WO2019117641A1

WO2019117641A1 - High-pressure gas cylinder gasket automatic replacement device

Info

Publication number: WO2019117641A1
Application number: PCT/KR2018/015819
Authority: WO
Inventors: 최원호
Original assignee: 에이엠티 주식회사
Priority date: 2017-12-13
Filing date: 2018-12-13
Publication date: 2019-06-20

Abstract

The present invention relates to a high-pressure gas cylinder gasket automatic replacement device for replacing, during the replacement of a high-pressure gas cylinder, a gasket with a new gasket according to the deformation of the gasket so as to maintain airtightness, and the objective of the present invention is to remove the used gasket from a connector holder of a connection unit, and then to enable the new gasket to be automatically inserted therein. To this end, the present invention comprises: a holder (30) fixedly provided at a main plate (20) so as to be positioned at one side of a connector holder (11) of a high-pressure gas cylinder connection unit (10); a movable member (31) rotatably provided at the holder (30); a two-stage actuator (33) provided at the holder (30) such that rods thereof are respectively connected to the holder (30) and a bracket (32) fixed to the main plate (20), thereby rotating the movable member (31); a docking actuator (34) for making the movable member (31) advance and retreat from the holder (30) toward the connector holder (11); a gasket removal cartridge (60) provided at the movable member (31) so as to automatically remove the used gaskets (50a) from the connector holder (11) and sequentially accommodate the same; and a gasket insertion cartridge (70) provided at the movable member (31), which is positioned at the upper part of the gasket removal cartridge (60), such that the new gasket (50) accommodated therein is inserted into the connector holder (11).

Description

Gasket automatic replacement device of high pressure gas cylinder

The present invention relates to a high pressure gas cylinder automatic gasket replacement apparatus for replacing a high pressure gas cylinder with a new gasket so as to maintain airtightness according to deformation of the gasket. More specifically, And then automatically insert a new gasket after the gasket is removed.

Generally, various kinds of gases are supplied and used depending on the application in the manufacturing process of the semiconductor. Most of these gases are sucked into the human body or exposed to the air, causing serious damage such as safety accidents and environmental pollution, .

For example, as a kind of gas used in the ion implantation process, there is a flowable gas such as arsenic hydride (AsH 3: Arsine), hydrogen phosphide (PH 3: Phosphine) or boron trifluoride (BF 3: boron fluoride) These gases are very toxic and should be carefully controlled so that they do not leak out in the process of feeding to the production line, as they cause fatal consequences when workers inhale into the respiratory tract.

The gas used in such a semiconductor manufacturing process is very important to be managed. These gases are supplied to a production line through a gas supply line, mounted in a cabinet (hereinafter referred to as "high-pressure gas cylinder" When the gas is exhausted by about 90%, an operator continuously replaces the high-pressure gas cylinder with a new high-pressure gas cylinder so as to prevent foreign matter remaining in the high-pressure gas cylinder from being supplied to the wafer processing step.

FIG. 1 is a perspective view schematically showing a gas supply device for a semiconductor device according to the prior art. In FIG. 1, SiH4, PH3, NF3, and SiH4 necessary for various equipments 8 in the FAB 7, (Not shown) in which a plurality of high-pressure gas cylinders (not shown) filled with process gases such as CF4 gas are respectively filled in the cabinet 1, and a gas supply line 3 so that the ducts 4 can be guided.

A number of regulator boxes 5 corresponding to the high-pressure gas cylinders are provided on the other side of the duct 4 so as to supply the process gas introduced along the gas supply lines 3, The same number of supply pipes 9 as the number of the equipment 8 are connected so as to be able to be connected to each equipment 8 in the FAB 7.

Therefore, when the process gas is supplied from each of the high-pressure gas cylinders seated in the cabinet 1, the respective process gases are supplied to the respective regulator boxes 5 along the gas supply line 3 passing through the inside of the duct 4 &Lt; / RTI >

Each of the process gases introduced into each of the regulator boxes 5 is purified through a filter (not shown), and then branched into a number corresponding to the equipment 8 in the FAB 7 So that the wafer can be processed.

When the control unit (not shown) detects the replacement timing of the high-pressure gas cylinder after the gas is exhausted while supplying the gas to the gas supply line 3 as described above, the valve of the high-pressure gas cylinder used by the operator is closed, Gas line.

Thereafter, the operator unloads the high-pressure gas cylinder separated from the gas line from the cabinet 1 and then replaces it with a new high-pressure cylinder, connects the high-pressure cylinder to the outside gas line again, When opened, the replacement of the high-pressure gas cylinder is completed.

