KR101572537B1 - Auto-connecting system between chemical tank lorry and acqc - Google Patents

Auto-connecting system between chemical tank lorry and acqc Download PDF

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Publication number
KR101572537B1
KR101572537B1 KR1020150083885A KR20150083885A KR101572537B1 KR 101572537 B1 KR101572537 B1 KR 101572537B1 KR 1020150083885 A KR1020150083885 A KR 1020150083885A KR 20150083885 A KR20150083885 A KR 20150083885A KR 101572537 B1 KR101572537 B1 KR 101572537B1
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KR
South Korea
Prior art keywords
cap
unit
acqc
male connector
chemical
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KR1020150083885A
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Korean (ko)
Inventor
허명정
양승희
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주식회사 에이치에스티
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L55/00—Devices or appurtenances for use in, or in connection with, pipes or pipe systems

Abstract

The present invention relates to an automatic connection system between a chemical tank lorry and an automatic clean quick coupler (ACQC) unit. The automatic connection system between a chemical tank lorry and an ACQC unit according to an embodiment of the present invention includes a first movable unit which can hold a first male connector, a first male connector cap removing unit, a first female connector cap removing unit, a first transfer unit, a second movable unit which can hold a second male connector, a second male connector cap removing unit which can remove the cap of the second male connector, a second female connector cap removing unit which can remove the cap of the second female connector, a second transfer unit, a clean booth with a shutter, and a frame.

Description

{AUTO-CONNECTING SYSTEM BETWEEN CHEMICAL TANK LORRY AND ACQC}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an automatic tightening system between a chemical tank cooler and an automatic clean quick coupler unit, and more particularly, Which can securely fasten the male connector of the hose drawn from the chemical tank roller to the female connector of the ACQC unit while minimizing the operation and intervention of the operator in supplying the ACQC unit with the chemical tank roller And an automatic locking system between the ACQC unit.

Various types of chemicals are used in the manufacturing process of semiconductor devices, and as the degree of integration of semiconductor devices is increased, the amount of use is also increasing. In addition, the chemical supply system is diversified. Since most of the chemicals used in the manufacturing process of semiconductor devices are harmful to the environment and human body, the direct exposure of the workers to chemicals at all stages should be minimized and care should be taken. In the manufacturing process of the semiconductor device, the chemical supply is performed by transferring the chemical from the tank lorry to the chemical storage tank and then transferring the chemical from the chemical storage tank to the chamber where the unit process is performed. The chemical transfer system according to the prior art is provided with a chemical relay means called an ACQC unit (Automatic Clean Quick Coupler Unit) between the tank and the chemical storage tank, The high pressure nitrogen is supplied to the tank, and the chemical is discharged at the pressure of the supply nitrogen and stored in the chemical storage tank through the ACQC unit. Through this process, the chemical is first transferred from the tank lorry to the ACQC unit and then from the ACQC unit to the chemical storage tank. Therefore, the process of transferring from the ACQC unit to the chemical storage tank is less likely to expose the operator to chemicals or cause the chemical to leak to the outside. However, in the step of transferring the chemical from the chemical tank to the ACQC unit, the tanker driver (operator) pulls out the chemical supply hose connected to the tank lorry, and then the male connector provided at the end of the chemical supply hose and the ACQC unit Since the cap of the provided female connector is removed and the male connector is connected to the female connctor of the ACQC unit, the chemical is discharged from the tank of the tank through the high-pressure nitrogen supply, Or there is a risk of spillage. In addition to being able to separate the male connector and the female connector during the supply of chemicals, the chemical can not be properly injected due to the operation abnormality of the ACQC unit, As shown in FIG. If such chemical spills or leaks occur, it may cause fatal damage to the human body such as workers nearby, and it may seriously pollute the surrounding environment with only a single leak. In the event of chemical spills or spillage, there may be explosions or fire, which can lead to major disasters. That is, when the operator supplies chemical to the ACQC unit from the tank lorry, when the chemical feed hose is manually connected by the operator and the chemical is transported by the nitrogen charging method, the possibility of chemical contact of the operator, , The possibility of explosion or fire, and so on.

1. Korean Patent Publication No. 10-2001-0053914 2. Korean Patent Publication No. 10-1999-0069657 3. Korean Patent Publication No. 10-1999-0075353

SUMMARY OF THE INVENTION The present invention has been made to solve the above-described problems occurring during a chemical transfer operation from a tank lorry to an ACQC unit, and a problem to be solved by the present invention is to provide a chemical tank, Minimize interventions, prevent the possibility of chemical spills, reduce the risk of chemical exposure to workers, ensure safety, improve the working environment, and reduce the risk of environmental pollution by automating chemical tank rollers and ACQC units And to provide a fastening system.

