棱形电极中的所述第二电极通过所述过孔连接以使同一行的相邻两个所述棱形电极电性连接，所述第二桥接线的两端分别与位于同一列相邻两个所述棱形电极中的所述第一电极通过所述过孔连接以使同一列的相邻两个所述棱形电极电性连接。
  7. 根据权利要求1所述的触控面板，其中，所述绝缘层为有机绝缘层。
  8. 根据权利要求1所述的触控面板，其中，所述第一电极的尺寸为1-40000平方微米，所述第二电极的尺寸为1-40000平方微米。
  9. 根据权利要求1所述的触控面板，其中，所述第一电极的制备材料为金属氧化物或金属，所述第二电极的制备材料为金属氧化物或金属。
  10. 根据权利要求9所述的触控面板，其中，所述金属氧化物为氧化铟锡。
  11. 一种触控面板的制造方法，其中，所述制造方法包括如下步骤：
    提供一基板；
    于所述基板上形成多个第一电极；
    于多个所述第一电极和所述基板上形成设置有多个过孔的绝缘层，所述过孔设置于所述第一电极的上方；
    于所述绝缘层上形成多个第二电极，所述第二电极通过所述过孔与所述第一电极交替地串接以形成触控单元。
  12. 根据权利要求11所述的触控面板的制造方法，其中，所述触控单元包括棱形电极。
  13. 根据权利要求12所述的触控面板的制造方法，其中，组成所述棱形电极的所述第一电极的形状为正方形、长方形、棱形、圆形、梯形以及三角形中的至少一种，组成所述棱形电极的所述第二电极的形状为正方形、长方形、棱形、梯形、圆形以及三角形中的至少一种。
  14. 根据权利要求13所述的触控面板的制造方法，其中，所述棱形电极包括多个所述第一电极组成的第一棱形图案和多个所述第二电极形成的第二棱形图案，所述过孔在所述基板上的垂直投影与组成所述第一棱形图案的多个所述第一电极和组成所述第二棱形图案的多个所述第二电极在所述基板上的垂直投影重合的部分完全重合。
  15. 根据权利要求12所述的触控面板的制造方法，其中，同一行的相邻两个所述棱形电极通过第一桥接线电性连接，同一列的相邻两个所述棱形电极通过第二桥接线电性连接。
  16. 根据权利要求15所述的触控面板的制造方法，其中，所述第一桥接线与所述第一电极通过同一制程且同层制作，所述第二桥接线与所述第二电极通过同一制程且同层制作，所述第一桥接线的两端分别与位于同一行相邻两个所述棱形电极中的所述第二电极通过所述过孔连接以使同一行的相邻两个所述棱形电极电性连接，所述第二桥接线的两端分别与位于同一列相邻两个所述棱形电极中的所述第一电极通过所述过孔连接以使同一列的相邻两个所述棱形电极电性连接。
  17. 根据权利要求11所述的触控面板的制造方法，其中，所述绝缘层为有机绝缘层。
  18. 根据权利要求11所述的触控面板的制造方法，其中，所述第一电极的尺寸为1-40000平方微米，所述第二电极的尺寸为1-40000平方微米。
  19. 根据权利要求11所述的触控面板的制造方法，其中，所述第一电极的制备材料为金属氧化物或金属，所述第二电极的制备材料为金属氧化物或金属。
  20. 根据权利要求19所述的触控面板的制造方法，其中，所述金属氧化物为氧化铟锡。
PCT/CN2019/076705 2018-12-19 2019-03-01 触控面板及其制造方法 Ceased WO2020124791A1 (zh)

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