(Prior art document)

(Patent Document 0001) Korean Registered Patent No. 10-0242982 (registered on November 15, 1998)

(Patent Document 0002) Korean Registered Patent No. 10-0649112 (Registered on November 16, 2006)

(Patent Document 0003) Korean Registered Patent No. 10-0985575 (registered on September 29, 2010)

However, since the gasket used once in the connection portion of the conventional high-pressure gas cylinder is pressed and deformed by the annular protruding band formed at the inlet of the gas injection nozzle to form the recessed groove, the gasket used by the operator is removed The replacement of the gasket with a new gasket is manually performed by a worker. As a result, the replacement time of the high-pressure gas cylinder is delayed, which lowers the operation rate of the high-priced equipment. In addition to the operator's skill and fatigue, There is a problem in that a harmful gas leaks when a human error occurs in which the gasket is inserted in a different direction.

SUMMARY OF THE INVENTION The present invention has been made in order to solve the above problems, and it is an object of the present invention to provide an apparatus for automatically changing a gasket to one side of a connector holder connected to a gas pipe, The gasket removing cartridge can be inserted into the connector holder at the same time as the storage box and the new gasket in the gasket insertion cartridge can be inserted into the connector holder.

Another object of the present invention is to store the used gasket and the new gasket in the cartridge, respectively, so as to prevent the generation of particles due to the replacement of the gasket.

According to an aspect of the present invention for achieving the above object, there is provided a high pressure gas cylinder connection unit comprising: a holder which is fixed to a main plate positioned at one side of a connector holder of a high-pressure gas cylinder connection unit; a movable member rotatably installed in the holder; A docking actuator for moving the movable member from the holder to the connector holder side and a docking actuator for moving the movable member from the holder to the connector holder side, And a gasket insertion cartridge for inserting a new gasket installed in and accommodated in the movable member located above the gasket removal cartridge into the connector holder, characterized by comprising: Device is provided.

In the present invention, when replacing a high-pressure gas cylinder, the gasket used in the connector holder is removed, and then the gasket is automatically replaced with a new gasket. Therefore, the human operator, who accidentally leaks the toxic gas from the connection portion of the high- Thereby preventing an error in advance.

1 is a perspective view schematically showing a gas supply apparatus for a semiconductor device according to a conventional technique;

2 is a perspective view showing a state in which the present invention is installed;

Fig. 3 is a perspective view of the main part of the present invention,

Fig. 4 is a perspective view of the assembled state of Fig.

5 is a perspective view and a longitudinal sectional view of the gasket removing cartridge of the present invention

6 is a perspective view showing a state in which a gasket used in a connector holder is inserted and a perspective view in a state in which a gasket used in a holding member of a gasket removing cartridge is held.

7 is a perspective view and a longitudinal sectional view of the gasket insertion cartridge of the present invention

8 is a vertical sectional view of the gasket removing cartridge inserted in the movable member and the gasket insertion cartridge supported by the one-touch knob

9A to 9C are longitudinal sectional views for explaining the operating state of the present invention

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings, which will be readily apparent to those skilled in the art to which the present invention pertains. The present invention may be embodied in many different forms and is not limited to the embodiments described herein. The drawings are schematic and illustrate that they are not drawn to scale. The relative dimensions and ratios of the parts in the figures are exaggerated or reduced in size for clarity and convenience in the figures, and any dimensions are merely illustrative and not restrictive. And to the same structure, element or component appearing in more than one drawing, the same reference numerals are used to denote similar features.

FIG. 2 is a perspective view showing a state in which the present invention is installed, FIG. 3 is a perspective view showing a main part of the present invention in an exploded manner, and FIG. 4 is an assembled state perspective view of the present invention. When the gas injection nozzle (not shown) of the high-pressure gas cylinder 40 is fitted into the connector holder 11 and both sides of the gasket are engaged with the connector holder 11 and the annular protruding band (not shown) formed at the inlet of the gas- It is necessary to remove the used gasket 50a and replace it with a new gasket 50 every time the high-pressure gas cylinder 40 is replaced because the recessed groove 50b is formed.

