WO2020087833A1 - 风刀及采用该风刀的干燥装置 - Google Patents

风刀及采用该风刀的干燥装置 Download PDF

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Publication number
WO2020087833A1
WO2020087833A1 PCT/CN2019/077835 CN2019077835W WO2020087833A1 WO 2020087833 A1 WO2020087833 A1 WO 2020087833A1 CN 2019077835 W CN2019077835 W CN 2019077835W WO 2020087833 A1 WO2020087833 A1 WO 2020087833A1
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Prior art keywords
air knife
substrate
dried
deflector
via hole
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PCT/CN2019/077835
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English (en)
French (fr)
Inventor
施杰
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Wuhan China Star Optoelectronics Technology Co Ltd
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Wuhan China Star Optoelectronics Technology Co Ltd
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Publication of WO2020087833A1 publication Critical patent/WO2020087833A1/zh
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Ceased legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B21/00—Arrangements for supplying or controlling air or other gases for drying solid materials or objects
    • F26B21/50—Ducting arrangements from the source of air or other gases to the materials or objects being dried

Definitions

  • the invention relates to the field of display devices, in particular to an air knife and a drying device using the air knife.
  • wet equipment In the manufacturing process of each component of the display device, wet equipment (Wet) is often required.
  • a cleaner (Cleaner) is used to clean the surface of the glass substrate before coating to remove particles and organic matters;
  • a developing machine (Develop) is used to peel off the photoresist after the glass substrate is coated and exposed to Form the desired pattern.
  • Wet equipment generally consists of conveyor rollers, spray rinsing, brushing, and air knife drying.
  • the air knife with drying function is an important quality assurance part of wet equipment.
  • the substrate to be cleaned such as a glass substrate, is conveyed on the conveying roller by spraying water or chemical solution, detergent through the spray mechanism to wash off particles, organic matter, photoresist, etc. on the surface of the substrate.
  • the gas under pressure and flow can quickly blow out and dry the remaining water on the surface of the cleaned substrate.
  • FIG. 1 is a schematic side view of a conventional air knife when performing a drying operation.
  • the air knife drying device includes an upper air knife 11 and a lower air knife 12 respectively disposed on both sides of the substrate 10 to be dried, and a substrate to be dried 10 is conveyed from the upper air knife 11 and the lower wind by the conveying roller 13 Passing between the knives 12, a certain pressure and flow of dry air is ejected from the nozzle slits of the upper air knife 11 and the lower air knife 12 to quickly blow off and dry the water 14 remaining on the surface of the substrate 10 to be dried.
  • the existing air knife drying device uses rapid high-pressure slit airflow to blow off water stains at one time, and has the following disadvantages: (1) The wind action time is short, the one-time drying effect cannot be well guaranteed, and the drying is easy to happen occasionally. Secondary drying method requires high equipment cost; (2) Water stains on the surface of the substrate to be dried are easily splashed by high pressure, which can easily cause water droplets to gather and drip on the air knife device, causing secondary pollution and affecting the drying effect.
  • the technical problem to be solved by the present invention is to provide an air knife and a drying device using the air knife, which can improve the drying effect.
  • the present invention provides an air knife, which includes a main air knife for delivering a drying gas to a substrate to be dried, and the main air knife is away from the substrate to be dried
  • a side wall of the moving direction is provided with a baffle plate, the baffle plate extends along the flow direction of the drying gas, and the baffle plate has an included angle with the plane of the substrate to be dried, the included angle Less than 90 degrees
  • the deflector is provided with a plurality of through holes penetrating the deflector, and in the width direction of the deflector, the plurality of through holes are sequentially arranged to form a row , And along the flow direction of the drying gas, the diameter of the via hole gradually increases, and a cover is provided at one end of the via hole, and the cover can block the via hole.
  • the air knife further includes at least one auxiliary air pipe, one end of the auxiliary air pipe is connected to a branch opening of the main air knife, and the other end of the auxiliary air pipe is connected to the via hole facing away from the On one side of the substrate to be dried, the main air knife supplies drying gas to the auxiliary gas pipe through the branch opening, and the drying gas is blown toward the substrate to be dried through the via hole.
  • the auxiliary air pipe includes a joint, a pipe body and a nozzle, the joint is provided at one end of the pipe body and connected with the main air knife, and the nozzle is provided in the pipe The other end of the body is connected to the via.
  • the nozzle includes a magnetic sleeve and a tapered nozzle, the magnetic sleeve is sleeved on the tapered nozzle, and the magnetic sleeve is adsorbed on the surface of the deflector, To fix the nozzle, the tapered nozzle is inserted into the via hole.
  • the deflector further includes a connecting portion facing the side wall of the main air knife, the connecting portion has at least one sliding slot, and a locking knob passes through the sliding slot and the The side walls of the main air knife are connected, and the length of the chute is greater than the diameter of the screw of the locking knob.
  • the present invention also provides an air knife, including a main air knife, the main air knife is used to deliver a drying gas to a substrate to be dried, the main air knife away from the substrate to be dried
  • a deflector is provided on the side of the movement direction, the deflector extends along the flow direction of the drying gas, and the deflector has an angle with the plane of the substrate to be dried, and the angle is less than 90 degree.
  • the deflector is provided with a plurality of vias penetrating the deflector, and the plurality of vias are sequentially arranged in a row along the width of the deflector .
  • the deflector is provided with a plurality of through holes penetrating the deflector, and the diameter of the through holes gradually increases along the flow direction of the drying gas.
