WO2019124966A1

WO2019124966A1 - Method for automatically replacing high-pressure gas barrels

Info

Publication number: WO2019124966A1
Application number: PCT/KR2018/016222
Authority: WO
Inventors: 최원호
Original assignee: 에이엠티 주식회사
Priority date: 2017-12-19
Filing date: 2018-12-19
Publication date: 2019-06-27

Abstract

The present invention is characterized in that the following steps are successively performed: a first step of loading first and second high-pressure gas barrels (201 and 202) onto a cabinet (100), supplying gas from the first high-pressure gas barrel (201) to a gas supply line, connecting a valve connector (211) of the second high-pressure gas barrel (202) to a connector holder (310), and standing by; a second step of switching channels, if a control portion (500) detects a time to replace the first high-pressure gas barrel (201), so as to stop gas supply from the first high—pressure gas barrel (201) and then supplying gas from the second high-pressure gas barrel (202); a third step of closing a valve handle (213) of the first high-pressure gas barrel (201); a fourth step of disconnecting the first high-pressure gas barrel (201) from the connector holder (310) and closing the valve connector (211) by an end cap (212); a fifth step of lowering the first high-pressure gas barrel (201) to the bottom dead point; a sixth step of automatically removing the gasket from the connector holder (310); a seventh step of releasing the clamping state of the first high-pressure gas barrel (201); an eighth step of opening the door of the cabinet (100), replacing the first high-pressure gas barrel (201) with a third high-pressure gas barrel (203), and closing the door; a ninth step of clamping the third high-pressure gas barrel (203); a tenth step of automatically inserting a new gasket into the connector holder (310); an eleventh step of lifting the third high-pressure gas barrel (203) to the top dead point and then aligning the center of the valve connector (211) and the center of the connector holder (310); a twelfth step of removing the end cap (212) from the third high-pressure gas barrel (203) and then connecting the valve connector (211) to the connector holder (310); and a thirteenth step of opening the valve handle (213) of the third high-pressure gas barrel (203) and standing by.

Description

Automatic replacement method of high pressure gas cylinder

In the present invention, when a high-pressure gas cylinder is loaded on a lift of a cabinet so as to supply gas from a fabrication process facility of a semiconductor to a wafer production line, a high-pressure gas cylinder And then connecting a new high-pressure gas cylinder to the connector holder.

Generally, various kinds of gases are supplied and used depending on the application in the manufacturing process of the semiconductor. Most of these gases are sucked into the human body or exposed to the air, causing serious damage such as safety accidents and environmental pollution, .

For example, as a kind of gas used in the ion implantation process, there is a flowable gas such as arsenic hydride (AsH 3: Arsine), hydrogen phosphide (PH 3: Phosphine) or boron trifluoride (BF 3: boron fluoride) These gases are very toxic and should be carefully controlled so that they do not leak out in the process of feeding to the production line, as they cause fatal consequences when workers inhale into the respiratory tract.

The gas used in such a semiconductor manufacturing process is very important to be managed. These gases are supplied to a production line through a gas supply line, mounted in a cabinet (hereinafter referred to as "high-pressure gas cylinder" When the gas is exhausted by about 90%, an operator continuously replaces the high-pressure gas cylinder with a new high-pressure gas cylinder so as to prevent foreign matter remaining in the high-pressure gas cylinder from being supplied to the wafer processing step.

FIG. 1 is a perspective view schematically showing a gas supply device for a semiconductor device according to the prior art. In FIG. 1, SiH4, PH3, NF3, and SiH4 necessary for various equipments 8 in the FAB 7, (Not shown) in which a plurality of high-pressure gas cylinders (not shown) filled with process gases such as CF4 gas are respectively filled in the cabinet 1, and a gas supply line 3 so that the ducts 4 can be guided.

A number of regulator boxes 5 corresponding to the high-pressure gas cylinders are provided on the other side of the duct 4 so as to supply the process gas introduced along the gas supply lines 3, The same number of supply pipes 9 as the number of the equipment 8 are connected so as to be able to be connected to each equipment 8 in the FAB 7.

