WO2019218837A1 - 触控面板及其制作方法、触控装置 - Google Patents

触控面板及其制作方法、触控装置 Download PDF

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Publication number
WO2019218837A1
WO2019218837A1 PCT/CN2019/083253 CN2019083253W WO2019218837A1 WO 2019218837 A1 WO2019218837 A1 WO 2019218837A1 CN 2019083253 W CN2019083253 W CN 2019083253W WO 2019218837 A1 WO2019218837 A1 WO 2019218837A1
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Prior art keywords
electrode
touch
touch electrode
insulating layer
layer
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PCT/CN2019/083253
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English (en)
French (fr)
Inventor
马伟杰
陈璀
袁亚东
陈闰
许占齐
Original Assignee
京东方科技集团股份有限公司
合肥鑫晟光电科技有限公司
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Priority to US16/639,637 priority Critical patent/US10928965B2/en
Publication of WO2019218837A1 publication Critical patent/WO2019218837A1/zh

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    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0445—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using two or more layers of sensing electrodes, e.g. using two layers of electrodes separated by a dielectric layer
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F1/00—Details not covered by groups G06F3/00 - G06F13/00 and G06F21/00
    • G06F1/26—Power supply means, e.g. regulation thereof
    • G06F1/32—Means for saving power
    • G06F1/3203—Power management, i.e. event-based initiation of a power-saving mode
    • G06F1/3234—Power saving characterised by the action undertaken
    • G06F1/325—Power saving in peripheral device
    • G06F1/3265—Power saving in display device
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0443—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a single layer of sensing electrodes
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0446—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a grid-like structure of electrodes in at least two directions, e.g. using row and column electrodes
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0448—Details of the electrode shape, e.g. for enhancing the detection of touches, for generating specific electric field shapes, for enhancing display quality
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04112—Electrode mesh in capacitive digitiser: electrode for touch sensing is formed of a mesh of very fine, normally metallic, interconnected lines that are almost invisible to see. This provides a quite large but transparent electrode surface, without need for ITO or similar transparent conductive material

Definitions

  • the present disclosure relates to the field of semiconductor technologies, and in particular, to a touch panel, a method for fabricating the same, and a touch device.
  • Some embodiments of the present disclosure provide a method for fabricating a touch panel, including: forming a first touch electrode in a grid shape on the base substrate; and first assisting the first touch electrode from being spaced apart from each other and insulated from each other An electrode, a first insulating layer is formed on the first touch electrode, the first insulating layer covers the first touch electrode and exposes at least a portion of the first auxiliary electrode; forming a cover a first metal layer of the insulating layer and the at least a portion of the first auxiliary electrode; patterning the at least a portion of the first auxiliary electrode and the first metal layer forming a grid-shaped second touch electrode .
  • the manufacturing method before the first touch electrodes in a grid shape and the first auxiliary electrodes spaced apart from each other and insulated from each other are formed on the base substrate, the manufacturing method further includes: A second metal layer is formed on the base substrate, wherein the first touch electrode and the first auxiliary electrode are formed synchronously by patterning the second metal layer.
  • the fabricating method before the forming the first metal layer, further includes: forming a second auxiliary electrode in an edge region of the base substrate, wherein the subsequently formed first metal layer covers at least the second auxiliary electrode Part of: patterning the at least a portion of the first metal layer and the second auxiliary electrode to form a touch lead.
  • the first touch electrode, the first auxiliary electrode, and the second auxiliary electrode are simultaneously formed by the same patterning process.
  • the second touch electrode and the touch lead are formed using the same patterning process.
  • the first insulating layer is in a grid shape, and an orthographic projection of the first touch electrode on the substrate substrate falls on the first insulating layer on the substrate substrate. Inside the orthographic projection.
  • the first touch electrode has a line width of 2 to 5 ⁇ m
  • the first insulating layer has a line width of 8 to 11 ⁇ m.
  • the manufacturing method further includes: forming a second insulating layer on the base substrate on which the second touch electrode is formed, the second insulating layer covering the second touch electrode.
  • the second insulating layer has a grid shape, and an orthographic projection of the second touch electrode on the substrate substrate falls on the second insulating layer on the substrate substrate. Inside the orthographic projection.
  • the second touch electrode has a line width of 2 to 5 ⁇ m
  • the second insulating layer has a line width of 8 to 11 ⁇ m.
  • a spacing between the first auxiliary electrode and the first touch electrode is between 3 ⁇ m and 5 ⁇ m.
  • the grid-shaped first touch electrode has a plurality of openings
  • the first auxiliary electrode includes a plurality of first sub-auxiliary electrodes
  • the plurality of first sub-auxiliary electrodes are located in the plurality of In the opening.
  • Some embodiments of the present disclosure provide a touch panel including: a substrate substrate; a grid-shaped first touch electrode on the substrate substrate; and a grid-shaped second touch electrode, the second touch electrode and The first touch electrodes are arranged to intersect each other; and the first insulating layer is disposed at least in the plurality of intersection regions of the first touch electrode and the second touch electrode, and is disposed on the first touch electrode and the second touch electrode.
  • the first portion of the second touch electrode between the at least one pair of adjacent two intersecting regions includes a stacked first electrode layer and a second electrode layer, the first electrode layer being located on the base substrate and the second electrode Between the layers, the first touch electrode and the first electrode layer are disposed in the same layer by the same material.
  • the touch panel further includes: a touch lead disposed at an edge region of the substrate, wherein the touch lead includes a stacked third electrode layer and a fourth electrode layer, and the third electrode The layer is located between the base substrate and the fourth electrode layer, and the first touch electrode and the third electrode layer are disposed in the same layer in the same material.
  • the first insulating layer is in a grid shape, and an orthographic projection of the first touch electrode on the substrate substrate falls on the first insulating layer on the substrate substrate. Inside the orthographic projection.
  • the first touch electrode has a line width of 2 to 5 ⁇ m
  • the first insulating layer has a line width of 8 to 11 ⁇ m.
  • the touch panel further includes: a second insulating layer over the second touch electrode, wherein the second insulating layer covers the second touch electrode.
  • the second insulating layer has a grid shape, and an orthographic projection of the second touch electrode on the substrate substrate falls on the second insulating layer on the substrate substrate. Inside the orthographic projection.
  • the second touch electrode has a line width of 2 to 5 ⁇ m
  • the second insulating layer has a line width of 8 to 11 ⁇ m.
  • Some embodiments of the present disclosure provide a touch device including the touch panel described in the foregoing embodiments.
