KR102158015B1 - Automatic connection of the valve in the high pressure gas system - Google Patents

Abstract

The present invention relates to an automatic valve connecting apparatus for a high-pressure gas tank, which automatically separates an end cap from the high-pressure gas tank stored in a cabinet, and connects a valve connector to a connector holder. According to the automatic valve connecting apparatus for a high-pressure gas tank, an auto coupler with a high-pressure gas tank connection unit is installed in a small cabinet so as to automatically attach/detach the end cap and also automatically attach/detach the valve connector of the high-pressure gas tank to/from the connector holder of a gas supply line when replacing the high-pressure gas tank. To this end, in the automatic valve connecting apparatus for a high-pressure gas tank with a high-pressure gas tank connection unit (60) installed on an auto coupler (50) which is installed to be elevated, the high-pressure gas tank connection unit (60) comprises: a main plate (61); a second actuator (63) installed on the main plate (61) to make a second installation plate (62) move back and forth toward the high-pressure gas tank (70); a first actuator (65) installed on the second installation plate (62) to move a first installation plate (64) in the direction orthogonal to the moving direction of the second installation plate (62); an end cap holder (67) rotatably installed on a housing (66) fixed on the first installation plate (64) to accommodate the end cap (71); a connector holder (68) installed on the housing (66) to be thread-engaged with the valve connector (72) of the high-pressure gas tank (70); and a driving means installed in front of the housing (66) to selectively rotate the end cap holder (67) and the connector holder (68), thereby attaching/detaching the end cap (71) and the valve connector (72).

Description

Automatic connection of the valve in the high pressure gas system}

The present invention relates to a valve automatic connection device for a high-pressure gas cylinder that automatically separates an end cap from a high-pressure gas cylinder housed in a cabinet and then connects the valve connector to a connector holder, and more specifically, a high pressure inside a narrow cabinet. An auto coupler equipped with a gas cylinder connection part is installed to automatically attach and detach the valve connector of the high pressure gas cylinder to the connector holder of the gas supply line when replacing the high pressure gas cylinder. About.

In general, various types of gases are supplied and used in the manufacturing process of manufacturing semiconductors, and most of these gases are inhaled into the human body or exposed to the atmosphere, causing great damage such as safety accidents and environmental pollution, so be careful. Cost.

For example, as the type of gas used in the ion implantation process, there are toxic gases such as arsenic hydride (AsH3: Arsine), hydrogen phosphide (PH3: Phosphine), or boron trifluoride (BF3: Boron Fluoride). These gases are very toxic and cause fatal consequences when inhaled by a worker through a respirator, so they must be carefully managed so that they do not leak in the process of supplying them to the production line.

The management of the gases used in the semiconductor manufacturing process is very important. These gases are supplied to the production line through the gas supply line by filling them in a high-pressure gas cylinder and mounting it in a cabinet. The operator replaces and uses a new high-pressure gas cylinder so that foreign substances remaining inside the machine are not supplied to the wafer processing process.

1 is a perspective view showing a conventional high-pressure gas cylinder, in which a conventional high-pressure gas cylinder 200 for semiconductor manufacturing includes a container body 210, a container neck 230, a valve connector 250, an end cap 290, and a valve. It consists of a handle (valve handle) 270.

The container body 210 has a cylindrical shape in which gas to be supplied to the semiconductor manufacturing process is filled and stored, and the container neck 230 is a portion extending from one end of the container body 210 by a predetermined length and has a pipe shape. And serves as a gate so that gas is discharged from the container body 210.

In addition, the valve connector 250 has the same pipe shape as the container neck 230 and is connected to an external gas supply line (not shown).

In addition, the end cap 290 is in the shape of a stopper, and the other end of the valve connector 250, that is, the valve connector 250 is mounted on a portion connected to the external gas supply line, and serves to seal the valve connector 250. Is done.

In addition, the valve handle 270 has a'T' shape, is mounted on a portion connected to the valve connector 250 and the container neck 230, and opens the valve connector 250 when gas is discharged to the container body 210 To play a role.

The conventional high-pressure gas cylinder 200 configured as described above is replaced by an operator whenever the gas filled in the container body 210 is exhausted, at this time, the operator first supplies the high-pressure gas cylinder 200, which has exhausted all the gas, to the outside. It must be separated from the line.

Thereafter, the operator prepares a new high-pressure gas cylinder, removes the end cap closing the valve connector of the new high-pressure gas cylinder, and then connects the high-pressure gas cylinder to the external gas supply line again, and then opens the valve handle 270. ), the replacement of the high-pressure gas cylinder is completed.