  • a cover is provided at one end of the via hole, and the cover can cover the via hole.
  • the air knife further includes at least one auxiliary air pipe, one end of the auxiliary air pipe is connected to a branch opening of the main air knife, and the other end of the auxiliary air pipe is connected to the via hole facing away from the On one side of the substrate to be dried, the main air knife supplies drying gas to the auxiliary gas pipe through the branch opening, and the drying gas is blown toward the substrate to be dried through the via hole.
  • the auxiliary air pipe includes a joint, a pipe body and a nozzle, the joint is provided at one end of the pipe body and connected with the main air knife, and the nozzle is provided in the pipe The other end of the body is connected to the via.
  • the nozzle includes a magnetic sleeve and a tapered nozzle, the magnetic sleeve is sleeved on the tapered nozzle, and the magnetic sleeve is adsorbed on the surface of the deflector, To fix the nozzle, the tapered nozzle is inserted into the via hole.
  • the deflector further includes a connecting portion facing the side wall of the main air knife, the connecting portion has at least one sliding slot, and a locking knob passes through the sliding slot and the The side walls of the main air knife are connected, and the length of the chute is greater than the diameter of the screw of the locking knob.
  • the invention also provides a drying device, which comprises an upper air knife and a lower air knife, the air outlet of the upper air knife is arranged opposite to the air outlet of the lower air knife, and the air outlet of the upper air knife and the outlet of the lower air knife There is a gap between the air outlets, which allows a substrate to be dried to pass through, characterized in that the structure of the upper air knife is the same as the structure of the air knife as described above.
  • the structure of the lower air knife is the same as the structure of the air knife as described above, the air outlet direction of the upper air knife is at an acute angle to the plane of the substrate to be dried, and the air outlet of the lower air knife The direction is at an acute angle to the plane of the substrate to be dried.
  • the advantage of the present invention is that a deflector is provided on the side wall of the main air knife, and the deflector plays a blocking role on the drying gas, extending the horizontal stroke of the drying gas, thereby prolonging the wind action time of the drying gas, and improving the drying effect.
  • the deflector can block the water stains on the surface of the substrate to be dried under high pressure, to avoid secondary pollution and affect the drying effect.
  • Figure 1 is a schematic side view of a conventional air knife when performing a drying operation
  • FIG. 2 is a schematic side view of an embodiment of the air knife of the present invention.
  • FIG. 3 is a schematic side view of the working state of the air knife of the present invention.
  • FIG. 4 is a schematic view of the top structure of the working state of the air knife of the present invention.
  • 5A is a schematic diagram of the working principle of the existing air knife
  • 5B is a schematic diagram of the working principle of the air knife of the present invention.
  • FIG. 6 is a schematic side view of another embodiment of the air knife of the present invention.
  • FIG. 7A is a schematic diagram of another embodiment of the air knife of the present invention.
  • FIG. 7B is a schematic structural plan view of a deflector of another embodiment of the air knife of the present invention.
  • FIG. 7C is a schematic structural side view of a deflector of another embodiment of the air knife of the present invention.
  • FIG. 8 is a schematic diagram of another embodiment of the air knife of the present invention.
  • FIG. 9 is a schematic diagram of the structure of the drying device of the present invention.
  • FIG. 2 is a schematic view of a side structure of an embodiment of the air knife of the present invention
  • FIG. 3 is a schematic view of a side view of the working state of the air knife of the present invention
  • FIG. 4 is a schematic plan view of the working state of the air knife of the present invention.
  • the air knife 20 of the present invention includes a main air knife 21 and a deflector 22.
  • the main air knife 21 is used to deliver a drying gas to a substrate 30 to be dried.
  • the main air knife 21 has an air outlet 211 that faces the substrate 30 to be dried, and drying gas is blown from the air outlet 211 to the substrate 30 to be dried.
  • the air outlet direction of the air outlet 211 has an acute angle with the substrate 30 to be dried, so as to improve the utilization rate of the drying gas.
  • the main air knife 21 is inclined with respect to the substrate 30 to be dried, so that the air outlet direction of the air outlet 211 has an acute angle with the substrate 30 to be dried, thereby drying
  • the stroke side of the gas blowing is long, thereby improving the utilization rate of the drying gas.
  • the air outlet 211 includes but is not limited to a slit air outlet.
  • the main air knife 21 has an inner cavity 212 that serves as a buffer cavity for dry gas.
  • the inner cavity 212 communicates with the air outlet 211, and the dry gas transmitted by a gas source (not shown in the drawings) passes through the inner cavity 212 and is ejected from the air outlet 211.
  • the deflector 22 is disposed on the side of the main air knife 21 facing away from the moving direction of the substrate 30 to be dried, and the deflector 22 extends along the flow direction of the drying gas.
  • the moving direction of the substrate 30 to be dried is shown by arrow A, and the flow guide is provided on the side of the main air knife 21 facing away from the moving direction of the substrate to be dried 30 Plate 22, the deflector 22 extends in a direction away from the main air knife 21, that is, the deflector 22 extends along the flow direction of the drying gas.
  • the width W of the deflector 22 is smaller than the width of the substrate 30 to be dried, thereby preventing the deflector 22 from interfering with the double conveying roller 31 at the edge.
  • the width of the deflector 22 refers to a dimension of the deflector 22 in an extending direction perpendicular to the moving direction of the substrate 30 to be dried.