The above object of the present invention can be also achieved by a first movable unit which is capable of mounting a first male connector provided at the end of a chemical hose for supplying a chemical from the tank to the ACQC unit, A first male connector cap removing means capable of removing the cap of the first male connector in a state in which the connector is mounted on the first movable unit; and a second male connector cap removing means for removing the cap of the first female connector provided in the chemical injection port of the ACQC unit A first female connector cap removal means for linearly transferring the first movable unit to the ACQC unit in a state in which the cap of the first male connector and the cap of the first female connector are removed, And a second male connector at the end of a nitrogen hose for supplying nitrogen from the ACQC unit to the tank lorry for chemical extrusion is connected to a second male connector, A movable unit, A second male connector cap removing means capable of removing the cap of the second male connector in a state in which the connector is mounted on the second movable unit and a cap of the second female connector provided in the nitrogen outlet of the ACQC unit A second female connector cap removal means for linearly transferring the second movable unit to the ACQC in a state in which the cap of the second male connector and the cap of the second female connector are removed, A second transferring means for connecting the second male connector to the first male connector and the first female connector of the ACQC unit and a second transferring means for connecting the first male connector and the first female connector of the ACQC unit to each other to prevent the chemical from being scattered, A clean booth provided around the first arm connector and the second arm connector of the ACQC and provided with a shutter through which the first movable unit and the second movable unit can enter the ACQC side, First male connector cap removal number , The first female connector cap removing means, the first transfer means, the second movable unit, the second male connector cap removing means, the second female connector cap removing means, the second transfer means, and the clean booth, And can be solved by an automatic tightening system between a chemical tank rollers and an ACQC unit including a frame sized to be placed on the front side.

According to the present invention, in the space isolated from the outside, the cap of the male connector provided at the end of the hose drawn from the chemical tank roller, the female connector provided at the chemical inlet of the ACQC unit and the nitrogen outlet, By removing the cap of the hose and the male connector, by traction of the hose and male connector, by combining the male connector and the female connector, without the operator's manipulation and intervention, and by blocking the possibility of the chemical leakage beforehand Reduce the risk of chemical exposure, ensure safety, improve the working environment, and prevent environmental pollution.

1 is a perspective view of a movable unit of an automatic fastening system between a chemical tank roller and an ACQC unit according to an embodiment of the present invention.
Fig. 2 is a perspective view showing the loader unit in a state where the movable unit shown in Fig. 1 is mounted on the conveying unit and the male connector with the cap is engaged with the movable unit.
3 is a perspective view of a male connector cap removing means provided on the upper part of the path of the transfer means of the automatic fastening system between the chemical tank roller and the ACQC unit according to the embodiment of the present invention.
4 to 6 are operational state diagrams showing a method of removing the cap of the male connector by means of the male connector cap removing means shown in Fig.
Fig. 7 is a perspective view showing a male connector in which the cap is removed in a state of being coupled to the movable unit according to the method shown in Figs. 4 to 6. Fig.
8 is a perspective view showing a state in which a cap for sealing the injection port of the female connector is fastened and the cap is fixed by the locking unit.
9 and 10 are perspective views showing a method of removing the cap of the female connector using the female connector cap removing means.
Fig. 11 is a perspective view showing a male connector, which has been moved to the injection port of the female connector using the movable unit shown in Fig. 1, in a state immediately before engagement. Fig.
12 is a perspective view showing a state in which a transporting unit and a moving unit of a chemical and nitrogen hose are provided on a lower frame and a transporting unit of an arm connector cap removing means and an arm connector cap locking unit are installed in an auxiliary frame.
Fig. 13 is a cross-sectional view showing a state in which a clean booth is provided in front of the female connector using a fixed partition and a movable partition in Fig. 12, a male connector cap removing means is provided in front of the clean booth, Fig.
14 is a perspective view showing a state in which the movable partition is opened in FIG. 13 so that the chemical and nitrogen transfer means can enter the direction of the female connector.
Fig. 15 is a perspective view showing a state in which the cap of the male connector is removed by the male connector cap removing means in Fig. 14; Fig.
16 is a perspective view showing a state in which the male connector of the chemical hose and the male connector of the nitrogen hose are moved in the direction of the female connector by the transferring means and are coupled to the corresponding female connectors in Fig.
FIG. 17 is a perspective view showing the state in which the movable partition is closed and the clean booth is sealed during nitrogen discharge and chemical dosing time in FIG.
18 to 19 are diagrams showing another embodiment of the present invention, in which a loader door capable of opening and closing a loader portion in an automatic fastening system between a chemical tank roller and an ACQC unit, a fire detection sensor for extinguishing a fire in a clean booth, And a fan filter unit and a discharge automatic damper for maintaining the cleanliness of the extinguisher and the clean booth.
20 is a perspective view showing a hose support roller and a hose motor pulley in a loader portion according to another embodiment of the present invention.
21 is a front sectional view of the hose motor pulley shown in Fig.
22 and 23 are schematic diagrams of a system capable of automatic and manual switching between a chemical tank roll and an ACQC unit, according to another embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an automatic fastening system between a chemical tank roller and an ACQC unit according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

