WO2019160166A1 - Procédé de production de moule et procédé de production d'article moulé l'utilisant - Google Patents

Procédé de production de moule et procédé de production d'article moulé l'utilisant Download PDF

Info

Publication number
WO2019160166A1
WO2019160166A1 PCT/JP2019/006929 JP2019006929W WO2019160166A1 WO 2019160166 A1 WO2019160166 A1 WO 2019160166A1 JP 2019006929 W JP2019006929 W JP 2019006929W WO 2019160166 A1 WO2019160166 A1 WO 2019160166A1
Authority
WO
WIPO (PCT)
Prior art keywords
mold
curable composition
ultraviolet curable
deformation
curing
Prior art date
Application number
PCT/JP2019/006929
Other languages
English (en)
Japanese (ja)
Inventor
慎介 石川
武 藤川
有希 大西
平井　義彦
Original Assignee
株式会社ダイセル
国立大学法人東京工業大学
公立大学法人大阪府立大学
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2018174162A external-priority patent/JP2019142206A/ja
Application filed by 株式会社ダイセル, 国立大学法人東京工業大学, 公立大学法人大阪府立大学 filed Critical 株式会社ダイセル
Priority to EP19754456.2A priority Critical patent/EP3756847A4/fr
Priority to KR1020207026730A priority patent/KR20200119872A/ko
Priority to CN201980014198.XA priority patent/CN111741840A/zh
Priority to US16/970,844 priority patent/US20200376720A1/en
Publication of WO2019160166A1 publication Critical patent/WO2019160166A1/fr

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/42—Moulds or cores; Details thereof or accessories therefor characterised by the shape of the moulding surface, e.g. ribs or grooves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing

Definitions

  • the present invention relates to a method for producing a mold made of an elastic body used for molding an ultraviolet curable composition, and a method for producing a molded body using the mold produced by the above method.
  • Imprint is a microfabrication technology that can transfer nano-sized patterns with a very simple process. If imprint is used, it can be mass-produced at low cost, and has been put to practical use in various fields such as semiconductor devices and optical members.
  • a micromirror array is an optical member in which a large number of three-dimensional shapes of quadrangular columns and pyramids with sides of 100 to 1000 ⁇ m are arranged in a lattice shape, and two adjacent side surfaces of the four side surfaces of the three-dimensional shape are used as orthogonal mirrors. Therefore, an accurate angle and high flatness (that is, high surface accuracy) are required.
  • Imprint includes thermal imprint that is transferred to a thermoplastic composition and optical imprint that is transferred to an ultraviolet curable composition.
  • thermal imprint that is transferred to a thermoplastic composition
  • optical imprint that is transferred to an ultraviolet curable composition.
  • a change in shape (expansion or contraction) during solidification or curing is required to be small.
  • thermoplastic compositions that use thermoplastic compositions are excellent in terms of transferability because the shape change of the thermoplastic composition is extremely small, but it takes a long time to solidify and the work efficiency is poor.
  • the problem is that the cost increases because of the use of a molded mold.
  • the ultraviolet curable composition is economical because a resin mold such as a mold can be used.
  • the working efficiency is also good.
  • various studies have been made on the composition in order to suppress the curing shrinkage of the ultraviolet curable composition, but this is also a limit.
  • Patent Document 1 describes that a reduction in line width due to resin shrinkage can be corrected by a specific function for a mold used for forming a wiring pattern by molding a resin by an imprint method.
  • Patent Document 1 no consideration is given to the fact that the side surface of the wiring is curved, and even if a mold corrected using the above function is used, the side surface of the obtained wiring pattern is not curved. It was found that the surface accuracy was low.
  • an object of the present invention is to provide a mold manufacturing method capable of accurately molding an ultraviolet curable composition by photoimprinting. Another object of the present invention is to provide a mold capable of reliably producing a molded article having excellent shape accuracy (particularly excellent in surface accuracy). Another object of the present invention is to provide a method for producing a highly accurate (particularly excellent in surface precision) molded article comprising a cured product of an ultraviolet curable composition using the mold. . Another object of the present invention is to provide a highly accurate (particularly excellent in surface accuracy) molded article made of a cured product of an ultraviolet curable composition. Another object of the present invention is to provide a simulation apparatus that can accurately predict curing shrinkage of an ultraviolet curable composition and accompanying mold deformation.
  • the present inventors have found that when performing a photoimprint molding using a mold, the mold and the ultraviolet curable composition are in close contact during curing.
  • the ultraviolet curable composition filled in the mold gradually increases in hardness with the progress of the curing reaction, and finally becomes harder than the mold. Therefore, the elastic mold is a deformation of the cured product that is in close contact with the mold wall surface. It was found that the molded body obtained was deformed following the movement of the mold, and the deformation of the mold was transferred to the cured product, so that the obtained molded body had a curved side surface and a low surface accuracy.
  • the mold is designed so as to compensate for the deformation in consideration of the curing shrinkage of the ultraviolet curable composition and the accompanying deformation of the mold, and manufactured according to the design. It has been found that if an ultraviolet curable composition is molded by an imprint method using the molded mold, a molded body having a desired shape can be produced with high accuracy, efficiency and low cost. The present invention has been completed based on these findings.
  • the present invention relates to a method for producing a mold made of an elastic material used for molding an ultraviolet curable composition, wherein the deformation accompanying the curing of the ultraviolet curable composition is caused by curing shrinkage of the ultraviolet curable composition [ 1) and a deformation [2] of the mold associated therewith are simulated by a finite element analysis method, and a mold is designed based on the simulation, and a mold manufacturing method is provided.
  • the present invention also replaces the curing shrinkage [1] of the ultraviolet curable composition with the shrinkage accompanying cooling of the thermoviscoelastic body, and the model is obtained by increasing the thermal expansion coefficient of the thermoviscoelastic body and the viscosity relaxation time accompanying cooling.
  • a method for producing the mold is provided.
  • the present invention also provides a method for manufacturing the mold, wherein the deformation [2] of the mold is modeled by a superelastic body.
  • the present invention also provides a mold obtained by the above-described mold manufacturing method.
  • the present invention also provides a mold comprising the cured product of the ultraviolet curable composition through a step of producing a mold by the mold production method and molding the ultraviolet curable composition using the obtained mold.
  • a method for producing a molded body to obtain a body is provided.
  • the present invention also provides a method for producing the molded body, wherein the molded body is a micromirror array.
  • the present invention also provides a molded body obtained by the method for producing a molded body.
  • the present invention also simulates the deformation accompanying the curing of the ultraviolet curable composition by a finite element analysis method considering the curing shrinkage [1] of the ultraviolet curable composition and the accompanying mold deformation [2]. Providing equipment.
  • the present invention is also an apparatus for producing a mold used for molding an ultraviolet curable composition, wherein the deformation accompanying the curing of the ultraviolet curable composition is caused by the curing shrinkage [1] of the ultraviolet curable composition and the accompanying deformation.
