WO2019124696A1 - 내굴곡성이 우수한 철-니켈 합금박 - Google Patents

내굴곡성이 우수한 철-니켈 합금박 Download PDF

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WO2019124696A1
WO2019124696A1 PCT/KR2018/012178 KR2018012178W WO2019124696A1 WO 2019124696 A1 WO2019124696 A1 WO 2019124696A1 KR 2018012178 W KR2018012178 W KR 2018012178W WO 2019124696 A1 WO2019124696 A1 WO 2019124696A1
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iron
alloy foil
nickel alloy
nickel
less
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PCT/KR2018/012178
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English (en)
French (fr)
Korean (ko)
Inventor
김종권
이재곤
김현태
이재륭
정관호
양홍석
홍재화
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주식회사 포스코
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Publication of WO2019124696A1 publication Critical patent/WO2019124696A1/ko

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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K99/00Subject matter not provided for in other groups of this subclass
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C38/00Ferrous alloys, e.g. steel alloys
    • C22C38/08Ferrous alloys, e.g. steel alloys containing nickel
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D1/00Electroforming
    • C25D1/04Wires; Strips; Foils
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10Deposition of organic active material
    • H10K71/16Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/166Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask

Definitions

  • the present invention relates to an iron-nickel alloy foil, and more particularly to an iron-nickel alloy foil excellent in bending resistance.
  • Flexible Display is a next-generation display that can be folded or folded, unlike a flat panel display. Flexible displays can enhance space utilization through shape modification, and are thin, lightweight, and unbreakable. Accordingly, the present invention can be applied to fields such as smart phones, wearable smart devices, foldable IT devices, rollable IT devices, automobile displays, and digital signage. Flexible IT devices that can fold or warp are expected to provide convenience to consumers by enhancing portability and space utilization. In order to develop such next-generation IT equipment, development of parts that can be transformed, such as flexible display, should be preceded.
  • Flexible displays can be implemented in a variety of ways such as OLED, LCD, and E-paper. In the industry, however, OLED driving methods are suitable for flexible displays, and products are being developed using them.
  • a key component of flexible display production technology is the shadow mask, which is essential for high resolution.
  • This mask known as FMM (fine metal mask)
  • FMM fine metal mask
  • OLEDs of RGB Red, Green, Blue
  • a shadow mask In order to make OLED with resolution of 1 million pixels, a shadow mask .
  • the material shrinks or expands due to heat as the process is performed at a high temperature, so it is essential to select a material having excellent thermal expansion characteristics.
  • Korean Patent Publication No. 2016-0047193 and the like have been filed for a conventional shadow mask technology.
  • an iron-nickel (Fe-Ni) alloy-based invar alloy (Fe-36% Ni) is mainly used as a shadow mask material.
  • the Invar alloy produced through the rolling process has a high resolution (due to surface defects due to inclusions and an increase in manufacturing cost) due to limitations in the manufacture of thin shadow mask thin films (thickness of 18 ⁇ m or less), which is a key component for determining pixels of organic light emitting diode It is difficult to upgrade.
  • the mask has a thin thickness, and numerous fine holes are drilled to the extent that it is invisible by an etching technique.
  • OLED panels are made by placing a mask on a panel substrate and vacuum-depositing the RGB phosphor organic material. The thickness of the mask is small and the hole is finely pierced at a precise position so that the pixel can be deposited in place. As the hole becomes finer, a higher pixel can be realized. In addition, the phenomenon that the mask is stretched or stretched even at a high temperature must be minimized.
  • Patent Document 1 Korean Patent Publication No. 2016-0047193
  • the present invention provides an iron-nickel alloy foil excellent in strength and bending resistance.
  • the present invention also provides an iron-nickel alloy foil excellent in strength and bending resistance usable as a material for a flexible display.
  • a steel sheet comprising a nickel content of 36 to 42 wt%, a content of carbon and sulfur of 500 ppm or less, a balance of iron and unavoidable impurities, and a surface roughness (Ra) Nickel-iron alloy foil having a tensile strength of 800 MPa or more, an average grain size of 50 nm or more, and a weight deviation of iron-nickel alloy foil of 3 g / m 2 or less.