Therefore, when the process gas is supplied from each of the high-pressure gas cylinders seated in the cabinet 1, the respective process gases are supplied to the respective regulator boxes 5 along the gas supply line 3 passing through the inside of the duct 4 &Lt; / RTI >

Each of the process gases introduced into each of the regulator boxes 5 is purified through a filter (not shown), and then branched into a number corresponding to the equipment 8 in the FAB 7 So that the wafer can be processed.

When the control unit (not shown) detects the replacement timing of the high-pressure gas cylinder after the gas is exhausted while supplying the gas to the gas supply line 3 as described above, the valve of the high-pressure gas cylinder used by the operator is closed, Gas line.

Thereafter, the operator unloads the high-pressure gas cylinder separated from the gas line from the cabinet 1 and then replaces it with a new high-pressure cylinder, connects the high-pressure cylinder to the outside gas line again, When opened, the replacement of the high-pressure gas cylinder is completed.

(Prior art document)

(Patent Document 0001) Korean Registered Patent No. 10-0242982 (registered on November 15, 1998)

(Patent Document 0002) Korean Registered Patent No. 10-0649112 (Registered on November 16, 2006)

(Patent Document 0003) Korean Registered Patent No. 10-0985575 (registered on September 29, 2010)

However, when replacing such a conventional high-pressure gas cylinder, when a replacement time of the high-pressure gas cylinder is detected while the operator loads a new high-pressure gas cylinder into the cabinet, the high-pressure gas cylinder used for manual operation is separated and removed, It was not possible to replace the high-pressure gas cylinder quickly because it had to be connected. Not only human error occurred according to the skill of the operator, but also gas leaked from the high-pressure gas cylinder inadvertently during the replacing operation, There was a fatal fatal addiction to the leaked gas.

SUMMARY OF THE INVENTION The present invention has been devised to solve such a problem in the prior art, and it is an object of the present invention to provide a high pressure gas cylinder which is separated from a high pressure gas cylinder connected to a connector holder at the time of replacing a high pressure gas cylinder, So that it is possible to automate the replacement of the high-pressure gas cylinder.

According to an aspect of the present invention for achieving the above object, the first and second high-pressure gas cylinders are loaded in a pair of lifts installed in a cabinet so as to be able to be raised and lowered, The second high pressure gas passage is connected to the connector holder and waits. The second high pressure gas passage is switched from the first high pressure gas passage to the first high pressure A second step of stopping supply of gas from the gas cylinder and supplying gas from the second high-pressure gas cylinder, a third step of automatically locking the valve handle of the first high-pressure gas cylinder, A fifth step of lowering the die on which the first high-pressure gas cylinder is placed to a bottom dead center, A sixth step of automatically removing the gasket used from the connector holder, a seventh step of releasing the clamping state of the first high-pressure gas cylinder placed on the die, a step of opening the door of the cabinet, A third step of clamping the third high-pressure gas cylinder placed on the die; and a third step of automatically inserting a new gasket into the connector holder, Elevating the lift to which the third high-pressure gas cylinder has been loaded up to the upper dead point, and then aligning the center of the valve connector and the center of the connector holder; and removing the end cap from the third high- And a thirteenth step of waiting by opening the valve handle of the third high-pressure gas cylinder are sequentially performed A method for automatically replacing a high-pressure gas cylinder is provided.

The present invention relates to a gas supply system for a gas supply system in which a pair of lifts are installed in a cabinet so as to be movable up and down to supply gas from one high pressure gas pipe to a gas supply line, Pressure gas cylinder is automatically unloaded after the supply of the gas has been completed and then the new high-pressure gas cylinder is loaded on the lift die to maintain the standby state, unlike the conventional method in which the high-pressure gas cylinder is manually replaced, It is possible to automatically replace the gas cylinder, thereby preventing the human error by the operator and realizing automation by replacing the high-pressure gas cylinder.