  • a mold manufacturing apparatus characterized by simulating by a finite element analysis method considering the deformation [2] of a mold, and designing and manufacturing the mold based on the simulation.
  • the present invention also simulates the deformation accompanying the curing of the ultraviolet curable composition by a finite element analysis method considering the curing shrinkage [1] of the ultraviolet curable composition and the accompanying mold deformation [2].
  • an apparatus for producing a molded body wherein the ultraviolet curable composition is molded using a mold designed and manufactured based on the mold.
  • the mold manufacturing method of the present invention it is possible to predict the deformation by simulation and reflect the necessary correction to the design, which has been done in the past by repeating trial manufacture and spending enormous time and cost. Can be done faster and more reliably.
  • the ultraviolet curable composition is analyzed as a thermo-viscoelastic body, and the curing and shrinkage (hereinafter sometimes referred to as “curing behavior”) of the UV-curable composition are determined for each thermoviscoelastic body.
  • Curing behavior the curing and shrinkage of the UV-curable composition are determined for each thermoviscoelastic body.
  • Modeling by replacing with shrinkage and solidification due to cooling hereinafter sometimes referred to as “solidification behavior”
  • solidification behavior enables quantitative analysis of mold deformation, such as side curvature, caused by the curing behavior of the UV-curable composition.
  • the mold shape can be optimized in consideration of the curvature in advance.
  • the mold obtained by the mold manufacturing method of the present invention has a shape corrected so as to cancel out the expected deformation, if the mold is used, the shape accuracy is excellent, especially the surface accuracy is excellent.
  • a molded body can be obtained efficiently and inexpensively. Therefore, the mold obtained by the mold manufacturing method of the present invention is required to have high surface accuracy such as an optical member such as a micromirror array, semiconductor lithography, polymer MEMS, flat screen, hologram, waveguide, and precision mechanical parts. It is suitably used for applications in which a fine structure is produced by optical imprinting.
  • the side surface is curved and displaced. It is a figure which shows the bending displacement of the micromirror side surface after mold release by finite element analysis. It is a figure which shows the x direction displacement in the cut surface perpendicular
  • vertical to a y-axis in the time t 50s of Step2 of the molded object obtained in Example 1. FIG. It is a figure which shows the x direction displacement in the cut surface perpendicular
  • vertical to a y-axis in the time t 100s of Step2 of the molded object obtained in Example 1.
  • FIG. 5B is a diagram illustrating the displacement of the side surface in the y-axis direction.
  • FIG. 5B is a diagram illustrating the displacement of the side surface in the y-axis direction.
  • vertical to a y-axis in the time t 100s of Step2 of the molded object obtained in Example 4 (a), The y-axis direction displacement in the cross section perpendicular
  • FIG. 5B is a diagram illustrating the displacement of the side surface in the y-axis direction.
  • vertical to a y-axis in the time t 100s of Step2 of the molded object obtained in Example 5 (a), The y-axis direction displacement in the cross section perpendicular
  • FIG. It is a figure which shows the curvature displacement distribution of the mirror surface in the analysis result before mold shape optimization of the ultraviolet curable composition in Example 6.
  • FIG. It is a figure which shows the outline of the physical-property measurement experiment of the ultraviolet curable composition by a rotational vibration type rheometer.
  • the mold production method of the present invention is a method for producing a mold made of an elastic material, which is used for molding an ultraviolet curable composition. Simulation is performed by a finite element analysis method that takes into account hardening shrinkage [1] and accompanying mold deformation [2], and a mold is designed based on this (for example, mold correction is performed based on this and the mold gold The mold is designed, and a mold is manufactured using the design).
  • the mold in the present invention is a mold made of an elastic body. That is, it is a mold having elasticity and a property of being deformed by an external force.
  • the material of the mold is not particularly limited as long as it has elasticity, and examples thereof include silicone (for example, polydimethylsiloxane), acrylic polymer, cycloolefin polymer, and fluorine-based polymer.
  • the curing behavior by irradiating the ultraviolet curable composition of [1] with ultraviolet rays is, for example, the temperature dependence of the thermal expansion coefficient of a thermo-viscoelastic body (for example, thermoplastic resin) and the viscosity accompanying cooling. Can be modeled by increasing relaxation time.
  • the deformation of the mold of [2] can be modeled by, for example, a super elastic body (for example, a neo-hook elastic body).
  • the curing reaction that proceeds by UV irradiation of the ultraviolet curable composition can be modeled by replacing it with a solidification reaction by cooling the thermoviscoelastic body (for example, cooling from 100 ° C. to 0 ° C.).
  • the progress of the curing reaction of the ultraviolet curable composition can replace the increase in the integrated UV irradiation amount per unit volume with the temperature decrease of the thermoviscoelastic body.
  • the shrinkage rate of the ultraviolet curable composition depending on the integrated UV irradiation amount can be replaced with the thermal expansion coefficient of the thermo-viscoelastic material depending on the temperature.
  • the thickening of the ultraviolet curable composition that depends on the integrated UV irradiation amount can be replaced with an increase in the viscosity relaxation time of the thermoviscoelastic body that depends on the temperature.
  • thermoviscoelastic body can be expressed by a generalized Maxwell model (see FIG. 1).
  • the shear elastic modulus having time dependence of the thermo-viscoelastic body based on the generalized Maxwell model is expressed by the following equation.
  • g ⁇ is the long-term shear elastic modulus
  • g i and ⁇ i are the i-th shear elastic modulus and relaxation time in FIG. 1, respectively.
  • thermoviscoelastic body can be expressed by the WLF rule.
  • WLF law the time first temperature conversion rule is expressed using a shift factor A theta represented by the following formula.