  • FIG. 1 is a flowchart of a method for fabricating a touch panel according to some embodiments of the present disclosure
  • FIG. 2A is a schematic plan view of a touch panel after the step S101 is completed by using the manufacturing method of FIG. 1 according to some embodiments of the present disclosure
  • FIG. 2B is a schematic cross-sectional view of the touch panel of FIG. 2A taken along lines A-A and B-B;
  • 3A is a schematic plan view of a touch panel after the step S102 is completed by using the manufacturing method of FIG. 1 according to some embodiments of the present disclosure
  • FIG. 3B is a schematic cross-sectional view of the touch panel of FIG. 3A taken along lines A-A and B-B;
  • FIG. 4A is a schematic plan view of a touch panel after the step S103 is completed by using the manufacturing method of FIG. 1 according to some embodiments of the present disclosure
  • FIG. 4B is a schematic cross-sectional view of the touch panel of FIG. 4A taken along lines A-A and B-B;
  • 5A is a schematic plan view of a touch panel after the step S104 is completed by using the manufacturing method of FIG. 1 according to some embodiments of the present disclosure
  • FIG. 5B is a schematic cross-sectional view of the touch panel of FIG. 5A taken along lines A-A and B-B;
  • FIG. 6A is a schematic plan view of a touch panel after the step S105 is completed by using the manufacturing method of FIG. 1 according to some embodiments of the present disclosure
  • FIG. 6B is a schematic cross-sectional view of the touch panel of FIG. 6A taken along lines A-A and B-B;
  • 6C is a schematic cross-sectional view of the touch panel of FIG. 6A taken along line C-C.
  • touch panel using the metal mesh technology intersects the conventional touch panel using ITO as the touch electrode, which can greatly reduce the cost.
  • Applicants have discovered that in the related art, when the touch grid electrode is fabricated by using the metal grid technology, the touch electrode formed has a large impedance, and the touch panel formed has a large power consumption.
  • FIG. 1 is a flowchart of a method for fabricating a touch panel according to some embodiments of the present disclosure. Referring to FIG. 1 , some embodiments of the present disclosure provide a method for fabricating a touch panel, including the following steps:
  • Step S101 forming a grid-shaped first touch electrode on the base substrate and a first auxiliary electrode spaced apart from each other and insulated from the first touch electrode, the first auxiliary electrode including a plurality of grids a first sub-auxiliary electrode;
  • Step S102 forming a first insulating layer over the first touch electrode, the first insulating layer covering the first touch electrode and exposing at least a portion of the first auxiliary electrode;
  • Step S103 forming a first metal layer covering the at least a portion of the first insulating layer and the first auxiliary electrode;
  • Step S104 patterning the at least a portion of the first auxiliary electrode and the first metal layer to form a grid-shaped second touch electrode.
  • the first auxiliary electrode is retained while forming the grid-shaped first touch electrode, and the first metal for forming the second touch electrode is formed. a layer, and then patterning the first auxiliary electrode and the first metal layer into a grid-shaped second touch electrode, so that the formed second touch electrode is a double-layer metal laminated structure, thereby effectively reducing the second The impedance of the touch electrode, which in turn reduces the power consumption of the touch panel.
  • FIG. 2A is a schematic plan view of a touch panel after the step S101 is completed by using the manufacturing method of FIG. 1 according to some embodiments of the present disclosure
  • FIG. 2B is a cross-sectional view of the touch panel of FIG. 2A taken along lines A-A and B-B.
  • a first touch electrode 1 and a first auxiliary electrode 2 are formed on the base substrate 10.
  • the first touch electrode 11 has a grid shape and has a plurality of
  • the first auxiliary electrode 2 includes a plurality of first sub-auxiliary electrodes 21 located in the plurality of openings, that is, the first sub-assisted electrode 21 is located in the grid, and the first auxiliary electrode 2 and the first touch electrode are spaced apart from each other. And insulated from each other.
  • the shape of the first auxiliary electrode 21 may be similar to that of the first opening, but the occupied area is smaller than the first opening thereof, so that the first touch electrode 1 and the first need to be ensured.
  • the auxiliary electrodes 2 are spaced apart from each other. Specifically, the distance d1 between the first auxiliary electrode 2 and the first touch electrode 1 surrounding the first auxiliary electrode 2 is 3 ⁇ m to 5 ⁇ m, and the two are insulated from each other.
  • the first touch electrode can be used as a touch sensing electrode or as a touch driving electrode.
  • FIG. 3A is a schematic plan view of a touch panel after the step S102 is completed by using the manufacturing method of FIG. 1 according to some embodiments of the present disclosure
  • FIG. 3B is a cross-sectional view of the touch panel of FIG. 3A taken along lines A-A and B-B.
  • step S102 as shown in FIG. 3A and FIG. 3B, the first insulating layer 4 is formed on the base substrate 10 on which the first touch electrode 1 and the first auxiliary electrode 2 have been formed, and the first insulating layer 4 covers the first a touch electrode 1 and exposing at least a portion of the first auxiliary electrode 2, the pattern of the first insulating layer 4 is similar to the pattern of the first touch electrode 1, and is also a grid pattern, the first touch electrode An orthographic projection on the base substrate 10 falls within the orthographic projection of the first insulating layer 4 on the base substrate 10.
  • the first insulating layer 4 may be externally expanded by 3 ⁇ m to 6 ⁇ m on the basis of the line width of the first touch electrode 1 , for example, the first touch
  • the line width w1 of the control electrode 1 (that is, each of the traces constituting the grid-shaped first touch electrode 1) is generally 2 ⁇ m to 5 ⁇ m, and the line width w2 of the first insulating layer 4 can be made 8 ⁇ m to 11 ⁇ m.
  • the first insulating layer 4 may be formed by a patterning process, specifically, for example, depositing a first insulating material layer on the base substrate 10 on which the first touch electrode 1 and the first auxiliary electrode 2 have been formed, in the first insulating material
  • the layer is coated with a photoresist, the photoresist is exposed by a mask, the exposed photoresist is developed, the first insulating material layer is etched, and the remaining photoresist is stripped to obtain a first shape having a mesh shape. Insulation layer 4.
  • the first insulating layer 4 does not overlap with the first auxiliary electrode 2 , that is, the first insulating layer 4 covers only the first touch electrode 1 and completely exposes the first auxiliary electrode 2 . .
  • FIG. 4A is a schematic plan view of a touch panel after the step S103 is completed by using the manufacturing method of FIG. 1 according to some embodiments of the present disclosure
  • FIG. 4B is a cross-sectional view of the touch panel of FIG. 4A taken along lines A-A and B-B.
  • the first metal layer 5 is formed over the base substrate 10 on which the first insulating layer 4 is formed.
