WO2020080071A1 - Dispositif d'éclairage - Google Patents

Dispositif d'éclairage Download PDF

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Publication number
WO2020080071A1
WO2020080071A1 PCT/JP2019/038288 JP2019038288W WO2020080071A1 WO 2020080071 A1 WO2020080071 A1 WO 2020080071A1 JP 2019038288 W JP2019038288 W JP 2019038288W WO 2020080071 A1 WO2020080071 A1 WO 2020080071A1
Authority
WO
WIPO (PCT)
Prior art keywords
light
work
unit
illumination
diffusion plate
Prior art date
Application number
PCT/JP2019/038288
Other languages
English (en)
Japanese (ja)
Inventor
誠 竹島
隆平 山口
祐輝 久保
越智　達也
Original Assignee
東レエンジニアリング株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東レエンジニアリング株式会社 filed Critical 東レエンジニアリング株式会社
Priority to CN201980067694.1A priority Critical patent/CN112912794A/zh
Publication of WO2020080071A1 publication Critical patent/WO2020080071A1/fr

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21S—NON-PORTABLE LIGHTING DEVICES; SYSTEMS THEREOF; VEHICLE LIGHTING DEVICES SPECIALLY ADAPTED FOR VEHICLE EXTERIORS
    • F21S2/00—Systems of lighting devices, not provided for in main groups F21S4/00 - F21S10/00 or F21S19/00, e.g. of modular construction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V14/00—Controlling the distribution of the light emitted by adjustment of elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V3/00—Globes; Bowls; Cover glasses
    • F21V3/04—Globes; Bowls; Cover glasses characterised by materials, surface treatments or coatings
    • F21V3/10—Globes; Bowls; Cover glasses characterised by materials, surface treatments or coatings characterised by coatings