  • ⁇ represents temperature.
  • ⁇ 0 , C 1 and C 2 are model parameters of the WLF rule, and in particular, ⁇ 0 indicates a reference temperature.
  • ⁇ 0 can be set to about ⁇ g ⁇ ⁇ 0 ⁇ ⁇ g +50 (° C.).
  • the curing behavior by irradiating the ultraviolet curable composition used in the molded product with ultraviolet rays is measured, and the physical properties (temperature-dependent thermal expansion coefficient, temperature-dependent Shift factors, Prony series coefficients, immediate transverse (or longitudinal) elastic modulus and immediate Poisson's ratio can also be identified and used.
  • a rotational vibration rheometer can be used to measure the curing behavior of the ultraviolet curable composition. More specifically, a transverse viscoelasticity is obtained by sandwiching an ultraviolet curable composition in a gap of about several hundred microns between a glass plate and a cylinder rod, and irradiating ultraviolet rays from the glass plate side and at the same time vibrating the rod slightly. The time history of characteristics is measured (see FIG. 24). In addition, the time history of the shrinkage characteristics of the ultraviolet curable composition is also measured by making the vertical position of the rod follow the change in the gap due to the shrinkage of the ultraviolet curable composition.
  • UV irradiation condition it is desirable to adjust the UV irradiation condition so that it is almost the same as the molding condition of the molded body, and always keep it constant, and the characteristics according to the frequency of each rotational vibration by changing the frequency of the rotational vibration in various ways
  • a physical property value can be identified by measuring the value.
  • the finite element analysis can be performed, for example, by the following procedure using, for example, an ABAQUIS / Standard tetrahedral secondary modified hybrid element (C3D10MH).
  • Fig. 2 shows a mesh division diagram of the tetrahedral element used in the analysis
  • Fig. 3 shows a two-dimensional sectional view.
  • the mold shape is optimized by the following means (for example, one direction on the horizontal plane is the x axis, the direction perpendicular to the x axis on the horizontal plane is the y axis, x
  • the z-axis is a direction perpendicular to the axis and the y-axis
  • the quadrangular pyramid shaped molded body is placed on a horizontal plane and cut by a plane including the x-axis and the z-axis (FIG. 3)
  • the left side is the z-axis
  • the mold shape can be optimized so as to be parallel straight lines (FIG. 4). 1.
  • Sub-analysis static analysis for mold shape change
  • ⁇ x (i) is given to the node i as a forced displacement in the x direction.
  • no displacement is applied in the y direction. 6).
  • the coordinates of all nodes are acquired from the results of the sub-analysis, and are substituted and updated as initial coordinates of the main analysis.
  • Curing shrinkage of an ultraviolet curable composition is a complicated phenomenon including a phase transition and is difficult to analyze.
  • the mold manufacturing method of the present invention the curing behavior of an ultraviolet curable composition is changed to a thermoviscoelastic body.
  • the deformation of the UV curable composition can be simulated by a finite element analysis method, and the mold for manufacturing the mold is designed based on this. Filling the mold obtained on the basis of a liquid mold forming material (for example, silicone resin such as polydimethylsiloxane) and curing it, the desired shape can be obtained in an extremely short time compared to the conventional case.
  • a liquid mold forming material for example, silicone resin such as polydimethylsiloxane
  • the simulation apparatus of the present invention simulates the deformation accompanying the curing of the ultraviolet curable composition by a finite element analysis method considering the curing shrinkage [1] of the ultraviolet curable composition and the mold deformation [2] associated therewith. (Or implement a simulation).
  • the apparatus of the present invention has a particularly limited configuration as long as it has a function of simulating by a finite element analysis method in consideration of cure shrinkage [1] of the ultraviolet curable composition and accompanying mold deformation [2].
  • a computer type eg, CPU, memory, hard disk, etc.
  • an operating system e.g., an operating system
  • a finite element analysis software solver, preprocessor, postprocessor
  • the simulation apparatus of the present invention it is possible to accurately predict the curing shrinkage of the ultraviolet curable composition, which is a complicated phenomenon including a phase transition, and the deformation of the mold associated therewith. Accurate prediction of deformation obtained using the simulation apparatus of the present invention is very useful because a molded body having a desired shape can be reliably manufactured if a mold is manufactured based on this.
  • the mold of the present invention is obtained by the above-described mold manufacturing method.
  • deformation due to curing shrinkage of the ultraviolet curable composition is predicted in advance by simulation, and this is reflected in the design. Therefore, if the mold of the present invention is used, it is possible to reliably produce a molded body made of a cured product of an ultraviolet curable composition and having excellent shape accuracy (particularly excellent surface accuracy). it can.
  • the mold manufacturing apparatus of the present invention is a mold manufacturing apparatus used for molding an ultraviolet curable composition, and the deformation accompanying the curing of the ultraviolet curable composition is cured by shrinkage of the ultraviolet curable composition [1]. And a mold is designed and manufactured based on the simulation by the finite element analysis method considering the deformation [2] of the mold associated therewith.
  • the mold manufacturing apparatus of the present invention simulates the deformation accompanying the curing of the ultraviolet curable composition by a finite element analysis method considering the curing shrinkage [1] of the ultraviolet curable composition and the mold deformation [2] associated therewith. Then, mold is designed and manufactured based on this (for example, the mold is designed by making necessary corrections based on this, and the mold is manufactured using the obtained mold)
  • the configuration is not particularly limited as long as it has a function. For example, it is a computer type as a hard wafer (eg, CPU, memory, hard disk, etc.), an operating system as software, and a finite element analysis software (solver, preprocessor) , A post processor).