In the accompanying drawings, a chemical tank, a chemical storage tank, and a nitrogen tank are omitted.

12, the ACQC unit 206 is provided with a first female connector 72a for connecting the chemical hose 204a and a second female connector 72b for connecting the nitrogen hose 204b . The chemical inlet of the first female connector 72a and the nitrogen outlet of the second female connector 72b are sealed by caps 59a and 59b except during chemical injection.

2, the first and second male connectors 72a and 72b are connected to the ends of the chemical hose 204a and the nitrogen hose 204b, respectively, And a second male connector 202b are provided. The first male connector 202a and the second male connector 202b are covered with caps 200a and 200b, respectively. Generally, the diameter 50A of the first chemical water connector 202a is larger than the diameter 20A of the second water connector 202b.

The first male connector 202a of the chemical hose and the second male connector 202b of the nitrogen hose are connected to the first female connector 72a and the second female connector 72b formed in the ACQC unit 206, And more particularly, to a system capable of securely locking and releasing while minimizing manipulation and intervention of a user.

13 to 17, the components of the present invention are installed in frames 43a, 43b, and 43c of a size that can be placed in front of the ACQC unit 206. [ As shown in the figure, the frame may include an upper frame 43a, a lower frame 43b and an auxiliary frame 43c. Although the side and upper surfaces of the upper frame 43a are opened to show the internal structure, the starting points of the first movable unit 1a and the second movable unit 1b, which will be described later, Except for the loader portion at which the male connectors (202a, 202b) are mounted, the upper frame (43a) is sealed and sealed by a transparent fireproof glass wall or an opaque wall. The frames 43a, 43b and 43c spatially separate the connection points between the chemical hose and the nitrogen hose male connectors 202a and 202b and the female connectors 72a and 72b of the ACQC unit from the loader portion. The worker merely loads the male connectors 202a and 202b to the movable units 1a and 1b in the loader section. By the frames 43a, 43b, and 43c, the operator is prevented from accessing the connection point between the male connectors 202a and 202b and the female connectors 72a and 72b in which an accident such as chemical spillage or leakage may occur . The connection and disconnection operations between the male connectors 202a and 202b and the female connectors 72a and 72b are all performed by other components of the present invention. 13 to 17, one end of the chemical hose 204a and the nitrogen hose 204b are connected to the tank lorry. The other end of the chemical hose 204a and the nitrogen hose 204b are connected to the ACQC unit 206 by the first male connector 202a and the second male connector 202b to supply nitrogen of the nitrogen tank to the chemical tank And transfers the chemical through the ACQC unit 206 to the chemical storage tank at the filling pressure.

As shown in FIGS. 18 and 19, when the loader door 85 is also provided in the loader section, the whole inside of the upper frame 43a can be sealed. An air cylinder 87 is attached to the loader door 85 to open and close. By doing so, scattering of the chemical can be prevented and external leakage of the fume can be prevented.

10, a chemical injection port 73a is formed in the center of the first female connector 72a, and a center portion of the second female connector 72b is formed in the same structure as the nitrogen outlet 73b are formed. The distal ends of the first male connector 202a and the second male connector 202b have a structure and a size that can be closely inserted into the chemical injection port 73a and the nitrogen discharge port 73b, respectively. When the first male connector 202a and the second male connector 202b are coupled to the first female connector 72a and the second female connector 72b respectively, first, the caps 200a and 200b are removed, The male connector 202a and the distal end of the second male connector 202b are inserted into the chemical inlet 73a of the first female connector 72a and the nitrogen outlet 73b of the second female connector 72b.