Definitions

  • the present invention relates to an illumination device that emits illumination light used for observation, imaging, inspection, etc. of a light-transmitting work having a lens effect.
  • a lighting device that emits illumination light has been conventionally used to inspect the product for scratches or stains after it is completed or during manufacturing.
  • a housing containing a lamp serving as a light source As a form of irradiating the illumination light required for observation, imaging, etc. onto a substrate (called a work) targeted for observation, imaging, inspection, etc., a housing containing a lamp serving as a light source (so-called It is well known that light emitted from a lamp box is guided by a light guide member, which is a bundle of optical fibers called a light guide.
  • Patent Documents 1 and 2 which of the methods of Patent Documents 1 and 2 is used is appropriately selected and adopted depending on the surface state of the workpiece to be observed, working distance, observation magnification, scratches or stains to be found, and the like. It was
  • Patent Document 2 that is, mere diffused light
  • the present invention has been made in view of the above problems, and it is possible to irradiate illumination light having a sufficient light amount and uniformity for observation, imaging, inspection, etc. of a light-transmitting work having a lens effect.
  • An object is to provide a lighting device.
  • one aspect of the present invention is A lighting device for irradiating a light-transmitting work having a lens effect with illumination light, A light source, A light emitting portion that guides the light emitted from the light source to emit a light beam having a predetermined spread angle, A condenser lens unit that converts a light beam with a predetermined divergence angle into a parallel light beam, It is characterized in that it is provided with a diffusing plate that converts parallel light fluxes into illumination light whose traveling directions are random.
  • the light passing through the diffusion plate is diffused in the traveling direction at random, it is possible to reduce the bias of the observation light when observing a light-transmitting work having a lens effect. it can. Further, since the parallel luminous flux is guided until immediately before passing through the diffuser plate, it is possible to uniformly illuminate the entire visual field with a sufficient amount of light.
  • the three axes of the Cartesian coordinate system are X, Y, and Z
  • the horizontal direction is expressed as the X direction and the Y direction
  • the direction perpendicular to the XY plane that is, the gravity direction
  • the Z direction is expressed as the Z direction.
  • the direction against gravity is expressed as up and the direction in which gravity works is expressed as down.
  • the direction of rotation about the Z direction as the central axis is the ⁇ direction.
  • FIG. 1 is a schematic diagram showing an overall configuration of an example of a mode for embodying the present invention.
  • FIG. 1 shows a schematic view of a lighting device 1 according to the present invention and an inspection device K incorporating the same.
  • the inspection device K is for inspecting the front surface, the back surface, and the inside of a light-transmitting work having a lens effect (referred to simply as the work W) for scratches, foreign matters, dirt, bubbles, and the like.
  • the work W is made of thin plate silicon, glass, resin, or the like, and is formed into a predetermined pattern on the surface by film formation or etching, processed into a predetermined surface shape, or laminated with a functional material.
  • the inspection device K includes the illumination device 1, the imaging unit C, the work holding unit H, the relative moving unit M, the computer CN, and the like.
  • the lighting device 1 irradiates the work W with illumination light.
  • the lighting device 1 includes a light source 2, a light emitting unit 3, a condenser lens unit 4, a diffusion plate 5, a housing 10, and the like.
  • the light source 2 emits light necessary for observation, imaging, inspection and the like.
  • the light source 2 may be, for example, one that emits light in the visible light region, which is the sensitivity wavelength of the human eye or the imaging unit C, when a current or voltage is applied from the outside.
  • examples of the light source 2 include a xenon lamp, a metal halide lamp, a halogen lamp, a fluorescent lamp, an LED illumination, and a laser diode that emits light of a predetermined wavelength.
  • the light emitting section 3 guides the light emitted from the light source and emits the light flux L1 having a predetermined divergence angle.
  • the light emitting section 3 includes a light guide section 30 in which a large number of optical fibers are bundled, a reflection mirror 32, and the like.
  • the light guide section 30 allows light to enter the entrance end, the light guide section 30 repeats multiple reflection inside the fiber, and a light beam L1 having a predetermined divergence angle is emitted from the exit end 31.
  • the condenser lens unit 4 converts the light beam L1 having a predetermined spread angle into a parallel light beam L2.
  • the condenser lens unit 4 is composed of a plano-convex lens, an aspherical convex lens, a combination lens, and the like.
  • the reflection mirror 32 changes the direction of the parallel light flux L2. Specifically, the reflection mirror 32 is arranged in an oblique direction of 45 degrees, and is configured to convert the parallel light flux L2 emitted from the X direction into the parallel light flux L3 emitted in the Z direction. .
  • the diffuser plate 5 converts the parallel light flux L3 into illumination light 4 whose traveling direction is random. Further, the diffusion plate 5 is arranged with a predetermined distance d from the work W. More specifically, the diffuser plate 5 has a frosted glass-like concavo-convex treatment on the surface and / or the back surface of a transparent glass plate or white translucent plastic resin, and the traveling direction of incident light is diffused randomly. It has a characteristic (so-called diffusiveness) of being emitted as a result.
  • the light L5 with which the work W is irradiated includes light from various directions, and even if the work W includes a portion having a lens effect, there is no bias in strength and weakness (that is, uniformity). Observation light L is obtained.
  • the housing 10 fixes the light emitting unit 3, the condenser lens unit 4, and the diffusion plate 5 in a predetermined positional relationship.
  • the housing 10 is arranged below the work W. More specifically, the housing 10 is made up of a box whose upper surface and side surfaces are partially open.
  • the light emitting unit 3 is attached to the opening on the side surface of the housing 10
  • the diffusion plate 5 is attached to the opening on the upper surface of the housing 10.
  • the condenser lens unit 4 and the reflection mirror 32 are attached inside the housing 10.
  • the image pickup section C picks up an image of the work W. Specifically, the image pickup unit C picks up an image including the inspection area R set on the work W and outputs the image to an external device. More specifically, the image pickup section C includes an image pickup camera C1, a lens C2, and the like.
  • the image pickup camera C1 includes an image pickup element (so-called image sensor) C3 such as CCD or CMOS, and the image in the field of view F formed by the observation light L on the image pickup element via the lens C2 or the like is converted into a video signal. Or image data can be output to an external device.