1 is a perspective view schematically showing a gas supply apparatus for a semiconductor device according to a conventional technique;

2 is a front view of a cabinet for explaining the present invention;

3 is a perspective view showing the connecting unit of the present invention.

4 is a front view showing a lift and a clamp of the present invention

5 is a perspective view showing a lower clamp according to the present invention.

FIG. 6 is a view showing a state in which the clamp is clamped in the high-pressure gas cylinder and the stopper is in the clamped state

7 is a perspective view showing a high-

Fig. 8 is a graph showing the state where the lift for lifting and lowering the first high-pressure gas cylinder is located at the bottom dead center and the lift for which the second high-pressure gas cylinder is placed on the die is located at the top dead center

9A and 9B are flow charts for explaining the present invention.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings, which will be readily apparent to those skilled in the art to which the present invention pertains. The present invention may be embodied in many different forms and is not limited to the embodiments described herein. The drawings are schematic and illustrate that they are not drawn to scale. The relative dimensions and ratios of the parts in the figures are shown exaggerated or reduced in size for clarity and convenience in the figures, and any dimensions are merely illustrative and not restrictive. And to the same structure, element or component appearing in more than one drawing, the same reference numerals are used to denote similar features.

2 is a front view of a cabinet for explaining the present invention, FIG. 3 is a perspective view showing a connecting unit of the present invention, FIG. 4 is a front view showing a lift and a clamp of the present invention, The door that is installed as much as possible is omitted.

A connection unit 300 installed on the upper part of the cabinet 100 to automatically connect or disconnect the valve connector 211 of the high-pressure gas cylinder 200 to the connector holder 310, And a clamp 420 installed on the lift 400 for clamping and rotating the high-pressure gas cylinder 200. The clamp 400 includes a die 410 on which the high- And a control unit 500 for controlling the above-described configuration.

The present invention is characterized in that two high pressure gas cylinders (200) are installed in a cabinet (100) and lifts (400) having a connecting unit (300) and a clamp One of the high-pressure gas cylinders 202 is connected to the connector holder 310 of another connecting unit 300 to wait for gas supply.

The operator can open the door (not shown) of the cabinet 100 or control the clamping or unclamping of the high-pressure gas cylinder 200 and the high-pressure A screen 110 for inputting information of the gas container 200 is provided in the cabinet 100 located at the upper portion of each connection unit 300.

4, the clamps 420 are installed on the upper and lower portions of the lifts 400 installed on the moving base 430 so as to be movable up and down, respectively, so that the high pressure Thereby clamping or unclamping the gas container 200.

5 is a perspective view showing a lower clamp. The clamp 420 is installed such that the frame 422 is opened or closed at the same time by the driving of the first actuator 421, and each frame 422 is provided with two A gripper 424 provided with a roller 423 is rotatably provided around a shaft 425 and a pair of grippers 424 are fixed to the upper portion or the lower portion of the frame 422 by a high pressure gas cylinder 6, a second actuator 426 for moving the stopper 427 upward and downward is provided in the positioning hole 424a formed in the gripper 424 so as not to be opened in the clamped state, When the stopper 427 is inserted into the positioning hole 424a while the high pressure gas cylinder 200 is placed on the die 410, even if the position of the high pressure gas cylinder 200 placed on the die 410 is out of the predetermined position, A pair of frames 422 are formed on the inner side Multiple bunched in time, the stopper 427 does not happen that the gripper 424 of a pair there is inserted in the positioning holes (424a) is clamped to the high-pressure gas passage (200).

Therefore, the stopper 427 must be turned on or off by driving the second actuator 421 before clamping or unclamping the high-pressure gas cylinder 200.

A pair of rollers 423 rotatably mounted on the gripper 424 are connected by a timing belt 428 so that the driving means 429 is driven so that the power is transmitted through another timing belt 441, The roller 423 is tightly connected to the high-pressure gas cylinder 200 when the roller 423 on the side of the roller 423 rotates and a pair of rollers 423 provided on the gripper 424 located on the opposite side are rotated .