As shown in Figs. 1 and 2, the automatic fastening system between the chemical tank rollers and the ACQC unit according to the present invention includes a first movable unit 1a and a second movable unit 1b. 1, the first movable unit 1a includes a first male connector 202a provided at the end of a chemical hose 204a for supplying a chemical from the tanker to the ACQC unit 206, (200a) in a state where they are coupled to each other. The second movable unit 1b is different from the second movable unit 1b only in the size of the mounting portions 5a and 5b for mounting the male connector and in the structure of the key codes K1 and K2, Unit 1a. That is, the second movable unit 1b mounts the second male connector 202b at the end of the nitrogen hose for supplying the chemical extruding nitrogen to the tank from the ACQC unit 206 in a state where the cap 200b is engaged Lt; / RTI > Key code protrusions K1 and K2 are provided in the first movable unit 1a mounting portions 5a and 5b to prevent chemical mixing and the corresponding key code grooves are provided in the first male connector 202a So that only the first male connector 202a conforming to the key code can be seated in the mounting portions 5a, 5b. By doing so, it is possible to prevent a mistake or contamination of the kind of the chemical. By doing so, it is possible to prevent chemical mixing from loading the first male connector 202a. The key code may be formed on the flange of the first male connector 202a and the first movable unit 1a may be held in contact with the flange of the first male connector 202a. Although the circular flange is shown in the figure, the flange may be made square to give a key code.

1 and 2, the first movable unit 1a and the second movable unit 1b include an LM guide 15 for guiding the rail 35 to travel on a straight line, and the LM guide 15 , A cradle rail (13) provided on the upper surface of the motion block (11), a cradle (3a, 3b) coupled to allow the cradle rail (13) to travel, A first air cylinder 11 having a body fixed to the motion block 11 and one end of the cylinder shaft 9 being coupled to the cradles 3a and 3b to linearly move the cradles 3a and 3b on the cradle rail 13, And a cylinder AC1. The cradle (3a, 3b) includes a cradle support (3a) having a lower cradle (5a) capable of placing and mounting a part of the male connectors (202a, 202b) And a cradle lid 3b formed with an upper mounting portion 5b capable of fixing the other portions of the connectors 202a and 202b. The cradle support 3a and the cradle lid 3b are coupled using a hinge 7 and the cradle lid 3b is opened around the hinge 7 when the male connectors 202a and 202b are mounted, After the male connectors 202a and 202b are mounted on the lower mounting portion 5a and the cradle lid 3b is closed, the opposite side of the hinge 7 is fixed with pins or the like to prevent the cradle lid 3b from being opened. The first air cylinder AC1 allows the male connectors 202a and 202b to move linearly by a certain range in a state where the male connectors 202a and 202b are mounted on the cradles 3a and 3b. This operation is performed when the caps of the male connectors 202a and 202b mounted on the mounts 3a and 3b are precisely removed or fixed again or when the male connectors 202a and 202b are precisely coupled to the female connectors 72a and 72b .

12 and 16, the automatic locking system between the chemical tank rollers and the ACQC unit according to the present invention is characterized in that the first movable unit 1a is mounted on the lower frame 43b or in the upper frame 43a A first transfer means 33a for linearly transferring the first male connector 202a to the ACQC unit 206 to fasten the first male connector 202a to the first female connector 72a of the ACQC unit 206, And second transfer means 33b for linearly transferring the first male connector 1b to the ACQC unit 206 and fastening the second male connector 202b to the second female connector 72b of the ACQC unit 206. [ The first conveying means 33a and the second conveying means 33b are extended from the starting point (loader portion) of the movable units 1a and 1b to the ACQC unit 206, A rail 35 which is coupled to the LM guide 15 of the first movable unit 1a and which is coupled to the motion block 11 of the first movable unit 1a to move the first movable unit 1a to the rail 35, And a screw conveying device for driving the screw conveying device.

The transfer of the male connectors 202a, 202b and the fastening to the female connectors 72a, 72b are accomplished by precise position control of the screw transfer device.

2, the screw conveying apparatus includes a ball screw shaft 37 disposed along the rail, a screw shaft 37 screwed to the ball screw shaft 37 and fixed to the first movable unit 1a A servo motor 39 for driving the ball screw shaft 37 and a timing belt 41 for transmitting the driving force of the servo motor 39 to the ball screw shaft 37, As shown in FIG.

The conveying means 33a and 33b according to the present invention may be provided on the side of the upper frame 43a or inside the lower frame 43b.