  • image captured by the image capturing camera C1 is output to the computer CN.
  • the imaging unit C is arranged so as to look down on the work W from above, and the work W and the lens C2 face the diffusion plate 5 of the lighting device 1 with a predetermined working distance WD. It is located in a position.
  • the work holding unit H holds the work W in a predetermined posture.
  • the work holding unit H includes a work mounting table H1 and a suction mechanism (not shown).
  • the work placing table H1 holds the work W in a predetermined posture by contacting the lower surface and side surfaces of the outer peripheral portion of the work W and applying a frictional force or a suction force to the outer peripheral portion.
  • the workpiece mounting table H1 is provided with a suction groove or hole on the upper surface of a plate-shaped member arranged so that the upper surface is horizontal, and is connected to a suction mechanism via a switching valve or the like. Examples thereof include a structure (so-called negative pressure suction plate), an electrostatic suction plate, a grip chuck mechanism including an opening / closing mechanism.
  • the relative moving unit M relatively moves the image pickup unit C and the work holding unit H, and changes the location of the work W imaged by the image pickup unit C.
  • the relative movement unit M is configured to relatively move the illumination unit 2 and the image pickup unit C so as to face each other and the work placement table H1 holding the work W.
  • the relative moving unit M includes an X-axis stage, a Y-axis stage, and a ⁇ -axis stage (not shown).
  • the X-axis stage moves the work mounting table H1 in the X direction or stops it at a predetermined position, and is mounted on the device frame (not shown).
  • the Y-axis stage moves the work mounting table H1 in the Y-direction or stops it at a predetermined position, and is attached to the X-axis stage.
  • the ⁇ -axis stage rotates the work mounting table H1 or stops it at a predetermined angle, and is attached to the Y-axis stage.
  • the X-axis stage, the Y-axis stage, and the ⁇ -axis stage are connected to a control unit (not shown), and move / rotate at a predetermined speed or a predetermined speed based on a control signal output from the control unit. It stops at the position and angle of.
  • the computer unit CN controls turning on / off of the lighting device 1, adjusting the intensity of illumination light, controlling the image pickup unit C, the work holding unit H, the relative moving unit M, and the like. Specifically, when a signal or data is input from a connected external device, the computer unit CN performs processing according to a program registered in advance and outputs the processing result to the external device. More specifically, the computer unit CN includes hardware such as an input / output device, a storage device, an image processing device, an arithmetic processing device, and an execution program (software).
  • the computer unit CN performs predetermined image processing on the image. Etc. and is programmed to perform a predetermined inspection.
  • FIG. 2 is a cross-sectional view showing a main part of an example of a form embodying the present invention.
  • FIG. 2 shows the loci of the illumination light and the observation light L passing through the work W.
  • the observation light L is a light flux imaged by the imaging camera C1 of the imaging unit C, and includes a light flux Ld that has passed through the portion Sd of the work W having the lens effect and a light flux Lf that has passed through the portion Sf that does not have the lens effect. Is included.
  • the present invention In the case where the present invention is not applied, among the light fluxes emitted from the lower side of the work W to the vertically upper direction (that is, only parallel light rays), the light fluxes Lf that have passed through the portion Sf having no lens effect are Reach C.
  • the light flux that passes through the portion Sd having the lens effect becomes a light flux that passes through the focal point position Fp as shown by the broken line, and does not reach the image pickup unit C or is a biased light. Therefore, the image pickup unit C cannot obtain a uniform light amount distribution.
  • the illumination light L5 emitted from the lower side to the upper side of the work W is a luminous flux having a random traveling direction because of the above-described configuration. Therefore, the light flux indicated by the solid line passes through the portion Sd having the lens effect and the portion Sf having no lens effect, and reaches the imaging unit C. Then, when observing the work W, the deviation of the observation light L can be reduced. Further, since the illumination light guided from the light source is guided as parallel luminous fluxes L2 and L3 until just before passing through the diffusion plate 5, it is possible to uniformly illuminate the entire visual field F with a sufficient amount of light.
  • the present invention can be applied even if the lower surface or the upper and lower surfaces are shaped like convex lenses. Further, the upper surface and / or the lower surface may have a shape like a concave lens.
  • the illumination device 1 according to the present invention is incorporated in the inspection device K as an example.
  • Such a form is preferable because it is possible to perform the automatic inspection while reducing the bias of the observation light L.
  • the work W is held by the work holding table H and a person visually observes or inspects it (there is no imaging unit C).
  • the work W may be manually held by a person and visually observed or inspected (there is no imaging unit C, work holding base H, relative moving unit M, or the like).
  • the diffusion plate 5 is not limited to the form fixed to the housing 10, and may be a form attached so as to be vertically movable.
  • the housing 10 of the lighting device 1 is provided with the diffusion plate distance adjusting unit 7.
  • the diffusion plate distance adjusting unit 7 adjusts the distance d between the work W and the diffusion plate 5.
  • the diffuser plate distance adjusting unit 7 is configured to include an actuator having a movable unit that changes the position in the vertical direction. Then, the diffusing plate 5 is attached to the movable portion via a mounting member or the like.
  • the actuator changes its vertical position based on a control signal from the outside and makes it stand still at a predetermined position.
  • the actuator can be exemplified by a stage mechanism equipped with a ball screw and a stepping motor, a pneumatic cylinder, etc., and can be moved based on a control signal from the computer CN, a change in an electric signal by a switching SW, a potentiometer, or the like.
  • An example is a configuration in which the vertical position of the unit is controlled.
  • the distance d between the work W and the diffusing plate 5 can be changed while the light emitting unit 3 and the condenser lens unit 4 are fixed, so that the distance d suitable for the curvature of the work W is set. It is possible and preferable.
  • the light emitting unit 3 is illustrated as having the light guide unit 30 in which a large number of optical fibers are bundled. Such a configuration is preferable because it is easy to appropriately move the housing 10 and attach it to the inspection device K or the like.
  • the light emitting unit 3 is not limited to the configuration in which the light guide unit 30 is provided, and a portion where the light is emitted from the lamp box in which the light source 2 is housed (that is, the light emitting unit).
  • the condenser lens unit 4 may be attached to the (corresponding to the unit 3).