The pair of grippers 424 are maintained in a state in which the pair of grippers 424 are opened in a state as shown in Fig. 5 in which the first actuator 421 opens the pair of frames 422 before the high-pressure gas cylinder 200 is placed on the die 410 This is possible because the coil spring 440 is connected between the frame 422 constituting the clamp 420 and the gripper 424.

9A and 9B are flow charts for explaining the present invention. First and second high-pressure gas cylinders 201 and 202 are installed in a pair of lifts 400 installed in the cabinet 100 so as to be able to move up and down in the cabinet 100 The first high-pressure gas cylinder 202 is loaded and supplied to the gas supply line as shown in FIG. 2 and the gas of the first high-pressure gas cylinder 201 is connected to the connector holder 310 .

When the replacing time of the first high-pressure gas cylinder 201 is detected by the controller 500 during the supply of the gas from the first high-pressure gas cylinder 201 as described above, it is determined whether the preparation for replacement of the second high- Pressure gas cylinder 201 to stop the supply of gas from the first high-pressure gas cylinder 201 and to supply the gas from the second high-pressure gas cylinder 202 when the control unit 500 determines that replacement preparation is completed, .

The control unit 500 determines whether the second high-pressure gas cylinder 202 is present before the replacement of the second high-pressure gas cylinder 202 or if the valve connector 211 of the second high- If the abnormality is judged to be abnormal, an error is generated. At the same time, the gas supply from the first high-pressure gas cylinder 201 should be continuously performed by the operator.

This is a measure to prevent defects in the wafer proceeding as the gas supply to the gas supply line is temporarily stopped.

When the control unit 500 detects the weight or the pressure of the first high-pressure gas cylinder 201 and determines that the first high-pressure gas cylinder 201 is below the set value because the kind of the supplied gas differs depending on the processing step .

The third step of automatically locking the valve handle 213 of the first high-pressure gas cylinder 201 is performed after switching the flow path of the gas piping as described above and stopping the supply of the gas from the first high-pressure gas cylinder 201 do.

The operation of automatically locking or opening the valve handle 213 of the first high-pressure gas cylinder 201 is performed by the valve handle holder 610 of the valve handle unit 600, It can be applied in various forms, so a detailed description thereof will be omitted.

After the valve handle 213 of the first high-pressure gas cylinder 201 is closed, the remaining gas in the piping of the gas supply line to which the first high-pressure gas cylinder 201 is connected is removed, and after the inside of the pipe is cleaned, And then the valve connector 211 is automatically locked with the end cap 212 after releasing the connection state of the first high-pressure gas cylinder 201 from the connector holder 310. If the abnormality is detected, If it is judged, an error is generated and the worker takes this action.

The end cap 212 is automatically locked or disengaged from the valve connector 211 of the high-pressure gas cylinder 200 by the end cap holder 320 of the connection unit 300, It is understandable that the present invention can be applied in various forms by experts.

After the end cap 212 of the first high-pressure gas cylinder 201 is locked, the lift 400 is moved to the bottom dead center as shown in FIG. 8 in order to replace the first high-pressure gas cylinder 201 with a new third high- And the fifth step of descending.

A sixth step of automatically removing the gasket used from the connector holder 310 by the gasket automatic replacement means 700 is performed in the step of lowering the lift 400 to the bottom dead center.

The timing of automatically removing the gasket used from the connector holder 310 may be performed after the lift 400 reaches the bottom dead center. However, when the lift 400 is driven separately from the driving of the lift 400, Since the gasket is removed, the lift 400 may be carried out while the lift 400 is descending, so that it is not necessarily limited.

After removing the used gasket from the connector holder 310, a check is made by using a sensor (not shown) whether the gasket remains in the connector holder 310. If the gasket remains, an error is generated and the operator However, if there is no residual gasket, a seventh step of semi-automatically releasing the clamping state of the first high-pressure gas cylinder 201 placed on the die 410 is performed.