2 is a perspective view schematically showing a gas supply device of a semiconductor equipment according to the prior art. SiH4, PH3, NF3, which are required by various equipment 8 in the FAB 7, at a predetermined place outside the FAB 7, A cabinet 1 is positioned to seat a plurality of high-pressure gas cylinders (not shown) each filled with process gas such as CF4, and a gas supply line connected to the high-pressure gas cylinder at one side of the cabinet 1 ( A duct (4) is installed to guide 3).

On the other side of the duct 4, a regulator box 5 is installed in an opening corresponding to the high-pressure gas cylinder so as to supply the process gas introduced along the gas supply line 3, and the upper end of each of the regulator boxes 5 In the FAB 7, the same number of supply pipes 9 as the number of equipment 8 are connected so that they can be connected correspondingly to each equipment 8 in the FAB 7.

Therefore, when process gas is supplied from each of the high-pressure gas cylinders seated in the cabinet 1, each process gas is transferred to each regulator box 5 along the gas supply line 3 passing through the inside of the duct 4. Flow in.

Thereafter, each of the process gases introduced into each of the regulator boxes 5 is purified through a filter (not shown) and then branched to the number corresponding to the equipment 8 in the FAB 7 and connected to each supply pipe ( As it flows along 9), the wafer can be processed.

(Prior technical literature)

(Patent Document 0001) Korean Patent Publication No. 10-0242982 (registered on November 15, 1998)

(Patent Document 0002) Korean Patent Publication No. 10-0649112 (registered on November 16, 2006)

(Patent Document 0003) Republic of Korea Patent Publication 10-0985575 (registered on September 29, 2010)

However, such a conventional gas supply device has several problems as follows.

First, since the operator manually replaced the high-pressure gas cylinder stored in the cabinet whenever the gas was exhausted, a human error occurred according to the operator's skill level.

Second, when the high-pressure gas cylinder is manually replaced in the gas supply line, if the gas is accidentally leaked, the leaked gas explodes, or there is a fatal defect that the worker is poisoned by the leaked gas.

Third, the end cap is opened and closed manually by the operator. After removing the end cap, if you want to close the valve connector due to replacement of the high pressure gas cylinder after storing it in a certain place, the end cap must be screwed again. Since the cap storage location was not constant, the end cap could not be quickly screwed into the valve connector when replacing the high pressure gas cylinder.

Even if the end cap is stored in a certain place, there is a problem that there is a problem that it is vulnerable to a safety accident because there is a concern that a human error may occur due to an operation mistake because the operator closes the valve connector manually.

The present invention was conceived to solve such a problem in the related art, and while the third actuator, which is a driving source of the high pressure gas cylinder connection unit, is arranged so that it does not protrude to the outside of the auto coupler, the high pressure gas cylinder stored in the cabinet is automatically transferred to the gas supply line. Its purpose is to be able to connect or disconnect.

Another object of the present invention is to securely store the end cap automatically separated from the high-pressure gas cylinder stored in the cabinet in the end cap holder, and automatically close the valve connector with the end cap stored in the end cap holder when the replacement timing of the gas cylinder is detected. There is to be able to do it.

According to an aspect of the present invention for achieving the above object, in the automatic connection device for a valve of a high-pressure gas cylinder in which a high-pressure gas cylinder connection part is installed in an auto coupler installed to be lifted and lowered, the high-pressure gas cylinder connection part is connected to a main plate and the main plate. A second actuator installed to move the second mounting plate forward and backward toward the high-pressure gas cylinder; and a first actuator installed on the second mounting plate to move the first mounting plate in a direction orthogonal to the moving direction of the second mounting plate; An end cap holder rotatably installed in a housing fixed to the first mounting plate to receive an end cap, a connector holder installed in the housing and screwed to a valve connector of a high pressure gas cylinder, and positioned in front of the housing. There is provided a valve automatic connection device for a high-pressure gas cylinder, characterized in that it is installed and configured as a driving means for selectively rotating the end cap holder and the connector holder to attach and detach the end cap and the valve connector.

In the present invention, since the third actuator, which is a driving means, is accommodated inside the auto coupler, it is possible to install the auto coupler while reducing the size of the cabinet, and it is also possible to automatically open and close the valve of the high-pressure gas cylinder. It prevents the occurrence of human errors due to the deterioration of the product.

1 is a perspective view showing a conventional high-pressure gas cylinder
2 is a perspective view schematically showing a gas supply device for semiconductor equipment according to the prior art
3 is a perspective view showing an embodiment of the present invention
Figure 4 is a perspective view showing the rear of Figure 3
5 is a front view showing an embodiment of the present invention
6 is a side view showing an embodiment of the present invention

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those of ordinary skill in the art may easily implement the present invention. The present invention may be implemented in various forms and is not limited to the embodiments described herein. Note that the drawings are schematic and have not been drawn to scale. Relative dimensions and ratios of parts in the drawings are exaggerated or reduced in size for clarity and convenience in the drawings, and any dimensions are illustrative only and not limiting. In addition, the same reference numerals are used to indicate similar features to the same structure, element, or part appearing in two or more drawings.