  • the shrinkage of the ultraviolet curable composition which is a complicated phenomenon including phase transition, and the deformation of the mold accompanying it are accurately predicted.
  • a mold with deformation compensation can be manufactured. The mold thus obtained is very useful since it can reliably produce a molded body having a desired shape.
  • the molded body examples include a micromirror array.
  • the micromirror array is an optical member in which a large number of three-dimensional patterns such as a quadrangular column, a truncated pyramid, and a quadrangular pyramid having a height of 10 to 1000 ⁇ m are arranged in a grid pattern (for example, arranged in a grid pattern at intervals of 10 to 1000 ⁇ m) (See FIG. 5).
  • a mold for manufacturing a micromirror array it is preferable to have a configuration in which a large number of concave portions having a reversed shape of a quadrangular prism or a quadrangular pyramid are arranged in a lattice shape.
  • Examples of the method for molding the ultraviolet curable composition include the following methods (1) and (2).
  • a substrate having a light transmittance of a wavelength of 400 nm of 90% or more is preferably used, and a substrate made of quartz or glass can be suitably used.
  • the light transmittance of the said wavelength is calculated
  • the method for applying the ultraviolet curable composition is not particularly limited, and examples thereof include a method using a dispenser or a syringe.
  • Curing of the ultraviolet curable composition can be performed by irradiating with ultraviolet rays.
  • a high pressure mercury lamp, an ultrahigh pressure mercury lamp, a carbon arc lamp, a xenon lamp, a metal halide lamp, or the like is used as a light source for ultraviolet irradiation.
  • the irradiation time varies depending on the type of light source, the distance between the light source and the coating surface, and other conditions, it is several tens of seconds at the longest.
  • the illuminance is about 5 to 200 mW.
  • curing may be promoted by heating (post-cure) as necessary.
  • the ultraviolet curable composition in the present invention includes a cationic curable composition and a radical curable composition.
  • a cationic curable composition is preferable in that it does not undergo curing inhibition by oxygen.
  • the cationic curable composition is a composition containing a cationic curable compound and is excellent in curability.
  • a composition containing an epoxy resin as a cationic curable compound is preferable in that a cured product having excellent curability and optical characteristics (particularly transparency), high hardness, and heat resistance can be obtained.
  • an alicyclic epoxy compound having one or more epoxy groups (oxirane ring) in the molecule can be used as the epoxy resin.
  • an alicyclic epoxy compound, an aromatic epoxy compound, an aliphatic epoxy compound, etc. Can be mentioned.
  • an alicyclic epoxy compound having an alicyclic structure and an epoxy group as a functional group in the molecule is capable of forming a cured product excellent in heat resistance and transparency.
  • Particularly preferred are polyfunctional alicyclic epoxy compounds.
  • polyfunctional alicyclic epoxy compound (I) A compound having an epoxy group (that is, an alicyclic epoxy group) composed of two adjacent carbon atoms and oxygen atoms constituting the alicyclic ring (II) An epoxy group bonded directly to the alicyclic ring with a single bond Compound (III) having an alicyclic ring and a glycidyl group.
  • the compound (I) which has an alicyclic epoxy group is preferable at the point from which the cure shrinkage rate is low and the hardened
  • Representative examples of the compound represented by the above formula (1) include 3,4-epoxycyclohexylmethyl (3,4-epoxy) cyclohexanecarboxylate, (3,4,3 ′, 4′-diepoxy) biphenyl. Cyclohexyl, bis (3,4-epoxycyclohexylmethyl) ether, 1,2-epoxy-1,2-bis (3,4-epoxycyclohexane-1-yl) ethane, 2,2-bis (3,4-epoxy) Cyclohexane-1-yl) propane, 1,2-bis (3,4-epoxycyclohexane-1-yl) ethane and the like.
  • the ultraviolet curable composition in the present invention may contain other curable compounds in addition to the epoxy resin as the curable compound.
  • one or two cationic curable compounds such as oxetane compounds and vinyl ether compounds may be used. More than one species can be contained.
  • the ultraviolet curable composition in the present invention preferably contains an epoxy resin as a curable compound, and particularly 50% by weight (particularly preferably 60% by weight or more, most preferably 70% by weight or more) of the total amount of the curable compound.
  • an epoxy resin containing a polyfunctional alicyclic epoxy compound is preferably an epoxy resin containing a polyfunctional alicyclic epoxy compound.
  • the ultraviolet curable composition preferably contains one or more photopolymerization initiators together with the curable compound.
  • the content of the photopolymerization initiator is, for example, in a range of 0.1 to 5.0 parts by weight with respect to 100 parts by weight of the curable compound (particularly, cationic curable compound) contained in the ultraviolet curable composition. .
  • content of a polymerization initiator is less than the said range, there exists a possibility of causing a curing defect.
  • the content of the polymerization initiator exceeds the above range, the cured product tends to be colored.
  • the ultraviolet curable composition in the present invention comprises the curable compound, a photopolymerization initiator, and other components as necessary (for example, a solvent, an antioxidant, a surface conditioner, a photosensitizer, an antifoaming agent, And a leveling agent, a coupling agent, a surfactant, a flame retardant, an ultraviolet absorber, a colorant, and the like).
  • the blending amount of the other components is, for example, 20% by weight or less, preferably 10% by weight or less, particularly preferably 5% by weight or less, based on the total amount of the ultraviolet curable composition.
  • the molded body manufacturing apparatus of the present invention uses a finite element analysis method that takes into account the deformation accompanying the curing of the ultraviolet curable composition by taking into account the curing shrinkage [1] of the ultraviolet curable composition and the accompanying mold deformation [2].
  • the ultraviolet curable composition is molded using a mold that is simulated and designed and manufactured based on the simulation.
  • the molded body manufacturing apparatus of the present invention uses a finite element analysis method that takes into account the deformation accompanying the curing of the ultraviolet curable composition by taking into account the curing shrinkage [1] of the ultraviolet curable composition and the accompanying mold deformation [2].