  • the first metal layer 5 covers the entire upper surface of the base substrate 10, at which time the first metal layer 5 is in contact with the first auxiliary electrode 2.
  • the first metal layer 5 is formed by magnetron sputtering.
  • FIG. 5A is a schematic plan view of the touch panel after the step S104 is completed by using the manufacturing method of FIG. 1 according to some embodiments of the present disclosure
  • FIG. 5B is a cross-sectional view of the touch panel of FIG. 5A taken along lines A-A and B-B.
  • step S104 referring to FIGS. 5A and 5B, the first auxiliary electrode 2 and the first metal layer 5 are patterned to form a grid-shaped second touch electrode 6.
  • the formed second touch electrode 6 and the formed first touch electrode 5 have a similar shape, which can achieve a visual blanking effect, and avoid defects such as white lines and black lines.
  • the second touch electrode 6 has a two-layer structure and can be used as a touch sensing electrode or as a touch driving electrode.
  • the method for manufacturing the touch panel further comprises: forming a first touch electrode pattern in a grid shape while retaining the first auxiliary electrode pattern in the grid, and forming the second touch electrode a first metal layer, and then patterning the first auxiliary electrode and the first metal layer surrounded by the grid-shaped first touch electrode into a grid-shaped second touch electrode, so that the formed second touch electrode can be formed
  • the double-layer metal laminated structure can effectively reduce the impedance of the second touch electrode and reduce the power consumption of the touch panel.
  • the method for manufacturing the touch panel further includes the following steps. S105. A second insulating layer is formed on the second touch electrode, and the second insulating layer covers the second touch electrode.
  • FIG. 6A is a schematic plan view of a touch panel after the step S105 is completed by using the manufacturing method of FIG. 1 according to some embodiments of the present disclosure
  • FIG. 6B is a cross-sectional view of the touch panel of FIG. 6A taken along lines AA and BB.
  • FIG. 6C is a schematic cross-sectional view of the touch panel of FIG. 6A taken along line CC.
  • a second insulating layer 7 is formed on the base substrate 10 on which the second touch electrode 6 is formed, and the second insulating layer 7 covers the second touch electrode 6 to avoid the second The touch electrode 6 is corroded by external water.
  • the second insulating layer 7 has a pattern similar to that of the second touch electrode 6 and is also in a grid shape, and the orthographic projection of the second touch electrode 6 on the substrate 10 falls. The second insulating layer 7 is within the orthographic projection on the base substrate 10.
  • the second insulating layer 7 can be externally expanded by 3 ⁇ m to 6 ⁇ m on the basis of the line width of the second touch electrode 6 , for example, the second touch electrode 6 .
  • the line width w3 i.e., each of the traces constituting the grid-shaped second touch electrode 6) is generally 2 ⁇ m to 5 ⁇ m, and the line width w4 of the second insulating layer 7 can be made 8 ⁇ m to 11 ⁇ m.
  • the second insulating layer 7 covers only the second touch electrode 6 , and the transmittance of the touch panel can be effectively improved compared to covering the entire surface of the base substrate.
  • the second insulating layer 7 can cover the entire upper surface of the base substrate 10 and also protect the second touch electrode 6. The disclosure does not limit this.
  • the grid-shaped first touch electrodes 1 and the first auxiliary electrodes 2 spaced apart from each other and insulated from each other by the first touch electrodes may be formed by the same patterning process.
  • a second metal layer is formed on the base substrate, and the second metal layer is patterned to simultaneously form the first touch electrode 1 and the first auxiliary electrode 2.
  • the second metal layer may cover the entire base substrate 10 by deposition or sputtering, and the patterning of the second metal layer may include a process of coating photoresist, exposure, development, etching, stripping, and the like.
  • the material of the second metal layer may be Al, AlNd or Au or the like.
  • the method of manufacturing the touch panel before the forming the first metal layer, further includes: forming a second auxiliary electrode in an edge region of the base substrate.
  • a grid-shaped first touch electrode 1 is formed on the base substrate 10
  • the block-shaped first auxiliary electrode 2 is located in each of the grids: on the substrate substrate
  • the second auxiliary electrode 3 is formed in an edge region of the base substrate 10, for example, a peripheral region shown in FIG. 2A
  • the second auxiliary electrode 3 is, for example, a ring shape
  • the first touch electrode 1 and the first auxiliary electrode 2 are formed on the substrate.
  • the intermediate portion of the substrate 10 is surrounded by the edge regions.
  • the second auxiliary electrode 3 and the first touch electrode 1 and the first auxiliary electrode 2 are simultaneously formed by patterning the second metal layer.
  • the subsequently formed first metal layer 5 covers at least a portion of the second auxiliary electrode 3, as shown in FIGS. 4A and 4B, the subsequently formed first metal layer 5 covers the entire upper surface of the substrate substrate 10, The second auxiliary electrode 3 is completely covered.
  • the method of fabricating the touch panel further includes: patterning the at least a portion of the first metal layer and the second auxiliary electrode to form a touch lead.
  • the first auxiliary electrode 2 and the first metal layer 5 are patterned to form a grid-shaped second touch electrode 6 while the second auxiliary electrode 3 and the first metal layer 5 are patterned.
  • the touch lead 8 is formed, and the second touch electrode 6 and the touch lead 8 are synchronously formed by the same patterning process.
  • the second touch electrode 6 and the touch lead 8 are both double-layered structures, and are each formed by stacking the material of the second metal layer and the material of the first metal layer.
  • the material of the first metal layer 5 may be Al, AlNd or Au, and the material of the first metal layer 5 may be the same as or different from the material of the second metal layer.
  • the second auxiliary electrode 3 located at the edge region of the base substrate 10 is further formed, and the second auxiliary electrode 3 is formed.
  • the first metal layer 5 formed thereon is used to form the touch lead 8 , and the touch lead 8 is connected to the external circuit for transmitting the touch signal, including the touch driving electrode lead and the touch sensing electrode lead.
  • the pattern of the grid-shaped first touch electrodes, the block-shaped first auxiliary electrodes located in the grid, and the second auxiliary electrodes located in the edge regions may be synchronously formed by one patterning process, Specifically, the second metal layer is first formed on the base substrate 10, and then the second metal layer is patterned into a grid-shaped first touch by a process of applying photoresist, exposure, development, etching, and peeling.
  • the electrode includes a first auxiliary electrode of the bulk first sub-auxiliary electrode located within each of the grids, and a second auxiliary electrode located at the edge region.
  • the second touch electrode and the touch lead can also be formed by the same patterning process.
  • the first auxiliary electrode, the second auxiliary electrode, and the subsequently formed first metal layer are patterned by using a mask.