  • the double-conveying roller 31 is used to stabilize the traveling of the substrate 30 to be dried, to avoid being slipped or shaken by wind force.
  • FIG. 5A is a schematic diagram of the working principle of an existing air knife
  • FIG. 5B is a schematic diagram of the working principle of the air knife of the present invention.
  • the drying gas ejected from the air outlet is blocked by the substrate 10 to be dried, and the flow of the drying gas will be dispersed (as indicated by the arrows in the figure) Display), which makes the drying gas's wind action time short, can not guarantee a one-time drying effect, is easy to occasionally dry poorly, and the water stain on the surface of the substrate 100 to be dried is suddenly subject to high pressure and easy to splash, which is easy to cause water droplets on the air knife to gather and drip, resulting in Secondary pollution affects the drying effect.
  • the air flow of the drying gas will also be dispersed, but the dispersed air flow will be further guided
  • the blocking of the flow plate 22 extends the horizontal stroke of the drying gas (as shown by the arrow in the figure), thereby prolonging the wind action time of the drying gas and improving the drying effect, and the deflector 22 can be applied to the surface of the substrate 30 to be dried
  • the water splashed by high pressure acts as a barrier.
  • the plane between the deflector 22 and the substrate 30 to be dried has an angle ⁇ , and the angle ⁇ is less than 90 degrees.
  • the deflector 22 and the horizontal plane have the included angle ⁇ .
  • the deflector 22 is inclined relative to the plane of the substrate 30 to be dried, that is, the included angle ⁇ is an acute angle.
  • the deflector 22 is parallel to the plane where the substrate 30 to be dried is located, that is, the included angle ⁇ is 0 degrees.
  • the deflector 22 When the deflector 22 is parallel to the plane where the substrate 30 to be dried is located, the deflector 22 can further extend the horizontal stroke of the drying gas, thereby prolonging the wind action time of the drying gas and improving the drying effect, and The deflector 22 can further block water stains on the surface of the substrate 30 to be dried due to high pressure. Among them, please refer to the arrow in Figure 6 for the flow of drying gas.
  • FIG. 7A is a schematic view of another embodiment of the air knife of the present invention
  • FIG. 7B is a schematic top view of a deflector of another embodiment of the air knife of the present invention
  • FIG. 7C is a guide of another embodiment of the air knife of the present invention.
  • the deflector 22 is parallel to the plane where the substrate 30 to be dried is located.
  • the deflector 22 is provided with at least one through hole 221 penetrating the deflector 22.
  • the via hole 221 penetrates the deflector 22 in the thickness direction of the deflector 22.
  • the via hole 221 allows a part of the drying gas to pass through, which can relieve the pressure of the drying gas.
  • For the direction of the drying gas refer to the arrow in FIG. 7A.
  • the deflector 22 is provided with a plurality of through holes 221 penetrating through the deflector 22, along the width direction of the deflector 22 (as shown by the width W in FIG. 4) Direction), the plurality of vias 221 are arranged in sequence to form a row.
  • the diameters of the plurality of vias 221 are the same in this direction.
  • the plurality of the through holes 221 are along the flow direction of the drying gas (ie, the moving direction of the substrate 30 to be dried) The pore size gradually increases.
  • the deflector 22 is provided with four rows of via holes, each row includes a plurality of via holes 221 having the same pore diameter, and the pore diameters of the four rows of via holes 221 are along the drying gas
  • the direction of the flow gradually increases.
  • the advantage of gradually increasing the diameter of the through hole 221 is that it facilitates the evacuation of gas pressure, so that the airflow pressure at the deflector 22 away from the main air knife 21 is the lowest. The closer to the main air knife 21, the stronger the air pressure. The treatment effect gradually becomes thinner, avoiding water splash caused by sudden pressure changes.
  • the size of the diameter of the via hole 221 is exaggerated in the drawings schematically. In practice, the diameter of the via hole 221 can be set according to requirements.
  • the present invention is not limited to four rows of vias, and the number of vias can be adjusted according to the actual structure of the product.
  • a cover 222 is provided at one end of the via 221, and the cover 222 may be provided at the end of the via 221 facing the substrate 30 to be dried, or may be provided at the via 221 facing away from the target One end of the substrate 30 is dried.
  • the cover 222 can block the via hole 221, and then selectively open the via hole 221 to adjust the air pressure. For example, if the air pressure needs to be increased, the via hole 221 with a large hole diameter is closed or the via hole 221 with a small hole diameter is opened. If the air pressure needs to be reduced, the via hole 221 with a large hole diameter is opened, or the via hole 221 with a small hole diameter is closed.
  • only two covers 222 are schematically shown in the drawings.
  • the cover 222 is a magnetic cover, which is attracted to the deflector 22 by magnetic force to block the via hole 221.
  • the deflector 22 further includes a connecting portion 223 facing the side wall of the main air knife 21, the deflector 22 passes through the connecting portion 223 and the The side walls of the main air knife 21 are connected.
  • the connecting portion 223 is disposed on the side of the deflector 22, the connecting portion 223 has at least one sliding groove 224, and a locking knob 24 passes through the sliding groove 224 and the main air knife 21's side wall connection.
  • the locking knob 24 may be a conventional structure, such as a bolt with a nut.
  • the locking knob 24 has a locking head 241 and a screw (not shown in the drawings) connected to the main air knife 21 through the sliding groove 224, so The locking head 241 plays a fixed role.