The present invention is characterized by a holder 30 fixed to the main plate 20 at one side of the connector holder 11 of the high-pressure gas cylinder connection unit 10 and a movable member 31 rotatably installed in the holder 30 A two-stage actuator 33 installed on the holder 30 for connecting the rod to the bracket 32 and the movable member 31 fixed to the main plate 20 to rotate the movable member 31, A docking actuator 34 for causing the movable member 31 to move back and forth from the holder 30 toward the connector holder 11 side and a dangling actuator 34 for moving the movable member 31 from the connector holder 11 to the gasket 50a And a new gasket 50 accommodated in and accommodated in the movable member 31 located above the gasket removing cartridge 60 are inserted into the connector holder 11, And a gasket insertion cartridge 70 for inserting the gasket into the gasket insertion cartridge 70.

The gasket removing cartridge 60 and the gasket insertion cartridge 70 detachably installed in the movable member 31 are inserted into the insertion hole 35 formed in the upper portion of the movable member 31 as shown in FIGS. Touch knob 36 so as to provide convenience in replacing the gasket removing cartridge 60 or the gasket insertion cartridge 70 from the movable member 31. [

5 is a perspective view and a vertical cross-sectional view of the gasket removing cartridge of the present invention. The gasket removing cartridge 60 separating and accommodating the gasket 50a used in the connector holder 11 has a cylindrical shape as shown in FIG. 5, A first piston 62 formed in the first sleeve 61 and moving to an air pressure and a second piston 62 disposed in the first sleeve 61. The

first sleeve

61, 61 at equal intervals on the tip end thereof and holding the gasket 50a.

6 and 7, the connector holder 11 is formed with a locking protrusion 11a therein and has a cutout portion 11a formed at the entrance thereof so as to allow each of the retaining pieces 63 formed at the tip of the first sleeve 61 to pass therethrough. 11b so that the retaining piece 63 moves through the cutout 11b to hold the rear face of the used gasket 50a as shown in FIG.

Although the gasket removing cartridge 60 is described as holding the gasket 50a used by the cutout 11b and the engaging piece 63 in one embodiment of the present invention, It can be understood that the gasket 50a which is deformed and used can be held.

7 is a perspective view and a longitudinal sectional view of a gasket insertion cartridge according to the present invention. As shown in FIG. 7, after a plurality of unused gaskets 50 are received and the unused gaskets 50a are removed from the connector holder 11, The gasket insertion cartridge 70 for sequentially inserting the gasket 50 into the connector holder 11 includes a second sleeve 71 which is formed in a cylindrical shape as shown in FIG. 7 and accommodates an unused gasket 50, And a protruding protrusion 73 formed on the inner circumferential surface of the outlet of the second sleeve 71 and restricting the movement of the gasket 50. The second piston 72 is provided in the first sleeve 71 and moves to air pressure.

The gasket 50 accommodated in the gasket insertion cartridge 70 is inserted into the connector holder 11 at the tip end of the second sleeve 71. The inclined surface 74 connects the inlet of the connector holder 11 to the tip of the second sleeve 71, It is possible to accurately align the gasket 50 with the inclined surface 74 when the inlet of the second sleeve 71 is connected to the connector holder 11 for insertion into the inside of the connector holder 11 11 to be inserted.

The lengths of the first and

second sleeves

61 and 71 of the gasket removing cartridge 60 and the gasket insertion cartridge 70 can be appropriately adjusted so that about 10 to about 15

gaskets

50 and 50a are accommodated, There is no need to limit it.

At this time, it is understood that the gasket 50 used in the present invention may be made of a metal material, a synthetic resin material, or a composite material thereof.

The gasket removal cartridge 60 and the gasket insertion cartridge 70 may be used after being cleaned and reused, but it is more preferable to use the gasket removal cartridge 70 only once in consideration of the contamination by the particles.

The movable member 31 is further provided with first and second detection means for detecting the replacement timing of the cartridge in the gasket removal cartridge 60 and the gasket insertion cartridge 70, The

magnets

64 and 75 installed in the first and

second pistons

62 and 72 and the replacement timing of the gasket removal cartridge 60 or the gasket insertion cartridge 70 by detecting the

magnets

64 and 75 The first and

second detection sensors

37a and 37b constitute the new gasket 50a used for the gasket removing cartridge 60 or the new gasket 50 Is completely supplied to the connector holder 11, the first and

second detection sensors

37a and 37b detect the presence of the gasket removing cartridge 60 and the gasket insertion cartridge 70, .

At this time, the movable member 31 located between the gasket removing cartridge 60 and the gasket insertion cartridge 70 is provided with the reflection type sensor 38, so that the gasket 50a used in the connector holder 11 The gasket 50a used in the connector holder 11 is detected and used before the new gasket 50 is inserted and the gasket 50a is removed from the connector holder 11 Thereby preventing the occurrence of an error due to the insertion of the new gasket 50.