  • the manufacturing process is relatively simple.
  • the method for fabricating the touch panel provided by the embodiments of the present disclosure can increase the thickness of the second touch electrode and the touch lead under similar processing conditions, and reduce the second touch electrode and the touch. Controlling the impedance of the lead reduces the power consumption of the touch panel without increasing the manufacturing cost of the touch panel.
  • the present disclosure further provides a touch panel that can be fabricated by using the manufacturing method provided by the foregoing embodiments of the present disclosure.
  • the touch panel includes a base substrate 10 and is disposed on the base substrate 10 .
  • the first touch electrode 1 and the second touch electrode 6 have a mesh shape, and the second touch electrode 6 also has a grid shape.
  • the grid-shaped second touch electrodes 6 and the grid-shaped first touch electrodes 1 are arranged to cross each other.
  • the touch panel further includes a first insulating layer 4 disposed at least in a plurality of intersection regions of the first touch electrode 1 and the second touch electrode 6 to prevent the first touch electrode 1 and the second touch electrode 6 from being electrically connected.
  • the first insulating layer 4 covers the first touch electrode 1 , for example, the first insulating layer 4 has a grid shape, similar to the pattern of the first touch electrode 1 .
  • An orthographic projection of a touch electrode 1 on the substrate 10 falls within an orthographic projection of the first insulating layer 4 on the substrate 10.
  • the first insulating layer 4 may be externally expanded by 3 ⁇ m to 6 ⁇ m on the basis of the line width of the first touch electrode 1 , for example, the first touch
  • the line width w1 of the control electrode 1 (that is, each of the traces constituting the grid-shaped first touch electrode 1) is generally 2 ⁇ m to 5 ⁇ m, and the line width w2 of the first insulating layer 4 can be made 8 ⁇ m to 11 ⁇ m.
  • the first portion 61 between the adjacent two intersecting regions M of the second touch electrode 6 includes a stacked first electrode layer 611 and a second electrode layer 612, An electrode layer 611 is disposed between the base substrate and the second electrode layer 612, and the first touch electrode 1 and the first electrode layer 611 are disposed in the same layer in the same material.
  • the thickness of the second portion 62 of the second touch electrode 6 located in the plurality of intersection regions M is smaller than the thickness of the first portion 61 of the second touch electrode 6 between the adjacent two intersection regions M.
  • the first touch electrode 1 has a single layer structure and can be formed by patterning a second metal layer.
  • the second portion 62 of the second touch electrode 6 located in the plurality of intersection regions M has a single layer structure and can be patterned by the first metal layer 5.
  • the first portion 61 of the second touch electrode 6 located between the adjacent two intersecting regions M has a two-layer structure, and is formed by patterning the stacked second metal layer and the first metal layer 5.
  • the material of the first metal layer may be Al, AlNd or Au
  • the material of the second metal layer may be Al, AlNd or Au.
  • the material of the first metal layer 5 may be the same as or different from the material of the second metal layer. .
  • the touch panel further includes a touch lead 8 , which may also be formed by stacking the second metal layer and the first metal layer 5 , as shown in FIG. 6B , the touch lead 8 includes a stack
  • the third electrode layer 81 and the fourth electrode layer 82 are disposed between the base substrate 10 and the fourth electrode layer 82, and the first touch electrode 1 and the third electrode layer 81 are The same material is set in the same layer.
  • the thickness of the second touch electrode and/or the touch lead of the touch panel is increased, the impedance of the second touch electrode and the touch lead is reduced, and the work of the touch panel is reduced. Consumption.
  • the touch panel further includes a second insulating layer 7 covering the second touch electrode 6 to prevent the second touch electrode 6 from being corroded by external water.
  • the second insulating layer 7 has a pattern similar to that of the second touch electrode 6 , which is also a grid shape, and the second touch electrode 6 is on the base substrate 10 .
  • the upper orthographic projection falls within the orthographic projection of the second insulating layer 7 on the base substrate 10.
  • the second insulating layer 7 can be externally expanded by 3 ⁇ m to 6 ⁇ m on the basis of the line width of the second touch electrode 6 , for example, the second touch electrode 6 .
  • the line width w3 (that is, each of the traces constituting the grid-shaped second touch electrodes 6) is generally 2 ⁇ m to 5 ⁇ m, and the line width w4 of the second insulating layer 7 can be made 8 ⁇ m to 11 ⁇ m.
  • the second insulating layer 7 covers only the second touch electrode 6 , and the transmittance of the touch panel can be effectively improved compared to the touch panel covered on the entire surface of the base substrate. .
  • the embodiment of the present disclosure further provides a touch device including the touch panel provided by the foregoing embodiments of the present disclosure.
  • the touch control device is, for example, a touch display device, and the touch display device can be any product with a touch display function, such as a display panel, an electronic paper, a mobile phone, a tablet computer, a television, a notebook computer, a digital photo frame, a navigator, and the like. Or parts.