  • the tensile strength may be 800 MPa to 1200 MPa.
  • the average grain size may be 50 nm to 100 nm.
  • the iron-nickel alloy foil may have a crystal orientation of 20% or more.
  • the iron-nickel alloy foil may have a thermal expansion coefficient of 5 ppm / K or less.
  • the iron-nickel alloy foil may have a deviation of nickel component of 1 wt% / m 2 or less.
  • the iron-nickel alloy foil may have a thickness of 18 ⁇ or less.
  • the iron-nickel alloy foil can be used as a flexible display material.
  • the iron-nickel alloy foil according to the present invention not only has high strength but also excellent bending resistance and can be used as a material for a flexible display.
  • the iron-nickel alloy foil according to the present invention can be micro-etched and can realize high resolution.
  • Fig. 1 is a schematic view showing a pole electroplating apparatus used for producing an iron-nickel alloy foil of the present invention.
  • the inventors of the present invention confirmed that iron-nickel alloy foils satisfying a specific combination of physical properties among iron-nickel alloy foils have high strength and excellent bending resistance in spite of their small thickness, and have completed the present invention.
  • the iron-nickel alloy foil having high strength and excellent bending resistance contains 36 to 42 wt% of nickel, 500 ppm or less of carbon and sulfur respectively, and the balance iron and unavoidable impurities, A roughness Ra of 1.5 ⁇ m or less, a tensile strength of 800 MPa or more, an average grain size of 50 nm or more, and a weight deviation of iron-nickel alloy foil of 3 g / m 2 or less.
  • the physical properties of the alloy foil described in this specification are all physical properties after heat treatment.
  • the nickel content in the iron-nickel alloy foil (hereinafter, simply referred to as "alloy foil") is 36 wt% to 42 wt%.
  • alloy foil When the nickel content is low, there is a problem that the coefficient of thermal expansion sharply increases. Therefore, it is preferable that the nickel content is 36 wt% or more.
  • the content is excessively high and exceeds 42 wt%, the coefficient of thermal expansion of the alloy foil becomes excessively large compared to glass or the like, and thus the alloy foil can not be suitably used as a material for a flexible display.
  • the content of carbon and sulfur is 500ppm or less, respectively. If the content of carbon or sulfur exceeds 500 ppm, fine cracks are formed as carbon becomes carbon dioxide and sulfur becomes sulfur dioxide due to the heat reaction during the deposition process of the alloy foil.
  • Fe is the other component.
  • impurities which are not intended from the raw material or the surrounding environment may be inevitably incorporated, so that it can not be excluded. These impurities are not specifically mentioned in this specification, as they are known to any person skilled in the art of manufacturing.
  • the surface roughness (Ra) of the drum surface and the solution surface is 1.5 ⁇ or less, respectively.
  • the surface roughness (Ra) of the drum surface and the solution surface should be 1.5 ⁇ m or less, respectively.
  • the drum surface refers to the surface in contact with the drum of the electrophotographic apparatus
  • the solution surface refers to the surface that comes into contact with the solution and the opposite surface to the drum surface.
  • the alloy foil of the present invention has a tensile strength of 800 MPa or more, preferably 800 to 1200 MPa.
  • the tensile strength is less than 800 MPa, it is difficult to secure the dent resistance during handling in the etching and vapor deposition processes.
  • the upper limit may be about 1200 MPa.
  • the average grain size is an average grain size after heat treatment, and the alloy foil of the present invention has an average grain size of 50 nm or more, preferably 50 nm to 100 nm.
  • the average grain size in the above range is preferable in terms of excellent bending resistance and tensile strength.
  • the average crystal grain size is less than 50 nm, the bending resistance is low, and when it exceeds 100 nm, the tensile strength is undesirably low.
  • the average grain size of the electrodeposited foil is 50 nm or less. However, the average grain size of the crystal grains in the heat treatment foil after the heat treatment process is grown to 50 nm or more. Generally, in the case of having fine crystal grains, it has high hardness and high strength, but low elongation. However, in order to have excellent flex resistance, the average grain size should be 50 nm or more.