The operation of the present invention will be described below.

The gasket 50a inserted into the connector holder 11 when replacing the high-pressure gas cylinder is required to be replaced with a new high-pressure gas cylinder after the gas in the high-pressure gas cylinder 40 is supplied to the gas line through the connector holder 11. [ Since the gas injection nozzle and the connector holder 11 are deformed by the protruding strip 11c and the recessed grooves 50b are formed on both surfaces and the airtightness can not be maintained, the gasket 50 must be replaced.

9A to 9C are vertical cross-sectional views for explaining the operating state of the present invention. In the initial state in which the two-stage actuator 33 is not operated, the gasket removing cartridge 60 is the same as the connector holder 11 It is located on the horizontal line.

6, when the movable member 31 is moved to the connector holder 11 side by driving the docking actuator 34 in this state, a plurality of latching pieces 63 formed at the tip of the gasket removing cartridge 60 are inserted into the connector holder The gasket 50a is inserted into the cutout 11b formed in the cutout 11 and reaches the rear end of the used gasket 50a to hold the used gasket 50a while being inwardly restored by the restoring force .

As described above, since air is supplied to the interior of the first sleeve 61 after the gasket 50a used by the retaining piece 63 of the gasket removing cartridge 60 is held, the first piston 62 And is connected to one surface of the gasket 50a to be removed and moved to the left side.

However, if the gasket 50a used in the first sleeve 61 of the gasket removing cartridge 60 is filled with the gasket 50a, it can be understood that the gasket 50a located at the foremost end is in close contact with the gasket to be removed.

When the movable member 31 is returned to the initial position by the docking actuator 34 in a state in which the retaining piece 63 holds the gasket 50a to be removed, the used gasket 50a is retained in the connector holder 11 and is accommodated in the first sleeve 61.

A new gasket 50 must be inserted into the connector holder 11 after the gasket 50a used in the connector holder 11 is removed.

The two-stage actuator 33 is driven by one stage to insert the new gasket 50 into the connector holder 11 so that the movable member 31 is rotated as shown in FIG. 9B so that the gasket removing cartridge 60 and the gasket insertion cartridge 70 The reflective sensor 38 disposed between the connector holder 11 and the connector holder 11 is positioned on the horizontal line with the connector holder 11 to detect whether there is an unused gasket 50a inside the connector holder 11. [

Therefore, when the reflection type sensor 38 detects the gasket 50a used, an error is generated. At the same time, the operator informs the operator of the error and manually removes the used gasket 50a. However, if there is no used gasket The two-stage actuator 33 is driven in two stages as shown in FIG. 9C so that the movable member 31 is rotated to a position where the gasket insertion cartridge 70 is positioned on the same horizontal line as the connector holder 11. [

Thereafter, when the docking actuator 34 moves the movable member 31 to the connector holder 11 side and the tip of the second sleeve 71 is connected to the connector holder 11 as described above, the second sleeve 71 And the second sleeve 71 and the connector holder 11 are properly aligned.

In this state, when air is supplied to the gasket insertion cartridge 70, the second piston 72 is moved toward the connector holder 11, so that a new gasket 50 positioned at the foremost end is inserted into the connector holder 11 At this time, a locking protrusion 11a is formed at the inlet of the connector holder 11 so that the gasket 50 inserted into the connector holder 11 is not released even if the gasket insertion cartridge 70 is reduced to the initial position.

After the new gasket 50 is inserted into the connector holder 11 as described above, the movable member 31 is returned to the initial position by the docking actuator 34, and then, by the operation of the two-stage actuator 33, The member 31 is reduced as shown in FIG. 9A and then waits until the gasket is replaced.

It is more preferable to replace the gasket 50 as described above immediately before connecting the new high-pressure gas cylinder 40 to the connector holder 11.

This is because there is a possibility that the new gasket 50 that has been replaced is exposed to the atmosphere and thus contaminated with fine dust or the like.

On the other hand, when the gasket 50a used is filled in the gasket removing cartridge 60 is detected by the first detecting sensor 37a as the first detecting means, or the new gasket 50 is completely supplied, It is necessary to replace the gasket removing cartridge 60 or the gasket insertion cartridge 70 in the movable member 31 as the second detecting sensor 37b detects that there is no gasket in the gasket 70. However, The gasket removing cartridge 60 and the gasket insertion cartridge 70 are supported by the peripheral surface of the one-touch knob 36 fitted in the insertion hole 35 formed in the movable member 31, It is possible to remove the gasket removing cartridge 60 or the gasket insertion cartridge 70 from the movable member 31 only by removing the gasket removing cartridge 36 so that the replacement operation can be carried out quickly and easily.