Figure 3 is a perspective view showing an embodiment of the present invention, Figure 4 is a perspective view showing the rear of Figure 3, Figure 5 is a front view showing an embodiment of the present invention, the present invention is an auto coupler ( The high-pressure gas cylinder connection portion 60 installed in the main plate 61 is installed on the main plate 61 and a second actuator 63 that moves the second installation plate 62 forward and backward toward the high-pressure gas cylinder 70 ), a first actuator 65 installed on the second mounting plate 62 to move the first mounting plate 64 in a direction orthogonal to the moving direction of the second mounting plate 62, and the first End cap holder 67 rotatably installed in the housing 66 fixed to the mounting plate 64 to accommodate the end cap 71, and the valve connector of the high pressure gas cylinder 70 installed in the housing 66 The connector holder 68 screwed to the 72, and the end cap holder 67 and the connector holder 68 are selectively rotated to be installed on the housing 66 so that the end cap 71 and the valve connector 72 It characterized in that it consists of a drive means for attaching and detaching.

In this case, it is more preferable that the end cap holder 67 further includes an end cap support means (not shown) that prevents the end cap 71 removed from the valve connector 72 from being separated.

The end cap support means is not particularly limited because it can be applied in various forms by experts in the art.

In FIGS. 3 to 6 showing the driving means as an embodiment of the present invention, a third actuator 69 for rotating a driving sprocket 81 installed in the housing 66 and the shaft of the end cap holder 67 The driven sprocket 82 fixed to (67a), the chain 83 wound around the driving and driven sprocket 81, 82, and the shaft 67a of the end cap holder 67 and the connector holder 68 It is composed of first and second gears (not shown) that are fixed to each other and engaged with each other (68a), but in another embodiment, each of the shafts 67a and 68a of the end cap holder 67 and the connector holder 68 It is understandable that it may be configured as an actuator (not shown) that is fixed to directly rotate the end cap holder 67 and the connector holder 68.

Installing the third actuator 69 to be accommodated in the auto coupler 50 as shown in FIGS. 3 and 6 shown as an exemplary embodiment of the present invention minimizes the space installed in the cabinet so that the size of the cabinet can be reduced. It is more preferable.

At this time, the first, second, and third actuators 65, 63, 69 and the actuators may be used by selecting any one of hydraulic or pneumatic cylinders, air motors, step motors, and servo motors, as necessary. The first, second, and third actuators 65, 63, 69 and actuators are hydraulic or pneumatic cylinders, or air motors, more preferably air motors.

This is because it is advantageous for explosion-proof when replacing the high-pressure gas cylinder 70 as electricity is not used.

In addition, the rod (63a) of the second actuator (63) is movably fitted to the bracket (84) fixed to the second mounting plate (62), and the rod (63a) passing through the bracket (84) has a coil spring. The elastic member 85 is fitted so as not to be separated.

This is, when rotating the end cap holder 67 and the connector holder 68, the second mounting plate by the amount by which the end cap 71 or the valve connector 72 is screwed without operating the second actuator 63. It is to be able to compensate for the position of (62).

The operation of the present invention will be described as follows.

First, after the high-pressure gas cylinder 70 is accommodated in a cabinet (not shown) and the auto coupler 50 is lowered and alignment of the high-pressure gas cylinder 70 is completed, the end cap holder 67 and the end The cap 71 is in the same state as in FIG. 3 located on the same axis (Y axis in the drawing).

In this state, when the second actuator 63 is driven to pull the rod 63a, the second mounting plate 62 is moved by the LM guide 86 along the Y-axis direction in FIG. The first mounting plate 64 and the housing 66 installed orthogonally to 62 move along the Y-axis direction at the same time, and accordingly, the valve connector of the high pressure gas cylinder 70 inside the end cap holder 67 ( The end cap 71 which closed 72) is inserted.

After the end cap 71 is inserted into the end cap holder 67 in the above-described operation, the third actuator 69 is driven to drive and drive through the chain 83 wound around the driven sprockets 81 and 82. Since the shaft 67a of the end cap holder 67 is rotated, the end cap 71 screwed to the valve connector 72 is released. After the end cap 71 is separated, the third actuator ( 69) is temporarily stopped.