  • the length of the sliding groove 224 is greater than the diameter of the screw of the locking knob 24, that is, when the locking knob 24 is loosened, the connecting portion 223 can be moved to change the locking knob 24 relative to The position of the chute 224 further changes the distance between the deflector 22 and the substrate 30 to be dried.
  • a scale (not shown in the drawings) is provided on the connecting portion 223 to observe the distance between the deflector 22 and the substrate 30 to be dried.
  • the air knife further includes at least one auxiliary air pipe 23.
  • FIG. 8 is a schematic diagram of another embodiment of the air knife of the present invention. Please refer to FIG. 8.
  • only one auxiliary air pipe 23 is schematically shown, and one end of the auxiliary air pipe 23 is connected to the main air knife 21.
  • a branch opening 213, the other end of the auxiliary gas pipe 23 is connected to a side of the via hole 221 facing away from the substrate 30 to be dried.
  • the branch opening 213 communicates with the inner cavity 212
  • the main air knife 21 can deliver dry gas to the auxiliary air pipe 23 through the branch opening 213, the dry gas is blown through the through hole 221 To the substrate 30 to be dried.
  • the function of the auxiliary air pipe 23 is that, when needed, the drying gas can be sprayed to the substrate 30 to be dried through the via hole 221 to increase the downward airflow pressure to avoid the unstable airflow causing the substrate 30 to be dried shake.
  • the auxiliary air pipe 23 includes a joint 231, a pipe body 232, and a nozzle 233.
  • the joint 231 is disposed at one end of the tube body 232 and connected to the branch opening 213 of the main air knife 21, and the nozzle 233 is disposed at the other end of the tube body 232 and is connected to the through hole 221 connection.
  • the nozzle 233 includes a magnetic sleeve 2331 and a tapered nozzle 2332, the magnetic sleeve 2331 is sleeved on the tapered nozzle 2332, and the magnetic sleeve 2331 is attracted to the deflector 21 surface to fix the nozzle 233, the tapered nozzle 2332 is inserted into the via hole 221.
  • the nozzle 233 is connected to the via hole 221 in a magnetically fixed manner, which facilitates disassembly of the auxiliary air pipe 23 and movement between different via holes 221.
  • the invention also provides a drying device.
  • 9 is a schematic diagram of the structure of the drying device of the present invention.
  • the drying device 100 includes an upper air knife 101 and a lower air knife 102.