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  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Human Computer Interaction (AREA)
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Abstract

一种触控面板及其制作方法、触控装置，所述触控面板的制作方法包括：在衬底基板上形成网格状的第一触控电极以及与所述第一触控电极相互间隔且相互绝缘的第一辅助电极（S101），在所述第一触控电极之上形成第一绝缘层，所述第一绝缘层覆盖所述第一触控电极并暴露所述第一辅助电极的至少一部分（S102）；形成覆盖所述第一绝缘层和所述第一辅助电极的所述至少一部分的第一金属层（S103）；图案化所述第一辅助电极的所述至少一部分以及所述第一金属层形成网格状的第二触控电极（S104）。

Description

[根据细则37.2由ISA制定的发明名称]　触控面板及其制作方法、触控装置
相关申请的交叉引用
本公开要求于2018年5月16日向中国国家知识产权局提出、申请号为201810468639.0的中国专利申请的权益，该中国专利申请的全部内容通过引用的方式并入本文中。
技术领域
本公开涉及半导体技术领域，尤其涉及一种触控面板及其制作方法、触控装置。
背景技术
受低价智能手机和平板电脑的市场冲击，触控面板产业的价格战日益加剧。经过激烈的市场竞争，处于弱势的中小型触控面板厂商一度面临淘汰出局的压力。面对压力，触控面板厂商需要寻求新的替代材料来降低成本压力
但现有技术中使用金属网格状的触控电极时，存在走线阻抗较大，使触控面板功耗较大的问题。
公开内容
本公开一些实施例提供一种触控面板的制作方法，包括：在衬底基板上形成网格状的第一触控电极以及与所述第一触控电极相互间隔且相互绝缘的第一辅助电极，在所述第一触控电极之上形成第一绝缘层，所述第一绝缘层覆盖所述第一触控电极并暴露所述第一辅助电极的至少一部分；形成覆盖所述第一绝缘层和所述第一辅助电极的所述至少一部分的第一金属层；图案化所述第一辅助电极的所述至少一部分以及所述第一金属层形成网格状的第二触控电极。
在一些实施例中，在衬底基板上形成网格状的第一触控电极以及与所述第一触控电极相互间隔且相互绝缘的第一辅助电极之前，所述制作方法还包括：在衬底基板上形成第二金属层，其中，所述第一触控电极和所述第一辅助电极通过图案化所述第二金属层同步形成。
在一些实施例中，在形成第一金属层之前，所述制作方法还包括：在衬底基板的边缘区域形成第二辅助电极，后续形成的第一金属层覆盖所述 第二辅助电极的至少一部分；图案化所述第一金属层和第二辅助电极的所述至少一部分形成触控引线。
在一些实施例中，所述第一触控电极、第一辅助电极以及第二辅助电极利用同一图案化工艺同步形成。
在一些实施例中，所述第二触控电极和所述触控引线利用同一图案化工艺形成。
在一些实施例中，所述第一绝缘层呈网格状，所述第一触控电极在所述衬底基板上的正投影落入所述第一绝缘层在所述衬底基板上的正投影内。
在一些实施例中，所述第一触控电极的线宽为2至5μm，所述第一绝缘层的线宽为8至11μm。
在一些实施例中，所述制作方法还包括：在形成有所述第二触控电极的衬底基板上形成第二绝缘层，所述第二绝缘层覆盖所述第二触控电极。
在一些实施例中，所述第二绝缘层呈网格状，所述第二触控电极在所述衬底基板上的正投影落入所述第二绝缘层在所述衬底基板上的正投影内。
在一些实施例中，所述第二触控电极的线宽为2至5μm，所述第二绝缘层的线宽为8至11μm。
在一些实施例中，所述第一辅助电极与所述第一触控电极之间间隔的间距为3μm至5μm。
在一些实施例中，所述网格状的第一触控电极具有多个开口，所述第一辅助电极包括多个的第一子辅助电极，多个第一子辅助电极位于所述多个开口中。
本公开一些实施例提供一种触控面板，包括：衬底基板；位于衬底基板上的网格状的第一触控电极和网格状的第二触控电极，第二触控电极与第一触控电极相互交叉排列；以及第一绝缘层，至少设置在第一触控电极和第二触控电极的多个交叉区域，并设置在第一触控电极和第二触控电极之间；其中，第二触控电极的位于至少一对相邻两交叉区域之间的第一部分包括叠置的第一电极层和第二电极层，第一电极层位于衬底基板和第二电极层之间，所述第一触控电极和所述第一电极层采用相同材料同层设置。
在一些实施例中，所述触控面板还包括：触控引线，位于所述基板的边缘区域，其中，所述触控引线包括叠置的第三电极层和第四电极层，第三电极层位于衬底基板和第四电极层之间，所述第一触控电极和所述第三电极层采用相同材料同层设置。
在一些实施例中，所述第一绝缘层呈网格状，所述第一触控电极在所述衬底基板上的正投影落入所述第一绝缘层在所述衬底基板上的正投影内。
在一些实施例中，所述第一触控电极的线宽为2至5μm，所述第一绝缘层的线宽为8至11μm。
在一些实施例中，所述触控面板还包括：位于所述第二触控电极之上的第二绝缘层，其中，所述第二绝缘层覆盖所述第二触控电极。
在一些实施例中，所述第二绝缘层呈网格状，所述第二触控电极在所述衬底基板上的正投影落入所述第二绝缘层在所述衬底基板上的正投影内。
在一些实施例中，所述第二触控电极的线宽为2至5μm，所述第二绝缘层的线宽为8至11μm。
本公开一些实施例提供一种触控装置，包括前些实施例所述的触控面板。
附图说明
图1为本公开一些实施例提供的一种触控面板的制作方法的流程图；
图2A为本公开一些实施例提供的在利用图1中的制造方法制造完成步骤S101后的触控面板的平面示意图；
图2B为图2A中的触控面板沿线A-A和B-B截取的截面示意图；
图3A为本公开一些实施例提供的在利用图1中的制造方法制造完成步骤S102后的触控面板的平面示意图；
图3B为图3A中的触控面板沿线A-A和B-B截取的截面示意图；
图4A为本公开一些实施例提供的在利用图1中的制造方法制造完成步骤S103后的触控面板的平面示意图；
图4B为图4A中的触控面板沿线A-A和B-B截取的截面示意图；
图5A为本公开一些实施例提供的在利用图1中的制造方法制造完成 步骤S104后的触控面板的平面示意图；
图5B为图5A中的触控面板沿线A-A和B-B截取的截面示意图；
图6A为本公开一些实施例提供的在利用图1中的制造方法制造完成步骤S105后的触控面板的平面示意图；
图6B为图6A中的触控面板沿线A-A和B-B截取的截面示意图；
图6C为图6A中的触控面板沿线C-C截取的截面示意图。