  • the structure is not particularly limited as long as it has a function of forming the ultraviolet curable composition using a mold that is simulated and designed and manufactured based on the simulation. It is preferable to include an operating system (such as a CPU, a memory, and a hard disk), and finite element analysis software (solver, preprocessor, postprocessor) as software.
  • the manufacturing apparatus of the molded body of the present invention is used, the curing shrinkage of the ultraviolet curable composition, which is a complicated phenomenon including phase transition, and the deformation of the mold accompanying it are accurately predicted, and the manufacturing is based on this. Since an ultraviolet curable composition is shape
  • the mold contains an ultraviolet curable composition (trade name “CELVENUS OUH106”, a cationic curable compound and a photocationic polymerization initiator, and 80% by weight of the total amount of the cationic curable compound is epoxy resin (polyfunctional alicyclic epoxy). (Including a compound), manufactured by Daicel Corporation), and the mold was closed with a transparent substrate from above. Thereafter, UV irradiation (80 mW ⁇ 30 seconds) was performed, followed by release to obtain a molded body (FIG. 6). The obtained molded body was bent and displaced from the central part of the side surface to the central lower part.
  • Example 1 (examination of the curve from the center to the bottom of the side of the molded body) Curing shrinkage caused by irradiating the ultraviolet curable composition with ultraviolet rays was replaced with shrinkage solidification caused by cooling the thermo-viscoelastic body.
  • C 1 10 C 2 : 100 ° C.
  • the mold was modeled with a neo-hook elastic body.
  • neo-hook elastic body ⁇ Physical properties of neo-hook elastic body> Initial Young's modulus: 5Mpa Initial Poisson's ratio: 0.49
  • the thickness of the remaining film layer had little influence on the transfer accuracy. More specifically, if the thickness of the remaining film layer is less than 100 ⁇ m, the flow resistance may increase and the curvature may be affected. However, the remaining film layer may have a thickness of 100 ⁇ m or more. It has been found that the effect of improving the transfer accuracy cannot be obtained even if the thickness of the layer is increased to 200 ⁇ m or more. Therefore, it was confirmed that it was not necessary to add the element of the residual film layer thickness to the simulation by the finite element analysis method.
  • Example 6 (Examination using physical property value identification method by measurement of curing behavior) Curing behavior (gap change rate, storage lateral elasticity) of the ultraviolet curable composition (trade name “CELVENUS OUH106”, manufactured by Daicel Corporation) used in Experimental Example 1 using an Anton Paar rheometer (MCR-301). The rate (G ′) and the loss transverse elastic modulus (G ′′)) were measured for each rotational vibration frequency (0.1 to 10 Hz).
  • the UV irradiation conditions in the measurement were adjusted to be the same as in Experimental Example 1 (80 mW ⁇ 30 seconds).
  • the UV irradiation conditions are always constant, and the gap change rate does not depend on the frequency.
  • a typical result of the gap change rate is shown in FIG.
  • the results of the transverse elastic modulus differ for each frequency, the results of three typical conditions (10 Hz, 1 Hz, and 0.1 Hz) are shown in FIGS.
  • the ultraviolet curable composition used in this measurement continues to shrink and cure even after 30 seconds of UV irradiation, indicating that dark curing proceeds.
  • the “temperature” set here is a virtual value that is not related to the actual temperature.
  • the temperature-dependent thermal expansion coefficient was identified from the time history of the gap change rate obtained by the measurement. Note that the volume expansion coefficient ⁇ is three times the linear expansion coefficient ⁇ , and when the linear expansion coefficient ⁇ ( ⁇ ) depending on the temperature is obtained from the initial state as a reference, the graph of FIG. As obtained.
  • the shift factor of the time-temperature conversion rule was identified using the time history of the transverse elastic modulus obtained by the measurement.
  • the shift factor A ( ⁇ ) depending on the temperature is varied so that the master curve ( ⁇ : angular frequency) of G ′ ( ⁇ ) and G ′′ ( ⁇ ) becomes a smooth function after the reference temperature ⁇ ref is determined. It can be obtained by determining the shift factor at various sample temperatures.
  • the time-temperature conversion does not use the WLF rule or the like, and performs conversion using table data that can be applied more generally.
  • the coefficient of the Prony series was identified using the obtained master curve.
  • the bulk modulus is not viscous and only the transverse modulus is viscous. Since an ultraviolet curable composition undergoes a phase change from a fluid to a solid, it is necessary to identify Prony series coefficients over a wide range of time constants in order to accurately reproduce its deformation behavior.
  • the immediate transverse elastic modulus, the immediate Poisson's ratio, and the like are obtained by conducting a material test on the bulk specimen after being completely cured.
  • the long-term transverse elastic modulus is a physical property value that is difficult to obtain experimentally.
  • the behavior close to the fluid was reproduced by setting the long-term lateral elastic modulus to a value that can be regarded as sufficiently small in light of the measurement range with the rheometer (for example, a value of immediate lateral elastic modulus ⁇ 10 ⁇ 6 or so).
  • the physical property value data of the mold was the same as in Example 1, and finite element analysis was performed. From the cross-sectional view of the molded body reproduced by numerical analysis (FIG. 23), it was found that the curvature from the center to the center lower part quantitatively coincided with the result of the above experimental example.
  • the mold manufacturing method of the present invention it is possible to predict the deformation by simulation and reflect the necessary correction to the design, which has been done in the past by repeating trial manufacture and spending enormous time and cost. Can be done faster and more reliably. Further, since the mold obtained by the above method has a shape corrected so as to cancel out the expected deformation, a molded body having excellent shape accuracy can be obtained efficiently and inexpensively by using the mold. Therefore, it is suitably used for the purpose of producing a fine structure such as a micromirror array that requires high surface accuracy by optical imprinting.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)