  • the weight of the alloy foil of the present invention is 3 g / m 2 or less. If the weight deviation exceeds 3 g / m 2, the stress is concentrated on the high-weight portion, the flatness of the iron-nickel alloy foil is lowered, and the etching becomes uneven and there is a risk of fracture. The smaller the weight deviation is, the better, and the lower limit value is not particularly limited.
  • the iron-nickel alloy foil of the present invention preferably has a change in crystal orientation of 20% or more, more preferably 20% to 30%.
  • the surface roughness (Ra) of the iron-nickel alloy foil is not changed by the heat treatment process, but crystals grow in a low temperature range. Grain growth not only changes grain size but also changes texture.
  • the change of the crystal orientation is less than 20%, there is a problem that the surface curl increases due to the crystal structure change. If the surface curl increases, there is a problem that it can not be commercialized. In case of exceeding 30%, the shape of the pattern in the etching process becomes inaccurate due to the change of the plate shape of the alloy foil, and the uniformity is low and commercialization is impossible.
  • (200) plane peak intensity is I (200)
  • the crystal orientation orientation is I (200) when the peak intensity of the (111) plane in the peak obtained by X-ray diffraction analysis is I / I < / RTI > (111).
  • the iron-nickel alloy foil of the present invention preferably has a coefficient of thermal expansion (CTE) of 5 ppm / K or less. If the coefficient of thermal expansion is more than 5 ppm / K, it is not preferable because of the color blur due to the difference in dimension between the substrate and the mask during the deposition process. The smaller the coefficient of thermal expansion is, the better, and the lower limit value is not limited.
  • CTE coefficient of thermal expansion
  • the iron-nickel alloy foil of the present invention has a deviation of nickel component of 1 wt% / m 2 or less. If the deviation of the nickel component of the alloy foil exceeds 1 wt% / m 2 , the difference in thermal expansion coefficient becomes large, which may cause a problem of dimensional difference between the substrate and the mask during the deposition process.
  • the iron-nickel alloy foil of the present invention has a thickness of 18 ⁇ or less, preferably 4 ⁇ to 18 ⁇ . If the thickness of the alloy foil exceeds 18 ⁇ , it is not preferable for use as a high-resolution material. If the thickness is less than 4 ⁇ , the yield is lowered due to the handling problem of the etching process.
  • the iron-nickel alloy foil of the present invention can be used as a flexible display material (e.g., a mask, a substrate, or the like), and is not particularly limited thereto.
  • the iron-nickel alloy foil of the present invention satisfying the above physical properties can be produced by the electroforming method.
  • a method of manufacturing the iron-nickel alloy foil of the present invention by the electroforming method will be described with reference to the electroplating apparatus of FIG.
  • the electrophotographic method is a method in which a liquid-receiving portion 14 is formed in a gap surrounded by a rotating cylindrical negative-electrode drum 12 provided in an electrolytic bath 11 of a electrophotographic apparatus in Fig. 1 and a pair of circular insoluble anodes 13 opposed thereto Nickel alloy foil is electrodeposited on the surface of the negative electrode drum 12 while supplying an electric current to the negative electrode drum 12 while supplying an electric current to the negative electrode drum 12 and winding the same.
  • the iron-nickel alloy foil produced through the electroplating apparatus is referred to as an electrodeposited foil and the one subjected to the heat treatment under a predetermined temperature condition is referred to as a " heat-treated foil ".
  • the electrodeposited foil can be obtained by subjecting the electrodeposited foil to surface roughness, weight variation, carbon content, sulfur content, aggregate structure ratio, thermal expansion coefficient and the like of the electrodeposited foil according to the conditions of electrolytic solution, temperature, current density, pH, , Tensile strength, and other factors (physical properties) can be controlled.
  • the electrolytic solution may contain additives such as iron, a nickel compound, a stress relieving agent, a polishing agent, a pH stabilizer, and the like.
  • the electrolytic solution may contain 5 to 20 g / L of iron ion, 20 to 50 g / L of nickel ion, 30 g / L or less of sodium (excluding 0), 5 g / 100 ppm of saccharin, and more than 5 ppm to less than 25 ppm of polyphenylene sulfide (PPS).
  • PPS polyphenylene sulfide