As shown in FIGS. 3 to 6, the automatic fastening system between the chemical tank rollers and the ACQC unit according to the present invention includes the male connector cap removing means 17, 19. The removing means of the first male connector 202a connected to the chemical hose and the second male connector removing means connected to the nitrogen hose have the same structure and consist of a single transfer portion 17 and each grip portion 19. [ 3 shows only the grip portion 19 for removing the first male connector 202a is coupled to the transfer portion 17 but the grip portion for removing the second male connector 202b adjacent thereto is coupled to the transfer portion 17 have. The conveying unit 17 includes a support plate 21 fixed to the upper frame 43a in a horizontal direction, a rail 23 fixed to the support plate 21 in a horizontal direction and fixed to the support plate 21 in a rail direction And a screw conveying device 24 for position control which is arranged and fixed. The grip portion 19 includes a motion block 25 which is coupled to the rail 23 of the transfer portion 17 and travels in the horizontal direction by the screw conveying device 24 and is fixed to the motion block 25 A second air cylinder AC2 in which the cylinder axis 9 extends and retracts in the traveling direction of the first movable unit 1a or the second movable unit 1b and a second air cylinder AC2 that extends and retracts in the cylinder axis 9 of the second air cylinder AC2 A third air cylinder AC3 suspended from the support block 27 and having a cylinder axis 9 extending and retracting in the forward direction of the conveyance rail 23 in both directions, And a clamp 31 provided at the tip of the cylinder axis 9 of the third air cylinder AC3 for gripping or releasing the caps 200a and 200b of the male connector when the cylinder shaft 9 is expanded and contracted have. The motion block 25 is provided with an LM guide which engages with the rail 23.

The clamp 31 further includes an object sensor such as an infrared sensor capable of recognizing the positions of the caps 200a and 200b and a pressure sensor capable of detecting whether the caps 200a and 200b are normally gripped .

4 to 7 show a case where the cap 200a of the first male connector 202a is removed, the cap 200a of the first male connector 202a is removed while the cap 200a of the second male connector 202b is removed. The cap 200b is also simultaneously removed in the same manner. Therefore, only the method of removing the cap 200a of the first male connector 202a will be described below. When the cap 200a of the first male connector 202a is removed, the grip portion 19 is fixed to the screw shaft 37 of the first transfer means 33a by the screw transfer device 24 and the second air cylinder AC2, The clamp 31 is opened so that the first transfer means 33a moves the first male connector 202a with the cap 200a in the direction of the clamp 31. [ In this state, as shown in Fig. 5, the cylinder axis of the third air cylinder AC3 is contracted so that the clamp 31 grasps the cap 200a, and then, as shown in Fig. 6, And the first male connector 202a is moved backward by the transfer means 33a. While holding the cap 200a, the transfer unit 17 moves the gripper 19 in a direction that does not interfere with advancement of the first contactor 202a. Fig. 7 shows a state in which the caps 200a and 200b are removed from the male connectors 202a and 202b. The process of reassembling the caps 200a and 200b, which have been removed after chemical supply, to the male connectors 202a and 202b is performed in the opposite process described above. As described above, the first male connector cap removing means 17 and 19 according to the present invention are configured such that the male connectors 202a and 202b are connected to the male connectors 202a and 202b in a state where the male connectors 202a and 202b are mounted on the movable units 1a and 1b, The caps 200a and 200b of the cap 200 can be removed and reassembled. Thus, the present invention protects the operator from the risk of chemical leakage in the step of removing the caps 200a, 200b of the male connectors 202a, 202b.

8 shows a state in which the cap 59 for sealing the injection port of the female connector 72a is fastened and the cap 59 is locked by the locking units 61a and 61b on both sides of the cap 59. Fig. The locking unit is disposed in a symmetrical direction with respect to the cap 59. The locking unit is provided around the pin 59 so as to be rotatable about the pin 71 and rotates around the pin 59 An eccentric cam 69 which is pressed or detached from the surface of the cap 59 and a cam rod 67 extending from the eccentric cam 69 and whose tip is fixed to the cam rod 67 When the cylinder shaft 65 is extended, the eccentric cam 69 is rotated in a direction to be pressed against the surface of the cap 59. When the cylinder shaft 65 is contracted, And an air cylinder 63 which rotates away from the surface of the cap 59. The locking units 61a and 61b are also used to fix the male connectors 202a and 202b so that the male connectors 202a and 202b do not come off while the male connectors 202a and 202b are engaged with the female connectors 72a and 72b. That is, the locking units 61a and 61b are arranged so that the male connectors 202a and 202b are connected to the female connectors 72a and 72b while the male connectors 202a and 202b are fastened to the female connectors 72a and 72b, 202b so as not to be separated from the male connectors 72a, 72b.