Abstract

La présente invention concerne un procédé de production de moule permettant de mouler une composition durcissable aux UV avec une excellente précision par photoimpression. Ce procédé de production de moule est un procédé de production d'un moule comprenant un corps élastique et utilisé pour mouler une composition durcissable aux UV, et est caractérisé en ce que la déformation accompagnant le durcissement de la composition durcissable aux UV est simulée à l'aide d'une analyse par éléments finis prenant en considération le retrait de durcissement [1] de la composition durcissable aux UV et la déformation [2] du moule accompagnant le retrait, et le moule est conçu sur la base des résultats de simulation.
PCT/JP2019/006929 2018-02-19 2019-02-18 Procédé de production de moule et procédé de production d'article moulé l'utilisant WO2019160166A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP19754456.2A EP3756847A4 (fr) 2018-02-19 2019-02-18 Procédé de production de moule et procédé de production d'article moulé l'utilisant
KR1020207026730A KR20200119872A (ko) 2018-02-19 2019-02-18 몰드의 제조 방법, 및 이것을 이용한 성형체의 제조 방법
CN201980014198.XA CN111741840A (zh) 2018-02-19 2019-02-18 模具的制造方法、以及利用了该制造方法的成型体的制造方法
US16/970,844 US20200376720A1 (en) 2018-02-19 2019-02-18 Method for producing mold, and method for producing molded article using same

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2018-027432 2018-02-19
JP2018027432 2018-02-19
JP2018-174162 2018-09-18
JP2018174162A JP2019142206A (ja) 2018-02-19 2018-09-18 モールドの製造方法、及びこれを利用した成形体の製造方法

Publications (1)

Publication Number Publication Date
WO2019160166A1 true WO2019160166A1 (fr) 2019-08-22