The gasket removing cartridge 60 and the gasket insertion cartridge 70 thus replaced may be cleaned and reused, but it is more preferable to use the gasket removing cartridge 70 in a single use so that the gas due to reuse is not contaminated with particles or the like.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention may be embodied with various changes and modifications without departing from the scope of the invention. will be.

It is therefore to be understood that the embodiments described above are to be considered in all respects only as illustrative and not restrictive, the scope of the invention being described in the foregoing specification is defined by the appended claims, Ranges and equivalents thereof are to be construed as being included within the scope of the present invention.

[Description of Symbols]

10: High-pressure gas cylinder connection unit 11: Connector holder

11a: a locking projection 11b:

11c: protruding strip 20: main plate

30: holder 31: movable member

33: Two-stage actuator 34: Docking actuator

36: one-

touch knobs

37a, 37b: first and second detection sensors

38: reflection type sensor 40: high pressure gas cylinder

50: gasket 50b: concave groove

60: gasket removing cartridge 61: first sleeve

62: first piston 63:

64, 75: magnet 70: gasket insertion cartridge

71: second sleeve 72: second piston

73: protruding jaw 74: inclined surface

Claims

A holder 30 fixed to the main plate 20 at one side of the connector holder 11 of the high-pressure gas cylinder connection unit 10,

A movable member 31 rotatably provided in the holder 30,

A two-stage actuator 33 installed on the holder 30 to rotate the movable member 31 so that the rod is connected to the bracket 32 and the holder 30 fixed to the main plate 20,

A docking actuator 34 for moving the movable member 31 from the holder 30 toward and away from the connector holder 11,

A gasket removing cartridge 60 installed in the movable member 31 for automatically removing and storing the gasket 50a used from the connector holder 11,

And a gasket insertion cartridge (70) for inserting a new gasket (50) installed in the movable member (31) positioned above the gasket removal cartridge (60) into the connector holder (11) Automatic replacement device.
The method according to claim 1,

Wherein the gasket removing cartridge (60) and the gasket insertion cartridge (70) detachably mounted on the movable member (31) are supported by a one - touch knob (36).
The method according to claim 1,

The gasket removing cartridge (60)

A first sleeve 61 which is formed in a cylindrical shape and receives the used gasket 50a in order,

A first piston (62) installed in the first sleeve (61) and moving to air pressure,

And a retaining piece (63) formed at equal intervals on the tip of the first sleeve (61) and holding the gasket (50a).
The method of claim 3,

A locking protrusion 11a is formed in the connector holder 11 and a cutout 11b is formed at the entrance of the connector holder 11 so that the respective locking pieces 63 formed in the first sleeve 61 are passed through And the movable member 31 is retracted by the docking actuator 34 while the engaging piece 63 moves through the cutout 11b and holds the gasket 50a, Pressure gas cylinder.
The method according to claim 1,

The gasket insertion cartridge (70)

A second sleeve 71 which is formed in a cylindrical shape and accommodates unused gaskets 50,

A second piston (72) installed in the second sleeve (71) and moving to air pressure,

And a protrusion (73) formed on an inner circumferential surface of the outlet of the second sleeve (71) for restricting the movement of the gasket (50).
The method of claim 5,

And an inclined surface (74) to which an inlet of the connector holder (11) is connected is formed at the tip of the second sleeve (71).
The method according to claim 1,

Wherein the movable member (31) is further provided with first and second detecting means for detecting the replacement timing of the gasket removing cartridge (60) and the gasket insertion cartridge (70).
The method of claim 7,

Wherein the first and second detection means comprise:

Magnets 64 and 75 provided in the first and second pistons 62 and 72,

And first and second detection sensors (37a) (37b) for detecting the magnets (64) and (75) and notifying the replacement timing of the gasket removal cartridge (60) or the gasket insertion cartridge (70) Automatic replacement device.
The method according to claim 1,

A reflective sensor 38 is provided on the movable member 31 positioned between the gasket removal cartridge 60 and the gasket insertion cartridge 70 to remove the gasket 50a used in the connector holder 11 So that the gasket (50a) used in the connector holder (11) can be detected before inserting the next new gasket (50).
The method according to claim 1,

Wherein the gasket removing cartridge (60) or the gasket insertion cartridge (70) replaced from the movable member (31) is discarded.