9 and 10, the automatic locking system between the chemical tank rollers and the ACQC unit according to the present invention is configured such that the cap of the first female connector 72a provided at the chemical injection port of the ACQC unit 206 is removed And a second female connector cap removing means 45b capable of removing the cap of the second female connector 72b provided at the nitrogen outlet of the ACQC unit 206. The second female connector cap removing means 45a, , 46). The first female connector cap removing means 45a and 46 and the second female connector cap removing means 45b and 46 include a transfer portion 46 commonly used with the grip portions 45a and 45b.

The conveyance unit 46 includes a support plate 47 fixed to the ACQC unit 206 in the horizontal direction, a rail 49 fixed to the support plate 47 in a horizontal direction and fixed to the support plate 47, 49) and a position control screw feed device 48 fixed and arranged in the direction of the arrow. The gripping portions 45a and 45b include a motion block 51 that is coupled to the rail 49 of the transferring portion 46 and travels in the horizontal direction by the screw conveying device 48, A supporting block 53 provided at the front end of the cylinder shaft 9 of the fourth air cylinder AC4 and a second air cylinder AC4 fixed to the supporting block 53 A fifth air cylinder AC5 which is fixedly suspended from the cylinder block 9 and which extends and contracts in the vertical direction and a fifth air cylinder AC5 which is provided at the tip of the cylinder axis 9 of the fifth air cylinder AC5, And a clamp 57 for gripping the cap 59 of the female connector when it is stretched or shrunk. An LM guide is provided below the motion block 51.

After the clamp 57 is moved around the cap 59 by the screw conveying device 48 and the fourth air cylinder AC4, the cylinder shaft 9 of the fifth air cylinder AC5 is contracted And the cap 59 is gripped by the clamp 57. When the fourth air cylinder AC4 is extended in the capping state, the cap 59 is removed from the chemical inlet 73a or the nitrogen outlet 73b. When the cap 59 is disengaged, the gripping portions 45a and 45b are moved in the direction not obstructing the entry of the male connectors 202a and 202b by using the screw conveyor 48. [

11, in a state in which the cap 200a of the first male connector 202a and the cap of the first female connector 72a are removed, the first transfer means 33a is connected to the first movable unit 33a, The first male connector 1a is linearly transferred to the ACQC unit 206 and the first male connector 202a is fastened to the first female connector 72a of the ACQC unit 206. [ At the same time, with the cap 200b of the second male connector 202b and the cap of the second female connector 72b removed, the second transfer means 33b transfers the second movable unit 1b to the ACQC And the second male connector (202b) is fastened to the second female connector (72b) of the ACQC unit (206).

As shown in FIGS. 13 to 17, when the chemical leaks from the joint portion between the first male connector 202a and the first female connector 72a of the ACQC unit 206, the chemical is prevented from being scattered, To block the source of contamination, the present invention comprises a clean booth (81). The clean booth 81 is provided so as to surround the first arm connector 72a and the second arm connector 72b of the ACQC and the first movable unit 1a and the second movable unit 1b And a shutter 83b capable of entering the ACQC side is provided. The shutter 83b is opened only when the first movable unit 1a and the second movable unit 1b enter the ACQC unit 206 and when they return to the loader unit after the chemical injection. To this end, as shown in FIG. 20, a fixed partition 83a is provided on the upper portion of the shutter 83b, and the air cylinder 101 for opening and closing the shutter is provided in the fixed partition 83a.

The clean booth 81 is necessary to block the surroundings of the chemical inlet 73a and the nitrogen outlet 73b of the ACQC unit 206 from external contaminants.

As can be seen from FIGS. 16 and 17, at the time of chemical injection, the shutter 83b is lowered to form a clean zone to prevent leakage of chemicals and fumes.

It is preferable that a gas detector is provided on the clean booth so as to detect whether the chemical is leaked.

18 to 20, a fire extinguisher 79 is installed near the clean booth 81, and a fire detection sensor 97 and the fire extinguisher 79 are installed in the clean booth 81, It is preferable to provide a fire extinguishing nozzle 99 for putting the extinguishing agent (carbon dioxide) to be supplied into the clean booth 81 so that it is immediately extinguished in the case of fire in the clean booth 81. As the fire detection sensor, a UV / IR sensor can be used. It is preferable that all components such as a motor, a sensor, and the like used in the present invention are of explosion-proof type, and the electric field portion is separated.

It is preferable that all the inner wall surfaces of the clean booth 81 are subjected to the chemical chemical uninterruptible surface treatment, the erosion treatment and the flame retardation treatment.