5, when the operator touches the clamp-open confirmation button of the screen 110 located at the upper part of the cabinet 100, the second actuator 426 is operated to release the clamping of the first high- The stopper 427 inserted in the positioning hole 424a of the gripper 424 is turned off and the first actuator 421 is driven to open the pair of frames 422 to both sides The clamping state of the first high-pressure gas cylinder 201 is released.

As described above, when the pair of frames 422 is opened by driving the first actuator 421, the gripper 424 maintains a state in which the gripper 424 is opened by the restoring force of the coil spring 440.

After the clamping state of the first high-pressure gas cylinder 201 is released by the above-described operation, the operator opens the door of the cabinet 100, removes the first high-pressure gas cylinder 201 from the die 410, An eighth step of placing the third high-pressure gas cylinder 203 as a new high-pressure gas cylinder and closing the door is performed.

The third high pressure gas cylinder 203 is placed on the die 410. When the replacement of the high pressure gas cylinder is completed, the operator touches the screen 110 to select the type of gas, bar code, weight The door of the cabinet 100 is closed and the button for confirming the replacement of the high-pressure gas container is touched.

After the first high-pressure gas cylinder 201 used in the die 410 is removed and replaced with a new third high-pressure gas cylinder 203 as described above, the third high-pressure gas cylinder 203 newly placed on the die 410 (Not shown in the figure) is correct, and if it is normal, the next step is performed. If the closing alignment position is deviated and abnormal, an error is generated so that the door opened by the operator is opened, 3, the high pressure gas cylinder 203 is taken out and then reinserted and then the door is closed.

Accordingly, if the third alignment position of the third high-pressure gas cylinder 203 placed on the die 410 is normal, the ninth step of clamping the third high-pressure gas cylinder 203 placed on the die 410 is performed.

The clamping of the third high-pressure gas cylinder 203 is performed in reverse to the unclamping of the high-pressure gas cylinder.

That is, when the operator pushes the third high-pressure gas cylinder 203 so that the third high-pressure gas cylinder 203 is placed on the die 410, the roller 423 located on the inner side is pushed inward by the third high- The pair of grippers 424 which have mutually opened due to the restoring force of the coil spring 440 simultaneously collapse and the roller 423 rotatably installed in the gripper 424 simultaneously encloses the third high-pressure gas cylinder 203.

When the operator touches the clamp cross confirmation button on the screen 110 while the roller 423 surrounds the third high-pressure gas cylinder 203, the second actuator 426 is driven to move the positioning hole (not shown) of the gripper 424 The stopper 427 is turned on by the first actuator 424a and the first actuator 421 is driven to move the pair of frames 422 inward so that the roller 423 is moved to the third high- ).

After the clamping of the third high-pressure gas cylinder 203 placed on the die 410 is completed, a new gasket must be automatically inserted into the connector holder 310 to which the third high-pressure gas cylinder 203 is connected. It is preferable to confirm whether or not there is a used gasket before inserting a new gasket into the gasket 310.

However, it is more preferable to perform the operation of removing the gasket used from the connector holder 310 again before confirming the gasket to be used, and then to confirm whether or not there is a residual gasket.

If there is a residual gasket in the connector holder 310, an error is generated by the control unit 500 so that the operator can take action.

The reason why the used gasket remains in the connector holder 310 several times is that the valve connector 211 of the third high-pressure gas cylinder 203 is inserted into the connector holder 310, To prevent the leakage of harmful gas due to the occurrence of connection failure.

If it is determined that there is no gasket used for the connector holder 310 as described above, the gasket automatic replacement means 700 performs a tenth step of automatically inserting a new gasket into the connector holder 310.

After the new gasket is automatically inserted into the connector holder 310, a step of checking whether a new gasket is inserted into the connector holder 310 by a sensor (not shown) is further performed.

This is because the valve connector 211 of the third high-pressure gas cylinder 203 is connected to the connector holder 310 without inserting a new gasket into the connector holder 310 so that the leakage of the noxious gas can be fundamentally eliminated .