In this way, after the separation of the end cap 71 from the valve connector 72 of the high-pressure gas cylinder 70 is completed, the separated end cap 71 is accommodated in the end cap holder 67 and the separation preventing means (shown Is omitted), and the accepted state is maintained.

After that, the second actuator 63 is driven again to advance the rod 63a, and the first actuator 65 is driven to move the rod 65a to the distance set in the X-axis direction of the first mounting plate 64 When moved by (the distance between the center of the connector holder and the valve connector), the valve connector 72 and the connector holder 68 are located on the same axis.

In this way, after the valve connector 72 and the connector holder 68 are positioned on the same axis, the second actuator 63 is driven again to pull the rod 63a, so the valve connector 72 and the connector holder 68 They come into contact with each other.

Thereafter, when the third actuator 69 is re-driven, its power is transferred to the shaft 67a of the end cap holder 67 through the chain 83 wound around the driving and driven sprockets 81 and 82 as described above. ), so that the drive gear (not shown) fixed to the shaft 67a is rotated.

When the driving gear rotates, the driven gear fixed to the shaft 68a of the connector holder 68 engages and rotates, so that the valve connector 72 is screwed to the connector holder 68.

Therefore, when the operator manually opens the valve handle of the high-pressure gas cylinder or automatically opens, the high-pressure gas in the high-pressure gas cylinder is supplied to the gas supply line.

However, the chain 83 is not sensed by the driving and driven sprockets 81 and 82 fixed to the shaft of the third actuator 69 and the shaft 67a of the end cap holder 67, respectively, and the end cap holder 67 And it is understandable that separate actuators (not shown) may be directly fixed to each of the shafts 67a and 68a of the connector holder 68 to be driven independently.

Although the embodiments of the present invention have been described above with reference to the accompanying drawings, those of ordinary skill in the art to which the present invention pertains can understand that it can be implemented in other specific forms without changing the technical idea or essential features. will be.

Therefore, it should be understood that the embodiments described above are illustrative in all respects and not limiting, and the scope of the present invention described in the detailed description is indicated by the claims to be described later, and the meaning of the claims and The scope and all changes or modifications derived from the concept of equivalent should be construed as being included in the scope of the present invention.

50: auto coupler 60: high pressure gas cylinder connection
61: main plate 62: second mounting plate
63: second actuator 64: first mounting plate
65: first actuator 66: housing
67: end cap holder 68: connector holder
69: third actuator 70: high pressure gas cylinder
71: end cap 72: valve connector
81: drive sprocket 82: driven sprocket
83: chain 85: elastic member

Claims (7)

In the automatic valve connection device of the high-pressure gas cylinder in which the high-pressure gas cylinder connection part 60 is installed on the auto coupler 50 installed to be able to rise and fall,
The high-pressure gas cylinder connection part 60 and the main plate 61,
A second actuator 63 installed on the main plate 61 to move the second installation plate 62 forward and backward toward the high-pressure gas cylinder 70,
A first actuator 65 installed on the second mounting plate 62 to move the first mounting plate 64 in a direction orthogonal to the moving direction of the second mounting plate 62,
An end cap holder 67 rotatably installed in the housing 66 fixed to the first mounting plate 64 to accommodate the end cap 71,
A connector holder 68 installed in the housing 66 and screwed to the valve connector 72 of the high pressure gas cylinder 70,
It is installed to be positioned in front of the housing 66 and configured as a driving means for attaching and detaching the end cap 71 and the valve connector 72 by selectively rotating the end cap holder 67 and the connector holder 68,
The driving means,
A third actuator 69 that rotates the driving sprocket 81 installed in the housing 66,
A driven sprocket 82 fixed to the shaft 67a of the end cap holder 67,
A chain 83 wound around the driving and driven sprockets 81 and 82,
A valve automatic connection device for a high-pressure gas cylinder, characterized in that the end cap holder (67) and the connector holder (68) are fixed to the shafts (67a) (68a) of the first and second gears, respectively, and engaged with each other.
delete The method according to claim 1,
Valve automatic connection device for a high-pressure gas cylinder, characterized in that the third actuator (69) is installed to be accommodated in the auto coupler (50).
delete The method according to claim 1 or 3,
The first, second, and third actuators (65) (63) (69) and the actuators are hydraulic or pneumatic cylinders, air motors, step motors, servo motors, characterized in that any one of a high pressure gas cylinder valve automatic connection device.
delete The method according to claim 1,
The rod (63a) of the second actuator (63) is movably fitted to the bracket (84) fixed to the second mounting plate (62), and the rod (63a) passing through the bracket (84) is Valve automatic connection device of a high-pressure gas cylinder, characterized in that the elastic member 85 is fitted so as not to be separated.

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