具体实施方式
为了使得本公开实施例的目的、技术方案和优点更加清楚，下面将结合本公开实施例的附图，对本公开实施例的技术方案进行清楚、完整地描述。显然，所描述的实施例是本公开的一部分实施例，而不是全部的实施例。基于所描述的本公开的实施例，本领域普通技术人员在无需创造性劳动的前提下所获得的所有其他实施例，都属于本公开保护的范围。
除非另外定义，本公开使用的技术术语或者科学术语应当为本公开所属领域内具有一般技能的人士所理解的通常意义。本公开中使用的“第一”、“第二”以及类似的词语并不表示任何顺序、数量或者重要性，而只是用来区分不同的组成部分。“包括”或者“包含”等类似的词语意指出现该词前面的元件或者物件涵盖出现在该词后面列举的元件或者物件及其等同，而不排除其他元件或者物件。“连接”或者“相连”等类似的词语并非限定于物理的或者机械的连接，而是可以包括电性的连接，不管是直接的还是间接的。“上”、“下”、“左”、“右”等仅用于表示相对位置关系，当被描述对象的绝对位置改变后，则该相对位置关系也可能相应地改变。
为了保持本公开实施例的以下说明清楚且简明，本公开省略了已知功能和已知部件的详细说明。
随着触控技术的发展，金属网格(Metal mesh)技术逐渐受到业界的关注。采用金属网格(Metal mesh)技术的触控面板相交传统的采用ITO作为触控电极的触控面板可以大幅降低成本。申请人发现相关技术中，使用金属网格技术制造触控电极时，形成的触控电极存在较大阻抗，进而形成的触控面板功耗较大。
图1为本公开一些实施例提供的一种触控面板的制作方法的流程图，参见图1，本公开一些实施例提供一种触控面板的制作方法，包括以下步骤：
步骤S101：在衬底基板上形成网格状的第一触控电极以及与所述第一触控电极相互间隔且相互绝缘的第一辅助电极，所述第一辅助电极包括多个位于网格内的第一子辅助电极；
步骤S102：在所述第一触控电极之上形成第一绝缘层，所述第一绝缘层覆盖所述第一触控电极并暴露所述第一辅助电极的至少一部分；
步骤S103：形成覆盖所述第一绝缘层和所述第一辅助电极的所述至少一部分的第一金属层；
步骤S104：图案化所述第一辅助电极的所述至少一部分以及所述第一金属层形成网格状的第二触控电极。
在该些实施例提供的触控面板的制作方法中，在形成网格状的第一触控电极的同时，也保留第一辅助电极，再形成用于制作第二触控电极的第一金属层，之后将第一辅助电极与第一金属层图案化为网格状的第二触控电极，可以使形成的第二触控电极为双层的金属叠层结构，进而可以有效降低第二触控电极的阻抗，进而降低触控面板的功耗。
图2A为本公开一些实施例提供的在利用图1中的制造方法制造完成步骤S101后的触控面板的平面示意图，图2B为图2A中的触控面板沿线A-A和B-B截取的截面示意图。
在步骤S101中、如图2A和图2B所示，在衬底基板10之上形成第一触控电极1，和第一辅助电极2，第一触控电极11呈网格状，具有多个开口，第一辅助电极2包括多个位于多个开口内的第一子辅助电极21，即第一子辅助电极21位于网格内，第一辅助电极2与第一触控电极之间相互间隔且相互绝缘。具体地，对于每一第一子辅助电极21，其具体可以与其所在第一开口的形状相似，但所占面积较其所在第一开口较小，以需要保证第一触控电极1与第一辅助电极2之间相互间隔，具体的，第一辅助电极2与包围该第一辅助电极2的第一触控电极1之间间隔的间距d1为3μm至5μm，并且两者相互绝缘。第一触控电极可以作为触控感应电极，也可以作为触控驱动电极。
图3A为本公开一些实施例提供的在利用图1中的制造方法制造完成步骤S102后的触控面板的平面示意图，图3B为图3A中的触控面板沿线A-A和B-B截取的截面示意图。
在步骤S102中、如图3A和图3B所示，第一绝缘层4形成在已经形成有第一触控电极1和第一辅助电极2的衬底基板10上，第一绝缘层4覆盖第一触控电极1，并暴露所述第一辅助电极2的至少一部分，第一绝缘层4的图案与第一触控电极1的图案相似，也为网格状的图案，第一触控电极1在衬底基板10上的正投影落入第一绝缘层4在所述衬底基板10上的正投影内。具体地，为了使第一绝缘层4完全覆盖第一触控电极1，可以使第一绝缘层4在第一触控电极1线宽的基础上，外扩3μm至6μm，例如，第一触控电极1的线宽w1(即，构成网格状第一触控电极1的每一条走线)一般为2μm至5μm，可以使第一绝缘层4的线宽w2为8μm至11μm。
第一绝缘层4可以通过图案化工艺形成，具体地，例如在已经形成有第一触控电极1和第一辅助电极2的衬底基板10上沉积第一绝缘材料层、在第一绝缘材料层涂覆光刻胶、利用掩膜板对光刻胶进行曝光、对曝光后的光刻胶显影，刻蚀第一绝缘材料层，并剥离剩余光刻胶来获得具有网格形状的第一绝缘层4。
在一些实施例中，如图3A和3B所示，第一绝缘层4与第一辅助电极2不重叠，即第一绝缘层4仅覆盖第一触控电极1，完全暴露第一辅助电极2。
图4A为本公开一些实施例提供的在利用图1中的制造方法制造完成步骤S103后的触控面板的平面示意图，图4B为图4A中的触控面板沿线A-A和B-B截取的截面示意图。
在步骤S103中、如图4A和图4B所示，在形成由第一绝缘层4的衬底基板10之上形成第一金属层5。例如，第一金属层5覆盖衬底基板10的整个上表面，此时第一金属层5与所述第一辅助电极2接触。在一些实施例中，第一金属层5通过磁控溅射形成。
图5A为本公开一些实施例提供的在利用图1中的制造方法制造完成步骤S104后的触控面板的平面示意图，图5B为图5A中的触控面板沿线A-A和B-B截取的截面示意图。
在步骤S104中、参见图5A和5B，将第一辅助电极2以及第一金属层5图案化形成网格状的第二触控电极6。此时，形成的第二触控电极6与形成的第一触控电极5为类似的形状，可以起到视觉消影效果，避免出现白线、黑线等不良。第二触控电极6为双层结构，可以作为触控感应电极，也可以作为触控驱动电极。
该些实施例提供的触控面板的制作方法，在形成网格状的第一触控电极图案的同时，也保留网格内的第一辅助电极图案，再形成用于制作第二触控电极的第一金属层，之后将网格状的第一触控电极包围的第一辅助电极与第一金属层图案化为网格状的第二触控电极，可以使形成的第二触控电极为双层的金属叠层结构，进而可以有效降低第二触控电极的阻抗，降低触控面板的功耗。
在一些实施例中，参见图1所示，在将第一辅助电极2以及第一金属层5图案化为网格状的第二触控电极6之后，触控面板的制作方法还包括：步骤S105、在第二触控电极之上形成第二绝缘层，所述第二绝缘层覆盖所述第二触控电极。