  • the air outlet 1011 of the upper air knife 101 is opposite to the air outlet 1021 of the lower air knife 102.
  • both the upper air knife 101 and the lower air knife 102 are inclined, and the air outlet 1011 of the upper air knife 101 is opposite to the air outlet 1021 of the lower air knife 102.
  • the outflow direction of the blade 101 is at an acute angle to the plane of the substrate 30 to be dried, and the outflow direction of the downdraft 102 is at an acute angle to the plane of the substrate 30 to be dried, further improving the utilization rate of the drying gas .
  • the structure of the upper air knife 101 is the same as the structure of the air knife of the present invention described above, or the structure of the upper air knife 101 and the structure of the lower air knife 102 are the same as the structure of the air knife of the present invention described above.
  • the structure of the upper air knife 101 is the same as the structure of the air knife of the present invention described above, and the specific structure of the upper air knife 101 will not be repeated one by one.
  • the drying device further includes a plurality of conveying rollers 103, and the substrate 30 to be dried is placed on the conveying roller 103, and the conveying roller 103 rotates to drive the substrate 30 to be dried in the direction indicated by the arrow A.
  • the transmission roller 103 is a conventional structure in the art, and will not be described in detail.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Drying Of Solid Materials (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

一种风刀（20）及采用该风刀（20）的干燥装置（100）。在主风刀（21）侧壁设置导流板（22），导流板（22）对干燥气体起到阻挡作用，延长干燥气体的水平行程，从而延长干燥气体的风力作用时间，提高干燥效果，且导流板（22）能够对待干燥基板（30）表面的受高压而飞溅的水渍起到阻挡作用，避免造成二次污染，影响干燥效果。

Description

风刀及采用该风刀的干燥装置 技术领域
本发明涉及显示装置领域，尤其涉及一种风刀及采用该风刀的干燥装置。
 背景技术
在显示装置的各个部件的制作工艺中，常常需要用到湿式设备（Wet）。例如，清洗机（Cleaner），用于玻璃基板表面涂布前的清洗，去除颗粒（Particle）和有机物等脏污；显影机（Develop），用于玻璃基板涂布曝光后光阻的剥离，以形成所需的图案（pattern）。
湿式设备一般主要由传送滚轮（roller）、喷淋冲洗、刷洗（brush）、风刀干燥等组成，其中具有干燥功能的风刀（Air Knife）是湿式设备重要的品质保障部分。待清洗基板，例如玻璃基板，在传送滚轮上传送经喷淋机构喷洒水或药液、洗剂将基板表面的颗粒、有机物脏污、光阻等冲洗脱离后，利用风刀狭缝喷出一定压力流量的气体，对清洗后的基板表面残留的水起到快速吹除干燥。
图1是现有的风刀进行干燥作业时的侧视示意图。请参阅图1，风刀干燥装置包括分别设置在待干燥基板10两侧的上风刀11及下风刀12，一待干燥基板10在传送滚轮13的传送下从所述上风刀11及所述下风刀12之间通过，一定压力流量的干燥风从所述上风刀11及所述下风刀12的喷嘴狭缝处喷出，快速吹除并干燥待干燥基板10表面残留的水14。
 技术问题
随着显示面板工艺的提升，制程能力越来越精细，产品良率的要求越来越高，细微的水渍残留都将影响产品良率。现有的风刀干燥装置利用快速高压狭缝气流一次性吹除水渍，有如下缺点：（1）风力作用时间短，不能良好保证一次性干燥效果，易偶发干燥不良，现多采用后续加热方式二次干燥，设备成本高；（2）待干燥基板表面水渍突然受高压易飞溅，易造成风刀装置上水滴聚集滴落，造成二次污染，影响干燥效果。
 技术解决方案
本发明所要解决的技术问题是，提供一种风刀及采用该风刀的干燥装置，其能够提高干燥效果。