Family

ID=67618758

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2019/006929 WO2019160166A1 (fr) 2018-02-19 2019-02-18 Procédé de production de moule et procédé de production d'article moulé l'utilisant

Country Status (1)

Country Link
WO (1) WO2019160166A1 (fr)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002268057A (ja) * 2001-03-06 2002-09-18 Omron Corp マイクロ凹凸パターンを有する樹脂薄膜を備えた光学素子、反射板の製造方法及び装置
JP2008006639A (ja) * 2006-06-28 2008-01-17 Toppan Printing Co Ltd インプリント用モールドおよびインプリント用モールド製造方法
JP2009226762A (ja) * 2008-03-24 2009-10-08 Toppan Printing Co Ltd インプリントモールド、インプリントモールド製造方法、微細構造体
JP2012183692A (ja) 2011-03-04 2012-09-27 Osaka Prefecture Univ ナノインプリント用モールドの設計方法
JP2018027432A (ja) 2017-11-28 2018-02-22 株式会社サンセイアールアンドディ 遊技機
JP2018174162A (ja) 2015-09-03 2018-11-08 株式会社カネカ 有機ｅｌ発光装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002268057A (ja) * 2001-03-06 2002-09-18 Omron Corp マイクロ凹凸パターンを有する樹脂薄膜を備えた光学素子、反射板の製造方法及び装置
JP2008006639A (ja) * 2006-06-28 2008-01-17 Toppan Printing Co Ltd インプリント用モールドおよびインプリント用モールド製造方法
JP2009226762A (ja) * 2008-03-24 2009-10-08 Toppan Printing Co Ltd インプリントモールド、インプリントモールド製造方法、微細構造体
JP2012183692A (ja) 2011-03-04 2012-09-27 Osaka Prefecture Univ ナノインプリント用モールドの設計方法
JP2018174162A (ja) 2015-09-03 2018-11-08 株式会社カネカ 有機ｅｌ発光装置
JP2018027432A (ja) 2017-11-28 2018-02-22 株式会社サンセイアールアンドディ 遊技機

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP3756847A4 *

Similar Documents

Publication Publication Date Title
Lipkowitz et al. Injection continuous liquid interface production of 3D objects
US11752713B2 (en) Polymer composition and methods using said polymer composition to manufacture ophthalmic lens
Hansen et al. Replication of micro and nano surface geometries
KR101219354B1 (ko) 액체 응고에 대한 산소 방해를 약화시키는 중합 기술 및그를 위한 조성물
Li et al. Interfacial interactions during demolding in nanoimprint lithography
BR112016000136B1 (pt) Método para fabricar uma lente oftálmica transparente tridimensional
CN101221358A (zh) 基于柔性紫外压模的曲面基底多相位微光学元件加工方法
EP1873174A4 (fr) Composition photodurcissable, article avec un motif fin et procede pour sa production
CN110945039B (zh) 光固化性组合物及三维物体的制造方法
Sonne et al. Modeling and simulation of the deformation process of PTFE flexible stamps for nanoimprint lithography on curved surfaces
JP2019142206A (ja) モールドの製造方法、及びこれを利用した成形体の製造方法
JP2003149476A (ja) 光導波路用樹脂組成物及びその硬化物
WO2019160166A1 (fr) Procédé de production de moule et procédé de production d'article moulé l'utilisant
Ali et al. 3D‐Printed Holographic Fresnel Lenses
JP5839877B2 (ja) スピンコート用樹脂鋳型
US10739583B2 (en) Method for obtaining at least one structure approximating a sought structure by reflow
Dileep et al. Review of Vat photopolymerization 3D Printing of Photonic Devices
JP2022012985A (ja) モールドの製造方法、及びこれを利用した成形体の製造方法
Liravi Dynamic force analysis for bottom-up projection-based Additive Manufacturing using finite element analysis
JP2019206165A (ja) モールドの製造方法
Zhang Empirical process planning for exposure controlled projection lithography
WO2019160095A1 (fr) Procédé de fabrication de moule
JP7475221B2 (ja) シミュレーション方法、プログラム、シミュレーション装置、データベース、膜形成装置および物品製造方法
Onishi et al. Numerical modeling method for UV imprint process simulation using thermoviscoelastic constitutive equations
CN118500990B (en) Inversion method for liquid drop impact fluid-solid interface stress

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 19754456

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

ENP Entry into the national phase

Ref document number: 20207026730

Country of ref document: KR

Kind code of ref document: A

ENP Entry into the national phase

Ref document number: 2019754456

Country of ref document: EP

Effective date: 20200921