图6A为本公开一些实施例提供的在利用图1中的制造方法制造完成步骤S105后的触控面板的平面示意图，图6B为图6A中的触控面板沿线A-A和B-B截取的截面示意图，图6C为图6A中的触控面板沿线C-C截取的截面示意图。
在步骤105中，参见图6A-6C，在形成有第二触控电极6的衬底基板10上形成第二绝缘层7，该第二绝缘层7覆盖第二触控电极6，避免第二触控电极6被外界水氧腐蚀。在一些实施例中，第二绝缘层7具有与第二触控电极6的图案相似的图案，也为网格状，第二触控电极6在所述衬底基板10上的正投影落入第二绝缘层7在所述衬底基板10上的正投影内。为了使第二绝缘层7完全覆盖第二触控电极6，可以使第二绝缘层7在第二触控电极6线宽的基础上，外扩3μm至6μm，例如，第二触控电极6的线宽w3(即，构成网格状第二触控电极6的每一条走线)一般为2μm 至5μm，可以使第二绝缘层7的线宽w4为8μm至11μm。该些实施例中，第二绝缘层7仅覆盖第二触控电极6，相比于在衬底基板整面覆盖，可有效提高触控面板的透过率。
在一些实施例中，第二绝缘层7可以覆盖衬底基板10的整个上表面，亦能起到保护第二触控电极6的效果，本公开对此不做限制。
在一些实施例中，在S101中，网格状的第一触控电极1以及与所述第一触控电极相互间隔且相互绝缘的第一辅助电极2可以采用同一图案化工艺形成。例如，在衬底基板上形成第二金属层，对第二金属层进行图案化来同步形成第一触控电极1以及第一辅助电极2。第二金属层可以采用沉积或溅射的方方式覆盖整个衬底基板10，对第二金属层的图案化可以包括涂覆光刻胶，曝光、显影、刻蚀、剥离等工艺。第二金属层的材料可以为Al、AlNd或Au等。
在一些实施例中，在形成第一金属层之前，触控面板的制作方法还包括：在衬底基板的边缘区域形成第二辅助电极。参见图2A和图2B，在衬底基板10之上形成网格状的第一触控电极1，以及位于各网格内的块状第一辅助电极2的同时：在衬底基板之上第二辅助电极3。第二辅助电极3形成在衬底基板10的边缘区域，例如为图2A所示的周边区域，第二辅助电极3例如为环形，第一触控电极1和第一辅助电极2形成在衬底基板10的由边缘区域包围的中间区域内。在一些实施例中，第二辅助电极3与第一触控电极1和第一辅助电极2通过对第二金属层进行图案化来同步形成。
在一些实施例中，后续形成的第一金属层5覆盖第二辅助电极3的至少一部分，如图4A和4B所示，后续形成的第一金属层5覆盖整个衬底基板10的上表面，完全覆盖第二辅助电极3。
在一些实施例中，触控面板的制作方法还包括：图案化所述第一金属层和第二辅助电极的所述至少一部分形成触控引线。参见图5A和图5B，将第一辅助电极2以及第一金属层5进行图案化形成网格状的第二触控电极6的同时将第二辅助电极3和第一金属层5进行图案化形成触控引线8，第二触控电极6和触控引线8利用同一图案化工艺同步形成。此时，第二触控电极6与触控引线8均为双层结构，均由第二金属层的材料和第一金 属层的材料叠置而成。第一金属层5的材料可以为Al、AlNd或Au等，第一金属层5的材料与第二金属层的材料可以相同，也可以不同。
该些实施例中，在衬底基板10上形成第一触控电极1图案和第一辅助电极2的同时，还形成位于衬底基板10边缘区域的第二辅助电极3，第二辅助电极3和其上后续形成的第一金属层5用于制作触控引线8，触控引线8与外电路连接传输触控信号，包括触控驱动电极引线和触控感应电极引线。通过保留边缘区域的环状第二辅助电极3，进而可以使触控面板的触控引线也为双层金属叠层结构，可以降低触控引线的阻抗，进一步降低触控面板的功耗。
本公开的一些实施例中，网格状的第一触控电极的图案、位于网格内的块状第一辅助电极、以及位于边缘区域的第二辅助电极可以通过一次图案化工艺同步形成，具体地，先在衬底基板10形成第二金属层，再通过涂覆光刻胶、曝光、显影、刻蚀、剥离等工艺，将第二金属层图案化为网格状的第一触控电极，包括位于各网格内的块状第一子辅助电极的第一辅助电极，以及位于边缘区域的第二辅助电极。第二触控电极与触控引线亦可以通过同一次图案化工艺形成，具体地，对第一辅助电极、第二辅助电极及其上后续形成的第一金属层采用一掩膜板进行图案化来形成第二触控电极与触控引线，制作工艺较为简单。同时，相对于相关技术，本公开实施例提供的触控面板的制作方法，可以在类似的工艺条件下，实现第二触控电极和触控引线的厚度增加，降低第二触控电极和触控引线的阻抗，不增加触控面板的制作成本的情形下降低了触控面板的功耗。
基于同一发明构思，本公开还提供一种触控面板，其可以利用本公开前述实施例提供的制作方法制作，参见图2A-6C，触控面板包括衬底基板10以及位于衬底基板10上的第一触控电极1、第二触控电极6：第一触控电极1呈网状，第二触控电极6亦呈网格状。网格状的第二触控电极6与网格状的第一触控电极1相互交叉排列。
触控面板还包括第一绝缘层4，至少设置在第一触控电极1和第二触控电极6的多个交叉区域，避免第一触控电极1和第二触控电极6电连接。在一些实施例中，如图4A和4B所示，第一绝缘层4覆盖第一触控电极1，例如第一绝缘层4呈网格状，与第一触控电极1的图案相似，第一触控电 极1在衬底基板10上的正投影落入第一绝缘层4在所述衬底基板10上的正投影内。具体地，为了使第一绝缘层4完全覆盖第一触控电极1，可以使第一绝缘层4在第一触控电极1线宽的基础上，外扩3μm至6μm，例如，第一触控电极1的线宽w1(即，构成网格状第一触控电极1的每一条走线)一般为2μm至5μm，可以使第一绝缘层4的线宽w2为8μm至11μm。
在一些实施例中，如图6A-6C所示，第二触控电极6的相邻两交叉区域M之间的第一部分61包括叠置的第一电极层611和第二电极层612，第一电极层611位于衬底基板和第二电极层612之间，所述第一触控电极1和所述第一电极层611采用相同材料同层设置。第二触控电极6的位于所述多个交叉区域M的第二部分62的厚度小于第二触控电极6的位于相邻两交叉区域M之间的第一部分61的厚度。具体地，第一触控电极1为单层结构，可以由第二金属层构图形成。第二触控电极6的位于所述多个交叉区域M的第二部分62为单层结构，可以由第一金属层5构图形成。第二触控电极6的位于相邻两交叉区域M之间的第一部分61为双层结构，由叠置的第二金属层和第一金属层5构图形成。第一金属层的材料可以为Al、AlNd或Au等，第二金属层的材料可以为Al、AlNd或Au等，第一金属层5的材料与第二金属层的材料可以相同，也可以不同。