为了解决上述问题，本发明提供了一种风刀，其包括一主风刀，所述主风刀用于向一待干燥基板输送一干燥气体，在所述主风刀背离所述待干燥基板运动方向的一侧壁设置有一导流板，所述导流板沿所述干燥气体的流向延伸，且所述导流板与所述待干燥基板所在的平面具有一夹角，所述夹角小于90度，其中在所述导流板上设置有多个贯穿所述导流板的过孔，在沿所述导流板的宽度方向上，多个所述过孔依序排列形成一排，且在沿所述干燥气体的流向方向，所述过孔的孔径逐渐增大，在所述过孔的一端设置有一盖子，所述盖子能够遮挡所述过孔。
在一实施例中，所述风刀还包括至少一辅助气管，所述辅助气管的一端连接至所述主风刀的一分支开口，所述辅助气管的另一端连接至所述过孔背离所述待干燥基板的一侧，所述主风刀经所述分支开口向所述辅助气管提供干燥气体，所述干燥气体经所述过孔吹向所述待干燥基板。
在一实施例中，所述辅助气管包括一接头、一管体及一喷嘴，所述接头设置在所述管体的一端，并与所述主风刀连接，所述喷嘴设置在所述管体的另一端，并与所述过孔连接。
在一实施例中，所述喷嘴包括一磁性套筒及一锥形嘴，所述磁性套筒套设在所述锥形嘴上，且所述磁性套筒吸附在所述导流板表面，以将所述喷嘴固定，所述锥形嘴插入所述过孔中。
在一实施例中，所述导流板还包括一朝向所述主风刀的侧壁的连接部，所述连接部具有至少一个滑槽，一锁紧旋钮穿过所述滑槽与所述主风刀的所述侧壁连接，所述滑槽的长度大于所述锁紧旋钮的螺杆的直径。
为了解决上述问题，本发明还提供了一种风刀，包括一主风刀，所述主风刀用于向一待干燥基板输送一干燥气体，在所述主风刀背离所述待干燥基板运动方向的侧面设置有一导流板，所述导流板沿所述干燥气体的流向延伸，且所述导流板与所述待干燥基板所在的平面具有一夹角，所述夹角小于90度。
在一实施例中，所述导流板上设置有多个贯穿所述导流板的过孔，在沿所述导流板的宽度方向上，多个所述过孔依序排列形成一排。
在一实施例中，所述导流板上设置有多个贯穿所述导流板的过孔，在沿所述干燥气体的流向方向，所述过孔的孔径逐渐增大。
在一实施例中，在所述过孔的一端设置有一盖子，所述盖子能够遮挡所述过孔。
在一实施例中，所述风刀还包括至少一辅助气管，所述辅助气管的一端连接至所述主风刀的一分支开口，所述辅助气管的另一端连接至所述过孔背离所述待干燥基板的一侧，所述主风刀经所述分支开口向所述辅助气管提供干燥气体，所述干燥气体经所述过孔吹向所述待干燥基板。
在一实施例中，所述辅助气管包括一接头、一管体及一喷嘴，所述接头设置在所述管体的一端，并与所述主风刀连接，所述喷嘴设置在所述管体的另一端，并与所述过孔连接。
在一实施例中，所述喷嘴包括一磁性套筒及一锥形嘴，所述磁性套筒套设在所述锥形嘴上，且所述磁性套筒吸附在所述导流板表面，以将所述喷嘴固定，所述锥形嘴插入所述过孔中。
在一实施例中，所述导流板还包括一朝向所述主风刀的侧壁的连接部，所述连接部具有至少一个滑槽，一锁紧旋钮穿过所述滑槽与所述主风刀的侧壁连接，所述滑槽的长度大于所述锁紧旋钮的螺杆的直径。
本发明还提供一种干燥装置，包括一上风刀及一下风刀，所述上风刀的出风口与所述下风刀的出风口相对设置，所述上风刀的出风口与所述下风刀的出风口之间具有一间隙，所述间隙允许一待干燥基板穿过，其特征在于，所述上风刀的结构与如上述的风刀的结构相同。
在一实施例中，所述下风刀的结构与如上述的风刀的结构相同，所述上风刀的出风方向与所述待干燥基板所在的平面呈一锐角，所述下风刀的出风方向与所述待干燥基板所在的平面呈一锐角。
 有益效果
本发明的优点在于，在主风刀侧壁设置导流板，所述导流板对干燥气体起到阻挡作用，延长干燥气体的水平行程，从而延长干燥气体的风力作用时间，提高干燥效果，且所述导流板能够对所述待干燥基板表面的受高压而飞溅的水渍起到阻挡作用，避免造成二次污染，影响干燥效果。
 附图说明
图1是现有的风刀进行干燥作业时的侧视示意图；
图2是本发明风刀的一实施例的侧视结构示意图；
图3是本发明风刀工作状态的侧视示意图；
图4是本发明风刀的工作状态的俯视结构示意图；
图5A是现有的风刀的工作原理示意图；
图5B是本发明风刀的工作原理示意图；
图6是本发明风刀的另一实施例的侧视结构示意图；
图7A是本发明风刀的另一实施例的示意图；
图7B是本发明风刀的另一实施例的导流板的俯视结构示意图；
图7C是本发明风刀的另一实施例的导流板的侧视结构示意图；
图8是本发明风刀的再一实施例的示意图；
图9是本发明干燥装置的结构示意图。
 本发明的实施方式
下面结合附图对本发明提供的风刀及采用该风刀的干燥装置的具体实施方式做详细说明。
图2是本发明风刀的一实施例的侧视结构示意图，图3是本发明风刀工作状态的侧视示意图，图4是本发明风刀的工作状态的俯视结构示意图。请参阅图2、图3及图4，本发明风刀20包括一主风刀21及一导流板22。
所述主风刀21用于向一待干燥基板30输送一干燥气体。具体地说，所述主风刀21具有一出风口211，所述出风口211朝向所述待干燥基板30，干燥气体从所述出风口211吹向所述待干燥基板30。所述出风口211的出风方向与所述待干燥基板30具有一锐角夹角，以提高干燥气体的利用率。例如，如图3所示，所述主风刀21相对于所述待干燥基板30倾斜，使得所述出风口211的出风方向与所述待干燥基板30具有一锐角夹角，进而使干燥气体吹拂的行程边长，从而提高干燥气体的利用率。所述出风口211包括但不限于狭缝出风口。所述主风刀21具有一内空腔212，用于作为干燥气体的缓存腔。所述内空腔212与所述出风口211连通，由气源（附图中未绘示）传输的干燥气体经过所述内空腔212后从所述出风口211喷出。
所述导流板22设置在所述主风刀21背离所述待干燥基板30运动方向的侧面，所述导流板22沿所述干燥气体的流向延伸。具体地说，请参阅图3及图4，所述待干燥基板30运动方向如箭头A所示，在所述主风刀21背离所述待干燥基板30运动方向的侧面设置有所述导流板22，所述导流板22朝向远离所述主风刀21的方向延伸，即所述导流板22沿所述干燥气体的流向延伸。进一步，所述导流板22的宽度W小于所述待干燥基板30的宽度，进而避免导流板22与边缘的双传送滚轮31干涉。所述导流板22的宽度指的所述导流板22垂直所述待干燥基板30运动方向的延伸方向上的尺寸。所述双传送滚轮31用于稳定所述待干燥基板30的行进，避免受风力打滑或抖动。