When the control unit 500 confirms that a new gasket is inserted into the connector holder 310, the third high-pressure gas cylinder 203 is lifted up to the top dead center of the lift 400, And the eleventh step of aligning the center of the connector holder 310 is performed.

As described above, the operation of aligning the center of the valve connector 211 and the center of the connector holder 310 automatically raises, lowers and rotates the third high-pressure gas cylinder 203 loaded in the lift 400, The center of the end cap 212 of the valve coupled to the high-pressure gas cylinder 203 is aligned with the center of the connector holder 310 connected to the gas piping.

After the center of the end cap 212 coupled to the third high pressure gas cylinder 203 is aligned with the center of the connector holder 310 connected to the gas piping, A twelfth step of removing the end cap 212 from the high-pressure gas cylinder 203 and then connecting the valve connector 211 to the connector holder 310 is performed.

After the end cap 212 is removed from the third high-pressure gas cylinder 203 and then the valve connecting hole 211 is connected to the connector holder 310 and the valve handle 213 of the third high-pressure gas cylinder 203 is opened, It is more preferable to further wind the spring on the shaft (not shown) of the valve handle unit 600 so that the valve handle 213 is automatically locked in the event of an emergency.

This is because the gas leaks due to sudden vibration or earthquake in the course of supplying the gas of the third high-pressure gas cylinder 203 to the gas supply line through the gas piping, ) Is automatically locked to fundamentally eliminate the occurrence of a safety accident due to gas leakage.

(Not shown) is wound on the shaft of the valve handle unit 600 so that the valve handle 213 of the third high-pressure gas cylinder 203 is locked, the valve handle holder 610 of the valve handle unit 600 And then the valve handle 213 of the third high-pressure gas cylinder 203 is opened to wait.

It is more preferable to perform the decompression test and the pressurization test in the piping after the valve handle 213 of the third high-pressure gas cylinder 203 is opened.

In the embodiment of the present invention, two high-pressure gas cylinders 200 are installed in the cabinet 100 to automatically replace the gas in the high-pressure gas cylinder 200 when the gas is below the set value. However, in the

cabinet

100, 200 may be built in from 3 to 4 or more so that the high-pressure gas cylinder 200 can be sequentially replaced every time when the replacement time of the high-pressure gas cylinder 200 is detected from the control unit 500. [

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention may be embodied with various changes and modifications without departing from the scope of the invention. will be.

It is therefore to be understood that the embodiments described above are to be considered in all respects only as illustrative and not restrictive, the scope of the invention being described in the foregoing specification is defined by the appended claims, Ranges and equivalents thereof are to be construed as being included within the scope of the present invention.

[Description of Symbols]