在一些实施例中，触控面板还包括触控引线8，其也可以由叠置的第二金属层和第一金属层5构图形成，如图6B所示，所述触控引线8包括叠置的第三电极层81和第四电极层82，第三电极层81位于衬底基板10和第四电极层82之间，所述第一触控电极1和所述第三电极层81采用相同材料同层设置。
该些实施例中，相对于相关技术，触控面板的第二触控电极和/或触控引线的厚度增加，降低第二触控电极和触控引线的阻抗，降低了触控面板的功耗。
在一些实施例中，触控面板还包括第二绝缘层7，第二绝缘层7覆盖所述第二触控电极6，避免第二触控电极6被外界水氧腐蚀。可选的，如图6A和6B所示，第二绝缘层7具有与第二触控电极6的图案相似的图案，也为网格状，第二触控电极6在所述衬底基板10上的正投影落入第二绝 缘层7在所述衬底基板10上的正投影内。为了使第二绝缘层7完全覆盖第二触控电极6，可以使第二绝缘层7在第二触控电极6线宽的基础上，外扩3μm至6μm，例如，第二触控电极6的线宽w3(即，构成网格状第二触控电极6的每一条走线)一般为2μm至5μm，可以使第二绝缘层7的线宽w4为8μm至11μm。该些实施例中，第二绝缘层7仅覆盖第二触控电极6，相比于在第二绝缘层在衬底基板整面覆盖的触控面板，可有效提高触控面板的透过率。
本公开实施例还提供一种触控装置，包括本公开前述实施例提供的触控面板。所述触控装置例如为触控显示装置，触控显示装置可以为：显示面板、电子纸、手机、平板电脑、电视机、笔记本电脑、数码相框、导航仪等任何具有触控显示功能的产品或部件。
显然，本领域的技术人员可以对本公开进行各种改动和变型而不脱离本公开的精神和范围。这样，倘若本公开的这些修改和变型属于本公开权利要求及其等同技术的范围之内，则本公开也意图包含这些改动和变型在内。

Claims (20)

  1. 一种触控面板的制作方法，包括：
    在衬底基板上形成网格状的第一触控电极以及与所述第一触控电极相互间隔且相互绝缘的第一辅助电极，
    在所述第一触控电极之上形成第一绝缘层，所述第一绝缘层覆盖所述第一触控电极并暴露所述第一辅助电极的至少一部分；
    形成覆盖所述第一绝缘层和所述第一辅助电极的所述至少一部分的第一金属层；
    图案化所述第一辅助电极的所述至少一部分以及所述第一金属层形成网格状的第二触控电极。
  2. 如权利要求1所述的制作方法，在衬底基板上形成网格状的第一触控电极以及与所述第一触控电极相互间隔且相互绝缘的第一辅助电极之前，还包括：
    在衬底基板上形成第二金属层，
    其中，所述第一触控电极和所述第一辅助电极通过图案化所述第二金属层同步形成。
  3. 如权利要求1或2所述的制作方法，在形成第一金属层之前，还包括：在衬底基板的边缘区域形成第二辅助电极，后续形成的第一金属层覆盖所述第二辅助电极的至少一部分；图案化所述第一金属层和第二辅助电极的所述至少一部分形成触控引线。
  4. 如权利要求3所述的制作方法，其中，所述第一触控电极、第一辅助电极以及第二辅助电极利用同一图案化工艺同步形成。
  5. 如权利要求3所述的制作方法，其中，所述第二触控电极和所述触控引线利用同一图案化工艺形成。
  6. 如权利要求1或2所述的制作方法，其中，所述第一绝缘层呈网格状，所述第一触控电极在所述衬底基板上的正投影落入所述第一绝缘层在所述衬底基板上的正投影内。
  7. 如权利要求6所述的制作方法，其中，所述第一触控电极的线宽为2至5μm，所述第一绝缘层的线宽为8至11μm。
  8. 如权利要求1或2所述的制作方法，还包括：在形成有所述第二 触控电极的衬底基板上形成第二绝缘层，所述第二绝缘层覆盖所述第二触控电极。
  9. 如权利要求8所述的制作方法，其中，所述第二绝缘层呈网格状，所述第二触控电极在所述衬底基板上的正投影落入所述第二绝缘层在所述衬底基板上的正投影内。
  10. 如权利要求9所述的制作方法，其中，所述第二触控电极的线宽为2至5μm，所述第二绝缘层的线宽为8至11μm。
  11. 如权利要求1或2所述的制作方法，其中，所述第一辅助电极与所述第一触控电极之间间隔的间距为3μm至5μm。
  12. 如权利要求1所述的制作方法，其中，所述网格状的第一触控电极具有多个开口，所述第一辅助电极包括多个的第一子辅助电极，多个第一子辅助电极位于所述多个开口中。
  13. 一种触控面板，包括：
    衬底基板；
    位于衬底基板上的网格状的第一触控电极和网格状的第二触控电极，第二触控电极与第一触控电极相互交叉排列；以及
    第一绝缘层，至少设置在第一触控电极和第二触控电极的多个交叉区域，并设置在第一触控电极和第二触控电极之间；
    其中，第二触控电极的位于至少一对相邻两交叉区域之间的第一部分包括叠置的第一电极层和第二电极层，第一电极层位于衬底基板和第二电极层之间，所述第一触控电极和所述第一电极层采用相同材料同层设置。
  14. 如权利要求13所述的触控面板，还包括：
    触控引线，位于所述基板的边缘区域，
    其中，所述触控引线包括叠置的第三电极层和第四电极层，第三电极层位于衬底基板和第四电极层之间，所述第一触控电极和所述第三电极层采用相同材料同层设置。
  15. 如权利要求13或14所述的触控面板，其中，所述第一绝缘层呈网格状，所述第一触控电极在所述衬底基板上的正投影落入所述第一绝缘层在所述衬底基板上的正投影内。
  16. 如权利要求15所述的触控面板，其中，所述第一触控电极的线 宽为2至5μm，所述第一绝缘层的线宽为8至11μm。
  17. 如权利要求13或14所述的触控面板，还包括：
    位于所述第二触控电极之上的第二绝缘层，
    其中，所述第二绝缘层覆盖所述第二触控电极。
  18. 如权利要求17所述的触控面板，其中，所述第二绝缘层呈网格状，所述第二触控电极在所述衬底基板上的正投影落入所述第二绝缘层在所述衬底基板上的正投影内。
  19. 如权利要求18所述的触控面板，其中，所述第二触控电极的线宽为2至5μm，所述第二绝缘层的线宽为8至11μm。
  20. 一种触控装置，包括如权利要求13至19中任一项所述的触控面板。
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CN206322134U (zh) * 2016-12-23 2017-07-11 上海天马微电子有限公司 一种触控显示面板及触控显示设备
CN108415621A (zh) * 2018-05-16 2018-08-17 京东方科技集团股份有限公司 一种触控面板、触控装置及其制作方法

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