图5A是现有的风刀的工作原理示意图，图5B是本发明风刀的工作原理示意图。请参阅图5A所示，对于现有的上风刀11及下风刀12而言，出风口喷出的干燥气体受到所述待干燥基板10的阻挡，干燥气体的气流会分散（如图中箭头所示），使得干燥气体的风力作用时间短，不能良好保证一次性干燥效果，易偶发干燥不良，且待干燥基板100表面水渍突然受高压易飞溅，易造成风刀上水滴聚集滴落，造成二次污染，影响干燥效果。请参阅图5B所示，对于本发明风刀20而言，出风口喷出的干燥气体受到所述待干燥基板30的阻挡后，干燥气体的气流也会分散，但分散的气流会进一步受到导流板22的阻挡，延长干燥气体的水平行程（如图中箭头所示），从而延长干燥气体的风力作用时间，提高干燥效果，且所述导流板22能够对所述待干燥基板30表面的受高压而飞溅的水渍起到阻挡作用。
请继续参阅图2及图3，所述导流板22与所述待干燥基板30所在的平面具有一夹角α，所述夹角α小于90度。具体地说，若所述待干燥基板30所在的平面为水平面，则所述导流板22与所述水平面具有所述夹角α。在本实施例中，如图3所示，所述导流板22相对于所述待干燥基板30所在的平面倾斜设置，即所述夹角α为锐角。在本发明另一实施例中，如图6所示，所述导流板22与所述待干燥基板30所在的平面平行，即所述夹角α为0度。所述导流板22与所述待干燥基板30所在的平面平行的情况下，所述导流板22能够进一步延长干燥气体的水平行程，从而延长干燥气体的风力作用时间，提高干燥效果，且所述导流板22能够进一步对所述待干燥基板30表面的受高压而飞溅的水渍起到阻挡作用。其中，干燥气体流向请参考图6中箭头所示。
图7A是本发明风刀的另一实施例的示意图，图7B是本发明风刀的另一实施例的导流板的俯视结构示意图，图7C是本发明风刀的另一实施例的导流板的侧视结构示意图。请参阅图7A、图7B及图7C，在本实施例中，所述导流板22与所述待干燥基板30所在的平面平行。所述导流板22上设置有至少一个贯穿所述导流板22的过孔221。具体地说，所述过孔221在所述导流板22的厚度方向贯穿所述导流板22。当所述干燥气体喷向所述导流板22时，所述过孔221允许部分干燥气体通过，进而能够缓解干燥气体的压力，其中，干燥气体流向请参阅图7A中箭头所示。
在该实施例中，所述导流板22上设置有多个贯穿所述导流板22的所述过孔221，在沿所述导流板22的宽度方向（如图4中宽度W所示方向），多个所述过孔221依序排列形成一排。优选地，在该方向上多个所述过孔221的孔径相同。进一步，当所述导流板22上设置有多个所述过孔221时，在沿所述干燥气体的流向方向（即所述待干燥基板30的运动方向）多个所述过孔221的孔径逐渐增大。例如，在本实施例中，所述导流板22上设置有四排过孔，每一排都包括多个孔径相同的过孔221，所述四排过孔221的孔径沿所述干燥气体的流向方向逐渐增大。所述过孔221的孔径逐渐增大的优点在于，利于疏散气体压力，使得导流板22远离主风刀21处的气流压力最低，离主风刀21越近气压越强，对水层的处理效果逐渐变薄，避免了气压突变造成水渍飞溅。为了清楚说明本发明的技术方案，在附图中示意性地夸大了所述过孔221的孔径的大小，在实务中，所述过孔221的孔径可根据需求设定。当然，本发明也并不局限于四排过孔，过孔的数量可以根据产品实际结构而调整。
进一步，在所述过孔221的一端设置有一盖子222，所述盖子222可设置在所述过孔221朝向所述待干燥基板30的一端，也可以设置在所述过孔221背离所述待干燥基板30的一端。所述盖子222能够遮挡所述过孔221，进而可选择性地开启过孔221，以调节气压。例如，若需要增大气压，则关闭孔径大的过孔221或者开启孔径小的过孔221，若需要减小气压，则开启孔径大的过孔221，或者关闭孔径小的过孔221。在本实施例中，在附图中仅示意性地绘示两个盖子222，所述盖子222为磁性盖，其靠磁力吸附在所述导流板22上，以堵塞所述过孔221。
请参阅图7A、图7B及图7C，所述导流板22还包括一朝向所述主风刀21的侧壁的连接部223，所述导流板22通过所述连接部223与所述主风刀21的侧壁连接。具体地说，所述连接部223设置在所述导流板22的侧面，所述连接部223具有至少一个滑槽224，一锁紧旋钮24穿过所述滑槽224与所述主风刀21的侧壁连接。所述锁紧旋钮24可以为常规的结构，例如带有螺母的螺栓。具体地说，在本实施例中，所述锁紧旋钮24具有一锁定头241及一穿过所述滑槽224与所述主风刀21连接的螺杆（附图中未绘示），所述锁定头241起到固定的作用。其中，所述滑槽224的长度大于所述锁紧旋钮24的螺杆的直径，即当旋松所述锁紧旋钮24时，可移动所述连接部223，改变所述锁紧旋钮24相对于所述滑槽224的位置，进而改变所述导流板22与所述待干燥基板30之间的距离。在所述连接部223上设置有刻度（附图中未绘示），以观察所述导流板22与所述待干燥基板30之间的距离。
在本发明再一实施例中，所述风刀还包括至少一辅助气管23。图8是本发明风刀的再一实施例的示意图，请参阅图8，在图8中仅示意性地绘示一个辅助气管23，所述辅助气管23的一端连接至所述主风刀21的一分支开口213，所述辅助气管23的另一端连接至所述过孔221背离所述待干燥基板30的一侧。其中，所述分支开口213与所述内空腔212连通，所述主风刀21可经所述分支开口213向所述辅助气管23输送干燥气体，所述干燥气体经所述过孔221吹向所述待干燥基板30。所述辅助气管23的作用在于，在需要时，可通过所述过孔221向所述待干燥基板30喷射干燥气体，增加向下的气流压力，避免气流不稳造成所述待干燥基板30的抖动。