  • the remaining components of the electrolytic solution are water as a solvent, and water is not particularly limited, and pure water, ultrapure water, purified water, and distilled water can be used, and ultrapure water can be preferably used.
  • the concentration of iron ions and the concentration of nickel ions in the electrolyte are determined according to the content of iron and nickel in the iron-nickel alloy foil to be produced. By adjusting to the above-mentioned range, it is possible to produce iron-nickel bonded gold foil which can be applied to a desired application and has desired properties.
  • the iron ion may be dissolved in the form of a salt such as iron sulfate, iron chloride or ferrous sulfate, or may be supplied by dissolving the iron or iron powder in hydrochloric acid or sulfuric acid.
  • the nickel ion may be used in the form of a salt such as nickel chloride, nickel sulfate, and nickel sulfamate, or may be prepared by dissolving ferronickel or the like in an acid.
  • the sodium in the electrolyte solution is added to lower the cell voltage comprising the cathode, the anode and the electrolyte by reducing the resistance of the electrolyte solution.
  • the sodium component preferably has an intended effect when added at 30 g / L or less. If the concentration of the above-mentioned sodium exceeds 30 g / L, the cell voltage is further lowered, but the red powder phenomenon occurs and the target product can not be manufactured There is a problem.
  • the sodium component may be provided by any material commonly known to be compounded to provide the sodium component in the electrolyte, and may be, for example, sodium chloride, sodium carbonate, and the like, but is not limited thereto.
  • the boron may be suitably added so as to have an intended pH range as a component to be added in order to keep the pH of the electrolytic solution constant.
  • the pH can be adjusted by adding 5 g / L or less.
  • the pH of the electrolyte is an important factor affecting not only the electrolyte itself, but also the overall properties of the product. In particular, it is very important to maintain the pH at a constant value because the vicinity of the cathode is a region where the local pH easily changes.
  • the boron component may be provided by any material generally known to be compounded to provide the boron component in the electrolyte, for example, boric acid may be used, but is not limited thereto.
  • Saccharin and PPS are added to lower the surface roughness of the iron-nickel alloy foil and to increase the tensile strength.
  • stress is concentrated on the plated surface of the iron-nickel alloy foil through the electroplating process, the powder is discharged as a result of being obstructed by crystallization of the adsorbed element. As a result, .
  • saccharin may be added as an additive for relieving stress.
  • the saccharin may be added to exhibit a desired stress relaxation effect in the range of 1 to 100 ppm.
  • PPS is added in order to give a leveling effect in addition to a gloss effect in electrolytic plating, and further functions to lower the roughness of the plated tissue through interactions with the saccharin.
  • the PPS may be formulated so as to lower the surface roughness and to exhibit a leveling effect by alternating action in the range of more than 5 ppm and less than 25 ppm.
  • the pH of the electrolytic solution may be, for example, 1.0 to 3.0, and electrodeposition foil can be easily prepared at such a pH range.
  • the conditions of a flow rate of 10 ⁇ 100A / dm current density of 2 and 10 ⁇ 100m 3 / hr at the time of manufacture electrodeposited foil with the pole device of Fig. 1, 45 ⁇ 70 °C have. If the current density is too low, there is a disadvantage that the working speed is slow and the productivity is lowered accordingly. On the other hand, if the current density is too high, the stress increases, and the overvoltage necessary for high current density becomes large, and the side reaction relatively increases on the surface of the anode and the cathode other than the main reaction. As a result, the current efficiency is lowered and deterioration of the electrodeposit such as burning and hydrogen embrittlement occurs.
  • the nickel composition will be low, while if the temperature is too low or if the flow rate is too high, the nickel composition will increase.
  • an electrodeposited foil is obtained by the electrolytic solution and electroforming conditions as described above, and a heat treatment process is performed so that the crystal grains of the electrodeposited foil are grown.
  • the heat treatment step may be performed by keeping the temperature at 300 to 350 ° C. for 10 minutes or more, preferably 10 minutes to 60 minutes in order to suppress surface oxidation while flowing a reducing gas and to stabilize the texture of the alloy foil. More preferably 20 minutes to 40 minutes.