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)

Abstract

L'invention concerne un dispositif d'éclairage pouvant émettre de la lumière d'éclairage ayant une uniformité et une quantité suffisantes pour observer, imager, inspecter, etc. une pièce à travailler transmettant la lumière présentant un effet de lentille. Plus spécifiquement, ce dispositif d'éclairage destiné à émettre de la lumière d'éclairage sur une pièce à travailler transmettant la lumière ayant un effet de lentille est pourvu : d'une source de lumière ; d'une partie d'émission de lumière qui guide la lumière rayonnée à partir de la source de lumière et émet un flux de lumière ayant un angle d'étalement prescrit ; une partie lentille de condenseur qui convertit le flux lumineux ayant l'angle d'étalement prescrit en un flux lumineux parallèle ; et une plaque de diffusion qui permet au flux lumineux parallèle d'y passer à travers de façon à convertir le flux lumineux parallèle en lumière d'éclairage se propageant dans des directions aléatoires.
PCT/JP2019/038288 2018-10-16 2019-09-27 Dispositif d'éclairage WO2020080071A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201980067694.1A CN112912794A (zh) 2018-10-16 2019-09-27 照明装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018194915A JP7086813B2 (ja) 2018-10-16 2018-10-16 照明装置
JP2018-194915 2018-10-16

Publications (1)

Publication Number Publication Date
WO2020080071A1 true WO2020080071A1 (fr) 2020-04-23

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Application Number Title Priority Date Filing Date
PCT/JP2019/038288 WO2020080071A1 (fr) 2018-10-16 2019-09-27 Dispositif d'éclairage

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JP (1) JP7086813B2 (fr)
CN (1) CN112912794A (fr)
TW (1) TW202016587A (fr)
WO (1) WO2020080071A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI792044B (zh) * 2020-08-19 2023-02-11 楊永賢 用於補助光學檢測裝置之光源裝置及其組成之光學檢驗裝置
CN114347385B (zh) * 2021-12-22 2023-09-08 东莞晶彩光学有限公司 一种用于生产凸透镜的注塑模具

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120019626A1 (en) * 2010-07-23 2012-01-26 Zeta Instruments, Inc. 3D Microscope And Methods Of Measuring Patterned Substrates
WO2018062215A1 (fr) * 2016-09-30 2018-04-05 オリンパス株式会社 Dispositif d'observation

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1008003B (zh) * 1985-04-01 1990-05-16 欧文斯-伊利诺衣公司 透明物体中折光缺陷的检测系统
JPH0621002U (ja) * 1992-04-07 1994-03-18 林時計工業株式会社 平面照明装置
JP2002122555A (ja) * 2000-10-16 2002-04-26 Nippi:Kk 透明体検査用光源、透明体検査装置およびその検査方法
JP4059623B2 (ja) 2000-12-15 2008-03-12 株式会社リコー 照明装置、及び均一照明装置
JP5541198B2 (ja) 2011-03-01 2014-07-09 ウシオ電機株式会社 光照射装置
CN103175478B (zh) * 2013-03-08 2016-01-20 华中科技大学 一种基于红外成像的薄膜测厚仪

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120019626A1 (en) * 2010-07-23 2012-01-26 Zeta Instruments, Inc. 3D Microscope And Methods Of Measuring Patterned Substrates
WO2018062215A1 (fr) * 2016-09-30 2018-04-05 オリンパス株式会社 Dispositif d'observation

Also Published As

Publication number Publication date
JP7086813B2 (ja) 2022-06-20
CN112912794A (zh) 2021-06-04
JP2020064734A (ja) 2020-04-23
TW202016587A (zh) 2020-05-01

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