A fan filter unit is installed in the ceiling of the clean booth 81 to block external contaminants from entering the clean booth 81 and to suppress chemical and fume discharge, It is preferable to further provide an exhaust damper 95 capable of purifying contaminants such as smoke inside.

The frames 43a, 43b and 43c are connected to the first movable unit 1a, the first male connector cap removing means 17 and 19, the first female connector cap removing means, the first transfer means 33a, The movable unit 1b, the second male connector cap removing unit, the second female connector cap removing unit, the second transfer unit 33b, and the clean booth 81 are installed in the front of the ACQC unit 206 Lt; / RTI >

A CCTV camera can be installed in the clean booth 81 and the operation status of the clean booth 81 can be monitored in real time through the CCTV at the center.

20 and 21, the hose motor pulley 107 further includes a hose motor pulley 107 for propelling the hoses 204a and 204b in front of the movable units 1a and 1b, The hoses 204a and 204b are driven in the direction in which the first conveying means 33a or the second conveying means 33b moves in synchronization with the first conveying means 33a or the second conveying means 33b And guiding it. 21, the hose motor pulley includes a servo motor, a driving gear 111 provided on the shaft of the servo motor 109, a first reduction gear 113a coupled to the driving gear 111, A second reduction gear 113b coupled to the first reduction gear 113a and rotating in a direction opposite to the first reduction gear 113a and a second reduction gear 113b coupled to the rotation shaft 115a of the first reduction gear 113a A first pulley 117a having a friction surface in contact with the surfaces of the hoses 204a and 204b and a friction surface coupled to the rotary shaft 115b of the second reduction gear 113b and contacting the hoses 204a and 204b And a second pulley 117b formed thereon. It is preferable that the friction surfaces formed on the first pulley 117a and the second pulley 117b are formed to have a curved surface and the curvature of the curved surface is formed to coincide with the curvature of the cross section of the hoses 204a and 204b. By such a constitution, hose deflection and hose deviation can be prevented, transfer torque can be increased, and slip of the hose can be prevented by controlling the pulley speed.

A wheel 103 is provided at the lower end of the frames 43a, 43b and 43c and a rail 105 extending laterally is provided at the lower portion of the frame to supply the chemicals to the male connectors 200a , 200b are manually connected to the female connectors 72a, 72b of the ACQC, it is desirable to be able to move the frame laterally from the front of the ACQC unit 206. [ With such a configuration, by securing a working radius for manual supply, the automatic coupling system between the chemical tank rollers and the ACQC unit according to the present invention can be supplied with the conventional chemical after moving about 1,000 mm to the side. In this case, the locking units 61a and 61b remain in the ACQC unit and can be used for locking the male connectors 200a and 200b during manual chemical supply.

The upper frame 43a may be provided with a touch screen for system on-off and operation control. This allows you to select auto / manual on the touch screen, and to check operation status or alarm.

A drain pan and a drain tank are provided in the lower frame 43b, and the leaked chemical can be recovered. The drain pan may further include a bottom leak sensor.

1a, 1b: movable unit 3a:
3b: Cradle cover 5a, 5b:
7: Hinge 9: Cylinder shaft
11: Motion Block 12: LM Guide
13: Mounting rail 15: LM guide
17: Feeder 19:
21: support plate 23: rail
24: screw conveying device 25: motion block
27: support block 29: support rod
31: clamp 33a: first conveying means
33b: second conveying means 35: rail
37: Ball screw shaft 39: Servo motor
41: timing belt 43a, 43b, 43c:
45a, 45b: grip section 46:
47: Support plate 48: Ball screw shaft
49: rail 51: motion block
53: support block 55: support rod
57: Clamp 59: Cap
61a, 61b: locking unit 63: air cylinder
65: Cylinder shaft 67: Cam rod
69: eccentric cam 71: pin
72a, 72b: female connector 73a: chemical inlet port 73b: nitrogen outlet port 75: drain pan
77: drain tank 79: fire extinguisher
81: Clean booth 83a: Fixed partition
83b: shutter 85: opening
87: Air cylinder 89: Cylinder shaft
90: Loader sub-door 91: Touch screen
93: Fan filter unit 95: Discharge automatic damper
97: fire detection sensor 99: fire extinguisher
101: Air cylinder 103: Wheel
105: rail 107: hose motor pulley
109: Servo motor 111: Drive gear
113a, 113b: reduction gears 115a, 115b:
117a, 117b: pulley 119: hose support roller
200a, 200b: cap 202a, 202b: male connector
204a, 204b: Hose 206: ACQC unit
AC1, AC2, AC3, AC4, AC5: Air cylinder K: Key code

Claims (6)