  • hydrogen hydrogen, nitrogen or a mixed gas (for example, a mixed gas of hydrogen: nitrogen at a ratio of 2: 8 by volume) may be used.
  • the heat treatment temperature is less than 300 ° C, there is a fear that the bending resistance due to insufficient tissue stabilization is lowered.
  • the shape of the alloy foil may be changed due to abrupt grain growth, which is not preferable.
  • the heat treatment time if it is less than 10 minutes, it is locally heat-treated. If it exceeds 60 minutes, the surface oxidation of the alloy foil is accelerated and the tensile strength is lowered due to grain growth.
  • Electrolytic foil was prepared by supplying an electrolytic solution having the composition shown in the following Table 1 at a flow rate of 35 m 3 / hr under the condition that the pH of the electrolytic solution was 2.0, the temperature was 57 ° C and the current density was 30 A / dm 2 . Thereafter, the obtained electrodeposited foil was subjected to heat treatment at a temperature range of 300 to 350 DEG C for 20 minutes to 40 minutes while flowing a mixed gas (mixed gas of hydrogen and nitrogen at a ratio of 2: 8 by volume) at 20 L / m with a reducing gas, - nickel alloy foil.
  • a mixed gas mixed gas of hydrogen and nitrogen at a ratio of 2: 8 by volume
  • the obtained heat-treated foil was subjected to the MIT bending test, and the physical properties and the number of MITs of the iron-nickel alloy foils manufactured in Examples and Comparative Examples are shown in Table 2 below.
  • the surface roughness of the drum surface and the solution surface was an arithmetic average roughness (Ra), which was measured by a 3D profiler as an optical non-contact surface roughness indicator, which represents the roughness according to JIS B 0601-2001.
  • Ra arithmetic average roughness
  • magnification was measured in the width direction of the iron-nickel foil surface at a magnification of 50 times in total of the viewing angle lens and objective lens magnification.
  • the grain size of the electrodeposited foil and heat treated foil was calculated using the Scherrer equation * , using the full width at half maximum (FWHM) of the diffraction peak by X-ray diffraction analysis. (* BDCullity; Elements of X-Ray diffraction, (2 nd ed., Addison-Wesley Pub., 1978)
  • Crystal size (d) 0.9? / (B cos?),?: X-ray wavelength, B: half-
  • the average grain size was analyzed by using X-ray, and the same value was indicated without any distinction between the drum surface and the solution surface.
  • the MIT bending test was performed by the MIT bending test apparatus. The bending test was repeated under the following conditions, and the number of times until the test piece was broken was obtained as the number of bending times.
  • the carbon and sulfur content in the alloy foil were measured using an elemental analyzer.
  • the weight deviation of the alloy foil is obtained by cutting the alloy foil to a size of 50 mm * 50 mm, preparing a specimen, measuring its weight, and converting the weight of the alloy foil per unit area. Then, the process of cutting the specimen along the width and the longitudinal direction was repeatedly performed. The weight values for each specimen were measured and then calculated by calculating the standard deviation.
  • the component of the nickel component was continuously measured using the fluorescent X-ray method.
  • the fluorescent X-ray method is a method commonly used as a method of measuring the component of an element constituting a specimen by measuring the intensity of a characteristic fluorescent X-ray emitted from the specimen after the primary X-ray is incident on the specimen.
  • standard specimens having known components are used.
  • five standard specimens of iron-nickel alloys were used.
  • the content of the nickel component of the alloy foil was also measured by the fluorescent X-ray method.
  • the heat-treated alloy foils were analyzed for thermal expansion behavior using TMA (Thermo-Mechanical Analysis). Stabilized at 20 ⁇ ⁇ , held for 1 minute, heated up to 200 ⁇ ⁇ by 5 ⁇ ⁇ / min, held for 5 minutes, and cooled to 20 ⁇ ⁇ at a rate of 5 ⁇ ⁇ / min.
  • the CTE was calculated at 30 ⁇ 100 °C in a straight line.
  • the iron ion used was iron sulfate, the nickel ion component was nickel chloride, the sodium component was sodium chloride, the boron component was boric acid, and the remainder was ultrapure water]
  • the iron-nickel alloy foils according to the embodiment of the present invention record at least 500 times of MIT, while the number of MITs of the iron-nickel alloy foils according to the comparative example is less than 500 . From this, it can be seen that the iron-nickel alloy foil satisfying the properties of the present invention exhibits excellent flex resistance.
  • Electrolytic foil 11 Electrolyzer