100: cabinet 110: screen

200: high-pressure gas cylinder 211: valve connector

212: end cap 213: valve handle

300: connection unit 310: connector holder

320: End cap holder 400: Lift

410: die 420: clamp

421: first actuator 422: frame

423: roller 424: gripper

426: second actuator 427: stopper

500: control unit 610: valve handle holder

Claims

The first and second high pressure gas cylinders 201 and 202 are loaded on a pair of lifts 400 installed in the cabinet 100 so as to be able to move up and down so that the gas of the first high pressure gas cylinder 201 is supplied to the gas supply line And the valve connector 211 of the second high-pressure gas cylinder 202 are connected to the connector holder 310 and are awaited by the control unit 500 during the supply of the gas from the first high-pressure gas cylinder 201 A second step of switching the flow path to stop supplying the gas from the first high-pressure gas cylinder 201 and supplying the gas from the second high-pressure gas cylinder 202 when the replacement time of the first high-pressure gas cylinder 201 is detected, A third step of automatically locking the valve handle 213 of the first high pressure gas cylinder 201 and a third step of releasing the connection state of the first high pressure gas cylinder 201 from the connector holder 310, A fourth step of locking the connecting hole 211, and a fourth step of disposing the die 410 on which the first high- A sixth step of automatically removing the gasket used from the connector holder 310, and a fourth step of removing the clamping state of the first high-pressure gas cylinder 201 placed on the die 410, An eighth step of opening the door of the cabinet 100 and removing the first high-pressure gas cylinder 201 from the die 410 and then placing the third high-pressure gas cylinder 203 on the die 410 and closing the door; A third step of clamping the third high-pressure gas cylinder 203 placed on the die 410, a third step of automatically inserting a new gasket into the connector holder 310, Elevating the lift 400 to the top dead center and aligning the center of the valve connector 211 and the center of the connector holder 310 from the third high pressure gas cylinder 203 to the end cap 212, And then connecting the valve connector 211 to the connector holder 310; And a thirteenth step of opening and waiting the valve handle (213) of the third high-pressure gas cylinder (203).
The method according to claim 1,

The control unit 500 detects the weight or pressure of the high-pressure gas cylinders 201 and 202 and determines when the first and second high-pressure gas cylinders 201 and 202 are replaced when the control unit 500 detects the weight or pressure of the high- .
The method according to claim 1,

Wherein the opening and closing of the valve handle (213) of the first and second high pressure gas cylinders (201, 202) is performed by rotation of the valve handle holder (610) constituting the valve handle unit (600) How to replace.
The method according to claim 1,

The end cap 212 is locked or disconnected to the valve connector 211 of the first and second high pressure gas cylinders 201 and 202 by the end cap holder 320 of the connection unit 300 Pressure gas cylinder.
The method according to claim 1,

The method for automatically replacing a high pressure gas canister according to any of the preceding claims, wherein the time of removing the gasket from the connector holder (310) in the sixth step is performed when the die (410) reaches the bottom dead center.
The method of claim 5,

Further comprising the step of removing the used gasket from the connector holder (310) and confirming whether the gasket remains or not.
The method according to claim 1,

Further comprising the step of determining whether the third high-pressure gas cylinder (203) placed on the die (410) is in the correct position in the eighth step.
The method according to claim 1,

Further comprising the step of confirming whether or not a used gasket remains before inserting a new gasket into the connector holder (310).
The method of claim 8,

Wherein the step of removing the gasket from the connector holder (310) is performed one more time before confirming whether or not the gasket used for the connector holder (310) remains.
The method according to claim 1,

The method of any one of the preceding claims, further comprising the step of checking whether a new gasket is inserted into the connector holder (310) after the tenth step.
The method according to claim 1,

The clamping of the first high-pressure gas cylinder (201) is accomplished by the operator pressing the clamp-open check button to turn off the stopper (427) and open the clamp (420) Way.
The method according to claim 1,

Wherein the clamping of the third high-pressure gas cylinder (203) is performed by an operator turning on the stopper (427) by pressing the clamp cross confirmation button and crossing the clamp (420).
The method according to claim 1,

And after the valve handle (213) of the first high-pressure gas cylinder (201) is locked, residual gas in the pipe is removed and then cleaned and subjected to a pressure reduction test and a pressure test.
The method according to claim 1,

The operator inputs the information of the third high-pressure gas cylinder 203 to the control unit 500 through the screen 110 and then closes the door after the third high-pressure gas cylinder 203 is placed on the die 410. [ Automatic replacement of gas cylinders.
The method according to any one of claims 6, 8, and 10,

Wherein when the gasket is detected in the step of confirming whether or not the gasket is used in the connector holder (310), an alarm is informed to the operator by an informing means to correct the error.
The method according to claim 1,

And further performs a pressure reduction test and a pressure test in the piping after opening the valve handle (213) of the third high-pressure gas cylinder (203).
18. The method of claim 16,

A spring is provided on the axis of the valve handle holder 610 constituting the valve handle unit 600 such that the valve handle 213 is automatically locked in an emergency before opening the valve handle 213 of the third high- Wherein the step of winding the high-pressure gas is further performed.