进一步，在本实施例中，所述辅助气管23包括一接头231、一管体232及一喷嘴233。所述接头231设置在所述管体232的一端，并与所述主风刀21的分支开口213连接，所述喷嘴233设置在所述管体232的另一端，并与所述过孔221连接。进一步，所述喷嘴233包括一磁性套筒2331及一锥形嘴2332，所述磁性套筒2331套设在所述锥形嘴2332上，且所述磁性套筒2331吸附在所述导流板21表面，以将所述喷嘴233固定，所述锥形嘴2332插入所述过孔221中。其中，所述喷嘴233通过磁性固定的方式与所述过孔221连接，便于所述辅助气管23的拆卸及在不同的过孔221之间的移动。
本发明还提供一种干燥装置。图9是本发明干燥装置的结构示意图。请参阅图9，所述干燥装置100包括一上风刀101及一下风刀102。所述上风刀101的出风口1011与所述下风刀102的出风口1021相对设置。具体地说，在本实施例中，所述上风刀101及所述下风刀102均倾斜设置，所述上风刀101的出风口1011与所述下风刀102的出风口1021相对设置，所述上风刀101的出风方向与所述待干燥基板30所在的平面呈一锐角，所述下风刀102的出风方向与所述待干燥基板30所在的平面呈一锐角，进一步提高干燥气体的利用率。所述上风刀101的出风口1011与所述下风刀102的出风口1021之间具有一间隙，所述间隙允许所述待干燥基板30穿过。其中，所述上风刀101的结构与上述的本发明风刀的结构相同，或者所述上风刀101的结构及所述下风刀102的结构均与上述的本发明风刀的结构相同，在本实施例中，所述上风刀101的结构与上述的本发明风刀的结构相同，所述上风刀101的具体结构不再一一赘述。
所述干燥装置还包括多个传送滚轮103，所述待干燥基板30放置在所述传送滚轮103上，所述传送滚轮103转动进而带动所述待干燥基板30沿A箭头所示方向前进。所述传送滚轮103为本领域常规结构，不再赘述。
以上所述仅是本发明的优选实施方式，应当指出，对于本技术领域的普通技术人员，在不脱离本发明原理的前提下，还可以做出若干改进和润饰，这些改进和润饰也应视为本发明的保护范围。
 工业实用性
本申请的主题可以在工业中制造和使用，具备工业实用性。

Claims (15)

  1. 一种风刀，其包括一主风刀，所述主风刀用于向一待干燥基板输送一干燥气体，在所述主风刀背离所述待干燥基板运动方向的一侧壁设置有一导流板，所述导流板沿所述干燥气体的流向延伸，且所述导流板与所述待干燥基板所在的平面具有一夹角，所述夹角小于90度，其中在所述导流板上设置有多个贯穿所述导流板的过孔，在沿所述导流板的宽度方向上，多个所述过孔依序排列形成一排，且在沿所述干燥气体的流向方向，所述过孔的孔径逐渐增大，在所述过孔的一端设置有一盖子，所述盖子能够遮挡所述过孔。
  2. 根据权利要求1所述的风刀，其中所述风刀还包括至少一辅助气管，所述辅助气管的一端连接至所述主风刀的一分支开口，所述辅助气管的另一端连接至所述过孔背离所述待干燥基板的一侧，所述主风刀经所述分支开口向所述辅助气管提供干燥气体，所述干燥气体经所述过孔吹向所述待干燥基板。
  3. 根据权利要求2所述的风刀，其中所述辅助气管包括一接头、一管体及一喷嘴，所述接头设置在所述管体的一端，并与所述主风刀连接，所述喷嘴设置在所述管体的另一端，并与所述过孔连接。
  4. 根据权利要求3所述的风刀，其中所述喷嘴包括一磁性套筒及一锥形嘴，所述磁性套筒套设在所述锥形嘴上，且所述磁性套筒吸附在所述导流板表面，以将所述喷嘴固定，所述锥形嘴插入所述过孔中。
  5. 根据权利要求1所述的风刀，其中所述导流板还包括一朝向所述主风刀的侧壁的连接部，所述连接部具有至少一个滑槽，一锁紧旋钮穿过所述滑槽与所述主风刀的所述侧壁连接，所述滑槽的长度大于所述锁紧旋钮的螺杆的直径。
  6. 一种风刀，其包括一主风刀，所述主风刀用于向一待干燥基板输送一干燥气体，在所述主风刀背离所述待干燥基板运动方向的一侧壁设置有一导流板，所述导流板沿所述干燥气体的流向延伸，且所述导流板与所述待干燥基板所在的平面具有一夹角，所述夹角小于90度。
  7. 根据权利要求6所述的风刀，其中所述导流板上设置有多个贯穿所述导流板的过孔，在沿所述导流板的宽度方向上，多个所述过孔依序排列形成一排。
  8. 根据权利要求6所述的风刀，其中所述导流板上设置有多个贯穿所述导流板的过孔，在沿所述干燥气体的流向方向，所述过孔的孔径逐渐增大。
  9. 根据权利要求6所述的风刀，其中在所述过孔的一端设置有一盖子，所述盖子能够遮挡所述过孔。
  10. 根据权利要求6所述的风刀，其中所述风刀还包括至少一辅助气管，所述辅助气管的一端连接至所述主风刀的一分支开口，所述辅助气管的另一端连接至所述过孔背离所述待干燥基板的一侧，所述主风刀经所述分支开口向所述辅助气管提供干燥气体，所述干燥气体经所述过孔吹向所述待干燥基板。
  11. 根据权利要求10所述的风刀，其中所述辅助气管包括一接头、一管体及一喷嘴，所述接头设置在所述管体的一端，并与所述主风刀连接，所述喷嘴设置在所述管体的另一端，并与所述过孔连接。
  12. 根据权利要求11所述的风刀，其中所述喷嘴包括一磁性套筒及一锥形嘴，所述磁性套筒套设在所述锥形嘴上，且所述磁性套筒吸附在所述导流板表面，以将所述喷嘴固定，所述锥形嘴插入所述过孔中。
  13. 根据权利要求6所述的风刀，其中所述导流板还包括一朝向所述主风刀的侧壁的连接部，所述连接部具有至少一个滑槽，一锁紧旋钮穿过所述滑槽与所述主风刀的所述侧壁连接，所述滑槽的长度大于所述锁紧旋钮的螺杆的直径。
  14. 一种干燥装置，包括一上风刀及一下风刀，所述上风刀的出风口与所述下风刀的出风口相对设置，所述上风刀的出风口与所述下风刀的出风口之间具有一间隙，所述间隙允许一待干燥基板穿过，其特征在于，所述上风刀的结构与如权利要求6所述的风刀的结构相同。
  15. 根据权利要求14所述的干燥装置，其特征在于，所述下风刀的结构与如权利要求6所述的风刀的结构相同，所述上风刀的出风方向与所述待干燥基板所在的平面呈一锐角，所述下风刀的出风方向与所述待干燥基板所在的平面呈一锐角。
PCT/CN2019/077835 2018-10-31 2019-03-12 风刀及采用该风刀的干燥装置 Ceased WO2020087833A1 (zh)

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