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PCT/KR2018/012178 2017-12-19 2018-10-16 내굴곡성이 우수한 철-니켈 합금박 WO2019124696A1 (ko)

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Cited By (1)

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Publication number Priority date Publication date Assignee Title
CN115679219A (zh) * 2022-11-14 2023-02-03 寰采星科技(宁波)有限公司 一种用于精密金属掩膜板的铁镍合金箔材及其制备方法

Families Citing this family (1)

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Publication number Priority date Publication date Assignee Title
KR20210062204A (ko) * 2019-11-21 2021-05-31 에스케이넥실리스 주식회사 주름 발생이 방지된 동박, 그것을 포함하는 전극, 그것을 포함하는 이차전지, 및 그것의 제조방법

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KR101798786B1 (ko) * 2016-09-08 2017-11-17 주식회사 포스코 철-니켈 합금 박용 전해액, 이를 이용한 철-니켈 합금 박의 제조방법 및 철-니켈 합금 박
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KR20160047193A (ko) 2014-10-22 2016-05-02 주식회사 엔앤비 유기발광다이오드 캐소드 제조용 쉐도우 마스크 조성물, 이로부터 형성되는 유기발광다이오드 쉐도우 마스크 필름 및 유기발광다이오드의 제조방법

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KR20160077465A (ko) * 2014-12-23 2016-07-04 주식회사 포스코 말림 방지 특성이 우수한 철-니켈 합금 및 그 제조방법
US20170342581A1 (en) * 2014-12-23 2017-11-30 Posco Fe-ni alloy metal foil having excellent heat resilience and method for manufacturing same
KR20170075134A (ko) * 2015-12-22 2017-07-03 주식회사 포스코 가요성이 우수한 Fe-Ni 합금 포일 및 제조 방법
KR101798786B1 (ko) * 2016-09-08 2017-11-17 주식회사 포스코 철-니켈 합금 박용 전해액, 이를 이용한 철-니켈 합금 박의 제조방법 및 철-니켈 합금 박

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115679219A (zh) * 2022-11-14 2023-02-03 寰采星科技(宁波)有限公司 一种用于精密金属掩膜板的铁镍合金箔材及其制备方法

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