A first movable unit capable of mounting a first male connector provided at an end of a chemical hose for supplying a chemical from the tank to the ACQC unit in a state in which the cap is engaged;
A first male connector cap removing means capable of removing the cap of the first male connector with the first male connector held in the first movable unit;
A first female connector cap removing means capable of removing a cap of a first female connector provided at a chemical injection port of the ACQC unit;
The first movable connector is linearly fed to the ACQC unit in a state where the cap of the first male connector and the cap of the first female connector are removed to fasten the first male connector to the first female connector of the ACQC unit Conveying means;
A second movable unit capable of mounting a second male connector at the end of a nitrogen hose for supplying nitrogen for chemical extrusion from the ACQC unit to the tank in a state in which the cap is engaged;
A second male connector cap removing means capable of removing the cap of the second male connector in a state in which the second male connector is mounted on the second movable unit;
A second female connector cap removing means capable of removing a cap of a second female connector provided at a nitrogen outlet of the ACQC unit;
A second feed mechanism for linearly feeding the second movable unit to the ACQC in a state in which the cap of the second male connector and the cap of the second female connector are removed to fasten the second male connector to the second female connector of the ACQC unit Way;
A first female connector and a second female connector of the ACQC are wrapped around the first female connector and the second female connector so as to prevent the chemical from being scattered and to prevent external contamination when the chemical leaks at the first female connector and the first female connector of the ACQC unit A clean booth provided with a shutter that is opened only when the first movable unit and the second movable unit enter or return to the ACQC unit; And
The first male connector cap removing means, the second female connector cap removing means, the second female connector cap removing means, the first transferring means, And a frame having a size capable of disposing a conveying means and a clean booth inside the ACQC unit and placing the ACQC unit on the front side of the ACQC unit.
The method according to claim 1,
Wherein the first male connector cap removing means comprises a transfer section and a grip section, the transfer section includes a support plate fixed to the frame in a horizontal direction, a rail horizontally fixed and secured to the support plate, And the grip portion is fixed to the motion block, and the gripping portion is fixed to the movable block by the screw conveying device, A second air cylinder extending and retracted in the advancing direction of the first movable unit, a support block provided at the end of the cylinder shaft of the second air cylinder, and a cylinder block fixedly suspended from the support block, the cylinder shaft extending and contracting in both directions in the traveling direction of the conveyance rail And a third air cylinder provided at the tip of the cylinder shaft of the third air cylinder, Automatic fastening system between the chemical tanks and Raleigh ACQC unit comprises a clamp for gripping the cap.
The method according to claim 1,
Wherein the second male connector cap removing means comprises a transfer section and a grip section, the transfer section includes a support plate fixed to the frame in a horizontal direction, a rail horizontally fixed and secured to the support plate, And the grip portion is fixed to the motion block, and the gripping portion is fixed to the movable block by the screw conveying device, A second air cylinder extending / retracted in the traveling direction of the second movable unit, a support block provided at the end of the cylinder shaft of the second air cylinder, and a cylinder block fixedly suspended from the support block, And a third air cylinder provided at the tip of the cylinder shaft of the third air cylinder, Automatic fastening system between the chemical tanks and Raleigh ACQC unit comprises a clamp for gripping the cap.
The method according to claim 1,
The first arm connector cap removing means and the second arm connector cap removing means each comprise a grip portion and a transfer portion, and the transfer portion includes a support plate horizontally fixed to the ACQC unit, And a position control screw conveying device fixed to the support plate in a rail direction, wherein the gripping portion includes a motion block which is coupled to a rail of the conveying portion and runs in a horizontal direction by the screw conveying device, And a fourth air cylinder fixed to the support block and extending and contracting forwardly of the cylinder shaft, a support block provided at the end of the cylinder shaft of the fourth air cylinder, and a fifth air cylinder fixedly suspended from the support block, An air cylinder, and a clam provided at the tip of the cylinder shaft of the fifth air cylinder for holding the cap of the female connector when the cylinder shaft is expanded and contracted Automatic fastening system between the chemical tanks and Raleigh ACQC unit comprising: a.
The method according to claim 1,
A key code protrusion is provided in the mounting portion of the first movable unit to prevent chemical mixing and a corresponding key code groove is formed in the first male connector so that only the first male connector And the ACQC unit can be mounted on the mounting part.
delete
KR1020150083885A 2015-06-15 2015-06-15 Auto-connecting system between chemical tank lorry and acqc KR101572537B1 (en)

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Application Number Priority Date Filing Date Title
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Application Number Priority Date Filing Date Title
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